Crimping device and crimping method

Abstract

To provide a pressure-bonding apparatus capable of preventing unexpected deformation of an elastic body caused by vacuum drawing when a workpiece is pressure-bonded, and a pressure-bonding method capable of preventing occurrence of sagging due to a self-weight of the elastic body.SOLUTION: A pressure-bonding apparatus comprises: a main body die which includes a transport board, a side wall part abutting on the transport board, a ceiling part that covers an upper end of the side wall part, and a pressure-bonding part, is relatively movable with respect to a workpiece mounting surface of the transport board and forms a vacuum chamber by abutting on the transport board; a metal frame body attached to a ceiling wall part of the main body die so as to be positioned in the vacuum chamber; an elastic body die including an elastic body surrounded with the metal frame body; and a gas exhaust part provided in the pressured-bonding part of the main body die. The gas exhaust part exhausts gas remaining in a gap between the pressure-bonding part of the main body die and the elastic body of the elastic body die. The main body die moves, while forming the vacuum chamber, the ceiling wall part and the pressure-bonding part together with the elastic body die toward plural workpieces and brings the elastic body into contact with the plural workpieces.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a crimping device that pressurizes a workpiece with a pressure mold, and a crimping method using this crimping device. [Background technology]

[0002] Conventionally, there has been known a crimping device that applies pressure to a workpiece (workpiece) in a vacuum atmosphere using a pressure die. In such a crimping device, the pressure die is made of an elastic material so that pressure can be applied uniformly to the workpiece.

[0003] For example, Patent Document 1 (see FIG. 2 in particular) describes a pressure device having a flexible layer that is an elastic body, which clamps and presses a workpiece. This pressure device is a pressure device that performs pressure bonding by applying pressure, and is capable of uniformly distributing pressure even when the workpiece has an uneven shape. It applies pressure to a substrate 10 and a circuit element 16 placed thereon via an intervening pad 38 that includes a flexible body 46 consisting of two layers: a fluid flexible layer 48 and a porous flexible layer 50. This allows the fluid flexible layer 48 to reach the recesses in the workpiece, allowing uniform pressure to be applied to the entire workpiece. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-296746 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in Patent Document 1, if air is trapped between the upper mold 32 and the flexible body 46, the trapped air creates a positive pressure atmosphere when the space surrounded by the upper mold 32, lower mold 30, and side mold 34 is depressurized, causing the flexible body 46 to suddenly deform. When the upper mold 32 is lowered in this state, the expanded convex portion of the flexible body 46 comes into contact with the center of the workpiece. As the flexible body 46 continues to descend, the contact area of ​​the flexible body 46 spreads radially from the center of the workpiece. This radially expanding force causes misalignment of the circuit elements 16 that constitute the workpiece. This misalignment in the workpiece remains in place until the end of the pressurization process, potentially preventing a precise crimping process. Similar problems could also occur if the flexible body 46 sags due to its own weight.

[0006] Therefore, the present invention has been made in consideration of such problems, and aims to provide a crimping device that can prevent sudden deformation of an elastic body caused by vacuuming when crimping a workpiece, and a crimping method using this crimping device. [Means for solving the problem]

[0007] In order to solve the above problem, one embodiment of the present invention provides a crimping device for crimping multiple workpieces, comprising: a conveying plate that can be moved while the multiple workpieces are stacked on top of each other and that has side wall portions that abut against the conveying plate, and a top wall portion and a pressing portion that cover the upper ends of the side wall portions, and that is movable relative to the workpiece placement surface of the conveying plate and abuts against the conveying plate to form a vacuum chamber; an elastic body mold that has a metal frame attached to the top wall portion of the main body mold so as to be positioned within the vacuum chamber, and an elastic body mold that is surrounded by the metal frame; and a gas exhaust portion provided in the pressing portion of the main body mold, wherein the gas exhaust portion exhausts gas remaining in the gap between the pressing portion of the main body mold and the elastic body of the elastic body mold, and when the vacuum chamber is formed, the main body mold moves the top wall portion and the pressing portion together with the elastic body mold toward the multiple workpieces, bringing the elastic body into contact with the multiple workpieces.

[0008] In order to solve the above problem, a crimping method using a crimping device of one embodiment of the present invention includes a main mold including a conveying plate, side wall portions that abut against the conveying plate, and a top wall portion and a pressing portion that cover the upper ends of the side wall portions, a metal frame attached to the top wall portion of the main mold so as to be positioned within a vacuum chamber, an elastic mold including an elastic body surrounded by the metal frame, and a gas exhaust portion provided in the pressing portion of the main mold, and includes the steps of: placing a plurality of workpieces on top of each other on the conveying plate; abutting the main mold, which is movable relative to the workpiece mounting surface of the conveying plate, against the conveying plate to form the vacuum chamber; using the gas exhaust portion to exhaust gas remaining in a gap between the pressing portion of the main mold and the elastic body of the elastic mold; creating a vacuum inside the vacuum chamber; and, when the vacuum chamber is formed, moving the top wall portion and the pressing portion together with the elastic mold toward the plurality of workpieces and bringing the elastic body into contact with the plurality of workpieces. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a crimping device that can prevent sudden deformation of an elastic body caused by vacuum drawing when crimping a workpiece, and a crimping method using this crimping device. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a side cross-sectional view showing a crimping device according to an embodiment of the present invention. [Figure 2] FIG. 2 is a schematic perspective view showing an elastic mold of the crimping device according to the embodiment of the present invention. [Figure 3] 1A to 1F are schematic plan views showing grooves provided in a pressing part of a crimping device according to an embodiment of the present invention, where (a) to (f) respectively show various positions at which the grooves are formed. [Figure 4] 1A to 1C are schematic cross-sectional views of grooves provided in the pressing part of a crimping device according to an embodiment of the present invention, and show various cross-sectional shapes of the grooves, respectively. [Figure 5]1A and 1B are cross-sectional schematic diagrams illustrating the vacuum bonding operation in the workpiece bonding process, showing (a) the movement of the transfer plate, (b) the movement of the main mold and the elastic mold, and (c) the formation of a chamber. [Figure 6] 1A and 1B are cross-sectional schematic diagrams illustrating the vacuum-assisted crimping operation during the crimping process of a workpiece, showing (a) the state in which the chamber is evacuated, (b) the crimping process using an elastic body, and (c) the rise of the elastic body mold. [Figure 7] 1A and 1B are cross-sectional schematic diagrams illustrating the vacuum crimping operation during the work crimping process, showing (a) the open-to-air state, (b) the rise of the main mold and elastic mold, and (c) the movement of the conveying plate. [Figure 8] 1A and 1B are schematic diagrams showing a method for preventing sagging of an elastic mold due to its own weight using a crimping device according to an embodiment of the present invention, showing (a) a main mold and an elastic mold, (b) a state in which the elastic body of the elastic mold has sagged due to its own weight, and (c) a state in which sagging of the elastic body of the elastic mold due to its own weight has been eliminated. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below are examples of specific implementations of the present invention. Therefore, the configurations of the embodiments described below should be appropriately modified or changed depending on the configuration of the device to which the present invention is applied and various conditions, and the present invention is not limited to the following embodiments.

[0012] <About the crimping device> FIG. 1 is a side cross-sectional view of a crimping device 100 according to an embodiment of the present invention. The crimping device 100 uniformly pressurizes and crimps a workpiece W, which may include a substrate such as an electronic circuit and circuit elements disposed on the substrate, in a vacuum atmosphere. The crimping device 100 includes a main mold 10, an elastic mold 11, a conveying plate 12 on which the workpiece W is placed, a gas exhaust unit 13, an ejector 14, and a vacuum pump 15. The main mold 10 includes a pressing unit 16, a top wall 17, and a side wall 18. The elastic mold 11 includes an elastic body 22 formed of a pair of interposing pads 19 and 20 and a flexible layer 21, and a metal frame 23 surrounding the elastic body 22. The gas exhaust unit 13 includes a through-hole 24 and a vacuum exhaust path 25, and exhausts gas from a gap 26 between the pressing unit 16 and the elastic body 22. Although not shown, there are sealing structures between the pressing portion 16 and the top wall portion 17, between the top wall portion 17 and the side wall portion 18, and between the side wall portion 18 and the conveying plate 12, respectively, which enable airtightness to be maintained.

[0013] Although details will be described later, the crimping device 100 of this embodiment evacuates the vacuum chamber C when crimping the workpiece W. During this evacuation, the gas in the gap 26 is evacuated by the ejector 14 via the gas exhaust part 13 consisting of the through hole 24 and the vacuum exhaust path 25 so that the elastic body 22 does not suddenly deform due to the positive pressure atmosphere of the gas in the gap 26, and as a result, displacement of the workpiece W is prevented.

[0014] In the crimping device 100, an elevator (not shown) lowers or raises the main body mold 10 and the elastic mold 11 relative to the conveying plate 12. As a result, after the side wall portion 18 of the main body mold 10 is brought into close contact with the conveying plate 12 and a vacuum chamber C is formed, the main body mold 10 and the elastic mold 11 lower relative to the workpiece W on the conveying plate 12 and crimp the workpiece W with the elastic body 22 (see FIG. 6(b)), and after crimping, they rise relative to the workpiece W (see FIG. 8(b)).

[0015] <About the transport plate> A plurality of workpieces W are placed on a stack of workpieces W on a placement surface 12a of the conveying plate 12. When the crimping process is started, the conveying plate 12 moves to a position directly below the main mold 10 with the plurality of workpieces W placed thereon. When the plurality of workpieces W are crimped by the elastic body 22, the side wall portion 18 of the main mold 10 comes into close contact with the conveying plate 12, and a vacuum chamber C is formed surrounded by the conveying plate 12 and the main mold 10. After the crimping process is completed, the crimped plurality of workpieces W are moved to the next process.

[0016] <About elastic molds> 2 is a perspective view showing an outline of the elastic mold 11. The elastic body 22 is fixed to the metal frame 23, for example, by sandwiching the flexible layer 21 and the interposed pads 19 and 20 between the metal frame 23. Furthermore, the metal frame 23 is attached to the top wall 17 of the main mold 10, thereby fixing the elastic mold 11 to the main mold 10.

[0017] <About the main mold> The main mold body 10 is made up of a pressing section 16, a top wall section 17, and a side wall section 18. The metal frame 23 of the elastic mold body 11 is attached to the top wall section 17. The main mold body 10 can be raised and lowered relative to the workpiece W placement surface 12a of the conveying plate 12 by a lifting device (not shown). Furthermore, when the side wall section 18 is in close contact with the conveying plate 12, the pressing section 16 and the top wall section 17 can be raised and lowered relative to the workpiece W placement surface 12a of the conveying plate 12.

[0018] <About the pressing part> Of the various parts constituting the main body mold 10, the pressing part 16 is located in the center of the main body mold 10, and is the part where the through-hole 24 and grooves 27 to 38 described below are provided, forming a gap 26 with the elastic body 22 of the elastic body mold 11. The pressing part 16 is provided opposite the elastic body 22 of the elastic body mold 11, and by lowering the elastic body mold 11 together with the top wall part 17 to which the metal frame 23 is attached and applying pressure, it is possible for the elastic body 22 to pressurize the workpiece W.

[0019] <Gas exhaust section> The gas exhaust section 13 is composed of a through-hole 24 provided in the pressing section 16 and a vacuum exhaust path 25 extending from the through-hole 24 to the ejector 14. The gas exhaust section 13 is in fluid communication with a gap 26 between the pressing section 16 and the elastic body 22, and is a path for exhausting gas remaining in the gap 26. By providing this gas exhaust section 13, gases such as air, nitrogen, or argon remaining in the gap 26 can be evacuated by the ejector 14. This prevents the gap 26 from becoming a positive pressure atmosphere due to the remaining gas when the vacuum chamber C is evacuated, and makes it possible to prevent sudden deformation of the elastic body 22 caused by the positive pressure atmosphere.

[0020] <Regarding the grooves provided in the pressing section> Figure 3 shows schematic plan views of possible shapes of grooves 27 to 38 provided in the lower part of pressing portion 16, with Figure 3(a) showing a schematic plan view of groove 27, Figure 3(b) showing a schematic plan view of groove 28, Figure 3(c) showing a schematic plan view of groove 29, Figure 3(d) showing a schematic plan view of grooves 30 to 32, Figure 3(e) showing a schematic shape diagram of grooves 33 to 35, and Figure 3(f) showing a schematic plan view of grooves 36 to 38.

[0021] Fig. 4 shows schematic cross-sectional shapes of possible structures of grooves 27 to 38 provided in the lower part of pressing part 16, with Fig. 4(a) showing a schematic diagram of groove cross-sectional shape 39, Fig. 4(b) showing a schematic diagram of groove cross-sectional shape 40, and Fig. 4(c) showing a schematic diagram of groove cross-sectional shape 41. Note that the schematic shape diagrams and schematic cross-sectional views of the grooves shown in Figs. 3 and 4 show only a few examples, and are not limited to these.

[0022] 3(a) to 3(f), the grooves 27 to 38 are provided on the underside of the pressing portion 16 on the elastic body 22 side, and one of the general shapes thereof is two straight lines that extend radially from the through hole 24 while connecting with the through hole 24, as shown in Fig. 3(a) to 3(c). However, the present invention is not limited to this, and three or more straight lines may be used.

[0023] In this way, by providing grooves 27 to 29 on the underside of the pressing portion 16 on the side of the elastic body 22, when the gas in the gap 26 is vacuumed by the ejector 14, it is possible to prevent the elastic body 22 from sticking to the suction port of the through hole 24, making it difficult to suck in areas other than the center of the elastic body 22, and it is possible to make the elastic body 22 adhere evenly to the underside of the pressing portion 16.

[0024] 3(d) to 3(f), annular grooves 31-32, 34-35, 37-38 are provided in a spider web shape with the through-hole 24 at the center, and the two straight grooves 30, 33, 36 intersecting with the two straight lines. These annular grooves may be rectangular or circular, but are not limited thereto. Two annular grooves are provided, but the number is not limited thereto, and three or more may be provided.

[0025] In this way, by providing grooves 30, 33, and 36 as well as annular grooves 31-32, 34-35, and 37-38 on the lower surface of pressing portion 16 on the elastic body 22 side, elastic body 22 can be more uniformly attached to the lower surface of pressing portion 16.

[0026] Furthermore, by positioning the through-holes 24 at the centers of the radial grooves, the central portion of the elastic body 22, which has the greatest amount of deformation, can be tightly attached to the underside of the pressing portion 16. Note that, to prevent damage to the main body mold 10 due to stress concentration, each groove is provided away from the outer corners of the pressing portion 16 of the main body mold 10.

[0027] 4(a) to 4(c), the cross-sectional shape of each of the grooves 27 to 38 may be, but is not limited to, a substantially triangular shape such as groove cross-sectional shape 39, a substantially rectangular shape such as groove cross-sectional shape 40, or a substantially semicircular shape such as groove cross-sectional shape 41. In this way, by having cross-sectional shapes such as grooves 27 to 38, elastic body 22 can be brought into closer contact with the lower surface of pressing portion 16.

[0028] <About the workpiece crimping process> 5 to 7 are cross-sectional schematic views showing each pressing step from when the conveying plate 12 conveys the work W directly below the main mold 10 to when the conveying plate 12 conveys the work W again after the work W has been pressed.

[0029] FIG. 5 is a cross-sectional view showing the process from when the conveying plate 12 moves to when the vacuum chamber C is formed. As shown in FIG. 5(a), the conveying plate 12 carrying the workpiece W moves in the direction of arrow A1 and stops so that the workpiece W is positioned directly below the main mold 10, particularly directly below the elastic body 22. At this time, the ejector 14 has already evacuated the gas in the gap 26. Next, as shown in FIG. 5(b), the main mold 10 and the elastic body mold 11 move toward the conveying plate 12 in the direction of arrow A2. Then, as shown in FIG. 5(c), the side wall portion 18 of the main mold 10 comes into close contact with the conveying plate 12, and the vacuum chamber C is formed between the main mold 10 and the conveying plate 12.

[0030] FIG. 6 is a cross-sectional schematic diagram showing the process of evacuating the internal space 42 of the vacuum chamber C and pressing the elastic body 22 against the workpiece W. As shown in FIG. 6(a), the vacuum pump 15 evacuates the gas in the internal space 42 of the vacuum chamber C, creating a vacuum atmosphere in the internal space 42 of the vacuum chamber C. This prevents gas from being trapped between the elastic body 22 and the workpiece W, preventing the elastic body 22 from uniformly pressurizing the workpiece W. Furthermore, since the gap 26 has already been evacuated by the ejector 14, the elastic body 22 is prevented from suddenly deforming due to the positive pressure created by the gas in the gap 26. Next, as shown in FIG. 6(b), the pressing portion 16 and the top wall portion 17 of the main mold 10 descend in the direction of arrow A3 relative to the conveying plate 12. At the same time, the elastic body mold 11 descends, causing the elastic body 22 to press against the workpiece W. Then, as shown in FIG. 6(c), the pressing portion 16, the top wall portion 17 and the elastic mold 11 rise relative to the conveying plate 12 in the direction of the arrow A4.

[0031] FIG. 7 is a cross-sectional view showing the process in which the vacuum chamber C is opened to the atmosphere and the conveying plate 12 moves the pressed workpiece W. As shown in FIG. 7(a), the vacuum chamber C, which was in a vacuum state, is opened to the atmosphere. Next, as shown in FIG. 7(b), the main mold 10 and the elastic mold 11 rise in the direction of arrow A5 relative to the conveying plate 12. Then, as shown in FIG. 7(c), the conveying plate 12 on which the workpiece W is placed moves the pressed workpiece W in the direction of arrow A6, i.e., to the next process. Note that the conveying direction of the workpiece W is not limited to the direction of arrow A6; for example, the workpiece W may be conveyed in the opposite direction to arrow A1 in FIG. 5(a).

[0032] In the crimping device 100 of this embodiment, when the vacuum chamber C is evacuated to crimp the workpiece W, the gap 26 is evacuated by the ejector 14 via the gas exhaust part 13 consisting of the through hole 24 and the vacuum exhaust path 25. This prevents the elastic body 22 from suddenly deforming due to the positive pressure atmosphere of the gas in the gap 26, and prevents the workpiece W from shifting.

[0033] <Preventing sagging due to the weight of the elastic body> 8A is a schematic cross-sectional view of the main body mold 10 and the elastic body mold 11 of the crimping device 100, excluding the conveying plate 12, and FIG. 8B is a schematic cross-sectional view showing the elastic body 22 constituting the elastic body mold 11 sagging due to its own weight. FIG. 8C is a schematic cross-sectional view showing the state in which the sagging of the elastic body 22 is prevented by evacuating the gas remaining in the gap 26 with the ejector 14. Note that, as shown in FIGS. 1 to 7, the crimping device 100 of this embodiment evacuates the gas in the gap 26 with the gas discharge unit 13 during the crimping process to suppress sudden deformation of the elastic body 22. However, in the crimping device shown in FIG. 8, the crimping device 100 of this embodiment evacuates the gas in the gap 26 with the gas discharge unit 13 before the start of the crimping process, thereby eliminating the sagging of the elastic body 22 due to its own weight.

[0034] In the crimping device 100 of this embodiment, in an ideal state (for example, at the time of shipment), as shown in FIG. 8(a), the elastic body 22 is positioned horizontally without sagging due to its own weight. However, in an actual state, as shown in FIG. 8(b), the elastic body 22 may deform in the direction of the arrow due to its own weight, causing sagging. This sagging occurs independently and is not related to the sudden deformation of the elastic body 22 described above. This sagging creates a convex portion on the elastic body 22, causing the workpiece W to shift as described above, making it difficult to perform a precise crimping process.

[0035] Therefore, in the crimping device 100 of this embodiment, the gas in the gap 26 is evacuated by the gas exhaust unit 13 before the crimping process is started, thereby eliminating the sagging of the elastic body 22 due to its own weight.

[0036] 8(c), by evacuating the gas remaining in the gap 26, the elastic body 22 adheres tightly to the pressing portion 16, eliminating sagging of the elastic body 22 due to its own weight. This not only prevents sudden deformation of the elastic body 22 during the pressure bonding process, but also prevents displacement of the workpiece W due to sagging due to its own weight, and as a result, the elastic body 22 can press the workpiece W uniformly.

[0037] In addition, the elimination of sagging due to the weight of the elastic body 22 by vacuuming the gas remaining in the gap 26 using the ejector 14 may be performed before or at the same time as creating a vacuum inside the vacuum chamber C, or may be performed before the vacuum chamber C is formed.

[0038] In the crimping method using the crimping device 100 of this embodiment, during or before the start of the crimping process, the gap 26 is evacuated by the ejector 14 via the gas exhaust section 13, which is made up of the through-hole 24 and the vacuum exhaust path 25. This prevents the elastic body 22 from deforming due to its own weight and causing sagging, and prevents the workpiece W from shifting.

[0039] (Embodiments of the invention) A first embodiment of the present invention is a crimping device for crimping multiple workpieces, comprising: a conveying plate that can be moved with multiple workpieces stacked on top of each other and that has side walls that abut against the conveying plate, and a top wall and pressing portion that cover the upper ends of the side walls, and that is movable relative to the workpiece placement surface of the conveying plate and abuts against the conveying plate to form a vacuum chamber; a metal frame attached to the top wall of the main mold so as to be positioned within the vacuum chamber, an elastic mold that has an elastic body surrounded by the metal frame; and a gas exhaust portion provided in the pressing portion of the main mold, wherein the gas exhaust portion exhausts gas remaining in the gap between the pressing portion of the main mold and the elastic body of the elastic mold, and the main mold moves the top wall and pressing portion together with the elastic mold toward the multiple workpieces when forming the vacuum chamber, bringing the elastic body into contact with the multiple workpieces.

[0040] In this way, when the vacuum chamber C is evacuated to press-bond the workpiece W, the gap 26 is evacuated by the ejector 14 via the gas exhaust part 13. This prevents the elastic body 22 from suddenly deforming due to the positive pressure atmosphere of the gas in the gap 26, and prevents the workpiece W from shifting.

[0041] In addition, by using the ejector 14 to evacuate the gap 26 through the gas exhaust section 13 consisting of the through hole 24 and the vacuum exhaust path 25, it is possible to prevent the elastic body 22 from deforming due to its own weight and causing sagging, thereby preventing the workpiece W from shifting.

[0042] In a second embodiment of the present invention, in the first embodiment, the gas discharge section has a through-hole formed in the pressing section of the main mold and a vacuum exhaust path communicating with the through-hole.

[0043] In this way, the gas discharge section 13 has the through hole 24 formed in the pressing section 16 of the main mold 10 and the vacuum exhaust path 25 communicating with the through hole, so when the vacuum chamber C is evacuated to press the workpiece W, the gap 26 is evacuated by the ejector 14 via the gas discharge section 13. This prevents the elastic body 22 from suddenly deforming due to the positive pressure atmosphere of gas in the gap 26, and prevents the workpiece W from shifting.

[0044] A third embodiment of the present invention is the second embodiment, wherein the gas discharge portion further has a groove that is connected to the through hole and extends radially on the underside of the pressing portion of the main mold that faces the elastic body.

[0045] In this way, by providing any one of the linear grooves 27 to 29 on the lower surface of the pressing part 16 on the side of the elastic body 22, when the gas in the gap 26 is evacuated by the ejector 14, it is possible to prevent the elastic body 22 from being sucked into the suction port of the through hole 24, which makes it difficult to suck in parts other than the center of the elastic body 22. This has the effect of allowing the elastic body 22 to be evenly and closely attached to the lower surface of the pressing part 16.

[0046] A fourth embodiment of the present invention is the third embodiment, further comprising a plurality of grooves that are annular and have intersections with the radially extending grooves, and that are arranged in a spider's web pattern relative to the radially extending grooves.

[0047] In this way, by providing any one of the annular grooves 31-32, 34-35, 37-38 in addition to any one of the linear grooves 30, 33, 36 on the underside of the pressing portion 16 facing the elastic body 22, the effect is achieved that the elastic body 22 can be more uniformly adhered to the underside of the pressing portion 16.

[0048] A fifth embodiment of the present invention is the third or fourth embodiment, wherein the through holes are provided at intersections of radially extending grooves.

[0049] This brings about the effect that by locating the through-hole 24 at the center of the radial grooves, the central portion of the elastic body 22, which has the greatest amount of deformation, can be tightly adhered to the lower surface of the pressing portion 16.

[0050] A sixth embodiment of the present invention is any one of the third to fifth embodiments, wherein the radially extending grooves are provided at a distance from the outer edge corners of the pressing portion of the main mold.

[0051] As a result, each groove is provided away from the outer edge corner of the pressing portion 16 of the main mold 10, which has the effect of preventing the main mold 10 from being damaged due to stress concentration.

[0052] A seventh embodiment of the present invention is a crimping method using a crimping device, comprising: a main mold having a conveying plate, side wall portions that abut against the conveying plate, and a top wall portion and pressing portion that cover the upper ends of the side wall portions; a metal frame attached to the top wall portion of the main mold so as to be positioned within a vacuum chamber, an elastic mold having an elastic body surrounded by the metal frame; and a gas exhaust portion provided in the pressing portion of the main mold, and includes the steps of: stacking multiple workpieces and placing them on the conveying plate; abutting the main mold, which is movable relative to the workpiece placement surface of the conveying plate, against the conveying plate to form a vacuum chamber; using the gas exhaust portion to exhaust gas remaining in the gap between the pressing portion of the main mold and the elastic body of the elastic mold; creating a vacuum inside the vacuum chamber; and, when forming the vacuum chamber, moving the top wall portion and pressing portion together with the elastic mold toward the multiple workpieces and bringing the elastic body into contact with the multiple workpieces.

[0053] In this way, the crimping method using the crimping device 100 of this embodiment has the effect of preventing the elastic body 22 from deforming due to its own weight and causing sagging by evacuating the gap 26 with the ejector 14 via the gas exhaust section 13 consisting of the through hole 24 and the vacuum exhaust path 25, thereby preventing the workpiece W from shifting.

[0054] Furthermore, when the vacuum chamber C is evacuated to press-bond the workpiece W, the gap 26 is evacuated by the ejector 14 via the gas exhaust part 13. This prevents the elastic body 22 from suddenly deforming due to the positive pressure atmosphere of the gas in the gap 26, and prevents the workpiece W from shifting.

[0055] An eighth embodiment of the present invention is a crimping method in the seventh embodiment, in which the step of evacuating the gas in the gap is performed before or simultaneously with the step of creating a vacuum in the vacuum chamber.

[0056] This prevents the elastic body 22 from deforming and sagging due to its own weight before or at the same time as the vacuum chamber C is evacuated, thereby preventing the workpiece W from shifting.

[0057] A ninth embodiment of the present invention is a crimping method in the seventh or eighth embodiment, in which the step of evacuating gas from the gap is performed before the step of forming a vacuum chamber.

[0058] This prevents the elastic body 22 from deforming due to its own weight and causing sagging before the vacuum chamber C is formed, thereby preventing the workpiece W from shifting. [Explanation of symbols]

[0059] 100 Crimping device 10 Main body mold 11 Elastic mold 12 Conveyor plate 12a Placement surface 13 Gas exhaust section 14 Ejector 15 Vacuum pump 16 Pressing section 17 Ceiling wall 18 Side wall 19 Interposition pad 20 Interposition Pad 21 Flexible layer 22 Elastic Body 23 Metal frame 24 through holes 25 Vacuum exhaust path 26 Gap 27~38 groove double work C. Vacuum chamber

Claims

1. A crimping device for crimping a plurality of workpieces, a conveying plate capable of moving the plurality of workpieces stacked on it; a main mold that includes a side wall portion that contacts the conveying plate, and a top wall portion and a pressing portion that contact the side wall portion, and is movable relative to a workpiece placement surface of the conveying plate, and that contacts the conveying plate to form a vacuum chamber; an elastic body mold including a metal frame attached to the top wall portion of the main body mold so as to be positioned within the vacuum chamber, and an elastic body surrounded by the metal frame; a first gas exhaust section for exhausting gas remaining in a gap between the pressing section of the main body mold and the elastic body of the elastic body mold; a second gas exhaust section for exhausting gas from the vacuum chamber; Equipped with A crimping device in which, when forming the vacuum chamber, the main mold moves the top wall portion and the pressing portion together with the elastic mold toward the multiple workpieces, bringing the elastic body into contact with the multiple workpieces.

2. A crimping device as described in Claim 1, wherein the gas is discharged by the first gas discharge section before the vacuum chamber is formed.

3. The crimping device according to claim 1 , wherein the first gas discharge section has a through hole formed in the pressing section of the main mold body, and a vacuum exhaust path communicating with the through hole.

4. 4. The crimping device according to claim 3, wherein the first gas discharge section further includes grooves connected to the through holes and extending radially on a lower surface of the pressing section of the main mold that faces the elastic body.

5. The crimping device according to claim 4 , further comprising a plurality of grooves each having an annular shape having an intersection with the radially extending grooves and arranged in a spider web shape relative to the radially extending grooves.

6. The crimping device according to claim 4 or 5, wherein the through holes are provided at intersections of the radially extending grooves.

7. The crimping device according to any one of claims 4 to 6, wherein the radially extending grooves are provided at a distance from outer edge corners of the pressing portion of the main mold.

8. A crimping method using a crimping device, A conveying plate; a main mold including a side wall portion that contacts the conveying plate, and a top wall portion and a pressing portion that contact the side wall portion; an elastic body mold including a metal frame attached to the top wall portion of the main body mold so as to be positioned within a vacuum chamber, and an elastic body surrounded by the metal frame; a first gas exhaust section for exhausting gas remaining in a gap between the pressing section of the main body mold and the elastic body of the elastic body mold; a second gas exhaust section for exhausting gas from the vacuum chamber; Equipped with A step of stacking a plurality of workpieces on a conveying plate; a step of bringing the main mold, which is movable relative to the workpiece placement surface of the conveying plate, into contact with the conveying plate to form the vacuum chamber; a step in which the first gas discharge unit discharges gas remaining in a gap between the pressing unit of the main body mold and the elastic body of the elastic body mold; a step of creating a vacuum in the vacuum chamber by discharging gas from the vacuum chamber using the second gas discharge unit; When forming the vacuum chamber, the ceiling wall portion and the pressing portion are moved together with the elastic mold toward the plurality of workpieces, and the elastic body is brought into contact with the plurality of workpieces; A crimping method comprising:

9. The crimping method according to claim 8 , wherein the step of discharging the gas from the gap is performed before or simultaneously with the step of creating a vacuum in the vacuum chamber.

10. The crimping method according to claim 8 or 9, wherein the step of discharging the gas from the gap is performed before the step of forming the vacuum chamber is performed.

Images