Workpiece machining method, program, and cylindrical grinding device

Abstract

To provide a workpiece conveyance device which can automatically clamp a workpiece between a spindle unit (spindle mouthpiece) and a tail unit (tail mouthpiece), in a state in which a crystal axis of the workpiece and a rotation axis of a cylindrical grinding device coincide with each other.SOLUTION: A workpiece conveyance device includes: a cramp mechanism 250 having a pair of claw parts 261a and 261b for clamping a workpiece; a turning mechanism for turning the clamp mechanism in a state in which the workpiece is clamped; and an X-ray device which measures a crystal face orientation of the workpiece clamped between a spindle mouthpiece and a tail mouthpiece of a cylindrical grinding device body, in a state in which a central axis of the workpiece and a rotation axis possessed by the cylindrical grinding device body coincide with each other, and outputting a correction value for correcting a deviation amount with respect to the rotation axis possessed by the cylindrical grinding device body of a crystal axis of the workpiece.SELECTED DRAWING: Figure 11

Description

[Technical Field]

[0001] The present disclosure relates to a workpiece transport device, a cylindrical grinding device, and a method for correcting a deviation amount. [Background technology]

[0002] A cylindrical grinding machine for grinding a cylindrical workpiece is known (see, for example, Patent Document 1). A method for measuring crystal orientation is also known (see, for example, Patent Document 2). In response to this, the inventors have developed a cylindrical grinding machine capable of performing predetermined machining (e.g., grinding the outer surface of the workpiece, additional machining such as creating a chamfered edge (OF) or a V-shaped notch) on cylindrical workpieces of various diameters and lengths (lengths in the direction of the central axis) to meet predetermined machining conditions. In factories where cylindrical grinding machines are installed, cylindrical workpieces of various diameters and lengths (lengths in the direction of the central axis) are stored. As needed, the corresponding workpieces are retrieved from storage and clamped between the spindle unit (spindle jaws) and tail unit (tail jaws) of the cylindrical grinding machine, and the clamped workpieces are subjected to predetermined machining to meet the predetermined machining conditions. In this case, it is desirable for the workpiece to be clamped between the spindle unit (spindle jaws) and tail unit (tail jaws) with its crystal axis aligned with the rotational axis of the cylindrical grinding machine.

[0003] Therefore, conventionally, the crystal axis of the workpiece is measured using a crystal orientation measuring device (for example, Model SU-021 manufactured by Toshiba IT Control Systems Corporation) as an X-ray device, and the amount of misalignment between this measured crystal axis and the rotation axis of the cylindrical grinding machine is corrected, and then the corrected workpiece is re-clamped between the spindle unit (spindle nozzle) and tail unit (tail nozzle) of the cylindrical grinding machine. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2009-190142 [Patent Document 2] Japanese Patent Application Laid-Open No. 2000-266697 Summary of the Invention [Problem to be solved by the invention]

[0005] However, the measurement of the crystal axis of the workpiece, the correction of the deviation amount, and the re-clamping must be performed manually, which poses a problem of a heavy workload.

[0006] The present disclosure has been made to solve such problems, and aims to provide a work transport device, a cylindrical grinding device, and a method for correcting misalignment that can automatically clamp a work between a spindle unit (spindle nozzle) and a tail unit (tail nozzle) while aligning the crystal axis of the work with the rotation axis of the cylindrical grinding device. [Means for solving the problem]

[0007] The workpiece transport device according to the present disclosure is A workpiece conveying device that conveys a cylindrical workpiece to be machined to a cylindrical grinding device body, a clamping mechanism having a pair of claws for clamping the workpiece; a turning mechanism that turns the clamping mechanism in a state where the workpiece is clamped; an X-ray device that measures the crystal plane orientation of the workpiece clamped between the spindle jaws and the tail jaws of the cylindrical grinding device body in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body, and outputs a correction value that corrects the amount of deviation of the crystal axis of the workpiece from the rotation axis of the cylindrical grinding device body, When the rotation axis of the cylindrical grinding device body is defined as the X axis, the axis perpendicular to the X axis is defined as the Y axis, and the axis perpendicular to the plane including the X axis and the Y axis is defined as the Z axis, The rotation mechanism rotates the clamping mechanism, which is holding the workpiece, by an angle corresponding to the correction value around a θ axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

[0008] With this configuration, it is possible to provide a work transport device that can automatically clamp the work between the main spindle unit (main spindle nozzle) and the tail unit (tail nozzle) while aligning the crystal axis of the work with the rotation axis of the cylindrical grinding device.

[0009] This is because the clamping mechanism is equipped with a rotation mechanism that rotates the clamping mechanism, when it is clamping a workpiece, around the θ axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

[0010] Further, in the above workpiece transport device, The claw moving mechanism may clamp the workpiece by moving the pair of claws in a direction approaching each other in the Y-axis direction and abutting the pair of claws against the outer peripheral surface of the workpiece.

[0011] Further, in the above workpiece transport device, The moving mechanism includes: a first moving mechanism that moves the clamp mechanism in the Z-axis direction; a second moving mechanism that moves the clamp mechanism and the first moving mechanism in the Y-axis direction; The apparatus may further include a third movement mechanism that moves the clamp mechanism, the first movement mechanism, and the second movement mechanism in the X-axis direction.

[0012] Further, in the above workpiece transport device, The moving mechanism includes: a first moving mechanism that moves the clamp mechanism in the Z-axis direction; a second moving mechanism that moves the clamp mechanism and the first moving mechanism in the X-axis direction; The apparatus may further include a third movement mechanism that moves the clamp mechanism, the first movement mechanism, and the second movement mechanism in the Y-axis direction.

[0013] Further, in the above workpiece transport device, Each of the pair of claw portions may have a first abutment portion that abuts against a lower portion of the workpiece and a second abutment portion that abuts against an upper portion of the workpiece when the pair of claw portions move in a direction toward each other.

[0014] Further, in the above workpiece transport device, The pair of claw portions may have tapered surfaces that open toward each other in a V-shape and function as the first contact portion and the second contact portion, respectively.

[0015] Further, in the above workpiece transport device, The moving mechanism may move the clamping mechanism that clamps the workpiece until the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body between the main shaft and tail of the cylindrical grinding device body.

[0016] Further, in the above workpiece transport device, The moving mechanism may further move the clamping mechanism that clamps the workpiece until one end face of the workpiece abuts against the spindle.

[0017] Further, in the above workpiece transport device, The pair of claw portions may clamp the center of the workpiece.

[0018] The cylindrical grinding device according to the present disclosure is a cylindrical grinding device body; A cylindrical grinding machine including a workpiece transport device that transports a cylindrical workpiece to be processed to the cylindrical grinding machine body, The workpiece transport device is a clamping mechanism having a pair of claws for clamping the workpiece; a turning mechanism that turns the clamping mechanism in a state where the workpiece is clamped; an X-ray device that measures the crystal plane orientation of the workpiece clamped between the spindle jaws and the tail jaws of the cylindrical grinding device body in a state where the central axis of the workpiece coincides with the rotation axis of the cylindrical grinding device body, and outputs a correction value that corrects the amount of deviation of the crystal axis of the workpiece from the rotation axis of the cylindrical grinding device body, When the rotation axis of the cylindrical grinding device body is defined as the X axis, the axis perpendicular to the X axis is defined as the Y axis, and the axis perpendicular to the plane including the X axis and the Y axis is defined as the Z axis, The rotation mechanism rotates the clamping mechanism, which is holding the workpiece, by an angle corresponding to the correction value around a θ axis that passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction.

[0019] With this configuration, it is possible to provide a cylindrical grinding device that can automatically clamp the workpiece between the spindle unit (spindle nozzle) and the tail unit (tail nozzle) while aligning the crystal axis of the workpiece with the rotation axis of the cylindrical grinding device.

[0020] This is because the clamping mechanism is equipped with a rotation mechanism that rotates the clamping mechanism, when it is clamping a workpiece, around the θ axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

[0021] The deviation amount correction method according to the present disclosure includes: A deviation amount correction method for correcting a deviation amount of the clamped workpiece relative to a rotation shaft of the cylindrical grinding machine body using the workpiece transport device, comprising: a measuring step of measuring the crystal plane orientation of a cylindrical workpiece to be machined, the workpiece being clamped in a state in which a spindle jaw of a cylindrical grinding device body is in contact with a top end face of the cylindrical workpiece and a tail jaw of the cylindrical grinding device body is in contact with a bottom end face of the workpiece, and the crystal plane orientation of a workpiece rotated by a predetermined angle from the reference position, and outputting a correction value for correcting the amount of deviation of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body; and a deviation amount correcting step of controlling the turning mechanism so as to eliminate the deviation amount.

[0022] This configuration provides a method for correcting misalignment that can automatically clamp the workpiece between the spindle unit (spindle nozzle) and the tail unit (tail nozzle) while aligning the crystal axis of the workpiece with the rotation axis of the cylindrical grinding device.

[0023] This is because the clamping mechanism is equipped with a rotation mechanism that rotates the clamping mechanism, when it is clamping a workpiece, around the θ axis (which passes through the center of the workpiece clamped by the clamping mechanism and extends in the Z-axis direction).

[0024] In the above-mentioned deviation amount correction method, The first measuring step, the second measuring step, the deviation amount calculating step, and the deviation amount correcting step may be repeatedly executed until the deviation amount of the workpiece after the deviation amount correcting step becomes equal to or less than a set value.

[0025] In the above-mentioned deviation amount correction method, the amount of deviation is a deviation angle of the central axis of the workpiece relative to the rotation axis of the cylindrical grinding machine body, The deviation amount correcting step may include controlling the turning mechanism so that the clamping mechanism that clamps the workpiece turns by the deviation angle. [Effects of the Invention]

[0026] The present disclosure provides a workpiece transport device, a cylindrical grinding device, and a method for correcting misalignment that can automatically clamp a workpiece between a spindle unit (spindle nozzle) and a tail unit (tail nozzle) while aligning the crystal axis of the workpiece with the rotation axis of the cylindrical grinding device. [Brief explanation of the drawings]

[0027] [Figure 1] FIG. 1 is a perspective view of a cylindrical grinding machine 1. [Figure 2] FIG. [Figure 3] 1 is a schematic diagram of a cylindrical grinding device main body 100. FIG. [Figure 4] (a) A diagram showing the state in which the workpiece W is clamped between the spindle unit 110 (spindle nozzle 111) and the tail unit 120 (tail nozzle 121) (when the central axis AXW of the workpiece W is aligned with the rotation axis AX100), (b) A diagram showing the state in which the workpiece W is clamped between the spindle unit 110 (spindle nozzle 111) and the tail unit 120 (tail nozzle 121) (when the central axis AXW of the workpiece W is misaligned by an angle θ with respect to the rotation axis AX100). [Figure 5] (a) is a diagram showing a state in which a workpiece W is clamped between the spindle nozzle 111 and the tail nozzle 121 with its central axis AXW aligned with the rotation axis AX100; (b) is a diagram showing a state in which a workpiece W is clamped between the spindle nozzle 111 and the tail nozzle 121 with its central axis AXW offset by an angle θ with respect to the rotation axis AX100; (c) is a diagram showing a state in which a workpiece W is clamped between the spindle nozzle 111 and the tail nozzle 121 with its central axis AXW offset by an angle θ with respect to the rotation axis AX100. [Figure 6] (a) A diagram showing the state in which the circular grinding unit 130 performs circular grinding or orientation flat (orientation flat) processing on the workpiece W, and (b) A diagram showing the state in which the notch unit 140 performs notch processing on the workpiece W. [Figure 7] FIG. 2 is a perspective view of the workpiece transport device 200. [Figure 8]8 is a perspective view of the first movable frame 220 (including the outer diameter measuring mechanism 270) and the associated configuration (second movable frame 230, etc.) extracted from FIG. 7. FIG. [Figure 9] 8 is a perspective view (a perspective view from a different angle than FIG. 8) of the first movable frame 220 and the associated components (second movable frame 230, etc.) extracted from FIG. 7. FIG. [Figure 10] FIG. 8 is a perspective view of a third movable frame 240 and its associated components (such as a clamping mechanism 250) extracted from FIG. 7. [Figure 11] This is an example of a rotation mechanism (rotation motor 260) that rotates the clamp mechanism 250. [Figure 12] FIG. 2 is a perspective view of a clamping mechanism 250. [Figure 13] 10 is a schematic diagram showing a state in which a workpiece W is clamped by a pair of claw portions 251a and 251b. [Figure 14] FIG. 10 is a perspective view of a sensor attached to a pair of claws 251a and 251b. [Figure 15] 10 is a schematic diagram showing how the length L of the workpiece W is measured by sensors attached to a pair of claws 251a and 251b. [Figure 16] FIG. 2 is a system configuration diagram including a control device 300. [Figure 17] 4 is a flowchart of an example of the operation of the cylindrical grinding device 1. [Figure 18] FIG. 1 is a perspective view of a cylindrical grinding machine 1 installed in a factory. [Figure 19] 10A and 10B are diagrams for explaining the operation of the clamp mechanism 250. FIG. [Figure 20] 10A and 10B are diagrams for explaining the operation of the clamp mechanism 250. FIG. [Figure 21] 4A to 4C are diagrams for explaining the operation of the spindle unit 110 and the tail unit 120. [Figure 22] 4A to 4C are diagrams for explaining the operation of the spindle unit 110 and the tail unit 120. [Figure 23] 10 is a flowchart of a displacement amount measurement process. [Figure 24]FIG. 10 is a diagram showing the workpiece W being rotated by 90 degrees. [Figure 25] 10 shows the outer diameter measuring mechanism 270 measuring the outer diameter of the bottom-side end face Wb. [Figure 26] 24 is a table summarizing the measured values ​​Δct, Δcb, θ, and ΔY of each of the workpieces WW3-W1, WW2-W4, WW1-W3, and WW4-W2 measured as a result of the processing of FIG. 23. [Figure 27] 10 is a flowchart of a deviation amount correction process. [Figure 28] 17(a) is a diagram illustrating the movement directions of the movable frames 220, 230, and 240 of the cylindrical grinding machine 1, and FIG. 17(b) is a diagram illustrating the movement directions of the movable frames 220, 230, and 240 of the cylindrical grinding machine 1 of a modified example. [Figure 29] 10A and 10B are diagrams for explaining a specific example 1 of the misalignment amount correction process. [Figure 30] 10A and 10B are diagrams for explaining a specific example 2 of the misalignment amount correction process. [Figure 31] 10A and 10B are diagrams for explaining a specific example 3 of the misalignment amount correction process. [Figure 32] 10A and 10B are diagrams for explaining a specific example 4 of the misalignment amount correction process. [Figure 33] 10A and 10B are diagrams for explaining a specific example 5 of the misalignment amount correction process. [Figure 34] 10A and 10B are diagrams for explaining a specific example 6 of the misalignment amount correction process. [Figure 35] 10 is a flowchart of another example of the operation of the cylindrical grinding device 1. [Figure 36] This is an oblique view showing the state in which the workpiece W is clamped between the spindle jaws 111 (spindle 101) and the tail jaws 121 (tail 102) with the central axis AXW of the workpiece W aligned with the rotation axis AX100 of the cylindrical grinding device body 100. [Figure 37] 10 is a flowchart of a surface orientation measurement process. [Figure 38] 1 is a diagram showing how an X-ray device 150 irradiates a workpiece W with X-rays to measure its surface orientation. [Figure 39]10 is a flowchart of a rotation angle / swing angle correction process. [Figure 40] 1 is a diagram showing how an X-ray device 150 irradiates a workpiece W with X-rays to measure its surface orientation. DETAILED DESCRIPTION OF THE INVENTION

[0028] (Embodiment 1) Hereinafter, a cylindrical grinding device 1 according to a first embodiment of the present disclosure will be described with reference to the accompanying drawings. Corresponding components in each drawing are given the same reference numerals, and redundant description will be omitted. <Cylindrical grinding machine 1> FIG. 1 is a perspective view of a cylindrical grinding machine 1. FIG.

[0029] As shown in Fig. 1, the cylindrical grinding machine 1 includes a cylindrical grinding machine main body 100, a workpiece transport device 200, and a control device 300 that controls the cylindrical grinding machine main body 100 and the workpiece transport device 200. In Fig. 1, the symbol AX 100 indicates a rotation axis (machining axis) of the cylindrical grinding machine body 100. Hereinafter, the rotation axis AX 100 It is called. <Work W> First, a configuration example of a cylindrical workpiece W to be machined will be described.

[0030] FIG. 2 is a perspective view of the workpiece W.

[0031] The workpiece W is, for example, a single crystal silicon ingot (for example, a silicon ingot that has been cylindrically ground) or a cylindrical workpiece (also called a block) cut from the single crystal silicon ingot. The workpiece W has a central axis AX W The workpiece W has a top end surface Wt and a bottom end surface Wb that are perpendicular to the workpiece W. The workpiece W has various diameters D and various lengths L (center axis AX of the workpiece W). W length in the direction) can be used. <Cylindrical grinding device body 100> Next, a configuration example of the cylindrical grinding device main body 100 will be described.

[0032] FIG. 3 is a schematic diagram of the cylindrical grinding device main body 100. As shown in FIG.

[0033] For the sake of convenience, the X, Y and Z axes are defined below as shown in Fig. 1 etc. The X axis is the rotation axis AX of the cylindrical grinding machine body 100. 100 The Y axis extends in the same direction as the X axis (horizontal axis). The Z axis extends in the direction perpendicular to the plane containing the X and Y axes (vertical axis).

[0034] The cylindrical grinding device main body 100 is a known cylindrical grinding device that can perform predetermined processing on the workpiece W so as to satisfy predetermined processing conditions. The processing conditions include, for example, the amount of grinding of the outer peripheral surface of the workpiece W, and whether or not additional processing such as a flat surface (OF) or a V-shaped notch is performed, and are input by an operator via, for example, the operating device 400. The predetermined processing is, for example, grinding the outer peripheral surface of the workpiece, or additional processing such as a flat surface (OF) or a V-shaped notch.

[0035] As shown in FIG. 3, the cylindrical grinding machine main body 100 includes a spindle unit 110, a tail unit 120, a grinding unit 130, a notch unit 140, an X-ray device 150, and the like.

[0036] The spindle unit 110 is installed in a state where it is fixed to the floor surface, while the tail unit 120 is installed in a state where it is movable in the X-axis direction.

[0037] FIG. 4(a) shows a state in which the workpiece W is clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121) (the central axis AX of the workpiece W). W and rotation axis AX 100 4(b) shows a state in which the workpiece W is clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121) (the central axis AX of the workpiece W is W is the rotation axis AX 100 (When there is an angle θ deviation from

[0038] As shown in FIG. 4(a), the workpiece W is clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121).

[0039] At this time, the mating surface between the spindle nozzle 111 and the rotation shaft rotated by the spindle motor 113 is spherical (see FIG. 4(a)). Therefore, as shown in FIG. 4(b), the central axis AX of the workpiece W W is the rotation axis AX 100 Even when the spindle mouthpiece 111 is tilted at an angle θ with respect to the top end surface Wt of the workpiece W, the spindle mouthpiece 111 rotates following the top end surface Wt of the workpiece W and comes into contact with (close contact with) the top end surface Wt.

[0040] Similarly, the mating surface between the tail nozzle 121 and the rotation shaft rotated by the tail motor 123 is spherical (see FIG. 4(a)). Therefore, as shown in FIG. 4(b), the central axis AX W is the rotation axis AX 100 Even when the tail jaw 121 is tilted at an angle θ with respect to the bottom end surface Wb of the workpiece W, the tail jaw 121 rotates following the bottom end surface Wb of the workpiece W and comes into contact with (close contact with) the bottom end surface Wb.

[0041] 3, the spindle unit 110 includes a spindle nozzle 111, a spindle body 112, and a spindle motor 113. The spindle nozzle 111 is rotated by the spindle motor 113 through a rotation axis AX 100 The main shaft motor 113 is attached to a rotation shaft that rotates around a center of gravity. The main shaft motor 113 is, for example, a servo motor.

[0042] The tail unit 120 includes a tail nozzle 121, a tail body 122, and a tail motor 123. The tail nozzle 121 is rotated by the tail motor 123 around a rotation axis AX 100 The tail motor 123 is attached to a rotary shaft that rotates around the center. The tail motor 123 is, for example, a servo motor. The main shaft motor 113 and the tail motor 123 are controlled so as to rotate in synchronization with each other.

[0043] The workpiece W is placed on its central axis AXW and rotation axis AX 100 It is desirable that the main shaft nozzle 111 and the tail nozzle 121 are clamped together (see FIG. 5(a)). W and rotation axis AX 100 There are cases where the main shaft nozzle 111 and the tail nozzle 121 are clamped in a state where they do not match (see FIG. 5(b) and FIG. 5(c)).

[0044] FIG. 5(a) shows the workpiece W on its central axis AX W and rotation axis AX 100 5(b) shows the state in which the workpiece W is clamped between the main shaft jaw 111 and the tail jaw 121 in a state in which the central axis AX W is the rotation axis AX 100 5(b) shows the state in which the workpiece W is clamped between the main shaft jaw 111 and the tail jaw 121 in a state where the workpiece W is misaligned at an angle θ with respect to the center point CP (center axis AX W The center point above is the rotation axis AX 100 The rectangle A1 drawn with dotted lines in Figure 5(b) represents the workpiece W in Figure 5(a).

[0045] Similarly, FIG. 5(c) shows the workpiece W moving along its central axis AX W is the rotation axis AX 100 5(c) shows the state in which the workpiece W is clamped between the main shaft jaw 111 and the tail jaw 121 in a state where the workpiece W is misaligned at an angle θ with respect to the center point CP (center axis AX W The center point above is the rotation axis AX 100 Not on top, but on the rotation axis AX 100 The workpiece W is located at a position offset ΔY in the Y-axis direction from the center point CP, and is offset by an angle θ around this center point CP. This offset angle θ and offset distance ΔY are corrected as described below. The rectangle A2 drawn with dotted lines in Figure 5(c) represents the workpiece W in Figure 5(b).

[0046] In addition, in Figures 5(b) and 5(c), Δct is the distance between the center of the top end face Wt and the rotation axis AX 100On the other hand, Δcb represents the distance between the center of the bottom end face Wb and the rotation axis AX 100 ΔY can be calculated by Δct - Δcb. In the case of Figure 5(b), that is, the center point CP of the workpiece W (central axis AX W The center point above is the rotation axis AX 100 On the other hand, in the case of Figure 5(c), that is, when the center point CP of the workpiece W is the true center, the relationship Δct = Δcb holds. W The center point above is the rotation axis AX 100 If not, there is a relationship of Δct>Δcb (or Δct<Δcb).

[0047] The grinding unit 130 is a device for grinding or orientation flat (orientation flat) the workpiece W clamped between the spindle nozzle 111 and the tail nozzle 121, and is held by a grinding base 132. The grinding unit 130 is equipped with a grinding wheel 131 and a grinding motor 133 that rotates the grinding wheel 131.

[0048] FIG. 6(a) is a diagram showing the state in which the circle grinding unit 130 performs circle grinding or orientation flat (orientation flat) processing on the workpiece W.

[0049] The grinding wheel 131 rotated by the grinding motor 133 cuts into the rotating workpiece W by the grinding amount x1 specified by input, thereby performing grinding (cylindrical grinding mode). On the other hand, the grinding unit 130 cuts into the non-rotating workpiece W by the grinding amount x1 specified by input, thereby performing orientation flat (orientation flat grinding mode).

[0050] The notch unit 140 is a device for performing notch processing on the workpiece W clamped between the spindle jaw 111 and the tail jaw 121, and is held by a notch frame 142. The notch unit 140 includes a notch grindstone 141, a notch motor 143 that rotates the notch grindstone 141, and the like.

[0051] 6(b) is a diagram showing the state in which the notch unit 140 performs notch processing on the workpiece W. The notch grindstone 141 rotated by the notch motor 143 cuts into the non-rotating workpiece W by an input grinding amount x 2 to perform orientation flat processing.

[0052] The X-ray device 150 is a device for measuring the crystal plane orientation of the workpiece W, and is provided so as to be movable in the X-axis direction. For example, a crystal orientation measurement device (manufactured by Toshiba IT Control Systems Corporation, Model SU-021) can be used as the X-ray device 150. This crystal orientation measurement device simultaneously measures the axial orientation of the cut plane (axial orientation) of the workpiece W before wafer processing and the crystal orientation of the V-notch. <Work transport device 200> Next, a configuration example of the workpiece transport device 200 will be described.

[0053] FIG. 7 is a perspective view of the workpiece transport device 200.

[0054] As shown in Figure 7, the workpiece transport device 200 includes a fixed frame 210 supported by four vertical pillars 201 extending in the Z-axis direction, a first movable frame 220 attached to the fixed frame 210 so as to be movable in the X-axis direction, a second movable frame 230 attached to the first movable frame 220 so as to be movable in the Y-axis direction, a third movable frame 240 attached to the second movable frame 230 so as to be movable in the Z-axis direction, and a clamping mechanism 250 fixed to the third movable frame 240. <Fixed Frame 210> The fixed frame 210 is a rectangular frame formed by combining a pair of first frames 211a and 211b extending in the X-axis direction and a pair of second frames 212a and 212b extending in the Y-axis direction.

[0055] The four vertical pillars 201 supporting the fixed frame 210 are fixed to the floor surface with anchors (not shown), with the length in the Z-axis direction of each pillar adjusted by an adjuster (not shown) provided at the bottom of the pillar so that the fixed frame 210 is horizontal. Each vertical pillar 201 is fixed to the cylindrical grinding machine main body 100 with a fastening member such as a bolt. <First movable frame 220> As shown in FIG. 7, the first movable frame 220 is a rectangular frame formed by combining a pair of third frames 221a, 221b extending in the X-axis direction and a pair of fourth frames 222a, 222b extending in the Y-axis direction.

[0056] The first movable frame 220 is attached to the fixed frame 210 so as to be slidable in the X-axis direction. Specifically, the first movable frame 220 is attached to guide rails 223a, 223b that are provided on the upper surface of the fixed frame 210 (first frames 211a, 211b) and extend in the X-axis direction so as to be slidable.

[0057] The first movable frame 220 moves in the X-axis direction along the guide rails 223a, 223b as a ball screw 224 connected to the first movable frame 220 and extending in the X-axis direction is rotated forward and backward by a drive motor 225 (e.g., a servo motor) attached to the fixed frame 210 (first frame 211a).

[0058] The guide rails 223a, 223b, the ball screw 224, and the drive motor 225 constitute a movable frame moving mechanism M that moves the first movable frame 220 in the X-axis direction. 220 The movable frame moving mechanism M 220 is an example of the first moving mechanism of the present disclosure. <Outer diameter measurement mechanism 270> FIG. 8 is a perspective view of the first movable frame 220 (including the outer diameter measuring mechanism 270) and its associated components (such as the second movable frame 230) extracted from FIG.

[0059] As shown in FIG. 8, an outer diameter measuring mechanism 270 is provided on the first movable frame 220 (fourth frame 222a).

[0060] The outer diameter measuring mechanism 270 is a device that measures the outer diameter of the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 (the outer diameters of the top end face Wt and the bottom end face Wb).

[0061] The outer diameter measuring mechanism 270 includes a lifting frame 271, measuring arms 272a and 272b, probes 273a and 273b, and a carriage 274 to which these are attached.

[0062] The carriage 274 is slidably attached to a guide rail 275 that is provided on the first movable frame 220 (fourth frame 222a) side and extends in the Z-axis direction.

[0063] The outer diameter measurement mechanism 270 (measuring probes 273a, 273b, etc.) moves (lifts and lowers) in the Z-axis direction along the guide rail 275 by rotating a ball screw (not shown) connected to the outer diameter measurement mechanism 270 and extending in the Z-axis direction forward and backward by a drive motor 276 (e.g., a servo motor) attached to the first movable frame 220 (third frame 221a) side.

[0064] Although not shown, the outer diameter measurement mechanism 270 includes a first probe moving mechanism that moves one measuring arm 272a (and probe 273a) in the Y-axis direction, and a second probe moving mechanism that moves the other measuring arm 272b (and probe 273b) in the Y-axis direction. The first probe moving mechanism and the second probe moving mechanism each include a probe drive motor (e.g., a servo motor). By controlling each probe drive motor, each of the probes 273a and 273b moves individually in the Y-axis direction.

[0065] According to the outer diameter measuring mechanism 270, the probes 273a, 273b move individually in the Y-axis direction and come into contact with the outer peripheral surface of the workpiece W, thereby making it possible to acquire the position (position data) of each contact point. Then, the control device 300 performs a predetermined calculation based on these positions (position data), thereby making it possible to measure (calculate) the outer diameter of the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 (the outer diameters of the top end face Wt and the bottom end face Wb of the workpiece W), etc. <Second movable frame 230> FIG. 9 is a perspective view (a perspective view from a different angle than FIG. 8) of the first movable frame 220 and the associated components (second movable frame 230, etc.) extracted from FIG.

[0066] As shown in FIG. 9, the second movable frame 230 is a rectangular cylindrical frame extending in the Z-axis direction.

[0067] The second movable frame 230 is attached to the first movable frame 220 so as to be slidable in the Y-axis direction. Specifically, the second movable frame 230 is attached to guide rails 231a, 231b that are provided on the upper surface of the first movable frame 220 (fourth frames 222a, 222b) and extend in the Y-axis direction so as to be slidable.

[0068] The second movable frame 230 moves in the Y-axis direction along the guide rails 231a, 231b as a ball screw 232 extending in the Y-axis direction and connected to the second movable frame 230 is rotated forward and backward by a drive motor 233 (e.g., a servo motor) attached to the first movable frame 220 (fourth frame 222b).

[0069] The guide rails 231a, 231b, the ball screw 232, and the drive motor 233 constitute a movable frame moving mechanism M that moves the second movable frame 230 in the Y-axis direction. 230 The movable frame moving mechanism M 230 is an example of the second movement mechanism of the present disclosure. <Third movable frame 240> 10 is a perspective view of the third movable frame 240 and its associated components (clamp mechanism 250, etc.) extracted from FIG.

[0070] The third movable frame 240 is a rectangular cylindrical frame extending in the Z-axis direction, and is disposed within the second movable frame 230, which is also a rectangular cylindrical frame extending in the Z-axis direction.

[0071] Third movable frame 240 is attached to second movable frame 230 so as to be slidable in the Z-axis direction. Specifically, third movable frame 240 is attached so as to be slidable on guide rails 241a, 241b (see FIG. 10) attached to one inner surface of second movable frame 230 and extending in the Z-axis direction, and on a guide rail (not shown) attached to the other inner surface.

[0072] The third movable frame 240 (and the clamping mechanism 250 attached thereto) moves in the Z-axis direction along the guide rails 241a, 241b, etc. as a ball screw (not shown) extending in the Z-axis direction and connected to the third movable frame 240 is rotated forward and backward by a drive motor 242 (e.g., a servo motor) attached to the second movable frame 230.

[0073] The guide rails 241a, 241b, a ball screw (not shown), and a drive motor 242 constitute a movable frame moving mechanism M that moves the third movable frame 240 (and the clamping mechanism 250 attached thereto) in the Z-axis direction. 240 The movable frame moving mechanism M 240 is an example of the third movement mechanism of the present disclosure. <Clamp mechanism 250> As shown in FIG. 10, a clamp mechanism 250 is attached to the lower end of the third movable frame 240 via a turning mechanism (a turning motor 260).

[0074] The clamp mechanism 250 is θ (See FIG. 11) and is attached to the buffer shaft mount base 245 so as to be rotatable about the θ axis AX θis the center (central axis AX) of the workpiece W clamped by the clamping mechanism 250, as will be described later. W 11 shows an example of a rotation mechanism (rotation motor 260) that rotates the clamp mechanism 250. The rotation mechanism (rotation motor 260) passes through the center of the clamp mechanism 250 and extends in the Z-axis direction.

[0075] Specifically, the clamp mechanism 250 is mounted in a state where the rotation shaft of the rotation motor 260 (for example, a hollow shaft motor) fixed to the top plate 262 is fixed to the buffer shaft mount base 245. As a result, the rotation motor 260 fixed to the top plate 262 rotates forward and backward, and the clamp mechanism 250 rotates along the θ axis AX θ The swing motor 260 swings at a predetermined angle (for example, angle θ; see FIGS. 5(b) and 5(c)) relative to the buffer shaft mount base 245 around the center. The swing motor 260 is an example of a swing mechanism of the present disclosure. Note that, instead of the swing motor 260 (for example, a hollow shaft motor), other drive mechanisms such as a worm gear, a wheel gear, and a general-purpose motor may be used as the swing mechanism.

[0076] The buffer shaft mount base 245 to which the clamp mechanism 250 is attached as described above is attached to the Z-axis mount base 243 so as to be slidable in the X-axis direction. Specifically, a slide rail 244 extending in the X-axis direction and provided on the upper surface of the buffer shaft mount base 245 is slidably engaged with the lower surface of the Z-axis mount base 243 fixed to the third movable frame 240. As a result, as will be described later, when the workpiece W (top end face Wt) clamped by the clamp mechanism 250 (pair of claws 251a, 251b) is pressed against the spindle nozzle 111, the buffer shaft mount base 245 (and the clamp mechanism 250 attached thereto) slides in the X-axis direction relative to the Z-axis mount base 243. As a result, when the workpiece W (top end face Wt) clamped by the clamp mechanism 250 (pair of claws 251a, 251b) is pressed against the spindle nozzle 111, excessive force is prevented from being applied to the clamp mechanism 250.

[0077] FIG. 12 is a perspective view of the clamping mechanism 250. As shown in FIG.

[0078] As shown in FIG. 12, the clamping mechanism 250 includes a pair of claws 251a and 251b for clamping the workpiece W, and a claw moving mechanism M for moving the pair of claws 251a and 251b in a direction toward or away from each other. 250 Equipped with.

[0079] One of the claws 251a is slidably attached to the lower end of the third movable frame 240 in the Y-axis direction. Specifically, one of the claws 251a is fixed to the lower surface of one of the movable frames 254a, which is slidably attached to guide rails 253a, 253b extending in the Y-axis direction and provided on the lower surface of a frame 252 fixed to the lower end of the third movable frame 240.

[0080] Similarly, the other claw portion 251b is also slidably attached to the lower end of the third movable frame 240 in the Y-axis direction. Specifically, the other claw portion 251b is fixed to the lower surface of the other movable frame 254b, which is slidably attached to guide rails 253a, 253b extending in the Y-axis direction and provided on the lower surface of frame 252 fixed to the lower end of third movable frame 240.

[0081] The pair of claws 251a, 251b move together with the movable frames 254a, 254b in a direction toward each other (in the Y-axis direction) along the guide rails 253a, 253b when a coaxial ball screw (not shown) extending in the Y-axis direction and coupled to movable frames 254a, 254b to which the pair of claws 251a, 251b are fixed is rotated forward by a drive motor 255 attached to the frame 252. Furthermore, the pair of claws 251a, 251b move together with the movable frames 254a, 254b in a direction away from each other (in the Y-axis direction) along the guide rails 253a, 253b when a coaxial ball screw (not shown) coupled to the movable frames 254a, 254b to which the pair of claws 251a, 251b are fixed is rotated reversely by the drive motor 255.

[0082] The guide rails 253a and 253b, the left and right coaxial ball screws (not shown), and the drive motor 255 constitute a claw moving mechanism M that moves the pair of claws 251a and 251b in a direction toward or away from each other. 250 Configure.

[0083] FIG. 13 is a schematic diagram showing a state in which the workpiece W is clamped by the pair of claws 251a and 251b.

[0084] As shown in FIG. 13, the pair of claw portions 251a, 251b each have a first contact portion 256a that contacts the lower portion of the workpiece W and a second contact portion 256b that contacts the upper portion of the workpiece W. Specifically, the pair of claw portions 251a, 251b each have tapered surfaces that open toward each other in a V-shape (the cross section in the YZ plane is V-shaped). These tapered surfaces function as the first contact portion 256a and the second contact portion 256b. Hereinafter, the first contact portion 256a and the second contact portion 256b will also be referred to as tapered surfaces 256a, 256b.

[0085] The pair of claws 251a, 251b are made of synthetic resin or metal with tapered surfaces 256a, 256b covered with synthetic resin. If the workpiece W is a cylindrical workpiece other than a silicon ingot, the pair of claws 251a, 251b may be made of metal with tapered surfaces 256a, 256b not covered with synthetic resin.

[0086] The pair of claws 251a, 251b move in directions approaching each other, and clamp the workpiece W in a state where the tapered surfaces 256a, 256b are in contact with the outer peripheral surface of the workpiece W (see FIG. 13).

[0087] The pair of claws 251a, 251b always rotates the central axis AX of the workpiece W regardless of the diameter of the workpiece W. W The workpiece W can be clamped while being positioned at the same position.

[0088] FIG. 14 is a perspective view of the sensor attached to the pair of claws 251a and 251b.

[0089] Furthermore, a sensor for measuring the length L (see FIG. 2) of the workpiece W is attached to the pair of claws 251a, 251b. As shown in FIG. 14, this sensor is composed of a light projector 257a attached to the bottom of one of the claws 251a and a light receiver 257b attached to the bottom of the other claw 251b. Conversely, the light projector 257a may be attached to the bottom of the other claw 251a, and the light receiver 257b may be attached to the bottom of one of the claws 251a.

[0090] FIG. 15 is a schematic diagram showing how the length L of the workpiece W is measured by the sensors attached to the pair of claws 251a and 251b.

[0091] With this sensor, for example, as shown in FIG. 15, the length L of the workpiece W can be measured by moving the clamping mechanism 250 (light projector 257a and light receiver 257b) in the direction of the thick arrow (X-axis direction) above the workpiece W, and calculating the position p1 (coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200) at which the workpiece W blocks the light ray from the light projector 257a that is received by the light receiver 257b (see FIG. 14), and the position p2 (coordinate position in the three-dimensional coordinate system of the workpiece conveying device 200) at which the light receiver 257b receives the light ray from the light projector 257a (see FIG. 14). <Control device 300> Next, the control device 300 will be described.

[0092] FIG. 16 is a diagram showing the configuration of a system including the control device 300.

[0093] The control device 300 includes a processor, RAM, ROM, etc., which are not shown. As shown in FIG. 16, the control device 300 includes a movable frame moving mechanism M that moves the first movable frame 220 in the X-axis direction. 220 a drive motor 225 that configures the second movable frame 230; and a movable frame moving mechanism M that moves the second movable frame 230 in the Y-axis direction. 230a drive motor 233 that configures the third movable frame 240 (and the clamp mechanism 250 attached thereto) in the Z-axis direction; 240 a drive motor 242 that configures the pair of claws 251a and 251b, a claw moving mechanism M that moves the pair of claws 251a and 251b in a direction toward or away from each other; 250 The drive motor 255 constituting the mechanism 250, the turning motor 260 that turns the clamp mechanism 250, the spindle unit 110 (spindle motor 113), the tail unit 120 (tail motor 123), the circle grinding unit 130 (circle grinding motor 133), the notch unit 140 (notch motor 143), the X-ray device 150, the turning motor 260, the outer diameter measuring mechanism 270 (drive motor 276, probe drive motor), the operating device 400, the pallet loader 500, and sensors (light projector 257a, light receiver 257b) are electrically connected.

[0094] The processor is, for example, a CPU. There may be one processor or multiple processors. For example, the processor executes a program read from ROM to RAM, thereby functioning as control means for controlling the drive motors 225, 233, 242, 255, the spindle unit 110 (spindle motor 113), the tail unit 120 (tail motor 123), the circle grinding unit 130 (circle grinding motor 133), the notch unit 140 (notch motor 143), the X-ray device 150, the turning motor 260, the outer diameter measuring mechanism 270 (drive motor 276, probe drive motor), etc.

[0095] Next, an example of the operation of the cylindrical grinding machine 1 having the above configuration will be described.

[0096] Fig. 17 is a flowchart of an example of the operation of the cylindrical grinding machine 1. Fig. 18 is a perspective view of the cylindrical grinding machine 1 installed in a factory. Figs. 19 and 20 are views for explaining the operation of the clamp mechanism 250. Figs. 21, 22(a), and 22(b) are views for explaining the operation of the spindle unit 110 and the tail unit 120.

[0097] 18, the reference symbols AGV1 and AGV2 indicate automated guided vehicles, and the reference symbol 500 indicates a pallet loader. Hereinafter, these vehicles will be referred to as the automated guided vehicles AGV1, AGV2, and pallet loader 500.

[0098] The automated guided vehicle AGV1 transports a pallet P1 carrying the workpiece W (workpiece W1 in Figure 18) to be processed from a designated location in a factory where cylindrical workpieces of various diameters and lengths (lengths in the direction of the central axis) are stored to a pallet loader 500 installed adjacent to the cylindrical grinding machine 1, and then hands over the pallet P1 to the pallet loader 500 by known means (workpiece W2 and pallet P2 in Figure 18).

[0099] The pallet loader 500 transports the pallet P2 received from the automatic guided vehicle AGV1 to a predetermined waiting position (in FIG. 18, workpiece W3 and pallet P3). The central axis AX of the workpiece W (in FIG. 18, workpiece W3) placed on the pallet P3 transported to the waiting position W extends in the X-axis direction.

[0100] An example of the operation of the cylindrical grinding device 1 installed in a factory will be described below with reference to FIG. 17 and other figures.

[0101] First, information about the workpiece W to be processed is acquired (step S10). The information about the workpiece W to be processed is, for example, the diameter D (see FIG. 2) of the workpiece W to be processed, and is attached to a predetermined location on the pallet as a barcode. For example, the information (barcode) about the workpiece W to be processed is read by a barcode reader (not shown) attached to a predetermined location on the pallet loader 500 when the pallet P1 is handed over to the pallet loader 500. The control device 300 acquires this read information about the workpiece W to be processed. Note that the control device 300 may also acquire information about the workpiece W to be processed that is sent from another device.

[0102] Next, the processing conditions for the workpiece W to be processed (for example, the amount of grinding of the outer peripheral surface of the workpiece W, whether or not additional processing such as a flat surface (OF) or a V-shaped notch is to be performed, etc.) are acquired (step S11). The processing conditions are input by an operator via the operation device 400, for example. The control device 300 acquires the input processing conditions. Note that the control device 300 may also acquire processing conditions transmitted from another device.

[0103] Next, the length L of the workpiece W (see FIG. 2) is measured (step S11A). For example, as shown in FIG. 15, the clamping mechanism 250 (the light projector 257a and the light receiver 257b) is moved in the direction of the thick arrow (X-axis direction) above the workpiece W. As a result, the length L of the workpiece W is measured by calculating the position p1 (coordinate position in the three-dimensional coordinate system of the workpiece conveyance device 200) at which the workpiece W (the workpiece W3 in FIG. 18) conveyed to the standby position blocks the light Ray (see FIG. 14) from the light projector 257a and is received by the light receiver 257b, and the position p2 (coordinate position in the three-dimensional coordinate system of the workpiece conveyance device 200) at which the light receiver 257b receives the light Ray (see FIG. 14) from the light projector 257a. This is realized by the control device 300 (processor) executing a program read from the ROM to the RAM.

[0104] Next, as shown in FIGS. 19(a) and 19(b), the clamping mechanism 250 is moved above the workpiece W (workpiece W3 in FIG. 18) that has been transported to the standby position (step S12).

[0105] Specifically, as shown in FIG. 19(a), in the Y-axis direction, the center Pa between one claw portion 251a and the other claw portion 251b is aligned with the central axis AX of the workpiece W. W 19(b), the clamping mechanism 250 is moved in the X-axis direction until the center Pb of the pair of claws 251a, 251b coincides with a vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be machined, which was automatically measured in step S11A). This is achieved by the control device 300 controlling the control motors (servo motors) 225, 233, 242.

[0106] Next, as shown in FIG. 20(a), in the Z-axis direction, the center Pa between one claw portion 251a and the other claw portion 251b is aligned with the central axis AX of the workpiece W. W The clamping mechanism 250 is moved (lowered) until it matches the distance D (step S13). This is achieved by the control device 300 controlling the drive motor 242. The moving distance d (lowering distance; see FIG. 20(a)) of the clamping mechanism 250 at this time can be calculated based on the diameter D of the workpiece W to be machined, etc., acquired in step S10.

[0107] 20(b), the pair of claws 251a, 251b are moved toward each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W, thereby clamping the workpiece W (step S14). This is achieved by the control device 300 controlling the control motor (servo motor) 255.

[0108] Next, the workpiece W clamped as described above is transported to the cylindrical grinding machine main body 100 (between the spindle jaws 111 and the tail jaws 121) (step S15).

[0109] In this case, in the cylindrical grinding machine 1, for example, by performing the same processes as steps S12 to S15 on the master work (not shown) before the process of step S10, the central axis AX of the master work is aligned between the main spindle jaw 111 and the tail jaw 121 of the cylindrical grinding machine main body 100. MW and a rotation axis AX of the cylindrical grinding machine body 100. 100 The clamping mechanism 250 that clamps the master workpiece is set to move so that the positions of the master workpieces match.

[0110] Therefore, in step S15, as shown in FIG. 21, first, the central axis AX of the master workpiece set as described above is aligned between the spindle jaw 111 and the tail jaw 121 of the cylindrical grinding machine body 100. MW and a rotation axis AX of the cylindrical grinding machine body 100.100 The clamping mechanism 250 clamping the workpiece W is moved so that the central axis AX of the master workpiece W matches the central axis AX of the master workpiece W. This is achieved by the control device 300 controlling the control motors (servo motors) 225, 233, and 242. Next, as shown in FIG. 22(b), the central axis AX of the master workpiece W set above is moved. MW and a rotation axis AX of the cylindrical grinding machine body 100. 100 The workpiece W in this state is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121) (step S16).

[0111] 22(a), the clamping mechanism 250 clamping the workpiece W is moved in the X-axis direction until the top end face Wt of the workpiece W abuts against the spindle jaws 111. This is achieved by the control device 300 controlling the control motor (servo motor) 225.

[0112] Next, as shown in FIG. 22(b), the tail unit 120 is moved in the X-axis direction so that the tail jaw 121 abuts against the bottom end face Wb of the workpiece W and applies pressure with sufficient force against the weight of the workpiece and external machining forces. This is achieved by the control device 300 controlling the tail motor 123. At this time, the control device 300 measures (calculates) the length L of the workpiece W based on the position at which the tail jaw 121 contacts the bottom end face Wb of the workpiece W. The length L of the workpiece W measured here is measured with higher accuracy than the length L of the workpiece W measured in step S11A. In the following description, this highly accurately measured length L will be used as the length L of the workpiece W.

[0113] Next, the pair of claws 251a, 251b release the clamping of the workpiece W (step S17). This is achieved by the control device 300 controlling the control motor (servo motor) 255.

[0114] Next, the control device 300 executes a deviation amount measurement process (step S17A).

[0115] FIG. 23 is a flowchart of the deviation amount measurement process.

[0116] The deviation amount measurement process is performed by rotating the rotation axis AX of the cylindrical grinding device main body 100. 100 This is a process of measuring (calculating) the amount of deviation (deviation angle θ and deviation distance ΔY; see FIGS. 5(b) and 5(c)) of the clamped workpiece W relative to the workpiece W.

[0117] The deviation amount measurement process (steps S17A1 to S17A3) is executed n times for the workpiece W. The following description will be given taking the case where n is 2 as an example. n (the number of measurements) is input by the operator via the operation device 400, for example. n is input at some timing before the deviation amount measurement process is executed. Note that n that is input in advance and stored in a predetermined storage unit may also be used. Note that n may be any integer equal to or greater than 2. In other words, the minimum value of n is 2. In addition, the maximum value of n is approximately 16, taking practicality into consideration.

[0118] When n is 2, the deviation amount measurement process (steps S17A1 to S17A3) is performed on the workpiece W (hereinafter referred to as the workpiece W) in the state of FIG. 24(a) (hereinafter referred to as the origin state or origin position). W3-W1 ), and the work W in a state where it has been rotated 180 degrees / n (here, 90 degrees) counterclockwise from the origin state (see Figure 24(b). Hereinafter, work W W2-W4 (It is executed twice in total) for each

[0119] First, the workpiece W in the origin state W3-W1 (See FIG. 24(a)), the processes from step S17A1 onward are executed.

[0120] That is, the outer diameter of the top-side end face Wt is measured (step S17A1). Specifically, in the Z-axis direction, the center between one probe 273a and the other probe 273b is located at the center of the workpiece W W3-W1 The rotation axis AX is located near the top end face Wt of 100Next, the measuring arms 272a and 272b are moved in a direction (Y-axis direction) in which they approach each other. W3-W1 The control device 300 then contacts the outer peripheral surface of the workpiece W near its top end face Wt. This acquires the positions (position data) of the contact points. W3-W1 The center position of the top end face Wt, and the center position and the rotation axis AX 100 Calculate the distance Δct between

[0121] Next, the outer diameter of the bottom-side end face Wb is measured (step S17A2). Figure 25 shows the outer diameter measuring mechanism 270 measuring the outer diameter of the bottom-side end face Wb. Note that for convenience of explanation, Figure 25 depicts the workpiece W in an unclamped state, but in reality, the outer diameter measuring mechanism 270 measures the workpiece W in a state where the spindle jaws 111 are in contact with the top-side end face Wt and the tail jaws 121 are in contact with the bottom-side end face Wb (i.e., in a clamped state). W3-W1 The outer diameter of the top end face Wt and the outer diameter of the bottom end face Wb are measured.

[0122] Specifically, in the Z-axis direction, the center between one probe 273a and the other probe 273b is located at the center of the workpiece W. W3-W1 The rotation axis AX is located near the bottom end face Wb of 100 Then, the outer diameter measuring mechanism 270 is lowered until it matches the workpiece W (see FIG. 25). Next, the measuring arms 272a and 272b are moved in a direction (Y-axis direction) in which they approach each other (see FIG. 25). As a result, the measuring probes 273a and 273b are moved toward the workpiece W. W3-W1 The control device 300 then contacts the outer peripheral surface of the workpiece W near its bottom end face Wb. This acquires the positions (position data) of the contact points. Based on these positions (position data), the control device 300 W3-W1 The center position of the bottom side end face Wb, and the distance between the center position and the rotation axis AX 100 Calculate the distance Δcb between

[0123] Next, the control device 300 calculates the amount of deviation based on the measurement value (position data) (step S17A3). Specifically, the control device 300 calculates the amount of deviation as a deviation angle θ and a deviation distance ΔY (see FIGS. 5(b) and 5(c)).

[0124] The angle θ is the rotation axis AX 100 The central axis AX of the workpiece W W (See Figure 5(b) and Figure 5(c)). ΔY is the deviation angle of the center point CP of the workpiece W (center axis AX W center point) and rotation axis AX 100 (See Figure 5(c)).

[0125] The deviation angle θ can be calculated as follows.

[0126] As shown in Figure 5(a), the central axis AX of the workpiece W W and rotation axis AX 100 When these two conditions are the same, the relationship Δct=Δcb=0 holds.

[0127] On the other hand, as shown in Figure 5(b), the rotation axis AX 100 Center axis AX of workpiece W W When the center point CP is tilted at an angle θ, the rotation axis AX 100 When the angle θ is above the target, the relationship is Δct = Δcb ≠ 0. In this case, the deviation angle θ can be calculated using the following equation 1. TIFF0007783671000001.tif15113 As shown in Figure 5(c), the rotation axis AX 100 Center axis AX of workpiece W W When the center point CP is tilted at an angle θ, the rotation axis AX 100 If the angle θ is not above the reference angle θ, the relationship is Δct>Δcb (or Δct<Δcb). In this case, the deviation angle θ can be calculated in the same manner as above.

[0128] Next, it is determined whether steps S17A1 to S17A3 have been executed n times (here, n=2 times) (step S17A4). If they have not been executed n times (step S17A4: No), the workpiece W is rotated 180 degrees / n (here, 90 degrees) (S17A5). W2-W4 (see FIG. 24(b)), steps S17A1 to S17A3 are executed in the same manner as above (second execution).

[0129] Then, when steps S17A1 to S17A3 have been executed n times (here, n=2 times) (step S17A4: Yes), the processing of FIG. 23 ends.

[0130] FIG. 26 shows the results of the process in FIG. 23 for each work W W3-W1 , W W2-W4 26 is a table summarizing the measured values ​​Δct, Δcb, θ, and ΔY (stored in a predetermined storage unit). W3-W1 , Δcb W3-W1 , θ W3-W1 , ΔY W3-W1 is Work W W3-W1 Similarly, the measured value Δct W2-W4 , Δcb W2-W4 , θ W2-W4 , ΔY W2-W4 is Work W W2-W4 This indicates that the measurement value was obtained by measuring

[0131] Next, returning to FIG. 17, it is determined whether the amount of deviation measured in step S17A is equal to or less than a set value (a predetermined threshold value) (step S17B).

[0132] If the determination result in step S17B is No, the control device 300 executes a deviation amount correction process (step S17C).

[0133] FIG. 27 is a flowchart of the deviation amount correction process.

[0134] The deviation amount correction process is performed by adjusting the rotation axis AX of the cylindrical grinding machine body 100 measured in step S17A. 100This is a process for correcting the amount of deviation (deviation angle θ and deviation distance ΔY; see FIGS. 5(b) and 5(c)) of the clamped workpiece W relative to the workpiece W.

[0135] Specific examples 1 to 6 of the deviation amount correction process will be described below. <Example 1> FIG. 29 is a diagram for explaining a specific example 1 of the misalignment amount correction process.

[0136] In Example 1, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121, as shown in FIG. 29(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 29(b)), the central axis AX of the workpiece W is W is the rotation axis AX 100 angle θ(θ W3-W1 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 It's above.

[0137] On the other hand, when viewed from the direction of the arrow Ar2 (see Figure 29(b)), the central axis AX of the workpiece W W and rotation axis AX 100 It is consistent with.

[0138] As a result of executing the displacement amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 29(c) are obtained. In FIG. 29(c), the measurement values ​​θ W3-W1 indicates a number other than 0.

[0139] First, the pair of claws 251a and 251b are moved in a direction approaching each other in the Y-axis direction, and the pair of claws 251a and 251b (respective tapered surfaces 256a and 256b) are brought into contact with the workpiece W. W3-W1 (See Figure 29(a) and Figure 29(b)) W3-W1 In this way, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1).W3-W1 With the clamped, the θ axis AX θ indicates the workpiece W clamped by the clamping mechanism 250. W3-W1 Center (center axis AX W It passes through the center of the top and extends in the Z-axis direction.

[0140] Next, the workpiece W of the main shaft nozzle 111 and the tail nozzle 121 W3-W1 The clamp on the signal is released (step S17C2).

[0141] Next, reloading is performed (step S17C3). W3-W1 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W3-W1 ) so that the θ axis AX θ The deviation angle θ(θ W3-W1 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W3-W1 ) is corrected.

[0142] Next, as shown in FIG. 22(b), the workpiece W W3-W1 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 Next, the clamping mechanism 250 clamping the workpiece W is moved so that the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 In this state, the workpiece W after the movement is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0143] Next, the pair of claws 251a and 251bW3-W1 The clamp on the signal is released (step S17C5).

[0144] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0145] If the result of the determination in step S17B is Yes, that is, if the workpiece W W3-W1 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX of the workpiece W W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (or almost match), so the processes in step S18 and onward are executed. On the other hand, if the determination result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes. <Example 2> FIG. 30 is a diagram for explaining a specific example 2 of the misalignment amount correction process.

[0146] In the second specific example, the workpiece W to be subjected to the deviation amount measurement process (step S17A) and the deviation amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121, as shown in FIG. 30(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 30(b)), the central axis AX of the workpiece W is W and rotation axis AX 100 It is consistent with.

[0147] On the other hand, when viewed from the direction of the arrow Ar2 (see Figure 30(b)), the central axis AX of the workpiece W W is the rotation axis AX 100 angle θ(θ W2-W4 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 It's above.

[0148] As a result of executing the misalignment measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 30(c) are obtained. In FIG. 30(c), the measurement values ​​θW2-W4 indicates a number other than 0.

[0149] First, Work W W3-W1 is rotated counterclockwise by 180 degrees / n (here, 90 degrees) from the origin state (see Figure 30(b)), and the workpiece W is W2-W4 This is achieved by the control device 300 controlling the main shaft motor 113 and the tail motor 123.

[0150] Next, the pair of claws 251a, 251b are moved in the direction approaching each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the workpiece W. W2-W4 (See Figure 30(d)) W2-W4 In this way, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W2-W4 With the clamped, the θ axis AX θ indicates the workpiece W clamped by the clamping mechanism 250. W2-W4 Center (center axis AX W It passes through the center of the top and extends in the Z-axis direction.

[0151] Next, the workpiece W of the main shaft nozzle 111 and the tail nozzle 121 W2-W4 The clamp on the signal is released (step S17C2).

[0152] Next, reloading is performed (step S17C3). W2-W4 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W2-W4 ) so that the θ axis AX θ The deviation angle θ(θ W2-W4 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W2-W4 ) is corrected.

[0153] Next, as shown in FIG. 22(b), the workpiece W W2-W4 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 Next, the clamping mechanism 250 clamping the workpiece W is moved so that the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 In this state, the workpiece W after the movement is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0154] Next, the pair of claws 251a and 251b W2-W4 The clamp on the signal is released (step S17C5).

[0155] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0156] If the result of the determination in step S17B is Yes, that is, if the workpiece W W2-W4 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX of the workpiece W W and the rotation axis AX of the cylindrical grinding device main body 100 100 On the other hand, if the determination result of step S17B is No, that is, if the workpiece W W2-W4 If the deviation amount measured again in step S17A is not less than or equal to the set value, the processes of steps S17C and S17A are repeatedly executed until the determination result of step S17B becomes Yes. <Example 3> FIG. 31 is a diagram for explaining a specific example 3 of the misalignment amount correction process.

[0157] In Example 3, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121, as shown in FIG. 31(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 31(b)), the central axis AX of the workpiece W is W is the rotation axis AX 100 angle θ(θ W3-W1 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 Not on top, but on the rotation axis AX 100 From the Y axis, ΔY(ΔY W3-W1 ) is in the wrong position.

[0158] On the other hand, when viewed from the direction of the arrow Ar2 (see Figure 31(b)), the central axis AX of the workpiece W W and rotation axis AX 100 It is consistent with.

[0159] As a result of executing the misalignment measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 31(c) are obtained. In FIG. 31(c), the measurement values ​​θ W3-W1 , ΔY W3-W1 indicates a number other than 0.

[0160] First, the pair of claws 251a and 251b are moved in a direction approaching each other in the Y-axis direction, and the pair of claws 251a and 251b (respective tapered surfaces 256a and 256b) are brought into contact with the workpiece W. W3-W1 (See Figure 31(a) and Figure 31(b)) W3-W1 In this way, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W3-W1 With the clamped, the θ axis AX θ indicates the workpiece W clamped by the clamping mechanism 250. W3-W1 Center (center axis AX W It passes through the center of the top and extends in the Z-axis direction.

[0161] Next, the workpiece W of the main shaft nozzle 111 and the tail nozzle 121 W3-W1 The clamp on the signal is released (step S17C2).

[0162] Next, reloading is performed (step S17C3). W3-W1 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W3-W1 ) so that the θ axis AX θ The deviation angle θ(θ W3-W1 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W3-W1 ) is corrected.

[0163] Along with this, Work W W3-W1 The clamp mechanism 250 clamping the object is moved by a deviation distance ΔY (ΔY W3-W1 ) is eliminated by adjusting the deviation distance ΔY(ΔY W3-W1 ) is moved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W3-W1 ) is corrected.

[0164] Next, as shown in FIG. 22(b), the workpiece W W3-W1 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 Next, the clamping mechanism 250 clamping the workpiece W is moved so that the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100In this state, the workpiece W after the movement is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0165] Next, the pair of claws 251a and 251b W3-W1 The clamp on the signal is released (step S17C5).

[0166] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0167] If the result of the determination in step S17B is Yes, that is, if the workpiece W W3-W1 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX of the workpiece W W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (or almost match), so the processes in step S18 and onward are executed. On the other hand, if the determination result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes. <Example 4> FIG. 32 is a diagram for explaining a fourth specific example of the misalignment amount correction process.

[0168] In Example 4, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121, as shown in FIG. 32(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 32(b)), the central axis AX of the workpiece W is W and rotation axis AX 100 It is consistent with.

[0169] On the other hand, when viewed from the direction of the arrow Ar2 (see Figure 32(b)), the central axis AX of the workpiece W W is the rotation axis AX 100 angle θ(θ W2-W4 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100Not on top, but on the rotation axis AX 100 from the Z axis to ΔY (ΔY W2-W4 ) is in the wrong position.

[0170] As a result of executing the misalignment measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 32(c) are obtained. In FIG. 32(c), the measurement values ​​θ W2-W4 , ΔY W2-W4 indicates a number other than 0.

[0171] First, Work W W3-W1 is rotated counterclockwise by 180 degrees / n (here, 90 degrees) from the origin state (see Figure 32(b)), and the workpiece W is W2-W4 This is achieved by the control device 300 controlling the main shaft motor 113 and the tail motor 123.

[0172] Next, the pair of claws 251a, 251b are moved in the direction approaching each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the workpiece W. W2-W4 (See Figure 32(d)) W2-W4 In this way, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W2-W4 With the clamped, the θ axis AX θ indicates the workpiece W clamped by the clamping mechanism 250. W2-W4 Center (center axis AX W It passes through the center of the top and extends in the Z-axis direction.

[0173] Next, the workpiece W of the main shaft nozzle 111 and the tail nozzle 121 W2-W4 The clamp on the signal is released (step S17C2).

[0174] Next, reloading is performed (step S17C3). W2-W4The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W2-W4 ) so that the θ axis AX θ The deviation angle θ(θ W2-W4 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W2-W4 ) is corrected.

[0175] Along with this, Work W W2-W4 The clamp mechanism 250 clamping the object is moved by a deviation distance ΔY (ΔY W2-W4 ) is eliminated by adjusting the deviation distance ΔY(ΔY W2-W4 ) is moved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W2-W4 ) is corrected.

[0176] Next, as shown in FIG. 22(b), the workpiece W W2-W4 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 Next, the clamping mechanism 250 clamping the workpiece W is moved so that the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 In this state, the workpiece W after the movement is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0177] Next, the pair of claws 251a and 251b W2-W4 The clamp on the signal is released (step S17C5).

[0178] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0179] If the result of the determination in step S17B is Yes, that is, if the workpiece W W2-W4 When the deviation measured in step S17A is less than or equal to the set value, the central axis AX of the workpiece W is W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (or almost match), so the processes in step S18 and onward are executed. On the other hand, if the determination result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes. <Example 5> FIG. 33 is a diagram for explaining a specific example 5 of the misalignment amount correction process.

[0180] In Example 5, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121, as shown in FIG. 33(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 33(b)), the central axis AX of the workpiece W is W is the rotation axis AX 100 angle θ(θ W3-W1 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 It's above.

[0181] On the other hand, when viewed from the direction of the arrow Ar2 (see Figure 33(b)), the central axis AX of the workpiece W W is the rotation axis AX 100 angle θ(θ W2-W4 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 It's above.

[0182] As a result of executing the misalignment amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 33(c) are obtained. In FIG. 33(c), the measurement values ​​θ W3-W1 , θ W2-W4 indicates a number other than 0.

[0183] First, the pair of claws 251a and 251b are moved in a direction approaching each other in the Y-axis direction, and the pair of claws 251a and 251b (respective tapered surfaces 256a and 256b) are brought into contact with the workpiece W. W3-W1 (See Figure 33(a) and Figure 33(b)) W3-W1 In this way, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W3-W1 With the clamped, the θ axis AX θ indicates the workpiece W clamped by the clamping mechanism 250. W3-W1 Center (center axis AX W It passes through the center of the top and extends in the Z-axis direction.

[0184] Next, the workpiece W of the main shaft nozzle 111 and the tail nozzle 121 W3-W1 The clamp on the signal is released (step S17C2).

[0185] Next, reloading is performed (step S17C3). W3-W1 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W3-W1 ) so that the θ axis AX θ The deviation angle θ(θ W3-W1 ) is rotated. This is achieved by the control device 300 controlling the rotation motor 260. As a result, as shown in FIG. 33(d), the angle θ (θ W3-W1 ) is corrected.

[0186] Next, as shown in FIG. 22(b), the workpiece W W3-W1is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 Next, the clamping mechanism 250 clamping the workpiece W is moved so that the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 In this state, the workpiece W after the movement is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0187] Next, the pair of claws 251a and 251b W3-W1 The clamp on the signal is released (step S17C5).

[0188] Next, Work W W3-W1 is rotated counterclockwise by 180° / n (here, 90°) from the state shown in Fig. 33(d), and the work W W2-W4 The state is as follows.

[0189] Next, similarly to step S17C1, the workpiece W is clamped by the clamping mechanism 250. W2-W4 Then, the workpiece W is clamped. W2-W4 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W2-W4 ) so that the θ axis AX θ The deviation angle θ(θ W2-W4 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W2-W4 ) is corrected.

[0190] Next, as shown in FIG. 22(b), the workpiece W W2-W4is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 Next, the clamping mechanism 250 clamping the workpiece W is moved so that the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 In this state, the workpiece W after the movement is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0191] Next, the pair of claws 251a and 251b W2-W4 The clamp on the signal is released (step S17C5).

[0192] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0193] If the result of the determination in step S17B is Yes, that is, if the workpiece W W3-W1 If the deviation measured again in step S17A is less than or equal to the set value, and the work W W2-W4 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX of the workpiece W W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (or almost match), so the processes in step S18 and onward are executed. On the other hand, if the determination result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes. <Example 6> FIG. 34 is a diagram for explaining a specific example 6 of the misalignment amount correction process.

[0194] In Example 6, the workpiece W to be subjected to the misalignment amount measurement process (step S17A) and the misalignment amount correction process (step S17c) is clamped between the spindle jaw 111 and the tail jaw 121, as shown in FIG. 34(a). At that time, when viewed from the direction of the arrow Ar1 (see FIG. 34(b)), the central axis AX of the workpiece W is W is the rotation axis AX 100 angle θ(θ W3-W1 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 Not on top, but on the rotation axis AX 100 From the Y axis, ΔY(ΔY W3-W1 ) is in the wrong position.

[0195] On the other hand, when viewed from the direction of the arrow Ar2 (see Figure 34(b)), the central axis AX of the workpiece W W is the rotation axis AX 100 angle θ(θ W2-W4 ) is misaligned. Also, the center point CP of the workpiece W (center axis AX W The center point above is the rotation axis AX 100 Not on top, but on the rotation axis AX 100 from the Z axis to ΔY (ΔY W2-W4 ) is in the wrong position.

[0196] As a result of executing the misalignment amount measurement process (step S17A) on the clamped workpiece W as described above, the measurement values ​​shown in FIG. 34(c) are obtained. In FIG. 34(c), the measurement values ​​θ W3-W1 , θ W2-W4 , ΔY W3-W1 , ΔY W2-W4 indicates a number other than 0.

[0197] First, the pair of claws 251a and 251b are moved in a direction approaching each other in the Y-axis direction, and the pair of claws 251a and 251b (respective tapered surfaces 256a and 256b) are brought into contact with the workpiece W. W3-W1 (See Figure 34(a) and Figure 34(b)) W3-W1In this way, the clamping mechanism 250 (the pair of claws 251a, 251b) clamps the workpiece W (step S17C1). W3-W1 With the clamped, the θ axis AX θ indicates the workpiece W clamped by the clamping mechanism 250. W3-W1 Center (center axis AX W It passes through the center of the top and extends in the Z-axis direction.

[0198] Next, the workpiece W of the main shaft nozzle 111 and the tail nozzle 121 W3-W1 The clamp on the signal is released (step S17C2).

[0199] Next, reloading is performed (step S17C3). W3-W1 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W3-W1 ) so that the θ axis AX θ The deviation angle θ(θ W3-W1 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W3-W1 ) is corrected.

[0200] Along with this, Work W W3-W1 The clamp mechanism 250 clamping the object is moved by a deviation distance ΔY (ΔY W3-W1 ) is eliminated by adjusting the deviation distance ΔY(ΔY W3-W1 ) is moved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W3-W1 ) is corrected.

[0201] Next, as shown in FIG. 22(b), the workpiece W W3-W1 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction Wand a rotation axis AX of the cylindrical grinding machine body 100. 100 Next, the clamping mechanism 250 clamping the workpiece W is moved so that the angle θ (θ W3-W1 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 In this state, the workpiece W after the movement is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0202] Next, the pair of claws 251a and 251b W3-W1 The clamp on the signal is released (step S17C5).

[0203] Next, Work W W3-W1 is rotated counterclockwise by 180° / n (here, 90°) from the state shown in Fig. 34(d), and the workpiece W W2-W4 The state is as follows.

[0204] Next, similarly to step S17C1, the workpiece W is clamped by the clamping mechanism 250. W2-W4 Then, the workpiece W is clamped. W2-W4 The clamp mechanism 250 that clamped the object is then rotated to the position corresponding to the deviation angle θ (θ W2-W4 ) so that the θ axis AX θ The deviation angle θ(θ W2-W4 This is achieved by the control device 300 controlling the rotation motor 260. As a result, the angle θ (θ W2-W4 ) is corrected.

[0205] Along with this, Work W W2-W4 The clamp mechanism 250 clamping the object is moved by a deviation distance ΔY (ΔY W2-W4 ) is eliminated by adjusting the deviation distance ΔY(ΔY W2-W4 ) is moved by the control device 300 controlling the drive motor 233. As a result, the distance ΔY (ΔY W2-W4 ) is corrected.

[0206] Next, as shown in FIG. 22(b), the workpiece W W3-W1 is clamped between the spindle jaws 111 and the tail jaws 121 (step S17C4). That is, first, the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 Next, the clamping mechanism 250 clamping the workpiece W is moved so that the angle θ (θ W2-W4 ) Central axis AX of workpiece W after correction W and a rotation axis AX of the cylindrical grinding machine body 100. 100 In this state, the workpiece W after the movement is clamped between the spindle 101 (spindle jaw 111) and the tail 102 (tail jaw 121).

[0207] Next, the pair of claws 251a and 251b W2-W4 The clamp on the signal is released (step S17C5).

[0208] Next, returning to FIG. 17, the processes of steps S17A and S17B are executed again.

[0209] If the result of the determination in step S17B is Yes, that is, if the workpiece W W3-W1 If the deviation measured again in step S17A is less than or equal to the set value, and the work W W2-W4 If the deviation measured again in step S17A is less than or equal to the set value, the central axis AX of the workpiece W W and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (or almost match), so the processes in step S18 and onward are executed. On the other hand, if the determination result in step S17B is No, the processes in steps S17C and S17A are repeatedly executed until the determination result in step S17B becomes Yes.

[0210] Next, the processing from step S18 onwards will be described.

[0211] That is, if the determination result in step S17B is Yes, predetermined machining is performed on the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 so as to satisfy the machining conditions acquired in step S11 (step S18). For example, the outer peripheral surface of the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 is ground.

[0212] Then, when the predetermined processing of the workpiece W to be processed (for example, grinding the outer surface of the workpiece, additional processing such as flattening (OF) or V-shaped notches) is completed (step S19: Yes), the processed workpiece W is clamped by the clamping mechanism 250 as described above, and the clamped processed workpiece W is transported to a predetermined location (for example, pallet P4 in Figure 18) (step S20).

[0213] The pallet P4 on which the machined workpiece W (workpiece W4 in FIG. 18) is placed is transferred together with the pallet P4 to the automatic guided vehicle AGV2 by, for example, a known means (workpiece W5 and pallet P5 in FIG. 18).

[0214] Then, the automatic guided vehicle AGV2 transports the pallet P5 on which the machined workpiece W (workpiece W5 in FIG. 18) is placed to the next process.

[0215] As described above, according to this embodiment, the central axis AX W and the rotation axis AX of the cylindrical grinding device main body 100 100 With these aligned, the workpiece W can be clamped between the spindle unit 110 (spindle jaw 111) and the tail unit 120 (tail jaw 121).

[0216] This is because the clamping mechanism 250 in a state where the workpiece W is clamped is rotated along the θ axis AX θ This is because the clamping mechanism 250 is provided with a rotation mechanism (rotation motor 260) that rotates the clamping mechanism 250 around a center (which passes through the center of the clamped workpiece W and extends in the Z-axis direction).

[0217] Furthermore, according to this embodiment, workpieces W of various lengths can be transported in a stable state at all times.

[0218] This is because the clamping mechanism 250 moves in the Y-axis direction until the center Pb of the pair of claws 251a, 251b coincides with the vertical line V2 passing through the center Pc of the workpiece W (the center of the length L of the workpiece W to be processed, which was automatically measured in step S11A) (step S12, see Figure 19(b)), and the clamping mechanism 250 (pair of claws 251a, 251b) clamps the center of the workpiece W in the Y-axis direction.

[0219] Next, a modified example will be described.

[0220] FIG. 28(a) is a diagram illustrating the movement directions of the movable frames 220, 230, and 240 of the cylindrical grinding machine 1, and FIG. 28(b) is a diagram illustrating the movement directions of the movable frames 220, 230, and 240 of the modified cylindrical grinding machine 1.

[0221] In the above embodiment, as shown in FIG. 28(a), the moving mechanism of the present disclosure is a movable frame moving mechanism M attached to the second movable frame 230, which moves the third movable frame 240 (and the clamping mechanism 250 attached thereto) in the Z-axis direction. 240 (an example of a first moving mechanism of the present disclosure), and a second movable frame 230 (a clamping mechanism 250 and a movable frame moving mechanism M 240 ) in the Y-axis direction, 230 (an example of a second moving mechanism of the present disclosure), and the first movable frame 220 (clamping mechanism 250, movable frame moving mechanism M 230 and the movable frame moving mechanism M 240 ) in the X-axis direction. 220 Although an example using (an example of the third moving mechanism of the present disclosure) and has been described, the present invention is not limited to this.

[0222] For example, as shown in FIG. 28(b), the moving mechanism of the present disclosure may be a moving frame moving mechanism M attached to the second moving frame 230, which moves the third moving frame 240 (and the clamping mechanism 250 attached thereto) in the Z-axis direction. 240 (an example of a first moving mechanism of the present disclosure), and a second movable frame 230 (a clamping mechanism 250 and a movable frame moving mechanism M 240 ) in the X-axis direction. 230 (an example of a second moving mechanism of the present disclosure), and the first movable frame 220 (clamping mechanism 250, movable frame moving mechanism M 230 and the movable frame moving mechanism M 240 ) in the Y-axis direction. 220 (an example of the third movement mechanism of the present disclosure) may be used.

[0223] Hereinafter, another example of the operation of the cylindrical grinding device 1 will be described with reference to FIG.

[0224] Fig. 35 is a flowchart of another example of the operation of the cylindrical grinding machine 1. Fig. 36 is a flowchart of the operation of the cylindrical grinding machine 1. W and a rotation axis AX of the cylindrical grinding machine body 100. 100 10 is a perspective view showing a state in which the workpiece W is clamped between the spindle jaws 111 (spindle 101) and the tail jaws 121 (tail 102) in a state in which the spindle jaws 111 (spindle 101) and the tail jaws 121 (tail 102) are aligned.

[0225] In Figure 36, symbol AX C indicates the crystal axis of the workpiece W, which is a silicon crystal (single crystal). Hereinafter, the crystal axis AX C The crystal plane and the crystal axis AX C has the meaning as written in the rectangle in FIG.

[0226] As a result of steps S10 to S17C shown in FIG. 17, the central axis AX of the workpiece W W and a rotation axis AX of the cylindrical grinding machine body 100. 100When the workpiece W is clamped between the spindle jaw 111 (spindle 101) and the tail jaw 121 (tail 102) in a state where the crystal axis AX C indicates the rotation axis AX of the cylindrical grinding machine body 100. 100 Therefore, in order to correct this deviation, the crystal axis AX C and a rotation axis AX of the cylindrical grinding machine body 100. 100 In order to make them match (approximately match), the process of FIG. 35 is executed.

[0227] In the process of FIG. 35, steps S10 to S17C shown in FIG. 17 are executed, the determination result of step S17B is Yes, and the central axis AX of the workpiece W is W and a rotation axis AX of the cylindrical grinding machine body 100. 100 This is performed when the workpiece W is clamped between the spindle jaws 111 (spindle 101) and the tail jaws 121 (tail 102) in a state where they are aligned (approximately aligned) (see FIG. 36).

[0228] First, it is determined whether or not a provisional notch is present (step S30). This is achieved, for example, by irradiating the workpiece W with a laser from a laser sensor (not shown) and rotating the workpiece 360° to search for the presence or absence of a provisional notch (notch groove). If the determination result in step S30 is No, provisional notch processing is performed on the workpiece W (step S31). Note that the location where provisional notch processing is performed is automatically determined based on the measurement results of the X-ray device 150. The provisional notch processing is performed by the notch unit 140.

[0229] Next, the control device 300 executes a surface orientation measurement process (step S32).

[0230] FIG. 37 is a flowchart of the surface orientation measurement process.

[0231] The surface orientation measurement process is performed on the rotation axis AX of the cylindrical grinding machine body 100. 100 Crystal axis AX relative to C This is a process of measuring (calculating) the deviation amount (deviation rotation angle Δδ and swing angle Δφ).

[0232] The plane orientation measurement process (steps S321 to S324) is executed n times for the workpiece W. The following description will be given taking the case where n is 2 as an example. n (the number of measurements) is input by an operator via the operation device 400, for example. n is input at any timing before the plane orientation measurement process is executed. Note that n that has been input in advance and stored in a predetermined storage unit may also be used. Note that n may be any integer equal to or greater than 2. In other words, the minimum value of n is 2.

[0233] First, the control device 300 rotates the workpiece W until the provisional notch N1 is positioned at the reference position (step S321).

[0234] Next, the plane orientation is measured (step S322). This is achieved by the X-ray device 150. The X-ray device 150 measures the plane orientation by irradiating X-rays (towards the workpiece center Wc) onto surface A of the workpiece W (see FIG. 36) positioned at the reference position as described above. The leftmost drawing in FIG. 38 and FIG. 40 are diagrams showing how the X-ray device 150 measures the plane orientation by irradiating X-rays onto the workpiece W. The plane orientation measurement for the workpiece center Wc is performed when the workpiece center Wc is aligned with the θ-axis AX θ Therefore, when performing the correction described later, the clamp mechanism 250 with the workpiece W clamped is moved along the θ axis AX θ This is because even if the wafer is rotated around the center, the distance to the X-ray device 150 does not change. The X-ray device 150 outputs the plane orientation and correction value as the measurement value for the A plane (plane orientation and correction value of the C plane based on the notch).

[0235] Next, it is determined whether step S322 has been executed n times (here, n=2 times) (step S323). If it has not been executed n times (step S323: No), the workpiece W is rotated by a predetermined angle (e.g., 90 degrees) (S324), and X-rays are irradiated (toward the workpiece center Wc) (see the center diagram in FIG. 38) onto surface B (see FIG. 36) of the workpiece W after the rotation by the predetermined angle (e.g., 90 degrees) to measure the surface orientation (step S322) (second execution). The X-ray device 150 outputs the surface orientation and correction value (the surface orientation and correction value of surface C based on the notch) as the measurement value for surface B.

[0236] Then, when step S322 is executed n times (here, n=2 times) (step S323: Yes), the axial misalignment rotation angle Δδ and the swing angle Δφ are calculated based on the measurement values ​​in step S322 (step S325). The X-ray device 150 outputs the calculated axial misalignment rotation angle Δδ and the swing angle Δφ. The axial misalignment rotation angle Δδ is calculated based on the central axis AX of the workpiece W. W And the straight line L1 passing through the temporary notch N1 and the central axis AX of the workpiece W W and the straight line L2 passing through the main notch (main notch planned location N2) (see FIG. 38). On the other hand, the workpiece W that is the target of the swing angle correction process (step S34) is clamped between the spindle jaws 111 and the tail jaws 121, and when viewed from the direction of the arrow Ar3 (see FIG. 38), the crystal axis AX of the workpiece W C is the rotation axis AX 100 The swing angle is shifted by Δφ (see Figure 35).

[0237] Next, returning to FIG. 35, it is determined whether the deviation amount (swing angle Δφ) measured in step S32 is equal to or less than a set value (a predetermined threshold value) (step S33).

[0238] If the determination result in step S33 is No, the control device 300 executes a rotation angle / swing angle correction process (step S34).

[0239] The rotation angle / swing angle correction process is performed by correcting the rotation axis AX of the cylindrical grinding machine body 100 measured (calculated) in step S32. 100 Crystal axis AX relative to C This is a process for correcting the deviation amount (deviation rotation angle Δδ and swing angle Δφ).

[0240] FIG. 39 is a flowchart of the rotation angle / swing angle correction process.

[0241] First, the control device 300 rotates the workpiece W until the misalignment rotation angle of the plane orientation becomes horizontal (step S341). That is, as shown on the right side of Fig. 38, the control device 300 rotates the workpiece W by a predetermined angle (270°±misalignment rotation angle Δδ) until the actual notch (predetermined position N2 of the actual notch) is located at the reference position. The misalignment rotation angle Δδ is a correction value that corrects the amount of misalignment of the actual notch (predetermined position N2 of the actual notch) from the reference position.

[0242] Next, the pair of claws clamp the workpiece (step S342). Specifically, the pair of claws 251a, 251b are moved in a direction approaching each other in the Y-axis direction, and the pair of claws 251a, 251b (respective tapered surfaces 256a, 256b) are brought into contact with the outer peripheral surface of the workpiece W, thereby clamping the workpiece W. In this way, in a state where the clamping mechanism 250 (pair of claws 251a, 251b) clamps the workpiece W, the θ-axis AX θ is the workpiece W (central axis AX) clamped by the clamping mechanism 250. W It passes through the center of the top and extends in the Z-axis direction.

[0243] Next, the workpiece W is released from the clamping of the spindle jaws 111 and the tail jaws 121 (step S343).

[0244] Next, the clamping mechanism 250 that clamps the workpiece W is moved to a position where the angle of the plane orientation is corrected (step S344). Specifically, the clamping mechanism 250 is moved about the θ axis AX so as to cancel the swing angle Δφ calculated in step S325. θ This is achieved by the control device 300 controlling the rotation motor 260. As a result, the deviation (swing angle Δφ) is corrected. The swing angle Δφ is the angle AX of the crystal axis of the workpiece W. C The cylindrical grinding machine body 100 has a rotation axis AX 100 This is a correction value for correcting the amount of deviation relative to the

[0245] Next, the workpiece W whose deviation (swing angle Δφ) has been corrected as described above is clamped between the spindle jaws 111 and the tail jaws 121 (step S345). C and a rotation axis AX of the cylindrical grinding machine body 100. 100 With these aligned, the shaft is clamped between the main shaft nozzle 111 (main shaft 101) and the tail nozzle 121 (tail 102).

[0246] Next, the clamping of the workpiece W by the pair of claws 251a, 251b is released (step S346).

[0247] Next, returning to FIG. 35, the processes of steps S32 and S33 are executed again.

[0248] If the determination result in step S33 is Yes, that is, if the deviation amount (swing angle Δφ) measured again for the workpiece W in step S32 is ≦ the set value (predetermined threshold value), the crystal axis AX C and the rotation axis AX of the cylindrical grinding device main body 100 100 This means that the two match (approximately match), so the processes from step S35 onwards are executed. On the other hand, if the determination result of step S33 is No, the processes of steps S34 and S32 are repeatedly executed until the determination result of step S33 becomes Yes.

[0249] Next, the processing from step S35 onwards will be described.

[0250] That is, if the determination result in step S33 is Yes, the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 is subjected to circular grinding so as to satisfy the machining conditions acquired in step S11 (step S35). That is, the outer peripheral surface of the workpiece W clamped between the spindle jaws 111 and the tail jaws 121 is ground. In Figure 35 "Circular grinding", the hatched area represents the area to be circularly ground (grinded). This is achieved by the circular grinding unit 130 (see Figure 6(a)).

[0251] Next, notch machining (main notch machining) is performed on the workpiece (step S36). The location where the notch machining is performed (main notch planned location N2) is determined based on the measurement results of the X-ray device 150. The notch machining is performed by the notch unit 140. Specifically, the workpiece W is rotated another 90° from the state at the right end of FIG. 38 so that the location where the notch machining is performed (main notch planned location N2) faces the notch unit 140, and then the main notch is formed at the main notch planned location N2 by the notch unit 140 (see FIG. 6(b)). As a result, the main notch is aligned with the crystal axis AX c exactly along the crystal axis AX c It can be formed on the workpiece W in a direction perpendicular to the crystal planes at both ends of the workpiece W.

[0252] Then, when the circular grinding and notch processing (main notch processing) on ​​the workpiece W is completed, the processed workpiece W is clamped by the clamping mechanism 250 in the same manner as described above, and the clamped processed workpiece W is transported to a predetermined location (for example, pallet P4 in Figure 18) (step S37).

[0253] All the numerical values ​​shown in the above embodiment are merely examples, and it goes without saying that other appropriate numerical values ​​can be used.

[0254] The above-described embodiments are merely examples in all respects. The present invention should not be construed as being limited by the description of the above-described embodiments. The present invention can be implemented in various other forms without departing from the spirit or main characteristics thereof. [Explanation of symbols]

[0255] 1...Cylindrical grinding device 100... Cylindrical grinding device body 110... Main spindle unit 111...Main shaft nozzle 112...Main shaft body 113... Main shaft motor 120...Tail unit 121...Tail nozzle 122...Tail body 123...Tail motor 130...Enken Unit 131...Circular grinding stone 132…Enken Base 133...Enken Motor 140...Notch unit 141...Notched grinding wheel 142...Notch frame 143...Notch motor 150...X-ray equipment 200...Work transport device 201...Vertical column 210...Fixed frame 211a...1st frame 211b...1st frame 212a...2nd frame 212b...2nd frame 220...1st movable frame 221a...3rd frame 221b...3rd frame 222a...4th frame 222b...4th frame 223a...Guide rail 223b...Guide rail 224...Ball screw 225...Drive motor 230...Second movable frame 231a...Guide rail 231b...Guide rail 232...Ball screw 233...Drive motor 240...Third moving frame 241a, 241b... Guide rails 242...Drive motor 243...Z-axis mount base 244...Slide rail 245...Buffer shaft mount base 250...Clamp mechanism 251a, 251b...Claw part 252...frame 253a...Guide rail 253b...Guide rail 254a...movable frame 254b...movable frame 255...Drive motor 256a...First contact portion (tapered surface) 256b...First contact part (tapered surface) 257a...Floodlight 257b…Receiver 260...Turning motor 262...Top plate 270…Outer diameter measurement mechanism 271...Lifting frame 272a, 272b...Measuring arms 273a, 273b...Measuring point 274...Carriage 275...Guide rail 276...Drive motor 300...Control device 400...Operating device 500...Pallet loader A1, A2...Rectangle AGV1, AGV2...Automated guided vehicles AX 100 …Rotation axis AX W ...center axis AX θ ...θ axis AX MW …Master work central axis CP…Center point M 220 ... Movable frame movement mechanism M 230 ... Movable frame movement mechanism M 240 ... Movable frame movement mechanism M 250 …Claw movement mechanism P1~P5...Palettes W…Work Wt...Top end surface Wb: Bottom end d…Distance traveled x1, x2...grinding amount θ...deviation angle ΔY...deviation distance

Claims

1. A workpiece processing method in which a workpiece transport device is used to correct the amount of misalignment of a crystal axis relative to the rotation axis of a cylindrical grinding machine body, and then circular grinding is performed on the workpiece after the correction, The workpiece is cylindrical and has a crystal plane orientation and a crystal axis, When the rotation axis of the cylindrical grinding machine body is defined as the X-axis, which is a horizontal axis, the axis perpendicular to the X-axis is defined as the Y-axis, which is a horizontal axis, and the axis perpendicular to a plane including the X-axis and Y-axis is defined as the Z-axis, which is a vertical axis, the workpiece transportation device includes a clamping mechanism that clamps the workpiece, and a turning mechanism that turns the clamping mechanism, with the workpiece clamped, around a θ-axis extending in the Z-axis direction, a first holding step in which the cylindrical grinding device body holds the workpiece in a state in which a rotation axis of the cylindrical grinding device body coincides with a central axis of the workpiece and the workpiece is rotatable around the rotation axis of the cylindrical grinding device body; an X-ray device irradiating the workpiece with X-rays and outputting a deviation amount of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body; a first clamping step in which the clamping mechanism clamps the workpiece; a holding release step in which the cylindrical grinding device main body releases the workpiece from being held by the cylindrical grinding device main body; a misalignment correction step in which the turning mechanism turns the clamping mechanism in a state in which the workpiece is clamped so as to eliminate the misalignment; a second holding step in which the cylindrical grinding device body holds the workpiece, the deviation of which has been eliminated and the rotation axis of the cylindrical grinding device body and the crystal axis of which are aligned, in a state in which the workpiece can rotate around the rotation axis of the cylindrical grinding device body; a grinding process for grinding the workpiece, which is rotating around the rotation axis of the cylindrical grinding device body and whose deviation has been eliminated.

2. A workpiece processing method as described in claim 1, in which the deviation amount output process, the first clamping process, the hold release process, the deviation amount correction process, and the second holding process are repeatedly executed until the deviation amount becomes equal to or less than a set value.

3. A program for implementing a workpiece processing method in which a workpiece conveying device is used to correct the amount of deviation of a crystal axis relative to the rotation axis of a cylindrical grinding device body, and then circular grinding is performed on the workpiece after the correction, The workpiece is cylindrical and has a crystal plane orientation and a crystal axis, When the rotation axis of the cylindrical grinding machine body is defined as the X-axis, which is a horizontal axis, the axis perpendicular to the X-axis is defined as the Y-axis, which is a horizontal axis, and the axis perpendicular to a plane including the X-axis and Y-axis is defined as the Z-axis, which is a vertical axis, the workpiece transportation device includes a clamping mechanism that clamps the workpiece, and a turning mechanism that turns the clamping mechanism, with the workpiece clamped, around a θ-axis extending in the Z-axis direction, a first holding step in which the cylindrical grinding device body holds the workpiece in a state in which a rotation axis of the cylindrical grinding device body and a central axis of the workpiece coincide with each other and the workpiece is rotatable around the rotation axis of the cylindrical grinding device body; an X-ray device irradiating the workpiece with X-rays and outputting a deviation amount of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding device body; a first clamping step in which the clamping mechanism clamps the workpiece; a holding release step in which the cylindrical grinding device main body releases the workpiece from being held by the cylindrical grinding device main body; a misalignment amount correcting step in which the turning mechanism turns the clamping mechanism in a state in which the workpiece is clamped so as to eliminate the misalignment amount; a second holding step in which the cylindrical grinding device body holds the workpiece, the deviation of which has been eliminated and the rotation axis of the cylindrical grinding device body and the crystal axis of which are aligned, in a state in which the workpiece can rotate around the rotation axis of the cylindrical grinding device body; a cylindrical grinding step of performing a circular grinding process on the workpiece rotating around the rotation axis of the cylindrical grinding device body and having the deviation amount eliminated.

4. A cylindrical grinding machine that corrects the amount of misalignment of a crystal axis relative to the rotation axis of the cylindrical grinding machine body and performs circular grinding on the workpiece after the correction, A workpiece transport device; a cylindrical grinding device body that holds the workpiece such that the rotation axis of the cylindrical grinding device body and the central axis of the workpiece coincide with each other and the workpiece can rotate around the rotation axis of the cylindrical grinding device body; A circle research unit; The workpiece is cylindrical and has a crystal plane orientation and a crystal axis, When the rotation axis of the cylindrical grinding machine body is defined as the X-axis, which is a horizontal axis, the axis perpendicular to the X-axis is defined as the Y-axis, which is a horizontal axis, and the axis perpendicular to a plane including the X-axis and Y-axis is defined as the Z-axis, which is a vertical axis, the workpiece transportation device includes a clamping mechanism that clamps the workpiece, and a turning mechanism that turns the clamping mechanism, with the workpiece clamped, around a θ-axis extending in the Z-axis direction, the cylindrical grinding device body releases the holding of the workpiece by the clamping mechanism after the clamping mechanism has clamped the workpiece; the turning mechanism turns the clamping mechanism in a state in which the workpiece is clamped so as to eliminate a deviation amount of the crystal axis of the workpiece relative to the rotation axis of the cylindrical grinding machine body, the deviation amount being output by the X-ray device irradiating the workpiece with X-rays; the cylindrical grinding device body holds the workpiece, the deviation of which has been eliminated and the rotation axis of the cylindrical grinding device body and the crystal axis of which are aligned, in a state in which the workpiece can rotate around the rotation axis of the cylindrical grinding device body; The cylindrical grinding unit is a cylindrical grinding device that performs a circular grinding process on the workpiece that is rotating around the rotation axis of the cylindrical grinding device main body and whose misalignment has been eliminated.

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