Stage mechanism and method of using the stage mechanism

Abstract

To provide a stage mechanism, etc. that can perform precision movement even with a simple configuration.SOLUTION: A flat plate stage mechanism, etc., having a pair of fixed stages and a movable stage includes configurations: (1) a micro head is provided on the side of the fixed stages and the movable stage to slide the movable stage along the surface of the fixed stages, (2) the micro head has a spindle, a sleeve, and a thimble, (3) a first connecting member is provided on the side of the fixed stages to fix and support the sleeve, (4) a second connecting member is provided on a side surface of the movable stage to rotatably support the spindle via a bearing member, (5) the bearing member has at least a first thrust bearing and a second thrust bearing, and (6) a preload member is provided to provide preload to the bearing member along the axial direction.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a stage mechanism and a method for using a stage mechanism. In particular, the present invention relates to a stage mechanism that can perform precise movement even with a simple configuration, and a method for using such a stage mechanism. [Background technology]

[0002] 2. Description of the Related Art Conventionally, stage mechanisms for reciprocating a workpiece are widely known in processing machines for cutting, grinding, polishing, etc., microscopes, etc. Such a stage mechanism basically consists of a fixed stage, a movable stage, and a feeder, and the feeder allows the movable stage to slide along the surface of the fixed stage, thereby allowing the workpiece fixed to the movable stage to move back and forth. In such a stage mechanism, various stage mechanisms have been proposed that can prevent play when the movable stage slides.

[0003] As one of such stage mechanisms, for example, a thin stage mechanism has been proposed that can effectively suppress the occurrence of yawing and move a workpiece precisely (see, for example, Patent Document 1). More specifically, as shown in FIG. 8(a), the stage mechanism has a fixed stage 212, a movable stage 214, a feed mechanism part 220 that slides the movable stage 214 along the surface of the fixed stage 212, guide grooves 218 provided on each stage, a metal piece 216 that fits into the guide groove 218, and a pressing member 215, and satisfies a predetermined relational expression regarding thickness.

[0004] Also, for example, a rotary table has been proposed that can stabilize the vertical position of the table using a simple structure (see, for example, Patent Document 2). Specifically, as shown in FIG. 8(b), the rotary table 300 includes a base 303 having an upwardly extending shaft member 309, a table 305 that can rotate around the axis of the shaft member 309, a hydrostatic bearing structure 320 that supports the rotation of the table 305 in the vertical direction, and a preload structure 333 that applies a downward preload to the hydrostatic bearing structure 320. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2015-000460 A (claims, drawings, etc.) [Patent Document 2] JP 2016-129921 A (claims, drawings, etc.) Summary of the Invention [Problem to be solved by the invention]

[0006] However, although the stage mechanism described in Patent Document 1 can effectively restrict the occurrence of yawing, there is a problem in that it tends to be difficult to sufficiently suppress play in the thrust direction of the feed screw.

[0007] On the other hand, the rotary table described in Patent Document 2 is essentially configured by combining a thrust bearing and a radial bearing, which has the problem that the bearing structure tends to be complicated. Furthermore, due to the structure of the thrust bearing, it is not possible to suppress play in the direction opposite to the direction of preload, and in cases where the shaft member moves back and forth, there is a problem that precise movement can become difficult.

[0008] Therefore, the inventors of the present application have made extensive efforts in consideration of these problems, and have discovered that the play of the stage can be effectively suppressed by using a simple configuration in which a specified bearing member is provided in the connecting member that connects the movable stage of the stage mechanism to the microhead, and have thus completed the present invention. That is, an object of the present invention is to provide a stage mechanism that can perform precise movement even with a simple configuration, and a method for using such a stage mechanism. [Means for solving the problem]

[0009] According to the present invention, there is provided a flat stage mechanism comprising a pair of fixed stages and a movable stage, characterized by having the following configurations (1) to (6), which can solve the above-mentioned problems. (1) Microheads are provided on the sides of the fixed stage and the movable stage to slide the movable stage along the surface of the fixed stage. (2) The microhead has a spindle with a male threaded portion, a sleeve in which the spindle is incorporated, and a thimble into which a portion of the sleeve is inserted and which is connected to one end of the spindle and which rotates together with the spindle. (3) A first connecting member for fixing and supporting the sleeve is provided on the side surface of the fixed stage. (4) A second connecting member that rotatably supports the spindle via a bearing member is provided on the side surface of the movable stage. (5) The bearing member has at least a first thrust bearing and a second thrust bearing adjacent to the first thrust bearing along the axial direction of the spindle. (6) A preload member is provided to apply a preload to the bearing member along the axial direction. That is, according to the stage mechanism of the present invention, by comprising at least the components (1) to (6) and connecting the movable stage and the microhead via a predetermined bearing member, precision movement can be performed even with a simple configuration.

[0010] Furthermore, when constructing the stage mechanism of the present invention, it is preferable that the first thrust bearing and the second thrust bearing each have a shaft washer fitted and fixed to the outer peripheral surface of the spindle, a housing washer fitted and fixed to the countersunk portion of the second connecting member, and a rotating body sandwiched between the shaft washer and the housing washer, and that the housing washer in the first thrust bearing and the second thrust bearing are arranged opposite each other. By configuring it in this way, the thrust bearings can be placed opposite each other and preload can be applied in the direction in which they attract each other, which does not lean towards the direction of travel and more effectively suppresses the play in the thrust direction of the spindle (hereinafter sometimes simply referred to as "play in the thrust direction"), contributing to precision movement. Furthermore, by arranging the two thrust bearings adjacent to each other, it is possible to more effectively suppress play in the thrust direction and improve the straightness of the spindle. Furthermore, the two thrust bearings reduce friction caused by the rotation of the bearing washer, making it easier to improve operability.

[0011] Furthermore, when configuring the stage mechanism of the present invention, it is preferable that the second connecting member has a cylindrical flange portion between the first thrust bearing and the second thrust bearing, which abuts the first thrust bearing and the second thrust bearing. With this configuration, the spindle and the preload member can firmly press the thrust bearing against the flange portion, more effectively suppressing play in the thrust direction of the spindle and contributing to precise movement.

[0012] Furthermore, when constructing the stage mechanism of the present invention, it is preferable that the spindle has a stepped portion that abuts against the bearing member to fix its position, and a bearing insertion portion that is inserted into the bearing member, further towards the tip side than the stepped portion. By adopting such a configuration, it is possible to apply preload more stably, and even with a simple configuration, it is possible to position the bearing member with higher accuracy.

[0013] In constructing the stage mechanism of the present invention, it is preferable that the preload member is a screw member that is screwed onto the tip of the spindle along the axial direction. With this configuration, the preload can be adjusted by the amount of tightening of the screw member, and play in the thrust direction of the spindle can be more effectively suppressed, contributing to precision movement.

[0014] In constructing the stage mechanism of the present invention, it is preferable to provide a pressing member that connects the fixed stage and the movable stage. With this configuration, the spindle and thimble can be indirectly pressed, and even when force is applied in the radial direction of the spindle, play in the thickness direction of the stage mechanism can be more effectively suppressed, contributing to precise movement. This makes it easier to improve the straightness of the spindle.

[0015] In constructing the stage mechanism of the present invention, it is preferable that a long guide member be provided on the surface of the fixed stage or on the back surface of the movable stage along the sliding direction of the movable stage. By adopting such a configuration, the rotation of the spindle can be indirectly suppressed, and even when force is applied in the radial direction of the spindle, play such as yawing can be more effectively suppressed, contributing to precision movement. This makes it easier to improve the straightness of the spindle.

[0016] Another aspect of the present invention is a method of using the above-mentioned stage mechanism, characterized in that it comprises the following steps (A) to (C): (A) A process of attaching the stage mechanism to a predetermined position. (B) A process of fixing a predetermined workpiece to the surface of the movable stage. (C) A process in which the microhead slides the movable stage along the surface of the fixed stage to move the specified workpiece. By implementing the method for using the stage mechanism in this way, it is possible to perform precise movement using a stage mechanism with a simple configuration. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 1 is a diagram provided for explaining the assembled state of the stage mechanism of the first embodiment. [Figure 2] 2(a) to 2(c) are cross-sectional views taken along the axial direction of the spindle, provided to explain examples of the configuration of the attachment portion of the spindle of the first embodiment to the bearing member. [Figure 3] 3(a) and 3(b) are cross-sectional views of the stage mechanism of the first embodiment taken along a horizontal plane. [Figure 4] 4(a) to 4(c) are cross-sectional views taken along the axial direction of the spindle, and are provided to explain an example of the configuration of the bearing member of the first embodiment. [Figure 5] 5(a) to 5(c) are diagrams provided for explaining a modified example of the stage mechanism of the first embodiment. [Figure 6] FIG. 6 is a diagram provided for explaining the attachment positions of the first connecting member and the second connecting member in the first embodiment. [Figure 7] FIG. 7 is a diagram provided for explaining how to use the stage mechanism of the second embodiment. [Figure 8] 8(a) and 8(b) are diagrams provided for explaining a conventional stage mechanism. DETAILED DESCRIPTION OF THE INVENTION

[0018] [First embodiment] As shown in FIG. 1, the first embodiment is a flat stage mechanism 10 including a pair of fixed stages 12 and a movable stage 14, and is characterized by the following configurations (1) to (6). (1) Microheads are provided on the sides of the fixed stage and the movable stage to slide the movable stage along the surface of the fixed stage. (2) The microhead has a spindle with a male threaded portion, a sleeve in which the spindle is incorporated, and a thimble into which a portion of the sleeve is inserted and which is connected to one end of the spindle and which rotates together with the spindle. (3) A first connecting member for fixing and supporting the sleeve is provided on the side surface of the fixed stage. (4) A second connecting member that rotatably supports the spindle via a bearing member is provided on the side surface of the movable stage. (5) The bearing member has at least a first thrust bearing and a second thrust bearing adjacent to the first thrust bearing along the axial direction of the spindle. (6) A preload member is provided to apply a preload to the bearing member along the axial direction. Hereinafter, an embodiment of the stage mechanism of the present invention will be described in detail with reference to the drawings as appropriate.

[0019] 1.Basic configuration The basic configuration of the stage mechanism is a flat-plate-shaped stage mechanism 10 that includes a pair of fixed stages 12 and a movable stage 14, as shown in FIG. The stage mechanism is characterized by having at least the features (1) to (6) as essential constituent elements.

[0020] 2. Composition (1) As shown in FIG. 1, configuration (1) is an essential configuration requirement that a microhead that slides the movable stage along the surface of the fixed stage is provided on the side of the fixed stage and the movable stage.

[0021] (fixed stage) Here, the fixed stage 12 is a flat plate-like member that serves as the base of the stage mechanism 10 . Therefore, it is preferable that the fixed stage 12 has a fitting groove 12a on the surface thereof, into which a guide member 16 (described later) is fitted and fixed. The reason for this is that the positional relationship between the guide member and the guide groove can be more accurately matched.

[0022] Furthermore, as shown in FIG. 1, when the fixed stage 12 is provided with a fitting groove 12a, it is preferable to provide a guide fixing member 13 on the side surface of the fitting groove 12a, which presses and fixes the guide member 16. That is, it is preferable that the guide fixing member 13 is a set screw-like member that is screwed from the outside to the inside of the fixed stage 12 into the screw hole 12c, which is a horizontal hole that penetrates the side of the fitting groove 12a and the side of the fixed stage 12, to fix the guide member 16. The reason for this is that the guide member can be firmly fixed to the fixed stage, allowing the workpiece to be moved with greater precision.

[0023] Furthermore, the shape of the fixed stage is not particularly limited as long as it is flat, but it is usually preferable that the planar shape be at least one of circular, elliptical, triangular, rectangular, polygonal (e.g., pentagonal to decagonal), convex, concave, T-shaped, L-shaped, H-shaped, etc. The reason for this is that such a planar shape makes it easy to manufacture even small or large sizes, and allows the stage surface to be wide, so that the movable stage described below can be stably placed and slid. Therefore, it is particularly preferable that the planar shape of the fixed stage be a rectangle.

[0024] Furthermore, it is generally preferable that the maximum diameter of the planar shape of the fixed stage is set to a value within the range of 20 to 200 mm. The reason for this is that by setting the diameter to such a maximum, a movable stage (described later) can be stably mounted and the sliding distance can be made long. Therefore, it is more preferable that the maximum diameter of the planar shape of the fixed stage is set to a value within the range of 30 to 150 mm, and even more preferable that it is set to a value within the range of 40 to 100 mm. The maximum diameter of the planar shape can be defined as the diameter of a circumscribing circle about the planar shape.

[0025] In addition, it is generally preferable that the thickness of the fixed stage be set to a value within the range of 2 to 30 mm. The reason for this is that such a thickness provides sufficient strength to support the movable stage and also makes it easier to make a thinner stage mechanism. Therefore, it is more preferable that the thickness of the fixed stage be set to a value within the range of 3 to 25 mm, and even more preferable that it be set to a value within the range of 5 to 20 mm.

[0026] Furthermore, the material of which the fixed stage is made is not particularly limited as long as it has the strength to support the movable stage, but it is usually preferable to use at least one of aluminum (including anodized aluminum, which has an anodized oxide coating formed on its surface), copper, brass, iron, nickel, magnesium, tungsten, titanium, ceramic, polymeric resin material, etc. The reason for this is that such constituent materials are excellent in terms of light weight, corrosion resistance, abrasion resistance, workability, thermal conductivity, decorativeness, and economy. Therefore, it is particularly preferable that the material of the fixed stage be anodized aluminum, which has excellent electrical insulation properties in addition to the above-mentioned characteristics.

[0027] (movable stage) The movable stage, which is paired with the fixed stage, is a flat plate-like member on whose surface a predetermined workpiece can be fixed, and is a member that slides linearly along the surface of the fixed stage by a microhead, which will be described later. Here, the basic configuration of the movable stage is preferably the same as that of the fixed stage, but it is also preferable to use a different configuration within a predetermined range, taking into consideration the usage environment, purpose of use, etc.

[0028] As shown in FIG. 1, the movable stage is preferably provided on its rear surface with a guide groove 18 that directly or indirectly contacts the guide member 16 to guide the slide. The reason for this is that the sliding direction of the movable stage can be regulated with greater precision.

[0029] (Guide member) It is also preferable that a long guide member be provided on the surface of the fixed stage or on the back surface of the movable stage along the sliding direction of the movable stage. Here, the guide member is a long, elongated member fixed so as to protrude from the surface of the fixed stage or the back surface of the movable stage, and has a sliding surface on at least one side that directly or indirectly abuts against the guide groove, and is a member that guides the sliding of the movable stage. The reason for this is that, by providing such a guide member, play such as yawing can be more effectively restricted even though the microhead is provided on the side of the stage mechanism. This is because the straightness of the spindle can be improved more easily.

[0030] Furthermore, as a configuration for fixing such a guide member to the surface of the fixed stage, it is preferable that the fixed stage has a fitting groove into which the guide member is fitted, and a screw member that presses and fixes the guide member against the side of the fitting groove. The reason for this is that the sliding surface can be brought into contact with the guide groove more effectively, and play such as yawing of the stage can be more effectively suppressed.

[0031] Furthermore, it is generally preferable that the protruding height of the guide member relative to the surface of the fixed stage be set to a value within the range of 1 to 20 mm. The reason for this is that by setting the protrusion height to this level, the guide member can effectively abut against the guide groove, reducing friction during sliding and creating a stage mechanism that can be slid with less force. Therefore, it is more preferable that the protruding height of the guide member is set to a value within the range of 2 to 15 mm, and even more preferable that it is set to a value within the range of 3 to 10 mm.

[0032] The guide member is preferably made of at least two metal members with their sliding surfaces facing each other at a predetermined distance. Specifically, it is preferable that the material be at least one metal member such as stainless steel, aluminum, copper, brass, iron, nickel, magnesium, tungsten, or titanium. The reason for this is that such materials have excellent strength and wear resistance, and therefore can effectively restrict play such as yawing for a longer period of time. Furthermore, the movable stage can be firmly sandwiched between the guide members, allowing the sliding surfaces to abut against each other, making it possible to more effectively suppress play such as yawing.

[0033] In addition, it is usually preferable that the distance between the opposing sliding surfaces is set to a value within the range of 10 to 150 mm. The reason for this is that by setting such a distance, the occurrence of yawing and the like can be effectively suppressed, and the movable stage can be slid with higher precision. Therefore, it is more preferable that the distance between the opposing sliding surfaces is set to a value within the range of 15 to 100 mm, and even more preferable that it is set to a value within the range of 20 to 50 mm.

[0034] Furthermore, it is generally preferable that the length of the guide member in the sliding direction be set to a value within the range of 10 to 150 mm. The reason for this is that by making the length this length, the surface area in contact with the guide groove is increased, making it possible to more effectively suppress the occurrence of yawing and the like, while also ensuring a sufficient sliding distance. Therefore, it is more preferable that the length of the guide member is set to a value within the range of 15 to 100 mm, and even more preferable that the length be set to a value within the range of 20 to 50 mm.

[0035] Furthermore, it is generally preferable that the width of the guide member in the direction perpendicular to the sliding direction be set to a value within the range of 2 to 20 mm. The reason for this is that by setting the width to this value, sufficient strength can be obtained when sliding along the guide groove, and the occurrence of yawing and the like can be more effectively suppressed. Therefore, it is more preferable that the width of the guide member is set to a value within the range of 3 to 15 mm, and even more preferable that it is set to a value within the range of 4 to 10 mm.

[0036] In addition, it is generally preferable that the thickness of the guide member be set to a value within the range of 3 to 25 mm. The reason for this is that by making the thickness as described above, it can be easily protruded from the surface of the fixed stage and can be brought into more firm contact with the guide groove. Therefore, it is more preferable that the thickness of the guide member be set to a value within the range of 4 to 20 mm, and even more preferable that the thickness be set to a value within the range of 5 to 15 mm.

[0037] (Guide groove) As shown in FIG. 1, it is preferable that a guide groove 18 for guiding the guide member 16 be provided on the rear surface of the movable stage 14, which is in direct or indirect contact with the sliding surface 16a. Specifically, it is preferable that the guide member be provided on the rear surface of the movable stage, and be in direct or indirect contact with the guide member so as to straddle the guide member. It is preferable that the groove be formed linearly along the sliding direction of the movable stage. The reason for this is that the sliding direction of the movable stage can be more precisely regulated.

[0038] It is also preferable that the cross-sectional shape of the guide groove along a plane perpendicular to the sliding direction be at least one of rectangular, semicircular, triangular, trapezoidal, convex, concave, and the like. The reason for this is that it is possible to more accurately regulate the sliding of the movable stage by effectively contacting the guide member.

[0039] Here, the stage mechanism of the first embodiment is shown as having a guide member on the surface of the fixed stage and a guide groove on the back surface of the movable stage, but it is also preferable to have a configuration in which a guide groove is on the surface of the fixed stage and a guide member is on the back surface of the movable stage.

[0040] 3. Composition (2) Configuration (2) is an essential component of the microhead 21, as shown in Figure 1, which includes a spindle 21a having a male threaded portion, a sleeve 21b into which the spindle 21a is incorporated, and a thimble 21c into which a portion of the sleeve 21b is inserted, which is connected to one end of the spindle 21a, and which rotates together with the spindle 21a. Therefore, by adopting such a configuration, a highly accurate feeding mechanism can be realized with a simpler configuration.

[0041] The spindle preferably has a smooth circumferential surface on the distal end side of the male thread portion, and rotates while abutting against a part of the inner wall of the sleeve. The reason for this is that by adopting such a configuration, the smooth circumferential surface can be used as a guide to further improve the straightness of the spindle, and it also becomes easier to insert it into the bearing member described below.

[0042] (bearing insert) Furthermore, as shown in Figure 2(a), it is preferable that the spindle 21a has a step portion 21a' that abuts against the bearing member 26 to fix its position, and a bearing insertion portion 21a'' that is inserted into the bearing member, further towards the tip side than the step portion. The reason for this is that such a configuration makes it possible to improve the positional accuracy of the bearing member relative to the spindle, and to more accurately adjust the amount of tightening by the preload member, thereby more effectively suppressing play in the thrust direction of the spindle.

[0043] Specifically, as shown in FIG. 2(b), the bearing inserting portion is preferably configured such that a cylindrical member 26d is provided at the tip of the spindle 21a. The reason for this is that with this configuration, the spindle and the cylindrical member can be arranged along the axial direction, making it possible to easily form a predetermined step portion. Therefore, the outer diameter of the cylindrical member is usually preferably 2 to 30 mm smaller than the diameter of the spindle, more preferably 4 to 20 mm smaller, and even more preferably 6 to 15 mm smaller.

[0044] Furthermore, the length of the bearing insertion portion along the axial direction is not particularly limited as long as it is a length that can stably hold the bearing member, but it is usually preferable that it is 1 to 1000 μm shorter than the length of the bearing member. The reason for this is that such a length allows the preload member to more effectively apply preload to the bearing member. Therefore, the length of the bearing insertion portion is preferably 5 to 500 μm shorter than the length of the bearing member, and more preferably 10 to 100 μm shorter.

[0045] As shown in FIG. 2(a), the height H1 of the step is not particularly limited as long as it does not exceed the outer diameter of the bearing member, but it is usually preferable to set it to a value within the range of 1 to 15 mm. The reason for this is that such a height allows the bearing member to be brought into effective contact with the bearing member. Furthermore, it is possible to press only the inner peripheral side of the bearing member, and the inner peripheral side can be deformed more than the outer peripheral side of the bearing member, making it possible to more effectively suppress play not only in the thrust direction of the spindle but also in the radial direction of the spindle. Therefore, the height of the step portion is more preferably set to a value within the range of 2 to 10 mm, and even more preferably to a value within the range of 3 to 7.5 mm.

[0046] Furthermore, as shown in FIG. 2(c), it is preferable that the bearing insertion portion be configured such that a cylindrical member 26d' having a female thread portion on its inner surface that screws into the male thread portion of the preload member is provided at the tip of the spindle 21a. The reason for this is that such a configuration allows the spindle and the cylindrical member to exert a double nut effect, allowing for more stable preload application.

[0047] Furthermore, when the male thread portion of the preload member is screwed into the female thread portion of the cylindrical member, it is preferable that they are fixed with an anaerobic adhesive. The reason for this is that, with this configuration, the preload on the preload member can be maintained for a longer period of time without being reduced.

[0048] (Backlash absorption member) It is also preferable that a backlash absorbing member is provided inside the sleeve. The reason for this is that the sleeve has a backlash absorption member that absorbs stress while exhibiting a predetermined sliding property while the spindle is rotating, thereby more effectively restricting the occurrence of yawing without hindering the rotation of the spindle. On the other hand, when the rotation of the spindle is stopped, it deforms appropriately to suppress backlash of the movable stage, and also solidifies sufficiently to maintain a firmly fixed state, thereby achieving the so-called "locking ability."

[0049] Furthermore, the backlash absorption member is preferably made of an organic resin component, and is preferably made of at least one resin material selected from the group consisting of amide resin (nylon resin), urethane resin, ester resin, carbonate resin, acrylic resin, olefin resin, rubber-based resin (natural rubber, styrene rubber, butadiene rubber, styrene-butadiene-styrene block copolymer (SBS), styrene-isoprene-styrene block copolymer (SIS), styrene-ethylene-butylene-styrene block copolymer (SEBS)), imide resin, amide-imide resin, phenoxy resin, polyethersulfone resin, polyetheretherketone resin, silicone resin, epoxy resin, airnate resin, guanamine resin, urea resin, and phenol resin. The reason for this is that if the backlash absorbing member is made of such a thermoplastic resin material or a thermosetting resin material, the formability and backlash absorbing properties of the backlash absorbing member can be improved. Therefore, it is particularly preferable that the backlash absorbing member be made of at least one of amide resin (nylon resin), urethane resin, and rubber-based resin. The reason for this is that it is possible to achieve a better balance between the mobility and fixation of the spindle, and it also has excellent durability.

[0050] It is also preferable that the backlash absorbing member has a metal protective cover around it. That is, it is preferable to use a metal protective cover having a cap-shaped housing portion that houses a resin backlash absorbing member and a threaded portion having a screw groove that corresponds to the male threaded portion of the spindle. It is preferable that a resin backlash absorbing member is inserted into the cap-shaped housing portion, and the opening on the inserted side is bent. The reason for this is that the provision of such a metal protective cover improves the fixation of the backlash absorbing member to a predetermined location on the sleeve. Furthermore, the durability of the backlash absorbing member is improved, and excellent spindle movement and fixation can be achieved for a longer period of time.

[0051] 4. Composition (3) The configuration (3) is an essential configuration requirement that a first connecting member for fixing and supporting the sleeve is provided on the side surface of the fixed stage, as shown in FIG. Therefore, with this configuration, the movable stage can be slid with high precision even in a simple, small or large configuration.

[0052] Furthermore, the form of the first connecting member 22 is not particularly limited as long as it is a form that supports the sleeve 21b threaded onto the spindle 21a on the side of the fixed stage 12, as shown in Figure 3(a).However, for example, it is preferable that the first connecting member 22 be a member having a through hole along the sliding direction as an insertion hole for the sleeve 21b. More specifically, it has a fixed portion that screws the first connecting member 22 to the fixed stage and a gripping portion for the sleeve 21b, and is preferably an L-shaped or convex-shaped member when the stage mechanism 10 is viewed in a plane. The reason for this is that with this configuration, the microhead can be more easily fixed and supported on the side surface of the fixed stage. Here, the method for attaching the fixed stage and the first connecting member is not particularly limited as long as they do not come off due to the stress caused by sliding, but it is usually particularly preferable that they are fixed using screw members 22a (see Figure 1). It is particularly preferable that the first connecting member and the sleeve are fixed by being pressed with a screw member 22b (see FIG. 1).

[0053] As shown in FIG. 3(a), the dimensions of the gripping portion of the sleeve 21b in the first connecting member 22 are preferably such that the axial length La is within a range of 4 to 40 mm, and the width Lb is within a range of 4 to 40 mm. The reason for this is that by using such lengths and widths, play such as yawing can be more effectively restricted, allowing the movable stage to slide with greater precision. Therefore, it is more preferable to set the axial length to a value within the range of 5 to 35 mm and the width to a value within the range of 5 to 35 mm, and it is even more preferable to set the axial length to a value within the range of 6 to 30 mm and the width to a value within the range of 6 to 30 mm.

[0054] Furthermore, the constituent material of the first connecting member is not particularly limited, but is preferably at least one of special purpose steel materials such as SUS, SUH, SUJ, SUP, and SUM, and tool steel materials such as SK, SKS, SKD, SKT, and SKH. Among these, it is particularly preferable to use SUS303, SUS440, SKS, and SKD.

[0055] 5. Composition (4) The configuration (4) is an essential configuration requirement that a second connecting member that rotatably supports the spindle via a bearing member is provided on the side surface of the movable stage, as shown in FIG. Therefore, with this configuration, the movable stage can be slid with high precision even in a simple, small or large configuration.

[0056] Furthermore, the form of the second connecting member 24 is not particularly limited as long as it is a form that supports the bearing member 26 on the side of the movable stage 14, as shown in Figure 3(b). However, for example, it is preferable that the second connecting member 24 be a member having a countersunk portion as an insertion hole for the bearing member 26 and a through hole as an insertion hole for the spindle. Specifically, it has a fixed portion for screwing the second connecting member 24 to the movable stage 14 and a gripping portion for the bearing member 26, and is preferably an L-shaped or convex member when the stage mechanism 10 is viewed in a plane. The reason for this is that with this configuration, the microhead can be more easily supported for rotation on the side surface of the movable stage via the bearing member. Here, the method for attaching the movable stage and the second connecting member is not particularly limited as long as they do not come off due to the stress caused by sliding, but it is usually particularly preferable that they are fixed using screw members 24a (see Figure 1).

[0057] Furthermore, the second connecting member is not particularly limited as long as it has a structure that prevents the bearing member from coming loose when the spindle moves back and forth. However, as shown in FIG. 2(b), it is preferable that the second connecting member 24 has a cylindrical flange portion 25 between the first thrust bearing 26a and the second thrust bearing 26b that abuts the first thrust bearing 26a and the second thrust bearing 26b. The reason for this is that the spindle and preload member allow the thrust bearing to be firmly pressed against the flange portion, more effectively suppressing play in the thrust direction of the spindle and enabling precise movement.

[0058] As shown in FIG. 3(b), the dimensions of the gripping portion of the bearing member 26 in the second connecting member 24 are preferably such that the axial length Lc is within a range of 4 to 40 mm, and the width Ld is within a range of 4 to 40 mm. The reason for this is that by using such lengths and widths, play such as yawing can be effectively restricted, and the movable stage can be slid with greater precision. Therefore, it is more preferable to set the axial length to a value within the range of 5 to 35 mm and the width to a value within the range of 5 to 35 mm, and it is even more preferable to set the axial length to a value within the range of 6 to 30 mm and the width to a value within the range of 6 to 30 mm.

[0059] Furthermore, the constituent material of the second connecting member is not particularly limited, but is preferably at least one of special purpose steel materials such as SUS, SUH, SUJ, SUP, and SUM, and tool steel materials such as SK, SKS, SKD, SKT, and SKH. Among these, it is particularly preferable to use SUS303, SUS440, SKS, and SKD.

[0060] Furthermore, the outer diameter of the bearing member along the direction perpendicular to the axial direction is preferably set to a value within the range of 5 to 50 mm. The reason for this is that such an outer diameter allows for more stable fitting with the second connecting member, and ensures sufficient strength for use. Therefore, the outer diameter of the bearing member is more preferably set to a value within the range of 8 to 40 mm, and even more preferably to a value within the range of 10 to 30 mm.

[0061] The inner diameter of the bearing member along the direction perpendicular to the axial direction is preferably set to a value usually within the range of 2 to 40 mm, although this depends on the outer diameter of the spindle, etc. The reason for this is that by using such an inner diameter, the spindle can be supported for rotation in a more stable manner.

[0062] Furthermore, the attachment positions of the first connecting member and the second connecting member are not particularly limited as long as they are on the side surfaces of the stage mechanism along the sliding direction, but it is preferable that a predetermined relational expression is satisfied as shown in Figure 5. Specifically, as shown in Figure 6, when the sliding direction is the left-right direction and the side surface on the first connecting member side is the reference position P0 (mm), it is preferable that the distance P1 (mm) to one end of the guide member, the distance P4 (mm) to the other end of the guide member, the distance P2 (mm) to the corner on the P0 side of the first connecting member, and the distance P3 (mm) to the corner on the opposite side from the P0 side of the second connecting member satisfy the following relational expression (1).

[0063]

number

[0064] The reason for this is that the feed mechanism can more effectively restrict play such as yawing that occurs when the movable stage is slid, allowing for more accurate movement.

[0065] Furthermore, it is generally preferable that the distance P2 from P0 to the corner of the first connecting member on the P0 side be set to a value within the range of 5 to 80 mm. The reason for this is that such a configuration improves the balance of the microhead arrangement, allowing for further miniaturization. Therefore, it is more preferable that the distance P2 be set to a value within the range of 8 to 60 mm, and even more preferable that the distance P2 be set to a value within the range of 10 to 40 mm.

[0066] Furthermore, it is generally preferable that the distance P3 from P0 to the corner of the second connecting member opposite to the P0 side be set to a value within the range of 10 to 150 mm. The reason for this is that such a configuration improves the balance of the microhead arrangement, allowing for further miniaturization. Therefore, it is more preferable that the distance P3 be set to a value within the range of 13 to 130 mm, and even more preferable that the distance P3 be set to a value within the range of 15 to 100 mm.

[0067] 6. Composition (5) Configuration (5) is an essential configuration requirement that the bearing member has at least a first thrust bearing and a second thrust bearing adjacent to the first thrust bearing along the axial direction of the spindle, as shown in FIG. 1. Therefore, with this configuration, play in the thrust direction along the axial direction of the spindle can be effectively restricted.

[0068] Furthermore, as shown in Figure 4(a), it is preferable that the first thrust bearing 26a and the second thrust bearing 26b each have a shaft washer 26' fitted and fixed to the outer peripheral surface of the spindle 21a or the preload member 26c, a housing washer 26'' fitted and fixed to the counterbore portion of the second connecting member 24, and a rotating body 26''' sandwiched between the shaft washer 26' and the housing washer 26''. In other words, it is preferable to have a retaining disc between the bearing washer on the spindle side and the bearing washer on the second connecting member side as the housing, in which a plurality of spherical or roller-shaped members that are rotating bodies are arranged in a circle. The reason for this is that it reduces friction caused by the rotation of the bearing washer, making it easier to operate and improving operability.

[0069] As shown in FIG. 4(a), it is preferable that the housing washers 26'' of the first thrust bearing 26a and the second thrust bearing 26b are disposed opposite each other. The reason for this is that, because the housing washer faces each other, the shaft washer can be facing outward, and by sandwiching and pressing from the front and back with the spindle and the preload member described below, preload can be applied more effectively in the direction in which they attract each other. Therefore, the play in the thrust direction of the spindle can be more effectively suppressed.

[0070] As shown in FIG. 4(b), the bearing member preferably has, for example, a shaft washer 26' or a housing washer 26'' on the rotor 26''' side, in which a circular groove is provided as a rotor guide. The reason for this is that such a configuration allows each bearing washer to rotate more smoothly.

[0071] As shown in FIG. 4(c), it is preferable to have at least one of a shaft washer 27' having a smooth surface on the rotor 26''' side, or a housing washer 27'' having a smooth surface on the rotor 26''' side. The reason for this is that by making the surface of at least one of the bearing washer surfaces smooth, it is possible to more effectively prevent eccentricity of rotation caused by slight distortion in the shape of the rotor guide.

[0072] 7. Composition (6) The configuration (6) is an essential configuration requirement that a preload member 26c is provided to apply a preload to the bearing member along the axial direction, as shown in FIG. Therefore, with this configuration, the bearing member can be pressed against the microhead side with a predetermined pressure, and play along the axial direction can be easily reduced.

[0073] Specifically, the preload member preferably has a head portion that abuts against the second thrust bearing and is a screw member that screws onto the tip of the spindle along the axial direction. That is, it is preferable to use a configuration in which the screw head is used as a press and the bearing member is sandwiched between the spindle and the screw member. The reason for this is that the preload can be adjusted by the amount of tightening of the screw member, and play in the thrust direction of the spindle can be more effectively suppressed.

[0074] Furthermore, the diameter of the head portion of the preload member is not particularly limited as long as it is large enough to abut against the second thrust bearing, but it is usually preferable to set it to a value within the range of 3 to 25 mm. The reason for this is that the bearing member can be brought into contact with the inner peripheral side thereof, and the preload can be applied more effectively along the axial direction without dispersing the preload. Therefore, it is more preferable that the diameter of the head portion of the preload member is set to a value within the range of 5 to 20 mm, and even more preferable that it is set to a value within the range of 8 to 15 mm.

[0075] The preload member is not particularly limited as long as it is configured to apply a pressure that does not loosen the bearing member, but it is usually preferable that it be configured to apply a pressure of 1 to 30N. The reason for this is that such pressure can more effectively suppress play in the thrust bearing. Therefore, it is more preferable to apply a pressure of 3 to 25 N, and even more preferable to apply a pressure of 5 to 20 N.

[0076] 8. Other configurations (1) Pressing member The stage mechanism of the first embodiment preferably includes, as other components, a pressing member that connects the fixed stage and the movable stage. Specifically, as shown in FIG. 1, the pressing member 15 is preferably a flat screw that passes through the pressing groove 14a and is threaded into the screw hole 12b of the fixed stage 12, and is a member that presses the movable stage 14 by sandwiching it between the screw head and the fixed stage 12 via the washer 15a. The reason for this is that with this configuration, even though the microhead is mounted on the side of the stage mechanism, it is possible to effectively restrict play in the thickness direction in addition to restricting play such as yawing. This is because the straightness of the spindle can be improved more easily.

[0077] Furthermore, when the stage mechanism includes a pressing member, it is preferable that the pressing member be disposed along the side surface opposite to the sliding surface of the guide member. The reason for this is that by arranging the guide member and the pressing member adjacent to each other, the area that the pressing member and the guide member occupy on the movable stage surface can be reduced, making it easier to make the entire stage mechanism smaller. In addition, the fixed stage and the movable stage can be pressed in the vicinity of the guide member, so that even if the screw member is made small, precise movement can be ensured and the stage mechanism itself can be made easily small.

[0078] As shown in FIG. 1, it is preferable that the movable stage 14 is provided with a pressing groove 14a so that it can slide while being pressed by the pressing member 13b. Specifically, it is preferable that a countersunk portion 14b into which the head portion of the pressing member is embedded is provided on the surface side of the movable stage 14, and that an elongated hole portion 14c is provided which penetrates the movable stage 14 in the thickness direction and is long in the sliding direction.

[0079] (2) Opening for attaching the workpiece Furthermore, it is preferable that the stage mechanism have an opening for attaching a workpiece inside the outer edge that corresponds to the outline when viewed from above. That is, as shown in Figures 5(a) to (c), it is preferable to use a transmission type stage mechanism 30 having an opening 32 for attaching a workpiece, which consists of a through hole 32a in the opening for attaching a workpiece and a through hole 32b in the movable stage 14. The reason for this is that having such an opening improves ease of use, and furthermore, with such an opening, the stage device can be placed in a predetermined position and the diameter of the opening, etc., can be determined while keeping the device small.

[0080] Here, it is preferable that at least one of the through holes (32a, 32b) has an elongated hole shape having a major axis along the sliding direction. The reason for this is that even if the fixed stage and the movable stage are displaced by sliding, a larger area of ​​the opening can be ensured.

[0081] Furthermore, it is generally preferable that the diameter (circular equivalent diameter) of the opening for attaching the workpiece in the direction perpendicular to the sliding direction is set to a value within the range of 8 to 140 mm. The reason for this is that, for example, when the guide members are arranged side by side at a predetermined interval, the area between the guide members can be widely used to form a large-diameter opening. Therefore, it is more preferable that the diameter of the through-hole be set to a value within the range of 10 to 80 mm, and even more preferable that it be set to a value within the range of 15 to 40 mm.

[0082] [Second embodiment] The second embodiment is a method of using the stage mechanism of the first embodiment, characterized in that it comprises the following steps (A) to (C). (A) A process of attaching the stage mechanism to a predetermined position. (B) A process of fixing a predetermined workpiece to the surface of the movable stage. (C) A process in which the microhead slides the movable stage along the surface of the fixed stage to move the specified workpiece. Hereinafter, an embodiment of a method of using a stage mechanism of the present invention will be specifically described with reference to the drawings as appropriate, but descriptions of parts that overlap with the first embodiment will be omitted as appropriate.

[0083] 1.Process (A) Step (A), as shown by the symbol S1 in FIG. 7, is a step of placing the stage mechanism at the location where it will be used. That is, the fixing method at the mounting position can be any general fixing method and is not particularly limited, but it is preferable to provide stage fixing holes 12d (see Figure 1) at the four corners of the fixed stage and to fix it from the surface side with screws into screw holes provided at the position where it will be placed. The reason for this is that the stage mechanism can be mounted with greater precision. On the other hand, it is also preferable to provide a female screw in the stage fixing hole and fix it with a screw from the back side.

[0084] 2.Process (B) Step (B), as shown by the symbol S2 in FIG. 7, is a step of fixing a predetermined workpiece to the surface of the movable stage. The method for fixing the specified workpiece can be any general fixing method and is not particularly limited, but it is preferable to provide screw holes as workpiece fixing holes 14d (see Figure 1) at the four corners of the movable stage and fix the workpiece with screws from the surface side. The reason for this is that even when the movable stage is slid, play such as yawing of the predetermined workpiece can be easily restricted, allowing for precise movement.

[0085] Here, the predetermined workpiece is not particularly limited as long as it can be placed on the surface of a movable stage and moved precisely, but is preferably, for example, a camera, an optical lens, a polarizing plate, a laser oscillator, a drill, a measuring instrument, a measuring probe, a semiconductor wafer, an object to be measured, an object to be processed, etc. The reason for this is that this type of device can be used in many areas where precision movement is required.

[0086] 3.Process (C) Step (C) is a step in which the microhead slides the movable stage to move a predetermined workpiece fixed to the movable stage. Specifically, first, as shown by the symbol S3 in FIG. 7, the fixed stage and the microhead fixed to the side of the movable stage are driven to move the spindle along the axial direction. Next, as shown by reference symbol S4, the spindle moves, thereby indirectly pressing the movable stage connected to the spindle and causing it to slide along the surface of the fixed stage. Then, as indicated by the reference symbol S5, the predetermined workpiece fixed to the movable stage is moved together with the movable stage. The reason for this is that by implementing it in this way, it is possible to use a small stage mechanism and move the workpiece with precision. [Industrial Applicability]

[0087] As described above, the stage mechanism and method of using the stage mechanism of the present invention make it possible to move a workpiece precisely even with a simple configuration. Therefore, it is expected that the stage mechanism can be used to precisely move a camera, microscope, electrode, light, lens, sensor, or the like, fixed as a predetermined workpiece. Furthermore, by creating an opening in the stage for attaching a workpiece, a camera or the like fixed to the surface of the movable stage can be extended to the fixed stage side without providing an arm or the like on the side, and it is expected that the stage can be used as a simple transmission stage that allows precise movement of a specified workpiece. [Explanation of symbols]

[0088] 10, 30: Stage mechanism 12: Fixed stage 12a: Fitting groove 14: Movable stage 15: Pressing member 16: Guide member 16a: Sliding surface 18: Guide groove 21: Micro Head 21a:Spindle 21a´:Step section 21a´´: Bearing insert 21b: Sleeve 21c: Thimble 22: First connecting member 24: Second connecting member 26: Bearing material 26a: First thrust bearing 26b: Second thrust bearing 26c: Preload member 26d: Cylindrical member 26´: Shaft washer 26´´:Housing race 26´´´: Rotating body 32: Opening for attaching workpiece

Claims

1. A flat stage mechanism comprising a pair of fixed stages and a movable stage, characterized in that the stage mechanism has the following configurations (1) to (6). (1) A microhead is provided on the side surface of the fixed stage and the movable stage, and slides the movable stage along the surface of the fixed stage. (2) The microhead has a spindle having a male threaded portion, a sleeve into which the spindle is incorporated, and a thimble into which a portion of the sleeve is inserted and which is connected to one end of the spindle and which rotates together with the spindle. (3) A first connecting member for fixing and supporting the sleeve is provided on the side surface of the fixed stage. (4) A second connecting member is provided on the side surface of the movable stage, which supports the spindle for rotation via a bearing member. (5) The bearing member includes at least a first thrust bearing and a second thrust bearing adjacent to the first thrust bearing along the axial direction of the spindle. (6) A preload member is provided to apply a preload to the bearing member along the axial direction.

2. 2. The stage mechanism according to claim 1, wherein the first thrust bearing and the second thrust bearing each have a shaft washer fitted and fixed to the outer peripheral surface of the spindle, a housing washer fitted and fixed to a counterbore portion of the second connecting member, and a rotating body sandwiched between the shaft washer and the housing washer, and the housing washer of the first thrust bearing and the second thrust bearing are arranged opposite each other.

3. 3. The stage mechanism according to claim 1, wherein the second connecting member has a cylindrical flange portion between the first thrust bearing and the second thrust bearing, the flange portion abutting the first thrust bearing and the second thrust bearing.

4. The stage mechanism according to any one of claims 1 to 3, characterized in that the spindle has a stepped portion that abuts against the bearing member to fix its position, and a bearing insertion portion that is inserted into the bearing member at a tip side of the stepped portion.

5. 5. The stage mechanism according to claim 1, wherein the preload member is a screw member that is screwed onto the tip of the spindle along the axial direction.

6. 6. The stage mechanism according to claim 1, further comprising a pressing member that connects the fixed stage and the movable stage.

7. A stage mechanism according to any one of claims 1 to 6, characterized in that a long guide member is provided on the surface of the fixed stage or on the back surface of the movable stage along the sliding direction of the movable stage.

8. A method for using the stage mechanism according to any one of claims 1 to 7, comprising the following steps (A) to (C): (A) A step of attaching the stage mechanism to a predetermined position. (B) A step of fixing a predetermined workpiece to the surface of the movable stage. (C) A step of sliding the movable stage along the surface of the fixed stage by the microhead to move the predetermined workpiece.

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