Method and apparatus for cutting glass sheets

Abstract

To surely cut even thin glass in a stable process.SOLUTION: A method comprises: preparing a glass sheet having the maximum thickness of 300 μm; irradiating the glass sheet with the pulse laser beam of an ultrashort pulse laser; relatively moving the laser beam and the glass sheet to each other to form a filament-like damaged part so as to be arranged side by side along a path extended on the glass sheet by the pulse of the laser beam; and applying tensile stress to at least the surface of the glass sheet while forming the filament-like damaged part to act the tensile stress on glass in the filament-like damaged part and separate the glass sheet along the path while forming the filament-like damaged part. The light intensity of the laser beam in the inside of the glass sheet is a size so as to leave the filament-like damaged part along a path in which the laser beam penetrates the glass sheet.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] This application is a sequel to German Patent Application No. 102020123928.9, the contents of which are therefore incorporated herein by reference in their entirety, and the applicant reserves the right to use and / or claim the disclosure of said application in particular in this application.

[0002] The present invention relates generally to cutting thin glass, and more particularly to a method and apparatus for cutting glass using laser radiation. [Background technology]

[0003] Separation from thin glass is typically achieved by known crack-fracture processes, which involve at least two stages: first, a superficial damage is created with a scratching tool, such as a scratching wheel or scratching diamond, and then the glass sheet is separated along the superficial damage by mechanical bending or the introduction of thermomechanical stress, for example with a CO2 laser.

[0004] A cutting method in which cracks are formed using a diamond or similarly shaped scratching tool is known from German Patent Application Publication No. 102018131179. This method can produce very solid edges. On the other hand, diamonds as scratching tools are very sensitive and can be damaged, especially when applied to glass.

[0005] Laser-induced stress crack separation is known, for example, from U.S. Patent Application Publication No. 2013 / 0126576, WO 2011 / 026074, and U.S. Patent No. 6,327,875. These methods have generally proven unstable for thin glass because it is difficult to create a sufficiently large temperature gradient between the upper and lower sides of the glass. Furthermore, even very small temperature gradients can result in unstable three-dimensional deformations ("bumps"). WO 2016 / 156235 proposes an asymmetric beam profile to achieve a relatively steep temperature gradient. Similarly, WO 2016 / 156234 specifies a special beam profile in which two partial regions of the laser's active area are spaced apart laterally relative to the separation line, the active area surrounding the cut-out section through which the separation line extends, such that in this section of the gap the area of ​​the thin glass near the separation line is heated more intensely than the area at the separation line.

[0006] Furthermore, a method for separating glass substrates is known from German Patent Application Publication No. 102017100015. In this known method, spaced-apart damages are created in the substrate along a predetermined separation line using a pulsed laser beam. The average distance between adjacent damages and the number of laser pulses for creating each damage are selected so that the fracture stress for separating the substrate is less than a reference stress and the edge strength of the separation edge obtained after separation is greater than a second reference stress associated with the respective substrate. After the damages are created, the substrates can be separated along the separation line by the action of stress. However, with particularly thin substrates, the glass substrate, whose strength has already been weakened by the perforations, can be separated in an undefined manner during handling (e.g., transportation). This can result in separation occurring without control over the edge profile and, in some cases, with reduced edge strength. This is because thin glass, due to its limited inherent strength, tends to deform under handling forces, which can result in the application of undesirably higher tensile stresses than are necessary for separation, particularly when such stresses are applied at angles to the pre-prepared line rather than along the pre-prepared line, which can result in uncontrolled fracture or reduced edge strength. Summary of the Invention [Problem to be solved by the invention]

[0007] The problem underlying the present invention is therefore to enable even thin glass to be separated reliably in a stable process. This problem is solved by the subject matter of the independent claims. Advantageous embodiments are set forth in the respective dependent claims. [Means for solving the problem]

[0008] According to the present invention, there is provided a method for separating glass sheets, comprising the steps of: - preparing a glass sheet having a thickness of up to 300 μm; - Irradiating a glass sheet with a pulsed laser beam of an ultrashort pulse laser, - the light intensity of the laser beam within the glass sheet is such that the laser beam leaves filament-like damage along a path that penetrates the glass sheet; - moving the laser beam and the glass sheet relative to one another, whereby pulses of the laser beam form side-by-side filamentary lesions along paths extending on the glass sheet; - applying a tensile stress to at least the surface of the glass sheet during the formation of the filamentary damage, and exerting a tensile stress on the glass at the filamentary damage, preferably in a direction transverse to, preferably perpendicular to or orthogonal to, the path of the adjacent filamentary damage, whereby - Separating the glass sheet along the path during the formation of the filamentous damage; The method is specified.

[0009] Preferably, the thickness of the glass sheet is at most 200 μm, more preferably at most 100 μm. In particular, the invention can also be used with very thin glass, up to 50 μm, especially up to 35 μm. In one embodiment, glass sheets with a thickness of 30 μm are processed.

[0010] Glass sheets are understood to mean very thin glass panes which, due to their small thickness, have little inherent strength.

[0011] Preferably, the laser beam has a predetermined wavelength for which the glass of the glass sheet is transparent, thereby allowing the laser beam to pass through the glass sheet.

[0012] Additionally, the laser beam can be focused by focusing optics, where, in particular, the focusing can be such that the light intensity of the laser beam within the glass sheet leaves filament-like damage along the path of the laser beam through the glass sheet.

[0013] By applying tensile stress during the formation of a filamentary lesion, it is meant that the application of tensile stress can be simultaneous with the process of forming a single filament, but generally, the application of tensile stress can occur at a time that overlaps the time of forming multiple filaments, such that the formation of the filaments and the application of tensile stress occur simultaneously during this time overlap.

[0014] For convenience, filamentary damage will hereinafter also be referred to simply as a filament. A filamentary damage may be an open, continuous, thin passage. However, only filamentary or linear material changes may be present. Mixed forms, in which cavities or material changes extend along a line, are also possible. One form is, for example, a chain of short damages arranged side by side along a line, which are formed by periodic self-focusing of a powerful laser beam.

[0015] Surprisingly, it was found that the perforation or pre-damage process and the singulation process can be performed directly in time succession using ultrashort pulse laser pulses, thereby enabling a defined combination in a single process step. Here, the perforation in the glass is performed while the glass of the glass sheet is subjected to a defined tensile stress. Combining the perforation and the resulting pre-weakening with the tensile stress allows for a defined weakening and direct singulation of the substrate in a single clamping step. This allows the typically required edge quality to be achieved in a single step using the established ultrashort pulse laser separation process.

[0016] Cracks typically jump from one filament to the next as new filaments are formed, especially under the influence of tensile stress. This eliminates the usual two-step process of separation by scratching and then breaking. Moreover, because the crack moves gradually from filament to filament, it is also prevented from overtaking the row of filaments and extending uncontrolled further as long as filaments are already formed. This allows for good control of the crack progression.

[0017] In an embodiment that provides particularly good control of crack growth, the glass sheet is bent to generate tensile stresses directed transversely to the path. To this end, the glass sheet may be placed on a support that includes a protrusion-forming member, whereby the glass sheet is bent over the protrusion-forming member. The protrusion-forming member is preferably elongated, and the path of the juxtaposed filaments extends along the longitudinal direction of the protrusion-forming member.

[0018] Separation of glass sheets can also be used to produce glass elements with particularly desired dimensions. In this case, pre-processing can be performed by separating the glass sheet from the glass ribbon. The separation edge resulting from separation from the glass ribbon does not need to be of high quality. For example, the separation edge does not need to extend strictly perpendicular to the glass ribbon edge. However, high shape fidelity is achieved with laser-assisted separation, since the separation line closely follows the path of multiple filaments juxtaposed one after the other. Thus, one embodiment of the method specifies producing a continuous glass ribbon in a high-temperature forming process, separating a glass sheet from the glass ribbon, and cutting glass elements from the glass sheet by forming and juxtaposing multiple filament-like damages.

[0019] A particular application of the method described herein is the use of straight cut-off lines and cut-off lines that cross each other, however, in principle curved cut-off lines (corner radii) are also possible.

[0020] The invention will now be explained in more detail with reference to the accompanying drawings. [Brief explanation of the drawings]

[0021] [Figure 1] FIG. 1 shows an apparatus for separating glass sheets. [Figure 2] FIG. 2 is a diagram showing a variation of the arrangement shown in FIG. [Figure 3] 2 shows another variant of the arrangement shown in FIG. 1 with a transport device for glass sheets; [Figure 4] FIG. 1 illustrates a glass sheet separated from a glass ribbon. [Figure 5] FIG. 1 shows a glass sheet with two paths of perforations with different starting points. [Figure 6] FIG. 1 shows a glass sheet with two intersecting paths of a laser beam. [Figure 7] 1A-1C illustrate different beam profiles of a laser beam. [Figure 8] FIG. 10 illustrates another embodiment of an apparatus for separating glass sheets. [Figure 9] FIG. 10 illustrates another embodiment of an apparatus for separating glass sheets. [Figure 10] FIG. 10 illustrates another embodiment of an apparatus for separating glass sheets. [Figure 11] FIG. 10 illustrates another embodiment of an apparatus for separating glass sheets. DETAILED DESCRIPTION OF THE INVENTION

[0022] In Figure 1, an apparatus 4 for carrying out the method described herein is shown. In general, without being limited to the specific illustrated example, the apparatus 4 for separating glass sheets 1 having a thickness of up to 300 μm comprises: an ultrashort pulse laser 3 for irradiating a glass sheet 1 with a pulsed laser beam 5, the laser beam 5 having a predetermined wavelength for which glass is transparent, so that the laser beam 5 can be transmitted through the glass sheet 1; - focusing optics 7 for focusing the laser beam 5, whereby the light intensity of the laser beam 5 inside the glass sheet 1 is such that the laser beam 5 leaves filament-like lesions 9 along the path of its penetration through the glass sheet 1; - a device 21 for moving the laser beam 5 and the glass sheet 1 relative to one another, whereby pulses of the laser beam 5 form side-by-side filamentary lesions 9 along a path 11 extending on the glass sheet 1; - a device for applying a tensile stress to the glass sheet 1 during the formation of the filamentary damages 9, the tensile stress acting on the glass at the filamentary damages 9 and transversely to the paths 11 of the adjacent filamentary damages 9, so that the glass sheet 1 is separated along the paths 11 during the formation of the filamentary damages 9; It is equipped with:

[0023] According to one embodiment, the ultrashort pulse laser 3 can be operated in so-called burst mode. In this burst mode, laser pulses are not emitted as single pulses, but as a series of pulses emitted one after the other at short intervals, forming a common pulse package, known as a burst. The pulse frequency within a burst is significantly higher than the burst repetition rate. Such pulse packages often have somewhat more energy than single pulses in normal single-shot operation. However, the pulses within a burst themselves contain significantly less energy than single pulses. The energy of the pulses within a burst does not need to be constant; it can be decreased or increased. A suitable laser for the purposes of the method described herein is, for example, a neodymium-doped yttrium aluminum garnet laser operating at a wavelength of 1064 nanometers. According to one embodiment, the ultrashort pulse laser 3 is operated at a repetition rate in the range of 1 kHz to 1000 kHz, preferably 10 kHz to 400 kHz, particularly preferably 30 kHz to 200 kHz. The repetition rate and the scanning speed at which the laser beam 5 is moved across the glass sheet 1 along the set path 11 can be selected to obtain a desired spacing (also called "pitch") between adjacent filamentary damages 9. A suitable pulse duration of the laser pulses is in the range of less than 100 picoseconds, preferably less than 20 picoseconds. A typical average power of the ultrashort pulse laser 3 is preferably in the range of 50 to 500 watts. According to one preferred development of the invention, to produce the filamentary damages 9 in the glass, a pulse energy in a burst of more than 400 microjoules is used, and even more preferably a total burst energy of more than 500 microjoules is used.

[0024] Preferably, the filamentous damages 9 have an average mutual spacing, ie pitch, in the range of 1 μm to 10 μm, preferably 3 μm to 8 μm.

[0025] When operating the ultrashort pulse laser 3 in burst mode, the repetition rate is the repetition rate of the emission of the bursts. The pulse duration is typically substantially independent of whether the laser is operated in single-pulse operation or in burst mode. Thus, the pulses within a burst generally have a pulse length similar to that of a single pulse in single-pulse operation. The frequency of the individual pulses within a burst may be in the range of 15 MHz to 90 MHz, preferably in the range of 20 MHz to 85 MHz, e.g., 50 MHz. The number of pulses in a burst may be in the range of 2 to 10 pulses, e.g., 6 pulses. A preferred repetition rate, i.e., the rate at which the bursts are repeated, is in the range of 50 to 500 kHz.

[0026] Preferably, the apparatus 4 includes a support 15, as in the example shown, on which the glass sheet 1 rests. The support 15 may have a rest surface 16 with a ridge former, so that the glass sheet 1 bends over the ridge former. This bending of the glass sheet 1 over the ridge former generates tensile stresses.

[0027] According to one embodiment, the support 15 has a resting surface 16 on which a rod 17 rests, the rod 17 forming an elongated protrusion on which the resting glass sheet 1 bends.

[0028] The bending of the glass sheet 1 over a projection former, such as a rod 17, produces a curvature axis 13 extending in the longitudinal direction of the projection former. The direction of the tensile stresses caused by the bending in the glass surface extends transversely, in particular perpendicularly, to the curvature axis 13 and thus to the longitudinal axis of the projection former.

[0029] The device 21 for moving the laser beam 5 and the glass sheet 1 relative to one another is symbolically represented in FIG. 1 by a crossbeam, along which the ultrashort-pulse laser 3 is moved across the glass sheet 1 together with focusing optics 7. Instead of or in addition to moving the laser 3, it is also possible to move the glass sheet 1 relative to the fixed laser beam 5 in order to guide the laser beam 5 across the surface of the glass sheet 1 along a set path 11. To achieve spontaneous and controlled severing of the glass sheet 1 by means of a plurality of parallel filamentary damages 9 along the predefined path 11, the path 11, i.e., the direction of movement of the laser beam 5, also extends across the surface of the glass sheet 1 along the longitudinal direction of the projection former, or more generally, along the curvature axis 13 of the bending of the glass sheet 1. Due to the bending on the rod 17, the curvature axis 13 of the bending is also parallel to the longitudinal axis of the rod 17 or, more generally, to the longitudinal axis of the elongated projection former.

[0030] The individualization of the glass sheet 1 by the perforation process step is directly achieved by forming perforations consisting of parallel filaments along the tensile stress lines caused by the bending. Separation can still be achieved even if the geometric bending lines and the perforation lines differ from one another within the normal manufacturing tolerances. Preferably, the deviation is in the range of less than 1 mm, preferably less than 0.5 mm, and particularly preferably less than 0.3 mm.

[0031] It is preferable that a defined curvature occurs, which is ensured by mounting on a correspondingly shaped support 15. Furthermore, to produce perforations or laser filaments in the glass, it is generally preferred if the laser beam 5 impinges on the glass as perpendicularly as possible. Preferably, the deviation of the direction of incidence from perpendicular to the surface is less than 5°.

[0032] The break occurring during separation is assumed to jump from one damaged filament 9 to the next along a path 11. This ensures that the break cannot outrun the laser beam 5 guided across the glass sheet 1, since the break stops at the last formed filament due to the absence of any further filaments ahead. If the break were to outrun the row of successively formed filaments, the lack of a guide along the filament would result in an uncontrolled progression of the break edge.

[0033] One parameter within the context of the separation process described herein is the tensile stress in the glass sheet 1, which is determined, for example, by the various diameters of the underlying rod 17. For example, a 30 μm-thick AS87 glass with a round rod D=6 mm produces a maximum tensile stress of 360 MPa. This value exceeds typical separation strengths (typically 15-35 MPa, depending on the laser process) by an order of magnitude. This allows for a controlled separation process even in the thinnest glasses, with the laser line and mechanical bending being oriented in a single step. Generally, without being limited to the illustrated example or to the generation of tensile stress by bending, one embodiment specifies that a tensile stress of at least 75 MPa, preferably at least 150 MPa, and particularly preferably at least 250 MPa, be generated in the glass sheet 1 in the region of the path 11 on at least one surface of the glass sheet 1. On the other hand, extremely high tensile stresses may be undesirable in some cases, since they may lead to spontaneous fracture. Preferably, the maximum tensile stress applied to the glass sheet 1 is at most 750 MPa.

[0034] The examples listed in the table below investigate the effect of the diameter of the rod 17 on the quality of the resulting separation edge in the glass sheet 1: [Table 1] The tests were carried out on a 30 μm thick glass sheet 1 made of AS87 glass. The optimum edge is obtained with a rod diameter of 6 mm, according to the results given in the table.

[0035] According to an alternative or additional embodiment, the glass sheet 1 is bent over a step 18 in the support 15, with filamentary damage 9 being formed along a path 11 extending along the step 18. The suspension of the substrate at the step 18 subjects the substrate to a defined tensile stress. FIG. 2 shows a variant of the device 4 according to FIG. 1 , which is designed in accordance with this embodiment. Such an arrangement may be advantageous for dividing the glass sheet 1 at successive parallel cuts, in which case the glass sheet 1 is moved further over the step 18 after one separation step and then a further separation is carried out.

[0036] FIG. 3 shows another variant of the arrangement shown in FIG. 1 , in which a feed or conveying device 23 is provided for moving the glass sheet 1. The principle of this embodiment is based on the following design of the conveying device 23: Here, the glass sheet 1 is bent on the conveying device 23, with the bending axis 13 of the glass sheet 1 lying transversely, in particular perpendicularly, to the feed direction 24 of the conveying device 23. The bending of the glass sheet 1 can be achieved, in particular, by various arrangements and configurations of the conveying elements. The example shown in FIG. 3 has two conveyor belts 25 as conveying elements. The conveyor belts 25 are arranged in different planes, so that, similar to the embodiment shown in FIG. 2, a step is formed over which the glass sheet 1 extends.

[0037] FIG. 4 shows a typical example of the use of the method. The method or the apparatus 4 for carrying out the method can be used to separate glass elements 2 from a glass sheet 1. The glass sheet 1 has ears 19 formed as thickened edge regions on two opposite sides. Such a glass sheet 1 is obtained when it is cut from a glass ribbon, which is produced in a continuous hot-forming process. In a preferred embodiment, the glass ribbon is produced by a downdraw method, in which the glass ribbon is drawn downward from a nozzle that opens downward. The ears 19 are generated by the tendency of the still hot, soft glass to shrink again after being drawn from the nozzle. This shrinkage occurs particularly at the edges of the glass ribbon. The ears 19 provide the glass sheet 1 with higher rigidity when bent about a bending axis 13 that intersects the ears 19 than when bent about a bending axis that is parallel to the longitudinal direction of the ears 19.

[0038] Here, the method can be used to produce glass elements 2 that are precisely defined, in particular in terms of shape and dimensions. As can be seen in FIG. 4 , the edges 98, 99 of the glass sheet 1 that intersect with the ears 19 are not exactly perpendicular to the edges 100, 101 that are provided with the ears. Such a glass sheet 1 can be obtained, in particular, when the glass sheet 1 is separated from a continuous glass ribbon by forming short cracks only at the edges of the glass ribbon. The edges 98, 99 then occur due to breaks in the glass ribbon that start from the cracks, so that the breaks do not necessarily extend completely perpendicular to both longitudinal edges of the glass ribbon. On the other hand, this pre-cutting method allows for rapid rough cutting and thus a high feed rate of the glass ribbon. Therefore, without being limited to the examples described herein, one embodiment of the method specifies producing a continuous glass ribbon in a high-temperature forming process, forming cracks in the edges of the glass ribbon, and separating the glass sheet 1 from the glass ribbon by breaking the glass sheet 1 with breaks that start from the cracks and separate the glass ribbon laterally. The glass elements 2 can then be separated from the glass sheet 1 by forming and juxtaposing filamentary damage 9 along one or more predefined paths 11 as described.

[0039] In the example shown in FIG. 4 , the path 11, which extends within the outer contour of the glass sheet 1, is divided into smaller paths or sections 111, 112. The path 11 generally surrounds the contour of the glass element 2 to be separated from the glass sheet 1. To facilitate bending of the glass sheet 1 to generate tensile stresses for separation purposes during perforation by the laser beam 5, it is generally preferred to first separate the glass sheet 1 along the section 111 of the path 11 that extends along the edge 19, and then along the section 112 of the path 11 that extends transversely to the edge 19. That is, the glass sheet 1 is easily bent over the ridge-forming portion that extends parallel to the edge 19. In contrast, if the ridge-forming portion intersects with the edge 19, the extremely rigid edge 19 would also have to be bent. Preferably, the section 111 that extends along the edge 19 is guided beyond at least one of the edges 98, 99 of the glass sheet 1. In the illustrated example, both sections 111 extend beyond both lateral edges 98, 99 of the glass sheet 1. Once the ears 19 have been separated, the glass sheet 1 can then be easily bent in a direction perpendicular to the ears 19. Thus, without being limited to the illustrated example, one embodiment generally specifies providing a glass sheet 1 having two opposite edges 100, 101 and having ears 19 in the form of thickened regions extending along these edges 100, 101, whereby the glass sheet 1 is first separated along two paths 111 extending in the direction of the edges 100, 101 with the ears 19, and then the glass sheet 1 is separated along at least one other path 112 extending transversely to the paths 111 in the direction of the edges 98, 99. Preferably, the separation is performed along the two paths 112 extending transversely to the edges 100, 101 with the ears 19, as also illustrated. The path 111 in the direction of the edges 100,101 with the ears 19 preferably runs parallel to these edges 100,101.Depending on the desired shape of the glass elements 2 to be cut in this way, however, these paths 111 may have a certain angle relative to the edges 98, 99. In this case, however, the paths 112 or their extensions preferably do not intersect the ears 19, thereby avoiding the ears 19 having to be bent together to create tensile stresses. Similarly, the paths 112 extending transversely to the edges 100, 101 with their ears 19 also extend perpendicularly to the edges 100, 101, as shown in FIG. 4. In this way, rectangular glass elements 2 are cut out of the glass sheet 1 by the parallel-extending paths 111 and the perpendicular-extending paths 112.

[0040] For a stable process guide, it is generally preferred that the tensile stress at the cut edge of the glass sheet 1, e.g., the glass ribbon section with the edge 19, does not exceed the existing edge strength, so that uncontrolled breakage does not occur. The edge strength can be determined by a break test on similarly produced samples. The average value of the tensile stress at which the sample breaks can be set as the edge strength. Therefore, generally, and without being limited to the illustrated example, it is specified that the glass sheet 1 is subjected to a tensile stress that is smaller than the average tensile stress, i.e., the average breaking stress at which the glass sheet 1 breaks at the edge. Preferably, the applied tensile stress does not exceed a value two-thirds the average breaking stress, particularly preferably half the average breaking stress.

[0041] The process guided by the ultrashort pulse laser 3 may have two particular method features. These method variants are explained in more detail with reference to FIG. 5 . FIG. 5 shows a glass sheet 1 with perforations, i.e., two paths 111, 112 of parallel filament-like damage 9. The paths 111, 112 differ from each other with respect to their starting point 113. According to one embodiment of the method, the path of the laser beam crosses two opposite edges 100, 101 of the glass sheet 1. That is, the perforations (laser lines or paths 11) are formed continuously across the edge of the glass sheet 1, i.e., with a forward and a backward crossover. However, depending on the cutting method, the voltage may not be controlled at the edge of the raw glass sheet or the glass sheet 1, which results in an undefined break. However, the continuous perforations realized in the example of path 111 are suitable for producing a well-defined continuous cut edge.

[0042] Another possibility is perforations formed by path 112. Here, the starting point 113 of path 112 of laser beam 5 is located on glass sheet 1, thereby providing a distance from all edges of glass sheet 1. That is, the perforations (laser line or path 11) are initially formed within glass sheet 1, preferably only with a corresponding break. Surprisingly, the first sections without perforations are automatically and controlled to separate under tensile stress due to the break mechanism used in the remaining areas. According to one embodiment, the distance from the nearest edge is 1 to 2 mm. Preferably, laser beam 5 is finally guided beyond one of the edges of glass sheet 1, so that path 112 of the laser beam intersects one of the edges, edge 101 in this case.

[0043] Both embodiments may be combined, in particular forming both shapes of paths 111, 112. For example, a discontinuous first cut with a defined starting point 113 can be formed. A second path intersecting two opposite edges can intersect the discontinuous cut or path, thereby separating the glass element 2. This embodiment is shown in Figure 6. In this case, it is also not necessary for the glass sheet 1 to break spontaneously between the starting point 113 of the path 112 and the edge 100.

[0044] The detachability of the glass sheet 1 and thus the tensile stress to be applied can be influenced by several parameters, such as the pitch, i.e., the spacing between the filament-like damages 9. One possibility for reducing the tensile stress is to adjust a specific beam profile of the laser beam 5. For this purpose, according to one embodiment, focusing optics 7 are provided, which generate a beam profile of the laser beam 5 at the glass sheet 1 that is longer in the direction along the path 11 than in the direction perpendicular to the path 11. Irradiating the glass sheet 1 with a laser beam 5 having such a beam profile can generate a preferred direction of microcracks that facilitates detachability or allows detachment with low tensile stress. Without limiting generality, FIG. 7 shows examples of various beam profiles of the laser beam 5, which, as described above, are longer in the direction along the path 11 than in the direction perpendicular to the path 11. In the partial view (a), a laser beam 5 is shown with an elliptical beam profile, the major axis of which is directed along the path 11. In the beam profile shown in the partial view (b), the beam profile is split into two separate spots, which are spaced apart along the path 11. This spacing also causes the beam profile to be elongated in the direction of the path 11 more than in a direction perpendicular to the path 11. It is also possible to provide a beam profile that is asymmetric with respect to a mirror axis perpendicular to the path 11. An example of this is shown in the partial view (c). This beam profile has the shape of a droplet that is elongated along the path 11. An elongated beam profile, such as that shown in FIG. 7 for example, can facilitate separation, especially for paths 11 that are not straight.

[0045] 8 to 10 show further embodiments of the device 4 for separating the glass sheet 1. FIG. 8 is a variation of the example shown in FIG. 1. In the embodiment shown as an example in FIG. 8, a support 15 is provided with an elongated projection-forming member, which has an interruption in the area of ​​the impact point of the laser beam 5, so that the glass sheet 1 resting on the support 15 is exposed at the impact point of the laser beam 5. In the example of FIG. 8, the interruption is realized by a groove 27 in the rod 17. The glass sheet 1 rests across this groove 27. In this way, the laser beam 5 does not directly impinge on the rod 17 after penetrating the glass sheet 1. This avoids damage to the rod 17.

[0046] In the examples shown above, bending of the glass sheet 1 induces tensile stress on the side of the glass sheet 1 facing the ultrashort pulse laser 3 or the direction of incidence of the laser beam 5. However, it is generally possible to bend the glass sheet 1 so that tensile stress occurs on the side of the glass sheet 1 facing away from the ultrashort pulse laser 3. FIG. 9 shows one example for this. Generally, without being limited to the illustrated example, it is specified that in one embodiment the side of the glass sheet 1 facing the ultrashort pulse laser 3 is bent concavely. To achieve this, more generally, a support with a gap 29 can be provided, into which the glass sheet 1 curves. In the illustrated example, the support is provided in the form of a conveyor or feeder 23 with two conveyor belts 25 separated by the gap 29. The glass sheet 1 flexes at the gap 29 and thereby curves into the gap 29. An advantage of this embodiment is that the tensile stresses are distributed over a wide area on opposite sides of the glass sheet 1 when the glass sheet 1 bends under its own weight, making this arrangement less sensitive to the length of the path 11 or the impact point of the laser beam 5. This also makes it possible to easily realize non-linear paths or cutting edges. By means of the counter-movements of the conveyor belt 25 or the movement device 21 in general, there is again the possibility of adjusting the bending radius and thus the tensile stress of the glass sheet 1. However, in this case, the vertical position of the glass sheet 1 relative to the laser beam 5 also changes.

[0047] In the embodiment described above with reference to the drawings, tensile stress on at least one surface of the glass sheet 1 is generated by bending the glass sheet 1. In the above-described example, tensile stress occurs on the convexly bent side during bending, while compressive stress occurs on the opposite concavely bent side. However, it is also possible to pull the glass sheet 1 to generate tensile stress. The tensile stress generated in this case acts on both sides located opposite each other. As will be clear to those skilled in the art, the glass sheet 1 is preferably pulled in a direction transverse to the path of the filaments, preferably perpendicular to the path of the filaments.

[0048] 10 shows an apparatus for carrying out this embodiment, which comprises tensioning devices 30 (symbolically shown by two gripping tongs) that pull the glass sheet 1 transversely to the path 11, thereby generating tensile stresses on two opposite surfaces of the glass sheet 1.

[0049] FIG. 11 shows a further variant of an apparatus 4 for separating a glass sheet 1 in a cross-sectional perspective view. This apparatus 4 allows the glass sheet 1 to be separated along a non-linear path 11. Generally, this apparatus is based on the use of a punch and a ridge former, which are offset relative to one another and guided together. The glass sheet 1 is bent between these elements. In the illustrated example, the punch 32 is plate-shaped, and the ridge former is a ring 34. This results in an annular tensile stress zone, which acts radially along the glass sheet surface. In this way, the glass sheet 1 can be separated along a generally annular, e.g., circular, path 11 as shown. It will be clear to those skilled in the art that the method and apparatus are not limited to the specific embodiments described herein, but can be modified within the scope of the following claims. In particular, various embodiments can be combined with one another. For example, the conveying device 23 shown in FIG. 3 could be provided in the example of FIG. 1. In this case, the rod 17 may generally be a passively or actively rotatable roller. An example is also provided with a punch 32 and an annular projection former to generate a non-linear profile of the glass element 2. Other possibilities exist here, for example, to apply negative pressure to generate tensile stresses acting along at least one glass surface. [Explanation of symbols]

[0050] 1 glass sheet 2 Glass elements 3 Ultrashort pulse laser 4. Device for separating glass sheets 5 Laser beam 7 Focusing optics 9 Filamentous lesions 11,111,112 routes 13 Curved axis 15 Support 16 Placement surface 17 Rod 18 Step section 19 Ears 21 Exercise equipment 23 Conveyor equipment 24 Feed direction 25 Conveyor Belt 27 Groove 29 Gap 30 Grip device 32 Punch 34 Ring 98,99,100,101 Edges of glass sheets 113 Starting point of routes 11, 111, and 112

Claims

1. 1. A method for separating glass sheets, comprising: - providing a glass sheet (1) having a thickness of at most 300 μm, - irradiating said glass sheet (1) with a pulsed laser beam (5) of an ultrashort pulse laser (3), the light intensity of the laser beam (5) inside the glass sheet (1) is such that the laser beam (5) leaves filament-like damage (9) along the path it takes through the glass sheet (1); - moving the laser beam (5) and the glass sheet (1) relative to one another, whereby pulses of the laser beam (5) form the filamentary lesions (9) side by side along a path (11) extending on the glass sheet (1); - applying a tensile stress to at least the surface of the glass sheet (1) during the formation of the filamentary damages (9), the tensile stress acting on the glass at the filamentary damages (9), preferably transverse to the paths (11) of the filamentary damages (9) located side by side, whereby - cutting the glass sheet (1) along the path (11) during the formation of the filamentary damage (9); Said method has the following characteristics: bending the glass sheet (1) over a step (18) in a support (15) on which the glass sheet (1) rests, forming the filamentous damage (9) along a path (11) extending along the step (18); - the glass sheet (1) is moved by means of a conveying device (23) which is configured in such a way that the glass sheet (1) is bent on the conveying device (23) and the bending axis (13) of the glass sheet (1) lies transversely to the feed direction (24) of the conveying device (23), in particular perpendicularly to the feed direction (24); and method.

2. the break occurring at the time of separation is characterized by jumping from one damaged filament (9) to the next damaged filament (9) along said path (11); The method of claim 1.

3. characterised in that the glass sheet (1) is bent to produce tensile stresses directed transversely to the path (11), 3. The method according to claim 1 or 2.

4. a glass sheet (1) is separated from the glass ribbon by a high-temperature forming process; and glass elements (2) are cut from the glass sheet (1) by forming and juxtaposing a plurality of filament-like damage portions (9).

4. The method according to any one of claims 1 to 3.

5. Said method has the following characteristics: - inducing a tensile stress in the glass sheet (1) in the region of the path (11) at at least one surface of the glass sheet, said tensile stress being at least 75 MPa, preferably at least 150 MPa, particularly preferably at least 250 MPa; - the maximum tensile stress applied to said glass sheet (1) is at most 750 MPa; the applied tensile stress is at most two-thirds, particularly preferably half, of the average breaking stress at the edge of the glass sheet (1); - pulling the glass sheet (1) transversely to the path (11) by means of a tensioning device (30), thereby generating tensile stresses on the opposing surfaces of the glass sheet (1); characterized in that it includes at least one of the following features:

5. The method according to any one of claims 1 to 4.

6. Said method has the following characteristics: - the path (111) of the laser beam (5) intersects two opposite edges (100, 101) of the glass sheet (1); the starting point (113) of the path (12) of the laser beam is located on the glass sheet (1), whereby said starting point is spaced from all edges of the glass sheet (1); - irradiating the glass sheet with a laser beam (5), the beam profile of the laser beam (5) on the glass sheet (1) being longer in a direction along the path (11) than in a direction perpendicular to the path (11); characterized in that it includes at least one of the following features:

6. The method according to any one of claims 1 to 5.

7. a glass sheet (1) having two edges (100, 101) located opposite each other, the edges (100, 101) having ears (19) in the form of thickened areas extending along the edges (100, 101); the glass sheet (1) is first separated along two paths (111) extending in the direction of the edges (100, 101) having the ears (19); and the glass sheet (1) is then separated along at least one other path (112) extending transversely to the two paths (111) in the direction of the edges.

7. The method according to any one of claims 1 to 6.

8. 1. An apparatus (4) for separating glass sheets having a thickness of up to 300 μm, said apparatus (4) comprising: an ultrashort pulse laser (3) for irradiating the glass sheet (1) with a pulsed laser beam (5), the laser beam (5) having a predetermined wavelength for which glass is transparent, so that the laser beam (5) can be transmitted through the glass sheet (1); - focusing optics (7) for focusing the laser beam (5), whereby the light intensity of the laser beam (5) inside the glass sheet (1) is such that the laser beam (5) leaves filament-like damage (9) along the path that it takes through the glass sheet (1); - a device (21) for moving the laser beam (5) and the glass sheet (1) relative to one another, whereby pulses of the laser beam (5) form filamentous lesions (9) side by side along a path (11) extending on the glass sheet (1); - a device for applying a tensile stress to the glass sheet (1) during the formation of the filamentary damages (9), the tensile stress acting on the glass at the filamentary damages (9) and transversely to the path (11) of the adjacent filamentary damages (9), so that the glass sheet (1) is cut along the path (11) during the formation of the filamentary damages (9); Equipped with Said device (4) has the following characteristics: - the device (4) has a support (15) with a step (18) on which the glass sheet (1) placed is bent; the device (4) has a conveying device (23) that is configured in such a way that the glass sheet (1) is bent on the conveying device (23), whereby the bending axis (13) of the glass sheet (1) lies transversely to the feed direction (24) of the conveying device (23), in particular perpendicularly to the feed direction (24); The present invention has at least one of the following characteristics: Device (4).

9. - a tensioning device (30) is provided, which tensions the glass sheet (1) transversely to the path (11), thereby generating tensile stresses on the opposite surfaces of the glass sheet (1); 9. The device (4) according to claim 8.

10. the device (4) comprises a focusing optical system (7) for generating a beam profile of the laser beam (5) on the glass sheet (1), the beam profile being elongated in a direction along the path (11) more than in a direction perpendicular to the path (11), 10. Device (4) according to claim 8 or 9.

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