Apparatus and method for establishing contact connections

Abstract

The invention relates to an apparatus (01) for establishing a contact connection between at least one connection contact (18) of a substrate (04) on whose surface a conductive material web is formed and at least one connection contact (19) of a semiconductor component (03), preferably a chip, the apparatus comprising a joining tool (02) for positioning and joining the semiconductor component (03) on the substrate (04), a beam channel (20) for optical radiation being formed in the joining tool (02), the apparatus comprising a laser device (07) for applying laser radiation to the substrate (04) and / or the semiconductor component (03), the apparatus comprising a laser device (07) for applying laser radiation to the substrate (04) and / or the semiconductor component (03), and a detection device (14, 17) for detecting the optical radiation, the device further comprises a substrate receiver (05) for fixing the substrate (04) in position and against which at least one underside (41) of the substrate (04) can be brought into contact, an optical window (06) having an optically transparent window body is integrated into the substrate receiver (05) in such a way that the optical radiation to and / or from the substrate (04) can pass unhindered, the optical window (06) being arranged in the beam path (10) of the laser device (07) and / or in the beam path (15, 16) of the detection device (14, 17). Furthermore, the invention relates to a method for establishing a contact connection between at least one connection contact (18) of the conductor material web and at least one connection contact (19) of a semiconductor component (03), in particular a chip.

Description

Technical Field

[0001] The present invention relates to an apparatus and a method for establishing a contact connection between at least one connection contact of a substrate and at least one connection contact of a semiconductor component, the apparatus and method comprising a bonding tool, a laser device, and a detection device.

Background Art

[0002] It is well known from the state of the art to solder a semiconductor component, in particular a chip, to a substrate which may be a circuit board, for example by means of a laser soldering system. For this purpose, the connection contacts of the chip or semiconductor component are connected to the solderable connection contacts of the substrate via a solder material. Solder can be provided to the solderable connection contacts, for example, by means of the solder ball supply device of a laser soldering system, and the solder can be at least partially melted by a laser device in such a way that a bond between the substances is produced between the connection contacts of the chip or semiconductor component and the connection contacts of the substrate. After the chip or semiconductor component has been applied to the substrate, it is also possible to at least partially melt the connection contacts arranged on the chip or on the substrate by heating the chip or semiconductor component and / or the substrate in order to produce a bond between the substances between the connection contacts of the chip or semiconductor component and the connection contacts of the substrate.

[0003] Also, in a plurality of known methods for applying semiconductor components to a substrate, such as a method called the Chip-on-Wafer method or the Chip-on-Board method, the substrate is always larger than the semiconductor component to be arranged. It is generally impossible or extremely complicated to rotate the substrate in order to protect temperature-sensitive components.

[0004] It is known from the level of the art that a substrate is positioned on a substrate support, and the thermal energy necessary to create a bond between materials is introduced through the top surface of the substrate and / or through bonding tools that position and bond semiconductor components to the substrate. Because the thermal energy is introduced only through the top surface of the substrate, substrates that are particularly sensitive to temperature may suffer unintended burnout. Therefore, it is known from the level of the art that, for example, in laser welding processes in which the above-mentioned type of burnout can commonly occur, a detection device for monitoring is provided, in particular for the purpose of determining whether or not burnout has occurred in the laser welding process based on optical radiation. Optical radiation can be detected, for example, by an infrared camera. However, in the case of a device for establishing a contact connection, which is known from the level of the art to apply laser radiation to the top surface of a substrate, additional detection of optical radiation is inconvenient or impossible because the offset between the detection device, particularly the camera, positioned above the substrate and the laser device must always be considered and set. Furthermore, because the space above the substrate is finite, it may be inconvenient that the laser device and detection device may need to be moved during the establishment of the contact connection, for example, to release the beam channel. This can cause positioning errors relative to the substrate due to the vertical movement of the aforementioned components. [Overview of the project] [Problems that the invention aims to solve]

[0005] Therefore, an object of the present invention is to propose an apparatus for establishing contact connections that can reliably and cost-effectively monitor and apply the required laser radiation while preventing damage to the substrate and preventing positioning errors. [Means for solving the problem]

[0006] This objective is achieved by an apparatus having the features of claim 1 and a method having the features of claim 10.

[0007] The apparatus according to the present invention serves to establish a contact connection between at least one contact point of a substrate and at least one contact point of a semiconductor component, wherein a conductive material web is formed on the substrate, the apparatus comprises a bonding tool for positioning and bonding the semiconductor component to the substrate, a beam channel for light emission is formed within the bonding tool, the apparatus further comprises a laser device for applying laser radiation to the substrate and / or the semiconductor component, and the apparatus further comprises a detection device for detecting the light emission. Furthermore, the apparatus according to the present invention comprises a substrate holder, which can fix the substrate in a predetermined position on the substrate holder, which can bring at least one lower surface of the substrate into contact with the substrate holder, and an optical window having an optically transparent window body is incorporated into the substrate holder so that light emission to and / or from the substrate can pass through without obstruction, the optical window is positioned in the beam path of the laser device or the detection device.

[0008] Preferably, the semiconductor component is a chip. The substrate is preferably a non-conductive substrate having a conductive material web formed on the substrate. It is also conceivable that the semiconductor component connected to the substrate is not a chip, but another substrate having conductive paths. In the context of the present invention, the semiconductor component and the substrate are also called bonding partners because they are bonded to establish a contact connection. In the context of the present invention, the term “bonding process” refers to positioning the bonding partners toward each other, heating at least one of the bonding partners, and applying one bonding partner to the other, for example, at a predetermined contact pressure.

[0009] The chip may have a housing, or it may be formed as a housing-less semiconductor component and may be placed directly on a substrate. Direct contact can be established between the chip's connection contacts and the conductive material web of the substrate.

[0010] The substrate can be made of plastic or ceramic material, and a substrate conductor material web for connecting electronic semiconductor components is preferably formed first. The formation of the conductor material web on the substrate can be carried out according to methods well known from the state of the art.

[0011] The term "laser device" can be understood to mean either a laser emitter that emits laser radiation itself, or a laser emitter in combination with a radiation transfer device that transmits laser radiation from the laser emitter to a substrate. A device equipped with lenses and / or reflectors is known as a radiation transfer device.

[0012] In the context of this invention, the term "lower surface of the substrate" refers to the surface of the substrate that is in contact with the substrate holder and facing away from the semiconductor component. Therefore, the connection contacts on the upper surface of the substrate, opposite to the lower surface, are formed to connect to the connection contacts of the semiconductor component.

[0013] In this context, the term "light emission" is not limited to light visible to the naked eye, but rather can include the entire electromagnetic spectrum, particularly infrared radiation (thermal radiation) and ultraviolet radiation. While the sun is a natural source of light emission, light emission can also be artificially generated.

[0014] In the context of this invention, the term “optical window” typically refers to an optically transparent plate designed to provide maximum transmission of light radiation within a specific wavelength range while also reducing reflection and absorption. Furthermore, the optical window acts as an insulator so that the maximum possible amount of heat can be transferred through it.

[0015] The basic idea of ​​the present invention is that the apparatus has an optical window in the substrate holder, in addition to a beam channel for applying light radiation to the top surface of the substrate or to semiconductor components placed on the top surface of the substrate. The optical window allows additional light radiation to be introduced to the substrate, particularly the underside of the substrate, and / or the light radiation to be reflected by the optical window and detected. This makes it possible to introduce the thermal energy necessary to establish contact connections via the underside of the substrate, i.e., from below, or via the beam channel of the bonding tool, i.e., from above, to the substrate. In particular, when laser radiation for introducing the necessary thermal energy is introduced to the substrate via the optical window, because the laser radiation is applied from below, a significantly larger space above the substrate becomes available for the bonding tool and detection device, so that semiconductor components placed on the substrate can be positioned without taking the laser device into consideration. This also minimizes the movement paths required when changing or aligning the bonding tool, laser device, and detection device above the substrate, for example, and thus prevents misalignment in the bonding process. In addition, since different light radiation can be applied or detected simultaneously through two optical radiation access points—namely, a beam channel in the bonding tool and an optical window in the substrate holder—it is possible to perform direct and active positioning during the bonding process of the apparatus according to the present invention. Thus, while introducing laser radiation for applying thermal energy to the substrate via the beam path, the detection device simultaneously detects the light radiation through the second beam path, which can be used to determine the position of the substrate relative to the substrate holder or the position of the semiconductor component relative to the substrate. Conveniently, therefore, laser radiation can be applied while the semiconductor component on the substrate is being positioned by the bonding tool, and at the same time, the positioning tool can be controlled using the position of the semiconductor component relative to the substrate determined by the detection device.

[0016] In the context of the present invention, the detection device functions, in particular, as a device for detecting light radiation, thereby enabling monitoring of the bonding process for establishing contact connections, in particular the focusing of laser radiation onto the connection contacts and heating of the substrate, as well as the positioning of semiconductor components on the substrate. This is preferably done based on light radiation emitted by the substrate or semiconductor components.

[0017] The apparatus for establishing contact connections according to the present invention allows semiconductor components to be positioned on a substrate by a bonding tool and attached to the substrate, and the necessary thermal energy is applied to the substrate and / or semiconductor components by a laser device. Preferably, the laser radiation is applied to the substrate and / or semiconductor components in such a manner that the connection contacts of the substrate and / or semiconductor components are at least partially melted, and a bond between materials is formed between the connection contacts of the substrate and the connection contacts of the semiconductor components by applying the connection contacts of the semiconductor components to the connection contacts of the substrate and the connection contacts of the semiconductor components. It is also conceivable to melt a solder material deposit placed between the connection contacts of the substrate and the connection contacts of the semiconductor components with laser radiation applied by the laser device to form a bond between materials between the connection contacts of the substrate and the connection contacts of the semiconductor components. To introduce the necessary thermal energy, it is also conceivable to directly expose the connection contacts or solder material deposits to laser radiation, or to introduce thermal energy to the substrate and / or semiconductor components by laser radiation and transfer it to the connection contacts of the substrate or semiconductor components.

[0018] To eliminate errors during the manufacturing of contact connections, particularly during the bonding of semiconductor components to a substrate, the detection device is preferably designed to detect the position of the semiconductor component relative to the substrate by reflected light radiation, and to also monitor process parameters of the bonding process, especially the temperature of the substrate and semiconductor component, by reflected light radiation. To simplify the positioning of the semiconductor component relative to the substrate, the device according to the present invention has a substrate holder that can fix the substrate in place. Preferably, the substrate is fitted into the substrate holder by shape fitting such that the bottom surface of the substrate rests on the substrate holder and the optical window, and at least partially covers the optical window. Alternatively, the substrate may be attached to the substrate holder by generating a retaining force. To generate a retaining force, negative pressure can be applied to the substrate placed on the substrate holder. Thus, the substrate holder enables the positioning and fixing of the substrate, while at the same time, due to the optical window, it allows the unobstructed passage of light radiation to and / or from the substrate. In summary, the apparatus according to the present invention can be conveniently used to expose a substrate and / or semiconductor component to laser radiation via beam paths that terminate on the substrate and / or semiconductor component and collide with the substrate or semiconductor component from different directions, while simultaneously detecting optical radiation for positioning bonding partners and monitoring the bonding process.

[0019] Preferred embodiments of the present invention are the subject matter of the dependent claims. Furthermore, the present invention relates to any combination of at least two features disclosed in the specification, claims, and / or drawings. All features and embodiments disclosed in the context of the apparatus are understood to be related to the methods according to the present invention in an equivalent manner, though they may not be identical. In particular, linguistically common paraphrases and / or similar substitutions of each term within the scope of common language practice, and especially the use of synonyms supported by generally recognized language literature, are naturally included in the content of this disclosure without the need to explicitly mention any variations.

[0020] It has become apparent that the detection device is advantageous to include an infrared sensor unit and / or an imaging unit. The imaging unit is preferably a camera. Preferably, an infrared sensor unit capable of non-contact measurement of the temperature of semiconductor components and / or substrates based on reflected radiation is used to measure temperature. If a reference marker is placed on the substrate and the infrared radiation of the reference marker is distinguishable from the infrared radiation of the substrate, an infrared sensor unit may also be used to detect the position of the substrate. By detecting light radiation in the infrared range within the wavelength range of 780 nm and 1 mm, the infrared sensor unit can be used to detect the position of semiconductor components and / or substrates, as well as to monitor process parameters of the bonding process, in particular to monitor the temperature of the bonding partners, i.e., semiconductor components and substrates. The imaging unit is preferably used for positioning semiconductor components relative to the substrate and / or positioning the substrate relative to the substrate holder.

[0021] The apparatus, particularly the detection apparatus, may also have a processing unit. Preferably, the processing unit has at least one processor and / or volatile and / or non-volatile memory, and is configured to continuously process position data and / or processing data, particularly temperature values, detected by the infrared sensor unit and / or imaging unit, and to control the bonding tool and / or laser apparatus according to the detected values. This means that the processing unit can directly respond to misalignment, for example, by controlling the bonding tool to correct the position of the semiconductor component relative to the substrate. The processing unit of the detection apparatus may also control the laser apparatus based on temperature values ​​recorded by the detection apparatus to correct the intensity of the laser radiation, and therefore the energy input. The processing unit may also emit acoustic and / or visual signals, for example, when the actual position deviates from the desired position, or when a predetermined temperature limit is exceeded in the semiconductor component or substrate. The operator can then manually stop the operation of the apparatus and / or make corrections as necessary. The operation of the apparatus can also be automatically stopped during the bonding process in the event of the aforementioned deviations to prevent damage to the substrate, semiconductor component, and / or the apparatus.

[0022] According to a preferred embodiment, the optical window is positioned within the beam path of the laser device, and the beam channel of the bonding tool is positioned within the beam path of the infrared sensor unit. In other words, the laser device and the infrared sensor unit are positioned such that the beam path of the laser device passes through the optical window, and the beam path of the infrared sensor unit passes through the beam channel of the bonding tool. This arrangement offers the advantage that the substrate can be exposed to laser radiation from below through the optical window, while infrared radiation reflected by the semiconductor components and / or the substrate can be detected by the beam channel of the bonding tool. In this way, the temperature and position of the bonding partners can be easily monitored by the infrared sensor unit, while energy can be introduced into the substrate to create a material bond between the bonding partners by melting the connection contacts.

[0023] According to another embodiment, the optical window is positioned within the beam path of the infrared sensor unit, and the beam channel of the bonding tool is positioned within the beam path of the laser device. This means that the infrared sensor unit and the laser device are positioned such that the beam path of the infrared sensor unit passes through the optical window and the beam path of the laser device passes through the beam channel of the bonding tool. This embodiment is advantageous in that the infrared radiation and laser radiation can be detected and applied simultaneously without the laser device and the infrared sensor unit affecting each other and / or without the need to move the laser device and the infrared sensor unit due to lack of space.

[0024] According to the third embodiment, the optical window is positioned within the beam path of the imaging unit, and the beam channel of the bonding tool is positioned within the beam paths of the laser device and the infrared sensor unit such that the beam path of the laser source and the beam path of the infrared sensor unit pass through at least a portion of the beam channel simultaneously. In other words, the imaging unit, the infrared sensor unit, and the laser device are positioned such that the beam path of the imaging unit passes through the optical window, and the beam paths of the laser device and the infrared sensor unit pass through the beam channel of the bonding tool. According to this embodiment, the position of the substrate relative to the substrate holder and the position of the semiconductor component relative to the substrate can be conveniently detected from below by the imaging unit, and the substrate and / or semiconductor component can be exposed to laser radiation from above, while the infrared radiation of the infrared sensor unit reflected by the semiconductor component and / or substrate can be detected to monitor the temperature of the semiconductor component and / or the substrate. By combining the imaging unit, the infrared sensor unit, and the laser device, position measurements can be performed using both the imaging unit and the infrared sensor unit, thereby improving the safety of process control. Preferably, position measurement is performed by an imaging unit, and temperature measurement is performed by an infrared sensor unit.

[0025] It is also conceivable to position the imaging unit and infrared sensor unit above the substrate and substrate support, so that the beam paths of the imaging unit and the infrared sensor unit pass through the beam channel of the bonding tool, while applying laser radiation from a laser device to the substrate support from below through an optical window.

[0026] Furthermore, it has been found advantageous for the laser device and / or the detection device and / or the substrate holder to be arranged on a table that can be displaced along at least two axes. Preferably, the laser device or the substrate holder is arranged on a table that can be displaced along at least two axes. The possibility of displacing the laser device and / or the detection device and / or the substrate holder by a table that can be displaced along at least two axes advantageously enables connecting a relatively large substrate to a relatively large semiconductor component or several semiconductor components. In particular, this may be required when the energy input or focusing of the laser beam emitted by the laser device is not sufficient to heat simultaneously all the connection contacts necessary to establish the contact connection. In such a case, the laser device and the substrate can be displaced relative to each other by a table that can be displaced along two axes. In particular, the laser device can be moved by a table that can be displaced along two axes from a first connection contact of the substrate or a first group of connection contacts of the substrate to another connection contact or another group of connection contacts, the group of connection contacts including several connection contacts that can be heated in one step by the laser, and the laser device can be positioned at the corresponding position to introduce energy into the substrate by laser emission. Preferably, the tool table can be displaced along two axes in the X-Y plane arranged parallel to the support surface of the substrate holder. However, it is conceivable that the tool table can also be displaced perpendicular to this X-Y plane, i.e., in the Z direction of the Cartesian coordinate system, for example to change the focus of a detection device or a laser device arranged on the tool table. More preferably, the tool table is arranged below the substrate holder so that it can displace the substrate holder and / or the laser device and / or the detection device without impairing the process performed above the substrate holder.

[0027] In a preferred embodiment, the system includes a base plate and a base for separating the substrate support from the base plate. To introduce light radiation into the substrate or to detect light radiation emanating from the substrate, the optical window needs to be accessible to the beam path of the laser and / or detection device. In particular, it has been found to be advantageous to position the laser and / or detection device below the substrate support to avoid complex deflection units for guiding light radiation through the optical window. To provide the necessary space while maintaining the required precision and stability of the device, it has been found to be advantageous to position the substrate support on at least one base, preferably two or four bases, and to connect these bases to a base plate parallel to the substrate support. In this way, the detection device and / or laser device can be positioned between the substrate support and the base plate. The laser and / or detection device can be fixed in place relative to the substrate and base plate, or it can be positioned on a displaceable table, and thus variably displaceable between the base plate and the substrate support. A displaceable substrate support can also be realized by placing at least one base on a tool table that is displaceable along two axes.

[0028] According to another preferred embodiment, the optical window is aligned coplanar with the substrate support on at least one side to form a shared flat surface with the substrate support, this shared flat surface in contact with the underside of the substrate. In other words, this means that the optical window is incorporated into the substrate support in such a way that the substrate-facing surfaces of the substrate support and the optical window form a shared flat surface on which the substrate can be placed. This forms the largest possible support surface for the substrate, simplifying positioning and improving repeatability. It is also conceivable that the optical window is coplanar with the substrate support on both sides, i.e., the upper surface of the substrate support facing the substrate and the underside of the substrate support on the opposite side. In other words, this means that the substrate support and the optical window may have the same thickness.

[0029] It has been found advantageous for the window to be made of glass and / or to have an anti-reflection coating so that light radiation can pass through the optical window without being hindered as much as possible. Preferably, the optical window is made of glass and has an anti-reflection coating. More preferably, the optical window has an anti-reflection coating on the surface facing the laser device, i.e., the surface where the laser radiation impinges on the optical window. Even more preferably, the upper surface of the optical window facing the substrate and the lower surface of the optical window opposite the upper surface have anti-reflection coatings. The anti-reflection coating can advantageously prevent the back reflection of light radiation such as laser radiation, and as a result, the energy of the laser radiation can be introduced almost completely into the substrate or the semiconductor component.

[0030] In a second aspect, the present invention relates to a method for establishing a contact connection between at least one connection contact of a conductor material web formed on a non-conductive substrate and at least one connection contact of a semiconductor component, particularly a chip. The method comprises at least the following steps, namely · Fixing the substrate at a predetermined position on a substrate holder such that the lower surface of the substrate contacts the substrate holder; · Positioning the semiconductor component on the substrate by means of a bonding tool; · Exposing the substrate and / or the semiconductor component to laser radiation in order to at least partially melt the connection contacts and to cause a bond between the materials between the connection contacts of the conductor material web and the semiconductor component, and · Detecting the light radiation by a detection device for detecting the position of the substrate and / or the position of the semiconductor component and / or measuring the temperature of the substrate and / or measuring the temperature of the semiconductor component. It includes.

[0031] It is essential to the present invention that at least one beam path of light radiation is directed to and / or from the substrate through a window having an optically transparent window body, the window being inserted into a substrate holder, and another beam path of light radiation is directed through a beam channel formed in a bonding tool. Preferably, the temperature of the connection contacts of the substrate and / or semiconductor component is measured based on the detected light radiation. To form a material-to-material bond between the conductive material web and the connection contacts of the semiconductor component, the bonding tool may apply force to the semiconductor component so that contact pressure is transmitted to the connection contacts of the bonding partner forming the contact pair after or during exposure of the connection contacts to laser radiation causing at least partial melting of the connection contacts. Alternatively, the semiconductor component and the substrate may only be in contact with each other due to the weight of the semiconductor component. In the method according to the present invention, the application of laser energy and monitoring of the bonding process are performed in a manner deviating from known methods by forming different beam paths, the beam paths being directed through a window incorporated into the substrate holder, and thus the radiation is conveniently accessible to the substrate from both sides.

[0032] According to a preferred embodiment of the present method, at least one reference marker positioned on a substrate and / or a semiconductor component is detected by a detection device, and the beam paths of the substrate, semiconductor component, and / or light emission are aligned based on the detected reference marker. In the context of the present invention, a reference marker refers to any marking on a substrate or semiconductor component that can be used for positioning the substrate or semiconductor component. A reference marker is generally an optical reference point that can be used to position a substrate on a substrate holder and to position a laser device, detection device, and / or semiconductor component relative to the substrate. In addition to positioning the substrate, the size of the substrate can also be determined using a reference marker. Preferably, the reference marker is captured using an imaging unit. Once the reference marker is recorded, the positions of one or more reference markers can then be compared by a processing unit, preferably, with an image of the printed circuit board stored in the processing unit, to compensate for any stretching, compression, or twisting of the printed circuit board.

[0033] In particular, when an infrared sensor unit is used to measure the temperature of a substrate and / or semiconductor component, it has become apparent that it is advantageous for the infrared sensor unit to detect at least one reference marker based on the infrared radiation reflected by at least one reference marker when exposed to heat. This means that at least one reference marker can also be detected with little effort, especially when an infrared sensor unit is already provided for temperature measurement. The reference marker preferably has a metallic structure in which its reflected infrared radiation is different from that of a non-conductive substrate of a conductive material web.

[0034] According to another preferred embodiment of the present method, the temperature of the connection contacts of a substrate and / or semiconductor component is measured by an infrared sensor unit by measuring the infrared radiation reflected from a reference plane of the connection contact. It has been found to be advantageous to directly measure the temperature of the connection contact as it is at least partially melted to create the connection, in order to determine the temperature of the connection contact as accurately as possible and to allow for the adjustment of the temperature curve or energy input as directly as possible.

[0035] Furthermore, it is conceivable to apply semiconductor components to a substrate that is at least partially transparent, or to a conductive material web formed on a substrate that is at least partially transparent. In the context of the present invention, a transparent substrate is an optically transparent substrate configured to provide maximum transmission for light radiation in a given wavelength range while reducing reflection and absorption. Preferably, the substrate is transparent in the region of a reference marker in order to detect the reference marker by a detection device. Thus, for example, detection of the reference marker can be performed through an optical window and the substrate. This makes it possible to detect the reference marker from the underside or topside of the substrate in a simple and flexible manner.

[0036] According to another preferred embodiment of the present method, the laser device and / or detection device are displaced along at least two axes, particularly below the optical window, for alignment with the substrate. This makes it possible to mount multiple semiconductor components and / or relatively large semiconductor components on a relatively large substrate in a simple manner. Preferably, the laser device is displaced along two axes with respect to the substrate or substrate support, below the substrate support and the optical window. However, it is also conceivable that the substrate support be placed on a table that can be moved along at least two axes to position the substrate, and the substrate support be displaced with respect to the detection device and / or laser device.

[0037] It goes without saying that the embodiments and explanatory examples described above, as well as those described later, can be implemented individually, and in any combination without falling outside the technical scope of the present invention. Furthermore, it is clear that the embodiments and explanatory examples described above, as well as those described later, relate to the methods according to the present invention in an equivalent or at least similar manner, without needing to be mentioned separately.

[0038] Embodiments of the present invention are schematically shown in the drawings and are described below in an exemplary manner. [Brief explanation of the drawing]

[0039] [Figure 1] A first schematic example of the apparatus according to the present invention is shown. [Figure 2] A second schematic example of the apparatus according to the present invention is shown. [Figure 3] A third schematic example of the apparatus according to the present invention is shown. [Figure 4] A fourth schematic example of the apparatus according to the present invention is shown. [Modes for carrying out the invention]

[0040] Figures 1 and 2 both show embodiments of the apparatus according to the present invention for establishing a contact connection 22 between at least one contact point 18 of a substrate 04 and at least one contact point 19 of a semiconductor component 03, where the semiconductor component 03 is a chip. In Figures 1 and 2, it can be seen that an optical window 06 is incorporated into the substrate holder 05, which allows for the back application of light radiation to the substrate 04. Laser radiation is applied to the lower surface 41 of the substrate 04 by a laser apparatus 07 which includes a lens system 08 in addition to a laser emitter 09. The beam path 10 of the laser apparatus 07 passes through the optical window 06 to the lower surface 41 of the substrate 04. According to the embodiments shown in Figures 1 and 2, the semiconductor component 03, in particular the contact point 19 of the semiconductor component 03, can be exposed to laser radiation through the optical window 06 and the substrate 04, and at least partially melted by the energy input of the laser radiation. For this purpose, the substrate may be transparent. The semiconductor component 03 can be positioned and placed on the substrate 04 by a bonding tool 02. After the semiconductor component 03 is applied to the substrate 04, at least partially molten connection contacts 19 form a contact connection 22 between the semiconductor component 03 and the substrate 04, preferably a conductive material web (not shown) formed on the substrate 04. To measure the temperature of the semiconductor component 03 and / or to detect the position of the semiconductor component 03 relative to the substrate 04, an infrared sensor unit 17 is positioned above the substrate 04, and the beam path 15 of the infrared sensor unit 17 passes through a beam channel 20 formed in the bonding tool 02. As seen in Figures 1 and 2, the reflected radiation reflected by the semiconductor component 03 and passing through the beam channel 20 is detected by the infrared sensor unit 17 and evaluated to determine the temperature and / or position. Furthermore, the embodiment of the apparatus 01 for establishing the contact connection 22 according to Figures 1 and 2 has a tool table 11 that is displaceable in the XY direction. The Y-direction movement path extends within the image plane, the X-direction movement path extends perpendicular to it, and another possible Z-direction movement path extends perpendicular to the X and Y directions from the base plate 13 toward the substrate support 05.The placement of the substrate support 05 on the base 12, which connects the substrate support 05 to the base plate 13, serves to provide the necessary space to allow the laser device 07 to be positioned below the substrate support 05 and the optical window 06. Furthermore, it can be seen from Figures 1 and 2 that the optical window 06 is coplanar with the upper surface of the substrate support 05, at least on the upper surface facing the substrate 04. This makes it possible to form a flat support surface for the lower surface 41 of the substrate on the upper surface of the substrate support 05 or the optical window 06.

[0041] The first explanatory example of the apparatus according to the present invention shown in Figure 1 and the second explanatory example shown in Figure 2 are essentially different in the different arrangements of the tool table 11 and the laser apparatus 07. In the first explanatory example shown in Figure 1, the base 12 is positioned on the tool table 11 so that the substrate holder 05 is displaceable in the XY direction by the tool table 11. This makes it easy to position the substrate 04 relative to the laser apparatus 07 and the bonding tool 02, and therefore relative to the semiconductor component 03. Furthermore, the laser apparatus 07 in the first explanatory example of the apparatus according to the present invention has a laser emitter 09 and a lens system 08, the lens system 08 and the laser emitter 09 are positioned below the optical window 06 or the substrate 04 so that deflection of the laser radiation is not required and therefore the beam path 10 directly hits the lower surface 41 of the substrate without being deflected, or the beam path 10 hits the semiconductor component 03 immediately after passing through the substrate 04.

[0042] In contrast, the laser device 07 in the second explanatory example shown in Figure 2 has, in addition to the laser emitter 09 and lens system 08, a deflection mirror 21 that deflects the laser radiation after it has passed through the lens system 08 and thus guides it to the substrate 04. Thus, the laser radiation beam path 10 first starts from the laser emitter 09 and travels in the X direction to the deflection mirror 21, and from there the beam path continues in the Z direction toward the substrate 04. As can also be seen from Figure 2, in the second explanatory example, the laser device 07 is positioned on a tool table 11 and is therefore movable in the XY direction. Thus, according to the second explanatory example, the laser device 07 can be positioned relative to the substrate 04 in a simple manner.

[0043] Figure 3 shows a third explanatory example of the apparatus according to the present invention. The laser apparatus 07 is positioned in the Z direction above the substrate 04 such that the beam path 10 of the laser apparatus 07 passes through the beam channel 20 of the bonding tool 02. The laser apparatus 07 has a laser emitter 09 for emitting laser radiation and a lens system 08 for beam expansion or beam focusing. In Figure 3, it can be seen that a semiconductor component 03 is already connected to the substrate 04 via two connection contacts 19, or conductively connected to a conductive material web (not shown) formed on the substrate 04. Another semiconductor component 03 can be held by the bonding tool 02, for example by negative pressure, and placed on the substrate 04 by the bonding tool 02. To at least partially melt the connection contacts 19, the semiconductor component 03 held on the bonding tool 02 is exposed to laser radiation from above through the beam channel 20. The bonding process, in particular the melting of the connection contacts 19, is monitored by an infrared sensor unit 17. The infrared sensor unit 17 detects infrared radiation reflected from the substrate 04 and / or semiconductor component 03 to detect the temperature and / or position of the semiconductor 03 relative to the substrate 04. Furthermore, the infrared sensor unit 17 can recognize a reference marker (not shown) placed on the substrate 04 based on its reflected radiation, and thus can also monitor the precise positioning of the substrate 04 relative to the substrate holder 05 and / or bonding tool 02 or semiconductor component 03 held on the bonding tool 02. According to a third descriptive example, the infrared sensor unit 17 is positioned below the substrate holder 05 so that the beam path 15 of the infrared sensor unit 17 passes through the optical window 06 toward the substrate 04. The positioning of the infrared sensor unit 17 is made possible by the fact that the substrate holder 05 is positioned on a base 12 that separates the substrate holder 05 from the base plate 13 of the apparatus 01. The optical window 06 is incorporated into the substrate holder 05 so that the lower surface 41 of the substrate can rest on the upper surface of the substrate holder 05 and the upper surface of the optical window 06 in a coplanar manner.To enable the substrate holder 05, and therefore the substrate 04, to be positioned relative to the infrared sensor unit 17 and / or bonding tool 02 in a simple manner, the base 12 on which the substrate holder 05 is placed is connected to a tool table 11 that can move at least in the XY direction.

[0044] Figure 4 shows a fourth explanatory example of the apparatus 01 according to the present invention. According to the fourth explanatory example, the substrate holder 05 is also separated from the base plate 13 by the base 12, and the substrate holder 05 is displaceable in the XY direction by positioning the base 12 on the tool table 11. The substrate 04 is in contact with both the upper surface of the substrate holder 05 and the upper surface of the optical window 06 integrated with the substrate holder 05 at the lower surface 41 of the substrate. According to the illustrated fourth explanatory example, the detection apparatus has both an infrared sensor unit 17 and an imaging unit implemented as a camera 14. The camera 14 is positioned below the substrate holder 05 between the base plate 13 and the substrate holder 05 so that the radiation detected by the camera 14 or the beam path 16 of the camera 14 passes through the optical window 06 and the transparent substrate 04. Thus, both the positioning of the substrate 04 on the substrate holder 05 and the positioning of the semiconductor component 03 relative to the substrate 04 can be monitored by the camera 14 from below the substrate holder 05. Thus, the positioning of the substrate 04 can be easily monitored based on a reference marker that can be detected by the camera 14. One semiconductor component 03 is already placed on the substrate 04, and another semiconductor component 03 is held on the bonding tool 02 for positioning on the substrate 04. Laser radiation is applied to the semiconductor component 03 to at least partially melt the connection contacts 19 of the semiconductor component 03, and the energy input of the laser radiation to the semiconductor component 03 melts the connection contacts 19. To apply the laser radiation, the laser device 07 has a laser emitter 09 and a lens system 08. It can be seen that the beam path 10 of the laser radiation passes through the beam channel 20 of the bonding tool 02, and therefore the beam channel 20 is located in the beam path 10 of the laser device 07 which is positioned above the substrate holder 05. Furthermore, the device 01 has an infrared sensor unit 17 that detects infrared radiation reflected by the semiconductor component 03 and / or the substrate 04 in order to measure the temperature of the semiconductor component 03 and / or the substrate 04. The infrared beam path 15 is deflected by the deflection mirror 21 so that the reflected radiation collides with the infrared sensor unit 17, which is not positioned vertically above the semiconductor component 03, but rather offset from it.By positioning the laser device 07 and the infrared sensor unit 17 above the substrate 04, both the beam path 15 of the infrared sensor unit 17 and the beam path 10 of the laser device 07 pass through at least a portion of the beam channel 20 simultaneously. According to the fourth explanatory example shown in Figure 4, the apparatus includes a camera 14 and a detection device comprising the infrared sensor unit 17, so that the bonding process, in particular the temperature and position of the bonding partners, can be detected with great reliability. The simultaneous use of the camera 14 and the infrared sensor unit 17 is made possible by the fact that at least one beam path 10, 15, 16, in this case the beam path 16 of the camera 14, passes through the optical window 06 and thus light emission can be detected below the substrate support 05.

Claims

1. In order to establish a contact connection between at least one connection contact of a substrate on which a conductive material web is formed and at least one connection contact of a semiconductor component, The bonding tool comprises a substrate in which a beam channel for light emission is formed inside the bonding tool for positioning and bonding the semiconductor component to the substrate, The system includes a laser device for applying laser radiation to the substrate and / or the semiconductor component, It is further equipped with a detection device for detecting light emission, The apparatus further comprises a substrate holder that fixes the substrate in a predetermined position and contacts at least one lower surface of the substrate, An optical window having an optically transparent window body is incorporated into the substrate holder so that light radiation to and from the substrate can pass through without obstruction, and the optical window is positioned within the beam path of the laser device or within the beam path of the detection device. The detection device is characterized by comprising an infrared sensor unit, the infrared sensor unit measuring the temperature of the substrate and the semiconductor component.

2. The apparatus according to claim 1, characterized in that the detection device further comprises an imaging unit.

3. The apparatus according to claim 2, characterized in that the optical window is located within the beam path of the laser device, and the beam channel of the bonding tool is located within the beam path of the infrared sensor unit.

4. The apparatus according to claim 2, characterized in that the optical window is located within the beam path of the infrared sensor unit, and the beam channel of the bonding tool is located within the beam path of the laser device.

5. The apparatus according to claim 2, wherein the optical window is located within the beam path of the imaging unit, and the beam channel of the bonding tool is located within the beam paths of the laser device and the infrared sensor unit such that the beam path of the laser device and the beam path of the infrared sensor unit pass through at least a portion of the beam channel simultaneously.

6. The apparatus according to any one of claims 1 to 5, characterized in that the laser device and / or the detection device are arranged on a tool table that is displaceable along at least two axes.

7. The apparatus according to any one of claims 1 to 5, further comprising a base plate and at least one base for separating the substrate holder from the base plate.

8. The apparatus according to any one of claims 1 to 5, characterized in that the optical window is aligned on the same plane as the substrate support on at least one side, forming a flat surface shared with the substrate support, and the shared flat surface is in contact with the lower surface of the substrate.

9. The apparatus according to any one of claims 1 to 5, characterized in that the optical window is made of glass and / or has an anti-reflective coating.

10. To establish a contact connection between at least one connection contact of a conductive material web formed on a non-conductive substrate and at least one connection contact of a semiconductor component, The substrate is fixed in a predetermined position on the substrate holder in such a manner that the lower surface of the substrate is in contact with the substrate holder. The semiconductor component is positioned on the substrate using a bonding tool. In order to at least partially melt the connection contacts and to create a material bond between the conductive material web and the connection contacts of the semiconductor component, the substrate is exposed to laser radiation from a laser device. A method for detecting light radiation by a detection device for detecting the position of the substrate, detecting the position of the semiconductor component, measuring the temperature of the substrate, and measuring the temperature of the semiconductor component, At least one beam path of light emission is guided to and / or from the substrate through an optical window having an optically transparent window body, the optical window being inserted into the substrate holder, and another beam path of light emission is guided through a beam channel formed in the bonding tool, The method is characterized in that the temperature of the substrate and the temperature of the semiconductor component are measured by an infrared sensor unit.

11. The method according to claim 10, wherein at least one reference marker disposed on the substrate and / or the semiconductor component is detected by the detection device, and the substrate, the semiconductor component, and / or the beam path of the light emission are aligned based on the detected at least one reference marker.

12. The method according to claim 11, wherein the at least one reference marker is detected by the infrared sensor unit based on infrared radiation reflected by the at least one reference marker when exposed to heat.

13. The method according to claim 10 or 11, wherein the semiconductor component is applied to at least a partially transparent substrate, and the measurement of the temperature of at least one connection contact of the substrate and / or at least one connection contact of the semiconductor component is performed by the infrared sensor unit by measuring infrared radiation reflected from a reference plane of the connection contact.

14. The method according to claim 11 or 12, wherein the semiconductor component is applied to a substrate that is at least partially transparent, and the detection of the at least one reference marker is performed through the optical window and the substrate.

15. The method according to any one of claims 10 to 12, wherein the laser device and / or the detection device is displaced along at least two axes for alignment with respect to the substrate below the optical window.

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