Method for manufacturing semi-finished pipes and semi-finished pipes

Abstract

To provide a semi-product tube serving in manufacturing a tube (final product tube) with a small outer diameter by using a lathe, even if the lathe has a small outer diameter and therefore holding the tube with a chucking jig is difficult and cutting is difficult.SOLUTION: A semi-product tube 1 is a semi-product tube before formed into a final product tube 2 by being cut using a lathe. The semi-product tube 1 comprises: a first layer 11 for a final product tube constitution which remains even after being cut by the lathe; and a second dummy layer 12 which is formed on the outside of the first layer 11, and does not remain after being cut by the lathe.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to This relates to a method for manufacturing semi-finished pipes and to semi-finished pipes themselves. Here, the "semi-finished pipe" is an intermediate product of the pipe as the final product, and refers to a product in a state where it can be sold.

Background Art

[0002] In recent years, in various fields, the need for very thin and long pipes with a very small outer diameter has been increasing. For example, metal pipes such as microtubes and micropipes used in pipes for semiconductor inspection contact probes, medical and printing nozzles, pipes for optical communication connectors, pipes for optical communication metal ferrules, etc. For such pipes, there may be a case where recesses or protrusions are formed on the surface of the pipe for attachment to a device to which the pipe is attached, display of the pipe manufacturer, etc. For example, when a contact pin (plunger) and a spring for restoring force are inserted into a pipe (barrel) to form a contact probe for semiconductor inspection, if a convex portion is formed on the outside of the pipe, by fitting it into a concave portion provided in the attachment portion, the contact probe becomes difficult to come off, and it becomes possible to perform a more reliable inspection on the electrodes of a miniaturized and highly integrated semiconductor.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Patent Document 1 discloses a technique for manufacturing a highly accurate cylindrical base by machining the surface of a cylindrical workpiece using a conventional lathe, as shown in Figure 14. In this technique, the lathe jig for holding the cylindrical workpiece 9120 has a pair of cylindrical pressing members 9112 and 9114, and the pressing members 9112 and 9114 have recesses 9122 and 9124 into which the ends of a shaft 9116 can be fitted. When machining the surface of a cylindrical workpiece using this lathe jig, the shaft 9116 is inserted through the cylindrical workpiece 9120, and the gap between the shaft 9116 and the cylindrical workpiece 9120 is filled with a filling member 9118 to hold the cylindrical workpiece 9120, and its surface is machined. The technology disclosed in Patent Document 1 is useful when the diameter of the cylindrical workpiece 9120 is large, such as when the cylindrical substrate is used to manufacture an electrophotographic photoreceptor substrate or an electrophotographic developing sleeve.

[0005] However, in the case of very small tubes, such as those with an outer diameter of less than 0.6 to 1.0 mm, the inner diameter of the tube is even smaller. Therefore, it is virtually impossible to insert a shaft 9116 as described in Patent Document 1 or to fill the gap with a filling member 9118, and it is difficult to machine the surface of the tube using the method described in Patent Document 1. Furthermore, tubes with very small outer diameters are usually impossible to grip with a lathe's chucking jig, or even if they can be gripped, the grip is unstable, making it extremely difficult to provide tubes with recessed or convex sections formed by machining the surface.

[0006] Therefore, the present invention aims to provide a method for manufacturing a small-diameter pipe having recesses or protrusions on its surface, and a pipe, even when using a lathe where cutting is difficult because gripping with a chucking jig is difficult when the outer diameter is small. Furthermore, there are users who want to receive tubes in the preceding stage, so to speak, semi-finished products (semi-finished tubes), rather than the final product tubes (final product tubes), and then use a lathe to machine them to produce small-diameter tubes (final product tubes) with recesses or protrusions of their desired shape on the surface. There is a market need for such semi-finished tubes. Therefore, the objective is to provide semi-finished tubes and a method for manufacturing them that can be used to produce small-diameter tubes (final product tubes) with recesses or protrusions on the surface, even on lathes where machining is difficult due to the difficulty of gripping with a chucking jig when the outer diameter is small. [Means for solving the problem]

[0007] [1] The semi-finished tube (first semi-finished tube) of the present invention is a semi-finished tube (first semi-finished tube) used to be made into a final product tube by cutting with a lathe, and is characterized by comprising: a first layer for forming a final product tube that remains even after being cut with the lathe; and a second layer formed on the outside of the first layer and used as a dummy to be cut with the lathe. "Final product tubing" is contrasted with "semi-finished tubing" and refers to tubing that becomes the final product. It does not matter whether the tubing itself is the subject of trading or whether the tubing is part of a product. "Dummy" refers to a component that is not used for the final product tube assembly, but rather for gripping with a chucking jig. Alternatively, the first layer may be composed primarily of rare metals, and the second layer may be composed of common metals (base metals).

[0008] With such a semi-finished tube (first semi-finished tube), a second dummy layer is formed on the outside of the first layer for the final product tube, which remains after being cut by the lathe. Therefore, by gripping the dummy second layer, it becomes possible to provide a semi-finished tube that can be used to manufacture a small-diameter tube (final product tube) having recesses or protrusions on its surface, even on a lathe where cutting is difficult because gripping with a chucking jig is difficult when the outer diameter is small. In this specification, "chucking fixture" includes not only fixtures that grip with jaws, such as three-jaw chucks and jaw chucks (jaws), but also fixtures that grip by contact or surface contact, such as open chucks and closed chucks. A collet chuck is a type of closed chuck, and in this application, it is preferable to use a collet chuck as a chucking fixture.

[0009] [2] In the semi-finished pipe described above (first semi-finished pipe), the outer diameter of the first layer is preferably an outer diameter near the outer diameter of the final product pipe.

[0010] [3] In the semi-finished tube described above (first semi-finished tube), it is preferable that the first layer has a small outer diameter that makes it difficult to grip with the chucking jig of the lathe, and the second layer has a large outer diameter that makes it possible to grip with the chucking jig of the lathe.

[0011] [4] In the semi-finished tube described above (first semi-finished tube), it is preferable that the first layer has an outer diameter of 0.05 mm or more and less than 0.60 mm, and the second layer has an outer diameter of 0.40 mm or more and 3.00 mm or less. It is even more preferable that the first layer has an outer diameter of 0.05 mm or more and less than 0.50 mm, and the second layer has an outer diameter of 0.50 mm or more and 2.00 mm or less. It is even more preferable that the first layer has an outer diameter of 0.10 mm or more and less than 0.40 mm, and the second layer has an outer diameter of 0.40 mm or more and 1.00 mm or less. It is even more preferable that the first layer has an outer diameter of 0.10 mm or more and less than 0.30 mm, and the second layer has an outer diameter of 0.40 mm or more and 0.60 mm or less.

[0012] [5] In the semi-finished pipe described above (first semi-finished pipe), it is preferable that the second layer has better machinability than at least the portion of the first layer adjacent to the second layer.

[0013] [6] In the semi-finished pipe (first semi-finished pipe) described above, the first layer has a first outer layer that forms an adjacent portion with the second layer, and a first inner layer formed inside the first outer layer, and it is preferable that the first outer layer has a Vickers hardness in the range of 350 to 550 HV.

[0014] [7] In the semi-finished tube described above (first semi-finished tube), it is preferable that the inner layer of the first layer is made of gold, a gold-cobalt alloy, palladium, a palladium alloy, or a co-deposit of polytetrafluoroethylene and nickel, the outer layer of the first layer is made of a nickel-cobalt alloy, a nickel-manganese alloy, or pure nickel, and the second layer is made of copper, pure nickel, or a nickel-manganese alloy. Polytetrafluoroethylene (PTFE) is a fluoropolymer composed solely of fluorine and carbon atoms. Furthermore, pure nickel includes, for example, NC-Ni (Ni200) (regular pure nickel), LC-Ni (Ni201) (with particularly low carbon content), D-Ni (with small amounts of aluminum and titanium added), A-Ni (high-purity nickel with a purity of 99.7% or higher), and K-Ni (high-purity nickel with a purity of 99.5% or higher) (sold by Hitachi Metals, Ltd., etc.).

[0015] [8] The present invention provides a method for manufacturing a semi-finished pipe (first semi-finished pipe), comprising the steps of: preparing a wire; forming a first layer on the outer circumference of the wire for the final product pipe, which remains even after being cut by the lathe; and forming a second layer on the outer circumference of the first layer for a dummy to be cut by the lathe. According to this method for manufacturing semi-finished tubes (first semi-finished tubes), a first layer for the final product tube, which remains on the wire after being cut by a lathe, is formed, and a second layer for a dummy to be cut by the lathe is formed on the outside of the first layer. Therefore, even with a lathe where cutting is difficult because gripping with a chucking jig is difficult when the outer diameter is small, it is possible to use the lathe to manufacture a semi-finished tube (final product tube) with a small outer diameter and having recesses or protrusions on its surface by gripping the dummy second layer.

[0016] [9] The present invention relates to a method for manufacturing a semi-finished tube (second semi-finished tube), which is a method for manufacturing a second semi-finished tube that is even closer to a final product tube than a semi-finished tube (first semi-finished tube) using a lathe, and is characterized by comprising the steps of: preparing the above-mentioned semi-finished tube (first semi-finished tube); gripping the semi-finished tube (first semi-finished tube) from the outside of the second layer; cutting to form a recess or protrusion in the first layer by cutting from the outside of the second layer; and forming the second semi-finished tube in a state in which the gripped portion and the portion where the recess or protrusion is formed are connected. According to this method for manufacturing semi-finished tubes (second semi-finished tubes), the first semi-finished tube can be gripped from the outside of the second layer to form a recess or protrusion in the first layer. Since the gripped portion and the portion where the recess or protrusion is formed are connected, the semi-finished tube (second semi-finished tube) can be cut to produce a final product tube. Thus, this manufacturing method provides a method for manufacturing semi-finished tubes (second semi-finished tubes) that can be produced using a lathe, even if the lathe is difficult to use for cutting due to the difficulty of gripping with a chucking jig when the outer diameter is small, and the lathe is otherwise difficult to use.

[0017]

[10] The semi-finished tube (second semi-finished tube) of the present invention is a semi-finished tube (second semi-finished tube) used to make a final product tube by cutting at a predetermined location, and is characterized by comprising a dummy layer lamination area in which a first layer for constructing a final product tube and a dummy second layer formed on the outside of the first layer are laminated, and a first layer unevenness forming area in which a recess or protrusion is formed. With this configuration, the dummy layer stacking area can be grasped and the first layer unevenness formation area can be separated to form the final product tube. This makes it possible to provide a semi-finished tube (second semi-finished tube) that can be used to manufacture a small outer diameter tube (final product tube) having recesses or protrusions on its surface.

[0018]

[11] The manufacturing method of the tube (final product tube) of the present invention includes a step of preparing the above-mentioned semi-finished product tube (second semi-finished product tube), a gripping step of gripping the semi-finished product tube (second semi-finished product tube) at the dummy layer lamination portion, and a cutting step of separating the first layer unevenness formation portion from the dummy layer lamination portion side. According to such a manufacturing method of the tube (final product tube), by gripping the dummy layer lamination portion and separating the first layer unevenness formation portion, a final product tube can be obtained. Therefore, it is possible to provide a manufacturing method of a semi-finished product tube (second semi-finished product tube) for manufacturing a tube (final product tube) having a small outer diameter and having concave or convex portions on the surface.

[0019]

[12] The manufacturing method of the tube (final product tube) of the present invention is a tube manufacturing method for manufacturing a final product tube from a semi-finished product tube (first semi-finished product tube) using a lathe, and includes a step of preparing the above-mentioned semi-finished product tube (first semi-finished product tube), a gripping step of gripping the semi-finished product tube (first semi-finished product tube) from the outside of the second layer, a cutting step of forming concave or convex portions in the first layer by cutting from the outside of the second layer, and a cutting step of cutting a predetermined portion of the semi-finished product tube (first semi-finished product tube). According to such a manufacturing method of the tube (final product tube), even for a lathe that is difficult to perform cutting due to difficulty in gripping with a chucking jig when the outer diameter is small, by gripping the dummy second layer, it is possible to provide a semi-finished product tube for manufacturing a tube (final product tube) having a small outer diameter and having concave or convex portions on the surface using the lathe.

[0020]

[13] In the manufacturing method of the tube (final product tube) of the present invention, when manufacturing a semi-finished product tube (first semi-finished product tube or second semi-finished product tube), it is preferable to cut the second layer so that a part of it remains. With such a manufacturing method of the tube (final product tube), by leaving a part of the second layer, it becomes possible to adjust the depth of the concave portion or the height of the convex portion, and to utilize it for electromagnetic shielding (reinforcement) and the like.

[0021]

[14] The tube (final product tube) of the present invention is made of metal and has an outer diameter of 0.05 mm or more and 0.60 mmIt is characterized by having a concave or convex portion on the outer periphery and cutting marks and being less than When such a tube (final product tube) is used, due to its small outer diameter, it becomes possible to manufacture small-diameter contact probes (used for semiconductor inspection, etc.) that were previously difficult to manufacture, enabling use in multiple applications. Also, for a tube with a small outer diameter, a certain strength is required. However, since it can be seen that the outer diameter has been reduced by cutting due to the cutting marks, it is possible to alleviate concerns regarding strength and other aspects. When an outer layer is formed by sputtering or plating, usually, the outer layer is thin and the outer layer strength is small of This is because in the case of those with cutting marks, the outer layer is thick and the outer layer strength is large.

[0022]

[15] In the semi-finished product tube (first semi-finished product tube) described above (for example, [1] to [5]), it is preferable that the first layer and the second layer are made of a metal that is alloyed when the semi-finished product tube is heated, namely, the first layer and the vicinity of the first layer of the second layer. Note that alloying means that the metal of the first layer and the metal of the second layer are mixed together (by thermal diffusion). Alloying means the alloying of the metal of the first layer and the metal of the second layer. The alloy is an alloy of the metal of the first layer and the metal of the second layer. The metals of the first layer and the second layer to be alloyed are not limited to pure metals. Metals containing impurities may also be used. By doing so, the first layer can be easily alloyed by heating hard becomes possible. Also, due to alloying, the vicinity of the first layer of the second layer can also hard be alloyed. On the other hand, the outside of the second layer is not alloyed or the degree of alloying (alloying rate) is low (small), so cutting is easy.

[0023]

[16] In the semi-finished product tube (first semi-finished product tube) described above (for example,

[15] ), it is preferable that the first layer is made of palladium or silver, and the 2 second layer is made of copper or iron. Note that "palladium", "silver", "copper", and "iron" mean the main components constituting the layer. In addition to metals composed of only a single element, metals containing impurities too 6] are included. This makes it easier to form an alloy.

[0024]

[17] In the semi-finished tube (first semi-finished tube) described above (for example,

[15] or

[16] ), it is preferable that the tube further comprises a third metal layer formed inside the first layer and an intermediate layer formed between the first layer and the third layer, wherein the intermediate layer prevents the metal of the third layer from being alloyed with the metals of the first and second layers by heating. This method prevents the third layer of metal from being alloyed along with the first and second layers of metal when they are alloyed. Furthermore, it is preferable that the third layer is made of a material such as a metal that has a lower thermal conductivity than the first layer (more preferably the first and third layers, and even more preferably the first, second, and third layers). Furthermore, the intermediate layer may be constructed using rare metals. Also, the third layer may be constructed using rare metals. The third layer may also be constructed using an alloy.

[0025]

[18] The above (for example, [ 17 In the semi-finished tube (first semi-finished tube) described in ]), the intermediate layer is preferably made of nickel. If the intermediate layer is made of nickel, since nickel has low thermal conductivity among metals, even if various metals with higher thermal conductivity than nickel are used as the third layer metal, heating prevents the third layer metal from alloying with the first layer (or the first and second layers) metals. Furthermore, nickel is readily available. Forming the intermediate layer is also easy using electrolytic plating, etc.

[0026]

[19] In the semi-finished tube (first semi-finished tube) described above (for example, any of [1] to [4]), it is preferable that the first layer is made of an alloy, and the second layer is configured such that the degree of alloying decreases (becomes smaller) as it moves outward. In this way, the first layer hardThis becomes possible. Also, the second layer is softer towards the outside (the direction that does not require precise cutting), making it easier to cut. On the other hand, the softer the second layer is in the opposite direction (the direction towards the first layer, the direction that requires precise cutting), hard Therefore, it becomes possible to suppress cutting errors.

[0027]

[20] In the method for manufacturing a semi-finished tube (first semi-finished tube) described above (for example, [8]), in the step of forming the first layer and the step of forming the second layer, it is preferable that the first layer and the second layer be formed of a metal in which the first layer and the vicinity of the first layer of the second layer are alloyed when the semi-finished tube is heated. In this way, it becomes possible to easily alloy the semi-finished pipe by heating it.

[0028]

[21] A method for manufacturing a final product tube from a semi-finished tube using the lathe of the present invention is characterized by comprising: a step of preparing a semi-finished tube (for example, as described in any of

[15] to

[18] ); a gripping step of gripping the semi-finished tube from the outside of the second layer; a cutting step of cutting the second layer from the outside of the second layer so that a part of it remains; and an alloying step of heating the semi-finished tube to alloy the first layer and the remaining second layer. In this way, the second layer is cut while it is still soft and before it is alloyed, making the cutting process easier. Furthermore, in the alloying process, it is easier to create a uniform alloy from the first layer and the remaining second layer. Generally speaking, alloys are more durable than the first and second layers of metal. hard Therefore, if the strength of the final product pipe is the same, alloying allows for a thinner layer thickness (pipe wall) compared to the case where the pipe is not alloyed. It also allows for a smaller outer diameter.

[0029]

[22] A pipe manufacturing method for manufacturing a final product pipe from a semi-finished pipe using the lathe of the present invention comprises the steps of preparing a semi-finished pipe (for example, as described in any of

[15] to

[18] ), and heating the semi-finished pipe to produce the first layer, and BeautyThe method is characterized by including an alloying step of alloying the vicinity of the first layer of the second layer; a gripping step of gripping the semi-finished pipe from the outside of the second layer; and a cutting step of cutting the second layer down to the vicinity of the first layer by cutting from the outside of the second layer. In this way, during the cutting process, the second layer of The material becomes softer as you move outwards (the direction that does not require precise cutting), making it easier to cut the outer layer of the second layer. On the other hand, the material becomes softer as you move in the opposite direction (towards the first layer, the direction that requires precise cutting), hard Therefore, final product management outside This makes it possible to suppress cutting errors around the circumference. Generally speaking, alloys are more durable than the first and second layers of metal. hard Therefore, if the strength of the final product pipe is the same, alloying allows for a thinner layer thickness (pipe wall) compared to the case where the pipe is not alloyed. It also allows for a smaller outer diameter. [Brief explanation of the drawing]

[0030] [Figure 1] A diagram illustrating the semi-finished tube 1 (first semi-finished tube) and the final product tube 2 according to Embodiment 1. [Figure 2] A diagram illustrating the manufacturing method of the semi-finished tube 1 according to Embodiment 1. [Figure 3] A diagram illustrating the manufacturing method of the final product tube 2 according to Embodiment 1. [Figure 4] A diagram (chart) illustrating the dimensions of the semi-finished pipe 1, the final product pipe 2, etc., according to Embodiment 1. [Figure 5] A diagram illustrating an example of the use of the final product tube 2 according to Embodiment 1. [Figure 6] A diagram (chart) illustrating the dimensions of the semi-finished pipe 1, the final product pipe 2, etc., related to embodiments 2 to 8. [Figure 7] A diagram illustrating embodiments 9 to 11. [Figure 8] Diagrams (charts) illustrating the dimensions of semi-finished pipes 1, final product pipes 2, etc., related to embodiments 9 to 11. [Figure 9]A diagram illustrating Embodiment 12 (method of cutting after alloying). [Figure 10] A diagram illustrating Embodiment 12 (method of cutting before alloying). [Figure 11] Diagrams (charts) illustrating the dimensions of semi-finished pipes 1, final product pipes 2, etc., related to embodiments 12 to 16. [Figure 12] A diagram illustrating a modified cutting pattern of the first layer 11. [Figure 13] A diagram illustrating variations of the first layer 11 and the second layer 12. [Figure 14] A diagram illustrating conventional technology. [Modes for carrying out the invention]

[0031] The semi-finished pipe, semi-finished pipe manufacturing method, pipe, and pipe manufacturing method of the present invention will be described below with reference to Figures 1 to 13. Note that the figures described below are schematic diagrams that simplify the actual shape, structure, method, etc.

[0032] [Embodiment 1] Using Figures 1 to 5, the semi-finished tube 1 (first semi-finished tube), the manufacturing method of the semi-finished tube 1, the tube (final product tube 2), and the tube manufacturing method according to Embodiment 1 will be explained. The semi-finished tube 9 (second semi-finished tube) and the manufacturing method of the semi-finished tube 9 will also be explained.

[0033] [Regarding semi-finished product tube 1 and final product tube 2] Figure 1 is a diagram illustrating the semi-finished pipe 1 (first semi-finished pipe) and the final product pipe 2 according to Embodiment 1. Figure 1(a) is a diagram illustrating the cross-sectional view of the semi-finished pipe 1 along its long axis, and Figure 1(b) is a diagram illustrating the cross-sectional view of the final product pipe 2 along its long axis. Both the semi-finished pipe 1 and the final product pipe 2 have an approximately circular shape on the outer side along their short axis. In this specification, the term "final product pipe" may sometimes be simply referred to as "pipe". As shown in Fig. 1, the semi-finished product 1 according to Embodiment 1 is a semi-finished product 1 before being made into a finished product by cutting on a lathe. The semi-finished product 1 includes a first layer 11 for the configuration of the finished product that remains after cutting on the lathe, and a second layer 12 for dummy formed outside the first layer 11 and to be cut by the lathe.

[0034] The outer diameter D1 of the first layer 11 of the semi-finished product 1 is an outer diameter near the outer diameter D5 (the outermost diameter) of the finished product 2. "Near" means "in the vicinity", "close to", etc., meaning that the outer diameter D1 is close to D5, including the case where D1 is the same as D5. In Embodiment 1, the outer diameter D1 of the first layer 11 is the same as the outer diameter D5 of the finished product 2. D19 is the inner diameter of the semi-finished product 1 or the finished product 2 and is the same as the outer diameter of the wire rod 3 described later.

[0035] In the above semi-finished product 1, the first layer 11 has a small outer diameter D1 that is difficult to be gripped by the chucking jig 51 of the lathe, and the second layer 12 has a large outer diameter D3 that can be gripped by the chucking jig 51 of the lathe. The outer diameter D2 in the figure is the minimum diameter that can be gripped by the chucking jig 51. The outer diameters D1, D2, and D3 have a relationship of D1 < D2 < D3. D5 is the outer diameter of the finished product 2. In Embodiment 1, the outer diameter D5 of the finished product 2 is the same as the outer diameter D1 of the first layer 11.

[0036] In the above semi-finished product 1, the outer diameter D1 of the first layer 11 is 0.05 mm or more and less than 0.60 mm, and the outer diameter D3 of the second layer 12 is 0.40 mm or more and 3.00 mm or less.

[0037] In the above semi-finished product 1, the second layer 12 has better machinability than at least the adjacent portion 11E of the second layer 12 of the first layer 11.

[0038] In the above semi-finished product 1, the first layer 11 has a first layer outer layer 11B that forms the adjacent portion 11E with the second layer 12, and a first layer inner layer 11A formed inside the first layer outer layer 11B. The Vickers hardness of the first layer outer layer 11B is within the range of 350 - 550 HV. In Embodiment 1, the inner layer 11A of the first layer is a gold-cobalt alloy, the outer layer 11B of the first layer is a nickel-cobalt alloy (Vickers hardness 400-550 HV), and the second layer 12 is copper (Vickers hardness 150-230 HV).

[0039] As shown in Figure 1, in the semi-finished pipe 1, the first layer 11 has a first inner layer 11A and a first outer layer 11B. The inside of the first inner layer 11A is a hollow portion 19. In Embodiment 1, the second layer 12 is cut away, and a part of the first outer layer 11B is cut away to form a convex portion 115 and a concave portion 116. Reference numeral 111 indicates the first layer surface before cutting, and 112 indicates the first layer surface after cutting. Cutting marks are visible on the first layer surface 112 after cutting.

[0040] [Manufacturing method for semi-finished tube 1] Figure 2 is a diagram illustrating the manufacturing method of a semi-finished tube 1 according to Embodiment 1. Figures 2(a) to (f) are diagrams illustrating the process. As shown in Figure 2, the manufacturing method of a semi-finished tube 1 according to Embodiment 1 is a manufacturing method of a semi-finished tube 1 before it is cut by a lathe to become a final product tube 2, and includes the steps of preparing a wire 3 (Figure 2(a)), forming a first layer 11 for the final product tube on the wire 3 (Figures 2(b), (c)), and forming a second layer 12 for a dummy to be cut by a lathe on the outside of the first layer 11 (Figure 2(d)).

[0041] To explain in more detail, first prepare a stainless steel wire (wire material) 3 with a diameter (outer diameter, D19) of 0.20 mm (Figure 2(a)). "Stainless steel wire" refers to stainless steel made into a wire. Stainless steel is an alloy steel mainly composed of iron (Fe) and contains 1.2% or less carbon (mass percentage concentration) and 10.5% or more chromium. Then, an inner first layer 11A of a gold-cobalt alloy (thickness 1 μm) is formed on the wire 3 (stainless steel wire) by electroplating (Figure 2(b)). On the outside of that, an outer first layer 11B of a nickel-cobalt alloy (thickness 24 μm) (outer diameter D1 of 0.25 mm) is formed by electroplating (Figure 2(c)). In this way, a first layer 11 for the final product pipe, having the inner first layer 11A and the outer first layer 11B, is formed on the wire 3. Then, a second layer 12 (outer diameter D3 of 1.25 mm) of copper (thickness 500 μm) is formed on the outside of the first layer 11 by electroplating (Figure 2(d)). The second layer 12 is a dummy layer that will be cut by the lathe. Then, pull out and remove wire 3 (Figure 2(e)). Figure 2(f) shows the semi-finished tube 1 (inner diameter D19, outer diameter D3) manufactured through the processes shown in Figures 2(a) to (e) above.

[0042] [Manufacturing method for the final product tube 2] Figure 3 is a diagram illustrating the manufacturing method of the final product tube 2 according to Embodiment 1. Figures 3(a) to (d) are diagrams illustrating the steps of the manufacturing method. As shown in Figure 3, the manufacturing method of the final product tube 2 according to Embodiment 1 is a tube manufacturing method that uses a lathe to manufacture the final product tube 2 from a semi-finished tube 1, and comprises the steps of preparing the semi-finished tube 1 as described above (Figure 3(a)), gripping the semi-finished tube 1 from the outside of the second layer 12 (Figure 3(a)), cutting the second layer 12 from the outside of the parts 1N other than the gripped part, and cutting a predetermined part of the first layer 11 to form a recess 116 or a protrusion 115 (Figure 3(b)), and the gripped part 1Y This includes a cutting step (Figure 3(c)) in which the (dummy layer stacking area) is cut (separated).

[0043] To explain in more detail, first, a semi-finished tube 1 is prepared for manufacturing the final product tube 2 (Figure 3(a)). The semi-finished tube 1 is the one explained in Figure 1, etc. Then, the semi-finished tube 1 is gripped from the outside of the second layer 12 using a chucking jig 51 such as a collet (Figure 3(a)). The outer diameter D3 of the second layer 12 is formed to a size that can be gripped by the chucking jig 51. Note that the process of preparing the semi-finished tube 1 and the gripping process of gripping the semi-finished tube 1 are shown together in the same Figure 3(a).

[0044] Then, avoiding the gripped area 1Y with the chucking jig 51, the second layer 12 at the other area 1N is cut from the outside with a cutting tool 52 to form a recess 116 or protrusion 115 at a predetermined location in the first layer 11 (Figure 3(b)). The cutting depth is 0.01 mm. The area where the first layer 11 is cut in the thickness direction (short axis direction) becomes a recess 116, and the area that is not cut becomes a protrusion 115. There are two methods for forming the recess 116 or protrusion 115: one is to move the cutting jig 52 relative to the semi-finished pipe 1 in the long axis direction of the semi-finished pipe 1, and sequentially cut the second layer 12 and the first layer 11 at a predetermined location to form the recess 116 or protrusion 115; the other is to cut the second layer 12 for a predetermined length in the long axis direction of the semi-finished pipe 1, and then form the recess 116 or protrusion 115 in the first layer 11 within that predetermined length.

[0045] Then, while holding the semi-finished pipe 1, the cut portion is cut off with a cutting jig 53 such as a cutting tool (Figure 3(c)). Note that if the length of the final product pipe 2 is short, such as 1 to 5 mm, while the length of the semi-finished pipe 1 is long, such as 1 to 1.5 m, the pipe is cut in sections equal to the length of the final product pipe 2, starting from the opposite end of the gripped portion 1Y. Figure 3(d) shows the final product tube 2 manufactured through the processes shown in Figures 3(a) to (c).

[0046] Figure 4 is a diagram (chart) illustrating the dimensions of the semi-finished pipe 1, the final product pipe 2, etc., according to Embodiment 1. Figure 4 shows the materials, thickness, outer diameter D, etc., of the wire 3 (core wire), first layer 11, second layer 12, and final product pipe 2 used in Embodiment 1. In Figure 4, "Machinability" indicates the degree of machinability for pure nickel, which is not easily machinable. ○ indicates good machinability, and ◎ indicates very good machinability. The outer diameter D5 of the final product tube 2 is the outermost diameter including any protrusions, if any exist. Regarding descriptions of content, for example, "AuCo alloy (Co0.1~1.0%)" means a gold-cobalt alloy with a cobalt content (weight ratio) of 0.1~1.0% and the remainder being gold. However, it may also contain trace amounts of additives. The descriptions for other alloys are similar. (The above explanation also applies to Figures 6 and 8.)

[0047] [Second semi-finished product tube 9] The semi-finished tube 1 (first semi-finished tube) described so far was in the state before the second layer 12 was cut, but the semi-finished tube 9 (second semi-finished tube) may be the state after the second layer 12 has been cut but before it is cut at a predetermined location (see Figure 3(c)). [Second semi-finished product tube 9] This semi-finished tube 9 (second semi-finished tube) manufacturing method is a semi-finished tube manufacturing method that uses a lathe to manufacture a second semi-finished tube that is even closer to a final product tube 2 from a semi-finished tube (first semi-finished tube), and includes the steps of: preparing the above-mentioned semi-finished tube (first semi-finished tube 1); gripping the semi-finished tube (first semi-finished tube) from the outside of the second layer 12; cutting to form a recess 116 or a protrusion 115 in the first layer 11 by cutting from the outside of the second layer 12; and forming the second semi-finished tube 9 in a state where the gripped portion 1Y and the portion where the recess 116 or protrusion 115 is formed are connected.

[0048] The manufactured semi-finished tube (second semi-finished tube 9) is a semi-finished tube (second semi-finished tube 9) used to make a final product tube 2 by cutting it at a predetermined location, and comprises a dummy layer lamination area in which a first layer 11 for constructing the final product tube and a dummy second layer 12 formed on the outside of the first layer 11 are laminated, and a first layer unevenness forming area in which a recess 116 or a protrusion 115 is formed. In other words, a recess 116 or a protrusion 115 is formed on the outside, and it can be made into a final product tube 2 by cutting (separating) it at a predetermined location.

[0049] The method for manufacturing a pipe (final product pipe 2) using this second semi-finished pipe 9 includes the steps of preparing the above-mentioned semi-finished pipe (second semi-finished pipe 9), gripping the semi-finished pipe (second semi-finished pipe 9) at the dummy layer lamination location 1Y, and cutting the first layer unevenness formation location away from the dummy layer lamination location.

[0050] [Final product pipe 2] The final product tube 2 according to Embodiment 1 shown in Figure 3(d), etc., has a metal outer diameter D5 of 0.05 mm or more and less than 0.60 mm, and has a recess 116 or a protrusion 115 on its outer circumference, as well as cutting marks on the cut portion.

[0051] [Example of using final product tube 2] Figure 5 is a diagram illustrating an example of use of the final product tube 2 according to Embodiment 1. It shows an example of use in a semiconductor inspection apparatus 7. In this example, the final product tube 2 is used as the barrel 61 (tube) of the contact probe 6, which contains a plunger 62 and a spring 63. A spring mounting bracket 64 is installed on the top of the barrel 61, and the spring 63 is attached to the spring mounting bracket 64. The contact probe 6 is housed in the contact probe mounting bracket 71 of the semiconductor inspection device 7, with the protrusion 115 of the final product tube 2 (barrel 61) fitted into the fitting part 72 of the semiconductor inspection device 7. As the contact probe 6 moves up and down as shown by the arrows in the figure, the plunger 62 makes contact with or does not make contact with the electrode 81 of the semiconductor element 8. When the plunger 62 makes contact with the electrode, the plunger 62 makes contact with appropriate pressure due to the elastic force of the spring 63. Then, a signal to or from the electrode 81 is transmitted or received via the wiring conductor 73. ru This allows for the inspection of semiconductors.

[0052] [Effects of Embodiment 1] According to the semi-finished tube 1 of Embodiment 1, a dummy second layer 12 for being cut by a lathe is formed on the outside of the first layer 11 for the final product tube. Therefore, even with a lathe where cutting is difficult because gripping with a chucking jig is difficult when the outer diameter is small, it is possible to provide a semi-finished tube 1 that can be used to manufacture a tube with a small outer diameter (final product tube 2) having recesses or protrusions on its surface by gripping the dummy second layer 12.

[0053] Furthermore, since the outer diameter D1 of the first layer 11 is formed to be close to the outer diameter D5 of the final product tube 2, it is possible to provide a semi-finished tube 1 that facilitates the cutting of the dummy second layer 12 and the formation of recesses 116 or protrusions 115 on the surface of the first layer 11.

[0054] Furthermore, even if the outer diameter D1 of the first layer 11 is small and difficult to grip with the lathe's chucking jig 51, the second layer 12 on its outer side is configured to have a large outer diameter D2 that can be gripped with the lathe's chucking jig. Therefore, by gripping the second layer 12 with the chucking jig, it becomes possible to provide a semi-finished tube 1 that can be easily machined on a lathe.

[0055] In the semi-finished pipe 1 according to Embodiment 1, the first layer 11 has an outer diameter D1 of 0.05 mm or more and less than 0.60 mm. Although the small outer diameter D1 makes it difficult to grip and difficult to form irregularities by turning, a second layer 12 with an outer diameter D3 of 0.40 mm or more and 3.00 mm or less is formed on the outside of it, making it possible to machine it.

[0056] Furthermore, since the second layer 12 has better machinability than at least the adjacent portion 11E of the first layer 11 to the second layer 12, it becomes possible to easily cut the dummy second layer 12.

[0057] Furthermore, the first layer 11 has an outer layer 11B that forms an adjacent portion 11E with the second layer 12, and an inner layer 11A formed inside the outer layer 11B. The outer layer 11B is formed with a Vickers hardness in the range of 350 to 550 HV, so it cannot be easily cut by a lathe, but it can be cut by a lathe. For example, a functional layer (a layer that imparts good conductivity, etc.) for the final product tube 2 is formed in the inner layer 11A. death Furthermore, it becomes possible to protect it with a hard first outer layer 11B formed on the outside.

[0058] According to the manufacturing method for a semi-finished tube 1 (a semi-finished tube 1 used to be made into a final product tube 2 by machining on a lathe) according to Embodiment 1, the method includes the steps of preparing a wire 3, forming a first layer 11 on the outer circumference of the wire 3 for forming the final product tube 2 which remains even after machining on a lathe, and forming a second layer 12 on the outer circumference of the first layer 11 for a dummy to be machined on a lathe. Therefore, even with a lathe that has a small outer diameter and is difficult to grip with a chucking jig, making machining difficult, it is possible to manufacture a semi-finished tube 1 for manufacturing a small outer diameter tube (final product tube 2) having a recess 116 or a protrusion 115 on its surface using the lathe.

[0059] According to the pipe manufacturing method of Embodiment 1 (a pipe manufacturing method for manufacturing a final product pipe 2 from a semi-finished pipe 1 using a lathe), the method includes a step of preparing a semi-finished pipe 1, a gripping step of gripping the semi-finished pipe 1 from the outside of the second layer 12, a cutting step of forming a recess or protrusion in the first layer 11 by cutting from the outside of the second layer 12, and a cutting step of cutting a predetermined part of the semi-finished pipe 1. Therefore, even with a lathe that has a small outer diameter and is difficult to grip with a chucking jig, making cutting difficult, it is possible to manufacture a small outer diameter pipe (final product pipe 2) having a recess 116 or protrusion 115 on its surface using the lathe.

[0060] According to Embodiment 1, a semi-finished tube 9 (a tube manufacturing method for manufacturing a second semi-finished tube 9 that is even closer to the final product tube 2 than the semi-finished tube 1), the steps are: preparing the semi-finished tube 1; gripping the semi-finished tube 1 from the outside of the second layer 12; cutting to form a recess 116 or a protrusion 115 in the first layer 11 by cutting from the outside of the second layer 12; and the gripped portion 1Y The process includes a step of forming a second semi-finished pipe 9 in a state where the recessed portion 116 or the convex portion 115 is connected, making it possible to manufacture a second semi-finished pipe 9 that is close to the final product pipe 2.

[0061] According to the semi-finished tube 9 of Embodiment 1 (a semi-finished tube 9 used to make a final product tube 2 by cutting at a predetermined location), it comprises a dummy layer stacking area in which a first layer 11 for the final product tube structure and a dummy second layer 12 formed on the outside of the first layer 11 are stacked, and a first layer unevenness forming area in which a recess 116 or a protrusion 115 is formed. Therefore, it is possible to make a final product tube 2 by gripping the dummy layer stacking area and cutting at a predetermined location of the first layer unevenness forming area.

[0062] According to the pipe manufacturing method of Embodiment 1 (a pipe manufacturing method for manufacturing a final product pipe 2 from a second semi-finished pipe 9), the method includes a step of preparing a semi-finished pipe 9 (second semi-finished pipe), a gripping step of gripping the semi-finished pipe 9 at the dummy layer lamination location, and a cutting step of separating the first layer unevenness formation location from the dummy layer lamination location side. Therefore, it is possible to easily manufacture a final product pipe 2 from the second semi-finished pipe 9.

[0063] According to the tube of Embodiment 1 (final product tube 2), the small outer diameter makes it possible to manufacture contact probes 6 (see Figure 5) with small diameters, which were previously difficult to manufacture. Furthermore, the presence of cutting marks indicates that the tube was manufactured by cutting rather than sputtering or plating, allowing for use without concerns regarding strength and other aspects.

[0064] [Implementation Examples 2-8] Figure 6 is a diagram (chart) illustrating the dimensions of the semi-finished pipe 1, the final product pipe 2, etc., according to Embodiments 2 to 8. Figure 6 shows the materials, thickness, outer diameter D, etc., of the wire 3, first layer 11, second layer 12, and final product pipe 2 of Embodiments 2 to 8. The tubes of Embodiments 2 to 8 (semi-finished tubes 1 and 9, and final product tube 2) and their manufacturing methods are basically the same as those of Embodiment 1, but as shown in Figure 6, the materials and other components that make them up differ from those of Embodiment 1. In other words, in embodiments 2 to 8, the first inner layer 11A is made of gold, gold-cobalt alloy, palladium, palladium alloy, or a co-deposit of polytetrafluoroethylene and nickel; the first outer layer 11B is made of nickel-cobalt alloy, nickel-manganese alloy, or pure nickel; and the second layer 12 is made of copper, pure nickel, or nickel-manganese alloy. Furthermore, regarding the materials, dimensions, etc., of the first and second layers, etc., in Embodiments 2 to 8, the contents of Figure 6 are assumed to be described in the specification, and the contents of Figure 6 are omitted from the written description (the same applies to Figure 4 above and Figure 8 below).

[0065] [Effects of Embodiments 2-8] By using materials of appropriate materials for the first layer inner layer 11A, the first layer outer layer 11B, and the second layer 12, it becomes even easier to manufacture a small-diameter pipe having recesses or protrusions on its surface using a lathe, even if the lathe is difficult to use for machining because gripping with a chucking jig is difficult when the outer diameter is small.

[0066] Furthermore, the functionality of the pipe is determined by the first layer inner layer 11A, the first layer outer layer 11B that protects it, and the outer layer 11B that allows for machining by a lathe, and it becomes possible to appropriately select materials that suit these components.

[0067] For example, if the inner layer 11A of the first layer is formed of gold (pure gold), it is possible to exhibit functions such as good conductivity, good corrosion resistance, and softness. When formed from a gold-cobalt alloy, it can be made harder than pure gold and exhibit functions such as good conductivity and good corrosion resistance.

[0068] When formed from palladium, it can exhibit properties such as hydrogen storage (absorbing hydrogen) and catalytic function (removing harmful substances from automobile exhaust gases). Palladium alloys offer various properties, including hydrogen storage, catalytic activity, biocompatibility, and corrosion resistance. Examples of palladium alloys include alloys with silver as the main component and palladium added to prevent silver sulfidation, alloys with gold added for further corrosion resistance, and 12% gold-silver-palladium alloys. A 12% gold-silver-palladium alloy consists of 12% gold, 20% palladium, and the remainder being approximately 50% silver, 20% copper, and indium, among others.

[0069] Co-deposits of polytetrafluoroethylene (PTFE) and nickel can exhibit sliding or lubricating properties. This is because when the surface wears down, new PTFE particles are revealed, maintaining a low coefficient of friction. PTFE is a polymer of tetrafluoroethylene and is a fluoropolymer (fluorocarbon resin) composed only of fluorine and carbon atoms.

[0070] Furthermore, the first outer layer 11B is made of nickel-cobalt alloy and Ni If it is made of any of the kelmanganese alloys, its hardness allows it to protect the inner layer 11A of the first layer. However, it can also be machined on a lathe, and uneven surfaces can be formed.

[0071] Furthermore, if the second layer 12 is made of either copper or pure nickel, it is grippable and has good machinability.

[0072] Furthermore, if the first layer inner layer 11A, the first layer outer layer 11B, and the second layer 12 are made of the above-mentioned material combination, lamination can be easily performed.

[0073] Furthermore, regarding aspects other than those described in Embodiments 2 to 6, the configurations, methods, effects, and other aspects described in Embodiment 1 can be applied directly to Embodiments 2 to 6.

[0074] [Embodiments 9-11] Figure 7 is a diagram (cross-sectional view) illustrating embodiments 9 to 11. Figure 8 is a diagram (chart) illustrating the dimensions of the semi-finished pipe 1, the final product pipe 2, etc., related to embodiments 9 to 11. The configuration of semi-finished tubes 1, 9, and final product tube 2 in Embodiments 9 to 11, as well as their manufacturing methods, are basically the same as in Embodiment 1. However, as shown in Figure 7 (or Figure 8), a difference is that a portion of the second layer 12 remains on the semi-finished tube 9 or final product tube 2 even after the second layer 12 has been cut. Reference numeral 121 denotes the portion of the second layer that remains after cutting (see Figures 7 and 8). If its surface has been cut, there will be cutting marks at the cut location. The manufacturing methods for the pipes (final product pipe 2) of Embodiments 9 to 11 will be described below. These manufacturing methods are basically the same as those described in Embodiment 1, but when manufacturing the final product pipe 2 (or second semi-finished pipe 9) from the semi-finished pipe (first semi-finished pipe 1), the difference is that in the cutting process for cutting the second layer 12, the second layer 12 is cut so that a portion of it 121 remains.

[0075] In Embodiment 9, the material, thickness, outer diameter, etc., of the first layer 11 and the second layer 12, as well as their manufacturing methods, are basically the same as in Embodiment 1. However, when converting the first semi-finished tube 1 to the final product tube 2 (or second semi-finished tube 9), the second layer 12 is cut so that a portion 121 remains (see Figures 7 and 8). In the final product tube 2 (or second semi-finished tube 9), in Embodiment 1, the second layer 12 is completely cut, and the first layer 11 is cut so that a convex portion 115 or concave portion 116 is formed and the (outer) diameter becomes 0.25 mm. In contrast, in Embodiment 9, the second layer 12 is cut so that a portion 121 remains (so that a thickness of 50 μm remains above the convex portion 115). In this way, the (outer) diameter of the final product tube 2 (or second semi-finished tube 9) is 0.27 mm, which is larger than the outer diameter of the first layer 11, which is 0.25 mm. Furthermore, a protrusion 115 or a recess 116 is formed in the first layer 11.

[0076] Furthermore, Embodiment 10 is a slightly modified version of Embodiment 9. In Embodiment 10, the materials of the first layer 11 and the second layer 12, and the thickness of the inner layer of the first layer are the same as in Embodiment 9, but the thickness of the second layer 12 before cutting, and the thickness of the remaining portion 121 of the second layer after cutting are different. The outer diameter of the final product pipe 2 (or the second semi-finished product pipe 9) is also different from that of Embodiment 9. However, it is similar to Embodiment 9 in that there is a remaining portion 121 of the second layer after cutting.

[0077] Embodiment 11 is an embodiment in which the material, thickness, and outer diameter of the first layer 11 and the second layer 12, as well as the thickness of a portion 121 of the second layer that remains after cutting and a portion of the outer diameter of the final product pipe 2 (or second semi-finished pipe 9), differ from Embodiment 9 (see Figure 8). However, it is the same as Embodiment 9 in that a portion 121 of the second layer remains after cutting.

[0078] [Effects of Embodiments 9-11] Thus, when manufacturing a final product tube 2 (or a second semi-finished product tube 9) from a semi-finished product tube (first semi-finished product tube 1), if the second layer 12 is cut in a cutting process that leaves a portion of it intact, it has the effect of making it easier to adjust the height of the protrusions 115, making it possible to form the surface of the protrusions 115 to be soft or hard, or making it possible to further improve the shielding properties.

[0079] Furthermore, regarding aspects other than those described in Embodiments 9 to 11, the configurations, methods, effects, and other aspects described in Embodiment 1 can be applied directly to Embodiments 9 to 11.

[0080] [Embodiments 12-16] Embodiments 12 to 16 are basically the same as Embodiment 1, but differ in that the first layer 11 and a portion of the second layer 12 are used as components of the final product pipe 2 in an alloyed state.

[0081] [Embodiment 12] This will be explained using Embodiment 12. Figures 9 and 10 are both diagrams illustrating Embodiment 12. Figure 9 illustrates a method of cutting after alloying, and Figure 10 illustrates a method of cutting before alloying. Figure 11 is a diagram (table) illustrating the dimensions of semi-finished pipes 1, final product pipes 2, etc., according to Embodiments 12 to 16. In Figure 11, the metals "Pg," "Ag," and "Ni" listed as constituent materials refer to metals whose main component is these elements. They are not limited to pure metals. They may contain impurities.

[0082] [Method of machining after alloying (see Figure 9)] In the method of machining after alloying, first, a semi-finished tube 1 (first semi-finished tube) is prepared (see Figure 9(a)). The wire 3 (not shown) used to create the hollow section 19 (inner diameter D19, 0.200 mm; see Figure 11 for dimensions) is made of stainless steel. The first layer 11 (layer thickness 2 μm) is made of palladium and is formed by electroplating (outer diameter D1, 0.204 mm). The second layer 12 (layer thickness 523 μm) is made of copper and is formed by electroplating (outer diameter D3, 1.250 mm). Reference numeral 12E indicates the vicinity of the first layer in the second layer 12. Then, the wire 3 (not shown) is pulled out and removed, resulting in the semi-finished pipe 1.

[0083] Next, the semi-finished tube 1 is placed in a heating furnace and heated (see Figure 9(b)). For example, it is heated to 400-500°C. Then, the first layer 11 (palladium) and the copper near the first layer 12E (copper) of the second layer 12 undergo thermal diffusion and alloying (copper-palladium alloy). The degree of alloying in the second layer 12 increases as it approaches the first layer 11, and decreases as it moves further away. The degree of alloying can be changed by adjusting the heating time and temperature.

[0084] Next, the semi-finished pipe 1 is cut (see Figure 9(c)). For example, the end of the semi-finished pipe 1 in the longitudinal direction (one end or both ends) is gripped with the chucking jig 51, and the second layer 12 (copper) is cut with the cutting jig 52 so that it has a predetermined outer diameter D6 (0.220 mm). At this time, a convex portion (see Figure 9(d)) or a concave portion (not shown) may be formed. However, even if a convex portion or concave portion is formed, it is only in a part of the pipe, and the pipe is cut overall to have a predetermined outer diameter D6 (0.220 mm). After that, the portion gripped by the chucking jig 51 is cut off with a cutting jig (not shown) for a cutting tool. If the length of the final product pipe 2 is short, such as 1 to 5 mm, while the length of the semi-finished pipe 1 is long, such as 1 to 1.5 m, the semi-finished pipe is cut off in sections equal to the length of the final product pipe 2.

[0085] In this way, the final product tube 2 is manufactured (see Figure 9(d)). Reference numeral 111 indicates an alloy layer (copper-palladium alloy layer) in which the first layer (palladium) and the vicinity 12E of the second layer 12 (copper) are alloyed. Furthermore, when the second layer 12 (copper) is machined while leaving a layer thickness of 8 μm with a high degree of alloying... 、 The alloy layer 200 (copper-palladium alloy) is an alloy layer in which copper (8 μm) and palladium (2 μm) are alloyed in a ratio of approximately 8:2 (see the diagram in Figure 11 for the layer thickness of the final product tube 2, outer diameter D6, etc.).

[0086] [Method for alloying after cutting (see Figure 10)] First, prepare a semi-finished tube 1 (the first semi-finished tube) in the same manner as the method of cutting after alloying (see Figure 9(a)) (see Figure 10(a)). (The wire 3 (not shown) is pulled out and removed to create a semi-finished tube 1.)

[0087] Next, the semi-finished pipe 1 is cut (see Figure 10(b)). For example, the end of the semi-finished pipe 1 in the longitudinal direction (one end or both ends) is gripped with a chucking jig 51, and the second layer 12 (copper) is cut with a cutting jig 52 so that it has a predetermined outer diameter D6 (0.220 mm). At this time, protrusions (see drawing) or recesses (not shown) may be formed. However, even if protrusions or recesses are formed, they are only in certain areas, and the pipe as a whole is cut to have a predetermined outer diameter D6 (0.220 mm).

[0088] Then, using a cutting tool jig (not shown), the portion held by the chucking jig 51 is cut off. If the length of the final product tube 2 is short, such as 1 to 5 mm, while the length of the semi-finished product tube 1 is long, such as 1 to 1.5 m, it is cut into sections equal to the length of the final product tube 2. This creates the shape of the final product tube 2. Alternatively, the portion gripped by the chucking jig 51 is left intact without being cut off (the portion other than the portion gripped by the chucking jig 51 is given the outer shape of the final product tube 2).

[0089] Next, the semi-finished tube 1 after cutting the second layer 12 is placed in a heating furnace and heated (see Figure 10(c)). As a result, the first layer 11 (palladium) and the vicinity 12E of the second layer 12 (copper) undergo thermal diffusion and alloying, forming an alloy layer 200 (copper-palladium alloy layer). When the second layer 12 (copper) is machined leaving a thickness of 8 μm, the alloy layer 200 (copper-palladium alloy layer, 10 μm) becomes an alloy layer in which copper (8 μm) and palladium (2 μm) are alloyed almost uniformly in a ratio of approximately 8:2. Even if there are some convex or concave parts, the entire alloy layer, including these areas, is alloyed almost uniformly.

[0090] Furthermore, if the semi-finished tube 1 has been cut off at the portion gripped by the chucking jig 51 and machined into the shape of the final product tube 2, it will remain as the final product tube 2 having the alloy layer 200 (see Figure 10(d)). On the other hand, if the portion of the semi-finished tube 1 gripped by the chucking jig 51 remains without being cut off, cutting off that portion results in a final product tube 2 having an alloy layer 200 (see the diagram in Figure 11 for the layer thickness, outer diameter D6, etc. of the final product tube 2). Reference numeral 215 indicates the convex portion when it is formed.

[0091] Furthermore, the pipe between the pipe shown in Figure 9(a) and the pipe shown in Figure 9(d) (for example, the pipe shown in Figure 9(b) or Figure 9(c)) may be designated as the semi-finished pipe 1 subject to trade. Also, the pipe between the pipe shown in Figure 10(a) and the pipe shown in Figure 10(d) (for example, Figure 10 (b) or figure 10 The pipe shown in (c) may be designated as the semi-finished pipe 1 subject to trade.

[0092] [Embodiment 13] Embodiment 13 is basically the same as Embodiment 12, but differs in that the first layer 11 of the semi-finished tube 1 is made of the first inner layer 11A (silver) and the first outer layer 11B (palladium), the second layer 12 is made of copper, and the alloy layer of the final product tube 2 is made of a copper-silver-palladium alloy layer (see Figure 11).

[0093] In other words, on the outside of the wire 3, the first inner layer 11A (silver, 1 μm), the first outer layer 11B (palladium, 1 μm), and the second layer 12 (copper, 523 μm) are laminated and formed by electroplating. Then, the wire 3 (not shown) is pulled out and removed, resulting in the semi-finished pipe 1. By heating the semi-finished tube 1, the first inner layer 11A (silver) and the first outer layer 11B (palladium) are alloyed with the second layer 12 (copper), and a final product tube 2 having an alloy layer (10 μm thick, copper-silver-palladium alloy, with a copper:silver:palladium ratio of approximately 8:1:1) is produced (see the diagram in Figure 11 for the layer thickness, outer diameter D6, etc. of the final product tube 2).

[0094] [Embodiment 14] Embodiment 14 is basically the same as Embodiment 12, but the semi-finished tube 1 has a laminated structure from the inside out, consisting of a third layer (gold-cobalt alloy layer, not shown), an intermediate layer (nickel layer, not shown), a first layer 11 (palladium layer), and a second layer 12 (copper layer), and the final product tube 2 has a third layer (gold-cobalt alloy layer), an intermediate layer (nickel layer), an alloy layer ( copper The difference lies in the layered structure of the palladium alloy layer (see Figure 11). Note that the third layer and the intermediate layer are layers formed inside the first layer 11, and are not part of the first layer 11, but for convenience, they are listed in the column for the first layer 11 in Figure 11.

[0095] In other words, on the outside of the wire 3, a third layer (gold-cobalt alloy layer, 1 μm), an intermediate layer (nickel layer, 1 μm), a first layer 11 (palladium layer, 2 μm), and a second layer 12 (copper layer, 188.5 μm) are laminated and formed by electroplating. Then, the wire 3 (not shown) is pulled out and removed, resulting in the semi-finished pipe 1. By heating the semi-finished tube 1, the first layer 11 (palladium layer) is alloyed with the second layer 12 (copper layer), and the final product tube 2 is manufactured having a laminated structure consisting of a third layer (gold-cobalt alloy layer, 1 μm), an intermediate layer (nickel layer, 1 μm), and an alloy layer (copper-palladium alloy layer, 10.5 μm, with a copper:palladium ratio of approximately 8.5:2) (see the diagram in Figure 11 for the layer thickness, outer diameter D6, etc. of the final product tube 2). Furthermore, as mentioned above, since nickel has a lower thermal conductivity than palladium, when alloying the first layer of metal with the second layer of metal, it is possible to prevent the third layer of metal from being alloyed together with it.

[0096] [Embodiment 15] Embodiment 15 is basically the same as Embodiment 12, but differs in that the semi-finished tube 1 has a laminated structure from the inside out, consisting of a third layer (gold-cobalt alloy layer, not shown), an intermediate layer (nickel layer, not shown), the first inner layer 11A (silver layer), the first outer layer 11B (palladium layer), and the second layer 12 (copper layer), while the final product tube 2 has a laminated structure consisting of a third layer (gold-cobalt alloy layer), an intermediate layer (nickel layer), and an alloy layer (copper-silver-palladium alloy layer) (see Figure 11).

[0097] In other words, on the outside of the wire 3, a third layer (gold-cobalt alloy layer, 1 μm), an intermediate layer (nickel layer, 1 μm), an inner layer 11A of the first layer (silver layer, 3 μm), an outer layer 11B of the first layer (palladium layer, 3 μm), and a second layer 12 (copper layer, 202 μm) are laminated and formed by electroplating. Then, the wire 3 (not shown) is pulled out and removed, resulting in the semi-finished pipe 1. By heating the semi-finished tube 1, the first inner layer 11A (silver layer) and the first outer layer 11B (palladium layer) are alloyed with the second layer 12 (copper layer), and the final product tube 2 having a laminated structure consisting of a third layer (gold-cobalt alloy layer, 1 μm), an intermediate layer (nickel layer, 1 μm), and an alloy layer (copper-silver-palladium alloy layer, 18 μm, with a copper:silver:palladium ratio of approximately 12:3:3) is manufactured (see the diagram in Figure 11 for the layer thickness, outer diameter D6, etc. of the final product tube 2). Furthermore, as mentioned above, since nickel has a lower thermal conductivity than silver (or silver and palladium), when alloying the first layer of metal with the second layer of metal, it is possible to prevent the third layer of metal from being alloyed together.

[0098] [Embodiment 16] Embodiment 16 is basically the same as Embodiment 12, but differs in that the semi-finished tube 1 has a laminated structure from the inside out, consisting of a third layer (gold-nickel alloy layer, not shown), an intermediate layer (nickel layer, not shown), a first layer 11 (palladium layer), and a second layer 12 (copper layer), while the final product tube 2 has a laminated structure consisting of a third layer (gold-nickel alloy layer), an intermediate layer (nickel layer), and an alloy layer (copper-palladium alloy layer) (see Figure 11).

[0099] In other words, on the outside of the wire 3, a third layer (gold-nickel alloy layer, 2 μm), an intermediate layer (nickel layer, 1 μm), a first layer 11 (palladium layer, 3 μm), and a second layer 12 (copper layer, 254 μm) are laminated and formed by electroplating. Then, the wire 3 (not shown) is pulled out and removed, resulting in the semi-finished pipe 1. By heating the semi-finished tube 1, the first layer 11 (palladium layer) is alloyed with the second layer 12 (copper layer), and the final product tube 2 is manufactured having a laminated structure consisting of a third layer (gold-nickel alloy layer, 2 μm), an intermediate layer (nickel layer, 1 μm), and an alloy layer (copper-palladium alloy layer, 7 μm, with a copper:palladium ratio of approximately 4:3) (see the diagram in Figure 11 for the layer thickness, outer diameter D6, etc. of the final product tube 2). Furthermore, as mentioned above, since nickel has a lower thermal conductivity than palladium, when alloying the first layer of metal with the second layer of metal, it is possible to prevent the third layer of metal from being alloyed together with it.

[0100] In embodiments 12 to 16 described above, copper (Cu) was used for the second layer 12, but copper may be replaced with iron (Fe). If copper is replaced with iron, then in Embodiment 12 of Figure 11, the component material of the second layer 12 becomes iron, and the alloy of the component material of the final product pipe 2 becomes an iron-palladium alloy. In Embodiment 13, the component material of the second layer 12 becomes iron, and the alloy of the component material of the final product pipe 2 becomes an iron-silver-palladium alloy. In Embodiment 14, the component material of the second layer 12 becomes iron, and the alloy (outer layer) of the final product pipe 2 becomes an iron-palladium alloy. In Embodiment 15, the component material of the second layer 12 becomes iron, and the alloy (outer layer) of the final product pipe 2 becomes an iron-silver-palladium alloy. In Embodiment 16, the component material of the second layer 12 becomes iron, and the alloy (outer layer) of the final product pipe 2 becomes an iron-palladium alloy. Other aspects shown in Figure 11 (components, dimensions, etc.) remain unchanged.

[0101] [Summary of Embodiments 12-16 (Configuration, Method)] The configurations and methods of the embodiments 12 to 16 described above can be summarized as follows: In the semi-finished tube 1 (first semi-finished tube), the first layer 11 and the second layer 12 (part of the second layer, near the first layer 12E) can be configured such that when the semi-finished tube 1 is heated, the first layer 11 and the second layer 12 (near the first layer 12E of the second layer 12) are alloyed with a metal (see Figures 9 to 11).

[0102] The semi-finished tube 1 (first semi-finished tube) preferably has a first layer 11 made of palladium or silver and a second layer 12 made of copper or iron (see Figure 11). Examples of combinations (components) for the first layer 11 / second layer 12 include palladium / copper, palladium / iron, silver / copper, silver / iron, silver-palladium / copper, and silver-palladium / iron. Note that "palladium," "silver," "copper," or "iron" refer to metals whose main component is one of these elements. They are not limited to pure metals; they may contain impurities.

[0103] Such a semi-finished tube 1 may further include a third metal layer formed inside the first layer 11 and an intermediate layer formed between the first layer 11 and the third layer, wherein the intermediate layer may be configured to prevent the metal of the third layer from alloying with the metals of the first layer 11 and the second layer 12 when heated. Furthermore, the third layer is preferably a layer with lower thermal conductivity than the first layer 11 (more preferably the first layer 11 and the third layer, and even more preferably the first layer 11, the second layer 12 and the third layer). The intermediate layer may also be made of a rare metal. The third layer may also be made of a rare metal. The third layer may also be made of an alloy.

[0104] Such an intermediate layer can be made of nickel. The thermal conductivity [W / m K] of the metal at 1 atm and 20°C is 59 for nickel (99.2%), which is lower than that of silver (418) and palladium (70).

[0105] In such a semi-finished tube 1, for example, as shown in Figure 9(b), the first layer 11 may be made of an alloy, and the second layer 12 may be configured such that the degree of alloying decreases as it moves outward.

[0106] In the above-described method for manufacturing a semi-finished tube (for example, [8]), in the steps of forming the first layer 11 and the second layer 12, the first layer 11 and the second layer 12 may be formed of a metal such that when the semi-finished tube 1 is heated, the vicinity of the first layer (12E) of the first layer 11 and the second layer 12 are alloyed (see Figures 9, 10, etc.).

[0107] As a method for manufacturing a final product tube from a semi-finished tube using a lathe, as explained with reference to Figure 10, the method may include the steps of: preparing a semi-finished tube 1 as described above (for example, any of

[15] to

[18] ); a gripping step of gripping the semi-finished tube 1 from the outside of the second layer 12; a cutting step of cutting the second layer 12 from the outside so that a part of it remains; and an alloying step of heating the semi-finished tube 1 to alloy the first layer 11 and the remaining second layer 12 (121).

[0108] Furthermore, as a method for manufacturing a final product tube from a semi-finished tube using a lathe, as explained with reference to Figure 9, the method may include the following steps: preparing a semi-finished tube 1 as described above (for example, any of

[15] to

[18] ); an alloying step of heating the semi-finished tube 1 to alloy the first layer 11 and the vicinity 12E of the first layer of the second layer 12; a gripping step of gripping the semi-finished tube 1 from the outside of the second layer 12; and a cutting step of cutting the second layer 12 down to the vicinity 12E of the first layer by cutting from the outside of the second layer 12.

[0109] [Effects of Embodiments 12-16] As described in Embodiments 12 to 16, in the semi-finished tube 1 (first semi-finished tube), the first layer 11 and the second layer 12 (a part of the second layer, near the first layer 11 12E) are made of a metal that alloys the first layer 11 and the vicinity 12E of the second layer 12 when the semi-finished tube 1 is heated. Therefore, the first layer 11 is easily alloyed by heating. hard This becomes possible. In addition, the vicinity of the first layer of the second layer 12 is also alloyed. hard This is possible. On the other hand, the outer surface of the second layer 12 is not alloyed, or has a low degree of alloying, making it easy to cut.

[0110] If the semi-finished tube 1 (first semi-finished tube) is constructed such that the first layer 11 is made of palladium or silver and the second layer 12 is made of copper or iron, it is prone to alloying.

[0111] Such a semi-finished pipe 1 further comprises a third metal layer formed inside the first layer 11 and an intermediate layer formed between the first layer 11 and the third layer, and the intermediate layer teeth, The third layer of metal By heating If the third layer is configured to prevent alloying with the metals of the first layer 11 and the second layer 12, it becomes possible to prevent the metal of the third layer from being alloyed along with the metals of the first layer 11 and the second layer 12 when they are alloyed.

[0112] Furthermore, if the intermediate layer is made of nickel, since nickel has low thermal conductivity among metals, even if various metals with higher thermal conductivity than nickel are used as the third layer metal, heating prevents the third layer metal from alloying with the first layer 11 (or the first layer 11 and the second layer 12). In addition, nickel is readily available. Furthermore, it is easy to form the layer by electroplating, etc.

[0113] In the semi-finished tube 1, the first layer 11 is made of an alloy, and the second layer 12 is configured such that the degree of alloying decreases as it moves outwards (see Figure 9(b)). hard This becomes possible. Also, the second layer 12 is softer towards the outside (the direction that does not require precise cutting), making it easier to cut. On the other hand, the softer it becomes towards the opposite direction (the direction towards the first layer 11, the direction that requires precise cutting), hard Therefore, it becomes possible to suppress cutting errors.

[0114] In the above-mentioned method for manufacturing a semi-finished tube (for example, [8]), in the steps of forming the first layer 11 and the second layer 12, if the first layer 11 and the second layer 12 are formed of a metal in which the vicinity of the first layer (12E) of the first layer 11 and the second layer 12 are alloyed when the semi-finished tube 1 is heated, then it becomes possible to easily alloy the semi-finished tube 1 by heating it.

[0115] A pipe manufacturing method for producing a final product pipe from a semi-finished pipe using a lathe includes the steps of: preparing a semi-finished pipe 1 as described above (for example, any of

[15] to

[18] ); gripping the semi-finished pipe 1 from the outside of the second layer 12; cutting the second layer 12 from the outside so that a portion of it remains; and alloying the semi-finished pipe 1 by heating it to alloy the first layer 11 and the remaining second layer 12 (121) (see Figure 10). In this method, the cutting process is easy because the second layer 12 is cut while it is still soft before alloying. In addition, in the alloying process, it is easy to create a uniform alloy of the first layer 11 and the remaining second layer 12 (121). Furthermore, by alloying, the metals of the first layer 11 and the second layer 12 are hard This makes it possible to reduce the layer thickness (wall thickness) of the final product pipe 2. Furthermore, it becomes possible to reduce the outer diameter D6 of the pipe.

[0116] Furthermore, if a pipe manufacturing method for producing a final product pipe from a semi-finished pipe using a lathe includes the steps of preparing a semi-finished pipe 1 as described above (for example, any of

[15] to

[18] ), an alloying step of heating the semi-finished pipe 1 to alloy the first layer 11 and the vicinity 12E of the first layer of the second layer 12, a gripping step of gripping the semi-finished pipe 1 from the outside of the second layer 12, and a cutting step of cutting the second layer 12 down to the vicinity 12E of the first layer by cutting from the outside of the second layer 12 (see Figure 9), then in the cutting step, the further out you go towards the second layer 12 (the direction that does not require precise cutting), the softer it becomes, making it easier to cut the outside of the second layer 12. On the other hand, the further you go towards the opposite direction (the direction towards the first layer 11, the direction that requires precise cutting), hard Therefore, it becomes possible to suppress cutting errors on the outer circumference of the final product tube 2. Furthermore, by alloying, the metals of the first layer 11 and the second layer 12 are hard This makes it possible to reduce the layer thickness (wall thickness) of the final product pipe 2. Furthermore, it becomes possible to reduce the outer diameter D6 of the pipe.

[0117] Furthermore, regarding points other than those described in Embodiments 12 to 16, the corresponding embodiments of the configurations, methods, effects, etc., described in Embodiment 1 or Embodiments 2 to 11 can be applied as is to Embodiment 1 or Embodiments 12 to 16.

[0118] [Differentiation] Although the present invention has been described above based on the above embodiments, the present invention is not limited to the above embodiments. It can be modified without departing from the spirit of the invention, and for example, the following modifications are also possible.

[0119] (1) In the above embodiment 1, a large area of ​​the exposed surface 113 of the first layer 11 was cut to form a recess 116, and a convex portion 115 was formed in the remaining narrow area. However, the proportion, shape, and method of forming the recess 116 or convex portion 115 are not limited to this. Figure 12 is a diagram illustrating a modified cutting of the first layer 11. As shown in Figure 12, a narrow area of ​​a portion of the exposed surface 113 of the first layer 11 may be cut to form a recess 116, so that the proportion of the area occupied by the convex portion 115 is greater than the proportion occupied by the recess 116. (In Figure 12, the surface of the first layer before cutting is shown by the dotted line labeled 111, and the surface after cutting is shown by the solid line labeled 112.) Alternatively, the proportion of the areas occupied by the convex portion 115 and the recess 116 may be equal. Thus, the proportion of the areas occupied by the convex portion 115 and the recess 116 can be arbitrary. In this way, for example, the outer layer 11B of the first layer is shoulder When cutting performance is poor or not always good, it becomes possible to reduce the amount or area of ​​cutting of the outer layer 11B of the first layer, improve cutting efficiency, etc. The number and shape of the recesses 116 and protrusions 115 may be arbitrary. Furthermore, the step between the protrusions 115 and the recesses 116 may be inclined instead of being vertical.

[0120] (2) In the above embodiment 1, the first layer 11 is composed of two layers, the inner layer 11A and the outer layer 11B of the first layer, and the second layer 12 is composed of a single layer. However, the configuration of the first layer 11 and the second layer 12 is not limited to this configuration. For example, the first layer 11 and the second layer may be made into single layers, the first layer 11 may be made into a single layer and the second layer may be made into a multi-layered layer (any number of layers), the first layer 11 may be made into a multi-layered layer (any number of layers) and the second layer may be made into a single layer, or both the first layer 11 and the second layer may be made into multi-layered layers (any number of layers for each).

[0121] Figure 13 illustrates a modified example of the configuration of the first layer 11 or the second layer 12 of the semi-finished pipe 1. For example, as shown in Figure 13(a), the first layer 11 may be made as a single layer. This simplifies the configuration of the first layer 11. 。 This facilitates the formation of the first layer 11 and the manufacture of the semi-finished tube 1. Furthermore, as shown in Figure 13(b), the first layer 11 may be composed of three or more layers, such as a first layer inner layer 11A, a first layer outer layer 11B, and a first layer intermediate layer 11C between the first layer inner layer 11A and the first layer outer layer 11B. In this case, for example, if the adhesion between the first layer inner layer 11A and the first layer outer layer 11B is poor, the adhesion can be improved by the first layer intermediate layer 11C. Furthermore, as shown in Figure 13(c), the second layer 12 may be composed of two or more layers, such as an inner layer 12A and an outer layer 12B. In this case, for example, a single layer of the second layer 12 can be used to grip hard This makes it easier to harden the outer layer 12B of the second layer if desired, or to soften the inner layer 12A of the second layer if it is needed for machining, etc.

[0122] (3) In embodiments 1 to 16 described above, stainless steel wire was used as the wire material 3 (core wire material), but the wire material 3 is not limited to stainless steel wire. For example, nichrome wire or iron-chromium wire may be used instead of stainless steel wire as the wire material 3. Nichrome wire is made from an alloy (nichrome) primarily composed of nickel and chromium, formed into a wire. It may contain small amounts of manganese, iron, carbon, silicon, etc. Iron-chromium wire is made by forming iron-chromium, which is an alloy of iron, chromium, and aluminum, into a wire. One example of iron-chromium is the Kanthal® brand, which is sold under that name.

[0123] (4) Although this overlaps somewhat with the above explanation, in embodiments 1 to 16, the semi-finished pipe 1 (first semi-finished pipe 1, second semi-finished pipe 9) or the final product pipe 2 does not have to have convex portions (115, 215) or concave portions (116). In other words, it may have only convex portions, only concave portions, both concave and convex portions, or neither concave nor convex portions (see Figures 4, 6, 8, 11, etc.). [Explanation of Symbols]

[0124] 1...Semi-finished tube (first semi-finished tube), 11...First layer, 11A...Inner layer of the first layer, 11B...Outer layer of the first layer, 11C...Middle layer of the first layer, 11E...Adjacent part of the first layer to the second layer, 111...Surface of the first layer before cutting, 112...Surface of the first layer after cutting (with cutting marks), 115...Convex part, 116...Concave part, 1Y...Part gripped by the chucking jig, 1N...Part not gripped by the chucking jig, 12...Second layer, 12A...Inner layer of the second layer, 12B...Outer layer of the second layer, 12E...Near the first layer, 121...Part of the second layer remaining after cutting, 19...Hollow part, 2...Final product tube, 200...Alloy layer, 215...Convex part, 3...Wire (core wire) Material), 51...Chucking jig, 52...Cutting jig, 53...Cutting jig, 6...Contact probe, 61...Barrel, 62...Plunger, 63...Spring, 64...Spring mount, 7...Semiconductor inspection device, 71...Contact probe mount, 72...Matching part, 73...Wiring conductor, 8...Semiconductor element, 81...Electrode, 9...Semi-finished tube (second semi-finished tube), D1...First layer outer diameter, D2...Minimum diameter for chucking, D3...Second layer outer diameter, D19...Wire outer diameter (inner diameter of semi-finished tube or final product tube), 9112, 9114...Pressing member, 9118...Filling member, 9120...Workpiece, 9122, 9124...Recess

Claims

1. A method for manufacturing semi-finished pipes used to produce final product pipes by cutting a workpiece with a predetermined lathe, The process of preparing the wire material, A first layer formation step is performed on the outer circumference of the wire material by electroplating, forming a first layer which will remain even after cutting by the lathe and will be used to construct the final product tube, having an outer diameter that is small and difficult to grip with the lathe's chucking jig. A second layer formation step is performed on the outer circumference of the first layer, in which a second layer is formed by electroplating, the second layer having a large outer diameter that can be gripped by the chucking jig of the lathe, for use as a dummy to be cut by the lathe. The process of removing the aforementioned wire, A method for manufacturing semi-finished pipes, characterized by including the following:

2. In the method for manufacturing semi-finished pipes according to claim 1, In the first layer formation step, the first layer is formed such that its outer diameter is the maximum outer diameter of the final product tube. A method for manufacturing semi-finished pipes characterized by the following features.

3. In the method for manufacturing semi-finished pipes according to Claim 1, In the first layer formation step, the first layer is formed such that the outer diameter obtained by adding the thickness of the second layer, which remains after cutting by the lathe, to the outer diameter of the first layer becomes the maximum outer diameter of the final product pipe. A method for manufacturing semi-finished pipes characterized by the following features.

4. In the method for manufacturing semi-finished pipes according to claim 1, In the first layer formation step, an inner layer of the first layer is formed on the outer circumference of the wire by electroplating, consisting of gold, gold-cobalt alloy, palladium, palladium alloy, or a co-deposit of polytetrafluoroethylene and nickel; and an outer layer of the first layer is formed on the outer circumference of the inner layer of the first layer by electroplating, consisting of nickel-cobalt alloy, nickel-manganese alloy, or pure nickel. In the second layer formation step, the second layer is formed on the outer periphery of the first layer by electroplating, consisting of copper, pure nickel, or a nickel-manganese alloy (however, the material used to form the second layer is different from the material used to form the outer layer of the first layer). A method for manufacturing semi-finished pipes characterized by the following features.

5. In the method for manufacturing semi-finished pipes according to claim 1, In the first layer formation step and the second layer formation step, the first layer and the second layer are formed of metal of a predetermined thickness by electroplating. The metal of the first layer and the metal of the second layer are made of metals that, when the semi-finished pipe is heated, are alloyed in the vicinity of the first layer of the first layer and the second layer, so that the alloyed portion of the first layer and the vicinity of the first layer of the second layer become hard due to the heating, while the outer portion of the second layer that is not alloyed remains soft, making it easier to cut by the lathe. A method for manufacturing semi-finished pipes characterized by the following features.

6. A semi-finished tube used to produce a final product tube by machining it on a specified lathe, A first layer for the final product pipe structure that remains even after being cut by the aforementioned lathe, A second layer is formed on the outside of the first layer and is a dummy to be cut by the lathe, Equipped with, The outer diameters of the first and second layers remain unchanged in the longitudinal direction of the semi-finished pipe. The outer diameter of the first layer is small, making it difficult to grip with the chucking jig of the lathe, The outer diameter of the second layer is large enough to be gripped by the chucking jig of the lathe. It is structured in such a way. A semi-finished pipe characterized by the following features.

7. In the semi-finished pipe according to claim 6, The outer diameter of the first layer is configured to be the maximum outer diameter of the final product tube. A semi-finished pipe characterized by the following features.

8. In the semi-finished pipe according to claim 6, The outer diameter of the final product tube is configured such that the sum of the outer diameter of the first layer and the thickness of the second layer, which remains after being machined by the lathe, becomes the maximum outer diameter of the final product tube. A semi-finished pipe characterized by the following features.

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