Microscope Air Nozzle

Abstract

To provide an air nozzle for microscope that can effectively remove water from a surface to be observed of a microscope.SOLUTION: An air nozzle for microscope includes a first injection port 84 that injects air toward a surface to be observed S from a direction oblique to an optical axis P of a microscope 50, and a second injection port 86 that is provided on the side where the first injection port 84 is arranged with respect to the optical axis P, and is provided at a position farther from the optical axis P than the first injection port 84, and injects air toward the periphery of the surface to be observed S.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to an air nozzle for a microscope, and more particularly to an air nozzle for a microscope mounted on a dicing device for semiconductor wafers. [Background technology]

[0002] In the semiconductor manufacturing process, various processes are performed on the surface of a semiconductor wafer (hereinafter referred to as the workpiece) to manufacture multiple semiconductor elements each having an electronic device. After the electrical characteristics of each chip of the semiconductor element are inspected by an inspection device, the chip is cut into individual chips by a dicing machine's blade that rotates at high speed.

[0003] Dicing machines have the function of constantly supplying water to the workpiece during the cutting process, forming a water film on the workpiece surface to prevent cutting chips from adhering to the surface. However, when performing kerf checks (to check the cutting position) or alignment corrections (to reconfirm the pattern position), the workpiece surface must be observed under a microscope, so the water film must be partially removed. Removing the water film prevents distortion of the pattern image caused by unevenness in the thickness of the water film, making it possible to detect the correct position using image processing.

[0004] Patent Documents 1 and 2 disclose air nozzles and air injection means (corresponding to microscope air nozzles) that remove the above-mentioned water film. The air nozzle in Patent Document 1 is placed between the microscope and the workpiece and injects air toward the microscope's objective lens, and Patent Document 1 includes a hood that directs air that bounces off the objective lens toward the workpiece surface (surface to be observed). The air injection means in Patent Document 2 includes an external air injection mechanism outside the microscope box, and removes water droplets from the workpiece surface by injecting air from the air injection port of the external air injection mechanism toward the workpiece surface (surface to be observed). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 3-126909 [Patent Document 2] Japanese Patent Application Laid-Open No. 2013-116518 Summary of the Invention [Problem to be solved by the invention]

[0006] However, the microscope air nozzle described in Patent Document 1 is configured to be placed between the objective lens and the workpiece, which makes it difficult to place when the distance between the objective lens and the workpiece is narrow. In contrast, the microscope air nozzle described in Patent Document 2 is configured to spray air at an angle to the optical axis of the microscope, which makes it possible to place it even when the distance between the objective lens and the workpiece is narrow. However, with the microscope air nozzle described in Patent Document 2, the flow rate of the air sprayed from the nozzle can entrain water behind the nozzle (upstream of the direction of air sprayed from the nozzle), which can adhere to the observation surface of the microscope. As a result, the microscope air nozzle described in Patent Document 2 has the problem of making it difficult to remove water from the observation surface of the microscope.

[0007] The present invention has been made in view of the above problems, and has as its object to provide an air nozzle for a microscope that can effectively remove water from within the observation surface of the microscope. [Means for solving the problem]

[0008] In order to achieve the object of the present invention, the air nozzle for a microscope of the present invention is an air nozzle for a microscope that is provided in a microscope for observing the surface to be observed of a workpiece, and is equipped with a first nozzle that sprays air toward the surface to be observed from a direction oblique to the optical axis of the microscope, and a second nozzle that is located on the side of the optical axis on which the first nozzle is located and is located at a position farther from the optical axis than the first nozzle, and sprays air toward the peripheral portion of the surface to be observed.

[0009] In one aspect of the present invention, the first injection port and the second injection port are preferably provided in the same pipe member.

[0010] In one aspect of the present invention, it is preferable that the first injection port is provided at the tip of the pipe member, and the second injection port is provided at a position before the tip of the pipe member.

[0011] In one aspect of the present invention, the tip side of the pipe member preferably has a tip pipe portion that is inclined obliquely with respect to the optical axis.

[0012] In one aspect of the present invention, it is preferable that the tip of the tip pipe portion has an opening surface perpendicular to the optical axis, and the first injection port is configured by an opening formed in the opening surface.

[0013] In one aspect of the present invention, the second injection port is preferably configured as a notched opening arranged in a position facing the periphery of the observation surface in the pipe member.

[0014] In one aspect of the present invention, it is preferable that a plurality of pipe members are arranged side by side. [Effects of the Invention]

[0015] According to the present invention, water within the observation surface of the microscope can be effectively removed. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 2 is an overall perspective view of the dicing device. [Figure 2] 2 is a perspective view showing the structure of a processing unit of the dicing device shown in FIG. 1. [Figure 3] FIG. 2 is an enlarged side view of a main part of the air nozzle for a microscope according to the embodiment. [Figure 4] FIG. 2 is an enlarged view of the air nozzle of the embodiment. [Figure 5] FIG. 2 is an enlarged view of a main part of the air nozzle according to the embodiment. [Figure 6] FIG. 1 is an explanatory diagram showing a calf image taken when a calf is in a dry state. [Figure 7] FIG. 1 is an explanatory diagram showing a calf image taken when a calf is in a wet state. [Figure 8] FIG. 10 is an explanatory diagram showing an image of light reflected by a pad and reflected on the water surface. DETAILED DESCRIPTION OF THE INVENTION

[0017] Hereinafter, an embodiment of an air nozzle for a microscope according to the present invention will be described with reference to the accompanying drawings.

[0018] 1 is an overall perspective view showing a dicing device 10 equipped with an air nozzle for a microscope (hereinafter referred to as an air nozzle) according to an embodiment. First, the configuration of the dicing device 10 will be described.

[0019] 1, the dicing device 10 of this example is a dicing device known as a twin-spindle dicer in which a pair of blades 12, 12 are arranged opposite each other. This dicing device 10 is equipped with a processing unit 18 having a pair of spindles 14 with built-in high-frequency motors and blades 12 attached to the tips thereof, and a work table 16 on which a workpiece W is placed and which holds the workpiece W by suction. This processing unit 18 cuts the workpiece W with the blade 12 while moving the workpiece W and the blade 12 relative to each other.

[0020] The dicing apparatus 10 also has a cleaning unit 20 that spin-cleans the processed workpiece W, a load port 22 on which a cassette containing multiple workpieces W is placed, and a transport device 24 that transports the workpieces W, all of which are arranged at predetermined positions. The dicing apparatus 10 also has a built-in control unit 26 that controls the overall operation of each component of the dicing apparatus 10.

[0021] Fig. 2 is a perspective view showing the structure of processing unit 18. As shown in Fig. 2, processing unit 18 is equipped with an X table 34. X table 34 is guided by X guides 30, 30 provided on X base 28, and is driven in the X direction indicated by arrow XX by a linear motor 32. A rotary table 36 that rotates in the θ direction is fixed to the upper surface of X table 34, and work table 16 is provided on this rotary table 36. Therefore, work table 16 is moved in the X direction by X table 34, and rotated in the θ direction by rotary table 36.

[0022] Processing unit 18 also includes a gate-shaped Y base 38 that straddles X base 28. A pair of Y tables 42, 42 are provided on the wall surface of Y base 38. The pair of Y tables 42, 42 are guided by Y guides 40, 40 fixed to the wall surface of Y base 38, and are driven in the Y direction indicated by arrow YY by a drive device made up of a stepping motor and a ball screw (not shown).

[0023] Z tables 44 are provided on the Y tables 42, respectively. The Z tables 44 are guided by Z guides (not shown) provided on the Y table 42, and are driven in the Z direction indicated by arrow ZZ by a drive device (not shown) made up of a stepping motor and a ball screw. Spindles 14 are fixed to the Z tables 44, facing each other, and blades 12 are attached to the tips of the spindles 14, facing each other.

[0024] With the above-described configuration of the processing unit 18, the blades 12, 12 are indexed in the Y direction and cut in the Z direction, while the work table 16 is cut in the X direction and rotated in the θ direction. By such operation of the processing unit 18 and the rotating blades 12, 12, a checkerboard-like groove (kerf) is cut into the surface of the workpiece W.

[0025] FIG. 3 is an enlarged side view of the main parts of the microscope 50 mounted on the dicing device 10 (see FIG. 1) and the air nozzle for the microscope (hereinafter referred to as the air nozzle) 70 of the embodiment.

[0026] First, we will explain a microscope 50 to which the air nozzle 70 of the embodiment is applied. In recent years, there has been a demand for higher precision in the cutting position of a workpiece, which has led to an increase in the resolution required of microscopes. To address this trend, high-magnification microscopes have been increasing in numerical aperture (NA). In other words, microscopes are designed to have shorter focal lengths for the same lens diameter. For example, if the effective diameter (φ) of the lens is 6 mm and the NA is 0.35, the differential distance (focal length) is 8 mm. Here, assuming that the thickness of the water film formed on the surface of the workpiece W is 1 mm, the distance between the microscope's objective lens (the tip) and the water film when removing the water is 7 mm. In other words, in a microscope with a high NA, the distance between the objective lens and the water film is small, making it difficult to position an air nozzle between them. In the following explanation, we will use an air nozzle 70 applied to a high-magnification microscope with a high NA as an example. Note that the air nozzle 70 of the embodiment is not limited to the high-magnification microscope described above, but can also be applied to other microscopes (e.g., low-magnification microscopes).

[0027] 3, a microscope 50 includes an objective lens 52 at the bottom of a microscope body 51. In FIG. 3, the optical axis of the objective lens 52, which is the optical axis of the microscope 50, is indicated by the symbol P.

[0028] 3, the microscope 50 is covered with a cylindrical cover 54. The cover 54 has a lower opening 56, and a shutter mechanism (not shown) is provided between the lower opening 56 and the objective lens 52. The lower opening 56 can be opened and closed by the shutter mechanism.

[0029] 3, an air nozzle 70 of the embodiment is disposed in the gap between the microscope 50 and the cover 54. The air nozzle 70 has one air pipe 72, which is an example of a pipe member of the present invention. This air pipe 72 is configured, for example, in an L-shape, and is attached to the microscope body 51 via an attachment member 53.

[0030] More specifically, the air pipe 72 has a horizontal pipe 74 arranged substantially parallel to a direction perpendicular to the optical axis P of the microscope 50, and a vertical pipe 76 arranged substantially parallel to the optical axis P. A connector 78 is provided at the upper end of the vertical pipe 76, and this connector 78 is connected to an air supply source 82 via an air tube 80.

[0031] 3, a first injection port 84 and a second injection port 86 are formed in the air pipe 72. That is, the first injection port 84 and the second injection port 86 are provided in the same air pipe 72.

[0032] The first jet nozzle 84 is formed as a jet nozzle that jets air toward the observation surface S from a direction oblique to the optical axis P of the microscope 50. The first jet nozzle 84 is provided at the tip of the horizontal pipe 74 (corresponding to the tip of the pipe member). The first jet nozzle 84 is an example of the first jet nozzle of the present invention.

[0033] The second outlet 86 is located on the same side of the optical axis P of the microscope 50 as the first outlet 84 (the left side in FIG. 3 ), and is located farther from the optical axis P than the first outlet 84. As an example, the second outlet 86 is formed as an outlet that injects air toward the periphery of the observation surface S in a direction parallel to the optical axis P. The second outlet 86 is located in front of the tip of the air pipe 72. The second outlet 86 is an example of a second outlet of the present invention. The second outlet 86 may be any outlet that injects air toward the periphery of the observation surface S, and may be, for example, an outlet that injects air in a direction inclined with respect to a direction parallel to the optical axis P.

[0034] The following describes in detail the configuration of the first injection nozzle 84 and the second injection nozzle 86. FIG.

[0035] 4, the tip side of the horizontal pipe 74 has a tip pipe section 75 that is inclined obliquely with respect to the optical axis P of the microscope 50. The tip of this tip pipe section 75 has an opening surface 75A that is perpendicular to the optical axis P, and the first injection port 84 is configured as an opening formed in the opening surface 75A. The tip pipe section 75 is an example of the tip pipe section of the present invention.

[0036] The first nozzle 84 having the above configuration can spray air delivered from the air supply source 82 (see FIG. 3) through the air pipe 72 toward the observation surface S from a direction oblique to the optical axis P of the microscope 50. As a result, water adhering to the observation surface S can be removed (blowed away) from the observation surface S to the opposite side of the first nozzle 84. The air spray angle of the first nozzle 84 with respect to the optical axis P is set to approximately 30 to 40 degrees, for example. This makes it possible for the air sprayed from the first nozzle 84 to effectively blow away water adhering to the observation surface S from the observation surface S to the opposite side of the first nozzle 84. The opening shape of the first nozzle 84 is preferably circular (a perfect circle or an ellipse) from the viewpoint of effectively removing water from the observation surface S, but is not particularly limited thereto and may be, for example, rectangular.

[0037] The second injection port 86 is, for example, configured as a notched opening, and this notched opening is disposed at a position on the horizontal pipe 74 facing the periphery of the observation surface S of the microscope 50.

[0038] The second nozzle 86 having the above configuration can spray a portion of the air sent from the air supply source 82 (see FIG. 3) through the air pipe 72 toward the periphery of the observation surface S in a direction parallel to the optical axis P of the microscope 50. This forms an air curtain 90 extending from the second nozzle 86 toward the periphery of the observation surface S, as shown in the enlarged view of a main portion of the air nozzle 70 in FIG. 5 . As a result, the air curtain 90 can block water that would otherwise be drawn into the first nozzle 84 from the second nozzle 86 side toward the observation surface S. This reduces the amount of water drawn into the first nozzle 84 from the second nozzle 86 side toward the observation surface S. The opening shape of the second nozzle 86 is preferably a notched opening from the viewpoint of forming the air curtain 90, but is not particularly limited thereto and may be, for example, a circular (perfect circle or ellipse) shape.

[0039] With the air nozzle 70 of the embodiment configured as described above, water adhering to the observation surface S can be blown away from the observation surface S to the opposite side of the first nozzle 84 by the air sprayed from the first nozzle 84. At this time, water that attempts to be drawn toward the observation surface S from a position on the second nozzle 86 side of the first nozzle 84 can be blocked by the air sprayed from the second nozzle 86 (air curtain 90). As a result, water within the observation surface S can be effectively removed.

[0040] Therefore, the air nozzle 70 of the embodiment is configured to include a first outlet 84 that injects air toward the observation surface S from a direction oblique to the optical axis P of the microscope 50, and a second outlet that is located on the same side of the optical axis P as the first outlet 84 and is located farther from the optical axis P than the first outlet 84, and that injects air toward the periphery of the observation surface S in a direction parallel to the optical axis P. This makes it possible to effectively remove water from within the observation surface S. Furthermore, the provision of the second outlet 86 makes it possible to reduce the area of ​​the water film that needs to be removed and shorten the removal time. As a result, the air nozzle 70 of the embodiment can prevent cutting debris from adhering to the observation surface S.

[0041] Other Embodiments As another embodiment, a configuration can be employed in which the first jet nozzle 84 and the second jet nozzle 86 are formed as openings in separate air pipes 72, 72. However, this configuration requires two air pipes 72, 72, and therefore from the standpoints of equipment cost, arrangement space, etc., the configuration of this example in which the first jet nozzle 84 and the second jet nozzle 86 are formed as openings in the same air pipe 72 is preferable.

[0042] In another embodiment, a configuration can be adopted in which multiple air pipes 72, 72... are arranged with no gaps in the depth direction on the paper surface of Figure 3. With this configuration, water outside the observation surface S can also be removed, making it possible to reliably prevent water from being drawn into the observation surface S.

[0043] Other functions of the air nozzle 70 of this embodiment will be described below.

[0044] In the air nozzle 70 of this example, the flow rate of air sprayed from the second nozzle 86 is set relatively high (large flow rate) so that water is not basically drawn into the observation surface S. In contrast, when detecting kerf width or chipping using the microscope 50, it may be preferable to set the flow rate of air sprayed from the second nozzle 86 relatively low (small flow rate). In this case, a small amount of water is drawn into the kerf in the observation surface S and remains in the kerf, making it possible to obtain an image (picture) in which the kerf is easily recognized.

[0045] Furthermore, when the air flow rate injected from the second nozzle 86 is set to a high value, water entrainment into the calf is suppressed, resulting in a dry calf. FIG. 6 shows a calf image captured when a dry calf 100 is photographed. Reference symbol A in FIG. 6 is a line image showing the correct edge of the calf 100. However, when the calf 100 is dry, light may be reflected by a saw mark (not shown) formed at the bottom of the calf 100, causing the calf 100 to be misidentified. For example, reference symbol B in FIG. 6 is a line image that has been misidentified as the edge of the calf 100 due to the saw mark, and this line image B is recognized at a position that is slightly inside the calf 100 compared to the correct line image A. In such a case, the air flow rate injected from the second nozzle 86 is set to a low value. This allows water to enter the calf, causing the calf to become wet, making the saw mark at the bottom of the calf less visible. As a result, the reflected light from the saw marks can be suppressed, making it easier to recognize the line image A, as shown in the wet kerf image in Fig. 7, and enabling accurate detection of the kerf 100. In other words, the air nozzle 70 of this example also has the function of enabling accurate kerf detection by switching the air flow rate to a low level to let water into the kerf.

[0046] Furthermore, if the air flow rate is set low and there are TEG (Test Element Group) pad patterns on both ends of the kerf, using oblique illumination may cause the light reflected by the metal pads to appear on the water surface, making the kerf unrecognizable. The kerf image of kerf 100 shown in FIG. 8 shows a reflected light image C in which the light reflected by the pads appears on the water surface. In this case, it is necessary to turn off the oblique illumination, reduce the brightness of the oblique illumination and observe with coaxial illumination, or increase the air flow rate sprayed from the second nozzle 86 to remove the water from the kerf.

[0047] An example of an air nozzle for a microscope according to the present invention has been described above, but the technology of the present invention is not limited to the embodiment, and several improvements or modifications may be made without departing from the gist of the present invention. [Explanation of symbols]

[0048] 10... dicing device, 12... blade, 14... spindle, 16... work table, 18... processing section, 20... cleaning section, 22... load port, 24... transfer device, 26... control section, 28... X base, 30... X guide, 32... linear motor, 34... X table, 36... rotary table, 38... Y base, 40... Y guide, 42... Y table, 44... Z table, 50... microscope, 52... objective lens, 54... cover, 56... lower opening, 70... air nozzle, 72... air pipe, 74... horizontal pipe, 75... tip pipe section, 76... vertical pipe, 78... connector, 80... air tube, 82... air supply source, 84... first jet nozzle, 86... second jet nozzle, 90... air curtain, 100... kerf

Claims

1. An air nozzle for a microscope that is provided in a microscope for observing an observation surface of a workpiece, a first nozzle for injecting air toward the observation surface from a direction oblique to the optical axis of the microscope; a second nozzle that is disposed on the side of the optical axis where the first nozzle is disposed and that is located farther from the optical axis than the first nozzle, and that sprays air toward the periphery of the observation surface; An air nozzle for a microscope comprising:

2. The first injection port and the second injection port are provided in the same pipe member.

2. The air nozzle for a microscope according to claim 1.

3. The first injection port is provided at the tip of the pipe member, The second injection port is provided at a position before the tip of the pipe member.

3. The air nozzle for a microscope according to claim 2.

4. The tip side of the pipe member has a tip pipe portion inclined obliquely with respect to the optical axis.

4. The air nozzle for a microscope according to claim 3.

5. the tip of the tip pipe portion has an opening surface perpendicular to the optical axis, the first injection port is configured by an opening formed in the opening surface, 5. The air nozzle for a microscope according to claim 4.

6. the second injection port is configured as a notched opening arranged in the pipe member at a position facing the periphery of the observation surface; 6. The air nozzle for a microscope according to claim 2.

7. A plurality of the pipe members are arranged side by side.

7. The air nozzle for a microscope according to claim 2.

Images