Control support device and control support method

Abstract

To provide a control support device and a control support method that can reduce effort to determine the value of a control parameter of a component of a substrate processing device.SOLUTION: A control support device comprises: a correspondence relationship acquisition unit that acquires the correspondence relationship between a plurality of parameter values and a plurality of pieces of model identification information for identifying each of a plurality of determination models that each determine the degree of normality of the operation of a component from processing information indicating the operation or state related to processing of a substrate performed by a substrate processing device; an information acquisition unit that acquires the model identification information corresponding to a determination model, of the plurality of determination models, which can obtain an appropriate determination result from the processing information during the operation of the component; and a determination unit that determines a parameter value for controlling the component based on the correspondence relationship acquired by the correspondence relationship acquisition unit and the model identification information acquired by the information acquisition unit.SELECTED DRAWING: Figure 7

Description

Technical Field

[0001] The present invention relates to a control support device and a control support method.

Background Art

[0002] A substrate processing apparatus for processing a substrate such as a semiconductor substrate (semiconductor wafer) is composed of various components (devices or parts, etc.). In Patent Documents 1 and 2, a needle valve is used as a component to adjust the flow rate of a processing liquid supplied to a substrate processing unit in a substrate processing apparatus. In the needle valve, the flow rate of the processing liquid is adjusted by controlling an actuator.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] Generally, even for components of the same type, their characteristics vary due to individual differences. Therefore, in order to operate the substrate processing apparatus normally, it is necessary to determine the values of control parameters for controlling each component. The determination of the values of control parameters for each component is performed by an engineer. In this case, the engineer needs to repeatedly fine-tune the values of the control parameters for each component and for each processing recipe (processing procedure) by the teaching operation of the substrate processing apparatus in order to determine the values of the control parameters. These operations take a great deal of time.

[0005] The object of the present invention is to provide a control support device and a control support method that can reduce the effort required to determine the values ​​of control parameters of components of a substrate processing device. [Means for solving the problem]

[0006] (1) A control support device for determining parameter values ​​which are values ​​of control parameters for controlling components in a substrate processing device, comprising: a plurality of model identification information which identifies a plurality of judgment models which each determine the normality of the operation of the component from processing information which indicates the operation or state related to the processing of the substrate of the substrate processing device; a correspondence acquisition unit which acquires the correspondence between the plurality of parameter values; and a unit which determines the highest normality among the plurality of judgment results of the plurality of judgment models from the processing information when the component is operating. Appropriate The system includes an information acquisition unit that acquires model identification information corresponding to a judgment model capable of obtaining a judgment result, and a determination unit that determines the parameter values ​​for controlling the component based on the correspondence relationship acquired by the correspondence relationship acquisition unit and the model identification information acquired by the information acquisition unit, wherein the judgment model is a learning model that determines the normality of the operation of the component based on the degree of deviation between the predicted processing information and the processing information actually acquired. Furthermore, the control support device for determining parameter values, which are values ​​of control parameters for controlling components in a substrate processing apparatus, comprises: a plurality of model identification information that identifies a plurality of judgment models that each determine the normality of the operation of the component from processing information that indicates the operation or state related to the processing of the substrate of the substrate processing apparatus; a correspondence relationship acquisition unit that acquires the correspondence relationship with a plurality of parameter values; an information acquisition unit that acquires model identification information corresponding to a judgment model among the plurality of judgment models that can obtain an appropriate judgment result from the processing information when the component is operating; and a determination unit that determines the parameter values ​​for controlling the component based on the correspondence relationship acquired by the correspondence relationship acquisition unit and the model identification information acquired by the information acquisition unit, wherein each of the plurality of judgment models determines the normality of the component based on the invariant relationship between the plurality of processing information that indicates the operation or state related to the processing of the substrate of the substrate processing apparatus and the plurality of processing information actually collected from the substrate processing apparatus.

[0007] According to this control support device, the components of the substrate processing device are controlled based on parameter values. At this time, the normality of the components is determined from the processing information of the substrate processing device by multiple judgment models. Multiple model identification information and multiple parameter values ​​are pre-associated. The correspondence between the multiple model identification information and multiple parameter values ​​is acquired by the correspondence acquisition unit. In addition, model identification information corresponding to the judgment model that can obtain an appropriate judgment result is acquired from the processing information during the operation of the components. In this case, the judgment model that can obtain an appropriate judgment result can be identified based on the model identification information. Furthermore, the parameter value corresponding to the identified judgment model can be determined based on the correspondence. As a result, the parameter value is determined based on the acquired correspondence and the acquired model identification information. Therefore, the parameter value for controlling the components in the substrate processing device is automatically determined to an appropriate parameter value. As a result, it becomes possible to reduce the effort required to determine the control parameter values ​​of the components of the substrate processing device to appropriate values. The normality of a component is determined by multiple judgment models based on processing information during its operation, and model identification information corresponding to the judgment model that shows the highest normality is obtained. This makes it possible to quickly determine the appropriate parameter values ​​that can obtain the highest normality judgment result. Therefore, the operator's work of fine-tuning parameter values ​​is eliminated. Furthermore, according to the control support device, the normality of the operation of the components is appropriately determined based on the invariant relationships between the processing information of the substrate processing device. As a result, the acquired model identification information will indicate a judgment model that can obtain a more appropriate judgment result. Therefore, the parameter values ​​used for controlling the components can be determined to be more appropriate values.

[0010] (3) The substrate processing apparatus includes a plurality of identical components as its components, the plurality of parameter values ​​are values ​​for controlling each of the plurality of components, and the determination unit may determine the parameter values ​​for controlling each component based on the correspondence relationships obtained by the correspondence relationship acquisition unit and the model identification information obtained by the information acquisition unit.

[0011] In this case, when determining the parameter values ​​corresponding to each component, the parameter values ​​corresponding to other components can be determined as the parameter values ​​corresponding to the first component. Therefore, the parameter values ​​of multiple components can be easily determined.

[0012] (4) The system may further include a transmission unit that transmits the parameter values ​​determined by the determination unit to the substrate processing device.

[0013] In this case, parameter values ​​to be used to control the components of the substrate processing device are transmitted to the substrate processing device. This makes it possible to automatically set the parameter values ​​for controlling the components of the substrate processing device in the substrate processing device.

[0014] (5) The determination unit may determine the parameter values ​​used to control the components after installation or replacement when the substrate processing device is installed, when the substrate processing device is inspected, or when components of the substrate processing device are replaced with new components.

[0015] In this case, when installing the substrate processing device, inspecting the substrate processing device, or replacing components, the parameter values ​​used for the components after installation or replacement can be automatically and quickly determined to appropriate values.

[0016] (6) When the judgment result of the judgment model corresponding to the parameter value used to control the component is in a predetermined abnormal state during the normal operation of the substrate processing apparatus, the correspondence relationship acquisition unit may acquire the correspondence relationship, the information acquisition unit may acquire model identification information corresponding to the judgment model capable of obtaining the appropriate judgment result, and the determination unit may determine the parameter value to be newly used to control the component based on the correspondence relationship acquired by the correspondence relationship acquisition unit and the model identification information acquired by the information acquisition unit.

[0017] As the characteristics of the components of a substrate processing device change over time, the parameter values ​​used to control those components may become inappropriate. In such cases, the judgment results of the judgment model corresponding to those parameter values ​​may indicate an abnormal state. In such situations, the new parameter values ​​to be used to control the components can be determined automatically and quickly. As a result, it becomes possible to continue using the components.

[0020] (8) The system further comprises a storage unit for storing the correspondence relationships, wherein the correspondence relationship acquisition unit acquires the correspondence relationships stored by the storage unit, and the determination unit determines the parameter values ​​for controlling the components using the correspondence relationships stored in the correspondence relationship acquisition unit.

[0021] In this case, multiple correspondences are stored after the parameter values ​​are determined. This eliminates the need to provide a configuration to store the correspondences outside the control support device.

[0022] (9) The components include a valve related to the processing of the substrate, and the control parameters may be used to control the valve.

[0023] In this case, it becomes possible to quickly determine the appropriate values ​​for the control parameters used to control the valve. This enables precise control of the fluid in the substrate processing apparatus.

[0024] (10) The valve includes a needle and a motor and is a needle valve for adjusting the flow rate of a liquid related to substrate processing, and the parameter value may be a value related to the operation of at least one of the needle and the motor.

[0025] In this case, it becomes possible to determine the value of the control parameter related to the operation of the needle valve to an appropriate value in a short time. Thereby, it becomes possible to accurately execute the flow rate control in the substrate processing apparatus.

[0026] (11) The substrate processing apparatus includes a chamber in which substrate processing is performed, the component includes an air supply and exhaust unit for performing air supply and exhaust in the chamber, and the parameter value may be a value related to the operation of at least one of the air supply and the exhaust.

[0027] In this case, it becomes possible to determine the parameter value related to at least one of the air supply and the exhaust in the chamber of the substrate processing apparatus to an appropriate value in a short time. Thereby, it becomes possible to accurately execute the airflow control in the chamber.

[0028] (12) The control parameter includes a first parameter corresponding to the air supply and a second parameter corresponding to the exhaust, the parameter value of the first parameter is a value related to the operation of the air supply, and the parameter value of the second parameter may be a value related to the operation of the exhaust.

[0029] In this case, it becomes possible to determine at least one of the parameter values of the first and second parameters related to the air supply and the exhaust in the chamber of the substrate processing apparatus to an appropriate value in a short time. Thereby, it becomes possible to accurately execute the air supply and exhaust control in the chamber.

[0030] (13) A control support method for determining parameter values ​​which are values ​​of control parameters for controlling components in a substrate processing apparatus, comprising the steps of obtaining a correspondence between a plurality of model identification information which identifies a plurality of judgment models which each determine the normality of the operation of the component from processing information which indicates the operation or state related to the processing of a substrate of the substrate processing apparatus, and a plurality of parameter values, and determining the highest normality among a plurality of judgment results of the plurality of judgment models from the processing information when the component is operating Appropriate The process includes the steps of obtaining model identification information corresponding to a judgment model capable of obtaining a judgment result, and determining the parameter values ​​for controlling the component based on the obtained correspondence and the obtained model identification information, wherein the judgment model is a learning model that determines the normality of the operation of the component based on the degree of deviation between the predicted processing information and the processing information actually obtained. Furthermore, the control support method for determining parameter values, which are values ​​of control parameters for controlling components in a substrate processing apparatus, includes the steps of: obtaining a correspondence between a plurality of model identification information, each of which identifies a plurality of judgment models that determine the normality of the operation of the component from processing information indicating the operation or state related to the processing of the substrate of the substrate processing apparatus, and a plurality of parameter values; obtaining model identification information corresponding to a judgment model among the plurality of judgment models that can obtain an appropriate judgment result from the processing information when the component is operating; and determining the parameter values ​​for controlling the component based on the obtained correspondence and the obtained model identification information, wherein each of the plurality of judgment models determines the normality of the component based on the invariant relationship between the plurality of processing information indicating the operation or state related to the processing of the substrate of the substrate processing apparatus and the plurality of processing information actually collected from the substrate processing apparatus.

[0031] This control support method allows for the identification of a judgment model capable of obtaining an appropriate judgment result based on model identification information. Furthermore, it allows for the determination of parameter values ​​corresponding to the identified judgment model based on the correspondence. Thus, parameter values ​​are determined based on the acquired correspondence and model identification information. Consequently, the parameter values ​​for controlling the components of the substrate processing apparatus are automatically determined to appropriate values. As a result, the effort required to determine the appropriate values ​​for the control parameters of the components of the substrate processing apparatus is reduced. The normality of a component is determined by multiple judgment models based on processing information during its operation, and model identification information corresponding to the judgment model that shows the highest normality is obtained. This makes it possible to quickly determine the appropriate parameter values ​​that can obtain the highest normality judgment result. Therefore, the operator's work of fine-tuning parameter values ​​is eliminated. Furthermore, according to this control support method, the normality of the operation of the components is appropriately determined based on the invariant relationships between the processing information of the substrate processing device. As a result, the acquired model identification information will indicate a judgment model that can obtain more appropriate judgment results. Therefore, the parameter values ​​used for controlling the components can be determined to be more appropriate values. [Effects of the Invention]

[0032] According to the present invention, it becomes possible to reduce the effort required to determine the values ​​of control parameters for the components of a substrate processing apparatus. [Brief explanation of the drawing]

[0033] [Figure 1] This is a diagram illustrating the configuration of a substrate processing system including a control support device according to one embodiment. [Figure 2] This diagram illustrates a specific example of how to calculate the degree of deviation. [Figure 3] This diagram illustrates a specific example of how to calculate an anomaly score. [Figure 4] This is a conceptual diagram illustrating the operation of the substrate processing device, information analysis device, and control support device during learning and appropriate parameter value update operations. [Figure 5] This is a conceptual diagram to explain multiple decision models. [Figure 6] This is a conceptual diagram illustrating the correspondence between the judgment model number and the parameter values. [Figure 7] This block diagram primarily illustrates the functional configuration of the information analysis device and control support device shown in Figure 1. [Figure 8]This flowchart shows an example of the operation of the control unit of the substrate processing device during the learning process. [Figure 9] This flowchart shows an example of how an information analysis device operates during a learning process. [Figure 10] This flowchart shows an example of the operation of a control support device during learning. [Figure 11] This flowchart shows an example of the operation of the substrate processing device during the process of updating appropriate parameter values. [Figure 12] This flowchart shows an example of the operation of the information analysis device during the process of updating appropriate parameter values. [Figure 13] This flowchart shows an example of the operation of the control support device during the process of updating appropriate parameter values. [Figure 14] This is a schematic diagram illustrating a substrate processing system including a substrate processing apparatus according to another embodiment. [Modes for carrying out the invention]

[0034] Hereinafter, a control support device and a control support method according to one embodiment of the present invention will be described in detail with reference to the drawings. In the following description, "substrate" refers to semiconductor substrates (semiconductor wafers), substrates for FPDs (Flat Panel Displays) such as liquid crystal display devices or organic EL (Electro Luminescence) display devices, substrates for optical discs, substrates for magnetic discs, substrates for magneto-optical discs, substrates for photomasks, ceramic substrates, or substrates for solar cells.

[0035] (1) Overall structure Figure 1 is a diagram illustrating the configuration of a substrate processing system including a control support device according to one embodiment. The substrate processing system 100 in Figure 1 includes a substrate processing device 1, an information analysis device 3, and a control support device 4. The control support device 4 is connected to the substrate processing device 1 and the information analysis device 3. The control support device 4 is connected to each of the substrate processing device 1 and the information analysis device 3 by a wired or wireless communication path or communication network. For example, the control support device 4 is connected to each of the substrate processing device 1 and the information analysis device 3 via a communication network such as the Internet. In this embodiment, the control support device 4 is connected to the substrate processing device 1 and the information analysis device 3 by a wired or wireless LAN (Local Area Network).

[0036] (2) Example of the configuration of the substrate processing apparatus 1 In the example shown in Figure 1, the substrate processing apparatus 1 comprises a control device 40 and a plurality of substrate processing units WU. Each substrate processing unit WU has a spin chuck SC for holding and rotating a substrate W. The substrate processing units WU include, for example, a substrate cleaning unit, a photosensitive film forming unit, a peripheral exposure unit, and a developing unit. In the substrate processing units, for example, the substrate W is cleaned by supplying a cleaning solution to the substrate W. The substrate processing apparatus 1 includes various components (equipment or parts, etc.) that constitute the substrate processing apparatus 1. For example, the substrate processing apparatus 1 includes a flow meter FM, a pressure gauge PM, a discharge valve DV, and a flow control valve MV as components for introducing various processing solutions into each substrate processing unit WU. In addition to the above-mentioned plurality of components, the substrate processing apparatus 1 is also provided with a display device, an audio output device, and an operating unit (not shown). The substrate processing apparatus 1 is operated according to a predetermined processing procedure (processing recipe) of the substrate processing apparatus 1.

[0037] The flow meter FM measures the flow rate of the processing liquid flowing through the processing liquid channel RP (hereinafter referred to as the control flow rate value). The pressure gauge PM measures the pressure value within the processing liquid channel RP (hereinafter referred to as the primary pressure). The discharge valve DV opens and closes to supply the processing liquid in the processing liquid channel RP to the substrate processing unit WU. In this embodiment, the flow rate adjustment valve MV is a motor needle valve. This flow rate adjustment valve MV includes a motor and a needle, and the flow rate is adjusted by moving the needle within the internal flow path using the motor.

[0038] In this embodiment, the control device 40 controls the power supplied to the motor of the flow rate adjustment valve MV using PID (proportional-integral-derivative) control based on the difference between a control flow rate value and a predetermined flow rate value (hereinafter referred to as the target flow rate value) in order to adjust the flow rate of the processing liquid in the processing liquid flow path RP. As a result, the processing liquid at the target flow rate value is supplied to the substrate processing unit WU. The substrate processing apparatus 1 in Figure 1 is provided with multiple flow meters FM, multiple pressure meters PM, multiple flow rate adjustment valves MV, and multiple discharge valves DV of the same type, corresponding to multiple substrate processing units WU.

[0039] Here, when the control device 40 controls the components of the substrate processing apparatus 1, it controls the components using various control parameter values. The control device 40 controls the operation of each component using control parameters defined for each type of component. In this case, even components of the same type may have different characteristics due to individual differences. Therefore, appropriate control parameter values ​​are set for multiple components of the same type. Hereinafter, the control parameter values ​​will be referred to as parameter values.

[0040] For example, in each flow control valve MV in Figure 1, individual differences occur due to variations in needle shape, the starting reference position of the needle, and the pressure applied to the flow control valve MV. As a result, the characteristics of each flow control valve MV in the substrate processing apparatus 1 differ. Therefore, it is necessary to set appropriate parameter values ​​for each component. In the example in Figure 1, the control parameters used to control the flow control valve MV are P gain, I gain, D gain, the starting reference position of the needle, the control period, and the filter coefficient.

[0041] (3) Processing information The substrate processing apparatus 1 is configured with a plurality of processing information that indicates operations or states related to the processing of the substrate W in the substrate processing apparatus 1, as information for managing abnormalities in the components of the substrate processing apparatus 1. In this embodiment, this processing information is transmitted from the control device 40 of the substrate processing apparatus 1 to the information analysis device 3 via the control support device 4 at predetermined intervals, as shown by the thick solid arrows in Figure 1.

[0042] As shown in the outlet in Figure 1, the processing information transmitted from the substrate processing device 1 to the information analysis device 3 via the control support device 4 includes "a. current needle position", "b. target flow rate value", "c. control flow rate value", "d. primary side pressure", and "e. opening and closing timing of discharge valve DV". In this example, processing information related to one component, the flow rate adjustment valve MV, is shown.

[0043] "a. Needle current position" indicates the current position of the needle within the internal flow path of the flow control valve MV. "b. Target flow rate value" is the flow rate value of the processed liquid that should be discharged from the flow control valve MV according to a predetermined processing procedure (processing recipe). "c. Control flow rate value" is the flow rate value of the processed liquid in the processed liquid flow path RP measured by the flow meter FM. "d. Primary side pressure" is the pressure value in the processed liquid flow path RP measured by the pressure gauge PM. "e. Discharge valve DV opening / closing timing" is a value indicating the opening and closing timing of the discharge valve DV.

[0044] (4) Detection of abnormalities in each component by the information analysis device 3 (detection of normality) The information analysis device 3 is, for example, a server and includes a CPU (Central Processing Unit) and memory. The information analysis device 3 collects multiple processing information transmitted from the substrate processing device 1. In the information analysis device 3, multiple combinations of two different processing information are predetermined for the multiple processing information transmitted from the substrate processing device 1 to the information analysis device 3.

[0045] At this time, a predetermined invariant relationship (hereinafter referred to as the invariant relationship) is maintained between the two processing information components that make up each combination. The invariant relationship is set for each predetermined processing procedure (processing recipe) of the substrate processing device 1.

[0046] Here, we assume a scenario where inappropriate substrate processing is performed because a malfunction occurs in any component of the substrate processing apparatus 1. In this case, the relationship between two processing information components that constitute at least one of the multiple combinations deviates from an invariant relationship.

[0047] Therefore, the information analysis device 3 calculates multiple deviation degrees, which represent the degree of discrepancy between the relationships between multiple combinations of the multiple processing information actually collected and the multiple invariant relationships predetermined for those multiple processing information. Furthermore, based on the calculated multiple deviation degrees, the information analysis device 3 calculates the degree of abnormality of the component as an abnormality score. The abnormality score represents the normality of the operation of the component. That is, a low abnormality score indicates a high degree of normality of the operation of the component, and a high abnormality score indicates a low degree of normality of the operation of the component. A specific example of how to calculate the abnormality score will be described later.

[0048] Furthermore, the anomaly score changes depending on the parameter values ​​set for each component. When the parameter values ​​set for each component are appropriate, the normality of the operation of that component increases, and the anomaly score decreases. Conversely, when the parameter values ​​set for each component are inappropriate, the normality of the operation of that component decreases, and the anomaly score increases. As will be explained below, in this embodiment, the anomaly score can be used to determine appropriate parameter values.

[0049] (5) Example of calculating an anomaly score using the information analysis device 3 As described above, the information analysis device 3 has defined multiple combinations of two different pieces of processed information. A deviation degree is calculated for each combination in order to calculate the anomaly score of the components. Figure 2 is a diagram illustrating a specific example of deviation degree calculation. Here, we will explain an example of deviation degree calculation corresponding to the combination of "a. Needle current position" and "b. Target flow rate value" in Figure 1. In the following explanation, the data for "a. Needle current position" will be referred to as "a" data as appropriate, and the data for "b. Target flow rate value" will be referred to as "b" data as appropriate.

[0050] To calculate the degree of deviation, reference data based on the invariant relationship between "a. current needle position" and "b. target flow rate value" is required. Therefore, the information analysis device 3 stores "a" data and "b" data when the components of the substrate processing device 1 (in this example, the flow rate adjustment valve MV) are operating ideally according to a predetermined processing recipe before the actual processing of the substrate W in the substrate processing device 1.

[0051] These ideal "a" and "b" data are obtained, for example, based on multiple processing information transmitted from the substrate processing device 1 when the substrate processing device 1 is actually operating normally. Alternatively, the ideal "a" and "b" data may be generated by simulation or the like.

[0052] At the top of Figure 2, a graph shows an example of the temporal changes in ideal "a" and "b" data. In the "a" data graph, the horizontal axis represents time, and the vertical axis represents the current position of the needle. In the "b" data graph, the horizontal axis represents time, and the vertical axis represents the flow rate of the processing liquid in the processing liquid channel RP. The horizontal axis (time axis) is common to both the "a" data graph and the "b" data graph.

[0053] As can be seen from the two graphs at the top of Figure 2, as the value of the current position of the needle increases, the value of the flow rate of the processing liquid in the processing liquid channel RP also increases at a nearly constant rate. In other words, there is an invariant relationship between the current position of the needle and the value of the flow rate of the processing liquid in the processing liquid channel RP. When the substrate processing apparatus 1 operates ideally, the relationship in each combination of multiple processing information is equal to an invariant relationship.

[0054] The information analysis device 3 creates invariant relationships for each combination of the multiple processing information (the "a" to "e" data mentioned above). In this embodiment, an invariant relationship is created for each component of the substrate processing device 1 (Figure 1).

[0055] In this state, the substrate W is processed in the substrate processing apparatus 1, and the actual "a" data and "b" data are collected by the information analysis apparatus 3. In the center of Figure 2, an example of the temporal changes in the actually collected "a" data and "b" data is shown in a graph.

[0056] When actual "a" data is collected, "b" data is predicted based on pre-stored invariant relationships. Similarly, when actual "b" data is collected, "a" data is predicted based on pre-stored invariant relationships. The lower part of Figure 2 shows a graph illustrating an example of the temporal changes in "a" and "b" data predicted based on invariant relationships. In the graph at the bottom of Figure 2, the predicted "a" and "b" data are shown as solid lines, while the actually collected "a" and "b" data are shown as dotted lines.

[0057] When the flow control valve MV is operating ideally, the actual "a" data and the predicted "a" data will match or nearly match. Similarly, the actual "b" data and the predicted "b" data will match or nearly match. However, if there is a malfunction in the flow control valve MV, there is a high probability that the actual "a" data and the predicted "a" data will diverge. Similarly, there is a high probability that the actual "b" data and the predicted "b" data will diverge. The degree of this divergence is considered to be greater the greater the degree of the malfunction in the flow control valve MV, and smaller the less severe the malfunction in the flow control valve MV.

[0058] Therefore, in this embodiment, the difference between the data that is actually collected as processing information and the data that is predicted as processing information is calculated as the degree of deviation. In the example in Figure 2, the information analysis device 3 calculates the degree of deviation as the difference between the actual "a" data and the predicted "a" data when calculating the degree of deviation at a certain point in time. The information analysis device 3 also calculates the degree of deviation as the difference between the actual "b" data and the predicted "b" data.

[0059] Figure 3 is a diagram illustrating a specific example of calculating an anomaly score. The information analysis device 3 calculates the above deviation for all combinations of multiple processing information. The multiple values ​​in the rows to the right of each of the processing information "a" to "e" in the left vertical column of Figure 3 represent the deviation between the processing information predicted from each of the processing information "a" to "e" in the upper horizontal column and the processing information actually obtained. The multiple values ​​in the columns below each of the processing information "a" to "e" in the upper horizontal column of Figure 3 represent the deviation between the processing information predicted from each of the "a" to "e" in the left vertical column and the processing information actually obtained.

[0060] For example, the value "35" in the column at the intersection of the rightmost row of processing information "a" in the left vertical column and the lowermost column of processing information "b" in the upper horizontal column represents the degree of discrepancy between the processing information "a" predicted from processing information "b" and the processing information "a" actually obtained. Similarly, the value "21" in the column at the intersection of the rightmost row of processing information "b" in the left vertical column and the lowermost column of processing information "a" in the upper horizontal column represents the degree of discrepancy between the processing information "b" predicted from processing information "a" and the processing information "b" actually obtained.

[0061] Figure 3 shows multiple deviations calculated for all combinations of processing information related to a single component. Once all deviations have been calculated, the information analysis device 3 calculates the sum of the calculated deviations as the anomaly score corresponding to that component. In the example in Figure 3, the anomaly score is 161.

[0062] In this embodiment, the information analysis device 3 generates and updates a judgment model by machine learning to determine the normality of the operation of a component based on the degree of discrepancy between the predicted processing information and the actually acquired processing information for each component, as described above. As a result, the information analysis device 3 generates and updates multiple judgment models corresponding to multiple identical components of the substrate processing device 1 (for example, multiple flow control valves MV). In this embodiment, the judgment result of the normality of the operation of the component corresponding to each judgment model is calculated as an abnormality score.

[0063] In this embodiment, the parameter values ​​to be set for one or more components are determined based on the anomaly scores calculated by multiple judgment models. Hereinafter, the operation of generating multiple judgment models using machine learning will be referred to as the learning operation. The operation of updating (fine-tuning) the parameter values ​​set for each component will be referred to as the appropriate parameter value update operation.

[0064] (6) Learning behavior Figure 4 is a conceptual diagram illustrating the operation of the substrate processing device 1, information analysis device 3, and control support device 4 during the learning operation and the appropriate parameter value update operation. Figure 5 is a conceptual diagram illustrating multiple decision models. Figure 6 is a conceptual diagram illustrating the correspondence between decision model numbers and parameter values.

[0065] In the example shown in Figure 4, the parameter values ​​PR1, PR2, ..., PRn of multiple identical components C1, C2, ..., Cn of the substrate processing apparatus 1 are set in the memory unit ME. Here, n is an integer greater than or equal to 2.

[0066] When a command is issued to start the learning operation, the control device 40 of the substrate processing device 1 controls the operation of multiple components C1 to Cn based on the parameter values ​​PR1 to PRn set in the memory unit ME. As a result, multiple processing information PI1, PI2, ..., PIn corresponding to each of the multiple components C1 to Cn is transmitted from the substrate processing device 1 to the information analysis device 3. Each of the multiple processing information PI1 to PIn contains one or more processing information. For example, if the multiple components C1 to Cn are multiple flow control valves MV, then multiple processing information "a" to "e" corresponding to each flow control valve MV is transmitted to the information analysis device 3.

[0067] The judgment model generation unit 32 of the information analysis device 3 generates multiple judgment models MD1, MD2, ..., MDn corresponding to multiple constituent elements C1 to Cn using machine learning based on the multiple processing information PI1 to PIn that it receives. For example, judgment models MD1 to MDn corresponding to multiple flow control valves MV in Figure 1 are generated. In this embodiment, the multiple judgment models MD1 to MDn are assigned judgment model numbers M1 to Mn as model identification information to identify each judgment model.

[0068] Figure 5 shows examples of two decision models, MD1 and MD2. In decision models MD1 and MD2, the functions that represent the relationship between changes in each processing information and changes in other processing information are different. For example, in decision model MD1, processing information "a" is represented by function f1, where processing information "b" is the variable. Also, processing information "b" is represented by function g1, where processing information "a" is the variable. On the other hand, in decision model MD2, processing information "a" is represented by function f2, where processing information "b" is the variable. Also, processing information "b" is represented by function g2, where processing information "a" is the variable.

[0069] As shown in Figure 4, multiple judgment models MD1 to MDn calculate anomaly scores AS1 to ASn as judgment results based on multiple processing information PI1 to PIn, using the method described in Figures 2 and 3.

[0070] As shown in Figure 4, the control support device 4 receives multiple parameter values ​​PR1 to PRn corresponding to multiple components C1 to Cn from the substrate processing device 1, and multiple judgment model numbers M1 to Mn corresponding to multiple judgment models MD1 to MDn from the information analysis device 3. As a result, the control support device 4 stores the correspondence relationship CR between the multiple judgment model numbers M1 to Mn and the multiple parameter values ​​PR1 to PRn.

[0071] Figure 6 shows the correspondence for one of the flow control valves MV in Figure 1. In the example in Figure 6, the control parameters include the control period, filter coefficient, P gain, I gain, D gain, and needle starting reference position. In the correspondence in Figure 6, multiple decision model numbers M1 to Mn are associated with the values ​​of the control period, filter coefficient, P gain, I gain, D gain, and needle starting reference position.

[0072] In this way, during the learning process, multiple decision models MD1 to MDn are generated corresponding to multiple constituent elements C1 to Cn, and a correspondence relationship CR is set between multiple decision model numbers M1 to Mn and multiple parameter values.

[0073] During normal operation of the substrate processing device 1, the control device 40 controls the operation of multiple components C1 to Cn based on parameter values ​​PR1 to PRn set in the memory unit ME. As a result, multiple processing information PI1 to PIn corresponding to each of the multiple components C1 to Cn are transmitted from the substrate processing device 1 to the information analysis device 3.

[0074] In the information analysis device 3, multiple judgment models MD1, MD2, ..., MDn generated by the learning process determine the normality of the corresponding components C1 to Cn, and calculate abnormality scores AS1 to ASn as a result of the judgment. The abnormality scores AS1 to ASn corresponding to multiple components C1 to Cn may be transmitted to the substrate processing device 1 or the control support device 4. This allows the operator to recognize whether each component C1 to Cn of the substrate processing device 1 is normal or abnormal.

[0075] (7) Operation to update appropriate parameter values Here, the same components C1 to Cn of the substrate processing apparatus 1 have different characteristics due to individual differences. Therefore, when installing (setting up) the substrate processing apparatus 1 in a factory or the like, it is necessary to set appropriate parameter values ​​for each component C1 to Cn. In the initial state, for example, default parameter values ​​are set for each component C1 to Cn of the substrate processing apparatus 1. In this state, it is necessary to update (fine-tune) the parameter values ​​for each component C1 to Cn to appropriate parameter values ​​(hereinafter referred to as appropriate parameter values). Also, due to aging, the characteristics of one of the multiple components C1 to Cn of the substrate processing apparatus 1 may deteriorate. In this case, the component with deteriorated characteristics is replaced with a new component. Due to individual differences between the component before replacement and the component after replacement, the characteristics of the component after replacement may differ from those of the component before replacement. In this case as well, it is necessary to update (fine-tune) the parameter values ​​for the component before replacement to parameter values ​​appropriate for the component after replacement.

[0076] This example describes the process of updating (fine-tuning) the parameter value PR1 for controlling component C1 of the substrate processing apparatus 1 to an appropriate parameter value. This appropriate parameter value update operation is performed when the substrate processing apparatus 1 is installed, when the substrate processing apparatus 1 is inspected, or when any of the components C1 to Cn are replaced.

[0077] In the operation to update the appropriate parameter value, first, the control device 40 of the substrate processing device 1 controls the component C1 with the parameter value PR1 that has already been set for the component C1. As a result, processing information PI1 related to the component C1 is transmitted from the substrate processing device 1 to the information analysis device 3.

[0078] In the information analysis device 3, processing information PI1 related to component C1 is provided to multiple judgment models MD1 to MDn. Based on the processing information PI1, the multiple judgment models MD1 to MDn each calculate anomaly scores AS1 to ASn as judgment results using the method described with reference to Figures 2 and 3.

[0079] The minimum score determination unit 35 determines the abnormal score with the minimum value among the abnormal scores AS1 to ASn calculated by multiple determination models MD1 to MDn, and transmits the determination model number corresponding to the determination model that calculated the abnormal score with the minimum value to the control support device 4. The abnormal score with the minimum value indicates the highest degree of normality. In the example in Figure 4, the abnormal score ASn calculated by determination model MDn has the minimum value. As a result, the minimum score determination unit 35 transmits the determination model number Mn corresponding to determination model MDn to the control support device 4.

[0080] The control support device 4 determines the appropriate parameter value PRn corresponding to the judgment model number Mn obtained from the information analysis device 3 based on the correspondence relationship CR acquired during learning. The determined appropriate parameter value PRn is transmitted from the control support device 4 to the substrate processing device 1. In the substrate processing device 1, the parameter value PR1 for component C1 is updated to the appropriate parameter value PRn. Similarly, the parameter values ​​PR2 to PRn for other components C2 to Cn can be updated.

[0081] (8) Functional configuration of control support device 4 and an example of learning operation and appropriate parameter update operation Figure 7 is a block diagram primarily intended to illustrate the functional configuration of the information analysis device 3 and the control support device 4 shown in Figure 1.

[0082] In Figure 7, the substrate processing apparatus 1 includes the control device 40 shown in Figure 4. In Figure 7, the multiple components C1 to Cn and the memory unit ME shown in Figure 4 are omitted from the illustration. The information analysis apparatus 3 in Figure 7 includes an information receiving unit 31, a judgment model generation unit 32, a minimum score determination unit 35, a judgment model memory calculation unit 33, and a judgment model number transmission unit 34. The information analysis apparatus 3 is composed of, for example, a CPU (Central Processing Unit) and memory. The multiple functional units (31 to 35) in Figure 7 are realized by the CPU executing a control program stored in memory.

[0083] The control support device 4 in Figure 7 includes a processing information acquisition unit 41, a parameter value acquisition unit 42, a judgment model number acquisition unit 43, a correspondence relationship generation unit 44, a correspondence relationship storage unit 45, a correspondence relationship acquisition unit 46, an appropriate parameter value determination unit 47, and a transmission unit 48. The control support device 4 is composed of, for example, a CPU (Central Processing Unit) and memory. The multiple functional units (41-48) in Figure 7 are realized by the CPU executing a control program stored in memory. The functions and operations of each functional unit (31-35, 41-48) in Figure 7 will be explained later with reference to the flowcharts in Figures 8-13.

[0084] Figure 8 is a flowchart showing an example of the operation of the control device 40 of the substrate processing device 1 during the learning process. Figure 9 is a flowchart showing an example of the operation of the information analysis device 3 during the learning process. Figure 10 is a flowchart showing an example of the operation of the control support device 4 during the learning process.

[0085] First, the learning operation by the substrate processing device 1, the information analysis device 3, and the control support device 4 will be explained. In Figure 8, first, the control device 40 of the substrate processing device 1 determines whether or not a command to start the learning operation has been issued (step S10). If a command to start the learning operation has not been issued, the control device 40 waits until a command to start the learning operation is issued. If a command to start the learning operation is issued, the control device 40 controls multiple components C1 to Cn with multiple parameter values ​​PR1 to PRn shown in Figure 4, which have been set in advance (step S11).

[0086] Next, the control device 40 transmits the multiple processing information PI1 to PIn obtained from the operation of the multiple components C1 to Cn to the information analysis device 3 via the control support device 4 (step S12). Alternatively, the control device 40 may transmit the obtained multiple processing information PI1 to PIn directly to the information analysis device 3. After that, the control device 40 determines whether or not the termination of the learning operation has been commanded (step S13). If the termination of the learning operation has not been commanded, the control device 40 returns to step S11. As a result, the operations in steps S11 to S13 are repeated. If the termination of the learning operation is commanded in step S13, the learning operation ends.

[0087] In Figure 9, the information receiving unit 31 of the information analysis device 3 determines whether or not a command to start the learning operation has been issued (step S20). If a command to start the learning operation has not been issued, the information receiving unit 31 waits until a command to start the learning operation is issued. If a command to start the learning operation has been issued, the information receiving unit 31 determines whether or not it has received the multiple processing information PI1 to PIn transmitted in step S12 of Figure 8 (step S21). If the multiple processing information PI1 to PIn has not been received, the information receiving unit 31 waits until it receives the multiple processing information PI1 to PIn.

[0088] When multiple processing information PI1 to PIn is received, the judgment model generation unit 32 generates multiple judgment models MD1 to MDn corresponding to multiple constituent elements C1 to Cn using machine learning (step S22). At this time, the judgment model generation unit 32 assigns judgment model numbers M1 to Mn to the multiple judgment models MD1 to MDn as model identification information to identify each judgment model. The judgment model storage calculation unit 33 stores the multiple judgment models MD1 to MDn generated by the judgment model generation unit 32 (step S23).

[0089] The determination model number transmission unit 34 transmits the determination model numbers M1 to Mn of the multiple determination models MD1 to MDn stored in the determination model storage calculation unit 33 to the control support device 4 (step S24). Subsequently, the information receiving unit 31 determines whether or not the end of the learning operation has been commanded (step S25). If the end of the learning operation has not been commanded, the information receiving unit 31 returns to step S21. As a result, the operations of steps S21 to S25 are repeated.

[0090] In this way, the judgment model storage calculation unit 33 stores multiple judgment models MD1 to MDn corresponding to multiple constituent elements C1 to Cn. When a command to terminate the learning operation is issued, the learning operation terminates.

[0091] In Figure 10, the processing information acquisition unit 41 of the control support device 4 determines whether or not a command to start a learning operation has been issued (step S30). If a command to start a learning operation has not been issued, the processing information acquisition unit 41 waits until a command to start a learning operation is issued. If a command to start a learning operation has been issued, the processing information acquisition unit 41 determines whether or not it has received multiple processing information PI1 to PIn (step S31). If multiple processing information PI1 to PIn has not been received, the processing information acquisition unit 41 waits until it receives multiple processing information PI1 to PIn.

[0092] When multiple processing information PI1 to PIn is received, the processing information acquisition unit 41 transmits the received multiple processing information PI1 to PIn to the information analysis device 3 (step S32). If the substrate processing device 1 transmits the multiple processing information PI1 to PIn directly to the information analysis device 3, the processing information acquisition unit 41 does not perform steps S31 and S32.

[0093] The parameter value acquisition unit 42 determines whether or not it has acquired the multiple parameter values ​​PR1 to PRn set to control the components in the substrate processing apparatus 1 (step S33). If the multiple parameter values ​​PR1 to PRn have not been acquired, the parameter value acquisition unit 42 waits until the multiple parameter values ​​PR1 to PRn have been acquired.

[0094] Furthermore, the determination model number acquisition unit 43 determines whether or not it has acquired the multiple determination model numbers M1 to Mn transmitted by the information analysis device 3 (step S34). If it has not acquired the multiple determination model numbers M1 to Mn, the determination model number acquisition unit 43 waits until it has acquired the multiple determination model numbers M1 to Mn.

[0095] If the determination model number acquisition unit 43 acquires multiple determination model numbers M1 to Mn, the correspondence relationship generation unit 44 generates a correspondence relationship CR between the multiple parameter values ​​PR1 to PRn acquired by the parameter value acquisition unit 42 and the multiple determination model numbers M1 to Mn acquired by the determination model number acquisition unit 43 (step S35). The correspondence relationship storage unit 45 stores the correspondence relationship CR generated by the correspondence relationship generation unit 44 (step S36).

[0096] The processing information acquisition unit 41 determines whether or not a command has been issued to terminate the learning operation (step S37). If a command has not been issued to terminate the learning operation, the process returns to step S31. As a result, the operations in steps S31 to S37 are repeated. If a command has been issued to terminate the learning operation, the learning operation terminates.

[0097] Figure 11 is a flowchart showing an example of the operation of the substrate processing device 1 during the appropriate parameter value update operation. Figure 12 is a flowchart showing an example of the operation of the information analysis device 3 during the appropriate parameter value update operation. Figure 13 is a flowchart showing an example of the operation of the control support device 4 during the appropriate parameter value update operation.

[0098] Next, the operation of updating appropriate parameter values ​​by the substrate processing device 1, information analysis device 3, and control support device 4 will be described. Hereinafter, the parameter value to be updated will be denoted as PRk, and the component to be updated as Ck. k is any integer from 1 to n.

[0099] In Figure 11, the control device 40 of the substrate processing apparatus 1 determines whether or not a command has been issued to start the appropriate parameter value update operation (step S40). If a command has not been issued to start the appropriate parameter value update operation, the control device 40 waits until a command has been issued to start the appropriate parameter value update operation. If a command has been issued to start the appropriate parameter value update operation, the control device 40 controls the component Ck with a preset parameter value Pk (step S41).

[0100] Next, the control device 40 transmits the processing information PIk obtained from the operation of the component Ck to the information analysis device 3 via the control support device 4 (step S42). Alternatively, the control device 40 may transmit the obtained processing information PIk directly to the information analysis device 3. Subsequently, in step S64, described later, the control device 40 determines whether or not it has received the appropriate parameter value transmitted by the transmission unit 48 of the control support device 4 (step S43). If the appropriate parameter value has not been received, the control device 40 waits until the appropriate parameter value is received.

[0101] If the appropriate parameter value is received, the control device 40 updates the parameter value Pk of the target component Ck to the appropriate parameter value (step S44). The control device 40 determines whether or not the termination of the appropriate parameter value update operation has been commanded (step S45). If the termination of the appropriate parameter value update operation has not been commanded, the control device 40 returns to step S41. If the termination of the appropriate parameter value update operation has been commanded, the appropriate parameter value update operation is terminated.

[0102] In Figure 12, the information receiving unit 31 of the information analysis device 3 determines whether or not a command has been issued to start the appropriate parameter value update operation (step S50). If a command has not been issued to start the appropriate parameter value update operation, the information receiving unit 31 waits until a command has been issued to start the appropriate parameter value update operation. If a command has been issued to start the appropriate parameter value update operation, the information receiving unit 31, Figure 12 In step S42, the control device 40 determines whether or not it has received the processing information PIk transmitted via the control support device 4 (step S51).

[0103] If processing information PIk has not been received, the information receiving unit 31 waits until processing information PIk is received. When processing information PIk is received, the multiple judgment models MD1 to MDn stored in the judgment model storage calculation unit 33 each calculate anomaly scores AS1 to ASn based on the received processing information PIk (step S52). The minimum score determination unit 35 determines the minimum anomaly score among the multiple anomaly scores AS1 to ASn and selects the judgment model that calculated the minimum anomaly score (step S53).

[0104] The determination model number transmission unit 34 transmits the determination model number of the selected determination model to the control support device 4 (step S54). Subsequently, the information receiving unit 31 determines whether or not the termination of the appropriate parameter value update operation has been commanded (step S55). If the termination of the appropriate parameter value update operation has not been commanded, the process returns to step S51. If the termination of the appropriate parameter update operation has been commanded, the appropriate parameter update operation is terminated.

[0105] In Figure 13, the processing information acquisition unit 41 of the control support device 4 determines whether or not a command has been issued to start the appropriate parameter value update operation (step S60). If a command has not been issued to start the appropriate parameter value update operation, the processing information acquisition unit 41 waits until a command has been issued to start the appropriate parameter value update operation. If a command has been issued to start the appropriate parameter value update operation, the determination model number acquisition unit 43 determines whether or not it has acquired the determination model number transmitted from the determination model number transmission unit 34 of the information analysis device 3 in step S54 of Figure 12 (step S61). If a determination model number has not been acquired, the determination model number transmission unit 34 waits until a determination model number has been acquired. If a determination model number has been acquired, the correspondence relationship acquisition unit 46 acquires the correspondence relationship stored in the correspondence relationship storage unit 45 (step S62). The appropriate parameter value determination unit 47 determines the parameter value corresponding to the determination model number acquired by the determination model number acquisition unit 43 as the appropriate parameter value based on the correspondence relationship CR acquired by the correspondence relationship acquisition unit 46 (step S63). The transmitting unit 48 transmits the appropriate parameter values ​​determined by the appropriate parameter value determination unit 47 to the substrate processing device 1 (step S64). The processing information acquisition unit 41 determines whether or not the termination of the appropriate parameter update operation has been commanded (step S65). If the termination of the appropriate parameter update operation has not been commanded, the process returns to step S61. If the termination of the appropriate parameter update operation has been commanded, the appropriate parameter update operation is terminated.

[0106] In this way, the appropriate parameter update operation updates the parameter value CRk, which controls at least one component Ck, to an appropriate parameter value. Similarly, by performing the same appropriate parameter update operation for other parameter values, multiple parameter values ​​PR1 to PRn can be updated (fine-tuned) to appropriate parameter values.

[0107] Furthermore, if the parameter value for controlling at least one component is updated, the operation of that component is controlled using the updated parameter value, and the information analysis device 3 generates a decision model corresponding to the updated parameter value through the learning operation described above.

[0108] In this case, the judgment model storage and calculation unit 33 of the information analysis device 3 stores the new judgment model in addition to the judgment model corresponding to the parameter value before the update. As a result, the number of judgment models used to calculate the abnormal score increases during the appropriate parameter value update operation. Consequently, the accuracy of the appropriate parameter value is improved as the appropriate parameter value update operation is repeated.

[0109] (9) Effects of the embodiment According to the control support device 4 of the above embodiment, a judgment model (in the example of Figure 4, judgment model MDn) capable of obtaining an appropriate judgment result can be identified based on the judgment model number (in the example of Figure 4, judgment model number Mn) acquired from the information analysis device 3 through an appropriate parameter value update operation. Furthermore, a parameter value (in the example of Figure 4, parameter value PRn) corresponding to the identified judgment model (in the example of Figure 4, judgment model MDn) can be identified based on the correspondence relationship CR. As a result, the parameter value (in the example of Figure 4, parameter value PRn) is determined based on the acquired correspondence relationship CR and the acquired judgment model number (in the example of Figure 4, judgment model number Mn). Therefore, the parameter value for controlling a component (in the example of Figure 4, component C1) in the substrate processing device 1 is automatically determined to an appropriate parameter value (in the example of Figure 4, parameter value PRn). Similarly, the parameter values ​​for controlling other components (in the example of Figure 4, components C2 to Cn) can be automatically determined to appropriate parameter values. As a result, the effort required to determine the control parameter values ​​of the components of the substrate processing device 1 to appropriate values ​​can be reduced.

[0110] Furthermore, in this embodiment, the information analysis device 3 appropriately determines the degree of abnormality (normality) of the operation of multiple components based on the invariant relationships between the processing information of the substrate processing device 1. As a result, the judgment model number acquired by the judgment model number acquisition unit 43 of the control support device 4 becomes the judgment model number corresponding to the judgment model that can obtain a more appropriate judgment result (the abnormality score with the lowest degree of abnormality). As a result, the appropriate parameter value determination unit 47 can determine the parameter value corresponding to the judgment model number acquired by the judgment model number acquisition unit 43 from the correspondence relationships acquired by the correspondence relationship acquisition unit 46 as the appropriate parameter value. As a result, it becomes possible to determine the parameter values ​​for controlling the components of the substrate processing device 1 to appropriate values.

[0111] Furthermore, in this embodiment, the control support device 4 includes a transmission unit 48, which enables it to transmit appropriate parameter values ​​to the substrate processing device 1. This makes it possible to automatically set parameter values ​​for controlling the components of the substrate processing device 1 in the substrate processing device 1.

[0112] Furthermore, when installing the substrate processing device 1, inspecting the substrate processing device 1, or replacing components, the parameter values ​​used for the components after installation, inspection, or replacement can be automatically and quickly determined to appropriate values.

[0113] Furthermore, in this embodiment, since the control support device 4 includes a correspondence relationship storage unit 45, it is no longer necessary to provide a configuration for storing correspondence relationships outside of the control support device 4.

[0114] (10) Other embodiments (10-1) In the above embodiment, an example is shown of determining the appropriate parameter values ​​for each flow rate adjustment valve MV of the substrate processing unit WU, among the various components of the substrate processing apparatus 1, but the present invention is not limited thereto. For example, the control support device 4 according to the above embodiment can also be applied when determining parameter values ​​for other types of components of the substrate processing apparatus 1. For example, the control support device 4 according to the above embodiment may be applied when determining the appropriate parameter values ​​for other valves such as the discharge valve DV in Figure 1. It may also be applied to determine appropriate parameter values ​​for other components of the substrate processing apparatus 1 other than valves.

[0115] Figure 14 is a schematic diagram illustrating a substrate processing system 100a, including a substrate processing apparatus 1a according to another embodiment. As shown in Figure 14, the substrate processing apparatus 1a includes an air supply unit FFU and an exhaust unit ED as components in order to maintain a constant amount of air supply and exhaust in the chamber CH of each substrate processing unit WU. The air supply unit FFU is a filter fan unit provided at the air supply port of the chamber CH to supply clean gas into the chamber CH. The exhaust unit ED is an exhaust damper provided at the exhaust port of the chamber CH to discharge the gas inside the chamber CH.

[0116] In the air intake unit (FFU), the rotation speed of the motor that rotates the fan is controlled. This adjusts the amount of clean air supplied into the chamber CH. Pressure gauge PG1 detects the pressure of the air introduced by the air intake unit (FFU). In the exhaust unit (ED), the rotation angle of the motor that changes the damper opening is controlled. This adjusts the amount of air discharged from the chamber CH. Pressure gauge PG2 detects the pressure of the air discharged by the exhaust unit (ED).

[0117] The control device 40 controls the motor of the air intake unit FFU and the motor of the exhaust unit ED in order to adjust the pressure detected by the pressure gauge PG1 and the pressure detected by the pressure gauge PG2 to a predetermined pressure (target pressure). This ensures that the amount of air supplied and exhausted within the substrate processing unit WU remains constant. The control device 40 controls the motor of the air intake unit FFU using a first parameter value and controls the motor of the exhaust unit ED using a second parameter value.

[0118] In the substrate processing apparatus 1a described above, it is possible to determine appropriate parameter values ​​for one or both of the first parameter value for controlling the motor of the air supply unit FFU and the second parameter value for controlling the motor of the exhaust unit ED by updating the appropriate parameter value using the information analysis device 3 and the control support device 4 in the above embodiment.

[0119] (10-2) In the above embodiment, the appropriate parameter value update operation is performed to update (fine-tune) the parameter values ​​for each component when the substrate processing apparatus 1 is installed, to update (fine-tune) the parameter values ​​for each component when the substrate processing apparatus 1 is inspected, or to update (fine-tune) the parameter values ​​when any component of the substrate processing apparatus 1 is replaced, but the present invention is not limited thereto. For example, the appropriate parameter value update operation may be performed when an abnormality is detected in any of the multiple components by the information analysis device 3. In this case, the parameter value of the component in which the abnormality was detected is updated to the appropriate parameter value. As a result, if no abnormality is detected in the component controlled by the updated appropriate parameter value, it becomes possible to continue using the component without replacing it with a new component.

[0120] For example, if a motor needle valve is used as a flow control valve MV, it is assumed that an abnormality in the motor needle valve is detected due to a change in the shape of the needle caused by aging deterioration of the needle. In this case, according to the control support device 4 of the above embodiment, it is possible to update the parameter values ​​for the motor needle valve in which the abnormality was detected to appropriate parameter values. If no abnormality is detected in the motor needle while it is controlled with appropriate parameter values, it becomes possible to continue using the motor needle. As a result, it becomes possible to extend the remaining lifespan of the motor needle during its service life.

[0121] (10-3) In the control support device 4 of the above embodiment, a decision model is generated based on invariant relationships, but the present invention is not limited thereto. For example, in the control support device 4, a decision model may be generated by using other machine learning methods such as deep learning.

[0122] (10-4) In the above embodiment, the control support device 4 includes a transmission unit 48, but the present invention is not limited thereto. For example, the control support device 4 may be provided with a notification unit for notifying the appropriate parameter values ​​determined by the appropriate parameter value determination unit 47. In this case, the operator will be able to input the appropriate parameter values ​​notified by the notification unit to the substrate processing device 1.

[0123] (10-5) In the above embodiment, the control support device 4 includes a correspondence relationship storage unit 45, but the present invention is not limited thereto. A configuration for storing correspondence relationships outside of the control support device 4 may be provided. For example, correspondence relationships may be stored in a cloud on the internet or the like. In this case, it is possible to reduce the storage capacity of the control support device 4.

[0124] (10-6) In the above embodiment, the substrate processing apparatus 1 and the control support apparatus 4 are provided separately, but the substrate processing apparatus 1 and the control support apparatus 4 may be provided as an integrated unit. Also, in the above embodiment, the information analysis apparatus 3 and the control support apparatus 4 are provided separately, but the information analysis apparatus 3 and the control support apparatus 4 may be provided as an integrated unit.

[0125] (11) Correspondence between each component of the claim and each part of the embodiment The following describes an example of the correspondence between each component of the claim and each element of the embodiment. In the above embodiment, the determination model number acquisition unit 43 is an example of an information acquisition unit, the correspondence relationship storage unit 45 is an example of a storage unit, and the appropriate parameter value determination unit 47 is an example of a determination unit. [Explanation of Symbols]

[0126] 1,1a...Substrate processing device, 3...Information analysis device, 4...Control support device, 31...Information receiving unit, 32...Judgment model generation unit, 33...Judgment model memory calculation unit, 34...Judgment model number transmission unit, 35...Minimum score determination unit, 40...Control device, 41...Processing information acquisition unit, 42...Parameter value acquisition unit, 43...Judgment model number acquisition unit, 44...Correspondence relationship generation unit, 45...Correspondence relationship storage unit, 46...Correspondence relationship acquisition unit, 47...Appropriate parameter value determination unit, 48...Transmission unit, 100,100a...Substrate processing system, AS1,ASn...Abnormal score, C 1, C2…Component, CH…Chamber, CR…Correspondence, CRK…Parameter value, Ck…Component, DV…Discharge valve, ED…Exhaust section, FFU…Air supply section, FM…Flow meter, M1…Judgment model number, MD1, MD2, MDn…Judgment model, ME…Memory unit, MV…Flow control valve, Mn…Judgment model number, PG1, PG2…Pressure gauge, PI1, PI2, PIk…Processing information, PM…Pressure gauge, PR1, PR2, PRn…Parameter value, RP…Processing liquid flow path, SC…Spin chuck, W…Substrate, WU…Substrate processing unit

Claims

1. A control support device that determines parameter values, which are the values ​​of control parameters for controlling components in a substrate processing apparatus, A correspondence acquisition unit that acquires a correspondence between a plurality of determination models for determining the normality of the operation of a component from processing information indicating the operation or state related to the processing of a substrate of the substrate processing apparatus, and a plurality of model identification information for determining the normality of the operation of a plurality of component values, An information acquisition unit acquires model identification information corresponding to a judgment model that can obtain the most appropriate judgment result showing the highest degree of normality among the multiple judgment results of the multiple judgment models from the processing information during the operation of the above-mentioned components. The system comprises a determination unit that determines the parameter values ​​for controlling the components based on the correspondence relationships acquired by the correspondence relationship acquisition unit and the model identification information acquired by the information acquisition unit, The aforementioned determination model is a learning model that determines the normality of the operation of the component based on the degree of discrepancy between predicted processing information and actually acquired processing information, and is a control support device.

2. A control support device that determines parameter values, which are the values ​​of control parameters for controlling components in a substrate processing apparatus, A correspondence acquisition unit that acquires a correspondence between a plurality of determination models for determining the normality of the operation of a component from processing information indicating the operation or state related to the processing of a substrate of the substrate processing apparatus, and a plurality of model identification information for determining the normality of the operation of a plurality of component values, An information acquisition unit acquires model identification information corresponding to a judgment model among the plurality of judgment models that can obtain an appropriate judgment result from the processing information during the operation of the component, The system comprises a determination unit that determines the parameter values ​​for controlling the components based on the correspondence relationships acquired by the correspondence relationship acquisition unit and the model identification information acquired by the information acquisition unit, Each of the plurality of determination models determines the normality of the component based on the invariant relationships between the plurality of processing information that indicate the operation or state related to the processing of the substrate of the substrate processing apparatus and the plurality of processing information actually collected from the substrate processing apparatus.

3. The substrate processing apparatus includes a plurality of identical components as its components, The aforementioned multiple parameter values ​​are values ​​for controlling each of the aforementioned multiple components, The control support device according to claim 1 or 2, wherein the determination unit determines the parameter values ​​for controlling each component based on the correspondence relationship acquired by the correspondence relationship acquisition unit and the model identification information acquired by the information acquisition unit.

4. The control support device according to any one of claims 1 to 3, further comprising a transmission unit for transmitting the parameter values ​​determined by the determination unit to the substrate processing device.

5. The control support device according to any one of claims 1 to 4, wherein the determination unit determines the parameter values ​​used for controlling the components after installation or replacement when the substrate processing device is installed, when the substrate processing device is inspected, or when components of the substrate processing device are replaced with new components.

6. During normal operation of the substrate processing apparatus, if the determination result of the determination model corresponding to the parameter value used to control the component indicates a predetermined abnormal state, The correspondence relationship acquisition unit acquires the correspondence relationship, The information acquisition unit acquires model identification information corresponding to a judgment model capable of obtaining the appropriate judgment result, The control support device according to any one of claims 1 to 5, wherein the determination unit determines the parameter value to be newly used to control the component based on the correspondence relationship obtained by the correspondence relationship acquisition unit and the model identification information obtained by the information acquisition unit.

7. The system further includes a memory unit that stores the aforementioned correspondence relationship, The correspondence acquisition unit acquires the correspondence stored by the storage unit, The control support device according to any one of claims 1 to 6, wherein the determination unit determines the parameter value for controlling the component using the correspondence stored in the correspondence acquisition unit.

8. The aforementioned components include a valve related to the processing of the substrate, The control parameter is used to control the valve, as described in any one of claims 1 to 7.

9. The valve is a needle valve that includes a needle and a motor and adjusts the flow rate of liquid related to the processing of the substrate. The control support device according to claim 8, wherein the parameter value is a value related to the operation of at least one of the needle and the motor.

10. The substrate processing apparatus includes a chamber in which the substrate is processed, The aforementioned components include an air intake and exhaust unit that supplies and exhausts air into the chamber, The control support device according to any one of claims 1 to 9, wherein the parameter value is a value related to the operation of at least one of the air supply and exhaust.

11. The control parameters include a first parameter corresponding to the air supply and a second parameter corresponding to the exhaust. The parameter value of the first parameter is a value related to the operation of the air supply, The control support device according to claim 10, wherein the parameter value of the second parameter is a value related to the operation of the exhaust.

12. A control support method for determining parameter values, which are the values ​​of control parameters for controlling components in a substrate processing apparatus, A step of obtaining a correspondence between a plurality of model identification information, which identifies a plurality of determination models for determining the normality of the operation of the constituent elements from processing information indicating the operation or state related to the processing of the substrate of the substrate processing apparatus, and a plurality of parameter values, The steps include obtaining model identification information corresponding to a judgment model that can obtain the most appropriate judgment result showing the highest degree of normality among the multiple judgment results of the multiple judgment models from the processing information during the operation of the above-mentioned components, The step of determining the parameter values ​​for controlling the components based on the acquired correspondence and the acquired model identification information, The aforementioned determination model is a learning model that determines the normality of the operation of the component based on the degree of discrepancy between predicted processing information and actually acquired processing information, and is a control support method.

13. A control support method for determining parameter values, which are the values ​​of control parameters for controlling components in a substrate processing apparatus, A step of obtaining a correspondence between a plurality of model identification information, which identifies a plurality of determination models for determining the normality of the operation of the constituent elements from processing information indicating the operation or state related to the processing of the substrate of the substrate processing apparatus, and a plurality of parameter values, The steps include: obtaining model identification information corresponding to a judgment model among the plurality of judgment models that can obtain an appropriate judgment result from the processing information during the operation of the component; The step of determining the parameter values ​​for controlling the components based on the acquired correspondence and the acquired model identification information, A control support method in which each of the plurality of determination models determines the normality of the component based on the invariant relationships between the plurality of processing information that indicate the operation or state related to the processing of the substrate of the substrate processing apparatus and the plurality of processing information actually collected from the substrate processing apparatus.

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