Purge flow distribution system for a substrate container and method for implementing a purge flow distribution system - Patents.com

Abstract

The substrate container includes a shell defining an interior space and a purge flow distribution system. The shell includes a front opening, a bottom wall, and a rear wall. The purge flow distribution system receives a flow of purge gas and includes an inlet and a network of individual gas distribution devices configured to distribute the flow of purge gas to the interior space. Also included is a supply line connected to the inlet and configured to split a supply of purge gas to the network of individual gas distribution devices. A method of purging an open substrate container includes supplying a flow of purge gas to the inlet of the purge flow distribution system and splitting the purge gas for supply to the network of individual gas distribution devices for distribution to the interior space.

Description

[Technical Field]

[0001] This disclosure claims priority to U.S. Provisional Patent Application No. 63 / 272,282, filed October 27, 2021, which priority document is incorporated herein by reference.

[0002] The present disclosure relates generally to a substrate container having a front opening for processing semiconductor devices. More particularly, the present disclosure relates to a purge gas distribution system for distributing a purge gas into the interior of the substrate container and a method for implementing the purge gas distribution system. [Background technology]

[0003] Substrates in the form of wafers can be processed to form semiconductor devices. Wafer substrates, or simply substrates, are subjected to a series of processing steps. Exemplary processing steps can include, but are not limited to, material layer deposition, doping, etching, or chemical or physical reactions of materials on the substrate. Substrate containers are used to store and transport wafers during processing between processing steps within a fabrication facility. During some processing steps, substrates are processed by processing equipment in a clean environment (e.g., a clean room). During processing, for example, during purging, gases must be introduced and removed from a substrate container, such as a front opening unified pod (FOUP), and therefore the FOUP must have one or more locations where gas can enter or exit the FOUP. Substrates can be transferred from the substrate container to a processing tool via an equipment front end module (EFEM). The EFEM typically includes a load port for receiving the substrate container, a transfer unit, a frame or "mini-environment," and a fan filter unit used to generate gas flow within the EFEM.

[0004] During use, a substrate container is docked onto the load port and the EFEM door is opened. The door is then disengaged from the substrate container, allowing a transfer unit housed within the EFEM to access the substrates contained within the substrate container for processing. Gas flow introduced by the fan filter unit flows through the EFEM in a direction from the top of the EFEM to the bottom of the EFEM. If the front opening of the substrate container interfaces with the load port opening of the EFEM, some of the gas flowing through the EFEM and across the load port opening may be inadvertently directed into the interior of the container, temporarily increasing relative humidity and / or oxygen levels within the substrate container's microenvironment, potentially interfering with the substrate container's purging capabilities and potentially undesirable. Summary of the Invention

[0005] The present disclosure is directed to a system for distributing purge gas for wafer or reticle-carrying containers, such as FOUPs or pods (e.g., reticle pods) used in semiconductor manufacturing. More particularly, the present disclosure is directed to a purge flow distribution system within a FOUP or reticle pod for distributing a flow of purge gas to an interior space of the substrate container by splitting a flow of purge gas from a common input port into multiple discrete input purge ports to feed a network of individual gas distribution devices.

[0006] In at least one exemplary embodiment, the substrate container defines an interior space. shell Including, shell comprises a front opening, a first side wall, a second side wall, a rear wall, and shellThe substrate container includes a bottom wall including a forward edge extending between the first and second sidewalls along a forward opening. The substrate container also includes a purge flow distribution system configured to receive a flow of purge gas, the purge flow distribution system including an inlet configured to receive the flow of purge gas and a network of individual gas distribution devices configured to distribute the flow of purge gas to the interior space. The purge flow distribution system further includes a supply line connected to the inlet, the supply line configured to divide the flow of purge gas among the network of individual gas distribution devices. According to at least one exemplary embodiment, the supply line includes a first flow path to one gas distribution device of the network of individual gas distribution devices and a second flow path to another gas distribution device of the network of individual gas distribution devices. In an embodiment, one gas distribution device in the network of gas distribution devices may be a first gas distribution device disposed closer to the rear wall, and another gas distribution device in the network may be a second gas distribution device, the second gas distribution device being disposed closer to the front opening, with the first flow path configured to supply a portion of the purge gas flow to the first gas distribution device and the second flow path configured to supply another portion of the purge gas flow to the second gas distribution device. It is recognized that the second gas distribution device may be disposed elsewhere within the substrate vessel, such as on another rear or adjacent gas distribution device, and is not limited to the above embodiment. According to at least one other exemplary embodiment, the purge flow distribution system further includes a manifold base disposed on the bottom wall that receives the purge gas flow from the inlet and divides the purge gas flow among the network of gas distribution devices, and the manifold base may be configured to divide the second flow path into at least a left second flow path and a right second flow path to supply a portion of the purge gas flow to the second gas distribution device.

[0007] In at least one exemplary embodiment, In the open stateA method for purging a substrate container having a front opening includes supplying a flow of purge gas through an inlet port disposed in a wall of the substrate container to an inlet of a purge flow distribution system disposed at least partially within the substrate container, and splitting the purge gas through supply lines of the purge flow distribution system to supply to a network of individual gas distribution devices for distributing the flow of purge gas into an interior space of the substrate container, the supply lines including at least a first flow path to one gas distribution device of the network of gas distribution devices and at least a second flow path to another gas distribution device of the network of individual gas distribution devices. In an embodiment, the method further includes directing a first portion of the flow of purge gas to the first gas distribution device via the first flow path and directing a second portion of the flow of purge gas to the second gas distribution device via the second flow path.

[0008] The disclosed and other features, aspects, and advantages of both the substrate container and the method of purging the substrate container will be better understood with reference to the following drawings. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a front perspective view of a substrate container in accordance with at least one example embodiment; [Figure 2] FIG. 1 is an exploded view of a substrate container in accordance with at least one example embodiment. [Figure 3A] 1 is a schematic diagram of a substrate container having a purge flow distribution system configured to split the supply of purge gas according to different embodiments. [Figure 3B] 1 is a schematic diagram of a substrate container having a purge flow distribution system configured to split the supply of purge gas according to different embodiments. [Figure 3C] 1 is a schematic diagram of a substrate container having a purge flow distribution system configured to split the supply of purge gas according to different embodiments. [Figure 4A]FIG. 1 illustrates a rear perspective view of a substrate container having a purge flow distribution system configured to split the supply of purge gas in accordance with at least one example embodiment. [Figure 4B] 4B is a cross-sectional top side view of the substrate container of FIG. 4A in accordance with at least one example embodiment. [Figure 5A] FIG. 1 is a rear perspective view of a substrate container having a purge flow distribution system configured to split the supply of purge gas using a manifold base, according to at least one example embodiment. [Figure 5B] 5B is a schematic diagram of the manifold base of FIG. 5A configured to split the supply of purge gas according to different embodiments. [Figure 5C] FIG. 5B is a bottom side view of the substrate container of FIG. 5A according to at least one example embodiment. [Figure 6] 1 is a flow diagram for a method of purging a substrate container that includes splitting a supply of purge gas to a network of individual gas distribution devices, according to at least one example embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] While the present disclosure is susceptible to various modifications and alternative forms, specifics of the disclosure have been shown by way of example in the drawings and will be described in detail. It should be understood, however, that the intention of the present disclosure is not to limit aspects of the disclosure to the particular exemplary embodiments described. On the contrary, the intention of the present disclosure is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the disclosure.

[0011] As used herein, the term "gas distribution device network" refers to a network including multiple individual, distinct gas distribution devices connected together by at least one supply line. The term "gas distribution device" refers to a device that includes at least one gas distribution surface and is a combination of any multiple gas distribution surfaces located at a specific, defined location in the substrate vessel; for example, a front gas distribution device includes all gas distribution surfaces located at the front of the substrate vessel. The term "gas distribution surface" refers to a structural portion of a gas distribution device that distributes a portion of the purge gas from the gas distribution device to an interior space, and a gas distribution device can include multiple gas distribution surfaces. The term "supply line" refers to piping, tubing, and plumbing that receives purge gas and connects to an inlet port used to divide and supply the purge gas to input purge ports for the gas distribution device and / or gas distribution surface. That is, a supply line can be used to supply purge gas to a single input purge port for a gas distribution device / gas distribution surface, or a supply line can be used to supply purge gas along multiple input purge ports for a gas distribution device / gas distribution surface. The term "pipe" or "piping" means a structure used to distribute the flow of purge gas through a network of gas distribution devices, and includes pipes, piping, conduits, passages, connectors, valves, controllers, and similar structures that can be used to set / regulate the flow of gas through a network of gas distribution devices.

[0012] Also, as used herein, the terms "front" and "rear" and "right" and "left" are used to describe various elements, but these elements are not limited by these terms. Instead, these terms are used merely to distinguish one element from another. Instead, these terms may be broadly construed to include any positional relationship between elements, including front, rear, side, top, bottom, or any combination thereof, without departing from the scope of the present disclosure.

[0013] As used in this specification and the appended claims, the singular forms "a," "an," and "the" include plural references unless the content clearly dictates otherwise. As used in this specification and the appended claims, the term "or" is generally used in its sense including "and / or" unless the content clearly dictates otherwise.

[0014] The following detailed description should be read with reference to the drawings, in which like elements in different drawings are numbered the same. The detailed description and drawings, which are not necessarily to scale, depict example embodiments and are not intended to limit the scope of the invention. The example embodiments depicted are intended to be exemplary only. Selected features of any example embodiment may be incorporated into additional embodiments, unless expressly stated otherwise.

[0015] The present disclosure generally relates to a purge flow distribution system for a substrate container having a front opening for accessing the interior space of the substrate container. More particularly, the present disclosure relates to a purge flow distribution system configured to distribute a flow of purge gas to the interior space of the substrate container by splitting a flow of purge gas from a common source into multiple discrete input purge ports to feed a network of individual gas distribution devices. In some embodiments, the purge flow distribution system can be configured to prevent gas from entering the front opening of the substrate container while it is open, or can be configured as an outlet to facilitate exhaust of purge gas from the substrate container when it is closed.

[0016] Substrates in the form of wafers can be processed to form semiconductor devices. A substrate container is a container for transporting substrates during processing. Substrates can be stored in the substrate container before and during different processing steps. The substrate container is accessed through a front opening of the substrate container. The substrate container can be, for example, a Front Opening Unified Pod (FOUP). In embodiments, the substrate container can be a container for reticles, such as a reticle pod. In such embodiments, the container body can be included as at least part of an outer pod configured to encase the inner pod, and a purge flow distribution system including a flow distribution system base is configured to provide a purge gas to an interior space of the outer pod.

[0017] 1-2 show a substrate container 1 according to an embodiment of the present disclosure. FIG. 1 is a front perspective view of the substrate container 1, while FIG. 2 illustrates the substrate container with the door removed (e.g., the door open). As shown in FIG. 1, the substrate container 1 has a front door 4 and shell 6. Front door 4 is shell 6 and blocking the front opening 12.

[0018] 2 illustrates the substrate container 1 with the front door 4 removed (e.g., the front door 4 is open). As shown in FIG. shell6 defines an interior space 8 of the substrate container 1, and substrates are stored in the interior space 8 of the substrate container 1. The substrate container 1 can be accessed by moving (e.g., opening or removing) the door 4. For example, the door 4 in FIG. shell By inserting it into the 6 shell In an embodiment, the door 4 and shell One or more of the doors 4 may include a locking mechanism (not shown) to prevent accidental removal of the door 4 .

[0019] As further shown in Figure 2, shell 6 includes a first side wall 14, a second side wall 16, a rear wall 18, and top and bottom walls 20 and 22. The first side wall 14 is opposite the second side wall 16, and the top wall 20 is opposite the bottom wall 22. The first side wall 14 can be referred to as the left side, while the second side wall 16 can be referred to as the right side. The top wall 20 and bottom wall 22 extend between the first side wall 14 and the second side wall 16, respectively. shell Bottom wall 22 includes a front edge 24A extending along front opening 12. Front edge 24A is shell 6. The first side wall 14 includes a front edge 24B that extends along the front opening 12. The front edge 24B of the first side wall 14 is shell 2, the front edges 24A, 24B of the embodiment are adjacent the front opening 12, respectively.

[0020] The substrate container 1 is shell6 may include an equipment hook-up 26 on the top wall 20 thereof. In an embodiment, the equipment hook-up 26 may allow a standard robotic attachment (not shown) to be connected to the substrate container 1 for moving the substrate container 1, such as, but not limited to, a robotic arm. For example, the robotic arm may be used to move the substrate container 1 between different pieces of processing equipment. In an embodiment, the substrate container 1 may include one or more handles (not shown) to allow manual movement of the substrate container 1 by a user (e.g., a technician, etc.).

[0021] The substrate container 1 may include a plurality of shelves 28 for holding substrates (not shown) within the interior space 8. The portions of the second side wall 16 on the shelves 28 are obscured in FIG. 2 but have a similar configuration to the portions on the shelves 28 on the first side wall 14 (e.g., slots in the substrate container). Each shelf 28 is sized to hold a substrate (not shown) within the interior space 8. For example, the shelves 28 in the embodiment are sized to hold substrates of a particular size (e.g., 150 mm wafers, 200 mm wafers, etc.).

[0022] The substrate container 1 may include a plurality of inlet and / or outlet purge ports (e.g., 30A, 30B, 30C, etc., in FIG. 2 ) on the bottom wall 22 corresponding to the inlets and / or outlets of the substrate container 1. These plurality of inlet and / or outlet purge ports may be connected to a purge flow distribution system, as discussed further below. At least one outlet port may be provided for releasing gas in the interior space 8 from the substrate container 1 and may be located on the bottom wall between the inlet and the second side wall. The inlet and / or outlet purge ports may be: shell It will be appreciated that the inlet and / or outlet purge ports may be located at different locations along the substrate container, such as on the rear wall 18, and in such an embodiment the inlet and / or outlet purge ports would correspond to the inlet and outlet of the substrate container.

[0023] The substrate container 1 also includes at least one inlet, e.g., an inlet port, for receiving a flow of purge gas from a purge gas supply system. The purge gas supply system delivers a purge gas, which may generally be an inert gas. The purge gas may include, for example, but is not limited to, one or more of nitrogen, clean dry air (CDA), and extra clean dry air (xCDA).

[0024] In an embodiment, the inlet port is connected to a purge flow distribution system for supplying purge gas to the inlet purge port and distributing the purge gas to the interior space 8. When open A purge flow distribution system can be used to distribute purge gas into the interior space 8, thereby reducing the intrusion of the external environment (e.g., gases, particles, moisture, etc.) into the substrate container 1 through the front opening 12. For example, the supplied purge gas is configured to flow out of the interior space 8 through the front opening 12, which helps minimize any inward flow into the interior space 8 through the front opening 12.

[0025] Meanwhile, purge gas can continue to be supplied to the interior space 8 of the substrate container 1 when the door 4 is received in the front opening 12 and the substrate container 1 is closed. The purge gas can also be exhausted to the exterior of the substrate container 1 via a purge flow distribution system, as described herein in various embodiments, which can act as both an inlet and an outlet, or as an outlet only, depending on the configuration and desired application. The positive pressure of purge gas within the interior space 8 creates a diffusion gradient that facilitates the flow of purge gas from the interior space through one or more outlets and out of the substrate container.

[0026] 3A illustrates a schematic diagram of an embodiment of a purge flow distribution system 340. The purge flow distribution system 340 is connected to an inlet port 305 to receive purge gas from a purge supply system. The purge flow distribution system 340 further includes a network of individual gas distribution devices 350 for distributing the flow of purge gas to the interior space 8. Supply lines 360 connected to the inlets are used to divide the flow of purge gas to the network of individual gas distribution devices 350. For example, in an embodiment, the supply line includes at least a first flow path 360A connected to a first gas distribution device 350A and at least a second flow path 360B connected to a second gas distribution device 350B. However, it will be appreciated that the supply line 360 ​​can be split into any number of different flow paths as needed for substrate vessel purging operations, such as additional third, fourth, etc. flow paths for supplying purge gas to separate and / or identical gas distribution devices within the substrate vessel 1. That is, the supply line 360 ​​is configured to receive a supply of purge gas from a common input port, e.g., a purge gas source, and to split the supply of purge gas into multiple discrete input purge ports for supplying multiple gas distribution devices 350.

[0027] The network of individual gas distribution devices includes a plurality of individual, distinct gas distribution devices 350 connected together by at least one supply line 360. The network of individual gas distribution devices therefore includes the individual gas distribution devices 350 and associated piping connecting the individual distribution devices for distributing purge gas flow inside the substrate vessel 1.

[0028] The gas distribution device 350 is separate and distinct from other gas distribution devices in the network. RudeEach gas distribution device includes at least one gas distribution surface, and each gas distribution device is a combination of any of multiple gas distribution surfaces 351A, 351B, and 351C located at a specific, defined location in the substrate vessel. For example, the front gas distribution device includes any and all of the gas distribution surfaces 351A and 351B located at the front of the substrate vessel. That is, the gas distribution device is a combination of any or all of multiple gas distribution surfaces located at a specific location in the substrate vessel, and the gas distribution surface is a structural portion of the gas distribution device that distributes a portion of the purge gas from the gas distribution device to the interior space. It is recognized that the gas distribution surfaces 351A, 351B, and 351C are connected to at least one input purge port and include structures for distributing the purge gas to the interior space, such as diffusers, manifolds, membranes, parts having slits or nozzles, or made of porous materials, or similar structures that can direct the purge gas into the interior of the substrate vessel, and combinations thereof.

[0029] For example, in an embodiment, the first gas distribution device 350A may be located in the rear section, e.g., closer to the rear wall 18 of the FOUP, and may include at least one gas distribution surface 351A, 351B, e.g., first and / or second diffusers connected to at least one input purge port. The second gas distribution device 350B may be located in the front section, e.g., closer to the front opening 12 of the FOUP, and may include at least one gas distribution surface 351C with multiple openings arranged along the length of the gas distribution surface between the first and second side walls or extending vertically along one of the front edges of the first or second side walls, and may include top / bottom manifolds and / or right / left manifolds connected to at least one other input purge port. The supply line 360 ​​is divided into a first flow path 360A for supplying at least a portion of the flow of purge gas to an input purge port for the first gas distribution device 350A, and into a second flow path 360B for supplying at least another portion of the flow of purge gas to an input purge port for the second gas distribution device 350B. It will be appreciated that the first and second gas distribution devices are not necessarily located in the rear and front sections, but are provided as an example and can be provided in different (or the same) locations within the interior space of the substrate container.

[0030] The amount of purge gas provided to the first and second flow paths 360A, 360B to supply the individual gas distribution devices 350A, 350B can be set in a number of ways. For example, in embodiments, valves can be provided in the supply lines and set, for example, with predetermined opening sizes, to divide the supply of purge gas to the first and second flow paths 360A, 360B, thereby providing predetermined amounts of purge gas to the individual gas distribution devices 350A, 350B. These valves can include needle valves, ball valves, butterfly valves, check valves, or similarly structured valves used to set the amount of purge gas flow to the different individual gas distribution devices. It will be appreciated that the amount of purge gas can be set using orifices, spring-loaded diverters, or by providing piping / pipes with smaller or larger cross-sectional areas as needed in one of the first or second flow paths to divide the supply of purge gas into appropriate / predetermined amounts to feed the gas distribution devices, e.g., the division / supply of purge gas is based on a network differential pressure. It will also be appreciated that the amount of purge gas can be set for each individual gas distribution surface 351A, 351B, 351C. In other words, the supply of purge gas from a single inlet port is divided and set so that predetermined amounts of purge gas are provided to multiple discrete input purge ports to feed each gas distribution device and / or gas distribution surface.

[0031] 3B illustrates another embodiment of a purge flow distribution system 340, in which the inlet includes at least two inlet ports 305A and 305B. In the embodiment of FIG. 3B, the purge flow distribution system 340 is connected to both inlet ports 305A, 305B to receive purge gas from a purge gas supply system. The purge flow distribution system further includes a network of individual gas distribution devices 350 to distribute the purge gas within the interior space 8. However, in this embodiment, a supply line 360 ​​is connected to both inlet ports 305A and 305B such that the supply of purge gas is combined and then split into at least a first flow path 360A connected to a first gas distribution device 350A and a second flow path 360B connected to a second gas distribution device 350B. It will be appreciated that the purge gas supplies can be mixed / combined by piping supply lines from the inlet ports 305A, 305B, or can be mixed using, for example, an in-line mixer and then split / separated into different flow paths 360A, 360B. The first and second gas distribution devices 350A, 350B each include at least one gas distribution surface for distributing the purge gas into the interior of the substrate vessel as discussed above.

[0032] The amount of purge gas provided to the first and second flow paths 360A, 360B to supply the individual gas distribution devices 350A, 350B can be configured in a number of ways. For example, in embodiments, valves can be provided and configured upstream and / or downstream of the mixing / combining of the purge gas supply from the inlet ports 305A, 305B to divide the purge gas supply into predetermined amounts of purge gas for the individual gas distribution devices 350A, 350B and / or individual gas distribution surfaces 351A, 351B, 351C. In other words, the purge gas supply from both inlet ports 305A, 305B is divided and configured to provide predetermined amounts of purge gas to multiple discrete input purge ports to supply the individual gas distribution devices and / or individual gas distribution surfaces, respectively.

[0033] 3C illustrates yet another embodiment of a purge flow distribution system 340, in which the inlet includes at least two inlet ports 305A and 305B, which are individually used to feed different networks of individual gas distribution devices. That is, the purge flow distribution system 340 includes at least two networks of individual gas distribution devices 350 to distribute the flow of purge gas into the interior space 8. In this embodiment, the purge flow distribution system 340 includes at least two individual supply lines 360, 370, each individually connected to the inlet ports 305A and 305B. Using a first supply line 360 ​​connected to the inlet port 305A, the supply of purge gas from the inlet port 305A is split into at least a first flow path 360A connected to a first gas distribution device 350A having gas distribution surfaces 351A, 351B, and a second flow path 360B connected to a second gas distribution device 350B having at least one gas distribution surface 351C. Using a second supply line 370 connected to the inlet port 305B, the supply of purge gas from the inlet port 305B is split into at least a first flow path 370A connected to a third gas distribution device 350C having at least two gas distribution surfaces 351D, 351E, and a second flow path 370B connected to a fourth gas distribution device 350D having at least one gas distribution surface 351F.

[0034] The amount of purge gas provided to the first and second flow paths of the at least two networks of individual gas distribution devices to supply the individual gas distribution devices 350A, 350B, 350C, 350D can be configured in a number of ways. For example, in embodiments, valves can be provided and configured in the supply lines 360, 370 to divide the supply of purge gas into predetermined amounts of purge gas for the individual gas distribution devices 350A, 350B, 350C, 350D and / or the individual gas distribution surfaces 351A, 351B, 351C, 351D, 351E, 351F. In other words, the supply of purge gas from the inlet ports 305A, 305B is each individually used to supply the respective supply lines and is divided and configured using the respective respective supply lines to supply the individual gas distribution devices, thereby providing predetermined amounts of purge gas to the plurality of discrete input purge ports.

[0035] While Figures 3A-3C show the supply line 360 ​​(or 370) splitting prior to supplying the individual gas distribution devices, it is recognized that the supply line can be separated into any number of different flow paths that can be used to individually supply purge gas to any of the gas distribution devices and / or gas distribution surfaces, so long as a predetermined amount of purge gas flow can be configured to be split and / or distributed to each gas distribution device, e.g., equal amounts of purge gas flow to all gas distribution devices in the network, or more purge gas flow to one of the gas distribution devices as needed. It is also recognized that the inlet ports can be provided at different locations along the substrate vessel. For example, the bottom wall of the substrate vessel can include a rear inlet port for introducing a second flow of purge gas, the rear inlet port being located closer to the rear wall than the front opening, or the bottom wall can include a second inlet port for introducing a second flow of purge gas, the second inlet port being located closer to the front opening than the rear wall, or located elsewhere along the substrate vessel. In other embodiments, the inlet port (and / or outlet port) can be provided in the bottom wall of the substrate container, and if multiple inlet ports are provided, the purge gas can be combined before being supplied to the purge flow distribution system.

[0036] Although the above description has been given with respect to a FOUP, it will be appreciated that any of the embodiments discussed herein may similarly be used to distribute purge gas to an interior space within a reticle pod, for example, an interior space within an outer pod of a reticle pod.

[0037] 4A and 4B illustrate another embodiment in which a supply line can be provided to split the supply of purge gas to individual gas distribution devices and / or individual gas distribution surfaces, in an embodiment, a second flow path of the supply line is provided after the first flow path.

[0038] FIG. 4A shows the back side of the substrate container 400. FIG. shell 406 defines an interior space 408 of the substrate container 400 in which substrates (not shown) are stored. shell 406 includes a first sidewall 414, a second sidewall 416, a rear wall 418, and top and bottom walls 420 and 422. The first sidewall 414 is opposite the second sidewall 416, and the top wall 420 is opposite the bottom wall 422. The first sidewall 414 may be referred to as the left side, while the second sidewall 416 may be referred to as the right side. The top wall 420 and bottom wall 422 extend between the first sidewall 414 and the second sidewall 416, respectively. The substrate container 400 includes: shell It may also include a carrier plate 423 that may provide a base to which 406 may be attached.

[0039] The purge flow distribution system shell 406, or e.g. shell Between 406 and carrier plate 423 shell You can connect to 406, or shellThe purge flow distribution system can be at least partially disposed between the bottom wall 422 and the carrier plate 423. The purge flow distribution system is connected to at least one inlet port that is connected to the purge gas supply system to supply purge gas to a network of individual gas distribution devices. The purge flow distribution system includes at least one supply line that is connected to at least one inlet purge port 430A, 430B in the bottom wall 422. The supply line includes a first flow path 460A that is connected to the inlet purge port 430A, 430B to supply purge gas to the rear gas distribution device 450A, 450B, which can include at least two diffusers. These at least two diffusers 450A, 450B include a plurality of openings for distributing purge gas at the rear of the substrate vessel 400. At least one of the at least two diffusers 450A, 450B of the rear gas distribution device also includes an opening at its top end closer to the top wall 420 of the substrate vessel 400 to form an input purge port that is connected to a second passage 460B to supply purge gas to another gas distribution device, e.g., a second gas distribution device. In this embodiment, the second passage 460B is connected to a front gas distribution device that includes at least one gas distribution surface, e.g., a top manifold 450C located near the top wall 420 of the substrate vessel 400.

[0040] 4B, the second flow path 460B includes piping, passages, or pathways along a closer top portion of the top wall 420 of the substrate container 400 for delivering at least a portion of the purge gas delivered to the first flow path 460A to the front gas distribution device. For example, the amount of purge gas to the front gas distribution device can be set, for example, by sizing the cross-sectional area of ​​the second flow path 460B to have a predetermined amount of purge gas flow, where the flow is proportional to the cross-sectional area, and / or by setting the size, e.g., diameter, of a plurality of openings in the at least two diffusers 450A, 450B such that a predetermined amount of purge gas is delivered through the second flow path 460B depending on the supply pressure, e.g., pressure differential. That is, the first gas distribution device is supplied with purge gas for distribution of a predetermined amount of purge gas through the openings in the diffusers 450A, 450B, while the remaining amount of purge gas is supplied to the second gas distribution device via the second passage 460B for distribution of the purge gas through the gas distribution surface of the second (front) gas distribution device. While described herein with reference to a top manifold and diffuser, it will be recognized that any gas distribution surface may be any structure for distributing purge gas inside the substrate vessel 400, including, but not limited to, top / bottom / side manifolds, top / bottom / side diffusers, top / bottom / side membranes, top / bottom / side portions with slits or nozzles, or top / bottom / side portions made of a porous material. It will also be recognized that the supply lines can also include valves or other structures for setting the amount of purge gas supplied to the first gas distribution device and / or the second gas distribution device.

[0041] FIG. 5A illustrates another embodiment, showing the back side of a substrate container 500 . shell 506 defines an interior space of the substrate container, and substrates (not shown) are stored in the interior space of the substrate container 500 . shell506 includes a first sidewall 514, a second sidewall 516, a rear wall 518, and top and bottom walls 520 and 522. The first sidewall 514 is opposite the second sidewall 516, and the top wall 520 is opposite the bottom wall 522. The first sidewall 514 may be referred to as the left side, while the second sidewall 516 may be referred to as the right side. The top wall 520 and the bottom wall 522 extend between the first sidewall 514 and the second sidewall 516, respectively. The substrate container 500 includes: shell It may also include a carrier plate 523 that may provide a base to which 506 may be attached.

[0042] The purge flow distribution system shell 506, or e.g. shell Between 506 and carrier plate 523 shell 506, or shell 506 and carrier plate 523. Purge flow distribution system 540 is connected to at least one inlet port 505, which is connected to a purge gas supply system to supply purge gas to the network of individual gas distribution devices. Purge flow distribution system 540 includes at least one supply line connected to at least one purge port in bottom wall 522. In this embodiment, purge flow distribution system 540 includes a manifold base 560 provided in bottom wall 522 and configured to divide the flow of purge gas to the network of gas distribution devices.

[0043] 5B, a manifold base 560 is connected to a network of individual gas distribution devices 550. The manifold base 560 includes a first flow path 560A connected to an inlet purge port to supply purge gas to the first gas distribution device, and a second flow path 560B connected to the inlet purge port to supply purge gas to the second gas distribution device. The first gas distribution device may be a rear gas distribution device 550A that may include rear left and right diffusers 550A and 550B, and the second gas distribution device may be a front gas distribution device that may include a front manifold 550C and left and right manifolds 550D and 550E for distributing purge gas to the interior of the substrate vessel at the front side of the substrate vessel. The purge flow distribution system 540 is configured in such a way that supply lines can be adjusted to set the amount of purge gas flowing through at least one of the front and rear gas distribution devices, and / or can also be set to adjust the amount of purge gas to the individual gas distribution surfaces of the front and / or rear gas distribution devices. It will be appreciated that the first and second gas distribution devices do not necessarily have to be located in the rear and front sections, are provided as an example, and can be provided in different (or the same) locations within the interior space of the substrate container.

[0044] For example, in this embodiment, the inlet supply line valve 580 can be adjusted to set the amount of purge gas supplied to the front and rear gas distribution devices, i.e., the supply line valve 580 can be adjusted to provide a pressure differential to split the supply of purge gas to the first flow path 560A and the second flow path 560B to set the amount of purge gas supplied to the front and rear gas distribution devices needed to purge the substrate container.

[0045] In addition to controlling the amount of purge gas to the front gas distribution device by setting the supply line valve 580, multiple adjustable valves 585A, 585B, 585C, 585D can be used to adjust the amount of purge gas to the individual gas distribution surfaces 550C, 550D, 550E of the front gas distribution device. For example, adjustable valve 585A can be set to control the amount of purge gas to the front right side, e.g., right manifold 550E, adjustable valves 585B and 585C can be set to control the amount of purge gas to the front manifold 550C, and adjustable valve 585D can be set to control the amount of purge gas to the front left side, e.g., left manifold 550D. Thus, by setting the adjustable valves 580, 585A, 585B, 585C, 585D, the manifold base 560 can be used to split purge gas from the supply line to a network of individual gas distribution devices and / or individual gas distribution surfaces. In other words, the supply of purge gas from a single inlet port is divided and configured to provide predetermined amounts of purge gas to multiple discrete input purge ports, each to supply an individual gas distribution device 550.

[0046] As can be seen in Figure 5C, the inlet ports connected to the purge flow distribution system 540 can be located in a variety of locations. For example, while Figure 5A generally shows inlet port 505 located below manifold base 560 to supply purge gas from the purge gas distribution system, it will be appreciated that purge gas can be supplied to any number of inlet (or outlet) ports 505A, 505B, 505C, 505D provided through carrier plate 523 depending on the nature of the application / docking configuration for the substrate container. It will be appreciated that purge gas from inlet ports 505A, 505B, 505C, 505D can be combined before being supplied to manifold base 560 or can be provided / combined to supply different purge flow distribution systems within the substrate container as needed.

[0047] It will be appreciated that the amount of purge gas can also be controlled or set using any combination of different structures that can set the pressure drop or flow rate based on the conservation of energy. For example, orifices can be placed in either the first and / or second flow paths to create a pressure differential to set the amount of purge gas delivered to the front and / or rear gas distribution devices and / or any individual gas distribution surfaces. Alternatively, or in addition to such structures, the cross-sectional areas of the various piping in the first and / or second flow paths can be sized to set the amount of purge gas divided between the front and rear gas distribution devices and / or between the gas distribution surfaces of the front and rear gas distribution devices. Thus, the purge flow distribution system 540 is configured to divide and deliver purge gas to different gas distribution devices and / or gas distribution surfaces by adjusting and / or setting different components of the purge flow distribution system 540 in an appropriate manner.

[0048] FIG. 6 illustrates an operational flow 600 for providing a purge flow to a substrate container according to at least one example embodiment.

[0049] Operational flow 600 may include one or more operations, actions, or functions depicted by one or more blocks 610, 620, 630, and 640. While illustrated as discrete blocks, various blocks may be divided into additional blocks, combined into fewer blocks, or removed depending on the desired implementation. As a non-limiting example, a description of method 600 corresponding to its description in FIG. 6 and performed by one or more of the apparatus or components described in the above embodiments according to one or more exemplary embodiments described herein relates to providing a purge flow into a substrate container. Process flow 600 may begin at block 610.

[0050] Block 610 may refer to supplying a flow of purge gas into an interior of the vessel through an inlet purge port connected to a purge flow distribution system disposed at least partially within a substrate vessel, which may be a wafer or reticle vessel (e.g., a FOUP or a reticle pod). The flow of purge gas may include one or more of nitrogen gas, clean dry air (CDA) gas, extra clean dry air (xCDA) gas, or any other suitable fluid for conditioning the vessel environment. Block 610 may be followed by block 620.

[0051] Block 620 may refer to splitting the purge gas through a supply line of a purge flow distribution system to supply a network of individual gas distribution devices for distribution to the interior space of the substrate container. In an embodiment, splitting the purge gas in block 630 includes splitting the supply line into a first flow path for supplying the purge gas to at least one of the network of gas distribution devices and a second flow path for supplying the purge gas to another of the network of gas distribution devices. The amount of purge gas supplied to the first flow path and the second flow path may be based on a number of predetermined operating conditions. For example, in one embodiment, one or more sensors may be used to detect at least one environmental condition inside the substrate container for a predetermined period of time. The at least one environmental condition may include one or more of relative humidity (%RH), pressure (e.g., absolute pressure), oxygen level, temperature, the measured presence of airborne molecular contaminants, the measured presence of one or more volatile organic compounds, etc. Blocks 620 / 630 may be followed by block 640.

[0052] Block 640 can be referred to as setting a first portion or amount of flow of purge gas to the first distribution device via the first flow path and setting a second portion or amount of purge gas to the second gas distribution device via the second flow path based on at least one detected environmental condition for a predetermined period of time.

[0053] In at least one exemplary embodiment, the amount of purge gas to the front gas distribution device and / or the rear gas distribution device can be obtained or determined, for example, by achieving a desired (predetermined or optimal) environmental response (e.g., inside the container). The desired environmental response can include adjusting one or more of the relative humidity (%RH), oxygen level, temperature, measured presence of airborne molecular contaminants, and / or measured presence of one or more volatile organic compounds inside the container relative to respective predetermined threshold levels. The desired environmental response can also include generating a desired pressure (e.g., absolute pressure) inside the container. The environmental response can be detected or measured by a sensor inside the container, and the detected data can be communicated to a controller outside the container, for example.

[0054] The controller analyzes the environmental response and determines the amount of purge gas to be supplied to the front gas distribution device (and / or front gas distribution surface) and the rear gas distribution device necessary to reach the applicable operating scenario. In embodiments, the controller analyzing the environmental response and determining the amount of purge gas to reach the applicable operating scenario can be achieved by design of experiments (DOE), trained neural networks, modeling, etc.

[0055] The amount of purge gas supplied to at least one forward distribution device and / or rearward distribution device can be set by a set valve in the supply line of the purge flow distribution system. These valves can include needle valves, ball valves, butterfly valves, check valves, or similarly structured valves that can be used to control the flow of gas to different individual gas distribution devices. It will be appreciated that the flow of purge gas can also be set using an orifice, a spring-loaded diverter, or by sizing the piping / pipes in one of the first or second flow paths to have a cross-sectional area that supplies a predetermined amount of purge gas given a supply pressure to split the purge gas supply as needed. In embodiments, once the amount of purge gas supplied to the network of gas distribution devices is set, the amount of purge gas supplied, e.g., a valve, is not further adjusted until needed, e.g., passively controlled.

[0056] Aspects Any of the embodiments 1 to 18 can be combined with either of the embodiments 19 and 20.

[0057] Aspect 1. Defining the interior space shell a front opening, a first side wall, a second side wall, a rear wall, and shell a bottom wall including a forward edge extending between the first side wall and the second side wall along the forward opening of the shell and a purge flow distribution system configured to receive a flow of purge gas, the purge flow distribution system comprising: an inlet configured to receive the flow of purge gas and a network of individual gas distribution devices for distributing the flow of purge gas to an interior space, the purge flow distribution system further comprising a supply line connected to the inlet, the supply line configured to divide the flow of purge gas to the network of individual gas distribution devices.

[0058] Embodiment 2. The substrate vessel of embodiment 1, wherein the supply line comprises a first flow path to one gas distribution device of the network of individual gas distribution devices and a second flow path to another gas distribution device of the network of individual gas distribution devices.

[0059] Embodiment 3. The substrate vessel of embodiment 2, wherein one gas distribution device of the network of gas distribution devices is a first gas distribution device disposed closer to the rear wall, and another gas distribution device of the network of gas distribution devices is a second gas distribution device disposed in the interior space of the substrate vessel, and the first flow path is configured to supply a portion of the flow of purge gas to the first gas distribution device, and the second flow path is configured to supply another portion of the flow of purge gas to the second gas distribution device.

[0060] Embodiment 4. The substrate vessel of embodiment 3, wherein the first flow path of the supply line to the first gas distribution device has a smaller or larger cross-sectional area than the second flow path of the supply line to the second gas distribution device, or comprises an orifice, spring-loaded diverter, or valve for directing flow to the second flow path of the supply line to the second gas distribution device.

[0061] Embodiment 5. The substrate vessel of embodiment 3, wherein the second flow path is disposed after the first flow path at an end of the first gas distribution device opposite the inlet.

[0062] Embodiment 6. The substrate container of embodiment 3, wherein the second flow path is provided in a top portion of the substrate container for supplying a purge gas to the second gas distribution device.

[0063] Embodiment 7. The substrate vessel of embodiment 6, wherein the second gas distribution device comprises a gas distribution surface comprising a plurality of openings arranged along a length of the gas distribution surface between the first sidewall and the second sidewall, or wherein the front gas distribution device comprises a gas distribution surface extending vertically along one of a front edge of the first sidewall or a front edge of the second sidewall.

[0064] Embodiment 8. The substrate vessel of any of Embodiments 1-3, wherein the purge flow distribution system further comprises a manifold base disposed in the bottom wall that receives a flow of purge gas from the inlet and divides the flow of purge gas among the network of gas distribution devices.

[0065] Embodiment 9. The substrate vessel of embodiment 8, wherein the manifold base is configured to divide the second flow path into at least a left second flow path and a right second flow path to supply a portion of the flow of purge gas to the second gas distribution device.

[0066] Embodiment 10. The substrate container of embodiment 9, wherein the manifold base comprises a plurality of adjustable valves for setting at least one of a portion of the flow of purge gas to a first flow path to a first gas distribution device and a portion of the flow of purge gas to a second flow path to a second gas distribution device.

[0067] Embodiment 11. The substrate vessel of any of Embodiments 1-9, wherein one gas distribution device of the network of gas distribution devices comprises a gas distribution surface comprising a porous material.

[0068] Embodiment 12. The substrate container of any of embodiments 1-11, wherein the purge flow distribution system comprises: shell The substrate container is attached to an inlet purge port in the bottom wall of the substrate container.

[0069] Embodiment 13. The substrate vessel of any of embodiments 1-12, wherein one gas distribution device in the network of gas distribution devices comprises: shell a substrate container including a gas distribution surface with a plurality of openings disposed along a length of the gas distribution surface between a first sidewall and a second sidewall;

[0070] Embodiment 14. The substrate container of any of embodiments 1-13, further comprising an outlet port for releasing gas from the interior space, the outlet port being located in the bottom wall between the inlet and the second side wall.

[0071] Embodiment 15. The substrate vessel of any of embodiments 1-14, wherein the bottom wall includes a rear inlet port for introducing a second flow of purge gas into the interior space via the purge flow distribution system, the rear inlet port being located closer to the rear wall than the front opening.

[0072] Embodiment 16. The substrate vessel of any of embodiments 1-14, wherein the bottom wall includes a second inlet port for introducing a second flow of purge gas into the interior space via the purge flow distribution system, the second inlet port being positioned closer to the front opening than to the rear wall.

[0073] Embodiment 17. The substrate container of any one of embodiments 1 to 16, shell the substrate container further comprising a door configured to be received within the front opening defined by the door for sealing the interior space.

[0074] Embodiment 18. The substrate vessel of any of embodiments 1-17, wherein the inlet of the purge flow distribution system comprises a first inlet and a second inlet, and the supply line is configured to combine a flow of purge gas from the first inlet and the second inlet and then divide the flow of purge gas to the network of individual gas distribution devices.

[0075] Aspect 19. In the open state1. A method for purging a substrate container, comprising: supplying a flow of purge gas through an inlet port disposed in a wall of the substrate container to an inlet of a purge flow distribution system disposed at least partially within the substrate container; and splitting the purge gas through supply lines of the purge flow distribution system to supply to a network of individual gas distribution devices for distributing the flow of purge gas into an interior space of the substrate container, the supply lines comprising a first flow path to one gas distribution device of the network of gas distribution devices and a second flow path to another gas distribution device of the network of gas distribution devices.

[0076] Embodiment 20. The method of embodiment 19, further comprising: setting a first portion of the flow of purge gas to a first gas distribution device via a first flow path; and setting a second portion of the flow of purge gas to a second gas distribution device via a second flow path.

[0077] Thus, while several illustrative embodiments of the present disclosure have been described, those skilled in the art will readily recognize that still other embodiments can be constructed and used within the scope of the claims appended hereto. Many advantages of the present disclosure encompassed by this document have been set forth in the foregoing description. It will be understood, however, that the present disclosure is in many respects merely illustrative. Changes may be made in detail, particularly with respect to the shape, size, and arrangement of parts, without departing from the scope of the present disclosure. The scope of the present disclosure is, of course, defined in the language in which the appended claims are expressed.

Claims

1. a shell defining an interior space, the shell including a bottom wall including a front opening, a first side wall, a second side wall, a rear wall, and a front edge extending between the first side wall and the second side wall along the front opening of the shell; a purge flow distribution system configured to receive a flow of purge gas; A substrate container comprising: the purge flow distribution system comprises: an inlet configured to receive the flow of purge gas; and a network of individual gas distribution devices for distributing the flow of purge gas to the interior space; the purge flow distribution system further comprising a supply line connected to the inlet, the supply line configured to divide the flow of purge gas to the network of individual gas distribution devices, and the supply line comprising a valve operable to divide the supply of purge gas into first and second flow paths to supply predetermined amounts of purge gas to the individual gas distribution devices.

2. 10. The substrate container of claim 1, further comprising an outlet port for releasing gas from the interior space, the outlet port being disposed in the bottom wall between the inlet and the second sidewall.

3. The substrate container of claim 1 , further comprising a door configured to be received within the front opening defined by the shell to enclose the interior space.

4. 1. A method of purging an open substrate container, comprising: providing a flow of purge gas through an inlet port disposed in a wall of the substrate container to an inlet of a purge flow distribution system disposed at least partially within the substrate container; splitting the purge gas through supply lines of the purge flow distribution system to feed a network of individual gas distribution devices for distributing the flow of purge gas into an interior volume of the substrate container; wherein the supply line comprises a first flow path to one gas distribution device of the network of individual gas distribution devices and a second flow path to another gas distribution device of the network of individual gas distribution devices, and the supply line comprises a valve operable to split the supply of purge gas between the first flow path and the second flow path to supply predetermined amounts of purge gas to the individual gas distribution devices.

5. 5. The method of claim 4, further comprising: directing a first portion of the flow of purge gas to a first gas distribution device via the first flow path; and directing a second portion of the flow of purge gas to a second gas distribution device via the second flow path.

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