Bonding bridges to multiple semiconductor chips

Abstract

The interconnection of the first chip and the second chip by the bridge member includes a chip handler for handling the first chip and the second chip. Each of the first chip and the second chip has a first surface including a first set of terminals and a second surface opposite the first surface. The chip handler has an opening and at least one support surface for supporting the first surfaces of the first chip and the second chip when the first chip and the second chip are mounted on the chip handler. A chip support member supports the first chip and the second chip from the second surface, and a bridge handler is provided for inserting the bridge member through the opening of the chip handler and positioning the bridge member on the first set of terminals of the first chip and the second chip.

Description

[Technical Field]

[0001] The present invention relates generally to the field of multi-chip interconnection technology, and more particularly to a chip handler for interconnecting multiple semiconductor chips. [Background technology]

[0002] Currently, there is growing interest in high-density interconnections between multiple chips, such as between a central processing unit (CPU) and memory, between an AI accelerator and memory, etc. A promising structure for interconnecting multiple chips is a bridge structure, which connects multiple chips via a bridge member that implements high-density interconnections.

[0003] To build a bridge structure, appropriate tools and processes are required to interconnect multiple chips. The bridge assembly process remains challenging due to the difficulty of chip alignment and the fragile nature of the intermediate structures. Precise alignment is generally required between the chips and the bridge members connecting them, not only horizontally but also vertically. Relatively small bumps, such as microbumps, are employed to achieve dense interconnections between chips via bridge members.

[0004] As the solder volume of the bumps decreases, alignment becomes more difficult, especially in the vertical direction. Furthermore, to prevent misalignment between chips that are subsequently bonded to other substrates, the alignment between each chip and the bridge member must be more precise, which creates additional challenges when bridging multiple chips. As an example, a 20mm die size with 30-micrometer-pitch bumps requires alignment accuracy of less than 5 micrometers in the horizontal dimension and less than 2 micrometers in the vertical dimension. Furthermore, the fragile bridged module requires end-to-end support throughout the entire process, from chip alignment to bridge-chip bonding and underfill.

[0005] Therefore, there is a need for an alternative multi-chip interconnection technique to properly align multiple chips and bridge members and to support the chips and bridge members during the bridging process. Summary of the Invention

[0006] According to one embodiment of the present invention, an apparatus for interconnecting a first chip and a second chip with a bridge member is provided. The first chip and the second chip each have a first surface including a first set of terminals formed thereon and a second surface opposite the first surface. The apparatus includes a chip handler for handling the first chip and the second chip, the chip handler having an opening and at least one support surface for supporting the first surfaces of the first chip and the second chip when the first chip and the second chip are mounted on the chip handler. The apparatus further includes a chip support member for supporting the first chip and the second chip from the second surfaces. The apparatus further includes a bridge handler for inserting a bridge member through the opening of the chip handler and positioning the bridge member on the first set of terminals of the first chip and the second chip.

[0007] The apparatus according to the above embodiment allows the chip handler to provide pre-alignment between the first and second chips, enabling precise alignment between the first and second chips and between each of the first and second chips and the bridge member. The bridge member is placed on the first and second chips that have been pre-aligned with the chip handler, and then the bridged chips are simultaneously bonded to the substrate. The first and second chips and the intermediate bridge structure are supported by the support surface of the chip handler during the bridging process.

[0008] In a preferred embodiment, the chip handler, chip support member, and bridge handler provide a chamber space that accommodates the first set of terminals of the first chip and the second chip and the terminals of the bridge member within the chamber space when the chip handler, chip support member, and bridge handler are assembled, thereby subjecting the first set of terminals of the first chip and the second chip and the terminals of the bridge member to a controlled environment during the bridging process.

[0009] In a more preferred embodiment, the apparatus further includes a gas supplier for supplying a reducing gas into the chamber space to clean the first set of terminals of the first chip and the second chip, or the terminals of the bridge member, or both. This allows clean-less bonding to be achieved in a reducing atmosphere. Furthermore, since the reducing gas can be maintained within the chamber space, corrosion of device components outside the chamber space due to the corrosiveness of the reducing gas can also be prevented.

[0010] In a further preferred embodiment, the bridge handler includes a handler body for mounting the bridge member, and a gas leakage stopper for sealing the chamber space when the bridge member is inserted through the opening by the handler body, thereby preventing gas leakage from the gap between the chip handler and the bridge handler.

[0011] In a further preferred embodiment, the apparatus further includes a sealing member provided between the chip handler and the chip support member to seal the chamber space when the chip handler is assembled to the chip support member, thereby preventing gas leakage from a gap between the chip handler and the chip support member.

[0012] In a further preferred embodiment, the first surface of each of the first chip and the second chip includes a second set of terminals. The chip handler further includes a cavity communicating with the opening, the cavity having a height greater than the height of the first set of terminals and the second set of terminals so that the first set of terminals and the second set of terminals of the first chip and the second chip are accommodated within the cavity when the first chip and the second chip are mounted on the chip handler. This prevents deformation of the first set of terminals and / or the second set of terminals.

[0013] In certain preferred embodiments, the chip handler further includes a first set of gas passages routed from the bonding stage side to a first set of holes formed in the at least one support surface, and a second set of gas passages routed from the bonding head side to a second set of holes formed in the at least one support surface, thereby enabling controlled fixation of the at least one support surface of the chip handler to the first surfaces of the first and second chips by utilizing suction or exhaust of gas at the holes from both the bonding head side and the bonding stage side.

[0014] In another embodiment, the chip handler further includes a suction system for applying suction to the first surfaces of the first chip and the second chip on at least one support surface of the chip handler.

[0015] In yet another embodiment, the first surfaces of the first chip and the second chip are secured to at least one support surface by a securing member selected from the group consisting of an adhesive, a metal stud bump and pad pair, and a solder bump and pad pair.

[0016] In yet another embodiment, the apparatus further includes a positioning module for horizontally aligning the first chip and the second chip with respect to the chip handler, wherein at least one support surface of the chip handler partially contacts the first surfaces of the first chip and the second chip at a point outside the first set of terminals of the first chip and the second chip so as to vertically align the first surfaces of the first chip and the second chip when the first chip and the second chip are aligned and mounted on the chip handler.

[0017] In another embodiment, the chip handler and chip support member includes a plurality of fixtures and a set of suction lines for securing and releasing at least one of the plurality of fixtures relative to the bonding head or stage by suction.

[0018] In yet another preferred embodiment, the chip support member includes a first base portion having a first horizontal surface for holding the first chip from the second surface of the first chip, and a second base portion having a second horizontal surface for holding the second chip from the second surface of the second chip, thereby allowing the first chip and the second chip to have different thicknesses.

[0019] In yet another embodiment, the first horizontal plane of the first base portion and the second horizontal plane of the second base portion of the chip support member are independently adjustable, thereby enabling the device to handle first and second chips of the same or different thicknesses.

[0020] In yet another embodiment, the chip support member further includes a first thickness adjustment layer formed on the first base portion, a second thickness adjustment layer formed on the second base portion, or both, such that the first thickness adjustment layer and the second thickness adjustment layer can absorb thickness variations of the corresponding chips.

[0021] In yet another embodiment, the bridge member has a third set of terminals, and the apparatus further includes a dispenser for dispensing underfill material from the second surface side to locations around connections between the first set of terminals of the first chip and the second chip and the third set of terminals of the bridge member. In certain embodiments, the chip support member includes a second opening through which the underfill material is dispensed.

[0022] In certain embodiments, the apparatus further includes a control module for controlling the release of the bridged module, including the first chip, the second chip, and the bridge member bonded to the first chip and the second chip, from the chip handler and the mounting of the bridged module to the substrate.

[0023] According to another embodiment of the present invention, a method for interconnecting a first chip and a second chip with a bridge member is provided. The first chip and the second chip each have a first surface including a first set of terminals formed thereon and a second surface opposite the first surface. The method includes mounting the first chip and the second chip to a chip handler having an opening and at least one support surface, where the first surfaces of the first chip and the second chip mounted to the chip handler are supported by the at least one support surface of the chip handler. The method also includes placing the first chip and the second chip from the second surfaces onto a chip support member using the chip handler. The method further includes inserting a bridge member through the opening of the chip handler by the bridge handler and placing the bridge member on the first set of terminals of the first chip and the second chip.

[0024] In a method according to an embodiment of the present invention, when mounting a first chip and a second chip on a chip handler, the first chip and the second chip are pre-aligned with respect to the chip handler, enabling precise alignment between the first chip and the second chip and between the first chip and the second chip and the bridge member. Next, a bridge member is placed on the first and second chips pre-aligned with respect to the chip handler, and then the bridged multiple chips can be simultaneously bonded to a substrate. Furthermore, the first and second chips and the intermediate bridge structure are supported by at least one support surface of the chip handler during the process.

[0025] In a preferred embodiment, the method further includes assembling the chip handler, the chip support member, and the bridge handler to provide a chamber space that accommodates the first set of terminals of the first chip and the second chip and the terminals of the bridge member within the chamber space, thereby subjecting the first set of terminals of the first chip and the second chip and the terminals of the bridge member to a controlled environment during the bridging process.

[0026] In a further preferred embodiment, the method further includes supplying a reducing gas into the chamber space to clean the first set of terminals of the first chip and the second chip, or the terminals of the bridge member, or both. This allows clean-less bonding to be achieved in a reducing atmosphere. Furthermore, since the reducing gas can be maintained within the chamber space, corrosion of device components outside the chamber space due to the corrosive properties of the reducing gas can also be prevented.

[0027] In certain embodiments, mounting the first chip and the second chip to the chip handler includes suctioning a first surface of the first chip through a plurality of first holes formed in the at least one support surface, and suctioning a first surface of the second chip through a plurality of second holes formed in the at least one support surface.

[0028] In certain embodiments, mounting the first chip and the second chip on the chip handler includes suctioning the first surfaces of the first chip and the second chip through a first set of holes formed in at least one support surface and routed from one of the bonding stage side and the bonding head side. Placing the first chip and the second chip on the chip support member includes suctioning the first surfaces of the first chip and the second chip through a second set of holes formed in the at least one support surface and routed from the other of the bonding stage side and the bonding head side. Placing the first chip and the second chip on the chip support member further includes releasing the chip handler from one of the bonding stage side and the bonding head side. This allows fixation between the at least one support surface of the chip handler and the first surfaces of the first chip and the second chip to be controlled by utilizing suction in the holes from both the bonding head side and the bonding stage side.

[0029] In certain embodiments, the method further includes releasing a bridged module from the chip handler, the bridged module including the first chip, the second chip, and a bridge member bonded to the first chip and the second chip, and mounting the bridged module to a substrate.

[0030] In certain embodiments, the bridge member has a third set of terminals. The method further includes dispensing an underfill material from the second surface to locations around connections between the first set of terminals of the first chip and the second chip and the third set of terminals of the bridge member, and curing the underfill material.

[0031] According to another embodiment of the present invention, a chip handler for handling a first chip and a second chip is provided. Each of the first chip and the second chip has a first surface including a first set of terminals formed thereon and a second surface opposite the first surface. The chip handler includes at least one support surface for supporting the first surfaces of the first chip and the second chip when the first chip and the second chip are mounted on the chip handler. The chip handler also includes an opening used to insert a bridge member and subsequently position the bridge member over the first set of terminals of the first chip and the second chip. The second surfaces of the first chip and the second chip are exposed from the chip handler.

[0032] The chip handler according to the present invention provides a pre-alignment function between the first and second chips, thereby enabling precise alignment between the first and second chips and between each of the first and second chips and a bridge member. The bridge member can be placed on the first and second chips that have been pre-aligned with respect to the chip handler, and then the bridged chips are simultaneously bonded to a substrate. The first and second chips and the intermediate bridge structure are supported by at least one support surface of the chip handler during the bridging process.

[0033] Additional features and advantages are realized through the techniques of the present invention.Other embodiments and aspects of the invention are described in detail herein and are considered a part of the claimed invention.

[0034] The following detailed description is given by way of example, and is not intended to be limiting of the invention solely thereto, and will be best understood in conjunction with the accompanying drawings. [Brief explanation of the drawings]

[0035] [Figure 1A]1 is a cross-sectional view of a chip handler used in a bridged multi-chip module manufacturing apparatus and a bridged module carried by the chip handler according to one embodiment of the present invention. [Figure 1B] 1 is a cross-sectional view of a chip handler taken along line B-B' according to one embodiment of the present invention. [Figure 1C] FIG. 1 is a top view of a chip handler according to one embodiment of the present invention. [Figure 1D] FIG. 2 is a bottom view of a chip handler according to one embodiment of the present invention. [Figure 2A] 1 is a cross-sectional view of a chip handler according to one embodiment of the present invention. [Figure 2B] 1 is a cross-sectional view of a chip handler taken along line B-B' according to one embodiment of the present invention. [Figure 2C] FIG. 1 is a top view of a chip handler according to one embodiment of the present invention. [Figure 2D] FIG. 2 is a bottom view of a chip handler according to one embodiment of the present invention. [Figure 3A] 1 is a first step in a process for fabricating a bridged multi-chip module using a chip handler according to one embodiment of the present invention. [Figure 3B] 1 is a cross-sectional view of a chip handler illustrating a mounting step according to one embodiment of the present invention. [Figure 3C] 1 is a cross-sectional view of a chip handler illustrating the step of placing a first chip and a second chip on a bonding stage according to one embodiment of the present invention. [Figure 3D] 1A-1C are cross-sectional views of a chip handler illustrating the step of preparing a bridge member attached to the bridge handler, according to one embodiment of the present invention. [Figure 3E] 1 is a cross-sectional view of a chip handler illustrating the step of inserting a bridge member through an opening in the chip handler by the bridge handler, according to one embodiment of the present invention. [Figure 4A]1 is a cross-sectional view of a chip handler illustrating the steps of increasing the temperature, performing solder bonding, replacing the gas with an inert gas, and cooling, according to one embodiment of the present invention. [Figure 4B] 10 is a cross-sectional view of the chip handler illustrating the steps of releasing the joined bridge members and removing the handler body of the bridge handler from the chip handler according to one embodiment of the present invention. [Figure 4C] 1 is a cross-sectional view of a chip handler illustrating the step of dispensing underfill material according to one embodiment of the present invention. [Figure 4D] 1A-1C are cross-sectional views of the chip handler illustrating the step of releasing a bridged module from the chip handler according to one embodiment of the present invention. [Figure 4E] 1 is a cross-sectional view of a chip handler illustrating the step of mounting a bridged module to a substrate according to one embodiment of the present invention. [Figure 5] 1 is a schematic diagram of a bridged multi-chip module manufacturing apparatus according to one embodiment of the present invention. [Figure 6A] 1 is a cross-sectional view of a chip handler, a chip support member, and a bridged module mounted on the chip handler and chip support member for use in a bridged multi-chip module manufacturing apparatus according to one embodiment of the present invention. [Figure 6B] 1 is a cross-sectional view of a chip handler and chip support assembly taken along line B-B' according to one embodiment of the present invention. [Figure 6C] FIG. 1 is a top view of a chip handler assembly according to one embodiment of the present invention. [Figure 7A] 1 is a first step in a process for fabricating a bridged multi-chip module by using a chip handler and chip support member according to one embodiment of the present invention. [Figure 7B] 1A-1C are cross-sectional views of a chip handler illustrating the step of attaching a chip support member to the chip handler according to one embodiment of the present invention. [Figure 7C] 1A-1C are cross-sectional views of a chip handler illustrating the step of preparing a bridge member attached to the bridge handler, according to one embodiment of the present invention. [Figure 7D] 1 is a cross-sectional view of a chip handler illustrating the step of inserting a bridge member through an opening in the chip handler, according to one embodiment of the present invention. [Figure 8A] A cross-sectional view of a chip handler showing the steps of releasing a bridge member from the handler body of the bridge handler, removing the handler body of the bridge handler from the chip handler, inverting the assembly of the chip handler and chip support member, and dispensing underfill material, according to one embodiment of the present invention. [Figure 8B] 1A-1C are cross-sectional views of the chip handler illustrating the step of releasing a bridged module from the chip handler according to one embodiment of the present invention. [Figure 8C] 1A-1C are cross-sectional views of a chip handler illustrating the step of preparing a substrate with contact pads according to one embodiment of the present invention. [Figure 8D] 1 is a cross-sectional view of a chip handler illustrating the steps of mounting a bridged module to a substrate and performing a reflow, according to one embodiment of the present invention. [Figure 9A] 1A-1C illustrate a first bonding stage where misalignment occurs when sequentially bonding two chips and a bridge member without using a chip handler, according to one embodiment of the present invention. [Figure 9B] 10A-10C illustrate a second bonding stage where misalignment occurs when sequentially bonding two chips and a bridge member without using a chip handler, according to one embodiment of the present invention. [Figure 9C] 10A-10C illustrate a third bonding stage where misalignment occurs when sequentially bonding two chips and a bridge member without using a chip handler, according to an embodiment of the present invention. [Figure 10A]1 is a cross-sectional view of a set of chip handling fixtures and a bridged module carried by the set of chip handling fixtures, according to one embodiment of the present invention. [Figure 10B] 1 is a cross-sectional view of a bonding head having a pair of chip handling fixtures, a bonding stage, and a bridged module carried by the pair of chip handling fixtures, in accordance with one embodiment of the present invention. [Figure 11A] FIG. 1 is a cross-sectional view of a set of suction lines formed in a set of chip handling fixtures, according to one embodiment of the present invention. [Figure 11B] 1 is a cross-sectional view of a set of suction lines according to one embodiment of the present invention. [Figure 11C] FIG. 10 is a plan view of a surface of a second baseline fixture, according to one embodiment of the present invention. [Figure 12A] 10A-10C illustrate the operation of a set of aspiration lines in a set of chip handling fixtures, according to one embodiment of the present invention. [Figure 12B] 10 illustrates operation of a set of suction lines in a set of chip handling fixtures with exhaust of the suction lines from the bonding stage turned on, according to one embodiment of the present invention. [Figure 13A] 1A-1C are cross-sectional views of a chip handle structure illustrating a first step in a process for fabricating a bridged multi-chip module using a set of chip handling fixtures according to one embodiment of the present invention. [Figure 13B] 10A-10C are cross-sectional views of a chip handle structure illustrating the step of mounting a second chip having alignment marks according to one embodiment of the present invention. [Figure 13C] FIG. 10 is a cross-sectional view of the tip-handle structure illustrating the step of attaching the stage fixture to the baseline fixture by turning on the remaining suction lines, according to one embodiment of the present invention. [Figure 14A]10A-10C are cross-sectional views of a tip-handle structure illustrating the steps of turning off all suction functions of the bonding head and releasing the bonding head from the fixture, according to one embodiment of the present invention. [Figure 14B] 10 is a cross-sectional view of a tip-handle structure illustrating the step of inserting a bridge member through an opening in a second baseline fixture by a bridge handler, according to one embodiment of the present invention. FIG. [Figure 14C] A cross-sectional view of a tip handle structure showing the steps of releasing a joined bridge member from the handler body of the bridge handler and removing the handler body of the bridge handler from the fixture through an opening, according to one embodiment of the present invention. [Figure 15A] 10A-10C are cross-sectional views of a chip handle structure illustrating the step of placing a chip handling fixture with bridged modules onto a carrier according to one embodiment of the present invention. [Figure 15B] 1A-1C are cross-sectional views of a chip handle structure illustrating the step of picking up and placing the chip handling fixture onto a bonding stage according to one embodiment of the present invention. [Figure 15C] 10A-10C are cross-sectional views of a tip-handle structure illustrating the step of bonding a substrate onto a bridged module according to one embodiment of the present invention. [Figure 16A] 15B-15C on a carrier according to one embodiment of the present invention. [Figure 16B] 1 is a cross-sectional view of a chip handle structure illustrating obtaining a bridged multi-chip module including a semiconductor chip, a bridge member, and a substrate according to one embodiment of the present invention. [Figure 17A] FIG. 1 is a cross-sectional view of a set of chip handling fixtures during a first step of a process for fabricating a bridged multi-chip module using the set of chip handling fixtures, according to one embodiment of the present invention. [Figure 17B]10 is a cross-sectional view of a tip-handle structure illustrating the step of inserting a bridge member through an opening in a second baseline fixture by a bridge handler, according to one embodiment of the present invention. FIG. [Figure 17C] A cross-sectional view of a tip handle structure showing the steps of releasing a joined bridge member from the handler body of the bridge handler and removing the handler body of the bridge handler from the fixture through an opening, according to one embodiment of the present invention. [Figure 17D] 15D is a cross-sectional view of a tip-handle structure showing a step prior to the bonding step shown in FIG. 15C, according to one embodiment of the present invention. [Figure 18A] 1 is a schematic diagram of an apparatus and process for fabricating a bridged multi-chip module using a set of chip handling fixtures according to one embodiment of the present invention. [Figure 18B] 10 is a cross-sectional view of a tip-handle structure illustrating the step of inserting a bridge member through an opening in a second baseline fixture by a bridge handler, according to one embodiment of the present invention. FIG. [Figure 18C] 10A-10C are cross-sectional views of a tip-handle structure illustrating the step of bonding a substrate onto a bridged module according to one embodiment of the present invention. [Figure 19A] FIG. 10 is a cross-sectional view of a tip-handle structure showing multiple fixation members, according to one embodiment of the present invention. [Figure 19B] FIG. 19B is a detailed view of the tip-handle structure of FIG. 19A illustrating the use of adhesive as a fastening member, according to one embodiment of the present invention. [Figure 19C] FIG. 19B is a detailed view of the tip handle structure of FIG. 19A showing the use of metal stud bump and pad pairs as fastening members according to one embodiment of the present invention. [Figure 19D] FIG. 19B is a detailed view of the tip handle structure of FIG. 19A showing the use of solder bump and pad pairs as fastening members according to one embodiment of the present invention. [Figure 20A]FIG. 1 illustrates a first step of an exemplary process flow using solder bump and pad pairs as fasteners according to one embodiment of the present invention. [Figure 20B] 1A-1C illustrate steps for performing a bridging bond according to one embodiment of the present invention. [Figure 20C] 1A-1C illustrate the step of curing the underfill according to one embodiment of the present invention. [Figure 20D] FIG. 1 illustrates the step of performing exfoliation by increasing the temperature according to one embodiment of the present invention. [Figure 21A] 11A-11C are top views of chip handling fixtures illustrating variations of the chip handling fixture corresponding to the baseline fixture shown in FIG. 10, in accordance with one embodiment of the present invention. [Figure 21B] 1 is a cross-sectional view of a chip handling fixture with a semiconductor chip mounted thereon, according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0036] The drawings are not necessarily to scale, and the drawings are merely schematic representations and are not intended to portray specific parameters of the invention. The drawings are intended to depict only typical embodiments of the invention. In the drawings, like numbers represent like elements.

[0037] Detailed embodiments of the claimed structures and methods are disclosed herein. However, it should be understood that the disclosed embodiments are merely exemplary of the claimed structures and methods, which may be embodied in various forms. The present invention, however, may be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. In the description, details of well-known features and techniques may be omitted to avoid unnecessarily obscuring the presented embodiments.

[0038] The present invention will be described below with reference to specific embodiments, but those skilled in the art will understand that the embodiments described below are referred to by way of example only and are not intended to limit the scope of the present invention.

[0039] One or more embodiments of the present invention are directed to an apparatus and method for interconnecting multiple chips with a bridge member by using at least one of a chip handler, a chip support member, and a bridge handler. One or more embodiments of the present invention may also be directed to at least one of a chip handler, a chip support member, and a bridge handler.

[0040] Each chip to be bridged has a first surface including a first set of terminals formed on the first surface and a second surface opposite the first surface. The first set of terminals of each chip is used for bridging. Hereinafter, the first surface on which the first set of terminals is formed is often referred to as the "front surface," and the second surface opposite the front surface is often referred to as the "back surface." In one embodiment, the front surface of each chip also includes a second set of terminals used for bonding to a substrate, and the resulting bridged module is mounted to the substrate during subsequent processing. The terminals can have any suitable form. In one embodiment, the first set of terminals is a set of contact pads with or without pre-solder, and the second set of terminals is a set of bumps.

[0041] The chip handler is used to handle multiple chips and has an opening disposed at a predetermined position and at least one support surface. The support surface of the chip handler is used to support the front surfaces of the multiple chips when the multiple chips are mounted on the chip handler. In a specific embodiment, the chip handler further has a cavity communicating with the opening and having a height greater than that of the first and second sets of terminals of the multiple chips so that the first and second sets of terminals of the multiple chips are accommodated within the cavity when the multiple chips are mounted on the chip handler. The cavity may be provided as a recessed or concave portion of the body of the chip handler.

[0042] The chip support is used to support multiple chips from their backsides when the multiple chips are mounted on the chip support using a chip handler. The chip support may be a bonding stage or bonding head of a chip bonder, or other fixture that can be attached to the bonding stage and head. The bridge handler is used to insert a bridge member through an opening in the chip handler and position the bridge member on a first set of terminals of the multiple chips that are exposed through the opening.

[0043] 1A-1D and 2A-2D, a schematic diagram of a chip handler for use in a bridged multi-chip module manufacturing apparatus according to one embodiment of the present invention is illustrated, which includes an apparatus for interconnecting multiple chips with a bridge member.

[0044] Specifically, FIGS. 1A-1D show a chip handler 200 having a bridged module 150 carried by the chip handler 200, while FIGS. 2A-2D show a chip handler 200 without the bridged module 150 shown in FIGS. 1A-1D. The chip handler 200 shown in FIGS. 1A-1D and 2A-2D is a chip handler for interconnecting two chips 100A and 100B using a single bridge member 120. However, this is merely an example, and the number of chips to be interconnected is not limited, nor is the number of bridge members used to interconnect the chips. Chip handlers according to embodiments of the present invention can generally be used to interconnect two or more chips using one or more bridge members.

[0045] FIGS. 1A and 1B and 2A and 2B show cross-sectional views of chip handler 200. FIGS. 1C and 2C show top views of chip handler 200. FIGS. 1D and 2D show bottom views of chip handler 200. Note that the cross-sectional views shown in FIGS. 1A and 2A correspond to the cross-sections indicated by dotted line A-A' in the top and bottom views of FIGS. 1C-1D and 2C-2D, respectively. The cross-sectional views shown in FIGS. 1B and 2B correspond to the cross-sections indicated by dotted line B-B' in the top and bottom views of FIGS. 1C-1D and 2C-2D, respectively.

[0046] As shown in FIGS. 1A-1D, a bridged module 150 is carried by a chip handler 200. The bridged module 150 shown in FIGS. 1A-1D is a post-bridging structure that includes two chips 100A, 100B mounted on the chip handler 200 and a bridge member 120 joined to the chips 100A, 100B by a bridge-chip connection 130. During the bridged multi-chip module manufacturing process, the chip handler 200 is used to handle, carry, support, and / or hold the two chips, the first chip 100A and the second chip 100B, and the intermediate and / or resulting structure of the bridged module 150.

[0047] Each chip 100 (collectively referred to by a numeric character without an alphabetical character, such as "100," and individually referred to by a numeric character and a corresponding alphabetical character, such as "100A" and "100B") has a front surface 102 and a back surface 104. The first and second chips 100A, 100B are mounted upside down in the chip handler 200, as shown in FIGS. 1A-1D. A bridge member 120 is bonded to the front surfaces 102A, 102B of the chips 100A, 100B, which face downward relative to the chip handler 200.

[0048] Each chip 100 may include, but is not limited to, a semiconductor chip (also referred to as a "die") containing an integrated circuit. The integrated circuit of each chip 100 may include electrical, electro-optical, and / or electromagnetic elements fabricated therein, along with wiring for connecting these elements to terminals formed on the front surface 102 of the chip 100. Each chip 100 may have processor functionality such as a central processing unit (CPU), digital signal processor (DSP), general-purpose computing on graphics processing units (GPGPU), memory, an AI accelerator, or a system-on-a-chip (SoC). Each chip 100 may be made of a semiconductor material such as Si, SiGe, Ge, GaAs, GaP, or InSb. Such semiconductor materials generally have a low coefficient of thermal expansion (CTE).

[0049] The front surface 102 is a chip surface including a first set of terminals for bridging (not shown) and a second set of terminals 106 for bonding to an external substrate, such as an interposer, to which the resulting bridged module 150 is mounted during subsequent processing. Note that the bridge-chip connections 130 are already formed on the first set of terminals in FIGS. 1A-1D . The terminals can have any suitable form, including pads (with or without pre-solder), bumps, etc. In the embodiment depicted in FIGS. 1A-1D , the second set of terminals 106 for bonding to an external substrate includes a set of solder bumps, and the first set of terminals for bridging may be a set of contact pads. However, these terminals are not limited, and in other embodiments, the second set of terminals 106 may be a set of contact pads. Alternatively, the first set of terminals may be a set of bumps.

[0050] 1D, the second set of terminals 106 of each chip 100 form a two-dimensional array with a notch region, and the bridge-chip connections 130 also form a two-dimensional array located in the notch region of the two-dimensional array of the second set of terminals 106A, 106B of the first and second chips 100A, 100B. The notch region is located in the center of the two chips 100A, 100B.

[0051] In a specific example, each chip 100 may have an area of ​​approximately 10-30 mm x 10-30 mm and a thickness of approximately 750-800 micrometers when considering a 300 mm wafer, or 50 micrometers when considering backgrinding. Each chip 100 may have bumps with a pitch of approximately 100-200 micrometers and a diameter of approximately 50-100 micrometers.

[0052] The bridge member 120 functions to interconnect multiple chips (i.e., the first chip 100A and the second chip 100B in the exemplary embodiment shown in FIGS. 1A-1D ). The bridge member 120 is generally smaller than the chips 100. In the bridged module 150, the bridge member 120 is joined to both the first and second chips 100A, 100B by bridge-chip connections 130. The bridge-chip connections 130 may be much smaller than typical C4 bumps. In the bridged module 150, an underfill material may be applied around the bridge-chip connections 130, although FIGS. 1A-1D show an intermediate structure of the bridged module 150 before underfilling.

[0053] For reference, in a specific example, the bridge member 120 may have an area of ​​approximately 1-5 mm by 2-10 mm and a thickness of approximately 75-250 micrometers. The bridge member 120 may have micro-bumps with a pitch of approximately 20-80 micrometers and a diameter of approximately 10-40 micrometers. The bridge member 120 and bridged module 150 are described in more detail below.

[0054] The chip handler 200 is used to handle, carry, support, and / or hold the first chip 100A and the second chip 100B during the manufacturing process. As shown in FIGS. 2A-2D , the chip handler 200 includes a body 202 having a first cavity 210, a second cavity 208 formed in the bottom of the first cavity 210, and an opening 212 formed through the body 202. The cavities 208, 210 may be recessed or concave portions of the body 202 of the chip handler 200. The first cavity 210 connects to the second cavity 208, which communicates with the opening 212. The bottom of the second cavity 208 corresponds to the bottom surface 206, and the bottom of the first cavity 210 corresponds to the surface 204.

[0055] As shown in FIGS. 1A-1D, the surface 204 supports the front surfaces 102A, 102B of the first and second chips 100A, 100B in the peripheral regions of each chip 100 when the first and second chips 100A, 100B are mounted on the chip handler 200. Therefore, hereinafter, the surface 204 is often referred to as the "support surface." In the exemplary embodiment shown in FIGS. 1A-1D and 2A-2D, the support surface 204 is a single, flat, continuous surface. However, in other embodiments, the support surface 204 may include multiple surface regions separated from one another. For example, there may be an additional support surface located in the central region of each chip 100. Thus, the chip handler 200 has at least one support surface 204 for supporting the front surfaces 102A, 102B of the first chip 100A and the second chip 100B when the first and second chips 100A, 100B are mounted on the chip handler 200.

[0056] The first chip 100A and the second chip 100B are mounted on the chip handler 200 and horizontally aligned with respect to the chip handler 200 using an appropriate alignment tool. When the first chip 100A and the second chip 100B are horizontally aligned with respect to the chip handler 200 and mounted on the chip handler 200, the support surface 204 of the chip handler 200 contacts the front surfaces 102A and 102B of the first and second chips 100A and 100B at their peripheral regions, thereby also establishing vertical alignment between the front surface 102A of the first chip 100A and the front surface 102B of the second chip 100B.

[0057] As shown in FIGS. 1A-1D, the second cavity 208 shown in FIGS. 2A-2D has a height greater than the height of the first and second sets of terminals 106A, 106B of the first and second chips 100A, 100B so that the first and second sets of terminals 106A, 106B of the first and second chips 100A, 100B are accommodated within the cavity 208 when the chips 100A, 100B are mounted on the chip handler 200. Note that the edges of the second cavity 208 are represented by short dashed lines in the top and bottom views of FIGS. 1C and 1D. The edges of the first cavity 210 are represented by short dashed lines in the bottom view of FIG. 1D. The edges of each chip 100 are also represented by dashed lines in the bottom view of FIG. 1D. The first cavity 210 accommodates the bodies of the first and second chips 100A and 100B when the first and second chips 100A and 100B are mounted on the chip handler 200.

[0058] It should also be noted that when the first and second chips 100A, 100B are mounted to the chip handler 200 by the support surface 204, the backsides 104A, 104B of the chips 100A, 100B are exposed from the body 202 of the chip handler 200. Also, in the described embodiment, the chips 100A, 100B are fully contained within the cavities 208, 210 of the chip handler 200.

[0059] As mentioned above, the chip handler 200 also has an opening 212 through which the bridge member 120 is inserted and positioned over the first and second chips 100A, 100B. To this end, the opening 212 is positioned at a predetermined location where the bridge member 120 will be placed, as shown in FIG. 1D. Note that a portion of the edge of the opening 212 behind the chips 100A, 100B is represented by a dashed line in the top view of FIG. 1C.

[0060] Chip handler 200 may further include a gas seal member 218 provided on top of body 202 of chip handler 200 for sealing the space inside body 202 when chip handler 200 having chips 100A and 100B is assembled to a chip support member described below. Examples of gas seal member 218 include, but are not limited to, rubber, silicone, glass fiber, plastic polymer, etc.

[0061] As shown in Fig. 1C, when viewed from above, bridge member 120 (its front surface 122) can be seen through the gap between first chip 100A and second chip 100B. Also, as shown in Fig. 1D, when viewed from the bottom, bridge member 120 (its back surface 124) bonded to first and second chips 100A, 100B, and portions of front surfaces 102A, 102B of first and second chips 100A, 100B can be seen through opening 212.

[0062] According to one embodiment, the chip handler 200 may include a fixing mechanism for fixing the first and second chips 100A, 100B to the support surface 204. As part of the fixing mechanism, the chip handler 200 has a set of holes 214 formed in the support surface 204, as shown more clearly in FIGS. 2C and 2D. The set of holes 214 are connected to suction (or vacuum) lines in an appropriate manner and are used to suction the front surfaces 102A, 102B of the chips 100A, 100B. The holes 214 are drilled in locations corresponding to the peripheral regions of the chips 100A, 100B, which are areas outside the bridge-chip connection 130 and the second set of terminals 106A, 106B. For reference, in one embodiment, each chip 100 has a peripheral region several hundred micrometers wide. The holes 214 may be fabricated in such edge regions of the chips 100A, 100B.

[0063] The set of holes 214 can be divided into two subsets: a first subset of holes 214A for the first chip 100A and a second subset of holes 214B for the second chip 100B. The holes 214 can be distributed apart from one another, as shown in FIGS. 2C and 2D . In certain embodiments, the holes 214 can be evenly distributed. In a preferred embodiment, the set of holes 214 can be divided into at least two subsets: a peripheral subset of holes 214 (labeled 214A-P, 214B-P) that are sparsely distributed, and a central subset of holes 214 (labeled 214A-C, 214B-C) that are more densely distributed than the peripheral subsets. Preferably, the number of holes located at the center of the handler is greater than the number of holes located at the periphery of the handler to prevent inappropriate displacement of the terminals on the first and second chips 100A, 100B during heating if the CTE mismatch between the chip 100 and the chip handler 200 is not small enough.

[0064] According to one embodiment, chip handler 200 may further include a gas supply mechanism for supplying gas to the interior space (including at least cavity 208) of body 202 when chip handler 200 having chips 100A, 100B mounted thereon is assembled to the chip support member. Body 202 of chip handler 200 functions as a gas flow container when gas seal member 218 contacts the surface of the chip support member. As part of the gas supply mechanism, chip handler 200 includes gas inlet 216I and gas outlet 216O, which open to body 202 of chip handler 200 and communicate with the interior space of body 202, as shown in FIGS. 1B, 1D, and 2B-2D.

[0065] In certain embodiments, the gas supplied from the gas inlet 216I may include a reducing gas for cleaning the terminals and / or bridge members 120 of the chips 100A, 100B housed within the space. Examples of reducing gases include vapor-phase formic acid, hydrogen gas (a mixture of hydrogen and an inert gas (e.g., nitrogen, argon)), and the like. Vapor-phase formic acid is preferably capable of removing metal oxides formed on the terminals. The gas supplied from the gas inlet 216I may also include an inert gas, such as nitrogen gas or a noble gas such as argon. The inert gas may be used to replace the gas in the space after bridging.

[0066] The body 202 of the chip handler 200 can be made of any material, such as silicon, metal (e.g., pure metals and alloys), or ceramic. To that end, the material of the body 202 can have a certain degree of rigidity. In a preferred embodiment, the body 202 of the chip handler 200 can be made of any material with a specific coefficient of thermal expansion (CTE) similar or equivalent to that of the material of the chips 100A and 100B. In a preferred embodiment, the body 202 of the chip handler 200 can be made of any material that has at least one, and more preferably all, of the following characteristics: heat resistance, machinability, and corrosion resistance to reducing gases such as vapor-phase formic acid. Examples of such materials suitable for the body 202 of the chip handler 200 include Mo, Ti, Zr, Hastelloy™ (Ni, Mo, Cr), etc. In certain embodiments, pure metals and alloys other than SUS (Fe, Cr, Ni) and Al alloys can be used for the body 202 of the chip handler 200.

[0067] 3A-3E and 4A-4E, schematic diagrams of a process for fabricating a bridged multi-chip module using a chip handler are shown, according to one embodiment of the present invention. The bridged multi-chip module fabrication process involves using a chip handler to interconnect multiple chips with bridge members. In this embodiment, FIGS. 3A-3E and 4A-4E show cross-sectional views corresponding to the cross-sections denoted by line B-B' in the top and bottom views of FIGS. 1C-1D and 2C-2D. However, FIGS. 3A-3E and 4A-4E also show, by dotted lines, a cross-sectional portion along line A-A' that includes a central portion of support surface 204 that contacts two chips 100A and 100B.

[0068] As shown in FIG. 3A , the manufacturing process may include mounting a first chip 100A having alignment marks (not shown) on a chip handler 200 using a bonding head, followed by suctioning the front surface 102A of the first chip 100A through a first subset of holes 214A formed on the support surface 204 of the chip handler 200. The chip handler alignment marks may be formed on the surfaces 204, 206A of the chip handler 200. The chip alignment marks may also be formed on the front surface 102A (and the second chip 100B) where the terminals are to be fabricated, enabling highly accurate alignment. The chip handler 200 is then placed on the bonding stage 300 of a chip bonder. Note that in FIGS. 3A-3E and 4A-4E , the thick solid lines represent holes (and flow paths) through which vacuum (including reduced pressure) is currently applied. The first chip 100A is mounted upside down on the chip handler 200. The first set of terminals 108A and the second set of terminals 106A for bridging of the first chip 100A are accommodated in a cavity 208 of the chip handler 200.

[0069] 3B , the manufacturing process may also include mounting a second chip 100B having alignment marks (not shown) on the chip handler 200 by using a bonding head, followed by suction of the front surface 102B of the second chip 100B through holes 214B formed in the support surface 204 of the chip handler 200. The second chip 100B is also mounted upside down on the chip handler 200. The first set of terminals 108B and the second set of terminals 106B of the second chip 100B are accommodated in the cavity 208 of the chip handler 200.

[0070] 3A-3B, the first chip 100A and the second chip 100B are mounted on the chip handler 200 such that the front surfaces 102A, 102B of the chips 100A, 100B are supported by the support surface 204 of the chip handler 200. Thus, the front surfaces 102A, 102B of the first and second chips 100A, 100B are vertically aligned. Note that vertically aligning two surfaces means that the two surfaces are flush with each other or aligned with a tolerance that is acceptable for bridge-chip bonding.

[0071] 3C, the manufacturing process may also include placing the first chip 100A and the second chip 100B with their backsides 104A, 104B facing each other onto a bonding stage 300. The placing step may include flipping the first and second chips 100A, 100B onto the bonding stage 300 by turning the chip handler 200 upside down. The bonding stage 300 functions as a chip support member in the described embodiment.

[0072] As shown in FIG. 3D , the manufacturing process may further include preparing the bridge member 120 attached to a bridge handler 310. The bridge handler 310 includes a (handler) body for attaching the bridge member 120 and a gas leak stopper 312 attached to the bridge handler 310. In the described embodiment, the bridge handler 310 may be attached to a bonding head of a chip bonder. The gas leak stopper 312 is used to close the opening 212 of the chip handler 200 so as to seal the chamber space formed by the chip handler 200 and the bonding stage 300 when the bridge member 120 is inserted through the opening 212 of the chip handler 200 by the handler body. The handler body of the bridge handler 310 may have a protrusion to which the gas leak stopper 312 is fixed, as shown. Examples of materials used for the handler body of the bridge handler 310 include, but are not limited to, aluminum nitride and materials thereof. Examples of the gas leak stopper 312 include, but are not limited to, rubber, silicone, etc.

[0073] The bridge member 120 may include, but is not limited to, a semiconductor chip or an organic component with interconnects fabricated therein, and may function to interconnect each terminal formed on one side bonded to one chip with a corresponding terminal formed on the other side also bonded to another chip.

[0074] In certain embodiments, the bridge member 120 may be made of a semiconductor material such as Si, SiGe, Ge, GaAs, GaP, or InSb, and thus the bridge member is a bridge chip. In other specific embodiments, the bridge member 120 may be made of an organic material and a conductive pattern. Examples of organic materials used for the organic bridge member include thermosetting or thermoplastic polymer materials such as epoxy resin and acrylic resin, and photosensitive insulating resins such as polyimide (PI), benzocyclobutene (BCB), and polybenzoxazole (PBO). The conductive pattern embedded in the organic material may be a metal material (e.g., Cu, Al, etc.) or other conductive material.

[0075] The bridge member 120 may also have a front surface 122 and a back surface 124 opposite the front surface 122. The front surface 122 is a surface on which a third set of terminals 126A, 126B for bridging are formed. In the embodiment depicted in FIG. 3C , the third set of terminals 126 for bridging may be a set of (micro)bumps. The set of bumps included in the third set of terminals 126 may be divided into two subsets, including a first subset of terminals 126A for bonding to the first chip 100A and a second subset of terminals 126B for bonding to the second chip 100B. The bridge member 120 may be supported from the back surface 124 by a handler body of the bridge handler 310.

[0076] As shown in FIG. 3E , the manufacturing process may also include inserting the bridge member 120 by a bridge handler 310 through an opening 212 of the chip handler 200, which has alignment marks (not shown), to position the bridge member 120 over the first set of terminals 108A, 108B of the chips 100A, 100B. The alignment marks may be formed on the front surface 102 of the chip 100 on which the terminals will be fabricated and on the front surface 122 of the bridge member 120, thereby enabling highly accurate alignment. The bridge member 120 is inserted so that the front surfaces 102A, 102B of the aligned chips 100A, 100B and the front surface 122 of the bridge member 120 face each other. Additionally, the first set of terminals 108A of the first chip 100A are aligned with the first subset of terminals 126A of the bridge member 120. The first set of terminals 108B of the second chip 100B is aligned with the second subset of terminals 126B of the bridge member 120. During the insertion step, the gas leak stopper 312 contacts the top of the chip handler 200 and covers the gap between the bridge handler 310 and the chip handler 200.

[0077] As also shown in FIG. 3E , the manufacturing process may further include supplying a reducing gas into the chamber space to clean the terminals 108A, 108B of the first chip 100A and the second chip 100B and / or the terminals 126A, 126B of the bridge member 120. Metal oxide formed on the terminals can be removed by the reducing gas. Examples of reducing gases include gaseous formic acid (e.g., a mixture of gaseous formic acid and nitrogen gas in an appropriate ratio) and hydrogen (e.g., a mixture of hydrogen and an inert gas (e.g., nitrogen, argon, etc.)). During the inserting step, the chip handler 200, the bonding stage 300, and the bridge handler with the gas leak stopper 312 are assembled to provide a chamber space, which is preferably a closed space. The chamber space can accommodate the first set of terminals 108A, 108B of the first and second chips 100A, 100B and the terminals 126A, 126B of the bridge member 120 within the chamber space.

[0078] As shown in FIG. 4A , the manufacturing process may also include steps of increasing the temperature, soldering, replacing the gas with an inert gas, and cooling. By soldering, a first subset of bridge-chip connections 130A and a second subset of bridge-chip connections 130B are formed between the bridge member 120 and the chips 100A and 100B, respectively. In the described embodiment, flip-chip bonding is performed in a reducing gas environment. Therefore, clean-less bonding can be achieved in a reducing atmosphere. Furthermore, by retaining the reducing gas within the chamber space, corrosion of device components outside the chamber space due to the corrosive properties of the gas can also be prevented.

[0079] As shown in FIG. 4B, the manufacturing process can include releasing the bonded bridge member 120 from the handler body of the bridge handler 310 and removing the handler body of the bridge handler 310 from the chip handler 200 through the opening 212, thereby leaving the bridged module 150 between the chip handler 200 and the bonding stage 300.

[0080] As shown in FIG. 4C, the manufacturing process can further include dispensing underfill material from the backsides 104A and 104B of the chips 100A and 100B to locations surrounding the bridge-chip connections 130A and 130B. Note that the chip handler 200 and bridged module 150 are inverted compared to FIG. 4B. In a preferred embodiment, a jetting dispenser 240 can be used to inject droplets 242 of underfill material through the gap between the chips 100A and 100B. This gap can generally be in the range of 150 to 450 micrometers. Therefore, a jetting dispenser capable of injecting droplets 242 having a size smaller than the size of a typical needle used for capillary underfill can be preferably employed. In a preferred embodiment, a plasma treatment can be performed before dispensing the underfill material. Because the underfill material can be applied after bridging, regular capillary-type underfills can be employed, which have better material properties (e.g., higher adhesion) compared to NCPs (non-conductive pastes), thereby reducing the risk of joint defects.

[0081] 4D , the manufacturing process may also include releasing the bridged module 150 from the chip handler 200 by turning off the suction of the holes 214 and picking up the bridged module 150 from the chip handler 200 with a bonding head 320. The bonding head 320 may have a pair of holes 322A, 322B for applying suction to the backsides 104A, 104B of the chips 100A, 100B. The process may also include curing the dispensed underfill material 132 in an oven.

[0082] As shown in FIG. 4E, the manufacturing process can also include mounting bridged module 150 on a substrate 140, such as an interposer, followed by reflow. Substrate 140 can have recesses or cavities 142 to avoid interference between bridge member 120 and substrate 140. Reflow results in first and second subsets of connections 146A and 146B between chips 100A, 100B, and substrate 140, respectively. After the reflow step, any suitable packaging process can be performed to produce the final bridged multi-chip module.

[0083] 5, there is shown a schematic diagram of a bridged multi-chip module manufacturing apparatus 10 according to one embodiment of the present invention. As shown in FIG. 5, the manufacturing apparatus 10 includes the above-described bonding stage 300, chip handler 200, and bonding head 320. The manufacturing apparatus 10 further includes a control module 20, an XY positioning module 30, a Z positioning module 40, as well as a suction system 60, a reducing gas supplier 70, and an inert gas supplier 80.

[0084] The bonding stage 300 is used to support an object or target placed thereon. The bonding stage 300 is attached to an XY positioning module 30, which is used to position the bonding stage 300 in the X and Y dimensions (horizontally). The XY positioning module 30 is used to horizontally align multiple chips 100 with the chip handler 200 when the chip handler 200 is placed on the bonding stage 300, as shown in FIGS. 3A-3B. The bonding stage 300 can also be used to support multiple chips 100 from their backsides 104, as shown in FIGS. 3C-3E and 4A-4B, and can function as a chip support member.

[0085] Chip handler 200 is used to handle, carry, support, and / or hold multiple chips 100 during the manufacturing process. Chip handler 200 is rotatably mounted to a Z positioning module 40, which is used to position chip handler 200 in the Z dimension (Z1, vertically). Z positioning module 40 can flip chip handler 200 upside down as needed.

[0086] The bonding head 320 is used to handle the bridged module 150. The bonding head 320 may be attached to any Z positioning means used to position the bonding head 320 in the Z dimension (Z2, vertically). The bridge handler 310 used to insert the bridge member 120 may also be attached to the bonding head 320.

[0087] The suction system 60 is used to suck the front surface 102 of the chip 100 through holes 214 formed in the chip handler 200. The suction system 60 may include a vacuum pump, vacuum piping connected to the chip handler 200 and the flow path of the vacuum pump, and a valve for controlling the flow of gas.

[0088] The reducing gas supplier 70 is used to supply a reducing gas to the chamber space within the chip handler 200. In embodiments where vapor-phase formic acid is employed, the reducing gas supplier 70 may include a tank for holding the formic acid, a heating chamber for vaporizing the formic acid, gas flow piping connected to the inlet 216I of the chip handler 200 and the heating chamber, and a valve for controlling the flow of the gas. In embodiments where hydrogen gas (a mixture of hydrogen and an inert gas (e.g., nitrogen, argon)) is employed, the reducing gas supplier 70 may include a gas cylinder for supplying hydrogen gas to the chamber space within the chip handler 200.

[0089] The inert gas supplier 80 is used to supply an inert gas to the chamber space within the chip handler 200 to replace the reducing gas remaining in the chamber space. The inert gas supplier 80 may include a gas cylinder for supplying the gas, gas flow piping connected to the inlet 216I of the chip handler 200 and the cylinder, and a valve for controlling the flow of the gas. The inert gas supplier 80 may also be used to supply an inert gas for mixing with the reducing gas.

[0090] The manufacturing apparatus 10 may further include a jet dispenser 240 for dispensing the underfill material, which is shown in FIG. 4C but omitted in FIG. 5. The manufacturing apparatus 10 may also include a bridge handler 310 used to insert the bridge member 120, which is shown in FIGS. 3D-3E and 4A but omitted in FIG. 5.

[0091] The control module 20 may include processing circuits and electronic components, and operates the XY positioning module 30, the Z positioning module 40, the bonding head 320, the suction system 60, the reducing gas supplier 70, the inert gas supplier 80, and the injector / discharger 240. The control module 20 controls any one of the steps of mounting the chip 100 on the chip handler 200, inverting the chip handler 200, handling the bridge member, discharging the underfill material, releasing the bridged module 150 from the chip handler 200, and mounting the bridged module 150 on the substrate 140, which are shown in FIGS. 3A to 3E and 4A to 4E.

[0092] Although the bonding stage 300 has been described as moving along the XY direction and the chip handler 200 and bonding head 320 have been described as moving along the Z direction, any configuration may be adopted as long as the relative position of the handler or head (200, 310, 320) with respect to the bonding stage 500 is determined three-dimensionally.

[0093] 6A-6C, there are shown schematic diagrams of a chip handler, a chip support member, and a bridged module mounted on the chip handler and chip support member for use in a bridged multi-chip module manufacturing apparatus according to one embodiment of the present invention. The bridged multi-chip module manufacturing apparatus includes an apparatus for interconnecting multiple chips with bridge members using chip handlers and chip support members.

[0094] The exemplary embodiments described with reference to Figures 1A-1D, 2A-2D, 3A-3E, 4A-4E, and 5 are preferably used to interconnect multiple chips 100 having approximately the same thickness. The exemplary embodiment shown in Figures 6A-6C is preferably used to interconnect multiple chips having different thicknesses.

[0095] 6A-6C show chip handler 200 and chip support member 250, and bridged module 150 carried thereby. Unless otherwise noted, chip handler 200 shown in FIGS. 6A-6C has substantially the same structure as chip handler 200 shown in FIGS. 1A-1D and 2A-2D.

[0096] 6A and 6B show cross-sectional views of the assembly of chip handler 200 and chip support member 250. Fig. 6C shows a top view of the assembly of chip handler 200 and chip support member 250. Note that the cross-sectional views shown in Figs. 6A and 6B correspond to the cross-sections indicated by lines A-A' and B-B', respectively, shown in the top view of Fig. 6C.

[0097] As shown in FIGS. 6A-6C, a bridged module 150 is supported by an assembly of a chip handler 200 and a chip support member 250. The bridged module 150 includes two chips 100A and 100B mounted on the chip handler 200 and a bridge member 120 joined to the two chips 100A and 100B by a bridge-chip connector 130. The chips 100A and 100B shown in FIGS. 6A-6C have different thicknesses. For example, the second chip 100B is background to have a thinner thickness than the first chip 100A. Note that the chip handler 200, chips 100, and bridge member 120 shown in FIGS. 6A-6C are the same as those shown in FIGS. 1A-1D and 2A-2D unless otherwise noted.

[0098] The chip handler 200 is used to handle, carry, support, and / or hold the first chip 100A and the second chip 100B from their front surfaces 102A, 102B during the manufacturing process. The chip support member 250 is also used to handle, carry, support, and / or hold the first chip 100A and the second chip 100B from their back surfaces 104A, 104B during the process.

[0099] As shown in FIGS. 6A to 6C, chip support member 250 has a first base portion 252A and a second base portion 252B. First base portion 252A has a first horizontal surface for holding first chip 100A from rear surface 104A. Second base portion 253B has a second horizontal surface for holding second chip 100B from rear surface 104B. The positional relationship between the first horizontal surface and the second horizontal surface is fixed in the described embodiment.

[0100] The chip support member 250 further includes a first thickness adjustment layer 254A formed on the first base portion 252A and a second thickness adjustment layer 254B formed on the second base portion 252B. Note that the thickness of the base portion 252 of each chip 100 is designed based on the nominal thickness of the chips 100A and 100B. The first and second thickness adjustment layers 254A and 254B are provided to eliminate the effects of thickness variations due to chip manufacturing.

[0101] Chip support member 250 also has openings 260 through which the underfill material is dispensed. For this purpose, openings 260 are positioned at predetermined locations where bridge member 120 will be placed, as shown in FIG. 6C. When viewed from above, bridge member 120 (its front surface 122) is visible through openings 260 and the gap between first chip 100A and second chip 100B.

[0102] The chip support member 250 may include an attachment / detachment mechanism 256 for attaching / detaching the chip support member 250 to / from the chip handler 200. The chip support member 250 may have a pair of holes 258A, 258B for securing the chips 100A, 100B to the chip support member 250. The pair of holes 258A, 258B are connected to a vacuum line in an appropriate manner and are used to suction the backsides 104A, 104B of the chips 100A, 100B. It should be noted that in other embodiments, the attachment / detachment mechanism may be provided in the chip handler 200 instead of the chip support member 250.

[0103] Chip support member 250 can be made of any material, such as silicon, metal, or ceramic, similar to the material of chip handler 200. To that end, the material of chip support member 250 may have some rigidity. Examples of materials suitable for making chip support member 250 include Mo, Ti, Zr, Hastelloy™ (Ni, Mo, Cr), and the like.

[0104] 7A-7D and 8A-8D, which illustrate schematic diagrams of a process for fabricating a bridged multi-chip module using a chip handler and chip support members, according to one embodiment of the present invention. Note that FIGS. 7A-7D and 8A-8D, like FIGS. 3A-3E and 4A-4E, illustrate cross-sectional views corresponding to the cross-section indicated by line B-B' in the top and bottom views of FIG. 6C.

[0105] 7A, the process may include mounting a first chip 100A and a second chip 100B with alignment marks (not shown), followed by suctioning the front surfaces 102A, 102B of the first and second chips 100A, 100B through a set of holes 214A. The chip handler 200 is placed on a bonding stage 300 of a chip bonder. The chips 100A, 100B are mounted on the chip handler 200, and the front surfaces 102A, 102B of the chips 100A, 100B are vertically aligned even though the chips have different thicknesses.

[0106] As shown in FIG. 7B, the process may also include attaching a chip support member 250 to the chip handler 200 so that the chip support member 250 supports the chips 100A, 100B from their backsides 104A, 104B.

[0107] 7C, the manufacturing process may further include preparing a bridge member 120 attached to a bridge handler 310 having a gas leak stopper 312 fixed thereto. The bridge member 120 may be supported from its back surface 124 by the handler body of the bridge handler 310 such that its front surface 122, including the terminals 126A and 126B, faces downward. Note that the chip handler 200, chip support member 250, and chips 100A and 100B are inverted.

[0108] As shown in FIG. 7D , the manufacturing process may also include inserting the bridge member 120 through an opening 212 in the chip handler 200, which has alignment marks (not shown), to align the bridge member 120 over the chips 100A and 100B. During the insertion step, a gas leak stopper 312 contacts the top of the chip handler 200. As also shown in FIG. 7D , the process may further include supplying a reducing gas into the chamber space to remove oxides formed on the terminals. The process may also include increasing the temperature, soldering, replacing the gas with an inert gas, and cooling. By soldering, bridge-chip connections 130A and 130B are formed between the bridge member 120 and the chips 100A and 100B, respectively. In the described embodiment, flip-chip bonding is performed in a reducing gas environment similar to that in the embodiments described in FIGS. 3A-3E and 4A-4E.

[0109] 8A, the process may further include releasing the bridge member 120 from the handler body of the bridge handler 310, removing the handler body of the bridge handler 310 from the chip handler 200, inverting the assembly of the chip handler 310 and the chip support member 250, and dispensing underfill material from the backsides 104A, 104B of the chips to locations around the bridge-chip junctions 130A, 130B. Droplets 242 of underfill material are injected through openings 260 from a jet dispenser 240 located behind.

[0110] 8B, the manufacturing process may also include releasing the bridged module 150 from the chip handler 200 by turning off the suction on the holes 214 and picking up the bridged module 150 with the chip support member 250. Then, turning on the suction on the holes 258 to suction the backsides 104A, 104B of the chips 100A, 100B. The process may also include curing the dispensed underfill material 132 in an oven.

[0111] As shown in FIG. 8C, the process may also include preparing a substrate 140 having contact pads 144A, 144B formed thereon. The substrate 140 may have a recess or cavity 142 to prevent interference between the substrate 140 and the bridge member 120 mounted thereon. As shown in FIG. 8D, the manufacturing process may also include mounting a bridged module 150 to the substrate 140 and performing a reflow process. The reflow process forms a set of connections 146A, 146B between the chips 100A, 100B and the substrate 140. After the reflow step, any suitable packaging process may be performed to produce the final bridged multi-chip module.

[0112] 9A-9C show schematic diagrams of misalignment when two chips are bonded to a bridge member in sequence without using a chip handler 200 according to one embodiment of the present invention. The chip handler 200 provides a function for performing precise pre-alignment between multiple chips 100. Without the chip handler 200, in order to prevent misalignment between a first chip 100A and a second chip 100B to be bonded to an external substrate, the alignment accuracy between the first chip 100A and the bridge member 120 and between the second chip 100B and the bridge member 120 must be at least 10 times higher.

[0113] FIG. 9A is a schematic diagram illustrating misalignment during a first bond, bonding a bridge member 920 to a first chip 900A. FIG. 9B is a schematic diagram illustrating misalignment during a second bond, bonding a second chip 900B to a bridge member 920 already bonded to the first chip 900A. The second bond results in a bridge module 950. Assume that misalignment during the first and second bonding processes is individually tolerable. FIG. 9C is a schematic diagram illustrating misalignment during a third bond, bonding the bridge module 950 to a substrate 940. Even if misalignment during the first and second bonds is individually tolerable, misalignment between the bridge module 950 and the substrate 940 may be unacceptable. Considering that some rotational misalignment occurs, misalignment at locations farther from the connection may be unacceptable because displacement increases with distance from the connection point.

[0114] In contrast to related processes, the chip handler 200 according to exemplary embodiments of the present invention enables the following process: a bridge member is bonded to two regions on "different chips" that are pre-aligned to the chip handler 200 with alignment marks having mask design level precision, and then the two bridged chips are simultaneously bonded to a substrate.

[0115] 10A-10B, a schematic diagram of a set of chip handling fixtures is shown that functions equivalently to the chip handler 200 and chip support member 250 combination shown in Figures 6A-6C, according to one embodiment of the present invention. The set of chip handling fixtures shown in Figures 10A-10B is preferably used to interconnect multiple chips of different thicknesses, similar to the embodiment shown in Figures 6A-6C.

[0116] 10A-10B show a pair of chip handling fixtures, a bonding stage 500, and a bonding head 510 with a bridged module 150 carried by the pair of chip handling fixtures. Figures 10A and 10B show cross-sectional views of the structure.

[0117] As shown in FIGS. 10A-10B, the set of chip handling fixtures includes two baseline fixtures 402, 404 (first baseline fixture 404 and second baseline fixture 402) and four stage fixtures 406, 408, 410A, 410B (first stage fixture 408, second stage fixture 406, and third stage fixtures 410A, 410B). Note that the set of chip handling fixtures 402-408, 410A, and 410B corresponds to a set of components obtained by dividing the assembly of chip handler 200 and chip support member 250 shown in FIGS. 6A-6C into multiple components. The set of chip handling fixtures 402-408, 410A, and 410B is disposed between bonding stage 500 and bonding head 510.

[0118] The first baseline fixture 404, the second baseline fixture 402, and the first stack of second stage fixture 406 (portion thereof) correspond to chip handler 200. The second stage fixture 406 (portion thereof), the first stage fixture 408, and the second stack of third baseline fixtures 410A, 410B correspond to chip support member 250. Unless otherwise noted, the functionality of the first stack of fixtures (402, 404, 406) and the second stack of fixtures (406, 408, 410A, 410B) is substantially the same as chip handler 200 and chip support member 250, respectively, shown in Figures 6A-6C.

[0119] The first baseline fixture 404 provides a cavity 414 and a support surface 405 that correspond to the cavity 208 and support surface 204, respectively, of the chip handler 200. The second baseline fixture 402 has an opening 416 that corresponds to the opening 212 of the chip handler 200. The third stage fixtures 410A, 410B correspond to the first and second base portions 252A, 252B of the chip support member 250. The layers 412A, 412B formed on the third baseline fixtures 410A, 410B correspond to the first and second thickness adjustment layers 254A, 254B of the chip support member 250.

[0120] The set of chip handling fixtures is provided with a set of suction lines for securing and releasing the fixtures to the bonding stage 500 and bonding head 510 by suction. FIGS. 11A-11C show the set of suction lines (labeled in the format "Vx-yy-z") formed on the set of chip handling fixtures. FIGS. 11A and 11B also show cross-sectional views, while FIG. 11C shows a plan view of the surface of the second baseline fixture 402. Note that the gas inlets and gas outlets shown in FIGS. 6A-6B have been omitted.

[0121] 11A-11B, there are multiple suction lines (or channels) for sucking or drawing in the fixture, each suction line extending through at least one of the fixture, bonding stage 500, and bonding head 510 and routed from the bonding stage or head side. The functions of the suction lines for drawing in the fixture are as follows.

[0122] A suction line, designated Vh-bf-1, is formed through the bonding head 510 and the second baseline fixture 402 and is routed from the bonding head side (-h) to the surface (-bf-1) of the first baseline fixture 404.

[0123] A suction line, designated Vh-bf-2, is formed through the bonding head 510 and routed from the bonding head side (-h) to the surface (-bf-2) of the second baseline fixture 402.

[0124] A suction line, designated Vh-sf-1, is formed through the bonding head 510, the baseline fixtures 402, 404, and the second stage fixture 406 and is routed from the bonding head side (-h) to the surface (-sf-1) of the first stage fixture 408.

[0125] A suction line, designated Vh-sf-2, is formed through the bonding head 510 and the baseline fixtures 402, 404 and is routed from the bonding head side (-h) to the surface (-sf-2) of the second stage fixture 406.

[0126] A suction line, denoted by Vs-sf-1, is formed through bonding stage 500 and routed from the bonding stage side (-s) to the surface (-sf-1) of first stage fixture 408.

[0127] A suction line, denoted by Vs-sf-2, is formed through bonding stage 500 and first stage fixture 408 and is routed from the bonding stage side (-s) to the surface (-sf-2) of second stage fixture 406.

[0128] A suction line, denoted by Vs-bf-1 / 2 (abbreviation), is formed through the bonding stage 500 and stage fixtures 406, 408 (and also the first baseline fixture 404 for bf-2) and is routed from the bonding stage side (-s) to the surface of the first baseline fixture 404 (the second baseline fixture 402 for bf-2).

[0129] A suction line, denoted by Vs-sf-A, is formed through bonding stage 500 and first stage fixture 408 and is routed from the bonding stage side (-s) to the surface of third stage fixture 410A.

[0130] A suction line, denoted by Vs-sf-B, is formed through bonding stage 500 and first stage fixture 408 and is routed from the bonding stage side (-s) to the surface of third stage fixture 410B.

[0131] 11A-11B, there are also multiple suction lines (or channels) for sucking the chips 100A, 100B, each suction line passing through at least one of the fixture, bonding stage 500, and bonding head 510 and routed from the bonding stage or head side. The functions of the suction lines for sucking the chips are as follows.

[0132] A suction line, denoted by Vh-cp-A, is formed through elements 510, 402, traverses along the surface of second baseline fixture 402, and then extends through second baseline fixture 404, and is routed from the bonding head side (-h) to the support surface 405 and the front surface 102A (cp-A) of the first chip 100A.

[0133] A suction line, denoted by Vh-cp-B, is formed through elements 510, 402, traverses along the surface of the second baseline fixture 402, and then extends through the second baseline fixture 404, and is routed from the bonding head side (-h) to the support surface 405 and the front surface 102B (cp-B) of the second chip 100B.

[0134] A suction line, designated Vs-tcp-A, is formed through elements 500, 408, 406, 404, traverses along the surface of the second baseline fixture 402, and then extends back through the second baseline fixture 404, and is routed from the bonding head side (-s) to the support surface 405 and the front surface 102A (tcp-A) of the first chip 100A.

[0135] A suction line, designated Vs-tcp-B, is formed through elements 500, 408, 406, 404, traverses along the surface of the second baseline fixture 402, and then extends back through the second baseline fixture 404, and is routed from the bonding head side (-s) to the support surface 405 and the front surface 102B (tcp-B) of the second chip 100B.

[0136] A suction line, denoted by Vs-bcp-A, is formed through the bonding stage 500 and the stage fixtures 408, 410A and is routed from the bonding head side (-s) to the backside 104A (bcp-A) of the first chip 100A.

[0137] A suction line, denoted by Vs-bcp-B, is formed through the bonding stage 500 and the stage fixtures 408, 410B and is routed from the bonding head side (-s) to the backside 104B (bcp-B) of the second chip 100B.

[0138] The flow paths traversing the surface of the second baseline fixture 402 for the suction lines, labeled Vh-cp-A, Vh-cp-B, Vs-tcp-A, and Vs-tcp-B, are depicted in Figure 11C, which shows a top view of the surface of the second baseline fixture 402. Note that the vertical holes formed through the second baseline fixture 402 corresponding to the other suction lines are omitted from Figure 11C.

[0139] The suction lines designated by Vh-cp-A, Vh-cp-B, Vs-tcp-A, and Vs-tcp-B correspond to a set of holes 214 formed in the support surface 204. The suction lines designated by Vs-bcp-A and Vs-bcp-B correspond to a set of holes 258A, 258B in the tip support member 250.

[0140] A set of suction lines denoted by Vs-tcp-A and Vs-tcp-B is a first set of flow paths routed from the bonding stage side to the holes formed in the support surface 405. A set of suction lines denoted by Vh-cp-A and Vh-cp-B is a second set of flow paths routed from the bonding head side to the holes formed in the support surface 405.

[0141] Figures 12A-12B show the operation of a set of suction lines in a chip handling fixture. Figures 12A and 12B also show cross-sectional views of the structure. Note that in Figures 12A-12B (and the same can be applied to the remaining Figures 13A-18C), the thick solid lines represent suction lines (or flow paths) to which vacuum is currently turned on.

[0142] The operation shown in Figure 12A corresponds to the situation shown in Figure 7A. As shown in Figure 12A, the first and second chips 100A, 100B are attached to a support surface 405 provided by a first baseline fixture 404, and the front surfaces 102A, 102B are suctioned by suction lines Vh-cp-A, Vh-cp-B. In this situation, the exhaust of suction lines Vh-bf-1, Vh-bf-2, Vh-cp-A, and Vh-cp-B is turned on.

[0143] The operation shown in FIG. 12B corresponds to the situation shown in FIG. 7D. As shown in FIG. 12B, chips 100A and 100B are held by a set of chip handling fixtures 402-408, 410A, and 410B. In this situation, the vacuum pumping of the suction lines (Vs-sf-1, Vs-sf-1 / 2, Vs-tcp-A, Vs-bcp-A, Vs-tcp-B, and Vs-bcp-B) from the bonding stage side is turned on. The vacuum pumping of the suction lines from the bonding head side is stopped. The bridge member 120 held by the bridge handler 520 can be inserted through the opening 416 of the second baseline fixture 402. Although not shown in FIG. 12B, if the bridge handler 520 has a gas leak stopper, which is preferably used when underfilling is applied after bridging, the gas leak stopper can contact the top of the second baseline fixture 402 to seal the gap between the second baseline fixture 402 and the bridge handler 520.

[0144] 13A-13C, 14A-14C, 15A-15C, and 16A-16B, a process for fabricating a bridged multi-chip module using a set of chip handling fixtures according to an exemplary embodiment of the present invention will be outlined. Note that Figures 13A-13C, 14A-14C, 15A-15C, and 16A-16B also show cross-sectional views similar to Figures 3A-3E, 4A-4E, 7A-7D, and 8A-8D.

[0145] As shown in FIG. 13A , the manufacturing process may include preparing baseline fixtures 402, 404 by turning on the exhaust of suction lines Vh-bf-2, Vh-bf-1. The manufacturing process may include mounting a first chip 100A having alignment marks (not shown) and then turning on suction line Vh-cp-A to suction the front surface 102A of the first chip 100A through holes routed from the bonding head side formed in the support surface 405. As shown in FIG. 13B , the manufacturing process may include mounting a second chip 100B having alignment marks (not shown) and then turning on suction line Vh-cp-B to suction the front surface 102B of the second chip 100B through holes routed from the bonding head side formed in the support surface 405. In certain embodiments where pre-applied underfill is employed, chips 100A, 100B optionally have pre-applied underfill on their chip surfaces.

[0146] As shown in FIG. 13C , the fabrication process may include attaching stage fixtures 406, 408, 410A, and 410B to baseline fixtures 402 and 404 by turning on the remaining suction lines (Vs-sf-1, Vs-sf-2, Vs-bf-1 / 2, Vs-sf-A, Vs-tcp-A, Vs-bcp-A, Vs-sf-B, Vs-tcp-B, Vs-bcp-B, Vh-sf-1, and Vh-sf-2). The attaching may include placing first stage fixture 408 on bonding stage 500 and turning on suction line Vs-sf-1. The attaching may include placing third stage fixtures 410A and 410B on first stage fixture 408 and turning on suction lines Vs-sf-A and Vs-sf-B, respectively. The attaching step may include the substeps of placing the second stage fixture 406 on the first stage fixture 408 and turning on the suction line Vs-sf-2. The attaching step may include the substeps of placing the baseline fixtures 402, 404 (chips 100A, 100B) on the second stage fixture 406 and turning on the suction lines Vs-bcp-A, Vs-bcp-B, Vs-tcp-A, Vs-tcp-B, Vs-bf-1 / 2, Vh-sf-1, and Vh-sf-2. By turning on the suction lines Vs-tcp-A and Vs-tcp-B, the front surfaces 102A, 102B of the chips 100A, 100B are sucked by holes formed in the support surface 405 and routed from the bonding stage side.

[0147] As shown in FIG. 14A, the manufacturing process may include turning off all suction functions (Vh-**-*) of the bonding head 510 and releasing the bonding head 510 from the fixture.

[0148] 14B, the manufacturing process may also include inserting bridge member 120 by bridge handler 520 through openings 416 in second baseline fixture 402, which has alignment marks (not shown), to position bridge member 120 over first and second chips 100A, 100B. The manufacturing process may also include increasing the temperature, soldering, and cooling. If a pre-applied underfill material is not employed, a reducing gas supply may be performed.

[0149] 14C , the manufacturing process can include releasing the bonded bridge member 120 from the handler body of the bridge handler 520 and removing the handler body of the bridge handler 520 from the fixture through the opening 416. The manufacturing process can include attaching the bonding head 510 to the fixtures 402-408, 410A, and 410B and applying suction to the chip handling fixtures 402-108, 410A, and 410B by turning on suction lines Vh-sf-1, Vh-sf-2, Vh-bf-1, Vh-bf-2, Vh-cp-A, and Vh-cp-B. The manufacturing process can also include turning off all suction functions (Vs-**-*) of the bonding stage 500 and releasing and picking up the fixtures 402-408, 410A, and 410B from the bonding stage 500.

[0150] 15A, the manufacturing process may include placing the chip handling fixtures 402-108, 410A, 410B with the bridged modules 150 on a carrier 540, followed by securing them with suction and closing the suction lines to maintain the vacuum. The manufacturing process may also include curing the pre-applied underfill material. If pre-applied underfill material is not used, an underfill dispensing process using a jet dispenser may be performed before curing.

[0151] As shown in FIG. 15B, the manufacturing process can include picking up and placing the chip handling fixtures 408, 410A, 410B onto the bonding stage 500, and releasing the baseline fixtures 402, 404 and the second stage fixture 406 from the bonding stage 500 by the bonding head 510 by turning off the suction lines Vh-sf-1, Vh-cp-A, Vh-cp-B.

[0152] As shown in Figure 15C, the manufacturing process can include bonding substrate 140 onto bridged module 150. Optionally, as shown in Figure 16A, the steps described in the sequence of Figures 15B-15C can be performed on carrier 540. As shown in Figure 16B, a bridged multi-chip module is obtained, including chips 100A, 100B, bridge member 120, and substrate 140.

[0153] Referring to the series of FIGS. 17A-17D, a process for fabricating a bridged multi-chip module using a set of chip handling fixtures according to one embodiment of the present invention is outlined. Note that FIGS. 17A-17D also show cross-sectional views. During the process shown in the series of FIGS. 13A-13C, 14A-14C, 15A-15C, and 16A-16B, the chips 100A, 100B are mounted with their front surfaces 102A, 102B facing up (toward the bonding head 510), and the chips 100A, 100B are not flipped during the process. The exemplary embodiment shown in FIGS. 17A-17D is a variation of the process in which the chips 100A, 100B are mounted with their front surfaces 102A, 102B facing down (toward the bonding stage 500) during the process.

[0154] As shown in Figures 17A to 17D, the fixtures used to handle the chips are the same as those shown in Figures 10A and 10B, but the stacking order of fixtures 402, 404, 406, 408, 410A, and 410B is reversed.

[0155] The situation shown in Figure 17A corresponds to the situation shown in Figure 13B. As shown in Figure 17A, first and second chips 100A, 100B are attached to a support surface 405 provided by a first baseline fixture 404. Chips 100A, 100B are mounted to fixtures 402, 404 with their front surfaces 102A, 102B facing downwards.

[0156] The situation shown in Figure 17B corresponds to the situation shown in Figure 14B. As shown in Figure 17B, chips 100A, 100B are held by a set of chip handling fixtures 402-408, 410A, 410B, and bridge member 120 is inserted through opening 416 in fixture 402 by bridge handler 560. Bridge member 120 is bonded to chips 100A, 100B with its front surface 122 facing up.

[0157] The situation shown in Figure 17C corresponds to the situation shown in Figure 14C. As shown in Figure 17C, the bridged module 150 and fixtures 402-408, 410A, and 410B are attached to a bonding stage 500, and a bonding head 510 is released from the fixtures 402-408, 410A, and 410B.

[0158] The situation shown in Figure 17D corresponds to the situation immediately prior to the bonding step shown in Figure 15C. As shown in Figure 17D, a substrate 140 is provided having contact pads 144A, 144B formed thereon. The second set of terminals 106A, 106B of chips 100A, 100B are aligned with the contact pads 144A, 144B of substrate 140, and bridged module 150 is placed on substrate 140.

[0159] Referring to the series of Figures 13B and 18A-18C, an apparatus and process for fabricating a bridged multi-chip module using a set of chip handling fixtures according to yet another exemplary embodiment of the present invention is generally described. Note that Figures 18A-18C also show cross-sectional views. In the exemplary embodiment shown in Figures 6A-8D, 11A-16B, and 17A-17D, the positional relationship between the surfaces of first and second base portions 252A and 252B and between fixtures 410A and 410B is fixed. In contrast, the apparatus shown in Figures 18A-18C includes multiple chip bonding stages 500A, 500B for supporting chips 100A, 100B, and a peripheral bonding stage 500C. Bonding stages 500A, 500B are independently controlled by individual Z-positioning modules for adjusting the height of the surfaces on which the corresponding chips 100A / 100B are supported. The level of the peripheral bonding stage 500C may be fixed.

[0160] As shown in FIG. 13B, the first and second chips 100A, 100B are mounted on a support surface 405 provided by a first baseline fixture 404.

[0161] The situation shown in FIG. 18A corresponds to the situation shown in FIG. 14B. As shown in FIG. 18B, chips 100A and 100B are held by a set of chip handling fixtures 402-408, 410A, and 410B. Fixtures 402, 404, and 408 are stacked on a peripheral bonding stage 500C. The front surface 102A of the first chip 100A and the front surface 102B of the second chip 100B are vertically aligned by the support surface 405 of the first baseline fixture 404 and backed up by the height-adjusted bonding stages 500A and 500B. Bridge members 120 are inserted by a bridge handler 520 through openings 416 in the second baseline fixture 402.

[0162] The situation shown in Figure 18B corresponds to the situation shown in Figure 15B. As shown in Figure 18B, baseline fixtures 402, 404 and second stage fixture 406 are disengaged from bridge module 150 disposed on multiple bonding stages 500A, 500B. Baseline fixtures 402, 404 and second stage fixture 406 are also disengaged from peripheral bonding stage 500C.

[0163] The situation shown in Figure 18C corresponds to the situation shown in Figure 15C. As shown in Figure 18C, substrate 140 is mounted on bridge modules 150 arranged on multiple bonding stages 500A, 500B.

[0164] In the above-described embodiments, a set of holes is fabricated in the support surface 204 of the chip handler 200 or the support surface 405 of the baseline fixture 404 as part of a fastening mechanism for securing the first and second chips 100A, 100B to the support surface (204, 405). In one or more embodiments, the first surfaces 102A, 102B of the chips 100 are secured to the support surface (204, 405) by a fastening member selected from the group consisting of an adhesive, a metal stud bump and pad pair, and a solder bump and pad pair.

[0165] 19A-19D, several fixation members that may be used in one or more embodiments of the present invention will be described.

[0166] FIG. 19B illustrates the use of an adhesive as a fixing member. The cross-sectional view in FIG. 19B corresponds to an enlarged view of the circled portion in FIG. 19A. As shown in FIG. 19B, depending on the chip surface roughness or structure, an adhesive layer or tape 604 can be laminated on the first baseline fixture 404, which has holes or channels 602 for gas passage. The adhesive layer 604 can be made of a material such as a magic resin. In addition to the suction provided by the holes 602, the adhesive layer 604 provides additional adhesion to the support surface 405. The fixation between the support surface 405 and the first surface 102 of the chip 100 can be controlled by utilizing the suction or exhaust of gas passing through the channels 602. Therefore, in addition to or instead of the suction provided by the holes 602, the holes 602 can be used to apply positive pressure to the front surface 102 of the chip 100, making it easier to release the chip at an appropriate temperature (higher temperatures result in less adhesion).

[0167] FIG. 19C illustrates a case where a pair of metal stud bumps and pads is used as a fastening member. The cross-sectional view shown in FIG. 19C corresponds to an enlarged view of the circled portion in FIG. 19A when a metal stud bump and pad are used. As shown in FIG. 19C, the chip 100 includes a pad 622, a metal stud bump 624 formed on the pad 622, and a passivation layer 630 formed on the front surface 102 of the chip 100, exposing the pad 622 formed on the chip 100. The first baseline fixture 404 has a pad 626 formed on its support surface 405. In a specific embodiment, the pad 622 may be an Al pad, and the metal stud bump may be an Au stud bump. The Al pad 622 and the Au stud bump 624 are formed on the dicing street or the periphery of the chip. The pad 626 may be a Ni / Au pad. The metal stud bump 624 and pad 622 pair can be used as a fastening member in place of a vacuum suction line.

[0168] FIG. 19D illustrates a case where a pair of solder bumps and pads is used as the fixing member. The cross-sectional view shown in FIG. 19D corresponds to an enlarged view of the circled portion in FIG. 19A when a pair of solder bumps and pads is used. As shown in FIG. 19D, the chip 100 includes a pad 642, a solder-capped pillar bump 644 formed on the pad 642, and a passivation layer 649 formed on the front surface 102 of the chip 100 and exposing the pad 642 formed on the chip 100. The first baseline fixture 404 has a pad 648 formed on its support surface 405. The pillar bump 644 and the solder-capped pad 648 are joined by a solder bonding process. In a specific embodiment, the pad 642 may be an Al pad, and the pillar bump may be a solder-capped Cu pillar bump. Al pads 642 and Cu pillar bumps 644 with solder caps 646 are formed on the dicing streets or around the chip periphery. Pads 648 may be Ni / Au or Cu pads. Instead of vacuum suction lines, pairs of solder bumps (pillar bumps 644 and solder caps 646) and pads 648 can be used as fixing members.

[0169] 20A-20D illustrate an exemplary process flow for using solder bump and pad pairs as fasteners in accordance with certain embodiments of the present invention. Note that only the baseline fixtures 402, 404, the multiple chips 100A, 100B, the bridge member 120, and the fasteners are depicted in FIGS. 20A-20D. Because low-melting-point metals are used for bridging and bonding to the substrate, proper temperature management is required when using solder bump and pad pairs as fasteners. In the example shown in FIGS. 20A-20D, the solder bumps used to secure the front surface 102 of the chip 100 to the support surface are SnZn with a melting point of 199°C. The bridging bumps are In or SnBi with a melting point of 155.6°C or 139°C, respectively, formed on Cu under bump metallurgy (UBM). The solder bumps for bonding to the substrate are SnAg with a melting point of 221 degrees Celsius or SnAgCu with a melting point of 217 degrees Celsius.

[0170] As shown in Figure 20A, an exemplary process flow includes forming a temporary bond by raising the temperature above the melting point of the fixing solder bumps (199 degrees Celsius) but below the melting point of the bonding bumps (221 / 217 degrees Celsius).

[0171] As shown in FIG. 20B, this flow includes a step of performing bridging bonding at a temperature higher than the melting point of the bridging bumps, 157 degrees Celsius or 139 degrees Celsius, but lower than the melting point of the bonding bumps.

[0172] As shown in Figure 20C, this flow includes a step of curing the underfill under a typical temperature range for curing underfill (e.g., 150-160°C). Note that because bridging has already occurred, the metal of the bridging bump has generally been converted to an intermetallic compound with a high melting point. For example, CuIn intermetallic compounds have melting points above 300°C. CuSn and Bi intermetallic compounds have melting points above 271.4°C.

[0173] As shown in FIG. 20D, this flow includes a step of performing peeling by raising the temperature to a temperature higher than 199° C., which is the melting point of the fixing solder bumps, but lower than the melting point of the joining bumps.

[0174] The above-described embodiment provides a chip handling fixture for interconnecting two chips 100A, 100B by one bridge member 120. Furthermore, the front faces 102A, 102B of the first and second chips 100A, 100B are supported only at the peripheral regions of each chip 100. However, the number of interconnected chips is not limited, and the number of bridge members used to interconnect the chips is not limited. Furthermore, the front faces 102 of the chips 100 may be supported not only at the peripheral regions of each chip 100 but also at the central region.

[0175] 21A-21B show schematic diagrams of a variation of a chip handling fixture corresponding to baseline fixtures 403, 404 shown in FIG. 10 , according to one embodiment of the present invention. FIG. 21A shows a top view of chip handling fixture 650, and FIG. 21B shows a cross-sectional view of chip handling fixture 650 with chip 100 mounted thereon. Note that the cross-sectional view shown in FIG. 21B corresponds to the cross-section denoted by dash-dotted line C-C′ in the top view of FIG. 21A .

[0176] 21A-21B is a chip handling fixture for interconnecting four chips 100A, 100B, 100C, and 100D by four bridge members (not shown in Figures 21A-21B). The four bridge members include a first bridge for connecting chips 100A and 100B, a second bridge for connecting chips 100B and 100D, a third bridge for connecting chips 100C and 100D, and a fourth bridge for connecting chips 100A and 100C.

[0177] As shown in FIGS. 21A-21B, the chip handling fixture 650 includes a cavity 652 for each chip 100 to be mounted and an opening 654 for each bridge member. Each cavity 652 accommodates the terminals 106 (and possibly 108) of the corresponding chip 100. For example, cavity 652A accommodates the terminals 106A (and possibly 108A) of the first chip 100A. Each opening 654 is used to insert a respective bridge member. The chip handling fixture 650 also includes a support surface 651 for supporting the front surfaces 102A, 102B, 102C, and 102D of the chips 100A, 100B, 100C, and 100D. The support surface 651 may include multiple surface areas separated from one another, including an additional support surface located in the central region of each chip 100. A plurality of pads 656 are formed on the support surface 651, and bumps of the chip 100 are placed on these pads to form solder joints 660 for fixing.

[0178] According to the above-described embodiments, a multi-chip interconnection technique is provided that allows for proper alignment of multiple chips and bridge members, and allows for proper handling of the chips and bridge members during the bridging process.

[0179] The apparatus, method, and chip handler according to exemplary embodiments of the present invention enable precise alignment between multiple chips and between each chip and a bridge member because the chip handler provides pre-alignment between the multiple chips. The bridge member is placed on an area on the chip that is pre-aligned with respect to the chip handler, and then the bridged multiple chips are simultaneously bonded to a substrate. The multiple chips and intermediate bridge structure are also properly supported by at least one support surface of the chip handler during the bridging process.

[0180] Although advantages obtained with respect to one or more particular embodiments of the present invention have been described, it should be understood that some embodiments may not have these potential advantages, and that these potential advantages may not be required for all embodiments.

[0181] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used herein, specify the presence of stated features, steps, layers, elements, or components, or combinations thereof, but do not exclude the presence or addition of one or more other features, steps, layers, elements, components, or groups thereof, or combinations thereof.

[0182] Corresponding structure, materials, acts, and equivalents of all means or steps as well as functional elements in the following claims are intended to include any structure, material, or acts for performing a function in combination with other claimed elements as specifically claimed, if any. The description of one or more aspects of the present invention has been presented for purposes of illustration and description, but is not intended to be exhaustive or limited to the invention in the form disclosed.

[0183] Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terms used herein have been selected to best explain the principles of the embodiments, practical applications or technical improvements to technology found in the market, or to enable those skilled in the art to understand the embodiments disclosed herein.

Claims

1. 1. An apparatus for interconnecting a first chip and a second chip by a bridge member, wherein the first chip and the second chip each have a first surface including a first set of terminals and a second surface opposite the first surface, the apparatus comprising: a chip handler for handling the first chip and the second chip, the chip handler having an opening and at least one support surface for supporting the first surfaces of the first chip and the second chip when the first chip and the second chip are mounted on the chip handler; a chip support member that supports the first chip and the second chip from the second surface; a bridge handler for inserting the bridge member through the opening in the chip handler and placing the bridge member over the first set of terminals of the first chip and the second chip; Equipped with the chip handler, the chip support member, and the bridge handler provide a chamber space to accommodate the first set of terminals of the first chip and the second chip and a terminal of the bridge member within the chamber space when the chip handler, the chip support member, and the bridge handler are assembled; a gas supplier for supplying a reducing gas into the chamber space to clean at least one of the first set of terminals of the first chip and the second chip and the terminal of the bridge member; Device.

2. 1. An apparatus for interconnecting a first chip and a second chip by a bridge member, wherein the first chip and the second chip each have a first surface including a first set of terminals and a second surface opposite the first surface, the apparatus comprising: a chip handler for handling the first chip and the second chip, the chip handler having an opening and at least one support surface for supporting the first surfaces of the first chip and the second chip when the first chip and the second chip are mounted on the chip handler; a chip support member that supports the first chip and the second chip from the second surface; a bridge handler for inserting the bridge member through the opening in the chip handler and placing the bridge member over the first set of terminals of the first chip and the second chip; Equipped with the chip handler, the chip support member, and the bridge handler provide a chamber space to accommodate the first set of terminals of the first chip and the second chip and a terminal of the bridge member within the chamber space when the chip handler, the chip support member, and the bridge handler are assembled; The bridge handler: a handler body for attaching the bridge member; a gas leakage stopper for sealing the chamber space when the bridge member is inserted through the opening by the handler body; and Further provided with Device.

3. 1. An apparatus for interconnecting a first chip and a second chip by a bridge member, wherein the first chip and the second chip each have a first surface including a first set of terminals and a second surface opposite the first surface, the apparatus comprising: a chip handler for handling the first chip and the second chip, the chip handler having an opening and at least one support surface for supporting the first surfaces of the first chip and the second chip when the first chip and the second chip are mounted on the chip handler; a chip support member that supports the first chip and the second chip from the second surface; a bridge handler for inserting the bridge member through the opening in the chip handler and placing the bridge member over the first set of terminals of the first chip and the second chip; Equipped with the chip handler, the chip support member, and the bridge handler provide a chamber space to accommodate the first set of terminals of the first chip and the second chip and a terminal of the bridge member within the chamber space when the chip handler, the chip support member, and the bridge handler are assembled; a sealing member provided between the chip handler and the chip support member, for sealing the chamber space when the chip handler is assembled to the chip support member; Device.

4. 4. The apparatus of claim 2, further comprising a gas supplier for supplying a reducing gas into the chamber space to clean at least one of the first set of terminals of the first chip and the second chip and the terminal of the bridge member.

5. the first surface of each of the first chip and the second chip includes a second set of terminals, and the chip handler: a cavity communicating with the opening, the cavity having a height greater than a height of the first set of terminals and the second set of terminals of the first chip and the second chip so as to accommodate the first set of terminals and the second set of terminals of the first chip and the second chip within the cavity when the first chip and the second chip are mounted on the chip handler; The apparatus of claim 1 , further comprising:

6. The chip handler includes: a first set of flow paths for gas to pass through, the first set of flow paths being routed from a bonding stage side to a first set of holes formed in the at least one support surface; a second set of flow paths for the gas to pass through, the second set of flow paths being routed from a bonding head side to a second set of holes formed in the at least one support surface; The apparatus of claim 1 , further comprising:

7. The chip handler includes: a suction system for applying suction to the first surfaces of the first and second chips at the at least one support surface of the chip handler; The apparatus of claim 1 , further comprising:

8. 8. The device of claim 1, wherein the first surfaces of the first chip and the second chip are fixed to the at least one support surface by a fixing member, the fixing member being selected from the group consisting of an adhesive, a metal stud bump and pad pair, and a solder bump and pad pair.

9. the chip handler and the chip support member A plurality of fixtures; a set of suction lines for securing and releasing at least one of the plurality of fixtures to at least one of the bonding head and the stage by suction; 9. The apparatus according to claim 1, comprising:

10. The tip support member is a first base portion having a first horizontal surface for holding the first chip from the second surface of the first chip; a second base portion having a second horizontal surface for holding the second chip from the second surface of the second chip; 10. The apparatus of claim 1, comprising:

11. 11. The device of claim 10, wherein the first horizontal surface of the first base portion and the second horizontal surface of the second base portion of the chip support member are positioned independently of each other depending on the thicknesses of the first chip and the second chip.

12. The tip support member is a first thickness adjustment layer formed on the first base portion; a second thickness adjustment layer formed on the second base portion; 12. The apparatus of claim 10 or 11, further comprising:

13. the bridge member having a third set of terminals, and the device comprising: a dispenser for dispensing underfill material from the second surface side to locations around connections between the first set of terminals of the first chip and the second chip and the third set of terminals of the bridge member; 13. The apparatus of claim 1, further comprising:

14. The tip support member is a second opening through which the underfill material is dispensed; The apparatus of claim 13 further comprising:

15. a control module that controls releasing a bridged module, including the first chip, the second chip, and the bridge members bonded to the first chip and the second chip, from the chip handler and mounting the bridged module on a substrate; 15. The apparatus of claim 1, further comprising:

16. 1. A method for interconnecting a first chip and a second chip, comprising: mounting the first chip and the second chip on a chip handler having an opening and at least one support surface, each of the first chip and the second chip having a first surface including a first set of terminals and a second surface opposite the first surface, the first surface of the first chip and the first surface of the second chip mounted on the chip handler being supported by the at least one support surface of the chip handler; placing the first chip and the second chip from the second surface onto a chip support member using the chip handler; inserting a bridge member through the opening of the chip handler by a bridge handler and disposing the bridge member on the first set of terminals of the first chip and the second set of terminals exposed through the opening; Including, assembling the chip handler, the chip support member, and the bridge handler to provide a chamber space for accommodating the first set of terminals of the first chip and the second chip and a terminal of the bridge member within the chamber space; supplying a reducing gas into the chamber space to clean the first set of terminals of the first chip and the second chip and the terminal of the bridge member; further comprising: method.

17. 1. A method for interconnecting a first chip and a second chip, comprising: mounting the first chip and the second chip on a chip handler having an opening and at least one support surface, each of the first chip and the second chip having a first surface including a first set of terminals and a second surface opposite the first surface, the first surface of the first chip and the first surface of the second chip mounted on the chip handler being supported by the at least one support surface of the chip handler; placing the first chip and the second chip from the second surface onto a chip support member using the chip handler; inserting a bridge member through the opening of the chip handler by a bridge handler and disposing the bridge member on the first set of terminals of the first chip and the second set of terminals exposed through the opening; Including, Mounting the first chip and the second chip on the chip handler includes: applying suction to the first surface of the first tip through a plurality of first holes formed in the at least one support surface; sucking the first surface of the second tip through a plurality of second holes formed in the at least one support surface; A method comprising:

18. 1. A method for interconnecting a first chip and a second chip, comprising: mounting the first chip and the second chip on a chip handler having an opening and at least one support surface, each of the first chip and the second chip having a first surface including a first set of terminals and a second surface opposite the first surface, the first surface of the first chip and the first surface of the second chip mounted on the chip handler being supported by the at least one support surface of the chip handler; placing the first chip and the second chip from the second surface onto a chip support member using the chip handler; inserting a bridge member through the opening of the chip handler by a bridge handler and disposing the bridge member on the first set of terminals of the first chip and the second set of terminals exposed through the opening; Including, Mounting the first chip and the second chip on the chip handler includes: applying suction to the first surfaces of the first chip and the second chip through a first set of holes formed in the at least one support surface and routed from one of a bonding stage side and a bonding head side; Including, disposing the first chip and the second chip on the chip support member; suctioning the first surfaces of the first chip and the second chip through a second set of holes formed in the at least one support surface and routed from the other of the bonding stage side and the bonding head side; Releasing the chip handler from one of the bonding stage side and the bonding head side; Including, method.

19. Assembling the chip handler, the chip support member, and the bridge handler to provide a chamber space that accommodates the first set of terminals of the first chip and the second chip and the terminals of the bridge member within the chamber space; supplying a reducing gas into the chamber space to clean the first set of terminals of the first chip and the second chip and the terminal of the bridge member; 19. The method of claim 17 or 18, further comprising:

20. Releasing a bridged module from the chip handler, the bridged module including the first chip, the second chip, and the bridge member bonded to the first chip and the second chip; Mounting the bridged module on a substrate; 20. The method of any one of claims 16 to 19, further comprising:

21. the bridge member having a third set of terminals, and the method further comprising: Discharging an underfill material from the second surface side to a location around a connection portion between the first set of terminals of the first chip and the second chip and the third set of terminals of the bridge member; curing the underfill material; and 21. The method of any one of claims 16 to 20, further comprising:

22. The bridge handler according to claim 21, a handler body for attaching the bridge member; a gas leak stopper for sealing the opening of the chip handler when the bridge member is inserted through the opening of the chip handler by the bridge handler; 22. The method of any one of claims 16 to 21, comprising:

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