Support device

Abstract

To provide an auxiliary device which enables automatic replacement of a cutting blade and can be attached to a cutting device that has been delivered to a user after the delivery.SOLUTION: An auxiliary device 2 includes: cutting blade storage means 4; carrying-in / out means 6 which carries a cutting blade into / out from the cutting blade storage means 4; Y axis direction positioning means 8 which positions the carrying-in / out means 6 at an action position and a retreat position in a Y axis direction; Z axis moving means 10 which moves the carrying-in / out means 6 in a Z axis direction; and X axis moving means 12 which moves the carrying-in / out means 6 in an X axis direction and acts on the cutting blade attached to a spindle of cutting means of a cutting device. The carrying-in / out means 6 includes: a Z rotary shaft 46 extending in the Z axis direction; a blade holding part 48 which is radially connected to the Z rotary shaft 46 and suctions and holds the cutting blade; and a fixed nut holding part 50 which causes a fixed nut to be threadedly engaged with or disengaged from a male screw 228 formed at a tip of the spindle. Further, the carrying-in / out means 6 is connected to a tip of a bending arm 112 through the Z rotary shaft 46.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an auxiliary device that is connected to a cutting device. [Background technology]

[0002] A wafer with multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines, is divided into individual device chips by a cutting machine, and each divided device chip is used in electrical equipment such as mobile phones and personal computers.

[0003] The cutting device comprises a chuck table with a holding surface that holds the wafer, cutting means having a cutting blade that cuts the wafer held on the chuck table attached with a fixing nut, X-axis feed means that feeds the chuck table in the X-axis direction for processing, Y-axis feed means that indexes and feeds the cutting means in the Y-axis direction that is perpendicular to the X-axis direction, and Z-axis feed means that notches and feeds the cutting means in the Z-axis direction that is perpendicular to the X-axis and Y-axis directions, and the holding surface is defined in the X-axis and Y-axis directions, so that the wafer can be divided into individual device chips with high precision.

[0004] The present applicant has also proposed an automatic blade changing device that can automatically change cutting blades attached to cutting means (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-98536 Summary of the Invention [Problem to be solved by the invention]

[0006] However, there is a problem in that it is difficult to later install an automatic exchange device on a cutting device that has already been delivered to a user.

[0007] SUMMARY OF THE INVENTION It is an object of the present invention to provide an auxiliary device for automatically changing cutting blades, which can be retrofitted to a cutting device that has already been delivered to the user. [Means for solving the problem]

[0008] According to the present invention, there is provided the following auxiliary device that solves the above-mentioned problems. "An auxiliary device is provided which is connected to a cutting device comprising a chuck table having a holding surface for holding a workpiece, a cutting means having a cutting blade attached with a fixing nut for cutting the workpiece held on the chuck table, an X-axis feed means for feeding the chuck table in the X-axis direction for processing, a Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means for cutting and feeding the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, and the holding surface is defined in the X-axis and Y-axis directions, The cutting device is provided with at least a cutting blade storage means for storing a plurality of cutting blades, a carry-in / out means for carrying cutting blades in and out of the cutting blade storage means, a Y-axis direction positioning means for positioning the carry-in / out means at an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means, a Z-axis movement means for moving the carry-in / out means in the Z-axis direction, and an X-axis movement means for moving the carry-in / out means in the X-axis direction to act on the cutting blades attached to the spindle of the cutting means, The carry-in / out means includes a Z rotation shaft extending in the Z-axis direction, a blade holding section radially connected to the Z rotation shaft for suction-holding the cutting blade, and a fixing nut holding section for screwing the fixing nut onto and unscrewing from a male screw formed at the tip of the spindle, and is connected to the tip of the bending arm via the Z rotation shaft. 、 The carrying-in / out means is disposed on a frame body via the bending arm, and the frame body is slidably supported on a guide rail extending in the Y-axis direction disposed on a lifting table, and is positioned at the operating position and the retracted position in the Y-axis direction relative to the cutting blade storage means by the Y-axis positioning means. "Assistive devices for the

[0009] Applicable The bending arm preferably moves the loading / unloading means forward and backward in the X-axis direction.

[0010] Furthermore, according to the present invention, there is provided the following auxiliary device that solves the above-mentioned problems. "An auxiliary device is provided which is connected to a cutting device comprising a chuck table having a holding surface for holding a workpiece, a cutting means having a cutting blade attached with a fixing nut for cutting the workpiece held on the chuck table, an X-axis feed means for feeding the chuck table in the X-axis direction for processing, a Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means for cutting and feeding the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, and the holding surface is defined in the X-axis and Y-axis directions, The cutting device is provided with at least a cutting blade storage means for storing a plurality of cutting blades, a carry-in / out means for carrying cutting blades in and out of the cutting blade storage means, a Y-axis direction positioning means for positioning the carry-in / out means at an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means, a Z-axis movement means for moving the carry-in / out means in the Z-axis direction, and an X-axis movement means for moving the carry-in / out means in the X-axis direction to act on the cutting blades attached to the spindle of the cutting means, the carry-in / out means includes a Z rotation shaft extending in the Z-axis direction, a blade holding portion radially connected to the Z rotation shaft for suction-holding the cutting blade, and a fixing nut holding portion for screwing the fixing nut onto and unscrewing a male screw formed at the tip of the spindle, and is connected to the tip of the bending arm via the Z rotation shaft; The cutting blade storage means includes a drive gear having a rotation axis extending in the Y-axis direction, a driven gear spaced apart from the drive gear in the Z-axis direction and having a rotation axis extending in the Y-axis direction, an endless track wound around the drive gear and the driven gear, and blade support shafts extending in the Y-axis direction that are disposed at predetermined intervals on the endless track and inserted into central openings of the cutting blades to support the cutting blades. Assistive devices are provided. It is desirable that the distance between the drive gear and the driven gear in the Z-axis direction be adjustable and that the length of the endless track be adjustable.

[0011] The cutting blade stored in the cutting blade storage means is a hub blade with a cutting edge arranged on the outer periphery of a base, the blade support shaft has an outer diameter corresponding to the inner diameter of the central opening of the hub blade, and the blade holding portion preferably holds the hub blade.

[0012] The cutting blade stored in the cutting blade storage means may be a washer blade consisting of a cutting edge formed in an annular shape, the blade support shaft may have an outer diameter corresponding to the inner diameter of the central opening of the washer blade, and the blade holding portion may hold a washer blade and an attachment flange for attaching the washer blade to the spindle of the cutting means. [Effects of the Invention]

[0013] The present invention In one aspect The auxiliary equipment is an auxiliary device connected to a cutting device comprising: a chuck table having a holding surface for holding a workpiece; cutting means having a cutting blade attached with a fixing nut for cutting the workpiece held on the chuck table; X-axis feed means for feeding the chuck table in an X-axis direction for processing; Y-axis feed means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction; and Z-axis feed means for cutting and feeding the cutting means in a Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is defined in the X-axis and Y-axis directions; The cutting device is provided with at least a cutting blade storage means for storing a plurality of cutting blades, a carry-in / out means for carrying cutting blades in and out of the cutting blade storage means, a Y-axis direction positioning means for positioning the carry-in / out means at an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means, a Z-axis movement means for moving the carry-in / out means in the Z-axis direction, and an X-axis movement means for moving the carry-in / out means in the X-axis direction to act on the cutting blades attached to the spindle of the cutting means, The carry-in / out means includes a Z rotation shaft extending in the Z-axis direction, a blade holding section radially connected to the Z rotation shaft for suction-holding the cutting blade, and a fixing nut holding section for screwing the fixing nut onto and unscrewing from a male screw formed at the tip of the spindle, and is connected to the tip of the bending arm via the Z rotation shaft. 、 The carrying-in / out means is disposed on a frame body via the bending arm, and the frame body is slidably supported on a guide rail extending in the Y-axis direction disposed on a lifting table, and is positioned at the operating position and the retracted position in the Y-axis direction relative to the cutting blade storage means by the Y-axis positioning means. Therefore, it can be installed later on cutting equipment that has already been delivered to the user. Furthermore, an assisting device according to one aspect of the present invention includes: an auxiliary device connected to a cutting device comprising: a chuck table having a holding surface for holding a workpiece; cutting means having a cutting blade attached with a fixing nut for cutting the workpiece held on the chuck table; X-axis feed means for feeding the chuck table in an X-axis direction for processing; Y-axis feed means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction; and Z-axis feed means for cutting and feeding the cutting means in a Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is defined in the X-axis and Y-axis directions; The cutting device is provided with at least a cutting blade storage means for storing a plurality of cutting blades, a carry-in / out means for carrying cutting blades in and out of the cutting blade storage means, a Y-axis direction positioning means for positioning the carry-in / out means at an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means, a Z-axis movement means for moving the carry-in / out means in the Z-axis direction, and an X-axis movement means for moving the carry-in / out means in the X-axis direction to act on the cutting blades attached to the spindle of the cutting means, the carry-in / out means includes a Z rotation shaft extending in the Z-axis direction, a blade holding portion radially connected to the Z rotation shaft for suction-holding the cutting blade, and a fixing nut holding portion for screwing the fixing nut onto and unscrewing a male screw formed at the tip of the spindle, and is connected to the tip of the bending arm via the Z rotation shaft; The cutting blade storage means includes a drive gear having a rotation axis extending in the Y-axis direction, a driven gear spaced apart from the drive gear in the Z-axis direction and having a rotation axis extending in the Y-axis direction, an endless track wound around the drive gear and the driven gear, and blade support shafts extending in the Y-axis direction that are disposed at predetermined intervals on the endless track and inserted into central openings of the cutting blades to support the cutting blades. Therefore, it can be attached to cutting equipment that has already been delivered to the user. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a perspective view of an auxiliary device constructed in accordance with the present invention; [Figure 2] FIG. 2 is an exploded perspective view of the cutting blade storage means shown in FIG. 1; [Figure 3] FIG. 3 is a perspective view of the blade support shaft shown in FIG. 2. [Figure 4] FIG. 3 is a cross-sectional view of the blade support shaft shown in FIG. 2. [Figure 5] FIG. 4 is a perspective view of a blade support shaft that supports a washer blade. [Figure 6] FIG. 2 is a perspective view of the loading / unloading means shown in FIG. [Figure 7] FIG. 2 is an exploded perspective view of the frame, the lift-up table, and the base frame shown in FIG. [Figure 8]FIG. 2 is an exploded perspective view of the frame shown in FIG. [Figure 9] 2 is a perspective view of a cutting device to which the auxiliary device shown in FIG. 1 is connected. [Figure 10] FIG. 10 is a perspective view of the chuck table shown in FIG. 9. [Figure 11] FIG. 10 is a perspective view of the cutting means shown in FIG. 9. [Figure 12] FIG. 12 is a perspective view of the cutting means shown in FIG. 11 with the blade cover open. [Figure 13] FIG. 10 is an exploded perspective view of the cutting means shown in FIG. 9. [Figure 14] FIG. 10 is an exploded perspective view of the cutting means when a washer blade is attached. [Figure 15] 10 is a perspective view showing a state in which the auxiliary device shown in FIG. 1 is connected to the cutting device shown in FIG. 9. [Figure 16] 2 is a perspective view showing a state in which the cutting blade storage means and the carrying-in / out means of the auxiliary device shown in FIG. 1 face each other. FIG. [Figure 17] 17 is a perspective view showing a state in which the frame body has advanced from the state shown in FIG. 16 toward the cutting blade storage means. FIG. [Figure 18] 18 is a perspective view showing a state in which the frame body has retracted from the state shown in FIG. 17 and the lift table has risen. [Figure 19] 19 is a perspective view showing a state in which the carry-in / out means has advanced from the state shown in FIG. 18 toward the cutting device. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, preferred embodiments of an auxiliary device constructed according to the present invention will be described with reference to the drawings.

[0016] (auxiliary device 2) Referring to Figure 1, the auxiliary device, generally designated by the reference numeral 2, comprises at least a cutting blade storage means 4 for storing a plurality of cutting blades, a loading / unloading means 6 for loading and unloading cutting blades from the cutting blade storage means 4, a Y-axis positioning means 8 for positioning the loading / unloading means 6 in an active position and a retracted position in the Y-axis direction relative to the cutting blade storage means 4, a Z-axis moving means 10 for moving the loading / unloading means 6 in the Z-axis direction, and an X-axis moving means 12 for moving the loading / unloading means 6 in the X-axis direction to act on a cutting blade attached to the spindle of the cutting means of the cutting device.

[0017] The X-axis direction is the direction indicated by the arrow X in Fig. 1, and the Y-axis direction is the direction indicated by the arrow Y in Fig. 1, which is a direction perpendicular to the X-axis direction. The Z-axis direction is the direction indicated by the arrow Z in Fig. 1, which is an up-down direction perpendicular to the X-axis and Y-axis directions. The plane defined by the X-axis and Y-axis directions is substantially horizontal.

[0018] (Cutting blade storage means 4) As shown in Figure 2, the cutting blade storage means 4 includes a drive gear 16 having a rotation axis 14 extending in the Y-axis direction, a driven gear 20 spaced apart from the drive gear 16 in the Z-axis direction and having a rotation axis 18 extending in the Y-axis direction, an endless track 22 wound around the drive gear 16 and the driven gear 20, and a blade support shaft 24 extending in the Y-axis direction, arranged at a predetermined interval on the endless track 22, inserted into the central opening of the cutting blade, and supporting the cutting blade.

[0019] (Drive gear 16) 1 and 2, the cutting blade storage means 4 of the illustrated embodiment includes a base plate 26 (see FIG. 1), a support wall 28 extending upward from the upper surface of the base plate 26, and a motor 30 fixed to one surface of the support wall 28. As shown in FIG. 2, the motor 30 is connected to the rotation shaft 14 of the drive gear 16, and the motor 30 rotates the drive gear 16 about its axis in the Y-axis direction.

[0020] (Driven gear 20) 2, driven gear 20 is disposed above drive gear 16, and rotation shaft 18 of driven gear 20 is supported by support wall 28 so as to be rotatable about the Y-axis direction and movable up and down in the Z-axis direction. Support wall 28 is provided with an elevating means (not shown) for elevating driven gear 20 in the Z-axis direction. The elevating means may include a ball screw connected to rotation shaft 18 of driven gear 20 and extending in the Z-axis direction, and a motor for rotating this ball screw.

[0021] (Infinite track 22) The endless track 22 is made up of a number of interconnected link pieces (reference numerals omitted) and is wound around the drive gear 16 and the driven gear 20. The endless track 22 rotates in response to the rotation of the drive gear 16 by the motor 30.

[0022] In the cutting blade storage means 4 of the illustrated embodiment, the distance between the drive gear 16 and the driven gear 20 in the Z-axis direction can be adjusted by changing the position of the driven gear 20 in the Z-axis direction using the lifting means. Also, in the cutting blade storage means 4, the length of the endless track 22 can be adjusted by appropriately increasing or decreasing the number of link pieces of the endless track 22.

[0023] (Blade support shaft 24) 2, multiple blade support shafts 24 are arranged at predetermined intervals on the endless track 22. Furthermore, as can be understood by referring to FIG. 3 together with FIG. 2, the blade support shaft 24 has a cylindrical base 32 connected to the endless track 22 and a cylindrical shaft 34 extending in the Y-axis direction from the end face of the base 32. The diameter of the shaft 34 is smaller than the diameter of the base 32.

[0024] (Hub Blade 36) FIG. 3 also shows a hub blade 36 as a cutting blade stored in the cutting blade storage means 4. The hub blade 36 has an annular base 38 and an annular cutting blade 40 disposed on the outer periphery of the base 38. The base 38 may be formed from an appropriate metal material such as an aluminum alloy. A circular central opening 38a is provided in the center of the base 38. The cutting blade 40 is formed to a predetermined thickness (for example, approximately 10 to 30 μm) from abrasive grains such as diamond and a binder such as metal or resin, and protrudes radially outward from the outer periphery of the base 38.

[0025] In the illustrated embodiment, the shaft portion 34 of the blade support shaft 24 has an outer diameter corresponding to the inner diameter of the central opening 38a of the hub blade 36, and in the blade support shaft 24, the shaft portion 34 is inserted into the central opening 38a of the hub blade 36 so that multiple (e.g., five) hub blades 36 are supported by the shaft portion 34.

[0026] In the illustrated embodiment, as can be understood by referring to Figure 2, hub blades 36 are supported on half of the blade support shafts 24. Also, as shown in Figure 3, a plurality of ball plungers 42 are attached at intervals in the circumferential direction to the tip end side of the shaft portion 34 to prevent the hub blades 36 supported by the shaft portion 34 from popping out.

[0027] As shown in Fig. 4, a flow path 32a is formed inside each base portion 32 of the blade support shaft 24, and a plurality of flow paths 22a communicating with one end of each flow path 32a are formed in the endless track 22. The other end of each flow path 32a opens at the end face of the base portion 32 radially outward from the shaft portion 34, as shown in Fig. 3.

[0028] 2, an air nozzle 44 is provided on the support wall 28 below the drive gear 16 and protrudes in the Y-axis direction, and the air nozzle 44 is connected to a high-pressure air supply means (not shown). In the illustrated embodiment, the tip of the air nozzle 44 faces the blade support shaft 24 located at the lowest end in the orbit of the blade support shaft 24 that follows the rotation of the endless track 22.

[0029] When the hub blade 36 located at the tip end of the shaft 34 is carried out, high-pressure air is supplied from the air nozzle 44 to the flow path 32a of the base 32 of the blade support shaft 24 located at the lowest end via the flow path 22a of the endless track 22, thereby pushing the hub blade 36 remaining on the shaft 34 toward the tip end of the shaft 34. However, the action of the ball plunger 42 prevents the hub blade 36 from falling off the shaft 34.

[0030] (Washer blade 45) The cutting blades stored in the cutting blade storage means 4 are not limited to the hub blades 36 described above, but may also be washer blades 45 shown in FIG. 5. The washer blade 45 is composed of a cutting edge formed in an annular shape. When the washer blades 45 are stored in the cutting blade storage means 4, the shaft portion 34 of the blade support shaft 24 is formed with an outer diameter D that corresponds to the inner diameter of the central opening 45a of the washer blade 45. The shaft portion 34 is then inserted into the central opening 45a of the washer blade 45, and multiple (e.g., 10) washer blades 45 are supported by the shaft portion 34.

[0031] The cutting blade storage means 4 may be configured to store only either the hub blade 36 or the washer blade 45, or may be configured to store both the hub blade 36 and the washer blade 45.

[0032] (Carrying in / out means 6) The carry-in / out means 6 will be described with reference to Figure 6. The carry-in / out means 6 includes at least a Z rotation shaft 46 extending in the Z-axis direction, a blade holding part 48 that is radially connected to the Z rotation shaft 46 and that holds the cutting blade by suction, and a fixing nut holding part 50 that screws a fixing nut onto and unscrews a male thread formed at the tip of the spindle of the cutting device.

[0033] 6, the loading / unloading means 6 of the illustrated embodiment further includes a casing 52, which has a regular hexagonal top plate 54 and six rectangular side walls 56 hanging down from the periphery of the top plate 54. The Z rotation shaft 46 protrudes from the upper surface of the top plate 54. A motor (not shown) connected to the Z rotation shaft 46 is housed inside the casing 52.

[0034] In the illustrated embodiment, of the six side walls 56 of the casing 52, blade holders 48 are attached to four side walls 56, and fixing nut holders 50 are attached to two side walls 56, with the two fixing nut holders 50 being provided on a pair of opposing side walls 56.

[0035] (Blade holding part 48) The blade holding portion 48 is formed in a cylindrical shape, and the end surface 58 of the blade holding portion 48 is provided with a circular central opening 60 that can receive the shaft portion 34 of the blade support shaft 24 and the tip of the spindle of the cutting device, and a plurality of first suction holes 61 arranged at equal intervals circumferentially around the central opening 60.

[0036] An annular protrusion 62 is provided on the outer periphery of the end face 58. Second suction holes 63 are formed in the annular protrusion 62 and are arranged at equal intervals in the circumferential direction. The first and second suction holes 61, 63 are connected to suction means (not shown).

[0037] The inner diameter of the annular protrusion 62 is slightly larger than the outer diameter D of the shaft 34 that supports the washer blade 45, so that the annular protrusion 62 can receive the shaft 34 that supports the washer blade 45.

[0038] When the blade holding portion 48 is positioned at a position where the end face 58 of the blade holding portion 48 contacts the base 38 of the hub blade 36 stored in the cutting blade storage means 4, the suction means generates suction force in the first suction hole 61 to suction-hold the hub blade 36.

[0039] In addition, when the blade holding portion 48 holds the washer blade 45, it generates suction force in the second suction hole 63 using the suction means to suction and hold the washer blade 45 stored in the cutting blade storage means 4.

[0040] (Fixing nut holding portion 50) Continuing the explanation with reference to Figure 6, the fixing nut holding portion 50 includes a cylindrical housing 64 fixed to the side wall 56 of the casing 52, an annular rotating body 66 rotatably accommodated inside the housing 64, and a motor (not shown) that rotates the rotating body 66.

[0041] A central opening 68 capable of receiving the tip of a spindle of a cutting device is formed in the rotor 66. A plurality of suction holes 70 and a plurality of pins 72 are alternately provided at intervals in the circumferential direction on an end surface 66a of the rotor 66.

[0042] Each suction hole 70 is connected to suction means (not shown). The pin 72 is positioned at a position (position shown in FIG. 6) where it protrudes from the end face 66a of the rotor 66 by a spring (not shown) built into the rotor 66, and when the pin 72 is pushed toward the inside of the rotor 66, the spring contracts and the pin 72 is accommodated inside the rotor 66. The pin 72 is also positioned to correspond to the position of a pin hole formed in the fixing nut.

[0043] In the fixing nut holding portion 50, a suction force is generated in each suction hole 70 by the suction means to hold the fixing nut by suction, and by rotating the rotating body 66 by the motor with a pin 72 inserted into the pin hole formed in the fixing nut, the fixing nut for fixing the hub blade 36 or washer blade 45 to the spindle of the cutting device can be screwed and unscrewed onto the male thread formed at the tip of the spindle.

[0044] Furthermore, even if the position of pin 72 of fixing nut holding portion 50 is misaligned with the position of the pin hole of the fixing nut when unscrewing (removing) the fixing nut from the spindle, by positioning end face 66a of rotating body 66 on the end face of the fixing nut attached to the spindle and storing pin 72 inside rotating body 66, and then rotating rotating body 66 with the motor, when the position of pin 72 aligns with the position of the pin hole, pin 72 will be pushed out by the spring and inserted into the pin hole.

[0045] In the illustrated embodiment, the carry-in / out means 6, which may be configured as described above, is disposed inside a frame 74, as shown in Fig. 1. The frame 74 is supported on a lift table 76 so as to be movable in the Y-axis direction, and the lift table 76 is supported on a base stand 78 so as to be movable up and down in the Z-axis direction.

[0046] (Frame 74) 1 and 7, the frame 74 includes a rectangular plate-shaped bottom 80, four support posts 82 extending upward from the four corners of the upper surface of the bottom 80, and a plate-shaped ceiling 84 (see FIG. 1) fixed to the upper ends of the support posts 82. A pair of guided members 86, each having a groove 86a extending in the Y-axis direction, are provided on the lower surface of the bottom 80 at a distance in the X-axis direction.

[0047] (Lift table 76) The lift table 76 includes a rectangular top plate 88 and four cylindrical legs 90 extending downward from the four corners of the underside of the top plate 88. A pair of guide rails 92 extending in the Y-axis direction and spaced apart in the X-axis direction are provided on the upper surface of the top plate 88. The pair of guide rails 92 are slidably fitted into grooves 86a of a pair of guided members 86 of the frame body 74.

[0048] (Y-axis direction positioning means 8) Furthermore, a Y-axis direction positioning means 8 is provided on the upper surface of the top plate 88 of the lift table 76. The Y-axis direction positioning means 8 has a ball screw 94 extending in the Y-axis direction between a pair of guide rails 92, and a motor 96 that rotates the ball screw 94. A nut portion (not shown) of the ball screw 94 is fixed to the lower surface of the bottom portion 80 of the frame body 74.

[0049] In the Y-axis direction positioning means 8, the rotational motion of the motor 96 is converted into linear motion by a ball screw 94 and transmitted to the frame body 74, which moves in the Y-axis direction along a pair of guide rails 92. In this way, the frame body 74 on which the carrying-in / out means 6 is disposed is slidably supported by the guide rails 92 extending in the Y-axis direction and disposed on the lifting table 76, and can be positioned by the Y-axis direction positioning means 8 at an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means 4.

[0050] The operating position is a position where the blade holding portion 48 of the carrying-in / out means 6 is close to the cutting blade storage means 4, and where the cutting blade supported by the cutting blade storage means 4 can be sucked and held by the blade holding portion 48. The retracted position is a position where the blade holding portion 48 of the carrying-in / out means 6 is farther away from the cutting blade storage means 4 than the operating position.

[0051] (Base stand 78) 7, the base stand 78 includes a frame 98 and a rectangular base plate 100 fixed to the upper part of the frame 98. Four circular holes 102 are formed in the four corners of the base plate 100, into which the legs 90 of the lift table 76 are slidably inserted. In addition, a female screw 104 is formed in the center of the base plate 100.

[0052] (Z-axis moving means 10) Continuing the explanation with reference to Figure 7, Z-axis movement means 10 is connected to the lift table 76 and the base frame 78. Z-axis movement means 10 includes a ball screw 106 extending in the Z-axis direction, a motor 108 that rotates the ball screw 106, and a connecting plate 110 fixed to the upper end of the motor 108. The ball screw 106 is threadedly engaged with a female screw 104 of the base plate 100. The connecting plate 110 is fixed to the underside of the top plate 88 of the lift table 76 by appropriate connecting means such as bolts (not shown).

[0053] In the Z-axis moving means 10, the ball screw 106 converts the rotational motion of the motor 108 into linear motion, and the lifting table 76 is raised and lowered relative to the base stand 78, thereby moving the frame 74 in which the loading / unloading means 6 is arranged in the Z-axis direction.

[0054] (X-axis moving means 12) 8, the X-axis moving means 12 includes a bending arm 112 attached to the frame body 74, and a first motor 114 and a second motor 115 that operate the bending arm 112. The bending arm 112 has a first arm piece 118 swingably connected to the underside of the ceiling portion 84 of the frame body 74 via a spacer 116, and a second arm piece 120 swingably connected to the underside of the first arm piece 118.

[0055] Spacer 116 is disposed at one end of first arm piece 118. First arm piece 118 is connected to ceiling 84 with the spacer 116 side as the swing center. A spacer 122 is also provided on the upper surface of the other end of first arm piece 118. Second arm piece 120 is connected to first arm piece 118 with the spacer 122 side as the swing center.

[0056] A circular hole (not shown) is provided at the tip of the second arm piece 120 (the end opposite to the spacer 122). The Z rotation shaft 46 of the loading / unloading means 6 is inserted into this circular hole, and the Z rotation shaft 46 is fixed to the second arm piece 120 so as not to rotate. When the motor of the loading / unloading means 6 connected to the Z rotation shaft 46 is driven, the casing 52 of the loading / unloading means 6 rotates relative to the second arm piece 120, and the blade holder 48 and the fixing nut holder 50 are positioned in any orientation. In this way, the loading / unloading means 6 is connected to the tip of the bending arm 112 via the Z rotation shaft 46, and is disposed in the frame 74 via the bending arm 112.

[0057] In the X-axis moving means 12, the first motor 114 swings the first arm piece 118 around the spacer 116 side as the swing center, and the second motor 115 swings the second arm piece 120 around the spacer 122 side as the swing center, thereby bending or extending the bending arm 112 and moving the loading / unloading means 6 in the X-axis direction.

[0058] Next, the cutting device 170 to which the above-described auxiliary device 2 is connected will be described with reference to FIGS.

[0059] (Cutting device 170) As shown in FIG. 9, the cutting device 170 includes a chuck table 172 having a holding surface for holding a workpiece, cutting means 174 having a cutting blade attached with a fixing nut for cutting the workpiece held on the chuck table 172, X-axis feeding means 176 for feeding the chuck table 172 in the X-axis direction for processing, Y-axis feeding means 178 for indexing and feeding the cutting means 174 in the Y-axis direction perpendicular to the X-axis direction, and Z-axis feeding means 180 for feeding the cutting means 174 in the Z-axis direction perpendicular to the X-axis and Y-axis directions.

[0060] (Chuck table 172) 9 and 10, the cutting device 170 includes an X-axis movable plate 184 provided on the upper surface of a base 182 (see FIG. 9) so as to be movable in the X-axis direction, a support column 186 fixed to the upper surface of the X-axis movable plate 184, and a cover plate 188 fixed to the upper end of the support column 186. A circular opening 188a is formed in the cover plate 188. The chuck table 172 is rotatably mounted on the upper end of the support column 186 and extends upward through the circular opening 188a in the cover plate 188. The chuck table 172 is rotated about the Z-axis direction by a motor (not shown) built into the support column 186.

[0061] 10, a circular porous suction chuck 190 connected to a suction means (not shown) is disposed on the upper end portion of the chuck table 172. In the chuck table 172, the suction means generates a suction force on the upper surface of the suction chuck 190, thereby suction-holding a workpiece placed on the upper surface of the suction chuck 190.

[0062] In this way, in the chuck table 172, the upper surface of the suction chuck 190 serves as a holding surface for holding the workpiece, and the holding surface is positioned on the XY plane defined by the X-axis and Y-axis directions. In addition, a plurality of clamps 192 are arranged around the periphery of the chuck table 172 at intervals in the circumferential direction.

[0063] (X-axis feed means 176) 10, X-axis feed means 176 has a ball screw 198 that is connected to X-axis movable plate 184 and extends in the X-axis direction, and a motor 200 that rotates ball screw 198. X-axis feed means 176 converts the rotational motion of motor 200 into linear motion using ball screw 198 and transmits it to X-axis movable plate 184, moving X-axis movable plate 184 along guide rails 182a of base 182 and feeding chuck table 172 for processing in the X-axis direction.

[0064] 9, the cutting device 170 includes a gate-shaped frame 202 arranged across the chuck table 172. The frame 202 has a pair of support columns 204 spaced apart in the Y-axis direction and extending upward from the upper surface of the base 182, and a beam 206 that is bridged between the upper ends of the pair of support columns 204 and extends in the Y-axis direction.

[0065] (Cutting means 174) A pair of cutting means 174 are provided on one side surface of the beam 206 (the side surface on the rear side in FIG. 9) at a distance in the Y-axis direction. In the cutting device 170 of the illustrated embodiment, a pair of cutting means 174 is provided so that the cutting blades face each other, and a workpiece held on the chuck table 172 can be simultaneously cut by the pair of cutting blades. Note that the number of cutting means 174 may be one.

[0066] As shown in Figure 11, each cutting means 174 comprises a rectangular Y-axis movable member 208 supported on one side of a beam 206 so as to be freely movable in the Y-axis direction, a Z-axis movable member 210 with an L-shaped cross section supported on the Y-axis movable member 208 so as to be freely raised and lowered in the Z-axis direction, and a spindle housing 212 fixed to the lower end of the Z-axis movable member 210.

[0067] A pair of guided grooves 208a extending in the Y-axis direction and spaced apart in the Z-axis direction are formed on one side surface of the Y-axis movable member 208 (the side surface on the near side in Figure 11), and the guided grooves 208a are slidably connected to a pair of guide rails (not shown) extending in the Y-axis direction and spaced apart in the vertical direction on one side surface of the beam 206.

[0068] (Y-axis feed means 178) Y-axis feed means 178 has a ball screw 214 extending in the Y-axis direction on one side surface of beam 206, and a motor 216 that rotates ball screw 214. Ball screw 214 is connected to Y-axis movable member 208. Y-axis feed means 178 converts the rotational motion of motor 216 into linear motion using ball screw 214 and transmits it to Y-axis movable member 208, and indexes and feeds Y-axis movable member 208 in the Y-axis direction along a guide rail attached to one side surface of beam 206.

[0069] A pair of guide rails (not shown) extending in the Z-axis direction and spaced apart in the Y-axis direction are formed on the other side of Y-axis movable member 208 (the side on the back side in Figure 11), and Z-axis movable member 210 has a pair of guided grooves (not shown) that are slidably connected to the pair of guide rails of Y-axis movable member 208.

[0070] (Z-axis feed means 180) Z-axis feed means 180 has a ball screw (not shown) that is connected to Z-axis movable member 210 and extends in the Z-axis direction, and motor 218 that rotates this ball screw. Z-axis feed means 180 converts the rotational motion of motor 218 into linear motion using the ball screw and transmits it to Z-axis movable member 210, and feeds Z-axis movable member 210 in the Z-axis direction along the guide rail of Y-axis movable member 208.

[0071] Explaining with reference to Fig. 12, the spindle housing 212 supports a cylindrical spindle 220 rotatably about the Y-axis direction, and also houses a motor (not shown) that rotates the spindle 220. A cutting blade that cuts the workpiece is detachably fixed to the tip of the spindle 220 by a fixing nut 222. Note that Fig. 12 shows an example in which a hub blade 36 is fixed to the spindle 220 as the cutting blade.

[0072] A blade cover 224 that covers the cutting blade is attached to the tip of the spindle housing 212. The blade cover 224 has a first cover member 224a fixed to the tip of the spindle housing 212 and a second cover member 224b movably attached to the tip of the first cover member 224a. The second cover member 224b is adapted to be moved in the X-axis direction by an appropriate actuator (not shown) such as an air cylinder, and is positioned in the open position shown in Fig. 12 when replacing the cutting blade, and in the closed position shown in Fig. 11 when performing cutting processing.

[0073] 13, an annular mount flange 226 that protrudes radially outward is provided on the outer peripheral surface of the tip end of spindle 220. An annular recess 226a is formed in the radially inner portion of the tip end face of mount flange 226, and an annular receiving portion 226b that protrudes axially is formed on the outer peripheral portion of the tip end face of mount flange 226. Furthermore, an external thread 228 is formed on the outer peripheral surface of spindle 220 further tip side than mount flange 226.

[0074] When the hub blade 36 is attached to the spindle 220 as a cutting blade, the central opening 38a of the hub blade 36 fits into the tip of the spindle 220, and the male thread 228 of the spindle 220 is screwed (fastened) into the fixing nut 222, whereby the hub blade 36 is sandwiched between the receiving portion 226b of the mount flange 226 and the fixing nut 222 and detachably fixed to the tip of the spindle 220. In addition, a plurality of pin holes 222a, into which pins 72 of the fixing nut holding portion 50 of the loading / unloading means 6 are inserted, are formed on the side surface of the fixing nut 222 at equal intervals in the circumferential direction.

[0075] Furthermore, when a washer blade 45 is attached to the spindle 220 as a cutting blade, as shown in Figure 14, the washer blade 45 is sandwiched between the receiving portion 226b of the mount flange 226 and the annular attachment flange 229, and the male thread 228 of the spindle 220 is screwed (fastened) to the fixing nut 222, thereby removably fixing the washer blade 45 to the tip of the spindle 220.

[0076] The rear surface of the mounting flange 229 is provided with an annular protrusion 229a having an outer diameter D (the same as the outer diameter D of the shaft 34 of the cutting blade storage means 4) that corresponds to the inner diameter of the central opening 45a of the washer blade 45. When the washer blade 45 is fixed to the spindle 220, the central opening 45a of the washer blade 45 is fitted into the protrusion 229a.

[0077] As shown in Figure 9, a pair of imaging means 230 for imaging the workpiece held on the chuck table 172 is mounted on the other side of the beam 206 of the frame 202 (the side facing the front in Figure 9) so as to be movable in the Y-axis direction, and a pair of moving means 232 for moving the imaging means 230 in the Y-axis direction is also mounted on the other side (the side facing the front in Figure 9).

[0078] The moving means 232 has a ball screw 234 extending in the Y-axis direction on the other side surface of the beam 206, and a motor 236 that rotates the ball screw 234. The ball screw 234 is connected to the imaging means 230. The moving means 232 converts the rotational motion of the motor 236 into linear motion and transmits it to the imaging means 230, moving the imaging means 230 in the Y-axis direction along a guide rail 206a attached to the other side surface of the beam 206. It is noted that the number of imaging means 230 may be one.

[0079] (cutting) When cutting a workpiece such as a wafer using the cutting device 170, the workpiece is first sucked onto the chuck table 172. Next, the X-axis feed means 176 moves the chuck table 172 below the imaging means 230, and the moving means 232 adjusts the position of the imaging means 230 in the Y-axis direction. Next, the imaging means 230 captures an image of the workpiece from above, and the cutting region of the workpiece is detected.

[0080] Next, based on the cutting area of ​​the workpiece detected by the imaging means 230, the chuck table 172 is rotated to adjust the orientation of the cutting area of ​​the workpiece relative to the cutting blades of the cutting means 174. Next, the chuck table 172 is moved in the X-axis direction by the X-axis feed means 176, and the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178, so that the pair of cutting blades is positioned above the cutting area of ​​the workpiece.

[0081] Next, the spindle housing 212 is lowered by the Z-axis feed means 180, and the cutting edge of the cutting blade, which is rotating at high speed, is caused to cut into the cutting area of ​​the workpiece. At the same time, cutting water is supplied to the part where the cutting edge of the cutting blade is to be cut, and the chuck table 172 is fed in the X-axis direction for processing, thereby performing a predetermined cutting process on the cutting area of ​​the workpiece. The spindle housing 212 is indexed and fed in the Y-axis direction by the Y-axis feed means 178, and the above cutting process is repeated as appropriate, until the entire cutting area of ​​the workpiece is cut. After the cutting process is completed, the machined workpiece is transported to the next process.

[0082] (Cutting blade replacement) When the cutting process is repeatedly performed, the cutting blade wears, and when the wear of the cutting blade reaches a predetermined amount, cutting accuracy cannot be maintained, so the cutting blade attached to the spindle 220 needs to be replaced with a new cutting blade. Also, even if the wear of the cutting blade attached to the spindle 220 has not reached the predetermined amount, when cutting a workpiece made of a material different from that of the workpiece previously cut, it may be necessary to replace the cutting blade with one that suits the material of the workpiece.

[0083] In the illustrated embodiment, as shown in FIG. 15, an auxiliary device 2 capable of automatically replacing the cutting blade of the cutting device 170 is connected to the cutting device 170, and the following describes a method for replacing the hub blade 36 using the auxiliary device 2.

[0084] 15, the auxiliary device 2 is disposed at the rear side of the cutting device 170 in the X-axis direction, and can be attached later to a cutting device 170 that has already been delivered to a user. When using the auxiliary device 2 to replace a cutting blade attached to the cutting device 170, first, the endless track 22 of the cutting blade storage means 4 is rotated, and the blade support shaft 24 supporting the new hub blade 36 to be brought into the cutting device 170 is positioned at a predetermined position (for example, the lowest position in the track of the blade support shaft 24).

[0085] Next, as shown in Figure 16, the casing 52 is rotated by a motor connected to the Z rotation shaft 46 of the loading / unloading means 6, and the side wall 56 of the casing 52 on which the blade holding portion 48 is attached is aligned in the X-axis direction, so that the blade holding portion 48 faces the cutting blade storage means 4.

[0086] In addition, the X-axis moving means 12 and the Z-axis moving means 10 are operated to adjust the X-axis and Z-axis positions of the blade holding portion 48 so that the shaft portion 34 of the blade support shaft 24 in the predetermined position can be inserted into the central opening 60 of the blade holding portion 48 (see Figure 6).

[0087] 17, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the loading / unloading means 6 is positioned at an operating position where the hub blade 36 supported by the blade support shaft 24 can be held by the blade holding portion 48. As a result, the shaft portion 34 of the blade support shaft 24 in the predetermined position is inserted into the central opening 60 of the blade holding portion 48, and the end face 58 of the blade holding portion 48 is brought into contact with the end face of the hub blade 36 located on the tip side of the shaft portion 34. Next, a suction force is generated in the first suction hole 61 of the blade holding portion 48, and the hub blade 36 located on the tip side of the shaft portion 34 is suction-held by the blade holding portion 48.

[0088] Next, the Y-axis direction positioning means 8 is operated to move the loading / unloading means 6 away from the cutting blade storage means 4 in the Y-axis direction and position it at the retracted position. Next, the casing 52 of the loading / unloading means 6 is rotated 180° so that the blade holding part 48 opposite to the blade holding part 48 that suction-holds the hub blade 36 faces the cutting blade storage means 4.

[0089] Next, the Y-axis positioning means 8 is operated to position the loading / unloading means 6 at an operating position where the opposite blade holding portion 48 can hold the hub blade 36 of the blade support shaft 24. Next, a suction force is generated in the first suction hole 61 of the opposite blade holding portion 48, and the hub blade 36 located on the tip side of the shaft portion 34 is held by suction by the blade holding portion 48. As a result, a new hub blade 36 is held by suction by a pair of opposing blade holding portions 48 out of the four blade holding portions 48.

[0090] 18, the Y-axis positioning means 8 moves the frame 74 in the Y-axis direction, and the Z-axis moving means 10 moves the lifting table 76 in the Z-axis direction. This separates the loading / unloading means 6 from the cutting blade storage means 4 and positions it in the retracted position, and also adjusts the Y-axis and Z-axis positions of the loading / unloading means 6 relative to the cutting device 170. After the position adjustment, the Y-axis position of the loading / unloading means 6 is between the pair of cutting means 174 of the cutting device 170, and the Z-axis position of the loading / unloading means 6 after the position adjustment is above the holding surface of the chuck table 172.

[0091] 19, the X-axis moving means 12 moves the loading / unloading means 6 in the X-axis direction, and the X-axis position of the loading / unloading means 6 relative to the pair of cutting means 174 is adjusted. Specifically, the X-axis position of the center of the new pair of hub blades 36 held by suction by the pair of blade holding portions 48 of the loading / unloading means 6 is aligned with the X-axis position of the center of the pair of hub blades 36 attached to the pair of cutting means 174.

[0092] In addition, the Z-axis moving means 10 of the auxiliary device 2 or the Z-axis feeding means 180 of the cutting device 170 is operated to align the Z-axis position of the center of the hub blade 36 of the blade holding portion 48 with the Z-axis position of the center of the hub blade 36 of the cutting means 174.

[0093] Next, the casing 52 of the loading / unloading means 6 is rotated 60° so that the pair of fixing nut holding parts 50 face the hub blades 36 of the pair of cutting means 174. Note that the casing 52 may be rotated 60° before the loading / unloading means 6 is moved forward.

[0094] Next, the second cover member 224b of each blade cover 224 of the pair of cutting means 174 is positioned in the open position (see FIG. 12). Next, the cutting means 174 is moved in the Y-axis direction by the Y-axis feed means 178 of the cutting device 170, and the fixing nut 222 fixing the hub blade 36 to the spindle 220 is brought into contact with the end face 66a of the rotating body 66 of the fixing nut holder 50. As a result, the pin 72 of the fixing nut holder 50 is pushed by the fixing nut 222 and accommodated inside the rotating body 66, and the tip of the spindle 220 is accommodated in the central opening 68 of the rotating body 66.

[0095] Next, when the rotor 66 is rotated by the motor of the fixing nut holder 50, when each pin 72 aligns with the pin hole 222a of the fixing nut 222, the pins 72 fit into the pin hole 222a and the rotational motion of the rotor 66 is transmitted to the fixing nut 222 via the pins 72, loosening the fixing nut 222. This allows the fixing nut 222 to be unscrewed (removed) from the male thread 228 of the spindle 220 of the cutting means 174. Furthermore, suction force is generated in each suction hole 70 of the fixing nut holder 50, and the removed fixing nut 222 is sucked and held by the fixing nut holder 50.

[0096] Next, the cutting means 174 is moved away from the loading / unloading means 6 by the Y-axis feed means 178, and the casing 52 of the loading / unloading means 6 is rotated 60 degrees so that the empty blade holding portion 48 that is not holding the hub blade 36 by suction faces the hub blade 36 of the cutting means 174.

[0097] Next, the cutting means 174 is moved closer to the carry-in / out means 6 by the Y-axis feed means 178, and the spindle 220 of the cutting means 174 is inserted into the central opening 60 of the blade holding part 48, and the end face of the hub blade 36 of the cutting means 174 is brought into contact with the end face 58 of the empty blade holding part 48. Next, suction force is generated in the first suction hole 61 of the blade holding part 48, and the hub blade 36 of the cutting means 174 is suction-held by the blade holding part 48.

[0098] Next, the cutting means 174 is moved away from the loading / unloading means 6 by the Y-axis feed means 178, and the casing 52 of the loading / unloading means 6 is rotated 60 degrees so that the blade holding portion 48, which is holding the new hub blade 36 by suction, faces the spindle 220 of the cutting means 174.

[0099] Next, the Y-axis feed means 178 moves the cutting means 174 closer to the carry-in / out means 6, and the spindle 220 is inserted into the central opening 38a of the new hub blade 36 until the end face of the hub blade 36 comes into contact with the receiving portion 226b of the mounting flange 226 of the spindle 220. Next, the suction force of the blade holding portion 48 is released, and the new hub blade 36 is transferred from the blade holding portion 48 to the spindle 220.

[0100] Next, the cutting means 174 is moved away from the loading / unloading means 6 by the Y-axis feed means 178, and the casing 52 of the loading / unloading means 6 is rotated 60° so that the fixing nut holding portion 50, which is holding the removed fixing nut 222 by suction, faces the spindle 220 of the cutting means 174.

[0101] Next, the cutting means 174 is moved closer to the carry-in / out means 6 by the Y-axis feed means 178, and the fixing nut 222 held by suction by the fixing nut holding part 50 is fitted onto the tip of the spindle 220. Next, the motor of the fixing nut holding part 50 is operated in the opposite direction to when the fixing nut 222 was removed, causing the fixing nut 222 to rotate, and the fixing nut 222 is screwed (fastened) onto the male thread 228 of the spindle 220.

[0102] This allows the new hub blade 36 to be attached to the cutting means 174 to be fixed to the spindle 220 by being sandwiched between the receiving portion 226 b of the mount flange 226 of the spindle 220 and the fixing nut 222 .

[0103] Next, after releasing the suction force of the fixing nut holding portion 50, the second cover member 224b of the blade cover 224 of the cutting means 174 is positioned in the closed position. Note that the removal and attachment of the fixing nut 222 and the hub blade 36 as described above may be performed simultaneously for the pair of cutting means 174 or separately.

[0104] Next, the loading / unloading means 6 is retracted, and the casing 52 of the loading / unloading means 6 is rotated 60° so that one of the pair of removed hub blades 36 faces the cutting blade storage means 4. In addition, the endless track 22 of the cutting blade storage means 4 is rotated, and the empty blade support shaft 24 that is not supporting a hub blade 36 is positioned at a predetermined position (for example, the lowest position in the track of the blade support shaft 24).

[0105] Next, the X-axis moving means 12 and the Z-axis moving means 10 are operated to adjust the X-axis and Z-axis positions of the blade holding portion 48 so that the shaft portion 34 of the blade support shaft 24 in the specified position can be inserted into the central opening 38a of one of the hub blades 36 held by suction by the blade holding portion 48.

[0106] Next, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the shaft portion 34 of the blade support shaft 24 in the predetermined position is inserted into the central opening 38a of one of the hub blades 36 held by suction by the blade holding portion 48, and the end face of one of the hub blades 36 is brought into contact with the end face of the base portion 32 of the blade support shaft 24. Next, the suction force of the blade holding portion 48 is released, and one of the removed pair of hub blades 36 is transferred to the blade support shaft 24.

[0107] In addition, the Y-axis positioning means 8 moves the transporting / unloading means 6 away from the cutting blade storage means 4, and the casing 52 of the transporting / unloading means 6 is rotated 180 degrees so that the opposite blade holding portion 48, which is holding the other of the removed pair of hub blades 36 by suction, faces the cutting blade storage means 4.

[0108] Next, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the shaft portion 34 of the blade support shaft 24 in the predetermined position is inserted into the central opening 38a of the other hub blade 36 held by suction by the blade holding portion 48 on the opposite side, and the end face of the other hub blade 36 is brought into contact with the end face of the hub blade 36 supported by the blade support shaft 24. Next, the suction force of the blade holding portion 48 is released, and the other of the removed pair of hub blades 36 is transferred to the blade support shaft 24.

[0109] As described above, the auxiliary device 2 of the illustrated embodiment can be attached to a cutting device 170 that has already been delivered to a user, and the cutting blade attached to the cutting means 174 of the cutting device 170 can be replaced.

[0110] Although the above example has been described in which the hub blade 36 is replaced, in the illustrated embodiment, the washer blade 45 can also be replaced.

[0111] When replacing the washer blade 45, the carry-in / out means 6 is positioned between the pair of cutting means 174 of the cutting device 170 without the new replacement washer blade 45 being held by suction by the blade holding portion 48. Next, the fixing nut holding portion 50 is brought to face the cutting means 174, and the fixing nut 222 is removed from the spindle 220 of the cutting means 174 by the fixing nut holding portion 50.

[0112] Next, after the blade holding portion 48 is brought face to face with the cutting means 174, suction force is generated in the first suction hole 61 of the blade holding portion 48, the mounting flange 229 is held by suction by the blade holding portion 48, the mounting flange 229 is removed from the spindle 220, and suction force is generated in the second suction hole 63, and the washer blade 45 attached to the spindle 220 is held by the blade holding portion 48.

[0113] Next, the carry-in / out means 6 is moved to the cutting blade storage means 4, and the blade holding part 48, which is holding the mounting flange 229 and the washer blade 45 by suction, is brought face to face with the cutting blade storage means 4, and the suction force of the second suction hole 63 is released to store the washer blade 45 in the cutting blade storage means 4. Next, suction force is generated in the first suction hole 61 of the blade holding part 48, which is holding the mounting flange 229 by suction, and a new replacement washer blade 45 is held by the blade holding part 48 by suction. That is, the same blade holding part 48 holds the mounting flange 229 and the new replacement washer blade 45 by suction.

[0114] Next, the mounting flange 229 and the blade holder 48 holding the new washer blade 45 are brought to face the cutting means 174, and the mounting flange 229 and the new washer blade 45 are transferred to the spindle 220. Then, after the fixing nut holder 50 is brought to face the cutting means 174, the fixing nut 222 is screwed onto the male thread 228 of the spindle 220. In this way, the auxiliary device 2 can be attached to a cutting device 170 that has already been delivered to the user, and the washer blade 45 of the cutting device 170 can be replaced. [Explanation of symbols]

[0115] 2: Auxiliary equipment 4: Cutting blade storage means 6: Carrying in / out means 8: Y-axis direction positioning means 10:Z-axis movement means 12:X-axis movement means 14: Rotation axis 16: Drive gear 18: Rotation axis 20: Driven gear 22: Endless track 24: Blade support shaft 36: Hub blade (cutting blade) 38a: Central opening 45: Washer blade (cutting blade) 45a: Central opening 46: Z rotation axis 48: Blade holder 50: Fixing nut holder 74: Frame 76: Height-adjustable table 92: Guide rail 112: Bending arm 170: Cutting equipment 172: Chuck table 174:Cutting means 176: X-axis feed means 178: Y-axis feed means 180: Z-axis feed means 220:Spindle 222: Fixing nut 228: Male thread (spindle) 229: Mounting flange

Claims

1. an auxiliary device connected to a cutting device comprising: a chuck table having a holding surface for holding a workpiece; cutting means having a cutting blade attached with a fixing nut for cutting the workpiece held on the chuck table; X-axis feed means for feeding the chuck table in an X-axis direction for processing; Y-axis feed means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction; and Z-axis feed means for cutting and feeding the cutting means in a Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is defined in the X-axis and Y-axis directions; The cutting device comprises at least cutting blade storage means for storing a plurality of cutting blades, carry-in / out means for carrying cutting blades in and out of the cutting blade storage means, Y-axis direction positioning means for positioning the carry-in / out means at an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means, Z-axis movement means for moving the carry-in / out means in the Z-axis direction, and X-axis movement means for moving the carry-in / out means in the X-axis direction to act on the cutting blades attached to the spindle of the cutting means, the carry-in / out means includes a Z rotation shaft extending in the Z-axis direction, a blade holding portion radially connected to the Z rotation shaft for suction-holding the cutting blade, and a fixing nut holding portion for screwing the fixing nut onto and unscrewing from a male screw formed at the tip of the spindle, and is connected to the tip of the bending arm via the Z rotation shaft; The loading / unloading means is arranged on a frame body via the bending arm, and the frame body is slidably supported on a guide rail extending in the Y-axis direction arranged on a lifting table, and is an auxiliary device that is positioned at the operating position and the retracted position in the Y-axis direction relative to the cutting blade storage means by the Y-axis positioning means.

2. 2. The auxiliary device according to claim 1, wherein said bending arm moves said loading / unloading means back and forth in the X-axis direction.

3. An auxiliary device comprising: a chuck table with a holding surface for holding a workpiece; cutting means having a cutting blade attached with a fixing nut for cutting the workpiece held on the chuck table; X-axis feed means for feeding the chuck table in the X-axis direction for processing; Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction; and Z-axis feed means for cutting and feeding the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is connected to a cutting device defined in the X-axis and Y-axis directions, The cutting device comprises at least cutting blade storage means for storing a plurality of cutting blades, carry-in / out means for carrying cutting blades in and out of the cutting blade storage means, Y-axis direction positioning means for positioning the carry-in / out means at an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means, Z-axis movement means for moving the carry-in / out means in the Z-axis direction, and X-axis movement means for moving the carry-in / out means in the X-axis direction to act on the cutting blades attached to the spindle of the cutting means, the carry-in / out means includes a Z rotation shaft extending in the Z-axis direction, a blade holding portion radially connected to the Z rotation shaft for suction-holding the cutting blade, and a fixing nut holding portion for screwing the fixing nut onto and unscrewing from a male screw formed at the tip of the spindle, and is connected to the tip of the bending arm via the Z rotation shaft; The cutting blade storage means is an auxiliary device that includes a drive gear having a rotation axis extending in the Y-axis direction, a driven gear spaced from the drive gear in the Z-axis direction and having a rotation axis extending in the Y-axis direction, an endless track wound around the drive gear and the driven gear, and a blade support shaft extending in the Y-axis direction that is arranged at predetermined intervals on the endless track and inserted into a central opening of the cutting blade to support the cutting blade.

4. 4. An auxiliary device according to claim 3, wherein the distance between said drive gear and said driven gear in the Z-axis direction is adjustable and the length of said endless track is also adjustable.

5. The cutting blades stored in the cutting blade storage means are hub blades having cutting edges disposed on the outer periphery of a base, 4. The auxiliary device of claim 3, wherein the blade support shaft has an outer diameter corresponding to the inner diameter of the central opening of the hub blade, and the blade holder holds the hub blade.

6. The cutting blade stored in the cutting blade storage means is a washer blade having an annular cutting edge, the blade support shaft has an outer diameter corresponding to the inner diameter of the central opening of the washer blade; 4. The assist device of claim 3, wherein said blade holder holds a washer blade and a mounting flange for mounting said washer blade to a spindle of said cutting means.

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