Carrier Film for Semiconductor Wafer Processing

Abstract

The carrier film includes an adhesive layer, a core layer, and a release layer. The adhesive layer includes a hydrogenated styrene block copolymer having a storage modulus (G') of 400 kPa or less at 25°C and a first polyolefin elastomer. The core layer includes a second polyolefin elastomer, and the release layer includes a polyolefin.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of priority to U.S. Provisional Patent Application No. 62 / 986,387, filed March 6, 2020, and U.S. Provisional Patent Application No. 63 / 106,199, filed October 27, 2020, the entire contents of both of which are incorporated herein by reference.

[0002] The present invention relates to a carrier film that can be used to hold silicon wafers before and during the wafer dicing process, as well as the dies created during the wafer dicing process. [Background technology]

[0003] A typical wafer dicing film or tape used in semiconductor wafer dicing operations includes a base substrate with a pressure-sensitive adhesive on one side of the base substrate. To allow the film to be wound into roll form during manufacturing and unwound when ready for use without damaging the pressure-sensitive adhesive, many films also have a release coating, including, for example, silicone, on the opposite side of the base film as the pressure-sensitive adhesive.

[0004] When the film is wound onto the master roll, the release coating contacts the pressure-sensitive adhesive. When the film is unwound from the master roll, the pressure-sensitive adhesive separates from the release coating. Other known wafer dicing films use a release liner instead of a silicone coating to remove silicone from the product, which can cause contamination issues. The release liner protects the pressure-sensitive adhesive while the film is being wound and allows the film to be easily unwound when ready for use.

[0005] In addition, typical pressure-sensitive adhesives used in wafer dicing films contain UV-curable acrylic copolymers, which allow the adhesive properties of the pressure-sensitive adhesive to change when exposed to ultraviolet (UV) light. For example, before the wafer dicing process, a film may support a silicon wafer with a pressure-sensitive adhesive that contacts the wafer with sufficient adhesive strength to hold the wafer in place as it is diced into semiconductor chips. Exposing the film to UV light can change the adhesive properties of the pressure-sensitive adhesive so that individual semiconductor chips or dies can be easily removed from the film and placed elsewhere. Some wafer dicing films that use non-UV-curable acrylic copolymers for the pressure-sensitive adhesive are known to leave undesirable residue on the semiconductor chips when they are removed from the wafer dicing film. Summary of the Invention [Problem to be solved by the invention]

[0006] It is desirable to have a wafer dicing film with an adhesive surface that does not contain a release liner or silicone coating so that the wafer can be firmly held by the film during the dicing process, so that individual chips can be removed from the film without damaging the chips or leaving excessive residue on them, and so that the film can be wound up and unwound into a roll without damaging the adhesive surface. [Means for solving the problem]

[0007] According to one aspect of the present invention, there is provided a carrier film comprising an adhesive layer, a core layer, and a release layer. The adhesive layer comprises a hydrogenated styrene block copolymer having a storage modulus (G') of 400 kPa or less at 25°C and a first polyolefin elastomer. The core layer comprises a second polyolefin elastomer, and the release layer comprises a polyolefin.

[0008] In one embodiment, the hydrogenated styrene block copolymer has a storage modulus (G') at 25°C of 300 kPa or less.

[0009] In one embodiment, the hydrogenated styrene block copolymer has a melt flow rate (MFR) of greater than 200 g / 10 min at 230° C. under a mass of 2.16 kg.

[0010] In one embodiment, the hydrogenated styrene block copolymer has a styrene content of at least 20%.

[0011] In one embodiment, the first polyolefin elastomer and the second polyolefin elastomer are the same material. In one embodiment, the first polyolefin elastomer and the second polyolefin elastomer are ethylene octene copolymers.

[0012] In one embodiment, the first polyolefin elastomer is an alpha olefin copolymer. In one embodiment, the second polyolefin elastomer is an ethylene octene copolymer.

[0013] In one embodiment, the core layer comprises a third polyolefin elastomer, hi one embodiment, the second polyolefin elastomer and the third polyolefin elastomer have different melt flow rates (MFR).

[0014] In one embodiment, the core layer also includes low density polyethylene.

[0015] In one embodiment, the polyolefin in the release layer is low density polyethylene. In one embodiment, the release layer also includes high density polyethylene.

[0016] In one embodiment, the carrier film has a maximum longitudinal elongation of 590% or greater.

[0017] In one embodiment, the carrier film has a longitudinal tensile strength of 25 MPa or greater.

[0018] These and other aspects, properties, and characteristics of the present invention, as well as the method of operation and function of the associated elements of structure, combination of parts, and economies of manufacture, will become more apparent from a consideration of the following description and appended claims, taken in conjunction with the accompanying drawings, all of which form a part hereof. It is to be expressly understood, however, that the drawings are for the purpose of illustration and description only and are not intended as a definition of the limits of the invention. As used in this specification and claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise.

[0019] The components in the following figures are illustrated to emphasize the general principles of the present disclosure, and the figures are not necessarily to scale. Reference numerals designating corresponding components are repeated as necessary among the figures for consistency and clarity. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a schematic cross-sectional view of a carrier film according to an embodiment of the present invention. [Figure 2] Figure 1. Schematic cross-sectional view of the carrier film attached to a frame and the silicon wafer supported by the carrier film. [Figure 3] Schematic cross-section of the carrier film, frame, and silicon wafer of Figure 2 after the silicon wafer has been diced into chips and the plunger has pushed the carrier film upward to separate the chips. [Figure 4] Figure 1. Plot of viscosity as a function of shear rate measured by capillary rheometry at 230 °C for three hydrogenated styrene block copolymers used in the adhesive layer of the carrier film. DETAILED DESCRIPTION OF THE INVENTION

[0021] FIG. 1 is a schematic cross-sectional view of a carrier film 100 according to an embodiment of the present invention. As shown in the figure, the carrier film 100 includes a core layer 120. direction Adhesive layer 110 on the side ,Ko Layer 120 Adhesive layer 110 and and an opposing release layer 130. Adhesive layer 110 includes an outer adhesive surface 112, and release layer 130 includes an outer release surface 132. When carrier film 100 is wound into a roll, adhesive surface 112 contacts release surface 132.

[0022] FIG. 2 schematically illustrates one embodiment using a carrier film 100 as a wafer dicing film. As illustrated, the carrier film 100 is attached to a frame 210 via the adhesive surface 112 of the adhesive layer 110. The frame 210 may be made of, for example, stainless steel. A silicon wafer 220 is supported and attached to the carrier film 100 within the frame 210 via the adhesive surface 112 of the adhesive layer 110. After the carrier film 100 is attached to the frame 210 and the silicon wafer 220 is placed on the carrier film 100 within the frame 210, the frame 210 may be inserted or placed into a wafer dicing machine (not shown) for processing.

[0023] 3, after dicing the wafer 220 into individual chips 222, the individual chips 222 may be further separated and removed from the carrier film 100 for further processing by using a plunger 310 to push the carrier film 100 upward. After all of the chips 222 have been removed from the carrier film 100, the carrier film 100 may be removed from the frame 210 and discarded or recycled.

[0024] Returning to FIG. 1 , the release layer 130 may comprise one or more polyolefins, such as low-density polyethylene (LDPE), linear low-density polyethylene (LLDPE), high-density polyethylene (HDPE), medium-density polyethylene (MDPE), polypropylene (PP), random copolymer polypropylene, polypropylene impact copolymer, or metallocene linear low-density polyethylene, and mixtures thereof. In one embodiment, the release layer 130 may comprise a suitable polyolefin blend of low-density polyethylene (LDPE) and high-density polyethylene (HDPE) in a weight ratio of 90:10 to 40:60. In one embodiment, the release layer 130 may comprise LDPE but not HDPE. In one embodiment, one or more additives, such as antioxidants, may be included in the release layer 130.

[0025] The thickness of the release layer 130 may be between about 1 μm and about 20 μm, for example, between about 5 μm and about 15 μm, for example, about 5 μm, about 6 μm, about 7 μm, about 8 μm, about 9 μm, about 10 μm, about 11 μm, about 12 μm, about 13 μm, about 14 μm, or about 15 μm.

[0026] The core layer 120 may include one or more polyolefin elastomers, such as ethylene octene copolymer or ethylene butene copolymer, and one or more polyolefins, such as low density polyethylene (LDPE), linear low density polyethylene (LLDPE), high density polyethylene (HDPE), medium density polyethylene, polypropylene (PP), random copolymer polypropylene, polypropylene impact copolymer, or metallocene linear low density polyethylene, and mixtures thereof. The core layer 120 may also include one or more additives, such as antioxidants.

[0027] In one embodiment of the present invention, the core layer 120 forms the bulk (e.g., at least 75%) of the carrier film thickness, thereby providing the desired mechanical properties of the carrier film 100, such as good impact strength and excellent deformation behavior and elongation, allowing the carrier film 100 to be stretched during wafer processing, as described above with reference to FIG. 3. ENGAGE™ 8450 (Melt Flow Rate (MFR) = 3 g / 10 min at 190 °C under a 2.16 kg mass; Density = 0.902 g / cm) 3 ) and ENGAGE™ 8402 (Melt flow rate (MFR) = 30 g / 10 min at 190 °C under a 2.16 kg mass; density = 0.902 g / cm 3 Polyolefin elastomers such as, but not limited to, ENGAGE™ ethylene octene copolymers manufactured by The Dow Chemical Company may be useful as components of the core layer 120 .

[0028] The melt processability during manufacturing of the core layer 120 containing such a polyolefin elastomer can be improved by blending the polyolefin elastomer with another polyolefin elastomer having a higher melt flow rate (MFR) and / or a polyolefin such as high-pressure low-density polyethylene (LDPE) produced by autoclave processing techniques.

[0029] The thickness of the core layer 120 of the carrier film 100 according to embodiments of the present invention may be between about 40 μm and about 80 μm, for example, between about 50 μm and about 70 μm, for example, about 50 μm, about 51 μm, about 52 μm, about 53 μm, about 54 μm, about 55 μm, about 56 μm, about 57 μm, about 58 μm, about 59 μm, about 60 μm, about 61 μm, about 62 μm, about 63 μm, about 64 μm, about 65 μm, about 66 μm, about 67 μm, about 68 μm, about 69 μm or about 70 μm.

[0030] The adhesive layer 110 of embodiments of the carrier film 100 includes a blend of one or more hydrogenated styrene block copolymers and one or more polyolefin elastomers, such as ethylene octene copolymer, ethylene butene copolymer, or alpha olefin copolymer. The adhesive layer 110 may also optionally include one or more polyolefins, such as low density polyethylene (LDPE) and / or high density polyethylene (HDPE).

[0031] Suitable hydrogenated styrene block copolymers may have a polystyrene block-polydiene block polymer structure prior to hydrogenation. The hydrogenated block copolymers may be linear or radial prior to hydrogenation. Suitable polydienes for hydrogenated styrene block copolymers include polybutadiene (1,3-butadiene), polyisoprene, and mixtures thereof. Hydrogenation of a polystyrene block-polydiene block structure may result in, for example, a styrene-ethylene-butylene-styrene polymer structure, or "SEBS," or a styrene-ethylene-propylene-styrene structure, or "SEPS." In embodiments of the present invention, the styrene content of the hydrogenated styrene block copolymer may be between 10% and 50% by weight. In one embodiment, the styrene content of the hydrogenated styrene block copolymer may be 20% or greater.

[0032] The storage modulus (G') of a thermoplastic is a measure of a material's ability to store energy elastically and can be measured by dynamic mechanical analysis ("DMA") at a constant frequency over a temperature sweep. The storage modulus (G') of a hydrogenated styrene block copolymer may be less than 400 kPa, e.g., less than 300 kPa, e.g., less than 250 kPa, at 25°C at a frequency of 1 Hz.

[0033] In various embodiments of the present invention, adhesive layer 110 may include 50% to 100% by weight of a hydrogenated styrene block copolymer. In such embodiments, adhesive layer 110 may also include 0% to 50% by weight of a polyolefin elastomer.

[0034] The melt flow rate ("MFR") of thermoplastics, such as hydrogenated styrene block copolymers, polyolefin elastomers, and polyolefins, is inversely related to the viscosity of the thermoplastic. A high MFR means that the thermoplastic has a low viscosity, and vice versa. As used herein, "MFR" means the melt flow rate, measured in grams per 10 minutes, determined at 230°C under a 2.16 kg weight according to ASTM D-1238, unless otherwise specified. Hydrogenated styrene block copolymers suitable for the adhesive layer 110 may have an MFR between about 10 g / 10 min and about 300 g / 10 min. Polyolefin elastomers suitable for the adhesive layer 110 may have an MFR between about 1 g / 10 min (under a 2.16 kg weight at 190°C) and about 100 g / 10 min (under a 2.16 kg weight at 190°C).

[0035] The thickness of the adhesive layer 110 of the carrier film 100 according to an embodiment of the present invention may be between about 1 μm and about 20 μm, for example, between about 3 μm and about 15 μm, for example, about 3 μm, about 4 μm, about 5 μm, about 6 μm, about 7 μm, about 8 μm, about 9 μm, about 10 μm, about 11 μm, about 12 μm, about 13 μm, about 14 μm, or about 15 μm. [Example]

[0036] Three different hydrogenated styrene block copolymers were investigated for use in the adhesive layer 110 of the carrier film 100. Specifically, SEPTON™ 2063 manufactured by Kuraray Co., Ltd., KRATON™ MD1653 manufactured by Kraton Performance Polymers, Inc., and KRATON™ MD1648 manufactured by Kraton Performance Polymers, Inc. Various properties of each resin are summarized in Table I below.

[0037] [Table 1]

[0038] The MFR and styrene content values ​​were taken from resin specifications from Kuraray Co., Ltd. (for SEPTON™ 2063) and Kraton Performance Polymers, Inc. (for KRATON™ MD1653 and KRATON™ MD1648). The storage modulus (G') was measured by DMA temperature sweep at a frequency of 1 Hz.

[0039] Capillary rheometry was also performed on hydrogenated styrene block copolymers according to ASTM D3835 on a Goettfert Rheograph 20 model capillary rheometer using a 2000 bar pressure transducer. A 30 mm long / 1 mm diameter die with a round hole and a 180° incidence angle was used. Each material was allowed to equilibrate in the barrel for 10 minutes before testing began. Corrected shear viscosity curves were collected at a constant test temperature of 230 °C. The results are shown in Figure 4. The high flow characteristics of KRATON™ MD1648 can improve the processability of the adhesive layer 110 and provide relatively high levels of adhesion of the carrier film 100 to the stainless steel frame 210 and silicon wafer 220, if desired.

[0040] A cast extrusion line equipped with three extruders, one for each layer, was used to extrude the carrier film 100 to a target thickness of 85 μm. The layer thickness ratio of the adhesive layer 110, core layer 120, and release layer 130 was 10:75:15 (i.e., 8.5 μm / 63.75 μm / 12.75 μm). Nitrogen gas was introduced at each feed throat of the extruders to provide an inert atmosphere for the extrusion process. During extrusion, the adhesive layer 110 was cast onto a matte chill roll with an average surface roughness (Ra) of 16 microinches (0.406 microns). An embossing nip roller with an average surface roughness (Ra) of 30 microinches (0.762 microns) was used to provide surface texture to the release layer 130. [Example]

[0041] In Example 1, the adhesive layer 110 was a blend of 85 wt% KRATON™ MD1648 hydrogenated styrene block copolymer and 15 wt% ENGAGE™ 8450 polyolefin elastomer (ethylene octene). The core layer 120 was 100 wt% ENGAGE™ 8450 polyolefin elastomer. The release layer 130 was a blend of 80 wt% low-density polyethylene (LDPE) and 20 wt% high-density polyethylene (HDPE). [Example]

[0042] In Example 2, the adhesive layer 110 was a blend of 85% by weight KRATON™ MD1648 hydrogenated styrene block copolymer and 15% by weight ENGAGE™ 8450 polyolefin elastomer. The core layer 120 was a blend of 75% by weight ENGAGE™ 8450 polyolefin elastomer and 25% by weight ENGAGE™ 8402 polyolefin elastomer (ethylene octane). The release layer 130 was a blend of 80% by weight LDPE and 20% by weight HDPE. [Example]

[0043] In Example 3, the adhesive layer 110 was a blend of 85% by weight KRATON™ MD1648 hydrogenated styrene block copolymer and 15% by weight ENGAGE™ 8450 polyolefin elastomer. The core layer 120 was a blend of 50% by weight ENGAGE™ 8450 polyolefin elastomer, 25% by weight ENGAGE™ 8402 polyolefin elastomer, and 25% by weight LDPE. The release layer 130 was a blend of 80% by weight LDPE and 20% by weight HDPE. [Example]

[0044] In Example 4, the adhesive layer 110 was a blend of 85 wt% KRATON™ MD1653 hydrogenated styrene block copolymer and 15 wt% ENGAGE™ 8450 polyolefin elastomer. The core layer 120 was 100 wt% ENGAGE™ 8450 polyolefin elastomer. The release layer 130 was a blend of 80 wt% LDPE and 20 wt% HDPE. [Example]

[0045] In Example 5, the adhesive layer 110 was a blend of 85 wt% SEPTON™ 2063 hydrogenated styrene block copolymer and 15 wt% ENGAGE™ 8450 polyolefin elastomer. The core layer 120 was 100 wt% ENGAGE™ 8450 polyolefin elastomer. The release layer 130 was a blend of 80 wt% LDPE and 20 wt% HDPE.

[0046] Each of the samples in Examples 1-5 was tested for adhesion to a stainless steel substrate (simulating a frame 210 made from stainless steel) and a silicon wafer (simulating a silicon wafer 220) by measuring the 180° peel force of a 1-inch-wide specimen that was allowed to age under ambient conditions for three weeks before testing. The silicon wafers were CZ-P, 4-inch diameter, mirror-polished wafers manufactured by Alpha Nanotech Inc. A Model Ta.xt Plus Texture Analyzer manufactured by Texture Technologies Corp. was used to measure the 180° peel force at a constant peel speed of 5 mm / sec. The results are listed in Table II below.

[0047] [Table 2]

[0048] Of all of the samples, Examples 1-3, each containing KRATON™ MD1648 in the adhesive layer 110, had the highest 180° peel force values ​​for both the stainless steel substrate and the silicon wafer.

[0049] Each of the carrier film samples was also measured for mechanical properties, including tensile strength and machine direction (MD) elongation at break, according to ASTM-D882. The results of the mechanical testing are listed in Table III below.

[0050] [Table 3]

[0051] A Zygo optical profilometer was used to estimate the amount of residue on the silicon wafers both before and after bonding and removing the carrier film 100 from the wafer. More specifically, the surface roughness of the wafers was measured, and the average calculated residue volume was calculated as the incremental volume above the average surface relative to the average surface height of a clean silicon wafer. Assuming that residue transfer adds to the existing silicon wafer surface roughness, the amount of residue transferred or left behind by the sample was calculated as the residue transfer volume. Five locations (360 μm × 270 μm) were analyzed for each stacked silicon wafer, and the average calculated residue volume was calculated in μm. 3 / cm 2 The results of the residue analysis from the optical profilometry are presented in Table IV below.

[0052] [Table 4]

[0053] Example 1 contained KRATON™ MD1648 and was comparable to a clean silicon wafer, leaving the least amount of residue for the sample containing the hydrogenated styrene block copolymer.

[0054] Two additional samples of multilayer carrier film 100 were extruded in the manner described above, with a target thickness of 85 μm and a layer thickness ratio of adhesive layer 110, core layer 120, and release layer 130 of 10:75:15 (i.e., 8.5 μm / 63.75 μm / 12.75 μm). [Example]

[0055] Example 6 was similar to Example 3, except that the adhesive layer 110 was a blend of 85% by weight KRATON™ MD1648 hydrogenated styrene block copolymer and 15% by weight ENGAGE™ 8450 polyolefin elastomer; the core layer 120 was a blend of 50% by weight ENGAGE™ 8450 polyolefin elastomer, 25% by weight ENGAGE™ 8402 polyolefin elastomer, and 25% by weight LDPE; and the release layer 130 was a blend of 80% by weight LDPE and 20% by weight HDPE. During extrusion, the adhesive layer 110 was cast onto a matte chill roll with an average surface roughness (Ra) of 16 microinches (0.406 microns). An embossing nip roller with an average surface roughness (Ra) of 30 microinches (0.762 microns) was used to provide a surface texture to the release layer 130. [Example]

[0056] In Example 7, the adhesive layer 110 was a blend of 90 wt. % KRATON™ MD1648 hydrogenated styrene block copolymer and 10 wt. % ABSORTOMER™ EP-1001 polyolefin elastomer (an alpha-olefin copolymer with a melt flow rate (MFR) of 10 g / 10 min at 230°C under a 2.16 kg mass, available from Mitsui Chemicals, Inc.). The core layer 120 was a blend of 50 wt. % ENGAGE™ 8450 polyolefin elastomer, 25 wt. % ENGAGE™ 8402 polyolefin elastomer, and 25 wt. % LDPE. The release layer 130 was a blend of 80 wt. % LDPE and 20 wt. % HDPE. During extrusion, the adhesive layer 110 was cast onto a matte chill roll with an average surface roughness (Ra) of 22 microinches (0.559 microns). An embossing nip roller having an average surface roughness (Ra) of 30 microinches (0.762 microns) was used to provide a surface texture to the release layer 130 .

[0057] The adhesive strength (180° peel force) of each of the samples of Examples 6 and 7 laminated onto stainless steel and mirror-polished silicon wafers was measured using a Ta.xt Plus texture analyzer (Texture Technologies Corp.). One-inch-wide samples were prepared on each substrate by compressing them twice with a 2 kg roller. Peel force was measured at a peel speed of 5 mm / sec after a 20-minute dwell time and after a 1-month dwell time to characterize the initial adhesive strength and the increase in adhesive strength over time. The ratio of the peel force value after aging the sample for 1 month to the initial peel force value is referred to herein as the "adhesion build value." The adhesive strength test results for Examples 6 and 7 are listed in Table V below.

[0058] [Table 5]

[0059] These results indicate that Example 7 exhibited a much lower bond buildup value to stainless steel than Example 6, which may be desirable. Without being bound by theory, the lower bond buildup value of Example 7 may be due to the glass transition temperature (T g ) may be due to differences in the T g The T of ABSORTOMER™ EP-1001 polyolefin elastomer is approximately -32°C. g is about +30° C. Thus, at room temperature (about 23° C.), the ABSORTOMER™ EP-1001 polyolefin elastomer may be in the form of rigid domains within adhesive layer 110, which may help prevent excessive bond buildup over time.

[0060] To test Examples 6 and 7 for potential residue transfer onto silicon wafers, 1-inch wide samples were laminated to mirror-polished silicon wafers as described above for peel force measurements. Trace amounts of organic contaminants left on the polished silicon wafers after delamination of the Examples 6 and 7 samples were quantified using electron spectroscopy for chemical analysis (ESCA). The samples were analyzed using monochromatic AlK α The silicon wafers were delaminated immediately before introduction into the analysis chamber of a PHI Quantum 2000 scanning ESCA microprobe with the X-ray source and take-off angle set to 45°. The surface carbon atom fraction Cd (%) from the delaminated region of the wafer was compared with the surface carbon atom fraction Cn (%) from the non-laminated region of the wafer. This difference (ΔC d-n =C d -C n ) was collected as the surface organic contamination of the wafers by the film samples. The results are listed in Table VI below.

[0061] [Table 6]

[0062] These results indicate that for both Examples 6 and 7, the films did not leave any residue on the silicon wafers and may actually have removed residue from the silicon wafers. [Example]

[0063] For Example 8, a sample of multilayer carrier film 100 having a target thickness of 100 μm and a layer thickness ratio of 12:76:12 (i.e., 12 μm / 76 μm / 12 μm) between adhesive layer 110, core layer 120, and release layer 130 was extruded in the manner described above. The adhesive layer 110 was the same formulation as used in Example 7 (i.e., a blend of 90 wt. % KRATON™ MD1648 hydrogenated styrene block copolymer and 10 wt. % ABSORTOMER™ EP-1001 polyolefin elastomer). The core layer 120 was the same formulation as used in Example 7 (i.e., 50% by weight ENGAGE™ 8450 polyolefin elastomer, 25% by weight ENGAGE™ 8402 polyolefin elastomer, and 25% by weight LDPE), and the release layer 130 was the same formulation as used in Example 7 (i.e., 80% by weight LDPE and 20% by weight HDPE). During extrusion, the adhesive layer 110 was cast onto a matte chill roll with an average surface roughness (Ra) of 22 microinches (0.559 microns). An embossing nip roller with an average surface roughness (Ra) of 30 microinches (0.762 microns) was used to provide a surface texture to the release layer 130.

[0064] Examples 6, 7 and 8 were compared to two commercially available films used in semiconductor wafer processing.

[0065] Comparative Example A was Ultron 1009R film having a PVC base substrate and an acrylic adhesive layer on one side thereof manufactured by Ultron Systems, Inc. The total film thickness was 70 μm and the adhesive layer thickness was 10 μm.

[0066] Comparative Example B was Nitto SWT 20+R semiconductor wafer processing tape manufactured by Nitto Denko Corporation, which had a PVC base substrate, an acrylic adhesive layer on one side thereof, and a silicone release coating on the opposite side of the PVC base substrate. The total film thickness was 75 μm, and the adhesive layer thickness was 10 μm.

[0067] The adhesive strength (180° peel force) of the samples of Examples 6-8 and Comparative Examples A and B laminated to stainless steel and mirror-polished silicon wafers was measured using a Ta.xt Plus texture analyzer (Texture Technologies Corp.). One-inch-wide samples were prepared on each substrate by compressing them twice with a 2 kg roller. Peel force was measured at a peel speed of 5 mm / sec after a 20-minute dwell time at room temperature and after a 1-week dwell time to characterize the initial adhesive strength and the increase in adhesive strength over time. Samples were also laminated to mirror-polished silicon wafers and exposed to a temperature of 60°C for 1 week. The adhesive buildup value was calculated by dividing the peel force of each sample after aging by the initial peel force value. Table VII below lists the peel force and adhesive buildup values ​​for samples laminated to stainless steel and aged at room temperature for 1 week. Table VIII below lists the peel force and adhesive buildup values ​​for samples laminated to mirror-polished silicon wafers and aged at room temperature for 1 week. Table IX below lists the peel force and bond build values ​​for samples laminated to a mirror polished silicon wafer and aged at 60°C for 1 week.

[0068] [Table 7]

[0069] [Table 8]

[0070] [Table 9]

[0071] Residue transfer from the film was measured using a quartz crystal microbalance with dissipation monitoring (QCM-D). Experiments were performed on a Biolin Scientific QSense analyzer using a quartz crystal sensor (QSensor) with a fundamental resonant frequency of 5 MHz. The frequency change of the QSensor was measured as a function of time and converted to mass change at the sensor surface. The QSense open module and silica-coated QSensor were rinsed with isopropanol, followed by deionized water, and then dried with nitrogen. The QSensor was further cleaned in a UV ozone cleaner to remove organic contaminants. A 10 mm circular sample was applied onto the QSensor and allowed to contact the sensor surface for 5 minutes. The sample was then carefully removed using PTFE tweezers. All measurements were performed at 23°C, and the test results are listed in Table X below.

[0072] [Table 10]

[0073] The results of the residue transfer test showed that the films of Examples 6, 7 and 8 transferred much less residue than the comparative film, which is desirable.

[0074] To further test the films of Examples 6 and 8, and Comparative Examples A and B, for potential residue transfer onto the silicon wafer, 1-inch wide samples of the films were laminated to mirror-polished silicon wafers as described above for peel force measurements. The residence time for each sample on the silicon wafer was 1 week. Trace amounts of organic contaminants remaining on the polished silicon wafer after sample delamination were quantified using electron spectroscopy for chemical analysis (ESCA). The samples were analyzed using monochromatic AlK α The surface carbon atom fraction C from the delaminated region of the silicon wafer was measured immediately before introduction into the analysis chamber of a PHI Quantum 2000 scanning ESCA microprobe with the X-ray source and take-off angle set to 45°. D(%), the surface carbon atom ratio C of the blank wafer B (%). This difference (ΔC D-B =C D -C B ) was collected as the surface organic contamination of the wafers by the film samples. The results are listed in Table XI below.

[0075] [Table 11]

[0076] The results, listed in Table XI, show that the films of Examples 6 and 8 left less surface organic contamination than Comparative Examples A and B, which is desirable.

[0077] The embodiments described herein represent multiple possible implementations and examples and are not intended to necessarily limit the disclosure to any particular embodiment. Instead, various modifications can be made to these embodiments, and different combinations of the various embodiments described herein, even if not explicitly described, can be used as part of the invention, as would be understood by those skilled in the art. Any such modifications are intended to be within the spirit and scope of the disclosure and are protected by the following claims.

Claims

1. an adhesive layer having a thickness of 1 μm to 20 μm, the adhesive layer comprising 50 wt % to 100 wt % of a hydrogenated styrene block copolymer having a storage modulus (G') of 400 kPa or less at 25°C and 0 wt % to 50 wt % of a first polyolefin elastomer; a core layer comprising a second polyolefin elastomer and having a thickness of 40 μm to 80 μm; a release layer comprising a polyolefin and having a thickness of 1 μm to 20 μm; The hydrogenated styrene block copolymer has a melt flow rate (MFR) of greater than 200 g / 10 min at 230° C. under a mass of 2.16 kg and a styrene content of at least 20%; the thickness of the core layer is greater than the sum of the thickness of the adhesive layer and the thickness of the release layer; the thickness of the core layer is 75% or more of the sum of the thickness of the adhesive layer, the thickness of the release layer, and the thickness of the core layer; The core layer is a carrier film disposed between the adhesive layer and the release layer.

2. 10. The carrier film of claim 1, wherein the hydrogenated styrene block copolymer has a storage modulus (G') at 25°C of 300 kPa or less.

3. 10. The carrier film of claim 1, wherein the first polyolefin elastomer and the second polyolefin elastomer are the same material.

4. 4. The carrier film of claim 3, wherein the first polyolefin elastomer and the second polyolefin elastomer are ethylene octene copolymers.

5. 10. The carrier film of claim 1, wherein the first polyolefin elastomer is an alpha-olefin copolymer.

6. 6. The carrier film of claim 5, wherein the second polyolefin elastomer is an ethylene octene copolymer.

7. The carrier film of claim 1 , wherein the core layer further comprises a third polyolefin elastomer.

8. 8. The carrier film of claim 7, wherein the second polyolefin elastomer and the third polyolefin elastomer have different melt flow rates (MFR).

9. 10. The carrier film of claim 8, wherein the core layer further comprises low density polyethylene.

10. 10. The carrier film of claim 1, wherein the polyolefin in the release layer is low density polyethylene.

11. 11. The carrier film of claim 10, wherein the release layer further comprises high density polyethylene.

12. 10. The carrier film of claim 1, wherein the carrier film has a maximum longitudinal elongation of 590% or greater.

13. The carrier film of claim 1 , wherein the carrier film has a longitudinal tensile strength of 25 MPa or more.

14. 2. The carrier film of claim 1, wherein the melt flow rate (MFR) of the hydrogenated styrene block copolymer in the adhesive layer is greater than 200 g / 10 min and less than or equal to 300 g / 10 min at 230°C under a mass of 2.16 kg.

15. 2. The carrier film of claim 1, wherein the melt flow rate of the first polyolefin elastomer in the adhesive layer is 1 g / 10 min or more and 100 g / 10 min or less at 190°C under a mass of 2.16 kg.

16. 2. The carrier film of claim 1, wherein the hydrogenated styrene block copolymer in the adhesive layer has a polystyrene block-polydiene block structure that is at least one of linear and radial before hydrogenation.

17. 2. The carrier film of claim 1, wherein the polyolefin in the release layer comprises at least one of low density polyethylene (LDPE), linear low density polyethylene (LLDPE), high density polyethylene (HDPE), medium density polyethylene (MDPE), polypropylene (PP), random copolymer polypropylene, polypropylene impact copolymer, and metallocene linear low density polyethylene.

18. The core layer is the second polyolefin elastomer being at least one of an ethylene octene copolymer or an ethylene butene copolymer; and 10. The carrier film of claim 1, comprising at least one other polyolefin.

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