Inductor and method for manufacturing the same

Abstract

Provided are an inductor and an inductor manufacturing method, wherein precipitation of a Si component is reduced and generation of pores in a coil conductor is reduced. An inductor according to the present disclosure comprises: an element body 10 that is provided with a coil conductor CD in the interior thereof, and includes a resin and metal magnetic particles MP in which an oxide layer OL has been provided to the surfaces of metal particles DP including Fe and Si; and external electrodes E1-E4 that are provided to the element body 10 and are connected to the coil conductor CD, wherein the peak value of the Si concentration in the oxide layer OL is less than or equal to 2 times the Si concentration in a prescribed location on the interior side of the metal particles DP, and the porosity of the coil conductor CD is 10% or less.

Description

[Technical Field]

[0001] The present disclosure relates to inductors and methods for manufacturing inductors. [Background technology]

[0002] Patent Document 1 discloses a laminated coil component that includes an element body containing a soft magnetic metal material (e.g., an Fe (iron)-Si (silicon) alloy or an Fe-Si-Cr (chromium) alloy) and a coil disposed within the element body, the coil including a plurality of internal conductors (e.g., Ag, Pd, Cu, Al, Ni, etc.) that are adjacent to and spaced apart from each other in a first direction and are electrically connected to each other. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2018-6411 A Summary of the Invention [Problem to be solved by the invention]

[0004] When an Fe-Si-based metal magnetic material or an Fe-Si-Cr-based metal magnetic material is heated, oxygen in the atmosphere reacts with Fe and Si, forming an oxide film on the surface of the metal magnetic particles. Here, since an element containing the metal magnetic material is heat-treated, the higher the heating temperature, the more Si components precipitate on the surface of the metal magnetic particles. The inventors of this application discovered that this precipitation of Si components causes the composition of the oxide film to deviate from the design, and this deviation in composition causes variations and / or decreases in the inductance value (L value).

[0005] One solution to the above problem is to lower the heating temperature to suppress the precipitation of the Si component. However, if the heating temperature is lowered, the sintering of the coil conductor that constitutes the coil placed inside the element body will be insufficient, and pores (cavities) will occur in the coil conductor, making it difficult to achieve the desired DC resistance (R dc ) cannot be obtained.

[0006] The present disclosure has been made in view of the above-mentioned problems. That is, a main object of the present disclosure is to provide an inductor and a method for manufacturing the inductor in which the precipitation of Si components is reduced and the occurrence of pores in the coil conductor is reduced. [Means for solving the problem]

[0007] The inductor according to the present disclosure comprises: an element body containing a resin and metal magnetic particles having a coil conductor therein and in which an oxide layer is provided on the surface of the metal particles containing Fe and Si; an external electrode provided on the element body and connected to the coil conductor; The peak value of the Si concentration in the oxide layer is not more than twice the Si concentration at a predetermined position inside the metal particle, and the pore ratio of the coil conductor is not more than 10%.

[0008] Further, a method for manufacturing an inductor according to the present disclosure includes: an element body forming step of forming an element body; and an external electrode forming step of forming external electrodes on a mounting surface of the element body, The element body forming step includes: a lamination step of laminating a metal magnetic body containing metal magnetic particles containing Fe and Si and a coil conductor; a drying step of drying the element body so that the peak value of the Si concentration in the oxide layer of the metal magnetic particle is equal to or less than twice the Si concentration at a predetermined position inside the metal particle; a degreasing step of degreasing the element body after the drying step; After the degreasing step, the method includes a heat treatment step of heat treating the element so that the pore ratio of the coil conductor becomes 10% or less. [Effects of the Invention]

[0009] According to the present disclosure, it is possible to provide an inductor in which the precipitation of Si components is reduced and the occurrence of pores in the coil conductor is reduced, and a method for manufacturing the inductor. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view of an inductor of the present disclosure. [Figure 2] FIG. 2 is an exploded perspective view of the inductor of the present disclosure. [Figure 3] 3 is a cross-sectional view taken along the line III-III in FIG. 2. FIG. [Figure 4] FIG. 4 is a cross-sectional view of a modified example of the inductor of the present disclosure. [Figure 5A] FIG. 5A is an enlarged cross-sectional view of a main part of FIG. [Figure 5B] FIG. 5B is an enlarged cross-sectional view of a main part of a conventional inductor. [Figure 6] FIG. 6 is an enlarged cross-sectional view of a main part of FIG. 5A. [Figure 7A] FIG. 7A is a graph showing the results of a composition analysis of metal magnetic particles in an inductor of the present disclosure. [Figure 7B] FIG. 7B is a graph showing the results of a composition analysis of metal magnetic particles in a conventional inductor. [Figure 8A] FIG. 8A is a graph showing the distribution of inductance values ​​(nH) in the inductor of the present disclosure. [Figure 8B] FIG. 8B is a graph showing the distribution of inductance values ​​(nH) in a conventional inductor. [Figure 9] FIG. 9 is a manufacturing flow illustrating the manufacturing process of the inductor of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0011] The inductor of the present disclosure will be described below. Note that the present disclosure is not limited to the following configurations and may be modified as appropriate without departing from the spirit of the present disclosure. In addition, a combination of multiple individual preferred configurations described below also constitutes the present disclosure.

[0012] The inductor of the present disclosure is used in, for example, a DC-DC converter, and is also applicable to uses other than DC-DC converters.

[0013] In this specification, terms indicating the relationship between elements (e.g., "parallel," "orthogonal," etc.) and terms indicating the shape of elements do not only mean the strict literal form, but also mean a range of substantial equivalence, for example, a range including a difference of about a few percent. Note that in this specification, the direction in which the magnetic layers and coil conductors that make up the element body are stacked is referred to as the "stacking direction."

[0014] Furthermore, in the description of this specification, references to directions or orientations are made merely for the convenience of explanation and are not intended to limit the scope of the present disclosure unless otherwise expressly stated. For example, relative terms such as "outside (or outer, external, or outer circumference)" and "inside (or inner, internal, or inner circumference)" and their derivatives should be understood to refer to the direction as described or illustrated. In other words, unless otherwise expressly stated, the invention is not necessarily limited to a specific direction, orientation, or form. Similarly, terms such as "provided," "disposed," and "connected" and their derivatives may refer not only to a direct configuration but also to a configuration in which other elements, such as intervening elements, are present, unless otherwise expressly stated.

[0015] The drawings shown below are schematic diagrams, and the dimensions, aspect ratio, scale, etc. may differ from those of the actual product.

[0016] <Inductor of the present disclosure> The inductor of the present disclosure will be described with reference to Figures 1 to 6. Figure 1 is a perspective view of the inductor of the present disclosure, Figure 2 is an exploded perspective view of the inductor of the present disclosure, Figure 3 is a cross-sectional view taken along line III-III in Figure 2, Figure 4 is a cross-sectional view of a modified example of the inductor of the present disclosure, Figure 5A is an enlarged cross-sectional view of a main part of Figure 3, Figure 5B is an enlarged cross-sectional view of a main part of a conventional inductor, and Figure 6 is an enlarged cross-sectional view of a main part of Figure 5A. Note that the shapes and arrangements of the inductor and each component are not limited to the examples shown in the figures.

[0017] The inductor 1 of the present disclosure comprises an element body 10 containing metal magnetic particles MP (see Figure 6) with an oxide layer OL provided on the surface of metal particles DP containing Fe and Si, and a resin (not shown), and external electrodes E1 to E4 connected to the coil conductor CD (see Figure 1).

[0018] In this embodiment, the element body 10 includes a first coil C1 and a second coil C2 arranged above the first coil C1 in the height direction T (see FIG. 3). The first coil C1 is formed by stacking a plurality of laminate groups G6 and G8 (see FIG. 2), which will be described later, so that the first coil conductor CD1 is spirally wound with via conductors V (see FIG. 3). The second coil C2 is formed by stacking a plurality of laminate groups G2 and G4 (see FIG. 2), which will be described later, so that the second coil conductor CD2 is spirally wound with via conductors (not shown).

[0019] The coils provided inside the element body 10 are not limited to the above configuration, and may include one coil or two or more coils. For example, the element body 10 may include four coils C1 to C4 as shown in Fig. 4. Specifically, the third coil C3 provided inside the element body 10 shown in Fig. 4 may be arranged in a direction intersecting the stacking direction with respect to the first coil C1, and the fourth coil C4 may be arranged in a direction intersecting the stacking direction with respect to the second coil C2.

[0020] Each component will be described in detail below.

[0021] -Base body- The element body 10 has, for example, a rectangular parallelepiped or approximately rectangular parallelepiped shape having six sides. The corners and ridges of the element body 10 may be rounded. A corner is a portion where three sides of the element body 10 intersect, and a ridge is a portion where two sides of the element body 10 intersect.

[0022] 1, the length direction, width direction, and height direction of the inductor 1 and the element body 10 are shown as the L direction, the W direction, and the T direction, respectively. The length direction L, the width direction W, and the height direction T are perpendicular to each other. The mounting surface of the inductor 1 is, for example, a surface (LW surface) parallel to the length direction L and the width direction W.

[0023] The element body 10 shown in Fig. 1 has a first main surface 11 and a second main surface 12 that face each other in the height direction T, a first end surface 13 and a second end surface 14 that are perpendicular to the height direction T and face each other in the length direction L, and a first side surface 15 and a second side surface 16 that face each other in the width direction W that is perpendicular to the length direction L and the height direction T. In the example shown in Fig. 1, the first main surface 11 of the element body 10 corresponds to the mounting surface (bottom surface) of the element body 10. It should be noted that the second main surface 12 may also be the mounting surface of the element body 10.

[0024] The element body 10 has a laminated structure in which a metal magnetic layer ML, multiple metal magnetic layers ML each having an insulator I and a coil conductor CD formed thereon, and multiple metal magnetic layers ML each having an insulator I formed thereon are laminated in a lamination direction (for example, height direction T). In this embodiment, as shown in FIG. 2, it is configured by laminating laminate groups G1 to G10 each including at least one metal magnetic layer ML and coil conductor CD (or only metal magnetic layer ML). Note that the boundaries between layers in the laminated structure of the element body 10 disappear. Furthermore, each laminated group layer may be configured by laminating multiple layers of the same pattern.

[0025] (Lamination group G1) The lamination group G1 has a metal magnetic layer ML and constitutes the second main surface 12 of the element body 10.

[0026] (Lamination group G2) The multilayer group G2 includes a metal magnetic layer ML, an insulator (not shown) provided on the metal magnetic layer ML, and a second coil conductor CD2 that forms part of the second coil C2 formed on the insulator.

[0027] The second coil conductor CD2 of the multilayer group G2 forms one winding of the second coil C2. More specifically, the second coil conductor CD2 is disposed on an insulator formed in the thickness direction of the metal magnetic layer ML along approximately the outer periphery of the metal magnetic layer ML. One end of the second coil conductor CD2 is connected to a via conductor (not shown) provided on the insulator of the metal magnetic layer ML of the multilayer group G4 for connection to the second coil conductor CD2, and the other end of the second coil conductor CD2 is connected to a fourth through-hole conductor (not shown) for electrical connection to the fourth external electrode E4.

[0028] (Lamination group G3) The laminated group G3 has a metal magnetic layer ML, an insulator I provided in the metal magnetic layer ML, a via conductor V provided in the insulator I, and a fourth through-hole conductor T4 provided in the metal magnetic layer ML.

[0029] The insulator I of the multilayer group G3 may be provided to correspond to the winding shape of the second coil conductor CD2 of the multilayer group G4, which will be described later. In a planar perspective view, the planar area of ​​the insulator I of the multilayer group G3 may be designed to be larger than the planar area of ​​the second coil conductor CD2 of the multilayer group G4. By making the planar area of ​​the insulator I larger than the planar area of ​​the second coil conductor CD2, appropriate electrical insulation can be achieved between the coil conductors in the stacking direction.

[0030] The via conductor V of the multilayer group G3 is disposed at a position where it is connected to one end of the second coil conductor CD2 of the multilayer group G2.

[0031] The fourth through-hole conductor T4 of the multilayer group G3 connects the fourth through-hole conductors T4 of the multilayer groups G2 and G4 adjacent in the stacking direction, and is electrically connected to the fourth external electrode E4. Therefore, the fourth through-hole conductor T4 is disposed above the fourth external electrode E4 in a planar perspective view.

[0032] (Lamination group G4) The laminated group G4 has a metal magnetic layer ML, an insulator (not shown) provided on the metal magnetic layer ML, a second coil conductor CD2 that forms part of the second coil C2 formed on the insulator, and a fourth through-hole conductor T4 provided on the metal magnetic layer ML.

[0033] The second coil conductor CD2 of the multilayer group G4 forms another winding of the second coil C2. More specifically, the second coil conductor CD2 is disposed on an insulator formed in the thickness direction of the metal magnetic layer ML along approximately the outer periphery of the metal magnetic layer ML. One end of the second coil conductor CD2 is connected to the second coil conductor CD2 provided on the insulator of the metal magnetic layer ML of the multilayer group G2, and the other end of the second coil conductor CD2 is connected to a third through-hole conductor (not shown) for electrical connection to the third external electrode E3.

[0034] The fourth through-hole conductor T4 of the multilayer group G4 connects the fourth through-hole conductors T4 of the multilayer groups G3 and G5 adjacent in the stacking direction and is electrically connected to the fourth external electrode E4. Therefore, the fourth through-hole conductor T4 may be disposed at a corner of the metal magnetic layer ML located on the fourth external electrode E4.

[0035] (Lamination group G5) The multilayer group G5 includes a metal magnetic layer ML, an insulator I provided in the metal magnetic layer ML, and a third through-hole conductor T3 and a fourth through-hole conductor T4 provided in the metal magnetic layer ML.

[0036] The insulator I of the multilayer group G5 is provided to correspond to the winding shape of the first coil conductor CD1 of the multilayer group G6, which will be described later. By making the planar area of ​​the insulator I larger than the planar area of ​​the first coil conductor CD1, the first coil C1 and the second coil C2 arranged in the stacking direction can be appropriately electrically insulated.

[0037] The third through-hole conductor T3 of the multilayer group G5 connects the third through-hole conductors T3 of the multilayer groups G4 and G6 adjacent in the stacking direction, and is electrically connected to the third external electrode E3. Therefore, the third through-hole conductor T3 is disposed above the third external electrode E3 in a planar perspective view.

[0038] The fourth through-hole conductor T4 of the multilayer group G5 connects the fourth through-hole conductors T4 of the multilayer groups G4 and G6 adjacent in the stacking direction, and is electrically connected to the fourth external electrode E4. Therefore, the fourth through-hole conductor T4 is disposed above the fourth external electrode E4 in a planar perspective view.

[0039] (Lamination group G6) The laminated group G6 has a metal magnetic layer ML, an insulator (not shown) provided on the metal magnetic layer ML, a first coil conductor CD1 that forms part of a first coil C1 formed on the insulator, and a third through-hole conductor T3 and a fourth through-hole conductor T4 provided on the metal magnetic layer ML.

[0040] The first coil conductor CD1 of the multilayer group G6 forms one winding of the first coil C1. More specifically, the first coil conductor CD1 is disposed on an insulator formed in the thickness direction of the metal magnetic layer ML along approximately the outer periphery of the metal magnetic layer ML. One end of the first coil conductor CD1 is provided with a via conductor (not shown) for connection to the first coil conductor CD1 provided on the insulator of the metal magnetic layer ML of the multilayer group G7, and the other end of the first coil conductor CD1 is provided with a second through-hole conductor (not shown) for electrical connection to the second external electrode E2.

[0041] The third through-hole conductors T3 of the multilayer group G6 connect the third through-hole conductors T3 of the multilayer groups G5 and G7 adjacent in the stacking direction to each other, and are electrically connected to the third external electrode E3. Therefore, the third through-hole conductors T3 may be disposed at the corners of the metal magnetic layers ML located on the third external electrode E3.

[0042] The fourth through-hole conductor T4 of the multilayer group G6 connects the fourth through-hole conductors T4 of the multilayer groups G5 and G7 adjacent in the stacking direction, and is electrically connected to the fourth external electrode E4. Therefore, the fourth through-hole conductor T4 may be disposed at a corner of the metal magnetic layer ML located on the fourth external electrode E4.

[0043] (Lamination group G7) The laminated group G7 has a metal magnetic layer ML, an insulator I provided on the metal magnetic layer ML, a via conductor V provided on the insulator I, and a second through-hole conductor T2, a third through-hole conductor T3 and a fourth through-hole conductor T4 provided on the metal magnetic layer ML.

[0044] The insulator I of the multilayer group G7 is provided to correspond to the winding shape of the first coil conductor CD1 of the multilayer group G8, which will be described later. In a planar perspective view, the planar area of ​​the insulator I of the multilayer group G7 may be designed to be larger than the planar area of ​​the first coil conductor CD1 of the multilayer group G8. By making the planar area of ​​the insulator I larger than the planar area of ​​the first coil conductor CD1, appropriate electrical insulation can be achieved between the coil conductors in the stacking direction.

[0045] The via conductor V of the multilayer group G7 is disposed at a position where it is connected to one end of the first coil conductor CD1 of the multilayer group G6.

[0046] The second through-hole conductors T2 of the multilayer group G7 connect the second through-hole conductors T2 of the multilayer groups G6 and G8 adjacent in the stacking direction to each other, and are electrically connected to the second external electrode E2. Therefore, the second through-hole conductors T2 are disposed above the second external electrode E2 in a planar perspective view.

[0047] The third through-hole conductor T3 of the multilayer group G7 connects the third through-hole conductors T3 of the multilayer groups G6 and G8 adjacent in the stacking direction, and is electrically connected to the third external electrode E3. Therefore, the third through-hole conductor T3 is disposed above the third external electrode E3 in a planar perspective view.

[0048] The fourth through-hole conductor T4 of the multilayer group G7 connects the fourth through-hole conductors T4 of the multilayer groups G6 and G8 adjacent to each other in the stacking direction, and is electrically connected to the fourth external electrode E4. Therefore, the fourth through-hole conductor T4 is disposed above the fourth external electrode E4 in a planar perspective view.

[0049] (Lamination group G8) The laminated group G8 includes a metal magnetic layer ML, an insulator (not shown) provided on the metal magnetic layer ML, a first coil conductor CD1 that forms part of a first coil C1 formed on the insulator, and a second through-hole conductor T2, a third through-hole conductor T3, and a fourth through-hole conductor T4 provided on the metal magnetic layer ML.

[0050] The first coil conductor CD1 of the multilayer group G8 forms another winding of the first coil C1. More specifically, the first coil conductor CD1 is disposed on an insulator formed in the thickness direction of the metal magnetic layer ML along approximately the outer periphery of the metal magnetic layer ML. One end of the first coil conductor CD1 is connected to the first coil conductor CD1 provided on the insulator of the metal magnetic layer ML of the multilayer group G6, and the other end of the first coil conductor CD1 is provided with a first through-hole conductor (not shown) for electrical connection to the first external electrode E1.

[0051] The second through-hole conductors T2 of the multilayer group G8 connect the second through-hole conductors T2 of the multilayer groups G7 and G9 adjacent to each other in the stacking direction, and are electrically connected to the second external electrode E2. The second through-hole conductors T2 may also be disposed at corners of the metal magnetic layers ML located on the second external electrode E2.

[0052] The third through-hole conductors T3 of the multilayer group G8 connect the third through-hole conductors T3 of the multilayer groups G7 and G9 adjacent in the stacking direction to each other, and are electrically connected to the third external electrode E3. The third through-hole conductors T3 may also be disposed at corners of the metal magnetic layers ML located on the third external electrode E3.

[0053] The fourth through-hole conductor T4 of the multilayer group G8 connects the fourth through-hole conductors T4 of the multilayer groups G7 and G9 adjacent in the stacking direction to each other, and is electrically connected to the fourth external electrode E4. The fourth through-hole conductor T4 may also be disposed at a corner of the metal magnetic layer ML located on the fourth external electrode E4.

[0054] (Lamination group G9) The multilayer group G9 has a first through-hole conductor T1, a second through-hole conductor T2, a third through-hole conductor T3, and a fourth through-hole conductor T4 provided at the corners of the metal magnetic layer ML. The areas of the first through-hole conductor T1 to the fourth through-hole conductor T4 of the multilayer groups G1 to G9 in a plan view from the stacking direction are substantially the same.

[0055] (Lamination group G10) The multilayer group G10 has first through-hole conductors T1 to T4 that are larger in plane area than the first through-hole conductors T1 to T4 of the multilayer group G9 at the corners of the metal magnetic layer ML. The first through-hole conductors T1 to T4 may function as base electrodes for the external electrodes E1 to E4. By making the plane area of ​​the first through-hole conductors T1 to T4 of the multilayer group G10 larger than the plane area of ​​the first through-hole conductors T1 to T4 of the multilayer group G9, strength during mounting can be improved.

[0056] The thickness of the first coil conductor CD1 and the second coil conductor CD2 in each lamination group may be the same. The first coil conductor CD1 and the second coil conductor CD2 may be made of, for example, a metal conductor such as Ag (silver), Cu (copper), Au (gold), or an alloy thereof. The first coil conductor CD1 and the second coil conductor CD2 may be formed, for example, by printing a conductive paste on the metal magnetic layer ML.

[0057] The first through-hole conductors T1 to T4 and the via conductors may be made of, for example, a metal conductor such as Ag or Cu. The first through-hole conductors T1 to T4 and the via conductors may be made of the same or different materials as the first coil conductor CD1 and the second coil conductor CD2. The through-hole conductors and the via conductors may be formed, for example, by forming through-holes in the metal magnetic layer ML and printing a conductive paste into the through-holes. Alternatively, the metal magnetic layer ML may be formed by printing the conductive paste and then printing the conductive paste.

[0058] As described above, when the element body 10 has a multilayer structure including the multilayer groups G1 to G10, the degree of freedom in designing the inductor 1 is increased. For example, when manufacturing an inductor 1 including the first external electrode E1, the second external electrode E2, the third external electrode E3, and the fourth external electrode E4 on the bottom surface (first main surface 11) of the element body 10, it becomes easier to extend the first coil C1 and the second coil C2 to the bottom surface side. Note that the multilayer structure including the above-mentioned multilayer groups G1 to G10 may be formed by sequentially printing (e.g., screen printing) the material that constitutes the metal magnetic layer ML, the material that constitutes the insulator I, the material that constitutes the coil conductor CD, and the material that constitutes the through-hole conductors and via conductors from the second main surface 12 side or the first main surface 11 side of the element body 10. In this case, printing may be repeated for each of the multilayer groups G1 to G10 until the metal magnetic layer ML, the insulator I, the coil conductors, the through-hole conductors, and the via conductors reach the desired thickness. The insulators I between the first coil conductors CD1 and the insulators I between the second coil conductors CD2 are not essential components. In other words, the multilayer group G3 and the multilayer group G7 are not essential components.

[0059] The metal magnetic layers ML of each of the lamination groups G1 to G10 include metal magnetic particles MP (see FIG. 5) made of a magnetic material. The metal magnetic particles MP include metal particles DP, an oxide layer OL, and a resin (see FIG. 6).

[0060] The average particle size of the metal magnetic particles MP is preferably 0.2 μm to 20 μm, more preferably 2 μm to 15 μm, and even more preferably 2 μm to 10 μm. By making the average particle size of the metal magnetic particles MP relatively small within the above numerical range, the metal particles DP are more susceptible to oxidation, improving insulation properties.

[0061] The average particle size of the metal magnetic particles MP can be measured using the following procedure. An inductor sample is cut to obtain a cross section. Specifically, the sample cross section is obtained by cutting the sample through the center of the element body and the winding axis of the coil, perpendicular to the mounting surface and end surface of the element body. The cross section may be flattened by ion milling or other techniques. Three randomly selected locations in the center of the element body 10 are photographed using an SEM (approximately 1000x magnification) and subjected to composition analysis using EDX. The location of the metal magnetic particles MP in the SEM image can be identified by confirming the position of Fe in the field of view using the EDX composition analysis results. The circle-equivalent diameters of the identified metal magnetic particles MP are then determined using image analysis software (e.g., WinROOF2021 (Mitani Corporation)). The average of the circle-equivalent diameters is defined as the average particle size of the metal magnetic particles. Note that the term "average particle size" used herein may refer to the average particle size D50 (particle size equivalent to 50% cumulative volume percentage).

[0062] The metal particles DP contain Fe (iron) and Si. More specifically, they may be particles or alloy particles containing Fe and Si. Examples of the metal particles DP include Fe-Si alloys, Fe-Si-Cr (chromium) alloys, Fe-Si-Al (aluminum) alloys, Fe-Si-B (boron)-P (phosphorus)-Cu (copper)-C (carbon) alloys, and Fe-Si-B-Nb (niobium)-Cu alloys. The metal particles DP may also contain impurities unintended during production, such as Cr, Mn (manganese), Cu, Ni (nickel), P, S (sulfur), or Co (cobalt). The metal particles DP may also be contained in the magnetic paste, as will be described in detail in the description of the manufacturing method. Therefore, the metal particles DP may contain elements (e.g., Cr, Al, Li (lithium), Zn (zinc)) that are more easily oxidized than the Fe added during magnetic paste production. By including Si in the metal particles DP, oxidation of the Fe element contained in the metal magnetic particles can be suppressed, thereby further increasing the magnetic permeability of the inductor 1. The resin component contained in the magnetic paste may disappear after heat treatment of the element body, or it may remain.

[0063] The surfaces of the metal particles DP are covered with an insulating coating. In this specification, "insulating" refers to a volume resistivity of 1 MΩcm or more. When the surfaces of the metal particles DP are covered with an insulating coating, the insulation between the metal particles DP can be improved. A specific example of the insulating coating is an oxide layer OL, as shown in FIG. 6. Note that a configuration in which an insulating material is provided outside the oxide layer OL shown in FIG. 6, in other words, the metal particles DP may be coated with an insulating material (not shown).

[0064] The oxide layer OL is a layer produced by oxidation of the metal particles DP. In other words, it may contain oxygen. The thickness of the oxide layer OL may be preferably 1 nm to 50 nm, more preferably 1 nm to 30 nm, and even more preferably 1 nm to 20 nm. For example, the cross section obtained by polishing an inductor sample can be photographed with a scanning electron microscope (SEM) or a transmission electron microscope (TEM), and the thickness of the oxide layer OL covering the surface of the metal particles DP can be measured from the obtained SEM image.

[0065] To increase the strength of the element body 10, the element body 10 may be heat-treated and then impregnated with the resin, so that the resin is present between adjacent metal magnetic particles MP bonded by an insulating coating, by which the element body 10, which is formed by stacking the above-mentioned lamination groups, is heat-treated. The resin impregnated into the element body 10 after heat treatment may be, for example, one or more resins selected from the group consisting of epoxy resin, phenolic resin, polyester resin, polyimide resin, polyolefin resin, silicone resin, acrylic resin, polyvinyl butyral resin, cellulose resin, alkyd resin, etc.

[0066] In the inductor 1 of this embodiment, the peak value of the Si concentration in the oxide layer OL is less than twice the Si concentration at a predetermined position inside the metal particles DP. The Si concentration can be measured using the procedure described below. An inductor sample is cut to obtain a sample cross-section. Specifically, the sample cross-section is obtained by cutting through the center of the element body 10, perpendicular to the mounting surface (first main surface 11) and end faces of the element body 10. More specifically, the sample cross-section is obtained by cutting through the center of the element body 10 and the winding axis of the coil C, perpendicular to the mounting surface and end faces of the element body. The sample cross-section may be flattened by ion milling or the like. Three arbitrary locations in the center of the element body 10 are photographed using a TEM (approximately 400,000 times magnification) and subjected to composition analysis using EDX to determine the average Si concentration of the metal particles DP at the three locations. The composition analysis using EDX of the metal particles DP at each location is performed by line analysis along the direction from near the outer edge of the metal magnetic particles MP toward the interior of the metal particles DP (direction L1 in FIG. 6). The details of the analysis will be described later in the "Examples" section, but the composition analysis results shown in FIG. 7A can be obtained by line analysis as an example.

[0067] Here, the "peak value of the Si concentration in the oxide layer OL" as used herein refers to the maximum value of the Si concentration in the oxide layer OL when a line analysis is performed along the direction from near the outer edge of the metal magnetic particle MP toward the inside of the metal particle DP (the L1 direction in Figure 6). Furthermore, the "Si concentration at a predetermined position inside the metal particle DP" as used herein refers to the Si concentration at a position inside the metal particle DP that is a predetermined distance (for example, 300 nm) away from the position where the Si concentration in the oxide layer OL reaches its peak value. Note that the "Si concentration" as used herein refers to the content, and more specifically, the Si content based on weight.

[0068] In the inductor 1 of the present disclosure, the Si concentration at a predetermined position in the oxide layer OL is less than twice the Si concentration at a predetermined position inside the metal particle DP, which reduces the precipitation of Si components that occurs when the laminate is heated, making it difficult for compositional deviations in the oxide layer OL to occur, thereby reducing the degradation of inductance characteristics that would otherwise be caused by compositional deviations.

[0069] Verification tests of the peak value of the Si concentration in the oxide layer OL and the Si concentration at a predetermined position inside the metal particles DP will be described in detail in the Examples below. However, in a suitable inductor of the present disclosure, the peak value of the Si concentration in the oxide layer OL may be 1.5 times or less the Si concentration at a predetermined position inside the metal particles DP. More preferably, it may be 1.2 times or less. Even more preferably, it may be 1 time or less. Setting the Si concentration as described above can further reduce precipitation of Si components and further reduce deterioration of inductance characteristics. It can also reduce discoloration and / or rust of the element body due to compositional deviations.

[0070] Furthermore, in a preferred inductor of the present disclosure, the Si concentration at a predetermined position inside the metal particles DP may be 1 wt% or more and 15 wt% or less based on the total weight of the metal particles DP. When the Si concentration is set as described above, the precipitation of Si components can be further reduced, and the deterioration of inductance characteristics can be further reduced.

[0071] A first coil C1 and a second coil C2 are provided inside the element body 10. The first coil C1 and the second coil C2 may be magnetically coupled. For example, the coupling coefficient between the first coil C1 and the second coil C2 is 0.1 or more and 0.8 or less. Note that the element body 10 may be provided with two coils including only the first coil C1 and the second coil C2, or may be provided with three or more coils including the first coil C1 and the second coil C2.

[0072] -First coil- The first coil C1 is provided inside the element body 10. The first coil C1 includes a plurality of first coil conductors CD1 connected to each other by via conductors V (see FIG. 3), a first through-hole conductor T1, and a second through-hole conductor T2.

[0073] The first coil conductor CD1 of the present disclosure has a pore ratio of 10% or less. More preferably, the pore ratio may be 7% or less, and even more preferably, 1% or less. The term "pore" used in this specification refers to minute cavities such as those shown in FIGS. 5A and 5B. Note that the pores P can be observed from an SEM image (e.g., an SEM image observed at 500x magnification) of a cross section of an inductor sample obtained by ion milling after the heat treatment described above.

[0074] As an example, the pores P may have a size of about 1 μm in terms of circle equivalent diameter as analyzed using image analysis software. A more specific method for measuring the pores P can be performed using the procedure described below. The inductor sample is cut to obtain a sample cross section. Specifically, the sample cross section is obtained by cutting the sample through the center of the element body 10 and the winding axis of the coil C, perpendicular to the mounting surface (first main surface 11) and end surfaces of the element body 10. The sample cross section may be made flat by ion milling or the like. When the pores P in the coil conductor CD and the conductor portion (e.g., Ag (silver) portion) of the coil conductor CD of the obtained cross section are binarized and analyzed using image analysis software (WinROOF2021 (manufactured by Mitani Corporation)), the area ratio of the pores P to the entire observation area (e.g., area observed at 500x magnification) is 10% or less. Therefore, in the inductor of the present disclosure, the coil conductor CD is sufficiently sintered, and the pores (cavities) in the coil conductor are reduced. As a result, the desired DC resistance (R dc ) is obtained.

[0075] The first coil conductor CD1 is a sintered body. By making the first coil conductor CD1 a sintered body, the first coil conductor CD1 can be sintered together with the heat treatment of the element body 10, and the first coil conductor CD1 can be formed by a simple method.

[0076] The sintered body is made of Ag (silver). Metals other than Ag that can be formed by sintering may be used, such as metal conductors such as Cu (copper) and / or Pd (palladium). By using Ag for the sintered body, the resistance of the inductor can be further reduced.

[0077] As described above, the multiple first coil conductors CD1 are arranged in two stacking groups (stacked groups G6 and G8 (see FIG. 2)). This results in the first coil C1 having a two-layer structure with 1.75 turns. Furthermore, the length in the stacking direction of the via conductors V that connect the multiple first coil conductors CD1 together may be shorter than the length of the first through-hole conductors T1 or the length of the second through-hole conductors T2.

[0078] The first through-hole conductor T1 electrically connects the first external electrode E1 to the end of the first coil conductor CD1 of the first coil C1 that is closest to the bottom surface (first main surface 11) of the element body 10. The first through-hole conductor T1 extends along the stacking direction of the metal magnetic layers (e.g., the height direction T of the element body). The first through-hole conductor T1 may have a stacked structure.

[0079] The second through-hole conductor T2 electrically connects the other end of the first coil C1 and the second external electrode E2. The second through-hole conductor T2 extends in the stacking direction of the metal magnetic layers (e.g., the height direction T of the element body). The second through-hole conductor T2 may have a stacked structure.

[0080] -Second coil- The second coil C2 may be provided above the first coil C1 in the stacking direction inside the element body 10. The second coil C2 includes a plurality of second coil conductors CD2 connected to each other by via conductors (not shown), a third through-hole conductor T3, and a fourth through-hole conductor T4.

[0081] The second coil conductor CD2 of the present disclosure has a pore ratio of 10% or less. The pores of the second coil conductor CD2 are similar to those of the first coil conductor CD1, and therefore will not be described here. The second coil conductor CD2 may be a sintered body, and Ag may be used for the sintered body. The material of the second coil conductor CD2 may be the same as or different from the material of the first coil conductor CD1.

[0082] As described above, the multiple second coil conductors CD2 are arranged in two stacking groups (stacked groups G2 and G4 (see FIG. 2)). This results in the second coil C2 having a two-layer structure with 1.75 turns. Furthermore, the length in the stacking direction of the via conductors (not shown) connecting the multiple second coil conductors CD2 together may be shorter than the length of the third through-hole conductors T3 or the length of the fourth through-hole conductors T4.

[0083] The third through-hole conductor T3 electrically connects the end of the second winding portion of the second coil C2 that is closest to the bottom surface (first main surface 11) of the element body 10 to the third external electrode E3. The third through-hole conductor T3 extends along the stacking direction of the metal magnetic layers (e.g., the height direction T of the element body). The third through-hole conductor T3 may have a stacked structure.

[0084] The fourth through-hole conductor T4 connects the other end of the second coil C2 and the fourth external electrode E4. The fourth through-hole conductor T4 extends along the stacking direction of the metal magnetic layers (e.g., the height direction T of the element body). The fourth through-hole conductor T4 may have a stacked structure.

[0085] -External electrode- The external electrodes are provided on the bottom surface of the element body 10. The external electrodes include a first external electrode E1, a second external electrode E2, a third external electrode E3, and a fourth external electrode E4. The first external electrode E1 and the second external electrode E2 may be electrically connected to the first coil C1. The third external electrode E3 and the fourth external electrode E4 may be electrically connected to the second coil C2. Providing the external electrodes on the bottom surface (first main surface 11) of the element body 10 allows the inductor 1 to be properly mounted on a mounting board or the like.

[0086] The external electrodes may be made of various materials such as Cu or Ni, for example. The external electrodes may be formed of a single layer or may have a laminated structure of two or more layers. The external electrodes may be formed by any method, but may be plated electrodes formed by plating (for example, electroless plating).

[0087] As explained above, according to the inductor 1 of this embodiment, the peak value of the Si concentration in the oxide layer OL shown in FIG. 6 is less than twice the Si concentration at a predetermined position inside the metal particle DP, and the pore ratio of the coil conductor CD is 10% or less as shown in FIG. 5A, so that the precipitation of Si components and the occurrence of pores in the coil conductor are reduced. Therefore, the precipitation of Si components that occurs when the element body is heated can be reduced, and compositional deviations in the oxide film can be made less likely to occur. This makes it possible to reduce the deterioration of inductance characteristics due to compositional deviations. Furthermore, the coil conductor CD arranged in the element body 10 can be sintered sufficiently, reducing the occurrence of pores P in the coil conductor CD and achieving the desired DC resistance (R dc ) can be obtained.

[0088] <Method of manufacturing an inductor according to the present disclosure> Next, a method for manufacturing an inductor according to the present disclosure will be described with reference to Fig. 9. The method for manufacturing an inductor according to the present disclosure includes an element body forming step and an external electrode forming step.

[0089] -Body formation process- The element body forming process includes a laminating process, a drying process, a degreasing process, and a heat treatment process.

[0090] ·Lamination process First, magnetic paste for forming the metal magnetic layers ML of the laminated group described in FIG. 2, conductive paste for forming the coil conductors CD, and insulating paste for forming the insulators I between the coil conductors CD are prepared.

[0091] As an example of how to make a magnetic paste, a metal powder such as an Fe-Si alloy or an Fe-Si-Cr alloy with a volume-based cumulative 50% particle diameter (D50) of 2 μm or more and 20 μm or less is prepared. This metal powder is mixed with a binder such as cellulose or polyvinyl butyral (PVB) and a solvent such as a mixture of terpineol and butyl diglycol acetate (BCA), and then kneaded to make a magnetic paste.

[0092] When an Fe-Si alloy is used as the metal magnetic material, the Si content is preferably 2.0 at% or more and 8.0 at% or less. When an Fe-Si-Cr alloy is used as the metal magnetic powder, the Si content is preferably 2.0 at% or more and 8.0 at% or less. Furthermore, when an Fe-Si-Cr alloy is used as the metal magnetic powder, the Cr content is preferably 0.2 at% or more and 6.0 at% or less.

[0093] In one example of a method for producing an insulating paste, Fe2O3, ZnO, and CuO are prepared. These raw material powders are mixed with predetermined amounts of a solvent (such as a ketone-based solvent), a resin (such as polyvinyl acetal), and a plasticizer (such as an alkyd-based plasticizer), and then kneaded to produce the insulating paste. The insulating paste may contain non-magnetic ferrite powder, alumina powder, glass powder, zirconia powder, or a metal magnetic powder having an average particle size smaller than that of the metal magnetic powder constituting the element body.

[0094] As the conductive paste, for example, a paste containing Ag as a conductive material is prepared.

[0095] The above-mentioned magnetic paste, insulating paste, and conductive paste are used to prepare the multilayer groups G1 to G10 shown in FIG. 2 by screen printing or the like, and these are laminated to form an element body.

[0096] ·Drying process The drying process is a process for reducing the moisture content within the element bodies stacked in the lamination process by drying. This process is one of the processes for realizing that the peak value of the Si concentration in the oxide layer of the metal magnetic particles in the inductor of the present disclosure is no more than twice the Si concentration at a predetermined position inside the metal particles. However, this Si concentration relationship is not achieved by this process alone, and the above Si concentration relationship may be achieved by accompanying other processes.

[0097] In a preferred drying step, the drying step may be performed at a temperature lower than the processing temperature in the degreasing step described below. For example, the element body 10 may be dried for 10 hours or more at a temperature of approximately 150°C or higher and 200°C or lower. Under these drying conditions, the peak Si concentration in the oxide layer OL of the metal magnetic particles MP can be set to no more than twice the Si concentration at a predetermined position inside the metal particles DP.

[0098] ·Degreasing process The degreasing process is a process in which the element body is degreased after the drying process. For example, degreasing is performed at a temperature of about 300°C to 500°C. This removes the binder contained in the magnetic paste and conductive paste.

[0099] Heat treatment process After the degreasing step, a heat treatment is performed. The heat treatment temperature is such that the coil conductor is sintered, and may be, for example, about 700°C or higher and 900°C or lower. The heat treatment step of the present disclosure may be performed in an air atmosphere or a low-oxygen concentration atmosphere.

[0100] Furthermore, to increase the strength of the element body, the element body may be impregnated with a resin and then cured. The resin impregnated into the element body is typically an epoxy resin, but one or more resins selected from the group consisting of phenolic resin, polyester resin, polyimide resin, polyolefin resin, silicone resin, acrylic resin, polyvinyl butyral resin, cellulose resin, and alkyd resin may also be used. Through the above steps, the inductor element body of the present disclosure is formed.

[0101] ·External electrode formation process The external electrode formation process is a process for forming external electrodes electrically connected to the coil conductors. The external electrodes are formed by electrolytic plating at the positions where the through-hole conductors are exposed on the mounting surface (first main surface 11) of the element body 10. The plating material may be Cu plating. Other examples include, but are not limited to, Ni-Sn, Ni-Au, Ni-Cu, and / or Cu-Ni-Au. After the external electrodes are formed, the inductor of this embodiment can be manufactured by cutting into individual elements.

[0102] As described above, the inductor manufacturing method described in this embodiment can provide a method for manufacturing an inductor in which the precipitation of Si components is reduced and the occurrence of pores in the coil conductor is reduced. [Example]

[0103] The demonstration tests for the inductors of the present disclosure will be described in detail with reference to Figures 7A, 7B, 8A, and 8B. Specifically, the composition of the metal magnetic particles was analyzed, the pore ratio of the coil conductor was measured, and the distribution of the inductance value was measured for the following examples and comparative examples.

[0104] Example The inductor was manufactured through the element formation process, which includes the lamination process, drying process, degreasing process, and heat treatment process, and the external electrode formation process. Here, the heat treatment process in the example was performed in an air atmosphere, but by performing the heat treatment in a low-oxygen concentration atmosphere, the precipitation of Si components was reduced compared to when the heat treatment was performed in an air atmosphere, and the occurrence of pores in the coil conductor was also reduced.

[0105] Comparison example The inductor was manufactured through the element body forming process, which includes the lamination process, degreasing process, and heat treatment process, and the external electrode forming process. That is, in the comparative example, the drying process was not performed, and the heat treatment process was performed in an air atmosphere.

[0106] -Composition analysis results- The composition analysis was performed using the method described above. That is, the inductor sample was cut, and a line analysis was performed on the cross section of the sample using TEM and EDX along the direction from near the outer edge of the metal magnetic particle MP toward the inside of the metal particle DP (direction L1 in Figure 6). This analysis measured the "peak value of Si concentration in the oxide layer OL" and the "Si concentration at a predetermined position inside the metal particle DP" described in this specification.

[0107] In the inductor of the example, an analysis of values ​​close to the average of three arbitrary locations in the center of the element body 10 of the inductor sample cross section showed that the peak Si concentration in the oxide layer OL was 12 wt% and the Si concentration at a predetermined position inside the metal particle DP (a position inside the metal particle DP 300 nm away from the peak Si concentration in the oxide layer OL) was 12 wt% (see FIG. 7A). Furthermore, by adjusting the conditions of the drying and heat treatment processes while maintaining the Si concentration at a predetermined position inside the metal particle DP (a position inside the metal particle DP 300 nm away from the peak Si concentration in the oxide layer OL) at 12 wt%, the peak Si concentration in the oxide layer OL could be adjusted to 14.4 wt%, 18 wt%, and 24 wt%. In other words, the peak Si concentration in the oxide layer OL could be adjusted within a range of 1 to 2 times the Si concentration at the predetermined position inside the metal particle DP. On the other hand, in the inductor of the comparative example, an analysis of values ​​close to the average of three arbitrary locations in the center of element body 10 of the cross section of the inductor sample showed that the peak Si concentration in the oxide layer OL was 9 wt%, and the Si concentration at a predetermined position inside the metal particle DP (a position inside the metal particle DP 300 nm away from the peak Si concentration in the oxide layer OL) was 24.3 wt% (see FIG. 7B). In other words, the peak Si concentration in the oxide layer OL was more than twice the Si concentration at the predetermined position inside the metal particle DP.

[0108] -Pore ratio measurement results- As described above, the pore ratio was measured by cutting the inductor sample to prepare a cross section of the sample, and analyzing the cross section by binarizing it using image analysis software (WinROOF2021 (Mitani Shoji Co., Ltd.)).

[0109] As shown in Fig. 5A, the pore ratio of the coil conductor CD of the inductor of the example was 10% or less. On the other hand, the sintering of the coil conductor CD of the inductor of the comparative example was insufficient, and as shown in Fig. 5B, the pore ratio of the coil conductor CD exceeded 16%.

[0110] - Measuring the distribution of inductance values ​​- The distribution of inductance values ​​was measured using an LCR meter (E4982A, manufactured by Keysight Technologies) at a measurement frequency of 10 MHz.

[0111] As shown in Fig. 8A, the inductor of the example had an average inductance value of 58.01 nH and a standard deviation of 0.93 when a total of 107 samples were used. On the other hand, as shown in Fig. 8B, the inductor of the comparative example had an average inductance value of 57.05 nH and a standard deviation of 1.30 when a total of 106 samples were used. Measurement of the distribution of the inductance values ​​showed that the inductor of the example had an improved inductance value and improved variation in the inductance value compared to the inductor of the comparative example.

[0112] The embodiments disclosed herein are illustrative in all respects and are not intended to be limiting. Therefore, the technical scope of the present disclosure should not be interpreted solely by the above-described embodiments, but should be defined by the claims. The technical scope of the present disclosure also includes all modifications within the meaning and scope of the claims. While the element body 10 having lamination groups G1 to G10 has been disclosed as an example, the insulator I is not an essential component. Furthermore, if the insulator I is not provided, the lamination groups G3 and G7 may not be provided. Furthermore, while FIG. 6 illustrates an embodiment in which the surfaces of the metal particles DP are covered with an oxide layer OL, the present disclosure is not limited to this embodiment. For example, the oxide layer OL may be further coated with an insulating material.

[0113] Aspects of the inductor and the method for manufacturing the inductor according to the present disclosure are as follows. <1> an element body containing a resin and metal magnetic particles having a coil conductor therein and in which an oxide layer is provided on the surface of the metal particles containing Fe and Si; an external electrode provided on the element body and connected to the coil conductor; An inductor, wherein the peak value of the Si concentration in the oxide layer is not more than twice the Si concentration at a predetermined position inside the metal particle, and the pore ratio of the coil conductor is not more than 10%. <2> the peak value of the Si concentration in the oxide layer is 1.5 times or less the Si concentration at the predetermined position on the inner side of the metal particle; <1> The inductor according to claim 1. <3> The coil conductor is a sintered body. <1> or <2> The inductor according to claim 1. <4> The sintered body contains Ag as a component. <3> The inductor according to claim 1. <5> The average particle size D50 of the metal magnetic particles is 0.2 μm or more and 20 μm or less. <1> ~ <4> 10. An inductor according to any one of claims 1 to 9. <6> the Si concentration at a predetermined position inside the metal particle is 1 wt% or more and 15 wt% or less based on the total weight of the metal particle; <1> ~ <5> 10. An inductor according to any one of claims 1 to 9. <7> an element body forming step of forming an element body; and an external electrode forming step of forming external electrodes on a mounting surface of the element body, The element body forming step includes: a lamination step of laminating a metal magnetic body containing metal magnetic particles containing Fe and Si and a coil conductor; a drying step of drying the element body so that the peak value of the Si concentration in the oxide layer of the metal magnetic particle is equal to or less than twice the Si concentration at a predetermined position inside the metal particle; a degreasing step of degreasing the element body after the drying step; a heat treatment step of heat treating the element body after the degreasing step so that the pore ratio of the coil conductor becomes 10% or less. <8> The drying step is carried out at a temperature lower than the treatment temperature in the degreasing step. <7> 2. A method for manufacturing an inductor according to claim 1 <9> The heat treatment step is carried out at a temperature higher than the treatment temperature in the degreasing step. <7> or <8> A method for manufacturing the inductor described above. [Industrial Applicability]

[0114] The inductor of the present disclosure can be suitably used as an electronic component in which the deposition of Si components is reduced and the occurrence of pores in the coil conductor is reduced. [Explanation of symbols]

[0115] 1 inductor 10 Base 11 First main surface 12 Second main surface 13 First end surface 14 Second end face 15 First aspect 16 Second aspect C coil C1 First coil C2 Second coil C3 Third coil C4 4th coil CD Coil Conductor CD1 First coil conductor CD2 Second coil conductor E1 1st external electrode E2 2nd external electrode E3 3rd external electrode E4 4th external electrode G1~G10 Lamination Group I Insulator M Magnetic material MP metal magnetic particles ML metal magnetic layer T1 First through-hole conductor T2 Second through-hole conductor T3 Third through-hole conductor T4 4th through-hole conductor V via conductor

Claims

1. an element body containing a resin and metal magnetic particles having a coil conductor therein and in which an oxide layer is provided on the surface of the metal particles containing Fe and Si; an external electrode provided on the element body and connected to the coil conductor; An inductor, wherein the peak value of the Si concentration in the oxide layer is not more than twice the Si concentration of the metal particles located inside the oxide layer, and the pore ratio of the coil conductor is not more than 10%.

2. 2. The inductor according to claim 1, wherein the peak value of the Si concentration in the oxide layer is 1.5 times or less the Si concentration in the metal particles located inside the oxide layer.

3. The inductor according to claim 1 , wherein the coil conductor is a sintered body.

4. The inductor according to claim 3 , wherein the sintered body contains Ag as a component.

5. 2. The inductor according to claim 1, wherein the metal magnetic particles have an average particle size D50 of 0.2 μm or more and 20 μm or less.

6. An inductor as described in claim 1, wherein the Si concentration of the metal particles located inside the oxide layer is 1 wt% or more and 15 wt% or less based on the total weight of the metal particles.

7. an element body forming step of forming an element body; and an external electrode forming step of forming external electrodes on a mounting surface of the element body, The element body forming step includes: a lamination step of laminating a metal magnetic body containing metal magnetic particles containing Fe and Si and a coil conductor; a drying step of drying the element body so that the peak value of the Si concentration in the oxide layer of the metal magnetic particle is not more than twice the Si concentration of the metal particle located inside the oxide layer; a degreasing step of degreasing the element body after the drying step; a heat treatment step of heating the element body after the degreasing step so that the pore ratio of the coil conductor becomes 10% or less.

8. The method for manufacturing an inductor according to claim 7 , wherein the drying step is performed at a temperature lower than a processing temperature in the degreasing step.

9. The method for manufacturing an inductor according to claim 7 , wherein the heat treatment step is performed at a temperature higher than a treatment temperature in the degreasing step.

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