Integrated electromagnetic acoustic sensor and sensing

Abstract

One exemplary integrated electromagnetic acoustic sensor includes a ground plane, a patch antenna above the ground plane for transmitting or receiving an electromagnetic (EM) signal having an EM signal frequency, and an array of capacitive micromachined acoustic transducers formed by cavities between the patch antenna and a base electrode for transmitting or receiving an acoustic signal having an acoustic signal frequency. One exemplary sensing method includes driving or sensing an EM signal between the ground plane and the patch antenna, and driving or sensing an acoustic signal between the patch antenna and a base electrode, the base electrode and the patch antenna having an array of capacitive micromachined acoustic transducer cavities therebetween.

Description

[Technical Field]

[0001] Cross-reference of related applications This application claims priority to U.S. Nonprovisional Patent Application No. 17 / 187,251, filed on 26 February 2021, the contents of which are incorporated herein by reference. [Background technology]

[0002] In pursuit of safer and more convenient transportation options, many automakers are developing self-driving cars that require a wide variety of sensors, often including arrays of acoustic and / or electromagnetic (EM) sensors to monitor the distance between the vehicle and nearby people, pets, vehicles, or obstacles. Acoustic sensors can offer low cost while struggling to achieve long-range measurements. EM sensors can offer high accuracy and motion detection while struggling to achieve short-range detection. Sensors for each technology may require a dedicated exterior that imposes potentially costly constraints on vehicle design. These constraints, or at least the associated cost impacts, may not be adequately minimized with existing sensor designs. [Prior art documents] [Non-patent literature]

[0003] [Non-Patent Document 1] O. Oralkan et al., "Capacitive micromachined ultrasonic transducers: next generation acoustic imaging?", IEEE Trans. Ultrasonics, Vol. 49, No. 11, November 2002. [Overview of the project] [Means for solving the problem]

[0004] An integrated electromagnetic acoustic sensor and sensing method that can at least partially address the shortcomings identified above are disclosed herein. One exemplary integrated electromagnetic acoustic sensor includes a ground surface, a patch antenna above the ground surface for transmitting or receiving an EM signal having an electromagnetic (EM) signal frequency, and an array of capacitive micromachined acoustic transducers formed by a cavity between the patch antenna and a base electrode for transmitting or receiving an acoustic signal having an acoustic signal frequency.

[0005] One exemplary sensing method includes the steps of driving or sensing an EM signal between a ground surface and a patch antenna, and driving or sensing an acoustic signal between the patch antenna and a base electrode, wherein the base electrode and the patch antenna have an array of capacitively fabricated acoustic transducer cavities between them.

[0006] An exemplary obstacle detector includes a radar transceiver coupled to supply an EM transmit signal to the EM node of a first integrated electromagnetic acoustic sensor and to acquire an EM receive signal from the EM node of a second integrated electromagnetic acoustic sensor, wherein the EM receive signal potentially has reflections from obstacles within the detector's radar range; an acoustic transceiver coupled to supply an acoustic transmit signal to the acoustic input of the first integrated electromagnetic acoustic sensor and to acquire an acoustic receive signal from the acoustic output of the second integrated electromagnetic acoustic sensor, wherein the acoustic receive signal potentially has reflections from obstacles within the detector's acoustic range, and the acoustic range includes a distance shorter than the radar range; and a controller coupled to the radar transceiver and the acoustic transceiver for acquiring reflection measurements and combining the reflection measurements to determine the distance to the nearest obstacle.

[0007] Exemplary sensors, sensing methods, and detectors may be employed individually or in combination with any preferred combination of one or more of the following optional features: 1. First and second differential signal nodes for transmitting an acoustic signal to or from the sensor; a first filter coupling the first differential signal node to a patch antenna; and a second filter coupling the second differential signal node to a base electrode, wherein the first and second filters are configured to allow the acoustic signal frequency to pass while blocking the EM signal frequency. 2. The first filter couples the first differential signal node to the patch antenna using a first EM frequency choke and couples the first differential signal node to ground plane using a first capacitor. 3. The second filter couples the second differential signal node to the base electrode using a second EM frequency choke and couples the second differential signal node to ground plane using a second capacitor. 4. The first and second EM frequency chokes each comprise a quarter-wave microstrip transmission line. 5. The first and second EM frequency chokes each include an inductor. 6. The EM signal frequency is 10 GHz or higher. 7. The acoustic signal frequency is 1 GHz or lower. 8. An EM signal node for transmitting radio frequency signals to or from the sensor, and a capacitor coupling the patch antenna to the EM signal node. 9. The patch antenna is isolated by no more than 2 microns from the base electrode and at least 200 microns from the ground surface. 10. The base electrode is located between the ground surface and the patch antenna. 11. The base electrode is patterned to provide a high impedance surface at the EM signal frequency. 12. Additional integrated electromagnetic acoustic sensors coupled to the radar transceiver and the acoustic transceiver, respectively, are configured to perform multi-input multi-output reflectance measurements. 13. The controller is configured to determine the direction to the nearest obstacle and the relative velocity of the nearest obstacle. [Brief explanation of the drawing]

[0008] [Figure 1] This is an overhead view of an example vehicle equipped with sensors. [Figure 2] This is a block diagram of an example driver assistance system. [Figure 3] This is a schematic diagram of an example obstacle detection system. [Figure 4] This is a block diagram of an exemplary MIMO radar transceiver chip. [Figure 5] This is a block diagram of an exemplary MIMO acoustic transceiver chip. [Figure 6A] (From O. Oralkan et al., "Capacitive micromachined ultrasonic transducers: next generation acoustic imaging?", IEEE Trans. Ultrasonics, Vol. 49, No. 11, November 2002) This is a diagram of an exemplary capacitive micromachined ultrasonic transducer. [Figure 6B] (From O. Oralkan et al., "Capacitive micromachined ultrasonic transducers: next generation acoustic imaging?", IEEE Trans. Ultrasonics, Vol. 49, No. 11, November 2002) This is a diagram of an exemplary capacitive micromachined ultrasonic transducer. [Figure 7A] This is a diagram of the first exemplary integrated electromagnetic acoustic (EMA) sensor. [Figure 7B] This is a diagram of the first exemplary integrated electromagnetic acoustic (EMA) sensor. [Figure 8A] This is a diagram of a second exemplary EMA sensor. [Figure 8B] This is a diagram of a second exemplary EMA sensor. [Figure 9A] This is a diagram illustrating an exemplary EMA sensor chip structure. [Figure 9B] This is a diagram illustrating an exemplary EMA sensor chip structure. [Figure 10] This is a schematic diagram of an exemplary EMA sensor chip. [Figure 11A] This is a schematic diagram of an exemplary EMA sensor array. [Figure 11B] It is an equivalent circuit diagram at the EM signal frequency. [Figure 11C] It is an equivalent circuit diagram at the acoustic signal frequency. [Figure 12A] An exemplary data cube representing a collected set of radar measurements. [Figure 12B] An exemplary data cube representing a converted set of radar measurements. [Figure 13] A data flow diagram for an exemplary obstacle detection system. [Figure 14] A flowchart of an exemplary obstacle detection method.

Mode for Carrying Out the Invention

[0009] Name The use of the terms “about” or “substantially” means that an element has a parameter where the value is expected to be close to the stated value. However, as is well known in the art, there can be small variations that prevent the value from being exactly as stated. Thus, differences such as a 10% difference are reasonable differences that one of ordinary skill in the art expects and knows to be acceptable with respect to the stated or ideal goal for one or more embodiments of the present disclosure. Also, the terms “first,” “second,” “next,” “last,” “before,” “after,” and other similar terms are used for purposes of ease of explanation and reference only and are not to be construed as limiting the arbitrary configuration of elements or series of operations for various embodiments of the present disclosure. Further, terms such as “coupled” and “connected” do not limit such interactions and signal communication between two or more devices, systems, components, etc. to direct interactions, and indirect coupling and indirect connection can also occur.

[0010] The following description and accompanying drawings are provided for illustrative purposes only and are not intended to limit this disclosure; that is, they provide a basis for a person skilled in the art to understand all modifications, equivalents, and substitutions that fall within the scope of the claims.

[0011] Figure 1 shows an exemplary vehicle 102 equipped with various integrated electromagnetic acoustic (EMA) sensor arrays, including a forward sensor array 104 for forward obstacle detection and a rear sensor array 106 for rear obstacle detection. A side acoustic sensor array 108 may be provided for blind spot obstacle detection. Each EMA sensor array may combine electromagnetic (EM) and acoustic measurements to perform short-range, medium-range, and long-range sensing to support multiple driver assistance services, such as parking assist, adaptive driving control, and automatic collision avoidance. Each sensor array may perform multi-input multiple-output (MIMO) sensing to enable determination of the distance and direction of obstacles. The number and configuration of sensors in the sensor configuration for vehicles with driver assistance and autonomous driving functions will vary.

[0012] Figure 2 shows an electronic control unit (ECU) 202 of a vehicle (e.g., 102) coupled to various sensors 204-206 as the center of a star topology. Of course, other sensor bus topologies, including series, parallel, and hierarchical (tree) topologies, are also suitable and intended for use according to the principles disclosed herein. Each sensor includes an EM transceiver and / or acoustic transceiver coupled to one of the transmit and receive antenna arrays 104A-108B to transmit EM waves or acoustic waves, receive reflections, and determine the spatial relationship of the vehicle to its surroundings. To provide automatic parking, assisted parking, lane following, lane change assistance, obstacle and blind spot detection, automatic braking, autonomous driving, and other desired features, the ECU 202 may be further connected to a set of actuators, such as a turn signal actuator 208, a steering actuator 210, a braking actuator 212, and a throttle actuator 214. The ECU202 may also be coupled to a user-interactive interface 216 to accept user input and provide various measurements and system status displays.

[0013] To collect EM measurements, the sensor emits EM waves and / or acoustic waves, which travel outward from the transmitting antenna set and are then reflected back to the receiving antenna set. The reflector can be an object with moderate reflectivity along the path of the emitted wave. By measuring the time it takes for the wave to travel from the transmitting antenna to the reflector and back to the receiving antenna, the sensor can determine the distance to the reflector. By using multiple transmitting or receiving antennas, or by collecting multiple measurements at different locations, the sensor can determine its orientation relative to the reflector and thus track the reflector's location relative to the vehicle. With more advanced processing, it is possible to track multiple reflectors and determine their relative velocities. Both pulsed wave and continuous wave measurements can be implemented. In at least some intended implementations, the acoustic wave is a pulsed wave and the EM wave is a frequency-modulated continuous wave.

[0014] Figure 3 shows an exemplary obstacle detector including an EMA sensor array. The exemplary detector includes an EM transceiver chip 302 and an acoustic transceiver chip 304 mounted on a printed circuit board (PCB) 306, each having multiple EMA sensors 308A, 308B, 309A, 309B, 310A, 310B, 311A, and 311B, each of which can be fabricated as an integrated circuit chip.

[0015] Each EMA sensor has an EM signal node capacitively coupled to a patch electrode 312, which may be implemented as a mesh as shown in the figure, or as a fully conductive surface, as will be further described below. The patch electrode 312 may be driven or sensed to a ground surface in the sensor chip or in PCB 306 to transmit or receive EM signals. The capacitive coupling has an impedance that is negligible at the EM signal frequency but is expected to block the acoustic signal frequency, thereby isolating the EM transceiver 302 from the acoustic signal.

[0016] Each EMA sensor also has a pair of differential acoustic signal nodes, where one signal node ("+") is coupled to a patch electrode by a filter, and the complementary signal node ("-") is coupled to the base electrode 314 by a filter. The filter blocks the EM signal frequency while allowing the acoustic signal frequency to pass through, thereby isolating the acoustic transceiver 304 from the EM signal. The capacitor and filter enable independent and simultaneous electronic control of the EM and acoustic modes of the integrated sensor. For example, sensors 308A and 308B are configured in series for EM sensing and in parallel for acoustic sensing. Furthermore, it is possible to use a given sensor to receive an acoustic signal while simultaneously transmitting an EM signal, and vice versa.

[0017] EMA sensors 308A and 308B are used as a single combination antenna (EM) or transducer (acoustic). EMA sensors 309A and 309B form a second combination sensor, thereby providing multiple inputs to enable MIMO operation of the EM transceiver 302 and separately enable MIMO operation of the acoustic transceiver 304. EMA antennas / transducers 310A and 310B are coupled to one output of each transceiver, and EMA sensors 311A ​​and 311B are coupled to the second output of each transceiver. More sensors can be provided for transmission and reception to increase directivity.

[0018] Acoustic transceiver 304 can transmit acoustic pulses, process the received acoustic signals to detect echoes, thereby deriving the distance and direction of obstacles. EM transceiver 302 can transmit frequency-modulated continuous wave (FMCW) radar signals, analyze the received EM signals to detect reflected energy, thereby deriving the distance and direction of obstacles. Transceiver 302 can further combine EM signal-based measurements with acoustic signal-based measurements, thereby stitching them together to perform obstacle detection over a wider range than could be achieved by either technique alone. Transceiver 302 can also provide an external interface for transmitting measurement information to an ECU.

[0019] The exemplary implementation in Figure 3 shows an EMA sensor dedicated to either a transmitter or a receiver, but this is not a requirement. A given EMA sensor can be used in a bidirectional manner for both transmitting and receiving. Some intended transceiver chips include an internal switch or hybrid that allows those transceiver chips to use a given EMA sensor to transmit EM signals and / or acoustic signals, and then use that sensor to receive EM signals and / or acoustic signals. Furthermore, it should be noted that while a given EMA sensor is being used to transmit EM signals, that EMA sensor may simultaneously be used to receive acoustic signals, and vice versa.

[0020] Figure 4 shows a block diagram of an exemplary EM transceiver chip 402 configured for use in a MIMO radar system. Chip 402 includes a chirp generator 404 that converts the local oscillator signal into an FMCW signal, such as a signal with a series of linearly swept frequency chirps. A power splitter 406 separates a portion of the FMCW signal power and feeds a copy of the FMCW signal to a down-conversion mixer 407. The remainder of the FMCW signal passes through a set of phase shifters 408, which the controller 409 uses to phase-shift the FMCW signal independently for each of the RF outputs.

[0021] Phase shift can be used in various ways to provide coherent beam steering or coding for channel isolation, for example, enabling virtual beam steering. Channel isolation can be provided using quadrature-coded phase modulation with different coding patterns for each channel. Phase modulation can be 1-bit (bipolar phase shift keying), 2-bit (quadrature phase shift keying), or higher-order (N-bit). Power amplifier 410 takes the phase-shifted FMCW signal and transmits the signal (T0 R ~T1 R It drives the contacts to provide the signal. The transceiver in the illustration provides two transmit signals, but the number may vary.

[0022] The transceiver chip 402 receives two received signals (R0) from the receiving antenna. R ~R1 RThe system further includes contacts for obtaining the signal. The down-conversion mixer 407 multiplies the received signal by a copy of the FMCW signal, thereby converting the received signal to a near-baseband frequency through the low-pass filter 412. The gain-controlled amplifier 414 adaptively adjusts the signal amplitude to optimize the use of the dynamic range of the analog-to-digital converter (ADC) 416. The ADC 416 digitizes the received signal for processing by the controller 409. The controller 409 may take the form of a programmable digital signal processor with high-speed memory (SRAM) and a serial peripheral interface (SPI), thereby enabling the controller 409 to communicate with other chips in the system.

[0023] Figure 5 shows a block diagram of an exemplary acoustic transceiver chip 502 configured for use in a MIMO acoustic system. Chip 502 includes I / O interfaces for receiving measurement commands and parameters, and for transmitting measurements to other chips in the system. Core logic 504 operates according to firmware and parameters stored in non-volatile memory 505 to parse commands from other chips and perform appropriate operations, including transmitting and receiving acoustic bursts. To transmit an acoustic burst, core logic 504 uses a suitably modulated local oscillator signal from a voltage-controlled oscillator to transmit to the terminal {+T0 A ,-T0 A}, {+T1 A ,-T1 A It is coupled to a transmitter 506 that drives one or both sets of}. The transmitter terminal is coupled to the acoustic input of one or more EMA sensors that convert electrical signals into radiated acoustic energy.

[0024] One or more EMA sensors convert the echoes of an acoustic burst into electrical signals, typically in the millivolt or microvolt range. A low-noise amplifier 508 amplifies the signal from the receiving terminal. An optional mixer (not shown) multiplies the amplified received signal by a local oscillator signal to downconvert the modulated signal to baseband, and the signal is then digitized and processed by a digital signal processor (DSP) 510 with an integrated analog-to-digital converter (ADC). Alternatively, the received signal is digitized and processed directly.

[0025] The DSP510 applies a programmable method to detect echoes and measure their parameters, such as time of flight, duration, and peak amplitude. Such methods may employ threshold comparison, minimum interval, peak detection, zero-crossing detection and counting, noise level determination, and other customizable techniques tuned to improve reliability and accuracy. The DSP510 can provide the measurement results to the core logic 504 for buffering and final communication via an external interface. In alternative implementations, signal processing and sensor fusion may be offloaded to an ECU or other system-level processor.

[0026] Figures 6A and 6B show exemplary top and cross-sectional views of a capacitive microfabricated acoustic transducer. It includes a base electrode formed on a substrate, such as a crystalline semiconductor wafer. The substrate thickness may be as little as 100 or 200 microns, but is generally 500, 700 microns, or more. An insulating layer with embedded cavities is formed on the base electrode. In one intended configuration, the embedded cavities are 0.11 microns thick, 36 microns wide, and 4 microns apart, within a 0.2 micron thick insulating layer. An upper electrode is provided above each cavity, along with interconnects for forming a conductive mesh electrode. A passivation layer may be provided to protect the mesh electrode. The total thickness of the film above each cavity, including the passivation layer, the mesh electrode, and the portion covered by the insulating layer, may be approximately 0.9 microns. Further manufacturing details can be found, for example, in O. Oralkan et al., “Capacitive micromachined ultrasonic transducers: next generation acoustic imaging?”, IEEE Trans. Ultrasonics, Vol. 49, No. 11, November 2002, which are incorporated in their entirety herein.

[0027] When a properly biased acoustic signal is applied between the mesh electrode and the base electrode, the film above each cavity deforms, thereby converting the electrical signal into radiated acoustic energy. Returning the acoustic energy that deformed the film above each cavity generates an electrical fluctuation of the appropriate voltage bias, thereby converting the acoustic energy into an electrically received signal. Suitable acoustic signal frequencies range from at least 100 kHz to at least 10 MHz, and potentially, with suitably sized cavities, can range to lower frequencies (e.g., 10 kHz) and higher frequencies (e.g., 100 MHz).

[0028] When mesh electrodes and / or base electrodes are formed in the shape of a patch antenna, EM signals can be transmitted and received using the mesh electrodes and / or base electrodes. However, the gap between the mesh electrodes and base electrodes (approximately 1 micron) is only a small fraction of the desired gap between the patch antenna and its contact surface (approximately 800 microns, depending on the frequency), thereby preventing the use of an unmodified capacitive microfabricated acoustic transducer as an EM antenna.

[0029] Figures 7A and 7B show a top view and a cross-sectional view of the EMA sensor. The degree of metallization of the mesh electrode can be optionally increased, as shown in Figure 7A, to improve the performance of the mesh electrode as a patch antenna. In at least some intended implementations (e.g., Figure 8A), the mesh electrode is fully metallized (i.e., a solid electrode surface). The equivalent Young's moduli of the aluminum film (74 GPa) and the SiO2 film (70 GPa) allow for the use of greater metallization without significantly affecting the acoustic performance of the film.

[0030] Figure 7B shows the addition of a grounding surface on the back surface of the substrate, which may be, for example, 800 microns thick to provide the desired distance from the patch antenna. Alternatively, the grounding surface may be provided on the PCB to which the sensor is mounted. To prevent the base electrode from affecting the performance of the patch antenna, the base electrode may be electrically isolated from the EM signal frequency, thereby allowing the base electrode to "float" relative to the patch electrode. This isolation will be further discussed below.

[0031] When it is impossible to provide a nominal gap between the patch electrode and the ground surface (for example, when using a doped substrate with relatively low resistivity), the base electrode can be patterned as a high-impedance surface (HIS) using techniques disclosed in the academic literature to provide a magnetic wall that enables a "low-profile" patch antenna with minimal distance from the ground surface. Base electrode patterning does not affect the acoustic performance of the EMA sensor.

[0032] The acoustic cells of an EMA sensor are small (approximately 40 microns) compared to the typical dimensions (approximately 1000 microns) of a patch antenna configured for automotive radar signals. Therefore, a grid of acoustic cells, for example, a 25×25 cell grid, can be arranged within the desired profile of the patch antenna. For ease of illustration, Figure 9A shows a top view of a chip with a 4×4 grid 902, although an EMA sensor chip is expected to contain more acoustic cells. Also shown in Figure 9A is an optional wire bond for transmitting the acoustic signal between the patch electrode and the base electrode. It is not expected that it would be desirable for the EM signal to be transmitted via a wire bond.

[0033] Therefore, as shown in the cross-sectional view of Figure 9B, the EM signal can be transmitted to the patch electrode via a ball grid array contact on the bottom surface of the substrate. Through-silicon vias can transmit the EM signal to the patch electrode (along with an optional "cage" of surrounding vias to limit electromagnetic interference). Figure 9B shows an integrated coupling capacitor ("AC blocking capacitor") sized to pass the EM signal frequency while blocking the acoustic signal frequency. Figure 9B further shows an integrated quarter-wave transmission line configured to pass the acoustic signal frequency while blocking the EM signal frequency (in cooperation with an on-chip or off-chip capacitor). In the implementation configuration of Figure 9B, the ground surface is located on the PCB.

[0034] Figure 10 is a schematic diagram of an EMA sensor showing a ground plane, an EM signal node, and a pair of differential acoustic signal nodes. The EM node is coupled to a mesh electrode by a capacitor that allows the EM signal frequency to pass while blocking the acoustic signal frequency. In this configuration, the mesh electrode acts as a patch antenna. Alternatively, the base electrode can act as a patch antenna. The mesh electrode is coupled to one of the differential acoustic signal nodes by an RF choke, such as a quarter-wave transmission line or inductor. The base electrode is similarly coupled to the other differential acoustic signal node. A capacitor couples the differential acoustic signal node to ground, thereby working with the RF choke to provide a filter that blocks the EM signal frequency while allowing the acoustic signal frequency to pass.

[0035] Many patch antenna designs employ multiple patches to improve directivity. Figure 11A is a schematic diagram of an EMA sensor arranged in series with an intermediate transmission line segment of characteristic impedance Z0, where the length L required by a given design can be any length. Capacitors may be provided to prevent acoustic signal frequencies from entering or leaving the transmission line segment. Within each EMA sensor, the acoustic signal node is coupled to ground via a capacitor and to the mesh node via an RF choke, which, in cooperation with the capacitor, allows the acoustic signal frequency to pass while blocking it from entering or leaving the acoustic signal node. In the implementation shown in Figure 11A, the base electrode is coupled to ground by an RF choke that blocks the EM signal frequency. The series of capacitors between the mesh electrode and the base electrode represent an array of acoustic cavity cells.

[0036] At the EM signal frequency, the equivalent circuit is the equivalent circuit shown in Figure 11B, i.e., an amplifier driving a series configuration of patches interconnected by transmission line segments. At the acoustic signal frequency, the equivalent circuit is the equivalent circuit shown in Figure 11C, where one of the EMA sensors is driven by the acoustic signal to transmit an acoustic burst, and the other EMA sensor is coupled to an amplifier to detect a received signal variation indicating an acoustic burst echo.

[0037] Figure 12A shows an exemplary data cube representing a portion of the digital signal measurements that can be collected by the EM transceiver 302. Each chirp can be considered a measurement cycle. During a measurement cycle, the front end digitizes the down-converted received signal from the receiving antenna, thereby giving a time sequence of digitized received signal samples. Due to chirp modulation, the signal energy reflected by the target reaches the receiving antenna along with a frequency offset that depends on the round-trip travel time (and thus the distance to the target). A fast Fourier transform (FFT) of the time sequence collected during a given cycle isolates the energy associated with each frequency offset, thereby obtaining a function of reflected energy versus target range. This operation, sometimes referred to herein as "range FFT," can be performed for each transmit-receive antenna pair during each measurement cycle. The range FFT yields a peak for each target with a given range.

[0038] The movement of the target relative to the antenna array adds a Doppler shift to the reflected signal energy, which is essentially proportional to the relative velocity. While the Doppler shift is typically small for the frequency offset induced by the range, it is observable as a change in the phase of the relevant frequency coefficient during subsequent measurement cycles. (Recall that FFT coefficients are complex values ​​with both absolute and phase.) Applying an FFT to the corresponding frequency coefficients during a series of measurement cycles isolates the energy associated with each relative velocity, thereby yielding a function of reflected energy versus target velocity. This operation, sometimes referred to herein as the “velocity FFT,” can be performed for each range and each tx-rx antenna pair. The resulting two-dimensional data array possesses a “peak” for each target with a given range and relative velocity.

[0039] The reflected energy from a given target reaches individual receiving antennas in an antenna array, along with its relative phase (also known as the "angle of approach"), which depends on the direction of arrival of the reflected energy. Applying an FFT to the corresponding frequency coefficients associated with a series of equally spaced antennas isolates the energy associated with each incident angle, thereby yielding a function of reflected energy versus angle of approach ("AoA"). This operation, sometimes referred to herein as "AoA FFT," can be performed for each range and velocity using a given transmitting antenna.

[0040] Therefore, digitized signal measurements placed in a measurement data cube having three dimensions representing a function of time, measurement cycle, and antenna position (as shown in Figure 12A) can be converted to a target data cube having three dimensions representing a function of range, velocity, and AoA (as shown in Figure 12B). Since these operations (channel separation, range FFT, velocity FFT, and AoA FFT) are linear, they can be performed in any order. Furthermore, the FFT operations are independent (meaning, for example, a range FFT for a given antenna and cycle is independent of range FFTs for other antennas and other cycles, and a velocity FFT for a given range and antenna is independent of velocity FFTs for other ranges and antennas), thereby allowing for parallelization of FFT processing if necessary.

[0041] Another desirable processing operation is the separation of signal energy from noise energy. Any suitable noise suppression or target detection technique may be used. One common technique (including many variations) is the constant false alarm rate (CFAR) detection technique. CFAR detection employs detection threshold adaptation based on the measured energy values within a sliding window near or surrounding the measurement being evaluated (also known as the "test cell"). The original technique and its variations provide various trade-offs between performance and computational complexity by using different statistical methods to derive the detection threshold from the measurements within the sliding window. CFAR detection is a non-linear technique since measurements below the threshold are either zeroed out or ignored, however, the zeroing of frequency coefficients generally does not prevent subsequent FFTs from utilizing the associated phase / frequency information of the energy peaks representing the target, so the location of CFAR detection within the processing sequence can be changed.

[0042] FIG. 13 shows an exemplary data flow 1400 that can be implemented by only the transceiver chip or in combination with a system-level processor such as an ECU. The digitized received signal EM k When acquired, basically a range FFT 1402 is performed for each channel when the signal is collected, whereby the resulting frequency coefficients are stored in the frame buffer 1404 as range data. The frame buffer 1404 accumulates range data from multiple measurement cycles, whereby, as previously explained, the controller 409 can then perform a velocity FFT 1406 to generate target range and velocity data for each channel.

[0043] To remove noise energy below an adaptive threshold, the CFAR detector 1408 operates on the target range and velocity data. The CFAR detector 1408 zeros out values ​​below the threshold, thereby leaving only values ​​above the threshold that represent the range and velocity of the potential target (radar energy reflector). In some intended variations, the CFAR detection process compresses the amount of data by omitting at least some of the values ​​below the threshold, and, in some cases, by employing more advanced data compression techniques to reduce buffer size and / or bus bandwidth requirements. The controller 409 may further perform an AoA FFT 1410 to determine the relative orientation related to the potential target.

[0044] Digitized audio signal AC k When data is acquired from each acoustic receiving EMA sensor, the DSP 510 applies a correlation filter to compensate for distance-related attenuation and scales the output. The DSP may further perform array processing 1414 to identify peaks and determine the distance and direction of associated obstacles, and optionally track obstacles over time and perform velocity calculations 1416. The controller 409 or system-level processor 202 may perform sensor fusion processing to concatenate short-range acoustic signal measurements with longer-range EM signal measurements. Target detection and tracking may be performed by the system-level processor to evaluate targets, determine if a response action is required, and optionally automatically execute the response action.

[0045] Figure 14 is a flowchart of an exemplary obstacle detection method that can be implemented by a MIMO EMA sensor system. This obstacle detection method starts in block 1502, where a chirp generator 404 is used to generate a chirp signal having intervals in which the signal frequency linearly ramps from a start frequency to an end frequency. The chirp signal may be an ascending chirp signal, a descending chirp signal, or even a triangular ascending followed by descending chirp signal. The chirp signal is divided into multiple transmit signals, which are supplied to a selected EMA transmit sensor in block 1504. In block 1506, an EM receive signal is acquired and processed from a selected EMA receive sensor to determine the reflected signal energy as a function of at least distance and direction. In block 1508, the transmitter 506 generates an acoustic signal, which is supplied to a selected EMA transmit sensor in block 1510. In block 1512, an acoustic receive signal is acquired and processed from a selected EMA receive sensor to determine the reflected signal energy as a function of at least distance and direction. In block 1514, short-range acoustic energy measurements are combined with longer-range EM signal measurements to determine a map of reflected signal energy versus distance and direction. In block 1516, the processor may apply target detection and tracking and further analyze the target to determine whether a response action is required and, if so, to initiate the response action.

[0046] Although the operation in Figure 15 was described sequentially for illustrative purposes, various operations can actually be implemented simultaneously or in a pipelined manner. Furthermore, in some implementations, the operations can be executed in a reordered or asynchronous manner.

[0047] With full understanding of the above disclosures, numerous other modifications, equivalents, and substitutes will become apparent to those skilled in the art. The following claims shall be construed to encompass all such modifications, equivalents, and substitutes, where applicable. [Explanation of Symbols]

[0048] 102 vehicles 104 Forward Sensor Array 106 Rear sensor array 108 Side Acoustic Sensor Array 202 Electronic Control Unit 204 Sensors 205 Sensor 206 Sensors 208 Turn Signal Actuator 210 Steering Actuator 212 Brake Actuator 214 Throttle Actuator 216 User-Interactive Interfaces 302 EM Transceiver Tip 304 Acoustic Transceiver Chip 306 Printed Circuit Board 308A EMA sensor 308B EMA sensor 309A EMA sensor 309B EMA sensor 310A EMA sensor 310B EMA sensor 311A EMA sensor 311B EMA sensor 312 Patch electrodes 314 Base electrode 402 EM Transceiver Tip 404 Chirp Generator 406 Power Splitter 407 Down Conversion Mixer 408 Phase Shifter 409 Controller 410 Power Amplifier 412 Low-pass filter 414 Gain-controlled amplifier 416 Analog-to-Digital Converter 502 Acoustic Transceiver Chip 504 Core Logic 505 Non-volatile memory 506 Transmitter 508 Low-noise amplifier 510 Digital Signal Processor 902 4x4 grid 1400 data flows 1402 Range FFT 1404 Framebuffer 1406 Velocity FFT 1408 CFAR detector 1410 AoA FFT 1414 Array Processing 1416 Speed ​​calculation

Claims

1. The contact surface and, A patch antenna above the ground surface for transmitting or receiving an EM signal having an electromagnetic (EM) signal frequency, An array of capacitive microfabricated acoustic transducers formed by cavities formed between the patch antenna and the base electrode using microfabrication technology for transmitting or receiving acoustic signals having acoustic signal frequencies, An integrated electromagnetic acoustic sensor equipped with [features / equipment].

2. First and second differential signal nodes for transmitting the acoustic signal to or from the integrated electromagnetic acoustic sensor, A first filter that couples the first differential signal node to the patch antenna, A second filter that couples the second differential signal node to the base electrode, Furthermore, The integrated electromagnetic acoustic sensor according to claim 1, wherein the first and second filters are configured to block the EM signal frequency while allowing the acoustic signal frequency to pass through.

3. The integrated electromagnetic acoustic sensor according to claim 2, wherein the first filter couples the first differential signal node to the patch antenna using a first EM frequency choke and couples the first differential signal node to the ground plane using a first capacitor, and the second filter couples the second differential signal node to the base electrode using a second EM frequency choke and couples the second differential signal node to the ground plane using a second capacitor.

4. The integrated electromagnetic acoustic sensor according to claim 3, wherein the first and second EM frequency chokes each include a quarter-wave microstrip transmission line.

5. The integrated electromagnetic acoustic sensor according to claim 3, wherein the first and second EM frequency chokes each include an inductor.

6. The integrated electromagnetic acoustic sensor according to claim 3, wherein the EM signal frequency is 10 GHz or higher and the acoustic signal frequency is 1 GHz or lower.

7. An EM signal node for transmitting a radio frequency signal to or from the integrated electromagnetic acoustic sensor, The patch antenna is coupled to the EM signal node with a capacitor and The integrated electromagnetic acoustic sensor according to claim 2, further comprising the features described above.

8. The integrated electromagnetic acoustic sensor according to claim 1, wherein the patch antenna is separated from the base electrode by 2 microns or less and separated from the ground surface by at least 200 microns.

9. The integrated electromagnetic acoustic sensor according to claim 1, wherein the base electrode is located between the ground surface and the patch antenna.

10. The integrated electromagnetic acoustic sensor according to claim 9, wherein the base electrode is patterned to provide a high impedance surface at the EM signal frequency.

11. A method using an integrated electromagnetic acoustic sensor, A step of driving or sensing an EM signal between the ground surface and the patch antenna, The steps of driving or sensing an acoustic signal between the patch antenna and the base electrode. Includes, A method comprising the base electrode and the patch antenna having an array of capacitive microfabricated acoustic transducer cavities formed between them using microfabrication techniques.

12. The step of driving or sensing the aforementioned acoustic signal is: The method according to claim 11, comprising the steps of supplying the acoustic signal to or from the integrated electromagnetic acoustic sensor via first and second differential signal nodes, wherein the first differential signal node is coupled to the patch antenna by a first filter configured to allow the acoustic signal to pass while blocking the EM signal, and the second differential signal node is coupled to the base electrode by a second filter configured to allow the acoustic signal to pass while blocking the EM signal.

13. The method according to claim 12, wherein the EM signal frequency is 10 GHz or higher and the acoustic signal frequency is 1 GHz or lower.

14. The step of driving or sensing the EM signal is The method according to claim 12, comprising the step of supplying the EM signal to the integrated electromagnetic acoustic sensor via an EM node capacitor-coupled to the patch antenna, or receiving the EM signal from the integrated electromagnetic acoustic sensor.

15. The method according to claim 11, wherein the patch antenna is separated from the base electrode by 2 microns or less and separated from the ground surface by at least 200 microns.

16. The method according to claim 11, wherein the base electrode is located between the ground surface and the patch antenna.

17. The method according to claim 16, wherein the base electrode is patterned to provide a high impedance surface at the EM signal frequency.

18. Obstacle detector, A radar transceiver coupled to supply an EM transmit signal to the EM node of a first integrated electromagnetic acoustic sensor and coupled to acquire an EM receive signal from the EM node of a second integrated electromagnetic acoustic sensor, wherein the EM receive signal potentially has reflections from obstacles within the radar range of the obstacle detector. An acoustic transceiver coupled to the acoustic input of the first integrated electromagnetic acoustic sensor to supply an acoustic transmission signal, and coupled to the acoustic output of the second integrated electromagnetic acoustic sensor to acquire an acoustic reception signal, wherein the acoustic reception signal potentially has reflections from obstacles within the acoustic range of the obstacle detector, and the acoustic range includes a distance shorter than the radar range, A controller coupled to the radar transceiver and the acoustic transceiver for acquiring reflection measurements and combining the reflection measurements to determine the distance to the nearest obstacle, Equipped with, An obstacle detector in which each of the integrated electromagnetic acoustic sensors is equipped with a patch antenna as part of an array of capacitive microfabricated acoustic transducers, and a cavity formed between the patch antenna and the base electrode using microfabrication technology forms the array of capacitive microfabricated acoustic transducers.

19. The obstacle detector according to claim 18, further comprising an additional integrated electromagnetic acoustic sensor coupled to the radar transceiver and the acoustic transceiver, respectively, wherein the radar transceiver and the acoustic transceiver are configured to perform multi-input multi-output reflectance measurements, and the controller is configured to determine the direction to the nearest obstacle and the relative velocity of the nearest obstacle.

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