Systems and methods for sealed microvalves for use in jetting assemblies

Abstract

To provide an ejection assembly comprising a micro valve used in industrial marking and coding.SOLUTION: A micro valve 230 comprises an orifice plate 250 having a first surface, a second surface, and an orifice 260 extending from the first surface to the second surface. An actuation beam 240 is disposed apart from the orifice plate. The actuation beam comprises a base part 306 and a cantilever beam part 308. The base part is separated by a predetermined distance from the orifice plate. The cantilever beam part extends from the base part so that its overlapping part may overlap with the orifice. The actuation beam can move between a closed position and an open position. The micro valve also comprises a sealing structure comprising a sealing member 290 disposed at the overlapping part of the cantilever beam part. When the actuation beam is at the closed position, the cantilever beam part is disposed so as to close the micro valve by sealing the orifice.SELECTED DRAWING: Figure 5A

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to and the benefit of U.S. Provisional Application No. 62 / 670,280, filed May 11, 2018, the disclosure of which is incorporated herein by reference in its entirety.

[0002] The present disclosure relates generally to the field of microvalves fabricated using microelectromechanical systems (MEMS) technology. More particularly, the present disclosure relates to jetting assemblies including microvalves used in industrial marking and coding. [Background technology]

[0003] Traditional printing technologies have several drawbacks. For example, continuous inkjet printers have certain defects that are difficult to eliminate. The process of generating droplets from the ink supply can, for example, cause the ink to drip in undesirable directions (e.g., away from the target), which can lead to maintenance requirements. Furthermore, the supply liquid is lost over time as a result of evaporation, requiring continuous replenishment. Other maintenance costs, such as repairing the orifice plate due to deterioration, are also required. The prior art documents relevant to the invention of this application are as follows (including documents cited in the international phase after the international filing date and documents cited when the application entered the national phase in other countries). (Prior art document) (Patent document) (Patent Document 1) U.S. Patent Application Publication No. 2014 / 333703 (Patent Document 2) JP-A-57-197176 (Patent Document 3) European Patent Application Publication No. 3187337 (Patent Document 4) U.S. Patent Application Publication No. 2011 / 073788 Summary of the Invention

[0004] In some embodiments, the microvalve includes an orifice plate having a first surface and a second surface. The orifice plate includes an orifice extending from the first surface to the second surface. The microvalve also includes an actuation beam spaced apart from the orifice plate. The actuation beam includes a base portion and a cantilever portion. The base portion is spaced a predetermined distance from the orifice plate. The cantilever portion extends from the base portion such that an overlapping portion of the cantilever portion overlaps the orifice. The actuation beam is movable between a closed position and an open position. The microvalve also includes a sealing structure including a sealing member disposed on an overlapping portion of the cantilever portion. When the actuation beam is in the closed position, the cantilever portion is positioned such that the sealing structure seals the orifice to close the microvalve.

[0005] Another embodiment relates to a method of constructing a microelectromechanical systems (MEMS) microvalve. The method includes providing an orifice plate having an orifice. The method also includes providing an actuation beam, the actuation beam having a spacer member and a sealing member attached thereto. The method also includes forming a portion of a sealing structure on either the orifice plate or the sealing member. After forming the portion of the sealing structure, the method also includes attaching the actuation beam to the orifice plate, and the sealing member is aligned with the orifice plate such that the sealing structure forms a seal between the orifice and a volume proximate to the actuation beam in a closed position of the actuation beam.

[0006] Another embodiment relates to a jetting assembly. The jetting assembly includes a valve body including an orifice plate having a plurality of orifices extending therethrough. The jetting assembly also includes a plurality of microvalves. Each of the plurality of microvalves includes a spacer member disposed on the orifice plate to displace a corresponding orifice. Each of the plurality of microvalves also includes an actuation beam including a base portion disposed on the spacer member and a cantilever portion extending from the base portion toward a corresponding orifice, with an overlapping portion overlapping the corresponding orifice. The actuation beam is configured to move between a closed position in which the cantilever portion bends toward the orifice and an open position in which the cantilever portion bends away from the orifice. Each of the plurality of microvalves also includes a sealing structure including a sealing member attached to the overlapping portion and extending toward the corresponding orifice. The jetting assembly also includes a fluid manifold coupled to each of the plurality of microvalves, defining a fluid reservoir for each microvalve.

[0007] Some embodiments relate to a microvalve including an orifice plate having a first surface and a second surface. The orifice plate includes an orifice extending from the first surface to the second surface. An actuation beam is spaced apart from the orifice plate. The actuation beam includes a base portion and a cantilever portion, the base portion being spaced a predetermined distance from the orifice plate, the cantilever portion extending from the base portion toward the orifice, and an overlapping portion thereof overlapping the orifice. The actuation beam is movable between a closed position and an open position. A sealing structure is disposed on the actuation beam. The sealing structure includes a sealing member disposed on the overlapping portion of the cantilever portion. A stopper is disposed on the surface of the sealing member. The stopper includes a first portion attached to the surface of the sealing member and a second portion disposed on the first portion proximate to the orifice plate. The second portion has a larger cross-sectional area than the first portion. The cantilever portion is positioned such that when the actuation beam is in the closed position, the stopper seals the orifice to close the microvalve.

[0008] Another embodiment relates to a microvalve including an orifice plate having a first surface and a second surface. The orifice plate includes an orifice extending from the first surface to the second surface. An actuation beam is spaced apart from the orifice plate. The actuation beam includes a base portion and a cantilever portion. The base portion is spaced apart from the orifice plate by a predetermined distance. The cantilever portion extends from the base portion toward the orifice such that the overlapping portion overlaps the orifice. The actuation beam is movable between a closed position and an open position. A sealing structure is disposed on the actuation beam. The sealing structure includes a valve seat surrounding the orifice. The valve seat surrounds the orifice and defines an opening that defines a fluid outlet. The sealing structure is disposed at the overlapping portion of the cantilever portion. A first sealing blade extends a distance from a sealing member surface of the sealing member toward the orifice plate. The first sealing blade surrounds the entire periphery of the orifice. The sealing blade is configured to contact the valve seat in the closed position to seal the fluid outlet and close the microvalve.

[0009] Yet another embodiment relates to a microvalve including an orifice plate having a first surface and a second surface. The orifice plate includes an orifice extending from the first surface to the second surface. An actuation beam is spaced apart from the orifice plate. The actuation beam includes a base portion and a cantilever portion, the base portion being spaced a predetermined distance from the orifice plate, the cantilever portion extending from the base portion toward the orifice, and an overlapping portion thereof overlapping the orifice. The actuation beam is movable between a closed position and an open position. A sealing structure is disposed on the actuation beam. The sealing structure includes a sealing member disposed at the overlapping portion of the cantilever portion. A constriction is disposed at an end of the sealing member. The constriction defines a surface of the sealing member facing the orifice. A sealing flap extends outward from the constriction and is configured to seal the orifice and close the microvalve when the actuation beam is in the closed position. [Brief explanation of the drawings]

[0010] The present disclosure will be more fully understood from the following detailed description taken in conjunction with the accompanying drawings.

[0011] [Figure 1] FIG. 1 is a perspective view of a jetting assembly disposed within a holder according to an exemplary embodiment. [Figure 2] FIG. 2 is an exploded view of the injection assembly shown in FIG. [Figure 3] FIG. 3 is a schematic cross-sectional view of the injection assembly shown in FIG. [Figure 4A] Figure 4A is a plan view of the jetting assembly shown in Figure 1. Figure 4B is a schematic diagram of an adhesive structure that can be used in the jetting assembly of Figure 1, according to an exemplary embodiment. [Figure 4B] Figure 4A is a plan view of the jetting assembly shown in Figure 1. Figure 4B is a schematic diagram of an adhesive structure that can be used in the jetting assembly of Figure 1, according to an exemplary embodiment. [Figure 5A] FIG. 5A is a cross-sectional view of a jetting assembly including a microvalve, according to an exemplary embodiment. [Figure 5B] FIG. 5B is a cross-sectional view of a jetting assembly including a microvalve according to another exemplary embodiment. [Figure 6] FIG. 6 is a cross-sectional view providing a more detailed view of the injection assembly shown in FIG. 5A. [Figure 7A] Figure 7A is a cross-sectional view of an actuation beam of a microvalve according to an exemplary embodiment, and Figure 7B is a cross-sectional front view of the actuation beam of Figure 7A according to another exemplary embodiment. [Figure 7B] Figure 7A is a cross-sectional view of an actuation beam of a microvalve according to an exemplary embodiment, and Figure 7B is a cross-sectional front view of the actuation beam of Figure 7A according to another exemplary embodiment. [Figure 8] 8, 9, 10, 11, 12, and 13 are cross-sectional views of sealing structures for microvalves according to various exemplary embodiments. [Figure 9]8, 9, 10, 11, 12, and 13 are cross-sectional views of sealing structures for microvalves according to various exemplary embodiments. [Figure 10] 8, 9, 10, 11, 12, and 13 are cross-sectional views of sealing structures for microvalves according to various exemplary embodiments. [Figure 11] 8, 9, 10, 11, 12, and 13 are cross-sectional views of sealing structures for microvalves according to various exemplary embodiments. [Figure 12] 8, 9, 10, 11, 12, and 13 are cross-sectional views of sealing structures for microvalves according to various exemplary embodiments. [Figure 13] 8, 9, 10, 11, 12, and 13 are cross-sectional views of sealing structures for microvalves according to various exemplary embodiments. [Figure 14] 14 and 15 are cross-sectional views of sealing structures for microvalves, according to various exemplary embodiments. [Figure 15] 14 and 15 are cross-sectional views of sealing structures for microvalves, according to various exemplary embodiments. [Figure 16] FIG. 16 is a bottom view of a sealing member comprising three sets of concentric sealing blades, according to one embodiment. [Figure 17] FIG. 17 is a flow diagram of a method for constructing a sealing structure for a microvalve, according to an exemplary embodiment. [Figure 18] FIG. 18 is a cross-sectional view of a sealing structure of a microvalve according to an exemplary embodiment. [Figure 19] FIG. 19 is a flow diagram of a method for constructing a sealing structure for a microvalve, according to an exemplary embodiment. [Figure 20] FIG. 20 is a flow diagram of a method for configuring a microvalve, according to an exemplary embodiment. [Figure 21] FIG. 21 is a cross-sectional view of a sealing member of a microvalve according to an exemplary embodiment. [Figure 22] FIG. 22 is a cross-sectional view of a valve seat of a microvalve according to an exemplary embodiment. [Figure 23] FIG. 23 is a cross-sectional view of a sealing structure of a microvalve according to another exemplary embodiment. [Figure 24] FIG. 24 is a schematic process flow for forming a sealing structure on a valve seat according to another exemplary embodiment. [Figure 25] FIG. 25 is a cross-sectional view of a microvalve that may be included in a jetting assembly, according to an exemplary embodiment. [Figure 26] 26 is an enlarged view of a portion of the injection assembly of FIG. 25 indicated by arrow A in FIG. [Figure 27] 27 is a top cross-sectional view of a sealing blade included in the microvalve of FIGS. 25-26 taken along line BB in FIG. [Figure 28A] Figure 28A is a cross-sectional view of a portion of a jetting assembly according to one embodiment. Figure 28B is an enlarged view of a portion of the jetting assembly of Figure 28A indicated by arrow B in Figure 28A. [Figure 28B] Figure 28A is a cross-sectional view of a portion of a jetting assembly according to one embodiment. Figure 28B is an enlarged view of a portion of the jetting assembly of Figure 28A indicated by arrow B in Figure 28A. [Figure 29] FIG. 29 is a side cross-sectional view of an injection assembly according to another embodiment. [Figure 30] FIG. 30 is a cross-sectional view of an actuation beam of an injection assembly in accordance with an exemplary embodiment. [Figure 31] FIG. 31 is a cross-sectional view of an actuation beam of an injection assembly in accordance with an exemplary embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] Before turning to the figures illustrating exemplary embodiments in detail, it is to be understood that the application is not limited to the details or manner set forth in the detailed description or illustrated in the figures, and that the terminology is for the purpose of description only and is not to be regarded as limiting.

[0013] Generally, with reference to the figures, jetting assemblies including a plurality of microvalves are described herein. The microvalves described herein use an actuation beam having a sealing member disposed thereon. Utilizing such actuation beams allows the microvalves to be tuned to eliminate or reduce various defects associated with prior art, including continuous inkjet assemblies. For example, in various embodiments, the microvalves include a spacer member disposed between the actuation beam and an orifice plate. The spacer member maintains a spacing between a first end of the actuation beam and an orifice in the orifice plate to prevent squeeze-film damping of the actuation beam. The actuation beam extends from the spacer member over the orifice, and the sealing member extends toward the orifice to form a seal with the orifice. Thus, without applying electrical energy to the actuation beam, the sealing member seals the orifice. In other words, the initial position of the actuation beam (e.g., configured by careful selection of materials contained therein) is for the microvalve to be closed. Thus, fluids (e.g., ink, solvent, etc.) disposed within the microvalve are sealed from the environment external to the jetting assembly. This eliminates evaporation of the liquid and reduces clogging. Additionally, limited evaporation allows for the use of faster drying inks, which allows for faster printing than conventional systems.

[0014] To ensure superior performance of the ejection assembly, the microvalves described herein include a sealing structure configured to form a seal separating the orifice from a volume proximate the actuation beam when the actuation beam is in its initial position. The sealing structure may include any combination of components designed to ensure the formation of the seal. For example, in various embodiments, the sealing structure includes a valve seat disposed on an orifice plate proximate the orifice. The valve seat may define an opening surrounding the orifice and overlapping the orifice to define the fluid outlet. A sealing member may contact the valve seat when the actuation beam is in the initial position. In some embodiments, the valve seat is constructed of a compliant material to facilitate the formation of an enhanced seal resulting from pressure exerted by the bending of the actuation beam.

[0015] In another aspect, the sealing structure can include components attached to or extending from the sealing member. For example, in one embodiment, the sealing structure includes a stopper extending from the orifice-facing surface of the sealing member. The stopper may include a narrowed portion and a wider portion having a cross-sectional area greater than the cross-sectional area of ​​the orifice. As a result, the actuation beam presses the stopper toward the orifice plate, facilitating the formation of the seal. Alternatively or additionally, the sealing structure may include a sealing blade extending from the orifice-facing surface to contact the valve seat or orifice plate. The sealing blade further facilitates the formation of the seal by pressure resulting from its relatively small cross-sectional area, thereby concentrating the downward pressure applied by the actuation beam to form a tight seal. Thus, the various structures described herein reinforce the seal formed when the actuation beam is in its initial position.

[0016] As used herein, the term "initial position," when used to describe an actuation beam of a microvalve, describes the position of the actuation beam relative to various other components of the microvalve without the application of a control signal (e.g., charge, current, or voltage) to the actuation beam. In other words, the initial position is the position of the actuation beam (and any components attached to it) when the actuation beam is in a passive state. Of course, other embodiments are envisioned in which the initial position is the open position of the actuation beam.

[0017] Referring now to FIG. 1 , a perspective view of a jetting assembly 100 disposed within a holder 150 is shown, according to an exemplary embodiment. The jetting assembly 100 includes a valve body 102 mounted to a carrier 108. The holder 150 includes a substantially circular body having an opening therein configured to receive the jetting assembly 100. The body of the holder 150 may include a notch 118 extending from its periphery to facilitate attachment of the holder 150 to a marking device. The valve body 102 may be a component of the marking device. In one exemplary embodiment, the valve body 102 is used in an industrial marking device that includes a pressurized ink supply. In another embodiment, the valve body 102 or any of the microvalves described herein may be used in pneumatic applications where the fluid includes a gas (e.g., air, nitrogen, oxygen, etc.).

[0018] As described herein, the valve body 102 includes an input fluid manifold attached to a plurality of microvalves. The microvalves and the input fluid manifold form a fluid plenum or fluid reservoir configured to hold fluid received from an external fluid supply. In another embodiment, the valve body 102 may define a plurality of fluid plenums, each corresponding to at least a portion of the plurality of microvalves. In such an embodiment, each fluid plenum may be filled with a different colored ink (e.g., black, green, yellow, cyan, etc.) or a different fluid to provide a multicolor jetting or multi-fluid deposition assembly. In various embodiments, the microvalves include actuation beams configured to move (e.g., bend, curve, twist, etc.) in response to a voltage applied thereto to temporarily open fluid outlets at orifices in the orifice plate. As a result, droplets are ejected from the fluid outlets onto an object, generating a desired marking pattern on the object.

[0019] As shown, the circuit board 104 is mounted to the side of the carrier 108. The circuit board 104 may include multiple electrical paths and may provide connection points (e.g., via a wire harness) between the valve body 102 and an electrical controller. The electrical controller may provide control signals via the electrical paths to control the operation of actuation beams of multiple microvalves included in the valve body 102. The structure and function of such microvalves are described in more detail herein. In some embodiments, the circuit board 104 itself includes a microcontroller that generates and provides the control signals to operate the microvalves.

[0020] An identification tag 106 is attached to the jetting assembly 100. In some embodiments, the identification tag 106 comprises an internal memory configured to store various forms of information about the jetting assembly 100 (e.g., manufacturing information, serial numbers, valve calibration information, settings, etc.). For example, in one embodiment, the identification tag 106 is a radio frequency identification (RFID) tag configured to receptively transmit stored information in response to receiving a predetermined identifier from an external device. In this manner, information about the jetting assembly 100 may be obtained quickly and efficiently.

[0021] Referring now to FIG. 2 , an exploded view of a jetting assembly 100 is shown, according to an exemplary embodiment. A carrier 108 includes a front surface 110, a rear surface 112, and a side surface 124. In various embodiments, a valve body 102 is attached to the front surface 110 with an adhesive. The rear surface 112 has a cover 116 disposed thereon. The cover 116 includes an opening 120 that provides a supply port for a fluid (e.g., ink) for deposition onto an object through the valve body 102. For example, in some embodiments, the fluid (e.g., ink) is supplied to the valve body 102 through a first opening of the openings 120 (e.g., via an input supply line or hose), circulated through the valve body 102, and ejected from the valve body 102 through a second opening of the openings 120. In other words, the fluid is recirculated through the fluid plenum. A septum may be disposed in each of the openings 120 and configured to allow insertion of a fluid delivery or fluid return needle therethrough, allowing fluid communication into the fluid plenum while maintaining a fluid seal of the jetting assembly 100. In certain embodiments, the septum may comprise a single septum sheet extending under each of the first and second openings of the openings. Although not shown, in some embodiments, a heating element (e.g., a resistive element) may be disposed proximate to (e.g., around or coupled to) the valve body 102 or the carrier 108. The heating element may be used to selectively heat the fluid (e.g., ink) contained within the fluid plenum to maintain the fluid at a desired temperature. Additionally, for example, a temperature sensor (not shown), e.g., a heat-sensitive resistor, may be provided in the carrier 108 to, for example, measure the temperature of the fluid flowing through the jetting assembly 100.

[0022] The front surface 110 includes a cavity configured to receive the valve body 102 such that the valve body 102 is securely attached (e.g., with an adhesive) to the front surface 110. The circuit board 104 is attached to the carrier 108 via the side surface 124. As shown, the side surface 124 includes mounting pegs 126. In various embodiments, the circuit board 104 includes openings positioned to correspond to the placement of the mounting pegs 126 and is configured to receive the mounting pegs 126 to align the circuit board 104 with the carrier 108.

[0023] As shown, the circuit board 104 has a flex circuit 114 attached thereto. The flex circuit 114 extends at an angle from the circuit board 104 and is attached to the carrier 108 proximate the front face 110. The valve body 102 and the circuit board 104 are aligned perpendicular to one another when the flex circuit 114 extends near the corner boundary of the front face 110. The circuit board 104 also includes a controller interface 122 that includes electrical connection members (e.g., pins) configured to receive control signals from a marking system controller.

[0024] As described herein, in various embodiments, the flex circuit 114 may be disposed between the fluid manifold and the carrier 108, or an interposer may be disposed between the carrier 108 and the valve body 102 to facilitate forming electrical connections between the flex circuit 114 and electrodes of the multiple microvalves included in the valve body 102. In some embodiments, the flex circuit 114 is attached to the front surface 110 by a mounting member 148. An opening in the flex circuit 114 aligns with a bulkhead of the carrier 108 and provides a fluid inlet to a fluid plenum formed through the valve body 102.

[0025] Referring now to FIG. 3, a schematic diagram of various components of the injector assembly 100 is shown, according to an exemplary embodiment. For example, FIG. 3 may depict a cross-sectional view of the injector assembly 100 shown in FIG. 1 at line II. As shown, the valve body 102 extends from the front surface 110 of the carrier 108 via an interposer 170. The interposer 170 provides structural support to ensure maximum performance of the various components within the valve body 102. Although not shown, in some embodiments, a compliant layer (e.g., a silicone or rubber layer) may also be disposed above or below the interposer 170, or at any other location within the stack, to provide stress relief.

[0026] The valve body 102 includes an input fluid manifold 162 and a plurality of microvalves 164 attached to the input fluid manifold 162. The microvalves 164 and the input fluid manifold 162 form a fluid plenum or fluid reservoir 166 for fluid (e.g., a combination of ink and makeup fluid) received from a pressurized fluid supply (e.g., via openings 120 in a cover 116 attached to the back surface 112). In various embodiments, the fluid supply includes a pump configured to supply pressurized fluid to the jetting assembly 100 via a supply line connecting to the fluid reservoir and the carrier 108. In various embodiments, the fluid supply supplies fluid pressurized to 7-15 PSI when one or more of the microvalves 164 are open. For example, in one embodiment, the fluid has a pressure of approximately 10 PSI. The carrier 108 may include an internal cavity configured to receive pressurized fluid and supply the fluid to the fluid plenum 166. In various embodiments, a pressure differential may be maintained between the fluid plenum and the fluid supply to force fluid out of the valve body 102 .

[0027] Input fluid manifold 162 may comprise a glass structure with channels that form a fluid plenum. Microvalve 164 generally comprises an actuation beam held in spaced relation to an orifice on an orifice plate on front surface 110. The actuation beam may comprise at least one layer of piezoelectric material configured to deflect in response to receiving a control signal (e.g., a voltage waveform provided via controller interface 122 on circuit board 104). As described herein, application of such an electrical signal causes microvalve 164 to open, thereby ejecting a droplet at the orifice plate. The droplet is ejected a jetting distance 192 onto substrate 190, creating a desired pattern on substrate 190. In some embodiments, the weight of a single fluid droplet dispensed by microvalve 164 or any other microvalve described herein may range from 200 nanograms to 300 nanograms. In some embodiments, the volume of a single dispensed droplet may range from 200 picoliters to 300 picoliters. The structure and function of the various components of microvalve 164 are described in more detail herein. In another embodiment, the actuation beam may comprise a stainless steel actuation beam (e.g., having a length of about 1 mm). In yet another embodiment, the actuation beam may comprise a bimorph beam having two layers of piezoelectric material disposed on either side of a base layer (e.g., a base silicon or stainless steel layer). An electrical signal (e.g., a voltage) may be applied to either one of the piezoelectric layers to bend the actuation beam toward the corresponding piezoelectric layer. The two piezoelectric layers may comprise the same piezoelectric material or different piezoelectric materials. In certain embodiments, different electrical signals may be applied to each of the piezoelectric layers to bend or curve the actuation beam a predetermined distance toward or away from the orifice.

[0028] While the embodiments described herein generally describe actuation beams comprising piezoelectric material, in other embodiments, any other actuation mechanism may be used. For example, in some embodiments, the actuation beam may comprise a capacitive coupling for moving the actuation beam. In other embodiments, the actuation beam may comprise an electrostatic coupling. In yet other embodiments, the actuation beam may comprise a magnetic coupling (e.g., an electromagnetic structure actuated by an electromagnet) for moving the beam. In yet other embodiments, the actuation beam may comprise a temperature-sensitive bimetal plate configured to move in response to temperature changes.

[0029] The interposer 170 generally adds stiffness to various portions of the valve body 102. For example, the interposer 170 may be configured to be stiffer than components of the valve body 102 (e.g., orifice plate, actuation beam, etc.) to offset stresses induced by attaching such components to one another. For example, the interposer 170 may be attached to the valve body 102 to offset stresses induced by adhesives used to attach the carrier 108 to the valve body 102. Additionally, the interposer 170 may offset stresses at the interface between the input fluid manifold 162 and the microvalve 164.

[0030] Referring now to Figure 4A, a plan view of the inject assembly 100 is shown, according to an exemplary embodiment. Figure 4A shows a plan view of the valve body 102 shown in Figure 2 taken along line II-II. That is, Figure 4A shows a cross-sectional view at the interface between the input fluid manifold 162 and the orifice plate. The input fluid manifold 162 includes a first opening 172 and a second opening 174. The first opening 172 exposes the plurality of microvalves 164 to form a fluid plenum 166 configured to hold fluid received from a fluid supply.

[0031] In the illustrated example, the plurality of microvalves 164 comprises a plurality of aligned actuation beams 176. Each of the plurality of actuation beams 176 has a sealing member 178 disposed at an end thereof. In some embodiments, the sealing member 178 aligns with and contacts a valve seat disposed in an orifice in an orifice plate to prevent fluid contained within the fluid plenum 166 from leaking out of the fluid plenum 166 in the absence of any electrical signal. The jetting assembly 100 is shown to include 52 actuation beams 176 forming 52 microvalves 164.

[0032] In various embodiments, each of the plurality of actuation beams 176 may include an electrical connection exposed through the second opening 174. An electrical contact pad 180 is disposed on each of the electrical connections. A wire bond electrically connects each of the electrical connections to the controller interface 122 via the electrical contact pad 180. That is, an electrical signal may be received by each of the actuation beams 176 via the electrical contact pad 180. In some embodiments, tape automated bonding (TAB) may be used to electrically connect each of the electrical connections to the controller interface.

[0033] The boundary between first opening 172 and second opening 174 separates electrical contact pads 180 from the fluid contained within the reservoir formed by first opening 172. Also advantageously, electrical contact pads 180 are located below input fluid manifold 162. This means that the electrical connections between actuation beams 176 are located inside carrier 108 and are protected from degradation and external contamination.

[0034] An adhesive structure 182 is disposed on the input fluid manifold 162 to separate the electrical contact pads 180 from the fluid contained in the fluid plenum 166. The adhesive structure 182 connects the input fluid manifold 162 to the orifice plate. As shown in FIG. 4A , the adhesive structure 182 forms a “racetrack” around each of the first opening 172 and the second opening 174. The racetrack provides a barrier for fluid leaking between the input fluid manifold 162 and the orifice plate and prevents particles from entering the input fluid manifold. The racetrack-type adhesive structure 182 may be present on either or both the input fluid manifold 162 side or the orifice plate side. For example, the racetrack may be composed of several concentric rectangular loops of adhesive material (e.g., a negative photoresist, such as a bisphenol A novalac glycidyl ether-based photoresist commercially available under the trade name SU-8, or polymethyl methacrylate, polydimethylsiloxane, silicone rubber, etc.) around each of the first and second openings 172 and 174. Segments of adhesive material may be cut across multiple segments of the rectangular loops to form compartments to receive leaking fluid. Such adhesive structures 182 facilitate fluid isolation between the microvalves 164 and the electrical contact pads 180. In another embodiment, the adhesive structures 182 are formed from silicon and are used to bond the input fluid manifold 162 to the orifice plate by fusion, laser bonding, adhesives, eutectic bonding, glass frit, solder, stiction, etc. The adhesive structure 182 may be disposed on the input fluid manifold 162 and the associated valve body 102, on the valve body 102 and the associated input fluid manifold 162, or on each of the input fluid manifold 162 and the valve body 102 prior to connecting the two.

[0035] In some embodiments, the adhesive structure 182 may be vented. For example, FIG. 4B shows a schematic diagram of an adhesive structure 182b. The adhesive structure 182b may be formed from SU-8, silicone, or any other suitable material and includes multiple loops 189b such that the adhesive structure has a racetrack shape. The innermost loop of the multiple loops 189b of the adhesive structure 182b surrounding the input fluid manifold 162 forms a closed loop. In contrast, the remaining portions of the multiple loops 189b, which are positioned radially outward of the innermost loop, include vent holes 183b, e.g., grooves or openings, defined therein. The vent holes 183b may facilitate bonding to the orifice plate of the input fluid manifold 162 by allowing air that may be trapped between the multiple loops 189b of the adhesive structure 182b to escape through the vent holes 183b. FIG. 4B shows that the vent holes 183b are radially aligned with each other and located at the corners of each loop. In another embodiment, one or more vents 183b in one loop may be radially offset from the vents defined in an adjacent loop.

[0036] 4B, the corners of each loop of adhesive structure 182b may be rounded. Additionally, the corners of input fluid manifold 162, interposer 170, flex circuit 114, or any other layer or component included in jetting assembly 100 may be rounded, for example, to reduce stress concentrations that may occur at sharp corners.

[0037] 5A, a cross-sectional view of an inject assembly 200 including a microvalve 230 is shown, according to an exemplary embodiment. In some embodiments, the inject assembly 200 is an exemplary embodiment of the inject assembly 100 described with respect to FIGS. 1, 2, 3, and 4A-4B. As shown, the inject assembly 200 includes a carrier 202 that is attached to a valve body 298 via a structural layer 222. In some embodiments, the carrier 202 may include the structural layer 222.

[0038] Carrier 202 includes a top portion 204 and a housing portion 206 extending from an edge of top portion 204. Top portion 204 includes a septum 208 through which pressurized ink is supplied. Housing portion 206 defines a cavity within which a valve body 298 is disposed. Valve body 298 includes an input fluid manifold 210 and a microvalve 230. As shown, input fluid manifold 210 and microvalve 230 define a reservoir 300 configured to hold a volume of pressurized fluid received from an external fluid supply via septum 208. In various embodiments, the pressurized fluid held within reservoir 300 is a combination of ink and another fluid in a liquid state.

[0039] The carrier 202 may be formed of plastic, ceramic, or any other suitable material. The carrier 202 facilitates operation of the jetting assembly 200 by providing structural support to the valve body 298. For example, in some embodiments, the periphery of the valve body 298 is attached to the housing portion 206 by a layer of adhesive 302 disposed on the inner surface of the housing portion 206. Such adhesive facilitates maintaining a desired relative positioning between the microvalve 230 and the input fluid manifold 210.

[0040] In various embodiments, the input fluid manifold 210 is pre-formed prior to attachment to other components of the jetting assembly 200. The input fluid manifold 210 is formed by a body 310 (e.g., formed from glass, silicon, silica, etc.) having any suitable thickness (e.g., 500 microns). As shown, the input fluid manifold 210 is pre-formed to include a first arm 330, a second arm 332, and a third arm 334. As used herein, the term "arm," when used to describe the input fluid manifold 210, is used to describe the structure separating the openings included in the input fluid manifold 210. Thus, the arms 330, 332, and 334 may have any suitable shape. For example, in some embodiments, the arms 330, 332, and 334 are substantially rectangular in shape with substantially planar sides. In another embodiment, the sides may be angled such that the arms 330, 332, and 334 are substantially trapezoidal in shape. Arms 330, 332, and 334 may be formed by creating openings in a structure (e.g., a silicon or glass structure) using any suitable method (e.g., wet or dry etching, e.g., deep reactive ion etching).

[0041] As shown, first channel 212 separates arms 330 and 332 from one another, and second channel 214 separates arms 332 and 334 from one another. In the illustrated embodiment, first channel 212 and second channel 214 are substantially straight and parallel to one another; however, input fluid manifold 210 may be positioned as needed for the placement of microvalves disposed thereon. First channel 212 is formed to have a width 304 that has a predetermined relationship to the length 312 of cantilevered portion 308 of actuation beam 240 of microvalve 230, e.g., in the range of approximately 500 to 1,000 microns. For example, first channel 212 may be formed to have width 304 that is greater than the desired length 312 of cantilevered portion 308 by a threshold amount. Second channel 214 provides a means for electrical connection between actuation beam 240 and flex circuit 216 via wire bonds 220 extending therebetween. Advantageously, such an arrangement is used to internalize the electrical connection between the actuation beam 240 and the flex circuit 216. In other words, the electrical connection between such components is not external to the carrier 202 and is therefore less vulnerable to degradation. In various embodiments, the first channel 212 and / or the second channel 214 may have sloped sidewalls.

[0042] As shown, the second channel 214 is substantially filled with an encapsulant 218. The encapsulant 218 may comprise an epoxy type or any other suitable material. The encapsulant 218 is configured to cover the electrical connections formed between the wire bonds 220, the flex circuit 216, and the actuation beam 240 and to protect the wire bonds 220 from physical damage, moisture, and corrosion. Thus, the encapsulant 218 ensures that a proper electrical connection is maintained between the flex circuit 216 and the actuation beam 240, facilitating the provision of an electrical control signal to the actuation beam 240 to move it and open or close the microvalve 230.

[0043] The second arm 332 acts as a barrier that prevents the fluid contained in the reservoir 300 from reaching the electrical connections. The portion 314 of the input fluid manifold 210 that separates the first channel 212 and the second channel 214 acts as a barrier that prevents the fluid contained in the reservoir 300 from reaching the electrical connections. That is, the input fluid manifold 210 functions both as a reservoir 300 for pressurized fluid received from an external fluid supply and as an insulating barrier between the pressurized fluid and any electrical connections contained within the jetting assembly 200. The first channel 212 and the second channel 214 may be formed using any suitable process (e.g., by sandblasting, physical or chemical etching, drilling). In some embodiments, the input fluid manifold 210 is composed of silicon, silica, ceramic, or any other suitable material, rather than being composed of glass. In some embodiments, the input fluid manifold 210 may be bonded to the microvalve 230 by glass frit, solder, or any other suitable adhesive.

[0044] Continuing with reference to FIG. 5A, microvalve 230 includes an orifice plate 250 attached to actuation beam 240. Orifice plate 250 may be formed from any suitable material, such as glass, stainless steel, nickel, nickel with another layer of electroplated metal (e.g., stainless steel), polyimide (e.g., Kapton), or negative photoresist (e.g., SU-8, polymethyl methacrylate, etc.). In some embodiments, orifice plate 250 may be substantially flat, e.g., have a coefficient of flatness of less than 3 microns across at least 15 mm of the length and width of orifice plate 250, such that orifice plate 250 is substantially free of warping or bending. Furthermore, orifice plate 250 may have any suitable thickness. In some embodiments, orifice plate 250 may have a thickness in the range of 30 microns to 60 microns (30, 40, 50, or 60 microns). In another embodiment, the orifice plate 250 may have a thickness in the range of 100 microns to 400 microns (e.g., 100, 150, 200, 250, 300, 350, or 400 microns). A thicker orifice plate 250 may facilitate achieving a flatter orifice plate.

[0045] Orifice plate 250 is substantially planar and includes orifice 260 extending between its surfaces. In various embodiments, orifice 260 is substantially cylindrical and has a central axis that is perpendicular or substantially perpendicular to the surface of orifice plate 250. Valve seat 270 is disposed adjacent to orifice 260 on inner surface 316 of orifice plate 250. In various embodiments, valve seat 270 is comprised of a compliant material that surrounds or substantially surrounds orifice 260. In some embodiments, valve seat 270 is comprised of an epoxy-based adhesive, e.g., SU-8 photoresist. In other embodiments, valve seat 270 may be formed from a moldable polymer, e.g., polydimethylsiloxane or silicone rubber. In yet other embodiments, valve seat 270 may be formed from a non-compliant material, e.g., silicon. In some embodiments, a compliant layer, e.g., a gold layer, may be disposed on the surface of valve seat 270 that is contacted by actuation beam 240. Valve seat 270 defines an internal opening 318 that is substantially aligned with orifice 260 and provides an outlet for pressurized fluid contained within reservoir 300. In certain embodiments, valve seat 270 may be omitted.

[0046] As shown, the actuation beam 240 comprises a base portion 306 and a cantilever portion 308. The base portion 306 extends below a portion 314 of the input fluid manifold 210 that separates the first channel 212 and the second channel 214. As shown, the base portion 306 comprises an electrical connection 294 in the area overlapping the second channel 214. The electrical connection 294 comprises an electrode through which an electrical connection is made to the flex circuit 216 via wire bonds 220. The cantilever portion 308 extends from the portion 314 of the input fluid manifold 210 into the reservoir 300. As shown, the cantilever portion 308 is disposed on a spacer member 280, thereby spatially separating the cantilever portion 308 from the orifice plate 250. Thus, there is space on either side of cantilevered portion 308 to allow actuation beam 240 to bend toward and / or away from orifice plate 250 as a result of an electrical signal being applied to actuation beam 240 via electrical connection 294. Spacer member 280 is configured to prevent squeeze film damping of the actuation beam.

[0047] The cantilevered portion 308 has a length 312 such that the cantilevered portion extends a predetermined distance from the boundary of the reservoir 300. In various embodiments, the predetermined distance is selected so that a portion 292 of the cantilevered portion 308 overlaps the valve seat 270 and the orifice 260, among other things. The sealing member 290 extends from a portion 292 of the actuation beam 240 that overlaps the orifice 260. In some embodiments, the sealing member 290 is configured to have a shape that substantially corresponds to the shape of the orifice 260. For example, in one embodiment, both the orifice 260 and the sealing member 290 are substantially cylindrical, with the sealing member 290 having a larger outer diameter. Such a configuration facilitates the sealing member 290 covering the entire orifice 260 to enable a seal to be formed between the sealing member 290 and the valve seat 270. In other embodiments, orifice 260 may have any other shape, such as a star, square, rectangle, polygon, oval, or asymmetric shape. In certain embodiments, valve seat 270 may define a recess size and shape to receive sealing member 290. In various embodiments, orifice plate 250 and thus orifice 260 may be formed from a non-wetting (e.g., hydrophobic) material, such as silicone or Teflon. In other embodiments, a non-wetting (e.g., hydrophobic) coating may be disposed on the interior wall or surface of orifice 260 or on the fluid outlet formed by valve seat 270 and orifice 260. Such coatings may include, for example, Teflon, nanoparticles, an oleophilic coating, or any other suitable coating.

[0048] In various embodiments, spacer member 280 and sealing member 290 are constructed from the same material and have equal or substantially equal thicknesses 320 and 322 (e.g., silicone, SU-8, silicone rubber, polymethyl methacrylate, etc.). In such embodiments, when actuation beam 240 extends parallel to orifice plate 250, the lower surfaces of spacer member 280 and sealing member 290 are aligned with one another. When actuation beam 240 is disposed in a closed position (as described herein), the surface of sealing member 290 contacts valve seat 270 to close the fluid outlet formed in orifice 260 (e.g., the sealing member surface of sealing member 290 may be configured to extend approximately 2 microns below the lower surface of spacer member 280 when valve seat 270 is not present). Valve seat 270 and sealing member 290 are sized so that when actuation beam 240 is placed in a closed position (e.g., when an electrical signal is removed from or applied to actuation beam 240 via wirebond 220), a sufficient surface area of ​​sealing member 290 contacts valve seat 270 to prevent fluid from migrating from reservoir 300 to orifice 260. For example, sealing member 290 may have a larger diameter or cross-section than valve seat 270. In another embodiment, sealing member 290 may have a smaller diameter or cross-section than valve seat 270. In some embodiments, a compliant material (e.g., a gold layer) may be disposed on a surface of sealing member 290 configured to contact valve seat 270.

[0049] Various aspects of the jetting assembly 200 are designed to ensure a proper seal between the valve seat 270 and the sealing member 290. For example, a structural layer 222 disposed on the input fluid manifold 210 couples the components of the microvalve 230 to one another and prevents warping of the orifice plate 250 resulting from stresses induced thereon by the adhesive coupling the microvalve 230 to the housing portion 206. In various embodiments, the structural layer 222 is configured to have a higher rigidity than the orifice plate 250 to perform this function. The structural layer 222 may be composed of silicone or any other suitable material. As shown, the structural layer 222 includes a protrusion 224 extending from a main portion thereof. The protrusion 224 is attached to the top surface of the input fluid manifold 210 (e.g., at the interface between the first channel 212 and the second channel 214). In certain embodiments, the protrusion 224 is omitted. The seal is formed, for example, by an adhesive disposed between the structural layer 222 and the flex circuit 216 at the protrusions 224. The protrusions 224 provide clearance above the input fluid manifold 210. Such clearance facilitates placement of the encapsulant 218 that completely covers all contact points between the wire bonds 220 and the flex circuit 216. In some embodiments, the carrier 202 may comprise the structural layer 222 such that rigidity is provided by the carrier 202.

[0050] In another aspect, the actuation beam 240 is configured such that, when in the closed position, a seal is formed at the interface between the valve seat 270 and the sealing member 290. The actuation beam 240 may comprise at least one layer of piezoelectric material. The layer of piezoelectric material may comprise lead zirconate titanate (PZT) or any suitable material. The layer of piezoelectric material has electrodes electrically connected thereto. In various embodiments, wire bonds 220 are attached to the electrodes such that an electrical signal from the flex circuit 216 is provided to the layer of piezoelectric material via the electrodes. The electrical signal causes the actuation beam 240 to move (e.g., bend, rotate, etc.) relative to its initial position. In other embodiments, the actuation beam 240 may comprise a stainless steel actuation beam (e.g., having a length of approximately 1 mm). In yet another embodiment, the actuation beam 240 may comprise a bimorph beam having two layers of piezoelectric material disposed on either side of a base layer (e.g., a base silicon layer). An electrical signal (e.g., a voltage) may be applied to either one of the piezoelectric layers to bend the actuation beam toward the corresponding piezoelectric layer. The two piezoelectric layers may comprise the same piezoelectric material or different piezoelectric materials, and in certain embodiments, different electrical signals may be applied to each of the piezoelectric layers to bend or curve the actuation beam a predetermined distance.

[0051] As shown, wire bonds 220 are attached to actuation beam 240 at their electrical connections 294. Electrical connections 294 comprise wire bond pads (e.g., constructed of gold, platinum, rubidium, etc.) that conductively connect to at least one electrode in actuation beam 240. Advantageously, electrical connections 294 are spaced from the cantilevered portion of actuation beam 240. In other words, electrical connections 294 are isolated from the fluid contained in jetting assembly 200 by a seal formed at the connection point between input fluid manifold 210 and actuation beam 240. In some embodiments, wire bonds 220 and / or encapsulant 218 may be routed out through openings provided in orifice plate 250.

[0052] In various embodiments, the actuation beam 240 is configured such that the closed position is its initial position. In other words, various layers within the actuation beam 240 are configured to cause the actuation beam to bend toward the orifice 260 as a result of a force applied by the pressurized fluid contained within the reservoir. Tuning layers within the actuation beam 240 may be configured to be in a compressive stress state to cause the actuation beam to bend toward the orifice. As a result of such bending, the sealing member 290 contacts the valve seat 270, for example, in the absence of any electrical signal applied to the actuation beam 240 to close the fluid outlet. The degree of bending may be specifically selected to form a seal at the interface between the sealing member 290 and the valve seat 270 with the actuation beam 240 in the initial position. Advantageously, such an initial seal prevents evaporation of the fluid contained in the jetting assembly 200, which prevents clogging and other defects.

[0053] 5A, actuation beam 240 is bent in a direction away from orifice plate 250. Such bending is achieved by applying an electrical signal to actuation beam 240 via flex circuit 216. For example, flex circuit 216 may be electrically connected to an external controller that provides the electrical signal that is transmitted to actuation beam 240.

[0054] As illustrated in FIG. 5A , application of an electrical signal temporarily moves the actuation beam 240 away from its initial position. For example, in various embodiments, the actuation beam 240 moves upward, away from the orifice 260, such that a portion of the sealing member surface of the sealing member 290 is at least 10 microns from the top surface of the valve seat 270. In one embodiment, the center of the sealing member surface is approximately 15 microns from the valve seat 270 at the peak of its vibration pattern. As a result, an opening temporarily forms between the valve seat 270 and the sealing member 290. The opening provides a path for a fluid volume to enter the orifice 260 and form droplets on the outer surface of the orifice plate 250. The droplets are deposited on a substrate, forming a pattern determined by a control signal sent to each of the actuation beams 240 of each microvalve 230 of the jetting assembly 200. As will be appreciated, the frequency by which the actuation beam 240 moves from its initial position to a position, such as the position shown in FIG. 5 , may vary depending on the implementation. For example, in one embodiment, the actuation beam 240 vibrates at a frequency of about 12 kHz, although in other implementations the actuation beam 240 may oscillate at a lower frequency (e.g., 10 kHz) or a higher frequency (e.g., 20 kHz).

[0055] 5B, a cross-sectional view of an injector assembly 200b including a microvalve 230b is shown, according to an exemplary embodiment. In some embodiments, the injector assembly 200b is an exemplary embodiment of the injector assembly 100 described with respect to FIGS. 1, 2, 3, and 4A-4B. As shown, the injector assembly 200b includes a carrier 202b attached to a valve body 298b via an interposer 222b.

[0056] The carrier 202b includes an upper portion 204b and a housing portion 206b extending from the edge of the upper portion 204b. A fluid channel 211b is provided in the upper portion 204b. A septum 208b (e.g., a rubber or foam septum) is disposed at the inlet of the fluid channel 211b, and a filter 213b is disposed at the outlet of the fluid channel 211b. A cover 203b (e.g., a plastic or glass cover) is disposed on the carrier 202b such that the septum 208b is disposed between and secured to the carrier 202b and the cover 203b. An opening 209b may be defined in the cover 203b and corresponds to the inlet of the fluid channel 211b. A fluid connector 10b couples to the cover 203b or the inlet of the fluid channel 211b. Fluid connector 10b includes insertion needle 12b, which is configured to penetrate septum 208b and be disposed within fluid channel 211b therethrough. Fluid connector 10b is configured to inject pressurized fluid (e.g., ink) through insertion needle 12b into input fluid manifold 210b of jetting assembly 200b. Additionally, filter 213b is configured to filter particles from the fluid before the fluid communicates with reservoir 300b. In some embodiments, insertion needle 12b may be formed from or coated with a non-wetting material (e.g., a hydrophobic material, such as Teflon). In another embodiment, insertion needle 12b may include a heating element, or an electric current may be provided to insertion needle 12b to heat it, thereby causing fluid to flow therethrough into reservoir 300b. In yet another embodiment, a metal needle or any other heating element may be provided within input fluid manifold 210b to heat the fluid contained therein. Although shown as comprising only fluid channel 211b, in some embodiments, carrier 202b may also define a second fluid channel so that fluid can be drawn from carrier 202b, i.e., so that fluid can be circulated through carrier 202b.

[0057] Housing portion 206b defines a cavity or boundary within which valve body 298b is disposed. Valve body 298b includes input fluid manifold 210b and microvalve 230b. As shown, input fluid manifold 210b and microvalve 230b define reservoir 300b configured to hold a volume of pressurized fluid received from an external fluid supply via septum 208b. In various embodiments, the pressurized fluid held within reservoir 300b is a combination of ink and another fluid in a liquid state.

[0058] In various embodiments, the input fluid manifold 210b is preformed prior to attachment to other components of the jetting assembly 200b. The fluid manifold 210b may be formed from a glass body 310b having any suitable thickness (e.g., 500 microns). As shown, the input fluid manifold 210b is preformed to include a first channel 212b and a second channel 214b. The first channel 212b is formed to have a width 304b that has a predetermined relationship to the length 312b of the cantilevered portion 308b of the actuation beam 240b of the microvalve 230b. The second channel 214b provides a path for an electrical connection between the actuation beam 240b and the flex circuit 216b via the wire bonds 220b extending therebetween.

[0059] As shown, the second channel 214b is substantially filled with an encapsulant 218b, which ensures proper electrical connection between the flex circuit 216b and the actuation beam 240b, facilitates sending electrical control signals to the actuation beam 240b to move it and open or close the microvalve 230b, and protects the wire bonds 220b from physical damage or moisture, as previously described herein.

[0060] The portion 314b of the input fluid manifold 210b separating the first channel 212b and the second channel 214b acts as a barrier to prevent the fluid contained in the reservoir 300b from reaching the electrical connections. That is, the input fluid manifold 210b serves as both a reservoir 300b for pressurized fluid received from an external fluid supply and an insulating barrier between the pressurized fluid and any electrical connections contained within the jetting assembly 200b.

[0061] Microvalve 230b includes an orifice plate 250b attached to actuation beam 240b. Orifice plate 250b is substantially planar and includes an orifice 260b extending between its surfaces. A valve seat 270b is disposed adjacent to orifice 260b on an inner surface 316b of orifice plate 250b. Valve seat 270b defines an internal opening 318b substantially aligned with orifice 260b and forms an outlet for pressurized fluid contained within reservoir 300b. In certain embodiments, valve seat 270b may be omitted. In some embodiments, orifice plate 250b, or any other orifice plate described herein, may also be grounded. For example, an electrical ground connector 295b (e.g., a bond pad, e.g., a gold bond pad) may be provided on orifice plate 250b and configured to enable orifice plate 250b to be electrically grounded (e.g., via an electrical coupling to a system ground).

[0062] Actuation beam 240b includes a base portion 306b and a cantilever portion 308b. Base portion 306b extends below portion 314b of input fluid manifold 210b, which separates first channel 212b and second channel 214b. As shown, base portion 306b includes electrical connection portion 294b in the area overlapping second channel 214b. Electrical connection portion 294b includes an electrode through which electrical connection is made to flex circuit 216b via wirebond 220b. Cantilever portion 308b extends from portion 314b of input fluid manifold 210b into reservoir 300b. As shown, cantilever portion 308b is disposed on spacer member 280b, thereby spatially separating it from orifice plate 250b.

[0063] Cantilevered portion 308b has length 312b such that the cantilevered portion extends a predetermined distance from the boundary of reservoir 300b. In various embodiments, the predetermined distance is selected such that, among other things, portion 292b of cantilevered portion 308b overlaps valve seat 270b and orifice 260b. Sealing member 290b extends from portion 292b of actuation beam 240b that overlaps orifice 260b. In some embodiments, sealing member 290b is configured to have a shape that substantially corresponds to the shape of orifice 260b.

[0064] Flex circuit 216b is disposed on glass body 310b and portion 314b of input fluid manifold 210b and coupled thereto via a first adhesive layer 221b (e.g., SU-8, silicone rubber, glue, epoxy, etc.). Interposer 222b is disposed between upper portion 204b of carrier 202b and input fluid manifold 210b to form a gap between upper portion 204b and input fluid manifold 210b via first adhesive layer 221b. This provides sufficient space for disposing encapsulant 218 and increases the volume of input fluid manifold 210b. As shown in FIG. 5B , interposer 222b is disposed on and coupled to portion 314b of flex circuit 216b via a second adhesive layer 223b (e.g., SU-8, silicone, or any other adhesive). Additionally, the interposer 222b couples to the sidewall of the top 204b of the carrier 202b adjacent to the microvalve 230b via a third adhesive layer 225b (eg, SU-8, silicone, or any other adhesive).

[0065] Interposer 222b may be formed from a strong, rigid material (e.g., plastic, silicon, glass, ceramic, etc.) and may be disposed over input fluid manifold 210b to couple the components of microvalve 230b together and prevent warping of orifice plate 250b from stresses induced thereon via the adhesive coupling microvalve 230b to housing portion 206b. In various embodiments, interposer 222b is configured to have greater rigidity than orifice plate 250b to perform this function.

[0066] In another embodiment, the actuation beam 240b is configured such that, when in the closed position, a seal is formed at the interface between the valve seat 270b and the sealing member 290b. The actuation beam 240b may comprise at least one layer of piezoelectric material (e.g., lead zirconate titanate (PZT) or any suitable material). The layer of piezoelectric material has electrodes electrically connected thereto, and wire bonds 220b are attached to the electrodes such that an electrical signal from the flex circuit 216b is provided to the layer of piezoelectric material via the electrodes. The electrical signal causes the actuation beam 240b to move (e.g., bend, rotate, etc.) relative to its initial position.

[0067] As shown, wire bond 220b is attached to actuation beam 240b at its electrical connection 294b and is substantially similar to wire bond 220 described with respect to jetting assembly 200 of Figure 5A. In various embodiments, actuation beam 240b is configured such that the closed position is its initial position, as described in detail with respect to actuation beam 240 of Figure 5A.

[0068] As shown in FIG. 5B, the actuation beam 240b is bent away from the orifice plate 250b. This bending is achieved by applying an electrical signal to the actuation beam 240b via the flex circuit 216b. For example, the flex circuit 216b may be electrically connected to a circuit board 215b (e.g., a printed circuit board) that extends perpendicular to the longitudinal axis of the actuation beam 240b along the sidewall of the carrier 202b. An identification tag 217b (e.g., the identification tag 106) may be disposed between the circuit board 215b and the sidewall of the carrier 202b. An electrical connector 219b is electrically coupled to the circuit board 215b and configured to electrically connect the flex circuit 216b to an external controller that provides the electrical signal transmitted to the actuation beam 240b via the circuit board 215b.

[0069] 5B, application of an electrical signal temporarily moves actuation beam 240b away from its initial position. As described in detail with respect to actuation beam 240 of FIG. 5A, for example, in various embodiments, actuation beam 240b moves upward, away from orifice 260b, such that a portion of the sealing member surface of sealing member 290b is at least 10 microns from the upper surface of valve seat 270b.

[0070] Referring now to FIG. 6, a more detailed diagram illustrating various components of the jet assembly 200 described with respect to FIG. 5A is shown, according to an exemplary embodiment. As shown, the actuation beam 240 comprises an actuation portion 242, a tuning layer 244, and a passive layer 246. The passive layer 246 serves as a base for the tuning layer 244 and the actuation portion 242. The structure of the actuation portion 242 and the tuning layer 244 is described in more detail with respect to FIG. 7. In some embodiments, the passive layer 246 is comprised of silicon or another suitable material. In some embodiments, the passive layer 246, the spacer member 280, and the sealing member 290 are all comprised of the same material (e.g., monolithically formed from a silicon wafer). In an exemplary embodiment, the passive layer 246, the spacer member 280, and the sealing member 290 are formed from a dual silicon-on-insulator (SOI) wafer.

[0071] Spacer member 280 is shown to comprise an intermediate layer interposed between two peripheral layers. In an exemplary embodiment, intermediate layer and passivation layer 246 comprise two silicon layers of a double SOI wafer, with peripheral layers disposed on either side of the intermediate layer, including a silicon oxide layer. In this example, sealing member 290 and spacer member 280 are formed by etching the surface of the double SOI wafer opposite active portion 242. The oxide layer serves to control or stop the etching process once, for example, the entire intermediate layer forming spacer member 280 is removed in the region separating spacer member 280 and sealing member 290. Such a process provides precise control over both the width and thickness of spacer member 280 and sealing member 290.

[0072] As will be appreciated, the size of the sealing member 290 may contribute to the resonant frequency of the actuation beam 240. A larger amount of material disposed at or near the end of the actuation beam 240 generally results in a lower resonant frequency of the actuation beam. Furthermore, such a larger amount of material will affect the initial bending of the actuation beam 240 induced by pressurized fluid contacting the actuation beam 240. Therefore, the desired size of the sealing member 290 influences various other design choices for the actuation beam 240. Such design choices are described in more detail with respect to FIG. 7A . In some embodiments, the sealing member 290 is sized based on the dimensions of the orifice 260. In some embodiments, the sealing member 290 is substantially cylindrical and has a diameter that is approximately 1.5 times the diameter of the orifice 260. For example, in one embodiment, the sealing member 290 has a diameter of approximately 90 microns when the orifice 260 has a diameter of approximately 60 microns. Such a configuration facilitates alignment between the sealing member 290 and the orifice 260 so that the sealing member 290 completely covers the orifice 260 when it contacts the valve seat 270. In another embodiment, the sealing member 290 is sized to have a surface area approximately twice that of the orifice 260 (e.g., the spacer member 280 may have a diameter of approximately 150 microns, and the orifice 260 is approximately 75 microns in diameter). Such an embodiment provides greater tolerance for alignment between the sealing member 290 and the orifice 260, making it easier to create a seal between the valve seat 270 and the sealing member 290. In another embodiment, the diameter of the sealing member 290 may be 2, 2.5, 3, 3.5, or 4 times the diameter of the orifice 260. In various embodiments, the length-to-diameter ratio of the orifice 260 may be within a range of 1:1 to 15:1. The ratio may affect the shape, size, and / or volume of the fluid droplets ejected through the orifice and may vary based on the particular application.

[0073] Advantageously, the gap 324 between the spacer member 280 and the sealing member 290 creates a separation volume 326 between the actuation beam 240 and the orifice plate 250. The separation volume 326 prevents squeeze-film damping of vibrations of the actuation beam 240. In other words, insufficient separation between the orifice plate 250 and the actuation beam 240 leads to drag forces resulting from fluid that must move in and out of the separation volume 326 as the actuation beam 240 opens and closes the orifice 260. By having a larger separation volume created via the spacer member 280, such drag forces are reduced, and therefore the actuation beam 240 is more likely to vibrate at faster frequencies.

[0074] 6 , the orifice plate 250 comprises a base layer 252 and an intermediate layer 254. For example, in one embodiment, the base layer 252 comprises a silicon layer, and the intermediate layer 254 comprises a silicon oxide layer. In the embodiment shown, a portion of the intermediate layer 254 proximate the orifice 260 is removed, with a first portion of the valve seat 270 disposed directly on the base layer 252 and a second portion of the valve seat 270 disposed on the intermediate layer 254. It should be understood that in another embodiment, the intermediate layer 254 extends all the way to the boundary of the orifice 260, with the valve seat 270 disposed on the intermediate layer 254. In yet another embodiment, the removed portion of the intermediate layer 254 may have a cross-section equal to or greater than the cross-section of the valve seat 270, such that the valve seat 270 is disposed completely on the base layer 252.

[0075] Due to the importance of the spatial relationship between the spacer member 280 and the valve seat 270, the attachment of the spacer member 280 to the orifice plate 250 may be performed in a manner that allows for precise control of the resulting distance between the actuation beam 240 and the orifice plate 250. As shown, an adhesive layer 256 is used to attach the spacer member 280 to the orifice plate 250. In various embodiments, a precise amount of epoxy-based adhesive (e.g., SU-8, polymethyl methacrylate, silicone, etc.) is applied to the intermediate layer 254, upon which the spacer member 280 and actuation beam 240 combination is then placed. The adhesive is then cured to form an adhesive layer 256 having a precisely controlled thickness. For example, in some embodiments, the bottom surface of the spacer member 280 is substantially aligned with the top surface of the valve seat 270. When the actuation beam 240 is in its initial position, any desired relationship between such surfaces can be obtained to create a proper seal between the sealing member 290 and the valve seat 270. In various embodiments, the adhesion layer 256 and the valve seat 270 may be formed from the same material (eg, SU-8) in a single photolithography process.

[0076] In various embodiments, once actuation beam 240 and orifice plate 250 are attached to one another via adhesive layer 256 (e.g., to form microvalve 230), another adhesive layer 248 is applied to the periphery of actuation beam 240. Another adhesive layer 248 is used to attach input fluid manifold 210 to actuation beam 240. Structural layer 222 (or interposer 222b) may be disposed on input fluid manifold 210 and coupled to it via second adhesive layer 225. In some embodiments, another adhesive layer 248 and second adhesive layer 225 may comprise the same material as adhesive layer 256.

[0077] 6 , the microvalve 230 includes a sealing structure 500 comprising various components that form a seal to separate the orifice 260 from a volume 502 proximate the actuation beam 240. In the illustrated embodiment, the sealing structure 500 includes a sealing member 290 and a valve seat 270. As described herein, the actuation beam 240 is configured such that an orifice-facing surface 504 of the sealing member 290 contacts the top surface of the valve seat 270 to form a seal at the interface between the valve seat 270 and the sealing member 290. The seal separates the orifice 260 from the volume 502 and ensures that minimal fluid escapes from the jetting assembly 200 when no electrical signal is applied to the actuation beam 240. Several alternatives for the sealing structure 500 are described in detail herein. In another embodiment, the valve seat 270 may be omitted such that the orifice-facing surface of the sealing structure 500 contacts the orifice plate 250 to fluidly seal the orifice 260 .

[0078] 7A, a more detailed view of actuation beam 240 is shown, not to scale, according to an exemplary embodiment. As shown, actuation beam 240 comprises a passivation layer 246, a tuning layer 244, a barrier layer 400, a first electrode portion 402, an actuation portion 242, a second electrode portion 404, and a passivation structure 406. As will be appreciated, in various alternative embodiments, actuation beam 240 may comprise more or fewer layers.

[0079] In some embodiments, tuning layer 244 is disposed directly on inert layer 246. Tuning layer 244 generally functions as an adhesion layer to facilitate the deposition of other layers described herein. Additionally, as described herein, the thickness of tuning layer 244 may play a significant role in determining the overall curvature of actuation beam 240 when actuation beam 240 is in its initial position. Generally speaking, tuning layer 244 is configured to have a predetermined tuning stress such that, in the closed position, sealing member 290 of actuation beam 240 contacts and applies a force to valve seat 270 to fluidly seal orifice 260. In some embodiments, the predetermined tuning stress is configured to cause actuation beam 240 to bend toward orifice 260 in the absence of an electrical signal such that, in the absence of valve seat 270, the sealing member surface of sealing member 290 is positioned a predetermined distance (e.g., 2 microns) below the lower surface of spacer member 280. For example, tuning layer 244 may be placed in a state of compressive stress as a result of the deposition of other layers described herein. Thus, a thicker tuning layer 244, when in its initial position, causes actuation beam 240 to bend more toward orifice 260. In one exemplary embodiment, tuning layer 244 is composed of silicon dioxide.

[0080] The barrier layer 400 acts as a barrier against the diffusion of materials contained in the piezoelectric layer 414 into the tuning layer 244. If left unchecked, such migration can lead to detrimental intermixing between the constituent materials within the layers, adversely affecting performance. In various embodiments, the barrier layer 400 is comprised of, for example, zirconium dioxide. As shown, the first electrode portion 402 comprises an adhesion layer 408 and a first electrode 410. The adhesion layer 408 facilitates deposition of the first electrode 410 on the barrier layer 400 and prevents diffusion of materials within the first electrode 410 into other layers. In various embodiments, the adhesion layer 408 is comprised of titanium dioxide. The first electrode 410 may be comprised of platinum, gold, rubidium, or any other suitable material to provide a conductive path for electrical signals sent to the actuation portion 242. In some embodiments, the first electrode portion 402 is provided only on select portions of the actuation beam 240. For example, the first electrode portion 402 may be provided only adjacent to and / or within the electrical connection portion 294 .

[0081] Actuating portion 242 may be formed from single or multiple layers of any suitable piezoelectric material. In the illustrated example, the active portion comprises a growth template layer 412 and a piezoelectric layer 414. Growth template layer 412 acts as a seed layer to promote growth of piezoelectric layer 414 with a desired texture (e.g., {001} crystal structure and corresponding texture) to ensure maximum piezoelectric response. In some embodiments, growth template layer 412 is composed of lead titanate. Piezoelectric layer 414 may be composed of any suitable material, for example, lead zirconate titanate (PZT).

[0082] The piezoelectric layer 414 may be deposited using any method, for example, using vacuum deposition or sol-gel deposition techniques. In some embodiments, the piezoelectric layer 414 may have a thickness in the range of approximately 1 to 6 microns (e.g., 1, 2, 3, 4, 5, or 6 microns) and is configured to generate a deflection of approximately 10 microns at the end of the actuation beam 240 when an electrical signal is applied thereto. A deflection of 10 microns (e.g., such that the surface of the sealing member 290 moves slightly less than that amount away from the valve seat 270) may be sufficient to generate a droplet at the orifice 260 having a desired size. In some embodiments, the piezoelectric layer 414 has a piezoelectric constant (d31 value) of approximately 140 to 160 pm / V. This value may allow the appropriate deflection of the actuation beam 240 to be generated by the electrical signal sent to the first electrode portion 402 and the second electrode portion 404.

[0083] As shown, the second electrode portion 404 is disposed on the actuation portion 242. In various embodiments, the second electrode portion 404 is configured similarly to the first electrode portion 402 described herein. Thus, application of a voltage to the first electrode portion 402 and / or the second electrode portion 404 induces a strain in the piezoelectric layer 414, bending the entire actuation beam 240 away from the orifice plate 250. By applying a periodic control signal to the first and second electrode portions, the periodic cycle of the actuation beam 240 generates droplets that are ejected from the orifice 260 at a desired frequency. While FIG. 7A shows the first electrode portion 402 and the second electrode portion 404 overlapping one another, in other locations, the first electrode portion 402 and the second electrode portion 404 may not overlap. This can limit or prevent electronic leakage between the first electrode portion 402 and the second electrode portion 404, which could damage the piezoelectric layer 414 or cause an electrical short.

[0084] In various embodiments, the electrodes included in the first electrode portion 402 and the second electrode portion 404 are deposited in an unannealed state. As a result, the electrodes are deposited in a substantially compressive state, which affects the overall curvature of the actuation beam 240 when in its initial position. The deposition mode of the piezoelectric layer 414 can affect the compressive state of the electrodes. For example, in some situations where the piezoelectric layer 414 is deposited (e.g., by a vapor deposition technique) and then cured at a predetermined temperature (e.g., about 700°C), the curing may anneal the electrodes 410, removing the compressive state. Such removal affects the overall balance of stress in the actuation beam 240, which alters its initial curvature. Therefore, it may be beneficial to use a low-temperature deposition process for the piezoelectric layer 414 (e.g., a low-temperature sol-gel deposition process or a plasma-enhanced chemical vapor deposition process) to prevent stress reversal within the electrodes. In various embodiments, the second electrode portion 404 may be annealed at a higher temperature than the first electrode portion 402, for example, to generate a predetermined tuning stress in the tuning layer 244.

[0085] 7A may extend substantially the entire length of actuation beam 240. Thus, there is overlap between electrode portions 402 and 404 and the reservoirs formed by microvalve 230. In various embodiments, the fluid contained within the reservoirs is conductive and / or corrosive to the materials forming first electrode portion 402 and second electrode portion 404. Therefore, it is preferable to separate electrode portions 402 and 404 from the reservoirs to prevent the fluid contained within the reservoirs from contacting electrode portions 402 and 404.

[0086] In this regard, passivation structure 406 is configured to provide such isolation. In the illustrated example, passivation structure 406 comprises a dielectric layer 416, an insulator layer 418, and a barrier layer 420. Barrier layer 420 may be composed of silicon nitride and acts as a diffusion barrier against water molecules and ions contained in the fluid to prevent corrosion of electrode portions 402 and 404. In some embodiments, insulator layer 418 comprises a silicon dioxide layer having a compressive stress that approximately balances the tensile stress in barrier layer 420. Dielectric layer 416 may be composed of aluminum oxide to prevent oxidation of other layers contained within actuation beam 240. In some embodiments, another metal layer is disposed on barrier layer 420. For example, the metal layer may be composed of talinum oxide or any other suitable chemically resistant metal to further enhance the protective properties of passivation structure 406. In certain embodiments, barrier layer 420 may be formed of Teflon or Parylene. In another embodiment, at least a portion of actuation beam 240, i.e., the structure formed by the layers shown in FIG. 7A, may be covered or overcoated with a Teflon or Parylene layer. Such an overcoat may prevent microcracks from forming in the layers of actuation beam 240. In yet another embodiment, the overcoat may comprise a metal layer, for example, a tantalum layer or a palladium layer.

[0087] The addition of the passivation structure 406 can significantly affect the initial positioning of the actuation beam 240 because the passivation structure 406 is offset from the neutral axis 422 of compression of the actuation beam 240. As shown, the neutral axis 422 is within the passivation layer 246, which means that the electrode portion 404 and the passivation structure 406 are furthest from it within the actuation beam 240. Given this, tensile or compressive stresses induced in such layers will significantly affect the initial bending of the actuation beam 240. Therefore, the thickness of the tuning layer 244 is selected based on the structure of the various constituent layers of the passivation structure 406.

[0088] 7B is a cross-sectional front view of actuation beam 240 showing the respective arrangements of layers included in actuation beam 240, according to an exemplary embodiment and not to scale. As shown, actuation beam 240 includes passivation layer 246, tuning layer 244, and barrier layer 400, as described with respect to FIG. 7A. First electrode portion 402 includes adhesion layer 408 (e.g., titanium dioxide) disposed on barrier layer 400, and conductive layer or electrode 410 (e.g., platinum, gold, rubidium, etc.) disposed thereon. First electrode portion 402 is configured to have a width that is smaller than the width of barrier layer 400, such that the ends of electrode portion 402 perpendicular to the longitudinal axis of actuation beam 240 are located inward of the ends of barrier layer 400 in the same direction.

[0089] The actuating portion 242, comprising a seed layer 412 and a piezoelectric layer 414, is conformally disposed on the first electrode portion 402 so as to extend beyond the lateral edges of the first electrode portion 402 and contact the barrier layer 400. In this manner, the piezoelectric layer completely surrounds or encloses at least a portion of the first electrode portion 402 that overlaps or is adjacent to the second electrode portion 404. The second electrode portion 404 comprises an adhesion layer 403 (e.g., titanium) and a conductive layer 405 (e.g., platinum, gold, rubidium, etc.). In some embodiments, the second electrode portion 404 may comprise only the conductive layer 405 disposed directly on the piezoelectric layer 414 (i.e., the adhesion layer 403 is omitted). Because the actuating portion 242 overlaps and extends beyond the ends of the first electrode portion 402, the actuating portion effectively electrically insulates the first electrode portion 402 from the second electrode portion 404 to prevent electron leakage and current migration that may be detrimental to the performance of the actuating beam 240.

[0090] The passivation structure 406 conformally coats the exposed portions of each of the other layers 246, 244, 400, 402, 242, and 404. However, the bottom surface of the passivation layer 246 may not be coated with the passivation structure 406. The passivation structure 406 may comprise a dielectric layer 416, an insulator layer 418, a barrier layer 420, and a top passivation layer 424. The barrier layer 420 may be composed of silicon nitride and acts as a diffusion barrier against water molecules and ions contained in the fluid to prevent corrosion of the electrodes 402 and 404. However, silicon nitride is typically in a state of tensile stress once deposited on the remaining layers. The insulator layer 418 is configured to counterbalance this tensile stress. For example, in some embodiments, the insulator layer 418 comprises a silicon dioxide layer having a compressive stress that approximately balances the tensile stress in the barrier layer 420. In various embodiments, a barrier layer 420 is disposed below the insulator layer 418. The dielectric layer 416 may be composed of aluminum oxide, titanium oxide, zirconium oxide, or zinc oxide to prevent oxidation of other layers included within the actuation beam 240. Thus, the passivation structure 406 serves to prevent both corrosion and oxidation—two major sources of defects caused by the presence of fluids—in the actuation beam 240, thus ensuring the long-term performance of the microvalve 230. Additionally, a top passivation layer 424 is disposed over the barrier layer 420 and may comprise a Teflon or Parylene layer. Such an overcoat can prevent microcracks from forming in the layers of the actuation beam 240 and can also protect underlying layers from plasma discharge (e.g., buried layers that may be exposed in subsequent fabrication operations). In certain embodiments, the top passivation layer 424 may comprise a metal layer, such as a tantalum or palladium layer. In some embodiments, another metal layer is disposed over the barrier layer 420. For example, the metal layer may be composed of Talinum oxide or any other suitable chemically resistant metal to further enhance the protective properties of the passivation structure 406 .

[0091] The jetting assembly, microvalve, and related components described with respect to FIGS. 8-12 may be implemented according to any of the previously described embodiments. Referring now to FIG. 8, a cross-sectional view of a sealing structure 800 for a microvalve is shown, according to an exemplary embodiment. For example, the sealing structure 800 may be an example of the sealing structure 500 described with respect to FIG. 6. As shown, an actuation beam 802 includes a cantilever portion 804. The cantilever portion 804 may extend from a base portion disposed on a spacer member. The spacer member may be disposed on an orifice plate 812 that includes an orifice 814. The cantilever portion 804 extends from the base portion toward the orifice 814 such that an overlapping portion 806 of the cantilever portion 804 overlaps the orifice 814.

[0092] The sealing structure 800 includes a sealing member 808 disposed in the overlapping portion 806 and a valve seat 810 disposed on the orifice plate 812. The sealing member 808 extends toward the orifice 814 such that an orifice-facing surface 816 contacts an upper surface 822 of the valve seat 810. The valve seat 810 surrounds the orifice 814 and defines an opening 818. In the illustrated example, the opening 818 is aligned with the orifice 814. In other words, the opening 818 and the orifice 814 define a fluid outlet having a substantially smooth, delimited surface. In various embodiments, the valve seat 810 is formed of a compliant material, such as SU-8. In another embodiment, the valve seat 810 may be formed of silicon. As described herein, actuation beam 802 may be configured to have a slight curvature or bias toward orifice 814 in an initial position, with orifice-facing surface 816 pressed into valve seat 810 to form a seal separating orifice 814 from volume 820 located near actuation beam 802.

[0093] In the example shown, the orifice 814 is cylindrical. In other embodiments, the orifice 814 may have any other suitable shape (e.g., star-shaped, square, rectangular, polygonal, elliptical, etc.). The valve seat 810 is substantially annular and has an inner diameter equal to or substantially equal to the diameter of the orifice 814. The valve seat 810 has an outer diameter greater than the inner diameter. The sealing member 808 is formed as a substantially cylindrical post or strut having a diameter between the inner and outer diameters of the valve seat 810. In the example shown, the diameter of the sealing member 808 is closer to the inner diameter than the outer diameter of the valve seat 810. The size of the sealing member 808 contributes to the resonant frequency of the actuation beam 802 (e.g., by affecting its overall weight and therefore the overall piezoelectric response of the actuation beam 802). Thus, in some embodiments, the diameter of the sealing member 808 is closer to the inner diameter to produce a desired resonant frequency when the size of the valve seat 810 is fixed. However, it will be appreciated that the thickness of the valve seat 810 (i.e., the difference between the inner and outer diameters of the valve seat 810) may vary radially in various alternative embodiments, as may the overall positioning of the outer edge of the sealing member 808 relative to the valve seat 810.

[0094] Referring now to Figure 9, a cross-sectional view of a sealing structure 900 is shown, according to an exemplary embodiment. The sealing structure 900 shares features with the sealing structure 800 described with respect to Figure 8. That is, Figure 9 incorporates common reference numbers to indicate the inclusion of such similar components.

[0095] As shown, in the sealing structure 900, a coating 902 is disposed on the upper surface 822 of the valve seat 810. In various embodiments, the coating 902 is a hydrophobic, elastomeric material, such as CYTOP®, Teflon®, polydimethylsiloxane (PDMS), or any other suitable hydrophobic or oleophilic material. The hydrophobic nature of the coating 902 promotes the dispersion of water droplets on the valve seat 810 and prevents coalescence of particulate matter on the upper surface 822. Thus, the coating 902 enhances the long-term durability of the sealing structure 900. Furthermore, the coating 902 can increase the elasticity or conformality of the valve seat 810, facilitating the formation of a seal at the interface between the orifice-facing surface 816 and the upper surface 822. In some embodiments, the coating 902 may be formed from a conformal material, such as gold.

[0096] Referring now to FIG. 10 , a cross-sectional view of a sealing structure 1000 is shown, according to an exemplary embodiment. The sealing structure 1000 shares features with the sealing structure 800 described with respect to FIG. 8 . That is, FIG. 10 incorporates common reference numerals to indicate the inclusion of such similar components. As shown in FIG. 10 , in the sealing structure 1000, a coating 1002 is disposed around the interior surface of the fluid outlet defined by the orifice 814 and the opening 818. In some embodiments, the coating 1002 may be composed of a hydrophobic material, such as CYTOP®, Teflon®, PDMS, or any other suitable hydrophobic or oleophilic material. The hydrophobicity of the coating 1002 promotes the formation and movement of a droplet within the orifice 814 upon actuation of the actuation beam 802 (e.g., as a result of an electrical signal applied thereto).

[0097] 9 and 10. In other words, the sealing structure may include both a coating covering the inner surface of the fluid outlet and a coating on the top surface 822. Advantageously, such an implementation provides hydrophobicity within the fluid outlet and the top surface 822.

[0098] 11 and 12, cross-sectional views of sealing structures 1100 and 1200 are shown, according to example embodiments. Sealing structures 1100 and 1200 share components with sealing structure 800 described with respect to FIG. 8 and include similar reference numbers to indicate the incorporation of such similar components.

[0099] 11, sealing structure 1100 differs from sealing structure 800 in that it includes a sealing member 1102 having a larger diameter than sealing member 808 described with respect to FIG. 8. Thus, side 1104 of sealing member 1102 is closer to the outer diameter of valve seat 810 than to the inner diameter. Such an arrangement provides a larger surface area for contacting top surface 822 of valve seat 810 to form the separating seal described herein. However, it will be appreciated that the larger size of sealing member 1102 may contribute to the resonant frequency of actuation beam 802 and other operating aspects of any incorporating jetting assembly (e.g., droplet size, operating frequency, etc.).

[0100] As shown in FIG. 12, sealing structure 1200 differs from sealing structure 1100 in that sealing structure 1200 includes a sealing member 1202 having a larger diameter than sealing member 1102. An outer surface 1204 of sealing structure 1200 is substantially aligned with the outer diameter of valve seat 810. In other words, the diameter of sealing member 1202 is substantially aligned with the outer diameter of valve seat 810 (e.g., + 10%。 Such an arrangement provides a larger surface area for forming a separating seal, with the understanding that such modifications may affect other aspects of the performance of any incorporated jetting assembly (e.g., operating frequency). In yet another embodiment, the diameter of sealing member 1202 may be larger than the outer diameter of valve seat 810. In some embodiments, silicon black may be formed on the orifice-facing surface of sealing member 1102 or 1202, thereby enhancing the fluid seal of the sealing member against valve seat 810.

[0101] 13 , a cross-sectional view of a sealing structure 1300 of a microvalve is shown, according to an illustrative embodiment. As shown, a cantilevered portion 1304 of an actuation beam 1302 extends toward an orifice 1318 in an orifice plate 1316. An overlapping portion 1306 of the cantilevered portion 1304 overlaps the orifice 1318. The sealing structure 1300 includes a sealing member 1308 disposed in the overlapping portion 1306 and extending toward the orifice 1318. In various embodiments, the sealing member 1308 is shaped to correspond to the orifice 1318. For example, in various embodiments, both the sealing member 1308 and the orifice 1318 are substantially cylindrical, and the orifice 1318 has a diameter smaller than the diameter of the sealing member 1308.

[0102] The sealing structure 1300 further includes a stopper 1310 disposed on the orifice-facing surface 1322 of the sealing member 1308. The stopper 1310 can be composed of a compliant material, such as SU-8, PDMS, or any other suitable material. As shown, the stopper 1310 includes a narrow portion 1312 attached to the orifice-facing surface 1322 and a wide portion 1314 extending from the narrow portion 1312. The narrow portion 1312 and the wide portion 1314 can be substantially cylindrical such that the stopper 1310 forms a substantially top-hat shaped structure. In various embodiments, the wide portion 1314 has a cross-sectional area that is greater than the cross-sectional area of ​​the narrow portion 1312.

[0103] The orifice-facing surface 1324 of the stopper 1310 includes a protrusion 1326 shaped to correspond to the orifice 1318. The protrusion 1326 fits into the orifice 1318, and the protrusion is aligned with the orifice 1318 to ensure a seal is formed when the orifice-facing surface 1324 contacts the orifice plate 1316. In FIG. 13 , the stopper 1310 is shown with a portion 1320 disposed on the orifice-facing surface 1322 and a remaining portion 1328 disposed on the orifice plate 1316. The stopper 1310 includes the portion 1320 and the remaining portion 1328 at an intermediate stage of its construction. In various embodiments, after construction of the stopper 1310 is complete, the stopper 1310 is a unitary structure extending continuously between the orifice-facing surfaces 1322 and 1324.

[0104] 5A-B, the actuation beam 1302 may be configured with an initial curvature or bias such that the orifice-facing surface 1324 contacts the orifice plate 1316 and the protrusion 1326 fits into the orifice 1318 to form a seal at the interface between the stopper 1310 and the orifice plate 1316. In other words, the actuation beam 1302 may apply a downward force to form a seal as a result of direct contact between the stopper 1310 and the orifice plate 1316. The protrusion 1326 ensures a minimal gap at the interface to form the seal.

[0105] 14 , a cross-sectional view of a sealing structure 1500 of a microvalve is shown, according to an illustrative embodiment. As shown, a cantilevered portion 1504 of an actuation beam 1502 extends toward an orifice 1516 in an orifice plate 1514. An overlapping portion 1506 of the cantilevered portion 1504 overlaps the orifice 1516. The sealing structure 1500 includes a sealing member 1508 disposed in the overlapping portion 1506 and extending toward the orifice 1516. In various embodiments, the sealing member 1508 is shaped to correspond to the orifice 1516. For example, in various embodiments, both the sealing member 1508 and the orifice 1516 are substantially cylindrical, and the orifice 1516 has a diameter smaller than the diameter of the sealing member 1508.

[0106] The sealing structure 1500 also includes a valve seat 1512. The valve seat 1512 surrounds the orifice 1516 and defines an opening that aligns with the orifice 1516 to define the fluid outlet. In various embodiments, the valve seat 1510 is formed of a compliant material, such as SU-8. In alternative embodiments, the valve seat 810 may be formed of a non-compliant material, such as glass or silicon. As shown, a sealing blade or protrusion 1510 extends from the orifice-facing surface 1518 of the sealing member 1508. The sealing blade 1510 may be shaped to correspond to the outer periphery of the sealing member 1508. In some embodiments, the sealing blade 1510 is substantially annular and has inner and outer diameters that fit between the inner and outer diameters of the valve seat 1512. The sealing blade 1510 extends toward the upper surface 1520 of the valve seat 1512 and contacts the valve seat 1512 when the actuation beam 1502 is positioned in its initial position. The sealing blade 1510 provides a center point for the downward force applied by the actuation beam 1502 so that a seal is formed at the interface between the tip of the sealing blade 1510 and the valve seat 1512. As shown in FIG. 14, the sealing blade 1510 may have a knife-edge tip with a suitable tip radius (e.g., in the range of 0.1 to 1.0 microns). In another embodiment, the sealing blade 1510, or any other sealing blade defined herein, may have a flat or rounded tip.

[0107] Referring now to FIG. 15 , a cross-sectional view of a sealing structure 1600 is shown, according to an exemplary embodiment. The sealing structure 1600 includes similar components as the sealing structure 1500 described with respect to FIG. 14 and includes similar reference numerals to indicate the incorporation of such similar components. The sealing structure 1600 differs from the sealing structure 1500 described with respect to FIG. 14 in that the sealing structure 1600 includes another sealing blade 1602. The another sealing blade 1602 may be concentric with and surround the sealing blade 1510 such that the sealing blades 1510 and 1602 form concentric circles that contact the top surface 1520. In other embodiments, the sealing blades 1510 and 1602 may be non-concentric with the orifice or may have a non-circular cross-section (e.g., oval, elliptical, polygonal, asymmetric, etc.).

[0108] The additional sealing blade 1602 increases the contact area between the sealing member 1508 and the valve seat 1512. The increased contact area not only improves the quality of the seal formed at the interface between the valve seat 1512 and the seal blades 1510 and 1602, but also makes the sealing structure 1600 more effective at dealing with small particulate matter that may get between the sealing member 1508 and the valve seat 1512. Furthermore, the additional sealing blade 1602 improves the durability of the sealing structure 1600 because the additional sealing blade 1602 serves as a backup point of contact with the valve seat 1512. In other words, if the sealing blade 1510 is broken at a particular circumferential point, the additional sealing blade 1602 will still form a seal at that point, allowing the sealing structure 1600 to function.

[0109] FIG. 16 is a bottom view of a sealing member 1614 of an actuation beam (e.g., any of the actuation beams defined herein) including a sealing structure 1650, according to an exemplary embodiment. The sealing member 1614, as shown in FIG. 16, has a substantially cylindrical cross-section. In alternative embodiments, the sealing member 1614 may have any other suitable cross-section, such as a square, rectangular, star-shaped, elliptical, etc. The sealing structure 1650 includes a first set 1610a of sealing blades extending axially from and concentrically arranged on the orifice-facing surface 1618 of the sealing member 1614. A first gap 1612a may be provided between each adjacent first sealing blade 1611a of the first set 1610a of sealing blades such that each of the first set 1610a of sealing blades resembles a segment of a first circle (e.g., an arc segment). As described with respect to the first set of sealing blades 1610a, the second set of sealing blades 1610b may be concentrically disposed within the first set of sealing blades 1610a, with a second gap 1612b provided between each adjacent second sealing blade 1611b in the second set of sealing blades 1610b. Similarly, as described with respect to the first and second sets of sealing blades 1610a / b, the third set of sealing blades 1610c may be concentrically disposed within the second set of sealing blades 1610b, with a third gap 1612c provided between each adjacent third sealing blade 1611c in the third set of sealing blades 1610b. In another embodiment, more sets of sealing blades may be concentrically disposed on the orifice sealing member surface 1618. The gaps 1612a / b / c of ​​the sets of sealing blades 1610a / b / c may be staggered relative to one another, i.e., do not concentrically overlap. Such an arrangement not only provides better sealing but can also trap any particles (eg, contaminants, photoresist particles), etc. between the sets of sealing blades 1610a / b / c.

[0110] 17, a flow diagram of a method 1700 for constructing a sealing structure for a microvalve is shown, according to an exemplary embodiment. Method 1700 can be performed to construct sealing structures 1500 and 1600 described with respect to FIGS. 14, 15, and 16. Method 1700 may include fewer or other steps, depending on the implementation.

[0111] In step 1702, an orifice plate comprising an orifice is provided. For example, in some embodiments, the orifice plate is formed from an SOI wafer (e.g., a portion of the wafer may be removed to form the orifice). In some embodiments, after the orifice is formed, a valve seat is placed over the orifice. The valve seat may define an opening surrounding the orifice and aligned with the orifice to form a fluid outlet. In step 1704, an actuation beam is provided comprising a sealing member having a surface facing the orifice. For example, as described herein, the actuation beam may be formed by etching a portion of a double SOI wafer such that the spacer member and the sealing member are formed in a single manufacturing step. A surface of the sealing member may form the surface facing the orifice.

[0112] In step 1706, an etch-resistant material is deposited on the surface facing the orifice. The etch-resistant material (e.g., silicon dioxide or silicon nitride) differs in chemical composition from the sealing member of the actuation beam such that the etch-resistant material slows the chemical process (e.g., etching) that removes portions of the sealing member. In step 1708, portions of the etch-resistant material are etched away so that the remaining portions of the etch-resistant material on the surface facing the orifice correspond to the position and shape of a sealing blade (e.g., one or more sealing blades). For example, the remaining portions of the etch-resistant material cover only a portion of the sealing member surface. In some embodiments, the etch-resistant material may be substantially ring-shaped to generate an annular sealing blade. In various embodiments, the etch-resistant material is comprised of silicon dioxide. That is, a layer of etch-resistant material can be deposited by chemical vapor deposition or any other suitable method. The layer of etch-resistant material may then be patterned using any suitable method (e.g., using an etch mask, photolithography, etc.). In some embodiments, multiple portions of the etch-resistant material are formed to facilitate the formation of multiple sealing blades. In another embodiment, a release layer (e.g., photoresist) may be deposited on the orifice-facing surface and photolithographically patterned to create a shape or shapes therein corresponding to the size and position of the sealing blade. An etch-resistant material may be disposed on the release layer such that the etch-resistant material contacts the orifice sealing member surface in the patterned portions but is disposed on the release layer at all other locations. The release layer may then be removed such that any portion of the etch-resistant material disposed on the release layer is removed with it, leaving behind a patterned etch-resistant material corresponding to the position and shape of the sealing blade disposed on the orifice-facing surface.

[0113] In step 1710, the sealing member is isotropically etched for a first predetermined time. The isotropic etch (e.g., a wet etch) may be configured to etch away a portion of the sealing member beneath the etch-resistant material, for example, to form the tip of a sealing blade. In step 1712, prior to attaching the actuation beam to the orifice plate, the sealing member is anisotropically etched (e.g., a deep reactive ion etching process, e.g., a Bosch process) for a second predetermined time to remove a portion of the sealing member, such that the remaining unetched portion forms the sealing blade. The second predetermined time may be varied to determine the height of the sealing blade. For example, the etch-resistant material may slow or completely prevent etching of portions of the sealing member covered by the etch-resistant material. Thus, the exposed portions of the sealing member are removed at a faster rate than portions covered by the etch-resistant material. Thus, a protrusion is formed beneath the etch-resistant material, forming the sealing blade. The etching may be performed for a time selected based on the desired length of the sealing blade. For example, the desired length may be selected based on the expected durability of the resulting sealing blade. The estimated durability may depend at least in part on other dimensions of the sealing blade (e.g., radial thickness). In alternative embodiments, rather than providing an etch-resistant material and applying an etchant to the sealing member surface, the sealing blade may be formed using other means. For example, the sealing blade may be formed using any suitable molding method.

[0114] In step 1714, in some embodiments, the etch-resistant material may be removed. For example, the etch-resistant material (e.g., silicon dioxide) may be removed by a wet etch (e.g., a buffered hydrofluoric acid etch) or a dry etch process. In some embodiments, method 1700 may also include anisotropically etching a portion of the actuation beam to form a sealing member and releasing the actuation beam from the substrate to form a cantilevered portion of the actuation beam. In step 1716, after the sealing blade is formed on the sealing member surface, the actuation beam is attached to the orifice plate such that the sealing member surface is aligned with a valve seat disposed on the orifice plate. For example, a spacer member attached to the actuation beam may be positioned and attached to the orifice plate such that the sealing member surface is aligned with the orifice. When the actuation beam is positioned in an initial position, the sealing member surface is aligned with the orifice such that the sealing blade is positioned to contact the top surface of the valve seat.

[0115] 18 , a cross-sectional view of a sealing structure 1800 of a microvalve is shown, according to an illustrative embodiment. As shown, a cantilevered portion 1804 of an actuation beam 1802 extends toward an orifice 1816 in an orifice plate 1814. An overlapping portion 1806 of the cantilevered portion 1804 overlaps the orifice 1816. The sealing structure 1800 includes a sealing member 1808 disposed in the overlapping portion 1806 and extending toward the orifice 1816. In various embodiments, the sealing member 1808 is shaped to correspond to the orifice 1816. For example, in various embodiments, both the sealing member 1808 and the orifice 1816 are substantially cylindrical, and the orifice 1816 has a diameter smaller than the diameter of the sealing member 1808.

[0116] As shown, the sealing member 1808 includes an orifice-facing surface 1818 and a side surface 1822. A portion of the sealing member 1808 is removed at a corner between the orifice-facing surface 1818 and the side surface 1822. In various embodiments, the removed portion of the sealing member 1808 extends circumferentially around the entire sealing member 1808. Accordingly, the sealing member includes a narrowed portion 1824 at its end. The narrowed portion may have a diameter approximately equal to the diameter of the orifice 1816. A sealing flap 1810 extends radially outward from the narrowed portion 1824 on the orifice-facing surface 1818. As shown, the sealing flap 1810 contacts an upper surface 1820 of the valve seat 1812 when the actuation beam 1802 is in the default position to form a seal at the interface between the sealing member 1808 and the valve seat 1812. The sealing flap 1810 provides a compressible medium through which a seal can be formed. In another embodiment, the sealing flap may be provided on the inner rim of the valve seat 1812. In such an embodiment, the narrow portion 1824 of the sealing member 1808 may be configured to at least partially enter an opening defined in the valve seat 1812 and may engage the sealing flap disposed on the inner rim of the valve seat 1812 to form a fluid-tight seal.

[0117] 19, a flow diagram of a method 1900 for constructing a sealing structure for a microvalve is shown, according to an example embodiment. Method 1900 can be performed to construct sealing structure 1800 as described with respect to FIG. 18. Method 1900 may include fewer or other steps, depending on the implementation.

[0118] In step 1902, an orifice plate comprising an orifice is provided. For example, in some embodiments, the orifice plate is formed from an SOI wafer (e.g., a portion of the wafer may be removed to form the orifice). In some embodiments, after the orifice is formed, a valve seat is placed over the orifice. The valve seat may define an opening surrounding the orifice and aligned with the orifice to form a fluid outlet. In step 1904, an actuation beam is provided comprising a sealing member having a surface facing the orifice and a side surface. For example, as described herein, the actuation beam may be formed by etching a portion of a double SOI wafer such that the spacer member and the sealing member are formed in a single manufacturing step. The sealing member may be substantially cylindrical. The surface facing the orifice may comprise an end surface of the sealing member, and the side surface may comprise a curved surface of the sealing member.

[0119] In step 1906, an etch-resistant material is deposited over the entire surface facing the orifice. The etch-resistant material (e.g., silicon dioxide or silicon nitride) differs in chemical composition from the sealing member of the actuation beam such that the etch-resistant material slows the chemical process (e.g., etching) that removes the sealing member. In various embodiments, the etch-resistant material comprises silicon dioxide. That is, the layer of etch-resistant material can be deposited by chemical vapor deposition or any other suitable method.

[0120] In step 1908, the sealing member is selectively etched (e.g., with an etchant, such as TMAH or KOH) to remove portions of the sealing member on the sides of the sealing member below the etch-resistant material, with the etch-resistant material extending over the removed portions of the sealing member to form a sealing flap. For example, an etchant may be applied to the edges of the sealing member near the sealing member surface so that portions of the sealing member not covered by the etch-resistant material (e.g., at corners separating the sealing member surface from the sides) are selectively etched and removed. The remaining portions of the etch-resistant material may then form the sealing flap. Thus, the sealing flap may have little or no material disposed on either side of it, forming a conformal layer that can form a seal against various surfaces. In another embodiment, the etch-resistant material may be removed after step 1908, and a separately fabricated sealing flap formed from a conformal material (e.g., PDMS) may be disposed on the surface facing the orifice.

[0121] In step 1910, the actuation beam is attached to the orifice plate such that a portion of the sealing flap extends over the orifice. For example, a spacer member attached to the actuation beam may be positioned and attached to the orifice plate such that a surface of the sealing member aligns with the orifice. In some embodiments, the sealing member is substantially centered relative to the orifice. As a result, the sealing flap may extend radially beyond the inner diameter of the valve seat such that a seal can be formed between the valve seat and the sealing flap when the actuation beam is positioned in the initial position.

[0122] 20, a flow diagram of a method 2000 for constructing a microvalve is shown, according to an exemplary embodiment. Method 2000 can be performed to construct any of the microvalves described herein. Method 2000 may include fewer or other steps, depending on the implementation.

[0123] In step 2002, an orifice plate comprising an orifice is provided. For example, in some embodiments, the orifice plate is formed from an SOI wafer (e.g., a portion of the wafer may be removed to form the orifice). In some embodiments, after the orifice is formed, a valve seat is placed over the orifice. The valve seat may define an opening surrounding the orifice and aligned with the orifice to form a fluid outlet. In step 2004, an actuation beam is provided comprising a sealing member having a surface facing the orifice and a side surface. For example, as described herein, the actuation beam may be formed by etching a portion of a double SOI wafer such that the spacer member and the sealing member are formed in a single manufacturing step. The sealing member may be substantially cylindrical. The surface facing the orifice may comprise an end surface of the sealing member.

[0124] In step 2006, a portion of the sealing structure is formed on at least one of the sealing member and the orifice plate. For example, in some embodiments, the portion of the sealing structure member comprises a valve seat formation on a surface of the orifice plate. The valve seat may surround the orifice plate and define openings that align with the orifices to form the fluid outlets. The valve seat may be composed of a compatible material, such as SU-8, and may be deposited using any suitable method (e.g., spin coating or spray coating).

[0125] In some embodiments, a portion of the sealing structure is formed on the surface of the sealing member facing the orifice. This may require the steps described with respect to FIGS. 14, 17, and 18 to form a stopper, at least one sealing blade, or a sealing flap. As will be appreciated, any combination of these structures may be used to form a portion of the sealing member. In certain embodiments, multiple portions of the sealing structure may be formed. For example, the valve seat may be formed on the orifice plate in addition to the formation of components (e.g., compliant structure, sealing blade, and / or sealing flap) on the sealing member surface of the sealing member or valve seat. In certain embodiments, a portion of the sealing structure may be formed on a side surface of the sealing structure (e.g., side surface 1822 described with respect to FIG. 18). For example, in one embodiment, the sealing member is configured to fit within a fluid outlet formed by the valve seat and orifice plate, and the sealing structure component extends radially outward from the side surface. The component may contact the top surface of the valve seat to form a seal separating the orifice from a volume proximate to the actuation beam.

[0126] In step 2008, the actuation beam is attached to the orifice plate, with the sealing member overlapping the orifice, and the sealing structure forming a seal separating the orifice from a volume adjacent to the actuation beam. For example, a spacer member attached to the actuation beam may be positioned and attached to the orifice plate such that the surface facing the orifice is aligned with the orifice. In some embodiments, the sealing member is substantially centered relative to the orifice. As a result, a portion of the sealing member formed in step 2006 may contact either the orifice plate or a valve seat thereon when the actuation beam is positioned in its initial position.

[0127] 21 , a cross-sectional view of a sealing member 2100 of a microvalve is shown, according to an exemplary embodiment. The sealing member 2100 may be the sealing member 808 included in the sealing structure 800 described with respect to FIG. 8 or any exemplary embodiment of the sealing structures described herein. As shown, the sealing member 2100 is substantially cylindrical and has a diameter 2102. The diameter 2102 may be selected based on the size of the orifice in the orifice plate. For example, in some embodiments, the diameter 2102 is approximately 150% of the diameter of the orifice (e.g., the orifice may have a diameter of 60 microns, and the diameter 2102 may be 90 microns).

[0128] Referring now to FIG. 22 , a cross-sectional view of a valve seat 2200 of a microvalve is shown, according to an exemplary embodiment. The valve seat 2200 may be the valve seat 810 included in the sealing structure 800 described with respect to FIG. 8 or any exemplary embodiment of the sealing structure described herein. As shown, the valve seat 2200 is annular and includes an inner diameter 2202 and an outer diameter 2204. The inner diameter 2202 and the outer diameter 2204 may define an included range of diameters for the sealing member. For example, in embodiments in which the sealing member 2100 described with respect to FIG. 21 is used in conjunction with the valve seat 2200, the diameter 2102 may be selected to be larger than the inner diameter 2202. In some embodiments, the diameter 2102 is between the inner diameter 2202 and the outer diameter 2204. In some embodiments, diameter 2102 is equal to outer diameter 2204, and the microvalve is configured such that sealing member 2100 is substantially aligned with valve seat 2200, such that the outer surface of the sealing member is substantially flush with valve seat 2200. In some embodiments, diameter 2102 is larger than outer diameter 2204, such that the outer edge of sealing member 2100 overhangs the valve seat in the assembled microvalve.

[0129] 23 , a cross-sectional view of a sealing structure 2300 of a microvalve is shown, according to an illustrative embodiment. As shown, a cantilevered portion 2304 of an actuation beam 2302 extends toward an orifice 2316 in an orifice plate 2314. An overlapping portion 2306 of the cantilevered portion 2304 overlaps the orifice 2316. The sealing structure 2300 comprises a sealing member 2308 disposed in the overlapping portion 2306 and extending toward the orifice 2316. In various embodiments, the sealing member 2308 is shaped to correspond to the orifice 2316. For example, in various embodiments, both the sealing member 2308 and the orifice 2316 are substantially cylindrical, and the orifice 2316 has a diameter smaller than the diameter of the sealing member 2308.

[0130] The sealing structure 2300 also includes a valve seat 2312. The valve seat 2312 surrounds the orifice 2316 and defines an opening that aligns with the orifice 2316 to define the fluid outlet. In various embodiments, the valve seat 2312 is formed of a compliant material, such as a photoresist (e.g., SU-8). As shown, a plurality of sealing blades or protrusions 2310 extend from the orifice-facing surface 2318 of the sealing member 2308. The sealing blades 2310 may be shaped to correspond to the outer periphery of the sealing member 2308 (e.g., arranged concentrically on the orifice-facing surface 2318). In some embodiments, the sealing blades 2310 are substantially annular and have inner and outer diameters that fit between the inner and outer diameters of the valve seat 2312.

[0131] As shown in FIG. 23 , the sealing layer 2320 may be disposed on the valve seat 2312. The sealing layer 2320 may comprise, for example, a metal (e.g., gold or platinum) layer or any other suitable layer. In various embodiments, a plurality of recesses 2322 may be formed on the sealing layer 2320. The plurality of recesses 2322 may be formed, for example, by an etching process and may be disposed at positions corresponding to the positions of the plurality of sealing blades 2310. In certain embodiments, the plurality of recesses 2322 are formed by cold forging by repeatedly hammering the plurality of sealing blades 2310 onto the sealing layer 2320 (e.g., by cyclic application of an electrical signal to the actuation beam 2302). The sealing blades 2310 extend toward the sealing layer 2320 and contact the bases of the corresponding recesses 2322 when the actuation beam 2302 is disposed in the initial position. The spacing between adjacent sealing blades 2310 and the distance between the orifice-facing surface 2318 and the orifice plate 2314 may be configured to push small particles P (e.g., dust, photoresist debris, etc.) out of the seal formed between the sealing blade 2310 and the valve seat 2312, for example, toward and out of the orifice 2316. Additionally, mating of multiple sealing blades 2310 with corresponding recesses 2322 may facilitate forming a better fluid-tight seal between the sealing member 2308 and the valve seat 2312. In certain embodiments, a filter (e.g., 5, 10, 15, or 20 micron) may be positioned in a fluid manifold upstream of a septum provided in an injection assembly including a microvalve with the sealing structure 2300 to filter dust or other fine particulate matter from the fluid.

[0132] In certain embodiments, the valve seat disposed on the orifice plate may be formed from silicon, and the sealing layer may be formed from silicon oxide or silicon nitride. For example, FIG. 24 illustrates a process 2400 used to provide a sealing layer 2420 on a valve seat 2412. In step 1, a silicon valve seat 2412 is provided on an orifice plate 2414, with an orifice 2416 defined therein. The orifice plate 2414 may comprise any of the orifice plates defined herein. The valve seat 2412 may be formed from silicon and deposited thereon, for example, by a silicon epitaxial growth process, followed by photolithographic patterning and etching, or may comprise a portion of silicon (e.g., a silicon ring) disposed around the orifice 2416. The sealing layer 2420 (e.g., a silicon oxide or silicon nitride sealing layer) is disposed on the valve seat 2412. The encapsulation layer 2420 may be deposited using a physical vapor deposition process (eg, a chemical vapor deposition process or a plasma-enhanced vapor deposition process).

[0133] In step 2, a plurality of openings 2422 are defined in the silicon oxide sealing layer 2420 at predetermined locations such that the sealing layer 2420 forms a plurality of silicon oxide or silicon nitride rings 2421. The plurality of openings 2422 may be formed by photolithography and etching (e.g., using buffered hydrofluoric acid or a dry plasma etching process) processes to expose the surface of the silicon valve seat 2412 at predetermined locations. In step 3, the silicon valve seat 2412 may be selectively etched at the plurality of openings 2422 using an etchant that selectively etches silicon (e.g., using a potassium hydroxide or tetramethylammonium oxide etchant or a dry plasma etching process) to form a plurality of recesses 2424 in the silicon valve seat 2412. In some embodiments, the plurality of recesses 2424 may correspond to a plurality of sealing blades (e.g., sealing blades 2310) disposed on a surface facing the orifice of the actuation beam (e.g., actuation beam 2302). In another embodiment, the multiple rings 2421 may function as sealing blades such that the multiple sealing blades may be excluded from the actuation beam. While process 2400 describes a silicon valve seat 2412 having a silicon oxide or silicon nitride sealing layer 2420 disposed thereon, it will be appreciated that in another embodiment, the valve seat 2412 and / or sealing layer 2420 may be formed from any other suitable material, such as a negative photoresist (e.g., SU-8, polymethyl methacrylate, etc.), PDMS, silicone rubber, etc., and may be formed using photolithography and etching processes (e.g., any combination of the processes described herein) or mechanically disposed thereon. Furthermore, in another embodiment, the steps of process 2400 may be used to form a sealing member having multiple rings on the tip of an actuation beam.

[0134] 25, a cross-sectional view of a microvalve 2530 included in a jetting assembly (e.g., jetting assembly 100, 200, 200b) is shown, according to an illustrative embodiment. An input fluid manifold 2510 couples to the microvalve 2530. As shown, the input fluid manifold 2510 and the microvalve 2530 define a reservoir 3000 configured to hold a volume of pressurized fluid received from an external fluid supply (e.g., via carrier 202, 202b). In various embodiments, the pressurized fluid held in reservoir 3000 is a combination of ink and another fluid in a liquid state.

[0135] In various embodiments, the input fluid manifold 2510 may be pre-formed prior to attachment to the microvalve. In some embodiments, the input fluid manifold 2510 may be formed by a glass body having any suitable thickness (e.g., about 500 microns). In another embodiment, the input fluid manifold 2510 may be formed from silicon. In some embodiments, the input fluid manifold 2510 may be coupled to a top surface of an actuation beam 2540 (e.g., any of the actuation beams 240, 240b described herein) via a first adhesive structure 2548 at a base portion 2542 of the actuation beam 2540 disposed and secured on a spacer member 2580. The first adhesive structure 2548 may comprise a plurality of adhesive rings similar to those described with respect to FIG. 4A or 4B. The adhesive may include SU-8 or any other suitable adhesive and may be applied to the bottom surface of the input fluid manifold 2510 and / or the top surface of the actuation beam 2540. In another embodiment, the first adhesive structure 2548 may be formed from silicon or glass and coupled to the actuation beam 2540 by glass frit, solder, adhesive, fusion bonding, eutectic bonding, or stiction. The electrodes 2504 are disposed in vias defined in the base of the actuation beam 2540 and are electrically coupled to a piezoelectric layer defined in the actuation beam 2540. As described herein, the vias may correspond to channels or openings 2512 defined in the input fluid manifold 2510 and may be filled with an encapsulant.

[0136] The microvalve 2530 also includes an orifice plate 2550 attached to the actuation beam 2540 via a spacer member 2580. As shown in FIG. 25, the second adhesive structure 2556 may be similar to the first adhesive structure 2548 and may include multiple rings or loops of an adhesive material (e.g., SU-8). In some embodiments, multiple grooves or teeth 2582 may be defined in a bottom surface of the spacer member 2580 facing the orifice plate 2550. The adhesive included in the adhesive structure 2556 may penetrate into the grooves 2582 to provide a substantially higher bond strength with the spacer member 2580 compared to embodiments in which the grooves 2582 are not defined.

[0137] In some embodiments, the support beam 2558 may extend from the orifice plate 2550 toward the spacer member 2580 and may be configured to define a separation distance between the orifice plate 2550 and the spacer member 2580, whereby the actuation beam 2540 may also function as a guard ring to prevent solvent solutions (e.g., contained in fluids used in the microvalve 2530) from seeping under the spacer member 2580 during use of the microvalve 2530. In certain embodiments, a support beam conformal layer 2559 may be disposed at the tip of the support beam 2558 adjacent to the spacer member 2580. The support beam conformal layer 2559 may comprise a gold layer or any other suitable conformal layer. In some embodiments, the second adhesive structure 2556 may also be formed from silicon or glass and coupled to the actuation beam spacer member by glass frit, solder, adhesive, fusion bonding, eutectic bonding, or stiction.

[0138] Orifice plate 2550 is substantially planar and includes an orifice 2560 extending between its surfaces. A valve seat 2570 may be disposed around the rim of orifice 2560 on the surface of orifice plate 2550 facing actuation beam 2540. Valve seat 2570 defines an internal opening 2571 substantially aligned with orifice 2560 to form an outlet for pressurized fluid supplied to microvalve 2530. In some embodiments, a valve seat conformal layer 2572 (e.g., a gold layer) may be disposed on the surface of valve seat 2570 facing actuation beam 2540.

[0139] In some embodiments, the orifice plate 2550 may be substantially flat, for example, having a flatness coefficient of variation of less than 3 microns across at least 15 mm of the length and width of the orifice plate 2550, such that the orifice plate 2550 is substantially free of warping or bending. Additionally, the orifice plate 2550 may have any suitable thickness. In some embodiments, the orifice plate 2550 may have a thickness in the range of 30 microns to 90 microns (e.g., 30, 40, 50, 60, 70, 80, 90, or 100 microns). In other embodiments, the orifice plate 2550 may have a thickness in the range of 100 microns to 900 microns (e.g., 100, 150, 200, 250, 300, 350, 400, 500, 600, 700, 800, or 900 microns). A thicker orifice plate 2550 may facilitate achieving a flatter orifice plate.

[0140] The actuation beam 2540 comprises a base portion 2542 disposed on the spacer member 2580 and a cantilever portion 2544 extending from the base portion toward the orifice 2560. The actuation beam 2540 is substantially similar to the actuation beams 240, 240b, except for the differences described herein below. A sealing member 2590 extends from a portion of the actuation beam 2540 that overlaps the orifice 2560. In some embodiments, the sealing member 2590 is configured to have a shape that substantially corresponds to the shape of the orifice 2560 (e.g., a cylindrical shape).

[0141] The sealing blade 2592 extends from the orifice-facing surface of the sealing member 2590 toward the valve seat 2570. The sealing blade 2592 may be shaped to correspond to the outer periphery of the sealing member 2590. In some embodiments, the sealing blade 2592 is substantially annular and has inner and outer diameters that fit between the inner and outer diameters of the valve seat 2570. The sealing blade 2592 extends toward the upper surface of the valve seat 2570 and contacts the valve seat 2570 when the actuation beam 2540 is disposed in the closed position. The sealing blade 2592 provides a center point for the downward force applied by the actuation beam 2540 so that a seal is formed at the interface between the tip of the sealing blade 2592 and the valve seat 2570.

[0142] 25. Zooming in even further, FIG. 26 is a close-up view of a portion of microvalve 2530 indicated by arrow A in FIG. 25. As shown in FIG. 25, the tip of sealing blade 2592 is substantially flat and, in some embodiments, may be coated with a sealing blade conformal layer (e.g., a gold layer). FIG. 26 shows the tip of the sealing blade coated with resist 2591, which acts as an etch mask to enable selective etching of sealing member 2590 to form sealing blade 2592, which is later removed. In some embodiments, resist width X2 of resist 2591 is in the range of 1 to 15 microns (e.g., 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, or 15 microns), such that sealing blade width X1 of sealing blade 2592 is in the range of 8 to 12 microns (e.g., 8, 9, 10, 11, or 12 microns). The resist inner cross-sectional dimension Y1 (e.g., inner diameter) can be in the range of 20 to 100 microns (e.g., 20, 30, 40, 50, 60, 70, 80, 85, 90, 95, or 100 microns), the resist outer cross-sectional dimension Y2 (e.g., outer diameter) can be in the range of 30 to 120 microns (e.g., 30, 40, 50, 60, 70, 80, 90, 100, 105, 110, 115, or 120 microns), and the sealing member outer cross-sectional dimension Y3 (e.g., outer diameter) of sealing member 2590 can be in the range of 80 to 140 microns (e.g., 80, 90, 100, 110, 120, 125, 130, 135, or 140 microns).

[0143] The inner cross-sectional dimension Z1 of the valve seat 2570 (e.g., the diameter of the opening 2571 defined in the valve seat 2570) may be in the range of 20 to 80 microns (e.g., 20, 30, 40, 50, 55, 60, 65, 70, 75, or 80 microns), and the outer cross-sectional dimension Z4 (e.g., the outer diameter) of the valve seat 2570 may be in the range of 100 to 160 microns (e.g., 100, 110, 120, 130, 140, 145, 150, 155, or 160 microns). A first radial distance Z2 from the rim of the opening 2571 defined in the valve seat 2570 to the edge of the valve seat conformal layer 2572 may be in the range of 1 to 4 microns (e.g., 1, 2, 3, or 4 microns), and a second radial distance Z3 from the inner diameter edge of the sealing blade 2592 to the rim of the opening 2571 defined in the valve seat 2570 may be in the range of 7 to 15 microns (e.g., 7, 8, 9, 10, 11, 12, 13, 14, or 15 microns).

[0144] The cross-section of the sealing blade 2592 being larger than the inner cross-sectional dimension Z1 allows for axial offset between the opening 2571 and the inner diameter edge of the sealing blade 2592, further enabling sealing of the opening 2571 defined in the valve seat 2570. For example, FIG. 27 shows a cross-sectional view of the sealing blade 2592 taken along line BB in FIG. 26. As shown in FIG. 27, the sealing blade 2592 is axially offset from the opening 2571, yet can still enclose and fluidly seal the area on the valve seat 2570 surrounding the opening 2571, thereby preventing leakage of fluid through the opening 2571 when the actuation beam 2540 is in its closed position (e.g., initial position).

[0145] In some embodiments, a portion of the adhesive structure used to bond the spacer member of the actuation beam to the orifice plate may extend beyond the radially inner edge of the spacer member. For example, FIG. 28A is a side cross-sectional view of a portion of a microvalve 2630, according to one embodiment. The microvalve 2630 includes an orifice plate 2650. An actuation beam 2640 is disposed on the orifice plate 2650. A base portion 2642 of the actuation beam 2640 is disposed on a spacer member 2680 that couples to the orifice plate 2650 via a support beam 2658 (e.g., support beam 2558) and a second adhesive structure 2656 (e.g., an SU-8 structure). The second adhesive structure 2656 may have a thickness ranging from 2 to 20 microns (e.g., 2, 3, 4, 5, 10, 12, 14, 16, 18, or 20 microns). A plurality of grooves or serrations 2682 may be defined in a surface of the spacer member 2680 facing the orifice plate 2650. The second adhesive structure 2656 penetrates the plurality of grooves 2682 to form a strong bond with the spacer member 2680, as previously described herein. In various embodiments, the plurality of grooves 2682 may have a cross-sectional dimension (e.g., width) of between about 5 and 10 microns and may be spaced apart by intervals between 5 and 10 microns. In another embodiment, the plurality of grooves 2682 may be excluded.

[0146] As described previously herein, the input fluid manifold 2610 is bonded to the actuation beam 2640 on the base portion 2642 of the actuation beam 2640 via a first adhesive structure 2661. The first adhesive structure 2661 may comprise multiple rings of an adhesive (e.g., SU-8) or a structural material, such as glass or silicon. At least one ring of the first adhesive structure 2661 is disposed opposite the second adhesive structure 2656, for example, to counterbalance torsional stresses imposed by movement of the cantilevered portion 2644 of the actuation beam 2640 away from the orifice plate 2650. In some embodiments, the first adhesive structure 2661 and the second adhesive structure 2656 may be formed from the same material (e.g., SU-8, silicon, glass, etc.). In some embodiments, multiple grooves may also be defined on the surface of the spacer member 2680 to facilitate adhesion of the first adhesive structure 2661, or on any other surface to which an adhesive is disposed.

[0147] The second adhesive structure 2656 may also extend radially beyond the radially inner edge of the spacer member 2680 such that a portion of the second adhesive structure 2656 has a predetermined length X (e.g., in the range of 5 to 10 microns) that underlies the cantilevered portion 2644 of the actuation beam 2640. The extension of the second adhesive structure 2656 may be axially spaced from the bottom surface of the cantilevered portion 2644 that faces the orifice plate 2650 by an axial distance Y, which may be equal to the thickness of the spacer member 2680.

[0148] In some embodiments, the fluid used with microvalve 2630 or any other microvalve described herein can include a solvent that can dissolve or swell the adhesive used to form first adhesive structure 2661 and second adhesive structure 2656. In some embodiments, first adhesive structure 2661 and / or second adhesive structure 2656 can be formed using an inorganic material, such as silicon or glass, that does not react with the solvent. In another embodiment, a thin coating of a solvent-resistant organic, inorganic, or hybrid / inorganic material can be placed on the exposed surfaces of microvalve 2630 to protect first adhesive structure 2661 and second adhesive structure 2656.

[0149] For example, Figure 28B shows an enlarged view of a portion of microvalve 2630 indicated by arrow B in Figure 28A. For example, a coating 2686 having a thickness in the range of 5 to 100 nm (5, 10, 20, 30, 40, 50, or 100 nm) may be coated on microvalve 2630. In some embodiments, the coating may be deposited using an atomic layer deposition (ALD) process. Coating 2686 may be formed from any suitable material, such as aluminum oxide, titanium oxide, zinc oxide, or any other suitable material, or a combination thereof.

[0150] In some embodiments, any of the microvalves described herein may also include a bumper to prevent overshoot of an actuation beam included in the microvalve. For example, FIG. 29 is a side cross-sectional view of microvalve 2730 according to another embodiment. Microvalve 2730 includes similar components to those described with respect to microvalve 2530. Microvalve 2730 includes an actuation beam 2740 substantially similar to actuation beam 2540, but also includes a bumper 2791 extending from a cantilevered portion 2744 of actuation beam 2740 toward orifice plate 2550. In another embodiment, bumper 2791 may be disposed on orifice plate 2550 and extend therefrom toward cantilevered portion 2744 of actuation beam 2740. Bumper 2791 may be disposed in any suitable location, for example, midway between spacer member 2580 and sealing member 2590. The bumper 2791 may be formed from the same material (e.g., silicon) as the orifice plate 2550 or the actuation beam 2740. The bumper 2791 may be configured to prevent overshoot of the cantilevered portion of the actuation beam 2740 by limiting the movement of the actuation beam 2740.

[0151] In some embodiments, the microvalve may include a mechanism for limiting movement of the actuation beam by guiding the actuation beam back to its initial position. For example, FIG. 30 is a side cross-sectional view of a microvalve 3520 according to another embodiment. The microvalve 3520 includes an orifice plate 3510 defining an orifice 3560 therein. The actuation beam 3540 is disposed on the orifice plate 3510 and spaced therefrom via a spacer 3580. A sealing member 3524 is disposed on an overlapping portion 3549 of the actuation beam 3540 and configured to contact a valve seat 3522 disposed on the orifice plate 3510 around or overlapping the orifice 3560, thereby sealing the orifice 3560 in the initial position of the actuation beam 3540. The overlapping portion 3549 is located at the tip of the actuation beam 3540 and overlaps the orifice 3560. The fingers 3517 are disposed on posts 3515 disposed on the orifice plate 3510 and extend toward the actuation beam 3540 to overlap at least an overlapping portion 3549 of the actuation beam 3540. The fingers 3517 may be configured to press the overlapping portion 3549 of the actuation beam 3540 toward the valve seat 3522 to ensure that a fluid-tight seal is formed between the sealing member 3524 and the valve seat 3522 in the initial position of the actuation beam 3540.

[0152] The fingers 3517 can be configured to have a stiffness that, in response to an electric charge applied to the actuation beam 3540, causes the cantilevered portion of the actuation beam 3540 to bend or curve away from the orifice 3560, thereby overcoming the stiffness. When the electric charge is removed, the fingers 3517 may push the cantilevered portion back toward the orifice 3560. In another embodiment, a biasing member 3519 (e.g., a helical spring, a Belleville spring, a beryllium-copper spring, a compliant member, etc.) is operably coupled to the fingers 3517 and configured to be biased when an electric charge is applied to the actuation beam 3540. When the electric charge is removed, the biasing member 3519 can push the overlapping portion 3549 back toward the orifice 3560. In certain embodiments, the biasing member 3519 may be operably coupled to the overlapping portion 3549 such that the fingers 3517 are removed.

[0153] While the above-described embodiments refer to cantilevered actuation beams, in other embodiments, a microvalve may comprise a simply supported actuation beam. For example, FIG. 31 is a side cross-sectional view of a microvalve 3620 according to another embodiment. The microvalve 3620 comprises an orifice plate 3610 defining an orifice 3660 therein. An actuation beam 3640 is disposed on the orifice plate 3610, with a first axial end 3646a of the actuation beam 3640 disposed on and spaced from the orifice plate 3610 via a first spacer member 3680a. A second axial end 3646b of the actuation beam 3640 is disposed on and spaced from the orifice plate 3610 via a second spacer member 3680. The spacer members 3680a / b are coupled to the orifice plate 3610 via corresponding adhesive layers 3656a / b. The actuation beam 3640 includes a bending portion 3648 configured to bend toward or away from the orifice plate 3610. The bending portion 3648 includes an overlapping portion 3649 that overlaps the orifice 3660 (e.g., located intermediate the axial ends 3646 a / b). The sealing member 3624 is disposed on the overlapping portion 3649 of the actuation beam 3640 and configured to contact a valve seat 3672 disposed around the orifice 3660 or on the orifice plate overlapping the orifice, sealing the orifice 3660 when the actuation beam 3640 is in its initial position. In various embodiments, the valve seat 3672 may be formed from the same material (e.g., formed in the same manufacturing process) as the adhesive layers 3656 a / b. The overlapping portion 3649 may be positioned at the center of the actuation beam 3640, so that bending of the bending portion 3648 around the axial end 3646a / b can move the sealing member 3624 toward and away from the valve seat 3672 without any angle being imparted to it (i.e., the sealing surface of the sealing member 3624 may remain substantially parallel to the valve seat 3672).Additionally, when the orifice plate 3610 warps, the actuation beam 3640 warps accordingly, allowing the sealing member 3624 to remain in the same position and orientation relative to the valve seat 3672. This allows for a better seal to be formed between the sealing surface of the sealing member 3624 and the valve seat 3672 despite any warping or curvature of the orifice plate 3610.

[0154] In some embodiments, the microvalve comprises: an orifice plate having a first surface and a second surface, the orifice plate having an orifice extending from the first surface to the second surface; an actuation beam disposed in a spaced relationship to the orifice plate, the actuation beam having a base portion and a cantilever portion, the base portion being spaced a predetermined distance from the orifice plate and the cantilever portion extending from the base portion toward the orifice, an overlapping portion of the cantilever portion overlapping the orifice, the actuation beam being movable between a closed position and an open position; and a sealing structure comprising a sealing member disposed on the overlapping portion of the cantilever portion, the cantilever portion being positioned such that when the actuation beam is in the closed position, the sealing structure seals the orifice to close the microvalve.

[0155] In some embodiments, the actuation beam comprises a layer of piezoelectric material, and the actuation beam is movable between a closed position and an open position in response to an electrical signal applied to the piezoelectric material. In some embodiments, when no electrical signal is applied to the piezoelectric material, the microvalve is in the closed position. In some embodiments, when a reverse polarity electrical signal is applied to the piezoelectric material, the microvalve approaches the closed position or the force holding the microvalve in the closed position increases.

[0156] In some embodiments, the sealing structure includes a stopper disposed on a surface of the sealing member, the stopper including a first portion attached to the surface of the sealing member and a second portion disposed on the first portion adjacent to the orifice plate, the second portion having a larger cross-sectional area than the first portion. In some embodiments, the stopper directly contacts the orifice plate in the absence of an electrical signal. In some embodiments, the stopper is comprised of a bisphenol A novolac glycidyl ether photoresist. [In some embodiments, each of the sealing member, the first portion, and the second portion is substantially cylindrical.

[0157] In some embodiments, the sealing structure further comprises a valve seat surrounding the orifice, the valve seat defining an opening that overlaps the orifice to define the fluid outlet. In some embodiments, the sealing member comprises: a sealing member surface facing the orifice, the sealing member surface being substantially parallel to an upper surface of the orifice plate, the sealing member surface being displaced a distance from the valve seat when the actuation beam is in the closed position; and a first sealing blade extending a distance from the sealing member surface toward the orifice plate, the first sealing blade surrounding the entire periphery of the orifice.

[0158] In some embodiments, the sealing member and orifice plate are substantially cylindrical, the orifice is cylindrical with a first diameter, and the sealing member is cylindrical with a second diameter greater than the first diameter. In some embodiments, the first sealing blade is annular and has a first outer diameter greater than the first diameter and less than the second diameter. In some embodiments, the first outer diameter is closer to the first diameter than the second diameter.

[0159] In some embodiments, the sealing member further comprises a second sealing blade surrounding the first sealing blade, the second sealing blade having a second outer diameter greater than the first outer diameter but less than the second diameter such that an annular gap is formed between the first sealing blade and the second sealing blade. In some embodiments, the first sealing blade and the second sealing blade are formed of the same material as the remainder of the sealing member.

[0160] In some embodiments, the orifice and sealing member are substantially cylindrical, and the valve seat is annular and surrounds the orifice. In some embodiments, the orifice has a first diameter, and the sealing member has a second diameter greater than the first diameter. In some embodiments, the valve seat has an outer diameter between the first diameter and the second diameter. In some embodiments, the valve seat has an outer diameter that is approximately equal to or greater than the second diameter.

[0161] In some embodiments, the sealing member further comprises a constriction disposed at an end thereof, the constriction defining a sealing member surface facing the orifice, and a sealing flap extending outwardly from the constriction to overlap an upper surface of the valve seat when the actuation beam is in the closed position.

[0162] In some embodiments, the inner surface of the valve seat and the inner surface of the orifice are substantially aligned with one another to form a fluid outlet, and the microvalve further comprises a coating disposed on the inner surface of the fluid outlet. In some embodiments, the coating covers at least one of an upper surface of the valve seat facing the sealing member or a sealing member surface of the sealing member facing the valve seat. In some embodiments, the coating comprises polydimethylsiloxane.

[0163] In some embodiments, a method of constructing a microelectromechanical systems (MEMS) microvalve includes providing an orifice plate with an orifice; providing an actuation beam having a spacer member and an attached sealing member; forming a portion of a sealing structure on either the orifice plate or the sealing member; and after forming the portion of the sealing structure, attaching the actuation beam to the orifice plate, wherein the sealing member is aligned with the orifice and the sealing structure forms a seal separating the orifice from a volume proximate to the actuation beam in a closed position of the actuation beam.

[0164] In some embodiments, forming a portion of the sealing structure includes disposing a valve seat on an orifice plate surrounding the orifice, and the method further includes forming an additional portion of the sealing structure on a surface of the sealing member facing the orifice.

[0165] In some embodiments, the additional portion of the sealing structure comprises one or more sealing blades, and forming the additional portion of the sealing structure includes depositing an etch-resistant material on the orifice-facing surface; etching a portion of the etch-resistant material, wherein a remaining portion of the etch-resistant material on the orifice-facing surface corresponds to the position and shape of the one or more sealing blades; isotropically etching the sealing member for a first predetermined time, the isotropic etching configured to etch the portion of the sealing member below the etch-resistant material to form the one or more sealing blades; and removing the remaining portion of the etch-resistant material from the orifice-facing surface.

[0166] In some embodiments, the method also includes anisotropically etching the sealing member for a second predetermined time to remove a portion of the sealing member before removing the etch-resistant material, the remaining portion forming a taller sealing blade, and then removing the etch-resistant material. In some embodiments, the etch-resistant material comprises silicon dioxide.

[0167] In some embodiments, the additional portion of the sealing structure comprises a sealing flap substantially parallel to the orifice plate extending outwardly from the orifice-facing surface, and forming the additional portion of the sealing structure includes depositing an etch-resistant material on the orifice-facing surface and selectively etching the sealing member, removing a portion of the sealing member at a periphery thereof below the etch-resistant material, wherein the etch-resistant material extends over the removed portion of the sealing member to form the sealing flap.

[0168] In some embodiments, the method of claim 27 further includes anisotropically etching a portion of the actuation beam to form the sealing member, and releasing the actuation beam from the substrate to form the cantilevered portion of the actuation beam.

[0169] In some embodiments, a jetting assembly comprises: a valve body comprising an orifice plate with a plurality of orifices extending therethrough; a plurality of microvalves, each of the plurality of microvalves disposed on the orifice plate and displaced from a corresponding orifice; an actuation beam having a base portion disposed on the spacer member and a cantilever portion extending from the base portion toward a corresponding orifice, the overlapping portions of which overlap the corresponding orifices, the actuation beam configured to move between a closed position in which the cantilever portion bends toward the orifice and an open position in which the cantilever portion bends away from the orifice; and a sealing structure attached to the overlapping portions and comprising a sealing member extending toward the corresponding orifice; and a fluid manifold coupled to each of the plurality of microvalves and defining a fluid reservoir for each microvalve.

[0170] In some embodiments, the actuation beam comprises a layer of piezoelectric material, the actuation beam being movable between a closed position and an open position in response to an electrical signal applied to the piezoelectric material, and when no electrical signal is applied to the layer of piezoelectric material, the microvalve is in the closed position.

[0171] In some embodiments, the sealing structure comprises a stopper disposed on the sealing member surface, the stopper comprising a first portion attached to the sealing member surface and a second portion disposed on the first portion closer to the orifice plate, the second portion having a larger cross-sectional area than the first portion.

[0172] In some embodiments, the sealing structure further comprises a valve seat disposed on the orifice plate adjacent the orifice, the valve seat defining an opening that overlaps the orifice and defines the fluid outlet.

[0173] In some embodiments, the sealing member comprises a sealing member surface facing the orifice, the sealing member surface being substantially parallel to an upper surface of the orifice plate, the sealing member surface being displaced a distance from the valve seat, and a first sealing blade extending a distance from the sealing member surface toward the orifice plate, the first sealing blade surrounding at least a portion of the orifice, a portion of the first sealing blade being spaced apart around the periphery of the orifice. In some embodiments, the sealing member further comprises a second sealing blade surrounding the first sealing blade.

[0174] In some embodiments, the first sealing blade, the second sealing blade, and the valve seat are substantially annular in shape, the valve seat having an inner diameter and an outer diameter, and when the cantilever portion is in the closed position, the entire first and second sealing blades are disposed on an upper surface of the valve seat between the inner and outer diameters.

[0175] In some embodiments, the sealing member further comprises a constriction disposed at an end thereof, the constriction defining a surface of the sealing member facing the orifice, and a sealing flap extending outwardly from an edge of the constriction at the sealing member surface, the sealing flap extending substantially parallel to the orifice plate and overlapping an upper surface of the valve seat.

[0176] In some embodiments, the microvalve comprises: an orifice plate having a first surface and a second surface, the orifice plate having an orifice extending from the first surface to the second surface; an actuation beam disposed in a spaced relationship to the orifice plate, the actuation beam having a base portion and a cantilever portion, the base portion being spaced a predetermined distance from the orifice plate and the cantilever portion extending from the base portion toward the orifice, an overlapping portion of the cantilever portion overlapping the orifice, the actuation beam being movable between a closed position and an open position; and a sealing structure disposed on the actuation beam, the sealing structure comprising: a sealing member disposed on the overlapping portion of the cantilever portion; and a stopper disposed on a surface of the sealing member, the stopper having a first portion attached to the surface of the sealing member and a second portion disposed on the first portion proximate to the orifice plate, the second portion having a larger cross-sectional area than the first portion, the cantilever portion being positioned such that when the actuation beam is in the closed position, the stopper seals the orifice to close the microvalve.

[0177] In some embodiments, the microvalve includes an orifice plate having a first surface and a second surface, the orifice plate having an orifice extending from the first surface to the second surface; and an actuation beam spaced apart from the orifice plate, the actuation beam having a base portion and a cantilever portion, the base portion being spaced apart from the orifice plate by a predetermined distance, the cantilever portion extending from the base portion toward the orifice, an overlapping portion thereof overlapping the orifice, the actuation beam being movable between a closed position and an open position; and and a sealing structure disposed on the cantilevered portion, the sealing structure comprising: a valve seat surrounding the orifice, the valve seat surrounding the orifice to define an opening defining the fluid outlet; a sealing structure disposed on the overlapping portion of the cantilevered portion; and a first sealing blade extending a distance from the sealing member surface toward the orifice plate, the first sealing blade surrounding the entire periphery of the orifice and configured to contact the valve seat in a closed position to seal the orifice and close the microvalve. In some embodiments, the sealing member further comprises a second sealing blade surrounding the first sealing blade, the second sealing blade having a second outer diameter greater than the first outer diameter but less than the second diameter, forming an annular gap between the first sealing blade and the second sealing blade.

[0178] In some embodiments, the microvalve comprises: an orifice plate having a first surface and a second surface, the orifice plate having an orifice extending from the first surface to the second surface; an actuation beam disposed in a spaced relationship with the orifice plate, the actuation beam having a base portion and a cantilever portion, the base portion being spaced a predetermined distance from the orifice plate and the cantilever portion extending from the base portion toward the orifice, an overlapping portion thereof overlapping the orifice, the actuation beam being movable between a closed position and an open position; and a sealing structure disposed on the actuation beam, the sealing structure comprising: a sealing member disposed at the overlapping portion of the cantilever portion; a constriction disposed at a merge end of the sealing member, the constriction defining a surface of the sealing member facing the orifice; and a sealing flap extending outward from the constriction and configured to seal the orifice and close the microvalve when the actuation beam is in the closed position.

[0179] As used herein, the terms "about" and "approximately" refer to approximately ±10% of a given value. For example, about 0.5 includes 0.45 and 0.55, about 10 includes 9-11, and about 1000 includes 900-1100.

[0180] As used herein, the terms "couple," "connect," and the like mean that two members are joined directly or indirectly to one another. Such joining may be fixed (e.g., permanent) or movable (e.g., removable or releasable). Such joining may be achieved either by the two members, or the two members and any other intervening members, being integrally formed with one another as a single, unitary body, or by the two members, or the two members and any other intervening members, being attached to one another.

[0181] References herein to the location of elements (e.g., "top," "bottom," "over," "under," etc.) are merely used to describe the orientation of various elements in the figures. It should be noted that the orientation of various elements may differ according to different exemplary embodiments, and such variations are intended to be encompassed by the present disclosure.

[0182] The configuration and arrangement of elements shown in the exemplary embodiments are for illustrative purposes only. While only a few embodiments of the present disclosure have been described in detail, those skilled in the art reviewing this disclosure will readily appreciate that many modifications (e.g., variations in the size, dimensions, structure, shape, and proportions of various elements, parameter values, mounting arrangements, material applications, colors, orientations, etc.) are possible without substantially departing from the novel teachings and advantages of the recited subject matter. For example, elements shown as integrally formed may be composed of multiple parts or elements, the positions of elements may be reversed or otherwise changed, and the nature or number or positions of individual elements may be modified or changed.

[0183] Moreover, the word "exemplary" is used to mean serving as an example, instance, or illustration. Any embodiment or design described herein as "exemplary" or "example" should not necessarily be construed as preferred or advantageous over other embodiments or designs (and such terminology is not intended to imply that such embodiment is necessarily the exceptional or best example). Rather, use of the word "exemplary" is intended to illustrate a concept. Accordingly, all such modifications are intended to be included within the scope of the present disclosure. Other substitutions, modifications, changes, and omissions may be made in the design, operating conditions, and arrangement of the preferred and other exemplary embodiments without departing from the scope of the appended claims.

[0184] Other substitutions, modifications, changes, and omissions may be made in the design, operating conditions, and arrangement of the various exemplary embodiments without departing from the scope of the present invention. For example, any element disclosed in one embodiment may be incorporated into or utilized in any other embodiment disclosed herein. Also, for example, the order or sequence of any process or method steps may be changed or re-ordered according to alternative embodiments. Any means-and-function clauses are intended to encompass the structures described herein as performing the recited function and structural equivalents as well as equivalent structures. Other substitutions, modifications, changes, and omissions may be made in the design, operating configuration, and arrangement of the preferred and other exemplary embodiments without departing from the scope of the appended claims.

Claims

1. A microvalve, an orifice plate having a first surface and a second surface, the orifice plate having an orifice extending from the first surface to the second surface; an actuation beam spaced apart from the orifice plate, the actuation beam having a base portion and a cantilever portion, the base portion being spaced a predetermined distance from the orifice plate, the cantilever portion extending from the base portion toward the orifice such that an overlapping portion thereof overlaps the orifice, the actuation beam being movable between a closed position and an open position relative to the orifice; A sealing structure, a valve seat surrounding the orifice; a sealing member disposed at the overlapping portion of the cantilever beam; a first sealing blade extending from the sealing member toward the valve seat, the first sealing blade being substantially annular, the first sealing blade having a tip distal from the sealing member, wherein in a closed position, a downward force imparted to the valve seat by the actuation beam is applied between the tip and the valve seat, the first sealing blade having a diameter configured to fluidly seal against a portion of the valve seat when axially offset; The sealing structure comprises: Equipped with Microvalve.

2. 10. The microvalve of claim 1, wherein the actuation beam comprises a layer of piezoelectric material, the actuation beam being movable between the closed position and the open position in response to an electrical signal applied to the layer of piezoelectric material.

3. 10. The microvalve of claim 1, wherein the first sealing blade has an inner diameter and an outer diameter that fit between the inner diameter and the outer diameter of the valve seat.

4. The microvalve of claim 1 , wherein the stop member is substantially cylindrical.

5. The microvalve of claim 4 , wherein the first sealing blade conforms to the outer periphery of the sealing member.

6. The microvalve of claim 1 , wherein the tip is a knife-edge tip.

7. The microvalve of claim 1 , wherein the tip is at least one of flat and rounded.

8. 2. The microvalve of claim 1, wherein the sealing member further comprises a second sealing blade surrounding the first sealing blade, thereby forming an annular gap between the first sealing blade and the second sealing blade.

9. The microvalve of claim 1 , wherein the valve seat is formed from a non-compliant material.

10. 1. An injection assembly comprising: a valve body including an orifice plate having a plurality of orifices extending therethrough; a plurality of microvalves, each of the plurality of microvalves corresponding to an orifice of the plurality of orifices; and an actuation beam spaced apart from the orifice plate, the actuation beam having a base portion and a cantilever portion, the base portion being spaced a predetermined distance from the orifice plate, the cantilever portion extending from the base portion toward the orifice such that an overlapping portion thereof overlaps the orifice, the actuation beam being movable between a closed position and an open position relative to the orifice; A sealing structure, a valve seat surrounding the orifice; a sealing member disposed at the overlapping portion of the cantilever beam; a first sealing blade extending from the sealing member toward the valve seat, the first sealing blade being substantially annular, the first sealing blade having a tip distal from the sealing member, wherein in a closed position, a downward force imparted to the valve seat by the actuation beam is applied between the tip and the valve seat, the first sealing blade having a diameter configured to fluidly seal against a portion of the valve seat when axially offset; The sealing structure comprises: the plurality of microvalves, An injection assembly comprising:

11. 11. The jetting assembly of claim 10, wherein the actuation beam comprises a layer of piezoelectric material, the actuation beam being movable between the closed position and the open position in response to an electrical signal applied to the layer of piezoelectric material.

12. The injector assembly of claim 10 , wherein the first sealing blade has an inner diameter and an outer diameter that fits between the inner diameter and the outer diameter of the valve seat.

13. The jet assembly of claim 10 , wherein the sealing member is substantially cylindrical.

14. The injection assembly of claim 13 , wherein the first sealing blade conforms to the outer periphery of the sealing member.

15. The injection assembly of claim 10 , wherein the tip is a knife-edge tip.

16. The jet assembly of claim 10, wherein the tip is at least one of flat and rounded.

17. 11. The injection assembly of claim 10, wherein the sealing member further comprises a second sealing blade surrounding the first sealing blade, thereby forming an annular gap between the first sealing blade and the second sealing blade.

18. The injection assembly of claim 10 , wherein the valve seat is formed from a non-compliant material.

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