Device-equipped equipment

Abstract

To prevent damage of a circuit pattern part included in a device.SOLUTION: A device mounting apparatus has: a device including a held surface, and a circuit pattern part provided on at least a part of the held surface; a holding member that holds the device with a holding surface facing the held surface; and a spacer member provided between the holding surface and the held surface, where a thickness of the spacer member is made thicker than a thickness of the circuit pattern part provided on the held surface.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a device-mounted apparatus. [Background technology]

[0002] Conventionally, there have been known devices equipped with devices such as MEMS (Micro Electro Mechanical Systems) elements. Examples of such device-equipped devices include a spectroscope that performs spectroscopic analysis of light from an object. For example, a spectroscope is used to identify the resin type of an object through spectroscopic analysis and to separate and recover the object by resin type as a recyclable material.

[0003] In order to provide a light source device that can suppress the generation of residual stress during bonding and maintain high output for a long period of time as a device-mounted equipment, a configuration has been disclosed in which a deformable holding part is provided between the peripheral part other than the center of the optical element and the light-emitting element, which restricts movement of the optical element and the light-emitting element in a direction moving them apart or closer together (see, for example, Patent Document 1). Summary of the Invention [Problem to be solved by the invention]

[0004] However, with the configuration described in Patent Document 1, there are cases where the circuit pattern portion included in the device is damaged.

[0005] An object of the present invention is to prevent damage to a circuit pattern portion included in a device. [Means for solving the problem]

[0006] A device-mounted equipment according to one aspect of the present invention includes a device including a held surface and a circuit pattern portion provided on at least a part of the held surface, a holding member that holds the device with a holding surface facing the held surface, and a spacer member provided between the holding surface and the held surface, and the thickness of the spacer member is thicker than the thickness of the circuit pattern portion provided on the held surface. When viewed from the normal direction of the holding surface, the holding member is provided with an opening having a rectangular shape, and the spacer members include four spacer members arranged at positions that are point symmetrical with respect to the center of the opening. . [Effects of the Invention]

[0007] According to the present invention, damage to a circuit pattern portion included in a device can be prevented. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a perspective view illustrating an example of the overall configuration of a spectrometer according to an embodiment. [Figure 2] 2 is a perspective view illustrating an example of a housing in the spectrometer of FIG. 1. FIG. [Figure 3] FIG. 2 is a cross-sectional view taken along line II-II of FIG. [Figure 4] 2 is a perspective view illustrating the configuration of a frame in the spectrometer of FIG. 1. FIG. [Figure 5] 2 is a plan view illustrating the configuration of a movable member in the spectrometer of FIG. 1. FIG. [Figure 6] 1 is a perspective view illustrating a configuration of a spacer member according to an embodiment. FIG. [Figure 7] 10A and 10B are side views illustrating the configuration of a spacer member according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings. In the drawings, the same components or components of the same quality are designated by the same reference numerals, and redundant explanations will be omitted where appropriate.

[0010] In the drawings below, directions may be indicated by the X-axis, Y-axis, and Z-axis, but the X-direction along the X-axis indicates a direction substantially perpendicular to the oscillation axis of the movable member of the device-mounted equipment according to the embodiment, and the Y-direction along the Y-axis indicates a direction along the oscillation axis. The Z-direction along the Z-axis is a direction substantially perpendicular to both the X-direction and the Y-direction, and indicates a direction along the movable direction of the movable member.

[0011] The direction in which the arrow points in the X direction is referred to as the +X direction or +X side, and the direction opposite to the +X direction is referred to as the -X direction or -X side. The direction in which the arrow points in the Y direction is referred to as the +Y direction or +Y side, and the direction opposite to the +Y direction is referred to as the -Y direction or -Y side. Furthermore, the direction in which the arrow points in the Z direction is referred to as the +Z direction or +Z side, and the direction opposite to the +Z direction is referred to as the -Z direction or -Z side. As an example, the device-equipped equipment according to the embodiment emits light in the +X direction. However, these do not limit the orientation of the device-equipped equipment during use, and the orientation of the device-equipped equipment is arbitrary.

[0012] Hereinafter, an embodiment will be described using a spectroscope that is equipped with a movable member and performs spectroscopic analysis of light from an object as an example of a device-mounted instrument.

[0013] <Example of overall configuration of spectrometer 100> 1 is a perspective view illustrating the overall configuration of a spectrometer 100 according to an embodiment. The spectrometer 100 is a handy device-mounted instrument that is small and portable so that a user of the spectrometer 100 can hold it in their hand or store it in a pocket or bag. As shown in FIG. 1, the spectrometer 100 has a housing 1 and a buffer member 2.

[0014] Spectrometer 100 irradiates an object with light from a light source inside housing 1 and performs spectroscopic analysis of the irradiated light reflected by the object. Spectroscopic analysis refers to examining the spectrum of light emitted or absorbed by a substance and identifying or specifying the components of the substance.

[0015] The target object is, for example, a component containing resin, fruits and vegetables, grains, meat, fish, medicine tablets, concrete, etc. The spectrometer 100 is used to identify the resin type of the target object by spectroscopic analysis and to sort and recover the target object by resin type as a recyclable material.

[0016] The housing 1 is a box-shaped member that houses a light source, a movable member, and the like. The movable member swings around a swing axis along the Y axis inside the housing 1. A moving direction 10 along the Z axis indicates the direction in which the movable member moves due to the swing. Note that, in this embodiment, the housing 1 is exemplified as a box-shaped member in the shape of a quadrangular prism, but is not limited to this. The housing 1 may have any shape, such as a cylindrical, elliptical, or polygonal prism, as long as it can house the movable member inside.

[0017] The buffer member 2 is a member that buffers impacts on the movable member 13. The buffer member 2 is made of an elastic material such as rubber, and is detachably provided so as to cover the housing 1. However, the buffer member 2 does not necessarily have to be detachable, and may be built into the housing 1.

[0018] If spectrometer 100 is dropped to the ground or hits a wall while being carried or used, the spectrometer 100 may be subjected to an impact, which may result in damage to the spectrometer 100. The movable members built into the housing 1 are particularly susceptible to damage from impact. The buffer member 2 absorbs the impact applied to the spectrometer 100 with its elasticity, thereby reducing the damage to the spectrometer 100, and in particular to the movable members of the spectrometer 100.

[0019] When the spectrometer 100 hits the ground or the like, the edges or corners of the spectrometer 100 are likely to be hit first. Therefore, it is preferable that the buffer member 2 is provided on the housing 1 so as to mainly cover the edges and corners of the housing 1 in the X direction and the Z direction.

[0020] Fig. 2 is a perspective view illustrating the housing 1. Fig. 2 shows the spectrometer 100 with the buffer member 2 removed. The housing 1 has a window 11 provided on the +X side of the housing 1 and a switch 12 provided on the +Z side of the housing 1.

[0021] Window 11 is a window that allows light from a light source inside housing 1 to exit housing 1 and allows light that is irradiated from spectroscope 100 and reflected by an object to enter housing 1. Window 11 includes glass, resin, or the like that is translucent to the light emitted by the light source. Translucent here means that the light emitted by the light source has a transmittance of 60% or more.

[0022] The switch 12 is a switch that turns the power of the spectrometer 100 on or off. The switch 12 turns the power on or off in response to a user operation of sliding the switch 12 in the X direction. However, the switch 12 is not limited to a slide type, and various types such as a push button type can be used.

[0023] The buffer member 2 has openings at positions where at least the window 11 and the switch 12 are to be disposed when the buffer member 2 is attached to the housing 1. Through these openings, the window 11 can allow light to enter or exit, and the switch 12 can receive operations by the user.

[0024] <Example of internal configuration of chassis 1> Fig. 3 is a cross-sectional view taken along line II-II in Fig. 2. Fig. 4 is a perspective view illustrating the configuration of frame 209 in spectrometer 100.

[0025] 3, spectrometer 100 includes light source 216, concave diffraction grating 202, movable member 13, and light receiving unit 217. Spectrometer 100 also includes frame 209, processing unit 215a, and battery 218. Spectrometer 100 accommodates these components inside housing 1.

[0026] The light source 216 irradiates light onto an object to be spectroscopically analyzed. The light source 216 is, for example, an LED (Light Emitting Diode) or a halogen lamp. The light source 216 is selected so as to irradiate light of an appropriate wavelength band onto the object to be spectroscopically analyzed, and is disposed outside the outer frame 210.

[0027] Concave diffraction grating 202 is a diffracting section that diffracts light that is emitted from light source 216 and reflected by an object. Concave diffraction grating 202 is an optical element in which evenly spaced thin lines are formed on the surface of a metal concave mirror. However, the material of the base material of concave diffraction grating 202 is not limited to metal, and may be semiconductor, glass, resin, etc. However, when using a material such as semiconductor, glass, resin, etc., it is preferable to form a reflective mirror film on the surface of the thin lines.

[0028] The thin lines in the concave diffraction grating 202 may be formed directly on the substrate, or may be formed on a thin layer of resin or the like formed on the substrate. The concave diffraction grating 202 combines the light dispersion function of a diffraction grating with the light focusing function of a concave mirror. Light incident on the concave diffraction grating 202 is diffracted and dispersed by the concave diffraction grating 202, and is then focused toward the movable member 13. Note that light dispersion refers to the phenomenon in which incident light is separated into individual wavelengths.

[0029] The movable member 13 is, for example, a MEMS mirror in which a mirror portion is integrally formed on a substrate with an elastic beam portion serving as a connecting portion. The mirror portion reflects incident light. The mirror portion also oscillates in the direction of the arrow around oscillation axis E due to the elastic motion of the elastic beam portion. The oscillation around oscillation axis E causes both ends of the mirror portion of the movable member 13 in the X-axis direction to move back and forth in movable direction 10 along the Z-direction.

[0030] In the movable member 13, the mirror portion moves by swinging, strictly speaking including curvature, but for example, both ends of the mirror portion in the X-axis direction move back and forth so as to move approximately linearly in the movable direction 10. The movable direction 10 includes the movement direction in which the mirror portion moves approximately linearly.

[0031] 3, the movable member 13 is slightly tilted with respect to the X axis, but the movable member 13 may be provided substantially parallel to the X axis. In this embodiment, the movable direction 10 is the movement direction in which both ends of the mirror part move substantially linearly when the movable member 13 is provided tilted with respect to the X axis as shown in FIG.

[0032] In this embodiment, an oscillating movable member 13 is exemplified, but is not limited to this. For example, the movement of the movable member includes movements such as oscillation, vibration, rotation, linear movement, precession, and translation. The movable direction 10 includes the direction in which the movable member 13 moves in accordance with these movements.

[0033] The movable member 13 swings the mirror portion to change the reflection angle of the incident light. The movable member 13 guides the light diffracted by the concave diffraction grating 202 to the light receiving portion 217 by, for example, reflecting the light toward the light receiving portion 217 using the mirror portion.

[0034] The light receiving section 217 is a photoelectric conversion element such as a photodiode, etc. The light receiving section 217 outputs an electrical signal according to the light intensity of the light diffracted by the concave diffraction grating 202.

[0035] The processing unit 215a performs a calculation to obtain a spectrum based on the electrical signal input from the light receiving unit 217. The spectrum refers to the intensity distribution for each wavelength of the light reflected from the object. The spectroscope 100 can perform spectroscopic analysis based on the spectrum.

[0036] The processing unit 215a controls the movable member 13 to emit light of a predetermined wavelength toward the light receiving unit, and further controls the light emitted by the light source 216, for example, the intensity of the light.

[0037] Battery 218 supplies power to drive components included in spectrometer 100, such as light source 216, movable member 13, and processing unit 215a. A battery, a secondary battery (storage battery), or the like can be used as battery 218. However, spectrometer 100 may be supplied with power from a commercial power source instead of or in addition to battery 218.

[0038] As shown in Fig. 4, frame 209 is a rectangular columnar member having a polygonal cross section and a hollow structure. The material of frame 209 is not particularly limited and may be resin, metal, ceramic, or the like. Frame 209 has entrance slit 201 and exit slit 204. Frame 209 also has rectangular openings 209a to 209d at predetermined positions on the surface that constitutes frame 209, which connect the outside of frame 209 with the hollow portion inside frame 209.

[0039] 3 and 4, concave diffraction grating 202 is disposed at the position of opening 209b in frame 209 and is fixed to the outer surface of frame 209. Light incident through opening 209a passes through opening 209b and enters concave diffraction grating 202 disposed outside frame 209. The light incident on concave diffraction grating 202 is diffracted and dispersed by concave diffraction grating 202, and propagates while being focused toward opening 209c.

[0040] Movable member 13 is placed at the position of opening 209c and is fixed to the outer surface of frame 209. Light dispersed by concave diffraction grating 202 passes through opening 209c and enters movable member 13 placed outside frame 209. Light incident on the mirror portion of movable member 13 is reflected by the mirror portion and propagates toward opening 209d.

[0041] The mirror portion of the movable member 13 swings around the swing axis E, but since the mirror portion swings within the area included in the opening 209c of the frame 209, the mirror portion does not come into contact with the frame 209 during swinging.

[0042] The light ray L shown by the dashed line in FIG. 3 indicates a part of the light ray that enters the frame 209, is diffracted by the concave diffraction grating 202, is reflected by the mirror portion of the movable member 13, and then reaches the light receiving portion 217.

[0043] Entrance slit 201 is a narrow, approximately rectangular opening that allows light incident from tapered hole 203 in outer frame 210 to enter frame 209. The longitudinal direction of the opening in entrance slit 201 corresponds to the X direction, and the lateral direction corresponds to a direction approximately perpendicular to the X direction.

[0044] The width of the opening of entrance slit 201 in the short direction is, for example, several tens of μm to several hundreds of μm. Entrance slit 201 is formed by providing a rectangular through-hole in a metal substrate such as nickel. However, the material of the substrate on which entrance slit 201 is formed is not limited to metal, and may be semiconductor, resin, or the like. Furthermore, entrance slit 201 is not limited to a rectangular opening, and may be a circular opening such as a pinhole. Light entering frame 209 from entrance slit 201 is incident on concave diffraction grating 202.

[0045] Exit slit 204 is a long, narrow, approximately rectangular opening that allows dispersed light to exit frame 209. The same material and shape as those of entrance slit 201 can be used for exit slit 204.

[0046] Exit slit 204 is positioned at a position where the light dispersed by concave diffraction grating 202 is approximately focused. The focusing position of the light dispersed by concave diffraction grating 202 shifts laterally depending on the wavelength. Spectrometer 100 can selectively guide light of a predetermined wavelength from the dispersed light to light receiving unit 217 by changing the reflection angle of the light dispersed by concave diffraction grating 202 at the mirror portion of movable member 13 and changing the wavelength of the light passing through exit slit 204.

[0047] <Configuration example of movable member 13> 5 is a plan view illustrating the configuration of the movable member 13. The movable member 13 is a MEMS mirror with a beam supported at both ends. The movable member 13 deflects light incident on the mirror surface 14 provided on the mirror member 120 about the oscillation axis E by oscillating the mirror section 120 about the oscillation axis E parallel to the Y axis. Deflection refers to changing the direction of light.

[0048] The movable member 13 is an example of a device including a circuit pattern portion 123 and a held surface 13a. The circuit pattern portion 123 is provided on at least a part of the held surface 13a.

[0049] As shown in FIG. 5, in this embodiment, the movable member 13 has a mirror portion 120, drive beams 130a and 130b, and support portions 140a and 140b in addition to the circuit pattern portion 123 and the held surface 13a.

[0050] The mirror section 120 is a plate-like section that is formed into a substantially rectangular shape in a plan view and is capable of swinging around a swing axis E. The -X side end of the mirror section 120 is connected to the drive beam 130a, and the +X side end is connected to the drive beam 130b. A mirror surface 14 is formed on the -Y side surface of the mirror section 120. Note that while FIG. 5 illustrates the mirror surface 14 having a rectangular shape in a plan view, the shape of the mirror surface 14 is not limited to this and may be other shapes such as a circle or an ellipse.

[0051] The drive beams 130a and 130b are arranged to sandwich the mirror section 120 from both sides in the Y direction, and support the mirror section 120 so that it can swing around the oscillation axis E. The drive beams 130a and 130b swing the mirror section 120, thereby changing the tilt of the mirror surface 14 around the oscillation axis E.

[0052] The drive beam 130a is a serpentine beam configured with a meander structure (folded structure) including multiple beam members 133. One end of the drive beam 130a is connected to the outer periphery of the mirror section 120, and the other end is connected to the inner periphery of the support section 140a. Piezoelectric drive units 131a to 131d are provided on each of the multiple beam members 133 included in the drive beam 130a. Each of the piezoelectric drive units 131a to 131d includes a piezoelectric element and deforms the drive beam 130a in response to an applied drive voltage.

[0053] The drive beam 130b is a serpentine beam having a meander structure including multiple beam members 133. One end of the drive beam 130b is connected to the outer periphery of the mirror section 120, and the other end is connected to the inner periphery of the support section 140b. Piezoelectric drive units 132a to 132d are provided on each of the multiple beam members 133 included in the drive beam 130b. Each of the piezoelectric drive units 132a to 132d includes a piezoelectric element and deforms the drive beam 130b in response to an applied drive voltage.

[0054] The point where the drive beam 130a connects to the mirror section 120 and the point where the drive beam 130b connects to the mirror section 120 are positioned symmetrically with respect to a point about the center of the mirror surface 14. The point where the drive beam 130a connects to the support section 140a and the point where the drive beam 130b connects to the support section 140b are positioned symmetrically with respect to a point about the center of the mirror surface 14. However, they may also be positioned symmetrically with respect to a line that is on a plane parallel to the mirror surface 14 and perpendicular to the oscillation axis E (i.e., a line parallel to the X-axis).

[0055] The support portion 140a supports the drive beam 130a, and the support portion 140b supports the drive beam 130b.

[0056] Support portion 140b has electrode connection portion 150 on its -Z side surface for inputting a drive voltage. Electrode connection portion 150 includes positive electrode connection portion 150a for inputting a positive voltage, GND connection portion 150b for connection to GND, and negative electrode connection portion 150c for inputting a negative voltage.

[0057] The positive electrode connection portion 150a, the GND connection portion 150b, and the negative electrode connection portion 150c are multiple voltage input portions arranged along the X direction. The positive electrode connection portion 150a, the GND connection portion 150b, and the negative electrode connection portion 150c are arranged along the X direction, which is the longitudinal direction of each of the multiple beam members 133 that make up the actuation beam 130a or the actuation beam 130b.

[0058] At least one circuit pattern portion 123 is provided on the area other than the mirror surface 14 on the −Z side surface of the mirror portion 120 and on the −Z side surfaces of the drive beams 130a and 130b.

[0059] Circuit pattern portion 123 is a portion where wiring is patterned to supply the drive voltage input from electrode connection portion 150 to piezoelectric drive portions 131a to 131d and piezoelectric drive portions 132a to 132d, respectively. When there are multiple circuit pattern portions 123, it is preferable to arrange them so as to surround mirror surface 14, as this can prevent weight imbalance.

[0060] Piezoelectric actuators 131a to 131d provided on actuator beam 130a are electrically connected to electrode connector 150 provided on support portion 140b by circuit pattern portion 123. Circuit pattern portion 123 conducts the actuator voltage input via electrode connector 150 to each of piezoelectric actuators 132a to 132d, and also conducts it over the surface of mirror portion 120 to each of piezoelectric actuators 131a to 131d. The actuator voltage input from electrode connector 150 is applied to both actuator beams 130a and 130b by circuit pattern portion 123.

[0061] The circuit pattern portion 123 includes a positive voltage conductor 123a that conducts a positive voltage, a GND conductor 123b that is connected to GND, and a negative voltage conductor 123c that conducts a negative voltage. The positive voltage conductor 123a is connected to the positive electrode connection portion 150a, the GND conductor 123b is connected to the GND connection portion 150b, and the negative voltage conductor 123c is connected to the negative electrode connection portion 150c.

[0062] The movable member 13 has light passing regions 16 and 17, which are open regions free of obstacles such as supports, on both sides of the mirror portion 120 along the X direction between the support portions 140a and 140b. The light passing regions 16 and 17 are portions that allow light reflected by the mirror surface 14 to pass through when the mirror portion 120 oscillates. The light passing regions 16 and 17 may be voids with no component present, or may include a component such as glass that transmits light in at least a portion of the void. The light passing regions 16 and 17 may be tapered, with their widths increasing along the oscillation axis E as they move away from the oscillation axis E.

[0063] The movable member 13 is formed by etching a single SOI (Silicon On Insulator) substrate, and then forming the mirror surface 14, actuation beams 130a and 130b, electrode connection portion 150, etc. on the formed substrate, so that each component is integrally formed. Note that each component may be formed after or during the formation of the SOI substrate.

[0064] The movable member 13 includes a mirror portion 120 and a plurality of movable portions such as actuation beams 130a and 130b, which are integrally formed by a semiconductor process. However, the movable member 13 does not necessarily have to be integrally formed, and the movable member 13 may be formed by combining a plurality of members.

[0065] The movable member 13 does not necessarily have to be formed by a semiconductor process, but manufacturing the movable member 13 by a semiconductor process is more preferable because it makes it possible to manufacture a small movable member 13, which increases manufacturing efficiency and formation accuracy.

[0066] From the viewpoint of including multiple movable parts, the movable member 13 can also be called a movable device. In particular, in this embodiment, the movable direction 10 of the movable member 13 means the direction in which the mirror section 120, which oscillates around the oscillation axis E, moves.

[0067] <Configuration example of spacer member 300> The configuration of the spacer member 300 of the spectrometer 100 will be described with reference to Figures 6 and 7. Figures 6 and 7 are diagrams illustrating the configuration of the spacer member 300. Figure 6 is a perspective view illustrating a frame 209 on which the spacer member 300 is provided, and Figure 7 is a side view illustrating a portion of the frame 209 and the movable member 13 held by the frame 209 via the spacer member 300.

[0068] 6, the spacer member 300 is fixed by adhesion using an adhesive or the like to a holding surface 301, which is the surface on the -Z direction side of the frame 209. The frame 209 is an example of a holding member that holds the movable member 13 by means of the holding surface 301 facing the held surface 13 a.

[0069] 7, when the movable member 13 is held by the frame 209, the spacer member 300 is provided between the holding surface 301 and the held surface 13a. The thickness t1 of the spacer member 300 is greater than the thickness t2 of the circuit pattern portion 123 provided on the held surface 13a. Note that the spacer member 300 may be fixed to the held surface 13a by being adhered with an adhesive member or the like, instead of to the holding surface 301.

[0070] The spacer members 300 include a first spacer member 300a, a second spacer member 300b, a third spacer member 300c, and a fourth spacer member 300d. The first spacer member 300a, the second spacer member 300b, the third spacer member 300c, and the fourth spacer member 300d are fixed near the four corners of the rectangular opening 209b.

[0071] The first spacer member 300a, the second spacer member 300b, the third spacer member 300c, and the fourth spacer member 300d are examples of the plurality of spacer members. In this embodiment, the number of the plurality of spacer members is four, but this is not limited to four and any number may be used. The arrangement positions of the plurality of spacer members may also be any position between the holding surface 301 and the held surface 13a. However, from the viewpoint of stably holding the movable member 13, it is preferable that the plurality of spacer members be provided at positions that are point-symmetrical with respect to the center of the opening 209b.

[0072] It should be noted that the first spacer member 300a, the second spacer member 300b, the third spacer member 300c, and the fourth spacer member 300d will be collectively referred to as spacer members 300 unless they are to be particularly distinguished from one another.

[0073] Particularly in this embodiment, the spacer member 300 is provided in an area other than a predetermined functional area of ​​the movable member 13. Here, the functional area refers to an area of ​​the movable member 13 where the movable member 13 performs a predetermined function.

[0074] In this embodiment, the functional area includes the circuit pattern portion 123, the movable area of ​​the movable member 13, and a path through which light passes when it is incident on the mirror surface 14 of the movable member 13. The movable area of ​​the movable member 13 means the area through which the mirror surface 14 or the drive beams 130a and 130b, etc., pass when they are moved. The path through which light passes when it is incident on the mirror surface 14 is, for example, the opening 209b.

[0075] There are no particular limitations on the material of the spacer member 300, and it is possible to use a material including a resin material or a metal material to form the spacer member 300. In particular, in this embodiment, the spacer member 300 is made of a material including an elastic material such as rubber, and has elasticity.

[0076] <Actions and Effects of Spectrometer 100> As described above, the spectrometer 100 according to this embodiment has a movable member 13 (device) including a held surface 13a and a circuit pattern portion 123 provided on at least a portion of the held surface 13a. The spectrometer 100 also has a frame 209 (holding member) that holds the movable member 13 with a holding surface 301 facing the held surface 13a, and a spacer member 300 provided between the holding surface 301 and the held surface 13a. The thickness t1 of the spacer member 300 is thicker than the thickness t2 of the circuit pattern portion 123 provided on the held surface 13a. For example, the circuit pattern portion 123 includes wiring.

[0077] Here, in consideration of production costs and production efficiency, the frame 209 is manufactured without processes such as polishing to smooth the surface, and therefore the surface of the frame 209 includes some unevenness. Therefore, when the frame 209 holds the movable member 13 so that the circuit pattern portion 123 included in the movable member 13 contacts the holding surface 301, protrusions included in the holding surface 301 may come into contact with the circuit pattern portion 123. As a result, the circuit pattern portion 123 may be scratched, or the wiring included in the circuit pattern portion 123 may be broken or short-circuited. Similarly, scratches, breaks, short-circuits, etc. may occur if foreign matter adheres to the holding surface 301, etc. Scratches on the circuit pattern portion 123 or breaks or short-circuits in the wiring may prevent the movable member 13 from operating normally.

[0078] In this embodiment, the spectrometer 100 has a spacer member 300 between the holding surface 301 and the held surface 13a, the spacer member 300 having a thickness t1 that is thicker than a thickness t2 of the circuit pattern portion 123 provided on the held surface 13a. This prevents the circuit pattern portion 123 from coming into contact with the holding surface 301 when the frame 209 holds the movable member 13 with the holding surface 301. As a result, in this embodiment, it is possible to prevent the circuit pattern portion 123 from being scratched and the wiring included in the circuit pattern portion 123 from being broken or short-circuited, and therefore damage to the circuit pattern portion 123 included in the movable member 13 can be prevented.

[0079] In the present embodiment, a configuration in which the circuit pattern portion 123 includes wiring has been exemplified, but the circuit pattern portion 123 may include, in addition to or instead of wiring, electrode connection portions 150, electric circuits, electronic circuits, etc. The thickness t2 of the circuit pattern portion 123 corresponds to the thickest thickness of the components included in the circuit pattern portion 123.

[0080] Furthermore, in this embodiment, the spacer member 300 is provided in an area other than a predetermined functional area of ​​the movable member 13. This functional area includes at least one of the movable area of ​​the movable member 13 and the path through which light incident on the movable member 13 passes. With this configuration, the spectrometer 100 can prevent damage to the circuit pattern portion 123 included in the movable member 13 without impeding the function of the movable member 13.

[0081] In this embodiment, the spacer member 300 includes a first spacer member 300a, a second spacer member 300b, a third spacer member 300c, and a fourth spacer member 300d. This allows the frame 209 to stably hold the movable member 13 while reducing the contact area between the spacer member 300 and the holding surface 301 and the held surface 13a. This also reduces the probability of protrusions or foreign objects being caught between the holding surface 301 and the held surface 13a, thereby more effectively preventing damage to the circuit pattern portion 123.

[0082] Furthermore, in this embodiment, the spacer member 300 has elasticity. As a result, even if there is a protrusion or foreign matter on the holding surface 301, the spacer member 300 can deform to absorb the unevenness caused by the protrusion or foreign matter. As a result, the movable member 13 can be stably held and damage to the circuit pattern portion 123 can be suitably prevented.

[0083] [Other Preferred Embodiments] Although the preferred embodiments have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments without departing from the scope of the claims.

[0084] In this embodiment, the movable member 13 is used as an example of a device, but this is not limited to this and any device including a circuit pattern portion and a held surface may be used.

[0085] In the embodiment, the spectrometer 100 is illustrated, but the device-equipped equipment according to the embodiment is not limited to the spectrometer 100. For example, the device-equipped equipment may be a projector, a head-mounted display, a head-up display, or the like, including a device such as a DMD (Digital Mirror Device). Furthermore, the movable member 13 is not limited to a MEMS mirror and may be any movable member.

[0086] The ordinal numbers, quantities, and other figures used in the description of the embodiments are all provided as examples to specifically explain the technology of the present invention, and the present invention is not limited to the illustrated figures. Furthermore, the connection relationships between the components are provided as examples to specifically explain the technology of the present invention, and do not limit the connection relationships that realize the functions of the present invention. [Explanation of symbols]

[0087] 1 chassis 2. Cushioning material 10 Direction of movement 11. Windows 12 Switch 13 Movable parts 13a Surface to be held 14 Mirror Surface 16, 17 Light passing area 100 Spectrometer (an example of equipment mounted on the device) 120 Mirror section 123 Circuit Pattern Section 130a, 130b driving beam 131a to 131d piezoelectric drive units 132a to 132d Piezoelectric drive units 133 Beam member 140a, 140b Support part 150 Electrode connection part 201 Entrance slit 202 Concave diffraction grating 203 Tapered hole 204 Exit slit 209 Frame (an example of a holding member) 209a, 209b, 209c, 209d aperture 210 outer frame 215a Processing section 216 Light source 217 Light receiving part 218 Battery 300 spacer member 300a First spacer member 300b Second spacer member 300c third spacer member 300d Fourth spacer member 301 Holding surface E Swing shaft t1, t2 thickness [Prior art documents] [Patent documents]

[0088] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-111133

Claims

1. A device including a held surface and a circuit pattern portion provided on at least a part of the held surface; a holding member that holds the device with a holding surface facing the held surface; a spacer member provided between the holding surface and the held surface, The thickness of the spacer member is greater than the thickness of the circuit pattern portion provided on the held surface, When viewed from the normal direction of the holding surface The holding member is provided with a rectangular opening, The device-mounted equipment includes four spacer members arranged near the four corners of the opening and at positions that are point-symmetrical with respect to the center of the opening.

2. The device-mounted equipment according to claim 1 , wherein the circuit pattern portion includes wiring.

3. 2. The device-mounted equipment according to claim 1, wherein the spacer member is provided in an area other than a predetermined functional area of ​​the device.

4. the device has a movable member; The device-mounted equipment according to claim 3 , wherein the functional area includes at least one of a movable area of ​​the movable member and a path through which light incident on the device passes.

5. The device-mounted equipment according to claim 1 , wherein the spacer member has elasticity.

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