Switchgear

Abstract

To provide an opening and closing apparatus opening and closing an opening.SOLUTION: A mobile object 20 comprises a valve element 21 and a base 22. The valve element 21 comprises a valve plate 211, a sealing member 212, an enlarged portion 213, a sealing member 214, and a support portion. The valve plate 211 is formed in such a way as to protrude from the enlarged portion 213. The valve plate 211 is a member closing an opening 121, and is formed to be larger than the opening 121. The valve plate 211 is provided with the sealing member 212 providing sealing when the valve plate 211 closes the opening 121. The enlarged portion 213 is a member for closing another opening, and is formed to be larger than the other opening. The enlarged portion 213 is provided with the sealing member 214 for providing sealing when the enlarged portion 213 closes the other opening. The support portion connects the enlarged portion 213 and the base 22 to each other.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present disclosure relates to a switching device. [Background technology]

[0002] 2. Description of the Related Art A transfer chamber is known that includes an openable / closable device between a processing chamber and a transfer chamber.

[0003] Patent Document 1 discloses a semiconductor processing facility that uses a planar motor to transport substrates. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Special Publication No. 2018-504784 Summary of the Invention [Problem to be solved by the invention]

[0005] In one aspect, the present disclosure provides an opening and closing device for opening and closing an opening. [Means for solving the problem]

[0006] In order to solve the above problem, according to one aspect, there is provided an opening and closing device for opening and closing a plurality of openings that respectively communicate a first chamber with a plurality of second chambers adjacent to the first chamber, the opening and closing device comprising: a planar motor having coils arranged in the first chamber; , and is movable between a position where one opening is blocked and a position where another opening is blocked, An opening and closing device is provided, which has a moving body that carries a valve body that closes either opening, the moving body moves on the planar motor by a magnetic field generated by the coil to open and close the opening, the valve body having a valve plate that is provided with a first sealing member and closes the opening, and an expansion portion that is provided with a second sealing member and is larger than the valve plate. [Effects of the Invention]

[0007] According to one aspect, an opening and closing device for opening and closing an opening can be provided. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a plan view showing an example of a configuration of a substrate processing system according to an embodiment; [Figure 2] FIG. 2 is a perspective view showing an example of an opening and an opening / closing device. [Figure 3] FIG. 1 is a perspective view showing an example of an opening and closing device. [Figure 4] FIG. 2 is a perspective view illustrating the driving principle of the opening and closing device. [Figure 5] FIG. 10 is a horizontal cross-sectional view showing an example of an opening and closing device when an opening is closed. [Figure 6] FIG. 10 is a horizontal cross-sectional view showing an example of an opening and closing device when performing maintenance on a seal member. [Figure 7] FIG. 10 is a horizontal cross-sectional view showing another example of an opening and closing device when performing maintenance on a sealing member. [Figure 8A] FIG. 10 is a horizontal cross-sectional view showing still another example of an opening and closing device when maintenance of a sealing member is performed. [Figure 8B] FIG. 10 is a horizontal cross-sectional view showing still another example of an opening and closing device when maintenance of a sealing member is performed. [Figure 8C] FIG. 10 is a horizontal cross-sectional view showing still another example of an opening and closing device when maintenance of a sealing member is performed. [Figure 9] FIG. 10 is a horizontal cross-sectional view showing an example of an opening and closing device including another moving body when maintenance of a seal member is performed on the opening and closing device. [Figure 10] FIG. 10 is a perspective view showing an example of a moving body that moves on an inner wall surface. [Figure 11] 10 is a horizontal cross-sectional view showing an example of an opening / closing device having a moving body that moves on an inner wall surface when an opening is closed. FIG. [Figure 12] FIG. 10 is a side view showing an example of a moving body having a plurality of valve bodies. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and redundant explanations may be omitted.

[0010] <Substrate Processing System 100> An example of the overall configuration of a substrate processing system 100 according to an embodiment will be described with reference to Fig. 1. Fig. 1 is a plan view showing the configuration of an example of a substrate processing system 100 according to an embodiment.

[0011] 1 is a cluster structure (multi-chamber type) system. The substrate processing system 100 includes a plurality of processing chambers 110, a vacuum transfer chamber 120, a load lock chamber 130, an atmospheric transfer chamber 140, and a control unit 150.

[0012] The processing chamber 110 is depressurized to a predetermined vacuum atmosphere, and a semiconductor wafer W (hereinafter also referred to as "wafer W") therein is subjected to a desired process (etching process, film formation process, cleaning process, ashing process, etc.). The processing chamber 110 is disposed adjacent to the vacuum transfer chamber 120. The processing chamber 110 has a mounting table 111 on which the wafer W is placed. The operation of each part for processing in the processing chamber 110 is controlled by a control unit 150.

[0013] The vacuum transfer chamber 120 is depressurized to a predetermined vacuum atmosphere. The vacuum transfer chamber 120 has an opening 121 that connects the processing chamber 110 to the vacuum transfer chamber 120. The vacuum transfer chamber 120 also has an opening 122 that connects the load lock chamber 130 to the vacuum transfer chamber 120. The vacuum transfer chamber 120 also has an opening / closing device (planar motor 10, moving body 20) that opens and closes the openings 121 and 122. The opening / closing device will be described later with reference to FIG. 2 etc.

[0014] The vacuum transfer chamber 120 has an opening 123 that communicates with the outside. The opening 123 is closed by a closing member 124 so as to be able to open and close.

[0015] A substrate transfer device (not shown) for transferring a wafer W is provided inside the vacuum transfer chamber 120. The substrate transfer device transfers the wafer W between the processing chamber 110 and the vacuum transfer chamber 120 through an opening 121. The substrate transfer device also transfers the wafer W between the load lock chamber 130 and the vacuum transfer chamber 120 through an opening 122. The substrate transfer device is controlled by a control unit 150.

[0016] The load lock chamber 130 is provided between the vacuum transfer chamber 120 and the atmospheric transfer chamber 140. The load lock chamber 130 has a mounting table 131 on which a wafer W is placed. The load lock chamber 130 is capable of switching between an atmospheric atmosphere and a vacuum atmosphere. The load lock chamber 130 and the vacuum transfer chamber 120, which has a vacuum atmosphere, communicate with each other via an opening 122 that can be opened and closed by an opening / closing device. The load lock chamber 130 and the atmospheric transfer chamber 140, which has an atmospheric atmosphere, communicate with each other via an opening (not shown) that can be opened and closed by an opening / closing device (not shown). The switching between the vacuum atmosphere and the atmospheric atmosphere in the load lock chamber 130 is controlled by a control unit 150.

[0017] The atmospheric transfer chamber 140 has an atmospheric atmosphere, and for example, a downflow of clean air is formed. A transfer device (not shown) for transferring the wafer W is provided inside the atmospheric transfer chamber 140. The transfer device (not shown) transfers the wafer W between the load lock chamber 130 and the atmospheric transfer chamber 140. The operation of the transfer device (not shown) is controlled by the control unit 150.

[0018] A load port (not shown) is provided on a wall surface of the atmospheric transfer chamber 140. A carrier (not shown) containing a wafer W or an empty carrier is attached to the load port. For example, a FOUP (Front Opening Unified Pod) or the like can be used as the carrier.

[0019] A transfer device (not shown) in the atmospheric transfer chamber 140 can remove a wafer W accommodated in a carrier attached to the load port and place it on the mounting table 131 in the load lock chamber 130. In addition, the transfer device (not shown) in the atmospheric transfer chamber 140 can remove a wafer W placed on the mounting table 131 in the load lock chamber 130 and place it in a carrier attached to the load port.

[0020] The control unit 150 has a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), and HDD (Hard Disk Drive). The control unit 150 may have other storage areas such as an SSD (Solid State Drive) instead of an HDD. The storage areas such as the HDD and RAM store recipes in which process procedures, process conditions, and transport conditions are set.

[0021] The CPU controls the processing of wafers W in each processing chamber 110 in accordance with a recipe and controls the transfer of wafers W. The HDD or RAM may store a program for executing the processing of wafers W in each processing chamber 110 and the transfer of wafers W. The program may be provided by being stored in a storage medium, or may be provided from an external device via a network.

[0022] Next, an opening and closing device that opens and closes the openings 121 and 122 will be described with reference to Fig. 2 to Fig. 5. Fig. 2 is a perspective view showing an example of the opening 121 and the opening and closing device. Fig. 3 is a perspective view showing an example of the moving body 20 of the opening and closing device.

[0023] The opening and closing device includes a planar motor 10 and a moving body 20.

[0024] The planar motor 10 is disposed on the floor of the vacuum transfer chamber 120 .

[0025] The movable body 20 includes a valve element 21 and a base 22. The valve element 21 includes a valve plate 211, a seal member 212, an enlarged portion 213, a seal member 214, and a support portion 215. The valve plate 211 is formed to protrude from the enlarged portion 213. The valve plate 211 is a member that closes the openings 121 and 122, and is formed to be larger than the openings 121 and 122 but smaller than the opening 123. The valve plate 211 is provided with a seal member 212 that seals when the valve plate 211 closes the openings 121 and 122. The enlarged portion 213 is a member that closes the opening 123, and is formed to be larger than the opening 123. The enlarged portion 213 is provided with a seal member 214 that seals when the enlarged portion 213 closes the opening 123. The support portion 215 connects the enlarged portion 213 to the base 22.

[0026] The planar motor 10 and the base 22 of the moving body 20 will be further described with reference to Fig. 4. Fig. 4 is a perspective view illustrating the driving principle of the opening and closing device.

[0027] The planar motor 10 has an array of coils 10a. The coils 10a generate a magnetic field when supplied with current. The control unit 150 (see FIG. 1) is configured to be able to individually control the value of the current passed through each coil 10a.

[0028] A plurality of permanent magnets 22a are arranged on base 22. The magnetic field generated by coil 10a causes base 22 to magnetically levitate above planar motor 10. The magnetic field generated by coil 10a also causes base 22 to move above planar motor 10.

[0029] With this configuration, the control unit 150 (see FIG. 1) is configured to be able to control the position, orientation, and levitation amount of the base 22 by controlling the current value of each coil 10a of the planar motor 10.

[0030] The control unit 150 controls the energization of each coil 10a of the planar motor 10 so that the position of the base 22 is the desired position, thereby moving and / or rotating the movable body 20 within the vacuum transfer chamber 120. In other words, the control unit 150 can cause the valve element 21 to open and close the openings 121 and 122 by moving the movable body 20 on the planar motor 10.

[0031] FIG. 5 is a horizontal cross-sectional view showing an example of an opening and closing device when the opening 121 is closed.

[0032] The control unit 150 moves the movable body 20 and brings the valve plate 211 of the valve element 21 into contact with the inner wall surface of the vacuum transfer chamber 120, thereby allowing the valve plate 211 to close the opening 121. In addition, the seal member 212 seals the inner wall surface of the vacuum transfer chamber 120 against the valve plate 211, thereby hermetically sealing the processing chamber 110.

[0033] Furthermore, the opening 121 can be opened (see FIG. 1) by moving the movable body 20 from a position where the opening 121 is closed (see FIG. 5). This allows the substrate processing system 100 to have a smaller footprint than a configuration in which an opening / closing device that opens and closes by mechanical drive, such as a gate valve (not shown), is provided between the processing chamber 110 and the vacuum transfer chamber 120.

[0034] In this way, the opening and closing device of this embodiment can open and close the opening 121. Similarly, the opening and closing device can open and close the opening 122.

[0035] A mechanism (not shown) may be provided to assist the contact force between the valve plate 211 and the inner wall surface of the vacuum transfer chamber 120 when the valve plate 211 of the valve element 21 is brought into contact with the inner wall surface of the vacuum transfer chamber 120 to close the openings 121 and 122. For example, a locking mechanism may be provided to fix the valve element 21 to the inner wall surface of the vacuum transfer chamber 120 when the valve element 21 is brought into contact with the inner wall surface of the vacuum transfer chamber 120. This ensures that the opening 121 is closed.

[0036] Furthermore, the valve element 21 may have a magnet (not shown) that adheres to the wall surface of the vacuum transfer chamber 120. This allows the valve element 21 to be adhered to the wall surface of the vacuum transfer chamber 120 by the magnet (not shown) when the openings 121 and 122 are closed with the valve element 21.

[0037] 6 is a horizontal cross-sectional view showing an example of an opening and closing device when performing maintenance on the seal member 212. For example, the sealing performance of the seal member 212 deteriorates when it is exposed to the processing gas in the processing chamber 110. When the sealing performance of the seal member 212 deteriorates, maintenance (replacement, cleaning, etc.) of the seal member 212 is performed.

[0038] When performing maintenance on the sealing member 212, the control unit 150 moves the movable body 20 and brings the expanded portion 213 of the valve element 21 into contact with the inner wall surface of the vacuum transfer chamber 120, thereby allowing the expanded portion 213 to close the opening 123 from inside the vacuum transfer chamber 120. In addition, the sealing member 214 seals the inner wall surface of the vacuum transfer chamber 120 against the expanded portion 213, thereby hermetically sealing the vacuum transfer chamber 120. At this time, the valve plate 211 is inserted into the opening 123.

[0039] Then, by removing the blocking member 124 (see FIG. 1) from the outer wall surface of the vacuum transfer chamber 120, the sealing member 212 can be maintained (replaced, cleaned, etc.) from outside the vacuum transfer chamber 120 while maintaining the vacuum atmosphere in the vacuum transfer chamber 120.

[0040] In this way, according to the opening and closing device of this embodiment, it is possible to perform maintenance on the seal member 214 while maintaining the vacuum atmosphere in the vacuum transfer chamber 120. This makes it possible to reduce the time required for maintenance work.

[0041] Furthermore, in addition to the movable bodies 20 that open and close the openings 121 and 122, a replacement movable body 20 may be disposed inside the vacuum transfer chamber 120. This allows the movable bodies 20 that open and close the openings 121 and 122 to be replaced with the replacement movable body 20, thereby ensuring sealing performance. Furthermore, when performing maintenance on the sealing member 212 of one of the movable bodies 20, the openings 121 and 122 can be opened and closed using the replacement movable body 20, so that maintenance of the sealing member 212 can be performed without stopping the substrate processing system 100.

[0042] The substrate processing system 100 may be provided with a device for opening and closing the closing member 124 and for performing maintenance on the sealing member 214. This allows the maintenance of the sealing member 214 to be automated.

[0043] FIG. 7 is a horizontal cross-sectional view showing another example of an opening and closing device when maintenance of the seal member 212 is performed.

[0044] Fixing devices 125 and 126 may be provided on the wall surface of the vacuum transfer chamber 120. The fixing device 125 detachably fixes the closing member 124 to the outer wall surface of the vacuum transfer chamber 120. The fixing device 126 detachably fixes the valve body 21 to the inner wall surface of the vacuum transfer chamber 120. In the example of Fig. 7, the fixing devices 125 and 126 are illustrated as detachable bolts.

[0045] When performing maintenance on the sealing member 212, the control unit 150 moves the movable body 20 and brings the expanding portion 213 of the valve element 21 into contact with the inner wall surface of the vacuum transfer chamber 120, causing the expanding portion 213 to close the opening 123 from inside the vacuum transfer chamber 120. Next, the fixing device 126 is used to fix the valve element 21 to the inner wall surface of the vacuum transfer chamber 120. Next, the fixing device 125 is released, and the closing member 124 is moved to open the opening 123 from outside the vacuum transfer chamber 120, thereby performing maintenance on the sealing member 212. This prevents the valve element 21 from shifting due to the pressure difference between the inside of the vacuum transfer chamber 120, which is a vacuum atmosphere, and the outside of the vacuum transfer chamber 120, which is an air atmosphere, and thereby maintains the vacuum transfer chamber 120 airtight.

[0046] In FIG. 7, the fixing devices 125 and 126 are illustrated as bolts, but are not limited to this and may be fixing devices such as lock pins.

[0047] 8A to 8C are horizontal cross-sectional views showing still another example of the opening and closing device when the seal member 212 is maintained.

[0048] As shown in FIG. 8A, the closing member 124 may be provided with a vent device 127. The vent device 127 includes a vent line 127a, a valve 127b, and a connection part 127c. The vent line 127a is formed to allow gas to flow through it. One end of the vent line 127a is connected to the space of the opening 123 (the space between the closing member 124 and the valve plate 211). The vent line 127a is also provided with an openable and closable valve 127b. The valve 127b is normally closed. The other end of the vent line 127a is provided with a connection part 127c that can be connected to a connection part 128c, which will be described later.

[0049] When performing maintenance on the sealing member 212, the control unit 150 moves the movable body 20 to abut the expanded portion 213 of the valve element 21 against the inner wall surface of the vacuum transfer chamber 120, causing the expanded portion 213 to close the opening 123 from inside the vacuum transfer chamber 120. Next, the fixing device 126 is used to fix the valve element 21 to the inner wall surface of the vacuum transfer chamber 120. The space around the opening 123 is now under vacuum. Next, the valve 127b is opened, and the space around the opening 123 is connected to the outside of the vacuum transfer chamber 120, which is under atmospheric pressure, via the vent line 127a. Next, the fixing device 125 is released, and the closing member 124 is moved to open the opening 123 from outside the vacuum transfer chamber 120, thereby performing maintenance on the sealing member 212. This reduces the pressure difference between the space around the opening 123 and the outside of the vacuum transfer chamber 120, allowing the closing member 124 to be easily removed from the outer wall surface of the vacuum transfer chamber 120.

[0050] 8B, a vacuum device 128 may be provided on the outer wall surface of the vacuum transfer chamber 120. The vacuum device 128 includes a vacuum line 128a, a valve 128b, and a connection part 128c. The vacuum line 128a is configured to allow gas to flow through it. One end of the vacuum line 128a is connected to the inside of the vacuum transfer chamber 120. The vacuum line 128a is also provided with an openable and closable valve 128b. The valve 128b is normally closed. The other end of the vacuum line 128a is provided with a connection part 128c that can be connected to the connection part 127c. At least a portion of the vacuum line 128a is formed of flexible piping or the like, and the connection part 127c and the connection part 128c are configured to be detachable from each other.

[0051] After maintenance of the seal member 212, the closing member 124 is attached to the outer wall surface of the vacuum transfer chamber 120, thereby closing the opening 123 from the outside of the vacuum transfer chamber 120. Next, the closing member 124 is fixed to the outer wall surface of the vacuum transfer chamber 120 using a fixing device 125. The space around the opening 123 is now under atmospheric pressure. Next, the connecting part 127c and the connecting part 128c are connected, and the valves 127b and 128b are opened to connect the space around the opening 123 to the interior of the vacuum transfer chamber 120, which is under vacuum, via the vent line 127a and the evacuation line 128a. This allows the vacuum pump (not shown) of the vacuum transfer chamber 120 to gradually reduce the pressure in the space around the opening 123, bringing the space around the opening 123 closer to a vacuum atmosphere. After the pressure in the space of opening 123 is reduced, valves 127b and 128b may be closed, and connection between connecting portion 127c and connecting portion 128c may be released. Next, fixing device 126 is released. Next, control unit 150 moves movable body 20, and valve element 21 moves away from opening 123. This makes it possible to prevent the degree of vacuum inside vacuum transfer chamber 120 from decreasing significantly when valve element 21 moves away from opening 123.

[0052] 8C, the evacuation line 128a may be connected to a vacuum pump 129. This allows the vacuum pump 129 to reduce the pressure in the space around the opening 123 to a vacuum atmosphere.

[0053] FIG. 9 is a horizontal cross-sectional view showing an example of an opening / closing device including another movable body 20A during maintenance of a seal member 212. In the movable body 20A shown in FIG. 9, a valve plate 211 on which a seal member 212 is provided is detachably attached to an expanded portion 213 on which a seal member 214 is provided, and the valve plate 211 is fixed to the expanded portion 213 by a fixing device 216. Note that in the example of FIG. 9, the fixing device 216 is illustrated as a detachable bolt, but is not limited thereto and may be a fixing device such as a lock pin. As a result, the opening 123 is closed from the inside of the vacuum transfer chamber 120 by the expanded portion 213 on which the seal member 214 is provided. Furthermore, when performing maintenance on the seal member 212, the fixing device 216 is removed, and the seal member 212 is replaced together with the valve plate 211. This improves the workability of maintenance work.

[0054] The above describes an opening and closing device according to one embodiment, but the present disclosure is not limited to the above embodiment, and various modifications and improvements are possible within the scope of the gist of the present disclosure described in the claims.

[0055] Although the planar motor 10 has been described as being mounted on the floor of the vacuum transfer chamber 120, this is not limiting. For example, the planar motor 10 may be mounted on the ceiling of the vacuum transfer chamber 120, and the moving body 20 may move along the ceiling of the vacuum transfer chamber 120 by the magnetic force of the planar motor 10. The moving body 20 is magnetically attracted by the planar motor 10 mounted on the ceiling of the vacuum transfer chamber 120, and is levitated with a gap between it and the ceiling of the vacuum transfer chamber 120. This allows a substrate transfer device to be disposed on the floor of the vacuum transfer chamber 120, for example.

[0056] Alternatively, a planar motor 10 may be provided on the inner wall surface of the vacuum transfer chamber 120, and the moving body 20B may be moved along the inner wall surface of the vacuum transfer chamber 120 by the magnetic force of the planar motor 10. Fig. 10 is a perspective view showing an example of the moving body 20B moving along the inner wall surface. Fig. 11 is a horizontal cross-sectional view showing an example of an opening and closing device including the moving body 20B moving along the inner wall surface when the opening 121 is closed.

[0057] The opening and closing device includes a planar motor 10 and a moving body 20B.

[0058] As shown in FIG. 11, the planar motor 10 is disposed on the wall surface of a vacuum transfer chamber 120 in which an opening 121 is formed. The planar motor 10 has an array of coils 10a. The coils 10a generate a magnetic field when supplied with current. The control unit 150 (see FIG. 1) is configured to be able to individually control the value of the current passed through each coil 10a.

[0059] 10, the movable body 20B includes a valve body portion 21B and a base portion 22B. That is, the movable body 20B has the valve body portion 21B that closes the openings 121 and 122 and the base portion 22B that moves on the planar motor 10, which are integrally formed.

[0060] The valve body portion 21B includes a valve plate 211B, a seal member 212B, an enlarged portion 213B, and a seal member 214B. The valve plate 211B is formed to protrude from the enlarged portion 213B. The valve plate 211B is a member that closes the openings 121 and 122, and is formed to be larger than the openings 121 and 122 but smaller than the opening 123. The valve plate 211B is provided with a seal member 212B that seals when the valve plate 211B closes the openings 121 and 122. The enlarged portion 213B is a member that closes the opening 123, and is formed to be larger than the opening 123. The enlarged portion 213B is provided with a seal member 214B that seals when the enlarged portion 213B closes the opening 123.

[0061] The base portion 22B has a plurality of permanent magnets 22Ba arranged thereon. In the movable body 20B shown in FIG. 10, the base portions 22B are provided on both longitudinal sides of the movable body 20B, sandwiching the expanded portion 213B of the valve body portion 21B, when viewed from a direction perpendicular to the contact surface of the valve plate 211B. However, this is not limiting. For example, the base portion 22B may be configured by arranging a plurality of permanent magnets 22Ba over the entire surface of the expanded portion 213B.

[0062] The magnetic field generated by coil 10a causes base portion 22B to magnetically levitate above planar motor 10. Furthermore, the magnetic field generated by coil 10a causes base portion 22B to move above planar motor 10.

[0063] With this configuration, the control unit 150 (see FIG. 1) is configured to control the position, orientation, and levitation amount of the movable body 20B (base portion 22B) by controlling the current value of each coil 10a of the planar motor 10. That is, by controlling the position and orientation of the movable body 20B (base portion 22B), it is possible to move and / or rotate the movable body 20B on the inner wall surface of the vacuum transfer chamber 120. Furthermore, by controlling the levitation amount of the movable body 20B (base portion 22B), it is possible to control the opening and closing of the openings 121 and 122 by the movable body 20B (valve body portion 21B).

[0064] Furthermore, although the opening and closing device that opens and closes the opening 121 between the processing chamber 110 and the vacuum transfer chamber 120 and the opening 122 between the vacuum transfer chamber 120 and the load lock chamber 130 has been described as an example, the present invention is not limited to this. For example, the present invention may be applied to an opening and closing device (planar motor 10, movable body 20) that opens and closes an opening (not shown) that connects the load lock chamber 130 to the atmospheric transfer chamber 140. The planar motor 10 may be provided on at least one of the top surface, side surface, and floor surface of the atmospheric transfer chamber 140. Furthermore, since the movable body 20 is disposed on the side of the atmospheric transfer chamber 140, replacement of the seal member 212 of the movable body 20 can be facilitated.

[0065] Furthermore, although one movable body 20 has been described as having one valve body 21 (valve plate 211, seal member 212) as shown in Fig. 3, this is not limiting. Fig. 12 is a side view showing an example of a movable body 20C having a plurality of valve bodies 21. The movable body 20C has a plurality (two) of valve bodies 21 and one base 22. This makes it possible to reduce the frequency of maintenance of the seal member 212 by switching the valve body 21 that opens and closes the openings 121, 122. [Explanation of symbols]

[0066] 10 Planar Motor 10a coil 20,20A~20C Mobile object 21 Valve body 21B Valve body 22 base 22B base 22a,22Ba permanent magnet 211,211B Valve Plate 212, 212B sealing member (first sealing member) 213,213B Enlarged section 214, 214B sealing member (second sealing member) 215 Support part 216 Fixation device 100 Substrate Processing System 110 Processing Room (Room 2, Room) 111 Mounting table 120 Vacuum transfer chamber (Chamber 1) 121 Opening (first opening) 122 Opening (first opening) 123 Opening (Second Opening) 124 Closure element 125 Fixation device 126 Fixation device 127 Venting Device 128 Vacuum device 130 Load lock chamber (chamber 2, chamber) 131 Mounting table 140 Atmospheric Transfer Room (Room 1) 150 control section

Claims

[Claim 1] An opening and closing device that opens and closes a plurality of openings that respectively communicate between a first chamber and a plurality of second chambers adjacent to the first chamber, a moving body that moves on a planar motor having coils arranged in the first chamber, and is movable between a position where one of the plurality of openings is closed and a position where another opening is closed, and that carries a valve body that closes either of the openings; the movable body is moved on the planar motor by a magnetic field generated by the coil, and the opening is opened and closed; The valve body is a valve plate provided with a first seal member and closing the opening; a second seal member is provided, and has an enlarged portion that is larger than the valve plate; Switchgear.

Images