Jet Modules and Active Jet Systems

Abstract

We provide jet modules and active jet systems. [Solution] The jet module M has a main body M1, and inside the main body are a transport chamber M10 and an annular airflow generation chamber M1. A gas input section M2 is provided at one end of the main body, a gas output section M3 is provided at the other end of the main body, and an outward-extending airflow introduction section M4 is formed on the side of the main body. The transport chamber, gas input section and gas output section are in communication with each other, and the transport chamber, annular airflow generation chamber M11 and airflow introduction section are also in communication with each other. The annular airflow generation chamber has a side connection section M110 and a nozzle section M111, and the side connection section and the nozzle section are in communication with each other. The side connection section is connected to the airflow introduction section, and the nozzle section is connected to the transport chamber. The nozzle section is arranged to generate a push airflow toward the transport chamber via a predetermined path.

Description

Technical Field

[0001] The present invention relates to a jet module and an active jet system, and more particularly to a jet module and an active jet system that replace a conventional pipe heating belt and generate an air flow at a predetermined angle.

Background Art

[0002] As far as the exhaust gas treatment system for particulate dust in the high-tech manufacturing industry is concerned, it is necessary to collect fine dust before and after many exhaust gas detoxification processes. Existing semiconductor manufacturing process equipment adopts a method of removing fine dust using a wet scrubber (Local Scrubber) and transporting the exhaust gas of the dust through a pipe. However, when the exhaust gas of the dust is transported for a long time, the dust in the exhaust gas accumulates and deposits on the pipe wall, resulting in the problem of pipe blockage. Therefore, in the current semiconductor manufacturing process equipment, a plurality of heating belts are installed on the pipe to make the dust deposited and accumulated on the pipe wall less adherent and removed outside the pipe together with the exhaust gas.

[0003] However, installing the heating belt not only causes an increase in manufacturing cost, but also the necessity of pipe cleaning cannot be completely eliminated even if the heating belt is installed.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The technical problem to be solved by the present invention is to provide a jet module and an active jet system in order to address the deficiencies of the current technology.

Means for Solving the Problems

[0005] To solve the above-mentioned technical problems, one technical means employed by the present invention is to provide a jet module, the jet module having a device body, the device body comprising a transport chamber and an annular airflow generation chamber inside the device body. One end of the device body is provided with a gas input section, and the other end of the device body is provided with a gas output section. Furthermore, an airflow introduction section is formed extending outward from the side of the device body. The transport chamber, the gas input section, and the gas output section are in communication with each other, and the transport chamber, the annular airflow generation chamber, and the airflow introduction section are in communication with each other. The gas input section is configured to be connected to a first external working device, and the gas output section is configured to be connected to a second external working device. The airflow introduction section is configured to be connected to an external gas source device. The annular airflow generation chamber comprises a side connection section and at least one nozzle section, the side connection section and the at least one nozzle section are in communication with each other. The side connection section is connected to the airflow introduction section, and the at least one nozzle section is connected to the transport chamber. The at least one nozzle section is arranged to generate a push airflow toward the conveying chamber via a predetermined path, and there is a predetermined angle between the predetermined path and the central axis of the device body. The predetermined angle is between 0 and 89 degrees.

[0006] To solve the above-mentioned technical problems, another technical means employed by the present invention is to provide an active jet system, the active jet system comprising at least one jet module, at least one gas supply module, and a control module. The at least one jet module comprises a device body, the device body comprising a transport chamber and an annular airflow generation chamber inside the device body. One end of the device body is provided with a gas input section, and the other end of the device body is provided with a gas output section. Furthermore, an outwardly extending airflow introduction section is formed on the side surface of the device body. The transport chamber, the gas input section, and the gas output section are in communication with each other, and the transport chamber, the annular airflow generation chamber, and the airflow introduction section are also in communication with each other. The at least one gas supply module is connected to the airflow introduction section. The control module is connected to the gas supply module and is configured to control the gas supply module to supply a driving airflow to the jet module in a continuous or intermittent mode. The gas input section is configured to be connected to a first external working device, and the gas output section is configured to be connected to a second external working device. The annular airflow generation chamber comprises a side connection section and at least one nozzle section, the side connection section and the at least one nozzle section communicating with each other. The side connection section is connected to the airflow introduction section, and the at least one nozzle section is connected to the transport chamber. The at least one nozzle section is arranged to generate a push airflow toward the transport chamber via a predetermined path, and there is a predetermined angle between the predetermined path and the central axis of the device body. The predetermined angle is between 0 and 89 degrees. [Effects of the Invention]

[0007] One beneficial effect of the present invention is that the jet module and active jet system provided by the present invention, through the above-described technical means, replace conventional pipe heating belts and effectively solve the problem of pipe clogging.

[0008] To further understand the features and technical content of the invention, please refer to the detailed description of the present invention and the accompanying drawings below. However, the accompanying drawings provided are for reference and illustrative purposes only and are not intended to limit the scope of the claims of the present invention. [Brief explanation of the drawing]

[0009] [Figure 1] This is a schematic diagram of the structure of an active jet system in a first embodiment of the present invention. [Figure 2] This is a functional block diagram of the active jet system in the first embodiment of the present invention. [Figure 3] This is a first schematic cross-sectional view of a jet module in a first embodiment of the present invention. [Figure 4] This is a second schematic cross-sectional view of a jet module in a first embodiment of the present invention. [Figure 5] This is a schematic diagram of the structure of an active jet system in a second embodiment of the present invention. [Figure 6] This is a functional block diagram of an active jet system in a second embodiment of the present invention. [Modes for carrying out the invention]

[0010] Embodiments of the "jet module and active jet system" disclosed herein will be described below. Those skilled in the art will be able to understand the merits and effects of the present invention from the published content herein. The present invention can be carried out or applied by other different embodiments. Each detail herein can also be modified and changed equally from various viewpoints or applications, as long as it does not depart from the spirit of the invention. Furthermore, the drawings of the present invention are for simple and schematic purposes only and do not represent actual dimensions. The following embodiments will further describe technical matters according to the present invention, but the published content does not limit the present invention.

[0011] Throughout this specification, terms such as “first,” “second,” etc., may be used to describe various components and signals, but it should be understood that these components and signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term “or” as used herein may, as appropriate, include any one or a combination of the relevant enumerated items, depending on the actual context.

[0012] [First Embodiment] Please refer to Figures 1 to 4. These are a schematic structural diagram of an active jet system in a first embodiment of the present invention, a functional block diagram of the active jet system, a schematic first cross-sectional view of a jet module, and a schematic second cross-sectional view of a jet module, respectively. As shown in these drawings, a first embodiment of the present invention provides an active jet system Z, which may include at least one jet module M, at least one gas supply module 1, and a control module 2.

[0013] As shown in Figures 1 to 4, the jet module M has a device body M1, and the device body M1 may be equipped with a transport chamber M10 and an annular airflow generation chamber M11 inside. One end of the device body M1 may be equipped with a gas input section M2, and the other end may be equipped with a gas output section M3. In addition, an outward-extending airflow introduction section M4 is formed on the side of the device body M1. The transport chamber M10, gas input section M2, and gas output section M3 are in communication with each other, and the transport chamber M10, annular airflow generation chamber M11, and airflow introduction section M4 can be in communication with each other. The gas input section M2 is arranged to be connected to a first external working device U1, and the gas output section M3 is arranged to be connected to a second external working device U2. The annular airflow generation chamber M11 includes a side connection section M110 and at least one nozzle section M111, and the side connection section M110 and the nozzle section M111 are in communication with each other. The side connection section M110 is connected to the airflow introduction section M4, and the nozzle section M111 is connected to the transport chamber M10. The nozzle section M111 is positioned to generate a push airflow PA toward the transport chamber M10 via a predetermined path PR, and there is a predetermined angle PG between the predetermined path PR and the central axis CA of the device body M1. The predetermined angle PG is between 0 and 89 degrees.

[0014] For example, the external shape of the device body M1 may be geometric, such as a square or a rounded trapezoid, but is not limited thereto. The transport chamber M10 is located in the center of the device body M1, and the annular airflow generation chamber M11 is arranged to surround the transport chamber M10. The transport chamber M10 may have a hollow structure. A gas input section M2 is formed extending outward from one end of the device body M1, and a gas output section M3 is formed extending outward from the other end. The gas input section M2, gas output section M3, and airflow introduction section M4 have a hollow tubular structure, with the gas input section M2 communicating with the gas output section M3 via the transport chamber M10, and the airflow introduction section M4 communicating with the transport chamber M10 via the annular airflow generation chamber M11. The diameter or hole diameter of the nozzle section M111 is 0.01 mm to 3 mm, preferably 0.1 mm. The predetermined angle PG is preferably 0 to 10 degrees, and the optimal predetermined angle PG is 0 degrees. The first external working device U1 and the second external working device U2 may be, but are not limited to, a turbo pump, dry pump, local scrubber, combustion exhaust gas removal device, plasma exhaust gas removal device, or central scrubber (e.g., a wet scrubbing tower) in a semiconductor device. The gas input section M2 is connected to the first external working device U1 via an external pipe EP, and the gas output section M3 is connected to the second external working device U2 via an external pipe EP.

[0015] Furthermore, the cross-section of the annular airflow generating chamber M11 is feather-shaped, and the annular airflow generating chamber M11 may have an annular hollow structure. The annular airflow generating chamber M11 includes a main chamber section M112, which has a feather-shaped covering area M112a and a shoulder area M112b. The feather-shaped covering area M112a connects the side connection section M110 to the shoulder area M112b, and the shoulder area M112b is connected to at least one nozzle section M111. The cross-section of the feather-shaped covering area M112a is conical, and the cross-section of the shoulder area M112b may be C-shaped or hook-shaped, but is not limited thereto. Furthermore, in the main body M1 of the apparatus, there is a predetermined inclination angle TG between the inner wall surface adjacent to the transport chamber M10 and the central axis CA of the wing-shaped covering area M112a, and this predetermined inclination angle TG is 5 to 30 degrees, preferably 8 degrees, 16 degrees (see Figure 4), 19 degrees, 26.5 degrees, and 30 degrees (see Figure 3), but is not limited to these.

[0016] Next, as shown in Figures 1 and 2, at least one gas supply source module 1 is connected to the airflow inlet M4. For example, the gas supply source module 1 is a gas supply device in a semiconductor device and can supply general air or a special gas (e.g., an inert gas, but not limited to this). The gas supply source module 1 has a connecting pipe 10, which is connected to the airflow inlet M4.

[0017] Next, referring to Figure 2, the control module 2 is electrically connected to the gas supply module 1 and is configured to control the gas supply module 1 to supply the drive airflow DA to the jet module M in continuous or intermittent mode. For example, the control module 2 may be a central control unit or a computer unit. In other preferred embodiments, the control module 2 is also connected to a first external work device U1 and a second external work device U2 and can receive information provided by the first external work device U1 or the second external work device U2, or both (e.g., relevant signals of parameters related to gas transport).

[0018] Therefore, when the airflow introduction section M4 receives the drive airflow DA provided from the gas supply source module 1, and the gas input section M2 receives the process gas MP provided from the first external working device U1, the annular airflow generation chamber M11 generates a push airflow PA into the transport chamber M10 via at least one nozzle section M111, and the push airflow PA causes the process gas MP to flow toward the gas output section M3. When the airflow introduction section M4 receives the drive airflow DA provided from the gas supply source module 1, the annular airflow generation chamber M11 introduces the drive airflow DA into the feather-shaped covering area M112a via the side connection section M110. The drive airflow DA then passes through the feather-shaped covering area M112a and the shoulder area M112b, and through at least one nozzle section M111, flows to the transport chamber M10 via a predetermined path PR, and forms the push airflow PA.

[0019] For example, referring to Figures 1 to 4, the active jet system Z of the present invention is applied to a semiconductor manufacturing process apparatus and replaces the pipe heating belt in existing semiconductor manufacturing process apparatuses. Therefore, when the active jet system Z of the present invention is in operation, the jet module M can receive process gas MP (e.g., harmful gas containing fine dust, e.g., waste gas, but not limited thereto) supplied from the first external working device U1. Next, the control module 2 can control the gas supply source module 1 to supply a driving airflow DA (e.g., a flow of inert gas, but not limited thereto) to the jet module M. At this time, the driving airflow DA enters the annular airflow generation chamber M11 from the airflow introduction section M4, passes through the feather-shaped section covering area M112a and the shoulder section area M112b in order, generates a swirling flow (i.e., flows in a vortex-like manner within the annular airflow generation chamber M11) in the annular airflow generation chamber M11, and is injected from the nozzle section M111 into the transport chamber M10. The nozzle section M111 injects the drive airflow DA into the transport chamber M10 along a predetermined path PR (i.e., a specific injection direction, a predetermined injection direction), and the drive airflow DA forms a push airflow PA. The push airflow PA may be an annular airflow.

[0020] Next, when the push airflow PA is injected into the inside of the transport chamber M10, the push airflow PA flows toward the gas output part M3 along a predetermined path PR (that is, a predetermined injection direction). At the same time, the push airflow PA entrains and sucks the process gas MP introduced from the gas input part M2, combines with the process gas MP to form a strong and stable airflow, and flows toward the gas output part M3. Finally, the push airflow PA completely propels the process gas MP and sends it into the second external working device U2, so that the dust contained in the process gas MP does not remain in the external pipe EP.

[0021] Note that the control module 2 of the present invention can control the gas supply source module 1 based on a built-in program or manual operation, and continuously supply the driving airflow DA to the jet module M. Alternatively, the gas supply source module 1 can be controlled to supply the driving airflow DA to the jet module M in an intermittent gas supply mode (for example, a mode of supplying gas every 5 seconds, but not limited to this). And the flow rate range of the push airflow PA generated by the jet module M is 1 SLM to 600 SLM.

[0022] In this way, through the above technical means, the active jet system Z of the present invention provides an active annular airflow by installing the jet module M, the gas supply source module 1 and the control module 2 between the first external working device U1 and the second external working device U2. Also, by generating the push airflow PA by the jet module M and completely flowing the process gas MP to the second external working device U2, the dust contained in the process gas MP can be prevented from remaining in the external pipe EP. At the same time, the active jet system Z of the present invention replaces the method of using a heating belt to heat the pipe to eliminate pipe blockage in the conventional semiconductor manufacturing process, thereby greatly reducing the manufacturing cost and the equipment maintenance cost.

[0023] Furthermore, based on the above, and with reference to Figures 1 to 4, the present invention further provides a jet module M. The jet module M has a device body M1, and the device body M1 may be equipped with a transport chamber M10 and an annular airflow generation chamber M11 inside. The device body M1 may be equipped with a gas input section M2 at one end and a gas output section M3 at the other end. In addition, an outward-extending airflow introduction section M4 is formed on the side surface of the device body M1. The transport chamber M10, the gas input section M2 and the gas output section M3 are in communication with each other, and the transport chamber M10, the annular airflow generation chamber M11 and the airflow introduction section M4 can be in communication with each other. The gas input section M2 is configured to be connected to a first external working device U1, and the gas output section M3 is configured to be connected to a second external working device U2. The airflow introduction section M4 is configured to be connected to an external gas source device U3 (which may be the same as the gas supply source module 1, for example, a gas supply device in a semiconductor device that supplies general air or a special gas (for example, an inert gas, but not limited to it)). The annular airflow generation chamber M11 includes a side connection section M110 and at least one nozzle section M111, which are in communication with each other. The side connection section M110 is connected to the airflow introduction section M4, and at least one nozzle section M111 is connected to the transport chamber M10. At least one nozzle section M111 is configured to generate a push airflow PA toward the transport chamber M10 via a predetermined path PR, and there is a predetermined angle PG between the predetermined path PR and the central axis CA of the device body M1. The predetermined angle PG is between 0 and 89 degrees.

[0024] However, the above examples are merely one embodiment and do not limit the present invention.

[0025] [Second Embodiment] Please refer to Figures 5 and 6. These are schematic structural diagrams and functional block diagrams of the active jet system in the second embodiment of the present invention. Please also refer to Figures 1 to 4. The active jet system Z of this embodiment is substantially similar to the active jet system Z of the previously described embodiment, so the same components will not be described in detail here. The main difference between this embodiment and the first embodiment is that in this embodiment, the active jet system Z further comprises multiple jet modules Ma, Mb, and Mc. Of these, the gas input section M2 of jet module Ma is connected to the first external working device U1, and the gas output section M3 of jet module Mb is connected to the gas input section M2 of another jet module Ma. Furthermore, the gas output section M3 of jet module Mc is connected to the second external working device U2. The airflow introduction sections M4 of the multiple jet modules Ma, Mb, and Mc are connected to at least one gas supply source module 1.

[0026] For example, referring to Figures 3 to 6, the active jet system Z can have multiple jet modules Ma, Mb, and Mc installed at equal or unequal intervals between the first external working device U1 and the second external working device U2. Each jet module Ma, Mb, and Mc may be individually connected to the gas supply source module 1, or multiple jet modules Ma, Mb, and Mc may be connected to the same gas supply source module 1. Therefore, if the distance between the first external working device U1 and the second external working device U2 is too long (i.e., the length of the external pipe EP is long), or if the external pipe EP installed between the first external working device U1 and the second external working device U2 is not a straight pipe but consists of straight and curved pipes, jet modules M can be installed at different positions along the piping path of the external pipe EP.

[0027] Next, the control module 2 is used to control the mode in which the gas supply module 1 supplies the drive airflow DA (e.g., a continuous mode or an intermittent mode), enabling the multiple jet modules Ma, Mb, and Mc to completely transport the process gas MP from the first external working device U1 to the second external working device U2 in a relay manner.

[0028] Furthermore, control module 2 can first control the gas supply source module 1 corresponding to jet module Ma to supply the drive airflow DA to jet module Ma, while temporarily controlling the gas supply source modules 1 corresponding to jet modules Mb and Mc to not supply the drive airflow DA. Next, after a certain period of time (for example, an interval of 5 seconds, but not limited to this), control module 2 controls the gas supply source module 1 corresponding to jet module Mb to supply the drive airflow DA to jet module Mb, and at the same time controls the gas supply source modules 1 corresponding to jet modules Ma and Mc to temporarily not supply the drive airflow DA. At this time, the process gas MP is carried to jet module Mb by the push airflow PA generated by jet module Ma, and is then carried to jet module Mc by the push airflow PA generated by jet module Mb.

[0029] Subsequently, after a certain period of time (for example, an interval of 5 seconds, but not limited to this), control module 2 controls gas supply source module 1 corresponding to jet module Mc to supply the drive airflow DA to jet module Mc, and at the same time controls gas supply source modules 1 corresponding to jet modules Ma and Mb to temporarily not supply the drive airflow DA. At this time, process gas MP is carried to jet module Mc by the push airflow PA generated by jet module Mb, and is therefore carried to the second external working device U2 by the push airflow PA generated by jet module Mc.

[0030] However, control module 2 controls gas source module 1 corresponding to jet modules Ma, Mb, and Mc, and can continuously supply drive airflow DA to all of these jet modules Ma, Mb, and Mc. As a result, jet modules Ma, Mb, and Mc can simultaneously generate push airflow PA, which can transport process gas MP supplied from the first external working device U1 to the second external working device U2.

[0031] Of particular note is that in the active jet system Z of the present invention, the flow rate range of the push airflow PA generated by the jet modules Ma, Mb, and Mc is 1 SLM to 600 SLM.

[0032] The above example is merely one embodiment and does not limit the present invention.

[0033] [Beneficial effects of the embodiment] One of the beneficial effects of the present invention is that the jet module M and active jet system Z provided by the present invention can replace conventional pipe heating belts through the above-described technical means, and can effectively solve the problem of pipe clogging.

[0034] Furthermore, the active jet system Z of the present invention can provide an active annular airflow by utilizing the above-described technical means and installing a jet module M, a gas supply source module 1, and a control module 2 between a first external working device U1 and a second external working device U2. The jet module M generates a push airflow PA in a specific direction along a predetermined path PR, allowing the process gas MP to flow completely to the second external working device U2, preventing dust contained in the process gas MP from remaining in the external pipe EP, and solving the pipe clogging problem in the semiconductor industry. In addition, it does not require an additional power supply and serves as an alternative to the current method of resolving pipe clogging by heating the pipe with a heating belt used in semiconductor manufacturing processes. In the future, heating belts will no longer be necessary in pipelines, making it possible to significantly reduce manufacturing costs and equipment maintenance costs.

[0035] The information disclosed above represents only preferred embodiments of the present invention and does not limit the scope of the claims. Therefore, all equivalent technical modifications made based on the specifications and accompanying drawings of the present invention are included within the scope of the claims. [Explanation of Symbols]

[0036] Z Active Jet System M, Ma, Mb, Mc Jet Modules M1 Main unit M10 Conveyor Chamber M11 Annular Airflow Generation Chamber M110 Side Connection Section M111 Nozzle M112 Main Chamber Section M112a Pinnate area M112b Shoulder area M2 Gas Input Section M3 Gas Output Section M4 Airflow Inlet 1. Gas supply source module 10 connecting pipes 2 Control Module U1 First external work device U2 Second External Work Device U3 External gas source device CA center axis DA drive airflow MP process gas PA Push Airflow PG Predetermined angle PR designated route TG Predetermined tilt angle EP external pipe

Claims

1. A jet module having a device body, The main body of the device is equipped with a transport chamber and an annular airflow generation chamber, one end of the main body of the device is equipped with a gas input section, the other end is equipped with a gas output section, an outwardly extending airflow introduction section is formed on the side of the main body of the device, the transport chamber, the gas input section and the gas output section are in communication with each other, and the transport chamber, the annular airflow generation chamber and the airflow introduction section are in communication with each other. The gas input section is configured to be connected to a first external work device, the gas output section is configured to be connected to a second external work device, and the airflow introduction section is configured to be connected to an external gas source device. The annular airflow generating chamber has a side connection portion and at least one nozzle portion, the side connection portion and the at least one nozzle portion are in communication with each other, the side connection portion is connected to the airflow introduction portion, the at least one nozzle portion is connected to the transport chamber, the at least one nozzle portion is configured to generate a push airflow toward the transport chamber via a predetermined path, there is a predetermined angle between the predetermined path and the central axis of the device body, and the predetermined angle is between 0 and 10 degrees. When the airflow introduction unit receives a drive airflow provided from the external gas source device and the gas input unit receives a process gas provided from the first external work device, the annular airflow generation chamber generates the push airflow toward the transport chamber via the at least one nozzle unit, thereby causing the push airflow to flow toward the gas output unit. The aforementioned push airflow is an annular airflow, The transport chamber is located in the center of the main body of the apparatus, and the annular airflow generation chamber surrounds the transport chamber. The flow rate range of the push airflow generated by the jet module is 1 SLM to 600 SLM. A jet module characterized by the following features.

2. The jet module according to claim 1, wherein the cross-section of the annular airflow generating chamber is feather-shaped, the annular airflow generating chamber further has a main chamber portion, the main chamber portion has a feather-shaped covering area and a shoulder area, the feather-shaped covering area connects the side connection portion and the shoulder area, the shoulder area is connected to the at least one nozzle portion, the cross-section of the feather-shaped covering area is conical, and the cross-section of the shoulder area is C-shaped or hook-shaped, and when the airflow introduction portion receives a drive airflow provided from the external gas source device, the annular airflow generating chamber introduces the drive airflow into the feather-shaped covering area via the side connection portion, the drive airflow passes sequentially through the feather-shaped covering area and the shoulder area, flows through the at least one nozzle portion via the predetermined path to the transport chamber, and forms the push airflow.

3. A jet module having a device body, the device body having a transport chamber and an annular airflow generation chamber inside, the device body having a gas input section at one end and a gas output section at the other end, an outwardly extending airflow introduction section formed on the side of the device body, the transport chamber, the gas input section and the gas output section being in communication with each other, and the transport chamber, the annular airflow generation chamber and the airflow introduction section being in communication with each other, at least one jet module, At least one gas supply source module connected to the airflow introduction section, A control module connected to the gas supply source module and configured to control the gas supply source module to supply a drive airflow to the jet module in continuous or intermittent mode, An active jet system comprising, The gas input section is configured to be connected to a first external work device, the gas output section is configured to be connected to a second external work device, and the airflow introduction section is configured to be connected to an external gas source device. The annular airflow generating chamber has a side connection portion and at least one nozzle portion, the side connection portion and the at least one nozzle portion are in communication with each other, the side connection portion is connected to the airflow introduction portion, the at least one nozzle portion is connected to the transport chamber, the at least one nozzle portion is configured to generate a push airflow toward the transport chamber via a predetermined path, there is a predetermined angle between the predetermined path and the central axis of the device body, and the predetermined angle is between 0 and 10 degrees. When the airflow introduction unit receives a drive airflow provided from the external gas source device and the gas input unit receives a process gas provided from the first external work device, the annular airflow generation chamber generates the push airflow toward the transport chamber via the at least one nozzle unit, thereby causing the push airflow to flow toward the gas output unit. The aforementioned push airflow is an annular airflow, The transport chamber is located in the center of the main body of the apparatus, and the annular airflow generation chamber surrounds the transport chamber. The flow rate range of the push airflow generated by the jet module is 1 SLM to 600 SLM. An active jet system characterized by the following features.

4. The active jet system according to claim 3, further comprising a plurality of jet modules, wherein the gas input section of one of the jet modules is connected to the first external working device, the gas output section of one of the jet modules is connected to the gas input section of another jet module, the gas output section of another jet module is connected to the second external working device, and the airflow introduction sections of the plurality of jet modules are connected to the at least one gas supply source module.

5. The active jet system according to claim 3, wherein the cross section of the annular airflow generating chamber is feather-shaped, the annular airflow generating chamber further has a main chamber section, the main chamber section has a feather-shaped covering area and a shoulder area, the feather-shaped covering area connects the side connection section and the shoulder area, the shoulder area is connected to the at least one nozzle section, the cross section of the feather-shaped covering area is conical, the cross section of the shoulder area is C-shaped or hook-shaped, and when the airflow introduction section receives a drive airflow provided from the at least one gas supply source module, the annular airflow generating chamber introduces the drive airflow into the feather-shaped covering area via the side connection section, the drive airflow passes sequentially through the feather-shaped covering area and the shoulder area, flows through the at least one nozzle section to the transport chamber via the predetermined path, and forms the push airflow.

Images