Conversion element member, conversion element module including the same, and electronic device

Abstract

To provide a technique that can enhance waterproofness of electronic equipment and suppress deterioration of the characteristics of the electronic equipment even when water pressure is applied thereto.SOLUTION: In a conversion element member 1, a conversion element 2 includes a vent 22 and a waterproof film 3. The waterproof film blocks the vent for an outer surface 23 of the conversion element, and is joined by a joint portion 41 having a shape surrounding the vent. A non-joint portion 31 of the waterproof film has an area 32 overlapping with the outer surface. Here, the separation distance D1 between the waterproof film and the outer surface in the overlapping area is set to a maximum deformation amount X mm or less by which the waterproof film can be deformed. As a result, even when the water pressure applied to the waterproof film is large, the deformed waterproof film comes into contact with the outer surface 23, so that the deformation of the waterproof film is limited to the range of elastic deformation without reaching plastic deformation. Further, since the deformation of the waterproof film due to water pressure is limited to the range of elastic deformation, the degree of permanent deformation of the waterproof film can be relaxed, and it is possible to prevent the contact with the outer surface from continuing after being released from the water pressure.SELECTED DRAWING: Figure 1B

Description

[Technical Field]

[0001] The present invention relates to a conversion element member including a conversion element having an opening that can function as an air vent and / or a sound vent, and a waterproof membrane that prevents water from entering. The present invention also relates to a conversion element module and an electronic device that include the conversion element member. [Background technology]

[0002] The housing of an electronic device may be provided with an external circulation port, which is an opening through which sound or gas can pass. For example, electronic devices such as wearable devices including smartwatches, smartphones, mobile phones, and cameras have audio functions, and their housings are provided with an external circulation port through which sound can pass. Furthermore, the electronic device includes an audio conversion unit equipped with an acoustic conversion element such as a microphone and a speaker inside the housing. The acoustic conversion element is an element that converts between electrical signals and sound, and has an opening on its outer surface that functions as a sound passage port. The audio conversion unit is housed within the housing so that sound can be transmitted between the audio conversion unit and the outside via the external circulation port. Furthermore, an electronic device equipped with a gas sensor such as a pressure sensor includes a housing provided with an external circulation port through which gas can pass, and the electronic device includes a characteristic conversion unit equipped with a characteristic conversion element that converts gas properties and electrical signals inside the housing. The characteristic conversion element has an opening on its outer surface that functions as an air vent. The characteristic conversion unit is housed within the housing so that gas can pass between the characteristic conversion unit and the outside via the external circulation port. On the other hand, it is necessary to prevent water from entering the audio conversion section and characteristic conversion section, which generally have electronic circuits. For this reason, a waterproof membrane that prevents water from entering has conventionally been attached to the housing so as to block the external circulation port.

[0003] Patent Document 1 discloses a porous polytetrafluoroethylene (hereinafter referred to as "PTFE") membrane that can be used as a waterproof membrane. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 10-165787 Summary of the Invention [Problem to be solved by the invention]

[0005] Regarding the waterproofing required for electronic devices, temporary waterproofing was previously sufficient to protect against accidental drops into shallow water where the device can be easily picked up. However, nowadays, a higher level of waterproofing is often required, such as ensuring that the device's audio and other functions remain functional even after being used for a certain period of time or repeatedly in water several meters deep. Furthermore, for electronic devices with audio functionality, ensuring not only waterproofing but also sound permeability is important. However, with regard to waterproof membranes, there is a trade-off between waterproofing and sound permeability, and it is not easy to improve the waterproofing of a waterproof membrane while maintaining sound permeability. Patent Document 1 does not take these points into consideration.

[0006] The present invention aims to provide a technique that can improve the waterproofing of electronic devices and prevent performance degradation of the electronic devices even when water pressure is applied. [Means for solving the problem]

[0007] The present invention provides A conversion element having an opening that can function as an air vent and / or a sound vent, and a waterproof membrane; the conversion element has an outer surface in which the opening is formed; the waterproof membrane is joined to the outer surface of the conversion element at a joint having a shape that closes the opening and surrounds the opening when viewed in a direction perpendicular to the outer surface, The non-jointed portion of the waterproof membrane is defined as a portion surrounded by the joint when viewed from a direction perpendicular to the outer surface, and has an area overlapping with the outer surface when viewed from the direction perpendicular to the outer surface, A conversion element member in which a separation distance D1 between the waterproof membrane and the outer surface in the region is 0.01 mm or more and X mm or less; to provide. Here, X is the amount of pushing of the probe that maximizes the repulsive force generated in the waterproof membrane when a push-in test of the probe is conducted on the waterproof membrane in accordance with the puncture strength test provisions defined in Japanese Industrial Standards (JIS) Z1707:1997.

[0008] In another aspect, the present invention provides a method for producing a composition comprising: The conversion element member of the present invention; a circuit board on which the conversion element member is mounted; to provide.

[0009] In yet another aspect, the present invention provides a method for manufacturing a pharmaceutical composition comprising: a housing provided with an external circulation port through which gas and / or sound can pass; The conversion element member of the present invention is housed in the housing, the conversion element member is an electronic device accommodated in the housing such that the waterproof membrane prevents water from entering the opening from the outside of the housing through the external circulation port; to provide. [Effects of the Invention]

[0010] According to the present invention, it is possible to improve the waterproofing of an electronic device and also to suppress a decrease in the performance of the electronic device even when water pressure is applied. [Brief explanation of the drawings]

[0011] [Figure 1A] FIG. 1A is a plan view schematically showing an example of a conversion element member of the present invention. [Figure 1B] FIG. 1B is a cross-sectional view showing a cross section BB of the conversion element member shown in FIG. 1A. [Figure 2] FIG. 2 is a diagram showing an example of the relationship between the amount of indentation of a measuring probe into a waterproof membrane and the repulsive force generated in the waterproof membrane by the indentation of the measuring probe, which can be evaluated by an indentation test. [Figure 3A]FIG. 3A is a cross-sectional view showing the vicinity of an opening of a conversion element and a waterproof membrane in an example of a conversion element member of the present invention. [Figure 3B] FIG. 3B is a cross-sectional view showing the vicinity of the opening of the conversion element and the waterproof film in an example of the conversion element member of the present invention. [Figure 4] FIG. 4 is a cross-sectional view showing an example of a micro-mechanical system (hereinafter referred to as "MEMS") microphone that can be provided with the conversion element member of the present invention. [Figure 5] FIG. 5 is a cross-sectional view showing an example of a MEMS microphone that can be equipped with the conversion element member of the present invention. [Figure 6A] FIG. 6A is a cross-sectional view showing an example of a state in which the conversion element member of the present invention is housed in the housing of an electronic device. [Figure 6B] FIG. 6B is a cross-sectional view showing an example of a state in which the conversion element member of the present invention is housed in the housing of an electronic device. [Figure 7] FIG. 7 is a cross-sectional view showing a state in which a conversion element and a waterproof film are housed in a housing of an electronic device based on a conventional technical concept. [Figure 8] FIG. 8 is a cross-sectional view schematically showing the vicinity of the opening of the conversion element and the waterproof film in an example of the conversion element member of the present invention. [Figure 9] FIG. 9 is a cross-sectional view that schematically shows the vicinity of the opening of the conversion element and the waterproof film in an example of the conversion element member of the present invention. [Figure 10A] FIG. 10A is a perspective view showing an example of a conversion element module of the present invention. [Figure 10B] FIG. 10B is a plan view showing an example of the conversion element module of the present invention. [Figure 11] FIG. 11 is a plan view showing an example of an electronic device of the present invention. [Figure 12] FIG. 12 is a diagram illustrating a push-in test on a waterproof membrane carried out in the examples. [Figure 13] FIG. 13 is a diagram for explaining a method for evaluating the sound transmission characteristics of the conversion element member, which was carried out in the examples. DETAILED DESCRIPTION OF THE INVENTION

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the accompanying drawings, but is not limited to the following embodiments.

[0013] [Conversion element material] An example of the conversion element member of the present invention is shown in Figures 1A and 1B. Figure 1B shows the cross section BB shown in Figure 1A. Figure 1A shows the conversion element member 1 as seen from the side of the surface of the conversion element 2 on which the waterproof membrane 3 is disposed.

[0014] The conversion element member 1 includes a conversion element 2 and a waterproof membrane 3. The conversion element 2 included in the conversion element member 1 of FIGS. 1A and 1B is a MEMS microphone 2A, which is a type of acoustic conversion element (acoustic transducer) that converts sound to and from an electrical signal. The MEMS microphone 2A includes a substrate 21 having an opening (sound passage) 22 through which sound can pass. The surface of the substrate 21 on which the opening 22 is formed is exposed to the outside when the waterproof membrane 3 is not disposed. In other words, the conversion element 2 has an outer surface 23 on which the opening 22 is formed. In this specification, the outer surface 23 of the conversion element 2 refers to the surface exposed to the outside when the waterproof membrane 3 is not disposed. The waterproof membrane 3 is bonded to the outer surface 23 of the conversion element 2 so as to close the opening 22, more specifically, to close the opening 22 on the outer surface 23. The waterproof membrane 3 is also bonded to the outer surface 23 at a joint 41 of the membrane 3, which has a shape that surrounds the opening 22 when viewed perpendicularly to the outer surface 23. In the conversion element member 1, the non-bonded portion 31 of the waterproof membrane 3, defined as the portion surrounded by the bonded portion 41 when viewed perpendicular to the outer surface 23, has a region 32 that overlaps with the outer surface 23 when viewed perpendicularly. In other words, a portion of the non-bonded portion 31 of the waterproof membrane 3 is located between the opening 22 and the bonded portion 41 when viewed perpendicularly to the outer surface 23. The distance D1 between the waterproof membrane 3 and the outer surface 23 in the region 32 is 0.01 mm or more and X mm or less, where X is the amount of indentation of the probe into the waterproof membrane 3 at which the repulsive force generated in the waterproof membrane 3 by the indentation of the probe is maximized when a probe indentation test is conducted on the waterproof membrane 3 in accordance with the puncture strength test provisions of JIS Z1707:1997. X corresponds to the maximum deformation amount of the waterproof membrane 3 within the range of elastic deformation.

[0015] When water pressure is applied to the waterproof membrane 3 of the conversion element member 1 in the direction of the conversion element 2, the waterproof membrane 3 deforms in the direction of the opening 22 at the non-jointed portion 31. However, in the conversion element member 1, the upper limit of the distance D1 between the waterproof membrane 3 and the outer surface 23 in the region 32 is limited to X mm or less. Therefore, even when the water pressure applied to the waterproof membrane 3 is large or when water pressure is continuously applied to the waterproof membrane 3, the deformed waterproof membrane 3 comes into contact with the outer surface 23, limiting the deformation of the waterproof membrane 3 to within the range of elastic deformation without reaching plastic deformation. When the conversion element 2 is an acoustic conversion element, the waterproof membrane 3 is required to prevent water intrusion while allowing sound transmission. In this case, the portion of the waterproof membrane 3 through which sound primarily transmits is the non-jointed portion 31. If the non-jointed portion 31 of the waterproof membrane 3 remains in contact with the outer surface 23 even after the water pressure is released, the sound permeability of the waterproof membrane 3 is reduced, thereby reducing the sound permeability of the conversion element member 1. Furthermore, deformation (permanent deformation) remaining in the waterproof membrane 3 even after release from water pressure reduces the sound permeability of the waterproof membrane 3, thereby reducing the sound permeability characteristics of the conversion element member 1. In the conversion element member 1, the deformation of the waterproof membrane 3 due to water pressure is limited to the range of elastic deformation, thereby mitigating the degree of permanent deformation in the waterproof membrane 3, and even if the non-jointed portion 31 of the waterproof membrane 3 comes into contact with the outer surface 23 due to the application of water pressure, this contact can be prevented from continuing after release from water pressure.

[0016] JIS Z1707:1997 specifies a puncture strength test for plastic food packaging films. Compliance with this standard allows for an indentation test to be performed. This test evaluates the repulsive force generated in the waterproof membrane 3 when a rod-shaped needle (probe) is pressed into one surface of the waterproof membrane 3 at a constant speed, as well as the indentation depth of the probe into the waterproof membrane 3. In this indentation test, the waterproof membrane 3 deforms as the probe is pressed into it. When the indentation depth of the probe is small and the deformation of the waterproof membrane 3 remains within the range of elastic deformation, the repulsive force generated in the waterproof membrane 3 increases with increasing indentation depth. As the indentation depth of the probe increases and the waterproof membrane 3 reaches plastic deformation, the repulsive force generated in the waterproof membrane 3 decreases (see Figure 2, which shows an example of the relationship between the indentation depth of the probe into the waterproof membrane 3 and the repulsive force generated in the waterproof membrane 3 due to the indentation of the probe). Therefore, the indentation depth X of the probe at which the repulsive force is maximized corresponds to the maximum deformation of the waterproof membrane 3 within the range of elastic deformation. The probe used is a cylinder with a diameter of 0.8 mm, one end of which is pressed into the waterproof membrane 3 and is hemispherical with a radius of 0.35 mm. The probe is pressed into the waterproof membrane 3 at a rate of 10 mm / min, and the evaluation is performed in an atmosphere of 25±5°C. Because the penetration strength of the waterproof membrane 3 is not being measured, the indentation test does not require the probe to continue pressing until it penetrates the waterproof membrane 3. The indentation test can be stopped once the indentation depth X at which the repulsion force is maximized is determined. Because the penetration strength value itself is not the subject of evaluation in the indentation test, it is not necessary to perform the test on five or more test specimens. For example, the indentation depth X can be determined by performing the test on a single test specimen. Of course, it is also possible to perform the test on multiple test specimens and use the average of the indentations at which the repulsion force is maximized for each test specimen as the indentation depth X.

[0017] Furthermore, in the conversion element member 1, the lower limit of the separation distance D1 is set to 0.01 mm or more, which prevents the vibration of the non-jointed portion 31 of the waterproof membrane 3 when no water pressure is applied from being hindered by contact with the outer surface 23. Preventing the vibration of the non-jointed portion 31 from being hindered contributes to the good sound transmission characteristics of the conversion element member 1.

[0018] In recent years, electronic devices with audio functions, such as wearable devices like smartwatches, have become increasingly miniaturized. To accommodate this miniaturization, the waterproof membrane must be reduced in area. According to the inventors' research, when the area of ​​the non-jointed portion (sound-transmitting portion) 31, which is the portion of the waterproof membrane 3 through which sound primarily passes, is reduced, the smaller the distance between the opening 22 of the conversion element 2 and the waterproof membrane 3, the less the deterioration in the sound transmission characteristics of the conversion element member 1 due to the area reduction, ensuring good sound transmission characteristics. From this perspective, the separation distance D1 may be 2 mm or less, 1.5 mm or less, 1 mm or less, less than 1 mm, or even 0.9 mm or less. Furthermore, the separation distance D1 may be equal to or less than the smaller value selected from the above X mm and 2 mm, equal to or less than the smaller value selected from the above X mm and 1.5 mm, equal to or less than the smaller value selected from the above X mm and 1 mm, or even equal to or less than the smaller value selected from the above X mm and 0.9 mm. Furthermore, the separation distance D1 may be 0.9 times or less, 0.8 times or less, 0.7 times or less, or even 0.6 times or less of the push-in amount X in order to more reliably suppress deterioration of the characteristics.

[0019] 1A and 1B, the shape of the waterproof membrane 3 is a circle when viewed from a direction perpendicular to the main surface of the waterproof membrane 3. However, the shape of the waterproof membrane 3 is not limited to this example, as long as it is capable of covering the opening 22 of the conversion element 2, is capable of being joined to the outer surface 23 at a joining portion 41 having a shape that surrounds the opening 22 when viewed from a direction perpendicular to the outer surface 23, and the non-joining portion 31 can have an area 32 that overlaps with the outer surface 23 when viewed from the above direction. The shape of the waterproof membrane 3 when viewed from a direction perpendicular to the main surface of the waterproof membrane 3 may be a circle (including an approximate circle), an ellipse (including an approximate ellipse), a polygon including a rectangle and a square, or an irregular shape. The corners of the polygon may be rounded.

[0020] 1A and 1B, the shape of the joint 41 of the waterproof membrane 3 corresponds to the peripheral edge of the membrane 3 when viewed from a direction perpendicular to the main surface of the waterproof membrane 3, and more specifically, is a ring shape. However, the shape of the joint 41 is not limited to this example, as long as it can join the waterproof membrane 3 to the outer surface 23 so as to close the opening 22 and has a shape that surrounds the opening 22 when viewed from a direction perpendicular to the outer surface 23.

[0021] 1A and 1B, the waterproof membrane 3 is bonded to the outer surface 23 by an adhesive portion 4. The adhesive portion 4 typically has the same shape as the joint portion 41 when viewed from a direction perpendicular to the main surface of the waterproof membrane 3. The adhesive portion 4 may be, for example, an adhesive layer made of a pressure-sensitive adhesive and / or adhesive, or may be a double-sided adhesive tape. When the adhesive portion 4 is a double-sided adhesive tape, the waterproof membrane 3 can be more reliably bonded to the outer surface 23, further improving the waterproofness of the conversion element member 1. Note that the method of bonding the waterproof membrane 3 to the outer surface 23 is not limited to the above example, and the waterproof membrane 3 may also be bonded to the outer surface 23 using welding, such as heat welding or ultrasonic welding.

[0022] A known double-sided adhesive tape can be used as the double-sided adhesive tape that can form the adhesive portion 4. The substrate of the double-sided adhesive tape is, for example, a resin film, nonwoven fabric, or foam. There are no limitations on the resin that can be used for the substrate, and examples include polyester (PET, etc.), polyolefin (polyethylene, etc.), and polyimide. Various adhesives such as acrylic adhesives and silicone adhesives can be used for the adhesive layer of the double-sided adhesive tape. It is preferable to use an acrylic adhesive for the adhesive layer because this can improve the bonding strength to the waterproof membrane 3 and / or the outer surface 23. The double-sided adhesive tape may be a thermal adhesive tape. The double-sided adhesive tape may also be a substrate-less double-sided adhesive tape that does not have a substrate.

[0023] In the example shown in FIGS. 1A and 1B, the waterproof membrane 3 is bonded to the outer surface 23 via an adhesive portion 4. In this case, the separation distance D1 can be controlled by the thickness of the adhesive portion 4. If the adhesive portion 4 is a double-sided adhesive tape, the separation distance D1 can be controlled more reliably. However, the method for controlling the separation distance D1 is not limited to this example. For example, as shown in FIG. 3A, the waterproof membrane 3 may be bonded to the outer surface 23 via a spacer 42. In this case, the separation distance D1 can be controlled by the thickness of the spacer 42. The spacer 42 may have the same shape as the joint portion 41 when viewed perpendicularly to the main surface of the waterproof membrane 3. The outer surface 23 and the spacer 42, and the spacer 42 and the waterproof membrane 3 can be bonded using the adhesive portion 4, welding, or the like. In the example shown in FIG. 3A, the spacer 42 and the outer surface 23 are bonded via the adhesive portion 4. 3B, the substrate 21 may have a protrusion 43 protruding from the outer surface 23, and the waterproof membrane 3 may be joined to the outer surface 23 at the protrusion 43. In this case, the separation distance D1 can be controlled by adjusting the height of the protrusion 43. The protrusion 43 may have the same shape as the joint 41 when viewed from a direction perpendicular to the main surface of the waterproof membrane 3. The protrusion 43 and the waterproof membrane 3 may be joined using an adhesive 4 or welding. The above-mentioned methods may be combined in any desired manner.

[0024] In the example shown in FIGS. 1A and 1B, the shape of the region 32 is surrounded by the joint 41 and the opening 22 when viewed perpendicular to the outer surface 23. More specifically, it is a ring-like shape that corresponds to the gap between the joint 41 and the opening 22. However, the shape of the region 32 is not limited to this example. Also, in the example shown in FIGS. 1A and 1B, the distance D2 between the joint 41 and the opening 22 in the region 32 when viewed perpendicular to the outer surface 23 is greater than the separation distance D1. The distance D2 may be 1.2 times or more, 1.4 times or more, 1.5 times or more, 1.7 times or more, 1.9 times or more, or even 2 times or more of the separation distance D1. The distance D2 may be, for example, 0.5 mm or more, 1.0 mm or more, 1.5 mm or more, 2.0 mm or more, 2.5 mm or more, or even 3.0 mm or more. In these cases, the deformation of the waterproof membrane 3 deformed by water pressure is more reliably restricted. Distance D2 can be defined as the average length of a virtual line extending from the center of opening 22 parallel to outer surface 23 and passing through region 32 when the virtual line is rotated around the center along outer surface 23 (the average length when viewed perpendicular to outer surface 23). The average length can be defined as half the sum of the maximum and minimum lengths of the virtual line passing through region 32. In the example shown in FIGS. 1A and 1B, distance D2 can be half the difference between the outer diameter and inner diameter of ring-shaped region 32. The minimum length may be 1.2 times or more, 1.4 times or more, 1.5 times or more, 1.7 times or more, 1.9 times or more, or even two times or more of separation distance D1. The minimum length may be 0.5 mm or more, 1.0 mm or more, 1.5 mm or more, 2.0 mm or more, 2.5 mm or more, or even 3.0 mm or more.

[0025] The area of ​​the non-jointed portion 31 of the waterproof membrane 3, which is defined as the portion surrounded by the joint portion 41 when viewed from a direction perpendicular to the outer surface 23, is, for example, 19.6 mm 2 Less than 12.6mm 2 Below, 7.1mm 2 Below, 4.9mm 2 Below, 3.1mm 2 Below that, even 1.8mm 2If the shape of the non-bonded portion 31 is a circle when viewed from a direction perpendicular to the outer surface 23, the above areas correspond to the areas of the non-bonded portion 31 when the diameter of the circle is 5 mm, 4 mm, 3 mm, 2.5 mm, 2 mm, and 1.5 mm, respectively.

[0026] 1A and 1B, the maximum distance between the non-jointed portion 31 of the waterproof membrane 3 and the plane including the outer surface 23 is equal to the separation distance D1. This embodiment can be achieved, for example, by joining a flat waterproof membrane 3 that has not been processed to have convex portions and / or concave portions, etc., to the outer surface 23 without causing deformation such as slack. However, the maximum distance between the non-jointed portion 31 of the waterproof membrane 3 and the plane including the outer surface 23 does not have to be equal to the separation distance D1. Independently of the separation distance D1, the maximum distance may be, for example, 2 mm or less, 1.5 mm or less, 1 mm or less, less than 1 mm, or even 0.9 mm or less. Furthermore, the maximum distance may be, independent of the separation distance D1, equal to or less than the smaller value selected from the above X mm and 2 mm, equal to or less than the smaller value selected from the above X mm and 1.5 mm, equal to or less than the smaller value selected from the above X mm and 1 mm, or even equal to or less than the smaller value selected from the above X mm and 0.9 mm.

[0027] The waterproof membrane 3 is a membrane that prevents water from entering while allowing sound to pass through. Various known waterproof membranes can be used for the waterproof membrane 3. The waterproof membrane 3 may be treated to be oil-repellent or liquid-repellent.

[0028] The waterproof membrane 3 is made of a resin such as polyester (PET, etc.), polycarbonate, polyethylene, polyimide, PTFE, polyurethane, or silicone. However, the resin that makes up the waterproof membrane 3 is not limited to the above examples. PTFE is a suitable material for the waterproof membrane 3. A membrane made of PTFE (PTFE membrane) has a good balance between mass and strength. An elastomer membrane may be excluded from the waterproof membrane 3. If the waterproof membrane 3 is an elastomer membrane, it may be a rubber-like elastic membrane having a rubber hardness of more than 80 (the upper limit is, for example, 100). In this specification, rubber hardness means the hardness evaluated using a Type A durometer defined in JIS K6253:2006.

[0029] The waterproof membrane 3 may be a porous membrane. The PTFE membrane may be a porous membrane (PTFE porous membrane) formed by stretching a paste extrusion or cast membrane containing PTFE particles. The PTFE membrane may be fired.

[0030] If it is expected that the electronic device equipped with the conversion element member 1 will be exposed to higher water pressure, the waterproof membrane 3 is preferably a microporous membrane or a non-porous membrane. Microporous membranes and non-porous membranes can withstand high water pressure and are less susceptible to deformation due to water pressure. The microporous membrane may be a PTFE microporous membrane made of PTFE. The non-porous membrane may be a PTFE non-porous membrane made of PTFE.

[0031] As used herein, a microporous membrane refers to a membrane having a thickness-wise air permeability (Gurley air permeability) of 10 sec / 100 mL or more and 10,000 sec / 100 mL or less, as measured in accordance with Air Permeability Measurement Method B (Gurley method) defined in Japanese Industrial Standards (hereinafter referred to as "JIS") L1096:2010. The lower limit of the Gurley air permeability of a microporous membrane may be 20 sec / 100 mL or more, 30 sec / 100 mL or more, 40 sec / 100 mL or more, 50 sec / 100 mL or more, or even 70 sec / 100 mL or more. The upper limit of the Gurley air permeability of a microporous membrane may be 5,000 sec / 100 mL or less, 1,000 sec / 100 mL or less, or even 300 sec / 100 mL or less. In this specification, a non-porous membrane refers to a membrane whose air permeability in the thickness direction, expressed in terms of the Gurley air permeability, exceeds 10,000 seconds / 100 mL. The air permeability in the thickness direction of a porous membrane, expressed in terms of the Gurley air permeability, is usually less than 10 seconds / 100 mL.

[0032] Even if the size of the waterproof membrane 3 is smaller than the size of the test piece used in the Gurley method (approximately 50 mm x 50 mm), the Gurley air permeability can be evaluated by using a measuring jig. One example of a measuring jig is a polycarbonate disk 2 mm thick and 47 mm in diameter, with a through-hole (having a circular cross section with a diameter of 1 mm or 2 mm) in the center. Measurement of the Gurley air permeability using this measuring jig can be carried out as follows.

[0033] The waterproof membrane to be evaluated is fixed to one side of the measurement jig so as to cover the opening of the through-hole. The fixing is performed so that during the Gurley air permeability measurement, air passes only through the opening and the effective test portion of the waterproof membrane to be evaluated (the portion overlapping the opening when viewed perpendicularly to the main surface of the fixed waterproof membrane), and the fixing portion does not obstruct the passage of air through the effective test portion of the waterproof membrane. The waterproof membrane can be fixed using double-sided adhesive tape with a vent hole punched in the center that matches the shape of the opening. The double-sided adhesive tape is simply placed between the measurement jig and the waterproof membrane so that the perimeter of the vent hole coincides with the perimeter of the opening. Next, the measurement jig with the waterproof membrane fixed is placed in a Gurley air permeability tester so that the fixed surface of the waterproof membrane is downstream of the air flow during measurement, and the time t1 required for 100 mL of air to pass through the waterproof membrane is measured. Next, the measured time t1 was measured using an effective test area of ​​642 mm2 as specified in the air permeability measurement method B (Gurley method) of JIS L1096:2010. 2 ] per unit area of ​​the effective test part of the waterproof membrane [mm 2 ]) / 642[mm 2 ]}, and the resulting converted value t can be used as the Gurley air permeability of the waterproof membrane. When the above-mentioned circular plate is used as the measuring jig, the area of ​​the effective test portion of the waterproof membrane is the area of ​​the cross section of the through hole. It has been confirmed that the Gurley air permeability measured without using a measuring jig for a waterproof membrane that meets the size of the above-mentioned test piece agrees well with the Gurley air permeability measured using the measuring jig after cutting the waterproof membrane into small pieces, i.e., that the use of the measuring jig does not substantially affect the measured value of the Gurley air permeability.

[0034] When the temperature of the housing drops due to using or wearing an electronic device underwater, condensation may occur inside the housing. Condensation can be prevented by reducing the amount of water vapor that accumulates inside the housing. If the waterproof membrane 3 is a non-porous membrane, such as a PTFE non-porous membrane, the intrusion of water vapor into the housing through the waterproof membrane 3 is prevented. Therefore, by selecting a non-porous membrane as the waterproof membrane 3, the amount of water vapor that accumulates inside the housing can be reduced, and condensation inside the housing can be prevented.

[0035] On the other hand, even if water vapor does not penetrate into the housing through the waterproof membrane 3, retention of water vapor inside the housing may be unavoidable. For example, this may occur when the housing is made of a hygroscopic resin such as polybutylene terephthalate (PBT), acrylonitrile-butadiene-styrene resin (ABS), polymethyl methacrylate (PMMA), polypropylene (PP), or polycarbonate (PC). In housings made of hygroscopic resin, external water vapor absorbed by the housing itself is released inside the housing by heat from a heat source inside the housing and tends to remain there. In this case, to prevent condensation inside the housing, it is preferable to select a waterproof membrane 3 that can release the water vapor retained inside the housing to the outside. One example of a selectable waterproof membrane 3 is a microporous membrane, such as a PTFE microporous membrane. When the waterproof membrane 3 is a microporous membrane, high waterproofness is achieved, while the moderate breathability of the waterproof membrane 3 allows the retained water vapor to be released to the outside, preventing condensation inside the housing.

[0036] The waterproof membrane 3, which is a PTFE microporous membrane, has an average pore size of, for example, 0.01 to 1 μm. The porosity of the waterproof membrane 3, which is a PTFE microporous membrane, is, for example, 5 to 50%. The average pore size of the PTFE membrane can be measured in accordance with ASTM (American Society for Testing and Materials) F316-86. The porosity of the PTFE membrane can be calculated by substituting the mass, thickness, area (area of ​​the main surface) and true density of the membrane into the following formula. The true density of PTFE is 2.18 g / cm 3 is. Porosity (%) = {1 - (mass [g] / (thickness [cm] × area [cm 2 ]×True density[2.18g / cm 3 ]))}×100

[0037] The thickness of the waterproof membrane 3 is, for example, 1 to 50 μm, and may be 3 to 30 μm, or even 5 to 20 μm. When the thickness is within this range, the waterproof property of the waterproof membrane 3 and properties such as sound transmission property can be improved in a balanced manner.

[0038] The surface density of the waterproof membrane 3 is, for example, 1 to 30 g / m 2 and 1 to 25 g / m2 The surface density can be calculated by dividing the mass of the waterproof membrane 3 by the area (area of ​​the main surface).

[0039] The waterproofness of the waterproof membrane 3 can be evaluated by its water pressure resistance (limiting water pressure resistance). The water pressure resistance of the waterproof membrane 3 is, for example, 15 kPa or more. The water pressure resistance of the waterproof membrane 3 that is a porous membrane may be 30 kPa or more, 40 kPa or more, 50 kPa or more, or even 100 kPa or more. The upper limit of the water pressure resistance of the waterproof membrane 3 that is a porous membrane is, for example, 300 kPa or less. The water pressure resistance of the waterproof membrane 3 that is a microporous membrane may be 100 kPa or more, 200 kPa or more, 300 kPa or more, or even 400 kPa or more. The upper limit of the water pressure resistance of the waterproof membrane 3 that is a microporous membrane is, for example, 2500 kPa or less. The water pressure resistance of the waterproof membrane 3 that is a non-porous membrane may be 400 kPa or more, 700 kPa or more, 1100 kPa or more, or even 1500 kPa or more. The upper limit of the water pressure resistance of the non-porous waterproof membrane 3 is not limited, and is, for example, 2500 kPa or less. The water pressure resistance of the waterproof membrane 3 can be measured as follows using a measuring jig in accordance with JIS L1092:2009 water resistance test method A (low water pressure method) or B (high water pressure method).

[0040] An example of a measurement jig is a metal or resin disk with a diameter of 47 mm, with a 1 mm diameter through-hole (with a circular cross section) in the center. The metal is, for example, stainless steel. The resin is, for example, polycarbonate. This disk has a thickness that does not deform due to the water pressure applied when measuring the water pressure resistance. Measurement of the water pressure resistance using this measurement jig can be carried out as follows.

[0041] The waterproof membrane to be evaluated is fixed to one side of the measurement jig so as to cover the opening of the through-hole. This fixation is performed so that water does not leak from the fixed part of the membrane during the water pressure measurement. The waterproof membrane can be fixed using double-sided adhesive tape with a water passage hole punched in the center that matches the shape of the opening. The double-sided adhesive tape is simply placed between the measurement jig and the waterproof membrane so that the periphery of the water passage hole coincides with the periphery of the opening. Next, the measurement jig with the waterproof membrane fixed is set in the testing equipment so that the surface opposite the fixed surface of the waterproof membrane becomes the surface to which water pressure is applied during measurement. The water pressure resistance is measured according to Water Resistance Test Method A (low water pressure method) or Method B (high water pressure method) of JIS L1092:2009. However, the water pressure resistance is measured based on the water pressure when water escapes from one point on the waterproof membrane surface. The measured water pressure resistance can be used as the water pressure resistance of the waterproof membrane. The test device may have the same configuration as the water resistance test device exemplified in JIS L1092:2009 and have a test piece mounting structure to which the above-mentioned measuring jig can be set.

[0042] 1A and 1B, the waterproof membrane 3 is a single-layer membrane. The waterproof membrane 3 may be a laminate of two or more membranes. The waterproof membrane 3 may be a laminate of two or more PTFE membranes.

[0043] The waterproof membrane 3 may be a colored membrane. The waterproof membrane 3 may be colored, for example, gray or black. A gray or black waterproof membrane 3 can be formed, for example, by mixing a gray or black colorant into the material that constitutes the membrane. The black colorant is, for example, carbon black. Note that, in terms of the "achromatic color brightness NV" defined in JIS Z8721:1993, colors in the range of 1 to 4 can be defined as "black," and colors in the range of 5 to 8 can be defined as "gray."

[0044] In the example shown in FIGS. 1A and 1B, the conversion element 2 included in the conversion element member 1 is an acoustic conversion element, more specifically, a microphone. However, the acoustic conversion element that can be included in the conversion element member 1 is not limited to a microphone. The acoustic conversion element may also be a speaker. However, according to the inventors' studies, when the acoustic conversion element is a microphone, the deterioration of sound transmission characteristics due to permanent deformation of the waterproof membrane 3 and the deterioration of sound transmission characteristics when the area of ​​the non-jointed portion 31 of the waterproof membrane 3 is reduced are more significant than when the acoustic conversion element is a speaker. Therefore, the effects of the present invention are particularly advantageous when the acoustic conversion element is a microphone. Note that when the acoustic conversion element has the functions of both a microphone and a speaker, the element is considered to be a microphone.

[0045] 1A and 1B is an MEMS acoustic transducer, but the acoustic transducer is not limited to this example and may be various elements other than MEMS, such as an electret condenser microphone (ECM).

[0046] FIG. 4 shows an example of a MEMS microphone 2A. The MEMS microphone 2A in FIG. 4 includes a substrate 21 and a cap 24 bonded to the peripheral portion of one surface of the substrate 21. The substrate 21 is a semiconductor substrate made of, for example, silicon (Si) or a compound semiconductor. The cap 24 is made of, for example, metal, resin, or a composite material thereof. An opening 22 serving as a sound passage is formed on the outer surface of the substrate 21. A diaphragm 25 that converts sound transmitted through the opening 22 into mechanical vibrations is disposed near the opening 22 in a space 26 between the substrate 21 and the cap 24. The diaphragm 25 is made of, for example, resin. The diaphragm 25 is supported by a pair of support posts 29A and 29B that extend from the one surface of the substrate 21 toward the space 26. A semiconductor circuit that converts the mechanical vibrations of the diaphragm 25 into an electrical signal is formed inside the support posts 29A and 29B. The mechanical vibrations generated in diaphragm 25 by the transmission of sound are transmitted to supports 29A and 29B and converted into electrical signals, and the converted electrical signals are output to the outside of MEMS microphone 2A via an electrical path including connector 27A, preamplifier 28, through electrode 27B and terminal 27C.

[0047] The MEMS microphone 2A shown in FIG. 4 is a so-called "bottom-sound-hole type" element in which the opening 22 and terminal 27C are formed on the same surface of the element (in the example of FIG. 4, the outer surface 23 of the substrate 21). The MEMS microphone 2A may also be a so-called "top-sound-hole type" element in which the opening 22 and terminal 27C are located on one surface of the element and the other surface opposite the first surface. An example of a top-sound-hole type MEMS microphone 2B is shown in FIG. 5. The MEMS microphone 2B in FIG. 5 has the same configuration as the MEMS microphone 2A in FIG. 4, except that the opening 22 is formed in the cap 24 rather than the substrate 21. In the MEMS microphone 2B in FIG. 5, the surface exposed to the outside of the cap 24 is the outer surface 23 described above.

[0048] The MEMS microphones 2A and 2B can be formed by known MEMS technology including semiconductor processing technology, thin film formation technology, and the like.

[0049] The configuration of the acoustic conversion element that can be provided in the conversion element member 1 is not limited to the above example. The acoustic conversion element can have any configuration as long as it has an outer surface 23 on which the opening 22 is formed. Also, known elements can be used as the acoustic conversion element.

[0050] 1A and 1B, the shape of the opening of opening 22 is circular when viewed from a direction perpendicular to outer surface 23. However, the shape of the opening of opening 22 is not limited to this example, and may be a circle (including an approximate circle), an ellipse (including an approximate ellipse), a polygon including a square and a rectangle, or an irregular shape when viewed from a direction perpendicular to outer surface 23.

[0051] The area of ​​the opening 22 when viewed from a direction perpendicular to the outer surface 23 is, for example, 12.6 mm 2 Less than 7.1mm 2 Below, 4.9mm 2 Below, 3.1mm 2 Below that, even 1.8mm 2 or less. When the shape of the opening 22 is a circle when viewed from a direction perpendicular to the outer surface 23, the above areas correspond to the areas of the opening 22 having a diameter of 4 mm, 3 mm, 2.5 mm, 2 mm, and 1.5 mm, respectively. When the area of ​​the opening 22 is small, for example, the degree to which the waterproof membrane 3 is pressed into the opening 22 by water pressure is suppressed, thereby making the effect of the present invention more reliable.

[0052] The area of ​​the opening 22 when viewed in a direction perpendicular to the outer surface 23 is usually smaller than the area of ​​the non-jointed portion 31 of the waterproof membrane 3.

[0053] A conversion element member 1 having an acoustic conversion element as the conversion element 2 can have good sound transmission characteristics. In the conversion element member 1, the insertion loss due to the waterproof membrane 3 for a sound with a frequency of 1 kHz (hereinafter, the "insertion loss due to the waterproof membrane 3" will be simply referred to as "insertion loss") is, for example, 4.0 dB or less, and may be 3.0 dB or less, 2.5 dB or less, 2.0 dB or less, 1.5 dB or less, or even 1.0 dB or less. Furthermore, the insertion loss for a sound with a frequency of 10 kHz is, for example, 4.0 dB or less, and may be 3.0 dB or less, 2.5 dB or less, 2.0 dB or less, 1.5 dB or less, or even 1.0 dB or less. In this case, the waterproof membrane 3 is typically a porous membrane. The insertion loss can be evaluated by using the acoustic conversion element provided in the conversion element member 1 as an evaluation microphone or speaker.

[0054] The conversion element member 1 having an acoustic conversion element as the conversion element 2 can have good sound transmission characteristics even after water pressure is applied. The insertion loss of the conversion element member 1 for a sound with a frequency of 1 kHz after a water pressure holding test at a water pressure of 60 kPa or 80 kPa for a water pressure application time of 20 minutes is, for example, 4.0 dB or less, and may be 3.0 dB or less, 2.5 dB or less, 2.0 dB or less, 1.5 dB or less, or even 1.0 dB or less. Furthermore, the insertion loss for a sound with a frequency of 10 kHz after a water pressure holding test at a water pressure of 60 kPa or 80 kPa for a water pressure application time of 20 minutes is, for example, 4.0 dB or less, and may be 3.0 dB or less, 2.5 dB or less, 2.0 dB or less, 1.5 dB or less, or even 1.0 dB or less. In this case, the waterproof membrane 3 is typically a porous membrane.

[0055] The water pressure retention test is a test in which a constant water pressure is applied to the conversion element member 1 for a certain period of time (water pressure application time). The water pressure retention test can be performed using the above-mentioned measuring jig and water resistance test device for measuring the water pressure resistance of the waterproof membrane 3. More specifically, a measuring jig to which the conversion element member 1 to be evaluated is fixed instead of a single waterproof membrane 3 is set in the test device so that the surface opposite to the surface to which the conversion element member 1 is fixed becomes the water pressure application surface, and a constant water pressure is applied to the conversion element member 1 for a certain period of time. However, the cross-sectional shape and area of ​​the through hole of the measuring jig are the same as the shape and area of ​​the non-bonded portion 31 of the waterproof membrane 3 when viewed from a direction perpendicular to the outer surface 23 of the conversion element member 1. Furthermore, the conversion element member 1 is fixed to the measuring jig so that the non-bonded portion 31 of the waterproof membrane 3 is exposed through the through hole of the measuring jig and so that the entire through hole of the measuring jig overlaps the entire non-bonded portion 31 when viewed from a direction perpendicular to the outer surface 23. During the test, water pressure is applied to the conversion element member 1 from the waterproof membrane 3 side.

[0056] For a conversion element member 1 having an acoustic conversion element as the conversion element 2, the degree of deterioration in sound transmission characteristics due to water pressure can be evaluated by the degree of deterioration in sound transmission characteristics (insertion loss change) calculated from the insertion loss before and after a water pressure retention test. The insertion loss change corresponds to the value L2-L1 obtained by subtracting the insertion loss L1 (for example, the insertion loss for a 1 kHz sound) before the water pressure retention test from the insertion loss L2 (for example, the insertion loss for a 1 kHz sound) after the water pressure retention test.

[0057] The change in insertion loss (calculated based on the insertion loss at 1 kHz) before and after a water pressure retention test (water pressure of 60 kPa or 80 kPa, water pressure application time of 20 minutes) is, for example, 2.0 dB or less, and may be 1.5 dB or less, 1.3 dB or less, 1.2 dB or less, 1.1 dB or less, or even 1.0 dB or less. Furthermore, the change in insertion loss (calculated based on the insertion loss at 10 kHz) before and after a water pressure retention test (water pressure of 60 kPa or 80 kPa, water pressure application time of 20 minutes) is, for example, 5.0 dB or less, and may be 4.5 dB or less, 4.0 dB or less, 3.5 dB or less, 3.0 dB or less, 2.5 dB or less, 2.0 dB or less, 1.5 dB or less, or even 1.0 dB or less.

[0058] The conversion element member 1, which includes an acoustic conversion element as the conversion element 2, can have good sound transmission characteristics even when the area of ​​the non-jointed portion 31 of the waterproof membrane 3 is reduced. Note that the insertion loss usually increases as the area of ​​the non-jointed portion 31 of the waterproof membrane 3 becomes smaller. The conversion element member 1 is 2 , 12.6mm 2 , 7.1mm 2 , 4.9mm 2 , 3.1mm 2 , or 1.8 mm 2 When the area of ​​the non-joined portion 31 of the waterproof membrane 3 is 19.6 mm 2 , the insertion loss and / or the change in the insertion loss can be within the above-mentioned range. 2 Over 12.6mm 2 Over 7.1mm 2 Over 4.9mm 2 Over 3.1mm 2 or more, or 1.8 mm 2 The above conversion element member 1 can exhibit an insertion loss and / or an insertion loss change amount within the above-mentioned range.

[0059] The water pressure resistance of the conversion element member 1 is normally the same as the water pressure resistance of the waterproof membrane 3 unless the conversion element member 1 has a configuration that increases the water pressure resistance of the conversion element member 1. The water pressure resistance of the conversion element member 1 can be measured using the above-mentioned method for measuring the water pressure resistance of the waterproof membrane 3. However, instead of a single waterproof membrane 3, a measuring jig to which the conversion element member 1 to be evaluated is fixed is set in the test equipment so that the surface opposite to the fixing surface of the conversion element member 1 becomes the water pressure application surface. Furthermore, the conversion element member 1 is fixed to the measuring jig so that the non-jointed portion 31 of the waterproof membrane 3 is exposed to the through hole of the measuring jig. During measurement, water pressure is applied to the conversion element member 1 from the waterproof membrane 3 side.

[0060] The conversion element member 1 can be used by being housed in, for example, the housing of an electronic device that houses an audio converter that converts electrical signals into sound and has an external circulation port for transmitting sound between the audio converter and the outside. An example of the state in which the conversion element member 1 is housed in the housing of the electronic device is shown in FIGS. 6A and 6B . In the example shown in FIGS. 6A and 6B , the conversion element member 1 is housed inside the housing 53 so that sound can be transmitted between the outside of the housing 53 and the conversion element 2 through the opening 22 of the conversion element member 1 and the external circulation port 54 of the housing 53, and so that the waterproof membrane 3 prevents water from entering from the outside of the housing 53 through the external circulation port to the opening 22. More specifically, the conversion element member 1 is housed inside the housing 53 as shown below.

[0061] The conversion element member 1 is fixed to a circuit board 51. The circuit board 51 is provided with a flow port 52, which is a sound-passing port, and the conversion element member 1 is fixed to the circuit board 51 with the adhesive portion 4 and the waterproof film 3 inserted into the flow port 52. In the example shown in FIGS. 6A and 6B, when the conversion element member 1 is fixed to the circuit board 51, sound can be transmitted through the opening 22, the waterproof film 3, and the flow port 52 of the circuit board 51. In the example shown in FIGS. 6A and 6B, when viewed from a direction perpendicular to the main surface of the circuit board 51, the opening 22 and the external flow port 54 have the same shape and area, and the opening 22 and the external flow port 54 overlap. The entire opening 22 and the external flow port 54 may also overlap. When viewed from a direction perpendicular to the main surface of the circuit board 51, the area of ​​the flow port 52 is larger than the areas of the opening 22 and the external flow port 54, and the opening 22 and the external flow port 54 overlap the flow port 52. A seal 5 is provided on the surface of the waterproof membrane 3 opposite to the conversion element 2 side. The seal 5 prevents foreign matter such as water from entering the housing 53 through the gap between the circuit board 51 and the housing 53. The seal 5 is in contact with the inner surface of the housing 53. In the example shown in FIG. 6A, when viewed from a direction perpendicular to the main surface of the waterproof membrane 3, the seal 5 has the shape of the peripheral portion of the waterproof membrane 3. In addition, in this example, when viewed from a direction perpendicular to the main surface of the waterproof membrane 3, the shape and area of ​​the seal 5 are the same as those of the joint portion 41 and the adhesive portion 4. On the other hand, in the example shown in FIG. 6B, when viewed from a direction perpendicular to the main surface of the waterproof membrane 3, the seal 5 has a shape that surrounds the external circulation port 54, and the inner periphery of the seal 5 coincides with the periphery of the external circulation port 54. In addition, in this example, when viewed from a direction perpendicular to the main surface of the waterproof membrane 3, the area of ​​the seal 5 is larger than those of the joint portion 41 and the adhesive portion 4. Terminals that can be electrically connected to terminals 27C of the conversion element member 1 are provided on the fixing surface of the circuit board 51 to which the conversion element member 1 is fixed, and when fixed to the circuit board 51, electrical signals can be exchanged between the conversion element member 1 and the circuit board 51 via both terminals. The configuration of the circuit board 51 is not limited as long as electrical signals can be exchanged between the conversion element member 1 and the circuit board 51. Furthermore, the method of fixing (mounting) the conversion element member 1 to the circuit board 51 is not limited to the method shown in Figures 6A and 6B.

[0062] The circuit board 51 on which the conversion element member 1 is mounted is housed inside the housing 53 so that sound can be transmitted between the conversion element member 1 and the outside of the housing 53 through the opening 22, the flow port 52 and the external flow port 54, and so that the waterproof membrane 3 prevents water from entering from the outside of the housing 53 through the external flow port 54 to the opening 22.

[0063] The smaller the area of ​​the non-bonded portion of the waterproof membrane, the easier it is to ensure the waterproofness of the waterproof membrane. For this reason, the configuration shown in FIG. 7 has typically been used in the past. In the configuration shown in FIG. 7, the shape of the adhesive portion 104, when viewed from a direction perpendicular to the main surface of the waterproof membrane 103, is shaped to surround the opening 22, and the inner periphery of the adhesive portion 104 coincides with the shape of the opening 22. Furthermore, the shape of the seal 105, when viewed from a direction perpendicular to the main surface of the circuit board 51, is shaped to surround the external circulation port 54, and the inner periphery of the seal 105 coincides with the periphery of the external circulation port 54. In the state shown in FIG. 7, no area corresponding to the region 32 exists in the waterproof membrane 103. In the state shown in FIG. 7, by matching the shape of the non-bonded portion of the waterproof membrane 103 to the shape of the opening 22 and the external circulation port 54, the area of ​​the non-bonded portion is reduced, thereby improving the waterproofness of the waterproof membrane 103 alone. 7, the waterproof membrane 103 is typically handled as a laminate with the adhesive portion 104 and the seal 105, and is disposed as this laminate between the substrate 21 and the housing 53. In this case, the area of ​​the waterproof membrane 103 is minimized to the extent that it can cover the opening 22 and the external circulation port 54, thereby increasing the rigidity of the laminate during handling and thereby suppressing unintended distortion or deformation of the waterproof membrane 103 during placement, thereby improving the waterproofness and characteristics of the waterproof membrane 3 alone. Furthermore, from the viewpoint of waterproofness, the opening 52 of the circuit board 51 is also configured to have the minimum area possible to accommodate the laminate.

[0064] The seal 5 can have the configuration described above in the description of the adhesive portion 4. However, the seal 5 may or may not have adhesive properties. The seal 5 may be made of a resin elastic material such as foam. In this case, for example, in the example shown in FIGS. 6A and 6B, by setting the total thickness of the adhesive portion 4, waterproof membrane 3, and seal 5 to be larger than the thickness of the circuit board 51 (depth of the flow port 52), it becomes possible to fix the conversion element member 1 to the circuit board 51 with the seal 5 compressed in the thickness direction, thereby improving the sealing properties of the seal 5. Note that fixing the conversion element member 1 to the circuit board 51 with the seal 5 compressed in the thickness direction can also be achieved in examples other than those shown in FIGS. 6A and 6B.

[0065] 6A and 6B, as long as sound can be transmitted between the outside of the housing 53 and the conversion element 2 via the opening 22 and the external circulation port 54, and water is prevented from entering the housing 53 and the conversion element 2 by the waterproof membrane 3. The conversion element member 1 can be housed inside the housing 53 using any member as long as it allows sound transmission and prevents water from entering.

[0066] The conversion element member of the present invention may have a seal 5 disposed on the surface of the waterproof membrane 3 opposite the conversion element 2, and may be distributed in this state. An example of a conversion element member 1 with a seal 5 disposed thereon is shown in FIG. 8 . FIG. 8 shows the waterproof membrane 3 and the vicinity of the opening 22 in this example. A separator 6 may also be disposed to protect the seal 5 and the non-jointed portion 31 of the waterproof membrane 3, and the conversion element member 1 may be distributed in this state. An example of a conversion element member 1 with a seal 5 and a separator 6 disposed thereon is shown in FIG. 9 . FIG. 9 shows the waterproof membrane 3 and the vicinity of the opening 22 in this example. The separator 6 may be a known separator made of paper, resin, metal, or a composite material thereof, such as a separator used in adhesive tape. The separator 6 may have adhesive properties on the surface in contact with the seal 5. When the conversion element member 1 is in use, the separator 6 is peeled off.

[0067] The conversion element member 1 may include any member other than those described above, as long as the effects of the present invention can be obtained.

[0068] The conversion element member 1 can be formed by arranging and joining a waterproof membrane 3 to an outer surface 23 on which an opening 22 of the conversion element 2 is formed, at a joining portion 41 having a shape that closes the opening 22 and surrounds the opening 22 when viewed from a direction perpendicular to the outer surface 23. However, the waterproof membrane 3 is arranged and joined so that a non-joining portion 31 of the waterproof membrane 3 has an area 32 that overlaps with the outer surface 23 when viewed from the above direction.

[0069] [Conversion element module] The conversion element member 1 can be distributed and used together with the circuit board 51 in a state where it is mounted on the circuit board 51, in other words, as a conversion element module 7 comprising the conversion element member 1 and the circuit board 51 on which the conversion element member 1 is mounted.

[0070] The conversion element member 1 included in the conversion element module 7 is a conversion element member of the present invention, for example, the conversion element member 1 shown in each of the above-described examples. However, the conversion element member 1 included in the conversion element module 7 is not limited to those shown in each of the above-described examples, as long as it is a conversion element member of the present invention.

[0071] The circuit board 51 included in the conversion element module 7 is not limited as long as it can transmit and receive electrical signals to and from the conversion element member 1 mounted on the circuit board 51. The circuit board 51 may be a circuit board formed with a minimum of electronic circuits for transmitting and receiving electrical signals to and from the conversion element member 1, typically electrical signals output from the conversion element 2 included in the conversion element member 1 and / or electrical signals input to the conversion element 2, or may be a circuit board further including various electronic circuits and / or elements capable of performing various processes on the electrical signals. An example of a conversion element module 7 is shown in FIGS. 10A and 10B . FIG. 10B is a plan view of the conversion element module 7 shown in FIG. 10A , viewed from the side of the circuit board 51 opposite to the side on which the conversion element member 1 is mounted. As shown in FIG. 10B , a flow port 52 can be seen on the opposite side of the circuit board 51. In FIG. 10A , reference numeral 57 denotes a terminal, and reference numeral 58 denotes an element such as a resistor or a diode.

[0072] 6A and 6B show examples of mounting the conversion element member 1 on a circuit board 51. As shown in Fig. 6A and 6B, the circuit board 51 has a flow port 52 that allows sound to be transmitted between the circuit board 51 and the opening 22 of the conversion element 2, and the conversion element member 1 may be fixed to the circuit board 51 with the waterproof film 3 inserted inside the flow port 52. However, the manner of mounting the conversion element member 1 on the circuit board 51 is not limited to the above example.

[0073] [Electronic equipment] FIG. 11 shows an example of an electronic device in which the conversion element member 1 is used. The electronic device shown in FIG. 11 is a smartphone 60. An audio conversion unit that converts between electric signals and sound is arranged inside a housing 53 of the smartphone 60. The audio conversion unit includes a conversion element 2 that is an acoustic conversion element having the functions of a speaker and / or a microphone. The conversion element 2 may be a microphone. The housing 53 is provided with openings 54A and 54B that are external circulation ports.

[0074] The audio conversion unit in the smartphone 60 includes the conversion element 2 as a conversion element member 1 and / or a conversion element module 7. In the smartphone 60, the conversion element member 1 and / or the conversion element module 7 are housed inside the housing 53 so that sound can be transmitted between the opening 22 of the conversion element 2 and the outside of the housing 53 via the external circulation port 54 of the housing 53, and so that the waterproof membrane 3 prevents water from entering from the outside through the external circulation port 54 into the opening 22. Examples of the state in which the conversion element member 1 or the conversion element module 7 is housed inside the housing 53 are shown in Figures 6A and 6B.

[0075] When the waterproof membrane 3 is breathable in the thickness direction, the conversion element 2 may be, for example, a characteristic conversion element that converts between gas characteristics and an electrical signal. The characteristic conversion element has an opening 22 that can function as a vent for transmitting (flowing) gas. The gas characteristics are, for example, pressure, flow rate, and concentration of a specific gas species (O2, etc.). However, the gas characteristics are not limited to the above examples. A conversion element member 1 that includes a characteristic conversion element as the conversion element 2 can be used in electronic devices that are sensor devices such as pressure sensors, flow rate sensors, O2 concentration sensors, etc. However, the uses of the conversion element member 1 are not limited to the above examples.

[0076] When the conversion element 2 is a characteristic conversion element, the waterproof membrane 3 is required to prevent water from entering while allowing gas to pass through. In this case, the waterproof membrane 3 may be a porous membrane. In this case, the portion of the waterproof membrane 3 through which gas mainly passes is the non-bonded portion 31.

[0077] When water pressure is applied to the waterproof membrane 3 of the conversion element member 1, which includes a characteristic conversion element as the conversion element 2, in the direction of the element, deformation of the waterproof membrane 3 is limited to the range of elastic deformation without reaching plastic deformation, even when the water pressure applied to the waterproof membrane 3 is large or when water pressure is continuously applied to the waterproof membrane 3. Furthermore, permanent deformation remaining in the waterproof membrane 3 even after the water pressure is released reduces the breathability characteristics of the conversion element member 1, resulting in, for example, variations in breathability or deviations from the designed breathability characteristics of the conversion element member 1. For example, variations in breathability and deviations from the designed breathability characteristics may adversely affect the performance of electronic devices such as pressure sensors. In the conversion element member 1, deformation of the waterproof membrane 3 due to water pressure is limited to the range of elastic deformation, thereby suppressing variations in breathability and deviations from the designed breathability characteristics caused by the application of water pressure.

[0078] The conversion element member 1 having the characteristic conversion element as the conversion element 2 can be housed in a housing 53 so that, for example, gas can be transmitted (flowed) between the housing 53 of the electronic device and the opening (vent) 22 of the conversion element 2 through the external flow port 54 of the housing 53, and the waterproof membrane 3 prevents water from entering the opening 22 from the outside through the external flow port 54. The electronic device housing the conversion element member 1 does not need to have an audio conversion unit. The electronic device housing the conversion element member 1 may also be an electronic device such as a smartphone that has an audio conversion unit. In this case, the conversion element member 1 can be housed inside the housing 53 so as to prevent water from entering through the external flow port 54 that does not correspond to the audio conversion unit. The external flow port 54 that does not correspond to the audio conversion unit is, for example, an air vent that is not intended to pass sound due to the design of the electronic device (although it may physically allow sound to pass through). More specific examples include a pressure measurement port, a flow rate measurement port, and a concentration measurement port.

[0079] The conversion element 2 that can be provided in the conversion element member 1 of the present invention is not limited to the acoustic conversion element and characteristic conversion element described above, as long as it has an opening that can function as an air vent and / or a sound vent.

[0080] Examples of electronic devices equipped with the conversion element member 1 and / or the conversion element module 7 include wearable devices such as smart watches and wristbands, various cameras including action cameras and security cameras, communication devices such as mobile phones and smartphones, virtual reality (VR) devices, augmented reality (AR) devices, sensor devices, etc. However, the electronic devices are not limited to the above examples. [Example]

[0081] The present invention will be described in more detail below with reference to examples, but the present invention is not limited to the following examples.

[0082] (Preparing the waterproof membrane) The following five types of waterproof membranes A to E were prepared.

[0083] [Waterproof membrane A] 100 parts by weight of PTFE fine powder (Polyflon F-104, manufactured by Daikin Industries, Ltd.) was uniformly mixed with 20 parts by weight of a liquid lubricant (n-dodecane, manufactured by Japan Energy Corporation), compressed into a cylinder, and then extruded using a ram extruder to obtain a longitudinally extending sheet-like molded body. This sheet-like molded body, still containing the liquid lubricant, was passed through metal rolling mills and rolled to a thickness of 0.2 mm. The sheet-like molded body was then heated to 150°C to remove the liquid lubricant, and the sheet-like molded body was dried. The sheet-like molded body was then stretched 2.5 times in the longitudinal direction at 300°C, stretched 20 times in the transverse direction at 200°C, and then fired at 400°C, a temperature above the melting point of PTFE, to obtain a waterproof membrane A, a PTFE porous membrane with a thickness of 15 μm and an average pore size of 0.32 μm.

[0084] [Waterproof membrane B] A 0.2 mm thick sheet-like molded article (before removing the liquid lubricant) obtained in the same manner as in the preparation of waterproof membrane A was stretched 4.5 times in the width direction at 25°C. Next, the stretched sheet-like molded article was heated to 150°C to remove the liquid lubricant and dried. Thereafter, the sheet-like molded article was stretched 2.0 times in the longitudinal direction at 300°C, and 20 times in the width direction at 100°C, and then fired at 400°C, which is a temperature above the melting point of PTFE, to obtain waterproof membrane B, which is a PTFE porous membrane with a thickness of 6 μm and an average pore size of 0.48 μm.

[0085] [Waterproof membrane C] The sheet-like molded body from which the liquid lubricant had been removed was stretched in the longitudinal direction at a temperature of 380°C, the stretching ratio at 4.5 times, the stretching temperature in the width direction at 330°C, the stretching ratio at 10 times, and the same procedure as for waterproof film A was repeated except that no firing was performed after stretching in the width direction, to obtain waterproof film C, a PTFE porous film with a thickness of 25 μm and an average pore diameter of 0.88 μm.

[0086] [Waterproof membrane D] As the waterproof membrane D, a silicone rubber sheet (thickness 40 μm, hardness 65, non-porous membrane, black color) was prepared.

[0087] [Waterproof membrane E] A polyurethane sheet (thickness 10 μm, hardness 95, non-porous membrane, white) was prepared as waterproof membrane E.

[0088] (Evaluation of waterproof membrane characteristics A to E) The waterproof membranes A to E prepared above were evaluated for the following properties.

[0089] [Breathability through the thickness (Gurley air permeability)] The through-thickness breathability of the waterproof membranes was evaluated as air permeability (Gurley air permeability) using the above-mentioned method based on the breathability measurement method B (Gurley method) specified in JIS L1096:2010. As a result of the evaluation, the Gurley air permeabilities of waterproof membranes A, B, and C were 1.0 sec / 100 mL, 2.0 sec / 100 mL, and 0.2 sec / 100 mL, respectively. The Gurley air permeabilities of waterproof membranes D and E were over 10,000 sec / 100 mL.

[0090] [Evaluation of indentation amount X by indentation test] The indentation amount X of the waterproof membrane was evaluated by carrying out the indentation test described above. More specifically, the indentation amount X was evaluated as follows (see FIG. 12). First, a precision universal testing machine (AG-5kNXPlus HS, manufactured by Shimadzu Corporation) capable of indenting a probe into the surface of a membrane-like test piece at a constant speed was prepared as a testing machine for the indentation test. Next, the waterproof membrane to be evaluated was cut into a circle with a diameter of 5.8 mm to obtain a test piece 81. Next, double-sided adhesive tape 82 (ring-shaped with an outer diameter of 5.8 mm and an inner diameter of 2.0 mm, thickness of 200 μm, manufactured by Nitto Denko Corporation No. 57120B) was attached to one main surface of test piece 81, and double-sided adhesive tape 83 (ring-shaped with an outer diameter of 5.8 mm and an inner diameter of 2.0 mm, thickness of 30 μm, manufactured by Nitto Denko Corporation No. 5603) and PET sheet 84 (ring-shaped with an outer diameter of 5.8 mm and an inner diameter of 2.0 mm, thickness of 0.1 mm, manufactured by Toray Industries, Ltd. Lumirror) were attached to the other main surface of test piece 81 in this order to obtain laminate 85. Double-sided adhesive tape 82, double-sided adhesive tape 83, and PET sheet 84 were attached via the adhesive layers of double-sided adhesive tapes 82 and 83 so that the outer peripheries of each component coincided with each other and so that the outer peripheries of each component coincided with the periphery of test piece 81. Next, the laminate 85 was placed on and fixed to the surface of a polycarbonate plate 86, which had a through-hole with a diameter of 2.0 mm extending perpendicularly to the surface, via the adhesive layer of the double-sided adhesive tape 82. The laminate 85 was fixed so that, when viewed from a direction perpendicular to the main surface of the test piece 81, the inner periphery of the double-sided adhesive tape 82 coincided with the periphery of the through-hole in the polycarbonate plate 86. Next, the polycarbonate plate 86 and the laminate 85 were fixed to a testing machine with the polycarbonate plate 86 facing downward, and an indentation test was performed in which a needle (measurement probe) 87 was pressed into the test piece 81 from above at a constant speed. The polycarbonate plate 86 and the laminate 85 were fixed to the testing machine so that the needle 87 could be pressed vertically downward into the test piece 81 through the through-hole in the double-sided adhesive tape 83 and the PET sheet 84 during the indentation test. The needle 87 used was a cylindrical needle (0.8 mm in diameter) with one end pressed into the test piece 81 being hemispherical with a radius of 0.35 mm, and the pressing speed of the needle 87 into the test piece 81 was 10 mm / min.The evaluation was carried out in an atmosphere of 25±5°C and 60±10% relative humidity. Five test pieces 81 were cut from different locations on a single waterproof membrane and subjected to indentation tests. The average indentation amount X was calculated for each test piece, at which the repulsive force generated by the indentation of the probe was maximized. The maximum repulsive force for each waterproof membrane was calculated as the average of the values ​​obtained for the five test pieces. The evaluation results are shown in Table 1 below.

[0091] [Table 1]

[0092] (Evaluation of properties as a conversion element material) [Relationship between separation distance D1 and sound transmission characteristics (insertion loss)] The relationship between the distance D1 and the sound transmission characteristics (insertion loss) was evaluated using the waterproof membranes A, B, D, and E prepared above and a separately prepared MEMS microphone (Knowles, SPU0410LR5H). The specific evaluation method was as follows.

[0093] First, the waterproof membrane was cut into a 5.8 mm diameter circle. Next, double-sided adhesive tape A (ring-shaped, 5.8 mm outer diameter, 2.0 mm inner diameter, 200 μm thick, Nitto Denko No. 57120B) was laminated to one main surface of the cut waterproof membrane, and multiple laminates of double-sided adhesive tape B (ring-shaped, 5.8 mm outer diameter, 2.0 mm inner diameter, 30 μm thick, Nitto Denko No. 5603) and PET sheet (ring-shaped, 5.8 mm outer diameter, 2.0 mm inner diameter, 0.1 mm thick, Toray Lumirror) were laminated to the other main surface to obtain evaluation samples. Double-sided adhesive tape A, double-sided adhesive tape B, and PET sheet were laminated together through the adhesive layers of double-sided adhesive tapes A and B so that the outer circumferences of each component were aligned with each other and with the circumference of the waterproof membrane. The laminate was bonded so that the double-sided adhesive tape B contacted the waterproof membrane. The laminate of the PET sheet and double-sided adhesive tape B was used as the adhesive portion 4 and the spacer 42 for adjusting the distance D1. When three sets of laminates were used, the distance D1 when combined with the MEMS microphone was 0.4 mm, i.e., the distance D1 was less than the amount of indentation X of the waterproof membranes A and B. When eight sets of laminates were used, the distance D1 when combined with the MEMS microphone was 1.0 mm, i.e., the distance D1 exceeded the amount of indentation X of the waterproof membranes A and B. Therefore, using the above sample, Examples 1 and 2, which have a distance D1 of 0.4 mm when combined with the MEMS microphone, and Comparative Examples 1 and 2, which have a distance D1 of 1.0 mm when combined with the MEMS microphone, could be prepared. Similarly, Examples 3 and 4 and Comparative Examples 3 and 4 were prepared by changing the thickness of the PET sheet as necessary. Table 2 below shows the combinations of waterproof membranes, push-in amounts X, and separation distances D1 for each of the examples and comparative examples.

[0094] [Table 2]

[0095] Next, an evaluation jig 93 used to evaluate insertion loss was prepared (see FIG. 13 ). The evaluation jig 93 is a resin box with a sound passage (circular, 2 mm in diameter) 97 on its top surface. A filler 94 and a speaker (SCG-16A, manufactured by Star Micronics) 95 are housed within the evaluation jig 93. The speaker 95 is surrounded by the filler 94. A cylindrical sound passage 96 with a diameter of 2 mm is provided in the filler 94, leading from its top surface to the speaker 95. Sound output from the speaker 95 can be output to the outside of the evaluation jig 93 via the sound passage 96 and the sound passage 97. The filler 94 is made of foamed resin and is housed within the evaluation jig 93 to prevent sound output from the speaker 95 from being transmitted outside the evaluation jig 93 through any part other than the sound passage 96 and the sound passage 97. Next, a polycarbonate spacer 92 having a circular through-hole 98 with a diameter of 2 mm formed in the center was fixed to the upper surface of the prepared evaluation jig 93. The spacer 92 was fixed so that the center of the sound vent 97 and the center of the through-hole 98 were aligned when viewed from a direction perpendicular to the surface of the spacer 92. An adhesive was used to fix the spacer 92.

[0096] Next, each of the prepared samples 91 was bonded to a spacer 92 via the adhesive layer of the double-sided adhesive tape A that was not bonded to the waterproof membrane. The sample 91 was bonded to the spacer 92 so that the conversion element member 91 covered the through-hole 98 and the center of the through-hole 98 coincided with the center of the waterproof membrane when viewed perpendicularly to the main surface of the waterproof membrane. Next, a MEMS microphone 99 was placed on the sample 91, and a weight 100 with a mass of 340 g was placed on the MEMS microphone 99. The weight 100 was used to closely contact the sample 91 and the MEMS microphone 99, enabling evaluation of the sound transmission characteristics equivalent to those of the conversion element member in which the two were bonded. Furthermore, being able to evaluate the sound transmission characteristics without bonding the sample 91 and the MEMS microphone 99 allowed for repeated use during evaluation. The MEMS microphone 99 was placed so that the outer surface of the MEMS microphone 99, where the sound vent was formed, was in contact with the PET sheet of sample 91, and so that the center of the waterproof membrane and the center of the sound vent were aligned when viewed perpendicular to the main surface of the waterproof membrane. The prepared MEMS microphone 99 was a bottom-sound-hole type, and the sound vent was a circle with a diameter of 1.0 mm when viewed perpendicular to the outer surface. The outer surface of the MEMS microphone 99, where the sound vent was formed, was flat over an area of ​​at least approximately 7 mm square, centered on the sound vent. With the MEMS microphone 99 placed, a ring-shaped area (outer diameter 2.0 mm and inner diameter 1.0 mm) overlapping the outer surface when viewed perpendicular to the outer surface was formed in the non-jointed portion of the waterproof membrane. The distance between the sound output surface of the speaker 95 and the sound vent of the MEMS microphone 99 was approximately 21 mm.

[0097] Next, the MEMS microphone 99 and speaker 95 were connected to an acoustic evaluation device (B&K Multi-analyzer System 3560-B-030). Next, the SSR (Solid State Response) mode (test signal 20 Hz to 20 kHz, sweep up) was selected as the evaluation method, and the insertion loss due to the sound-permeable membrane for the above combination of sound-permeable membrane and MEMS microphone was evaluated. The insertion loss can be automatically calculated from the test signal input from the acoustic evaluation device to the speaker 95 and the signal received by the MEMS microphone 99. Before evaluating the insertion loss, the insertion loss value (blank value) was calculated in advance when the waterproof membrane was removed from the sample 91. The insertion loss of the above combination corresponds to the value obtained by subtracting the blank value from the measurement value when the waterproof membrane is provided. The smaller the insertion loss, the better the sound transmission characteristics can be determined.

[0098] The evaluation results are shown in Table 3 below. In Table 3, "-" means not measured.

[0099] [Table 3]

[0100] As shown in Table 3, the smaller the separation distance D1, the lower the insertion loss value for a 1 kHz sound, i.e., the better the sound transmission characteristics. Note that a negative insertion loss value typically means that the waterproof membrane resonates with the sound of that frequency, resulting in an increase in sound pressure at that frequency compared to the original sound used for evaluation generated from the speaker unit. Therefore, when evaluating the relationship between separation distance D1 and sound transmission characteristics, if the insertion loss is a negative value, it can be determined that "the sound transmission characteristics were good at this separation distance D1," regardless of the value.

[0101] [Changes in sound transmission characteristics (insertion loss) before and after water pressure retention test] Next, a water pressure retention test was carried out on each of the prepared samples 91, and then the insertion loss after the water pressure retention test when combined with a MEMS microphone was evaluated using the method described above in the explanation of "Relationship between separation distance D1 and sound transmission characteristics (insertion loss)." The water pressure retention test was carried out as follows.

[0102] After evaluating the sound transmission characteristics before the water pressure retention test, the sample 91 and the spacer 92 were removed from the evaluation jig 93. Next, a polycarbonate support plate with a circular through-hole (1.0 mm in diameter) in the center, simulating the sound passage of the MEMS microphone 99, was placed on the side of the sample 91 opposite the spacer 92. The outer periphery of the spacer 92 and the support plate were evenly clamped with multiple clips to secure the sample 91 between them. The support plate was positioned so that the center of the waterproof membrane and the center of the through-hole in the support plate were aligned when viewed perpendicular to the main surface of the waterproof membrane. Next, the laminate of the spacer 92, sample 91, and support plate was placed in the water resistance test device described above, and a water pressure retention test was performed in which a constant water pressure was applied to the waterproof membrane for a certain period of time. The water pressure was applied from the spacer 92 side. The water pressure applied to the waterproof membrane A was 60 kPa, and the water pressure application time was 20 minutes. The water pressure applied to the waterproof membranes B, D, and E was 80 kPa, and the water pressure application time was 20 minutes.

[0103] The evaluation results are shown in Table 4 below, along with the degree of deterioration in sound transmission characteristics (amount of change in insertion loss), which is the value obtained by subtracting the insertion loss L1 before the water pressure retention test from the insertion loss L2 after the water pressure retention test. In Table 4, "-" indicates that the measurement was not performed.

[0104] [Table 4]

[0105] As shown in Table 4, compared to the comparative examples in which the separation distance D1 exceeded the waterproof membrane's push-in amount X, the examples in which the separation distance D1 was equal to or less than the waterproof membrane's push-in amount X showed a significant improvement in the degree of deterioration in sound transmission characteristics before and after the water pressure retention test, and the degree to which insertion loss increased due to the water pressure retention test was suppressed. Furthermore, the suppression of the degree to which insertion loss increased was particularly noticeable for sounds in the high-frequency range of 10 kHz. Note that while the amount of change in insertion loss in comparative example 3 was smaller than in example 3, comparative example 3 already had a very large insertion loss (especially at a frequency of 10 kHz) prior to the water pressure retention test. [Industrial Applicability]

[0106] The technology of the present invention can be applied to various electronic devices, such as wearable devices such as smart watches; various cameras; communication devices such as mobile phones and smartphones; and sensor devices. [Explanation of symbols]

[0107] 1. Conversion element material 2. Conversion element 2A, 2B MEMS microphones 3 Waterproof membrane 4 Adhesive part 5 Seals 6 Separator 7. Conversion element module 21 PCB 22 Aperture 23 Outer surface 31 Non-joint part 32 areas 41 Joint 42 spacer 43 Convex part 51 Circuit Board 52 Distribution port 53 Case 54,54A,54B External distribution port 57 terminals 58 elements 60 Smartphones D1 Separation distance D2 distance

Claims

1. A conversion element having an opening that can function as an air vent and / or a sound vent, and a waterproof membrane, the conversion element has an outer surface in which the opening is formed; the waterproof membrane is joined to the outer surface of the conversion element at a joint having a shape that closes the opening and surrounds the opening when viewed in a direction perpendicular to the outer surface, The non-jointed portion of the waterproof membrane is defined as a portion surrounded by the joint when viewed from a direction perpendicular to the outer surface, and has an area overlapping with the outer surface when viewed from the direction perpendicular to the outer surface, A distance D1 between the waterproof membrane and the outer surface in the region is 0.01 mm or more and X mm or less, a distance D2 between the joint portion and the opening in the region when viewed from a direction perpendicular to the outer surface is greater than the separation distance D1; Conversion element material. Here, X is the amount of pushing of the probe that maximizes the repulsive force generated in the waterproof membrane when a push-in test of the probe is conducted on the waterproof membrane in accordance with the puncture strength test provisions defined in JIS Z1707:1997.

2. 2. The conversion element member according to claim 1, wherein the separation distance D1 is equal to or less than the smaller value selected from the group consisting of X mm and 2 mm.

3. 3. The conversion element member according to claim 1, wherein the separation distance D1 is equal to or less than 0.6 times X mm.

4. The conversion element member according to any one of claims 1 to 3, wherein a distance D2 between the joint and the opening in the region when viewed from a direction perpendicular to the outer surface is 0.5 mm or more.

5. The area of ​​the opening of the conversion element when viewed from a direction perpendicular to the outer surface is 1.8 mm 2 The conversion element member according to any one of claims 1 to 4, wherein:

6. 6. The conversion element member according to claim 1, wherein the waterproof film includes a polytetrafluoroethylene film.

7. The conversion element member according to any one of claims 1 to 6, wherein the conversion element is a micro-electro-mechanical system (MEMS).

8. The conversion element member according to any one of claims 1 to 7, wherein the conversion element is an acoustic conversion element.

9. 9. The conversion element member according to claim 8, wherein the waterproof membrane exhibits an insertion loss of 3.0 dB or less for a sound having a frequency of 1 kHz after a water pressure holding test at a water pressure of 60 kPa or 80 kPa for a water pressure application time of 20 minutes.

10. 10. The conversion element member according to claim 8, wherein the waterproof membrane exhibits an insertion loss of 3.0 dB or less for a sound having a frequency of 10 kHz after a water pressure holding test at a water pressure of 60 kPa or 80 kPa for a water pressure application time of 20 minutes.

11. A conversion element member according to any one of claims 8 to 10, wherein the change in insertion loss due to the waterproof membrane for sound of a frequency of 1 kHz before and after a water pressure retention test at a water pressure of 60 kPa or 80 kPa and a water pressure application time of 20 minutes is 2.0 dB or less.

12. A conversion element member according to any one of claims 1 to 11, a circuit board on which the conversion element member is mounted.

13. the circuit board has a flow port through which sound and / or gas can be transmitted between the circuit board and the opening of the conversion element; The conversion element module according to claim 12 , wherein the conversion element member is fixed to the circuit board with the waterproof film inserted inside the flow port.

14. a housing provided with an external circulation port through which gas and / or sound can pass; The conversion element member according to any one of claims 1 to 11, which is housed in the housing; The conversion element member is accommodated in the housing such that the waterproof membrane prevents water from entering the opening from outside the housing through the external circulation port.

15. the electronic device includes an audio conversion unit that converts between an electric signal and sound, the sound conversion unit includes the conversion element member having an acoustic conversion element as the conversion element, The electronic device according to claim 14 , wherein the conversion element member is accommodated in the housing so as to enable sound transmission between the outside and the opening via the external circulation port.

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