Circuit board storage container

Abstract

Provided is a substrate storage container eliminating the possibility of a decrease in connection strength between a slide member and a bending locking member or a fall-off of the bending locking member from the slide member, without using a metal pin. This substrate storage container comprises a lid (10) which is fitted in an open front face (2) of a container body (1) in which a semiconductor wafer can be stored, and a locking mechanism (20) for locking the fitted lid (10). The locking mechanism (20) is composed of: an operating reel (21) that is supported on the operation lid (10) and is rotated by an external operation; a connecting bar (24) that slides in an upper-lower direction of the lid (10) due to rotation of the operating reel (21); and a locking claw (27) that projects from an entrance / exit opening (12) in a peripheral edge portion of the lid (10) as the connecting bar (24) slides, and that can be locked in a locking pocket (4) of a front-face inner periphery portion of the container body (1). The locking claw (27) is rotatably connected to the tip-end portion of the connecting bar (24) by means of a resin pin (31) of φ1.5 mm or greater. Use of the resin pin (31) reduces generation of metal ions, and eliminates various adverse effects on the semiconductor wafer.

Description

Technical Field

[0001] The present invention relates to a substrate storage container used for transporting and storing substrates such as semiconductor wafers.

Background Art

[0002] In semiconductor factories, a substrate storage container called a FOUP (Front Opening Unified Pod) is used for transporting and storing large-diameter semiconductor wafers. As partially shown in FIGS. 14(a), (b), and (c), this substrate storage container includes a lid 10 fitted to the open front 2 of a container body 1 for storing semiconductor wafers, and a locking mechanism 20 for locking the lid 10 fitted to the container body 1. The locking mechanism 20 is built into the lid 10, and this locking mechanism 20 is operated by a lid opening / closing machine (opener) standardized according to SEMI standards.

[0003] The lid 10 is formed in a substantially box shape fitted to the open front 2 of the container body 1, and a plurality of access holes 12 for the locking mechanism 20 are drilled in the peripheral edge portion. Further, the locking mechanism 20 includes a pair of operation reels supported by the lid 10 and rotated by a key operation of the lid opening / closing machine, a plurality of connecting bars 24A that move forward and backward in the vertical direction by the rotation of each operation reel, and a plurality of locking claws 27A that protrude from the access holes 12 of the lid 10 in conjunction with the advancement of each connecting bar 24A and can be locked to the locking pockets 4 on the inner periphery of the front surface of the container body 1 (see Patent Documents 1, 2, 3, 4, and 5).

[0004] Each locking claw 27A is pivotally supported near the access hole 12 of the lid 10 via a metal pin 50, for example, as shown in FIGS. 14(a), (b), (c) and Patent Document 1, and is pivotally connected to the tip of the connecting bar 24A via a metal pin 50. A pressing roller 36 that contacts the inside of the locking pocket 4 on the inner periphery of the front surface of the container body 1 is rotatably supported at the tip 33 via a metal pin 50. These plurality of metal pins 50 are, for example, SUS pins with a diameter of φ1.0 mm or the like, and are press-fitted into a plurality of holes of the locking claw 27A and the tip of the connecting bar 24A, or inserted in a cantilever beam manner.

[0005] In the above, when the lid 10 is fitted onto the open front 2 of the container body 1 and locked, the lid opening / closing mechanism fits the lid 10 onto the open front 2 of the container body 1 (see Figure 14(a)), and the operating key of this lid opening / closing mechanism rotates each operating reel of the locking mechanism 20. As the operating reels rotate, multiple connecting bars 24A advance toward the peripheral edge of the lid 10, and as these connecting bars 24A advance, the locking claws 27A protrude from inside the lid 10 through the opening 12 and out to the outside of the lid (see Figure 14(a)), and these protruding locking claws 27A engage with the locking pocket 4 of the container body 1, and as the locking of these locking claws 27A engages, the lid 10 fitted onto the front 2 of the container body 1 is pressed in and locked (see Figure 14(b)).

[0006] In contrast, when unlocking and removing the lid 10 from the container body 1, the operating key of the lid opening / closing machine rotates each operating reel of the locking mechanism 20 back to its original reference position. As the operating reels rotate back, the multiple connecting bars 24A that had been extended are retracted back to their original reference positions inside the lid 10. This retraction of the connecting bars 24A causes the protruding locking claws 27A to pass through the opening 12 from the locking pocket 4 of the container body 1 and return to the inside of the lid. This return of the locking claws 27A makes the lid 10, which is fitted to the front surface 2 of the container body 1, removable (see Figure 14(c)), and the lid 10 is pulled out and removed from the container body 1 by the lid opening / closing machine. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2013-038217 [Patent Document 2] Japanese Patent Publication No. 2021-28936 [Patent Document 3] Japanese Patent Publication No. 2002-368074 [Patent Document 4] Japanese Patent Publication No. 2005-306411 [Patent Document 5] Japanese Patent Publication No. 2006-303015 [Overview of the project] [Problems that the invention aims to solve]

[0008] Conventional substrate storage containers are configured as described above, with the tip of the connecting bar 24A and the locking claw 27A connected by a metal pin 50. However, from the standpoint of eliminating various adverse effects on the semiconductor wafers being stored, it is desirable to avoid using the metal pin 50 as much as possible. However, if a pin of another material is used instead of the metal pin 50, the connection strength between the connecting bar 24A and the locking claw 27A may decrease, or the locking claw 27A may detach from the tip of the connecting bar 24A, if the locking mechanism 20 is used repeatedly over a long period of time.

[0009] The present invention has been made in view of the above, and aims to provide a substrate storage container that eliminates the risk of reduced connection strength between the sliding member and the bendable locking member, or of the bendable locking member falling off the sliding member, without using metal pins. [Means for solving the problem]

[0010] In order to solve the above problems, the present invention provides a lid that fits into the opening of a container body capable of housing a substrate, and a locking mechanism for locking the fitted lid, The lid includes a lid body that is detachably fitted onto the open front of the container body, and a front plate that covers the front of the lid body. A locking mechanism is interposed between the lid body and the front plate, and the periphery of the lid body is provided with an opening for the locking mechanism that can face a locking pocket on the inner circumference of the front of the container body. The locking mechanism includes an operating member supported by the lid and rotated by external operation, a sliding member that slides as a result of the rotation of the operating member, and a bendable locking member that protrudes from the opening of the lid as a result of the sliding of the sliding member and can engage (stop) with a locking pocket on the inner circumference of the front of the container body. The device includes a holder member fitted to a slide member and a bendable locking member, the bendable locking member being rotatably connected to the tip of the slide member by a resin shaft of φ1.5 mm or more, resin pivot shafts of φ1.5 mm or more being supported on both sides of the holder member, and the through-ports of these multiple resin pivot shafts passing through the sides of the holder member being rotatably inserted into the front of the front side of the bendable locking member. The locking mechanism is configured such that the bent locking member can rotate in the thickness direction of the lid body, and the rotation center of the bent locking member is set as the front part on the front side of the bent locking member.

[0011] Furthermore, in order to solve the above problems, the present invention provides a lid that fits into the opening of a container body capable of housing a substrate, and a locking mechanism for locking the fitted lid, The lid includes a lid body that is detachably fitted onto the open front of the container body, and a front plate that covers the front of the lid body. A locking mechanism is interposed between the lid body and the front plate, and the periphery of the lid body is provided with an opening for the locking mechanism that can face a locking pocket on the inner circumference of the front of the container body. The locking mechanism includes an operating member supported by the lid and rotated by external operation, a sliding member that slides as a result of the rotation of the operating member, a bendable locking member that protrudes from the opening of the lid as a result of the sliding member and can be locked into a locking pocket on the inner front circumference of the container body, and a holder member fitted to the sliding member and the bendable locking member. The bendable locking member and the holder member are each divisible in the width direction of the sliding member, and resin pivot shafts of φ1.5 mm or more are formed to protrude from both sides of the front of the bendable locking member and are rotatably supported on both sides of the holder member, and a resin shaft of φ1.5 mm or more is supported on the back side of the bendable locking member, which rotatably passes through the tip of the sliding member. The locking mechanism is characterized by allowing the bent locking member to rotate in the thickness direction of the lid, and by positioning the rotation center of the bent locking member at the front of the front side of the bent locking member.

[0012] Furthermore, in order to solve the above problems, the present invention provides a lid that fits into the opening of a container body capable of housing a substrate, and a locking mechanism for locking the fitted lid, The lid includes a lid body that is detachably fitted onto the open front of the container body, and a front plate that covers the front of the lid body. A locking mechanism is interposed between the lid body and the front plate, and the periphery of the lid body is provided with an opening for the locking mechanism that can face a locking pocket on the inner circumference of the front of the container body. The locking mechanism includes an operating member supported by the lid and rotated by external operation, a sliding member that slides as a result of the rotation of the operating member, a bendable locking member that protrudes from the opening of the lid as a result of the sliding member and can be locked into a locking pocket on the inner front circumference of the container body, and a holder member fitted to the sliding member and the bendable locking member. On both sides of the front of the bendable locking member, there are resin pivot shafts of φ1.5 mm or more that are rotatably supported on both sides of the holder member. Multiple connecting cylinders are formed near the bend on the back of the bendable locking member, and a resin shaft of φ1.5 mm or more that rotatably passes through the tip of the sliding member is inserted into each connecting cylinder. The holder member is also divisible in the width direction of the sliding member. The locking mechanism is characterized by allowing the bent locking member to rotate in the thickness direction of the lid, and by positioning the rotation center of the bent locking member at the front of the front side of the bent locking member.

[0013] Also, the tip of the bent locking member is bifurcated into a substantially groove shape, and a resin support shaft of 1.5 mm or more in diameter is inserted into the bifurcated tip of the bent locking member. A pressing roller that can rotate in contact with the locking pocket of the container body is fitted onto this resin support shaft. It is possible to fit a pressing roller that can rotate in contact with the locking pocket of the container body. <​​​​​​​​​​Also, when a vertical line is drawn from the rotation center of the bending locking member at the time of locking by the locking mechanism in the direction of the locking pocket of the container body, and a virtual line is drawn from the rotation center of the bending locking member at the time of locking by the locking mechanism to the contact portion between the locking pocket of the container body and the bending locking member, the angle θ formed by these vertical line and the virtual line can be set to 0.5° or more and 20° or less.

[0016] Here, the substrates in the claims include various semiconductor wafers such as at least φ300 mm and φ450 mm, glass substrates, mask substrates, and the like. Also, the container body and the lid may be any of transparent, opaque, and translucent. The slide member of the locking mechanism is mainly plate-shaped, but may be rod-shaped. Further, the resin shaft, the resin fulcrum shaft, and the resin support shaft include at least various pins and bosses made of resin, and may be singular or plural. The resin shaft may be integral with the bending locking member or separate. Also, the resin fulcrum shaft may be integral with the bending locking member or separate. The resin support shaft may be installed rotatably or fixedly. The term "rotation" includes at least swinging (rocking).

[0017] At least the holder member of the bending locking member and the holder member can be configured to be divisible in the width direction of the slide member. Also, the holder member includes an opposing covering plate that faces the front surface of the slide member and the bending locking member, a pair of side plates disposed on both sides of this opposing covering plate to sandwich the slide member and the bending locking member from the left and right, and a dropout prevention member that is installed between the pair of side plates and is located on the back side of the slide member. At least the pair of side plates are included, and a resin fulcrum shaft can be rotatably supported by this pair of side plates. The holder member can be attached and fixed to the lid body of the lid as needed.

[0018] According to the present invention, when connecting the tip of the slide member of the locking mechanism and the bending locking member, since a resin shaft made of resin is used instead of a metal pin, generation of metal ions can be reduced, and various adverse effects on the substrate can be eliminated. Also, instead of simply using the resin shaft, the diameter of the resin shaft is set to φ1.5 mm or more, which is larger than before, to improve the strength and rigidity of the resin shaft. Because this improves durability, even if the locking mechanism is used repeatedly over a long period of time, the risk of a decrease in the connection strength between the sliding member and the bent locking member, or of the bent locking member detaching from the sliding member, can be eliminated. [Effects of the Invention]

[0019] According to the present invention, even without using metal pins, it is possible to effectively eliminate the risk of reduced connection strength between the sliding member and the bent locking member, or of the bent locking member detaching from the sliding member.

[0020] Also, slide member Since a dedicated holder member is used that fits into the bent locking member, there is no need to develop or manufacture a new lid configuration, and an existing lid configuration can be used as is. Also, the holder member Since resin pivot shafts are supported on both sides, there is no need to use one long resin pivot shaft, and it is possible to prevent shrinkage during molding by molding multiple resin pivot shafts to be shorter.

[0021] According to the invention described in claim 2, even without using metal pins, it is possible to effectively eliminate the risk of reduced connection strength between the slide member and the bendable locking member, or the risk of the bendable locking member falling off the slide member. Furthermore, since a dedicated holder member is used that fits onto the slide member and the bendable locking member, there is no need to develop or manufacture a new cover, and an existing cover can be used as is. In addition, the manufacturing process and number of parts of the bendable locking member can be reduced by integrating the bendable locking member, resin shaft, and resin pivot shaft. Furthermore, since there is no need to form a cylindrical portion through which the resin shaft and resin pivot shaft are inserted into the bendable locking member, the structure of the bendable locking member can be simplified. Moreover, since the bendable locking member and the holder member are separable, the assembly of these bendable locking member and holder member becomes extremely easy.

[0022] According to the invention described in claim 3, even without using metal pins, it is possible to effectively eliminate the risk of reduced connection strength between the slide member and the bendable locking member, or the risk of the bendable locking member falling off the slide member. Furthermore, since a dedicated holder member is used that fits onto the slide member and the bendable locking member, there is no need to develop or manufacture a new cover, and an existing cover can be used as is. In addition, it is possible to reduce the manufacturing work and the number of parts of the bendable locking member by integrating the bendable locking member and the resin pivot shaft. Furthermore, since there is no need to form a cylindrical portion for the resin pivot shaft in the bendable locking member, the structure of the bendable locking member can be simplified. In addition, since the holder member is separable, assembly of the bendable locking member and the holder member becomes easier. According to the invention described in claim 4, a retaining roller that contributes to friction reduction is rotatably in contact with the locking pocket of the container body, making it possible to suppress the generation of dust associated with contact.

[0023] Claim 5 stated According to this invention, a recess is formed on the circumferential surface of the rotatable resin support shaft, and a protrusion is formed on the inner circumferential surface of the press roller that fits into the recess of the resin support shaft. As a result of the fitting of the recess and the protrusion, the resin support shaft and the press roller can be rotated integrally. Therefore, it is possible to effectively prevent the press roller from rotating and coming into contact with the circumferential surface of the resin support shaft, thereby preventing dust generation.

[0024] Claim 6 statedAccording to this invention, the multiple ribs reduce the contact area of ​​the bent locking member with the locking pocket of the container body, thus reducing wear associated with contact of the bent locking member. Furthermore, since the resin support shaft and retaining roller can be omitted, the number of parts can be reduced.

[0025] Claim 7 stated According to this invention, if at least the resin shaft is molded from polyetheretherketone resin, excellent heat resistance, flame retardancy, wear resistance, mechanical properties, etc. can be obtained. Furthermore, if at least the resin shaft is molded from polycarbonate resin, excellent impact resistance, heat resistance, dimensional stability, wear resistance, etc. can be obtained. Furthermore, if at least the resin shaft is molded from polybutylene terephthalate resin, excellent heat resistance and durability can be obtained. Furthermore, if at least the resin shaft is molded from polyacetal resin, excellent impact resistance and wear resistance can be expected. Furthermore, if at least the resin shaft is molded from polyetherimide resin, excellent chemical resistance, water resistance, electrical properties, weather resistance, etc. can be expected.

[0026] Furthermore, if at least the resin shaft is molded from polyethersulfone resin, excellent heat resistance, creep resistance, dimensional stability, and flame retardancy can be expected. Also, if at least the resin shaft is molded from polyphenylene sulfide resin, chemical resistance, creep resistance, and weather resistance can be improved. Furthermore, if at least the resin shaft is molded from polyamide-imide resin, heat resistance and mechanical strength can be improved.

[0027] Claim 8 stated According to this invention, since the angle θ formed by the vertical line and the imaginary line is between 0.5° and 20°, when the lid is locked, the contact portion between the locking pocket of the container body and the bent locking member can be brought close to approximately above or below the rotation center of the bent locking member of the locking mechanism. Therefore, wear associated with the contact between the locking pocket of the container body and the bent locking member can be reduced. [Brief explanation of the drawing]

[0028] [Figure 1] This is a schematic overall perspective view showing an embodiment of a substrate storage container according to the present invention. [Figure 2] This is a schematic cross-sectional diagram illustrating the relationship between the container body, lid, and locking mechanism in an embodiment of the substrate storage container according to the present invention. [Figure 3] This is a schematic perspective view of the main parts of an embodiment of a substrate storage container according to the present invention, showing the connecting bar, locking claw, and holder of the locking mechanism from the front. [Figure 4] This is a schematic perspective view illustrating the connecting bar, locking claw, and holder of the locking mechanism in an embodiment of the substrate storage container according to the present invention, viewed from the rear side. [Figure 5] This is an exploded perspective view schematically showing the connecting bar and locking claw of the locking mechanism in an embodiment of the substrate storage container according to the present invention. [Figure 6] This is a schematic perspective view illustrating a holder in an embodiment of the substrate storage container according to the present invention, viewed from the front. [Figure 7] This is a schematic perspective view illustrating the connecting bar, locking claw, and holder of the locking mechanism in a second embodiment of the substrate storage container according to the present invention, viewed from the front. [Figure 8] This is a schematic perspective view illustrating the connecting bar, locking claw, and holder of the locking mechanism in a second embodiment of the substrate storage container according to the present invention, viewed from the rear side. [Figure 9] This is a schematic overall perspective view showing a third embodiment of the substrate storage container according to the present invention. [Figure 10] This is a schematic perspective view illustrating the connecting bar, locking claw, and holder of the locking mechanism in a third embodiment of the substrate storage container according to the present invention, viewed from the front. [Figure 11] This is a schematic perspective view illustrating the operating reel, connecting bar, locking claw, and holder of the locking mechanism in a third embodiment of the substrate storage container according to the present invention, viewed from the rear side. [Figure 12]This diagram shows a fourth embodiment of the substrate storage container according to the present invention, where (a) is a cross-sectional diagram of the main part showing the lid fitted to the open front of the container body, (b) is a cross-sectional diagram of the main part showing the locking mechanism in a fully locked state, and (c) is a cross-sectional diagram of the main part showing the locking mechanism in an unlocked state. [Figure 13] This is a schematic cross-sectional diagram illustrating the relationship between the container body, lid, and locking mechanism in a fourth embodiment of the substrate storage container according to the present invention. [Figure 14] The diagrams illustrate a conventional substrate storage container. (a) is a cross-sectional diagram showing the lid fitted to the open front of the container body, (b) is a cross-sectional diagram showing the locking mechanism in a fully locked state, and (c) is a cross-sectional diagram showing the locking mechanism in an unlocked state. [Modes for carrying out the invention]

[0029] A preferred embodiment of the present invention will now be described with reference to the drawings. In this embodiment, as shown in Figures 1 to 6, the substrate storage container is a FOUP (Floor Opening Up) that includes a lid 10 fitted to the open front 2 of a container body 1 capable of aligning and storing multiple substrates, which are semiconductor wafers, and a locking mechanism 20 for locking the lid 10 fitted to the front 2 of the container body 1. By rotatably connecting a locking claw 27 to a connecting bar 24 of the locking mechanism 20 with a resin pin 31, it contributes to achieving Goal 9 of the SDGs (Sustainable Development Goals, which are the United Nations' international goals for sustainable development, consisting of 17 global goals and 169 targets (achievement criteria)) adopted at the UN Summit.

[0030] The semiconductor wafers, although not shown in the diagram, consist of, for example, thin, brittle, high-quality silicon wafers with a diameter of φ300 mm, on which a circuit pattern is formed on the surface. They are housed inside the container body 1, and 25 wafers are arranged vertically at predetermined intervals.

[0031] The container body 1 and lid 10 are formed by injection molding multiple parts from a molding material containing the required resin, and are composed of a combination of these multiple parts. Examples of resins contained in this molding material include thermoplastic resins and alloys thereof, such as polycarbonate (PC) resin, cycloolefin polymer (COP) resin, cycloolefin copolymer (COC) resin, polypropylene (PP) resin, polyetherimide (PEI) resin, polyetherketone (PEK) resin, polyetheretherketone (PEEK) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, and liquid crystal polymer.

[0032] These resins are to which conductive materials such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers, as well as various antistatic agents such as anionic, cationic, and nonionic types, are added as needed. In addition, UV absorbers such as benzotriazole, salicylate, cyanoacrylate, oxalic acid anilide, and hindered amine types are added, and glass fibers or carbon fibers are selectively added to improve rigidity.

[0033] As shown in Figures 1 and 2, the container body 1 is injection molded into a front-opening box with a horizontally elongated front 2. A pair of left and right teeth for horizontally supporting semiconductor wafers are provided on both side walls of the interior, and these left and right pairs of teeth are arranged at a predetermined interval in the vertical direction, with each tooth being formed as an elongated plate extending in the front-to-back direction. The front 2 of the container body 1 is formed by bending outward in the width direction from the peripheral wall of the container body 1 via a stepped portion, and the flat shoulder surface of the stepped portion defines the seal-forming surface 3 for the lid 10. Locking pockets 4 for the locking mechanism 20 are recessed on both the upper and lower sides of the inner circumference of the front of the container body 1, and each locking pocket 4 is formed as a roughly rectangular hole.

[0034] As shown in Figures 1 and 2, the lid 10 is an existing type comprising a lid body 11 with a roughly rectangular front that is detachably fitted onto the open front 2 of the container body 1, and a front plate 15 that covers the front of the lid body 11 and is exposed to the outside. A locking mechanism 20 is installed between the recessed front sides of the lid body 11 and the front plate 15.

[0035] The lid body 11 is formed, for example, in a shallow, roughly box-shaped cross-section (or roughly tray-shaped cross-section), and openings 12 for the locking mechanism 20, which are opposite the locking pocket 4 of the container body 1, are perforated through both the upper and lower sides of the peripheral wall. A vertically elongated front retainer is attached to the center of the back surface, which is opposite the back wall of the container body 1, to horizontally hold the front edge of the semiconductor wafer with an elastic piece. A frame-shaped fitting groove 13 is provided around the periphery of the back surface of the lid body 11, and an elastic seal gasket 14, which is pressed against the seal-forming surface 3 of the container body 1, is fitted into this fitting groove 13.

[0036] The front plate 15 is formed, for example, from a horizontally elongated transparent or opaque plate, with an operating opening 16 for the locking mechanism 20 drilled through it near the center of both sides. A T-shaped operating key for the lid opener, standardized by SEMI standards, passes through this operating opening 16, and when this operating key is rotated at a predetermined angle, the locking mechanism 20 is operated to perform a locking or unlocking operation. Initially, when the lid 10 is fitted onto the open front 2 of the container body 1, the front plate 15 protrudes slightly forward from the front 2 of the container body 1. When the lid 10 is fitted and fully locked by the locking mechanism 20, the front plate 15 is aligned with the front 2 of the container body 1 and fits within the standard dimensions (see Figure 2).

[0037] As shown in Figures 1 to 6, the locking mechanism 20 is configured to include a pair of left and right operating reels 21 supported by the lid 10 and rotated by key operation from outside the lid opening / closing machine, a plurality of pairs of connecting bars 24 that move up and down in the vertical direction as each operating reel 21 rotates, a plurality of locking claws 27 that are linked to the extension of each connecting bar 24 and can protrude from the opening 12 of the lid 10 and engage with the locking pocket 4 on the inner front circumference of the container body 1, and a plurality of holders 37 that fit onto each connecting bar 24 and locking claw 27.

[0038] The operating reel 21, connecting bar 24, locking claw 27, and holder 37 of the locking mechanism 20 are injection molded from a molding material containing the required resin. Examples of suitable resins for this molding material include polyetheretherketone (PEEK) resin, which has excellent heat resistance, flame retardancy, abrasion resistance, and mechanical properties; polycarbonate (PC) resin, which has excellent impact resistance, heat resistance, dimensional stability, and abrasion resistance; polybutylene terephthalate (PBT) resin, which has excellent heat resistance and durability; polyacetal (POM) resin, which has excellent impact resistance and abrasion resistance; polyetherimide (PEI) resin, which has excellent chemical resistance, water resistance, electrical properties, and weather resistance; polyethersulfone (PES) resin, which has excellent heat resistance, creep resistance, dimensional stability, and flame retardancy; polyphenylene sulfide (PPS) resin, which has excellent chemical resistance, creep resistance, and weather resistance; polyamideimide (PAI) resin, which has excellent heat resistance and mechanical strength; or alloys thereof.

[0039] As shown in Figure 1, each operating reel 21 is formed as a roughly convex-shaped disc with a reel cover mounted on the center of the disc-shaped reel body via a rotating bearing, and is rotatably supported near the center on both sides of the front of the cover body 11. The central part 22 of the operating reel 21, which consists of the reel cover that protrudes toward the front plate 15, faces the operating opening 16 of the front plate 15, and is fitted onto the operating key of the cover opening / closing machine that passes through this operating opening 16, thereby automatically rotating the operating reel 21 at a predetermined rotation angle. A pair of curved grooves 23 are drilled near the periphery of the operating reel 21 at 180° intervals, and each curved groove 23 is formed in a semi-circular arc shape, to which the end of the connecting bar 24 is connected.

[0040] As shown in Figure 1, multiple pairs of connecting bars 24 are slidably arranged on both sides of the front of the lid body 11, with pairs of connecting bars 24 arranged vertically on the operating reel 21. Each connecting bar 24 is formed in an elongated, roughly plate-like shape with a guide hole, as shown in Figures 4 and 5, and has a pair of cylindrical portions 25 arranged side by side on both sides of its tip, with each cylindrical portion 25 being cylindrical. A cylindrical latch boss 26 is integrally formed on the rear end of each connecting bar 24, and this latch boss 26 is loosely slidably fitted into the curved groove 23 of the operating reel 21. Due to this loose fitting of the latch boss 26, the connecting bar 24 moves up and down while being guided by the guide on the lid body 11 as the operating reel 21 rotates.

[0041] As shown in Figures 2 to 5, each locking claw 27 is bent into a roughly L-shape or V-shape with a narrower width than conventional types in order to improve rigidity, with its front end 28 facing the front plate 15 of the lid 10. This front end 28 is formed into a cylindrical pivot cylinder 29, and a cylindrical connecting cylinder 30 is formed near the bent portion on the rear side, located on the lid body 11 side of the lid 10. This connecting cylinder 30 is connected to the tip of the connecting bar 24 via a separate resin pin 31, allowing it to swing in the thickness direction (front-to-back direction) of the lid 10.

[0042] As shown in Figures 2 and 5, unlike conventional metal pins 50, the resin pin 31 is molded from a predetermined molding material into a thick pin with a diameter of φ1.5 mm or more, preferably φ1.5 mm to 4 mm, more preferably φ3 mm, and even more preferably φ4 mm. A fall-prevention flange 32 is formed to protrude from the circumferential surface of the end portion as needed. The resin pin 31 passes through the pair of cylindrical portions 25 at the tip of the connecting bar 24 and the connecting cylinder 30 of the locking claw 27, functioning to pivotably connect the connecting bar 24 and the locking claw 27.

[0043] The specified molding material for the resin pin 31 is the same molding material as for the locking mechanism 20, namely, polyetheretherketone resin which has excellent heat resistance, flame retardancy, wear resistance, and mechanical properties; polycarbonate resin which has excellent impact resistance, heat resistance, dimensional stability, and wear resistance; polybutylene terephthalate resin which has excellent heat resistance and durability; polyacetal resin which has excellent impact resistance and wear resistance; polyetherimide resin which has excellent chemical resistance, water resistance, electrical properties, and weather resistance; polyethersulfone resin which has excellent heat resistance, creep resistance, dimensional stability, and flame retardancy; polyphenylene sulfide resin which has excellent chemical resistance, creep resistance, and weather resistance; polyamideimide resin which has excellent heat resistance and mechanical strength; or alloys thereof.

[0044] The tip 33 of the locking claw 27 is oriented toward the opening 12 of the lid 10, and is bifurcated to form a roughly groove-shaped recess. As shown in Figures 2 to 5, a thick resin support pin 34 is freely rotatably mounted between the bifurcated tip 33 of the locking claw 27, and a cylindrical retaining roller 36 that contacts the locking pocket 4 of the container body 1 is fitted onto this resin support pin 34.

[0045] Unlike conventional metal pins 50, the resin support pin 34 is made of the same molding material as the locking mechanism 20 and resin pin 31, and has a diameter of φ1.5 mm or more that penetrates the resin press roller 36. The diameter is preferably φ1.5 mm or more and 4 mm or less, more preferably φ3 mm, and even more preferably φ4 The pin is formed into a stepped pin of mm in diameter, and a reduced-diameter recess 35 is formed as a recess on the circumferential surface of at least the central part of the pin, as well as both ends and the central part. An enlarged-diameter flange is formed as needed on the circumferential surface of the end part to contact the side surface of the tip of the locking claw 27 and prevent misalignment.

[0046] The retaining roller 36 is located between the branched tips 33 of the locking claws 27, and has an enlarged protrusion on its inner circumferential surface that is press-fitted into the recess 35 of the resin support pin 34. This close fitting of the recess 35 and the protrusion allows the retaining roller 36 to rotate integrally with the resin support pin 34, and it rotatably slides into the locking pocket 4 of the container body 1. This integration of the resin support pin 34 and the retaining roller 36 effectively prevents the retaining roller 36 from rubbing against the circumferential surface of the resin support pin 34 as it rotates, thus preventing the generation of particles.

[0047] As shown in Figures 1, 3, 4, and 6, the holder 37 is formed in a roughly rectangular cylindrical shape in plan view and comprises a front rectangular opposing covering plate 38 that faces the front of the connecting bar 24 and the locking claw 27, a pair of left and right side plates 39 disposed on both sides of the opposing covering plate 38 to sandwich the connecting bar 24 and the locking claw 27 from the left and right, and a fall prevention bar 40 that is installed between the pair of side plates 39 and located on the rear side of the connecting bar 24, and is fitted onto the tip end of the connecting bar 24 and the locking claw 27.

[0048] The pair of side plates 39 of the holder 37 are formed to be vertically elongated and taller than the opposing covering plate 38. Through holes are drilled in the pair of side plates 39 of the holder 37, facing each other from the left and right sides towards the pivot cylinder 29 of the front part 28 of the locking claw 27. A resin pivot pin 41 passes through each of these through holes, and the through portions of the resin pivot pin 41 that pass through the side plates 39 of the holder 37 are inserted into the pivot cylinder 29 of the front part 28 of the locking claw 27 from both sides so as to be able to rotate relative to each other. As a result of this pair of resin pivot pins 41 being inserted into the pivot cylinder 29 of the locking claw 27 from both sides so as to be able to rotate relative to each other, the locking claw 27 swings in an arc around the front part 28.

[0049] Each resin pivot pin 41, as shown in Figures 2 to 4 and 6, differs from conventional metal pins 50 in that it is made of the same molding material as the locking mechanism 20 and resin pins 31, for example, with a diameter of φ1.5 mm or more. Preferably φ1.5mm to 4mm, more preferably φ3mm, and even more preferably φ It is molded into a 4mm thick pin. An enlarged flange 42 is formed protruding from the circumferential surface of the end portion of this resin pivot pin 41, which contacts the side plate 39 of the holder 37 to prevent misalignment, etc.

[0050] In the above configuration, when the lid 10 is fitted onto the open front 2 of the container body 1 and locked, first the lid 10 is fitted onto the open front 2 of the container body 1 by the lid opening and closing mechanism. At this time, the front plate 15 of the lid 10 protrudes slightly forward from the front 2 of the container body 1 and is misaligned with the front 2 of the container body 1.

[0051] Once the lid 10 is fitted onto the open front 2 of the container body 1, the operating key of the lid opening / closing machine rotates each operating reel 21 of the locking mechanism 20 at a 90° angle in one direction. As a result of the rotation of the operating reel 21, multiple pairs of connecting bars 24 advance from their reference position toward the peripheral edge of the lid body 11. This advancement of the connecting bars 24 causes the locking claws 27 to swing outwards from inside the lid body 11, passing through the opening 12, around the pivot cylinder 29 of their front part 28, and the retaining roller 36 of the swinging locking claws 27 engages and locks into the locking pocket 4 of the container body 1.

[0052] The engagement and locking of the locking claws 27 allows the lid 10 to be accurately pulled in and pressed into place at a specified position within the front of the container body 1, as shown in Figure 2, and the front plate 15 is locked in place with the front surface 2 of the container body 1 aligned. The arrows in Figure 2 indicate the direction of the reaction force.

[0053] In contrast, when unlocking and removing the lid 10 from the front 2 of the container body 1, the operating key of the lid opening / closing machine rotates each operating reel 21 of the locking mechanism 20 by 90° to its original reference position. As a result of the rotation of the operating reels 21, the multiple pairs of connecting bars 24 that had been extended retract back to their original reference position on the lid 10. As the connecting bars 24 retract, the protruding locking claws 27 pivot back into the lid, passing through the retraction opening 12 from the locking pocket 4 of the container body 1 around the pivot cylinder 29 of their front part 28. This pivoting return of the locking claws 27 makes the lid 10, which is fitted to the front 2 of the container body 1, removable, and the lid 10 is pulled out and removed from the front 2 of the container body 1 by the lid opening / closing machine.

[0054] According to the above configuration, since resin pins 31, resin support pins 34, and resin pivot pins 41 are used instead of metal pins 50, various adverse effects on the semiconductor wafer inside the container body 1 can be eliminated. In addition, since the diameters of the resin pins 31, resin support pins 34, and resin pivot pins 41 are increased from the conventional φ1 mm to φ1.5 mm or more, the thickness of the lid body 11 can be reduced. While taking these factors into consideration, it is possible to improve rigidity, and even if the locking mechanism 20 is used repeatedly over a long period of time, the risk of a decrease in the connection strength between the connecting bar 24 and the locking claw 27, or of the locking claw 27 detaching from the tip of the connecting bar 24, can be effectively eliminated.

[0055] Furthermore, if the resin pins 31, resin support pins 34, and resin pivot pins 41 are molded from polyetheretherketone resin or polycarbonate resin, which have excellent wear resistance, dust generation due to wear can be significantly suppressed. Also, since a dedicated holder 37 is used, there is no need to develop or manufacture a new lid 10 with a new configuration that pivotably supports the locking claws 27, and the existing lid 10 can be used as is. In addition, since a pair of resin pivot pins 41 are used instead of one long resin pivot pin 41, it is possible to mold each resin pivot pin 41 to be shorter and prevent sinking during molding.

[0056] Furthermore, since the locking claw 27 is narrower than the conventional locking claw 27A, a significant improvement in the strength of the locking claw 27 can be expected. In addition, by providing a flange that provides identification functionality around the end surface of the resin support pin 34, it is possible to prevent errors in the installation direction of the resin support pin 34 when attaching the retaining roller 36 to the locking claw 27. Moreover, since the retaining roller 36, which contributes to friction reduction, is rotatably sliding in contact with the locking pocket 4 of the container body 1, the generation of particles can be greatly suppressed.

[0057] Next, Figures 7 and 8 show a second embodiment of the present invention, in which the locking claw 27 and holder 37 of the locking mechanism 20 can be divided from the central part in the width direction of the connecting bar 24, thereby changing the configuration of the locking claw 27.

[0058] The locking claw 27 is bent into a roughly L-shape or V-shape in cross-section, and resin pivot pins 41 are formed to protrude in a boss-like manner on both sides of the front of the front portion. This pair of resin pivot pins 41 are rotatably inserted and supported in through holes in a pair of side plates 39 of the holder 37. Resin pins 31 are horizontally supported on both sides of the back of the locking claw 27, and a gap is formed between the back of the locking claw 27 and the pair of resin pins 31, allowing each resin pin 31 to rotatably pass through the cylindrical portion 25 of the connecting bar 24. The other parts are the same as in the above embodiment, so their description is omitted.

[0059] In this embodiment, the same effects and advantages as in the above embodiment can be expected, and it is clear that the manufacturing process and number of parts of the locking claw 27 can be reduced by integrating the locking claw 27, resin pin 31, and resin pivot pin 41. Furthermore, since there is no need to form a pivot cylinder 29 or connecting cylinder 30 on the locking claw 27, the structure of the locking claw 27 can be simplified. In addition, since the left and right pair of locking claws 27 and holder 37 can be separated, the assembly of these locking claws 27 and holder 37 becomes extremely easy.

[0060] Next, Figures 9 to 11 show a third embodiment of the present invention, in which the configuration of the locking claw 27 is changed so that the holder 37 can be divided from the central part in the width direction of the connecting bar 24.

[0061] As shown in Figures 10 and 11, the locking claw 27 is bent into a roughly L-shape or V-shape in cross-section, and resin pivot pins 41 are formed to protrude in a boss shape on both sides of the front part of the front side, and this pair of resin pivot pins 41 is rotatably inserted and supported in through holes in a pair of side plates 39 of the holder 37. Near the bent part on the back side of the locking claw 27, a pair of connecting cylinders 30 are formed side by side on the lid body 11 side of the lid body 10, and a short resin pin 31 is inserted into each connecting cylinder 30 so as to rotate relative to the cylindrical part 25 of the connecting bar 24.

[0062] The tip 33 of the locking claw 27 is formed in a tapered plate shape without being forked. On at least the front surface of this tip 33, a plurality of ribs 43 that contact the locking pocket 4 of the container body 1 are formed in a lateral arrangement at predetermined intervals. The other parts are the same as in the above embodiment, so their description is omitted.

[0063] In this embodiment, the same effects and advantages as in the above embodiment can be expected, and it is clear that the manufacturing process and the number of parts of the locking claw 27 can be reduced by integrating the locking claw 27 and the resin pivot pin 41. Furthermore, since there is no need to form a pivot cylinder 29 on the locking claw 27, the structure of the locking claw 27 can be simplified. In addition, since the holder 37 can be divided into a left and right pair, the assembly of the locking claw 27 and the holder 37 becomes extremely easy.

[0064] Furthermore, the multiple ribs 43 of the locking claw 27 reduce the contact area of ​​the locking claw 27 with the locking pocket 4 of the container body 1, thus greatly reducing wear associated with contact. In addition, the use of multiple ribs 43 makes it possible to omit the resin support pin 34 and the retaining roller 36, thus contributing to a reduction in the number of parts.

[0065] Next, Figures 12(a), (b), (c) and 13 show a fourth embodiment of the present invention. In this embodiment, the position of the front portion 28 of the locking claw 27 is changed. A vertical line vl (see Figure 13) is drawn from the pivot center of the locking claw 27 when the locking mechanism 20 is locked, in the direction of the locking pocket 4 of the container body 1. A virtual line il is drawn from the pivot center of the locking claw 27 when the locking mechanism 20 is locked, to the contact point between the locking pocket 4 of the container body 1 and the tip portion 33 of the locking claw 27. The angle θ formed by these vertical lines vl and virtual line il is set to be between 0.5° and 20°.

[0066] The locking claw 27 has a tapered plate-like tip 33, and multiple ribs 43 that contact the locking pocket 4 of the container body 1 are arranged as needed in the left-right width direction at least on the front of this tip 33. Also, the angle θ formed by the vertical line vl and the imaginary line il is generally about 25°, but in this embodiment it is 0.5° to 20°, preferably 2.2° to 10°. The temperature is set to 3.2° or less, more preferably 3.2° to 5.2°, and even more preferably 4.2°. The rest of the body is the same as in the above embodiment, so no further explanation is given.

[0067] In the above configuration, the lid 10 is fitted onto the open front surface 2 of the container body 1. When the operating key of the lid opening / closing device rotates each operating reel 21 of the locking mechanism 20 at a 90° angle in one direction, the rotation of the operating reel 21 causes multiple pairs of connecting bars 24 to advance from their reference position toward the peripheral edge of the lid body 11. As the connecting bars 24 advance, the locking claw 27 swings outwards from inside the lid body 11 through the opening 12, centered on its front portion 28 (see Figure 12(a)), and the tip portion 33 of the swinging locking claw 27 engages and locks into the locking pocket 4 of the container body 1 via the rib 43 (see Figure 12(b)).

[0068] The engagement and locking of the locking claws 27 allows the lid 10 to be accurately pulled in and pressed into place at a predetermined position inside the front of the container body 1, and the front plate 15 is locked in place with the front 2 of the container body 1 aligned.

[0069] In response to this, in order to unlock and remove the lid 10 from the container body 1, the operating key of the lid opening / closing machine rotates each operating reel 21 of the locking mechanism 20 by 90° to its original reference position. As the operating reel 21 returns to its original rotational position, multiple pairs of connecting bars 24 retract back to their original reference position on the lid 10. As the connecting bars 24 retract back, the locking claws 27 swing back into the lid, passing through the retractable opening 12 from the locking pocket 4 of the container body 1 around their front portion 28. This swinging return of the locking claws 27 makes the lid 10, which is fitted to the front surface 2 of the container body 1, removable (see Figure 12(c)), and the lid 10 is pulled out and removed from the front surface 2 of the container body 1 by the lid opening / closing machine.

[0070] In this embodiment as well, the same effects and advantages as in the above embodiment can be expected, and moreover, the angle θ formed by the vertical line vl and the virtual line il is smaller than in the conventional embodiment, between 0.5° and 20°, so the lid When the lock is engaged, the contact portion between the locking pocket 4 of the container body 1 and the tip 33 of the locking claw 27 of the locking mechanism 20 can be brought close to approximately above or approximately below the pivoting center of the locking claw 27. Therefore, wear due to sliding contact between the locking pocket 4 of the container body 1 and the tip 33 of the locking claw 27 can be significantly reduced.

[0071] Furthermore, the multiple ribs 43 reduce the contact area of ​​the tip 33 of the locking claw 27 with the locking pocket 4, thus greatly reducing wear associated with contact. In addition, the adoption of the ribs 43 allows for the omission of resin support pins 34 and retaining rollers 36, thus reducing the number of parts.

[0072] In addition, a cylindrical roller with excellent wear resistance may be rotatably fitted into the latch boss 26 of the connecting bar 24 in the above embodiment, and this roller may be slidably fitted into the curved groove 23 of the operating reel 21 to prevent dust generation. Alternatively, a resin support pin 34 may be fixed and axially mounted between the branched tip portions 33 of the locking claw 27, and a retaining roller 36 that slides into the locking pocket 4 of the container body 1 may be freely rotatably fitted onto this resin support pin 34 to distribute stress. Furthermore, a reduced-diameter recess 35 may be partially formed on the circumferential surface of the resin support pin 34 other than the central portion.

[0073] Furthermore, if there are no particular problems, the resin support pins 34 can be made into pairs, and each pair of resin support pins 34 can be inserted into the branched tip portion 33 of the locking claw 27, and at least both ends of the retaining roller 36 can be fitted into the through-holes that approach the tip portions 33 of the pair of resin support pins 34. Also, if there are no particular problems, the resin support pins 34 can be molded into straight pins or the like.

[0074] Furthermore, the opposing covering plate 38 of the holder 37 can be omitted, and semicircular notches serving as bearing portions can be formed in the pair of side plates 39 of the holder 37, with resin pivot pins 41 rotatably fitted and supported in these notches. The fall prevention bar 40 can also be changed to a wider fall prevention plate, which can then be detachably fixed to the lid body 11. In addition, while the substrate storage container is primarily a FOUP, it can also be an FOSB (Front Opening Shipping Box) for semiconductor wafer shipping, provided that it does not cause any particular problems. [Industrial applicability]

[0075] The substrate storage container according to the present invention is used in manufacturing fields such as electrical, electronic, precision equipment, and semiconductors. [Explanation of Symbols]

[0076] 1. Container body 2 front 4 Lockable Pockets 10 Lid 11 Lid body 12 Outlet 15 Front plate 20 Locking mechanism 21. Operating reel (operating component) 24. Connecting bar (sliding member) 25 Cylinder 27 Locking claw (bent locking member) 28 front 29 Pivot cylinder 30 Connecting tube 31. Resin pin (resin shaft) 32 Anti-drop flange 33 Tip 34. Resin support pin (resin support shaft) 35 recess 36 Pressing roller 37. Holder (Holder component) 39 Side panel (side section) 41. Resin pivot pin (resin pivot shaft) 43 Ribs 50 metal pins il virtual line vl plumb line θ is the angle formed by the vertical line and the imaginary line.

Claims

1. A circuit board storage container comprising a lid that fits into the opening of a container body capable of housing circuit boards, and a locking mechanism for locking the fitted lid, The lid includes a lid body that is detachably fitted onto the open front of the container body, and a front plate that covers the front of the lid body. A locking mechanism is interposed between the lid body and the front plate, and the periphery of the lid body is provided with an opening for the locking mechanism that can face a locking pocket on the inner circumference of the front of the container body. The locking mechanism includes an operating member supported by the lid and rotated by external operation, a sliding member that slides as a result of the rotation of the operating member, a bendable locking member that protrudes from the opening of the lid as a result of the sliding member and can be locked into a locking pocket on the inner circumference of the front of the container body, and a holder member fitted to the sliding member and the bendable locking member. The bendable locking member is rotatably connected to the tip of the sliding member by a resin shaft of φ1.5 mm or more, and resin pivot shafts of φ1.5 mm or more are supported on both sides of the holder member. The through-holes of these multiple resin pivot shafts, which pass through the sides of the holder member, are rotatably inserted into the front of the front side of the bendable locking member. A substrate storage container characterized in that the bendable locking member of the locking mechanism is rotatable in the thickness direction of the lid, and the center of rotation of the bendable locking member is the front part on the front side of the bendable locking member.

2. A circuit board storage container comprising a lid that fits into an opening of a container body capable of housing circuit boards, and a locking mechanism for locking the fitted lid, The lid includes a lid body that is detachably fitted onto the open front of the container body, and a front plate that covers the front of the lid body. A locking mechanism is interposed between the lid body and the front plate, and the periphery of the lid body is provided with an opening for the locking mechanism that can face a locking pocket on the inner circumference of the front of the container body. The locking mechanism includes an operating member supported by the lid and rotated by external operation, a sliding member that slides as a result of the rotation of the operating member, a bendable locking member that protrudes from the opening of the lid as a result of the sliding member and can be locked into a locking pocket on the inner front circumference of the container body, and a holder member fitted to the sliding member and the bendable locking member. The bendable locking member and the holder member are each divisible in the width direction of the sliding member, and resin pivot shafts of φ1.5 mm or more are formed to protrude from both sides of the front of the bendable locking member and are rotatably supported on both sides of the holder member, and a resin shaft of φ1.5 mm or more is supported on the back side of the bendable locking member, which rotatably passes through the tip of the sliding member. A substrate storage container characterized in that the bendable locking member of the locking mechanism is rotatable in the thickness direction of the lid, and the center of rotation of the bendable locking member is the front part on the front side of the bendable locking member.

3. A circuit board storage container comprising a lid that fits into the opening of a container body capable of housing circuit boards, and a locking mechanism for locking the fitted lid, The lid includes a lid body that is detachably fitted onto the open front of the container body, and a front plate that covers the front of the lid body. A locking mechanism is interposed between the lid body and the front plate, and the periphery of the lid body is provided with an opening for the locking mechanism that can face a locking pocket on the inner circumference of the front of the container body. The locking mechanism includes an operating member supported by the lid and rotated by external operation, a sliding member that slides as a result of the rotation of the operating member, a bendable locking member that protrudes from the opening of the lid as a result of the sliding member and can be locked into a locking pocket on the inner circumference of the front of the container body, and a holder member fitted to the sliding member and the bendable locking member. On both sides of the front of the bendable locking member, there are resin pivot shafts of φ1.5 mm or more that are rotatably supported on both sides of the holder member. Multiple connecting cylinders are formed near the bend on the back of the bendable locking member, and a resin shaft of φ1.5 mm or more that rotatably passes through the tip of the sliding member is inserted into each connecting cylinder. The holder member is also divisible in the width direction of the sliding member. A substrate storage container characterized in that the bendable locking member of the locking mechanism is rotatable in the thickness direction of the lid, and the center of rotation of the bendable locking member is the front part on the front side of the bendable locking member.

4. A substrate storage container according to claim 1, 2, or 3, wherein the tip of the bendable locking member is branched into two to form a roughly grooved shape, a resin support shaft of φ1.5 mm or more is inserted into the branched tip of the bendable locking member, and a retaining roller that rotatably contacts the locking pocket of the container body is fitted onto the resin support shaft.

5. A substrate storage container according to claim 4, wherein a resin support shaft is rotatably mounted between the branched ends of a bendable locking member, a recess is formed on the circumferential surface of the resin support shaft, and a protrusion is formed on the inner circumferential surface of the pressing roller that fits into the recess of the resin support shaft.

6. A substrate storage container according to claim 1, 2, or 3, wherein a plurality of ribs are formed at the tip of the bendable locking member, which contact the inside of the locking pocket of the container body.

7. A substrate storage container according to claim 4, 5, or 6, wherein at least the resin shaft among the resin shaft, resin pivot shaft, and resin support shaft is molded from polyetheretherketone resin, polycarbonate resin, polybutylene terephthalate resin, polyacetal resin, polyetherimide resin, polyethersulfone resin, polyphenylene sulfide resin, or polyamideimide resin.

8. A substrate storage container according to any one of claims 1 to 7, wherein when a vertical line is drawn from the rotation center of the bent locking member when the locking mechanism is locked towards the locking pocket of the container body, and a virtual line is drawn from the rotation center of the bent locking member when the locking mechanism is locked to the contact portion between the locking pocket of the container body and the bent locking member, the angle θ formed by these vertical lines and the virtual line is 0.5° or more and 20° or less.

Images