SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

Abstract

A substrate processing module 14 of this substrate processing device 10 includes: a first tank and a second tank 32, 30 which are arranged in a first direction and in which a substrate can be disposed; first transport units 34, 36 that move a substrate W into the second tank 30 and the first tank 32; and a second transport unit 20 that transports the substrate W in a second direction crossing the first direction, and that transfers the substrate W to / from the first transport units 34, 36. The second transport unit 20 includes: a chuck 26 that holds the substrate W and passes above the first tank 32; and an actuator 25 that moves the chuck 26 in the second direction. The actuator 25 of the second transport unit 20 is disposed on the first tank 32 side in the first direction in the substrate processing module 14.

Description

[Technical Field]

[0001] The present invention relates to a substrate processing module for processing a substrate and a substrate processing apparatus including the same. [Background technology]

[0002] Patent Document 1 discloses a substrate processing apparatus having multiple pairs of chemical tanks and cleaning tanks arranged in the longitudinal direction of the apparatus, as well as a main transport mechanism and an auxiliary transport mechanism. The main transport mechanism moves multiple substrates in the longitudinal direction from one end of the apparatus to the other. The auxiliary transport mechanism moves the multiple substrates in the longitudinal direction and up and down within the range of the pair of chemical tanks and cleaning tanks. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2018-56158 Summary of the Invention [Problem to be solved by the invention]

[0004] In the substrate processing apparatus described in Patent Document 1, multiple processing tanks such as chemical tanks and cleaning tanks are lined up in the main substrate transport direction of the main transport mechanism. Therefore, as the number of processing tanks increases, the size of the substrate processing apparatus in the main substrate transport direction increases.

[0005] Therefore, an object of the present invention is to prevent an increase in the size of a substrate processing apparatus due to an increase in the number of processing tanks. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems, according to one aspect of the present invention, A substrate processing module for processing a substrate, a first tank and a second tank arranged in a first direction and capable of accommodating a substrate; a first transfer unit that transfers the substrate to the first tank and the second tank; a second transport unit that transports the substrate in a second direction intersecting the first direction and transfers the substrate to and from the first transport unit, the second transfer unit includes a chuck that holds the substrate and passes above the first tank, and an actuator that moves the chuck in the second direction; The substrate processing module is provided, in which the actuator of the second transfer section is disposed on the first tank side in the first direction in the substrate processing module.

[0007] According to another aspect of the present invention, A substrate processing apparatus is provided that includes the substrate processing module and another module coupled to the substrate processing module in the second direction. [Effects of the Invention]

[0008] According to the present invention, it is possible to prevent the substrate processing apparatus from becoming larger in size due to an increase in the number of processing tanks. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a perspective view of a substrate processing apparatus according to a first embodiment of the present invention; [Figure 2] 1 is a perspective view of a chemical module in a substrate processing apparatus; [Figure 3A] FIG. 10 is a perspective view showing a state in which a first chuck of one first transfer unit and a second chuck of the other first transfer unit are positioned above a first tank and a second tank, respectively; [Figure 3B] FIG. 10 is a perspective view showing a state in which a first chuck of one first transfer unit and a second chuck of the other first transfer unit are positioned inside the first tank and the second tank, respectively; [Figure 3C] FIG. 10 is a perspective view showing a state in which both a first chuck of one first transfer unit and a second chuck of the other first transfer unit are positioned above the first tank; [Figure 4A]FIG. 10 is a side view showing a state in which a first chuck of one first transfer unit and a second chuck of the other first transfer unit are positioned above a first tank and a second tank, respectively. [Figure 4B] FIG. 10 is a side view showing a state in which a first chuck of one first transfer unit and a second chuck of the other first transfer unit are positioned inside the first tank and the second tank, respectively. [Figure 4C] FIG. 10 is a side view showing a state in which both the first chuck of one first transfer unit and the second chuck of the other first transfer unit are positioned above the first tank. [Figure 5] FIG. 10 is a top view showing a state in which both the first chuck of one first transfer unit and the second chuck of the other first transfer unit are positioned above the first tank. [Figure 6] Diagram showing the transfer of a substrate between the first chuck and the second chuck [Figure 7] FIG. 10 is a perspective view of a second transfer unit holding a substrate in the substrate processing apparatus according to the first embodiment; [Figure 8] FIG. 1 is a perspective view showing a chuck in a second transfer unit of the substrate processing apparatus according to the first embodiment; [Figure 9] Diagram showing the chuck holding and releasing the substrate [Figure 10] FIG. 10 is a diagram illustrating the transfer of a substrate from a chuck of the second transfer unit to a second chuck of the other first transfer unit. [Figure 11] FIG. 10 is a diagram showing the transfer of a substrate from a first chuck of one of the first transfer units to a chuck of the second transfer unit. [Figure 12A] FIG. 10 is a diagram showing an operation in an example of substrate processing performed by the substrate processing apparatus. [Figure 12B] 12B shows the operation following the operation shown in FIG. 12A. [Figure 12C] FIG. 12C shows the operation following the operation shown in FIG. 12B. [Figure 12D] 12D shows the operation following the operation shown in FIG. 12C. [Figure 12E] 12D shows the operation following the operation shown in FIG. 12D. [Figure 12F] 12B shows the operation following the operation shown in FIG. 12E. [Figure 12G] 12F shows the operation following the operation shown in FIG. 12F. [Figure 12H] 12B shows the operation following the operation shown in FIG. 12G. [Figure 12I] 12H shows the operation following the operation shown in FIG. 12H. [Figure 12J] 12A and 12B show operations subsequent to the operations shown in FIG. 12I. [Figure 13] FIG. 10 is a side view of a chemical module in the substrate processing apparatus according to the second embodiment. [Figure 14] FIG. 10 is a side view of a chemical module in the substrate processing apparatus according to the third embodiment. [Figure 15] FIG. 11 is a perspective view of a second transfer unit holding a substrate in the substrate processing apparatus according to the third embodiment; [Figure 16] FIG. 11 is a perspective view showing a chuck in a second transfer unit of a substrate processing apparatus according to a third embodiment; [Figure 17] FIG. 13 is a perspective view showing a plurality of first transport units in a modification of the third embodiment. [Figure 18] FIG. 10 is a side view of a chemical module in the substrate processing apparatus according to the fourth embodiment. [Figure 19] FIG. 11 is a perspective view of a second transfer unit holding a substrate in the substrate processing apparatus according to the fourth embodiment; [Figure 20] FIG. 10 is a perspective view showing a chuck in a second transfer unit of a substrate processing apparatus according to a fourth embodiment; [Figure 21] FIG. 13 is a side view of a chemical module in the substrate processing apparatus according to the fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] A substrate processing module according to one embodiment of the present invention is a substrate processing module for processing substrates, comprising: a first tank and a second tank arranged in a first direction and capable of placing substrates; a first transport unit that transports the substrate to the first tank and the second tank; and a second transport unit that transports the substrate in a second direction intersecting the first direction and transfers the substrate to and from the first transport unit, wherein the second transport unit comprises a chuck that holds the substrate and passes above the first tank, and an actuator that moves the chuck in the second direction, and the actuator of the second transport unit is positioned on the first tank side in the first direction in the substrate processing module.

[0011] According to this aspect, it is possible to prevent the substrate processing apparatus from becoming larger in size due to an increase in the number of processing tanks.

[0012] For example, the actuator of the second transfer unit may be disposed above or below the first tank.

[0013] For example, the actuator of the second transfer unit may be disposed above the first tank.

[0014] For example, the actuator of the second transport unit may be disposed in a drive space isolated from a processing space in which the first tank and the second tank are disposed.

[0015] A top plate portion may be provided above the processing space, and the drive space may be located above the top plate portion.

[0016] For example, the second transfer unit may include an arm extending in the height direction so as to connect the actuator and the chuck, and the arm is preferably located forward of the first tank.

[0017] For example, the substrate processing module may have a hanging plate that separates the space above the first tank from the arm.

[0018] For example, there may be two first transfer units, one of which includes a first chuck that can move into the first tank while holding the substrate, and the other of which includes a second chuck that can move into the second tank while holding the substrate and can move above the first tank, and the first chuck and the second chuck are configured to allow the substrate to be transferred between them.

[0019] A substrate processing apparatus according to another aspect of the present invention includes the substrate processing module and another module coupled to the substrate processing module in the second direction.

[0020] According to this aspect, it is possible to prevent the substrate processing apparatus from becoming larger in size due to an increase in the number of processing tanks.

[0021] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0022] (Embodiment 1) 1 is a perspective view of a substrate processing apparatus according to a first embodiment of the present invention. Note that the XYZ Cartesian coordinate system shown in the figure is intended to facilitate understanding of the invention and is not intended to limit the invention. The X-axis direction is the front-rear direction (first direction) of the substrate processing apparatus, the Y-axis direction is the left-right direction (second direction), and the Z-axis direction is the height direction (third direction).

[0023] 1, the substrate processing apparatus 10 according to the first embodiment is an apparatus for processing a substrate W, and is configured by connecting a plurality of modules each having a different function in the Y-axis direction (second direction). The substrate W is a circular thin plate, such as a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, a substrate for an optical disk, a MEMS sensor substrate, or a solar cell panel.

[0024] In the first embodiment, the substrate processing apparatus 10 includes a load module 12, a chemical module (substrate processing module) 14, a drying module 16, and an unload module 18. These modules 12, 14, 16, and 18 are connected in the Y-axis direction (second direction). A substrate W is loaded into the load module 12 from outside, and in the chemical module 14, the substrate W loaded into the load module 12 is subjected to chemical processing. In the drying module 16, the substrate W that has been processed in the chemical module 14 is subjected to drying processing. The substrate W that has been dried in the drying module 16 is unloaded from the unload module 18 to the outside. The module configuration may be changed depending on the type of substrate W and the processing content. For example, the substrate processing apparatus 10 may include multiple chemical modules 14 that perform different processes on the substrate W.

[0025] The substrate processing apparatus 10 also has a second transport unit 20 that transports substrates W in the Y-axis direction (second direction) between the multiple modules. The second transport unit 20 includes an actuator 25 and a chuck 26 that is moved in the Y-axis direction by the actuator 25. The actuator 25 is composed of, for example, rails 22 that are provided on and connect the multiple modules 12 to 18, and a moving head 24 (moving body) that moves along the rails 22. The chuck 26 is supported by the moving head 24 to hold the substrate W. The moving head 24 moves along the rails 22 in the Y-axis direction, along which the multiple modules 12 to 18 are arranged, so that the chuck 26 moves so as to pass through each of the multiple modules 12 to 18. The second transport unit 20 will be described in detail later. In this way, the multiple substrates W are transported in the second direction.

[0026] FIG. 2 is a schematic perspective view of a chemical module in the substrate processing apparatus.

[0027] 2 performs various chemical treatments on the substrate W, such as various chemical cleaning methods including APM (ammonium hydroxide-hydrogen peroxide mixture) cleaning, SPM (sulfuric acid-hydrogen peroxide mixture) cleaning, HPM (hydrochloric acid-hydrogen peroxide mixture), and DHF (diluted hydrofluoric acid) cleaning, as well as various chemical treatments such as etching and resist stripping. These chemical treatments can be combined as desired depending on the type of chemical treatment to be performed on the substrate W.

[0028] The chemical module 14 of the substrate processing apparatus 10 has a first tank 32 and a second tank 30 arranged in the X-axis direction (first direction) as processing tanks for processing the substrate W, in which the substrate W can be placed. The second tank 30 is located at the rear side of the substrate processing apparatus 10, and the first tank 32 is located at the front side of the substrate processing apparatus 10. In the case of the first embodiment, the second tank 30 is a chemical tank that stores a chemical tank in which the substrate W is immersed, and the first tank 32 is a cleaning tank that stores a cleaning liquid such as pure water in which the substrate W that has been processed with the chemical liquid is immersed.

[0029] The chemical module 14 of the substrate processing apparatus 10 also has a plurality of first transport parts 34, 36 that move the substrate W up and down in the Z-axis direction (third direction).

[0030] Fig. 3A is a perspective view showing a state in which the first chuck of one first transfer unit and the second chuck of the other first transfer unit are positioned above the first tank and the second tank, respectively. Fig. 3B is a perspective view showing a state in which the first chuck of one first transfer unit and the second chuck of the other first transfer unit are positioned inside the first tank and the second tank, respectively. Fig. 3C is a perspective view showing a state in which both the first chuck of one first transfer unit and the second chuck of the other first transfer unit are positioned above the first tank.

[0031] Furthermore, Fig. 4A is a side view showing a state in which the first chuck of one first transfer unit and the second chuck of the other first transfer unit are positioned above the first tank and the second tank, respectively. Furthermore, Fig. 4B is a side view showing a state in which the first chuck of one first transfer unit and the second chuck of the other first transfer unit are positioned inside the first tank and the second tank, respectively. And Fig. 4C is a side view showing a state in which both the first chuck of one first transfer unit and the second chuck of the other first transfer unit are positioned above the first tank. Note that Fig. 3A corresponds to Fig. 4A, Fig. 3B corresponds to Fig. 4B, and Fig. 3C corresponds to Fig. 4C.

[0032] As shown in Figures 3A to 3C and 4A to 4C, in the case of this embodiment 1, the other first transport section 34 includes a second chuck 34a that holds multiple substrates W, an arm 34b that supports the second chuck 34a, an actuator 34c that raises and lowers the arm 34b in the Z-axis direction (third direction), and an actuator 34d that moves the actuator 34c in the X-axis direction (first direction).

[0033] The second chuck 34a can be raised and lowered by the actuator 34c, so that the second chuck 34a can be placed in the second tank 30, as shown in Figures 3B and 4B. The second chuck 34a can be moved between a position above the second tank 30 and a position above the first tank 32 by the actuator 34d, as shown in Figures 3A, 3C, 4A, and 4C.

[0034] In the present embodiment 1, the first transport section 36 includes a first chuck 36a that holds multiple substrates W, an arm 36b that supports the first chuck 36a, and an actuator 36c that raises and lowers the arm 36b in the Z-axis direction (third direction).

[0035] The first chuck 36a can be raised and lowered by the actuator 36c, thereby allowing the first chuck 36a to be placed in the first tank 32, as shown in Figures 3B and 4B. Note that in the case of the present embodiment 1, the first chuck 36a, unlike the second chuck 34a, does not move in the X-axis direction (first direction).

[0036] 3A, the actuators 34c and 34d of the first transfer section 34 are disposed on one side (the right side in the case of the first embodiment) in the Y-axis direction (second direction) relative to the second tank 30. The actuator 36c of the first transfer section 36 is disposed on one side in the X-axis direction (first direction) relative to the first tank 32, i.e., in front of the first tank 32 (the opposite side of the second tank 30 across the first tank 32).

[0037] As shown in FIG. 3A, in the first embodiment, the second chuck 34a of the first transfer part 34 and the first chuck 36a of the first transfer part 36 have corresponding shapes so that the substrate W can be transferred between them.

[0038] For example, in the case of the first embodiment, the second chuck 34a and the first chuck 36a are comb-shaped chucks when viewed from above (when viewed in the Z-axis direction).

[0039] Specifically, the second chuck 34a includes a main body 34e connected to the arm 34b and a plurality of support rods 34f extending forward from the main body 34e in the X-axis direction (first direction) and on which the plurality of substrates W are placed. Similarly, the first chuck 36a includes a main body 36d connected to the arm 36b and a plurality of support rods 36e extending backward from the main body 36d in the X-axis direction and on which the plurality of substrates W are placed. Each of the support rods 34f, 36e has a plurality of grooves (not shown) formed therein that engage with the outer circumferential edges of the plurality of substrates W to maintain the plurality of substrates W at a predetermined interval. As a result, the plurality of substrates W are held by the first and second chucks 36a, 34a in an overlapping state with intervals in the X-axis direction. In the first embodiment, the second chuck 34a and the first chuck 36a each include four support rods 34f, 36e. The number of support rods on which the substrate W is placed may be three or more, and may be different between the second chuck 34a and the first chuck 36a.

[0040] In the first embodiment, the second chuck 34a and the first chuck 36a are configured so that the respective plurality of support rods 34f, 36e can pass through each other in the Z-axis direction (third direction).

[0041] Fig. 5 is a top view showing a state in which both the first chuck of one first transfer unit and the second chuck of the other first transfer unit are positioned above the first tank, and Fig. 6 is a view showing the transfer of the substrate between the first chuck and the second chuck.

[0042] 5, in the first embodiment, the transfer of multiple substrates W between the second chuck 34a and the first chuck 36a is performed above the first tank 32. During the transfer of the substrates W, the multiple support rods 34f of the second chuck 34a and the multiple support rods 36e of the first chuck 36a are positioned between the main body 34e of the second chuck 34a and the main body 36d of the first chuck 36a. This allows the multiple support rods 34f of the second chuck 34a and the multiple support rods 36e of the first chuck 36a to come into contact with the multiple substrates W simultaneously, as shown in FIG.

[0043] 5 and 6, when transferring the substrates W, the support rods 34f of the second chuck 34a and the multiple support rods 36e of the first chuck 36a do not overlap in the Z-axis direction (third direction) of the first and second chucks 36a, 34a. Therefore, the first and second chucks 36a, 34a can pass each other in the Z-axis direction without their support rods coming into contact with each other. For example, when the second chuck 34a is lowered from the state shown in FIG. 6, the multiple substrates W remain on the multiple support rods 36e of the first chuck 36a, and the multiple substrates W are transferred to the first chuck 36a.

[0044] In the present embodiment 1, the plurality of substrates W are supplied by the second transport unit 20 from the loading module 12 to the second chuck 34a of the first transport unit 34, and then transferred from the second chuck 34a to the first chuck 36a of the first transport unit 36. The plurality of substrates W on the first chuck 36a are then collected by the second transport unit 20 and transported to the drying module 16. In the present embodiment 1, the supply of the substrates W to the second chuck 34a of the first transport unit 34 and the collection of the substrates W from the first chuck 36a of the first transport unit 36 ​​are performed by the common second transport unit 20.

[0045] Fig. 7 is a perspective view of a second transport unit holding a substrate in the substrate processing apparatus according to embodiment 1. Fig. 8 is a perspective view showing a chuck in the second transport unit. Fig. 9 is a view showing the chuck holding and releasing the substrate.

[0046] As shown in Fig. 1, in the first embodiment, the moving head 24 of the actuator 25 of the second transfer section 20 is disposed in front of and above the substrate processing apparatus 10 (i.e., each of the modules 12 to 18) and moves on rails 22 extending in the Y-axis direction (second direction). As shown in Figs. 4A to 4C, in the chemical module 14, the actuator 25 is disposed on the first tank 32 side in the X-axis direction (first direction). Furthermore, in the first embodiment, the actuator 25 is positioned above the first tank 32. Therefore, the moving head 24 of the actuator 25 moves above the first tank 32 in the Y-axis direction.

[0047] In the case of the first embodiment, as shown in FIGS. 4A to 4C, in the chemical module 14, the actuator 25 of the second transfer section 20 is 30 The actuator 25 is disposed in a drive space S2 isolated from the processing space S1 in which the actuator 25 is disposed. The drive space S2 is provided above the processing space S1. The actuator 25 is installed on an inner top plate 14a of the chemical module 14 that separates the processing space S1 and the drive space S2. That is, the inner top plate 14a is present between the first tank 32 and the moving head 24 that moves on the rails 22 of the actuator 25. This inner top plate 14a prevents foreign matter generated by the movement of the moving head 24 on the rails 22 from falling into the first tank 32.

[0048] In the present embodiment, the chemical module 14 has an inner top panel 14a and an outer top panel 14b disposed above the inner top panel 14a. The actuator 25 is disposed in a drive space S2 formed between the inner top panel 14a and the outer top panel 14b.

[0049] 8, in the first embodiment, the chuck 26 in the second transfer section 20 includes a pair of chuck jaws 26a that rotate about a rotation center line C1 extending in the X-axis direction (first direction) of the substrate processing apparatus 10. The chuck jaws 26a are arranged to face each other in the Y-axis direction (second direction) of the substrate processing apparatus 10.

[0050] As shown in FIG. 9, the chuck jaws 26a of the chuck 26 have a non-circular shape when viewed in the direction in which the rotation center line C1 extends (i.e., when viewed in the X-axis direction (first direction)), and in the case of the first embodiment, have an oval shape. In the case of the first embodiment, the rotation center line C1 passes through the geometric center of the chuck jaws 26a when viewed in the first direction. Note that the rotation center line C1 may be off the geometric center as long as the chuck jaws 26a can hold multiple substrates W. Furthermore, the shape of the chuck jaws 26a is not particularly limited as long as the function of the chuck 26 is not impaired, and may be, for example, an elliptical shape, a rectangular shape, a triangular shape, or the like. Each of the chuck jaws 26a has a first support surface 26b and a second support surface 26c that support the outer peripheral edges of multiple substrates W.

[0051] 9, the chuck 26 holds or releases the substrate W by rotating each of the pair of chuck jaws 26a. Specifically, the chuck 26 can hold the substrate W by each of the pair of chuck jaws 26a taking a holding position (position shown by a solid line) in which the shortest distance D1 between the pair of chuck jaws 26a is smaller than the size w1 of the substrate W in the Y-axis direction (second direction) of the substrate processing apparatus 10. Also, the chuck 26 can release the substrate W by each of the pair of chuck jaws 26a taking a release position (position shown by a broken line) in which the shortest distance D1 is larger than the size w1 of the substrate W in the Y-axis direction. In other words, when the pair of chuck jaws 26a takes the release position, the substrate W can pass between the pair of chuck jaws 26a in the Z-axis direction (third direction) of the substrate processing apparatus 10. In addition, the first and second support surfaces 26b, 26c of each pair of chuck claws 26a are formed with a plurality of grooves (not shown) that engage with the outer peripheral edges of each of the plurality of substrates W to maintain the plurality of substrates W at a predetermined distance.

[0052] 4A to 4C, the chuck 26 is disposed above the first tank 32. As the moving head 24 of the actuator 25 moves in the Y-axis direction (second direction), the chuck 26 passes above the first tank 32 in the Y-axis direction. For this purpose, the second transfer unit 20 includes an arm 28 that connects the moving head 24 and the chuck 26.

[0053] In the first embodiment, as shown in Figures 4A to 4C, the moving head 24 is disposed above the chuck 26. Therefore, the arm 28 connecting them extends in the height direction (Z-axis direction) of the substrate processing apparatus 10, and supports the chuck 26 at its lower end. The arm 28 extending in this height direction is less likely to bend than an arm extending in the X-axis direction (first direction).

[0054] More specifically, if the moving head 24 is not located above the chuck 26, the arm 28 will have at least a portion extending in the X-axis direction (first direction). This portion of the arm 28 extending in the first direction is likely to bend significantly due to its own weight and the weight of the chuck 26. In particular, when the moving head 24 stops, the arm 28 is likely to bend significantly due to the inertia of the chuck 26.

[0055] 4A to 4C, the arm 28 extends at a position away from above the first tank 32. Specifically, as shown in FIG. 4B, the arm 28 does not extend within the processing space S1 and within a space S3 above the first tank 32. As a result, the arm 28 does not pass above the first tank 32. This prevents foreign matter adhering to the arm 28 from falling into the first tank 32.

[0056] 4B, in the present embodiment 1, the chemical module 14 has a hanging plate 14c that separates the space S3 above the first tank 32 from the arm 28 when viewed in the Y-axis direction (second direction). The hanging plate 14c extends from the inner top plate portion 14a in the Z-axis direction (third direction). The hanging plate 14c prevents foreign matter adhering to the arm 28 from moving toward the first tank 32.

[0057] In the first embodiment, the chemical module 14 has a hanging plate 14c and an outer wall portion 14d disposed outside the hanging plate 14c. The arm 28 moves between the hanging plate 14c and the outer wall portion 14d.

[0058] As described above, the chuck 26 of the second transfer section 20 passes above the first tank 32 in the Y-axis direction (second direction). Therefore, the transfer of the substrate W from the chuck 26 to the second chuck 34a of the first transfer section 34 (i.e., the supply of the substrate W) is performed above the first tank 32.

[0059] FIG. 10 is a diagram showing the transfer of the substrate from the chuck of the second transfer unit to the second chuck of the other first transfer unit.

[0060] First, the chuck 26 of the second transfer unit 20, which has received the plurality of substrates W from the load module 12, arrives above the first tank 32 of the chemical module 14. Before or after this arrival, the plurality of support rods 34f of the second chuck 34a of the first transfer unit 34 are positioned below the chuck 26. Next, the second chuck 34a rises, and the plurality of support rods 34f come into contact with the outer circumferential edges of the plurality of substrates W held by the chuck 26. When the plurality of support rods 34f come into contact with the plurality of substrates W, the pair of chuck claws 26a of the chuck 26 rotates, releasing the plurality of substrates W. This completes the transfer of the substrates W from the chuck 26 to the second chuck 34a. After receiving the substrates W, the second chuck 34a moves above the second tank 30 in the X-axis direction (first direction), and then moves into the second tank 30. When the movement of the second chuck 34a to the second tank 30 is completed, the chuck 26 becomes movable in the Y-axis direction (second direction).

[0061] The transfer of the substrate W from the first chuck 36a of the first transfer section 36 to the chuck 26 (ie, the recovery of the substrate W) also takes place above the first tank 32.

[0062] FIG. 11 is a diagram showing the transfer of a substrate from the first chuck of one of the first transfer units to the chuck of the second transfer unit.

[0063] First, the chuck 26 of the second transfer unit 20 arrives above the first tank 32 of the chemical module 14. Then, the pair of chuck jaws 26a of the chuck 26 assumes a release position, which allows the substrates W to pass between them in the Z-axis direction (third direction). Thereafter, the first chuck 36a of the first transfer unit 36 ​​moves upward from within the first tank 32 while holding multiple substrates W. When some of the multiple substrates W pass between the pair of chuck jaws 26a, the pair of chuck jaws 26a rotates and assumes a holding position from the release position. This completes the transfer of the substrates W to the pair of chuck jaws 26a. Once the transfer is complete, the first chuck 36a descends and moves into the first tank 32. Once this movement is complete, the chuck 26 becomes movable in the Y-axis direction (second direction).

[0064] Supplementally, when substrates W are transferred from the first chuck 36a of the first transfer unit 36 ​​to the chuck 26, the arm 36b of the first transfer unit 36 ​​and the chuck claws 26a of the chuck 26 overlap when viewed in the Y-axis direction (second direction), as shown in Fig. 4A. That is, the arm 36b is located between the pair of chuck claws 26a when viewed from above (when viewed in the Z-axis direction). In this state, the chuck 26 cannot move in the Y-axis direction, so the first chuck 36a, which has transferred multiple substrates W to the chuck 26, retreats into the first tank 32. As a result, the chuck 26 can move in the Y-axis direction without being obstructed by the arm 36b, as shown in Fig. 4B.

[0065] In the first embodiment, as described above, the chuck 26 of the second transfer unit 20 transfers the substrate W from the loading module 12 to the second chuck 34a of the first transfer unit 34 in the chemical module 14, and also transfers the substrate W from the first chuck 36a of the first transfer unit 36 ​​to the drying module 16. That is, the chuck 26 transfers the dry unprocessed substrate W and the processed substrate W that is wet with the cleaning liquid in the first tank 32. To this end, the pair of chuck claws 26a of the chuck 26 includes a first support surface 26b for supporting the dry substrate W and a second support surface 26c for supporting the wet substrate W, as shown in FIG. 9 . This prevents the dry substrate W from being supported by the wet support surface. In order to prevent the cleaning liquid on the second support surface 26c from transferring onto the first support surface 26b, a groove 26d extending in the X-axis direction (first direction) along which the rotation center line C1 of the chuck jaws 26a extends is formed between the first support surface 26b and the second support surface 26c. A nozzle (not shown) for sucking and recovering the cleaning liquid accumulated in the groove 26d may be provided on the chuck jaws 26a.

[0066] So far, we have explained the configuration of the substrate processing apparatus 10. From here on, we will explain the operations related to the chemical module 14 of the substrate processing apparatus 10, that is, the operations of the first transfer units 34 and 36 and the second transfer unit 20.

[0067] 12A to 12J show a number of operations in an example of substrate processing performed by the substrate processing apparatus, each of which shows a side view (left) and a front view (right) of a chemical module.

[0068] 12A, first, the second chuck 34a of the first transfer section 34 waits at a position of reference height H0 (initial position) above the first tank 32. Also, the first chuck 36a of the first transfer section 36 waits in the first tank 32. In this state, the chuck 26 of the second transfer section 20 transports a plurality of substrates W (previous substrates W1) to be processed to a position above the first tank 32 at a level higher than the reference height H0.

[0069] 12B, the second chuck 34a of the first transport unit 34 rises, whereby the plurality of substrates W (preceding substrates W1) held by the chuck 26 of the second transport unit 20 via the first support surface 26b are placed on the plurality of support rods 34f of the second chuck 34a. At this time, the plurality of support rods 34f come into contact with the outer circumferential edge of the substrate W (preceding substrate W1) located between the chuck jaws 26a of the chuck 26. Once the plurality of substrates W (preceding substrates W1) have been placed on the plurality of support rods 34f of the second chuck 34a, the chuck 26 of the second transport unit 20 releases the plurality of substrates W.

[0070] 12C, the second chuck 34a of the first transfer unit 34, on which the plurality of substrates W (preceding substrates W1) are placed, moves in the X-axis direction (first direction) toward above the second tank 30, and then descends into the second tank 30. As a result, the plurality of substrates W (preceding substrates W1) are immersed in the chemical solution in the second tank 30 and are processed by the chemical solution. Once the second chuck 34a has completed descending into the second tank 30, the second transfer unit 20 moves to the carry-in module 12 to receive the next substrate to be processed (subsequent substrate).

[0071] 12D, when the chemical treatment of the substrates W (previous substrates W1) is completed, the second chuck 34a rises above the second tank 30 and then moves in the X-axis direction (first direction) above the first tank 32. As a result, the second chuck 34a of the first transporter 34, holding the plurality of chemically treated substrates W (previous substrates W1), is positioned above the first chuck 36a of the first transporter 36.

[0072] 12E, the first chuck 36a of the first transfer section 36 rises, whereby the plurality of substrates W (preceding substrates W1) placed on the plurality of support rods 34f of the second chuck 34a are placed on the plurality of support rods 36e of the first chuck 36a. Then, when the second chuck 34a descends to the initial position of the reference height H0, the transfer of the substrate W (preceding substrate W1) from the second chuck 34a to the first chuck 36a is completed.

[0073] 12F, when the transfer of the substrate W (preceding substrate W1) from the second chuck 34a to the first chuck 36a is completed, the second chuck 34a moves above the second tank 30. This allows the first chuck 36a, which is holding the plurality of substrates W (preceding substrates W1), to descend into the first tank 32. As the first chuck 36a descends into the first tank 32, the plurality of substrates W (preceding substrates W1) are immersed in the cleaning liquid in the first tank 32 and are cleaned.

[0074] 12G, the second chuck 34a moves above the first tank 32. Above the second chuck 34a, the chuck 26 of the second transfer section 20 is positioned, holding, via the first support surface 26b, the plurality of substrates W (the subsequent substrates W2 following the preceding substrate W1) newly received by the loading module 12.

[0075] 12H, the second chuck 34a rises, and the plurality of substrates W (subsequent substrates W2) held by the chuck 26 of the second transfer unit 20 via the first support surface 26b are placed on the plurality of support rods 34f of the second chuck 34a. Once the plurality of substrates W (subsequent substrates W2) have been placed on the plurality of support rods 34f of the second chuck 34a, the chuck 26 of the second transfer unit 20 releases the plurality of substrates W.

[0076] 12I, the second chuck 34a of the first transfer part 34, which is holding the plurality of substrates W (subsequent substrates W2), moves in the X-axis direction (first direction) toward above the second tank 30, and then descends into the second tank 30. As a result, the plurality of substrates W (subsequent substrates W2) are immersed in the chemical solution in the second tank 30 and treated with the chemical solution. As a result, the chemical module 14 of the substrate processing apparatus 10 reaches a state in which the plurality of substrates W (preceding substrates W1) have been cleaned in the first tank 32, and the plurality of substrates W (subsequent substrates W2) have been chemically treated in the second tank 30.

[0077] When cleaning of the plurality of substrates W (preceding substrates W1) in the first tank 32 is completed, the first chuck 36a rises, as shown in FIG. 12J. The plurality of substrates W (preceding substrates W1) placed on the plurality of support rods 36e of the raised first chuck 36a are held by the chuck 26 of the second transport unit 20 via the second support surface 26c. By holding the plurality of substrates W (preceding substrates W1) wet with the cleaning liquid via the second support surface 26c, the first support surface 26b does not get wet. Thereafter, the first chuck 36a retreats into the first tank 32, and the second transport unit 20 transports the substrates W (preceding substrates W1) to the drying module 16. When the chuck 26 of the second transport unit 20 leaves the chemical module 14, the chemical module 14 returns to the state shown in FIG. 12C. Thereafter, the operations shown in FIGS. 12C to 12J are repeatedly performed, whereby a plurality of substrates W are successively processed by the substrate processing apparatus 10. As shown in FIG.

[0078] According to the first embodiment as described above, it is possible to prevent the substrate processing apparatus from becoming larger in size due to an increase in the number of processing tanks. Specifically, the first tank and the second tank are arranged in a direction (X-axis direction (first direction)) intersecting the transport direction (Y-axis direction (second direction)) of the substrate W of the second transport section. Therefore, even if the number of processing tanks increases, the size of the substrate processing apparatus in the main transport direction is prevented from becoming larger.

[0079] Furthermore, in the second transfer section, the chuck that holds the substrate and moves in the second direction to pass above the first tank is supported by a moving body of an actuator arranged above the first tank, so the distance between the chuck and the moving body is short (compared to, for example, when viewed from above, the moving body moves on the opposite side of the first tank across the second tank). This eliminates the need to connect the chuck and the moving body via a horizontally long arm that is prone to bending and vibrating. As a result, the size of the substrate processing apparatus in the first direction is reduced, and the substrate processing apparatus is made more compact.

[0080] (Embodiment 2) The present embodiment 2 is an improved version of the above-described embodiment 1. Therefore, the following description will focus on the differences between the present embodiment 2 and embodiment 1. Note that components that are substantially the same as those in the above-described embodiment 1 are given the same reference numerals.

[0081] FIG. 13 is a side view of a chemical module in the substrate processing apparatus according to the second embodiment.

[0082] 13 , unlike the chemical module 14 of the substrate processing apparatus 10 according to the first embodiment, the chemical module 114 in the substrate processing apparatus according to the second embodiment does not include a first transfer unit 36. Therefore, the first transfer unit 34 immerses the substrate W in the first tank 32. That is, the first transfer unit 34 receives the substrate W from the chuck 26 of the second transfer unit 20 and immerses the received substrate W in the second tank 30. Next, the first transfer unit 34 transfers the substrate W from the second tank 30 into the first tank 32. Thereafter, the first transfer unit 34 delivers the substrate W, which has been processed in the first tank 32, to the chuck 26 of the second transfer unit 20.

[0083] In the case of the second embodiment, as shown in FIG. 13, the first transfer section 36 is not present in front of the first tank 32, so the chemical module 114 The size in the X-axis direction (first direction) of the chemical module 14 can be made smaller than that of the chemical module 14 of the first embodiment.

[0084] According to the second embodiment as described above, similarly to the first embodiment, it is possible to prevent the substrate processing apparatus from becoming larger in size due to an increase in the number of processing tanks.

[0085] (Embodiment 3) This third embodiment differs from the first embodiment described above in that the chuck of the second transfer unit is different. Therefore, the third embodiment will be described focusing on the differences from the first embodiment. Note that components that are substantially the same as those in the first embodiment described above are given the same reference numerals.

[0086] Fig. 14 is a side view of a chemical module in the substrate processing apparatus according to embodiment 3. Fig. 15 is a perspective view of a second transfer unit holding a substrate in the substrate processing apparatus according to embodiment 3. Fig. 16 is a perspective view showing a chuck in the second transfer unit.

[0087] As shown in FIGS. 14 to 16, the chuck 226 of the second transfer section 220 is composed of two rotating shafts 226a extending rearward in the X-axis direction (first direction) of the substrate processing apparatus (chemical module 214) and extending parallel to each other, two support bars 226b extending in the X-axis direction and on which multiple substrates W are placed, and multiple links 226c connecting the rotating shafts 226a and the support bars 226b. Specifically, each support bar 226b is suspended and supported by the corresponding rotating shaft 226a via two links 226c. Each rotating shaft 226a is rotated by a motor (not shown) about a rotation center line C2 extending in the Y-axis direction (second direction) so that the distance D2 between the two support bars 226b can be changed. By changing the distance D2, the chuck 226 can hold or release the substrate W. The support bar 226b is formed with a plurality of grooves (not shown) that engage with the outer peripheral edges of the plurality of substrates W to maintain the plurality of substrates W spaced apart at a predetermined interval.

[0088] According to the third embodiment, as in the first embodiment, it is possible to prevent the substrate processing apparatus from becoming large in size due to an increase in the number of processing tanks.

[0089] The second transfer section 220 according to the third embodiment can be substituted for the second transfer section 20 of the chemical module 114 according to the second embodiment described above.

[0090] Moreover, the first conveying section can be changed in accordance with the second conveying section 220 according to the third embodiment.

[0091] FIG. 17 is a perspective view showing a plurality of first transport units according to a modification of the third embodiment.

[0092] As shown in FIG. 17, a first transport section 236 according to the modification of the third embodiment differs from the first transport section 36 according to the first embodiment described above.

[0093] Specifically, the first chuck 36a of the first transfer unit 236 according to the modification of the third embodiment is substantially the same as the first chuck 36a of the first embodiment. However, the positions of the arm 236b supporting the first chuck 36a of the first transfer unit 236 and the actuator 236c that raises and lowers the arm 236b are different. Mu 2 Similar to the arm 34b and the actuator 34c of the first transfer part 34, the arm 36b and the actuator 236c are arranged not in front of the first tank 32 but on one side of the first tank 32 in the Y-axis direction (second direction) of the substrate processing apparatus. As a result, the size of the substrate processing apparatus in the X-axis direction (first direction) is reduced, and the substrate processing apparatus can be made more compact.

[0094] (Fourth embodiment) This fourth embodiment differs from the first embodiment described above in that there is only one first transfer unit and the chuck of the second transfer unit is different. Therefore, the fourth embodiment will be described focusing on the differences from the first embodiment. Note that components that are substantially the same as those in the first embodiment described above are given the same reference numerals.

[0095] Fig. 18 is a side view of a chemical module in the substrate processing apparatus according to embodiment 4. Fig. 19 is a perspective view of a second transfer unit holding a substrate in the substrate processing apparatus according to embodiment 4. Fig. 20 is a perspective view showing a chuck in the second transfer unit.

[0096] 18 to 20, the chuck 326 of the second transfer section 320 includes a plurality of support rods 326a that extend rearward in the X-axis direction (first direction) of the substrate processing apparatus (chemical module 314) and that extend parallel to one another, and on which a plurality of substrates W are placed. Note that the support rods 326a are formed with a plurality of grooves (not shown) that engage with the outer circumferential edges of the plurality of substrates W to maintain the plurality of substrates W spaced apart at a predetermined interval.

[0097] When such a chuck 326 is used, the first transport unit 36 ​​of the first embodiment described above cannot be used. Because the chuck 326 and the first transport unit 36 ​​interfere with each other, the substrate W cannot be transferred from the first transport unit 36 ​​to the chuck 326. Therefore, in the case of the fourth embodiment, the first transport unit 34 transfers the substrate W to the chuck 326, as in the second embodiment described above.

[0098] According to the fourth embodiment, similarly to the first embodiment, it is possible to prevent the substrate processing apparatus from becoming larger in size due to an increase in the number of processing tanks.

[0099] (Embodiment 5) In the case of the above-described first embodiment, as shown in FIGS. 4A to 4C, the actuator 25 of the second transfer section 20 is disposed above the first tank 32. In the present fifth embodiment, the actuator of the second transfer section is disposed in a different location. Therefore, the following description of the fifth embodiment will focus on the differences from the first embodiment. Note that the same reference numerals are used to designate components that are substantially the same as those in the first embodiment.

[0100] FIG. 21 is a side view of a chemical module in a substrate processing apparatus according to the fifth embodiment.

[0101] 21, in the substrate processing apparatus according to the fifth embodiment, the actuator 425 of the second transfer section 420 is disposed on the first tank 32 side in the X-axis direction (first direction) in the chemical module 414. The actuator 425 is disposed below the first tank 32. The moving head of the actuator 425 424 The actuator 425 is separated from the processing space S1 in which the first tank 32 and the second tank 34 are disposed, and is disposed in a drive space S2 provided below the processing space S1.

[0102] In the case of this embodiment 5, the size of the substrate processing apparatus (chemical module 414) in the Z-axis direction (height direction) can be made smaller than in the above-mentioned embodiment 1 in which the moving head 24 of the actuator 25 of the second transport section 20 moves above the first tank 32.

[0103] According to the fifth embodiment, as in the first embodiment, it is possible to prevent the substrate processing apparatus from becoming large in size due to an increase in the number of processing tanks.

[0104] Although the present invention has been described above by way of a number of embodiments, the present invention is not limited to these.

[0105] For example, in the case of the first embodiment described above, the second tank 30 located at the rear of the substrate processing apparatus 10 is a chemical tank, and the first tank 32 located at the front of the substrate processing apparatus 10 is a cleaning tank. However, the present invention is not limited to this. For example, the second tank 30 may be used as a cleaning tank, and the first tank 32 may be used as a chemical tank. In this case, since the second chuck 34a and the first chuck 36a of the first embodiment described above are configured to be able to transfer substrates W to each other, multiple substrates W are transferred from the first chuck 36a of the first transfer unit 36 ​​to the second chuck 34a of the first transfer unit 34.

[0106] That is, a substrate processing module according to one embodiment of the present invention is, in a broad sense, a substrate processing module for processing substrates, comprising: a first tank and a second tank arranged in a first direction and capable of placing substrates; a first transport unit that moves the substrate into the first tank and the second tank; and a second transport unit that transports the substrate in a second direction intersecting the first direction and transfers the substrate to and from the first transport unit, wherein the second transport unit comprises a chuck that holds the substrate and passes above the first tank, and an actuator that moves the chuck in the second direction, and the actuator of the second transport unit is arranged on the first tank side in the first direction in the substrate processing module.

[0107] Furthermore, a substrate processing apparatus according to another embodiment of the present invention includes the substrate processing module and another module connected to the substrate processing module in the second direction.

[0108] As described above, the above-described embodiments have been described as examples of the technology of the present invention. For this purpose, drawings and detailed descriptions are provided. Therefore, the components described in the drawings and detailed descriptions may include not only components essential for solving the problem, but also components that are not essential for solving the problem in order to exemplify the above-described technology. Therefore, the fact that these non-essential components are described in the drawings or detailed descriptions should not be interpreted as immediately indicating that these non-essential components are essential.

[0109] Furthermore, since the above-described embodiments are intended to illustrate the technology of the present invention, various modifications, substitutions, additions, omissions, etc. can be made within the scope of the claims or their equivalents. [Industrial Applicability]

[0110] The present invention is applicable to a substrate processing apparatus that processes substrates using a plurality of tanks. [Explanation of symbols]

[0111] 10. Substrate processing equipment 14 Substrate processing module (chemical module) 20 Second conveying section 25 Actuators 26 Zipper 30 2nd tank 32 Tank 1 34 First conveying section 36 First conveying section W substrate

Claims

1. A substrate processing module for processing a substrate, a first tank and a second tank arranged in a first direction, which is a front-rear direction, and capable of accommodating a substrate; a first transfer unit that transfers the substrate to the first tank and the second tank; a second transport unit configured to transport the substrate in a second direction intersecting the first direction and to transfer the substrate to and from the first transport unit, In the substrate processing module, the first tank is located at the front side and the second tank is located at the rear side, the second transfer unit includes a chuck that holds the substrate and passes above the first tank, and an actuator that moves the chuck in the second direction; the actuator of the second transport unit includes a moving body that supports the chuck and moves in the second direction, A substrate processing module in which the actuator of the second transport unit is positioned on the first tank side in the first direction in the substrate processing module so that the movable body moves in the second direction while overlapping the first tank when viewed from above.

2. The substrate processing module according to claim 1 , wherein the actuator of the second transport part is disposed in a drive space isolated from a processing space in which the first tank and the second tank are disposed.

3. A top plate portion is provided above the processing space, The substrate processing module according to claim 2 , wherein the driving space is located above the top plate portion.

4. the second transport unit includes an arm extending in a height direction so as to connect the moving body of the actuator and the chuck, The substrate processing module according to claim 1 , wherein the arm is positioned forward of the first tank.

5. The substrate processing module according to claim 4 , further comprising a hanging plate separating a space above the first tank from the arm.

6. There are two first transport units, one of the first transfer units includes a first chuck that is movable into the first tank while holding the substrate; the other first transfer unit includes a second chuck that is movable into the second tank and above the first tank while holding the substrate; The substrate processing module according to claim 1 , wherein the first chuck and the second chuck are configured to be capable of transferring the substrate between them.

7. The first tank is a cleaning tank, The substrate processing module according to claim 1 , wherein the second tank is a chemical tank.

8. A substrate processing apparatus comprising: the substrate processing module according to claim 1 ; and another module coupled to the substrate processing module in the second direction.

Images