High vacuum system with magnetic shielding function

Abstract

The invention discloses a high vacuum system with a magnetic shielding function, the high vacuum system comprises a main vacuum cavity, an auxiliary vacuum cavity and a light source, the light source is fixedly installed on the auxiliary vacuum cavity, the auxiliary vacuum cavity and the main vacuum cavity are fixedly installed together, and a sample chamber blocking assembly is arranged between the auxiliary vacuum cavity and the main vacuum cavity. The magnetic shielding function and the high vacuum function are combined, the detection accuracy can be greatly improved, the main vacuum cavity and the auxiliary vacuum cavity are separately and independently arranged, vacuumizing operation can be carried out respectively, and the use convenience is greatly improved.

Description

Technical Field

[0001] This invention discloses a high vacuum system, particularly a high vacuum system with magnetic shielding function, belonging to the technical field of materials analysis equipment. Background Technology

[0002] Common materials analysis instruments include X-ray photoelectron spectroscopy, X-ray fluorescence spectrometer, and X-ray diffractometer.

[0003] X-ray photoelectron spectroscopy (XPS) uses monochromatic X-rays to irradiate a sample, exciting the inner-shell electrons of atoms on the sample surface. By detecting the kinetic energy and binding energy of the photoelectrons, the types, chemical states, and elemental contents of atoms can be analyzed. Its core is the photoelectric effect. It is mainly used for qualitative / quantitative elemental analysis and chemical state analysis (such as valence state and chemical bonds). It can detect most elements except H and He, and is usually used to detect information on the sample surface (about 1-10 nm).

[0004] X-ray fluorescence (XRF) uses high-energy X-rays to excite samples, causing inner-shell electrons to transition and outer-shell electrons to fill vacancies, releasing characteristic X-rays (i.e., fluorescent X-rays). By detecting their wavelength / energy, the type and content of elements can be determined. Its core is the fluorescence effect. It is mainly used for qualitative and quantitative analysis of elements and can detect the entire elemental range from light elements (such as B) to heavy elements. It is usually used to detect the surface or bulk phase of samples (depth of about a few micrometers to tens of micrometers).

[0005] X-ray diffraction (XRD) utilizes the wave nature of X-rays. When X-rays irradiate a crystal sample, the atomic lattice of the crystal causes coherent scattering of the X-rays. When the X-rays satisfy the Bragg equation, diffraction peaks are generated. The structure of the crystal can be analyzed by the position, intensity, and shape of the diffraction peaks. The core of XRD is X-ray diffraction. It is mainly used for crystal structure (such as crystal form and unit cell parameters), qualitative / quantitative phase analysis, grain size and stress determination, and is suitable for crystal samples.

[0006] Existing material analysis instruments typically require a high vacuum environment to operate. Due to the structural limitations of high vacuum environments, they often lack magnetic shielding capabilities. Furthermore, external magnetic environments can affect the analysis results, leading to inaccurate measurements. Summary of the Invention

[0007] To address the shortcomings of existing optical material analysis instruments that lack magnetic shielding capabilities, this invention provides a high-vacuum system and optical material analysis instrument with magnetic shielding capabilities. This system combines magnetic shielding and high-vacuum functions, significantly increasing the accuracy of detection.

[0008] The technical solution adopted by the present invention to solve its technical problem is: a high vacuum system with magnetic shielding function. The high vacuum system includes a main vacuum chamber, an auxiliary vacuum chamber and a light source. The light source is fixedly installed on the auxiliary vacuum chamber. The auxiliary vacuum chamber is fixedly installed together with the main vacuum chamber. A sample chamber sealing assembly is provided between the auxiliary vacuum chamber and the main vacuum chamber.

[0009] The technical solution adopted by the present invention to solve its technical problem further includes: The sample chamber sealing assembly includes a sample chamber sealing base, a sample chamber sealing cover, and a sample chamber sealing membrane. The sample chamber sealing base and the sample chamber sealing cover are fixedly installed together. The sample chamber sealing membrane is disposed between the sample chamber sealing base and the sample chamber sealing cover. The sample chamber sealing membrane is a thin film, typically made of polyester film. Metal mesh plates are plated on both sides of the sample chamber sealing membrane, and metal support meshes are disposed on both sides of the sample chamber sealing membrane. The metal support meshes are made of a high magnetic permeability material.

[0010] The light source includes a light tube housing, a lead tube, an upper cooling mechanism, a lower cooling mechanism, and a light-emitting mechanism. The lead tube is installed inside the light tube housing. The upper cooling mechanism and the lower cooling mechanism are respectively installed inside the lead tube. The upper cooling mechanism is located at the upper position, and the lower cooling mechanism is located at the lower position. The light-emitting mechanism is located at the bottom of the lead tube. A light tube cover is installed outside the light tube housing.

[0011] The aforementioned upper cooling mechanism includes an internal cooling water connector for the light source, a front cover for the light source, a cap, an outer flange, a cable socket, a cable socket gasket, an internal cooling water pipe for the light source, a cable connection contact point, a contact gasket, a contact spring, a spring mounting screw, a water-cooled sealing cover, and an inlet / outlet water separator. The outer flange is fixedly installed on the outer casing of the light tube, the front cover for the light source is fixedly installed on the outer flange, the cap is embedded inside the front cover for the light source, the internal cooling water connector for the light source is installed on the front cover for the light source and is connected to the internal cooling water pipe for the light source, the internal cooling water pipe for the light source is spirally arranged, the cable socket is located in the middle of the internal cooling water pipe for the light source, the cable socket is inserted into the front cover for the light source from top to bottom, a cable socket gasket is provided between the cable socket and the front cover for the light source, the cable connection contact point is located inside the cable socket at a lower position, the cable connection contact point is connected to a contact gasket, a contact spring is installed below the cable connection contact point by a spring mounting screw, the bottom of the contact spring abuts against the water-cooled sealing cover, the water-cooled sealing cover is installed on the inlet / outlet water separator, and the internal cooling water pipe for the light source is connected to the inlet / outlet water separator.

[0012] The lower cooling mechanism includes a glass shell, a water-cooled outer tube, a water-cooled inner tube, an expansion drum, a clamping ring at the small end of the expansion drum, a clamping ring at the large end of the expansion drum, a glass valve, an external valve, a main body connector, a pressure plate, a main body, a water-cooling ring, a target cap, a target, a filament shield, an internal valve, and a limiting ring for the water-cooled inner tube. The glass shell is installed inside the lead cylinder at a lower position. The glass valve is fitted onto the outside of the glass shell, and the expansion drum is fitted onto the outside of the glass valve. The clamping rings at the small and large ends of the expansion drum are fixedly installed at the upper and lower ends of the outside of the expansion drum, respectively. The water-cooled outer tube is inserted into the glass shell, and the water-cooled inner tube is located inside the water-cooled outer tube. The tops of the water-cooled outer tube and the water-cooled inner tube are respectively connected to the bottom of the inlet and outlet water separator sleeve. The water-cooled inner tube is sealed to the inlet and outlet water separator sleeve by a sealing element. The main body connector is fixedly installed at the bottom of the expansion drum, the pressure plate is installed at the bottom of the main body connector, the external valve is fixedly installed inside the main body connector, the target cap is located inside the external valve, the internal valve is located inside the target cap, and the target is located inside the target. The inner valve is located inside the target, which is positioned at the bottom of the water-cooled outer tube and the water-cooled inner tube. A water-cooled inner tube limiting ring is provided between the water-cooled inner tube and the target. The main body is installed below the main body connector. The main body is connected to two sets of electrode assemblies. A water-cooling ring is installed below the main body. An external cooling water pipe for the light source is connected to the water-cooling ring. An external cooling water connector for the light source is connected to the external cooling water pipe for the light source. A light tube cover is installed on the external cooling water pipe for the light source and the light source control line. A filament electrode fixing ring is installed inside the main body via a snap ring. A ceramic electrode is installed on the filament electrode fixing ring. A filament is installed on the ceramic electrode. A filament shield is fixedly installed inside the filament. A water-cooling head is installed inside the filament shield. The water-cooling head is fixedly installed at the bottom of the water-cooled inner tube. A beryllium plate is installed below the water-cooling head. A filament shield is fixedly installed outside the filament. A beryllium window assembly welding piece is fixedly installed at the bottom of the main body. A beryllium plate brazing piece is fixedly installed on the beryllium window assembly welding piece. A beryllium plate is fixedly installed at the bottom of the beryllium plate brazing piece.

[0013] The auxiliary vacuum chamber includes an aperture chamber, a sample chamber seat, a sample cover, a sample chamber lid, a light tube aperture disk drive assembly, an energy spectrum detector assembly, and a sample transfer assembly. The light tube aperture disk drive assembly and the energy spectrum detector assembly are respectively installed outside the auxiliary vacuum chamber shell and are positioned corresponding to the sample transfer assembly. The sample transfer assembly is installed inside the shell. The sample chamber seat is fixedly positioned above the sample cover. The aperture chamber is fixedly installed on the sample chamber seat and has an aperture chamber sealing ring embedded in it. The light source is fixedly installed on the aperture chamber sealing ring. The main vacuum chamber is fixedly installed together with the aperture chamber. The aperture chamber is provided with a sample chamber vacuum interface.

[0014] The aforementioned optical tube aperture disk drive assembly includes an optical tube aperture stepper motor, an optical tube aperture motor mount, a synchronous pulley, a synchronous belt, a crystal disk dial wheel, an optical tube aperture drive shaft, an optical tube aperture drive base, and a vacuum aviation socket. The optical tube aperture drive base is fixedly installed on the aperture chamber, the optical tube aperture motor mount is fixedly installed on the optical tube aperture drive base, the optical tube aperture stepper motor is fixedly installed on the optical tube aperture motor mount, the synchronous pulley is fixedly installed on the motor shaft of the optical tube aperture stepper motor, the optical tube aperture drive shaft is inserted into the optical tube aperture drive base, the crystal disk dial wheel is fixedly installed together with the optical tube aperture drive shaft, the synchronous belt is hooked between the crystal disk dial wheel and the synchronous pulley, and the optical tube aperture tensioner mount is fixedly installed on the optical tube aperture drive base.

[0015] The energy spectrum detector assembly includes an X-ray detector, an ED detector mount, an ED detector ring, a first lip seal, a second lip seal, and a detector head cover. The ED detector mount is fixedly installed on the aperture chamber. The X-ray detector head is inserted into the ED detector mount. The ED detector ring is fitted onto the X-ray detector head and is fixedly installed on the ED detector mount. The first lip seal and the second lip seal are provided between the ED detector ring and the ED detector mount. The detector head cover is fitted onto the front end of the X-ray detector head.

[0016] The sample transfer assembly includes a light tube aperture section and a sample switcher section, which are correspondingly arranged. The light tube aperture section includes a light tube aperture base, a light tube aperture limiter, a light tube aperture plate, a first magnet, a second magnet, a third magnet, a light tube aperture drive gear, a light tube aperture driven gear, a light tube aperture positioning seat, a light tube aperture limit spring plate, a light tube aperture limit bearing shaft, a light tube aperture limit bearing, and a sample tray photoelectric switch. The bottom of the light tube aperture drive shaft is fixedly installed with the light tube aperture drive gear, and the light tube aperture driven gear is fixedly installed with the light tube aperture base. The light tube aperture drive gear and the light tube aperture driven gear mesh with each other. The light tube aperture base has one or more passages arranged in a ring shape. A light tube aperture plate is fixedly installed at the through hole. A light tube aperture limiter is fixedly installed below the light tube aperture base. The light tube aperture limiter has notches with the same number of notches as the through holes on the light tube aperture base. A light tube aperture positioning seat is fixedly installed on the sample chamber seat. One end of the light tube aperture limiting spring plate is fixedly installed together with the light tube aperture positioning seat. A light tube aperture limiting bearing shaft is fixedly installed on the other end of the light tube aperture limiting spring plate. A light tube aperture limiting bearing is installed on the light tube aperture limiting bearing shaft. The light tube aperture limiting bearing is set corresponding to the light tube aperture limiter. A flange protrudes upward on the light tube aperture base. A notch is opened on the flange. A sample plate photoelectric switch is fixedly installed on the aperture chamber. The sample plate photoelectric switch is set corresponding to the flange. The sample switcher includes a sample chamber cover shielding liner, an upper shielding plate inside the sample chamber, a sample tray, a sample tray base, a sample cup drive gear, a sample tray shaft cover, a sample tray drive shaft, a sample tray shaft, an upper baffle plate, a lower baffle plate, an upper synchronous pulley, a lower synchronous pulley, an upper sample cover, an electromagnet, a sample position sealing cover, a sample position shielding plate, a sample tray assembly, and a key. The sample tray has one or more sample mounting positions arranged in a ring. Each sample mounting position houses a sample tray assembly. A sample tray shaft is fixedly inserted in the center of the sample tray, and a sample tray drive shaft is inserted within the sample tray shaft. A sample tray shaft cover is fixedly installed on the top of the sample tray drive shaft. The sample cup drive gear is fixedly installed together with the sample tray drive shaft. A sample tray base is installed on top of the sample cup drive gear. Each sample tray assembly meshes with the sample cup drive gear. An upper synchronous pulley is fitted at the bottom of the sample tray shaft, and a sample tray is positioned above the upper synchronous pulley. The sample tray has an upper baffle plate, and a sample tray lower timing pulley is fitted at the bottom of the sample tray drive shaft. Below the sample tray lower timing pulley is a sample tray lower baffle plate. Both the sample tray upper timing pulley and the sample tray lower timing pulley are located outside the auxiliary vacuum chamber. An external drive device drives the sample tray upper timing pulley and the sample tray lower timing pulley to rotate, thereby driving the sample tray and sample tray assembly to rotate. Below the sample tray is an upper shielding plate inside the sample chamber. Below the upper shielding plate inside the sample chamber is a semi-circular sample chamber cover shielding liner. Both the upper shielding plate inside the sample chamber and the sample chamber cover shielding liner are assembled inside the auxiliary vacuum chamber. The upper shielding plate inside the sample chamber has two through holes. Below one through hole is a sample position sealing cover. Below the sample position sealing cover is a sample position shielding plate. Below the other through hole is a sample upper cover. Below the sample upper cover is an electromagnet. The sample upper cover, electromagnet, sample position sealing cover, and sample position shielding plate are all located outside the auxiliary vacuum chamber. The sample switcher also includes a sample chamber cover drive module, which includes a sample chamber cover stepper motor, a sample cover drive base, a sample cover baffle disc, a sample cover bushing, a sample cover support, a sample cover bearing, and a sample cover photoelectric switch. The sample cover drive base is fixedly mounted on the sample chamber cover, the sample chamber cover stepper motor is fixedly mounted on the sample cover drive base, the sample cover bushing is fixedly mounted on the motor shaft of the sample chamber cover stepper motor, the sample cover baffle disc is mounted on the sample cover bushing, a notch is provided on the outer edge of the sample cover baffle disc, the sample cover photoelectric switch is fixedly mounted on the sample cover drive base, the sample cover photoelectric switch is set corresponding to the outer edge of the sample cover baffle disc, the sample cover bearing is installed between the sample cover bushing and the sample cover drive base, the sample cover support is fixedly mounted below the sample cover bushing, and the sample cover cap and electromagnet are respectively fixedly mounted on the sample cover support.

[0017] The sample tray assembly includes a sample cup driven gear, a sample holder, a sample inner mold, a sample cup, a sample cup lid, a sample cup cap, an upper sample cup magnet, a lower sample cup magnet, and a sample cup shaft. The sample inner mold is disposed inside the sample cup, the sample holder is fitted onto the outside of the sample cup, the sample cup driven gear is fixedly installed on the outside of the sample holder, and the sample cup driven gear meshes with the sample cup drive gear. The sample cup lid and the sample cup cap are respectively disposed inside the sample cup, with the sample cup cap positioned above the sample cup lid. The upper sample cup magnet is embedded in the sample cup cap, the lower sample cup magnet is embedded in the sample cup lid, and the sample cup shaft is fixedly installed together with the sample cup cap and the sample cup lid.

[0018] The beneficial effects of this invention are: this invention combines magnetic shielding and high vacuum functions, which can greatly increase the accuracy of detection, and the main vacuum chamber and auxiliary vacuum chamber are set separately and independently, which can be vacuumed separately, greatly increasing the convenience of use.

[0019] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0021] Figure 2 This is a schematic diagram of the decomposed state structure of the present invention.

[0022] Figure 3 This is a schematic diagram of the second perspective three-dimensional structure of the present invention.

[0023] Figure 4 This is a schematic diagram of the decomposed state structure from a second perspective of the present invention.

[0024] Figure 5 This is a schematic diagram of the partial disassembled structure of the auxiliary vacuum cavity in this invention.

[0025] Figure 6 This is a schematic diagram of the partial decomposed state structure of the energy spectrum detector component in this invention.

[0026] Figure 7 This is a schematic diagram of the exploded state structure of the auxiliary vacuum outdoor drive module in this invention.

[0027] Figure 8 This is a schematic diagram of the partial disassembled structure of the auxiliary vacuum chamber in this invention.

[0028] Figure 9 This is a schematic diagram of the exploded state structure of the sealing part in this invention.

[0029] Figure 10 This is a schematic diagram of the exploded structure of the optical tube aperture in this invention.

[0030] Figure 11 This is a schematic diagram of the disassembled state structure of the sample switcher in this invention.

[0031] Figure 12 This is a partial exploded view of the sample disk assembly in this invention.

[0032] Figure 13 This is a schematic diagram of the exploded state structure of the sample chamber cover drive module in this invention.

[0033] Figure 14 This is a schematic diagram of the decomposed state structure of the light source part in this invention.

[0034] Figure 15 This is a schematic diagram of the exploded structure of the light source housing in this invention.

[0035] Figure 16 This is a schematic diagram of the second-view exploded structure of the light source housing in this invention.

[0036] Figure 17 This is a schematic diagram of the exploded state structure of the light source cooling section in this invention.

[0037] Figure 18 This is a schematic diagram of the exploded structure of the main body of the light source in this invention.

[0038] Figure 19 This is a schematic diagram of the disassembled structure of the filament portion of the light source in this invention.

[0039] In the diagram, 1-Main vacuum chamber, 101-Controller, 102-Main vacuum chamber vacuum interface, 103-Main vacuum chamber air duct opening, 104-Lead glass, 2-Auxiliary vacuum chamber, 201-X-ray detector, 202-ED detector mount, 203-ED detector ring, 204-First lip seal, 205-Second lip seal, 206-Detector head cover, 207-Aperture chamber, 208-Aperture chamber sealing ring, 209-Sample chamber vacuum interface, 210-Sample chamber mount, 211-Sample cover, 212-Sample chamber cover, 213-Sample chamber cover stepper motor, 214-Sample top cover drive seat, 215-Sample cover baffle plate, 216-Sample top cover bushing, 217-Sample top cover support, 218-Sample top cover bearing. 219-Sample cover photoelectric switch; 220-First cleaning channel sealing cover; 221-Second cleaning channel sealing cover; 222-Optical tube aperture stepper motor; 223-Optical tube aperture motor mount; 224-Synchronous belt pulley; 225-Synchronous belt; 226-Crystal disk dial wheel; 227-Optical tube aperture drive shaft; 228-Optical tube aperture drive mount; 229-Vacuum aviation socket; 230-Optical tube aperture tensioner mount; 231-Tensioner frame; 232-Synchronous tensioner; 233-Collimation aperture limit spring; 234-Optical tube aperture chassis; 235-Optical tube aperture limiter; 236-Optical tube aperture plate; 237-First magnet; 238-Second magnet; 239-Third magnet; 240-Optical tube aperture drive gear; 241-Optical... 242-Optical tube aperture driven gear, 243-Optical tube aperture positioning seat, 244-Optical tube aperture limiting spring plate, 245-Optical tube aperture limiting bearing shaft, 246-Sample chamber cover shielding liner, 247-Sample chamber upper shielding plate, 248-Sample tray, 249-Sample tray photoelectric switch, 250-Sample tray base, 251-Sample cup drive gear, 252-Sample tray shaft cover, 253-Sample tray drive shaft, 254-Sample tray shaft, 255-Sample tray upper baffle plate, 256-Sample tray lower baffle plate, 257-Sample tray upper synchronous pulley, 258-Sample tray lower synchronous pulley, 259-Sample upper sealing cover, 260-Electromagnet, 261-Sample position sealing cover, 262-Sample position shielding plate, 26 3-Sample tray assembly, 2631-Sample cup driven gear, 2632-Sample holder, 2633-Sample inner mold, 2634-Sample cup, 2635-Sample cup lid, 2636-Sample cup cap, 2637-Sample cup upper magnet, 2638-Sample cup lower magnet, 2639-Sample cup shaft, 26310-Sample, 264-Key, 265-Cleaning channel cover, 266-Sample chamber sealing assembly, 2661-Sample chamber sealing seat, 2662-Sample chamber sealing cover, 2663-Sample chamber sealing film, 2664-Sample chamber first sealing mesh plate, 2665-Sample chamber second sealing mesh plate, 2666-Sample chamber first sealing support, 2667-Sample chamber second sealing support, 3-Light source, 301-Light tube cover302 - Optical tube housing; 303 - Lead cylinder; 304 - Optical tube cover; 305 - External cooling water pipe for light source; 306 - External cooling water connector for light source; 307 - Light source control line; 308 - Welded parts for cover; 309 - Internal cooling water connector for light source; 310 - Front cover for light source; 311 - Sheath; 312 - Housing flange; 313 - Optical tube base; 314 - Cable socket; 315 - Cable socket gasket; 316 - Internal cooling water pipe for light source; 317 - Cable connection contact point; 318 - Contact connection gasket; 319 - Contact sealing ring; 320 - Contact spring; 321 - Spring mounting screw; 322 - Water-cooled sealing cover; 323 - Inlet / outlet water separator sleeve; 324 - Glass shell; 325 - Water-cooled outer tube; 326 - Water-cooled inner tube. 327-Expansion drum, 328-Expansion drum small end clamping ring, 329-Expansion drum large end clamping ring, 330-Glass valve, 331-External valve, 332-Main body connector, 333-Pressure plate, 334-Main body, 335-Water cooling ring, 336-Target cap, 337-Target, 338-Filament shield, 339-Internal valve, 340-Water cooling inner tube limiting ring, 341-First motor valve, 342-Second electrode valve, 343-Electrode ceramic, 344-Conductive post, 345-Filament electrode fixing ring, 346-Water cooling head, 347-Ceramic electrode, 348-Filament, 349-Filament shielding ring, 350-Beryllium window assembly welding part, 351-Beryllium sheet brazing part, 352-Beryllium sheet, 353-Beryllium sheet. Detailed Implementation

[0040] This embodiment is a preferred embodiment of the present invention. All other embodiments that are the same as or similar to this embodiment in principle and basic structure are within the protection scope of the present invention.

[0041] Please refer to the appendix for details. Figure 1 To be continued Figure 19 This invention protects a high vacuum system with magnetic shielding function. The system mainly includes a main vacuum chamber 1, an auxiliary vacuum chamber 2, and a light source 3. The light source 3 is fixedly installed on the auxiliary vacuum chamber 2. The auxiliary vacuum chamber 2 is fixedly installed together with the main vacuum chamber 1. A sample chamber sealing assembly 266 is provided between the auxiliary vacuum chamber 2 and the main vacuum chamber 1. On the one hand, the sample chamber sealing assembly 266 can play a magnetic shielding role between the main vacuum chamber 1 and the auxiliary vacuum chamber 2. On the other hand, the sample chamber sealing assembly 266 can also separate the main vacuum chamber 1 and the auxiliary vacuum chamber 2, so that the two can be pumped and pumped independently.

[0042] Please refer to the appendix carefully. Figure 9In this embodiment, the sample chamber sealing assembly 266 mainly includes a sample chamber sealing seat 2661, a sample chamber sealing cover 2662, and a sample chamber sealing film 2663. The sample chamber sealing seat 2661 and the sample chamber sealing cover 2662 are fixedly installed together. The sample chamber sealing film 2663 is disposed between the sample chamber sealing seat 2661 and the sample chamber sealing cover 2662. The sample chamber sealing film 2663 is a thin film, typically a polyester film. Metal mesh plates are plated on both sides of the sample chamber sealing film 2663, which are defined as the first sealing mesh plates 2 of the sample chamber. The first and second sample chamber baffles 2664 and 2665 are typically made of aluminum. Metal support meshes are provided on both sides of the sample chamber baffle 2663 to provide support and prevent damage during use. These metal support meshes are defined as the first sample chamber baffle support 2666 and the second sample chamber baffle support 2667, respectively. Both the first and second sample chamber baffle supports 2666 and 2667 are made of high-permeability materials, typically permalloy, to provide magnetic shielding.

[0043] In this embodiment, the main vacuum chamber 1 can house detection equipment. The structure and installation structure of the detection equipment within the main vacuum chamber 1 can employ conventional structures such as photoelectron spectroscopy (XPS), X-ray fluorescence spectrometer (XRF), and X-ray diffractometer (XRD), which are not innovative aspects of this invention and will not be elaborated upon here. A controller 101 is fixedly installed on the main vacuum chamber 1. The controller 101 can control the movement, detection, and signal processing of the detection equipment within the main vacuum chamber 1, or connect devices such as a goniometer to the controller 101. A main vacuum chamber vacuum interface 102 is connected to the main vacuum chamber 1, which can be used to connect vacuum pumping equipment to perform vacuuming operations within the main vacuum chamber 1. A main vacuum chamber air duct 103 is connected to the main vacuum chamber 1, which can be used to adjust the vacuum level. In some scenarios, a small amount of air can be introduced to precisely adjust the vacuum level within the chamber, adapting to different detection requirements. A lead glass 104 is installed on the main vacuum chamber 1, allowing observation of the working conditions within the main vacuum chamber 1 through the lead glass 104. In this embodiment, the main vacuum chamber 1 is made of a metal material, typically stainless steel, preferably S136 stainless steel.

[0044] In this embodiment, the light source 3 is an X-ray tube, and the window of the light source 3 is set facing the interior of the auxiliary vacuum chamber 2. The X-rays emitted by the light source 3 irradiate the sample inside the auxiliary vacuum chamber 2, and the irradiated area is the detection surface. The light source 3 mainly includes a tube housing 302, a lead cylinder 303, an upper cooling mechanism, a lower cooling mechanism, and a light-emitting mechanism. The lead cylinder 303 is also set on the tube housing 302. The upper cooling mechanism and the lower cooling mechanism are respectively set inside the lead cylinder 303. The upper cooling mechanism is set at the upper position, the lower cooling mechanism is set at the lower position, and the light-emitting mechanism is set at the bottom of the lead cylinder 303.

[0045] In this embodiment, the outer shell 302 of the light tube serves as a support, and the lead tube 303 is placed inside the outer shell 302 of the light tube to prevent X-rays from escaping and causing harm to the user. The outer shell 302 of the light tube is provided with a light tube cover 301, which is made of lead-containing paint (LPB) and can further absorb the scattered X-rays.

[0046] In this embodiment, the upper cooling mechanism mainly includes an internal cooling water connector 309 for the light source, a front cover 310 for the light source, a cap 311, a housing flange 312, a cable holder 314, a cable holder sealing gasket 315, an internal cooling water pipe 316 for the light source, a cable connection contact point 317, a contact connection gasket 318, a contact sealing ring 319, a contact spring 320, a spring mounting screw 321, a water-cooled sealing cover 322, and an inlet / outlet water separator sleeve 323. The housing flange 312 is fixedly installed on the light tube housing 302, the front cover 310 for the light source is fixedly installed on the housing flange 312, the cap 311 is embedded inside the front cover 310, the internal cooling water connector 309 for the light source is installed on the front cover 310 and is connected to the internal cooling water pipe 316 for the input and output of cooling water. The cable is arranged in a spiral shape. The cable holder 314 is located in the middle of the cooling water pipe 316 inside the light source. The cable holder 314 is inserted into the front cover 310 of the light source from top to bottom. A cable holder sealing gasket 315 is provided between the cable holder 314 and the front cover 310 of the light source. The cable connection contact point 317 is located in the lower part of the inside of the cable holder 314. The cable connection contact point 317 is connected to three contact connection pads 318. A contact sealing ring 319 is provided between the contact connection pads 318 and the cable connection contact point 317. A contact spring 320 is installed below the cable connection contact point 317 by a spring mounting screw 321. The bottom of the contact spring 320 abuts against the water-cooled sealing cover 322. The water-cooled sealing cover 322 is installed on the inlet and outlet water separator sleeve 323. The cooling water pipe 316 inside the light source is connected to the inlet and outlet water separator sleeve 323.

[0047] In this embodiment, the lower cooling mechanism includes a glass shell 324, a water-cooled outer tube 325, a water-cooled inner tube 326, an expansion drum 327, a clamping ring 328 at the small end of the expansion drum, a clamping ring 329 at the large end of the expansion drum, a glass valve 330, an external valve 331, a main body connector 332, a pressure plate 333, a main body 334, a water-cooled ring 335, a target cap 336, a target 337, a filament shield 338, an internal valve 339, and a water-cooled inner tube limiting ring 340. The glass shell 324 is installed inside the lead cylinder 303 at a lower position, and the glass valve 330 is fitted inside the glass shell 324. 4. On the outside, the expansion drum 327 is fitted onto the outside of the glass valve 330. The small end clamping ring 328 and the large end clamping ring 329 of the expansion drum are respectively fixedly installed at the upper and lower ends of the outside of the expansion drum 327. The water-cooled outer tube 325 is inserted into the glass shell 324, and the water-cooled inner tube 326 is set inside the water-cooled outer tube 325. The tops of the water-cooled outer tube 325 and the water-cooled inner tube 326 are respectively connected to the bottom of the inlet and outlet water separator sleeve 323. The water-cooled inner tube 326 and the inlet and outlet water separator sleeve 323 are sealed by a sealing element, thereby, the water-cooled outer tube 325 and the water-cooled inner tube... A cooling water channel is formed between 326. The main connector 332 is fixedly installed at the bottom of the expansion drum 327. The pressure plate 333 is installed at the bottom of the main connector 332. The external valve 331 is fixedly installed inside the main connector 332. The target cap 336 is located inside the external valve 331. The internal valve 339 is located inside the target cap 336. The target 337 is located inside the internal valve 339, and the target 337 is positioned corresponding to the bottom of the water-cooled outer tube 325 and the water-cooled inner tube 326. A water-cooled inner tube limiting ring 340 is provided between the water-cooled inner tube 326 and the target 337, thereby... The cooling water between the water-cooled outer tube 325 and the water-cooled inner tube 326 can dissipate heat from the target 337. The main body 334 is installed below the main body connector 332. The main body 334 is connected to two sets of electrode assemblies, which are respectively connected to the light source control line 307 for power supply. Each set of electrode assemblies includes a first electrode valve 341, a second electrode valve 342, an electrode ceramic 343, and a conductive post 344. The first electrode valve 341 and the second electrode valve 342 are respectively installed at both ends of the electrode ceramic 343, and the conductive post 344 is located inside. A water-cooling ring 335 is installed below the main body 334. An external cooling water pipe 305 for the light source is connected to the water-cooling ring 335. An external cooling water connector 306 for the light source is connected to the external cooling water pipe for cooling the main body 334. An exhaust pipe is connected to the main body 334 for exhausting waste gas. The external cooling water pipe 305 and the light source control line 307 are covered by a light tube cover 304. The light tube cover 304 is fixedly installed to the light tube housing 302 by a cover welding part 308, which protects the external cooling water pipe 305 and the light source control line 307. A light tube base 313 is fitted on the outside of the light tube cover 304 and the light tube housing 302 to make the installation more secure.

[0048] In this embodiment, a filament electrode fixing ring 345 is installed inside the main body 334 via a retaining ring. A ceramic electrode 347 is installed on the filament electrode fixing ring 345, and a filament 348 is installed on the ceramic electrode 347. A filament shield 338 is fixedly disposed inside the filament 348, and a water cooling head 346 is disposed inside the filament shield 338. The water cooling head 346 is fixedly installed at the bottom of the water cooling inner tube 326. A beryllium plate 352 is disposed below the water cooling head 346. A filament shield ring 349 is fixedly disposed outside the filament 348. A beryllium window assembly welding component 350 is fixedly installed at the bottom of the main body 334. A beryllium plate brazing component 351 is fixedly installed on the beryllium window assembly welding component 350. A beryllium plate 353 is fixedly installed at the bottom of the beryllium plate brazing component 351. X-rays emitted by the target 337 are excited and pass through the beryllium plate 353 into the auxiliary vacuum chamber 2 to detect the sample.

[0049] In this embodiment, the outer shell of the auxiliary vacuum chamber 2 is made of metal material, typically stainless steel, preferably S136 stainless steel.

[0050] In this embodiment, the auxiliary vacuum cavity 2 mainly includes a shell, a light tube aperture disk driving assembly, an energy spectrum detector assembly, and a sample transfer assembly. The light tube aperture disk driving assembly and the energy spectrum detector assembly are respectively installed outside the shell of the auxiliary vacuum cavity 2 and are set corresponding to the sample transfer assembly, which is installed inside the shell.

[0051] In this embodiment, the outer shell of the auxiliary vacuum chamber 2 mainly includes an aperture chamber 207, a sample chamber seat 210, a sample cover 211, and a sample chamber cover 212. The sample chamber seat 210 is fixedly disposed above the sample cover 211. The aperture chamber 207 is fixedly mounted on the sample chamber seat 210. An aperture chamber sealing ring 208 is embedded in the aperture chamber 207. The light source 3 is fixedly mounted on the aperture chamber sealing ring 208. The main vacuum chamber 1 is fixedly mounted together with the aperture chamber 207. A sample chamber vacuum interface 209 is provided on the aperture chamber 207, through which the vacuum operation of the auxiliary vacuum chamber 2 can be performed. The optical tube aperture disk drive assembly and the energy spectrum detector assembly are respectively mounted on the aperture chamber 207.

[0052] In this embodiment, the optical tube aperture disk drive assembly mainly includes an optical tube aperture stepper motor 222, an optical tube aperture motor mount 223, a synchronous pulley 224, a synchronous belt 225, a crystal disk dial 226, an optical tube aperture drive shaft 227, an optical tube aperture drive seat 228, a vacuum aviation socket 229, an optical tube aperture tension wheel seat 230, a tension wheel frame 231, a synchronous tension wheel 232, and a collimation aperture limiting spring plate 233. The optical tube aperture drive seat 228 (using screws, or other conventional means in specific implementations) is fixedly installed on the aperture chamber 207, the optical tube aperture motor mount 223 is fixedly installed on the optical tube aperture drive seat 228, the optical tube aperture stepper motor 222 is fixedly installed on the optical tube aperture motor mount 223, and the synchronous pulley 224 is fixedly installed on the motor shaft of the optical tube aperture stepper motor 222. The optical tube aperture stepper motor 222 drives the synchronous pulley 224 to rotate. The optical tube aperture drive shaft 227 is inserted into the optical tube aperture drive seat 228. The crystal disk dial wheel 226 is fixedly installed together with the optical tube aperture drive shaft 227. The synchronous belt 225 is hooked between the crystal disk dial wheel 226 and the synchronous pulley 224. The optical tube aperture tension wheel seat 230 is fixedly installed on the optical tube aperture drive seat 228. One end of the collimation aperture limiting spring plate 233 is fixedly installed together with the optical tube aperture tension wheel seat 230. A tension wheel frame 231 is fixedly installed on one end of the collimation aperture limiting spring plate 233. A synchronous tension wheel 232 is installed on the tension wheel frame 231. The synchronous tension wheel 232 is attached to the synchronous pulley 224. The synchronous tension wheel 232 can squeeze the synchronous pulley 224 to make it tensioned. In this embodiment, the vacuum aviation socket 229 is fixedly mounted on the optical tube aperture driver seat 228.

[0053] In this embodiment, the energy spectrum detector assembly mainly includes an X-ray detector 201, an ED detector mount 202, an ED detector ring 203, a first lip seal 204, a second lip seal 205, a detector head cover 206, a first clean passage sealing cover 220, and a second clean passage sealing cover 221. Two mounting holes are provided on the aperture chamber 207, and a clean passage sealing cover, namely the first clean passage sealing cover 220 and the second clean passage sealing cover 221, is installed at each of the two mounting holes. When using a particular mounting hole, the clean passage sealing cover at that mounting hole is opened, and the ED detector mount 202 is fixedly installed at that mounting hole. The detector head of the X-ray detector 201 is inserted into the ED detector holder 202. An ED detector ring 203 is fitted on the detector head of the X-ray detector 201. The ED detector ring 203 is fixedly installed on the ED detector holder 202, thereby fixing the X-ray detector 201 on the ED detector holder 202 through the ED detector ring 203. A first lip seal 204 and a second lip seal 205 are provided between the ED detector ring 203 and the ED detector holder 202 to achieve a seal between the ED detector ring 203 and the ED detector holder 202. A detector head cover 206 is fitted on the front end of the detector head of the X-ray detector 201.

[0054] In this embodiment, the sample transfer assembly includes a light tube aperture section and a sample switcher section, which are respectively configured to be the same.

[0055] In this embodiment, the light tube aperture section mainly includes a light tube aperture chassis 234, a light tube aperture limiter 235, a light tube aperture plate 236, a first magnet 237, a second magnet 238, a third magnet 239, a light tube aperture drive gear 240, a light tube aperture driven gear 241, a light tube aperture positioning seat 242, a light tube aperture limit spring plate 243, a light tube aperture limit bearing shaft 244, a light tube aperture limit bearing 245, and a sample tray photoelectric switch 249. The light tube aperture drive shaft 227 is located at the bottom. The light tube aperture drive gear 240 is fixedly installed together with the light tube aperture driven gear 241, and the light tube aperture base 234 is fixedly installed together with the light tube aperture chassis 234. The light tube aperture drive gear 240 and the light tube aperture driven gear 241 mesh with each other. The light tube aperture base 234 can be driven to rotate by an external light tube aperture disk drive assembly. The light tube aperture base 234 has one or more through holes in an annular shape. The light tube aperture plate 236 is fixedly installed at the through holes. The light tube is fixedly installed below the light tube aperture base 234. Aperture limiter 235, with the same number of notches as the through holes on the aperture base 234, is fixedly mounted on the sample chamber seat 210. One end of the aperture limiter spring 243 is fixedly mounted to the aperture positioner 242, and the other end of the aperture limiter bearing shaft 244 is fixedly mounted on the aperture limiter bearing shaft 244. A aperture limiter bearing 245 is mounted on the aperture limiter bearing shaft 244. The aperture limit bearing 245 is configured corresponding to the aperture limiter 235 of the light tube, and can limit the rotation of the aperture base 234. In this embodiment, a flange protrudes upward from the aperture base 234, and a notch is provided on the flange. A sample plate photoelectric switch 249 is fixedly installed on the aperture chamber 207. The sample plate photoelectric switch 249 is configured corresponding to the flange, and can detect the notch on the flange to determine whether the aperture base 234 has rotated to the correct position. The first magnet 237 is fixedly installed at the center of the bottom of the aperture base 234 by screws, and the second magnet 238 and the third magnet 239 are fixedly installed on the aperture chamber 207 by screws.

[0056] In this embodiment, the sample switcher mainly includes a sample chamber cover shielding liner 246, an upper shielding plate 247 inside the sample chamber, a sample tray 248, a sample tray base 250, a sample cup drive gear 251, a sample tray shaft cover 252, a sample tray drive shaft 253, a sample tray shaft 254, an upper baffle plate 255, a lower baffle plate 256, an upper synchronous pulley 257, a lower synchronous pulley 258, an upper sample cover 259, an electromagnet 260, a sample position sealing cover 261, a sample position shielding plate 262, a sample tray assembly 263, and a key 264. The sample tray 248 has one or more sample holders arranged in a ring shape. In this embodiment, five sample mounting positions are used. Each sample mounting position contains a sample tray assembly 263. A sample tray shaft 254 is fixedly inserted into the center of the sample tray 248. A sample tray drive shaft 253 is inserted into the sample tray shaft 254. A sample tray shaft cover 252 is fixedly installed on the top of the sample tray drive shaft 253. A sample cup drive gear 251 is fixedly installed together with the sample tray drive shaft 253. A sample tray seat 250 is installed on the top of the sample cup drive gear 251. Each sample tray assembly 263 meshes with the sample cup drive gear 251. A synchronous pulley 257 for the sample tray is fitted at the bottom of the sample tray shaft 254. A sample tray upper baffle plate 255 is mounted above the stepper pulley 257. A sample tray lower synchronous pulley 258 is fitted at the bottom of the sample tray drive shaft 253. A sample tray lower baffle plate 256 is mounted below the sample tray lower synchronous pulley 258. Both the sample tray upper synchronous pulley 257 and the sample tray lower synchronous pulley 258 are located outside the auxiliary vacuum chamber 2. An external drive device drives the sample tray upper synchronous pulley 257 and the sample tray lower synchronous pulley 258 to rotate, thereby driving the sample tray 248 and the sample tray assembly 263 to rotate. An upper shielding plate 247 is mounted below the sample tray 248, which can shield a designated area. A semi-circular sample chamber cover shielding liner 246 is provided below 247. The upper shielding plate 247 and the sample chamber cover shielding liner 246 are both assembled inside the auxiliary vacuum chamber 2. The upper shielding plate 247 inside the sample chamber has two through holes. A sample position sealing cover 261 is provided below one of the through holes. A sample position shielding plate 262 is installed below the sample position sealing cover 261. A sample upper cover 259 is provided below the other through hole. An electromagnet 260 is fixedly installed below the sample upper cover 259. The sample upper cover 259, electromagnet 260, sample position sealing cover 261 and sample position shielding plate 262 are all provided outside the auxiliary vacuum chamber 2.

[0057] In this embodiment, the sample switcher also includes a sample chamber cover drive module. The sample chamber cover drive module mainly includes a sample chamber cover stepper motor 213, a sample cover drive seat 214, a sample cover baffle plate 215, a sample cover bushing 216, a sample cover support 217, a sample cover bearing 218, and a sample cover photoelectric switch 219. The sample cover drive seat 214 is fixedly mounted on the sample chamber cover 212, and the sample chamber cover stepper motor 213 is fixedly mounted on the sample cover drive seat 214. The sample cover bushing is fixedly mounted on the motor shaft of the sample chamber cover stepper motor 213. 216. A sample cover blocking disc 215 is installed on the sample cover bushing 216. A notch is opened on the outer edge of the sample cover blocking disc 215. A sample cover photoelectric switch 219 is fixedly installed on the sample cover drive seat 214. The sample cover photoelectric switch 219 is set corresponding to the outer edge of the sample cover blocking disc 215. A sample cover bearing 218 is installed between the sample cover bushing 216 and the sample cover drive seat 214. A sample cover support 217 is fixedly installed below the sample cover bushing 216. A sample cover 259 and an electromagnet 260 are respectively fixedly installed on the sample cover support 217.

[0058] In this embodiment, the sample tray assembly 263 mainly includes a sample cup driven gear 2631, a sample holder 2632, a sample inner mold 2633, a sample cup 2634, a sample cup lid 2635, a sample cup cap 2636, an upper sample cup magnet 2637, a lower sample cup magnet 2638, and a sample cup shaft 2639. The sample inner mold 2633 is disposed inside the sample cup 2634, the sample holder 2632 is fitted onto the outside of the sample cup 2634, the sample cup driven gear 2631 is fixedly installed on the outside of the sample holder 2632, and the sample cup driven gear 2637... 1. It meshes with the sample cup drive gear 251. The sample cup cover 2635 and the sample cup pressure cover 2636 are respectively set inside the sample cup 2634. The sample cup pressure cover 2636 is set above the sample cup cover 2635. The upper magnet 2637 of the sample cup is embedded in the sample cup pressure cover 2636. The lower magnet 2638 of the sample cup is embedded in the sample cup cover 2635. The sample cup shaft 2639 is fixedly installed together with the sample cup pressure cover 2636 and the sample cup cover 2635 respectively. Different samples 26310 are loaded into the sample cup 2634 according to actual needs.

[0059] In this invention, the light source 3 is an X-ray tube, with its window facing the auxiliary vacuum chamber 2. X-rays irradiate the sample for detection, and the irradiated area becomes the detection surface. A sample switcher installed outside the auxiliary vacuum chamber 2 rotates the sample holder 2632, causing the surfaces of each sample to sequentially rotate to the detection surface for testing.

[0060] This invention combines magnetic shielding and high vacuum functions, which can greatly increase the accuracy of detection. Furthermore, the main vacuum chamber and the auxiliary vacuum chamber are set up separately and can be vacuumed separately, which greatly increases the convenience of use.

Claims

1. A high vacuum system with magnetic shielding function, characterized in that: The high vacuum system comprises a main vacuum cavity (1), an auxiliary vacuum cavity (2) and a light source (3), the light source (3) is fixedly installed on the auxiliary vacuum cavity (2), the auxiliary vacuum cavity (2) and the main vacuum cavity (1) are fixedly installed together, and a sample chamber sealing and blocking assembly (266) is arranged between the auxiliary vacuum cavity (2) and the main vacuum cavity (1).

2. The high vacuum system having a magnetic shielding function according to claim 1, characterized in that: The sample chamber sealing and blocking assembly (266) comprises a sample chamber sealing and blocking seat (2661), a sample chamber sealing and blocking cover (2662) and a sample chamber sealing and blocking film (2663), the sample chamber sealing and blocking seat (2661) and the sample chamber sealing and blocking cover (2662) are fixedly installed together, the sample chamber sealing and blocking film (2663) is arranged between the sample chamber sealing and blocking seat (2661) and the sample chamber sealing and blocking cover (2662), the sample chamber sealing and blocking film (2663) is a thin film, and a polyester film can be usually selected, metal materials are plated on both sides of the sample chamber sealing and blocking film (2663) to form mesh plates, and metal support meshes are arranged on both sides of the sample chamber sealing and blocking film (2663), and the metal support meshes are made of high magnetic permeability materials.

3. The high vacuum system with magnetic shielding function according to claim 1, characterized in that: The light source (3) comprises a light pipe shell (392), a lead cylinder (393), an upper cooling mechanism, a lower cooling mechanism and a light emitting mechanism, the lead cylinder (393) is arranged in the light pipe shell (392), the upper cooling mechanism and the lower cooling mechanism are arranged in the lead cylinder (393), the upper cooling mechanism is arranged at an upper position, the lower cooling mechanism is arranged at a lower position, the light emitting mechanism is arranged at the bottom of the lead cylinder (393), and a light pipe cover (391) is arranged outside the light pipe shell (392).

4. The high vacuum system with magnetic shielding function according to claim 3, characterized in that: The upper cooling mechanism includes a light source internal cooling water joint (399), a light source front cover (319), a cap (311), a shell flange (312), a cable seat (314), a cable seat sealing gasket (315), a light source internal cooling water pipe (316), a cable connection contact (317), a contact connection gasket (318), a contact spring (329), a spring mounting screw (321), a water cooling sealing cover (322), and an in-out water separation sleeve (323).

5. The high vacuum system with magnetic shielding function according to claim 3, characterized in that: The lower cooling mechanism comprises a glass shell (324), a water-cooled outer tube (325), a water-cooled inner tube (326), an expansion drum (327), an expansion drum small-end clamping ring (328), an expansion drum large-end clamping ring (329), a glass valve (339), an outer valve (331), a main body connecting piece (332), a pressing plate (333), a main body (334), a water-cooled ring (335), a target cap (336), a target (337), a filament shielding cover (338), an inner valve (339) and a water-cooled inner tube limiting ring (349), the glass shell (324) is installed at a lower position inside a lead cylinder (393), the glass valve (339) is sleeved outside the glass shell (324), the expansion drum (327) is sleeved outside the glass valve (339), the expansion drum small-end clamping ring (328) and the expansion drum large-end clamping ring (329) are fixedly installed at the upper and lower ends outside the expansion drum (327) respectively, the water-cooled outer tube (325) is inserted into the glass shell (324), the water-cooled inner tube (326) is arranged inside the water-cooled outer tube (325), the top portions of the water-cooled outer tube (325) and the water-cooled inner tube (326) are connected with the bottom portion of a water inlet and outlet separation sleeve (323), the water-cooled inner tube (326) and the water inlet and outlet separation sleeve (323) are sealed by a sealing element, the main body connecting piece (332) is fixedly installed at the bottom of the expansion drum (327), the pressing plate (333) is installed at the bottom of the main body connecting piece (332), the outer valve (331) is fixedly installed inside the main body connecting piece (332), the target cap (336) is arranged inside the outer valve (331), the inner valve (339) is arranged inside the target cap (336), the target (337) is arranged inside the inner valve (339), and the target (337) is arranged corresponding to the bottom portions of the water-cooled outer tube (325) and the water-cooled inner tube (326), the water-cooled inner tube limiting ring (349) is arranged between the water-cooled inner tube (326) and the target (337), the main body (334) is installed below the main body connecting piece (332), the main body (334) is connected with two groups of electrode assemblies, the water-cooled ring (335) is installed below the main body (334), the light source external cooling water pipe (395) is connected to the water-cooled ring (335), the light source external cooling water pipe (395) is connected with a light source external cooling water connector (396), the light source external cooling water pipe (395) and a light source control line (397) are externally covered with a light pipe cover (394), the filament electrode fixing ring (345) is installed inside the main body (334) by a snap spring, the ceramic electrode (347) is installed on the filament electrode fixing ring (345), the filament (348) is installed on the ceramic electrode (347), the filament shielding cover (338) is fixedly arranged inside the filament (348), the water-cooled head (346) is arranged inside the filament shielding cover (338), the water-cooled head (346) is fixedly installed at the bottom of the water-cooled inner tube (326), the laohu piece (352) is arranged below the water-cooled head (346), the filament shielding ring (349) is fixedly arranged outside the filament (348), the beryllium window assembly welding piece (359) is fixedly installed at the bottom of the main body (334),Beryllium window assembly welding piece (359) is fixedly installed on beryllium sheet brazing piece (351), and the bottom of beryllium sheet brazing piece (351) is fixedly installed with beryllium sheet (353).

6. The high vacuum system having a magnetic shielding function according to claim 1, characterized in that: The auxiliary vacuum cavity (2) includes a diaphragm chamber (297), a sample chamber seat (219), a sample cover (211), a sample chamber cover (212), a light pipe diaphragm disc driving assembly, a spectrum detector assembly, and a sample conveying assembly. The light pipe diaphragm disc driving assembly and the spectrum detector assembly are respectively installed outside the shell of the auxiliary vacuum cavity (2) and are arranged in correspondence with the sample conveying assembly. The sample conveying assembly is installed in the shell. The sample chamber seat (219) is fixedly arranged above the sample cover (211). The diaphragm chamber (297) is fixedly installed on the sample chamber seat (219). The diaphragm chamber (297) is embedded with a diaphragm chamber sealing ring (298). The light source (3) is fixedly installed on the diaphragm chamber sealing ring (298). The main vacuum cavity (1) and the diaphragm chamber (297) are fixedly installed together. The diaphragm chamber (297) is provided with a sample chamber vacuum interface (299).

7. The high vacuum system with magnetic shielding function according to claim 6, characterized in that: The light pipe diaphragm disc driving assembly comprises a light pipe diaphragm stepper motor (222), a light pipe diaphragm motor base (223), a synchronous pulley (224), a synchronous belt (225), a crystal disc dial wheel (226), a light pipe diaphragm driving shaft (227), a light pipe diaphragm driving base (228) and a vacuum aviation socket (229), the light pipe diaphragm driving base (228) is fixedly installed on the diaphragm chamber (297), the light pipe diaphragm motor base (223) is fixedly installed on the light pipe diaphragm driving base (228), the light pipe diaphragm stepper motor (222) is fixedly installed on the light pipe diaphragm motor base (223), the synchronous pulley (224) is fixedly installed on the motor shaft of the light pipe diaphragm stepper motor (222), the light pipe diaphragm driving shaft (227) is insertedly installed in the light pipe diaphragm driving base (228), the crystal disc dial wheel (226) is fixedly installed together with the light pipe diaphragm driving shaft (227), the synchronous belt (225) is hung between the crystal disc dial wheel (226) and the synchronous pulley (224), and the light pipe diaphragm tensioning pulley base (239) is fixedly installed on the light pipe diaphragm driving base (228).

8. The high vacuum system with magnetic shielding function according to claim 6, characterized in that: The energy spectrum detector assembly comprises an X-ray detector (291), an ED detector base (292), an ED detector ring (293), a first lip-shaped sealing ring (294), a second lip-shaped sealing ring (295) and a detector head cover (296), the ED detector base (292) is fixedly installed on the diaphragm chamber (297), the detection head of the X-ray detector (291) is insertedly installed in the ED detector base (292), the detection head of the X-ray detector (291) is sleeved with the ED detector ring (293), the ED detector ring (293) is fixedly installed on the ED detector base (292), the first lip-shaped sealing ring (294) and the second lip-shaped sealing ring (295) are arranged between the ED detector ring (293) and the ED detector base (292), and the detection head of the X-ray detector (291) is sleeved with the detector head cover (296).

9. The high vacuum system having a magnetic shielding function according to claim 6, characterized in that: The sample delivery assembly includes a light pipe diaphragm part and a sample switcher part, the light pipe diaphragm part and the sample switcher part are correspondingly arranged, the light pipe diaphragm part includes a light pipe diaphragm base (234), a light pipe diaphragm limiter (235), a light pipe diaphragm piece (236), a first magnetic steel (237), a second magnetic steel (238), a third magnetic steel (239), a light pipe diaphragm drive gear (249), a light pipe diaphragm driven gear (241), a light pipe diaphragm positioning seat (242), a light pipe diaphragm limiting spring piece (243), a light pipe diaphragm limiting bearing shaft (244), a light pipe diaphragm limiting bearing (245) and a sample disc photoelectric switch (249), the bottom of the light pipe diaphragm drive shaft (227) is fixedly installed with the light pipe diaphragm drive gear (249), the light pipe diaphragm driven gear (241) is fixedly installed with the light pipe diaphragm base (234), the light pipe diaphragm drive gear (249) is engaged with the light pipe diaphragm driven gear (241), the light pipe diaphragm base (234) is annularly provided with more than one through hole, the through hole is fixedly installed with the light pipe diaphragm piece (236), the light pipe diaphragm limiter (235) is fixedly installed below the light pipe diaphragm base (234), the light pipe diaphragm limiter (235) is provided with the same number of notches as the through holes in the light pipe diaphragm base (234), the light pipe diaphragm positioning seat (242) is fixedly installed on the sample chamber seat (219), one end of the light pipe diaphragm limiting spring piece (243) is fixedly installed with the light pipe diaphragm positioning seat (242), the other end of the light pipe diaphragm limiting spring piece (243) is fixedly installed with the light pipe diaphragm limiting bearing shaft (244), the light pipe diaphragm limiting bearing shaft (244) is installed with the light pipe diaphragm limiting bearing (245), the light pipe diaphragm limiting bearing (245) is correspondingly arranged with the light pipe diaphragm limiter (235), the light pipe diaphragm base (234) is provided with a flange protruding upward, the flange is provided with a notch, the diaphragm chamber (297) is fixedly installed with the sample disc photoelectric switch (249), the sample disc photoelectric switch (249) is correspondingly arranged with the flange; The sample switcher part comprises a sample chamber cover shielding inner liner (246), a sample chamber inner upper shielding plate (247), a sample disc (248), a sample disc seat (259), a sample cup driving gear (251), a sample disc shaft cover (252), a sample disc driving shaft (253), a sample disc shaft (254), a sample disc upper light blocking disc (255), a sample disc lower light blocking disc (256), a sample disc upper synchronous pulley (257), a sample disc lower synchronous pulley (258), a sample upper sealing cover (259), an electromagnet (269), a sample site sealing cover (261), a sample site shielding plate (262), a sample disc assembly (263), and a key (264). The sample disc (248) is annularly provided with more than one sample installation site, each sample installation site is provided with a sample disc assembly (263), the sample disc (248) is fixedly provided with the sample disc shaft (254) in the middle, the sample disc shaft (254) is provided with the sample disc driving shaft (253), the sample disc driving shaft (253) is fixedly provided with the sample disc shaft cover (252) at the top, the sample cup driving gear (251) is fixedly installed with the sample disc driving shaft (253), the sample cup driving gear (251) is provided with the sample disc seat (259) at the top, each sample disc assembly (263) is engaged with the sample cup driving gear (251), the sample disc shaft (254) is provided with the sample disc upper synchronous pulley (257), the sample disc upper synchronous pulley (257) is provided with the sample disc upper light blocking disc (255) above, the sample disc driving shaft (253) is provided with the sample disc lower synchronous pulley (258), the sample disc lower synchronous pulley (258) is provided with the sample disc lower light blocking disc (256) below, the sample disc upper synchronous pulley (257) and the sample disc lower synchronous pulley (258) are provided outside the auxiliary vacuum cavity (2), the sample disc upper synchronous pulley (257) and the sample disc lower synchronous pulley (258) are driven to rotate by an external driving device, so as to drive the sample disc (248) and the sample disc assembly (263) to rotate, the sample disc (248) is provided with the sample chamber inner upper shielding plate (247) below, the sample chamber inner upper shielding plate (247) is provided with the semicircular sample chamber cover shielding inner liner (246) below, the sample chamber inner upper shielding plate (247) and the sample chamber cover shielding inner liner (246) are assembled inside the auxiliary vacuum cavity (2), the sample chamber inner upper shielding plate (247) is provided with two through holes, one of the through holes is provided with the sample site sealing cover (261) below, the sample site sealing cover (261) is provided with the sample site shielding plate (262) below, the other through hole is provided with the sample upper sealing cover (259) below, the sample upper sealing cover (259) is fixedly provided with the electromagnet (269) below, the sample upper sealing cover (259), the electromagnet (269), the sample site sealing cover (261), and the sample site shielding plate (262) are provided outside the auxiliary vacuum cavity (2). The sample switcher part further comprises a sample chamber cover driving module, which comprises a sample chamber cover stepping motor (213), a sample upper cover driving seat (214), a sample cover light blocking disc (215), a sample upper cover shaft sleeve (216), a sample upper cover support (217), a sample upper cover bearing (218) and a sample cover photoelectric switch (219). The sample chamber cover stepping motor (213) is fixedly installed on the sample upper cover driving seat (214). The motor shaft of the sample chamber cover stepping motor (213) is fixedly installed with the sample upper cover shaft sleeve (216). The sample upper cover shaft sleeve (216) is installed with the sample cover light blocking disc (215). The outer edge of the sample cover light blocking disc (215) is provided with a notch. The sample cover photoelectric switch (219) is fixedly installed on the sample upper cover driving seat (214) and corresponds to the outer edge of the sample cover light blocking disc (215). The sample upper cover bearing (218) is installed between the sample upper cover shaft sleeve (216) and the sample upper cover driving seat (214). The sample upper cover support (217) is fixedly installed below the sample upper cover shaft sleeve (216). The sample upper cover (259) and the electromagnet (269) are fixedly installed on the sample upper cover support (217), respectively.

10. The high vacuum system having a magnetic shielding function according to claim 9, characterized in that: The sample disc assembly (263) comprises a sample cup driven gear (2631), a sample support (2632), a sample inner mold (2633), a sample cup (2634), a sample cup cover (2635), a sample cup gland (2636), a sample cup upper magnetic steel (2637), a sample cup lower magnetic steel (2638) and a sample cup shaft (2639). The sample inner mold (2633) is arranged in the sample cup (2634). The sample support (2632) is sleeved outside the sample cup (2634). The sample cup driven gear (2631) is fixedly installed outside the sample support (2632) and engaged with the sample cup driving gear (251). The sample cup cover (2635) and the sample cup gland (2636) are arranged in the sample cup (2634) respectively. The sample cup gland (2636) is arranged above the sample cup cover (2635). The sample cup upper magnetic steel (2637) is embedded in the sample cup gland (2636). The sample cup lower magnetic steel (2638) is embedded in the sample cup cover (2635). The sample cup shaft (2639) is fixedly installed with the sample cup gland (2636) and the sample cup cover (2635) respectively.

Images