Sensors, sensor systems, and electronic devices

Abstract

To provide a sensor, a sensor system, and an electronic apparatus that can improve characteristics.SOLUTION: According to an embodiment, a sensor includes a base body, a fixation part, and a movable part. The movable part includes a plurality of annular parts, a plurality of connection parts, and a first radial structure. The plurality of annular parts includes a first annular part and a second annular part. The second annular part is adjacent to the first annular part in the plurality of annular parts. The first radial structure is connected to the first annular part. The first radial structure extends toward the second annular part along a first radial direction. A first radial gap is provided between the first radial structure and the second annular part.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to sensors, sensor systems, and electronic devices.

Background Art

[0002] For example, there are sensors with MEMS (Micro Electro Mechanical Systems) structures. In some cases, electronic devices and the like are controlled based on the concessions obtained by the sensors. In sensors, improvement of characteristics is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments of the present invention provide a sensor, a sensor system, and an electronic device capable of improving characteristics.

Means for Solving the Problems

[0005] According to one embodiment, the sensor includes a substrate including a first surface, a fixed portion fixed to the first surface, and a movable portion supported by the fixed portion. A first gap is provided between the first surface and the movable portion. The movable portion includes a plurality of annular portions, a plurality of connecting portions, and a first radiating structure. Each of the plurality of annular portions is provided around the fixed portion in a first plane along the first surface, with the fixed portion as the center. The plurality of connecting portions extend along a radiating direction. The radiating direction passes through a first center of the fixed portion in the first plane and lies along the first plane. One of the plurality of connecting portions connects two of the plurality of annular portions to each other. The plurality of annular portions include a first annular portion and a second annular portion. The second annular portion is adjacent to the first annular portion among the plurality of annular portions. The first radiating structure is connected to the first annular portion. The first radiating structure extends toward the second annular portion along a first radiating direction. The first radial direction passes through the first center and lies along the first plane. A first radial gap is provided between the first radial structure and the second annular portion. [Brief explanation of the drawing]

[0006] [Figure 1] Figure 1 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 2] Figure 2 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 3] Figure 3 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 4] Figure 4 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 5] Figure 5 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 6] Figure 6 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 7] Figure 7 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 8] Figure 8 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 9] Figure 9 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 10] Figure 10 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 11] Figure 11 is a schematic diagram illustrating an electronic device according to the second embodiment. [Figure 12] Figures 12(a) to 12(h) are schematic diagrams illustrating applications of the electronic device according to the embodiment. [Figure 13] Figures 13(a) and 13(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. [Modes for carrying out the invention]

[0007] (First Embodiment) Figure 1 is a schematic plan view illustrating a sensor according to the first embodiment. Figures 2 to 6 are schematic cross-sectional views illustrating a sensor according to the first embodiment. Figure 2 is a cross-sectional view taken along line A1-A2 in Figure 1. Figure 3 is a cross-sectional view taken along line A3-A4 in Figure 1. Figure 4 is a cross-sectional view taken along line A5-A6 in Figure 1. Figure 5 is a cross-sectional view taken along line A7-A8 in Figure 1. Figure 6 is a cross-sectional view taken along line A9-A10 in Figure 1.

[0008] As shown in Figures 1 to 6, the sensor 110 according to this embodiment includes a base 50s, a fixed part 10F, and a movable part 10M.

[0009] The base 50s includes a first surface 50a. The fixed part 10F is fixed to the first surface 50a. The movable part 10M is supported by the fixed part 10F.

[0010] As shown in Figures 2 to 6, a first gap G1 is provided between the first surface 50a and the movable part 10M. For example, an insulating member 55 is provided on the first surface 50a. A fixed part 10F is provided on the insulating member 55. An insulating member 55 is not provided between the first surface 50a and the movable part 10M.

[0011] The movable part 10M is conductive. The movable part 10M may include, for example, conductive silicon or the like. The fixed part 10F is conductive. The fixed part 10F may include, for example, conductive silicon or the like. The fixed part 10F is electrically connected to the movable part 10M. The insulating member 55 may include, for example, silicon oxide or the like.

[0012] The movable part 10M includes a plurality of annular parts 10, a plurality of connection parts 20, and a first radiation structure 28a. Each of the plurality of annular parts 10 is provided around the fixed part 10F with the fixed part 10F as the center in a first plane PL1 along the first surface 50a.

[0013] A direction perpendicular to the first plane PL1 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction. The first plane PL1 is parallel to the X-Y plane.

[0014] For example, each of the plurality of annular parts 10 is concentric with the fixed part 10F as the center. Each of the plurality of annular parts 10 extends along the circular circumferential direction Dc.

[0015] As shown in FIG. 1, the plurality of connection parts 20 extend along the radial direction Dr. The radial direction Dr passes through the first center 10C in the first plane PL1 of the fixed part 10F and is along the first plane PL1. One of the plurality of connection parts 20 connects two of the plurality of annular parts 10 to each other.

[0016] In this example, the plurality of annular parts 10 include a first annular part 11, a second annular part 12, a third annular part 13, and a fourth annular part 14. In this example, the first annular part 11 is the outermost. The second annular part 12 is provided between the fixed part 10F and the first annular part 11. The third annular part 13 is provided between the fixed part 10F and the second annular part 12. The fourth annular part 14 is provided between the fixed part 10F and the third annular part 13. In an embodiment, as will be described later, the first annular part 11 may not be the outermost. In an embodiment, the number of the plurality of annular parts 10 is arbitrary.

[0017] In this example, the multiple connection parts 20 include a first connection part 21, a second connection part 22, a third connection part 23, and a fourth connection part 24. The first connection part 21 is provided between the second annular part 12 and the first annular part 11. The first connection part 21 connects the second annular part 12 to the first annular part 11. The second connection part 22 is provided between the third annular part 13 and the second annular part 12. The second connection part 22 connects the third annular part 13 to the second annular part 12. The third connection part 23 is provided between the fourth annular part 14 and the third annular part 13. The third connection part 23 connects the fourth annular part 14 to the third annular part 13. The fourth connection part 24 is provided between the fixing part 10F and the fourth annular part 14. The fourth connection part 24 connects the fourth annular part 14 to the fixing part 10F.

[0018] The second annular section 12 is adjacent to the first annular section 11 among the multiple annular sections 10. The second annular section 12 is closest to the first annular section 11 among the multiple annular sections 10. The second annular section 12 may be inside the first annular section 11. Alternatively, the first annular section 11 may be inside the second annular section 12.

[0019] The first radiating structure 28a is connected to the first annular section 11. The first radiating structure 28a extends toward the second annular section 12 along the first radiating direction Dr1. The first radiating direction passes through the first center 10C and aligns with the first plane PL1. A first radiating gap g1 is provided between the first radiating structure 28a and the second annular section 12. The first radiating structure 28a is separated from the second annular section 12.

[0020] As shown in Figure 1, the sensor 110 is provided with a plurality of fixed electrodes 30. The plurality of fixed electrodes 30 are fixed to, for example, a first surface 50a. For example, a signal containing an AC component is applied between a portion of the plurality of fixed electrodes 30 and the movable part 10M. As a result, the movable part 10M vibrates. The signal may include components in the X-axis direction and components in the Y-axis direction. When an external force is applied to the vibrating movable part 10M, the vibration state changes. By detecting the change in the vibration state, the applied external force can be detected. The change in the vibration state is detected, for example, as a change in capacitance. The change in the vibration state due to the external force is caused by, for example, the Coriolis force. The change in the vibration state can be detected, for example, by another portion of the plurality of fixed electrodes 30. The signal may be supplied, for example, by the control unit 70. The detection of the change in the vibration state may be performed, for example, by the control unit 70.

[0021] In an embodiment, for example, the plurality of fixed electrodes 30 include a first fixed electrode 31. The first fixed electrode 31 is provided between the second annular portion 12 and the first annular portion 11 in the radiation direction Dr. The first fixed electrode 31 is provided between the first connecting portion 21 and the first radiation structure 28a in the circumferential direction Dc. In the circumferential direction Dc, one end of the first fixed electrode 31 faces the first radiation gap g1. In the circumferential direction Dc, one end of the first fixed electrode 31 is open. With this configuration, the movable portion 10M has appropriate flexibility. The movable portion 10M can vibrate with appropriate degrees of freedom. The movable portion 10M can vibrate stably around the first fixed electrode 31.

[0022] For example, in the first reference example, the first connection portion 21 is also provided where the first radiating structure 28a is provided. In the first reference example, the first fixed electrode 31 is surrounded in the radiating direction Dr and the circumferential direction Dc by the second annular portion 12, the first annular portion 11, and the two first connection portions 21. In the first reference example, the first radiating gap g1 is not provided. In such a first reference example, the movable portion 10M is mechanically rigid, making it difficult to obtain the desired vibration.

[0023] In contrast, in this embodiment, in the circumferential direction Dc, one end of the first fixed electrode 31 faces the first radiating gap g1. The movable part 10M can vibrate with an appropriate degree of freedom. It can vibrate in a stable state. The signal strength based on vibration is high. High-sensitivity detection becomes possible. According to this embodiment, a sensor with improved characteristics can be provided.

[0024] As shown in Figure 1, multiple first fixed electrodes 31 are provided along the circumferential direction Dc. The number of multiple first fixed electrodes 31 may be 16 or more. This allows, for example, the detection of vibration states in any direction while compensating for the anisotropy of the resonant frequency.

[0025] In this configuration, a second reference example can be considered in which the first connecting portion 21 is not provided between the two first fixed electrodes 31. In the second reference example, the first radiating structure 28a is not provided. In the second reference example, a large gap exists between the two first fixed electrodes 31. The movable portion 10M is formed by removing a part of the movable member that becomes the movable portion 10M. In this process, the etching rate increases locally around the large gap. As a result, the portion of the first annular portion 11 and the second annular portion 12 corresponding to the gap is excessively etched. Consequently, in the second reference example, it is difficult to obtain an annular portion 10 of uniform width. In the second reference example, high-precision detection is difficult.

[0026] In contrast, in this embodiment, a first radiating structure 28a is provided between the two first fixed electrodes 31. This makes the area of ​​the gap between the two first fixed electrodes 31 smaller compared to the second reference example. Excessive etching is suppressed in the region corresponding to the space between the two first fixed electrodes 31. An annular portion 10 of uniform width can be obtained. According to this embodiment, multiple annular portions 10 of the desired shape can be obtained with high precision. Multiple annular portions 10 with high precision enable high-precision detection. According to this embodiment, a sensor with improved characteristics can be provided.

[0027] For example, by providing the first radiating structure 28a, local etching of the first annular portion 11 is suppressed.

[0028] As shown in Figure 1, in the sensor 110, the movable part 10M may further include a first opposing radiation structure 28A. The first opposing radiation structure 28A is connected to the second annular part 12. The first opposing radiation structure 28A extends toward the first radiation structure 28a along the first radiation direction Dr1. A first radiation gap g1 is provided between the first radiation structure 28a and the first opposing radiation structure 28A.

[0029] The provision of the first opposing radiation structure 28A suppresses local etching of the second annular portion 12.

[0030] As shown in Figure 1, the sensor 110 may include a first fixed electrode 31 and a first other fixed electrode 31A. The first fixed electrode 31 and the first other fixed electrode 31A are fixed to the first surface 50a (see Figures 4 to 6). As shown in Figure 1, the first fixed electrode 31 and the first other fixed electrode 31A are provided between the second annular portion 12 and the first annular portion 11. In the circumferential direction Dc along the first plane PL1 centered on the fixed portion 10F, at least a portion of the first radiating structure 28a is provided between the first fixed electrode 31 and the first other fixed electrode 31A. For example, in the circumferential direction Dc, at least a portion of the first opposing radiating structure 28A is provided between the first fixed electrode 31 and the first other fixed electrode 31A.

[0031] As shown in Figure 1, in the circumferential direction Dc, the first fixed electrode 31 is provided between the first radiating structure 28a and the first connecting portion 21. In the circumferential direction Dc, the first fixed electrode 31 is provided between the first opposing radiating structure 28A and the first connecting portion 21.

[0032] As shown in Figure 1, the movable part 10M may further include a second radiating structure 28b. In this example, the second annular part 12 is provided between the fixed part 10F and the first annular part 11. The third annular part 13 is provided between the fixed part 10F and the second annular part 12. The third annular part 13 is adjacent to the second annular part 12 among the multiple annular parts 10. The second radiating structure 28b is connected to the second annular part 12. The second radiating structure 28b extends toward the third annular part 13 along the second radiating direction Dr2. The second radiating direction Dr2 passes through the first center 10C and lies along the first plane PL1. A second radiating gap g2 is provided between the second radiating structure 28b and the third annular part 13.

[0033] By providing such a second radiating structure 28b, the desired vibration can be easily obtained in the movable part 10M. High-precision detection is possible. For example, excessive local etching of the second annular part 12 can be suppressed.

[0034] In this example, the second radial direction Dr2 intersects the first radial direction Dr1. In the embodiment, the second radial direction Dr2 may also be aligned with the first radial direction Dr1.

[0035] As shown in Figure 1, the movable part 10M may further include a second opposing radiation structure 28B. The second opposing radiation structure 28B is connected to the third annular part 13. The second opposing radiation structure 28B extends toward the second radiation structure 28b along the second radiation direction Dr2. A second radiation gap g2 is provided between the second radiation structure 28b and the second opposing radiation structure 28B.

[0036] By providing such a second opposing radiation structure 28B, the desired vibration can be easily obtained in the movable part 10M. High-precision detection is possible. For example, excessive local etching of the third annular portion 13 can be suppressed.

[0037] As shown in Figure 1, the sensor 110 may further include a second fixed electrode 32 and a second other fixed electrode 32A. The second fixed electrode 32 and the second other fixed electrode 32A are fixed to the first surface 50a. The second fixed electrode 32 and the second other fixed electrode 32A are provided between the third annular portion 13 and the second annular portion 12. In the circumferential direction Dc centered on the fixed portion 10F along the first plane PL1, at least a portion of the second radiating structure 28b is provided between the second fixed electrode 32 and the second other fixed electrode 32A.

[0038] For example, the second fixed electrode 32 is provided between the second connection portion 22 and the second radiation structure 28b in the circumferential direction Dc.

[0039] As shown in Figure 1, the movable part 10M may further include a third radial structure 28c. The plurality of annular parts 10 may further include a third annular part 13 and a fourth annular part 14. The fourth annular part 14 is adjacent to the third annular part 13 among the plurality of annular parts 10. The third radial structure 28c is connected to the third annular part 13. The third radial structure 28c extends toward the fourth annular part 14 along the third radial direction Dr3. The third radial direction Dr3 passes through the first center 10C and lies along the first plane PL1. A third radial gap g3 is provided between the third radial structure 28c and the fourth annular part 14.

[0040] For example, the third radial direction Dr3 aligns with the first radial direction Dr1. In this embodiment, the third radial direction Dr3 may intersect with the first radial direction Dr1.

[0041] The movable part 10M may further include a third opposing radiation structure 28C. The third opposing radiation structure 28C is connected to the fourth annular part 14. The third opposing radiation structure 28C extends toward the third radiation structure 28c along the third radiation direction Dr3. A third radiation gap g3 may be provided between the third radiation structure 28c and the third opposing radiation structure 28C.

[0042] The sensor 110 may further include a third fixed electrode 33 and a third other fixed electrode 33A. The third fixed electrode 33 and the third other fixed electrode 33A are fixed to the first surface 50a. The third fixed electrode 33 and the third other fixed electrode 33A are provided between the fourth annular portion 14 and the third annular portion 13. In the circumferential direction Dc centered on the fixed portion 10F along the first plane PL1, at least a portion of the third radiating structure 28c is provided between the third fixed electrode 33 and the third other fixed electrode 33A.

[0043] For example, the third fixed electrode 33 is provided between the third connection portion 23 and the third radiating structure 28c in the circumferential direction Dc.

[0044] As shown in Figure 1, the movable part 10M may further include a fourth radiating structure 28d. The multiple annular parts 10 further include a fourth annular part 14. The fourth annular part 14 is provided between the fixed part 10F and the third annular part 13. The fourth radiating structure 28d is connected to the fourth annular part 14. In this example, the fourth radiating structure 28d extends toward the fixed part 10F along the second radiating direction Dr2. A fourth radiating gap g4 is provided between the fourth radiating structure 28d and the fixed part 10F.

[0045] As shown in Figure 1, the movable part 10M may further include a fourth opposing radiation structure 28D. The fourth opposing radiation structure 28D is connected to the fixed part 10F. The fourth opposing radiation structure 28D extends toward the fourth radiation structure 28d along the second radiation direction Dr2. A fourth radiation gap g4 is provided between the fourth radiation structure 28d and the fourth opposing radiation structure 28D.

[0046] The sensor 110 may further include a fourth fixed electrode 34 and a fourth other fixed electrode 34A. The fourth fixed electrode 34 and the fourth other fixed electrode 34A are fixed to the first surface 50a. The fourth fixed electrode 34 and the fourth other fixed electrode 34A are provided between the fixed portion 10F and the fourth annular portion 14. In the circumferential direction Dc centered on the fixed portion 10F along the first plane PL1, at least a portion of the fourth radiating structure 28d is provided between the fourth fixed electrode 34 and the fourth other fixed electrode 34A.

[0047] For example, the fourth fixed electrode 34 is provided between the fourth connection portion 24 and the fourth radiating structure 28d in the circumferential direction Dc.

[0048] Figure 7 is a schematic plan view illustrating a sensor according to the first embodiment. Figure 8 is a schematic plan view illustrating a part of the sensor according to the first embodiment. As shown in Figure 7, in the sensor 111 according to this embodiment, the movable part 10M includes the first structure 41. The configuration of the sensor 111 other than this may be the same as that of the sensor 110.

[0049] Figure 8 shows a magnified view of the portion including the first structure 41. In this example, the first structure 41 is connected to the first annular portion 11. In this example, the first annular portion 11 is the outermost part. The first structure 41 functions, for example, as a weight. The presence of the first structure 41 stabilizes the vibration of the movable part 10M. Noise in the signal associated with the vibration can be suppressed. Higher accuracy detection is possible.

[0050] For example, the length of the first structure 41 in the radial direction Dr is longer than the length of the first annular portion 11 in the radial direction Dr. For example, the length of the first structure 41 in the radial direction Dr is longer than the distance between the second annular portion 12 and the first annular portion 11 in the radial direction Dr.

[0051] Multiple first structures 41 may be provided. The multiple first structures 41 are arranged along the circumferential direction Dc. The multiple first structures 41 and the first annular portion 11 may satisfy at least one of the first, second, and third conditions.

[0052] As shown in Figure 8, the first structure 41 may include a first structural component 41p and a first structural connecting portion 41a. The first structural connecting portion 41a is provided between the first annular portion 11 and the first structural component 41p. The first structural connecting portion 41a connects the first structural component 41p to the first annular portion 11. The length of the first structural connecting portion 41a in the circumferential direction Dc centered on the fixing portion 10F along the first surface 50a is shorter than the length of the first structural component 41p in the circumferential direction Dc.

[0053] The first structure 41 may further include a second structure connecting portion 41b. The second structure connecting portion 41b is provided between the first annular portion 11 and the first structure component 41p, and connects the first structure component 41p to the first annular portion 11. The direction from the first structure connecting portion 41a to the second structure connecting portion 41b is along the circumferential direction Dc.

[0054] At least one of the multiple fixed electrodes 30 (in this example, the second fixed electrode 32 or the second other fixed electrode 32A) includes multiple partial electrodes. The multiple partial electrodes include a first partial electrode 30a and a second partial electrode 30b. The first partial electrode 30a and the second partial electrode 30b are aligned in the circumferential direction Dc.

[0055] As shown in Figure 8, the length of the first radiation gap g1 in the first radiation direction Dr1 is denoted as length dg1. The distance between the second annular portion 12 and the first annular portion 11 along the first radiation direction Dr1 is denoted as d11. Preferably, length dg1 is, for example, 0.1 times or more and 0.9 times or less of the distance d11. If length dg1 is excessively long, for example, excessive etching of the annular portion 10 is likely to occur. If length dg1 is excessively short, for example, the mechanical strength of the first radiation structure 28a is likely to decrease.

[0056] As shown in Figure 8, the tip of the first radiating structure 28a may be curved. The tip of the first opposing radiating structure 28A may also be curved.

[0057] As shown in Figure 8, the length of the first radial structure 28a in the circumferential direction Dc is defined as the first radial structure length w28a. The length of the first annular section 11 in the radial direction Dr is defined as the first annular section width w11. For example, the first radial structure length w28a may be between 0.2 and 2 times the first annular section width w11.

[0058] As shown in Figure 7, in this example, the multiple annular sections 10 include a fifth annular section 15 and a sixth annular section 16. The fifth annular section 15 is provided between the fixed section 10F and the fourth annular section 14. The sixth annular section 16 is provided between the fixed section 10F and the fifth annular section 15.

[0059] As shown in Figure 7, in this example, the multiple connection parts 20 include a fifth connection part 25 and a sixth connection part 26. The fifth connection part 25 connects the sixth annular part 16 to the fifth annular part 15. The sixth connection part 26 connects the sixth annular part 16 to the fixing part 10F.

[0060] As shown in Figure 7, in this example, the multiple fixed electrodes 30 include a fifth fixed electrode 35 and a sixth fixed electrode 36. The fifth fixed electrode 35 is provided between the sixth annular portion 16 and the fifth annular portion 15. The sixth fixed electrode 36 is provided between the fixed portion 10F and the sixth annular portion 16.

[0061] Figure 9 is a schematic plan view illustrating a sensor according to the first embodiment. As shown in Figure 9, in the sensor 112 according to this embodiment, the first annular portion 11 is not the outermost part. In the radial direction Dr, the first annular portion 11 is located between a plurality of movable parts 10M. The configuration of the sensor 112, excluding this, may be the same as that of the sensor 110 or sensor 111.

[0062] In sensor 112, the first radiation structure 28a is connected to the first annular portion 11. The first opposing radiation structure 28A is connected to the second annular portion 12. Sensor 112 also enables highly accurate detection.

[0063] Figure 10 is a schematic plan view illustrating a sensor according to the first embodiment. Figure 10 illustrates the fixed part 10F and the movable part 10M. In the sensor 120 according to this embodiment, at least one of the multiple fixed electrodes 30 includes multiple partial electrodes. The configuration of the sensor 120 other than this may be the same as that of the sensor 110 and the like.

[0064] In this example, at least one of the multiple fixed electrodes 30 is a second fixed electrode 32. The second fixed electrode 32 includes multiple partial electrodes. The multiple partial electrodes include a first partial electrode 30a and a second partial electrode 30b. The first partial electrode 30a and the second partial electrode 30b are arranged in the circumferential direction Dc. In this example, two second partial electrodes 30b are provided. The first partial electrode 30a is provided between the two partial electrodes in the circumferential direction Dc. Different signals may be supplied to the multiple partial electrodes. The signals obtained from the multiple partial electrodes may be processed to perform detection.

[0065] As shown in Figure 10, in this example, the direction in which the second connection portion 22 extends is aligned with the direction in which the third connection portion 23 extends. For example, this makes it easier to obtain a high-intensity detection signal.

[0066] As shown in Figure 10, the sensor 120 may include a connecting member 48. The connecting member 48 is fixed to the first surface 50a. A fixed portion 10F is provided around the connecting member 48. Electrical connections may be made through the connecting member 48. In this example, the connecting member 48 includes a first connecting member 48a and a second connecting member 48b. The connecting member 48 (e.g., the first connecting member 48a and the second connecting member 48b) may be electrically insulated from the fixed portion 10F and the movable portion 10M. At least a portion of the connecting member 48 (e.g., the first connecting member 48a and the second connecting member 48b) may be electrically connected to the fixed portion 10F or the movable portion 10M by wiring for electrical connection.

[0067] (Second Embodiment) The second embodiment relates to an electronic device. Figure 11 is a schematic diagram illustrating an electronic device according to the second embodiment. As shown in Figure 11, the electronic device 310 according to the embodiment includes a sensor according to the first embodiment (e.g., sensor 110) and a circuit control unit 170. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a drive device 185. According to the embodiment, for example, a circuit 180 for controlling a drive device 185 can be controlled with high precision.

[0068] As shown in Figure 11, the sensor system 210 according to the embodiment includes a sensor according to the first embodiment (for example, sensor 110) and a member to be detected 81. Sensor 110 is fixed to the member to be detected 81. Sensor 110 can detect signals from the member to be detected 81.

[0069] Figures 12(a) to 12(h) are schematic diagrams illustrating applications of the electronic device according to the embodiment. As shown in Figure 12(a), the electronic device 310 may be at least part of a robot. As shown in Figure 12(b), the electronic device 310 may be at least part of a machine robot installed in a manufacturing plant or the like. As shown in Figure 12(c), the electronic device 310 may be at least part of an automated guided vehicle in a factory or the like. As shown in Figure 12(d), the electronic device 310 may be at least part of a drone (unmanned aerial vehicle). As shown in Figure 12(e), the electronic device 310 may be at least part of an airplane. As shown in Figure 12(f), the electronic device 310 may be at least part of a ship. As shown in Figure 12(g), the electronic device 310 may be at least part of a submarine. As shown in Figure 12(h), the electronic device 310 may be at least part of an automobile. The electronic device 310 may include, for example, at least one of a robot and a mobile body.

[0070] Figures 13(a) and 13(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in Figure 13(a), the sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transmitting / receiving unit 420. In the example in Figure 13(a), the sensor 110 is depicted as the sensor. The transmitting / receiving unit 420 can transmit the signal obtained from the sensor 110 by, for example, at least one of wireless and wired methods. The sensor 430 is installed, for example, on a slope surface 410 such as a road 400. The sensor 430 can monitor the state of, for example, a facility (e.g., infrastructure). The sensor 430 may be, for example, a state monitoring device.

[0071] For example, the sensor 430 detects changes in the condition of the slope surface 410 of the road 400 with high accuracy. Changes in the condition of the slope surface 410 include, for example, changes in the inclination angle and changes in the vibration state. The signal (inspection result) obtained from the sensor 110 is transmitted by the transmitting / receiving unit 420. The condition of the facility (e.g., infrastructure) can be monitored, for example, continuously.

[0072] As shown in Figure 13(b), the sensor 430 is installed, for example, on a part of a bridge 460. The bridge 460 is built over a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is installed on at least one of the main girder 450 and the pier 440. For example, the angle of at least one of the main girder 450 and the pier 440 may change due to deterioration or other reasons. For example, the vibration state may change in at least one of the main girder 450 and the pier 440. The sensor 430 can detect these changes with high accuracy. The detection results can be transmitted to any location by the transmitting / receiving unit 420. Anomalies can be effectively detected.

[0073] The embodiments may include the following technical proposals. (Technical proposal 1) A substrate including the first face, The fixing part fixed to the first surface, The movable part is supported by the fixed part, Equipped with, A first gap is provided between the first surface and the movable part. The movable part includes a plurality of annular parts, a plurality of connecting parts, and a first radial structure. Each of the plurality of annular portions is provided around the fixing portion in a first plane along the first surface, with the fixing portion as the center. The aforementioned plurality of connection parts extend along the radial direction, The aforementioned radial direction passes through the first center of the fixed portion in the first plane and follows the first plane. One of the plurality of connecting parts connects two of the plurality of annular parts to each other. The plurality of annular portions include a first annular portion and a second annular portion, The second annular portion is adjacent to the first annular portion among the plurality of annular portions, The first radial structure is connected to the first annular portion, The first radial structure extends toward the second annular portion along the first radial direction, The first radial direction passes through the first center and lies along the first plane, A sensor in which a first radiating gap is provided between the first radiating structure and the second annular portion.

[0074] (Technical proposal 2) The second annular portion is the sensor described in Technical Proposal 1, provided between the fixed portion and the first annular portion.

[0075] (Technical proposal 3) The movable part further includes a first opposing radiation structure, The first opposing radiation structure is connected to the second annular portion, The first opposing radiation structure extends toward the first radiation structure along the first radiation direction, The sensor according to Technical Proposal 1 or 2, wherein the first radiation gap is provided between the first radiation structure and the first opposing radiation structure.

[0076] (Technical proposal 4) The first fixed electrode and the first other fixed electrode are further fixed to the first surface, The first fixed electrode and the first other fixed electrode are provided between the second annular portion and the first annular portion. In the circumferential direction along the first plane and centered on the fixed portion, at least a portion of the first radiating structure is provided between the first fixed electrode and the first other fixed electrode, as described in any one of Technical Proposals 1 to 3.

[0077] (Technical proposal 5) The first fixed electrode is further fixed to the first surface, The first fixed electrode is provided between the second annular portion and the first annular portion. The plurality of connection parts include the first connection part, The first connecting portion is provided between the second annular portion and the first annular portion. The first connecting portion connects the second annular portion to the first annular portion, In the circumferential direction along the first plane and centered on the fixed portion, the first fixed electrode is provided between the first radiating structure and the first connecting portion, as described in any one of Technical Proposals 1 to 3.

[0078] (Technical proposal 6) The movable part further includes a second radial structure, The plurality of annular portions further include a third annular portion, The second annular portion is provided between the fixed portion and the first annular portion. The third annular portion is provided between the fixed portion and the second annular portion, The third annular portion is adjacent to the second annular portion among the plurality of annular portions, The second radial structure is connected to the second annular portion, The second radial structure extends toward the third annular portion along the second radial direction, The second radial direction passes through the first center and lies along the first plane, The sensor according to Technical Proposal 1, wherein a second radiating gap is provided between the second radiating structure and the third annular portion.

[0079] (Technical proposal 7) The second radiation direction is along the first radiation direction, as described in Technical Proposal 6.

[0080] (Technical proposal 8) The movable part further includes a second opposing radiation structure, The second opposing radiation structure is connected to the third annular portion, The second opposing radiation structure extends toward the second radiation structure along the second radiation direction, The sensor according to technical proposal 6 or 7, wherein the second radiation gap is provided between the second radiation structure and the second opposing radiation structure.

[0081] (Technical proposal 9) The device further comprises a second fixed electrode and a second other fixed electrode fixed to the first surface, The second fixed electrode and the second other fixed electrode are provided between the third annular portion and the second annular portion. In the circumferential direction along the first plane and centered on the fixed portion, at least a portion of the second radiating structure is provided between the second fixed electrode and the second other fixed electrode, as described in any one of Technical Proposals 6 to 8.

[0082] (Technical proposal 10) The movable part further includes a third radial structure, The plurality of annular portions further include a third annular portion and a fourth annular portion, The fourth annular portion is adjacent to the third annular portion among the plurality of annular portions, The third radial structure is connected to the third annular portion, The third radial structure extends toward the fourth annular portion along the third radial direction, The third radial direction passes through the first center and lies along the first plane, The sensor according to Technical Proposal 1, wherein a third radiating gap is provided between the third radiating structure and the fourth annular portion.

[0083] (Technical proposal 11) The third radiation direction intersects with the first radiation direction, as described in Technical Proposal 10.

[0084] (Technical proposal 12) The second annular portion is provided between the fixed portion and the first annular portion. The third annular portion is provided between the fixed portion and the second annular portion, The fourth annular portion is a sensor provided between the fixed portion and the third annular portion, as described in technical proposal 10 or 11.

[0085] (Technical proposal 13) The movable part further includes a third opposing radiation structure, The third opposing radiation structure is connected to the fourth annular portion, The third opposing radiation structure extends toward the third radiation structure along the third radiation direction, The sensor according to any one of the technical proposals 10 to 12, wherein the third radiation gap is provided between the third radiation structure and the third opposing radiation structure.

[0086] (Technical proposal 14) The device further comprises a third fixed electrode and a third other fixed electrode fixed to the first surface, The third fixed electrode and the third other fixed electrode are provided between the fourth annular portion and the third annular portion. In the circumferential direction along the first plane and centered on the fixed portion, at least a portion of the third radiating structure is provided between the third fixed electrode and the third other fixed electrode, as described in any one of the technical proposals 10 to 13.

[0087] (Technical proposal 15) The movable part further includes a fourth radial structure, The plurality of annular portions further include a fourth annular portion, The fourth annular portion is provided between the fixed portion and the third annular portion, The fourth radial structure is connected to the fourth annular portion, The fourth radiation structure extends toward the fixed portion along the second radiation direction, A sensor according to any one of Technical Proposals 6 to 8, wherein a fourth radiating gap is provided between the fourth radiating structure and the fixed portion.

[0088] (Technical proposal 16) The movable part further includes a fourth opposing radiation structure, The fourth opposing radiation structure is connected to the fixed portion, The fourth opposing radiation structure extends toward the fourth radiation structure along the second radiation direction, The sensor according to technical proposal 15, wherein the fourth radiation gap is provided between the fourth radiation structure and the fourth opposing radiation structure.

[0089] (Technical proposal 17) The device further comprises a fourth fixed electrode and a fourth other fixed electrode fixed to the first surface, The fourth fixed electrode and the fourth other fixed electrode are provided between the fixed portion and the fourth annular portion. The sensor according to technical proposal 15 or 16, wherein, in the circumferential direction along the first plane and centered on the fixed portion, at least a portion of the fourth radiating structure is provided between the fourth fixed electrode and the fourth other fixed electrode.

[0090] (Technical proposal 18) The sensor according to any one of Technical Proposals 1 to 17, wherein the length of the first radial gap in the first radial direction is 0.1 times or more and 0.9 times or less the distance between the second annular portion and the first annular portion along the first radial direction.

[0091] (Technical proposal 19) A sensor described in any one of Technical Proposals 1 to 18, The detection target member to which the sensor is fixed, A sensor system equipped with [unspecified features].

[0092] (Technical proposal 20) A sensor described in any one of Technical Proposals 1 to 18, A circuit control unit capable of controlling the circuit based on the signal obtained from the sensor, An electronic device equipped with [the necessary components].

[0093] According to the embodiment, sensors, sensor systems, and electronic devices capable of improving characteristics can be provided.

[0094] In this specification, "perpendicular" and "parallel" do not mean strictly perpendicular and strictly parallel, but also include variations in the manufacturing process, for example, and it is sufficient if they are substantially perpendicular and substantially parallel.

[0095] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, specific technical proposals for each element included in the sensor, such as the components, substrate, sensor part, housing, sensor element, base body, fixed part, movable part, and control unit, are included within the scope of the present invention as long as those skilled in the art can implement the present invention in the same way and obtain similar effects by appropriately selecting from the known scope.

[0096] Furthermore, combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the invention.

[0097] Furthermore, all sensors, sensor systems, and electronic devices that a person skilled in the art can design and implement based on the above-described embodiments of the present invention, insofar as they encompass the gist of the present invention, also fall within the scope of the present invention.

[0098] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and it is understood that such modifications and alterations also fall within the scope of the present invention.

[0099] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of symbols]

[0100] 10: Annular section, 10C: First center, 10F: Fixed section, 10M: Movable section, 11~16: First to sixth annular sections, 20: Connection section, 21~26: First to sixth connection sections, 28A~28D: First to fourth opposing radiation structures, 28a~28d: First to fourth radiation structures, 30: Fixed electrode, 30a, 30b: First and second partial electrodes, 31~36: First to sixth fixed electrodes, 31A~34A: First to fourth other fixed electrodes, 41: First structure, 41a, 41b: First and second structure connection section, 41p: First structure component, 48: Connecting member, 48a, 48b: First and second connecting member, 50a: First surface, 50s: Base, 55: Insulating member, 70: Control unit, 81: Detectable member, 110~112, 120: Sensor, 170: Circuit control unit, 180: Circuit, 185: Drive unit, 210: Sensor system, 310: Electronic device, 400: Road, 410: Slope surface, 420: Transmitter / receiver unit, 430: Sensor, 440: Bridge pier, 450: Main girder, 460: Bridge, 470: River, Dc: Circumferential direction, Dr: Radiation direction, Dr1~Dr3: 1st~3rd radiation direction, G1: 1st gap, PL1: 1st plane, S1: Signal, d11: Distance, g1~g4: 1st~4th radiation gap, w11: 1st annular section width, w28a: 1st radiation structure length

Claims

1. A substrate including the first surface, The fixing part fixed to the first surface, The movable part is supported by the fixed part, Equipped with, A first gap is provided between the first surface and the movable part. The movable part includes a plurality of annular parts, a plurality of connecting parts, and a first radial structure. Each of the plurality of annular portions is provided around the fixing portion in a first plane along the first surface, with the fixing portion as the center. The aforementioned plurality of connection parts extend along the radial direction, The aforementioned radial direction passes through the first center in the first plane of the fixed portion and follows the first plane. One of the plurality of connecting parts connects two of the plurality of annular parts to each other. The plurality of annular portions include a first annular portion and a second annular portion, The second annular portion is adjacent to the first annular portion among the plurality of annular portions, The first radial structure is connected to the first annular portion, The first radial structure extends toward the second annular portion along the first radial direction, The first radial direction passes through the first center and lies along the first plane, A sensor in which a first radiating gap is provided between the first radiating structure and the second annular portion.

2. The movable part further includes a first opposing radiation structure, The first opposing radiation structure is connected to the second annular portion, The first opposing radiation structure extends toward the first radiation structure along the first radiation direction, The sensor according to claim 1, wherein a first radiation gap is provided between the first radiation structure and the first opposing radiation structure.

3. The first fixed electrode and the first other fixed electrode are further fixed to the first surface, The first fixed electrode and the first other fixed electrode are provided between the second annular portion and the first annular portion. The sensor according to claim 1, wherein at least a portion of the first radiating structure is provided between the first fixed electrode and the first other fixed electrode in a circumferential direction centered on the fixed portion along the first plane.

4. The first fixed electrode is further fixed to the first surface, The first fixed electrode is provided between the second annular portion and the first annular portion. The plurality of connection parts include the first connection part, The first connecting portion is provided between the second annular portion and the first annular portion. The first connecting portion connects the second annular portion to the first annular portion, The sensor according to claim 1, wherein, in the circumferential direction along the first plane and centered on the fixed portion, the first fixed electrode is provided between the first radiating structure and the first connecting portion.

5. The movable part further includes a second radial structure, The plurality of annular portions further include a third annular portion, The second annular portion is provided between the fixing portion and the first annular portion, The third annular portion is provided between the fixing portion and the second annular portion. The third annular portion is adjacent to the second annular portion among the plurality of annular portions, The second radial structure is connected to the second annular portion, The second radial structure extends toward the third annular portion along the second radial direction, The second radial direction passes through the first center and lies along the first plane, The sensor according to claim 1, wherein a second radiating gap is provided between the second radiating structure and the third annular portion.

6. The movable part further includes a third radial structure, The plurality of annular portions further include a third annular portion and a fourth annular portion, The fourth annular portion is adjacent to the third annular portion among the plurality of annular portions, The third radial structure is connected to the third annular portion, The third radial structure extends toward the fourth annular portion along the third radial direction, The third radial direction passes through the first center and lies along the first plane, The sensor according to claim 1, wherein a third radiating gap is provided between the third radiating structure and the fourth annular portion.

7. The sensor according to claim 6, wherein the third radiation direction intersects with the first radiation direction.

8. The movable part further includes a third opposing radiation structure, The third opposing radiation structure is connected to the fourth annular portion, The third opposing radiation structure extends toward the third radiation structure along the third radiation direction, The sensor according to claim 6 or 7, wherein the third radiation gap is provided between the third radiation structure and the third opposing radiation structure.

9. The sensor according to claim 1, The detection target member to which the sensor is fixed, A sensor system equipped with [unspecified features].

10. The sensor according to claim 1, A circuit control unit capable of controlling the circuit based on the signal obtained from the sensor, An electronic device equipped with [the necessary components].

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