Discharge cell for ozone generation, and ozone gas generator.

Abstract

The electric resistance value of a first flow path (F1) between a first grounded part (8A) and a high-voltage side cooling flow path (HP2) closest to the first grounded part (8A) is larger than the electric resistance value of a second flow path (F2) between the first grounded part (8A) and a low-voltage side cooling flow path (LP2) closest to the first grounded part (8A). The electric resistance value of a third flow path (F3) between a second grounded part (8B) and a high-voltage side cooling flow path (HP2) closest to the second grounded part (8B) is larger than the electric resistance value of a fourth flow path (F4) between the second grounded part (8B) and a low-voltage side cooling flow path (LP2) closest to the second grounded part (8B).

Description

Technical Field

[0001] The present disclosure relates to a discharge cell for ozone generation.

Background Art

[0002] Patent Document 1 discloses a discharge cell for ozone generation. The discharge cell includes a discharge part having a high-voltage electrode module and a low-voltage electrode module, and a cooling channel for cooling the discharge part. In the discharge part, a discharge space is formed between the high-voltage electrode module and the low-voltage electrode module. When a high voltage is applied to the high-voltage electrode of the high-voltage electrode module, barrier discharge occurs in the discharge space, and ozone gas is generated. When heat is generated due to the discharge, the temperature of the discharge space rises, and the generated ozone is decomposed by the heat. Therefore, the discharge part is cooled by the heat medium in the cooling channel to suppress the decomposition of ozone by heat.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a discharge cell as disclosed in Patent Document 1, when a voltage is applied to the high-voltage electrode of the discharge part, the current on the high-voltage electrode side may flow into the cooling channel. As a result, due to the current flowing through the cooling channel, the power consumption of the discharge cell increases.

[0005] An object of the present disclosure is to suppress an increase in power consumption caused by current leakage from the high-voltage electrode side to the cooling channel.

Means for Solving the Problems

[0006] The invention of the present application is directed to a discharge cell for an ozone generator.

[0007] The heat transfer medium flow path (P) of the present invention includes an inlet passage (33) into which the heat transfer medium flows, a high-pressure side flow path (HP) and a low-pressure side flow path (LP) branching from the outlet end of the inlet passage (33), and an outlet passage (34) to which the outlet ends of the high-pressure side flow path (HP) and the low-pressure side flow path (LP) are connected. The high-pressure side flow path (HP) includes a plurality of high-pressure side cooling flow paths (HP2) connected in parallel to each other, each adjacent to each high-pressure electrode module (62) of a plurality of discharge sections (60). The low-pressure side flow path (LP) includes a plurality of low-pressure side cooling flow paths (LP2) connected in parallel to each other, each adjacent to each low-pressure electrode module (61) of a plurality of discharge sections (60). Note that "a plurality of high-pressure side cooling flow paths (HP2) connected in parallel" here means that the high-pressure side cooling flow paths (HP2) are connected in parallel to each other as flow paths, and does not mean that the high-pressure side cooling flow paths (HP2) are structurally arranged side by side. Similarly, the phrase "multiple low-pressure side cooling channels (LP2) connected in parallel" here means that the low-pressure side cooling channels (LP2) are connected to each other in parallel as channels, and does not mean that the low-pressure side cooling channels (LP2) are structurally arranged side by side.

[0008] The heat transfer medium flow path (P) is provided with a first grounding point (8A) located between the high-pressure side cooling flow path (HP2) closest to the outlet end of the inlet passage (33) and the low-pressure side cooling flow path (LP2) closest to the outlet end of the inlet passage (33). The electrical resistance of the first flow path (F1) between the first grounding point (8A) and the high-pressure side cooling flow path (HP2) closest to the first grounding point (8A) is greater than the electrical resistance of the second flow path (F2) between the first grounding point (8A) and the low-pressure side cooling flow path (LP2) closest to the first grounding point (8A). As a result, it is possible to suppress the flow of current from the high-pressure side cooling flow path (HP2) to the first grounding point (8A) due to the voltage applied between the high-pressure electrode (62c) and the low-pressure electrode (61c).

[0009] The heat transfer medium flow path (P) is provided with a second grounding point (8B) located between the high-pressure side cooling flow path (HP2) closest to the inlet end of the outlet passage (34) and the low-pressure side cooling flow path (LP2) closest to the inlet end of the outlet passage (34). The electrical resistance of the third flow path (F3) between the second grounding point (8B) and the high-pressure side cooling flow path (HP2) closest to the second grounding point (8B) is greater than the electrical resistance of the fourth flow path (F4) between the second grounding point (8B) and the low-pressure side cooling flow path (LP2) closest to the second grounding point (8B). As a result, it is possible to suppress the flow of current from the high-pressure side cooling flow path (HP2) to the second grounding point (8B) due to the voltage applied to the high-pressure electrode (62c).

[0010] It is preferable that the high-voltage electrode modules (62) of adjacent discharge sections (60) face each other across the high-voltage side cooling channel (HP2), and that the low-voltage electrode modules (61) of adjacent discharge sections (60) face each other across the low-voltage side cooling channel (LP2).

[0011] If one high-voltage electrode module (62) and the other low-voltage electrode module (61) of adjacent discharge sections (60) face each other, there is a possibility that current may leak from the high-voltage electrode module (62) to the low-voltage electrode module (61). In contrast, in adjacent discharge sections (60), the high-voltage electrode modules (62) face each other, and the low-voltage electrode modules (61) face each other, so such current leakage between electrodes can be suppressed.

[0012] It is preferable that the length of the first channel (F1) is greater than the length of the second channel (F2), and the length of the third channel (F3) is greater than the length of the fourth channel (F4). With this configuration, the electrical resistance value of the first channel (F1) can be made greater than that of the second channel (F2), and the electrical resistance value of the third channel (F3) can be made greater than that of the fourth channel (F4).

[0013] The heat transfer medium flow path (P) includes an inflow high-pressure side main channel (91) from the outlet end of the inflow passage (33) to the nearest high-pressure side cooling flow path (HP2) from the outlet end of the inflow passage (33), an inflow low-pressure side main channel (93) from the outlet end of the inflow passage (33) to the nearest low-pressure side cooling flow path (LP2) from the outlet end of the inflow passage (33), an outflow high-pressure side main channel (92) from the inflow end of the outlet passage (34) to the nearest high-pressure side cooling flow path (HP2) from the inflow end of the outlet passage (34), and the inflow end of the outlet passage (34) Furthermore, the outlet includes an outlet low-pressure side main channel (94) between the inlet end of the outlet passage (34) and the nearest low-pressure side cooling passage (LP2), wherein the first grounding portion (8A) is provided at the outlet end of the inlet passage (33), and the second grounding portion (8B) is provided at the inlet end of the outlet passage (34), and it is preferable that the electrical resistance value of the inlet high-pressure side main channel (91) is greater than the electrical resistance value of the inlet low-pressure side main channel (93), and the electrical resistance value of the outlet high-pressure side main channel (92) is greater than the electrical resistance value of the outlet low-pressure side main channel (94).

[0014] This configuration allows the electrical resistance of the first channel (F1) to be greater than that of the second channel (F2), and the electrical resistance of the third channel (F3) to be greater than that of the fourth channel (F4). As a result, it is possible to suppress current flow from the high-voltage side cooling channel (HP2) to the first grounding point (8A) and from the high-voltage side cooling channel (HP2) to the second grounding point (8B) due to the voltage applied to the high-voltage electrode (62c).

[0015] It is preferable that the length of the inflow high-pressure side main channel (91) is greater than the length of the inflow low-pressure side main channel (93), and that the length of the outflow high-pressure side main channel (92) is greater than the length of the outflow low-pressure side main channel (94).

[0016] This configuration allows the electrical resistance of the inflow high-voltage side trunk (91) to be greater than that of the inflow low-voltage side trunk (93), and also allows the electrical resistance of the outflow high-voltage side trunk (92) to be greater than that of the outflow low-voltage side trunk (94).

[0017] It is preferable that the electrical resistance value of the inflow high-pressure side main path (91) is equal to the electrical resistance value of the outflow high-pressure side main path (92). In particular, it is preferable that the flow path length of the inflow high-pressure side main path (91) is equal to the flow path length of the outflow high-pressure side main path (92).

[0018] Thereby, the flow path lengths of the inflow high-pressure side main path (91) and the outflow high-pressure side main path (92) can be suppressed to the minimum necessary.

[0019] It is preferable that either one or both of the inflow high-pressure side main path (91) and the outflow high-pressure side main path (92) include a curved portion (95, 96) where the flow path is curved.

[0020] Thereby, the flow path lengths of the inflow high-pressure side main path (91) and the outflow high-pressure side main path (92) can be easily increased.

[0021] It is preferable that the ozone generator includes the above-described discharge cell (20) and a supply unit (4) that supplies water having a specific resistance value of 15 [Ω·m] or more to the inflow path (33).

[0022] In the discharge cell (20) of the present invention, by setting the specific resistance value of the water flowing through the heat medium flow path (P) to 15 [Ω·m] or more, it is possible to particularly suppress the flow of current from the high-pressure electrode module (62) to the low-pressure side flow path (LP), and reduce the loss of power consumption.

Brief Description of the Drawings

[0023] [Figure 1] FIG. 1 is a schematic perspective view showing the appearance of the ozone generator. [Figure 2] FIG. 2 is a configuration diagram schematically showing a discharge cell and a flow path connected to the discharge cell. [Figure 3] FIG. 3 is a perspective view showing the overall configuration of the discharge cell. [Figure 4] FIG. 4 is a perspective view showing the discharge cell disassembled by unit. [Figure 5] FIG. 5 is a perspective view showing the header unit disassembled by substrate. [Figure 6]Figure 6 is a perspective view showing the low-pressure side cooling unit disassembled into individual circuit boards. [Figure 7] Figure 7 is a perspective view showing the discharge unit disassembled into individual circuit boards. [Figure 8] Figure 8 is a cross-sectional view of the main part of the discharge unit, cut in the front-to-back direction. [Figure 9] Figure 9 is a perspective view showing the high-pressure side cooling unit disassembled into individual circuit boards. [Figure 10] Figure 10 is a schematic diagram showing the upstream side of the heat transfer fluid flow path in a discharge cell. [Figure 11] Figure 11 is a schematic diagram showing the downstream side of the heat transfer fluid channel in a discharge cell. [Figure 12] Figure 12 is a schematic diagram of the heat transfer fluid flow path in the comparative example discharge cell. [Figure 13] Figure 12 is a graph showing the relationship between the resistivity of the heat transfer medium and the power loss in the heat transfer medium flow path in this embodiment and comparative example. [Modes for carrying out the invention]

[0024] The embodiments of this disclosure will be described in detail below with reference to the drawings. However, this disclosure is not limited to the embodiments shown below, and various modifications are possible without departing from the technical idea of ​​this disclosure. Since the drawings are for conceptual illustration of this disclosure, dimensions, ratios, or numbers may be exaggerated or simplified as necessary for ease of understanding.

[0025] (1) Overall configuration of the ozone generator The discharge cell (20) of this disclosure is applied to an ozone generator (1). The ozone generator (1) is applied to, for example, semiconductor manufacturing equipment. The ozone generator (1) generates ozone gas. The ozone generator (1) generates ozone gas using high-purity oxygen gas supplied from an external source as a raw material. In semiconductor manufacturing equipment, ozonated water is produced by dissolving the ozone gas generated by the ozone generator (1) in water. This ozonated water is used, for example, for cleaning silicon wafers. Alternatively, the generated ozone gas is used for film formation on substrates.

[0026] As shown in Figure 1, the ozone generator (1) comprises a casing (10), a discharge cell (20), and a power supply unit (11). The casing (10) is formed in the shape of a hollow box. The discharge cell (20) and the power supply unit (11) are housed inside the casing (10). The power supply unit (11) includes a high-voltage power supply. The power supply unit (11) supplies power to the discharge cell (20). The discharge cell (20) generates ozone gas when a high voltage is applied from the power supply unit (11). An operating unit (12) is provided on the front of the casing (10). The operating unit (12) includes switches, a display, lamps, etc.

[0027] As schematically shown in Figure 2, the ozone generator (1) includes an oxygen gas supply unit (2), an ozone gas supply unit (3), a heat transfer medium supply unit (4), and a heat transfer medium discharge unit (5).

[0028] The oxygen gas supply unit (2) supplies high-purity oxygen gas to the discharge cell (20). The oxygen gas supply unit (2) includes an oxygen gas source (6) for storing oxygen gas and an oxygen gas supply path (2a) connecting the oxygen gas source (6) to the discharge cell (20).

[0029] The ozone gas supply unit (3) sends the ozone gas generated in the discharge cell (20) to a designated object. The ozone gas supply unit (3) includes an ozone gas supply path (3a) for sending ozone gas from the discharge cell (20) to the object.

[0030] The heat transfer medium supply unit (4) supplies a heat transfer medium to the discharge cell (20) for cooling the discharge cell (20). The heat transfer medium supply unit (4) includes a heat transfer medium supply passage (4a) for sending cooling water, which is the heat transfer medium, to the discharge cell (20).

[0031] The heat transfer medium discharge section (5) discharges the cooling water used to cool the discharge cell (20). The heat transfer medium discharge section (5) includes a heat transfer medium discharge passage (5a) for sending the cooling water flowing out of the discharge cell (20) to a predetermined flow path.

[0032] Alternatively, the heat transfer medium discharged from the heat transfer medium discharge passage (5a) may be sent to the heat transfer medium supply passage (4a) to circulate the heat transfer medium. In this configuration, the heat transfer medium supply unit (4) includes a transport unit such as a pump for transporting the heat transfer medium, and a cooling device for cooling the heat transfer medium. The heat transfer medium supply unit (4) includes a tank for storing the heat transfer medium, a valve for opening and closing the heat transfer medium supply passage (4a), and a tap for a water pipe connected to the heat transfer medium supply passage (4a). The heat transfer medium supply passage (4a) may be equipped with a filter for capturing impurities in the heat transfer medium and the various devices mentioned above.

[0033] (2) Discharge cell The configuration of the discharge cell (20) will be explained with reference to Figures 3 to 13. In the following explanation, "up," "down," "right," "left," "front," and "back" refer to the directions shown in Figure 3 unless otherwise specified. As shown in Figure 3, the "first direction" described below corresponds to the left-right direction, the "second direction" corresponds to the "front-back direction," and the "third direction" corresponds to the "up-down direction." In the following explanation, "right" and "left" refer to the direction when the discharge cell (20) is viewed from the front.

[0034] As shown in Figure 3, the external shape of the discharge cell (20) is formed in the shape of a rectangular parallelepiped or a prismatic column. The discharge cell (20) is constructed by stacking multiple substrates (S) in the vertical direction. More precisely, the multiple substrates (S) are stacked via a glass-based bonding layer. The multiple substrates (S) are composed of multiple types of substrates with different structures and functions. These substrates (S) are composed of rectangular flat plates in a plan view (top view). The multiple substrates are made of, for example, alumina material.

[0035] The discharge cell (20) has six faces. The six faces consist of an upper face (20a) formed on the upper side of the discharge cell (20), a lower face (20b) formed on the lower side of the discharge cell (20), and four sides. The four sides consist of a front face (20c) formed on the front side of the discharge cell (20), a rear face (20d) formed on the rear side of the discharge cell (20), a right face (20e) formed on the right side of the discharge cell (20), and a left face (20f) formed on the left side of the discharge cell (20).

[0036] As shown in Figure 4, the discharge cell (20) of this embodiment has, from top to bottom, a header unit (HU), a first cooling unit (CU1), a first discharge unit (DU1), a second cooling unit (CU2), a second discharge unit (DU2), a third cooling unit (CU3), a third discharge unit (DU3), a fourth cooling unit (CU4), and an end plate (E). The configurations of the first discharge unit (DU1), the second discharge unit (DU2), and the third discharge unit (DU3) are basically the same. For convenience, the first discharge unit (DU1), the second discharge unit (DU2), and the third discharge unit (DU3) may be referred to as "discharge unit (DU)". However, the vertical positional relationship of the low-voltage electrode module (61) and the high-voltage electrode module (62) is reversed between the first discharge unit (DU1) and the third discharge unit (DU3) and the second discharge unit (DU2).

[0037] The configurations of the first cooling unit (CU1) and the third cooling unit (CU3) are basically the same. The first cooling unit (CU1) and the third cooling unit (CU3) constitute the low-pressure side cooling unit (50) located on the low-pressure electrode module (61) side of the discharge cell (20). The configurations of the second cooling unit (CU2) and the fourth cooling unit (CU4) are basically the same. The second cooling unit (CU2) and the fourth cooling unit (CU4) constitute the high-pressure side cooling unit (70) located on the high-pressure electrode module (62) side of the discharge cell (20). For convenience, the first cooling unit (CU1), the second cooling unit (CU2), the third cooling unit (CU3), and the fourth cooling unit (CU4) may sometimes be referred to as "cooling units (CU)".

[0038] In the discharge cell (20), the discharge units (DU) and cooling units (CU) are stacked alternately in the vertical direction.

[0039] (2-1) Header Unit The header unit (HU) has the function of introducing oxygen gas into the discharge cell (20) and releasing the generated ozone gas from the discharge cell (20). The header unit (HU) has the function of introducing cooling water into the discharge cell (20) and releasing the cooling water from the discharge cell (20). The header unit (HU) has the function of splitting the cooling water to the low-pressure electrode module (61) side and the high-pressure electrode module (62) side. The header unit (HU) has the function of merging the cooling water that has been split to the low-pressure electrode module (61) side and the high-pressure electrode module (62) side.

[0040] As shown in Figure 5, the header unit (HU) has, from top to bottom, a first header plate (30A), a second header plate (30B), and a third header plate (30C).

[0041] (2-2-1) First Header Board The first header plate (30A) has a gas inlet (31), a gas outlet (32), a heat transfer medium inlet (33), and a heat transfer medium outlet (34). These are circular holes that penetrate the first header plate (30A) in a third direction. These holes may also be elongated. The outlet end of the oxygen gas supply passage (2a) is connected to the gas inlet (31). The inlet end of the ozone gas supply passage (3a) is connected to the gas outlet (32). The outlet end of the heat transfer medium supply passage (4a) is connected to the heat transfer medium inlet (33). The inlet end of the heat transfer medium discharge passage (5a) is connected to the heat transfer medium outlet (34). In the discharge cell (20), a heat transfer medium channel (P) is formed from the heat transfer medium inlet (33) to the heat transfer medium outlet (34) through which cooling water flows as a heat transfer medium (see Figures 10 and 11).

[0042] The gas inlet (31) is formed along the right side (20e) of the discharge cell (20). The gas inlet (31) is located in the middle of the front-to-back direction on the right side of the first header plate (30A). The gas outlet (32) is formed along the left side (20f) of the discharge cell (20). The gas outlet (32) is located in the middle of the front-to-back direction on the left side of the first header plate (30A).

[0043] The heat transfer medium inlet (33) is formed at a location closer to the front (20c) and left side (20f) of the discharge cell (20) than the center. The heat transfer medium outlet (34) is formed at a location closer to the front (20c) and right side (20e) of the discharge cell (20) than the center.

[0044] (2-2-2) Second Header Board A first gas inlet relay path (35) and a first gas outlet relay path (36) are formed in the second header plate (30B). The first gas inlet relay path (35) and the first gas outlet relay path (36) are circular holes that penetrate the second header plate (30B) in a third direction. These holes may be elongated holes. The first gas inlet relay path (35) is located in a position that coincides with the gas inlet (31) in the third direction. The first gas outlet relay path (36) is located in a position that coincides with the gas outlet (32) in the third direction.

[0045] The second header plate (30B) has a low-voltage inlet relay path (37), a low-voltage outlet relay path (38), a high-voltage inlet relay path (39), and a high-voltage outlet relay path (40). These relay paths penetrate the second header plate (30B) in a third direction.

[0046] The low-voltage side inflow relay path (37) is formed along the front surface (20c) of the discharge cell (20). The low-voltage side inflow relay path (37) is located slightly to the left of the front edge of the second header plate (30B). The low-voltage side inflow relay path (37) is formed in a roughly rectangular shape, extending from the middle of the second header plate (30B) in the left-right direction to near the left surface (20f) of the discharge cell (20).

[0047] The low-pressure side outlet relay path (38) is formed along the front surface (20c) of the discharge cell (20). The low-pressure side outlet relay path (38) is located slightly to the right of the front edge of the second header plate (30B). The low-pressure side outlet relay path (38) is formed in a roughly rectangular shape, extending from the middle of the second header plate (30B) in the left-right direction to near the right surface (20e) of the discharge cell (20).

[0048] The high-voltage side inflow relay path (39) is formed along the rear surface (20d) of the discharge cell (20). The high-voltage side inflow relay path (39) is located slightly to the left of the rear edge of the second header plate (30B). The high-voltage side inflow relay path (39) is formed in a roughly rectangular shape, extending from the middle of the second header plate (30B) in the left-right direction to near the left surface (20f) of the discharge cell (20).

[0049] The high-voltage side outlet relay path (40) is formed along the rear surface (20d) of the discharge cell (20). The high-voltage side outlet relay path (40) is located slightly to the right of the rear edge of the second header plate (30B). The high-voltage side outlet relay path (40) is formed in a roughly rectangular shape, extending from the middle of the second header plate (30B) in the left-right direction to near the right surface (20e) of the discharge cell (20).

[0050] The second header plate (30B) has a low-pressure side inlet branch (41), a low-pressure side outlet branch (42), a high-pressure side inlet branch (43), and a high-pressure side outlet branch (44). These branch passages penetrate the second header plate (30B) in a third direction. The upper side of these branch passages is closed by the first header plate (30A), and the lower side is closed by the third header plate (30C).

[0051] The low-pressure side inlet branch (41) has its inlet end connected to the heat transfer medium inlet (33) and its outlet end connected to the low-pressure side inlet relay (37). The low-pressure side inlet branch (41) has a portion that extends from the heat transfer medium inlet (33) toward the corner between the front and left sides of the second header plate (30B), and a portion that extends further forward from this portion and connects to the low-pressure side inlet relay (37).

[0052] The low-pressure side outlet branch (42) has its outlet end connected to the heat transfer fluid outlet (34) and its inlet end connected to the low-pressure side outlet relay (38). The low-pressure side outlet branch (42) has a portion that extends from the heat transfer fluid outlet (34) toward the corner between the front and right sides of the second header plate (30B), and a portion that extends further forward from this portion and connects to the low-pressure side outlet relay (38).

[0053] The high-pressure side inlet branch (43) has its inlet end connected to the heat transfer medium inlet (33) and its outlet end connected to the high-pressure side inlet relay (39). The high-pressure side inlet branch (43) has a portion extending from the heat transfer medium inlet (33) to the center of the second header plate (30B), a portion extending further rearward from this portion, a portion extending from this portion toward the corner between the rear and left edges of the second header plate (30B), and a portion extending further rearward from this portion to connect to the high-pressure side inlet relay (39).

[0054] Thus, the high-pressure side inlet branch (43) has a curved shape. The length of the flow path of the high-pressure side inlet branch (43) is greater than the length of the flow path of the low-pressure side inlet branch (41).

[0055] The high-pressure side outlet branch (44) has its outlet end connected to the heat transfer fluid outlet (34) and its inlet end connected to the high-pressure side outlet relay (40). The high-pressure side outlet branch (44) has a portion extending from the heat transfer fluid outlet (34) to the center of the second header plate (30B), a portion extending further rearward from this portion, a portion extending from this portion toward the corner between the rear and right edges of the second header plate (30B), and a portion extending further rearward from this portion to connect to the high-pressure side outlet relay (40).

[0056] Thus, the high-pressure side outlet branch (44) has a curved shape. The length of the flow path of the high-pressure side outlet branch (44) is greater than the length of the flow path of the low-pressure side outlet branch (42).

[0057] (2-2-3) Third Header Board A second gas inlet relay path (45) and a second gas outlet relay path (46) are formed in the third header plate (30C). The second gas inlet relay path (45) and the second gas outlet relay path (46) are circular holes that penetrate the third header plate (30C) in a third direction. These holes may be elongated. The second gas inlet relay path (45) is located in a position that overlaps with the first gas inlet relay path (35) in the third direction, and the second gas outlet relay path (46) is located in a position that overlaps with the first gas outlet relay path (36) in the third direction.

[0058] The third header plate (30C) has a low-pressure inlet opening (O1), a low-pressure outlet opening (O2), a high-pressure inlet opening (O3), and a high-pressure outlet opening (O4). These openings penetrate the third header plate (30C) in a third direction. These openings are also formed in several other substrates (S), which will be described in detail later. Below, these openings formed in the third header plate (30C) will be described in detail as representative examples.

[0059] The low-pressure side inlet opening (O1) is formed along the front surface (20c) of the discharge cell (20). The low-pressure side inlet opening (O1) is located slightly to the left of the front edge of the third header plate (30C). The low-pressure side inlet opening (O1) is formed in a roughly rectangular shape, extending from the middle of the third header plate (30C) in the left-right direction to near the left surface (20f) of the discharge cell (20). In the third direction, the low-pressure side inlet opening (O1) is located in a position that overlaps with the low-pressure side inlet relay path (37).

[0060] The low-pressure side outlet opening (O2) is formed along the front surface (20c) of the discharge cell (20). The low-pressure side outlet opening (O2) is located slightly to the right of the front edge of the second header plate (30B). The low-pressure side outlet opening (O2) is formed in a roughly rectangular shape, extending from the middle of the second header plate (30B) in the left-right direction to near the right surface (20e) of the discharge cell (20). In the third direction, the low-pressure side outlet opening (O2) is located in a position that overlaps with the low-pressure side outlet relay path (38).

[0061] The high-voltage side inlet opening (O3) is formed along the rear surface (20d) of the discharge cell (20). The high-voltage side inlet opening (O3) is located slightly to the left of the rear edge of the second header plate (30B). The high-voltage side inlet opening (O3) is formed in a roughly rectangular shape, extending from the middle of the second header plate (30B) in the left-right direction to near the left surface (20f) of the discharge cell (20). In the third direction, the high-voltage side inlet opening (O3) is located in a position that overlaps with the high-voltage side inlet relay path (39).

[0062] The high-pressure side outlet opening (O4) is formed along the rear surface (20d) of the discharge cell (20). The high-pressure side outlet opening (O4) is located slightly to the right of the rear edge of the second header plate (30B). The high-pressure side outlet opening (O4) is formed in a roughly rectangular shape, extending from the middle of the second header plate (30B) in the left-right direction to near the right surface (20e) of the discharge cell (20). In the third direction, the high-pressure side outlet opening (O4) is located in a position that overlaps with the high-pressure side outlet relay path (40).

[0063] (2-3) Low-pressure side cooling unit The low-pressure side cooling unit (50) is positioned adjacent to the low-pressure electrode module (61) of the discharge unit (DU). As shown in Figure 6, the low-pressure side cooling unit (50) has, from top to bottom, a first upper partition plate (50A), a first upper flow path plate (50B), a first intermediate plate (50C), a first lower flow path plate (50D), and a first lower partition plate (50E).

[0064] (2-3-1) First upper partition plate The first upper partition plate (50A) has a gas inlet opening (O5) and a gas outlet opening (O6). These openings penetrate the first upper partition plate (50A) in a third direction. These openings are also formed in several other substrates, the details of which will be described later. Below, these openings formed in the first upper partition plate (50A) will be described in detail as representative examples.

[0065] The gas inlet opening (O5) is formed along the right side (20e) of the discharge cell (20). The gas inlet opening (O5) extends in the front-rear direction along the right side of the first upper partition plate (50A). In the third direction, the gas inlet opening (O5) is located in a position that overlaps with the second gas inlet relay path (45).

[0066] The gas outlet opening (O6) is formed along the left side (20f) of the discharge cell (20). The gas outlet opening (O6) extends in the front-rear direction along the left side of the first upper partition plate (50A). In the third direction, the gas outlet opening (O6) is located in a position that overlaps with the second gas outlet relay path (46).

[0067] The first upper partition plate (50A) has a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the first upper partition plate (50A) in a third direction.

[0068] (2-3-2) First upper flow channel plate The first upper flow channel plate (50B) has a gas inlet opening (O5), a gas outlet opening (O6), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the first upper flow channel plate (50B) in a third direction.

[0069] The first upper flow channel plate (50B) has a first upper upstream flow channel (51) and a first upper downstream flow channel (52) formed therein. These flow channels penetrate the first upper flow channel plate (50B) in a third direction. In this embodiment, the first upper flow channel plate (50B) has four first upper upstream flow channels (51) and four first upper downstream flow channels (52) formed therein.

[0070] The first upper upstream channel (51) is formed in a rectangular shape extending in the second direction, which is the front-to-back direction. The first upper upstream channel (51) may also be trapezoidal in shape. The first upper upstream channel (51) extends from near the front surface (20c) of the discharge cell (20) to near the high-pressure side inlet opening (O3). Multiple first upper upstream channels (51) are arranged parallel to each other at equal intervals in the left-to-right direction. Multiple first upper upstream channels (51) may be arranged at different intervals in the left-to-right direction. The front end (inlet end) of each first upper upstream channel (51) is located in a position that coincides with the low-pressure side inlet opening (O1) in the third direction.

[0071] The first upper downstream channel (52) is formed in a rectangular shape extending in the second direction, which is the front-to-back direction. The first upper lower channel (52) may be trapezoidal in shape. The first upper downstream channel (52) extends from near the front surface (20c) of the discharge cell (20) to near the high-pressure side outlet opening (O4). Multiple first upper downstream channels (52) are arranged parallel to each other at equal intervals in the left-to-right direction. The front end (outlet end) of each first upper downstream channel (52) is located in a position that coincides with the low-pressure side outlet opening (O2) in the third direction.

[0072] The upper side of the first upper upstream channel (51) is closed by the first upper partition plate (50A), except for its inlet end (front end). The lower side of the first upper upstream channel (51) is closed by the first intermediate plate (50C), except for its inlet end (front end) and outlet end (rear end). The upper side of the first upper downstream channel (52) is closed by the first upper partition plate (50A), except for its outlet end (front end). The lower side of the first upper downstream channel (52) is closed by the first intermediate plate (50C), except for its inlet end (rear end) and outlet end (front end).

[0073] (2-3-3) First Intermediate Plate The first intermediate plate (50C) has a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the first intermediate plate (50C) in a third direction.

[0074] A first intermediate flow path (53) is formed in the first intermediate plate (50C). The first intermediate flow path (53) extends in the left-right direction, which is the first direction, along the rear surface (20d) of the discharge cell (20). Specifically, the first intermediate flow path (53) extends from near the gas inlet opening (O5) to near the gas outlet opening (O6). The upstream portion of the first intermediate flow path (53) is adjacent to the high-pressure side inlet opening (O3), and the downstream portion of the first intermediate flow path (53) is adjacent to the high-pressure side outlet opening (O4). In the third direction, the upstream portion of the first intermediate flow path (53) is located at a position that coincides with the rear end (outlet end) of each first upper upstream flow path (51). In the third direction, the downstream portion of the first intermediate flow path (53) is located at a position that coincides with the rear end (inlet end) of each first upper downstream flow path (52).

[0075] (2-3-4) First lower channel plate The structure of the first lower flow channel plate (50D) is basically the same as that of the first upper flow channel plate (50B). The first lower flow channel plate (50D) has a gas inlet opening (O5), a gas outlet opening (O6), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the first lower flow channel plate (50D) in a third direction.

[0076] The first lower channel plate (50D) has a first lower upstream channel (54) and a first lower downstream channel (55) formed therein. These channels penetrate the first lower channel plate (50D) in a third direction. In this embodiment, the first lower channel plate (50D) has four first lower upstream channels (54) and four first lower downstream channels (55) formed therein.

[0077] The first lower upstream channel (54) extends in the second direction, which is the front-to-back direction. The first lower upstream channel (54) extends from near the front surface (20c) of the discharge cell (20) to near the high-pressure side inlet opening (O3). Multiple first lower upstream channels (54) are arranged parallel to each other at equal intervals in the left-to-right direction. The front end (inlet end) of each first lower upstream channel (54) is located in a position that coincides with the low-pressure side inlet opening (O1) in the third direction.

[0078] The first lower downstream channel (55) extends in the second direction, which is the front-to-back direction. The first lower downstream channel (55) extends from near the front surface (20c) of the discharge cell (20) to near the high-pressure side outlet opening (O4). Multiple first lower downstream channels (55) are arranged parallel to each other at equal intervals in the left-to-right direction. The front end (outlet end) of each first lower downstream channel (55) is located in a position that coincides with the low-pressure side outlet opening (O2) in the third direction.

[0079] The upper side of the first lower upstream channel (54) is blocked by the first intermediate plate (50C), except for its inlet end (front end) and outlet end (rear end). The lower side of the first lower upstream channel (54) is blocked by the first lower partition plate (50E), except for its inlet end (front end). The upper side of the first lower downstream channel (55) is blocked by the first intermediate plate (50C), except for its outlet end (front end) and inlet end (rear end). The lower side of the first lower downstream channel (55) is blocked by the first lower partition plate (50E), except for its outlet end (front end).

[0080] (2-3-5) First lower partition plate The first lower partition plate (50E) has a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the first lower partition plate (50E) in a third direction.

[0081] (2-4) Discharge Unit As shown in Figures 7 and 8, the discharge unit (DU) has a discharge section (60). The discharge section (60) has a low-pressure electrode module (61) and a high-pressure electrode module (62) facing each other. In the first discharge unit (DU1) and the third discharge unit (DU3), the low-pressure electrode module (61) is located on the upper side and the high-pressure electrode module (62) is located on the lower side. In the second discharge unit (DU2), the high-pressure electrode module (62) is located on the upper side and the low-pressure electrode module (61) is located on the lower side. In the discharge section (60), a discharge space (63) is formed between the low-pressure electrode module (61) and the high-pressure electrode module (62).

[0082] In the discharge cell (20), the high-voltage electrode modules (62) and low-voltage electrode modules (61) of adjacent discharge units (DU) face each other in the third direction (see Figures 10 and 11).

[0083] The low-voltage electrode module (61) has a first base (61a) and a plurality of first protrusions (61b) projecting from the first base (61a) toward the high-voltage electrode module (62). The first base (61a) constitutes the main body of the substrate (S). The first base (61a) is made up of a flat plate with a rectangular parallelepiped shape in plan view. The first base (61a) constitutes the low-voltage dielectric. A low-voltage electrode (61c) is formed on the back (top) surface of the first base (61a). The low-voltage electrode (61c) is electrically connected to the low-voltage side (ground side) of the power supply unit (11). The low-voltage electrode (61c) is made up of a metal film, but may also be a plate-shaped electrode. The first protrusions (61b) are formed in a horizontally elongated rod shape in the left-right direction. The plurality of first protrusions (61b) are arranged parallel to each other so as to be equally spaced in the front-back direction.

[0084] The high-voltage electrode module (62) has a second base (62a) and a plurality of second protrusions (62b) projecting from the second base (62a) toward the low-voltage electrode module (61). The second base (62a) constitutes the main body of the substrate (S). The second base (62a) is composed of a rectangular flat plate in plan view. The second base (62a) constitutes the high-voltage side dielectric. A high-voltage electrode (62c) is formed on the back (bottom) surface of the second base (62a). The high-voltage electrode (62c) is electrically connected to the high-voltage side of the power supply unit (11). The high-voltage electrode (62c) is composed of a metal film, but may also be a plate-shaped electrode. The second protrusions (62b) are formed in a horizontally elongated rod shape in the left-right direction. The plurality of second protrusions (62b) are arranged parallel to each other so as to be equally spaced in the front-back direction.

[0085] Between the first protrusion (61b) and the second protrusion (62b), a glass bonding layer (64) is formed in the third direction between the tip of the first protrusion (61b) and the tip of the second protrusion (62b). The bonding layer (64) constitutes an insulator.

[0086] Multiple discharge spaces (63) are formed between the first base (61a), the first protrusion (61b), the second base (62a), and the second protrusion (62b). These discharge spaces (63) are elongated spaces extending in the left-right direction. When a voltage is applied to the high-voltage electrode (62c), a discharge (more precisely, a barrier discharge) occurs in the discharge spaces (63). In the discharge spaces (63), gas (oxygen gas and ozone gas) flows in the left-right direction, which is the first direction.

[0087] A first discharge-side inlet passage (65) and a first discharge-side outlet passage (66) are formed in the first base portion (61a). The first discharge-side inlet passage (65) and the first discharge-side outlet passage (66) penetrate the first base portion (61a) in a third direction. The first discharge-side inlet passage (65) communicates with the gas inlet opening (O5) of the first lower partition plate (50E), and the second discharge-side outlet passage (68) communicates with the gas outlet opening (O6) of the first lower partition plate (50E).

[0088] The first discharge-side inlet passage (65) is formed along the right side (20e) of the discharge cell (20). The first discharge-side inlet passage (65) extends in the front-rear direction along the right side of the first base (61a). The first discharge-side inlet passage (65) communicates with the inlet ends of the multiple discharge spaces (63). The first discharge-side outlet passage (66) is formed along the left side (20f) of the discharge cell (20). The first discharge-side outlet passage (66) extends in the front-rear direction along the left side of the first base (61a). The first discharge-side outlet passage (66) communicates with the outlet ends of the multiple discharge spaces (63).

[0089] A second discharge-side inlet passage (67) and a second discharge-side outlet passage (68) are formed in the second base (62a). The second discharge-side inlet passage (67) and the second discharge-side outlet passage (68) penetrate the second base (62a) in a third direction. The second discharge-side inlet passage (67) is formed along the right side (20e) of the discharge cell (20). The second discharge-side inlet passage (67) extends in the front-rear direction along the right side of the second base (62a). The second discharge-side inlet passage (67) communicates with the inlet ends of the multiple discharge spaces (63). The second discharge-side inlet passage (67) communicates with the first discharge-side inlet passage (65) of the first base (61a). The second discharge-side outlet passage (68) is formed along the left side (20f) of the discharge cell (20). The second discharge-side outflow passage (68) extends in the front-rear direction along the left side of the second base (62a). The second discharge-side outflow passage (68) communicates with the outflow ends of the multiple discharge spaces (63). The second discharge-side outflow passage (68) communicates with the first discharge-side outflow passage (66) of the first base (61a).

[0090] The first base portion (61a) and the second base portion (62a) are formed with a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4), respectively.

[0091] (2-5) High-pressure side cooling unit The high-pressure side cooling unit (70) is positioned adjacent to the high-pressure electrode module (62) of the discharge unit (DU). As shown in Figure 9, the high-pressure side cooling unit (70) has, from top to bottom, a second upper partition plate (70A), a second upper flow path plate (70B), a second intermediate plate (70C), a second lower flow path plate (70D), and a second lower partition plate (70E). The configuration of the second upper partition plate (70A) and the second lower partition plate (70E) is the same as the configuration of the first upper partition plate (50A) and the first lower partition plate (50E) described above, so a detailed explanation is omitted.

[0092] (2-5-1) Second upper flow channel plate The second upper flow channel plate (70B) has a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), and a low-pressure side outlet opening (O2). These openings penetrate the second upper flow channel plate (70B) in a third direction.

[0093] The second upper flow channel plate (70B) has a second upper upstream flow channel (71) and a second upper downstream flow channel (72) formed therein. These flow channels penetrate the second upper flow channel plate (70B) in a third direction. In this embodiment, the second upper flow channel plate (70B) has four second upper upstream flow channels (71) and four second upper downstream flow channels (72) formed therein.

[0094] The second upper upstream channel (71) extends in the second direction, which is the front-to-back direction. The second upper upstream channel (71) extends from near the low-pressure side inlet opening (O1) to near the rear surface (20d) of the discharge cell (20). Multiple second upper upstream channels (71) are arranged parallel to each other at equal intervals in the left-to-right direction. The rear end (inlet end) of each second upper upstream channel (71) is located in a position that coincides with the high-pressure side inlet opening (O3) in the third direction.

[0095] The second upper downstream channel (72) extends in the second direction, which is the front-to-back direction. The second upper downstream channel (72) extends from near the low-pressure side outlet opening (O2) to near the rear surface (20d) of the discharge cell (20). Multiple second upper downstream channels (72) are arranged parallel to each other at equal intervals in the left-to-right direction. The rear end (outlet end) of each second upper downstream channel (72) is located in a position that coincides with the high-pressure side outlet opening (O4) in the third direction.

[0096] The upper side of the second upper upstream channel (71) is closed by the second upper partition plate (70A), except for its inlet end (rear end). The lower side of the second upper upstream channel (71) is closed by the second intermediate plate (70C), except for its inlet end (rear end) and outlet end (front end). The upper side of the second upper downstream channel (72) is closed by the second upper partition plate (70A), except for its outlet end (rear end). The lower side of the second upper downstream channel (72) is closed by the first intermediate plate (50C), except for its inlet end (front end) and outlet end (rear end).

[0097] (2-5-2) Second Intermediate Plate The second intermediate plate (70C) has a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the second intermediate plate (70C) in a third direction.

[0098] A second intermediate flow path (73) is formed in the second intermediate plate (70C). The second intermediate flow path (73) extends in the left-right direction, which is the first direction, along the front surface (20c) of the discharge cell (20). Specifically, the second intermediate flow path (73) extends from near the gas inlet opening (O5) to near the gas outlet opening (O6). The upstream portion of the second intermediate flow path (73) is adjacent to the low-pressure side inlet opening (O1), and the downstream portion of the second intermediate flow path (73) is adjacent to the low-pressure side outlet opening (O2). In the third direction, the upstream portion of the second intermediate flow path (73) is located at a position that coincides with the front end (outlet end) of each second upper upstream flow path (71). In the third direction, the downstream portion of the second intermediate flow path (73) is located at a position that coincides with the front end (inlet end) of each second upper downstream flow path (72).

[0099] (2-5-3) Second lower channel plate The structure of the second lower flow channel plate (70D) is basically the same as that of the second upper flow channel plate (70B). The second lower flow channel plate (70D) has a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), and a low-pressure side outlet opening (O2). These openings penetrate the second lower flow channel plate (70D) in a third direction.

[0100] The second lower channel plate (70D) has a second lower upstream channel (74) and a second lower downstream channel (75) formed within it. These channels penetrate the second lower channel plate (70D) in a third direction. In this embodiment, the second lower channel plate (70D) has four second lower upstream channels (74) and four second lower downstream channels (75) formed within it.

[0101] The second lower upstream channel (74) extends in the second direction, which is the front-to-back direction. The second lower upstream channel (74) extends from near the low-pressure side inlet opening (O1) to near the rear surface (20d) of the discharge cell (20). Multiple second lower upstream channels (74) are arranged parallel to each other at equal intervals in the left-to-right direction. The rear end (inlet end) of each second lower upstream channel (74) is located in a position that coincides with the high-pressure side inlet opening (O3) in the third direction.

[0102] The second lower downstream channel (75) extends in the second direction, which is the front-to-back direction. The second lower downstream channel (75) extends from near the low-pressure side outlet opening (O2) to near the rear surface (20d) of the discharge cell (20). Multiple second lower downstream channels (75) are arranged parallel to each other at equal intervals in the left-to-right direction. The rear end (outlet end) of each second lower downstream channel (75) is located in a position that coincides with the high-pressure side outlet opening (O4) in the third direction.

[0103] The upper side of the second lower upstream channel (74) is blocked by the second intermediate plate (70C), except for its inlet end (rear end) and outlet end (front end). The lower side of the second lower upstream channel (74) is blocked by the second lower partition plate (70E), except for its inlet end (rear end). The upper side of the second lower downstream channel (75) is blocked by the second intermediate plate (70C), except for its inlet end (front end) and outlet end (rear end). The lower side of the second lower downstream channel (75) is blocked by the second lower partition plate (70E), except for its outlet end (rear end).

[0104] (2-6) End Plate As shown in Figure 4, the end plate (E) is the substrate located at the bottom of the discharge cell (20). No openings are formed in the end plate (E). The end plate (E) blocks the gas inlet opening (O5), gas outlet opening (O6), low-pressure side inlet opening (O1), low-pressure side outlet opening (O2), high-pressure side inlet opening (O3), and high-pressure side outlet opening (O4) of the adjacent substrate (S).

[0105] (3) Heat transfer medium channel A heat transfer medium channel (P) through which cooling water flows is formed in the discharge cell (20). Details of the heat transfer medium channel (P) will be explained mainly with reference to Figures 10 and 11. Figure 10 shows the upstream channel in the heat transfer medium channel (P), and Figure 11 shows the downstream channel in the heat transfer medium channel (P).

[0106] The heat transfer medium flow path (P) has a high-pressure side flow path (HP) corresponding to the high-pressure electrode module (62) and a low-pressure side flow path (LP) corresponding to the low-pressure electrode module (61). The high-pressure side flow path (HP) and the low-pressure side flow path (LP) branch off from the outlet end of the heat transfer medium inlet passage (33) (see Figure 10). The outlet end of the cooling water inlet is a diversion section (86) that separates the heat transfer medium into the high-pressure side flow path (HP) and the low-pressure side flow path (LP). The outlet ends of the high-pressure side flow path (HP) and the low-pressure side flow path (LP) are connected to the inlet end of the heat transfer medium outlet passage (34) (see Figure 11). The inlet end of the heat transfer medium outlet passage (34) is a confluence section (87) where the heat transfer medium from the high-pressure side flow path (HP) and the low-pressure side flow path (LP) merge.

[0107] (3-1) High-pressure side channel The high-pressure side flow path (HP) includes a high-pressure side inlet branch (43), a high-pressure side inlet relay (39), a high-pressure side inlet (HP1), a high-pressure side cooling flow path (HP2), a high-pressure side outlet (HP3), a high-pressure side outlet relay (40), and a high-pressure side outlet branch (44).

[0108] The high-pressure side inlet passage (HP1) is a passage for introducing cooling water, which is the heat transfer medium, into the high-pressure side cooling passage (HP2). The high-pressure side inlet passage (HP1) is formed in both the cooling unit (CU) and the discharge unit (DU). In both the cooling unit (CU) and the discharge unit (DU), the high-pressure side inlet passage (HP1) is formed by connecting multiple high-pressure side inlet openings (O3) in the vertical direction. The high-pressure side inlet passage (HP1) is formed along the rear surface (20d), which is the third surface of the discharge cell (20).

[0109] The high-pressure side cooling channel (HP2) is a cooling channel through which a heat transfer medium flows to cool the high-pressure electrode module (62). The high-pressure side cooling channel (HP2) is formed adjacent to the high-pressure electrode module (62). In this embodiment, the high-pressure side cooling channel (HP2) is formed in the second cooling unit (CU2) and the fourth cooling unit (CU4). The high-pressure side cooling channel (HP2) is composed of a second upper upstream channel (71), a second lower upstream channel (74), a second intermediate channel (73), a second upper downstream channel (72), and a second lower downstream channel (75). The second upper upstream channel (71) and the second lower upstream channel (74) each constitute the first cooling channel (81), the second upper downstream channel (72) and the second lower downstream channel (75) each constitute the second cooling channel (82), and the second intermediate channel (73) constitutes the intermediate channel (83).

[0110] The high-pressure side outlet passage (HP3) is a passage for draining the heat transfer medium from the high-pressure side cooling passage (HP2). The high-pressure side outlet passage (HP3) is formed in the cooling unit (CU) and the discharge unit (DU), respectively. In the cooling unit (CU) and the discharge unit (DU), the high-pressure side outlet passage (HP3) is formed by connecting multiple high-pressure side outlet openings (O4) in the vertical direction. The high-pressure side outlet passage (HP3) is formed along the rear surface (20d), which is the third surface of the discharge cell (20).

[0111] Of the high-pressure side flow path (HP), the flow path from the diversion section (86), which is the outlet end of the heat transfer medium inlet passage (33), to the inlet end of the high-pressure side cooling flow path (HP2) closest to the diversion section (86), constitutes the inlet high-pressure side main flow path (91). Of the high-pressure side flow path (HP), the flow path from the confluence section (87), which is the inlet end of the heat transfer medium outlet passage (34), to the outlet end of the high-pressure side cooling flow path (HP2) closest to the confluence section (87), constitutes the outlet high-pressure side main flow path (92). The inlet high-pressure side main flow path (91) is the flow path between point a and point b in Figure 10. The outlet high-pressure side main flow path (92) is the flow path between point d and point e in Figure 11.

[0112] In the discharge cell (20), the high-pressure inlet passages (HP1) of each of the multiple discharge units (DU) and multiple cooling units (CU) are connected in the vertical direction. In the discharge cell (20), the high-pressure outlet passages (HP3) of each of the multiple discharge units (DU) and multiple cooling units (CU) are connected in the vertical direction. As a result, multiple high-pressure cooling channels (HP2) are formed in parallel in the discharge cell (20).

[0113] (3-2) Low-pressure side flow path The low-pressure side flow path (LP) includes a low-pressure side inlet branch (41), a low-pressure side inlet relay (37), a low-pressure side inlet (LP1), a low-pressure side cooling flow path (LP2), a low-pressure side outlet (LP3), a low-pressure side outlet relay (38), and a low-pressure side outlet branch (42).

[0114] The low-pressure side inlet passage (LP1) is a passage for introducing cooling water, which is the heat transfer medium, into the low-pressure side cooling passage (LP2). The low-pressure side inlet passage (LP1) is formed in the cooling unit (CU) and the discharge unit (DU), respectively. In the cooling unit (CU) and the discharge unit (DU), the low-pressure side inlet passage (LP1) is formed by connecting multiple low-pressure side inlet openings (O1) in the vertical direction. The low-pressure side inlet passage (LP1) is formed along the front surface (20c), which is the fourth surface of the discharge cell (20).

[0115] The low-pressure side cooling channel (LP2) is a cooling channel through which a heat transfer medium flows to cool the low-pressure electrode module (61). The low-pressure side cooling channel (LP2) is formed adjacent to the low-pressure electrode module (61). In this embodiment, the low-pressure side cooling channel (LP2) is formed in the first cooling unit (CU1) and the third cooling unit (CU3). The low-pressure side cooling channel (LP2) is composed of a first upper upstream channel (51), a first lower upstream channel (54), a first intermediate channel (53), a first upper downstream channel (52), and a first lower downstream channel (55). The first upper upstream channel (51) and the first lower upstream channel (54) each constitute a first cooling channel (81), the first upper downstream channel (52) and the first lower downstream channel (55) each constitute a second cooling channel (82), and the first intermediate channel (53) constitutes an intermediate channel (83).

[0116] The low-pressure side outlet passage (LP3) is a passage for draining the heat transfer medium from the low-pressure side cooling passage (LP2). The low-pressure side outlet passage (LP3) is formed in the cooling unit (CU) and the discharge unit (DU), respectively. In the cooling unit (CU) and the discharge unit (DU), the low-pressure side outlet passage (LP3) is formed by connecting multiple low-pressure side outlet openings (O2) in the vertical direction. The low-pressure side outlet passage (LP3) is formed along the front surface (20c), which is the fourth surface of the discharge cell (20).

[0117] Of the low-pressure side flow paths (LP), the flow path from the diversion section (86), which is the outlet end of the heat transfer medium inlet passage (33), to the nearest low-pressure side cooling flow path (LP2) from the diversion section (86) constitutes the inlet low-pressure side main flow path (93). Of the low-pressure side flow paths (LP), the flow path from the confluence section (87), which is the inlet end of the heat transfer medium outlet passage (34), to the nearest low-pressure side cooling flow path (LP2) from the confluence section (87) constitutes the outlet low-pressure side main flow path (94). The inlet low-pressure side main flow path (93) is the flow path between point a and point c in Figure 10. The outlet low-pressure side main flow path (94) is the flow path between point d and point f in Figure 11.

[0118] In the discharge cell (20), the low-pressure inflow passages (LP1) of each of the multiple discharge units (DU) and multiple cooling units (CU) are connected in the vertical direction. In the discharge cell (20), the low-pressure outflow passages (LP3) of each of the multiple discharge units (DU) and multiple cooling units (CU) are connected in the vertical direction. As a result, the discharge cell (20) is provided with multiple low-pressure cooling passages (LP2) arranged in parallel with each other.

[0119] (3-3) Grounding part Grounding sections (8A, 8B) are connected to the heat transfer medium flow path (P). The grounding sections (8A, 8B) are connected to the ground. The grounding sections (8A, 8B) have the function of releasing the current that flows through the heat transfer medium flow path (P) due to the discharge of the discharge section (60) to the ground. As shown in Figures 10 and 11, the grounding sections (8A, 8B) consist of a first grounding section (8A) and a second grounding section (8B). The first grounding section (8A) and the second grounding section (8B) are provided in the header unit (HU).

[0120] The first grounding point (8A) is located on the inflow side of the heat transfer medium flow path (P) and is provided in the flow path that diverts the heat transfer medium. Specifically, the first grounding point (8A) is provided between the high-pressure side cooling flow path (HP2) closest to the diversion point (86) and the low-pressure side cooling flow path (LP2) closest to the diversion point (86). In this embodiment, the first grounding point (8A) is provided in the diversion point (86). The first grounding point (8A) is configured, for example, by grounding a stainless steel fitting.

[0121] The flow path between the first grounding point (8A) and the high-pressure side cooling flow path (HP2) closest to the first grounding point (8A) constitutes the first flow path (F1). In other words, the first flow path (F1) is the flow path from the first grounding point (8A) to point b. The flow path between the first grounding point (8A) and the low-pressure side cooling flow path (LP2) closest to the first grounding point (8A) constitutes the second flow path (F2). In other words, the second flow path (F2) is the flow path from the first grounding point (8A) to point c. The first grounding point (8A) in this embodiment is provided in the flow division section (86). Therefore, the first flow path (F1) in this embodiment substantially constitutes the inflow high-pressure side main channel (91). The second flow path (F2) in this embodiment substantially constitutes the inflow low-pressure side main channel (93).

[0122] The second grounding point (8B) is located on the outlet side of the heat transfer medium flow path (P) and is provided in the flow path where the heat transfer mediums merge. Specifically, the second grounding point (8B) is provided between the high-pressure side cooling flow path (HP2) closest to the merging point (87) and the low-pressure side cooling flow path (LP2) closest to the merging point (87). In this embodiment, the second grounding point (8B) is provided at the merging point (87). The second grounding point (8B) is configured, for example, by grounding a stainless steel fitting.

[0123] The flow path between the second grounding section (8B) and the high-pressure side cooling flow path (HP2) closest to the second grounding section (8B) constitutes the third flow path (F3). In other words, the third flow path (F3) is the flow path from the second grounding section (8B) to point e. The flow path between the second grounding section (8B) and the low-pressure side cooling flow path (LP2) closest to the second grounding section (8B) constitutes the fourth flow path (F4). In other words, the fourth flow path (F4) is the flow path from the second grounding section (8B) to point f. The second grounding section (8B) in this embodiment is provided at the confluence section (87). Therefore, the third flow path (F3) in this embodiment substantially constitutes the outflow high-pressure side main channel (92). The fourth flow path (F4) in this embodiment substantially constitutes the outflow low-pressure side main channel (94).

[0124] (4) Gas inlet and gas outlet A gas inlet passage (GP1) is formed in both the cooling unit (CU) and the discharge unit (DU). In the cooling unit (CU), the gas inlet passage (GP1) is formed by connecting multiple gas inlet openings (O5) in the vertical direction. In the discharge unit (DU), the gas inlet passage (GP1) is formed by connecting a first discharge-side inlet passage (65) and a second discharge-side inlet passage (67) in the vertical direction. The gas inlet passage (GP1) is formed along the right surface (20e), which is the first surface of the discharge cell (20).

[0125] A gas outlet passage (GP2) is formed in both the cooling unit (CU) and the discharge unit (DU). In the cooling unit (CU), the gas outlet passage (GP2) is formed by connecting multiple gas outlet openings (O6) in the vertical direction. In the discharge unit (DU), the gas outlet passage (GP2) is formed by connecting the first discharge-side outlet passage (66) and the second discharge-side outlet passage (68) in the vertical direction. The gas outlet passage (GP2) is formed along the left surface (20f), which is the second surface of the discharge cell (20).

[0126] (5) Operating The basic operation of the ozone generator (1) is described below. When the ozone generator (1) is in operation, a high voltage is applied from the power supply unit (11) between the high-voltage electrode (62c) and the low-voltage electrode (61c) of the discharge unit (60). The oxygen gas supply unit (2) supplies oxygen gas to the discharge cell (20). The heat transfer medium supply unit (4) supplies cooling water to the discharge cell (20).

[0127] Oxygen gas flows sequentially through the gas inlet (31), the first gas inlet relay path (35), and the second gas inlet relay path (45), before flowing through the gas inlet path (GP1). From the gas inlet path (GP1), the oxygen gas is divided into the discharge spaces (63) of each discharge unit (DU). In the discharge spaces (63), barrier discharge occurs between the high-voltage electrode module (62) and the low-voltage electrode module (61). As a result, ozone gas is generated from the oxygen gas in the discharge spaces (63). In the discharge spaces (63), the ozone gas concentration increases from the upstream side to the downstream side, specifically from the right side to the left side in the first direction.

[0128] The gas containing ozone gas that flows out from each discharge space (63) merges in the gas outlet path (GP2), flows sequentially through the second gas outlet relay path (46), the first gas outlet relay path (36), and the gas outlet (32), and then flows out to the outside of the discharge cell (20). This gas is supplied from the ozone generator (1) to a designated object.

[0129] After flowing through the heat transfer medium inlet (33), the cooling water is divided into a high-pressure side channel (HP) and a low-pressure side channel (LP).

[0130] Cooling water flowing into the high-pressure side channel (HP) flows sequentially through the high-pressure side inlet branch (43) and the high-pressure side inlet relay (39) before flowing into the high-pressure side inlet (HP1). From the high-pressure side inlet (HP1), the cooling water is divided into multiple high-pressure side cooling channels (HP2). The cooling water flowing into the high-pressure side cooling channels (HP2) is mainly used to cool the high-pressure electrode module (62). The cooling water that flows out of each high-pressure side cooling channel (HP2) merges in the high-pressure side outlet (HP3) and flows sequentially through the high-pressure side outlet relay (40) and the high-pressure side outlet branch (44).

[0131] Cooling water flowing into the low-pressure side channel (LP) flows sequentially through the low-pressure side inlet branch (41) and the low-pressure side inlet relay (37) before flowing into the low-pressure side inlet (LP1). From the low-pressure side inlet (LP1), the cooling water is divided into multiple low-pressure side cooling channels (LP2). The cooling water flowing into the low-pressure side cooling channels (LP2) is mainly used to cool the low-pressure electrode module (61). The cooling water that flows out of each low-pressure side cooling channel (LP2) merges in the low-pressure side outlet (LP3) and flows sequentially through the low-pressure side outlet relay (38) and the low-pressure side outlet branch (42).

[0132] The cooling water from the high-pressure side outlet branch (44) and the low-pressure side outlet branch (42) merge in the heat transfer fluid outlet (34) and are then discharged to the outside of the discharge cell (20).

[0133] (6) Measures to reduce power consumption loss (6-1) Assignment When a high voltage is applied to the high-voltage electrode (62c) from the power supply unit (11), current may flow from the high-voltage electrode module (62) to the grounding unit (8A, 8B) via the nearby cooling channels (HP2, LP2). This results in wasted power during discharge. Consequently, the amount of ozone generated by the discharge cell (20) decreases, or it becomes necessary to enlarge the discharge cell (20) in order to increase the amount of ozone generated by the discharge cell (20). Therefore, in this embodiment, the following measures are taken to reduce such power loss.

[0134] (6-2) Configuration of the heat transfer medium flow path As shown in Figure 10, in the heat transfer medium flow path (P), the high-pressure side flow path (HP) and the low-pressure side flow path (LP) branch off from the diversion point (86) of the heat transfer medium inlet passage (33). The high-pressure side flow path (HP) and the low-pressure side flow path (LP) are connected to the junction (87) of the heat transfer medium outlet passage (34). In the high-pressure side flow path (HP), multiple high-pressure side cooling flow paths (HP2) are connected in parallel. In the low-pressure side flow path (LP), multiple low-pressure side cooling flow paths (LP2) are connected in parallel.

[0135] Here, let R1 be the electrical resistance of the first channel (F1). Let R2 be the electrical resistance of the second channel (F2). Let R3 be the electrical resistance of the third channel (F3). Let R4 be the electrical resistance of the fourth channel (F4).

[0136] In the heat transfer medium flow path (P) of this embodiment, the flow path length L1 of the first flow path (F1) is greater than the flow path length L2 of the second flow path (F2). Here, the first flow path (F1) and the second flow path (F2) are equal in other parameters that affect the electrical resistance of these flow paths (e.g., flow path width, resistance due to the material of the material surrounding the flow path, etc.). Therefore, when L1 is greater than L2, the electrical resistance value R1 of the first flow path (F1) becomes greater than the electrical resistance value R2 of the second flow path (F2). In other words, in this embodiment, the flow path length of the inflow high-pressure side main channel (91) is greater than the flow path length of the inflow low-pressure side main channel (93). The electrical resistance value of the inflow high-pressure side main channel (91) is greater than the electrical resistance value of the inflow low-pressure side main channel (93).

[0137] This configuration makes it difficult for current to flow from the high-pressure side cooling channel (HP2) to the first channel (F1) (i.e., the inflow high-pressure side main channel (91)) to the first ground section (8A), thereby reducing power consumption losses. In this embodiment, as shown in Figure 5, a first curved section (95) is formed in the high-pressure side inflow branch channel (43). The first curved section (95) has a shape that bulges toward the center of the second header plate (30B). This configuration makes it easy to increase the channel length L1 of the inflow high-pressure side main channel (91) or the first channel (F1).

[0138] In the heat transfer medium flow path (P), the flow path length L3 of the third flow path (F3) is greater than the flow path length L4 of the fourth flow path (F4). Here, the third flow path (F3) and the fourth flow path (F4) are equal in other parameters that affect the electrical resistance of these flow paths (e.g., flow path width, resistance due to the material of the material surrounding the flow path, etc.). Therefore, when L3 is greater than L4, the electrical resistance R3 of the third flow path (F3) becomes greater than the electrical resistance R4 of the fourth flow path (F4). In other words, in this embodiment, the flow path length of the outlet high-pressure side main channel (92) is greater than the flow path length of the outlet low-pressure side main channel (94). The electrical resistance of the outlet high-pressure side main channel (92) is greater than the electrical resistance of the outlet low-pressure side main channel (94).

[0139] This configuration makes it difficult for current to flow from the high-pressure side cooling channel (HP2) to the second grounding section (8B) via the third channel (i.e., the outflow high-pressure side main channel (92)), thereby reducing power consumption losses. In this embodiment, as shown in Figure 5, a second curved section (96) is formed in the high-pressure side outflow branch channel (44). The second curved section (96) has a shape that bulges toward the center of the second header plate (30B). This configuration makes it easy to increase the flow path length L3 of the outflow high-pressure side main channel (92).

[0140] In the heat transfer medium flow path (P), the flow path length of the inlet high-pressure side main channel (91) and the flow path length of the outlet high-pressure side main channel (92) are substantially equal. Therefore, the electrical resistance value of the inlet high-pressure side main channel (91) is substantially equal to the electrical resistance value of the outlet high-pressure side main channel (92). If the flow path length of the inlet high-pressure side main channel (91) and the flow path length of the outlet high-pressure side main channel (92) are of different magnitudes, the flow path resistance value of the shorter of the two will be dominant in reducing power consumption losses. For this reason, the flow path resistance value of the longer of the two will not contribute to reducing power consumption losses. In contrast, by making the flow path length of the inlet high-pressure side main channel (91) and the flow path length of the outlet high-pressure side main channel (92) equal, the respective flow path lengths of the inlet high-pressure side main channel (91) and the outlet high-pressure side main channel (92) can be kept to the minimum necessary. Therefore, the header unit (HU), and consequently the discharge cell (20), can be miniaturized.

[0141] (6-3) Arrangement of discharge units In this embodiment, as shown in Figures 10 and 11, the high-voltage electrode modules (62) of adjacent discharge sections (60) in the third direction face each other across the high-voltage side cooling channel (HP2). Specifically, the high-voltage electrode module (62) of the first discharge unit (DU1) and the high-voltage electrode module (62) of the second discharge unit (DU2) face each other across the high-voltage side cooling channel (HP2) of the second cooling unit (CU2). The low-voltage electrode modules (61) of adjacent discharge sections (60) in the third direction face each other across the low-voltage side cooling channel (LP2). Specifically, the low-voltage electrode module (61) of the second discharge unit (DU2) and the low-voltage electrode module (61) of the third discharge unit (DU3) face each other across the low-voltage side cooling channel (LP2) of the third cooling unit (CU3).

[0142] For example, in the comparative example shown in Figure 12, the high-voltage electrode module and low-voltage electrode module of adjacent discharge sections face each other, so there is a possibility that current may leak from the high-voltage electrode module to the low-voltage electrode module side through the cooling channel. In contrast, in the configuration of this embodiment, the high-voltage electrode module (62) and the low-voltage electrode module (61) do not face each other via the cooling channels (HP2, LP2), so such current leakage can be suppressed. Therefore, power consumption loss can be further reduced.

[0143] (7) Resistivity of the cooling water In this embodiment, the heat transfer medium supply unit (4), which is the supply unit, supplies cooling water with a resistivity of 15 [Ω·m] or more to the heat transfer medium inlet passage (33). The cooling water is tap water. By flowing water with a resistivity of 15 [Ω·m] or more through the heat transfer medium flow path (P), the power consumption loss reduction effect can be sufficiently obtained in the configuration of the discharge cell (20) of this embodiment. The results of verifying this point are shown in Figure 13. In this verification, the relationship between the resistivity of the heat transfer medium (cooling water) and the power consumption loss in the heat transfer medium flow path (P) was estimated for the discharge cell (20) according to this embodiment and the discharge cell related to the comparative example (see Figure 12). Here, the power supply conditions were an AC high-voltage power supply with an applied voltage of 2.85 [kV].

[0144] Verification results show that in this embodiment, the higher the resistivity of the heat transfer medium, the greater the reduction in power consumption loss. Specifically, when the resistivity was 15 [Ω·m] or higher, the power consumption loss in this embodiment became smaller than that of the comparative example. For this reason, it is preferable that the resistivity of the heat transfer medium be 15 [Ω·m] or higher.

[0145] Furthermore, when the resistivity of the heat transfer medium was 1000 [Ω·m] or higher, there was almost no power loss, and when it was 1000 [Ω·m] or higher, the power loss was almost zero. Therefore, it is even more preferable for the resistivity of the heat transfer medium to be 1000 [Ω·m] or higher.

[0146] (8) Other embodiments The above embodiment may also have the following configuration.

[0147] The first grounding section (8A) does not necessarily have to be located at the outlet end of the inlet passage (33), as long as it is provided between the high-pressure side cooling passage (HP2) closest to the outlet end of the inlet passage (33) and the low-pressure side cooling passage (LP2) closest to the outlet end of the inlet passage (33). In this case, it is preferable that the first grounding section (8A) be provided at the inlet low-pressure side main passage (93). In this case, the lengths of the inlet high-pressure side main passage (91) and the inlet low-pressure side main passage (93) may be equal.

[0148] The second grounding section (8B) does not necessarily have to be located at the inlet end of the outlet passage (34), as long as it is provided between the high-pressure side cooling channel (HP2) closest to the inlet end of the outlet passage (34) and the low-pressure side cooling channel (LP2) closest to the inlet end of the outlet passage (34). In this case, it is preferable that the second grounding section (8B) be provided at the low-pressure side outlet main channel (94). In this case, the lengths of the high-pressure side outlet main channel (92) and the low-pressure side outlet main channel (94) may be equal.

[0149] In this configuration as well, power loss can be reduced by aligning the high-voltage electrode modules (62) of adjacent discharge sections (60) with each other, and aligning the low-voltage electrode modules (61) of adjacent discharge sections (60) with each other.

[0150] The electrical resistance values ​​of the first channel (F1), second channel (F2), third channel (F3), and fourth channel (F4) may be set by parameters other than the channel length. Examples of such parameters include the channel width and the resistance value due to the material of the material surrounding the channel. In other words, as described above, as long as the relationships R1>R2 and R3>R4 are satisfied, it is not necessarily required that the relationships L1>L2 and L3>L4 be satisfied, and the relationships L1≦L2 and L3≦L4 may also be satisfied.

[0151] The first protrusion (61b) and the second protrusion (62b) of the discharge section (60) may be columnar projections.

[0152] The heat transfer medium in the heat transfer medium channel (P) does not have to be water; it may be a liquid such as a refrigerant or brine. The water may be pure water or tap water. The type of heat transfer medium affects the electrical resistance of each channel, thus impacting the reduction in power consumption loss mentioned above.

[0153] The number of discharge units (DUs) is not limited to the above embodiment. If the number of discharge units (DUs) is increased, the number of cooling units (CUs) will also increase accordingly.

[0154] The shape of the discharge cell (20) as viewed from a third direction may not be rectangular; for example, it may be circular.

[0155] The cooling unit (CU) may have one first cooling channel (81) and one second cooling channel (82). In this case, for example, the cooling unit (CU) may be configured without a first upper channel plate (50B) or a second lower channel plate (70D). This cooling unit (CU) can be positioned, for example, adjacent to the uppermost discharge unit (DU) or adjacent to the lowermost discharge unit (DU).

[0156] In the discharge unit (DU) of the above embodiment, dielectrics are provided on both the high-voltage electrode module (62) and the low-voltage electrode module (61), but dielectrics may be provided on only one of them. In other words, the discharge unit (DU) does not have to be a so-called double-sided barrier type, but may be a single-sided barrier type.

[0157] Although embodiments and modifications have been described above, it will be understood that various changes in form and details are possible without departing from the spirit and scope of the claims. Furthermore, elements of the above embodiments, modifications, and other embodiments may be combined or substituted as appropriate.

[0158] The designations "1st," "2nd," "3rd," etc., mentioned above are used to distinguish between the terms to which these designations are attached, and do not limit the number or order of those terms. [Industrial applicability]

[0159] As described above, this disclosure is useful for discharge cells and ozone generators. [Explanation of Symbols]

[0160] 1. Ozone generator 8A 1st grounding section 8B 2nd grounding part 33 Heat medium inflow path (inflow path) 34 Heat medium outflow path (outflow path) 60 Discharge section 61 Low-voltage electrode module 61a First base (dielectric on the low-voltage side) 61c low-pressure electrode 62 High-voltage electrode module 62a Second base (dielectric on the high-voltage side) 62c high-voltage electrode 91 Inflow high-voltage side main channel 92 Outflow high-voltage side main channel 93 Inflow low-pressure main channel 94 Low-pressure outflow main channel 95 First curved section 96 Second Curve Section F1 First channel F2 Second channel F3 Third channel F4 Fourth channel HP High-Pressure Side Channel HP2 High-Pressure Side Cooling Channel LP Low-Pressure Side Flow LP2 Low-pressure side cooling channel P Heat medium flow path

Claims

1. A plurality of discharge sections (60) each having a high-voltage electrode module (62) including a high-voltage electrode (62c) and a low-voltage electrode module (61) including a low-voltage electrode (61c), and a dielectric material (61a, 62a) provided in at least one of the high-voltage electrode module (62) and the low-voltage electrode module (61), A heat transfer medium channel (P) through which a heat transfer medium flows for cooling the discharge section (60), It comprises a grounding section (8A, 8B) connected to the heat transfer medium flow path (P), The heat transfer medium channel (P) is The inlet passage (33) into which the heat transfer medium flows, A high-pressure side channel (HP) and a low-pressure side channel (LP) branch off from the outlet end of the inflow channel (33), It includes an outlet passage (34) to which the outlet ends of the high-pressure side flow path (HP) and the low-pressure side flow path (LP) are connected, The high-pressure side flow path (HP) includes a plurality of high-pressure side cooling flow paths (HP2) that are connected in parallel to each other so that each is adjacent to each high-pressure electrode module (62) of a plurality of discharge sections (60), The low-pressure side flow path (LP) includes a plurality of low-pressure side cooling flow paths (LP2) that are connected in parallel to each other so that each one is adjacent to each low-pressure electrode module (61) of a plurality of discharge sections (60), The aforementioned grounding portions (8A, 8B) are A first grounding portion (8A) is provided between the high-pressure side cooling channel (HP2) closest to the outlet end of the inlet channel (33) and the low-pressure side cooling channel (LP2) closest to the outlet end of the inlet channel (33), It consists of a high-pressure side cooling channel (HP2) closest to the inlet end of the outflow channel (34) and a second grounding section (8B) provided between the low-pressure side cooling channel (LP2) closest to the inlet end of the outflow channel (34), The electrical resistance value of the first flow path (F1) between the first grounding portion (8A) and the high-pressure side cooling flow path (HP2) closest to the first grounding portion (8A) is greater than the electrical resistance value of the second flow path (F2) between the first grounding portion (8A) and the low-pressure side cooling flow path (LP2) closest to the first grounding portion (8A). The electrical resistance of the third flow path (F3) between the second grounding point (8B) and the high-pressure side cooling flow path (HP2) closest to the second grounding point (8B) is greater than the electrical resistance of the fourth flow path (F4) between the second grounding point (8B) and the low-pressure side cooling flow path (LP2) closest to the second grounding point (8B). Discharge cell for ozone generators.

2. Each high-voltage electrode module (62) of adjacent discharge sections (60) faces each other across the high-voltage side cooling channel (HP2), Each low-pressure electrode module (61) of adjacent discharge sections (60) faces each other across the low-pressure side cooling channel (LP2). A discharge cell for an ozone generator according to claim 1.

3. The length of the first channel (F1) is greater than the length of the second channel (F2), The length of the third channel (F3) is greater than the length of the fourth channel (F4). A discharge cell for an ozone generator according to claim 1.

4. The heat transfer medium channel (P) is The inflow high-pressure side main channel (91) is located between the outlet end of the inflow channel (33) and the nearest high-pressure side cooling channel (HP2) from the outlet end of the inflow channel (33), The inflow low-pressure main channel (93) is located between the outlet end of the inflow channel (33) and the nearest low-pressure side cooling channel (LP2) from the outlet end of the inflow channel (33), The outlet high-pressure side main channel (92) is located between the inlet end of the outlet channel (34) and the nearest high-pressure side cooling channel (HP2) from the inlet end of the outlet channel (34), The outlet passage (34) includes the outlet low-pressure side main passage (94) from the inlet end to the nearest low-pressure side cooling passage (LP2) from the inlet end of the outlet passage (34), The first grounding portion (8A) is provided at the outlet end of the inlet passage (33), The second grounding portion (8B) is provided at the inlet end of the outflow passage (34), The electrical resistance value of the inflow high-voltage side trunk (91) is greater than the electrical resistance value of the inflow low-voltage side trunk (93). The electrical resistance of the aforementioned high-voltage side trunk (92) is greater than the electrical resistance of the aforementioned low-voltage side trunk (94). A discharge cell for an ozone generator according to claim 1.

5. The length of the flow path of the inflow high-pressure side main channel (91) is greater than the length of the flow path of the inflow low-pressure side main channel (93), The flow path length of the aforementioned high-pressure outlet main channel (92) is greater than the flow path length of the aforementioned low-pressure outlet main channel (94). A discharge cell for an ozone generator according to claim 4.

6. The electrical resistance value of the inflow high-voltage side trunk (91) is equal to the electrical resistance value of the outflow high-voltage side trunk (92). A discharge cell for an ozone generator according to claim 5.

7. The length of the flow path of the inflow high-pressure side main channel (91) is equal to the length of the flow path of the outflow high-pressure side main channel (92). A discharge cell for an ozone generator according to claim 6.

8. Either or both of the inflow high-pressure side main channel (91) and the outflow high-pressure side main channel (92) include a curved section (95, 96) in which the flow path is curved. A discharge cell for an ozone generator according to claim 5.

9. A discharge cell (20) for an ozone generator according to any one of claims 1 to 8, The system includes a supply unit (4) that supplies water with a resistivity of 15 [Ω·m] or more to the inlet passage (33). Ozone generator.

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