Semiconductor equipment

Abstract

To provide a semiconductor device capable of suppressing a leak current in a case where a battery is reversely connected, in a configuration where a main element and a sense element are integrated into the same semiconductor chip.SOLUTION: A main element 201 and a sense element 202 comprise: a drift region 1 of a first conductivity type; respective well regions 2a and 2b of a second conductivity type provided in an upper part of the drift region 1; respective first main electrode regions 4a-4d of the first conductivity type provided in upper parts of the well regions 2a and 2b; respective gate electrodes 8a and 8b embedded in respective trenches 6a and 6b via a gate insulation film 7; and respective main electrodes 22 and 23 connected to the respective first main electrode regions 4a-4d. A separation region 203 includes: an element separation insulation film 31 provided on a top face of a semiconductor substrate (1, 11) held between the well regions 2a and 2b; and a first wire 9b provided on a top face of the element separation insulation film 31 and electrically connected to the main electrode 22 of the main element 201.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] This invention relates to a semiconductor device. [Background technology]

[0002] Conventionally, semiconductor devices are known in which a semiconductor element that conducts a main current (hereinafter referred to as the "main element") and a semiconductor element for detecting the main current of the main element (hereinafter referred to as the "sense element") are connected in parallel and monolithically integrated (mixed) on the same semiconductor chip (see Patent Document 1).

[0003] The sense element is several hundredths to tens of thousands of times smaller (active area) than the main element, and a current corresponding to this size ratio is supplied to the sense element. The ratio of the current supplied to the sense element to the main current supplied to the main element is called the sense ratio, and a current that is twice the sense ratio of the main current supplied to the main element is supplied to the sense element. By monitoring the current supplied to the sense element, the main current supplied to the main element can be indirectly monitored, and damage to the main element and load due to overcurrent can be prevented. [Prior art documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2018-133433 [Overview of the project] [Problems that the invention aims to solve]

[0005] In the above-mentioned semiconductor device, it is difficult to properly suppress the leakage current that occurs when the power supply (battery) is incorrectly connected in the wrong direction.

[0006] In view of the above issues, the present invention aims to provide a semiconductor device that can suppress leakage current when a battery is connected in reverse, in a configuration in which a main element and a sense element are integrated on the same semiconductor chip. [Means for solving the problem]

[0007] One aspect of the present invention is a semiconductor device having a main element, a sense element for detecting the current of the main element, and an isolation region for separating the main element and the sense element, wherein each of the main element and the sense element comprises a drift region of a first conductivity type provided on a semiconductor substrate, a well region of a second conductivity type provided above the drift region, a first main electrode region of the first conductivity type provided above the well region, a gate electrode embedded in a trench in contact with the first main electrode region, the well region, and the drift region via a gate insulating film, and a main electrode electrically connected to the first main electrode region, and the isolation region comprises an element isolation insulating film provided on the upper surface of a semiconductor substrate sandwiched between the well region of the main element and the well region of the sense element, and a first wiring provided on the upper surface of the element isolation insulating film and electrically connected to the main electrode of the main element.

[0008] Another aspect of the present invention relates to a semiconductor device comprising a main element, a sense element for detecting the current of the main element, and a separation region for separating the main element and the sense element, wherein each of the main element and the sense element comprises a drift region of a first conductivity type provided on a semiconductor substrate, a well region of a second conductivity type provided above the drift region, a first main electrode region of the first conductivity type provided above the well region, a gate electrode embedded via a gate insulating film in a trench in contact with the first main electrode region, the well region, and the drift region, and a main electrode electrically connected to the first main electrode region, and the separation region comprises a first electrode embedded via a gate insulating film in an element separation trench provided on a semiconductor substrate sandwiched between the well region of the main element and the well region of the sense element, and electrically connected to the main electrode of the main element. [Effects of the Invention]

[0009] According to the present invention, in a configuration in which a main element and a sense element are integrated on the same semiconductor chip, a semiconductor device capable of suppressing a leakage current when a battery is reversely connected can be provided.

Brief Description of the Drawings

[0010] [Figure 1] It is an equivalent circuit diagram when a battery is normally connected to the semiconductor device according to the first embodiment. [Figure 2] It is an equivalent circuit diagram when a battery is reversely connected to the semiconductor device according to the first embodiment. [Figure 3] It is a plan view of a main part of the semiconductor device according to the first embodiment. [Figure 4] It is a cross-sectional view taken along the line A-A' of FIG. 3. [Figure 5] It is a cross-sectional view taken along the line B-B' of FIG. 3. [Figure 6] It is a plan view showing a semiconductor device according to a comparative example. [Figure 7] It is a cross-sectional view taken along the line A-A' of FIG. 6. [Figure 8] It is a cross-sectional view taken along the line B-B' of FIG. 6. [Figure 9] It is a graph showing the relationship between the voltage between the sources of the main element and the sense element and the leakage current. [Figure 10] It is a plan view of a main part of the semiconductor device according to the second embodiment. [Figure 11] It is a cross-sectional view seen from the A-A direction of FIG. 10. [Figure 12] It is a cross-sectional view seen from the B-B direction of FIG. 10. [Figure 13] It is a cross-sectional view seen from the C-C direction of FIG. 10.

Modes for Carrying Out the Invention

[0011] Hereinafter, the first and second embodiments of the present invention will be described with reference to the drawings. In the description of the drawings referred to in the following explanation, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the relationship between the thickness and the planar dimensions, the ratio of the thicknesses of the respective layers, etc. are different from the actual ones. Therefore, specific thicknesses and dimensions should be determined in consideration of the following explanation. Also, it is a matter of course that there are portions where the dimensional relationships and ratios are different between the drawings.

[0012] [[ID=​​​​Furthermore, the definitions of directions such as "top surface," "bottom surface," etc., in the following explanation are merely for the convenience of explanation and do not limit the technical concept of the present invention. For example, it is obvious that if an object is rotated 90° and observed, top and bottom will be converted to left and right and read accordingly, and if it is rotated 180° and observed, top and bottom will be inverted and read accordingly.

[0014] Furthermore, the following explanation uses the case where the first conductivity type is n-type and the second conductivity type is p-type as an example. However, it is also acceptable to choose the conductivity types in the reverse relationship, with the first conductivity type being p-type and the second conductivity type being n-type. Also, the "+" or "-" attached to "n" or "p" indicates that the semiconductor region has a relatively higher or lower impurity concentration (in other words, a lower or higher resistivity) compared to the semiconductor region without the "+" or "-" mark. However, in the representation of the diagram, even if two semiconductor regions are marked with the same "n" or "n", it does not mean that the impurity concentration (resistivity) of each semiconductor region is exactly the same.

[0015] (First Embodiment) As an example of a semiconductor device according to the first embodiment, a configuration applicable to an automotive power IC called an intelligent power switch (IPS) is provided. As shown in Figure 1, the semiconductor device 100 according to the first embodiment includes an input terminal 111, a first power terminal 112, a second power terminal 113, an output terminal 114, and a ground terminal 115. The input terminal 111 is connected to an external microcontroller or the like. The first power terminal 112 and the second power terminal 113 are connected to the positive terminal side of the battery 102, which is the power source for the semiconductor device 100 according to the first embodiment. Note that Figure 1 shows the battery 102 connected in the correct orientation. The output terminal 114 is connected to one end of the load 103, which is the target of the semiconductor device 100 according to the first embodiment. The ground terminal 115 is grounded together with the negative terminal side of the battery 102 and the other end of the load 103.

[0016] The semiconductor device 100 according to the first embodiment includes a main element T1, a sense element T2, an auxiliary element T3, and a control unit 101. The main element T1, sense element T2, auxiliary element T3, and control unit 101 are monolithically integrated on the same semiconductor chip. However, the semiconductor device 100 according to the first embodiment does not necessarily have to include the auxiliary element T3 and the control unit 101 as part of its configuration. Furthermore, the auxiliary element T3 and the control unit 101 may be provided on a semiconductor chip different from the semiconductor chip on which the main element T1 and sense element T2 are integrated. In this case, the auxiliary element T3 and the control unit 101 may be provided on separate semiconductor chips. Also, the control unit 101 may be provided on a semiconductor chip different from the semiconductor chip on which the main element T1, sense element T2, and auxiliary element T3 are integrated, and may be electrically connected to the main element T1, sense element T2, and auxiliary element T3.

[0017] Figure 1 illustrates a case where the main element T1, sense element T2, and auxiliary element T3 are MOSFETs, but other power semiconductor elements such as IGBTs may also be used. Also, Figure 1 illustrates a case where one main element T1, one sense element T2, and one auxiliary element T3 are provided, but multiple main elements T1, T2, and T3 may be connected in parallel.

[0018] Diode D1, a freewheeling diode, is connected in antiparallel to the main element T1. Diode D2, a freewheeling diode, is connected in antiparallel to the sense element T2. Diode D3, a freewheeling diode, is connected in antiparallel to the auxiliary element T3. Diodes D1 to D3 may consist of the body diodes of the MOSFETs that are the main element T1, the sense element T2, and the auxiliary element T3.

[0019] The source of the main element T1 is connected to one end of the load 103 via the output terminal 114. The source of the main element T1 is also connected to the control unit 101 and the source of the sense element T2 via two-stage diodes D4 and D5. Diodes D4 and D5 have the function of blocking leakage current when the battery 102 is reverse-connected. Figure 1 shows two-stage diodes D4 and D5 as an example, but the number of stages of diodes D4 and D5 is not particularly limited and may be one stage or three or more stages. The drain of the main element T1 is connected to the drain of the sense element T2 and the drain of the auxiliary element T3. The gate of the main element T1 is connected to the control unit 101 in common with the gate of the sense element T2. The main element T1 drives the load 103 by performing on / off operations in response to the control signal applied to the gate from the control unit 101.

[0020] The source of sense element T2 is connected to the control unit 101. The source of sense element T2 is connected to the source of main element T1 via diodes D4 and D5. The drain of sense element T2 is connected to the drain of main element T1 and the drain of auxiliary element T3. The gate of sense element T2 is connected to the control unit 101 in common with the gate of main element T1. Sense element T2 is a current sensing element that detects the current flowing through main element T1. Sense element T2 performs on / off operations at the same timing as main element T1 in response to a control signal applied to its gate from the control unit 101.

[0021] The drain of auxiliary element T3 is connected to the drain of main element T1 and the drain of sense element T2. The gate of main element T1 is connected to the control unit 101. The source of auxiliary element T3 is connected to the positive terminal of battery 102 via the second power supply terminal 113. Auxiliary element T3 has a structure in which its drains are butted together with those of main element T1, and diode D3 connected in antiparallel to auxiliary element T3 has the function of blocking leakage current when battery 102 is reversed. Auxiliary element T3 performs on / off operations at the same timing as main element T1 and sense element T2 in response to a control signal applied to its gate from the control unit 101.

[0022] Alternatively, instead of the auxiliary element T3 and diode D3, only diode D3, such as a Schottky diode, may be connected. The anode side of diode D3 is connected to the second power supply terminal 113, and the cathode side is connected to the drain of the main element T1. By connecting at least diode D3, leakage current can be blocked when the battery 102 is reverse-connected.

[0023] The control unit 101 is composed of integrated semiconductor elements, such as a lateral MOSFET. The control unit 101 controls the on / off operation of the main element T1, sense element T2, and auxiliary element T3 by applying control signals to the gates of the main element T1, sense element T2, and auxiliary element T3 in response to input signals input via the input terminal 111 from an external microcontroller or the like. The control unit 101 indirectly detects the main current flowing through the main element T1 by detecting the current flowing through the sense element T2. When the control unit 101 detects that an overcurrent has flowed through the sense element T2, it prevents the overcurrent flowing to the load 103 by turning off the main element T1.

[0024] Figure 2 shows a state in which the battery 102 is connected in reverse to the semiconductor device 100 according to the first embodiment. When the battery 102 is connected in reverse, the control unit 101 detects the reverse connection state of the battery 102 and outputs control signals to turn off the main element T1, the sense element T2, and the auxiliary element T3. The main element T1, the sense element T2, and the auxiliary element T3 each turn off in accordance with the control signals applied to their gates from the control unit 101.

[0025] As schematically shown by the dashed arrows in Figure 2, when the battery 102 is reverse-connected, the leakage current I1 flowing in from the output terminal 114 attempts to flow through the diode D1 connected in antiparallel to the main element T1, but the leakage current I1 can be blocked by the diode D3 connected in antiparallel to the auxiliary element T3. Also, the leakage current I2 flowing in from the output terminal 114 attempts to flow to the control unit 101, but the leakage current I2 can be blocked by the diodes D4 and D5 connected between the output terminal 114 and the source of the sense element T2.

[0026] Figure 3 shows a plan view of the main parts of the semiconductor device 100 according to the first embodiment shown in Figure 1. As shown by the dashed lines in Figure 3, the semiconductor device according to the first embodiment comprises a main element (main element region) 201 and a sense element (sense element region) 202 monolithically integrated on the same semiconductor chip. The main element 201 includes a region corresponding to the main element T1 shown in Figure 1, and the sense element 202 includes a region corresponding to the sense element T2 shown in Figure 1. The active area of ​​the sense element 202 is set to a predetermined ratio with respect to the active area of ​​the main element 201.

[0027] Although not shown in Figure 3, the semiconductor device according to the first embodiment further comprises an auxiliary element region corresponding to the auxiliary element T3 shown in Figure 1, a diode region corresponding to the diodes D4 and D5 shown in Figure 1, and a control circuit region corresponding to the control unit 101 shown in Figure 1.

[0028] Figure 4 shows a cross-sectional view taken at the position of line AA', which spans the main element 201 and sense element 202 in Figure 3. As shown in Figure 4, the semiconductor device according to the first embodiment comprises a semiconductor substrate (1,11) that constitutes a semiconductor chip. The semiconductor substrate (1,11) is a first conductivity type (n + A low resistivity layer 11 made of a semiconductor substrate of type (type), and an n-ion layer with a lower impurity concentration than the low resistivity layer 11, epitaxially grown on the low resistivity layer 11. -It comprises a high resistivity layer 1 of type n. The semiconductor substrate (1,11) is described exemplified by using silicon (Si) as the base material, but the base material is not limited to Si. - On the underside of the semiconductor substrate, ion implantation and thermal diffusion are performed. + A semiconductor substrate (1,11) may be constructed by forming a low-resistivity layer 11 of the type.

[0029] The main element 201 on the right side of Figure 4 has a portion of the high resistivity layer 1 as a drift region. The main element 201 has n arranged on the lower surface of the drift region. + A portion of the low resistivity layer 11 of the type is provided as a second main electrode region (drain region).

[0030] A well region 2a of the second conductivity type (p-type) is selectively provided above the high resistivity layer 1. Above the well region 2a, n + A first main electrode region (source region) 4a, 4b of the type is provided. A main electrode (source electrode) 22 is provided on the upper surface side of the source regions 4a, 4b so as to be in contact with the source regions 4a, 4b. As the material of the source electrode 22, metals such as aluminum (Al), Al alloys, and copper (Cu) can be used. Examples of Al alloys include Al-silicon (Si), Al-copper (Cu)-Si, and Al-Cu.

[0031] A trench 6a is provided so as to reach the high resistivity layer 1 from the upper surface of the well region 2a. The trench 6a is in contact with the source regions 4a, 4b, the well region 2a, and the high resistivity layer 1. A gate insulating film 7 is provided on the inner surface of the trench 6a. As the gate insulating film 7, for example, a silicon oxide film (SiO2 film) can be used, but in addition to SiO2 film, silicon oxynitride (SiON) film, strontium oxide (SrO) film, silicon nitride (Si3N4) film, and aluminum oxide (Al2O3) film can also be used. Alternatively, a magnesium oxide (MgO) film, yttrium oxide (Y2O3) film, hafnium oxide (HfO2) film, zirconium oxide (ZrO2) film, tantalum oxide (Ta2O5) film, or bismuth oxide (Bi2O3) film may also be used. Furthermore, composite films made by selecting several of these single-layer films and stacking multiple films can also be used.

[0032] Inside the trench 6a, a gate electrode 8a is embedded via a gate insulating film 7. The upper surface of the gate electrode 8a is covered with an interlayer insulating film 32 and insulated from the source electrode 22. As the material for the gate electrode 8a, for example, polysilicon with a high concentration of n-type or p-type impurities (doped polysilicon) can be used, but in addition to doped polysilicon (DOPOS), high-melting-point metals such as tungsten (W), molybdenum (Mo), and titanium (Ti), or silicides of high-melting-point metals and polysilicon can also be used. The material for the gate electrode 8a may also be polyside, which is a composite film of polysilicon and a high-melting-point metal silicide. The gate insulating film 7 and the gate electrode 8a constitute a trench gate structure (7,8a).

[0033] A gate wiring 9a is provided on the upper surface of the portion of the well region 2a spaced apart from the trench 6a, via a gate insulating film 7. The gate wiring 9a is covered by an interlayer insulating film 32. Although not visible in the cross-section of Figure 4, the gate wiring 9a is connected to the gate electrode 8a of the main element 201 in the direction towards the viewer in Figure 4. The gate wiring 9a is made of the same material as the gate electrode 8a, such as doped polysilicon.

[0034] The sense element 202 on the left side of Figure 4 has a portion of the high resistivity layer 1 as a drift region. The sense element 202 has n arranged on the lower surface of the drift region. + A portion of the low resistivity layer 11 of the type is provided as the second main electrode region (drain region). A p-type well region 2b is selectively provided above the high resistivity layer 1, spaced apart from the well region 2a. Above the well region 2b, n + The first main electrode regions (source regions) 4c and 4d of the type are provided.

[0035] A main electrode (source electrode) 23 is provided on the upper surface of the source regions 4c and 4d so as to be in contact with the source regions 4c and 4d. The source electrode 23 is provided spaced apart from the source electrode 22 of the main element 201. The source electrode 23 is made of the same material as the source electrode 22.

[0036] A trench 6b is provided so as to reach the high resistivity layer 1 from the upper surface of the well region 2b. The trench 6b is in contact with the source regions 4c, 4d, the well region 2b, and the high resistivity layer 1. A gate insulating film 7 is provided on the inner surface of the trench 6b. A gate electrode 8b is embedded inside the trench 6b via the gate insulating film 7. The gate electrode 8b is covered with an interlayer insulating film 32 and insulated from the source electrode 23.

[0037] A gate wiring 9c is provided on the upper surface of the portion of the well region 2b spaced apart from the trench 6b, via a gate insulating film 7. The gate wiring 9c is covered by an interlayer insulating film 32. Above the gate wiring 9c, the source electrode 22 of the main element 201 and the source electrode 23 of the sense element 202 are spaced apart from each other. Although not shown in the cross-section of Figure 4, the gate wiring 9c is connected to the gate electrode 8b of the sense element 202 in the direction towards the viewer in Figure 4. The gate wiring 9c is made of the same material as the gate electrode 8b, such as doped polysilicon.

[0038] In the central part of Figure 4 in the left-right direction, an isolation region 203 is provided to separate the main element 201 and the sense element 202. In the isolation region 203, an element isolation insulating film 31, such as a local insulating film (LOCOS film), is selectively provided on the upper surface of the high resistivity layer 1 sandwiched between the well region 2a on the main element 201 side and the well region 2b on the sense element 202 side. A first wiring 9b is provided on the upper surface of the element isolation insulating film 31. The first wiring 9b is separated from the gate wiring 9a of the main element 201 and the gate wiring 9c of the sense element 202.

[0039] The source electrode 22 of the main element 201 extends from the upper side of the first wiring 9b via the interlayer insulating film 32. The first wiring 9b is connected to the source electrode 22 of the main element 201 via a contact 22a provided in an opening in the interlayer insulating film 32.

[0040] As shown by the dashed line in Figure 4, in the isolation region 203, a parasitic MOS structure 51 is formed by the high resistivity layer 1 sandwiched between the well region 2a on the main element 201 side and the well region 2b on the sense element 202 side, the element isolation insulating film 31, and the first wiring 9b. Furthermore, as schematically shown by the circuit symbol in Figure 4, a pn junction diode D11 is formed between the well region 2a of the main element 201 and the high resistivity layer 1. Also, a pn junction diode D12 is formed between the well region 2b of the sense element 202 and the high resistivity layer 1.

[0041] Figure 5 shows a cross-sectional view taken at the position of line BB' in Figure 3. In the sense element 202 on the right side of Figure 5, a gate wiring 9c is provided on the upper surface of the well region 2b via a gate insulating film 7. A source electrode 23 is provided on the upper side of the gate wiring 9c via an interlayer insulating film 32. A gate runner 24 is also provided on the upper side of the gate wiring 9c, spaced apart from the source electrode 23, via the interlayer insulating film 32. The gate wiring 9c is connected to the gate runner 24 via a contact 24b provided in an opening in the interlayer insulating film 32.

[0042] As shown in Figure 5, a well region 2a is provided above the high resistivity layer 1, spaced apart from the well region 2b. Well region 2a is an integral region with the well region 2a shown in Figure 4. In the isolation region 203 shown in the center of the left-right direction in Figure 5, an element isolation insulating film 31 is selectively provided on the upper surface of the high resistivity layer 1 sandwiched between the well regions 2a and 2b. A first wiring 9b is provided on the upper surface of the element isolation insulating film 31. The first wiring 9b is an integral region with the first wiring 9b shown in Figure 4. The first wiring 9b is separated from the gate wirings 9a and 9c. The first wiring 9b is covered by an interlayer insulating film 32.

[0043] A gate wiring 9a is provided on the upper surface of the well region 2a shown in Figure 5, via a gate insulating film 7. The gate wiring 9a is a region integrated with the gate wiring 9a shown in Figure 4. The gate wiring 9a extends to the upper surface of the element isolation insulating film 31 located to the left of the well region 2a. A gate runner 24 is provided on the upper surface side of the gate wiring 9a via an interlayer insulating film 32. The gate wiring 9a is connected to the gate runner 24 via a contact 24a provided in an opening in the interlayer insulating film 32.

[0044] The gate runner 24 is connected to a gate pad, which is not shown in the figure. The gate runner 24 is electrically connected to the gate electrode 8a of the main element 201 via the gate wiring 9a of the main element 201, and is electrically connected to the gate electrode 8b of the sense element 202 via the gate wiring 9c of the sense element 202.

[0045] In the planar layout of Figure 3, the source electrode 22 of the main element 201, the source electrode 23 of the sense element 202, and the gate runner 24 are each shown by solid lines. The gate runner 24 shown on the left side of Figure 3 has a stripe portion 24x that extends in the vertical direction of Figure 3 and a protruding portion 24y that protrudes toward the sense element 202 in the horizontal direction of Figure 3. The source electrode 22 of the main element 201 shown from the center to the lower right of Figure 3 is provided spaced apart from the stripe portion 24x of the gate runner 24. The source electrode 23 of the sense element 202 shown in the upper right of Figure 3 is provided spaced apart from the source electrode 22 of the main element 201 and the protruding portion 24y of the gate runner 24.

[0046] In Figure 3, the end 91 of the gate wiring 9a of the main element 201, the ends 92 and 93 of the first wiring 9b of the isolation region 203, and the end 94 of the gate wiring 9c of the sense element 202 are schematically shown with dashed lines as shown in Figures 4 and 5. The end 91 of the gate wiring 9a of the main element 201 is separated from the end 92 of the first wiring 9b of the isolation region 203 in an L-shaped planar pattern. The end 93 of the first wiring 9b of the isolation region 203 is separated from the end 94 of the gate wiring 9c of the sense element 202 in an L-shaped planar pattern. The first wiring 9b of the isolation region 203, which is partitioned by ends 92 and 93, has an L-shaped planar pattern.

[0047] In Figure 3, the ends 31a and 31b of the element isolation insulating film 31 in the isolation region 203 shown in Figures 4 and 5, and the end 31c of the element isolation insulating film 31 on the stripe portion 24x side of the gate runner 24 are schematically shown with dashed lines. The element isolation insulating film 31 of the isolation region 203 demarcated by ends 31a and 31b has an L-shaped planar pattern and is provided so as to overlap with the first wiring 9b of the isolation region 203 demarcated by ends 92 and 93.

[0048] In Figure 3, the contact 22a connecting the source electrode 22 of the main element 201 and the first wiring 9b of the isolation region 203 is schematically shown by a dashed line. Also, the contact 24a connecting the gate runner 24 and the gate wiring 9a on the main element 201 side is schematically shown by a dashed line. Contact 24a is provided on the stripe portion 24x of the gate runner 24. Furthermore, the contact 24b connecting the gate runner 24 and the gate wiring 9c on the sense element 202 side is schematically shown by a dashed line. Contact 24b is provided on the protruding portion 24y of the gate runner 24.

[0049] Figure 3 schematically shows the trench 6a of the main element 201 with a dashed line. Trench 6a has a stripe-like planar pattern extending in the left-right direction in Figure 3. Although not shown in Figure 3, multiple trenches with a similar structure to trench 6a may be provided, extending parallel to trench 6a. Also, the trench 6b of the sense element 202 is schematically shown with a dashed line. Trench 6b has a stripe-like planar pattern extending in the left-right direction in Figure 3. Although not shown in Figure 3, multiple trenches with a similar structure to trench 6b may be provided, extending parallel to trench 6b.

[0050] <Comparative Example> Next, a semiconductor device relating to a comparative example will be described. The equivalent circuit of the semiconductor device relating to the comparative example is the same as the equivalent circuit of the semiconductor device relating to the first embodiment shown in Figures 1 and 2. Figure 6 is a plan view of the main part of the semiconductor device relating to the comparative example. Figure 7 shows a cross-sectional view taken at the position of line AA' in Figure 6, and Figure 8 shows a cross-sectional view taken at the position of line BB' in Figure 6.

[0051] As shown in Figures 7 and 8, the semiconductor device according to the comparative example differs from the semiconductor device according to the first embodiment in that gate wiring 9 is continuously provided in the main element 201, the sense element 202, and the isolation region 203. The gate wiring 9 is covered with an interlayer insulating film 32 and is insulated from the source electrode 22 of the main element 201 and the source electrode 23 of the sense element 202. As shown in Figure 8, the gate wiring 9 is connected to the gate runner 24 via a contact 24a provided in the interlayer insulating film 32. Therefore, the gate potential of the parasitic MOS structure 52 in the isolation region 203 is the same as the gate potential of the main element 201 and the gate potential of the sense element 202.

[0052] In the semiconductor device of the comparative example, consider the case where the battery 102 is connected in reverse, as shown in Figure 2. In this case, the gate potentials of the main element T1 and the sense element T2 become low, and the main element T1 and the sense element T2 are in the off state. In the semiconductor device of the comparative example, as shown in Figures 7 and 8, the gate wiring 9 that serves as the gate electrode of the parasitic MOS structure 52 is continuous (common) with the gate wiring 9 of the main element 201 and the sense element 202. Therefore, the gate potential of the parasitic MOS structure 52 becomes low, at the same potential as the gate potentials of the main element 201 and the sense element 202.

[0053] Furthermore, when the battery 102 of the semiconductor device in the comparative example is reverse-connected, as shown in Figure 2, diodes D4 and D5 are provided between the sources of the main element T1 and the sense element T2, resulting in a potential difference between the sources of the main element T1 and the sense element T2. For example, the source potential of the main element T1 becomes a positive potential of about 16V, which is approximately the same as the battery potential, and the source potential of the sense element T2 becomes about 0V, which is the internal GND potential. As a result, the pn junction diode D21 formed by the well region 2a of the main element 201 and the high resistivity layer 1, schematically shown in Figure 7, is forward-biased, and the back gate potential of the parasitic MOS structure 52 (the potential of the high resistivity layer 1) rises.

[0054] When the gate potential of the parasitic MOS structure 52 is low and the back gate potential of the parasitic MOS structure 52 rises, a p-type channel layer is formed on the surface layer of the parasitic MOS structure 52, causing the parasitic MOS structure 52 to operate and reducing the breakdown voltage between the main element 201 and the sense element 202. As a result, a leakage current I3 flows through the parasitic MOS structure 52, as schematically shown by the dashed line in Figure 2. This problem can be improved by removing the gate wiring 9b of the main element 201 on the element isolation insulating film 31 that constitutes the parasitic MOS structure 52, but this is difficult to implement considering the gate connection of the sense element 202, etc. Also, connecting the gate of the sense element 202 with a wire increases the cost.

[0055] In contrast, according to the semiconductor device of the first embodiment, as shown in Figure 4, the first wiring 9b on the element isolation insulating film 31 of the parasitic MOS structure 51 is separated from the gate wiring 9a of the main element 201 and the gate wiring 9c of the sense element 202. Furthermore, by connecting the first wiring 9b on the element isolation insulating film 31 of the parasitic MOS structure 51 to the source electrode 22 via a contact 22a provided in the opening of the interlayer insulating film 32, the gate potential of the parasitic MOS structure 51 is set to the same potential as the source potential of the main element 201.

[0056] As shown in Figure 2, when the battery 102 is reverse-connected to the semiconductor device according to the first embodiment, the gate potentials of the main element T1 and the sense element T2 become low, and the main element T1 and the sense element T2 are turned off. The first wiring 9b of the parasitic MOS structure 51 shown in Figure 4 is separated from the gate wiring 9a of the main element 201 and the gate wiring 9c of the sense element 202, and is connected to the source electrode 22 via a contact 22a provided in the opening of the interlayer insulating film 32. Therefore, the gate potential of the first wiring 9b of the parasitic MOS structure 51 becomes high, which is the same potential as the source potential of the main element T1.

[0057] Furthermore, as shown in Figure 2, when the battery 102 of the semiconductor device according to the first embodiment is reverse-connected, diodes D4 and D5 are provided between the sources of the main element T1 and the sense element T2, so a potential difference is generated between the sources of the main element T1 and the sense element T2. Since the source potential of the main element T1 becomes positive, the pn junction diode D11 formed by the well region 2a of the main element 201 and the high resistivity layer 1 shown in Figure 4 is forward-biased, and the back gate potential of the parasitic MOS structure 51 (potential of the high resistivity layer 1) rises. This point is the same as that of the semiconductor device according to the comparative example.

[0058] However, in the semiconductor device according to the first embodiment, although the back gate potential of the parasitic MOS structure 51 shown in Figure 4 rises, the gate potential of the parasitic MOS structure 51 is at a high level, so the parasitic MOS structure 51 does not operate, and the withstand voltage between the main element 201 and the sense element 202 can be ensured. Therefore, without making significant changes to the chip size or process, the withstand voltage of the main element 201 and the sense element 202 can be ensured even when the battery 102 is connected in reverse, and leakage current can be blocked or reduced.

[0059] Figure 9 shows the simulation results of the breakdown voltage between the main element and the sense element in the semiconductor device according to the first embodiment and the semiconductor device according to the comparative example. The horizontal axis represents the source-to-source potential of the main element and the sense element, and the vertical axis represents the leakage current. In the semiconductor device according to the comparative example (referred to as "comparative example"), leakage current due to the parasitic MOS structure is observed from a source-to-source potential of about 5V, and the breakdown voltage is insufficient when considering the battery voltage. On the other hand, in the semiconductor device according to the first embodiment (referred to as "the present invention"), breakdown voltage is ensured even at a source-to-source potential of 35V or higher, and leakage current can be interrupted even when the battery is connected in reverse.

[0060] (Second Embodiment) The equivalent circuit of the semiconductor device according to the second embodiment is the same as the equivalent circuit of the semiconductor device according to the first embodiment shown in FIGS. 1 and 2. As shown in FIG. 10, the semiconductor device according to the second embodiment includes a main element 201 and a sense element 202 integrated on the same semiconductor chip.

[0061] The main element 201 includes a p-type well region 2a, and n-type source regions 4a to 4j provided on the upper part of the well region 2a and contacting the well region 2a. + The main element 201 also has gate electrodes 8a to 8f whose sides are in contact with the source regions 4a to 4j via a gate insulating film (not shown). The gate electrodes 8a to 8f extend parallel to each other in the vertical direction of FIG. 10. Further, a gate electrode 8y having the same structure as the gate electrodes 8a to 8f is provided so as to extend in a direction orthogonal to the gate electrodes 8a to 8f (the horizontal direction of FIG. 10) and is connected to the ends of the gate electrodes 8a to 8c.

[0061] The sense element 202 includes a p-type well region 2b, and n-type source regions 4k, 4l, 4m provided on the upper part of the well region 2b and contacting the well region 2b. + The sense element 202 also has gate electrodes 8g, 8h whose sides are in contact with the source regions 4k, 4l, 4m via a gate insulating film (not shown). The gate electrodes 8g, 8h extend parallel to each other in the vertical direction of FIG. 10. Further, a gate electrode 8z having the same structure as the gate electrodes 8g, 8h is provided so as to extend in a direction orthogonal to the gate electrodes 8g, 8h (the horizontal direction of FIG. 10) and is connected to the ends of the gate electrodes 8g, 8h.

[0063] At the boundary position between the main element 201 and the sense element 202, a first electrode 8x is provided as a separation region for separating the main element 201 and the sense element 202. The first electrode 8x is embedded in a trench via a gate insulating film not shown. The first electrode 8x has a portion extending parallel to each other in the vertical direction of FIG. 10 and a portion extending parallel to each other in the horizontal direction of FIG. 10.

[0064] The positions of the lower edges of well regions 2a and 2b in the planar pattern of Figure 10 are indicated by thick dotted lines. The positions of the lower edges of well regions 2a and 2b roughly coincide with the positions of the end 9x of gate wiring 9.

[0065] Figure 11 shows a cross-sectional view taken from the AA direction along the left-right direction of Figure 10. As shown in Figure 11, the semiconductor device according to the second embodiment is n + Low resistivity layer 11 and n - The semiconductor substrate (1,11) comprises a high resistivity layer 1 of type n. In the main element 201 shown on the right side of Figure 11, a portion of the high resistivity layer 1 functions as a drift region. Also, a portion of the low resistivity layer 11 functions as a drain region. A p-type well region 2a is provided above the high resistivity layer 1. Above the well region 2a is n + A type of source region 4f to 4j is provided. The source regions 4f to 4j are connected to the source electrode 22 via contacts 22a to 22c.

[0066] Trenches 6d to 6f are provided so as to penetrate the well region 2a and reach the high resistivity layer 1. Trenches 6d to 6f are in contact with the source regions 4f to 4j, the well region 2a, and the high resistivity layer 1, and are in contact with the pn junction between the source regions 4f to 4j and the well region 2a, and the pn junction between the well region 2a and the high resistivity layer 1. Guard gates 8d to 8f are embedded in trenches 6d to 6f via a gate insulating film 7. An interlayer insulating film 32 is provided on the upper surface of the guard gates 8d to 8f.

[0067] In the sense element 202 shown on the left side of Figure 11, a portion of the high resistivity layer 1 functions as a drift region. A portion of the low resistivity layer 11 functions as a drain region. A p-type well region 2b is provided above the high resistivity layer 1. Above the well region 2b is an n + Source regions 4k, 4l, and 4m are provided. Source regions 4k, 4l, and 4m are connected to the source electrode 23 via contacts 23a and 23b. The source electrode 23 is spaced apart from the source electrode 22 of the main element 201.

[0068] Trenches 6g and 6h are provided so as to penetrate the well region 2b and reach the high resistivity layer 1. The trenches 6g and 6h are in contact with the source regions 4k, 4l, 4m, the well region 2b, and the high resistivity layer 1, and are in contact with the pn junction between the source regions 4k, 4l, 4m and the well region 2b, and the pn junction between the well region 2b and the high resistivity layer 1. Guard gates 8g and 8h are embedded in the trenches 6g and 6h via a gate insulating film 7. An interlayer insulating film 32 is provided on the upper surface of the guard gates 8g and 8h.

[0069] An isolation region 203 is provided between the main element 201 and the sense element 202. In the isolation region 203, a trench (element isolation trench) 6x is provided between the well region 2a of the main element 201 and the well region 2b of the sense element 202. A first electrode 8x is embedded in the element isolation trench 6x via an insulating film 7. The first electrode 8x is connected to the source electrode 22 of the main element 201 via a contact 22d provided in an opening in the interlayer insulating film 32.

[0070] As shown by the dashed line in Figure 11, in the isolation region 203, a parasitic MOS structure 61 is formed by the high resistivity layer 1, insulating film 7, and first electrode 8x sandwiched between the well region 2a on the main element 201 side and the well region 2b on the sense element 202 side. Furthermore, as schematically shown by the circuit symbol in Figure 11, a pn junction diode D61 is formed between the well region 2a of the main element 201 and the high resistivity layer 1. Also, a pn junction diode D62 is formed between the well region 2b of the sense element 202 and the high resistivity layer 1.

[0071] Figure 12 shows a cross-sectional view of Figure 10 as seen from the BB direction along the left-right direction. Figure 12 shows the vicinity of the longitudinal ends of 6d-6f of the main element 201, trenches 6g and 6h of the sense element 202, and element isolation trench 6x of the isolation region 203. In the sense element 202 shown on the left side of Figure 12, the side and bottom surfaces near the longitudinal ends of trenches 6g and 6h are covered by a p-type field relaxation region 5a. In the main element 201 shown on the right side of Figure 12, the side and bottom surfaces near the longitudinal ends of trenches 6d-6f are covered by a p-type field relaxation region 5b.

[0072] In the isolation region 203 shown in the center of Figure 12, near the longitudinal end of the element isolation trench 6x, the first electrode 8x is covered with an interlayer insulating film 32 and separated from the gate wiring 9. The gate wiring 9 is provided continuously across the main element 201 and the sense element 202, straddling the upper surface of the interlayer insulating film 32 covering the first electrode 8x. The gate wiring 9 is connected to the gate electrodes 8d to 8f of the main element 201 and the gate electrodes 8g and 8h of the sense element 202.

[0073] The electric field relaxation regions 5a and 5b are separated from each other to prevent an electrical short circuit between the rightmost well region 2b of the sense element 202 and the leftmost well region 2a of the main element 201. However, there is a risk of electric field concentration occurring near the longitudinal end of the element isolation trench 6x that is not covered by the electric field relaxation regions 5a and 5b, which could lead to a decrease in breakdown voltage.

[0074] In contrast, when a high voltage different from normal operation is applied between the drain and source of the main element 201 and the sense element 202, the distance D1 between the electric field relaxation regions 5a and 5b is set so that the depletion layer extending from the pn junction of the high resistivity layer 1 connects with the drift region formed by the high resistivity layer 1. This makes it possible to relax the electric field at the longitudinal end of the trench 6b and prevent a decrease in breakdown voltage. For example, when the breakdown voltage is about 60V, it is preferable to set the distance D1 between the electric field relaxation regions 5a and 5b to about 1μm or more and 3μm or less.

[0075] Figure 13 shows a cross-sectional view of Figure 10 as seen from the CC direction along the vertical direction. In the main element 201 shown on the left side of Figure 13, a well region 2a is provided above the high resistivity layer 1. A source region 4a is provided above the well region 2a. The source region 4a is connected to the source electrode 22 via a contact 22x.

[0076] On the other hand, in the sense element 202 shown on the right side of Figure 13, a well region 2b is provided above the high resistivity layer 1. A source region 4k is provided above the well region 2b. The source region 4k is connected to the source electrode 23 via a contact 23x.

[0077] The right-hand side and bottom surfaces of the well region 2a are covered by the electric field relaxation region 5a. A field insulating film 10 is provided on the upper surface of the electric field relaxation region 5a. Gate wiring 9 is provided on the upper surface of the electric field relaxation region 5a via an interlayer insulating film 32. In Figure 13, the left-hand end 9x of the gate wiring 9 is located to the right of the left-hand side surface of the electric field relaxation region 5a.

[0078] Figure 10 schematically shows the location of the edge of the p-type field relaxation region 5a with a dashed-dotted line. It also schematically shows the location of the edge of the p-type field relaxation region 5b with a dashed-dotted line. Furthermore, the portion of the field insulating film 10 hidden under the gate wiring 9 is shown with a double-dotted line.

[0079] In the semiconductor device according to the second embodiment, as shown in Figure 12, the first electrode 8x of the element isolation trench 6x in the isolation region 203 is covered with an interlayer insulating film 32, and is isolated from the gate wiring 9 connected to the gate electrodes 8d~8f of the main element 201 and the gate electrodes 8g,8h of the sense element 202. Furthermore, as shown in Figures 11 and 13, by connecting the first electrode 8x of the element isolation trench 6x to the source electrode 22, the potential of the first electrode 8x of the element isolation trench 6x is made the same as the source potential of the main element 201.

[0080] As shown in Figure 2, when the battery 102 is reverse-connected to the semiconductor device according to the second embodiment, the gate potentials of the main element T1 and the sense element T2 become low, and the main element T1 and the sense element T2 are turned off. The first electrode 8x of the element isolation trench 6x is isolated from the gate wiring 9 of the main element 201 and the sense element 202, and is connected to the source electrode 22 via a contact 22d provided in the opening of the interlayer insulating film 32. Therefore, the potential of the first electrode 8x of the element isolation trench 6x becomes high, which is the same potential as the source potential of the main element T1.

[0081] Furthermore, as shown in Figure 2, when the battery 102 of the semiconductor device according to the second embodiment is reverse-connected, diodes D4 and D5 are provided between the sources of the main element T1 and the sense element T2, so a potential difference is generated between the sources of the main element T1 and the sense element T2. Since the source potential of the main element T1 becomes positive, the pn junction diode formed by the well region 2a of the main element 201 and the high resistivity layer 1 is forward-biased, and the potential of the high resistivity layer 1 located near the element isolation trench 6x rises.

[0082] If the first electrode 8x of the element isolation trench 6x were connected to the gate wiring 9, the gate electrode 8x of the element isolation trench 6x would be at a low level, the parasitic MOS structure 61 would operate, and the withstand voltage between the main element 201 and the sense element 202 could decrease. In contrast, in the semiconductor device according to the second embodiment, the potential of the first electrode 8x of the element isolation trench 6x is at the same potential as the source potential of the main element 201 and is at a high level, so the parasitic MOS structure 61 does not operate, and the withstand voltage between the main element 201 and the sense element 202 can be ensured. Therefore, even when the battery 102 is reverse-connected, the withstand voltage of the main element 201 and the sense element 202 can be ensured, and leakage current can be blocked or reduced.

[0083] (Other embodiments) As described above, the present invention has been described by first and second embodiments, but the descriptions and drawings that constitute part of this disclosure should not be understood as limiting the invention. Various alternative embodiments, examples and operational techniques will become apparent to those skilled in the art from this disclosure.

[0084] For example, in the first and second embodiments, a trench-gate type MOS transistor was exemplified as the main element 201, but the invention is not limited thereto. For example, the main element 201 may be a trench-gate type IGBT. If the main element 201 is an IGBT, for example, in Figure 1, n + The low resistivity layer 11 of type p + It should be a semiconductor layer of a certain type.

[0085] Furthermore, while the first and second embodiments illustrate the use of Si as the semiconductor substrate (1,11), the method is also applicable to wide-bandgap semiconductor materials other than Si, such as silicon carbide (SiC), gallium nitride (GaN), gallium oxide (Ga2O3), diamond (C), or aluminum nitride (AlN).

[0086] Furthermore, the configurations disclosed in the first and second embodiments can be combined as appropriate, provided that they do not create any contradictions. Thus, it goes without saying that the present invention includes various embodiments not described herein. Therefore, the technical scope of the present invention is determined solely by the inventive features relating to the claims that are appropriate based on the above description. [Explanation of symbols]

[0087] 1...High resistivity layer 2a, 2b... well region 4a~4m...Source area 5a,5b...Electric field relaxation region 6a~6h, 6x…Trench 7…Gate insulating film 8a~8h, 8y, 8z… Gate gate 8x…1st electrode 9, 9a, 9c… Gate wiring 9b…1st wiring 9x,9y…end 10…Field insulating film 11...Low resistivity layer 22, 23… Source electrodes 22a~22d,22x,23a,23b,23x,24a,24b… Contact lenses 24... Gate Runner 24x... Stripe section 24y…Protrusion 31... Element isolation insulating film 31a~31c...end 32...Interlayer insulating film 51,52,61...parasitic MOS structure 91-94...Ends 100... Semiconductor equipment 101... Control Unit 102... Battery 103...Load 111…Input terminal 112,113…Power terminal 114…Output terminal 115...Ground terminal 201... Main element 202...Sense element 203…Separation area D1~D3... Freewheeling diodes D4, D5... Diodes D11, D12, D21, D22... pn junction diodes I1~I3... Leakage current T1... Main element T2...Sense element T3... Auxiliary element

Claims

1. A semiconductor device having a main element, a sense element for detecting the current of the main element, and an isolation region for separating the main element and the sense element, Each of the main element and the sense element is, A first-conductivity drift region provided on the semiconductor substrate, A second conductivity type well region is provided above the drift region, A first main electrode region of the first conductivity type is provided in the upper part of the well region, A gate electrode embedded in a trench in contact with the first main electrode region, the well region, and the drift region via a gate insulating film, A main electrode electrically connected to the first main electrode region, Equipped with, The aforementioned separation region is The well region of the main element and the well region of the sense element, and an element isolation insulating film provided on the upper surface of the semiconductor substrate sandwiched between them, A first wiring is provided on the upper surface of the element isolation insulating film and is electrically connected to the main electrode of the main element, Equipped with, A semiconductor device characterized in that the element isolation insulating film is in contact with the upper surface of the drift region sandwiched between the well region of the main element and the well region of the sense element.

2. A semiconductor device having a main element, a sense element for detecting the current of the main element, and an isolation region for separating the main element and the sense element, Each of the main element and the sense element is, A first-conductivity drift region provided on the semiconductor substrate, A second conductivity type well region is provided above the drift region, A first main electrode region of the first conductivity type is provided in the upper part of the well region, A gate electrode embedded in a trench in contact with the first main electrode region, the well region, and the drift region via a gate insulating film, A main electrode electrically connected to the first main electrode region, Equipped with, The aforementioned separation region is The well region of the main element and the well region of the sense element, and an element isolation insulating film provided on the upper surface of the semiconductor substrate sandwiched between them, A first wiring is provided on the upper surface of the element isolation insulating film and is electrically connected to the main electrode of the main element, Equipped with, A semiconductor device characterized in that the element isolation insulating film is a LOCOS film.

3. The semiconductor device according to claim 1 or 2, characterized in that the first wiring is separated from the first gate wiring connected to the gate electrode of the main element and the second gate wiring connected to the gate electrode of the sense element.

4. The semiconductor device according to any one of claims 1 to 3, characterized in that the main electrode of the main element extends onto the first wiring, and the first wiring is connected to the main electrode of the main element via a first contact.

5. The semiconductor device according to claim 3, further comprising a gate runner connected to the first gate wiring via a second contact and connected to the second gate wiring via a third contact.

6. A semiconductor device having a main element, a sense element for detecting the current of the main element, and an isolation region for separating the main element and the sense element, Each of the main element and the sense element is, A first-conductivity drift region provided on the semiconductor substrate, A second conductivity type well region is provided above the drift region, A first main electrode region of the first conductivity type is provided in the upper part of the well region, A gate electrode embedded in a trench in contact with the first main electrode region, the well region, and the drift region via a gate insulating film, A main electrode electrically connected to the first main electrode region, Equipped with, A semiconductor device characterized in that the isolation region is embedded via a gate insulating film in an element isolation trench provided in the semiconductor substrate sandwiched between the well region of the main element and the well region of the sense element, and comprises a first electrode electrically connected to the main electrode of the main element.

7. The semiconductor device according to claim 6, characterized in that the first electrode of the isolation region is separated from the gate wiring connected to the gate electrode of the main element and the gate electrode of the sense element.

8. The semiconductor device according to any one of claims 1 to 7, further comprising a diode whose cathode side is connected to the first main electrode region of the main element and whose anode side is connected to the first main electrode region of the sense element.

9. The semiconductor device according to any one of claims 1 to 8, further comprising a diode whose cathode side is connected to the second main electrode region of the main element.

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