X-ray inspection equipment

Abstract

To provide an X-ray inspection device that can suppress a temperature change in an X-ray detection unit.SOLUTION: An X-ray inspection device 1 comprises: a conveyance unit 5 that conveys an article G; an X-ray irradiation unit 6 that irradiates the article G conveyed by the conveyance unit 5 with an X-ray; an X-ray detection unit 7 that detects the X-ray transmitting the article G; a housing 2 that has an inspection area R where an inspection of the article G is implemented by the X-ray provided inside; a cold air blower 40 that supplies cold air cooled by a heat exchange; and ventilation passages 50, 61 and 62 that are a flow passage guiding the cold air supplied from the cold air blower 40 to the X-ray irradiation unit 6 and X-ray detection unit 7 respectively.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to an X-ray inspection apparatus. [Background technology]

[0002] Known conventional X-ray inspection devices include, for example, the device described in Patent Document 1. The X-ray inspection device described in Patent Document 1 includes an air passage that directs heat generated from an X-ray irradiation unit (X-ray generator) to the outside, a base plate that forms part of the air passage and seals the X-ray irradiation unit, and cooling fins that penetrate the base plate and transfer heat generated in the X-ray irradiation unit to the air passage. The X-ray inspection device of Patent Document 1 can cool the X-ray irradiation unit. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2001-318062 Summary of the Invention [Problem to be solved by the invention]

[0004] An X-ray inspection device includes an X-ray detection unit such as a line sensor that detects X-rays emitted by an X-ray irradiation unit. Such X-ray detection units may experience problems such as increased noise due to the effects of heat, etc., which may result in reduced detection accuracy. Therefore, it is preferable to maintain the temperature of the X-ray detection unit as constant as possible. In the above-mentioned conventional X-ray inspection device, although it is possible to cool the X-ray irradiation unit, it is not possible to suppress temperature changes in the X-ray detection unit.

[0005] Therefore, an object of the present invention is to provide an X-ray inspection apparatus that can suppress temperature changes in the X-ray detection unit. [Means for solving the problem]

[0006] The X-ray inspection device according to the present invention includes an X-ray irradiation unit that irradiates X-rays, an X-ray detection unit that detects X-rays, and an air guide unit that guides air to at least a portion of the X-ray detection unit.

[0007] In an X-ray inspection device with this configuration, the X-ray detection unit can be cooled by the air guided by the air guide unit, thereby suppressing temperature changes in the X-ray detection unit.

[0008] In the X-ray inspection apparatus according to the present invention, the X-ray detection unit may be a sensor that detects X-rays in a plurality of energy bands. In the X-ray inspection apparatus having this configuration, for example, a transmission image that can be obtained by X-rays in a relatively high energy band and a transmission image that can be obtained by X-rays in a relatively low energy band can be simultaneously obtained.

[0009] In the X-ray inspection device according to the present invention, the X-ray detection unit may be integrally formed as a unit together with a control board that controls the X-ray detection unit, and the air guide unit may guide air to at least a part of the unit. In the X-ray inspection device having this configuration, even if the control board, which generates a large amount of heat, is integrally formed with the X-ray detection unit, it is possible to suppress temperature changes in the X-ray detection unit.

[0010] In the X-ray inspection device according to the present invention, the air guide unit may have an air passage which is an air flow path, and at least one of a fan which supplies air to the air passage and a fan which exhausts air from the air passage, thereby making it possible to more effectively guide air to the X-ray detection unit.

[0011] In the X-ray inspection device according to the present invention, the ventilation path and the fan may be connected via a sealing member. In the X-ray inspection device having this configuration, the ventilation path and the fan are connected airtightly, which makes it possible to more effectively guide air to the X-ray detection unit.

[0012] The X-ray inspection apparatus according to the present invention may further include a cooling fan that supplies cool air to the ventilation duct, the ventilation duct having a branching portion, and the cool air supplied by the cooling fan may be guided to the X-ray detection unit and the X-ray irradiation unit via the branching portion. In the X-ray inspection apparatus configured in this manner, cool air can be supplied to the X-ray irradiation unit. Also, the cooling fan can be used to cool the X-ray irradiation unit.

[0013] In the X-ray inspection apparatus according to the present invention, one end of the ventilation duct from which air is exhausted may open toward an air intake port of the air cooler that supplies air. In the X-ray inspection apparatus having this configuration, the X-ray detection unit can be effectively cooled between the air cooler and the ventilation duct. [Effects of the Invention]

[0014] According to the present invention, it is possible to suppress temperature changes in the X-ray detection unit. [Brief explanation of the drawings]

[0015] [Figure 1] 1 is a perspective view showing the appearance of an X-ray inspection apparatus according to an embodiment. [Figure 2] FIG. 2 is a cross-sectional side view of the X-ray inspection apparatus of FIG. [Figure 3] 2 is a perspective view of the X-ray inspection apparatus of FIG. 1 with the rear door open. FIG. [Figure 4] FIG. 2 is a perspective view showing the inside of a housing of the X-ray inspection apparatus of FIG. [Figure 5] 5 is a cross-sectional view showing a ventilation passage arranged to face the X-ray detection unit of FIG. 4. DETAILED DESCRIPTION OF THE INVENTION

[0016] A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings. In the description of the drawings, identical or corresponding elements are designated by the same reference numerals, and duplicate explanations will be omitted. For the sake of convenience, "upper," "lower," "left," "right," "front," and "rear" directions are set in Figures 1, 2, and 5, but the embodiment is not limited to these directions.

[0017] As shown in FIGS. 1 to 4, the X-ray inspection apparatus 1 includes a housing 2, support legs 3, a transport unit 5, an X-ray irradiation unit 6, an X-ray detection unit 7, a display operation unit 8, and a control unit 10. The X-ray inspection apparatus 1 generates an X-ray transmission image of the article G while transporting the article G, and performs inspections of the article G (e.g., inspection of the number of articles stored, inspection of foreign matter contamination, inspection of missing items, inspection of cracks and chips, etc.) based on the X-ray transmission image. The article G before inspection is carried into the X-ray inspection apparatus 1 by a carry-in conveyor (not shown). The article G after inspection is carried out from the X-ray inspection apparatus 1 by an unloading conveyor (not shown). The article G determined to be defective by the X-ray inspection apparatus 1 is sorted out of the production line by a sorting device (not shown) arranged downstream of the unloading conveyor. The article G determined to be non-defective by the X-ray inspection apparatus 1 passes through the sorting device as is.

[0018] The housing 2 houses a conveying unit 5, an X-ray irradiation unit 6, an X-ray detection unit 7, and a control unit 10. The housing 2 is made of stainless steel that blocks X-rays and prevents X-rays from leaking to the outside. An inspection area R where X-ray inspection of items G is carried out is provided inside the housing 2. The housing 2 is formed with an inlet 4a for transporting items G to the inspection area R and an outlet 4b for unloading items G from the inspection area R. Items G before inspection are carried into the inspection area R from the inlet conveyor through the inlet 4a. Items G after inspection are unloaded from the inspection area R to the outlet conveyor through the outlet 4b. An X-ray shielding curtain 4c that prevents X-ray leakage is provided at each of the inlet 4a and the outlet 4b.

[0019] The support legs 3 support the housing 2. The transport unit 5 transports the article G from the entrance 4a through the inspection area R to the exit 4b along the transport direction A. The transport unit 5 is, for example, a belt conveyor stretched between the entrance 4a and the exit 4b.

[0020] The X-ray irradiation unit 6 irradiates X-rays onto the object G transported by the transport unit 5. The X-ray irradiation unit 6 has an X-ray tube (not shown) that emits X-rays, a storage unit 6a in which the X-ray tube is immersed in insulating cooling oil, and a collimator 6b that is disposed below the storage unit 6a and spreads the X-rays emitted from the X-ray tube in a fan shape in a plane perpendicular to the transport direction A. Cooling fins (not shown) that extend in the vertical direction are provided on the outer peripheral surface of the storage unit 6a. A fan 6c that forms an air path from the bottom to the top of the storage unit 6a is provided on the top surface of the storage unit 6a.

[0021] The X-ray detection unit 7 has a first line sensor 11 and a second line sensor 12. The first line sensor 11 and the second line sensor 12 are each composed of X-ray detection elements arranged one-dimensionally along a horizontal direction perpendicular to the conveying direction A. The first line sensor 11 detects X-rays in the low-energy band that have passed through the article G and the conveying belt of the conveying unit 5. The second line sensor 12 detects X-rays in the high-energy band that have passed through the article G, the conveying belt of the conveying unit 5, and the first line sensor 11.

[0022] The X-ray detection unit 7 includes a first line sensor 11 and a second line sensor 12. In this embodiment, the first line sensor 11 and the second line sensor 12 are combined with a control board 14 to form an X-ray detection unit 70a. The X-ray detection unit 70a is housed in a housing 9. The housing 9 is a housing that covers the X-ray detection unit 7 from above, below, front, back, left and right. A slit is provided on the top surface of the housing 9, through which the X-rays irradiated from the X-ray irradiation unit 6 pass.

[0023] As shown in FIG. 5 , the accommodation section 9 has a first flow path (ventilation path) 61, a second flow path (ventilation path) 62, and an arrangement section 63. The first flow path 61 is disposed so as to face at least a portion 70a of the X-ray detection unit 70 and extends from one end 61a to the other end 61b. In this embodiment, the one end 61a and the other end 61b open toward the door 2a in the closed state. The first flow path 61 is formed in a U-shape in a plan view seen from the vertical direction. Like the first flow path 61, the second flow path 62 is disposed so as to face at least a portion 70a of the X-ray detection unit 70 and extends from one end 62a to the other end 62b. In this embodiment, the one end 62a and the other end 62b open toward the door 2a in the closed state. The first flow path 61 is formed in a U-shape in a plan view seen from the vertical direction. The arrangement section 63 is a portion where the X-ray detection unit 70 is disposed.

[0024] Brackets 65 supporting exhaust fans 66, 66 are provided at the other end 61b of the first flow path 61 and the other end 62b of the second flow path 62. The other end 61b of the first flow path 61 and the other end 62b of the second flow path 62 are connected to the bracket 65 via gaskets (sealing members) 67. The other end 61b of the first flow path 61 and the other end 62b of the second flow path 62 may also be connected to the bracket 65 by welding or the like. The bracket 65 is formed so that the mounting surface 65a of the exhaust fans 66, 66 is perpendicular to the obliquely upward-rear direction. That is, the other end 61b of the first flow path 61 and the other end 62b of the second flow path 62 open perpendicular to the obliquely upward-rear direction. When viewed from the exhaust fans 66, 66, the air intake port 42 of the air cooler 40 is disposed in the obliquely upward-rear direction.

[0025] As shown in Fig. 2, the display operation unit 8 is provided on the housing 2. The display operation unit 8 displays various information and accepts input of various conditions. The display operation unit 8 is, for example, a liquid crystal display, and displays an operation screen as a touch panel. In this case, the operator can input various conditions via the display operation unit 8.

[0026] As shown in FIGS. 1 and 2, the control unit 10 is disposed inside the housing 2. The control unit 10 controls the operation of each unit of the X-ray inspection apparatus 1. The control unit 10 is composed of a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), etc. The control unit 10 receives an input of a detection result of low-energy band X-rays from a first line sensor 11 (see FIG. 4) of the X-ray detection unit 7, and also receives an input of a detection result of high-energy band X-rays from a second line sensor 12 (see FIG. 4) of the X-ray detection unit 7. The control unit 10 functions as a processing unit that determines whether or not a foreign object is contained in the article G based on the detection result of the low-energy band X-rays and the detection result of the high-energy band X-rays.

[0027] 1 to 3, a cooling fan 40 is disposed on the rear surface of the X-ray inspection apparatus 1. The cooling fan 40 takes in air from inside and outside the housing 2 through an air inlet 42, exchanges heat with the taken-in air in a heat exchanger (not shown), and supplies the air cooled by the heat exchange (cold air) from the supply port 41 into the housing 2 through a duct (air passage) 50. In this embodiment, the cooling fan 40 is attached to a door 2a that enables the housing 2 to be opened and closed. A bracket 44 that supports the lower end of the cooling fan 40 is provided on the door 2a.

[0028] The duct 50 includes a first duct 51 extending in the front-rear direction when the door 2a is closed, and two branch ducts 52, 53 branching from the first duct 51 via a branch portion 54 and extending in the up-down direction. The first duct 51 has openings at one end 51a and the other end 51b, and a branch portion 54 branching into the branch ducts 52 and 53 is provided between the one end 51a and the other end 51b. The one end 51a of the first duct 51 is connected to the supply port 41. The other end 51b of the first duct 51 opens rearward when the door 2a is closed. That is, when the door 2a is closed, the other end 51b opens toward the space below the storage section 6a in which the collimator 6b is disposed.

[0029] The branch duct 52 has openings at one end 52a and the other end 52b. The one end 52a of the branch duct 52 is connected to a branching portion 54. The other end 52b of the branch duct 52 is disposed so as to face and be close to one end 61a of the first flow path 61 when the door 2a is closed (see FIG. 5). The branch duct 53 has openings at one end 53a and the other end 53b. The one end 53a of the branch duct 53 is connected to the branching portion 54. The other end 53b of the branch duct 53 is disposed so as to face and be close to one end 62a of the second flow path 62 when the door 2a is closed (see FIG. 5).

[0030] Next, the flow of cool air supplied from the cool air fan 40 will be described. In this embodiment, the air guide section that guides air to at least a part of the X-ray detection unit 7 includes the above-mentioned cool air fan 40, first flow path 61, second flow path 62, and exhaust fan 66. As shown in FIGS. 2 and 3 , the cool air supplied from the cool air fan 40 is supplied to the first duct 51 from the supply port 41 of the cool air fan 40. The cool air supplied to the first duct 51 flows into the branch ducts 52 and 53 via the branch section 54. The cool air that flows into the branch duct 52 is exhausted from the other end 52b of the branch duct 52. The cool air that flows into the branch duct 53 is exhausted from the other end 53b of the branch duct 53.

[0031] As shown in FIG. 5, when the door 2a is closed, the cool air exhausted from the other end 52b of the branch duct 52 flows into the first flow path 61 from one end 61a of the first flow path 61. The cool air that flows into the first flow path 61 flows from the rear to the front of the storage section 9, as indicated by the arrows in FIG. 5, and then flows from the front to the rear again. The cool air flowing through the first flow path 61 facing a part of the X-ray detection unit 70 absorbs heat from the X-ray detection unit 70. The air with an increased temperature (warm air) is then exhausted from the other end 61b of the first flow path 61 by the exhaust fan 66. The warm air exhausted from the exhaust fan 66 is exhausted toward the air intake port 42 of the cooler 40. Therefore, the warm air is taken in from the air intake port 42 of the cooler 40 and supplied again as cool air from the supply port 41.

[0032] The cool air exhausted from the other end 53b of the branch duct 53 flows into the second flow path 62 from one end 62a of the first flow path 61. The cool air that has flowed into the second flow path 62 flows from the rear to the front of the storage unit 9, as shown by the arrows in FIG. 5, and then flows from the front to the rear again. The cool air flowing through the second flow path 62 facing a part of the X-ray detection unit 70 absorbs heat from the X-ray detection unit 70. The air with an increased temperature (warm air) is then exhausted from the other end 62b of the second flow path 62 by the exhaust fan 66. The warm air exhausted from the exhaust fan 66 is exhausted toward the air intake port 42 of the cooler 40. Therefore, the warm air is supplied from the air intake port 42 of the cooler 40 and supplied again as cool air from the supply port 41.

[0033] As indicated by the arrows in FIG. 2, the cool air discharged from the other end 51b of the first duct 51 is discharged below the housing unit 6a toward the space where the collimator 6b is disposed. The cool air discharged toward the space where the collimator 6b is disposed is guided upward by the fan 6c. At this time, the air is guided along the cooling fins provided on the outer circumferential surface of the housing unit 6a, thereby removing heat from the cooling fins. The air whose temperature has increased is then guided by the fan 6c toward the air inlet 42 of the cooler 40. Therefore, the air is supplied from the air inlet 42 of the cooler 40 and supplied again from the supply port 41 as cool air.

[0034] 5, in the X-ray inspection apparatus 1 of the above embodiment, it is possible to cool the first line sensor 11 and the second line sensor 12 by the air guided through the first flow path 61 and the second flow path 62. This makes it possible to suppress changes in the temperatures of the first line sensor 11 and the second line sensor 12.

[0035] 5, in the X-ray inspection apparatus 1 of the above embodiment, the X-ray detection unit 70 faces the first flow path 61 (second flow path 62) extending from one end 61a (one end 62a) to the other end 61b (other end 62b), so that heat (warm air) generated in the X-ray detection unit 70 can be guided to the outside of the accommodation section 9, or cool air can be guided from the outside of the accommodation section 9 to the X-ray detection unit 70. As a result, temperature changes in the X-ray detection unit 70 can be suppressed.

[0036] In the X-ray inspection apparatus 1 of the above embodiment, the X-ray detection unit 70 is a sensor (first line sensor 11 and second line sensor 12) that detects X-rays in a plurality of energy bands. In the X-ray inspection apparatus 1 configured as described above, for example, a transmission image that can be obtained using X-rays in a relatively high energy band and a transmission image that can be obtained using X-rays in a relatively low energy band can be simultaneously obtained. This allows for improved detection accuracy of foreign matter, etc.

[0037] In the X-ray inspection apparatus 1 of the above embodiment, exhaust fans 66, 66 for discharging air are provided at the other end 61b of the first flow path 61 and the other end 62b of the second flow path 62. This makes it possible to more effectively guide heat generated in the X-ray detection unit 70 to the outside of the accommodation section 9, or to guide cool air from the outside of the accommodation section 9 to the X-ray detection unit 70.

[0038] In the X-ray inspection device 1 of the above embodiment, the other ends 61b, 62b of the first flow path 61 and the second flow path 62 are connected to the bracket 65 on which the exhaust fans 66, 66 are installed via a gasket 67, thereby improving the sealing performance of the first flow path 61 and the second flow path 62, and more effectively directing heat generated in the X-ray detection unit 70 to the outside of the storage section 9, or directing cool air from the outside of the storage section 9 to the X-ray detection unit 70.

[0039] In the X-ray inspection apparatus 1 of the above embodiment, the X-ray detection section 7 includes a control board 14 as well as the first line sensor 11 and the second line sensor 12, and is configured as an X-ray detection unit 70, and the first flow path 61 and the second flow path 62 are arranged to face at least a portion 70a, 70a of the X-ray detection unit 70. In the X-ray inspection apparatus 1 configured as above, even if the control board 14, which generates a large amount of heat, is formed integrally with the first line sensor 11 and the second line sensor 12, temperature changes in the first line sensor 11 and the second line sensor 12 can be suppressed.

[0040] The X-ray inspection apparatus 1 of the above embodiment is provided with the cool air fan 40 that supplies cool air to the first flow path 61 and the second flow path 62, and therefore, the temperature of the X-ray detection unit 70 can be prevented from rising.

[0041] In the X-ray inspection device 1 of the above embodiment, the duct 50 that supplies cool air to the X-ray detection unit 70 has a branching section 45, and the cool air is also guided to the X-ray irradiation section 6. In the X-ray inspection device 1 configured in this manner, it is possible to suppress an increase in the temperature of the X-ray irradiation section 6.

[0042] In the X-ray inspection apparatus 1 of the above embodiment, the exhaust fans 66 arranged at the other end 61b of the first flow path 61 and the other end 62b of the second flow path 62 open toward the air intake port 42 that draws air in the cool air fan 40. In the X-ray inspection apparatus 1 configured as described above, the X-ray detection unit 70 can be effectively cooled between the cool air fan 40 and the first flow path 61 and the second flow path 62.

[0043] Although one embodiment has been described above, the present invention is not limited to the above embodiment, and various modifications are possible without departing from the spirit of the invention.

[0044] In the above embodiment, the X-ray detection unit 7 was described as a so-called dual energy sensor having a first line sensor 11 and a second line sensor 12, but the X-ray detection unit 7 may also be composed of a single line sensor.

[0045] In the above embodiment and modified example, the X-ray detection section 7 is configured as an X-ray detection unit 70 integrally formed with the control board 14, but the sensors such as the first line sensor 11 and the second line sensor 12 and the control board 14 may be arranged in different positions. In this case, a configuration for cooling the sensors such as the first line sensor 11 and the second line sensor 12 is essential, but it is preferable to cool the control board 14 as well.

[0046] In the above embodiment and modified example, an example was given in which exhaust fans 66, 66 are respectively arranged at the other end 61b of the first flow path 61 and the other end 62b of the second flow path 62, but instead of or in addition to this configuration, an air supply fan may be arranged at one end 61a of the first flow path 61 and one end 62a of the second flow path 62.

[0047] In the above embodiment and modified examples, examples have been given in which exhaust fans 66, 66 provided at the other end 61b of the first flow path 61 and the other end 62b of the second flow path 62 exhaust warm air toward the air cooler 40, but the configuration may also be such that the exhaust is directed outside the housing 2.

[0048] In the above embodiment and modified examples, an example has been described in which cool air supplied from one cool air fan 40 is guided to both the X-ray irradiation unit 6 and the X-ray detection unit 70. However, a cool air fan 40 may be dedicated to the X-ray detection unit 70 without providing a branching unit 45 or the like. In this case, there is no need to provide a branching unit 45 or the like, and the cool air fan 40 may supply cool air to the X-ray detection unit 70 via a duct, or may supply cool air directly to the first flow path 61 and the second flow path 62.

[0049] In the above embodiment and modified example, the cool air fan 40 is provided on the door 2a that can open and close the inside of the housing 2, but it may be disposed inside the housing 2. Alternatively, cool air may be supplied to the first flow path 61 and the second flow path 62 from the cool air fan 40 disposed outside the housing 2 via a duct or the like.

[0050] In the above embodiment and modified example, an example has been described in which the cooling fan 40 is provided to supply cool air to the first flow path 61 and the second flow path 62 facing the X-ray detection unit 7. However, instead of the cooling fan 40, a heater or the like may be provided to supply warm air to the first flow path 61 and the second flow path 62. In this case, even when used in a low-temperature location such as outdoors, it is possible to guide cool air near the X-ray detection unit 7 to the outside, or guide warm air (heat) from the outside to the X-ray detection unit 7. As a result, temperature changes in the X-ray detection unit 7 can be suppressed.

[0051] In the above embodiment and modified examples, examples have been described in which the cooling fan 40 or heater, etc., is provided to blow cool air or warm air into the first flow path 61 and the second flow path 62, but the cooling fan 40 and heater, etc., are not necessarily provided. If the first flow path 61 and the second flow path 62 are provided so as to face a part of the X-ray detection unit 7, air will circulate by natural convection, and temperature changes in the X-ray detection unit 7 can be suppressed.

[0052] In the above embodiment and modified example, an example in which the first flow path 61 and the second flow path 62 are provided has been described, but a configuration may be adopted in which at least one of the air cooler 40 and the fan is provided without providing the first flow path 61 and the second flow path 62. Even in this case, air is guided to the first line sensor 11 and the second line sensor 12 or the X-ray detection unit 70.

[0053] In the above embodiment and modified example, an example in which the first flow path 61 and the second flow path 62 are formed as shown in FIG. 5 has been described, but the shape, arrangement, wind direction, etc. of the flow path (ventilation path) are not limited as long as they face a part of the X-ray detection unit 7. [Explanation of symbols]

[0054] 1...X-ray inspection device, 2...housing, 2a...door, 6...X-ray irradiation unit, 7...X-ray detection unit, 9...accommodation unit, 11...first line sensor, 12...second line sensor, 14...control board, 40...air cooler, 41...supply port, 42...air intake port, 50...duct (ventilation path), 51...first duct, 52, 53...branch duct, 54...branch section, 61...first flow path (ventilation path), 61a...one end of the first flow path, 61b...other end of the first flow path, 62...second flow path (ventilation path), 62a...one end of the second flow path, 62b...other end of the second flow path, 65...branch, 66...exhaust fan, 67...gasket (sealing member), 70...X-ray detection unit.

Claims

1. a conveying unit that conveys the article; an X-ray irradiation unit that irradiates X-rays onto the object conveyed by the conveying unit; an X-ray detection unit that detects the X-rays that have passed through the article; a control unit that determines whether the article is defective based on an X-ray transmission image generated based on the X-rays detected by the X-ray detection unit; a housing having an inspection area therein where the inspection of the item using the X-rays is performed; a cooler that supplies cool air cooled by heat exchange; an air passage that is a flow path that guides the cool air supplied from the cool air fan to each of the X-ray irradiation unit and the X-ray detection unit, the control unit causes a sorting device disposed downstream of an inspection area where the inspection of the object using the X-ray is performed to sort the object determined to be a defective product out of the production line; the ventilation path, which guides the cool air supplied from the cool air fan to the X-ray detection unit, is configured by a duct, and a first flow path and a second flow path which are formed in a housing section that houses the X-ray detection unit and are arranged so as to sandwich the X-ray detection unit, an opening formed at the other end of the duct is disposed opposite to and adjacent to an opening formed at one end of the first flow path and an opening formed at one end of the second flow path so as to guide the cool air supplied from the cool air fan at one end of the duct to the first flow path and the second flow path; The first flow path and the second flow path are arranged to guide the cool air guided from the duct to the X-ray detection unit.

2. The X-ray inspection apparatus according to claim 1 , wherein the ventilation path is connected to a supply port of the cooling fan.

3. 3. The X-ray inspection apparatus according to claim 1, wherein the ventilation passage branches off to guide air to the X-ray irradiation unit and the X-ray detection unit.

4. 4. The X-ray inspection apparatus according to claim 1, wherein the X-ray detection unit includes a control board that controls the X-ray detection unit.

5. 5. The X-ray inspection apparatus according to claim 4, wherein the X-ray detection unit is integrally formed as a unit together with a control board that controls the X-ray detection unit.

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