CMP polishing pad with improved removal rate

Abstract

To provide means of improving, preferably without increasing defects, a removal rate important to efficiency of a process of making an electronic device.SOLUTION: In chemical mechanical polishing, a polishing pad having a polishing portion comprising a polymer matrix and rate enhancing lamellar particles that include a phosphate or arsenate of a group III-A or IV-A metal can be effective in chemical mechanical polishing especially when using slurry comprising particles having a positive charge in slurry conditions.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION The present invention relates generally to polishing pads for chemical mechanical polishing of substrates, particularly including polishing with ceria-based slurries, such as during the formation of pre-metal insulating films.

[0002] background In the fabrication of integrated circuits and other electronic devices, multiple layers of conductive, semiconducting, and insulating materials are deposited on the surface of a semiconductor wafer and then partially or selectively removed from the surface. Thin layers of conductive, semiconducting, and insulating materials can be deposited using several deposition techniques. Also, in the damascene process, material is deposited to fill recesses created by patterned etching of trenches and vias. Because the filling is conformal, this can result in irregular surface topography. To avoid underfill, excess material can be deposited. Therefore, material outside the recesses must be removed. Common deposition techniques in modern wafer processing include physical vapor deposition (PVD), also known as sputtering, chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), and electrochemical deposition (ECD), among others. Common removal techniques include wet and dry etching; isotropic and anisotropic etching, among others.

[0003] As material is successively deposited and removed, the topography of the substrate can become uneven or non-planar. Subsequent semiconductor processing (e.g., photolithography, metallization, etc.) requires that the wafer have a flat surface, so the wafer must be planarized. Planarization is useful for removing undesirable surface topography and surface defects, such as rough surfaces, agglomerated materials, crystal lattice damage, scratches, and contaminated layers or materials.

[0004] Chemical mechanical planarization (CMP), also known as chemical mechanical polishing (CMP), is a common technique used to planarize or polish workpieces, such as semiconductor wafers, to remove excess material during damascene processes, front-end-of-line (FEOL) processing, or back-end-of-line (BEOL) processing. In conventional CMP, a wafer carrier, or polishing head, is mounted on a carrier assembly. The polishing head holds the wafer and positions it in contact with the polishing surface of a polishing pad mounted on a table or platen within the CMP apparatus. The carrier assembly provides controllable pressure between the wafer and the polishing pad. Simultaneously, a slurry or other polishing medium is dispensed onto the polishing pad and drawn into the gap between the wafer and the polishing layer. To perform polishing, the polishing pad and wafer typically rotate relative to one another. As the polishing pad rotates beneath the wafer, the wafer sweeps out a generally annular polishing track, or polishing area, within which the wafer's surface directly faces the polishing layer. The wafer surface is polished and planarized by the chemical and mechanical action of the polishing surface and polishing medium (eg, slurry) on the surface.

[0005] Removal rate is important to the efficiency of processes for fabricating electronic devices. For example, in high-capacity multilayer memory devices (e.g., 3D NAND flash memory), the manufacturing process can involve assembling alternating multilayer stacks of SiO2 and Si3N4 films in a pyramidal staircase format. Once completed, the stack is capped with a thick SiO2 capping layer, which must be planarized before the device structure is completed. Device capacitance is proportional to the number of layers in the stack. Commercially available devices generally use 32 and 64 layers, with the industry rapidly moving toward 128 layers. The thickness of each oxide / nitride pair in the stack is approximately 125 nm. Therefore, the thickness of the stack increases directly with the number of layers (32 layers have a thickness of approximately 4,000 nm, 64 layers have a thickness of approximately 8,000 nm, and 128 layers have a thickness of approximately 16,000 nm). The total amount of capping insulator to be removed can be approximately 1.5 times the thickness of the stack (e.g., up to approximately 24,000 nm). Conventional dielectric CMP slurries have a removal rate of approximately 250 nm / min, resulting in unnecessarily long CMP process times, which can be a bottleneck in 3D NAND manufacturing processes. Much of the effort to develop faster CMP processes has focused on process conditions, such as higher pressure, faster contact speed, pad conditioning, and slurry composition. However, the improvement in removal rate cannot be achieved without the expense of increased defects in the polished substrate. Therefore, a means of improving removal rate, preferably without increasing defects, is desired.

[0006] Summary of the Invention Provided herein is a polishing pad useful in chemical mechanical polishing having an abrasive comprising a polymer matrix material; and layered particles for enhancing the removal rate, wherein the layered particles are selected from the group consisting of a Group III-A or Group IV-A metal hydrogen phosphate or hydrogen arsenate, preferably having the formula: M(HYO4)2n(H2O) wherein M is a metal ion of Group III-A or IV-A, preferably Zr +4 , Ti +4 or Ce+4 , most preferably Zr +4 wherein Y is P or As, preferably P, and n is 0, 1, or 2, preferably 1.

[0007] Also provided herein are methods for producing a method of manufacturing a semiconductor device, comprising the steps of: providing a substrate; the above Also disclosed is a method comprising the steps of providing a polishing pad according to the invention, providing a slurry between the polishing pad and a substrate, and polishing the substrate using the pad and the slurry, preferably in an aqueous medium such as deionized water at a pH where the slurry contains particles with an overall positive surface charge. For purposes of this specification, a positive surface charge means that the pH of the polishing slurry is below its isoelectric point. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic diagram showing the chemical structure of one example of a rate-enhancing layered particle additive disclosed herein.

[0009] Detailed Description of the Invention Disclosed herein is a polishing pad having a polishing portion comprising a polymer matrix and rate-enhancing layered particles.

[0010] The rate-enhancing layered particles can be metal hydrogen phosphates or metal hydrogen arsenates. The rate-enhancing layered particles can have a laminated structure. Without wishing to be limited, it is believed that the laminated structure can reduce the likelihood that large particles will scratch the substrate being polished and cause defects. The rate-enhancing layered particles can have a plate-like structure (particularly a laminated plate-like structure). The average dimension of the particle's major axis (i.e., length and / or width, substantially perpendicular to the thickness) can be at least 0.5, or at least 1 micron, or at least 2 microns, and at the same time, can be at most 20, or at most 10, or at most 5 microns. The particles can have an aspect ratio (length or width:thickness) of 3 to 20 or 3 to 10.

[0011] The rate-enhancing layered particles can have a crystalline structure. Figure 1 illustrates an example of the molecular structure of such a layered particle, showing zirconium (as the metal) and phosphate groups. Each layer can have a metal ion face with hydrogen phosphate (or arsenate) groups attached (e.g., bridged) above and below the metal ion face. The outer face of the hydrogen phosphate (or arsenate) bridged layer can be terminated with P-OH groups (or As-OH groups). The metal ions (Zr +4 The hydroxyl groups can be bonded to phosphate or arsenate groups (phosphate groups shown), preferably phosphate, on either side to form an alternating or layered structure. Water can be bonded to the hydroxyl groups. The metal ions can be group III-A or IV-A metal ions, such as zirconium ions (e.g., Zr +4 ), titanium ions (e.g., Ti +4 ), or cerium ions (e.g., Ce +4 ) can be.

[0012] The particles are composed of metal ions (e.g., Zr +4), typically in the form of a metal oxide, can have several layers to which phosphate (or arsenate) groups are attached. In aqueous solutions, at pHs above isoelectric pH (approximately 3 for zirconium hydrogen phosphate), the surface is strongly electronegative due to the large number of surface hydroxyl groups. The particles are also hydrophilic but chemically inert and insoluble in water. The particles can be highly friable, thereby reducing the likelihood of scratch defects during polishing of larger particles. Furthermore, these particles can cleave to form platelets, which can improve polishing performance by, for example, increasing removal rates.

[0013] Metal phosphates or metal arsenates have the formula: M(HYO4)2n(H2O) wherein M is a metal ion of Group III-A or IV-A, preferably Zr +4 , Ti +4 or Ce +4 , most preferably Zr +4 wherein Y is P or As, preferably P, and n is 0, 1 or 2, preferably 1.

[0014] The amount of the rate-enhancing layered particles disclosed herein used in the polishing portion of the pad can be at least 0.1, or at least 1, or at least 2, or at least 3, or at least 5, to at most 20, or at most 15, or at most 10 weight percent based on the total weight of the polishing portion. The amount of the rate-enhancing layered particles can be 0.1 to 20 volume percent, or 1 to 18 volume percent, or 2 to 15 volume percent based on the total volume of the polishing portion.

[0015] The polishing portion can include any polymer matrix material commonly used in polishing pads. The polishing portion can include a thermoplastic polymer or a thermosetting polymer. Examples of polymers that can be used in the polishing portion of the polymer material that can be used in the base pad or polishing portion include polycarbonate, polysulfone, nylon, epoxy resin, polyether, polyester, polystyrene, acrylic polymer, polymethyl methacrylate, polyvinyl chloride, polyvinyl fluoride, polyethylene, polypropylene, polybutadiene, polyethyleneimine, polyurethane, polyethersulfone, polyamide, polyetherimide, polyketone, epoxy, silicone, copolymers thereof (such as polyether-polyester copolymers), and combinations or blends thereof. The polymer can be polyurethane.

[0016] The abrasive portion can have a Young's modulus (per ASTM D412-16) of at least 2, at least 2.5, at least 5, at least 10, or at least 50 MPa, up to 900, up to 700, up to 600, up to 500, up to 400, up to 300, or up to 200 MPa. The abrasive portion can be opaque to a signal used for endpoint detection.

[0017] The abrasive portion can also include other particles, such as hollow microelements, particularly flexible hollow polymeric microelements (e.g., microspheres). For example, multiple microelements can be uniformly dispersed throughout the abrasive layer. The multiple microelements can simply be pores (e.g., trapped gas bubbles) in a matrix, or they can be hollow-core polymeric materials, liquid-filled hollow-core polymeric materials, water-soluble materials, or insoluble phase materials (e.g., mineral oil). The multiple microelements provide porosity to the abrasive element, for example, when the microelements are selected from trapped gas bubbles and hollow-core polymeric materials uniformly distributed throughout the abrasive layer. The microelements can have a diameter of at least 10 microns and a weight-average diameter of up to 150 microns or up to 50 microns. The weight-average diameter can be measured using laser diffraction, for example, low-angle laser light scattering (LALLS). The plurality of microelements can comprise polymeric microballoons (e.g., Expancel® microspheres manufactured by Akzo Nobel) having shell walls of either polyacrylonitrile or polyacrylonitrile copolymers. The plurality of microelements can be incorporated into the polishing layer in an amount of 0, or at least 5, or at least 10 volume percent, up to 50, 45, 40, or 35 volume percent. When the microelements provide porosity, the porosity of the polishing portion can be 0-50, 5-45, or 10-35 volume percent. The volume percent porosity can be determined by dividing the difference between the specific gravity of the unfilled polishing layer and the specific gravity of the polishing layer containing the microelements by the specific gravity of the unfilled polishing layer. Alternatively, the percent porosity can be determined by dividing the density of the polishing layer by the weighted average density of the unfilled components of the polishing layer. Metal phosphates are particularly useful for machining non-porous polishing pads. For example, metal phosphate particles can improve the machining of grooves from a vertical lathe working with a fixed cutting tool or slotting with a spinning tool bit.

[0018] The polished area has a hardness of 0.4 to 1.15, or 0.7 to 1.0 g / cm when measured according to ASTM D1622 (2014). 3The density of the granular material may be 0.015 to 0.015.

[0019] The abrasive portion may have a Shore D hardness of 28 to 75 as measured according to ASTM D2240 (2015).

[0020] The abrasive portion can have an average thickness of 20 to 150 mils, 30 to 125 mils, 40 to 120 mils, or 50 to 100 mils (0.5 to 4, 0.7 to 3, 1 to 3, or 1.3 to 2.5 mm).

[0021] The polishing pad of the present invention optionally further comprises at least one additional layer in surface contact with the polishing layer. For example, the polishing pad can further comprise a compressible base layer that adheres to the polishing layer. The compressible base layer preferably improves the conformability of the polishing layer to the surface of the substrate being polished. A base pad (also referred to as a sublayer or base layer) can be used below the polishing portion. The base pad can comprise a single layer or multiple layers. The upper surface of the base pad can be defined as a plane in the xy Cartesian coordinate system. For example, the polishing portion can be attached to the base pad via a mechanical fastener or adhesive. The base layer can have a thickness of at least 0.5 mm or at least 1 mm. The base layer can have a thickness of 5 mm or less, 3 mm or less, or 2 mm or less.

[0022] The base pad or base layer can comprise any material known to be used as a base layer for polishing pads. For example, the base pad or base layer can comprise a polymer, a polymer blend, or a composite of a polymer material and another material, such as ceramic, glass, metal, or stone. Polymers and polymer composites can be used as the base pad, especially the upper layer when there are multiple layers, due to their compatibility with the material that can form the polishing portion. Examples of such composites include polymers filled with carbon or inorganic fillers and fiber mats (e.g., glass or carbon fiber) impregnated with polymers. The base of the pad may be constructed from a material having one or more of the following properties: a Young's modulus (e.g., as determined by ASTM D412-16) ranging from at least 2, at least 2.5, at least 5, at least 10, or at least 50 MPa, up to 900, up to 700, up to 600, up to 500, up to 400, up to 300, or up to 200 MPa; a Poisson's ratio (e.g., as determined by ASTM E132) of at least 0.05, at least 0.08, or at least 0.1, up to 0.6, or up to 0.5; a viscosity of at least 0.4 or at least 0.5, up to 1.7, up to 1.5, or up to 1.3 grams per cubic centimeter (g / cm 3 ) density.

[0023] Examples of such polymeric materials that can be used in the base pad or polishing portion include polycarbonate, polysulfone, nylon, epoxy resin, polyether, polyester, polystyrene, acrylic polymer, polymethyl methacrylate, polyvinyl chloride, polyvinyl fluoride, polyethylene, polypropylene, polybutadiene, polyethyleneimine, polyurethane, polyethersulfone, polyamide, polyetherimide, polyketone, epoxy, ethylene-vinyl acetate (EVA or PEVA), ethylene propylene diene monomer rubber (EPDM rubber), silicone, copolymers thereof (such as polyether-polyester copolymers), or combinations or blends thereof.

[0024] The polymer can be a polyurethane, which can be used alone or as a matrix for carbon or inorganic fillers and fiber mats (e.g., of glass or carbon fibers).

[0025] For purposes of this specification, "polyurethane" refers to products obtained from di- or polyfunctional isocyanates, such as polyetherureas, polyisocyanurates, polyurethanes, polyureas, polyurethaneureas, copolymers thereof, and mixtures thereof. C The MP polishing pad may be manufactured by a method including the steps of providing an isocyanate-terminated urethane prepolymer; separately providing a curable component; and combining the isocyanate-terminated urethane prepolymer and the curable component to form a combination and reacting the combination to form a product. The base pad or base layer can be formed by skiving a molded polyurethane cake to the desired thickness. Optionally, preheating the cake mold with IR radiation, induction, or direct current can reduce product variability when molding the porous polyurethane matrix. Optionally, either a thermoplastic or thermosetting polymer can be used. The polymer can be a crosslinked thermosetting polymer.

[0026] When polyurethane is used in the base pad and / or polishing layer, the polyurethane can be a reaction product of a polyfunctional isocyanate and a polyol. For example, a polyisocyanate-terminated urethane prepolymer can be used. The polyfunctional isocyanate used in forming the polishing layer of the chemical mechanical polishing pad of the present invention can be selected from the group consisting of aliphatic polyfunctional isocyanates, aromatic polyfunctional isocyanates, and mixtures thereof. For example, the polyfunctional isocyanate used in forming the polishing layer of the chemical mechanical polishing pad of the present invention can be a diisocyanate selected from the group consisting of 2,4-toluene diisocyanate, 2,6-toluene diisocyanate, 4,4'-diphenylmethane diisocyanate, naphthalene-1,5-diisocyanate, tolidine diisocyanate, para-phenylene diisocyanate, xylylene diisocyanate, isophorone diisocyanate, hexamethylene diisocyanate, 4,4'-dicyclohexylmethane diisocyanate, cyclohexane diisocyanate, and mixtures thereof. The polyfunctional isocyanate can be an isocyanate-terminated urethane prepolymer formed by the reaction of a diisocyanate with a prepolymer polyol. The isocyanate-terminated urethane prepolymer can have 2-12 wt%, 2-10 wt%, 4-8 wt%, or 5-7 wt% unreacted isocyanate (NCO) groups. The prepolymer polyol used to form the polyfunctional isocyanate-terminated urethane prepolymer can be selected from the group consisting of diols, polyols, polyol diols, copolymers thereof, and mixtures thereof.For example, the prepolymer polyol can be selected from the group consisting of polyether polyols (e.g., poly(oxytetramethylene) glycol, poly(oxypropylene) glycol, and mixtures thereof); polycarbonate polyols; polyester polyols; polycaprolactone polyols; mixtures thereof; and mixtures thereof with one or more low molecular weight polyols selected from the group consisting of ethylene glycol; 1,2-propylene glycol; 1,3-propylene glycol; 1,2-butanediol; 1,3-butanediol; 2-methyl-1,3-propanediol; 1,4-butanediol; neopentyl glycol; 1,5-pentanediol; 3-methyl-1,5-pentanediol; 1,6-hexanediol; diethylene glycol; dipropylene glycol; and tripropylene glycol. For example, the prepolymer polyol can be selected from the group consisting of polytetramethylene ether glycol (PTMEG); ester-based polyols (such as ethylene adipate and butylene adipate); polypropylene ether glycol (PPG); polycaprolactone polyols; copolymers thereof; and mixtures thereof. For example, the prepolymer polyol can be selected from the group consisting of PTMEG and PPG. When the prepolymer polyol is PTMEG, the isocyanate-terminated urethane prepolymer can have an unreacted isocyanate (NCO) concentration of 4 to 12 wt% (more preferably 6 to 10 wt%; most preferably 8 to 10 wt%).Examples of commercially available PTMEG-based isocyanate-terminated urethane prepolymers include Imuthane® prepolymers (available from COIM USA, Inc., e.g., PET 80A, PET 85A, PET 90A, PET 93A, PET 95A, PET 60D, PET 70D, PET 75D); Adiprene® prepolymers (available from Chemtura, e.g., LF 800A, LF 900A, LF 910A, LF 930A, LF 931A, LF 939A, LF 950A, LF 952A, LF 600D, LF 601D, LF 650D, LF 667, LF 700D, LF750D, LF751D, LF752D, LF753D, and L325); Andur® prepolymers (available from Anderson Development Available from Polypropylene Glycol Company, for example, 70APLF, 80APLF, 85APLF, 90APLF, 95APLF, 60DPLF, 70APLF, and 75APLF. When the prepolymer polyol is PPG, the isocyanate-terminated urethane prepolymer can have an unreacted isocyanate (NCO) concentration of 3 to 9 wt% (more preferably 4 to 8 wt%, and most preferably 5 to 6 wt%). Examples of commercially available PPG-based isocyanate-terminated urethane prepolymers include Imuthane® prepolymers (available from COIM USA, Inc., e.g., PPT 80A, PPT 90A, PPT 95A, PPT 65D, PPT 75D); Adiprene® prepolymers (available from Lanxess, e.g., LFG 963A, LFG 964A, LFG 740D); and Andur® prepolymers (available from Anderson Development Company, e.g., 8000APLF, 9500APLF, 6500DPLF, 7501DPLF). The isocyanate-terminated urethane prepolymer can be a low-free isocyanate-terminated urethane prepolymer having a free toluene diisocyanate (TDI) monomer content of less than 0.1 wt%. Non-TDI-based isocyanate-terminated urethane prepolymers can also be used.For example, an isocyanate-terminated urethane prepolymer can be formed by reacting 4,4'-diphenylmethane diisocyanate (MDI) with a polyol such as polytetramethylene glycol (PTMEG), although any diol such as 1,4-butanediol (BDO) is acceptable. When such an isocyanate-terminated urethane prepolymer is used, the unreacted isocyanate (NCO) concentration is preferably 3 to 10 wt% (more preferably 4 to 10 wt%, most preferably 5 to 10 wt%). Examples of commercially available isocyanate-terminated urethane prepolymers in this category include Imuthane® prepolymers (available from COIM USA, Inc., e.g., 27 85A, 27 90A, 27 95A); Andur® prepolymers (available from Anderson Development Company, e.g., IE75AP, IE80AP, IE85AP, IE90AP, IE95AP, IE98AP); and Vibrathane® prepolymers (available from Chemtura, e.g., B625, B635, B821).

[0027] The polishing pad of the present invention in its final form can further include the incorporation of one-dimensional or multi-dimensional textures on its upper surface. These can be classified as macrotextures or microtextures depending on their size. Common types of macrotextures used in CMP to control hydrodynamic response and / or slurry transport include, but are not limited to, grooves of many configurations and designs, such as annular, radial, and cross-hatched. These can be formed into thin, uniform sheets through machining, or directly on the pad surface through net-shape molding. Common types of microtextures are fine-scale features that create surface asperities that are contact points with the substrate wafer where polishing occurs. Common types of microtextures include, but are not limited to, textures formed before, during, or after use by abrasion with many hard particles, such as diamonds (often referred to as pad conditioning), and microtextures formed during the pad fabrication process.

[0028] The polishing pad of the present invention is adaptable for surface contact with the platen of a chemical mechanical polishing machine. The polishing pad can be secured to the platen of the polishing machine. The polishing pad can be secured to the platen using at least one of a pressure-sensitive adhesive and a vacuum.

[0029] The CMP pads of the present invention can be manufactured by a variety of processes compatible with the properties of the pad polymer used. These include mixing the components as described above, pouring them into a mold, annealing, and slicing them into sheets of the desired thickness. Alternatively, they may be manufactured by more precise net-shape molding. Manufacturing processes include: 1. thermoset injection molding (often referred to as "reaction injection molding" or "RIM"), 2. thermoplastic or thermoset injection blow molding, 3. compression molding, or 4. any similar type of process in which a flowable material is deposited and solidified to create at least a portion of the pad's macro- or micro-texture. In one example of shaping a polishing pad: 1. a flowable material is directed into or onto a structure or substrate; 2. as the material solidifies, the structure or substrate can impart a surface texture to the material, and 3. the structure or substrate is then separated from the solidified material.

[0030] method The polishing pads disclosed herein can be used to polish substrates. For example, a polishing method can include providing a substrate to be polished and then polishing using a pad disclosed herein. The substrate can be any substrate for which polishing and / or planarization is desired. Examples of such substrates include magnetic substrates, optical substrates, and semiconductor substrates. A specific example is a pre-metal insulating film stack. The specific material to be polished on the substrate can be a silicon oxide layer. The method can be part of front-end or back-end processing for integrated circuits. For example, this process can be used to remove undesired surface topography and surface defects, such as rough surfaces, agglomerated materials, crystal lattice damage, scratches, and contaminated layers or materials. Also, in damascene processes, material is deposited to fill recesses created by one or more of the photolithography, patterned etching, and metallization steps. Certain steps can be imprecise, for example, recess overfilling can occur. The method disclosed herein can also be used to remove material outside the recess. This process can be chemical mechanical planarization or chemical mechanical polishing, both of which can be referred to as CMP. A carrier can hold a substrate to be polished, for example, a semiconductor wafer (with or without layers formed by lithography and metallization), which contacts the polishing elements of the polishing pad. A slurry or other polishing medium can be dispensed into the gap between the substrate and the polishing pad. The polishing pad and substrate move relative to each other, for example, rotate. The polishing pad is typically placed below the substrate to be polished. The polishing pad can rotate. The substrate to be polished can also move, for example, on a polishing track (e.g., annular). The relative movement brings the polishing pad close to and into contact with the surface of the substrate.

[0031] The pad disclosed herein can be used with any slurry.The inventors have found that the pad disclosed herein can be used with a slurry having particles that are positively charged (or have a positive surface charge) during polishing conditions, thereby providing a significant improvement in removal rate.Without wishing to be limited, it is assumed that the rate-enhancing layered particles can provide a pad surface with a relatively high concentration of anionic hydroxyl sites, which can be bonded to the positively charged particles present during polishing.

[0032] The platen pressure can be 1 to 5, 1.5 to 4.5, or 2 to 4 pounds per square inch (psi) (approximately 6 to 35, 10 to 30, or 13 to 28 kilopascals (KPa)). The platen speed can be approximately 40 to 150, or 50 to 130 rpm. The amount of slurry added can be, for example, 50 to 500 milliliters per minute. The pH of the slurry during polishing can be as low as 2, 2.5, or 3, or as high as 7, or as high as 6.8.

[0033] For example, the benefits of improved removal rates are particularly pronounced in ceria-based slurries. In ceria-based slurries, CeO2 can provide particles with a positive charge (or positive surface charge) at a pH of about 6.5 or less. For example, such ceria-based slurries can contain at least 0.01, or at least 0.1, weight percent ceria particles, based on the total weight of the slurry, up to 20, or up to 15, or up to 10, or up to 5, or up to 2 weight percent ceria particles. Ceria-based slurries can contain only ceria as the sole particles, or can contain additional particles. These particles can be, for example, other particles that have a positive (surface) charge at the pH at which polishing is performed. The other particles can be, for example, silica particles or alumina particles, preferably silica particles or alumina particles that have a positive surface charge at the pH at which polishing is performed. Improvements in removal rates can also be observed in certain silica-based slurries, particularly silica-based slurries with particles that have a positive (surface) charge at the pH at which polishing is performed.

[0034] For example, the method may include providing a chemical mechanical polishing apparatus having a platen or carrier assembly; providing at least one substrate to be polished; providing a chemical mechanical polishing pad disclosed herein; attaching the chemical mechanical polishing pad to the platen; optionally providing a polishing medium (e.g., an abrasive-containing slurry and / or a non-abrasive reactive liquid composition) at the interface between the polishing portion of the chemical mechanical polishing pad and the substrate; creating dynamic contact between the polishing portion of the polishing pad and the substrate, thereby removing at least some material from the substrate. The carrier assembly can provide a controllable pressure between the substrate (e.g., wafer) to be polished and the polishing pad. The polishing medium can be dispensed onto the polishing pad and drawn into the gap between the wafer and the polishing layer. The polishing medium can include water, a pH adjuster, and optionally, one or more of the following, but not limited to: abrasive particles, oxidizers, inhibitors, biocides, soluble polymers, and salts. The abrasive particles can be oxide, metal, ceramic, or other suitably hard material. Typical abrasive particles are colloidal silica, fumed silica, ceria, and alumina. The polishing pad and substrate can rotate relative to each other. As the polishing pad rotates under the substrate, the substrate sweeps out a generally annular polishing track, or polishing area, in which the wafer surface directly faces the polishing portion of the polishing pad. The wafer surface is polished and planarized by the chemical and mechanical action of the abrasive layer and polishing media on the surface. Optionally, the polishing surface of the polishing pad can be conditioned with an abrasive conditioner before polishing begins.

[0035] The use of a pad containing the rate-enhancing layered particles described herein can be particularly effective in improving removal rates while avoiding defects. For example, using a slurry with positively charged particles (e.g., a ceria-based slurry with a pH of up to 7, or up to 6.5, or up to 6), the removal rate (e.g., tetraethyl orthosilicate (TEOS) removal rate) can be improved by 10% or more, 15% or more, or 20% or more compared to polishing with an equivalent pad lacking the rate-enhancing layered particles (e.g., ZHP), while reducing defectivity by 10% or more, 30% or more, or 50% or more.

[0036] Optionally, the pad may include a window for endpoint detection. , proposed The provided chemical mechanical polishing apparatus may further include a signal source (e.g., a light source) and a signal detector (e.g., an optical sensor (preferably a multi-sensor spectrograph)). In that case, the method may further include a step of determining the polishing endpoint by passing a signal (e.g., light from the light source) through a window and analyzing the signal (e.g., light) reflected from the surface of the substrate and passing back through the endpoint detection window to enter the sensor (e.g., an optical sensor). The substrate may have a metal or metallized surface, for example, containing copper or tungsten. The substrate may be a magnetic substrate, an optical substrate, or a semiconductor substrate. [Example]

[0037] material PTMEG Polytetramethylene Ether Glycol Blend Prepolymer H with 8.95-9.25wt% NCO 12 MDI / TDI-PTMEG formulation TDI (toluene diisocyanate) brand: Voranate T-80 (trademark) manufactured by Dow H 12 MDI (alicyclic diisocyanate) MBOCA (4,4'-methylenebis(2-chloroaniline) Zirconium hydrogen phosphate powder (ZHP, plate-shaped with an average particle size of 1 to 6 microns) Expancel™ microporous particles 551DE40d42 from Nouryon (formerly Akzo Nobel)

[0038] Prepolymer synthesis The prepolymer can be synthesized in batches (e.g., 200-1000 grams). The PTMEG components are blended together to make the polyol mixture. The TDI and H 12 The polyol mixture is mixed with MDI in an 80:20 ratio. Sufficient isocyanate mixture is then added to the polyol mixture to achieve the desired NCO weight percent. The entire mixture is mixed again and then placed in a preheated oven at 65°C for 4 hours before use. All samples were used on the same day as synthesis. Alternatively, prepolymer H 12 The MDI / TDI-PTMEG blend can also be used directly to make pads.

[0039] Pad Production The synthesized prepolymer or L-325 was heated to 65°C. MBOCA was pre-weighed and melted in a 95°C oven. ZHP was added to the prepolymer to produce layered particles of various levels. The ZHP and prepolymer were mechanically mixed. Expancel™ 551DE40d42 microporous particles were then added to the prepolymer and ZHP blend. The prepolymer, ZHP, and Expancel hollow microsphere blend was thoroughly mixed and degassed using a vacuum. All samples had enough Expancel added to reach the desired final density. After degassing, MBOCA was added to the prepolymer, ZHP, and Expancel blend and thoroughly mixed. The sample was then poured onto a heated plate and drawn out using a polytetrafluoroethylene (PTFE)-coated bar at a gap setting of 175 mils. The plate was then transferred to an oven, heated to 104°C, and held at this temperature for 16 hours. The sag was then removed from the mold, trimmed, and punched out to a 22-inch (55.9 cm) diameter, which was used to prepare lamellar polishing pads. All pads were 20 inches (50.8 cm) in diameter, with a top pad thickness of 80 mils (0.2 cm), circular grooves (30 mil deep, 20 mil wide, and 120 mil pitch, or 0.76 mm deep, 0.51 mm wide, and 3 mm pitch), pressure-sensitive adhesive, Suba IV subpad, and CR-II platen adhesive. Control pads were made without the ZHP additive using a similar process. Each material set was also fabricated into plaques for property testing, both with and without Expancel filler.

[0040] Example 1 Polyurethane formulation samples were prepared according to the procedure described above with various ZHP loadings. A summary of the material properties for the three materials is shown in Table 1. While the hardness or modulus (G') remained within a usable range, the tensile strength decreased in direct proportion to the loading. The functional limit of elongation and toughness loss without undesirable effects on the polishing process was estimated to occur at loadings up to approximately 15 weight percent.

[0041] [Table 1]

[0042] Example 2 TEOS wafers were polished using a commercial CeO2-based slurry (Asahi CES333) with pads containing 10 weight percent ZHP and pads without ZHP. The slurries were prepared according to the manufacturer's instructions. The pH of the slurries was 5.5. Based on historical data, this operating pH was well below the isoelectric pH of the particles being used, ensuring that the particles carry at least some positive charge. Each pad was used to polish 200 mm TEOS wafers using a single set of process conditions. The polishing conditions used for each test were a platen speed of 93 rpm, a wafer carrier speed of 87 rpm, and a slurry flow rate of 200 ml / min. The polishing equipment used was an Applied Materials Mirra CMP polishing tool. A significant improvement in removal rate was observed, with the ZHP-10 pad having a removal rate of 1930 Å / min compared to 1604 Å / min for the pad without ZHP. A reduction in polishing defects was also observed, with an average of 62 scratch defects per wafer for the pad without ZHP compared to only 15 for the pad with 10 weight percent ZHP. These results demonstrate that the incorporation of the hydrogen phosphate layered particles of the present invention into the pad of the present invention was effective in increasing the polishing rate when polishing was performed at a pH where the particles were at least partially cationic.

[0043] Example 3 TEOS wafers were polished using three commercially available CeO2-based slurries (Hitachi H8005, Versum STI2100F, and Asahi CES333) with pads containing 10 weight percent ZHP and without ZHP. All slurries were prepared using the manufacturer's instructions. The working pH was 5.5. Based on historical data, this working pH was well below the isoelectric pH of the particles being used, so the particles should carry at least some positive charge. Each pad was used to polish 200 mm TEOS wafers using a single set of process conditions. The polishing conditions used for each test were a platen speed of 93 rpm, a wafer carrier speed of 87 rpm, and a slurry flow rate of 150 ml / min. The polishing equipment used was an Applied Materials Mirra CMP polishing tool.

[0044] For all test slurries, significant improvements in removal rates were observed with the pads of the present invention compared to the ZHP-free reference, as shown in Table 2. These results demonstrate that the incorporation of hydrogen phosphate additives into the pads of the present invention is effective in increasing removal rates when the pH criteria set forth in the present invention for multiple ceria slurry formulations are met.

[0045] [Table 2]

[0046] Additionally, for the three slurries, silicon nitride selectivity increased by an average of 12% with the ZHP-10 pad compared to the control pad without ZHP.

[0047] Example 4 TEOS wafers were polished using pads with and without 10 weight percent ZHP using a commercial CeO2-based slurry (Asahi CES333) and a commercial SiO2-based slurry (Dow K1730). The slurries were prepared according to the manufacturer's instructions. The CeO2-based slurry had a pH of 5.5 and a working solids content of 1 wt%. The SiO2 slurry had a pH of 10.5 (which is above the isoelectric pH of the slurry, meaning particles do not carry a positive charge) and a working solids content of 16 wt%. Each of the four slurry / pad combinations was polished at two different polishing rates and with various downforces ranging from 1.5 to 4 psi. Multiple TEOS wafers were polished with each of the combinations, and the coefficient of friction during polishing was measured as well as the removal rate.

[0048] Additionally, experimentally, the pressure, rate, and velocity data were used to determine Preston's coefficient k by dividing the removal rate for each sample by the product of the pressure and velocity of the test. Because the two slurries used had quite different solids contents, an additional measure of polishing efficiency can also be determined by dividing k by the percentage solids of each of the samples being polished. The polishing efficiency of the SiO2-based slurry was the same at 0.5 for both the pad with and without ZHP. The polishing efficiency of the CeO2-based slurry was 4.9 for the pad without ZHP and 6.5 for the pad with ZHP.

[0049] Coefficient of friction (COF) data, calculated from the polishing table motor torque and slurry temperature, provided additional insight into the improvements achieved by the pads of the present invention. As is evident from Table 3, the data for the CeO2-based slurries all showed significantly higher COFs than the data for the SiO2-based slurries. Furthermore, the COFs for the pads containing ZHP were significantly higher than those for the pads that did not contain ZHP. This was evidence that the concentration of CeO2 particles on the pad surface of the pads containing ZHP was higher due to the presence of metal hydrogen phosphate particles. As with the rate, no such effect was observed when using negatively charged particle slurries (e.g., negatively charged SiO2 particles).

[0050] [Table 3]

[0051] Example 5 Polishing was undertaken with a pad without ZHP and a pad with 10 wt% ZHP, using a silica-based slurry at a pH above the isoelectric potential such that the particles have a negative charge. TEOS removal rates were similar and, on average, up to 1.7 percent lower with the ZHP-containing pad compared to the pad without ZHP. SiN selectivity was two times higher with the pad without ZHP than with the pad with ZHP. The pad with ZHP also exhibited substantially higher defects (scratches and chatter).

[0052] Example 6 Polishing was undertaken with a pad without ZHP and a pad with 10 wt% ZHP and a silica-based slurry at a pH below the isoelectric potential such that the particles have a positive charge. The TEOS removal rate was 18 percent higher with the pad with ZHP than with the pad without ZHP (2278 Å / min vs. 1922 Å / min).

[0053] The present disclosure further encompasses the following aspects:

[0054] Aspect 1: A polishing pad useful in chemical mechanical polishing having a polishing portion comprising a polymer matrix and polishing rate-enhancing layered particles comprising a phosphate or arsenate of a Group III-A or Group IV-A metal.

[0055] Embodiment 2: The polishing pad of embodiment 1, wherein the rate-enhancing layered particles comprise a material having the formula M(HY04)2n(HO), where M is a Group III-A or Group IV-A metal ion, Y is P or As, preferably P, and n is 0, 1, or 2.

[0056] Aspect 3: M is Zr +4 , Ti +4 or Ce+4 3. The polishing pad of embodiment 2, wherein Y is P and n is 1.

[0057] Embodiment 4: The polishing pad of any one of the preceding embodiments, wherein the rate-enhancing layered particles have a stacked crystalline structure.

[0058] Aspect 5: The polishing pad of any one of the preceding aspects, wherein the rate-enhancing layered particles are zirconium hydrogen phosphate.

[0059] Aspect 6: The polymer matrix is ​​polyurethane, polyolefin, polyethylene, polypropylene, polyester, polyether, nylon, polyvinyl alcohol, polyvinyl acetate, polyacrylate, polycarbonate, polyacrylamide, or polyamide. , Po The polishing pad of any one of the preceding embodiments, wherein the polishing pad comprises a polyurethane, a polyethyleneimide, a polyetherketone, a polysulfone, and a fluoropolymer, a copolymer thereof, or a mixture thereof, and preferably comprises a polyurethane.

[0060] Embodiment 7: The polishing pad of any one of the preceding embodiments, wherein the amount of the rate-enhancing layered particles is at least 0.1, preferably at least 1, more preferably at least 2, even more preferably at least 3, and most preferably at least 5, to a maximum of 20, preferably at most 15, and more preferably at most 10 weight percent, based on the total weight of the polishing portion.

[0061] Embodiment 8: The polishing pad of any one of the preceding embodiments, wherein the amount of the rate-enhancing layered particles can be 0.1 to 20 volume percent, or 1 to 18 volume percent, or 2 to 15 volume percent, based on the total volume of the polishing layer.

[0062] Aspect 9: The polishing pad of any one of the preceding aspects, wherein the rate-enhancing layered particles are in the form of plates.

[0063] Embodiment 10: The polishing pad of any one of the preceding embodiments, wherein the platelets have an average dimension in a direction perpendicular (or substantially perpendicular) to the thickness of at least 0.5, preferably at least 1, more preferably at least 2 microns, and at the same time can be at most 20, preferably at most 10, more preferably at most 7, or most preferably at most 5 microns.

[0064] Embodiment 11: The polishing pad of embodiment 9 or 10, wherein the plate has an aspect ratio of 3 to 20, preferably 3 to 10.

[0065] Embodiment 12: The polishing pad of any one of the preceding embodiments, wherein the polishing portion further comprises one or more microelements.

[0066] Embodiment 13: The polishing pad of embodiment 12, wherein the microelements provide porosity in the polishing portion.

[0067] Embodiment 14: The polishing pad of embodiment 13, wherein the one or more microelements comprise hollow microelements.

[0068] Embodiment 15: The polishing pad of embodiment 14, wherein the amount (volume percent) of the one or more hollow microelements is 0 to 50, preferably 5 to 45, and more preferably 10 to 35 volume percent.

[0069] Embodiment 16: The polishing pad of embodiment 14 or 15, wherein the microelements have a diameter of at least 10 microns, but have a weight average diameter of at most 150 microns or at most 50 microns as measured by laser diffraction.

[0070] Aspect 17: The abrasive portion has a hardness of 0.4 to 1.15, preferably 0.7 to 1.0 g / cm when measured according to ASTM D1622 (2014). 3 4. The polishing pad of any of the preceding aspects, having a density of

[0071] Embodiment 18: The polishing pad of any of the preceding embodiments, wherein the polishing portion has a Shore D hardness of 28 to 75 as measured according to ASTM D2240 (2015).

[0072] Embodiment 19: The polishing pad of any of the preceding embodiments, wherein the polishing portion has an average thickness of 0.5 to 4 mm, preferably 0.7 to 3 mm, more preferably 1 to 3 mm, and even more preferably 1.3 to 2.5 mm.

[0073] Embodiment 20: The polishing pad of any of the preceding embodiments, further comprising at least one additional layer in face-to-face contact with the polishing layer.

[0074] Embodiment 21: The polishing pad of embodiment 20, wherein the at least one additional layer comprises a base layer.

[0075] Aspect 22: The polishing pad of aspect 20 or 21, wherein the base layer is adhered to the back surface of the polishing portion.

[0076] Embodiment 23. The polishing pad of any one of embodiments 20 to 22, wherein the base layer is compressible.

[0077] Embodiment 24: The polishing pad of any of the preceding embodiments, wherein the volume porosity in the polishing portion can be 0 to 50, preferably 5 to 45, and more preferably 10 to 35 percent.

[0078] Embodiment 25: The polishing pad of any of the preceding embodiments, wherein the polymer matrix comprises polyurethane.

[0079] Embodiment 26: A method comprising the steps of providing a substrate, providing a polishing pad of any one of embodiments 1 to 25, providing a slurry between the polishing pad and the substrate, and polishing the substrate using the pad and the slurry.

[0080] Embodiment 27: The method of embodiment 26, wherein the slurry comprises particles and the polishing is performed at a pH such that at least a portion of the particles have a positive charge or a positive surface charge.

[0081] Embodiment 28: The method of embodiment 26 or 27, wherein the slurry comprises cerium oxide particles.

[0082] Embodiment 29: The method of embodiment 28, wherein the slurry comprises at least 0.01, preferably at least 0.1, to at most 20, preferably at most 10, and more preferably even or at most 5 weight percent ceria particles, based on the total weight of the slurry.

[0083] Embodiment 30: The method of any one of embodiments 26-29, wherein the slurry comprises silicon oxide particles.

[0084] Embodiment 31: The method of any one of embodiments 26 to 30, wherein the polishing pad is on a platen and the pressure of the platen is between 6 and 35, preferably between 10 and 30 kilopascals (kPa).

[0085] Embodiment 32: The method of embodiment 31, wherein the platen speed is 40 to 100, preferably 50 to 90 rpm.

[0086] Embodiment 33: The method of any one of embodiments 26 to 32, wherein the pH of the slurry during polishing is 2 to 7, preferably 2.5 to 6.8.

[0087] The compositions, methods and articles can alternatively comprise, consist of, or consist essentially of any suitable material, step, or component disclosed herein. The compositions, methods and articles can additionally or alternatively be formulated to be devoid of or substantially free of any material (or species), step, or component that is not otherwise necessary to achieve the function or purpose of the compositions, methods and articles.

[0088] All ranges disclosed herein are inclusive of their endpoints, and the endpoints are independently combinable with each other (e.g., the range "up to 25 wt.%, or more specifically, 5 wt.% to 20 wt.%" includes the endpoints of the range "5 wt.% to 25 wt.%" and all intermediate values, etc.). Additionally, stated upper and lower limits can be combined to form ranges (e.g., "at least 1 or at least 2 wt.%" and "up to 10 or 5 wt.%" can be combined to form the ranges "1 to 10 wt.%," or "1 to 5 wt.%," or "2 to 10 wt.%," or "2 to 5 wt.%"). "Combinations" are inclusive of blends, mixtures, alloys, reaction products, and the like. The terms "first," "second," and the like do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The terms "a," "an," and "the" do not denote limitations of quantity and should be construed to cover both the singular and the plural unless otherwise indicated herein or clearly contradicted by context. "Or" means "and / or" unless expressly stated otherwise. References throughout this specification to "some embodiments," "an embodiment," etc. mean that the particular element described in connection with the embodiment is included in at least one embodiment described herein and may or may not be present in other embodiments. It should also be understood that the described elements may be combined in any suitable manner in various embodiments. "Combinations thereof" are open-ended and include any combination including at least one of the listed elements or properties, optionally together with similar or equivalent elements or properties that are not listed.

[0089] Unless otherwise indicated herein, all test standards are substantially the most recent standards as of the filing date of this application or, if priority is claimed, the filing date of the earliest priority application in which the test standard appears.

Claims

1. A polishing pad useful in chemical mechanical polishing having an abrasive portion comprising a polymer matrix and layered particles for enhancing removal rate, wherein the layered particles comprise a material having the formula M(HYO4)2n(H2O), where M is Zr+4, Ti+4 or Ce+4, Y is P or As, and n is 0, 1 or 2, and the layered particles have the following structure: 【Chemistry 1】 A polishing pad having an alternating crystal structure that cleaves into platelets as represented by the formula:

2. 10. The polishing pad of claim 1, wherein the layered particles are zirconium hydrogen phosphate particles.

3. A polishing pad as described in claim 1, wherein the polishing portion contains layered zirconium hydrogen phosphate particles for improving the polishing rate, the amount of the layered particles is 0.1 to 20 weight percent based on the total weight of the polishing portion, and the layered particles have an average length of 0.5 to 20 microns.

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