Electrochemical Discharge Machining Equipment

Abstract

To provide a discharge machining device.SOLUTION: A discharge machining device includes at least a stage, and a discharge machining unit. The stage is a device where at least one machining object is mounted, and includes a clamp member. The discharge machining unit includes an electrode, a jig, and a power supply unit. When the discharge machining unit performs a discharge machining procedure on a target machining region of the machining object in a machining direction, a discharge section of the electrode and the target machining region of the machining object are relatively moved. The discharge machining device can improve a machining procedure, can reduce man-hours, and can also reduce a time required for replacing the electrode.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a machining apparatus, and more particularly to an electric discharge machining apparatus. [Background technology]

[0002] With the rapid development of the semiconductor industry, electrical discharge machining (EDM) has become a common technique for machining crystalline ingots or wafers. Electrical discharge machining (EDM) is a manufacturing procedure in which a spark is generated by an electrical discharge to machine a workpiece into a desired shape. A dielectric material separates two electrodes, and a voltage is applied to generate a periodic, rapidly changing current discharge that processes the workpiece. EDM technology uses two electrodes: one electrode, called the tool electrode or discharge electrode, and the other, called the workpiece electrode, which connects to the workpiece. In EDM, there is no actual contact between the discharge electrode and the workpiece electrode.

[0003] As the potential difference between the two electrodes increases, the electric field between them also increases. When the electric field strength exceeds the dielectric strength, dielectric breakdown occurs, and current flows between the two electrodes, removing some of the material. When the current stops flowing, new dielectric material flows into the electric field between the electrodes, removing some of the above material and providing dielectric insulation again. After the current flows, the potential difference between the two electrodes returns to the level before the breakdown, and a new dielectric breakdown occurs again.

[0004] However, the disadvantages of traditional EDM technology are that the roughness of the cut surface is not good, there are a large number of surface cracks on the cut surface, and they even extend along the non-cutting direction, causing cracking in unexpected directions. Furthermore, in conventional electric discharge machining techniques, for example, in order to prevent rolling or misalignment when cutting the crystalline ingot, a jig is used to clamp the periphery of the crystalline ingot, i.e., the sides of the crystalline ingot are clamped radially. However, because the cutting surface of the ingot is also located in the radial direction, the conventional technology can only cut the ingot exposed outside the jig, and cannot cut the overlapping portion of the jig and ingot, so the conventional technology requires stopping and readjusting the position to cut again. Furthermore, conventional EDM techniques can only cut or thin one wafer at a time, which is very time-consuming. Furthermore, conventional EDM technology only uses a single cutting line, and conventional EDM equipment does not have a quick-release design, so if the cutting line is accidentally damaged, it must be shut down and the replacement process takes a long time to complete. Summary of the Invention [Problem to be solved by the invention]

[0005] The present invention has been made in view of these points, and an object of the present invention is to provide an electric discharge machining apparatus that solves the above-mentioned problems of the prior art. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention provides an electric discharge machining apparatus comprising at least a stage for placing at least one workpiece thereon, and an electric discharge machining unit for performing an electric discharge machining procedure on a target machining area of ​​the workpiece on the stage along a machining direction, the electric discharge machining unit being configured by assembling at least one electrode, at least two mounting members, and at least two holding members corresponding to each other, and both sides of the electrode being pressed against the two mounting members, respectively, so that the discharge section of the electrode is in a floating state, a jig extending along a second direction perpendicular to the first direction, and a power supply unit for supplying a first power source to the electrode and the workpiece during the electric discharge machining procedure, thereby applying discharge energy to the target machining area of ​​the workpiece via the discharge section of the electrode, and when the electric discharge machining unit performs the electric discharge machining procedure along the machining direction, the discharge section of the electrode and the target machining area of ​​the workpiece move relatively along the second direction.

[0007] According to the electric discharge machining device of the present invention, the electric discharge section of the electrode and the target machining area of ​​the workpiece move relative to each other along the second direction, either back and forth or periodically returning to their original position.

[0008] According to the electric discharge machining apparatus of the present invention, the two carrying members and the two holding members move back and forth or periodically return to their original positions together with the electrode, thereby allowing the electrode to apply the discharge energy to the workpiece in the discharge section.

[0009] According to the electric discharge machining apparatus of the present invention, the two carrying members and the two holding members move back and forth or periodically return to their original positions together with the electrode, thereby allowing the electrode to apply the discharge energy to the workpiece in the discharge section.

[0010] According to the electric discharge machining apparatus of the present invention, the two carrying members and the two holding members move back and forth or periodically return to their original positions together with the electrode, thereby allowing the electrode to apply the discharge energy to the workpiece in the discharge section.

[0011] According to the electric discharge machining apparatus of the present invention, the electrode is linear or plate-shaped.

[0012] The electric discharge machining apparatus according to the present invention is characterized in that the stage moves along the first direction, the second direction, or the machining direction.

[0013] According to the electric discharge machining device of the present invention, the stage rotates around an axis that is the first direction, the second direction, or the machining direction.

[0014] According to the electric discharge machining apparatus of the present invention, the electric discharge machining apparatus further includes a chip discharge unit, and when the electric discharge machining unit performs the electric discharge machining procedure on the workpiece, the chip discharge unit provides an external force to remove residues generated when the electrode applies the discharge energy to the workpiece.

[0015] According to the electric discharge machining apparatus of the present invention, the direction and position of the external force applied from the chip discharge unit are dynamically adjusted depending on the shape of the workpiece to be machined, thereby removing the residue.

[0016] According to the electric discharge machining apparatus of the present invention, the electric discharge machining apparatus further includes a tension measuring unit, and the tension measuring unit is for measuring the tension of the electrode.

[0017] According to the electric discharge machining apparatus of the present invention, the electric discharge machining apparatus further includes a vibration measuring unit, and the vibration measuring unit is for measuring the vibration of the electrode.

[0018] According to the electric discharge machining apparatus of the present invention, the power supply unit of the electric discharge machining unit further supplies a second power source to the electrode, thereby applying DC power or radio frequency to the electrode.

[0019] In the electric discharge machining apparatus according to the present invention, the stage further includes a clamping member, and the clamping member is used to fix the workpiece.

[0020] According to the electric discharge machining apparatus of the present invention, the workpiece has a flat area, and the flat area is connected to the stage or the clamp member.

[0021] According to the electric discharge machining apparatus of the present invention, the shape of the clamping member conforms to the shape of the workpiece.

[0022] According to the electric discharge machining apparatus of the present invention, the clamping member has a plate, and the plate has a comb structure.

[0023] According to the electric discharge machining apparatus of the present invention, the stage has a comb structure.

[0024] According to the electric discharge machining apparatus of the present invention, the stage is connected to the clamp member via a locking structure.

[0025] According to the electric discharge machining apparatus of the present invention, the two plates of the clamping member are connected to each other via a snap-in structure.

[0026] The electric discharge machining apparatus according to the present invention is characterized in that the clamping member and the workpiece have two or more contact surfaces.

[0027] According to the electric discharge machining apparatus of the present invention, the stage or the clamping member is connected to the workpiece by an adhesive layer.

[0028] In the electric discharge machining apparatus according to the present invention, the adhesive layer is provided on the stage or the clamp member in a discontinuous form.

[0029] The electric discharge machining apparatus according to the present invention is characterized in that the adhesive layer is a conductive adhesive.

[0030] According to the electric discharge machining apparatus of the present invention, the clamping member is pressed against one side of the workpiece along the axial direction, and the machining groove formed in the target machining area of ​​the workpiece by the discharge energy is adhered to the two groove walls of the machining groove by an adhesive layer.

[0031] According to the electric discharge machining apparatus of the present invention, the electric discharge machining unit performs the electric discharge machining procedure on the workpiece and the clamp member on the stage along the machining direction.

[0032] According to the electric discharge machining apparatus of the present invention, the clamping member clamps a buffer member, and the buffer member is fixed to the workpiece via a conductive adhesive layer, and the electric discharge machining unit performs the electric discharge machining procedure on the workpiece on the stage along the machining direction.

[0033] According to the electric discharge machining apparatus of the present invention, the clamping member clamps the conductive frame to fix the workpiece, and the electric discharge machining unit performs the electric discharge machining procedure on the workpiece on the stage along the machining direction.

[0034] According to the electric discharge machining apparatus of the present invention, the stage, the clamping member, or the workpiece further has a conductive gain layer, which improves electrical contact between the workpiece and the stage, or between the workpiece and the clamping member.

[0035] The electric discharge machining apparatus according to the present invention further includes a heat source supply source, which provides a heat source to the workpiece before, during, or after the electric discharge machining procedure.

[0036] According to the electric discharge machining apparatus of the present invention, the two mounting members each have a plate-like structure or a sleeve structure.

[0037] According to the electric discharge machining apparatus of the present invention, the two support members each have a first sheet and a second sheet, and the electrode is clamped between the first sheet and the second sheet.

[0038] According to the electric discharge machining apparatus of the present invention, the two mounting members each have a through slot, the two holding members each have bumps corresponding to the through slots, and the two mounting members are assembled with the through slots corresponding to the bumps of the two holding members.

[0039] According to the electric discharge machining apparatus of the present invention, the two mounting members each have a through hole, the two holding members each have a threaded hole, and the two mounting members are fitted with bolts that are inserted through the through holes and screwed into the threaded holes of the two holding members.

[0040] According to the electric discharge machining apparatus of the present invention, the two holding members each have a groove structure, and the two mounting members are assembled to correspond to the two holding members by being inserted into the groove structures of the two holding members.

[0041] According to the electric discharge machining apparatus of the present invention, the two holding members each have a conductive structure, and are thereby electrically connected to the electrodes pressed against the two mounting members.

[0042] The electric discharge machining apparatus according to the present invention is characterized in that the two holding members simultaneously fix the two mounting members and the electrode.

[0043] According to the electric discharge machining apparatus of the present invention, the electric discharge machining unit further includes an accessory member, and the accessory member is connected to the electrodes at the edges of the two mounting members.

[0044] According to the electric discharge machining device of the present invention, the accessory member is electrically connected to the first power source or the second power source of the power supply unit.

[0045] According to the electric discharge machining apparatus of the present invention, the head and tail of the electrode are connected to the same one or both of the two mounting members, respectively.

[0046] According to the electric discharge machining apparatus of the present invention, the edges of the two mounting members are chamfered.

[0047] The electric discharge machining apparatus according to the present invention is characterized in that the workpiece placed on the stage is a semiconductor ingot or a wafer.

[0048] According to the electric discharge machining apparatus of the present invention, the electric discharge machining apparatus cuts or grinds the workpieces placed on the stage sequentially or simultaneously in the electric discharge machining procedure.

[0049] According to the electric discharge machining apparatus of the present invention, the object to be machined is formed by electrically bonding a plurality of workpieces together.

[0050] According to the electric discharge machining device of the present invention, a machining groove is formed in the target machining area of ​​the workpiece by the electric discharge energy, and a filler material is filled in the machining groove.

[0051] According to the electric discharge machining device of the present invention, a machining groove is formed in the target machining area of ​​the workpiece by the discharge energy, and the workpiece has tape attached to both sides of the machining groove, thereby reducing the shaking phenomenon in the target machining area of ​​the workpiece.

[0052] According to the electric discharge machining apparatus of the present invention, the electric discharge machining procedure is characterized in that the electric discharge energy is applied to the target machining region of the workpiece in a fluid.

[0053] According to the electric discharge machining apparatus of the present invention, the fluid contains an ozone or oxygen component.

[0054] According to the electric discharge machining apparatus of the present invention, the fluid contains bubbles.

[0055] According to the electric discharge machining apparatus of the present invention, the bubble undergoes an implosion phenomenon due to a pressure difference between the inside and outside of the bubble during the electric discharge machining procedure.

[0056] According to the electric discharge machining apparatus of the present invention, the bubbles contain an ozone or oxygen component.

[0057] The electric discharge machining apparatus according to the present invention is characterized in that the fluid is an electrolyte.

[0058] According to the electric discharge machining apparatus of the present invention, the electric discharge machining procedure is characterized in that the electric discharge energy is applied to the target machining region of the workpiece in a vacuum environment.

[0059] According to the electric discharge machining apparatus of the present invention, the electric discharge machining apparatus is further characterized by including an ultrasonic generator or a piezoelectric oscillator to oscillate the stage, the workpiece, or the electrode.

[0060] According to the electric discharge machining apparatus of the present invention, the electric discharge machining apparatus is further characterized by including an ultrasonic generator or a piezoelectric oscillator to oscillate the stage, the workpiece, the electrode, or the fluid.

[0061] The electric discharge machining apparatus according to the present invention is characterized in that there are a plurality of the electrodes, and these electrodes are arranged so as to be parallel to each other along the first direction.

[0062] The electric discharge machining apparatus according to the present invention is further characterized in that it is provided with a direction correcting element, which is configured to adjust the relative direction of the electrode and the workpiece to correct the machining direction when a deviation phenomenon occurs in the machining direction of the electrode. [Effects of the Invention]

[0063] The electric discharge machining device according to the present invention has the following effects. (1) The jig is composed of at least two mounting members and at least two holding members, which are assembled correspondingly. The quick-detachable design significantly reduces the time required for electrode replacement and also allows for the adjustment of the tension of the discharge electrodes. (2) The chip removal unit allows external force to be applied to single or multiple target machining areas, and the direction and position of the external force can be dynamically adjusted according to the shape of the workpiece to remove residues generated during the EDM procedure. (3) The clamping member has multiple clamping modes, and the comb structure allows it to firmly clamp the workpiece, solving the problem of not being able to cut the overlapping area between the clamping member and the workpiece, as occurs in conventional EDM technology. The locking structure allows for detachment and adjustment. (4) The direction correcting element can correct the machining direction of the electrode and the workpiece, thereby preventing misalignment in the machining direction. (5) Forming a comb structure on the clamping member or stage promotes a smooth EDM procedure and minimizes damage. (6) The stabilizing member can reduce vibration of the electrodes, provide a guiding effect as a separation column, and can also be used as an electrical contact. (7) The heat source can reduce unwanted cracks and crack expansion caused by thermal shock, and the EDM procedure can be carried out smoothly. (8) The conductive gain layer can improve electrical contact with the clamping member or stage of the workpiece. (9) The adhesive layer can prevent the workpiece from vibrating during the EDM process and prevent burrs from being generated before the EDM process is completed. The conductive adhesive layer can electrically connect the workpiece to the clamping member or stage.

[0064] In order to better understand the technical features and achievable technical effects of the present invention, better embodiments and detailed descriptions are provided below. [Brief explanation of the drawings]

[0065] [Figure 1] 1A and 1B are front views showing an embodiment of an electric discharge machining apparatus according to the present invention, and FIGS. 1A and 1B show different embodiments. [Figure 2] 2A, 2B, and 2C are top views showing embodiments of a partial structure of an electric discharge machining apparatus according to the present invention, and show different embodiments. [Figure 3] 3A and 3B are side views showing embodiments of a partial structure of an electric discharge machining apparatus according to the present invention, and show different embodiments. [Figure 4] 1 is a side view showing an embodiment in which the object to be machined according to the present invention is configured by connecting a plurality of workpieces to be machined. [Figure 5] 1 is a top view showing an embodiment in which an electric discharge machining unit according to the present invention performs an electric discharge machining procedure on a plurality of workpieces. FIG. [Figure 6]1A to 1C are schematic diagrams showing embodiments in which the horizontal cross sections of electrodes according to the present invention have different shapes. [Figure 7] 1 is a side view showing an embodiment in which both ends of an electrode according to the present invention are connected to different mounting members. [Figure 8] 1 is a top view showing an embodiment in which both ends of an electrode according to the present invention are connected to different mounting members. FIG. [Figure 9] 9(A), 9(B) and 9(C) are schematic diagrams showing different embodiments in which a filler material is filled into the processed groove according to the present invention. [Figure 10] 10A and 10B are schematic diagrams showing two embodiments in which an electric discharge machining apparatus according to the present invention has a stabilizing member, and FIGS. 10A and 10B show different embodiments. [Figure 11] 10 is a schematic diagram showing an embodiment in which a plurality of electrodes are provided in the limiting slot of the mounting member according to the present invention; FIG. [Figure 12] 1 is a side view showing an embodiment in which the mounting member according to the present invention has a plate-like structure; [Figure 13] 10 is a top view showing an embodiment in which the mounting member according to the present invention has another plate-like structure. FIG. [Figure 14] 10 is a side view showing an embodiment in which a plurality of mounting members according to the present invention are screwed into a holding member. FIG. [Figure 15] 10 is a side view showing an embodiment in which a holding member according to the present invention is assembled to a mounting member by a groove structure. FIG. [Figure 16] 1 is a top view showing an embodiment in which a holding member according to the present invention has a conductive structure connected to an electrode. [Figure 17] 17 is a top view showing an embodiment in which an insulating structure is provided between the conductive structure and the electrode of FIG. 16. FIG. [Figure 18] 18A and 18B are schematic diagrams showing an embodiment in which a clamping member according to the present invention clamps a workpiece radially, in which FIG. 18A is a side view and FIG. 18B is a top view. [Figure 19]19(A) and 19(B) are side views showing embodiments in which a clamping member according to the present invention clamps a workpiece in the axial direction, and show different embodiments. [Figure 20] 10 is a side view showing an embodiment in which a plate of a clamping member according to the present invention fixes an object to be processed on one side. FIG. [Figure 21] 21(A), (B), (C) and (D) are side views showing embodiments in which the clamping member according to the present invention clamps a workpiece radially, and show different embodiments. [Figure 22] 22(A), (B) and (C) are side views showing different embodiments of the present invention in which electrical contact is improved by a conductive gain layer. [Figure 23] 23A, 23B, and 23C are side views showing different embodiments of the present invention in which a comb structure assists in the electrical discharge machining procedure. [Figure 24] 24(A) and 24(B) are side views showing an embodiment in which the present invention makes a clamp member detachable by using a locking structure, and are schematic views seen from different angles. [Figure 25] 25(A) and 25(B) are side views showing an embodiment in which the present invention makes a clamp member detachable by using a lock structure and a snap-in structure, and are schematic views seen from different angles. [Figure 26] 26(A) to 26(D) are schematic diagrams showing embodiments in which an electric discharge machining apparatus according to the present invention clamps an object to be machined, and show different embodiments. [Figure 27] 27(A) and 27(B) are schematic diagrams showing an embodiment of the present invention in which electrodes are arranged parallel to each other using multiple mounting members, where FIG. 27(A) shows the electrodes arranged parallel to each other along the machining direction F (i.e., multiple electrodes perform electrical discharge machining procedures sequentially on a single target machining area), and FIG. 27(B) shows the electrodes arranged parallel to each other along the first direction X (i.e., multiple electrodes perform electrical discharge machining procedures simultaneously on multiple target machining areas). [Figure 28]These are top views showing an embodiment of the present invention in which electrodes are parallel to each other using a separation column, where Figure 28(A) is a schematic diagram showing the state in which the electrodes surround the support members on both sides, and Figure 28(B) is a schematic diagram showing the state in which the electrodes are connected to the support members on both sides. [Figure 29] 29(A) and 29(B) are top views showing an embodiment in which an electric discharge machining apparatus according to the present invention has a chip discharge unit, and are schematic diagrams showing different embodiments. [Figure 30] 1 is a schematic diagram showing an embodiment in which a jig of an electric discharge machining apparatus according to the present invention scrolls an electrode; [Figure 31] 1 is a schematic diagram showing an embodiment in which an electric discharge machining apparatus according to the present invention has a tension control module; [Figure 32] 1 is a schematic diagram showing an embodiment in which an electric discharge machining apparatus according to the present invention has a direction correcting element; DETAILED DESCRIPTION OF THE INVENTION

[0066] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The proportions of the components in the drawings of the embodiments of the present invention are shown for ease of understanding and are not to scale. Furthermore, the dimensional ratios of the assemblies shown in the drawings are for the purpose of explaining the components and their structures, and the present invention is not limited to these. On the other hand, for ease of understanding, the same components in the following embodiments will be described with the same reference numerals.

[0067] Furthermore, terms used throughout the specification and claims generally have their ordinary meanings as used in this field, the subject matter disclosed herein, and in the particular context, unless otherwise specified. Some terms used to describe the present invention are explained below and elsewhere in the specification to provide those skilled in the art with additional guidance regarding the description of the present invention.

[0068] The use of "first," "second," "third," etc. in this article does not denote a specific order or sequence, nor is it used to limit the invention, but is used only to distinguish between components or operations that are described with the same terminology.

[0069] Secondly, when this article uses terms such as "including," "comprising," "having," and "containing," they are all open terms, meaning including but not limited to.

[0070] FIG. 1 is a front view showing an electric discharge machining apparatus according to the present invention, in which the electrode in FIG. 1(A) adopts a wrap-around design, and the electrode in FIG. 1(B) adopts a jumper design. FIG. 2 is a top view showing the structure of a portion of the electric discharge machining apparatus according to the present invention, in which FIG. 2(A) has multiple electrodes and employs a wrap-around design, FIG. 2(B) has one electrode and employs a wrap-around design, and FIG. 2(C) has one electrode and employs a jumper design. 3A and 3B are side views showing the structure of a portion of the electric discharge machining apparatus according to the present invention, in which multiple electrodes simultaneously perform electric discharge machining procedures on multiple target machining areas, and in which a single electrode performs electric discharge machining procedures on a single target machining area. 1 to 3, an electric discharge machining (EDM) apparatus 10 according to the present invention includes at least a stage 20 and an electric discharge machining unit 30. The stage 20 is for placing at least one workpiece 100 thereon. Each end of the electrode 32 spans two jigs 36 as shown in Figures 1(B) and 2(C), or surrounds two jigs 36 as shown in Figures 1(A), 2(A), and 2(B). This leaves discharge section B of electrode 32 in a floating state. The electrode 32 of the electric discharge machining unit 30 extends along a second direction Y, such that the discharge section B of the electrode 32 is parallel to the second direction Y, and the second direction Y is perpendicular to the first direction X and the machining direction F. The discharge section B of the electrode 32 and the target processing area 110 of the workpiece 100 move relatively to and fro or periodically return to their original positions (for example, they are displaced relatively along the second direction Y shown in FIG. 1). As a result, the electrode 32 performs an electric discharge machining procedure on the machining target region 110 of the workpiece 100 on the stage 20 along the machining direction F. During the electric discharge machining procedure, the power supply unit 34 of the electric discharge machining unit 30 supplies a first power source P1 to the electrode 32 and the workpiece 100, thereby applying discharge energy to the target machining area 110 of the workpiece 100 via the electrode 32 located in the discharge section B.

[0071] The workpiece 100 is any conductive or semiconductive structure, such as a crystal ingot or wafer, and is, for example, a cylindrical block or sheet. The object 100 to be processed has at least one processing target area 110, for example, a single processing target area 110 as shown in FIG. 3(B), or multiple processing target areas 110 as shown in FIG. 3(A). In the case where there are a plurality of processing target regions 110, these processing target regions 110 are arranged in parallel to each other at any positions on the workpiece 100 that are suitable for processing. The interval D between these processing target areas 110 corresponds to the cutting thickness, thinning thickness, or cutting interval of the workpiece 100 (for example, the same as that of the workpiece 100), and the value can be selectively adjusted according to the needs of the actual process. Therefore, the interval D between these processing target areas 110 is not limited to being the same or different.

[0072] 1 to 3, the electric discharge machining (EDM) unit 30 performs an electric discharge machining procedure on a target machining area 110 of a workpiece 100 on the stage 20 along a machining direction F, for example, performing electric discharge machining procedures such as cutting and / or grinding (EDG) on the target machining area 110 of the workpiece 100 sequentially or simultaneously. The present invention is not limited to the stage 20 driving the workpiece 100 to move toward the electrode 32 of the electric discharge machining unit 30, or the electric discharge machining unit 30 driving the electrode 32 to move toward the workpiece 100, and can be applied to the present invention as long as the electric discharge machining (EDM) unit 30 and the workpiece 100 on the stage 20 can move relative to each other along the above-mentioned machining direction F. In other words, the stage 20 according to the present invention may be fixed in position, or may be movable or rotatable. Although the present invention has been described using an example in which the stage 20 is a work platform having a support plate 21, the present invention is not limited to this, and the stage 20 of the present invention may selectively omit the support plate 21, or may use the adhesive layer described below instead of the support plate 21. Similarly, the workpiece 100 according to the present invention is not limited to being formed from a single workpiece, but may be formed by connecting a plurality of workpieces to be processed, for example. These workpieces are optionally assembled together, for example by an adhesive layer 26 (embodiment shown in FIG. 4). The adhesive layer 26 is, for example, a conductive adhesive that can improve electrical contact. However, the present invention is not limited to these, and any of the above or below adhesive layers 26 that can exhibit adhesive effects fall within the scope of the present invention, regardless of whether they are conductive or not. Meanwhile, the electric discharge machining unit 30 according to the present invention can selectively perform electric discharge machining procedures on one or more workpieces 100 in sequence or simultaneously, as shown in FIG. FIG. 4 is a side view showing a plurality of workpieces bonded together and subjected to an electric discharge machining procedure, and FIG. 5 is a top view showing an electric discharge machining apparatus according to the present invention performing an electric discharge machining procedure on a plurality of workpieces.

[0073] 1 to 3, the electric discharge machining unit 30 includes at least one electrode 32, a power supply unit 34, and a jig 36. The electrode 32 may be one or more, as shown in Figures 2(B), 2(C) and 3(B), and performs an electric discharge machining procedure on one target machining area 110 or multiple target machining areas 110 on the workpiece 100, as shown in Figures 2(A) and 3(A). For example, in the case of a discharge section B having a plurality of electrodes 32 extending along the second direction Y, these electrodes 32 are arranged parallel to one another along the first direction X, or parallel to one another along the processing direction F. These electrodes 32 are linear (also called strip-shaped) or plate-shaped (also called strip-shaped) conductive structures, such as conductive wires or foils. The number of electrodes 32 is optional and depends on the actual needs. The spacing D between these electrodes 32 in the first direction X corresponds to the cutting or thinning thickness of the workpiece 100 . The cross-sectional shapes of these electrodes 32 in the transverse direction may be the same or different, for example, linear or plate-like, or may be any symmetrical shape (circular, square or rectangular as shown in FIG. 6) or asymmetrical. The power supply unit 34 is electrically connected to the electrode 32 and the workpiece 100 via electrical contacts 31, respectively. The power supply unit 34 is one or more sets of power outputs and supplies a first power source P1. The power supply unit 34 can also be electrically connected in series or parallel to the electrode 32, and can be applied to the present invention as long as discharge energy can be applied to the target processing area 110 of the workpiece 100 via the electrode 32. The material of the electrode 32 is selected from the group consisting of, for example, copper, brass, molybdenum, tungsten, graphite, steel, aluminum, and zinc. The thickness of the discharge electrode 32 is about 300 μm, and preferably about 30 μm to 300 μm. However, it should be noted that although the present invention has been described using an example in which there are multiple electrodes 32, the present invention is not limited to this, and even if there is a single electrode, as shown in Figures 2(B), 2(C), and 3(B), it falls within the scope of the present invention. A person skilled in the art can understand how to apply the technical means of the present invention to a single electrode or multiple electrodes based on the disclosure of the present invention and the prior art, so detailed description will be omitted.

[0074] 1 to 3, the jig 36 is configured by selectively assembling at least two mounting members 40 and at least two holding members 50, for example. Both sides A of the electrode 32 are pressed against two mounting members 40 so as to be movable or fixed, respectively, so that the discharge section B of the electrode 32 is in a floating state. There is a gap between the two mounting members 40. There is no particular limitation as to whether the dimensions of the two mounting members 40 and the heights of the electrodes 32 mounted on the mounting members 40 are the same or different. If the discharge section B of the electrode 32 is in a floating state, it can be applied to the present invention. The holding member 50 can be attached to and detached from the mounting member 40, or can be firmly attached to the mounting member 40. The holding member 50 is provided on a base 52. The base 52 is a structure for fixing the position of the holding member 50, or a movement mechanism for enabling the holding member 50 to move, rotate, or perform other movements. In order to drive the movement of the mounting member 40, such as movement or rotation, the discharge section B of the electrode 32 can reciprocate left and right. The movement mechanism of the base 52 may be, for example, any moving mechanism that can move back and forth to the left and right, such as a slide mechanism, or any rotating mechanism that can rotate back and forth or periodically return to its original position, such as a motor. This allows the holding member 50 to be driven to perform movements such as movement and rotation. As a result, the placing member 40 and the holding member 50 selectively move back and forth or periodically return together with the electrode 32, and the electrode 32 applies discharge energy to the workpiece 100 in the discharge section B. To allow the electrode 32 to better attach to the mounting member 40, the edges of the mounting member 40 optionally have a chamfer 47, as shown in FIGS.

[0075] In the electric discharge machining procedure, the power supply unit 34 supplies a first power source P1 to the electrode 32 and the workpiece 100, thereby applying electric discharge energy to the target machining area 110 of the workpiece 100 via the electric discharge section B of the electrode 32. When the electric discharge machining unit 30 performs electric discharge machining on the target machining area 110 of the workpiece 100 along the machining direction F (cutting / grinding direction), the discharge section B of the electrode 32 and the target machining area 110 of the workpiece 100 move relative to each other along the second direction Y, for example, moving back and forth or periodically returning to their original position. That is, one of the electrode 32 and the workpiece 100 is fixed, and the other can move relatively. Alternatively, the electrode 32 and the workpiece 100 move relative to each other. The processing direction F is, for example, perpendicular to the first direction X or the second direction Y, or is inclined to the first direction X or the second direction Y. To explain this by way of example, in the case where the workpiece 100 moves relative to the electrode 32, the stage 20 according to the present invention is, for example, a movable stage that can move and rotate, and moves, for example, along the first direction X, the second direction Y, or the machining direction F, or rotates around the first direction X, the second direction Y, or the machining direction F as an axis.

[0076] 1 to 3, in the present invention, the electrodes 32 are arranged parallel to each other along a first direction X. For example, the electrodes 32 movably surround two support members 40 spaced apart from each other, so that the discharge section B of the electrodes 32 is in a floating state and moves back and forth or periodically returns to its original position along a second direction Y in accordance with the movement of the two support members 40. Alternatively, the electrode 32 may be, for example, fixed and straddle or surround two mounting members 40 spaced apart from each other. The electric discharge machining apparatus 10 optionally includes a connection structure 35. The connection structure 35 extends along the first direction X and connects to the plurality of electrodes 32 arranged in parallel along the first direction X. The connecting structure 35 can increase the structural stability of the discharge electrodes 32 when performing electric discharge machining. For this reason, a non-conductive material may be used for the connecting structure 35. This can prevent the electrodes 32 from coming into electrical contact with each other. When the connecting structure 35 employs a conductive material, the connecting structure 35 can be used as the electrical contact 31 . That is, the head and tail ends of each electrode 32 are respectively connected to the same one of the two support members 40 as shown in FIG. 1A, or to both of the two support members 40 as shown in FIG. 7, so that the discharge section B of the electrode 32 is in a floating state and reciprocates along the two support members 40, reciprocating along the second direction Y. As shown in FIG. 7, the electrode 32 is not limited to surrounding the two support members 40, but may alternatively straddle only the top sides of the two support members 40.

[0077] 9(A), in the electric discharge machining procedure, the electric discharge machining unit 30 applies electric discharge energy to the target machining region 110 of the workpiece 100 along the machining direction F via the discharge section B of the electrode 32. As a result, a plurality of machining grooves 120 can be formed in the target machining region 110 of the workpiece 100 along the machining direction F. The depth H of the machining groove 120 increases as the electrical discharge machining steps are performed until the entire electrical discharge machining step is completed. As shown in FIG. 9(A), the present invention may optionally fill the kerf 120 with a filler material 124 by performing a filling procedure. This makes it possible to reduce vibrations of the workpiece 100, and to maintain the as-cut state / thinning distance of the workpiece 100. Furthermore, it is possible to prevent the sheets of the workpiece 100 from colliding with each other after cutting or polishing. The filler 124 may be an insulating material such as air, deionized water, oil, glue, or other suitable insulating material as a dielectric material. However, the material of the filler 124 of the present invention is not limited to insulating materials, and any material (e.g., semi-insulating or non-insulating material) that can be filled into the processing groove 120 falls within the scope of the present invention. And, depending on the needs of the actual process, the EDM procedure and the filling procedure may be performed synchronously, sequentially or alternately. For example, after forming a partial depth of the groove 120 and before the groove 120 penetrates completely through the workpiece 100, the present invention can further optionally perform a filling procedure on the groove 120. For example, as shown in FIG. 9(B), a dispensing procedure is performed on the processing groove 120. This is because the adhesive is used as the filler 124 to bond the machined surfaces on both sides of the machined groove 120, thereby reducing the occurrence of wobbling caused by the formation of the machined groove 120 in the workpiece 100. The adhesive may be a conductive adhesive or a non-conductive adhesive. The adhesive is not limited to filling a part or the whole of the groove 120, and any adhesive capable of adhering and fixing falls within the scope of the present invention. Alternatively, as shown in FIG. 9C, the present invention can selectively use a metal foil or a metal block as a filler 124 and place the filler 124 in the processing groove 120. The metal foil or metal block is a conductive material such as, for example, a copper foil or copper sheet. This also reduces the blurring phenomenon of the workpiece 100. Similarly, the above-mentioned metal foil or metal block is not limited to filling a part or all of the processing groove 120. The filler 124 is not limited to a conductive material such as a metal foil or metal block, and an insulating block or the like can also be used as the filler 124. Anything that can provide a compensation effect falls within the scope of the present invention. On the other hand, the present invention also allows for the optional application of a tape attachment procedure to the workpiece 100 having the processing groove 120 formed therein, for example, by attaching conductive or non-conductive tape 126 to both sides of the processing groove 120 of the workpiece 100, the workpiece 100 can be firmly fixed and the wobbling phenomenon of the processing target area 110 of the workpiece 100 can also be reduced. When the processing groove 120 is filled with a filler 124 such as a metal foil or a metal block, the filler 124 can be used as a support element to support both sides of the processing groove 120, effectively preventing the sheet-shaped workpiece 100 from bursting or breaking due to external forces during or after processing. Illustratively, the filler material 124 is a conductive material such as a metal foil or metal block, and the EDM and filling steps are alternated. In the present invention, for example, after performing a first stage electric discharge machining procedure to form a portion of the machining groove 120, a second stage filling procedure is performed to fill the machining groove 120 with a filler material 124, such as a metal foil or a metal block, and then attach a tape 126. Similarly, the present invention then performs a third stage of the EDM procedure to form another portion of the machining groove 120, a fourth stage of the filling procedure, and so on. This allows the machined groove 120 to be partially or entirely filled. Furthermore, the present invention is not limited to performing the electric discharge machining procedure by applying discharge energy to the target machining area 110 of the workpiece 100 in a fluid such as the liquid or gas phase, and the electric discharge machining procedure of the present invention may be performed in a vacuum environment. When performed in a vacuum environment, discharge loss and contamination by impurities can be reduced, and the precision and controllability of the electric discharge machining can also be improved. Alternatively, the fluid such as the liquid phase or gas phase may contain, for example, oxygen or ozone. By performing the EDM procedure in an environment containing oxygen or ozone, the EDM speed can be increased, the quality of the EDM can be improved, and carbides and residues generated on the surface of the electrode can be effectively removed, thereby reducing electrode wear. Briefly, the EDM procedure of the present invention can cut the workpiece 100 in a dry mode in a gas-phase fluid environment or a vacuum environment, and can cut the workpiece 100 in a wet mode in a moist environment by immersing the workpiece 100 in a liquid-phase fluid tank (e.g., a liquid tank or a heated liquid tank) or by spraying the workpiece 100 with a liquid-phase fluid. By way of example, the fluid is optionally an electrolyte (not shown), such as electrolyzed water. This allows the present invention to perform electrical discharge machining procedures in, for example, an electrolyte environment. As shown in FIG. 1, the electrode 32 is electrically connected to the cathode of the power supply unit 34, and the workpiece 100 is electrically connected to the anode of the power supply unit 34, so that an electrolytic reaction is generated simultaneously during the electrical discharge machining procedure. The present invention uses cathodic protection caused by electrolytic reaction to prevent the metal components of the electrode 32 from dissolving in the electrolyte during the EDM process, thereby reducing the risk of the electrode 32 breaking. By the electrolysis reaction, water in the electrolyte generates hydrogen gas in the processing target region 110 of the processing object 100 . The generation of hydrogen gas bubbles can promote the removal of residues in the grooves 120, thereby improving the cleaning effect of the workpiece 100. Furthermore, due to the principle that like electrical properties repel each other, it is possible to prevent residues with the same negative charge from adhering to the electrode 32 and the processing groove 120. Although the present invention has been described using electrolytic water as the electrolyte, any gaseous or liquid phase fluid that can generate an electrolytic reaction falls within the scope of the present invention.

[0078] 10(A) and 10(B). In the electric discharge machining procedure, the electric discharge section B of the electrode 32 advances along the machining direction F to apply electric discharge energy to the target machining area 110 of the workpiece 100. The electric discharge section B of the electrode 32 and the target machining area 110 of the workpiece 100 simultaneously move relatively along the second direction Y (for example, in the directions indicated by the open double arrow and single arrow in FIGS. 10(A) and 10(B)). In order to prevent vibrations of the electrode 32 generated during the electric discharge machining procedure, the electric discharge machining apparatus 10 according to the present invention optionally has a stabilizing member 22. The stabilizing member 22 is provided, for example, on the stage 20 or the jig 36 and is positioned, for example, between both sides A of the electrode 32 . The shape of the stabilizing member 22 is not particularly limited, and any shape that can reduce vibration of the electrode 32 can be applied to the present invention. For example, the contact surface 28 of the stabilizing member 22 that contacts the electrode 32 may be, for example, flat, and may support the electrode 32 in a floating state, thereby reducing vibration. 10(B), the contact surface 28 of the stabilizing member 22 that comes into contact with the electrode 32 optionally has a guide groove 281. The depth of the guide groove 281 is, for example, deep enough to accommodate the electrode 32 movably. The number of guide grooves 281 corresponds to the number of electrodes 32, so that the spacing between the electrodes 32 can be maintained, the vibration along the first direction X can be reduced, the electrodes 32 can be effectively stabilized, and the electrodes 32 can also be guided. The guide groove 281 can support the electrode 32 in a floating state, and can provide the effect of stabilizing and guiding the electrode 32 when the electrode 32 moves back and forth or periodically returns to its original position relative to the workpiece 100. Alternatively, the stabilizing member 22 may be configured to have an adjustable height. This allows the height of the contact surface 28 of the stabilizing member 22 that comes into contact with the electrode 32 to be changed according to the depth of the processing groove 120 . The strip-like structure between adjacent guide grooves 281 of the stabilizing member 22 can also be used as a separation column as described below. This allows the electrodes 32 to be separated so that they are parallel to one another. The stabilizing member 22 can be made of a non-conductive material to prevent the electrodes 32 from making electrical contact with each other. The stabilizing member 22 may also be used as an electrical contact 31 if an electrically conductive material is employed.

[0079] The shape of the mounting member 40 according to the present invention is not particularly limited, and may be, for example, a plate shape as shown in FIGS. 12 and 13, or a sleeve shape as shown in FIGS. The surface of the mounting member 40 is optionally provided with, for example, a plurality of limiting slots 42 . The position of the electrode 32 is restricted by the restricting slot 42 . The electrodes 32 in the different restrictive slots 42 may be electrically independent from each other, or may be connected in sequence to be in electrical communication. In the embodiment shown in Figures 1 to 13, the limiting slots 42 are arranged parallel along the first direction X at a spacing D, thereby arranging the electrodes 32 parallel along the first direction X. However, the present invention is not limited thereto, and the limiting slots 42 may be arranged, for example, parallel to the machining direction F, depending on the needs of the actual electrical discharge machining process. This allows the electrodes 32 to be arranged in parallel along the processing direction F. The width of the limiting slot 42 corresponds to the width of the electrode 32. For example, the width of the limiting slot 42 is slightly larger than the width of the electrode 32. This allows the position of the electrode 32 to be restricted to the restricting slot 42 . The two mounting members 40 have, for example, limiting slots 42 . When relative movement between the electrode 32 and the mounting member 40 is not required, for example when the mounting member 40 does not need to rotate, the present invention further provides for optional fixing of the electrode 32 in the limiting slot 42 by an attachment member 46, as shown in Figures 7 and 8. The attachment member 46 connects to the electrode 32, for example, at the edge of the mounting member 40. The attachment members 46 may, for example, have multiple positions and dimensions to correspond to bumps on the restrictive slots 42, or the attachment members 46 may be adhesive. Meanwhile, the attachment member 46 is further selectively electrically connected to a first power source P1 from the power supply unit 34 and a second power source P2 from another power supply unit 34'. The second power source P2 is, for example, a DC power source or a radio frequency power source, that is, the attachment member 46 can also be selectively used as the electrical contact 31 in FIG.

[0080] Please refer to the embodiment shown in FIG. 11 and FIGS. 1 to 10 simultaneously. For example, if the mounting member 40 of the jig 36 is a cylindrical sleeve structure, the multiple limiting slots 42 are arranged, for example, parallel to each other along a first direction X (i.e., the axial direction of the mounting member 40) and extend deep into the mounting member 40 along a third direction Z (i.e., the radial direction of the mounting member 40) to have a depth H. This allows for a single electrode or multiple electrodes 32 to be stacked in a single limiting slot 42, as shown in FIG. The depth H of the restriction slots 42 can be determined according to actual needs and is not limited to being the same as each other, that is, the depths H of the restriction slots 42 arranged in parallel along the first direction X may be different from each other. For example, if the electrodes 32 have a wrap-around design, the electrodes 32 are stacked in contact with each other and wrap around the mounting member 40 to stack within the limiting slot 42 . On the other hand, the number of electrodes 32 in different limiting slots 42 is not limited to being the same as each other, that is, the number of electrodes 32 located in different limiting slots 42 may be different from each other. In other words, the electrodes 32 arranged to be parallel along the first direction X are arranged in the same number and parallel along the third direction Z, or the electrodes 32 arranged to be parallel along the first direction X are arranged in a different number and parallel along the third direction Z. The third direction Z is, for example, perpendicular to the first direction X. That is, it is the radial direction of the mounting member 40 and parallel to the radial direction of the workpiece 100. However, depending on the actual process needs, the EDM procedure can cut or grind vertically along the radial direction of the workpiece 100, or can cut or grind obliquely at an inclined angle along the radial direction of the workpiece 100. Therefore, when actually performing the electric discharge machining procedure, the stage 20 and the jig 36 are adjusted so that the third direction Z is parallel to the machining direction F, for example.

[0081] The retaining member 50 is selectively removably or fixedly secured to the mounting member 40 . The manner in which the mounting member 40 and the holding member 50 are assembled is not particularly limited. This can be applied to the present invention if a mounting member can be attached to the holding member 50, or if the mounting member 40 can selectively move, rotate, or perform other movements by moving, rotating, or other movements of the holding member 50. The mounting member 40 is, for example, a cylindrical or other shaped sleeve having an axial hole 41 as shown in FIG. The mounting member 40 can be fitted onto the bump 53 of the holding member 50 through the shaft hole 41 . On the other hand, in order to reduce the time required to replace the electrode 32 when the electrode 32 is accidentally broken, the present invention further provides, for example, first fitting the axial hole 41 of the mounting member 40 onto a dummy support member similarly having a bump. This allows the user to quickly remove the mounting member 40 surrounded by the electrodes 32 from the dummy support member. Then, the user fits the bumps 53 of the holding member 50 into the axial holes 41 of the mounting member 40, or inserts the bumps 53 of the holding member 50 into the axial holes 41 of the mounting member 40. Therefore, the assembly work of the jig 36 can be completed quickly.

[0082] Taking a plate-like structure as an example, different embodiments are shown in FIGS. 12 and 13, with the viewpoint of FIG. 13 being perpendicular to that of FIG. The mounting members 40 each include a first sheet 44A and a second sheet 44B, and the electrode 32 is clamped between the first sheet 44A and the second sheet 44B. 12, the electrode 32 is first wrapped around the first sheet 44A, and then the second sheet 44B is joined to the first sheet 44A. The second sheet 44B is joined to, for example, a fitting groove in the first sheet 44A. This allows the limiting slot 42 to clamp the electrode 32 . The mounting member 40 optionally has a through slot 43, for example. The mounting member 40 can fit onto the bumps 53 of the holding member 50 via the through slots 43 . The through slot 43 is not limited to being open on one side or both sides, and any type of through slot 43 or assembly method can be applied to the present invention as long as the mounting member 40 and the holding member 50 can be assembled into a single unit. In the example of FIG. 13, the electrode 32 is clamped between a first sheet 44A and a second sheet 44B. The mounting member 40 has, for example, a through slot 43 that can fit onto the bump 53 of the holding member 50 . The second sheet 44B can be used as a partition layer between the electrodes 32 wound in multiple layers, and by changing the thickness of the second sheet 44B, the spacing D in the first direction X between the electrodes 32 in multiple layers can be adjusted. Alternatively, as in the embodiment shown in FIG. 14, the mounting member 40 is selectively assembled to the holding member 50 by, for example, using a screw connection method. For example, each of the mounting members 40 has a through hole 45, and each of the bumps 53 of the holding member 50 has a screw hole. The mounting member 40 has a bolt 59 that passes through the through hole 45 and is screwed into the threaded hole of the holding member 50 . 15, the holding members 50 may optionally have, for example, groove structures 57. The mounting member 40 is assembled to the holding member 50 by being inserted into the groove structures 57 of the holding member 50.

[0083] On the other hand, as in the embodiment shown in FIG. 16, the holding member 50 further includes, for example, a conductive structure 54. The conductive structure 54 straddles the plurality of electrodes 32 along the first direction X, for example, and is pressed against the electrodes 32 on the mounting member 40 to be electrically connected thereto. Thereby, the first power supply P1 from the power supply unit 34 in the above embodiment is selectively electrically connected to the electrode 32, for example via the conductive structure 54. That is, conductive structure 54 is selectively used as electrical contact 31 in FIG. In addition, insulating structures 56 are optionally provided between the electrodes 32 to prevent the electrodes 32 from making electrical contact with each other. For example, in the embodiment shown in FIG. 17, an insulating structure 56 is optionally provided between, for example, the electrode 32 and the conductive structure 54 . The material used for the insulating structure 56 is not particularly limited, and any material that can provide the above-mentioned insulating effect can be applied to the present invention.

[0084] On the other hand, in each embodiment of the present invention, the heights of the electrodes 32 located in different restriction slots 42 are not limited to being the same. The heights of the electrodes 32 located in different restriction slots 42 may be different. Alternatively, the heights of the electrodes 32 located on different mounting members 40 are not limited to being the same, and the heights of the electrodes 32 located on different mounting members 40 may be different. That is, as in the embodiment shown in FIG. 11, the electrodes 32 can not only be arranged to be parallel along the first direction X, but can also be selectively arranged to be parallel along the third direction Z, at the same height or at different heights. Electrodes 32 located within the same limiting slot 42 may be stacked or side-by-side.

[0085] On the other hand, as shown in FIG. 11, multiple electrodes 32 located within the same limiting slot 42 are arranged so as to be parallel along the third direction Z (machining direction F), and therefore are arranged so as to be parallel along the third direction Z. When these electrodes 32 cut or grind the target processing region 110 of the workpiece 100 in sequence along the processing direction F, the subsequent electrode 32 passes through the position where the previous electrode 32 passed. In other words, if the machining direction F is from top to bottom, even if the previous electrode 32 (e.g., the electrode at the bottom) is broken, the subsequent electrode 32 (e.g., the electrode at the top) can apply discharge energy to the target machining area 110 of the workpiece 100 shown in Figure 1 instead of the previous electrode 32. This makes it possible to avoid interruption of the process due to disconnection of the electrodes.

[0086] The workpiece 100 is placed on a stage 20 . The stage 20 includes a clamp member 24 for fixing the workpiece 100 . The clamping member 24 has, for example, two plates 23 and optionally includes a rest plate 21 . 18(A) and 18(B), the plate 23 of the clamping member 24 may optionally have a stepped structure. By designing the plate 23 of the clamping member 24 to have a stepped shape, it is possible to press and contact more positions on the workpiece 100, thereby achieving a more stable clamping effect on the workpiece 100. However, the shape of the clamping member 24 according to the present invention is not particularly limited. Any clamping member that can clamp the workpiece 100 falls within the scope of the claims of the present invention. To explain by way of example, if the workpiece 100 is a block-shaped object (e.g., an ingot), the clamping member 24 can clamp the peripheral surface of the ingot, which has a cylindrical shape, to prevent scrolling and displacement, as shown in Figures 18(A) and 18(B), and the target processing area 110 of the workpiece 100 can be positioned outside the clamping member 24. Alternatively, the clamp members 24 clamp, for example, both ends of the ingot. That is, by clamping both sides of the ingot along the axial direction, displacement can be prevented and the processing target region 110 of the workpiece 100 can be positioned between the two clamp members 24, as shown in Figures 19(A) and 19(B). The clamping member 24 is, for example, two separated plates 23. The workpiece 100 is clamped by the two plates 23. By providing two or more contact surfaces between the clamping member 24 and the workpiece 100, scrolling or displacement of the workpiece 100 can be effectively prevented. The support plate 21 or the clamp member 24 of the stage 20 is further selectively connected to the workpiece 100 by an adhesive layer 26, as shown in FIGS. 19(A) and 19(B). This effectively prevents the workpiece 100 from vibrating during the electrical discharge machining procedure, and also effectively prevents the occurrence of burrs on the workpiece 100 before the electrical discharge machining procedure is completed. The adhesive layer 26 is, for example, a conductive adhesive, and the adhesive can provide electrical conductivity and fixing effects. The adhesive layer 26 may be continuous or discontinuous and may be applied to the stage 20 or the clamping member 24 . As shown in Fig. 19(A), the adhesive layer 26 is continuously bonded between the workpiece 100 and the support plate 21 of the stage 20. Alternatively, as shown in Fig. 19(B), the adhesive layer 26 is discontinuously bonded between the workpiece 100 and the support plate 21 of the stage 20. In the case of the discontinuous type, for example, the adhesive layer 26 is provided on the support plate 21 of the stage 20, for example, so as to leave a gap therebetween. The position of the adhesive layer 26 corresponds to the target processing area 110, for example, i.e., the adhesive layer 26 is located below the target processing area 110. However, in the present invention, the adhesive layer 26 is not limited to being positioned directly below the target processing area 110. Any position that can firmly adhere the workpiece 100 falls within the scope of the present invention.

[0087] As in the embodiment shown in FIG. 20, the clamp member 24 may further be configured by combining a single plate 23 and a support plate 21, for example. The plate 23 is for supporting one side of the workpiece 100 . The support plate 21 is for placing the bottom side of the workpiece 100 on it. In another embodiment, the clamping member 24 according to the present invention may omit the resting plate 21 and a single plate 23 is positioned on the stage 20 . On the other hand, the present invention further selectively uses an adhesive layer 26 to bond two groove walls of the machining groove 120 in the target machining area 110 of the workpiece 100, thereby avoiding the phenomenon of the workpiece 100 vibrating during the EDM procedure and also preventing the generation of burrs before the EDM procedure is completed. The workpiece 100 is not limited to being fixed at both axial ends or at the radial periphery to one side of the clamp member 24 via the adhesive layer 26 . As above, adhesive layer 26 may be disposed on workpiece 100 in a continuous or discontinuous manner. The adhesive layer 26 is provided on the workpiece 100 so as to leave gaps therebetween, and the positions thereof correspond to, but are not limited to, target processing regions 110 of the workpiece 100, for example.

[0088] 21(A) will be described. The clamp member 24 is formed, for example, by combining a plurality of plates 23, or by combining a plate 23 with a mounting plate 21. Furthermore, the clamp member 24 may clamp, for example, a buffer member 27. The cushioning member 27 is fixed to the object 100 via an adhesive layer 26 . The electric discharge machining unit 30 performs an electric discharge machining procedure on the workpiece 100 on the stage 20 along a machining direction F (for example, perpendicular or parallel to the plane of the drawing). Furthermore, the electric discharge machining procedure is performed on the workpiece 100 and the buffer member 27, for example. The adhesive layer 26 is optionally, for example, a conductive adhesive layer. The workpiece 100 is not limited to being fixed to the buffer member 27 via the adhesive layer 26 at both axial ends or at the radial periphery. The buffer member 27 may be, for example, a conductive material, and the buffer member 27 allows the clamping member 24 to indirectly clamp the workpiece 100, thereby allowing the electric discharge machining procedure to take place. Therefore, the buffer member 27 is not limited to a specific structure or material, and any structure or material that can achieve the above object falls within the scope of the claims of the present invention.

[0089] The embodiments shown in Figures 21(B), 21(C) and 21(D) will be described. The clamping members 24 further fix the workpiece 100, for example, by clamping the conductive frame 25. The electric discharge machining unit 30 performs an electric discharge machining procedure on the workpiece 100 on the stage 20 along a machining direction F (for example, perpendicular or parallel to the plane of the drawing), and further performs an electric discharge machining procedure on the workpiece 100 and the conductive frame 25, for example. The workpiece 100 is not limited to being fixed to the clamping member 24 at both axial ends or at the radial periphery via the conductive frame 25; any workpiece that can be subjected to an electric discharge machining procedure falls within the scope of the present invention. Depending on the needs of the actual process, the conductive frame 25 of the present invention may be selectively attached, in part, to the periphery of the workpiece 100, as shown in Figures 21(C) and 21(D), or in its entirety to the periphery of the workpiece 100, as shown in Figure 21(B).

[0090] Additionally, to improve the efficiency of the EDM procedure, the present invention further improves electrical contact between the workpiece 100 and the clamping member 24, or between the workpiece 100 and the stage 20, via a conductive gain layer. To explain by way of example, as shown in Figure 22, the present invention first forms a conductive gain layer 90 on the workpiece 100 by surface modification (e.g., electrical discharge machining or laser), and then clamps the workpiece 100 with a clamping member 24. The components of the conductive gain layer 90 are determined according to the composition of the workpiece 100 . The position where the conductive gain layer 90 is formed corresponds to, for example, the position where the workpiece 100 is clamped (ie, the contact surface). For example, the conductive gain layer 90 is formed at a position where it contacts the plates 23 on both sides of the clamping member 24 of the workpiece 100 and / or the underlying support plate 21 . In another embodiment, the mounting plate 21 below the clamping member 24 is omitted, so that the present invention allows, for example, the conductive gain layer 90 to be in direct contact with the stage 20. The present invention can improve the electrical contact between the workpiece 100 and the clamping member 24 (or the stage 20) by modifying the surface of the workpiece 100. Alternatively, the present invention provides a conductive gain layer 90 by plating, coating, or the like to improve electrical contact. Furthermore, as shown in FIG. 21(B), the conductive frame 25 may have a conductive gain layer 90 formed thereon by plating, or may itself be the conductive gain layer 90, thereby improving electrical contact. The above-mentioned multiple conductive gain layers 90 located at different positions can be applied to the present invention, for example, if they employ the same or different conductive materials and can provide good electrical contact. In addition, each component of the clamping member 24 according to the present invention, for example, the plate 23 and / or the support plate 21 itself, is made of a conductive gain material. The conductive gain materials may be different conductive materials or the same conductive material. The conductive gain materials may be different metallic materials or the same metallic material. As long as the conductive gain materials can provide good electrical contact, they can be applied to the present invention. This makes it possible to improve the efficiency of electrical discharge machining of the workpiece 100, particularly a semiconductor or a poor conductor. The work function of the conductive gain layer 90 is, for example, about 4.5 eV or less, but is not limited to this, and any material that can improve electrical contact can be applied to the present invention.

[0091] On the other hand, in the electric discharge machining procedure, the electric discharge machining unit can perform the electric discharge machining procedure on the workpiece 100 on the stage 20 and the clamping member 24 along the machining direction F. As shown in Figures 23(A), 18(A) and 18(B), a clamping member 24 according to the present invention includes, for example, two plates 23 and a support plate 21. The two plates 23 optionally have a comb structure 11, for example, at least one of the two plates 23 has the comb structure 11 formed thereon, i.e., it becomes a comb plate. The positions of the tooth openings 29 of the comb structure 11 correspond to the positions of the target processing areas 110 , that is, the positions of the electrodes 32 . However, the present invention is not limited to this, and the support plate 21 according to the present invention may optionally have a comb structure 11' as shown in FIG. 23(B). When the support plate 21 is omitted, the comb structure 11' may be formed directly on the stage 20 as shown in FIG. 23(C). In other words, according to the actual needs when designing the structure, the clamping member 24 or the stage 20 of the present invention can selectively have a comb structure, or the clamping member 24 and the stage 20 can both have a comb structure. The positions of the tooth openings 29' of the comb structure 11' correspond to the positions of the target processing areas 110, for example. This allows the workpiece 100 to be securely clamped for the electrical discharge machining procedure, while preventing the electrode 32 from damaging the clamping member 24 and the stage 20 . On the other hand, the comb structure of the present invention is not limited to any particular dimensions, material, number of comb tooth openings, or installation orientation, and as long as the stage 20 and / or clamping member 24 can clamp the workpiece 100 during the EDM procedure, it falls within the scope of the present invention.

[0092] In the present invention, the clamp member 24 may be fixed or removable, and is not limited to being fixed on the stage 20 . For example, in the case of adopting a removable type, the two plates 23 of the clamping member 24 are detachably connected to each other, for example, by a lock-in structure 240, and the lower plate 23 is also detachably connected to the stage 20, for example, by a lock-in structure 240. The plate 23 below is for supporting the support plate 21 in the above figures, and may be replaced with the support plate 21, but for the sake of simplicity, only the plate 23 will be described as an example. The clamping member 24 according to the present invention can adjust the distance between the two plates 23 (i.e., the width of the clamping opening) by using the locking structure 240. This allows workpieces 100 with different dimensions to be clamped. The locking structure 240 includes, for example, but is not limited to, a bolt 242 and a nut 244 as shown in FIGS. 24(A) and 24(B). This allows the workpiece 100 to be detachably clamped, and also makes it possible to adjust the width of the clamp opening in accordance with the dimensions of the workpiece 100. Alternatively, the locking structure 240 according to the present invention may be a structure that employs any design as long as it can detachably mount the clamping member 24 on the stage 20 . In other words, any structure that is detachable falls within the scope of the present invention. Meanwhile, the two plates 23 of the clamping member 24 of the present invention can further be selectively quickly connected by a snap-in structure 243, for example, by a snap-in block 246 (e.g., a bump) and a snap-in hole 248 (e.g., a through hole) that can be mated and connected to each other. For example, as shown in FIGS. 25(A) and 25(B), the lower plate 23 has, for example, a snap-in block 246. The upper plate 23 has a corresponding snap-in hole 248 . This makes it easy to fit and connect the two plates 23 together. Next, the upper plate 23 can be pressed firmly onto the workpiece 100 using the bolts 242 and nuts 244 . This has the effect of enabling quick detachment and attachment, and also has the effect of increasing the strength of the structure. Other embodiments will be described with reference to FIGS. 24(A) and 24(B) and FIGS. 25(A) and 25(B). The two plates 23 of the clamping member 24 optionally have a comb structure 11. The stage 20 also optionally has a comb structure 11'. The positions of the comb tooth openings 29' of the comb structure 11' correspond to the positions of the target processing areas 110, for example. This allows the workpiece 100 to be securely clamped during the electrical discharge machining procedure, while preventing the plate 23 of the clamping member 24 and the stage 20 from being damaged.

[0093] In addition, as shown in FIG. 26, the cross-sectional shape in the radial direction of the workpiece 100 is not limited to a circle, and may have any shape, for example, a circle having a flat area 13. The workpiece 100 is selectively connected to the stage 20 at the flat area 13 as shown in Figures 26(A) and 26(C), or connected to the clamp member 24 at the flat area 13 as shown in Figure 26(B). The present invention is not limited to clamping the workpiece 100 by aligning the clamp members 24 with the stage 20 as shown in Figures 26(A) and 26(B). For example, as shown in Figures 26(C) and 26(D), the clamp members 24 may be omitted and the workpiece 100 may be clamped directly by the stage 20, or the workpiece 100 may be clamped by a mounting plate (not shown) on the stage 20. When the workpiece 100 is clamped on two or more surfaces, regardless of whether it is clamped to the clamping member 24 and / or the stage 20, the workpiece 100 can be firmly fixed and scrolling or displacement of the workpiece 100 can be prevented. The clamping member 24 and stage 20 (or the supporting plate on the stage 20) of the present invention may further optionally have a shape corresponding to the shape of the workpiece 100, for example, an arc-shaped groove 15, thereby being able to accommodate workpieces 100 having an arc-shaped contour, as shown in Figures 26(A) to 26(D). In other words, when the clamping member 24 clamps the workpiece 100, the shape of the clamping member 24 fits perfectly to the shape of the workpiece 100 (e.g., conformal attachment), which can achieve a better clamping effect and avoid scrolling or displacement of the workpiece 100 during the electric discharge machining procedure.

[0094] In another embodiment, the electrical discharge machining unit 30 of the present invention can move the discharge sections B of the multiple electrodes 32 back and forth or periodically back and forth, for example, by rotating two or more mounting members 40 back and forth or periodically back and forth. The connection between the mounting members 40 and the electrodes 32 is such that each electrode 32 encloses four mounting members 40, as in the embodiment shown in FIGS. 27(A) and 27(B). FIG. 27 is a schematic diagram showing two embodiments of the present invention in which electrodes are arranged in parallel via a plurality of mounting members. FIG. 27(A) shows that by arranging the electrodes 32 so that they are parallel along the machining direction F, the multiple electrodes 32 can sequentially perform electric discharge machining procedures on a single target machining area 110. FIG. 27(B) shows that the electrodes 32 are arranged parallel to the first direction X, so that the multiple electrodes 32 can simultaneously perform the electric discharge machining procedure on multiple target machining areas 110. These electrodes 32 share two of the four support members 40, so that both sides A of these electrodes 32 are in contact with each other and stacked, and are movably pressed together against the two shared support members 40. The remaining support members 40 are provided in pairs at different heights, so that the electrodes 32 are arranged parallel to each other with a gap between them. As a result, when the mounting members 40 rotate back and forth or periodically return to their original positions, the discharge sections B of these electrodes 32 are also displaced relative to the workpiece 100 and are positioned at different heights due to the mounting members 40 being provided in pairs at different heights. That is, the spaces are arranged to be parallel to one another. The two shared mounting members 40 rotate synchronously, for example, back and forth or periodically returning to their original positions, and have the same rotation speed, so that the electrodes 32 also move back and forth or periodically returning to their original positions along the second direction Y at the same speed.

[0095] In another embodiment, the electric discharge machining unit 30 according to the present invention moves the discharge sections B of the plurality of electrodes 32 back and forth or periodically back and forth, for example, by two bearing members 40 that rotate back and forth or periodically back and forth. 28(A) and 28(B), the setup configuration of the support members 40 and the electrodes 32 is such that both sides A of the electrodes 32 are in contact with each other in a stacked state and are movably pressed together onto the two support members 40. The discharge sections B of the electrodes 32 are arranged parallel to each other with a certain spacing therebetween by the separating columns 33. As a result, when the mounting member 40 rotates back and forth or periodically returns to its original position, the discharge sections B of these electrodes 32 are also displaced relative to the workpiece 100, separated into separating columns 33 and arranged parallel to each other. These electrodes 32 are movably pressed against the separation column 33, which is fixed in position, but may also adopt a fixed or scroll design and have limiting slots to act as directional guide columns. The separation column 33 may also be made of a conductive material, so that the electrode 32 is electrically connected to the power supply unit 34 via the separation column 33. That is, the separation column 33 can alternatively be used as the electrical contact 31 shown in FIG. On the other hand, an insulating material may be used for the separation column 33. This makes it possible to prevent the electrodes 32 from being electrically connected to each other. The two mounting members 40 rotate synchronously, for example, back and forth or periodically returning to their original positions. Because the two mounting members 40 rotate at the same speed, the electrodes 32 also move back and forth or periodically returning to their original positions along the second direction Y at the same speed.

[0096] Alternatively, as in the embodiment shown in Figures 29(A) and 29(B), the electrical discharge unit 30 may have selectively adjustable tension. For example, by relatively displacing the two support members 40 or the two holding members 50 (as shown by the two-way arrows at the bottom left and right sides of Figures 29(A) and 29(B)), for example, they can be moved toward or away from each other, thereby adjusting the tension of the electrodes 32. As shown in FIGS. 29(A) and 29(B), the electric discharge machining unit 30 further includes a tension measuring unit 60. The tension measuring unit 60 is, for example, a tension meter, and measures the tension of the electrode 32 . 29(A) and 29(B), the electric discharge machining apparatus further includes a vibration measuring unit 62. The vibration measuring unit 62 measures the vibration of the electrode 32.

[0097] As shown in FIGS. 29(A) and 29(B), the electric discharge machining unit 30 further includes a chip discharge unit 64. When the electric discharge machining unit 30 performs an electric discharge machining procedure on the workpiece 100, one or more external forces from the chip ejection unit 64 can cause the electrode 32 to apply electric discharge energy to the workpiece 100 and remove the generated residue. The direction and position of application of the external force from the chip discharge unit 64 can be adjusted in accordance with the shape of the workpiece 100 . As a result, the direction and position of application of the external force correspond to the discharge section B of the electrode 32. The chip ejection unit 64 is, for example, an air flow generator, a water flow generator, an ultrasonic generator, a piezoelectric oscillator, or a magnetic force generating element. The external force is, for example, an air flow, a water flow, an ultrasonic oscillation, a piezoelectric oscillation, an attraction force, or a magnetic force. The chip discharge unit 64 is not limited to being provided on the jig 36 and the stage 20, and may also be provided around the discharge section B of the electrode 32. For example, if the chip discharge unit 64 is an ultrasonic generator or a piezoelectric oscillator, the chip discharge unit 64 is disposed on the jig 36 and the stage 20. By directly generating and applying an external force to the jig 36 and the stage 20, the external force from the chip discharge unit 64 can further vibrate the jig 36, the workpiece 100, and the electrode 32, for example, and, by vibrating simultaneously, can achieve the effect of assisting in the removal of residues. Meanwhile, as described above, the present invention selectively performs an electric discharge machining procedure by applying electric discharge energy to the target machining area 110 of the workpiece 100 in a fluid, such as a liquid phase or a gas phase. For example, if the above-mentioned liquid or gas phase fluid contains oxygen or ozone components, the ultrasonic generator or piezoelectric oscillator in the chip discharge unit 64 of the present invention can not only vibrate the stage 20, the workpiece 100, and the electrode 32, but can also generate fine bubbles in the oxygen or ozone in the above-mentioned fluid. However, the present invention is not limited to these, and fine bubbles may be contained in a fluid by introducing bubbles containing components such as oxygen or ozone into the fluid in a liquid or gas phase. Alternatively, the present invention can selectively change the pressure difference between the inside and outside of these bubbles by using an ultrasonic generator, a piezoelectric oscillator, or a pressure difference caused by the flow rate of the fluid. This creates an implosion phenomenon that helps smooth the EDM procedure.

[0098] As shown in Figure 29 (B), the chip discharge unit 64 of the present invention can selectively adjust the direction and position of application of external force depending on the shape of the workpiece 100, thereby removing residues generated when the electrode 32 applies discharge energy to the workpiece 100. To give an example, if the chip discharge unit 64 is a water jet generator that removes residue by spraying water, the chip discharge unit 64 may have, for example, multiple nozzles 65 whose positions can be moved, and the direction of the spray can be adjusted depending on the shape of the workpiece 100. For example, when the workpiece 100 is an ingot, the multiple nozzles 65 of the chip discharge unit 64 are distributed on the arcuate surface of the ingot, and optionally on both sides of the arcuate surface of the ingot. Furthermore, the multiple nozzles 65 of the chip discharge unit 64 can further achieve the effect of dynamically adjusting the water jet according to the shape of the workpiece 100, for example, by selectively adjusting the arc shape and nozzle position according to the instantaneous depth position of the EDM. Similarly, although the above description uses the chip discharge unit 64 as an example of a water flow generator, a person skilled in the art to which the present invention relates should be able to understand how to appropriately modify the chip discharge unit 64 to achieve the effect of the dynamic water spraying design of the present invention, or the effect of dynamically adjusting the water spray according to changes in the shape of the workpiece 100, and therefore the description thereof will be omitted.

[0099] In another embodiment, as shown in FIGS. 29(A) and 29(B), the electric discharge machining unit 30 according to the present invention may further optionally include, for example, a heat source supply source 70. The heat source supply source 70 can heat part or all of the workpiece 100 by supplying a heat source to the workpiece 100 before, during, or after the electric discharge machining unit 30 performs the electric discharge machining procedure. That is, the heat source from the heat source supply source 70 can improve the efficiency of the electric discharge machining procedure by supplying energy before and during the electric discharge machining procedure, and can also provide repair, grinding, and fire suppression effects after the electric discharge machining procedure is performed. The heat source supply 70 may employ, for example, one or more of a laser unit, a microwave unit, a radio frequency unit, or an infrared light source to raise the temperature of the workpiece 100 (e.g., a solid structure), thereby reducing the brittleness of the material, reducing the roughness of the cut or thinned surface, and reducing the occurrence and propagation of unwanted cracks due to thermal shock. On the other hand, when a plurality of the same or different heat supply sources 70 are used, the temperature of the workpiece 100 can be increased, thereby increasing the absorption rate of electromagnetic energy, forming a virtuous cycle. For example, if the heat source supply 70 is a laser unit and a microwave unit, the laser energy from the heat source supply 70 (laser unit) can generate free electrons in the target processing area 110 of the workpiece 100. The generation of the free electrons allows the processing target area 110 to absorb more microwave energy from the heat source supply source 70 (microwave unit) than other areas (non-processing target areas). This allows the temperature of the processing target area 110 to increase. When the temperature is increased, the processing target area 110 can absorb more laser energy and generate more free electrons. This in turn allows the processing target area 110 to absorb more electromagnetic energy from the microwave unit (e.g., microwave or radio frequency radiation source), creating a virtuous cycle.

[0100] To put it simply, as shown in FIG. 30, the present invention employs a number of methods to move the discharge section B of the electrode 32 and the target machining area 110 of the workpiece 100 relatively along the machining direction F. In the first method, the workpiece 100 moves along the machining direction F, and the electrode 32 does not move in the machining direction F. In the second method, the electrode 32 moves along the machining direction F, and the workpiece 100 does not move in the machining direction F. In the third method, the electrode 32 and the workpiece 100 move in the direction opposite to the machining direction F.

[0101] Similarly, the present invention further employs a number of methods to move the discharge section B of the electrode 32 and the target processing area 110 of the workpiece 100 relative to each other along the second direction Y. In the first mode, the workpiece 100 moves along the second direction Y, and the electrode 32 does not move in the second direction Y. In the second mode, the electrode 32 moves along the second direction Y, and the workpiece 100 does not move in the second direction Y. In the third method, the electrode 32 and the workpiece 100 move in the direction opposite to the second direction Y. In the second method of moving the discharge section B and the target machining area 110 relative to each other along the second direction Y, the present invention further provides a method in which, for example, the jig 36 scrolls the electrode 32 back and forth or periodically returns to its original position, so that the electrode 32 moves back and forth from side to side, or moves continuously and periodically returns to its original position, or the electrode 32 is fixed to the jig 36. The base 52 moves the jig 36 back and forth from side to side along the second direction Y shown in each drawing, thereby indirectly moving the electrode 32.

[0102] However, it should be noted that the present invention is not limited to the above-mentioned movement methods for performing various EDM procedures. To illustrate with an example, the scope of the claims of the present invention also includes a case where the workpiece 100 moves along the machining direction F and the electrode 32 does not move in the machining direction F or the second direction Y, or a case where the electrode 32 moves along the machining direction F and the workpiece 100 does not move in the machining direction F or the second direction Y. That is, any movement method that can perform the electric discharge machining procedure falls within the scope of the present invention.

[0103] In addition, in the present invention, the technical means for scrolling the jig 36 so that it moves back and forth or periodically returns to its original position over the electrode 32 can adopt the embodiments shown in Figures 30 and 31, in which the electrode 32, for example, wraps around (straddles both sides of) two jigs 36 or straddles only one side of the two jigs 36. The two jigs 36 may be rotatably mounted on a base 52 . The two jigs 36 are connected to two motors 58, for example, via two couplings 55, so that the jigs 36 are rotated by the operation of the motors 58, and the electrodes 32 move back and forth or periodically return to their original positions along the second direction Y. Since the discharge section B of the electrode 32 is floating, the present invention optionally includes a tension control module 66, such as the tension measurement unit 60 and a controller 68, as shown in FIG. The tension measuring unit 60 is for measuring the tension of the electrode 32 . The controller 68 is electrically connected to the two motors 58, and controls the two motors 58 according to the tension of the electrode 32, causing the two motors 58 to rotate at the same speed to retract and release, thereby adjusting the tension of the electrode 32. This allows the electrode 32 to maintain a specified amount of tension when moving along the second direction Y. On the other hand, the present invention further provides the advantage that, for example, the time for switching the direction of rotation of the two motors 58 can be calculated based on the length and movement speed of the electrode 32, thereby enabling the electrode 32 to move back and forth.

[0104] As in the embodiment shown in FIG. 32, the electric discharge machining apparatus according to the present invention may optionally further include a direction correcting element 88. When deviation such as deflection occurs in the machining direction F of the electrode 32, the direction correcting element 88 adjusts the relative direction between the electrode 32 and the workpiece 100, thereby correcting the machining direction F between the electrode 32 and the workpiece 100. For example, the direction correcting element 88 may be, for example, a telescopic actuator (e.g., a manual or electric telescopic actuator) that can hold, for example, the stage 20, the electrode 32, or another component in the electric discharge machining apparatus that can change the relative orientation of the electrode 32 and the workpiece 100, thereby achieving the effect of adjusting the relative orientation of the electrode 32 and the workpiece 100, for example, along the first direction X. To explain this with an example, the present invention uses the detection element 89 to instantly determine whether or not a deviation has occurred in the machining direction F of the electrode 32. The detection element 89 is, for example, a discharge change detection element, or a photoelectric detection element or image detection element having a light emitter and a light receiver, and determines whether or not a deviation has occurred in the machining direction F of the electrode 32 by detecting the change in the ray of light or the intensity of the ray.

[0105] The electric discharge machining device according to the present invention has the following effects. (1) The jig is composed of at least two mounting members and at least two holding members, which are assembled correspondingly. The quick-detachable design significantly reduces the time required for electrode replacement and also allows for the adjustment of the tension of the discharge electrodes. (2) The chip removal unit allows external force to be applied to single or multiple target machining areas, and the direction and position of the external force can be dynamically adjusted according to the shape of the workpiece to remove residues generated during the EDM procedure. (3) The clamping member has multiple clamping modes, and the comb structure allows it to firmly clamp the workpiece, solving the problem of not being able to cut the overlapping area between the clamping member and the workpiece, as occurs in conventional EDM technology. The locking structure allows for detachment and adjustment. (4) The direction correcting element can correct the machining direction of the electrode and the workpiece, thereby preventing misalignment in the machining direction. (5) Forming a comb structure on the clamping member or stage promotes a smooth EDM procedure and minimizes damage. (6) The stabilizing member can reduce vibration of the electrodes, provide a guiding effect as a separation column, and can also be used as an electrical contact. (7) The heat source can reduce unwanted cracks and crack expansion caused by thermal shock, and the EDM procedure can be carried out smoothly. (8) The conductive gain layer can improve electrical contact with the clamping member or stage of the workpiece. (9) The adhesive layer can prevent the workpiece from vibrating during the EDM process and prevent burrs from being generated before the EDM process is completed. The conductive adhesive layer can electrically connect the workpiece to the clamping member or stage.

[0106] The foregoing description is by way of example only and is not limiting. Any equivalent modifications or variations thereto that do not depart from the spirit and scope of the present invention are intended to be encompassed within the scope of the appended claims. [Explanation of symbols]

[0107] 10 Electrical discharge machining equipment 11 Comb structure 11' comb structure 13 Plane area 15 Arc-shaped groove 20 stages 21 Mounting board 22 Stabilizing member 23 Plate 24 Clamping member 25 Conductive frame 26 Adhesive layer 27 Cushioning material 28 Contact surface 29 Comb opening 29' comb opening 30 Electrical Discharge Machining Unit 31 Electrical contacts 32 electrodes 33 Separation column 34 Power Supply Unit 34' Separate power supply unit 35 Connection structure 36 Jig 40 Mounting member 41 Shaft hole 42 Limited Slots 43 Through slot 44A 1st seat 44B Second seat 45 through holes 46 Accessory parts 47 Chamfering 50 holding member 52 Pedestal 53 Bump 54 Conductive structure 55 Coupling 56 Insulation structure 57 Groove structure 58 Motor 59 volts 60 Tension measurement unit 62 Vibration Measurement Unit 64 Chip Discharge Unit 65 nozzles 66 Tension Control Module 68 Controller 70 Heat source supply source 88 Direction Correction Element 89 Detector Element 90 Conductive Gain Layer 100 Processing object 110 Machining target area 120 Machining groove 124 Filling material 126 Tape 281 Guide groove 240 Locking Structure 242 volts 243 Snap-in structure 244 Nut 246 Snap-in Block 248 snap-in holes A Both sides B Discharge category D interval H Depth h depth X first direction Y Second direction Z third direction F Machining direction P1 First power supply P2 Second power supply

Claims

1. a stage for placing at least one workpiece; an electric discharge machining unit for performing an electric discharge machining procedure on a target machining area of ​​the workpiece on the stage along a machining direction; At least The electric discharge machining unit includes: at least one electrode; a jig configured by assembling at least two mounting members and at least two holding members corresponding to each other, wherein both sides of the electrode are pressed against the two mounting members, respectively, so that the discharge section of the electrode is in a floating state, and the jig extends along a second direction perpendicular to the first direction; a power supply unit that, in the electric discharge machining procedure, applies discharge energy to the target machining area of ​​the workpiece via the discharge section of the electrode by supplying a first power source to the electrode and the workpiece, and when the electric discharge machining unit performs the electric discharge machining procedure along the machining direction, the discharge section of the electrode and the target machining area of ​​the workpiece move relatively along the second direction; Equipped with the stage further includes a clamp member, the clamp member being for fixing the workpiece; 10. An electric discharge machining apparatus, wherein the clamping member has two plates, and at least one of the two plates has a comb structure.

2. 2. The electric discharge machining apparatus according to claim 1, wherein the discharge section of the electrode and the target machining area of ​​the workpiece move relatively along the second direction, either reciprocatingly or periodically returning to their original positions.

3. 3. The electric discharge machining apparatus according to claim 2, wherein the two carrying members and the two holding members move back and forth or periodically return to their original positions together with the electrode, thereby allowing the electrode to apply the electric discharge energy to the workpiece in the electric discharge section.

4. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit adjusts the tension of the electrode by relatively displacing the two rest members or the two holding members.

5. 3. The electric discharge machining apparatus according to claim 2, further comprising a stabilizing member for stabilizing movement of the electrode relative to the workpiece.

6. 2. The electric discharge machining apparatus according to claim 1, wherein the electrode is linear or plate-shaped.

7. The electric discharge machining apparatus according to claim 1 , wherein the stage moves along the first direction, the second direction, or the machining direction.

8. 2. The electric discharge machining apparatus according to claim 1, wherein the stage rotates around an axis that is the first direction, the second direction, or the machining direction.

9. 2. The electric discharge machining apparatus according to claim 1, further comprising a chip ejection unit, wherein when the electric discharge machining unit performs the electric discharge machining procedure on the workpiece, the chip ejection unit provides an external force to remove residues generated when the electrode applies the electric discharge energy to the workpiece.

10. 10. The electric discharge machining apparatus according to claim 9, wherein the direction and position of application of the external force from the chip discharge unit are dynamically adjusted according to the shape of the workpiece to remove the residue.

11. 2. The electric discharge machining apparatus according to claim 1, further comprising a tension measuring unit, the tension measuring unit being for measuring the tension of the electrode.

12. 2. The electric discharge machining apparatus according to claim 1, further comprising a vibration measuring unit, the vibration measuring unit being for measuring vibration of the electrode.

13. 2. The electric discharge machining apparatus according to claim 1, wherein the power supply unit of the electric discharge machining unit further supplies a second power source to the electrode, thereby applying a DC power source or a radio frequency to the electrode.

14. 2. The electric discharge machining apparatus according to claim 1, wherein the workpiece has a flat area, and the flat area is connected to the stage or the clamping member.

15. 2. The electric discharge machining apparatus according to claim 1, wherein the shape of said clamping member corresponds to the shape of said workpiece.

16. 2. The electric discharge machining apparatus according to claim 1, wherein the stage has a comb structure.

17. 16. The electric discharge machining apparatus according to claim 1, wherein the stage is connected to the clamp member via a locking structure.

18. 16. The electric discharge machining apparatus according to claim 1, 14 or 15, wherein the two plates of the clamping member are connected to each other via a snap-in structure.

19. 16. The electric discharge machining apparatus according to claim 1, wherein the clamping member and the workpiece have two or more contact surfaces.

20. 16. The electric discharge machining apparatus according to claim 1, wherein the stage or the clamping member is connected to the workpiece by an adhesive layer.

21. 21. The electric discharge machining apparatus according to claim 20, wherein the adhesive layer is provided on the stage or the clamp member in a discontinuous form.

22. 21. The electric discharge machining apparatus according to claim 20, wherein the adhesive layer is a conductive adhesive.

23. 2. The electric discharge machining device according to claim 1, wherein the clamping member is pressed against one side of the workpiece along the axial direction, and two groove walls of a machining groove formed in the target machining area of ​​the workpiece by the electric discharge energy are bonded together by an adhesive layer.

24. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit performs the electric discharge machining procedure on the workpiece and the clamp member on the stage along the machining direction.

25. 2. The electric discharge machining apparatus according to claim 1, wherein the clamping member clamps a buffer member, the buffer member being fixed to the workpiece via a conductive adhesive layer, and the electric discharge machining unit performs the electric discharge machining procedure on the workpiece on the stage along the machining direction.

26. 2. The electric discharge machining apparatus according to claim 1, wherein the clamping member clamps a conductive frame to fix the workpiece, and the electric discharge machining unit performs the electric discharge machining procedure on the workpiece on the stage along the machining direction.

27. 2. The electric discharge machining apparatus according to claim 1, wherein the stage, the clamping member, or the workpiece further comprises a conductive gain layer, and the conductive gain layer improves electrical contact between the workpiece and the stage, or between the workpiece and the clamping member.

28. 10. The electric discharge machining apparatus of claim 1, further comprising a heat source supply, the heat source supplying heat to the workpiece before, during, or after the electric discharge machining procedure.

29. 2. The electric discharge machining apparatus according to claim 1, wherein the two mounting members each have a plate-like structure or a sleeve structure.

30. 2. The electric discharge machining apparatus according to claim 1, wherein the two support members each comprise a first sheet and a second sheet, and the electrode is clamped between the first sheet and the second sheet.

31. 2. The electric discharge machining apparatus according to claim 1, wherein the two mounting members each have a through slot, the two holding members each have a bump corresponding to the through slot, and the two mounting members are assembled with the through slot corresponding to the bump of the two holding members.

32. 2. The electric discharge machining apparatus according to claim 1, wherein the two mounting members each have a through hole, the two holding members each have a threaded hole, and the two mounting members are mounted using bolts that are inserted through the through holes and screwed into the threaded holes of the two holding members.

33. 2. The electric discharge machining apparatus according to claim 1, wherein the two holding members each have a groove structure, and the two mounting members are assembled to correspond to the two holding members by being inserted into the groove structures of the two holding members.

34. 2. The electric discharge machining apparatus according to claim 1, wherein the two holding members each have a conductive structure, thereby electrically connecting to the electrodes pressed against the two mounting members.

35. 2. The electric discharge machining apparatus according to claim 1, wherein the two holding members simultaneously fix the two mounting members and the electrode.

36. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining unit further comprises an attachment member, the attachment member being connected to the electrode at edges of the two mounting members.

37. 37. The electric discharge machining apparatus according to claim 36, wherein the accessory member is electrically connected to the first power source or the second power source of the power supply unit.

38. 2. The electric discharge machining apparatus according to claim 1, wherein the head and tail of the electrode are connected to the same one or both of the two mounting members, respectively.

39. 2. The electric discharge machining apparatus according to claim 1, wherein the edges of the two mounting members are chamfered.

40. 2. The electric discharge machining apparatus according to claim 1, wherein the workpiece placed on the stage is a semiconductor ingot or a wafer.

41. 2. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining apparatus cuts or grinds the workpieces placed on the stage sequentially or simultaneously in the electric discharge machining procedure.

42. 2. The electric discharge machining apparatus according to claim 1, wherein the workpiece is formed by electrically bonding a plurality of workpieces.

43. 2. The electric discharge machining device according to claim 1, wherein a machining groove is formed in the target machining area of ​​the workpiece by the electric discharge energy, and a filler material is filled in the machining groove.

44. 2. The electric discharge machining device according to claim 1, wherein a machining groove is formed in the target machining area of ​​the workpiece by the discharge energy, and tape is attached to both sides of the machining groove of the workpiece to reduce a wobbling phenomenon in the target machining area of ​​the workpiece.

45. The electric discharge machining apparatus according to claim 1 , wherein the electric discharge machining procedure applies the electric discharge energy to the target machining area of ​​the workpiece in a fluid.

46. 46. ​​The electric discharge machining apparatus according to claim 45, wherein the fluid contains an ozone or oxygen component.

47. 46. ​​The electrical discharge machining apparatus of claim 45, wherein the fluid contains bubbles.

48. 48. The electric discharge machining apparatus according to claim 47, wherein the bubble undergoes an implosion phenomenon due to a pressure difference between the inside and outside of the bubble during the electric discharge machining procedure.

49. 48. The electric discharge machining apparatus according to claim 47, wherein the bubbles contain an ozone or oxygen component.

50. 46. ​​The electric discharge machining apparatus according to claim 45, wherein the fluid is an electrolyte.

51. The electric discharge machining apparatus according to claim 1 , wherein the electric discharge machining procedure applies the electric discharge energy to the target machining area of ​​the workpiece in a vacuum environment.

52. 2. The electric discharge machining apparatus according to claim 1, further comprising an ultrasonic generator or a piezoelectric oscillator for oscillating the stage, the workpiece, or the electrode.

53. 46. ​​The electric discharge machining apparatus according to claim 45, further comprising an ultrasonic generator or a piezoelectric oscillator for oscillating the stage, the workpiece, the electrode, or the fluid.

54. 2. The electric discharge machining apparatus according to claim 1, wherein the number of the electrodes is plural, and the electrodes are arranged so as to be parallel to each other along the first direction.

55. 2. The electric discharge machining apparatus according to claim 1, further comprising a direction correcting element, the direction correcting element being configured to adjust the relative direction of the electrode and the workpiece to correct the machining direction when a deviation phenomenon occurs in the machining direction of the electrode.

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