Light-emitting devices, projectors, displays, and head-mounted displays

Abstract

To provide a light-emitting device that can reduce the difference between the position of a first surface of a first electrode on the opposite side of a first semiconductor part and the position of a second surface of a second electrode on the opposite side of the first semiconductor part in a lamination direction.SOLUTION: A light-emitting device has: a substrate; a first semiconductor part having a first conductivity type; a first columnar part and a second columnar part each having a second semiconductor part having a second conductivity type different from the first conductivity type, a third semiconductor part having the first conductivity type, and a quantum well layer; a first electrode; a second electrode; and a conductive member electrically connecting the second electrode and the first semiconductor part to each other. The first columnar part and the second columnar part project from the first semiconductor part toward the substrate. The first electrode is electrically connected with the second semiconductor part of the first columnar part. The second electrode is electrically connected with the third semiconductor part of the first columnar part via the conductive member and the first semiconductor part.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a light-emitting device, a projector, a display, and a head-mounted display.

Background Art

[0002] Semiconductor lasers are expected as high-brightness next-generation light sources. In particular, semiconductor lasers applying nanocolumns are expected to achieve high-output light emission with a narrow emission angle due to the effect of photonic crystals by the nanocolumn periodic array.

[0003] For example, Patent Document 1 describes a light-emitting device having a buffer layer, a columnar portion provided on the buffer layer, a first electrode provided on the buffer layer, and a second electrode provided on the columnar portion. The columnar portion has an n-type first semiconductor layer, a p-type second semiconductor layer, and a light-emitting layer provided between the first semiconductor layer and the second semiconductor layer.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the light-emitting device as described above, flip-chip mounting is known. In the stacking direction of the first semiconductor layer and the light-emitting layer, if the difference between the position of the surface of the first electrode on the side opposite to the buffer layer and the position of the surface of the second electrode on the side opposite to the buffer layer is large, flip-chip mounting is difficult.

Means for Solving the Problems

[0006] One aspect of the light-emitting device according to the present invention is a substrate, a first semiconductor portion having a first conductivity type, A first columnar portion and a second columnar portion, each having a second semiconductor portion having a second conductivity type different from the first conductivity type, a third semiconductor portion having the first conductivity type and provided between the first semiconductor portion and the second semiconductor portion, and a quantum well layer provided between the second semiconductor portion and the third semiconductor portion, A first electrode is provided between the first columnar portion and the substrate, A second electrode is provided between the second columnar portion and the substrate, A conductive member that electrically connects the second electrode and the first semiconductor part, It has, The first columnar portion and the second columnar portion each protrude from the first semiconductor portion toward the substrate side, The second semiconductor portion is provided between the substrate and the quantum well layer, The first electrode is electrically connected to the second semiconductor portion of the first columnar portion. The second electrode is electrically connected to the third semiconductor portion of the first columnar portion via the conductive member and the first semiconductor portion.

[0007] One aspect of the projector according to the present invention is: It has one embodiment of the aforementioned light-emitting device.

[0008] One aspect of the display according to the present invention is: It has one embodiment of the aforementioned light-emitting device.

[0009] One embodiment of the head-mounted display according to the present invention is: It has one embodiment of the aforementioned light-emitting device. [Brief explanation of the drawing]

[0010] [Figure 1] A schematic cross-sectional view showing a light-emitting device according to the first embodiment. [Figure 2] A schematic plan view showing the light-emitting device according to the first embodiment. [Figure 3] A schematic cross-sectional view showing the manufacturing process of the light-emitting device according to the first embodiment. [Figure 4] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the first embodiment. [Figure 5] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the first embodiment. [Figure 6] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the first embodiment. [Figure 7] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the first embodiment. [Figure 8] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the first embodiment. [Figure 9] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the first embodiment. [Figure 10] Cross-sectional view schematically showing the light-emitting device according to the second embodiment. [Figure 11] Plan view schematically showing the light-emitting device according to the second embodiment. [Figure 12] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 13] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 14] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 15] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 16] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 17] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 18] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 19] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 20] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 21] Cross-sectional view schematically showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 22]A schematic cross-sectional view showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 23] A schematic cross-sectional view showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 24] A schematic cross-sectional view showing the manufacturing process of the light-emitting device according to the second embodiment. [Figure 25] A schematic diagram showing a projector according to the third embodiment. [Figure 26] A schematic plan view showing the display according to the fourth embodiment. [Figure 27] A schematic cross-sectional view showing the display according to the fourth embodiment. [Figure 28] A schematic perspective view showing a head-mounted display according to the fifth embodiment. [Figure 29] A schematic diagram showing the image forming apparatus and light guide apparatus of a head-mounted display according to the fifth embodiment. [Modes for carrying out the invention]

[0011] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. The embodiments described below are not intended to unduly limit the scope of the present invention as described in the claims. Furthermore, not all of the configurations described below are necessarily essential components of the present invention.

[0012] 1. First Embodiment 1.1. Light-emitting device First, the light-emitting device according to the first embodiment will be described with reference to the drawings. Figure 1 is a schematic cross-sectional view showing the light-emitting device 100 according to the first embodiment. Figure 2 is a schematic plan view showing the light-emitting device 100 according to the first embodiment. Note that Figure 1 is shown on line II in Figure 2. This is a cross-section.

[0013] As shown in Figures 1 and 2, the light-emitting device 100 includes, for example, a substrate 10 and a light-emitting element 20. For convenience, in Figure 2, the illustration of components other than the first electrode 30, first metal layer 44, conductive member 60, and first semiconductor portion 70 of the light-emitting element 20 is omitted. Also in Figure 2, the outer edge of the conductive member 60 is shown. Furthermore, in Figure 2, the first semiconductor portion 70 is shown as a transparent view.

[0014] As shown in Figure 1, the substrate 10 includes, for example, a circuit board 12, a first bump 14, and a second bump 16.

[0015] The circuit board 12 is electrically connected to the light-emitting element 20 via bumps 14 and 16. The circuit board 12 includes a drive circuit for driving the light-emitting element 20. The drive circuit is composed of, for example, an integrated circuit (IC). The circuit board 12 is provided with first and second wirings, which are not shown. The drive circuit and the first electrode 30 are electrically connected by the first wiring, which is not shown. The drive circuit and the second electrode 40 are electrically connected by the second wiring, which is not shown.

[0016] The first bump 14 and the second bump 16 are provided on the circuit board 12. The bumps 14 and 16 are provided between the circuit board 12 and the light-emitting element 20. The bumps 14 and 16 are spaced apart from each other. The material of the bumps 14 and 16 is, for example, copper and gold.

[0017] In "1.1. Light-emitting device," when referring to the stacking direction (hereinafter also simply referred to as the "stacking direction") between the second semiconductor portion 52 of the columnar portion 50 of the light-emitting element 20 and the quantum well layer 54, the direction from the quantum well layer 54 toward the third semiconductor portion 56 of the columnar portion 50 is described as "up," and the direction from the quantum well layer 54 toward the second semiconductor portion 52 is described as "down." The direction perpendicular to the stacking direction is also referred to as the "in-plane direction."

[0018] The light-emitting element 20 is provided on the substrate 10. The light-emitting element 20 has a first electrode 30, a second electrode 40, a columnar portion 50, a conductive member 60, and a first semiconductor portion 70. The light-emitting element 20 is flip-chip mounted with the electrode 30 and 40 sides facing the substrate 10. Therefore, in the light-emitting device 100, it is not necessary to establish conductivity between the electrodes and the circuit board using, for example, wire bonding, and miniaturization can be achieved.

[0019] The first electrode 30 is provided on the first bump 14. The first electrode 30 is joined to the first bump 14, for example. The first electrode 30 is provided between the first bump 14 and the columnar portion 50. In the example shown in Figure 2, the planar shape of the first electrode 30 is a quadrilateral such as a square or rectangle, but it may also be a circle or a polygon other than a quadrilateral. The first electrode 30 is, for example, a metal layer with a large work function such as a gold layer or a nickel layer, or a stack of these.

[0020] As shown in Figure 1, the first electrode 30 has a first surface 32. The first surface 32 is the surface of the first electrode 30 opposite to the first semiconductor portion 70. The first surface 32 is the surface of the first electrode 30 facing the substrate 10. The first surface 32 is the edge of the first electrode 30 facing the substrate 10. In the illustrated example, the first surface 32 is the bottom surface of the first electrode 30.

[0021] The second electrode 40 is provided on the second bump 16. The second electrode 40 is joined to the second bump 16, for example, via solder (not shown). The second electrode 40 is provided between the second bump 16, the columnar portion 50, and the conductive member 60.

[0022] The second electrode 40 has a second surface 42. The second surface 42 is the first semiconductor of the second electrode 40. This is the side opposite to part 70. The second surface 42 is the side of the second electrode 40 that faces the substrate 10. The second surface 42 is the end of the second electrode 40 that faces the substrate 10. In the illustrated example, the second surface 42 is the bottom surface of the second electrode 40. The second electrode 40 has, for example, a first metal layer 44 and a second metal layer 46.

[0023] The first metal layer 44 of the second electrode 40 is provided on the second bump 16. The first metal layer 44 is bonded to the second bump 16. The first metal layer 44 is provided between the second bump 16 and the second metal layer 46. In the example shown in Figure 2, the planar shape of the first metal layer 44 is a quadrilateral such as a square or rectangle, but it may also be a circle or a polygon other than a quadrilateral. The first metal layer 44 may be, for example, a gold layer, a nickel layer, an aluminum layer, a titanium layer, or a stack of these.

[0024] As shown in Figure 1, the second metal layer 46 of the second electrode 40 is provided on the first metal layer 44. The second metal layer 46 is provided between the first metal layer 44, the columnar portion 50, and the conductive member 60. Viewed from the stacking direction, the first metal layer 44 is provided inside the second metal layer 46. The second metal layer 46 is, for example, a platinum layer. 2nd metal layer 46 For example, it may be in contact with the conductive member 60 and may be formed from the same material as the conductive member 60. Also, the material constituting the second metal layer 46 and the material constituting the first metal layer 44 may be different.

[0025] The second electrode 40 is separated from the first electrode 30. The height H1 of the first electrode 30 and the height H2 of the second electrode 40 are, for example, the same. "Height" refers to the size in the stacking direction. In the illustrated example, the distance between the first surface 32 of the first electrode 30 and the first semiconductor portion 70 is the same as the distance between the second surface 42 of the second electrode 40 and the first semiconductor portion 70.

[0026] The columnar portion 50 is provided between the substrate 10 and the first semiconductor portion 70. The columnar portion 50 protrudes from the first semiconductor portion 70 toward the substrate 10. The columnar portion 50 is also called, for example, a nanocolumn, nanowire, nanorod, or nanopillar. The planar shape of the columnar portion 50 is, for example, a polygon such as a regular hexagon or a circle.

[0027] The diameter of the columnar portion 50 is, for example, between 50 nm and 500 nm. By setting the diameter of the columnar portion 50 to 500 nm or less, a high-quality crystalline quantum well layer 54 can be obtained, and the strain inherent in the quantum well layer 54 can be reduced.

[0028] The "diameter of the columnar portion 50" refers to the diameter of the columnar portion 50 if its planar shape is a circle, and the diameter of the smallest inclusion circle if its planar shape is not a circle. For example, if the planar shape of the columnar portion 50 is a polygon, the diameter of the smallest circle that contains the polygon is the diameter of the smallest circle that contains the ellipse is the diameter of the ellipse.

[0029] Multiple columnar portions 50 are provided. The multiple columnar portions 50 are spaced apart from each other. The spacing between adjacent columnar portions 50 is, for example, 5 nm to 30 nm. If the space between adjacent columnar portions 50 is filled with an insulating layer, the spacing between adjacent columnar portions 50 may be wider, up to about 200 nm. The multiple columnar portions 50 are arranged in a predetermined direction at a predetermined pitch when viewed from the stacking direction. The multiple columnar portions 50 are arranged, for example, in a regular triangular lattice or a square lattice. The multiple columnar portions 50 can exhibit the effect of a photonic crystal.

[0030] The "pitch of the columnar parts 50" refers to the distance between the centers of adjacent columnar parts 50 in a predetermined direction. The "center of the columnar part 50" refers to the center of the circle if the planar shape of the columnar part 50 is a circle, and to the center of the smallest inclusion circle if the planar shape of the columnar part 50 is not a circle. If the planar shape of the columnar portion 50 is a polygon, the center of the smallest circle containing the polygon is the center of the smallest circle containing the ellipse is the center of the ellipse.

[0031] The columnar portion 50 has a second semiconductor portion 52, a quantum well layer 54, and a third semiconductor portion 56. In the illustrated example, the columnar portion 50 is composed of the second semiconductor portion 52, the quantum well layer 54, and the third semiconductor portion 56. The second semiconductor portion 52, the quantum well layer 54, and the third semiconductor portion 56 are, for example, group III nitride semiconductors and have a wurtzite crystal structure.

[0032] The second semiconductor layer 52 is provided between the substrate 10 and the quantum well layer 54. The second semiconductor layer 52 is a semiconductor layer having a second conductivity type different from the first conductivity type. The second conductivity type is, for example, p-type. The second semiconductor layer 52 is, for example, a Mg-doped p-type GaN layer.

[0033] The quantum well layer 54 is provided on the second semiconductor section 52. The quantum well layer 54 is provided between the second semiconductor section 52 and the third semiconductor section 56. The quantum well layer 54 has, for example, a well layer and a barrier layer. The well layer and the barrier layer are i-type semiconductor layers that are not intentionally doped with impurities. The well layer is, for example, an InGaN layer. The barrier layer is, for example, a GaN layer. The quantum well layer 54 has an MQW (Multiple Quantum Well) structure composed of the well layer and the barrier layer.

[0034] The number of well layers and barrier layers constituting the quantum well layer 54 is not particularly limited. For example, there may be only one well layer, in which case the quantum well layer 54 has an SQW (Single Quantum Well) structure.

[0035] The third semiconductor portion 56 is provided on the quantum well layer 54. The third semiconductor portion 56 is provided between the quantum well layer 54 and the first semiconductor portion 70. The third semiconductor portion 56 is provided between the first semiconductor portion 70 and the second semiconductor portion 52. The third semiconductor portion 56 is a semiconductor layer having a first conductivity type. The first conductivity type is, for example, n-type. The third semiconductor portion 56 is, for example, a Si-doped n-type GaN layer.

[0036] The first columnar portion 50a among the multiple columnar portions 50 is a columnar portion 50 provided between the first electrode 30 and the first semiconductor portion 70. The first electrode 30 is provided between the first columnar portion 50a and the substrate 10. The first electrode 30 is electrically connected to the second semiconductor portion 52 of the first columnar portion 50a. In the illustrated example, the first electrode 30 is in contact with the second semiconductor portion 52 of the first columnar portion 50a. The second semiconductor portion 52 of the first columnar portion 50a may be in ohmic contact with the first electrode 30.

[0037] The second columnar portion 50b among the multiple columnar portions 50 is the columnar portion 50 provided between the second electrode 40 and the first semiconductor portion 70. The second electrode 40 is provided between the second columnar portion 50b and the substrate 10. In the illustrated example, the second columnar portion 50b is in contact with the second electrode 40. The second semiconductor portion 52 of the second columnar portion 50b may be in ohmic contact with the second electrode 40. In the illustrated example, the second columnar portion 50b is in contact with the conductive member 60.

[0038] The third columnar portion 50c among the multiple columnar portions 50 is a columnar portion 50 that is separated from the first electrode 30 and the conductive member 60. In the illustrated example, the third columnar portion 50c is provided between the first columnar portion 50a and the second columnar portion 50b. That is, the third columnar portion 50c is not electrically connected to the first electrode 30 and the second electrode 40 on the circuit board 12 side.

[0039] Multiple first columnar sections 50a are provided. In the illustrated example, adjacent first columnar sections 50a There is a gap between them. Multiple second columnar parts 50b are provided. A conductive member 60 is provided between adjacent second columnar parts 50b. The number of first columnar parts 50a is, for example, greater than or equal to the number of second columnar parts 50b. The number of first columnar parts 50a is, for example, greater than the number of second columnar parts 50b. Multiple third columnar parts 50c are provided. In the illustrated example, there is a gap between adjacent third columnar parts 50c. There is a gap between adjacent first columnar parts 50a and third columnar parts 50c. Multiple first columnar parts 50a, multiple second columnar parts 50b, and multiple third columnar parts 50c are, for example, provided at the same pitch. The diameters of the first columnar parts 50a, the second columnar parts 50b, and the third columnar parts 50c are, for example, the same as each other.

[0040] The height H3 of the first columnar portion 50a and the height H4 of the second columnar portion 50b are, for example, the same. In the illustrated example, the distance between the lower surface of the first columnar portion 50a and the first semiconductor portion 70 is the same as the distance between the lower surface of the second columnar portion 50b and the first semiconductor portion 70. The "lower surfaces of the columnar portions 50a and 50b" refer to the surfaces of the columnar portions 50a and 50b that face the substrate 10, respectively.

[0041] The quantum well layer 54 of the first columnar section 50a is a light-emitting layer that generates light when an electric current is injected. The second semiconductor section 52 and the third semiconductor section 56 of the first columnar section 50a are cladding layers that have the function of confining light in the quantum well layer 54 of the first columnar section 50a. The quantum well layer 54 of the second columnar section 50b does not generate light. The quantum well layer 54 of the third columnar section 50c does not generate light. In the illustrated example, the quantum well layers 54 of the columnar sections 50 other than the first columnar section 50a do not generate light.

[0042] In the light-emitting device 100, a PIN diode is formed by a p-type second semiconductor portion 52 of the first columnar portion 50a, an i-type quantum well layer 54 of the first columnar portion 50a, and an n-type third semiconductor portion 56 of the first columnar portion 50a. In the light-emitting device 100, when a forward bias voltage of the PIN diode is applied between the first electrode 30 and the second electrode 40, current is injected into the quantum well layer 54 of the first columnar portion 50a, causing recombination of electrons and holes in the quantum well layer 54. This recombination generates light. The light generated in the quantum well layer 54 of the first columnar portion 50a propagates in the in-plane direction, forms a standing wave due to the photonic crystal effect of the multiple first columnar portions 50a, and receives gain in the quantum well layer 54 of the first columnar portion 50a, causing laser oscillation. The light-emitting device 100 then emits the +1st order diffracted light and -1st order diffracted light as laser light in the stacking direction.

[0043] Light generated in the quantum well layer 54 of the first columnar portion 50a that is directed toward the first electrode 30 is reflected by the first electrode 30. As a result, the light-emitting device 100 can emit light only from the first semiconductor portion 70 side.

[0044] The first columnar portion 50a and the third columnar portion 50c are adjacent to each other. The pitch between the adjacent first columnar portion 50a and the third columnar portion 50c is the same as the pitch between the adjacent first columnar portions 50a. Therefore, compared to the case where, for example, the first columnar portion and the second columnar portion are adjacent to each other, the period of the refractive index difference felt by light propagating in the in-plane direction can be increased. This refractive index difference is the difference between the refractive index of the columnar portion 50 and the refractive index of the gap between adjacent columnar portions 50. If a conductive member is present between adjacent columnar portions, this refractive index difference changes, disrupting the periodicity, and light generated near the first columnar portion adjacent to the third columnar portion will no longer benefit from the photonic crystal effect, resulting in a decrease in light extraction efficiency.

[0045] The conductive member 60 is provided on the second electrode 40. The conductive member 60 is provided between the second electrode 40 and the first semiconductor portion 70. The conductive member 60 electrically connects the second electrode 40 and the first semiconductor portion 70. In the illustrated example, the conductive member 60 is in contact with the second metal layer 46 and the first semiconductor portion 70. The conductive member 60 is separated from the first columnar portion 50a.

[0046] The conductive member 60 is provided between adjacent second columnar portions 50b. When viewed from the stacking direction, the conductive member 60 surrounds the second columnar portions 50b. The conductive member 60 is provided on the side surface 51 of the second columnar portions 50b. The side surface 51 is, for example, composed of an m-plane.

[0047] The conductive member 60 is made of, for example, platinum. The conductive member 60 is provided integrally with, for example, the second metal layer 46. By providing the second metal layer 46 and the conductive member 60 integrally, the second metal layer 46 and the conductive member 60 can be formed in the same process. This shortens the manufacturing process compared to when the second metal layer 46 and the conductive member 60 are formed in separate processes. The materials constituting the second metal layer 46 and the materials constituting the conductive member 60 may be different. Furthermore, the materials constituting the first metal layer 44 and the materials constituting the conductive member 60 may be different or the same.

[0048] The first semiconductor portion 70 is provided on a plurality of columnar portions 50. In the illustrated example, the first semiconductor portion 70 is in contact with the plurality of columnar portions 50 and the conductive member 60. The first semiconductor portion 70 is a semiconductor layer having a first conductivity type. The first semiconductor portion 70 is, for example, a Si-doped n-type GaN layer. The second electrode 40 is electrically connected to the third semiconductor portion 56 of the first columnar portion 50a via the conductive member 60 and the first semiconductor portion 70.

[0049] Although not shown in the diagram, a mask layer for growing the columnar portion 50 may be provided beneath the first semiconductor portion 70. The mask layer may be, for example, a titanium layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer.

[0050] Furthermore, although the InGaN-based quantum well layer 54 was described above, various material systems capable of emitting light when an electric current is injected according to the wavelength of the emitted light can be used as the quantum well layer 54 of the first columnar portion 50a. For example, semiconductor materials such as AlGaN, AlInN, and AlGaInN can be used.

[0051] Furthermore, the light-emitting device 100 is not limited to a laser; it may also be an LED (Light Emitting Diode).

[0052] Furthermore, while the above example described a case where the first conductivity type is n-type and the second conductivity type is p-type, it is also possible for the first conductivity type to be p-type and the second conductivity type to be n-type.

[0053] The light-emitting device 100 has, for example, the following effects:

[0054] In the light-emitting device 100, the substrate 10 and , the A first semiconductor part 70 having one conductivity type, Each of them, The semiconductor device comprises a first columnar portion 50a and a second columnar portion 50b, each having a second semiconductor portion 52 having a second conductivity type different from the first conductivity type, a third semiconductor portion 56 having a first conductivity type and provided between the first semiconductor portion 70 and the second semiconductor portion 52, and a quantum well layer 54 provided between the second semiconductor portion 52 and the third semiconductor portion 56; a first electrode 30 provided between the first columnar portion 50a and the substrate 10; a second electrode 40 provided between the second columnar portion 50b and the substrate 10; and a conductive member 60 that electrically connects the second electrode 40 and the first semiconductor portion 70. The first columnar portion 50a and the second columnar portion 50b each protrude from the first semiconductor portion 70 toward the substrate 10. The second semiconductor portion 52 is provided between the substrate 10 and the quantum well layer 54. The first electrode 30 is electrically connected to the second semiconductor portion 52 of the first columnar portion 50a, and the second electrode 40 is electrically connected to the third semiconductor portion 56 of the first columnar portion 50a via the conductive member 60 and the first semiconductor portion 70.

[0055] Therefore, in the light-emitting device 100, compared to the case where the second columnar portion is not provided, in the stacking direction, the position of the first surface 32 of the first electrode 30 opposite to the first semiconductor portion 70 and the second electrode The difference between the position of the pole 40 and the second surface 42 on the opposite side of the first semiconductor portion 70 can be reduced. Therefore, in the light-emitting device 100, the light-emitting element 20 is easy to flip-chip mount onto the substrate 10. In particular, in the light-emitting device 100, since both the first columnar portion 50a and the second columnar portion 50b have a second semiconductor portion 52, a quantum well layer 54, and a third semiconductor portion 56, it is easy to make the height H3 of the first columnar portion 50a and the height H4 of the second columnar portion 50b the same.

[0056] In the light-emitting device 100, the height H3 of the first columnar portion 50a and the height H4 of the second columnar portion 50b are the same. Therefore, in the light-emitting device 100, compared to the case where the heights H3 and H4 are different, the difference between the position of the first surface 32 of the first electrode 30 and the position of the second surface 42 of the second electrode 40 in the stacking direction can be reduced.

[0057] In the light-emitting device 100, the conductive member 60 is made of platinum. Therefore, in the light-emitting device 100, the conductive member 60 can be formed by the ALD (Atomic Layer Deposition) method. This allows the conductive member 60 to be formed between adjacent second columnar parts 50b, even if the distance between adjacent second columnar parts 50b is narrow.

[0058] In the light-emitting device 100, the height H1 of the first electrode 30 and the height H2 of the second electrode 40 are the same. Therefore, in the light-emitting device 100, compared to the case where the heights H1 and H2 are different, the difference between the position of the first surface 32 of the first electrode 30 and the position of the second surface 42 of the second electrode 40 in the stacking direction can be reduced.

[0059] In the light-emitting device 100, the number of first columnar sections 50a is greater than or equal to the number of second columnar sections 50b. Therefore, the light-emitting device 100 can emit a greater intensity of light compared to the case where the number of first columnar sections is less than the number of second columnar sections.

[0060] 1.2. Method for manufacturing a light-emitting device Next, the manufacturing method of the light-emitting device 100 according to the first embodiment will be described with reference to the drawings. Figures 3 to 9 are schematic cross-sectional views showing the manufacturing process of the light-emitting device 100 according to the first embodiment. For convenience, Figures 3 to 9 are shown upside down compared to Figure 1.

[0061] As shown in Figure 3, the first semiconductor portion 70 is grown on the growth substrate 2. Examples of methods for crystal growth include MOCVD (Metal Organic Chemical Vapor Deposition) and MBE (Molecular Beam Epitaxy). The growth substrate 2 can be, for example, a sapphire substrate, a Si substrate, a GaN substrate, or a SiC substrate.

[0062] In "1.2. Method for Manufacturing a Light-Emitting Device," the direction from the quantum well layer 54 toward the second semiconductor section 52 is referred to as "up" and the direction from the quantum well layer 54 toward the third semiconductor section 56 is referred to as "down." This is also the case in "2.2. Method for Manufacturing a Light-Emitting Device," which will be described later.

[0063] Next, a mask layer (not shown) is formed on the first semiconductor portion 70. The mask layer is formed by, for example, electron beam deposition, ALD, or sputtering.

[0064] Next, a resist is applied to the mask layer, patterned using EB (Electron Beam) drawing or photolithography, and the mask layer is etched using the resist as a mask to expose the first semiconductor portion 70, and the resist is removed. Then, using the mask layer as a mask, the third semiconductor portion 56, the quantum well layer 54, and the second semiconductor portion 52 are epitaxially grown on the first semiconductor portion 70 in that order. Examples of epitaxial growth methods include MOCVD and MBE. Multiple columnar portions 50 can be formed by this process.

[0065] As shown in Figure 4, conductive members 60a are formed on the upper surface and side surface 51 of the columnar portion 50. The conductive members 60a are formed, for example, by the ALD method. The conductive members 60a are formed to fill the space between adjacent columnar portions 50. Conductive members 60a are also formed above the space between adjacent columnar portions 50.

[0066] As shown in Figure 5, a resist layer 4 of a predetermined shape is formed on the conductive member 60a. The resist layer 4 is formed, for example, by coating using a spin coating method and by photolithography.

[0067] As shown in Figure 6, the conductive member 60a is etched using the resist layer 4 as a mask. Wet etching is used for the etching. This reduces etching damage to the columnar portion 50 and allows for the removal of the conductive member 60a compared to using dry etching. Through this process, a conductive member 60 made of the conductive member 60a can be formed between adjacent columnar portions 50. Furthermore, a first metal layer 44 made of the conductive member 60a can be formed on the upper surface of the columnar portion 50 and above the space between adjacent columnar portions 50. Through this process, a portion of the first semiconductor portion 70 is exposed.

[0068] The resist layer 4 is removed as shown in Figure 7. The resist layer 4 is removed, for example, by organic exfoliation or O2 plasma.

[0069] As shown in Figure 8, a first electrode 30 is formed on the columnar portion 50. The first electrode 30 is formed by film deposition using vacuum deposition or sputtering, and by patterning. Patterning is performed, for example, by photolithography and etching. The first electrode 30 may also be formed by the lift-off method.

[0070] As shown in Figure 9, a second metal layer 46 is formed on the first metal layer 44. The second metal layer 46 is formed, for example, in the same manner as the first electrode 30. This step allows for the formation of a second electrode 40 having the first metal layer 44 and the second metal layer 46. Furthermore, a light-emitting element 20 having the growth substrate 2, the first electrode 30, the second electrode 40, the columnar portion 50, and the first semiconductor portion 70 can be formed.

[0071] Next, the growth substrate 2 is removed from the first semiconductor section 70. The growth substrate 2 is removed, for example, by CMP (Chemical Mechanical Polishing). However, if the growth substrate 2 has high light transmittance to the light generated in the quantum well layer 54 of the first columnar section 50a, it is not necessary to remove the growth substrate 2.

[0072] As shown in Figure 1, the first electrode 30 is joined to the first bump 14 and the second electrode 40 is joined to the second bump 16 to flip-chip mount the light-emitting element 20 onto the substrate 10. In the stacking direction, for example, the position of the first surface 32 of the first electrode 30 and the position of the second surface 42 of the second electrode 40 are the same, so the light-emitting element 20 can be easily flip-chip mounted. The bumps 14 and 16 are formed, for example, by a plating method. 。

[0073] The light-emitting device 100 can be manufactured through the above process.

[0074] 2. Second Embodiment 2.1. Light-emitting device Next, the light-emitting device according to the second embodiment will be described with reference to the drawings. Figure 10 is a schematic cross-sectional view showing the light-emitting device 200 according to the second embodiment. Figure 11 is the light-emitting device according to the second embodiment. 2 This is a schematic plan view of 00. Note that Figure 10 is a cross-sectional view taken along line XX shown in Figure 11.

[0075] Hereinafter, in the light-emitting device 200 according to the second embodiment, components having the same function as the components of the light-emitting device 100 according to the first embodiment described above will be denoted by the same reference numerals, and their detailed descriptions will be omitted.

[0076] The light-emitting device 200 differs from the light-emitting device 100 described above in that it has an insulating layer 80, as shown in Figures 10 and 11. For convenience, Figure 11 omits the illustration of components other than the first electrode 30, the first metal layer 44, the conductive member 60, the first semiconductor part 70, and the insulating layer 80. Also, Figure 11 shows the outer edges of the conductive member 60 and the insulating layer 80. Furthermore, Figure 11 shows the first semiconductor part 70 as a transparent view.

[0077] The light-emitting element 20 has an insulating layer 80. The insulating layer 80 is provided between the first electrode 30 and the first semiconductor portion 70. The insulating layer 80 covers the side surface 51 of the first columnar portion 50a. The insulating layer 80 is provided between adjacent first columnar portions 50a. When viewed from the stacking direction, the insulating layer 80 surrounds the first columnar portion 50a. The insulating layer 80 is separated from the conductive member 60.

[0078] The insulating layer 80 is, for example, an aluminum oxide (Al2O3) layer or a silicon oxide (SiO2) layer. When light generated in the quantum well layer 54 of the first columnar portion 50a propagates in the in-plane direction due to the photonic crystallization effect, the light propagates in the in-plane direction through the insulating layer 80.

[0079] The light-emitting device 200 has an insulating layer 80 that covers the side surface 51 of the first columnar portion 50a. Therefore, the light-emitting device 200 can protect the first columnar portion 50a with the insulating layer 80.

[0080] Furthermore, in the light-emitting device 200, since an insulating layer 80 is provided between adjacent first columnar portions 50a, the spacing between adjacent first columnar portions 50a can be made larger compared to the case where an insulating layer is not provided between adjacent first columnar portions. For example, if an insulating layer is not provided between adjacent first columnar portions, if the spacing between adjacent first columnar portions is 30 nm or more, the electrode material deposited by sputtering or vacuum deposition will adhere to the quantum well layer side rather than the second semiconductor portion, resulting in a short-circuit failure.

[0081] 2.2. Method for manufacturing a light-emitting device Next, the manufacturing method of the light-emitting device 200 according to the second embodiment will be described with reference to the drawings. Figures 12 to 24 are schematic cross-sectional views showing the manufacturing process of the light-emitting device 200 according to the second embodiment. For convenience, Figures 12 to 24 are shown upside down compared to Figure 10.

[0082] In the manufacturing method of the light-emitting device 200, as shown in Figure 3, the process is the same as the manufacturing method of the light-emitting device 100 described above up to the point of forming a plurality of columnar portions 50 on the first semiconductor portion 70.

[0083] Next, as shown in Figure 12, an insulating layer 80 is formed on the upper surface and side surface 51 of the columnar portion 50. The insulating layer 80 is formed, for example, by the ALD method. The insulating layer 80 is formed to fill the space between adjacent columnar portions 50. The insulating layer 80 is also formed above the space between adjacent columnar portions 50.

[0084] As shown in Figure 13, a resist layer 6 of a predetermined shape is formed on the insulating layer 80. The resist layer 6 is formed, for example, by spin coating and photolithography. It will be done.

[0085] As shown in Figure 14, the insulating layer 80 is etched using the resist layer 6 as a mask. Wet etching is used for the etching process. This reduces the amount of etching of the columnar portion 50 compared to when dry etching is used. This process exposes a portion of the first semiconductor portion 70. As the etching solution, for example, a dilute hydrofluoric acid-based or buffered hydrofluoric acid-based liquid is used.

[0086] The resist layer 6 is removed as shown in Figure 15. The resist layer 6 is removed, for example, by an organic exfoliation method.

[0087] As shown in Figure 16, conductive members 60a are formed on the upper and side surfaces 51 of the columnar portion 50, and on the upper and side surfaces of the insulating layer 80. The method for forming the conductive members 60a is the same as that for the light-emitting device 100.

[0088] As shown in Figure 17, a resist layer 4 of a predetermined shape is formed on the conductive member 60a. The method for forming the resist layer 4 is the same as that for the light-emitting device 100.

[0089] As shown in Figure 18, the conductive member 60a is etched using the resist layer 4 as a mask. The etching method for the conductive member 60a is the same as that for the light-emitting device 100. This process exposes the insulating layer 80.

[0090] The resist layer 4 is removed as shown in Figure 19. The method for removing the resist layer 4 is the same as that for the light-emitting device 100.

[0091] As shown in Figure 20, a resist layer 8 of a predetermined shape is formed on the first metal layer 44 and the insulating layer 80. The resist layer 8 is formed, for example, by coating using a spin coating method and by photolithography.

[0092] As shown in Figure 21, the insulating layer 80 is etched using the resist layer 8 as a mask. Wet etching is used for the etching process. This reduces etching damage to the columnar portions 50 and allows etching of the insulating layer 80 compared to when dry etching is used. As the etching solution, for example, a dilute hydrofluoric acid-based or buffered hydrofluoric acid-based liquid is used. In this process, some of the multiple columnar portions 50 are exposed.

[0093] The resist layer 8 is removed as shown in Figure 22. The resist layer 8 is removed, for example, by an organic exfoliation method.

[0094] As shown in Figure 23, the first electrode 30 is formed on the insulating layer 80 and on the exposed columnar portion 50. The method for forming the first electrode 30 is the same as that for the light-emitting device 100.

[0095] As shown in Figure 24, a second metal layer 46 is formed on the conductive member 60. The method for forming the second metal layer 46 is the same as that for the light-emitting device 100.

[0096] As shown in Figure 10, the first electrode 30 is joined to the first bump 14, and the second electrode 40 is joined to the second bump 16, thereby flip-chip mounting the light-emitting element 20 onto the substrate 10.

[0097] The light-emitting device 200 can be manufactured through the above process.

[0098] 3. Third Embodiment Next, the projector according to the third embodiment will be described with reference to the drawings. Figure 25 is a schematic diagram showing the projector 700 according to the third embodiment.

[0099] The projector 700 has, for example, a light-emitting device 100 as a light source.

[0100] The projector 700 has a housing (not shown) and red light source 100R, green light source 100G, and blue light source 100B located inside the housing, which emit red light, green light, and blue light, respectively. For convenience, the red light source 100R, green light source 100G, and blue light source 100B are simplified in Figure 25.

[0101] The projector 700 further includes a first optical element 702R, a second optical element 702G, a third optical element 702B, a first optical modulator 704R, a second optical modulator 704G, a third optical modulator 704B, and a projection device 708, all of which are located within the housing. The first optical modulator 704R, the second optical modulator 704G, and the third optical modulator 704B are, for example, transmissive liquid crystal light bulbs. The projection device 708 is, for example, a projection lens.

[0102] Light emitted from the red light source 100R is incident on the first optical element 702R. The light emitted from the red light source 100R is focused by the first optical element 702R. The first optical element 702R may have functions other than focusing. The same applies to the second optical element 702G and the third optical element 702B, which will be described later.

[0103] Light focused by the first optical element 702R is incident on the first optical modulator 704R. The first optical modulator 704R modulates the incident light according to the image information. The projection device 708 then magnifies the image formed by the first optical modulator 704R and projects it onto the screen 710.

[0104] Light emitted from the green light source 100G enters the second optical element 702G. The light emitted from the green light source 100G is focused by the second optical element 702G.

[0105] The light focused by the second optical element 702G is incident on the second optical modulator 704G. The second optical modulator 704G modulates the incident light according to the image information. Then, the projection device 708 magnifies the image formed by the second optical modulator 704G and projects it onto the screen 710.

[0106] Light emitted from the blue light source 100B enters the third optical element 702B. The light emitted from the blue light source 100B is focused by the third optical element 702B.

[0107] The light focused by the third optical element 702B is incident on the third optical modulator 704B. The third optical modulator 704B modulates the incident light according to the image information. Then, the projection device 708 magnifies the image formed by the third optical modulator 704B and projects it onto the screen 710.

[0108] The projector 700 further includes a cross dichroic prism 706 that combines the light emitted from the first light modulator 704R, the second light modulator 704G, and the third light modulator 704B and directs it to the projection device 708.

[0109] The three colored lights modulated by the first optical modulator 704R, the second optical modulator 704G, and the third optical modulator 704B are incident on the cross dichroic prism 706. The cross dichroic prism 706 is formed by bonding together four right-angle prisms, and its inner surface has a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light. These dielectric multilayer films combine three colors of light to form light that represents a color image. The combined light is then projected onto the screen 710 by the projection device 708, and the enlarged image is displayed.

[0110] Furthermore, the red light source 100R, the green light source 100G, and the blue light source 100B may directly form an image without using the first optical modulator 704R, the second optical modulator 704G, and the third optical modulator 704B by controlling the light-emitting device 100 as pixels of the image according to the image information. The projection device 708 may then enlarge the image formed by the red light source 100R, the green light source 100G, and the blue light source 100B and project it onto the screen 710.

[0111] Furthermore, while a transmissive liquid crystal light bulb was used as the light modulation device in the above example, other types of light bulbs may be used, as well as reflective light bulbs. Examples of such light bulbs include reflective liquid crystal light bulbs and digital micro mirror devices. The configuration of the projection device will also be appropriately modified depending on the type of light bulb used.

[0112] Furthermore, this can also be applied to the light source device of a scanning type image display device, which has a scanning means that displays an image of a desired size on a display surface by scanning the light from the light source across a screen.

[0113] 4. Fourth Embodiment Next, the display according to the fourth embodiment will be described with reference to the drawings. Figure 26 is a schematic plan view showing the display 800 according to this embodiment. Figure 27 is a schematic cross-sectional view showing the display 800 according to this embodiment. In Figure 26, the X-axis and Y-axis are shown as two mutually orthogonal axes.

[0114] The display 800 has, for example, a light-emitting device 100 as a light source.

[0115] The display 800 is a display device that displays images. The images include those that display only text information. The display 800 is a self-emissive display. As shown in Figures 26 and 27, the display 800 includes, for example, a circuit board 810, a lens array 820, and a heat sink 830.

[0116] The circuit board 810 is equipped with a drive circuit for driving the light-emitting device 100. The drive circuit is a circuit that includes, for example, a CMOS (Complementary Metal Oxide Semiconductor). The drive circuit drives the light-emitting device 100 based on input image information. Although not shown in the figure, a translucent substrate is placed on the circuit board 810 to protect the circuit board 810. The circuit board 810 may be composed of the circuit board 12 shown in Figure 1.

[0117] The circuit board 810 includes, for example, a display area 812, a data line drive circuit 814, a scan line drive circuit 816, and a control circuit 818.

[0118] The display area 812 is composed of multiple pixels P. In the illustrated example, the pixels P are arranged along the X and Y axes.

[0119] Although not shown in the diagram, the circuit board 810 is provided with multiple scan lines and multiple data lines. For example, the scan lines extend along the X-axis, and the data lines extend along the Y-axis. The scan lines are connected to the scan line drive circuit 816. The data lines are connected to the data line drive circuit 814. Pixels P are provided corresponding to the intersections of scan lines and data lines.

[0120] A single pixel P includes, for example, a light-emitting device 100, a lens 822, and a pixel circuit (not shown). The pixel circuit has a switching transistor that functions as a switch for the pixel P, with the gate of the switching transistor connected to the scan line and either the source or drain connected to the data line.

[0121] The data line drive circuit 814 and the scan line drive circuit 816 are circuits that control the driving of the light-emitting devices 100 that constitute the pixels P. The control circuit 818 controls the display of the image.

[0122] Image data is supplied to the control circuit 818 from the higher-level circuit. The control circuit 818 supplies various signals based on the image data to the data line drive circuit 814 and the scan line drive circuit 816.

[0123] When the scan line drive circuit 816 activates the scan signal and a scan line is selected, the switching transistor of the selected pixel P turns on. At this time, the data line drive circuit 814 supplies a data signal to the selected pixel P from the data line, causing the light-emitting device 100 of the selected pixel P to emit light in accordance with the data signal.

[0124] The lens array 820 has multiple lenses 822. For example, one lens 822 is provided for one light-emitting device 100. Light emitted from the light-emitting device 100 enters one lens 822.

[0125] The heatsink 830 is in contact with the circuit board 810. The material of the heatsink 830 is, for example, a metal such as copper or aluminum. The heatsink 830 dissipates the heat generated by the light-emitting device 100.

[0126] 5. Fifth Embodiment 5.1. Overall structure Next, the head-mounted display according to the fifth embodiment will be described with reference to the drawings. Figure 28 is a schematic perspective view showing the head-mounted display 900 according to this embodiment. In Figure 28, the X-axis, Y-axis, and Z-axis are shown as three mutually orthogonal axes.

[0127] The head-mounted display 900, as shown in Figure 28, is a head-mounted display device with the appearance of eyeglasses. The head-mounted display 900 is worn on the observer's head. The observer is the user of the head-mounted display 900. The head-mounted display 900 allows the observer to see a virtual image and also allows them to see the external world through it. The head-mounted display 900 can also be called a virtual image display device.

[0128] The head-mounted display 900 includes, for example, a first display unit 910a, a second display unit 910b, a frame 920, a first temple 930a, and a second temple 930b.

[0129] The first display unit 910a and the second display unit 910b display images. Specifically, the first display unit 910a displays a virtual image for the observer's right eye. The second display unit 910b displays a virtual image for the observer's left eye. In the illustrated example, the first display unit 910a is located in the -X axis direction of the second display unit 910b. The display units 910a and 910b include, for example, an image forming apparatus 911 and a light guide apparatus 915.

[0130] The image forming apparatus 911 forms image light. The image forming apparatus 911 includes, for example, an optical system such as a light source and a projection device, and an external member 912. The external member 912 houses the light source and the projection device.

[0131] The light guide device 915 covers the area in front of the observer's eyes. The light guide device 915 guides the image light formed by the image forming device 911, and also allows the observer to see the external light and the image light overlapping. Details of the image forming device 911 and the light guide device 915 will be described later.

[0132] Frame 920 supports the first display unit 910a and the second display unit 910b. The frame 920 surrounds the display units 910a and 910b, for example, when viewed from the Y-axis direction. In the illustrated example, the image forming apparatus 911 for the first display unit 910a is mounted on the -X-axis end of frame 920. The image forming apparatus 911 for the second display unit 910b is mounted on the +X-axis end of frame 920.

[0133] The first temple 930a and the second temple 930b extend from the frame 920. In the illustrated example, the first temple 930a extends from the -X-axis end of the frame 920 in the +Y-axis direction. The second temple 930b extends from the +X-axis end of the frame 920 in the +Y-axis direction.

[0134] The first temple 930a and the second temple 930b are suspended over the observer's ears when the head-mounted display 900 is worn by the observer. The observer's head is positioned between the temples 930a and 930b.

[0135] 5.2. Image forming apparatus and light guide apparatus Figure 29 is a schematic diagram showing the image forming apparatus 911 and light guide apparatus 915 of the first display unit 910a of the head-mounted display 900 according to this embodiment. Note that the first display unit 910a and the second display unit 910b have basically the same configuration. Therefore, the following description of the first display unit 910a can also be applied to the second display unit 910b.

[0136] As shown in Figure 29, the image forming apparatus 911 includes, for example, a light-emitting device 100 as a light source, a light modulation device 913, and a projection device 914 for image formation.

[0137] The light modulator 913 modulates the light incident from the light emitter 100 according to the image information and emits image light. The light modulator 913 is a transmissive liquid crystal light bulb. The light emitter 100 may be a self-emitting light emitter that emits light according to the input image information. In this case, the light modulator 913 is not provided.

[0138] The projection device 914 projects the image light emitted from the optical modulator 913 toward the light guide device 915. The projection device 914 is, for example, a projection lens. A lens with an axially symmetric plane as its lens surface may be used as the lens component of the projection device 914.

[0139] The light guide device 915 is precisely positioned relative to the projection device 914, for example, by being screwed to the lens barrel of the projection device 914. The light guide device 915 includes, for example, an image light guide member 916 for guiding image light and a transparent member 918 for viewing.

[0140] The image light guide member 916 is incident on the image light guide member 916, which is an image light guide member 916. The image light guide member 916 is a prism that guides the image light toward the observer's eye. The image light incident on the image light guide member 916 is reflected repeatedly on the inner surface of the image light guide member 916, then reflected by the reflective layer 917 and emitted from the image light guide member 916. The image light emitted from 16 reaches the observer's eye. In the illustrated example, the reflective layer 917 reflects the image light in the +Y axis direction. The reflective layer 917 is made of, for example, a metal or a dielectric multilayer film. The reflective layer 917 may also be a half-mirror.

[0141] The transparent member 918 is adjacent to the image light guide member 916. The transparent member 918 is fixed to the image light guide member 916. The outer surface of the transparent member 918 is continuous with, for example, the outer surface of the image light guide member 916. The transparent member 918 allows the observer to see through to the outside light. In addition to its function of guiding image light, the image light guide member 916 also has the function of allowing the observer to see through to the outside light.

[0142] The light-emitting device according to the above embodiment can be used in applications other than projectors, displays, and head-mounted displays. For example, the light-emitting device according to the above embodiment can be used as a light source for indoor and outdoor lighting, laser printers, scanners, in-vehicle lights, light-using sensing equipment, communication equipment, etc.

[0143] The embodiments and variations described above are examples only and are not limited thereto. For example, each embodiment and each variation can be combined as appropriate.

[0144] The present invention includes configurations substantially identical to those described in the embodiments, for example, configurations with the same function, method, and results, or configurations with the same purpose and effect. Furthermore, the present invention includes configurations in which non-essential parts of the configurations described in the embodiments are replaced. Furthermore, the present invention includes configurations that produce the same effects or achieve the same purpose as those described in the embodiments. Finally, the present invention includes configurations that add known technology to the configurations described in the embodiments.

[0145] The following can be derived from the embodiments and modifications described above.

[0146] One embodiment of a light-emitting device is: circuit board and A first semiconductor part having a first conductivity type, A first columnar portion and a second columnar portion, each having a second semiconductor portion having a second conductivity type different from the first conductivity type, a third semiconductor portion having the first conductivity type and provided between the first semiconductor portion and the second semiconductor portion, and a quantum well layer provided between the second semiconductor portion and the third semiconductor portion, A first electrode is provided between the first columnar portion and the substrate, A second electrode is provided between the second columnar portion and the substrate, A conductive member that electrically connects the second electrode and the first semiconductor part, It has, The first columnar portion and the second columnar portion each protrude from the first semiconductor portion toward the substrate side, The second semiconductor portion is provided between the substrate and the quantum well layer, The first electrode is electrically connected to the second semiconductor portion of the first columnar portion. The second electrode is electrically connected to the third semiconductor portion of the first columnar portion via the conductive member and the first semiconductor portion.

[0147] According to this light-emitting device, the difference between the position of the first surface of the first electrode opposite to the first semiconductor layer and the position of the second surface of the second electrode opposite to the first semiconductor layer can be reduced in the stacking direction of the second semiconductor layer and the quantum well layer.

[0148] In one embodiment of a light-emitting device, The height of the first columnar part and the height of the second columnar part may be the same.

[0149] This light-emitting device makes it possible to reduce the difference between the position of the first surface of the first electrode and the position of the second surface of the second electrode in the stacking direction.

[0150] In one embodiment of a light-emitting device, The first columnar portion may have an insulating layer covering its side surface.

[0151] This light-emitting device allows the first columnar portion to be protected by an insulating layer.

[0152] In one embodiment of a light-emitting device, The material of the conductive member may be platinum.

[0153] This light-emitting device allows for the formation of conductive materials using the ALD method.

[0154] In one embodiment of a light-emitting device, The height of the first electrode and the height of the second electrode may be the same.

[0155] This light-emitting device makes it possible to reduce the difference between the position of the first surface of the first electrode and the position of the second surface of the second electrode in the stacking direction.

[0156] In one embodiment of a light-emitting device, The number of the first columnar parts may be equal to or greater than the number of the second columnar parts.

[0157] This light-emitting device allows for a significant increase in the intensity of the emitted light.

[0158] One form of projector is, It has one embodiment of the aforementioned light-emitting device.

[0159] One form of display is, It has one embodiment of the aforementioned light-emitting device.

[0160] One form of head-mounted display is: It has one embodiment of the aforementioned light-emitting device. [Explanation of symbols]

[0161] 2…Growth substrate, 4,6,8…Resist layer, 10…Substrate, 12…Circuit board, 14…First bump, 16…Second bump, 20…Light-emitting element, 30…First electrode, 32…First surface, 40…Second electrode, 42…Second surface, 44…First metal layer, 46…Second metal layer, 50…Columnar part, 50a…First columnar part, 50b…Second columnar part, 50c…Third columnar part, 51…Side surface, 52…Second semiconductor part, 54…Quantum well layer, 56…Third semiconductor part, 60,60a…Conductive material, 70…First semiconductor part, 80…Insulating layer, 100…Light-emitting device, 100R…Red light source, 100G…Green light source, 100B…Blue light source, 200…Light-emitting device, 700…Projector, 702R…First optical element 702G…Second optical element, 702B…Third optical element, 704R…First optical modulator, 704G…Second optical modulator, 704B…Third optical modulator, 706…Cross dichroic prism, 708…Projection device, 710…Screen, 800…Display, 810…Circuit board, 812…Display area, 814…Data line drive circuit, 816…Scan line drive circuit, 818…Control circuit, 820…Lens array, 822…Lens, 830…Heat sink, 900…Head-mounted display, 910a…First display unit, 910b…Second display unit, 911…Image forming apparatus, 912…External components, 913…Optical modulator, 914…Projection device, 915…Light guide device 916...Image light guide member, 917...Reflective layer, 918...Transparent member, 920...Frame, 930a...First temple, 930b...Second temple

Claims

1. circuit board and A first semiconductor part having a first conductivity type, A first columnar portion and a second columnar portion, each having a second semiconductor portion having a second conductivity type different from the first conductivity type, a third semiconductor portion having the first conductivity type and provided between the first semiconductor portion and the second semiconductor portion, and a quantum well layer provided between the second semiconductor portion and the third semiconductor portion, A first electrode is provided between the first columnar portion and the substrate, A second electrode is provided between the second columnar portion and the substrate, A conductive member that electrically connects the second electrode and the first semiconductor portion, It has, The first columnar portion and the second columnar portion each protrude from the first semiconductor portion toward the substrate side, The second semiconductor portion is provided between the substrate and the quantum well layer, The first electrode is electrically connected to the second semiconductor portion of the first columnar portion. The second electrode is electrically connected to the third semiconductor portion of the first columnar portion via the conductive member and the first semiconductor portion. The material of the conductive member is platinum, in this light-emitting device.

2. In claim 1, A light-emitting device in which the height of the first columnar part and the height of the second columnar part are the same.

3. In claim 1 or 2, A light-emitting device having an insulating layer covering the side surface of the first columnar portion.

4. In any one of claims 1 to 3, A light-emitting device in which the height of the first electrode and the height of the second electrode are the same.

5. In any one of claims 1 to 4, A light-emitting device in which the number of the first columnar parts is equal to or greater than the number of the second columnar parts.

6. A projector having a light-emitting device according to any one of claims 1 to 5.

7. A display having a light-emitting device according to any one of claims 1 to 5.

8. A head-mounted display having a light-emitting device according to any one of claims 1 to 5.

Images