Substrate storage container

Abstract

To provide a substrate housing container capable of suppressing lifting and falling off of a reticle housing container mounted on an adapter in a container body, and preventing damage to a reticle in the reticle housing container.SOLUTION: A FOUP includes a container body 1 capable of storing a plurality of semiconductor wafers vertically, a lid fitted to the open front of the container body 1, and an adapter 40 that mounts a reticle storage container stored in the container body 1, a pair of support pieces 2 capable of supporting the semiconductor wafers horizontally is installed on both sides of the interior of the container body 1, the plurality of pairs of support pieces 2 is arranged at predetermined intervals in the vertical direction, the adapter 40 is formed in a disc supported by the pair of support pieces 2 of the container body 1, a plurality of positioning bars 43 that positions the reticle storage container is arranged on a mounting surface 41 of the adapter 40, and a part of the plurality of positioning bars 43 rotatably supports a clamp 50 that locks and fixes the reticle storage container.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a substrate storage container that can store not only semiconductor wafers but also reticle storage containers for reticles. [Background technology]

[0002] In the lithography process of a semiconductor manufacturing line, multiple reticles are used to form electronic circuits on semiconductor wafers, but the number of semiconductor wafers and reticles that can be transported at one time differs, and multiple reticles must be transported multiple times to form electronic circuits on a single semiconductor wafer, which can hinder improvements in semiconductor wafer transport efficiency. Furthermore, substrate storage containers for semiconductor wafers and containers for reticles differ in size and transport form, requiring separate transport lines, which necessitates the installation of multiple transport lines, resulting in problems in terms of equipment, costs, space occupation, etc.

[0003] To solve these problems, a technology has been proposed in the past (not shown) in which a reticle storage container for reticles is stored in the container body of a substrate storage container for semiconductor wafers via a dedicated adapter, and the reticle storage containers are transported using a single type of substrate storage container (see Patent Documents 1, 2, 3, and 4). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 7-58192 [Patent Document 2] Japanese Patent Application Laid-Open No. 2011-3723 [Patent Document 3] Japanese Patent Application Laid-Open No. 2013-239507 [Patent Document 4] Japanese Patent Application Laid-Open No. 2013-239643 Summary of the Invention [Problem to be solved by the invention]

[0005] When a reticle container is stored in a substrate container for semiconductor wafers via a dedicated adapter, it is possible to improve the efficiency of transporting semiconductor wafers and to solve problems such as equipment, costs, and space occupation. However, if the reticle container is simply mounted on the adapter, the reticle container may float up and become misaligned or fall off the adapter, which may result in damage to the reticle inside the reticle container.

[0006] The present invention has been made in consideration of the above, and aims to provide a substrate storage container that can prevent a reticle storage container mounted on an adapter inside the container body from floating up or falling off, thereby eliminating the risk of damage to the reticle inside the reticle storage container. [Means for solving the problem]

[0007] In order to solve the above problems, the present invention provides a container comprising a container body capable of storing a plurality of semiconductor wafers arranged vertically, a lid body detachably fitted to the open front surface of the container body, and an adapter for mounting a reticle storage container stored in the container body, A pair of support pieces capable of supporting the semiconductor wafers substantially horizontally are provided facing each other on both sides inside the container body, and a plurality of pairs of support pieces are arranged at predetermined intervals in the vertical direction; The adapter is supported by a pair of support pieces inside the container body. The adapter is formed into a substantially plate-like shape, and a front portion located on the front side of the container body of the adapter is linearly cut out. A front positioning member adjacent to the front peripheral portion of the reticle container, a rear positioning member adjacent to the rear peripheral portion of the reticle container, and a pair of side positioning members adjacent to the side peripheral portions of the reticle container are arranged at a predetermined interval on the mounting surface of the adapter on which the reticle container is mounted. At least the front positioning member of the front positioning member and the pair of side positioning members rotatably supports a clamp member that engages with the peripheral portion of the reticle container from above. The rear positioning member is formed into a substantially inverted L-shaped cross section, and is divided into an upright portion that faces the rear peripheral portion of the reticle container from the side and a locking covering portion that is detachably screwed to the upright portion via a fastener and engages with the rear peripheral portion of the reticle container from above. It is characterized by the following.

[0008] In addition, At least one of the adapter, the front positioning member, the rear positioning member, the pair of side positioning members, and the clamp member, It can be molded using a molding material containing resin and conductive filler.

[0010] Here, the semiconductor wafers in the claims include silicon wafers with a diameter of at least 300 mm or 450 mm. At least a portion of the container body or lid may be transparent, opaque, or translucent. A stopper for the semiconductor wafer or adapter may be formed on at least the front of the surface of the support piece of the container body. The reticle storage container may be a box-shaped, flat polygonal container capable of storing 5- to 7-inch reticles, or a cassette-type container.

[0011] The adapter can be formed into a suitable shape such as a circular, elliptical, rectangular, polygonal, or square shape in plan view. Also, the clamping member The term "rotation" includes rotation and swing. The "approximately inverted L-shaped cross section" of the rear positioning member includes both an inverted L-shaped cross section and similar shapes that are roughly recognized as an inverted L-shaped cross section (for example, an inverted J-shaped cross section or an inverted Γ-shaped cross section). Furthermore, although the substrate storage container is primarily a FOUP for semiconductor factories, it may also be a FOSB for shipping and transportation.

[0012] According to the present invention, when a reticle container is stored in the container body of a substrate storage container via an adapter, first, an adapter is prepared, and the reticle container is fitted and positioned between the positioning members on the mounting surface of the adapter. After fitting and positioning the reticle container, the clamp members of the adapter are engaged with the reticle container to prevent the reticle container from floating up. The adapter is then placed inside the container body, and both sides of the adapter are supported by a pair of opposing support pieces of the container body. The lid is then fitted onto the open front of the container body, whereby the reticle container can be stored in the container body via the adapter, allowing for safe storage and transportation of the reticle container. [Effects of the Invention]

[0013] According to the present invention, it is possible to prevent the reticle container mounted on the adapter inside the container body from floating up or falling off, thereby eliminating the risk of damage to the reticle inside the reticle container. Furthermore, since the front portion of the adapter located on the front side of the container body is cut out linearly, it is easy to specify the position and orientation. Furthermore, since the mounting surface of the adapter is provided with a front positioning member adjacent to the front peripheral portion of the reticle container, a rear positioning member adjacent to the rear peripheral portion of the reticle container, and a pair of side positioning members adjacent to the side peripheral portions of the reticle container, all spaced at predetermined intervals, it is possible to position the reticle container by surrounding most of it except for the four corners. Furthermore, at least the front positioning member of the pair of side positioning members rotatably supports a clamp member that engages the peripheral edge of the reticle container from above, effectively preventing the reticle container from floating up and becoming misaligned or falling off the adapter. Furthermore, since the rear positioning member is not a single unit but is comprised of a disassembled upright portion and a locking covering portion, assembly of the rear positioning member is facilitated. Furthermore, since the rear peripheral portion of the reticle container mounted on the mounting surface of the adapter is positioned and locked to the rear positioning member, it is possible to prevent the reticle container from shifting in the front-to-rear direction of the adapter and also to prevent the rear portion of the reticle container from floating up and becoming misaligned or falling off the adapter.

[0014] According to the invention described in claim 2, At least one of the adapter, the front positioning member, the rear positioning member, the pair of side positioning members, and the clamp member, Since it is molded from a molding material containing resin and conductive filler, it is possible to impart conductivity and prevent electrostatic damage to the reticle. [Brief explanation of the drawings]

[0016] [Figure 1] 1 is an overall perspective view schematically showing an embodiment of a substrate storage container according to the present invention. [Figure 2] 1 is a cross-sectional explanatory view schematically showing a plurality of adapters stored in a container body in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 3] 1 is a perspective view illustrating a reticle storage container mounted on an adapter in an embodiment of a substrate storage container according to the present invention; FIG. [Figure 4] 1A and 1B are explanatory views schematically showing a reticle storage container in an embodiment of a substrate storage container according to the present invention, in which FIG. 1A is a plan view and FIG. 1B is a side view. [Figure 5] 10A and 10B are explanatory views schematically showing a state in which a reticle storage container is mounted on an adapter in the embodiment of the substrate storage container according to the present invention. [Figure 6] 10 is a main part explanatory view schematically showing a rear positioning bar of an adapter in an embodiment of a substrate storing container according to the present invention. FIG. [Figure 7] FIG. 10 is an exploded perspective view schematically showing the relationship between an adapter, a plurality of positioning bars, and a plurality of clamps in an embodiment of a substrate storing container according to the present invention. [Figure 8] 10 is a perspective view of a main part, schematically showing a state in which a clamp is engaged with a peripheral edge portion of a reticle storage container in an embodiment of a substrate storage container according to the present invention. FIG. [Figure 9] FIG. 10 is a perspective explanatory view schematically showing the relationship between a container body and an adapter in a substrate storing container according to a second embodiment of the present invention. [Figure 10] FIG. 11 is a perspective explanatory view schematically showing the relationship between a container body and an adapter in a substrate storing container according to a third embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0017] A preferred embodiment of the present invention will now be described with reference to the drawings. As shown in FIGS. 1 to 8, the substrate storage container in this embodiment is a FOUP for use in a semiconductor factory, comprising a container body 1 capable of storing multiple semiconductor wafers W, a lid 10 that fits onto the open front of the container body 1, and an adapter 40 for mounting reticle storage containers, the required number of which are stored in the container body 1 instead of the semiconductor wafers W. A plurality of positioning bars 43 for positioning the reticle storage container 30 are arranged on a mounting surface 41 of the adapter 40 on which the reticle storage container 30 is mounted, and clamps 50 that can be engaged with the reticle storage container 30 are supported by the plurality of positioning bars 43, thereby contributing to the achievement of Goal 9 of the SDGs (the United Nations' International Goals for Sustainable Development, consisting of 17 global goals and 169 targets (achievement criteria)) adopted at the United Nations Summit.

[0018] As shown in FIG. 1, the semiconductor wafers W are round silicon wafers, for example, 300 mm in diameter, and 25 of them are stored in a vertically aligned arrangement inside the container body 1, with each semiconductor wafer W supported horizontally.

[0019] The container body 1 and the lid 10 are formed by assembling a plurality of parts that are each injection-molded from a molding material containing a predetermined resin. Examples of the resin used for this molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, and liquid crystal polymer, as well as alloys of these. To impart conductivity to the thermoplastic resin, an appropriate amount of carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, metal oxide, or the like is added.

[0020] 1 and 2, the container body 1 is formed as a tall, front-open box with a horizontally elongated opening at the front, and a pair of support pieces 2 that horizontally support the peripheral side portions of the semiconductor wafers W from below are provided opposite each other on both sides of the interior, in other words, on the inner surfaces of both left and right side walls, and a plurality of pairs of support pieces 2 are arranged vertically at a predetermined interval. This container body 1 is formed to a size that can store, for example, 25 semiconductor wafers W lined up vertically. Furthermore, each support piece 2 is formed, for example, as a flat shelf plate extending in the front-to-rear direction of the container body 1, and a stopper 3 that prevents the stored semiconductor wafers W from shifting position in the front direction is formed as a raised, integral part on at least the front of the front and rear portions of the surface.

[0021] A bottom plate 4 is selectively attached to the underside of the bottom plate of the container body 1, and a flat, rectangular robotic flange 5, which is a carrier for automatic transportation, is detachably attached to the center of the ceiling of the container body 1. This robotic flange 5 is gripped and suspended by a ceiling transport device in a semiconductor factory, and then transported along the semiconductor production line. In addition, a plurality of rear supports are arranged side by side on the inner rear surface of the container body 1, which can clamp the rear peripheral portion of the semiconductor wafer W in an emergency. The front peripheral portion of the container body 1 is bent outward in the width direction and bulged, and locking holes 6 for the lid 10 are recessed and formed on both upper and lower sides of the inner surface of this front peripheral portion.

[0022] An operating handle 7 for manual operation is removably attached to the outer surface of each side wall of the container body 1, and a conveying rail 8, which is an automatic conveying device, is removably attached to the bottom of each side wall as needed and is oriented horizontally in the front-to-back direction.

[0023] 1, the lid body 10 comprises a lid body 11 having a generally dish-shaped cross section that is detachably fitted to the front of the container body 1, and a cover plate 14 that covers the open surface of the lid body 11, with a locking mechanism 16 built in between the lid body 11 and the cover plate 14. The lid body 11 is formed in a generally rectangular shape that is long from side to side, and a front retainer 12 that resiliently holds the front peripheral portion of the semiconductor wafer W with an elastic piece is detachably attached to the center of the back surface. A frame-shaped gasket that is pressed against and deformed on the inner periphery of the front of the container body 1 is fitted to the peripheral wall of the lid body 11, and holes 13 for the locking mechanism 16 are drilled through both upper and lower sides of the peripheral wall of the lid body 11.

[0024] The cover plate 14 is formed from a transparent, translucent, or opaque plate, and has operation holes 15 for the locking mechanism 16 drilled through both sides, and a rotatable operation key of the lid opening and closing device passes through each operation hole 15 from the outside.

[0025] As shown in Figure 1, the locking mechanism 16 is composed of a pair of left and right rotating plates 17 that are rotated by an operating key of the lid body opening and closing device that passes through the operating hole 15 of the cover plate 14, a plurality of slide bars 19 that slide up and down in response to the rotation of each rotating plate 17, and a plurality of retractable locking claws 20 that are connected and supported by a connecting shaft at the tip of each slide bar 19, pass through the retractable holes 13 in the peripheral wall of the lid body, and engage with the locking holes 6 of the container body 1.

[0026] The locking mechanism 16 is molded from the same molding material as the container body 1 and the lid body 10. The multiple rotating plates 17 and slide bars 19 are pivotally supported or supported via support ribs provided within the lid body 11, and the ends of the slide bars 19 are loosely fitted via pins into a pair of arc-shaped grooves 18 near the periphery of each rotating plate 17. Each locking claw 20 is bent, for example, into a roughly L-shaped cross section, and a friction-reducing roller is rotatably supported at its free end.

[0027] In such a substrate storage container, a plurality of semiconductor wafers W are sequentially stored in the container body 1, and the lid 10 is press-fitted into the front of the container body 1 by a lid opening / closing device, while a front retainer 12 holds the front peripheral portion of each semiconductor wafer W, and a locking mechanism 16 is operated to lock the lid opening / closing device to firmly secure the lid 10. Once the lid 10 is firmly secured, the robotic flange 5 of the container body 1 is suspended from an overhead transport device in a semiconductor factory and transported to the next processing step, where each semiconductor wafer W is processed and treated in sequence, and electronic circuits are formed on the surfaces of the semiconductor wafers W.

[0028] 3 to 5, reticle storage container 30 is a reticle SMIF pod (RSP) that includes, but is not limited to, a flat rectangular bottom plate 31 that can store one 6-inch reticle and be mounted on adapter 40, and a flat, approximately rectangular top lid 32 that is detachably fitted to bottom plate 31 from above via a seal gasket. From the standpoint of preventing damage to the reticle due to static electricity, bottom plate 31 and top lid 32 of reticle storage container 30 are each molded from a predetermined molding material containing a conductive material such as carbon (for example, various synthetic resins such as polycarbonate resin, polybutylene terephthalate resin, polyacetal resin, polyether ether ketone resin, etc.).

[0029] The bottom plate 31 comprises opposing, generally rectangular upper and lower plates, with a gap defined between them, into which a locking mechanism is built. A pair of support members are spaced apart on the upper surface of the upper plate to horizontally support the peripheral edge of a single reticle, each support member being formed into a rail, and an elastically deformable, flat, frame-shaped seal gasket is attached near the peripheral edge of the upper surface of the upper plate.

[0030] Top cover 32 is, for example, transparent or translucent and formed with a generally hat-shaped cross section, and when fitted to bottom plate 31, a flange that protrudes horizontally outward in the width direction presses and deforms a seal gasket to ensure sealing. A pair of holding members that contact and hold the upper peripheral edge of the reticle are provided opposite and spaced apart on the interior ceiling of top cover 32, and each holding member is formed, for example, as a rail and faces the support member from above.

[0031] The flange protruding outward in the width direction of the top cover 32 has its peripheral edge 33 bent downward at a short angle so as to face the peripheral surface of the bottom plate 31, and the inner surface of this edge has locking grooves formed therein to fit into the tips of the retractable bars of the locking mechanism. In addition, a transport flange 34 is attached to the outer ceiling of the top cover 32 so as to be gripped by a transport device or the like.

[0032] Examples of reticle storage containers 30 include RSP-150, RSP-200 (product names manufactured by Dainichi Shoji Co., Ltd.), reticle cases (product names manufactured by Nagase Engineering Co., Ltd.), and reticle cassettes (product names manufactured by Sanyo Materials Co., Ltd.).

[0033] 2, 3, 5 to 8, the adapter 40 is molded in a generally plate-like shape that is supported by a pair of support pieces 2 inside the container body 1, and has a flat upper mounting surface 41 on which the reticle container 30 is mounted, on which a plurality of positioning bars 43 are arranged that surround most of the reticle container 30 except for the four corners, and a plurality of clamps 50 that engage with the reticle container 30 are rotatably supported on some of the positioning bars 43. The adapter 40 is molded from a predetermined molding material into a disk that is basically thick and large enough to be inserted between adjacent support pieces 2 of the container body 1, and a front portion 42 located on the front side of the container body 1 is cut out linearly in the left-right direction in order to indicate the positioning direction, and both side portions are supported horizontally by the pair of support pieces 2 of the container body 1.

[0034] Examples of the molding material for adapter 40 include lightweight synthetic resins such as polypropylene resin, polycarbonate resin, polybutylene terephthalate resin, polyacetal resin, and polyether ether ketone resin, which are excellent in chemical resistance, abrasion resistance, impact resistance, and versatility, as well as thermoplastic elastomers such as polyester, polystyrene, and polyolefin. To impart conductivity to the molding material and prevent electrostatic breakdown of the reticle, an appropriate amount of carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, metal oxide, or the like is preferably added.

[0035] The adapter 40 is formed to be, for example, approximately the same size as the semiconductor wafer W, and a plurality of positioning bars 43 are screwed near the periphery of the mounting surface 41 at intervals to define a planar rectangular mounting area 49 on the upper lid periphery 33 of the reticle container 30 for positioning the reticle closely from the front, rear, left, and right, and each positioning bar 43 is formed in a planar shape such as a semicircle. The positioning bars 43 are molded from the same molding material as the adapter 40, and an appropriate amount of carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, metal oxide, or the like is preferably added to this molding material to impart conductivity and prevent electrostatic damage to the reticle.

[0036] As shown in Figures 3, 5, and 7, the multiple positioning bars 43 include a front positioning bar 44 that positions the reticle storage container 30 close to the front peripheral edge of the top lid 32, a rear positioning bar 45 that positions the reticle storage container 30 close to the rear peripheral edge of the top lid 32, and a pair of left and right side positioning bars 48 that position the reticle storage container 30 close to both sides of the peripheral edge, with gaps formed between these bars 44, 45, and 48, and the rear positioning bar 45 is bent to have a slightly taller cross section that is approximately inverted L-shaped.

[0037] Of the multiple positioning bars 43, the rear positioning bar 45 is divided into a block-shaped upright portion 46 that faces and is close to the rear peripheral edge of the top cover 32 from the side, as shown in Figures 5 and 6, and an L-shaped locking covering portion 47 that is detachably attached to the upright portion 46 via multiple fasteners such as screws and locks onto the rear peripheral edge of the top cover 32 from above, as shown in Figures 5 and 6, and performs a locking function in addition to a positioning function.

[0038] 3, 5, 7, and 8, the multiple clamps 50 (three in this embodiment) are supported via bolts 52 at the center of the front positioning bar 44 and the pair of side positioning bars 48, respectively, and rotate horizontally. Each clamp 50 is molded in a roughly inverted L-shape from the same molding material as the adapter 40 and positioning bar 43, and functions to lock its long piece from above onto the upper lid rim 33 of the reticle container 30 to prevent it from lifting up in the Z direction, or to release the locking of the long piece to enable removal of the reticle container 30.

[0039] To prevent electrostatic damage to the reticle, an appropriate amount of carbon black, carbon fiber, carbon nanofiber, carbon nanotube, conductive polymer, metal fiber, metal oxide, or the like is preferably added to the molding material of clamp 50. Furthermore, bolt 52 is made of, but is not limited to, a high-performance polyether ether ketone resin with excellent heat resistance, mechanical properties, and the like, and is threaded into short-side cylindrical portion 51 of clamp 50 from above.

[0040] In the above configuration, when a reticle storage container 30 containing a reticle is stored in the container body 1 of the substrate storage container via the adapter 40, the adapter 40 is first prepared and the long pieces of the multiple clamps 50 are oriented in the longitudinal direction of the positioning bar 43 (see Figure 5), the rear of the tilted reticle storage container 30 is brought into contact with the mounting surface 41 of the adapter 40, the reticle storage container 30 is slid rearward until the rear peripheral edge of its upper lid 32 is engaged with the engaging covering portion 47 of the rear positioning bar 45, and the reticle storage container 30 is inserted into the mounting area 49 between the front positioning bar 44, the rear positioning bar 45, and the pair of side positioning bars 48 to position it.

[0041] After the reticle storage container 30 is inserted and loaded, the long pieces of each clamp 50 are rotated toward the center of the adapter 40 (see FIG. 8), and the long pieces of the clamps 50 are engaged with the peripheral edge 33 of the reticle storage container 30 to prevent the reticle storage container 30 from floating up in the Z direction (see FIG. 3). Multiple adapters 40 are then sequentially placed into the empty container body 1, with both sides supported by the pair of opposing support pieces 2 of the container body 1, and the position and orientation of the adapters 40 are stabilized. Then, the lid 10 is press-fitted into the open front of the container body 1, thereby safely storing the reticle storage container 30 via the adapters 40 in the container body 1. At this time, it is preferable to leave a gap between the adapters 40 so that the reticle storage container 30 does not collide with the underside of the adapter 40.

[0042] With the above configuration, not only is the reticle container 30 stably mounted on the mounting surface 41 of the adapter 40, but the clamps 50 are also engaged with the peripheral edge 33 of the reticle container 30, so that even if an external force is applied due to a collision with a substrate container, the reticle container 30 is effectively prevented from floating up from the adapter 40, becoming misaligned in the Z direction, rattling, or falling off. This can be expected to significantly prevent damage to the reticles inside the reticle container 30. Furthermore, since the adapter 40, the positioning bars 43, and the clamps 50 are each molded from a molding material containing resin and conductive filler, the conductivity provided prevents electrostatic damage to the reticles.

[0043] Furthermore, since the upright portion 46 of the rear positioning bar 45 is positioned close to the rear peripheral portion of the reticle storage container 30 mounted on the mounting surface 41 of the adapter 40 and the locking cover 47 of the rear positioning bar 45 is locked, it is possible to prevent the reticle storage container 30 from shifting in the front-to-rear direction of the adapter 40 and also to prevent the rear portion of the reticle storage container 30 from floating up and becoming misaligned, rattling, or falling off the adapter 40. Furthermore, since the rear positioning bar 45 is constructed by assembling the separate upright portion 46 and locking cover 47, even rear positioning bars 45 with complex shapes can be easily assembled and used.

[0044] 9 shows a second embodiment of the present invention, in which a clamp 50 that can rotate horizontally and laterally is supported at the center of the front positioning bar 44 via a bolt 52. The other parts are the same as those in the above embodiment, so a description thereof will be omitted. In this embodiment, the same effects as those of the above embodiment can be expected, and furthermore, since the clamps 50 of the side positioning bars 48 are omitted, it is clear that a significant reduction in the number of parts can be expected.

[0045] 10 shows a third embodiment of the present invention, in which a pair of left and right clamps 50 that can rotate horizontally and laterally are supported on the front positioning bar 44 via bolts 52. The other parts are the same as those of the above embodiment, so a description thereof will be omitted. This embodiment is expected to have the same effects as the above embodiment, and furthermore, it is expected to reduce the number of parts by omitting the clamps 50 on each side positioning bar 48. Furthermore, since a pair of clamps 50 is used, even if one clamp 50 comes loose, the other clamp 50 can reliably prevent the reticle container 30 from shifting position, rattling, falling off, etc.

[0046] In the above embodiment, the adapter 40, the plurality of positioning bars 43, and the plurality of clamps 50 are molded from a molding material containing resin and conductive filler, but at least one of these may be molded from a molding material containing resin and conductive filler. Also, notches may be formed on the periphery of both sides of the underside of the adapter 40 near the stoppers 3 of the support pieces 2 so as to be thinner than the other parts, and each notch may be brought into contact with the stoppers 3 of the support pieces 2 to prevent the adapter 40 from shifting in position in the front-to-rear direction, particularly in the front direction, or from rattling.

[0047] Alternatively, a plurality of mounting holes for the positioning bars 50 may be drilled in the radial direction of the adapter 40, and the positioning bars 50 may be selectively screwed into the mounting holes depending on the size of the reticle storage container 30. In addition, in the above embodiment, of the front positioning bar 44 and the pair of side positioning bars 48 of the adapter 40, the clamps 50 are supported by at least the front positioning bar 44, but it is also possible to rotatably support the required number of clamps 50 only on the pair of side positioning bars 48. Furthermore, if no particular obstacle is caused, a plurality of clamps 50 may be rotatably supported on the mounting surface 41 of the adapter 40.

[0048] Furthermore, by forming a required number of projections and recesses on the mounting surface 41 of the adapter 40, a gap can be formed between the adapter 40 and the bottom surface of the reticle container 30, facilitating the attachment and detachment of the reticle container 30. Alternatively, shallow holes or the like for the reticle container 30 can be selectively drilled in the mounting surface 41 of the adapter 40. Furthermore, by tilting the upright surface of the locking cover 47 of the rear positioning bar 45 facing the reticle container 30, the upward tilt angle of the reticle container 30 can be increased, facilitating the detachment of the reticle container 30. Furthermore, by imparting flexibility or springiness to each positioning bar 43, the reticle container 30 can be brought into close contact with the peripheral edge 33 of the reticle container 30, preventing the reticle container 30 from shifting or falling off. [Industrial Applicability]

[0049] The substrate storage container according to the present invention can be used in fields where semiconductors and reticles are handled. [Explanation of symbols]

[0050] 1 Container body 2 Support piece 5 Robotic Flange 8 Transport rail 10 Lid 11 Lid body 14 Cover plate 16 Locking mechanism 30 Reticle storage container 31 Bottom plate 32 Top lid 33 Periphery 40 adapter 41 Mounting surface 43 Positioning bar (positioning member) 44 Front positioning bar (positioning member, front positioning member) 45 Rear positioning bar (positioning member, rear positioning member) 46 Standing part 47 Locking covering part 48 Side positioning bar (positioning member, side positioning member) 49 Loading area 50 Clamp (clamping member) W Semiconductor wafer

Claims

1. A substrate storage container comprising: a container body capable of storing a plurality of semiconductor wafers arranged vertically; a lid body detachably fitted to the open front surface of the container body; and an adapter for mounting a reticle storage container stored in the container body, A pair of support pieces capable of supporting the semiconductor wafers substantially horizontally are provided facing each other on both sides inside the container body, and a plurality of pairs of support pieces are arranged at predetermined intervals in the vertical direction; a front positioning member adjacent to the front periphery of the reticle container, a rear positioning member adjacent to the rear periphery of the reticle container, and a pair of side positioning members adjacent to the side periphery of the reticle container, are arranged at a predetermined interval on a mounting surface of the adapter on which the reticle container is mounted; a front positioning member adjacent to the front periphery of the reticle container, a rear positioning member adjacent to the rear periphery of the reticle container, and a pair of side positioning members adjacent to the side periphery of the reticle container; a clamp member that engages with the periphery of the reticle container from above is rotatably supported on at least the front positioning member of the front positioning member and the pair of side positioning members; the rear positioning member is formed into a substantially inverted L-shaped cross section; and the rear positioning member is divided into an upright portion that laterally faces the rear periphery of the reticle container, and a locking cover portion that is detachably screwed to the upright portion via a fastener and locks with the rear periphery of the reticle container from above.

2. A substrate storage container as described in claim 1, wherein at least one of the adapter, front positioning member, rear positioning member, pair of side positioning members, and clamp member is molded from a molding material containing resin and conductive filler.

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