Substrate holding member and method for manufacturing the same

Abstract

To provide a substrate holding member capable of both suppressing particles and suppressing hot spots and a manufacturing method for the same.SOLUTION: A substrate holding member 100 includes a substrate 10 including a sintered ceramic body, a heat-generating resistive body 20 embedded in the substrate 10, and a plurality of pin-shaped convex parts 30 formed protruding upwardly from an upper surface 12 of the substrate 10. The pin-shaped convex parts 30 are so configured that an upper end surface 32 that is at least in contact with the substrate is formed of a thermal spray film 40 of a material with lower thermal conductivity than the sintered ceramic body. The pin-shaped convex parts 30 have a diameter of 2 mm or less on the upper end surface 32.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a substrate holding member and a method for manufacturing the same.

Background Art

[0002] As a member for a semiconductor manufacturing apparatus, a heater plate (substrate holding member) in which an electrode (heating resistor) is embedded has been used. The heater plate can heat the placed substrate.

[0003] Patent Document 1 discloses a technique of using, as a semiconductor manufacturing susceptor, a member in which a thin film made of aluminum nitride is formed on the surface of a base body made of a sintered body mainly composed of aluminum nitride with a thickness of 0.001 to 1.0 mm, and a heating circuit and / or a conductive circuit are formed inside the base body. Thereby, since it has excellent plasma resistance, the long life of the susceptor during plasma etching can be achieved, and moreover, it has heat uniformity, and when a heating circuit or the like is incorporated, uniform heating of the semiconductor can be achieved.

[0004] Patent Document 2 discloses a technique in which a low-emissivity film made of a material having a lower emissivity than that of a heater substrate is formed over the entire surface of at least the heated object placement surface of the heater substrate, and this low-emissivity film is patterned to change the exposure ratio of the heater substrate on the heated object placement surface, so as to have an emissivity distribution such that the emissivity decreases from the central portion to the outer peripheral edge of the heated object placement surface. Thereby, in a heater member for placing and heat-treating a heated object and a heat-treating apparatus using the same, it is described that the input power can be reduced to achieve energy saving, the risk of damage due to thermal stress can be eliminated, the degree of freedom in wiring design of the heating circuit portion can be increased, the heat uniformity performance can be enhanced, and the reliability can be enhanced by eliminating short circuits.

[0005] Patent Document 3 discloses a method for manufacturing a heater unit comprising a plate member having a groove on its lower surface, a base having an opening in the center and joined to a part of the lower surface of the plate member, a resistance heating element disposed between the groove and the upper surface of the base, and a plurality of protrusions formed on the upper surface of the plate member, each of which forms the same plane, wherein a thermal spray coating is formed on the surface of the plate member on which the object to be heated is placed, the thermal spray coating is planar polished to a predetermined thickness, a mask having an opening at a predetermined position is placed, and the thermal spray coating facing the opening is blast-treated until the surface of the plate member is exposed. It is stated that this makes it possible to ensure uniformity of the clearance with the object to be heated within the heater function surface and to reduce metal contamination.

[0006] Patent Document 4 discloses a method for repairing a used electrostatic chuck, in which a predetermined amount of dielectric material is removed from the used electrostatic chuck, leaving the base surface; then the base surface is roughened to improve the adhesion of the new dielectric material; then the new dielectric material is sprayed onto the roughened surface; then a mask is placed over the new dielectric material to help form a mesa on which the substrate is placed during processing; then a portion of the new dielectric layer is removed to form a new mesa; and after the mask is removed, the chuck is cleaned. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 7-86379 [Patent Document 2] Japanese Patent Publication No. 2005-158270 [Patent Document 3] Japanese Patent Publication No. 2009-146793 [Patent Document 4] Japanese Patent Publication No. 2017-55126 [Overview of the Initiative] [Problems that the invention aims to solve]

[0008] Substrate holding components such as electrostatic chucks and ceramic heaters with built-in heaters may exhibit abnormal heat generation points (hot spots). On the other hand, in order to suppress the generation and adhesion of particles to the substrate due to contact between the substrate and the substrate holding component, a structure in which the substrate is supported by pin-shaped protrusions is sometimes employed. From the viewpoint of particle suppression, a smaller diameter for the upper end surface of the pin-shaped protrusion is preferable, but the smaller the diameter of the upper end surface of the pin-shaped protrusion, the greater the risk of hot spot generation tends to be. In semiconductor processes, due to the requirement for process uniformity, there has been a demand for substrate holding components that suppress the generation of hot spots, even if they are equipped with pin-shaped protrusions.

[0009] The technology described in Patent Document 1 has the same thermal conductivity even when an AlN thin film is formed on the surface of an AlN sintered body. Therefore, hot spots and cold spots may appear in the surface temperature distribution directly above the heater or directly above sparse areas of the heater, and these may be exacerbated when used at higher temperatures.

[0010] The technology described in Patent Document 2 describes a film with a lower emissivity than the heater substrate, which is mainly metallic, has higher thermal conductivity, and is electrically conductive. However, in the case of a film with higher thermal conductivity, when used at higher temperatures, the area directly above the heater or directly above the sparse areas of the heater tends to become a hot spot or a cold spot, making it unsuitable to apply a conductive film to the surface.

[0011] The technology described in Patent Document 3 discloses means to address the problems of metal heaters by ensuring uniform clearance with the heated object and reducing metal contamination. However, it is not directly applicable to ceramic heaters, which are generally used at higher temperatures and in more severe corrosive environments than metal heaters.

[0012] The technology described in Patent Document 4 is a method for repairing an electrostatic chuck. Since the electrostatic adsorption function will not be restored unless the repair material is substantially identical to the original material, there are limitations on the material of the mesa, and it is not possible to select a material for purposes such as heat uniformity or corrosion resistance.

[0013] Furthermore, none of the technologies described in Patent Documents 1 to 4 take into consideration the suppression of hot spot generation when the diameter of the upper end surface of the pin-shaped protrusion is reduced.

[0014] This invention has been made in view of these circumstances, and aims to provide a substrate holding member and a method for manufacturing the same that can achieve both particle suppression and hot spot suppression. [Means for solving the problem]

[0015] (1) To achieve the above objective, the substrate holding member of the present invention comprises a substrate including a ceramic sintered body, a heat-generating resistor embedded in the substrate, and a plurality of pin-shaped protrusions formed projecting upward from the upper surface of the substrate, wherein at least the upper end surface of the pin-shaped protrusions that contacts the substrate is made of a material with lower thermal conductivity than the ceramic sintered body. Al 2 O 3 、Y 2 O 3 , ZrO 2 , or quartz glass The pin-shaped protrusion is formed by a thermal spray coating, and the upper end surface of the pin-shaped protrusion is characterized by being 2 mm or less in diameter, and the upper surface of the substrate being formed by the ceramic sintered body.

[0016] Thus, by forming at least the upper end surface of the pin-shaped protrusions of a substrate holding member, where the diameter of the upper end surface of the pin-shaped protrusions is 2 mm or less, with a thermal spray coating of a material with lower thermal conductivity than the ceramic sintered body, the generation of hot spots caused by the concentration of heat flow due to the reduced diameter of the pin-shaped protrusions can be suppressed. As a result, the substrate can be heated more uniformly.

[0017] (2) Furthermore, the present invention Related reference forms In the substrate holding member, the upper surface of the substrate is characterized in that it is formed of a thermal spray film made of the same material as the thermal spray film.

[0018] Thus, even when the substrate is formed using a ceramic material that reacts with moisture and has the property of deteriorating the material itself, since the upper surface of the substrate is formed of a sprayed film made of the same material as the sprayed film, the contact between the ceramic sintered body forming the substrate and the moisture in the outside air can be blocked. Thereby, the corrosion resistance of the substrate holding member can be improved.

[0019] (3) Further, in the substrate holding member of the present invention, the ratio of the total area of the upper end surfaces that contact the substrate among the plurality of pin-shaped convex portions with respect to the area of the substrate mounting surface of the substrate when viewed in plan is 10% or less.

[0020] Thus, by setting the ratio of the total area of the upper end surfaces that contact the substrate among the plurality of pin-shaped convex portions with respect to the area of the substrate mounting surface of the substrate when viewed in plan to 10% or less, the contact between the pin-shaped convex portions and the substrate can be sufficiently reduced, and uniform heating of the entire substrate can be achieved.

[0021] (4) Further, in the substrate holding member of the present invention, the porosity of the sprayed film is 2% or less.

[0022] Thereby, a sufficiently dense sprayed film can be formed, and the life of the sprayed film and thus the life of the substrate holding member can be lengthened.

[0023] (5) Further, in the substrate holding member of the present invention, the cross-sectional curve obtained by cutting the substrate mounting surface of the substrate with a cross-section passing through the Z-axis with the central axis of the substrate as the Z-axis is a curve that takes the maximum value of the Z value in the vicinity of the central axis and the minimum value of the Z value in the vicinity of the outer periphery of the substrate, or a curve that takes the minimum value of the Z value in the vicinity of the central axis and the maximum value of the Z value in the vicinity of the outer periphery of the substrate when the intersection line of a predetermined reference plane and the cross-section is taken as the X-axis.

[0024] When pin-shaped protrusions are processed into a flat surface, localized height differences may occur in unexpected locations on the substrate mounting surface, negatively affecting heat uniformity. By forming the substrate mounting surface of the base material with a curved surface as described above, the substrate's conformability to the pin-shaped protrusions is improved, further suppressing hot spots and achieving uniform heat distribution across the entire substrate.

[0025] (6) Furthermore, in the substrate holding member of the present invention, the plurality of pin-shaped protrusions include a second pin-shaped protrusion which has an upper end surface located closer to the upper surface than the substrate mounting surface of the base and does not constitute the substrate mounting surface, and the second pin-shaped protrusion is formed in a ring-shaped region surrounded by concentric circles centered on the center of the upper surface.

[0026] This allows for adjustment of the heat transfer to the substrate caused by the uneven heat distribution resulting from the radial arrangement of heat-generating resistors, by controlling whether or not the pin-shaped protrusions make contact with the substrate. This helps to further suppress hot spots and equalize the heat distribution across the entire substrate.

[0027] (7) Furthermore, in the substrate holding member of the present invention, the ceramic sintered body is characterized in that AlN is the main component, and the material of the thermal spray film is one of Al2O3, Y2O3, ZrO2, or quartz glass.

[0028] By using such materials, the thermal spray coating can be constructed from a material with lower thermal conductivity and higher moisture resistance than the AlN sintered body that forms the substrate. As a result, it is possible to suppress hot spots and improve corrosion resistance.

[0029] (8) Furthermore, the method for manufacturing a substrate holding member of the present invention is the method for manufacturing a substrate holding member described in any of (1) to (7) above, comprising: a preparation step of preparing a substrate holding member precursor comprising a base formed of a ceramic sintered body and a heating resistor embedded in the base; and a material having a lower thermal conductivity than the ceramic sintered body on the substrate mounting surface side of the substrate holding member precursor. Al 2 O 3 、Y 2 O 3 , ZrO 2 , or quartz glass The method includes a thermal spraying step of performing slurry spraying using a thermal sprayer to form a thermal spray film, and a pin-shaped protrusion forming step of processing the thermal spray film to form a pin-shaped protrusion in which at least the upper end surface that contacts the substrate is formed of the thermal spray film, wherein in the pin-shaped protrusion forming step, the thermal spray film is processed so that the ceramic sintered body is exposed on the upper surface of the substrate.

[0030] Thus, by forming a thermal spray film using slurry spraying, it is possible to create a thermal spray film that is denser and has fewer pores than conventional plasma spraying. As a result, substrate holding components can be manufactured that have the effect of suppressing hot spots and improving corrosion resistance. In addition, since the thermal spray film formed by slurry spraying can be made with a small surface roughness, wear of pin-shaped protrusions due to substrate attachment and detachment can also be suppressed.

[0031] (9) Furthermore, the method for manufacturing a substrate holding member of the present invention is the method for manufacturing a substrate holding member described in any of (1) to (7) above, comprising: a base body formed of a ceramic sintered body; a heating resistor embedded in the base body; and a plurality of pin-shaped protrusions formed projecting upward from the upper surface of the base body, wherein the pin-shaped protrusions are formed at least at an upper end surface that contacts the substrate, which is formed of the thermal spray film; a thermal spray film removal step of removing at least a portion of the thermal spray film; and a material with a lower thermal conductivity than the ceramic sintered body on the substrate mounting surface side of the substrate holding member precursor from which at least a portion of the thermal spray film has been removed. Al 2 O 3 、Y 2 O 3 , ZrO 2 , or quartz glass The method includes a thermal spraying step of performing slurry spraying using a thermal sprayer to form another thermal spray film, and a pin-shaped protrusion forming step of processing the other thermal spray film to form a pin-shaped protrusion in which at least the upper end surface that contacts the substrate is formed of the other thermal spray film, wherein in the pin-shaped protrusion forming step, the thermal spray film is processed so that the ceramic sintered body is exposed on the upper surface of the substrate.

[0032] In this way, by removing at least a portion of the first thermal spray coating on the substrate holding member precursor, where at least the upper end surface of the pin-shaped protrusions that contacts the substrate is formed with the first thermal spray coating, and then forming a thermal spray coating on top of that by slurry thermal spraying, it is possible to manufacture a substrate holding member that has the effect of suppressing hot spots and improving corrosion resistance. Furthermore, even if the pin-shaped protrusions of the substrate holding member of the present invention are worn or damaged, the substrate mounting surface can be easily repaired and restored, thereby extending the lifespan of the substrate holding member. [Effects of the Invention]

[0033] According to the substrate holding member and its manufacturing method of the present invention, it is possible to achieve both particle suppression and hot spot suppression. [Brief explanation of the drawing]

[0034] [Figure 1] This is a schematic cross-sectional view showing an example of a substrate holding member according to the first embodiment of the present invention. [Figure 2] This is a schematic diagram showing an example of the upper surface of a substrate holding member according to the first embodiment. [Figure 3] This is a schematic diagram showing an example of a heating resistor for a substrate holding member according to the first embodiment. [Figure 4] This is a schematic diagram showing a modified example of the upper surface of the substrate holding member according to the first embodiment. [Figure 5] This is a schematic cross-sectional view showing a modified example of the substrate holding member according to the first embodiment. [Figure 6] This is a schematic cross-sectional view showing a modified example of the substrate holding member according to the first embodiment. [Figure 7] This is a schematic cross-sectional view showing a modified example of the substrate holding member according to the first embodiment. [Figure 8] This is a schematic cross-sectional view showing an example of a substrate holding member according to the second embodiment. [Figure 9] This is a schematic diagram showing an example of the upper surface of a substrate holding member according to the second embodiment. [Figure 10] This is a schematic partial cross-sectional view showing an example of a substrate holding member according to the second embodiment. [Figure 11] In the example shown in Figure 10, this is a schematic partial cross-sectional view for determining the deviation ΔZ(X) at a given X. [Figure 12] This is a schematic partial cross-sectional view showing a modified example of the substrate holding member according to the second embodiment. [Figure 13] This is a schematic partial cross-sectional view showing a modified example of the substrate holding member according to the second embodiment. [Figure 14] This is a schematic partial cross-sectional view showing a modified example of the substrate holding member according to the second embodiment. [Figure 15] This is a schematic cross-sectional view showing an example of a substrate holding member according to the third embodiment. [Figure 16] This is a schematic diagram showing an example of the upper surface of a substrate holding member according to the third embodiment. [Figure 17] This flowchart shows a method for manufacturing a substrate holding member according to an embodiment of the present invention. [Figure 18] This flowchart shows a method for manufacturing a substrate holding member according to an embodiment of the present invention. [Figure 19] This table shows the conditions and measurement results for the examples and comparative examples. [Modes for carrying out the invention]

[0035] Next, embodiments of the present invention will be described with reference to the drawings. To facilitate understanding of the explanation, the same reference numeral is used for identical components in each drawing, and redundant explanations are omitted. Note that the sizes of each component in the configuration diagrams are conceptual representations and do not necessarily represent actual dimensional ratios.

[0036] [First Embodiment] (Configuration of substrate holding member) A substrate holding member according to the first embodiment of the present invention will be described with reference to Figures 1 to 3. Figure 1 is a schematic cross-sectional view showing an example of a substrate holding member according to the first embodiment of the present invention. Figure 2 is a schematic diagram showing an example of the upper surface of a substrate holding member according to the first embodiment. Figure 3 is a schematic diagram showing an example of a heat-generating resistor of a substrate holding member according to the first embodiment. The substrate holding member 100 according to this embodiment comprises a base body 10, a heat-generating resistor 20, and a pin-shaped projection 30.

[0037] The base body 10 is formed in a substantially flat plate shape from a ceramic sintered body. The base body 10 may be in various shapes other than a substantially circular plate shape, such as a polygonal plate shape or an elliptical plate shape. Note that a substantially flat plate shape includes a convex shape or a concave shape, which will be described later. It is preferable that the base body 10 has a shape in which the center 16 of the base body is naturally determined.

[0038] The ceramic sintered body forming the substrate 10 can be made from various materials depending on the application. For example, ceramics mainly composed of AlN, Al2O3, Si3N4, or SiC can be used. Among these, ceramics mainly composed of AlN are preferred. This is because ceramics mainly composed of AlN have high thermal conductivity, which makes them prone to the generation of hot spots due to the concentration of heat flow, as described later. Note that "mainly composed of AlN" means that the ceramic contains 90 wt% or more of AlN. The same applies to Al2O3, Si3N4, SiC, etc.

[0039] The heating resistor 20 is embedded in the substrate 10. The heating resistor 20 can have various shapes, such as mesh or foil. It can also be made of various materials, such as molybdenum or tungsten. The heating resistor 20 is used as a heater electrode for heating the substrate (wafer) W. Other electrodes, such as electrostatic adsorption electrodes or high-frequency electrodes, may also be embedded.

[0040] Multiple pin-shaped protrusions 30 are formed, projecting upward from the upper surface 12 of the base body 10. The shape of the pin-shaped protrusions 30 can be appropriately selected from shapes such as cylindrical, prismatic, conical, pyramidal, or truncated cone or truncated pyramidal shapes with the upper part cut off.

[0041] The arrangement of the pin-shaped protrusions 30 is not particularly limited. It can be a known form or a similar form, and may be a regular arrangement such as concentric circles as shown in Figure 2, a square grid as shown in Figure 4, or a triangular grid, or an irregular arrangement where localized density occurs. Figure 4 is a schematic diagram showing a modified example of the upper surface of the substrate holding member according to the first embodiment.

[0042] The upper end surfaces 32 of the multiple pin-shaped protrusions together form a predetermined shape surface (substrate mounting surface 34) on which the substrate W is placed. In this way, the multiple pin-shaped protrusions 30 support the substrate W. That is, the substrate mounting surface 34 formed by the upper end surfaces 32 of the multiple pin-shaped protrusions is determined. As a result, the upper end surfaces 32 of the multiple pin-shaped protrusions and the substrate W come into contact, and the substrate W is supported. It should be noted that some of the multiple pin-shaped protrusions 30 may not have their upper end surfaces 32 in contact with the substrate W. This is because even if such protrusions exist, it is possible to support the substrate W depending on the arrangement of the surrounding pin-shaped protrusions 30. It should be noted that the entire upper end surface 32 of the pin-shaped protrusions 30 may be in contact with the substrate W, or only a part of the upper end surface 32 of the pin-shaped protrusions 30 may be in contact with the substrate W. Since the substrate W is supported by the pin-shaped protrusions 30, the generation and jamming of particles can be suppressed, and the space under the substrate W can be used as a gas flow path if necessary.

[0043] The pin-shaped protrusions 30 are formed with a thermal spray coating 40 made of a material having a lower thermal conductivity than the ceramic sintered body forming the base 10, at least on the upper end surface 32 that contacts the substrate W. Furthermore, the diameter of the upper end surface 32 of the pin-shaped protrusions 30 is 2 mm or less, preferably 1 mm or less, and more preferably 0.5 mm or less. If the diameter of the upper end surface 32 of the pin-shaped protrusions 30 is greater than 2 mm, the generation of particles increases. On the other hand, if the diameter of the upper end surface 32 of the pin-shaped protrusions 30 is reduced, the risk of hot spots being generated due to the concentration of heat flow increases.

[0044] In this invention, the diameter of the upper end surface 32 of the pin-shaped protrusion 30 of the substrate holding member 100 is 2 mm or less, and at least the upper end surface 32 that contacts the substrate W is formed of a thermal spray film 40 made of a material with lower thermal conductivity than the ceramic sintered body forming the base body 10. This suppresses the generation of hot spots caused by the concentration of heat flow that occurs when the diameter of the pin-shaped protrusion 30 is reduced. As a result, the substrate W can be heated uniformly. The lower limit of the diameter of the upper end surface 32 of the pin-shaped protrusion 30 is preferably 0.1 mm or more, considering ease of formation and strength. Furthermore, the upper end surface 32 of the pin-shaped protrusion 30 that does not contact the substrate W does not need to be formed of the thermal spray film 40 because heat flow is suppressed as a result of not contacting the substrate W.

[0045] The height of the pin-shaped protrusion 30 is preferably 10 μm or more and 500 μm or less. The height of the pin-shaped protrusion 30 refers to the distance from the upper surface 12 of the base body 10 to the upper end surface 32 of the pin-shaped protrusion. The surface roughness of the plane of the upper end surface 32 of the pin-shaped protrusion 30 is preferably Ra 0.01 μm or more and 0.50 μm or less. The surface roughness of the upper end surface 32 of the pin-shaped protrusion can be measured with a non-contact type one-shot 3D shape measuring machine.

[0046] As shown in Figure 5, the pin-shaped protrusion 30 may be formed not only on its upper end surface 32 but also entirely on the thermal spray coating 40. Furthermore, as shown in Figure 6, it is preferable that the upper surface 12 of the base body 10 is formed of a thermal spray coating of the same material as the thermal spray coating 40 forming the upper end surface 32 of the pin-shaped protrusion 30. In this way, by forming the upper surface 12 of the base body 10 with a thermal spray coating of the same material as the thermal spray coating 40 forming the upper end surface 32 of the pin-shaped protrusion 30, even when the base body 10 is formed using ceramics that have the property of degrading themselves by reacting with the surrounding corrosive atmosphere and moisture, contact between the ceramic sintered body forming the base body 10 and the outside atmosphere and moisture can be blocked. This improves the corrosion resistance of the substrate holding member 100. Figures 5 and 6 are schematic cross-sectional views showing modified examples of the substrate holding member according to the first embodiment of the present invention. Note that when the upper surface 12 of the base body 10 is formed of a thermal spray coating, the base body 10 is formed of a ceramic sintered body and a thermal spray coating. In that case, as shown in Figure 6, the upper surface of the thermal spray coating is the upper surface 12 of the substrate 10.

[0047] The ratio of the total area of ​​the upper end surface 32 that contacts the substrate W among the multiple pin-shaped protrusions 30 to the area of ​​the substrate mounting surface 34 of the base body 10 when viewed from above is preferably 10% or less, and more preferably 5% or less. By setting the ratio of the total area of ​​the upper end surface 32 that contacts the substrate W among the multiple pin-shaped protrusions 30 to the area of ​​the substrate mounting surface 34 of the base body 10 when viewed from above to 10% or less, contact between the pin-shaped protrusions 30 and the substrate W can be sufficiently reduced, thereby suppressing particles and ensuring uniform heating of the entire substrate W. The area of ​​the substrate mounting surface 34 of the base body 10 when viewed from above is the area of ​​the region on which the substrate is placed, out of the area of ​​the plane determined by the outer shape of the base body 10. Furthermore, the sum of the areas of the upper end surfaces 32 that contact the substrate W among the multiple pin-shaped protrusions 30 is the sum of the areas of the surfaces when the upper end surfaces 32 of each pin-shaped protrusion 30 that contact the substrate W are projected onto the region on which the substrate is placed, and which are the same plane as the plane determined by the outer shape of the base body 10.

[0048] The porosity of the thermal spray coating 40 is preferably 2% or less. This allows for the formation of a sufficiently dense thermal spray coating 40, thereby extending the lifespan of the thermal spray coating 40 and, consequently, the lifespan of the substrate holding member 100.

[0049] The material for the thermal spray coating 40 is appropriately selected from materials with lower thermal conductivity than the ceramic sintered body forming the substrate 10, as described above. For example, if the ceramic sintered body is mainly composed of AlN, the material for the thermal spray coating is preferably Al2O3, Y2O3, ZrO2, or quartz glass. By using such materials, the thermal spray coating can be made of a material with lower thermal conductivity and higher moisture resistance than the AlN sintered body forming the substrate. As a result, it is possible to suppress hot spots and improve corrosion resistance.

[0050] In addition to the above, the substrate holding member 100 may also be provided with terminals 50 and terminal holes 52, and lift pin holes (not shown). Furthermore, as shown in Figure 7, when the substrate holding member 100 is used as a substrate holding member with a shaft, the substrate holding member 100 may be provided with a support member 60. The support member 60 is preferably cylindrical. Figure 7 is a schematic cross-sectional view showing a modified example of the substrate holding member according to the first embodiment of the present invention. Furthermore, when the substrate holding member 100 is used as a vacuum chuck, it may be provided with ventilation holes, annular protrusions, etc. If an annular protrusion is provided, its width is preferably 1.0 to 5.0 mm and its height is preferably 0.01 to 0.5 mm. Furthermore, the surface roughness of the flat surface of the upper end face of the annular protrusion is preferably Ra 0.01 μm or more and 0.5 μm or less. The surface roughness of the annular protrusion can be measured with a tactile surface roughness meter.

[0051] [Second Embodiment] A substrate holding member according to a second embodiment of the present invention will be described with reference to Figures 8 to 11. Figure 8 is a schematic cross-sectional view showing an example of a substrate holding member according to a second embodiment of the present invention. Figure 9 is a schematic diagram showing an example of the upper surface of a substrate holding member according to a second embodiment. Figure 10 is a schematic partial cross-sectional view showing an example of a substrate holding member according to a second embodiment. Figure 11 is a schematic partial cross-sectional view for determining the deviation ΔZ(X) at a certain X in the example of Figure 10. Terminals 50 and terminal holes 52 are omitted in the partial cross-sectional view. The basic configuration of the substrate holding member 200 according to this embodiment is the same as that of the substrate holding member 100 according to the first embodiment. That is, each configuration of the first embodiment can also be applied to the second embodiment. Only the differences will be described below.

[0052] In this embodiment, the substrate holding member 200 has a substrate mounting surface 34 (substrate mounting surface 34 of the base body 10) which is formed by the upper end faces 32 of a plurality of pin-shaped protrusions 30. The cross-sectional curve obtained by cutting the substrate mounting surface 34 through a cross section passing through the Z-axis, with the Z-axis being a straight line passing through the center 16 of the base body (a straight line perpendicular to the reference plane of the base body 10), is a curve that takes the maximum value of Z near the central axis as shown in Figure 10 and decreases monotonically toward the outer circumference 18 of the base body 10, or a curve that takes the minimum value of Z near the central axis as shown in Figure 12 and increases monotonically toward the outer circumference 18 of the base body 10. Figure 12 is a partial cross-sectional view showing a modified example of the substrate holding member according to the second embodiment.

[0053] The predetermined reference plane is the upper surface 12 when the base body 10 is placed on a horizontal surface, as shown in Figure 10 or Figure 12, if the upper surface 12 is horizontal when the base body 10 is placed on a horizontal surface, as shown in Figure 13 or Figure 14, if the upper surface 12 is not horizontal when the base body 10 is placed on a horizontal surface, the reference plane may be a horizontal plane passing through the point on the upper surface 12 of the base body 10 that is closest to the horizontal surface. Alternatively, the reference plane may be a plane obtained by shifting these horizontal planes upward or downward in parallel. Figures 13 and 14 are partial cross-sectional views showing a modified example of the substrate holding member according to the second embodiment. The vicinity of the central axis refers to the range within 25 mm from the central axis.

[0054] Thus, by having a cross-sectional curve of the substrate mounting surface 34 that takes its maximum Z value near the central axis and decreases monotonically toward the outer circumference 18 of the base body 10, or a curve that takes its minimum Z value near the central axis and increases monotonically toward the outer circumference 18 of the base body 10, the substrate W can follow the pin-shaped protrusions 30 better than by increasing the flatness of the substrate mounting surface 34 to make it closer to a plane, thereby reducing the occurrence of localized hot spots.

[0055] Preferably, the base body 10 and the multiple pin-shaped protrusions 30 are formed such that the base body 10 is flat, and the multiple pin-shaped protrusions 30 are formed at different heights from the reference surface, and the substrate mounting surface 34 is formed by the multiple pin-shaped protrusions 30. This makes it easier to process the substrate mounting surface 34, and when grinding or polishing the pin-shaped protrusions 30, one of the multiple substrate mounting surface shapes can be selected.

[0056] On the other hand, the shape of the base body 10 and the multiple pin-shaped protrusions 30 may be such that the upper surface 12 of the base body 10 is formed with a curved surface substantially identical to the substrate mounting surface 34, as shown in Figure 13, and the mounting surface is formed by multiple pin-shaped protrusions 30 that are formed at substantially the same height from the upper surface 12 of the base body 10. This makes it possible to equalize the suction force when the substrate holding member 200 is used as a member that adsorbs the substrate W. Even with the shape in Figure 10, the difference in height of the pin-shaped protrusions 30 in the Z-axis direction is minute, so it does not affect the suction force of the substrate W itself.

[0057] Furthermore, the shape of the base body 10 may be such that the lower surface 14 of the base body 10 is formed with a curved surface substantially identical to the mounting surface, as shown in Figure 14. Also, the heat-generating resistor 20 embedded in the base body 10 may be formed with a curved surface substantially identical to the mounting surface, as shown in Figure 14. Therefore, the description of the base body 10 as substantially flat includes not only the convex shapes shown in Figures 1 and 6, but also the convex shapes shown in Figures 13 and 14, or the concave shapes not shown.

[0058] The substrate mounting surface 34 can be measured with a 3D measuring instrument. However, it is important that when the substrate W is placed or adsorbed onto the substrate holding member 200, the substrate W follows the substrate mounting surface 34, and that the shape of the surface of the substrate W opposite the substrate mounting surface 34 (the surface of the substrate W) is an ideal curved surface. Therefore, the curved surface measured by a laser interferometer on the surface opposite the substrate mounting surface 34 when a silicon wafer with a thickness of 0.775 mm is placed or adsorbed is considered to be the substrate mounting surface 34. The same applies to the cross-sectional curve.

[0059] Furthermore, as shown in Figure 11, the cross-sectional curve is defined as follows: L (mm) is the reference length in the X-axis direction, Z (X) is the value of Z (mm) for a given X (mm), and the value of the deviation ΔZ(X) is ΔZ(X) = Z(X) - ((Z(X+L)+Z(XL)) / 2), and the maximum value of ΔZ(X) is ΔZ(X). max The minimum value of ΔZ(X) is ΔZ(X) min When this is the case, ΔZ(X) max -ΔZ(X) min It is preferable that the value ≤1 (μm) is satisfied, and more preferably that it is 0.5 μm or less. Here, X is defined in a region at least L inward from the outer edge of the region on which the substrate W is placed on the substrate holding member, and it is preferable that the calculation is performed in a region more than 2L inward from the outer edge of the region. This suppresses local irregularities, and thus the occurrence of local hot spots can be further reduced. Figure 11 is a schematic partial cross-sectional view for determining the deviation ΔZ(X) at a certain X in the example of Figure 10. The reference length L can be the arrangement pitch of the pin-shaped protrusions 30. For example, when the pin-shaped protrusions 30 are arranged in concentric circles, the difference in the radii of those concentric circles can be applied. When multiple pin-shaped protrusions 30 are arranged at regular intervals, the reference length L is preferably the interval between them. Figure 11 shows such an example.

[0060] Furthermore, the flatness of the substrate mounting surface 34 is preferably 50 μm or less. This allows the substrate W to be mounted without wrinkles forming on it. The flatness of the substrate mounting surface 34 is the difference between the maximum and minimum Z values ​​for all points on the substrate mounting surface 34, or it may be the difference between the maximum and minimum Z values ​​for all pin-shaped protrusions 30. There is no particular lower limit for the flatness, but in order to mount the substrate W without wrinkles forming on it, it may be set to, for example, 5 μm or more, depending on the diameter of the base body 10 and the shape of the target substrate mounting surface 34.

[0061] [Third Embodiment] A substrate holding member according to a third embodiment of the present invention will be described with reference to Figures 15 and 16. Figure 15 is a schematic cross-sectional view showing an example of a substrate holding member according to the third embodiment of the present invention. Figure 16 is a schematic diagram showing an example of the upper surface of a substrate holding member according to the third embodiment. Figure 16 omits the pin-shaped protrusions 30. The substrate holding member 300 according to this embodiment has the same basic configuration as the substrate holding member 100 according to the first embodiment. That is, each configuration of the first embodiment can also be applied to the third embodiment. Only the differences will be described below.

[0062] As shown in Figures 15 and 16, the substrate holding member 300 according to this embodiment includes a plurality of pin-shaped protrusions 30, including a second pin-shaped protrusion 36 that has an upper end surface 38 located closer to the upper surface 12 than the substrate mounting surface 34 of the base body 10 and does not constitute the substrate mounting surface 34. In this case, it is preferable that the second pin-shaped protrusions 36 are formed in a ring-shaped region (ring-shaped region 70) surrounded by concentric circles centered on the center 16 of the base body. It is preferable that all the pin-shaped protrusions 30 within the ring-shaped region 70 are second pin-shaped protrusions 36. The ring-shaped region 70 may also be a circular region including the center 16 of the base body. Furthermore, multiple ring-shaped regions 70 may be formed.

[0063] This allows the heat transfer to the substrate W due to the uneven heat distribution caused by the arrangement of the radially oriented heat-generating resistors 20 to be adjusted by the presence or absence of contact between the pin-shaped protrusions 30 and the substrate W, thereby further suppressing hot spots and achieving uniform heating of the entire substrate. Such processing may be performed after manufacturing the substrate holding member 300, based on the results of a temperature evaluation test. Since the pin-shaped protrusions 30 of the present invention are formed by processing the thermal spray film 40, it is easy to process some of the pin-shaped protrusions 30 by grinding or other means to create second pin-shaped protrusions 36 that have little to no contact with the substrate W, and thus easy to adjust the temperature. The upper end surface 38 of the second pin-shaped protrusion that does not contact the substrate W does not have to be formed of the thermal spray film 40. That is, when forming the second pin-shaped protrusions 36, grinding or other means may be performed until the thermal spray film 40 is almost gone.

[0064] Furthermore, the substrate holding member 300 according to this embodiment can also be combined with the configuration of the substrate holding member 200 according to the second embodiment. Figure 15 shows the substrate holding member 200 according to the second embodiment combined with a configuration in which the cross-sectional curve of the substrate holding member 200 has a curve that takes the maximum value of Z near the central axis and the minimum value of Z near the outer circumference of the substrate, i.e., a convex curve. In this embodiment as well, the curved surface measured by a laser interferometer on the surface opposite to the substrate mounting surface 34 when a silicon wafer with a thickness of 0.775 mm is placed or adsorbed may be considered as the substrate mounting surface 34.

[0065] [Manufacturing method for substrate holding member] Next, a method for manufacturing a substrate holding member according to this embodiment will be described. Figure 17 is a flowchart showing a method for manufacturing a substrate holding member according to an embodiment of the present invention. The method for manufacturing a substrate holding member according to an embodiment of the present invention includes a preparation step S1, a thermal spraying step S2, and a pin-shaped protrusion formation step S3.

[0066] (preparation process) Preparation step S1 prepares a substrate holding member precursor comprising a substrate formed from a ceramic sintered body and a heating resistor embedded in the substrate. The substrate holding member precursor can be manufactured by various existing methods, for example, by the molded body hot pressing method described below. Alternatively, it may be manufactured by a powder hot pressing method, in which ceramic raw material powder and predetermined electrodes are alternately layered to embed the electrodes inside the ceramics, and then fired using a uniaxial hot pressing method, or by the conventional green sheet lamination method, etc.

[0067] A method for manufacturing a substrate holding member precursor by a molded body hot press method includes a molded ceramic body formation step, a ceramic degreased body preparation step, a laminate formation step, and a firing step. In the case of a substrate holding member with a shaft, the method further includes a support member formation step, a support member degreased body preparation step, a support member firing step, and a joining step.

[0068] In the ceramic molded body formation process, multiple ceramic molded bodies are formed from ceramic raw material powder to which sintering aids are added as needed. For example, AlN ceramic raw material powder can be mixed with appropriate additives such as Y2O3, binders, plasticizers, and dispersants as sintering aids to prepare a slurry. After granulation of the granules (ceramic raw material powder) by a spray-drying method or the like, one or more ceramic molded bodies can be formed by pressure molding.

[0069] The ceramic raw material powder is preferably of high purity, preferably 96% or higher, and more preferably 98% or higher. Furthermore, the average particle size of the ceramic raw material powder is preferably between 0.1 μm and 1.0 μm.

[0070] The mixing method may be either wet or dry, and mixers such as ball mills and vibratory mills can be used. As for the molding method, known methods such as uniaxial pressure molding or cold isostatic pressing (CIP) can be used. It should be noted that the method for forming the ceramic molded body is not limited to pressure molding; for example, green sheet lamination or casting can also be applied, and the ceramic molded body can be manufactured by appropriately degreasing or further calcining the materials.

[0071] Multiple ceramic molded bodies may be shaped by machining after molding. Additionally, a groove shaped to match the shape of the heating resistor may be formed on one side of the ceramic molded body (the bonding surface with other ceramic molded bodies). Machining may be performed after degreasing.

[0072] In the process of producing degreased ceramic bodies, multiple ceramic molded bodies are degreased at a predetermined temperature and for a predetermined time to produce multiple degreased ceramic bodies. The ceramic molded bodies are heat-treated at a temperature of, for example, 500°C to 900°C to become degreased ceramic bodies. The degreasing time is preferably between 1 hour and 120 hours. An atmospheric furnace or a nitrogen atmosphere furnace can be used for degreasing, but an atmospheric furnace is preferred because it is important to remove the organic components of the binder.

[0073] In the laminate formation process, a heat-generating resistor is prepared, and the heat-generating resistor and multiple degreased ceramic bodies are combined to form a laminate that is flat in shape and has the heat-generating resistor embedded in it.

[0074] Furthermore, the heat-generating resistor is prepared in a shape that matches the design of the substrate holding member 100. The heat-generating resistor can be in various shapes, such as mesh or foil. The material can also be various, such as molybdenum or tungsten.

[0075] In the firing process, the formed laminate is fired by uniaxial pressure firing perpendicular to the main surface to fire the substrate holding member precursor. The pressure applied, firing temperature, and firing time vary depending on the type of ceramic raw material powder used, but for example, when using ceramic raw material powder mainly composed of AlN, the pressure applied is preferably 1 MPa or more. The firing temperature is preferably 1700°C to 2000°C. The firing time is preferably 1 hour to 12 hours, and more preferably 1 hour to 5 hours. The firing atmosphere is, for example, a nitrogen or inert gas atmosphere, but it may also be an atmosphere such as a vacuum. As a result, the degreased ceramic body is sintered to become a ceramic sintered body, and these are integrated.

[0076] After firing, the surface and back surfaces may be processed, and the material may also be ground or polished to a predetermined shape. The surface roughness is preferably Ra 0.1 μm to 1.6 μm. If necessary, ventilation holes may be formed. These can be formed by general grinding, blasting, milling, laser processing, etc. This allows for the preparation of a substrate holding member precursor with a heat-generating resistor embedded inside.

[0077] Furthermore, a ceramic calcined body manufacturing step may be included between the ceramic degreased body manufacturing step and the laminate formation step. For example, when using ceramic raw material powder mainly composed of AlN, the ceramic calcined body manufacturing step involves calcining the ceramic degreased body at a temperature of 1200°C to 1700°C to produce the ceramic calcined body. This allows for higher dimensional accuracy of the substrate holding member. The calcination time is preferably 0.5 hours to 12 hours. The calcination atmosphere is preferably a nitrogen or inert gas atmosphere, but an atmosphere such as a vacuum may also be used. If a calcined body manufacturing step is included, machining may be performed after the calcined body manufacturing step.

[0078] In the support member formation process, a support member molded body is formed from ceramic raw material powder. The ceramic raw material powder used is preferably the same as the ceramic raw material powder described above, but the amount of sintering aid added may differ. The method for preparing the ceramic raw material powder and the method for forming the support member molded body may be the same as in the ceramic molded body formation process.

[0079] In the process of manufacturing a degreased support member, the molded support member is degreased at a predetermined temperature and for a predetermined time to produce the degreased support member. The numerical range of the degreasing conditions for the molded support member may be the same as in the process of manufacturing a degreased ceramic body. The process of manufacturing a degreased support member may be performed simultaneously with the process of manufacturing a degreased ceramic body.

[0080] In the support member firing process, the degreased support member is fired to create the support member that supports the substrate holding member. The firing of the support member is preferably performed under atmospheric pressure. The firing temperature is preferably between 1800°C and 2000°C. The firing time is preferably between 1 hour and 12 hours. The firing atmosphere is, for example, a nitrogen or inert gas atmosphere, but may also be an atmosphere such as a vacuum.

[0081] In the bonding process, the substrate holding member precursor and the support member are bonded together. The bonding can be performed using either a bonding material or a bonding method without a bonding material.

[0082] (Thermal spraying process) In the thermal spraying process step S2, a slurry spray film is formed on the substrate mounting surface of the substrate holding member precursor by using a material with lower thermal conductivity than the ceramic sintered body. Slurry spraying is a thermal spraying method as described below.

[0083] The slurry is prepared by mixing the thermal spray coating raw material powder and water. The average particle size D50 of the thermal spray coating raw material powder is preferably between 0.5 μm and 6 μm. If D50 is less than 0.5 μm, the viscosity of the slurry increases, making thermal spraying difficult and degrading the film quality. If it is greater than 6 μm, the slurry cannot be transported stably, also degrading the film quality. The average particle size D50 can be measured using dry or wet measurement with a laser diffraction / scattering particle size distribution analyzer. The particle size distribution of the thermal spray coating raw material powder is preferably sharp.

[0084] Various materials can be used as raw material powders for thermal spray coatings. Preferably, the raw material powders used for thermal spray coatings are alumina (Al2O3), yttria (Y2O3), zirconia (ZrO2), or quartz glass powder, or any mixture thereof. When these materials are thermal sprayed onto a substrate formed from a ceramic sintered body, adhesion to the substrate can be a problem. The slurry thermal spraying method allows for the formation of a thermal spray coating while reducing the risk of strength reduction or substrate breakage, even when the substrate is formed from a ceramic sintered body.

[0085] Furthermore, the slurry concentration is preferably between 10 wt% and 40 wt%, and more preferably between 20 wt% and 40 wt%. If the slurry concentration is less than 10 wt%, the construction takes a long time and productivity is reduced, making it unsuitable for industrial use. If it is greater than 40 wt%, the viscosity becomes too high, making it impossible to transport the slurry stably.

[0086] The prepared slurry is then plasma-sprayed onto the surface of the substrate to be sprayed. The gas used for spraying is preferably a non-oxidizing gas. Examples of non-oxidizing gases include Ar gas, H2 gas, N2 gas, or any combination thereof. The slurry is supplied to a nozzle via a tube pump and plasma-sprayed using the gas.

[0087] Prior to the plasma spraying process, a step may be included in which the surface to be sprayed of the substrate is irradiated with plasma using only gas, without introducing slurry. By including such a step, the surface to be sprayed of the substrate is preheated, making it easier for the molten spray film raw material powder to penetrate into voids during plasma spraying.

[0088] As a result, a thermal spray film derived from the slurry is formed to cover the thermal spray surface of the substrate. The thickness of the thermal spray film is preferably adjusted to 5 μm or more and 1000 μm or less. This is because if the thickness of the thermal spray film is less than 5 μm, there is an increased risk of a decrease in the plasma resistance, abrasion resistance, heat insulation, and other functions of the thermal spray film. Also, if the thickness of the thermal spray film exceeds 1000 μm, the internal stress of the thermal spray film increases, increasing the risk of a decrease in adhesion or delamination. The porosity of the thermal spray film is preferably adjusted to 2% or less.

[0089] (Pin-shaped protrusion formation process) Step S3 of the pin-shaped protrusion formation process involves processing the thermal spray film to form pin-shaped protrusions, at least on the upper end surface that contacts the substrate, which is formed from the thermal spray film. The pin-shaped protrusions can be formed by blasting, milling, laser processing, etc., of the thermal spray film. The diameter of the upper end surface of the pin-shaped protrusions should be 2 mm or less. At this time, by carving shallower than the thickness of the thermal spray film, a configuration can be achieved in which the upper surface of the substrate is covered with the thermal spray film. If an annular protrusion is to be formed, it is preferable to do so at this stage.

[0090] When the substrate mounting surface of a base body, which is composed of the upper end faces of multiple pin-shaped protrusions, is cut by a cross-section passing through the Z-axis with the base body's central axis as the Z-axis, the resulting cross-sectional curve is such that, when the intersection line between a predetermined reference plane and the cross-section is the X-axis, the maximum value of Z is taken near the central axis and the minimum value of Z is taken near the outer circumference of the base body, or the minimum value of Z is taken near the central axis and the maximum value of Z is taken near the outer circumference of the base body, then the thermal spray coating before forming the pin-shaped protrusions may be polished to become a curved surface of the above shape, and then the pin-shaped protrusions may be formed, or the upper end faces of the pin-shaped protrusions may be polished after the pin-shaped protrusions have been formed so that the substrate mounting surface becomes a curved surface of the above shape. When forming a second pin-shaped protrusion, it is preferable to grind or otherwise grind the pin-shaped protrusions of the ring-shaped region that will become the second pin-shaped protrusion after forming the pin-shaped protrusions and the substrate mounting surface.

[0091] Next, terminal holes are provided in the substrate holding member. The terminal holes may be drilled before the thermal spraying step S2, or between the thermal spraying step S2 and the pin-shaped protrusion formation step S3. Also, if joining to a support member, this may be done before or after joining to the support member. Then, the terminals are connected to the terminal holes with brazing material or the like. Ni can be used for the terminals. Au brazing material can be used. If ventilation holes are to be formed, it is preferable to do so at this stage.

[0092] In this way, by reducing the diameter of the pin-shaped protrusions, it is possible to suppress the generation of hot spots caused by the concentration of heat flow and to manufacture a substrate holding member according to the embodiment of the present invention that enables uniform heating of the substrate.

[0093] [Method for manufacturing a substrate holding member 2] Next, different manufacturing methods for the substrate holding member according to this embodiment will be described. Figure 18 is a flowchart showing a manufacturing method for the substrate holding member according to an embodiment of the present invention. The manufacturing method for the substrate holding member according to an embodiment of the present invention includes a preparation step T1, a thermal spray film removal step T2, a thermal spraying step T3, and a pin-shaped protrusion formation step T4.

[0094] (preparation process) Preparation step T1 prepares a substrate holding member precursor comprising a substrate formed from a ceramic sintered body, a heat-generating resistor embedded in the substrate, and a plurality of pin-shaped protrusions formed projecting upward from the upper surface of the substrate, wherein at least the upper end surface of the pin-shaped protrusions that contacts the substrate is formed of a first thermal spray film. In other words, the substrate holding member precursor prepared by this manufacturing method may be a substrate holding member according to an embodiment of the present invention. This manufacturing method may also be described as a manufacturing method for repairing and reusing a substrate holding member.

[0095] (Thermal spray coating removal process) Step T2, the thermal spray coating removal step, removes at least a portion of the first thermal spray coating. "At least a portion" means the amount necessary to ensure a uniform thermal spray coating is applied in the subsequent thermal spraying step T3. Therefore, if it is determined that the performance of the substrate holding member formed by the pin-shaped protrusions in step T4 will not be affected, not only the thermal spray coating but also a portion of the ceramic sintered body forming the substrate may be removed. The thermal spray coating can be removed by grinding or polishing. The surface after at least a portion of the thermal spray coating has been removed is preferably a flat surface or a curved surface of a predetermined shape.

[0096] (Thermal spraying process) In the thermal spraying process step T3, a second thermal spray film is formed on the substrate mounting surface of the substrate holding member precursor, from which at least a portion of the first thermal spray film has been removed, by slurry spraying using a material with lower thermal conductivity than the ceramic sintered body. The material of the second thermal spray film may be the same as or different from the material of the first thermal spray film. Also, even if the first thermal spray film remains, the second thermal spray film is sprayed on top of it, so the thermal conductivity of the first thermal spray film can be anything. The details of slurry spraying are the same as described above, so the explanation is omitted.

[0097] (Pin-shaped protrusion formation process) Step T4, the pin-shaped projection formation process, involves processing the second thermal spray film to form a pin-shaped projection in which at least the upper end surface that contacts the substrate is formed of the second thermal spray film. The details of pin-shaped projection formation are the same as described above, so the explanation is omitted.

[0098] In this way, by reducing the diameter of the pin-shaped protrusions, it is possible to suppress the generation of hot spots caused by the concentration of heat flow and to manufacture or repair a substrate holding member according to an embodiment of the present invention that enables uniform heating of the substrate.

[0099] [Examples and Comparative Examples] (Example 1) (Preparation process for substrate holding member precursor) Example 1 is a substrate holder with a shaft. The base and support members were formed from a sintered body mainly composed of AlN. A base and support member were prepared that were roughly disc-shaped with a diameter of φ320 mm and a thickness of t20 mm, with a heat-generating resistor embedded in them. After joining the gas and the support member, the surface to be thermally sprayed was ground with a surface grinder to achieve a surface roughness of Ra0.4 μm.

[0100] (Thermal spraying process) Next, a non-oxidizing gas plasma was irradiated or sprayed onto the surface of the substrate to be sprayed using a high-velocity plasma sprayer to preheat the surface. A mixture of Ar gas, N2 gas, and H2 gas was used as the non-oxidizing gas. The supply of Ar gas to the nozzles constituting the sprayer was controlled to 100 l / min, the supply of N2 gas was controlled to 70 l / min, and the supply of H2 gas was controlled to 70 l / min.

[0101] By controlling the current applied to the nozzle constituting the high-speed plasma sprayer to 250A, the power supplied to the nozzle was adjusted to 65kW. The distance between the nozzle tip and the substrate surface to be sprayed was adjusted to 75mm. The scanning speed or displacement speed of the nozzle relative to the substrate was adjusted to 850mm / s. As a result, a plasma of a mixed gas of Ar, N2, and H2 was generated, and this plasma was irradiated or ejected from the nozzle tip onto the substrate surface to be sprayed. Preheating of the surface to be sprayed by plasma irradiation or ejection was performed for 3 minutes.

[0102] Then, using the same high-speed plasma spraying machine, an Al2O3 slurry was plasma sprayed onto the surface of the substrate to be sprayed using a non-oxidizing gas. The Al2O3 slurry was prepared by mixing 300g of Al2O3 raw material powder with an average particle size D50 of 0.5 μm and a purity of 99.9% or higher with 700g of water. A mixture of Ar gas, N2 gas, and H2 gas was used as the non-oxidizing gas. The supply rate of Ar gas to the nozzles constituting the spraying machine was controlled to 100 l / min, the supply rate of N2 gas was controlled to 70 l / min, and the supply rate of H2 gas was controlled to 70 l / min. As a result, the spraying speed was controlled to 600-700 mm / s.

[0103] By controlling the current applied to the nozzle constituting the high-speed plasma sprayer to 250A, the power supplied to the nozzle was adjusted to 65kW. The distance between the nozzle tip and the substrate surface to be sprayed was adjusted to 75mm. The scanning speed or displacement speed of the nozzle relative to the substrate was adjusted to 850mm / s. As a result, a plasma of a mixed gas of Ar, N2, and H2 was generated, and the raw material powder melted by this plasma was sprayed from the nozzle tip onto the substrate surface to be sprayed. As a result, the substrate surface to be sprayed, which was formed of an AlN ceramic sintered body, was coated with an Al2O3 spray film. The thickness of the spray film was set to 0.05mm.

[0104] (Pin-shaped protrusion formation process) By blasting the thermal spray coating, an annular protrusion and multiple pin-shaped protrusions were formed. The annular protrusion had an inner diameter at a position of φ296 mm from the center of the substrate, and was formed to have a width of 1.0 mm and a height of 50 μm. The multiple pin-shaped protrusions were formed concentrically in a region within φ294 mm from the center of the substrate, with a diameter of φ1.0 mm and a height of 50 μm from the reference plane. The ratio of the total area of ​​the upper end faces of the multiple pin-shaped protrusions to the area of ​​the substrate mounting surface when viewed from above was 4.8%. The shape of the pin-shaped protrusions was such that only the pin-shaped protrusions were formed by the thermal spray coating, as shown in Figure 5. The substrate mounting surface was flat. In this way, the substrate holding member of Example 1 was manufactured.

[0105] (Example 2) The substrate holding member of Example 2 was manufactured under the same conditions as the substrate holding member of Example 1, except that the thickness of the thermal spray coating was 0.5 mm. By making the thermal spray coating thicker than the height of the pin-shaped protrusions, the shape of the pin-shaped protrusions changed as shown in Figure 6, so that not only were the pin-shaped protrusions formed by the thermal spray coating, but the upper surface of the substrate was also formed by the thermal spray coating. The ratio of the total area of ​​the upper end faces of the multiple pin-shaped protrusions to the area of ​​the substrate mounting surface when viewed from above was 4.8%.

[0106] (Example 3) The substrate holding member of Example 3 was manufactured using a Y2O3 thermal spray coating with a film thickness of 0.2 mm, with an annular protrusion width of 2.0 mm and a height of 0.1 mm, and a pin-shaped protrusion diameter of 1.5 mm and a height of 0.1 mm. All other specifications were the same as those for the substrate holding member of Example 1. The pin-shaped protrusions were shaped as shown in Figure 6. The ratio of the total area of ​​the upper end faces of the multiple pin-shaped protrusions to the area of ​​the substrate mounting surface viewed from above was 5.8%.

[0107] (Example 4) The substrate holding member of Example 4 was manufactured by machining a thermal spray coating with a thickness of 1 mm, so that the thermal spray coating would be a smooth concave surface with a flatness of 50 μm. The height of the annular protrusion was 0.2 mm, the diameter of the pin-shaped protrusion was 2.0 mm, and the radial spacing (pitch) of the pins was 8 mm. Otherwise, it was manufactured under the same conditions as the substrate holding member of Example 1. The shape of the pin-shaped protrusion was as shown in Figure 6. In other words, the substrate holding member of Example 4 is manufactured so that the cross-sectional curve obtained by cutting the substrate mounting surface of the base body with a cross-section passing through the Z-axis, with the base body's central axis as the Z-axis, takes its minimum value of Z near the central axis and increases monotonically toward the outer circumference of the base body, when the intersection line of the cross-section and a predetermined reference plane is taken as the X-axis. The ratio of the total area of ​​the upper end faces of the multiple pin-shaped protrusions to the area of ​​the substrate mounting surface when viewed from above was 8.2%. The deviation ΔZ at this time was 0.25 μm.

[0108] (Example 5) The substrate holding member of Example 5 was manufactured by machining a thermal spray coating with a thickness of 1 mm, so that the thermal spray coating would be a smooth convex surface with a flatness of 50 μm. The height of the annular protrusion was set to 0.2 mm, the diameter of the pin-shaped protrusion was φ2.0 mm, and the radial spacing (pitch) of the pins was set to 8 mm. Subsequently, the pin-shaped protrusions in the ring-shaped region of φ100 mm to 125 mm were ground down to a maximum of approximately 20 μm to reduce contact with the substrate or to create a second pin-shaped protrusion that does not contact the substrate. Otherwise, it was manufactured under the same conditions as the substrate holding member of Example 1. The shape of the pin-shaped protrusion was as shown in Figure 6. In other words, the substrate holding member of Example 5 is a substrate holding member manufactured such that the cross-sectional curve obtained by cutting the substrate mounting surface of the base body with the base body's central axis as the Z-axis, when the intersection line of the cross-section and a predetermined reference plane is taken as the X-axis, takes the minimum value of Z near the central axis and increases monotonically toward the outer circumference of the base body. The ratio of the total area of ​​the upper end faces of the multiple pin-shaped protrusions to the area of ​​the substrate mounting surface when viewed from above was 8.2%.

[0109] (Example 6) The substrate holding member of Example 6 was manufactured by machining a thermal spray coating of Y2O3 with a film thickness of 0.4 mm, so that the thermal spray coating would be a smooth convex surface with a flatness of 50 μm. The width of the annular protrusion was 1.0 mm and the height was 0.1 mm, the diameter φ of the pin-shaped protrusion was 1.0 mm and the height was 0.1 mm, and the radial spacing (pitch) of the pins was 5 mm. Otherwise, it was manufactured under the same conditions as the substrate holding member of Example 1. The shape of the pin-shaped protrusion was as shown in Figure 6. In other words, the substrate holding member of Example 6 is manufactured such that the cross-sectional curve obtained by cutting the substrate mounting surface of the substrate with the Z axis passing through the Z axis, with the Z axis being the central axis of the substrate, takes its maximum value of Z near the central axis and decreases monotonically toward the outer circumference of the substrate, when the intersection line of the cross-section and a predetermined reference plane is taken as the X axis. The ratio of the total area of ​​the upper end faces of the multiple pin-shaped protrusions to the area of ​​the substrate mounting surface when viewed from above was 4.8%. The deviation ΔZ at this time was 0.16 μm.

[0110] (Comparative Example 1) The substrate holding member of Comparative Example 1 had annular and pin-shaped protrusions formed without a thermal spray coating. Otherwise, it was manufactured under the same conditions as the substrate holding member of Example 1.

[0111] (Measurement of temperature distribution) The substrate holding members of Examples 1 to 6 and Comparative Example 1 were installed in a process chamber. A temperature evaluation substrate (silicon wafer) with a diameter of φ300 mm and a thickness of 0.775 mm was placed on the substrate mounting surface, and the temperature of the central part of the substrate was set to a predetermined temperature by applying a voltage to the heating resistor, thereby controlling the temperature. At this time, the overall temperature distribution of the substrate was measured using an infrared camera. The value of the temperature distribution was obtained by subtracting the minimum value from the maximum value of the overall temperature of the substrate.

[0112] (Checking for hotspots) Hot spots were identified visually using infrared camera images, and evaluated based on whether or not a hot spot appeared at the location corresponding to the protrusion. A hot spot was defined as having a temperature difference of 1.0°C or more from its surroundings.

[0113] (Confirmation of changes over time) The substrate holding members of Examples 1 to 6 and Comparative Example 1 were used in a process chamber for two years, and the condition of the substrate mounting surface was checked. Examples 1 to 6 showed no particular changes over time and were in good condition, but Comparative Example 1 showed an increase in Ra on the substrate mounting surface.

[0114] (Measurement of porosity of thermal spray coating) The cross-section of the thermal spray film, prepared under the same conditions as in Example 1, was examined using a 1000x magnification SEM image. The SEM image was binarized using image processing software, and the porosity was calculated to be 1.2%. The porosity of the thermal spray film can be changed to some extent by altering the slurry spraying conditions, but it was confirmed that it can be controlled to 2% or less using the slurry spraying method described above.

[0115] (evaluation) Figure 19 is a table showing the conditions and measurement results for the examples and comparative examples. In Examples 1 to 6, the temperature distribution was kept below 4.4°C. In contrast, Comparative Example 1 had a larger temperature distribution of 5.6°C. Also, no hot spots were observed in Examples 1 to 6, but two hot spots were observed in Comparative Example 1. Furthermore, no changes over time were observed in Examples 1 to 6, but the Ra value on the upper end surface of the pin-shaped protrusion increased in Comparative Example 1. This is thought to be due to a reaction with moisture in the ambient air. The Ra value on the upper end surface of the pin-shaped protrusion was measured for a representative pin-shaped protrusion using a non-contact one-shot 3D shape measuring machine (VR-3000, manufactured by Keyence Corporation).

[0116] Based on the above, it has been confirmed that the substrate holding member of the present invention can achieve both particle suppression and hot spot suppression.

[0117] The present invention is not limited to the embodiments described above, and it goes without saying that it extends to various modifications and equivalents that fall within the spirit and scope of the present invention. Furthermore, the structure, shape, number, position, size, etc., of the components shown in each drawing are for illustrative purposes only and may be modified as appropriate. [Explanation of symbols]

[0118] 10 Base 12 Top side 14 Bottom side 16 Center of the substrate 18 Outer circumference 20 Heat-generating resistor 30 Pin-shaped protrusions 32 Upper end surface of pin-shaped protrusion 34 Substrate mounting surface 36 Second pin-shaped protrusion 38 Upper end surface of the second pin-shaped projection 40 Thermal spray coating 50 terminals 52 terminal holes 60 Support member 70 Ring-shaped region 100, 200, 300 Substrate holding member W board

Claims

1. A substrate holding member, A substrate containing a ceramic sintered body, A heat-generating resistor embedded in the substrate, The base comprises a plurality of pin-shaped protrusions formed to project upward from the upper surface of the base, The pin-shaped protrusions are formed with a thermal spray coating of Al₂O₃, Y₂O₃, ZrO₂, or quartz glass, at least on the upper end surface that contacts the substrate, which is a material with lower thermal conductivity than the ceramic sintered body. The pin-shaped projection has a diameter of 2 mm or less at its upper end surface. A substrate holding member characterized in that the upper surface of the substrate is formed of the ceramic sintered body.

2. The substrate holding member according to claim 1, characterized in that the ratio of the total area of ​​the upper end faces of the plurality of pin-shaped protrusions that come into contact with the substrate to the area of ​​the substrate mounting surface of the base when viewed from above is 10% or less.

3. The substrate holding member according to claim 1 or 2, characterized in that the porosity of the thermal spray film is 2% or less.

4. The substrate holding member according to any one of claims 1 to 3, characterized in that the cross-sectional curve obtained by cutting the substrate mounting surface of the substrate with a cross-section passing through the Z-axis with the central axis of the substrate as the Z-axis is a curve that takes the maximum value of Z near the central axis and the minimum value of Z near the outer circumference of the substrate, or a curve that takes the minimum value of Z near the central axis and the maximum value of Z near the outer circumference of the substrate, when the intersection line of a predetermined reference plane and the cross-section is the X-axis,

5. A substrate holding member, A substrate containing a ceramic sintered body, A heat-generating resistor embedded in the substrate, The base comprises a plurality of pin-shaped protrusions formed to project upward from the upper surface of the base, The pin-shaped protrusion is formed with a thermal spray coating of a material having a lower thermal conductivity than the ceramic sintered body, at least on its upper end surface that contacts the substrate. The pin-shaped projection has a diameter of 2 mm or less at its upper end surface. The substrate holding member is characterized in that the plurality of pin-shaped protrusions include a second pin-shaped protrusion having an upper end surface located closer to the upper surface than the substrate mounting surface of the base and not constituting the substrate mounting surface, and the second pin-shaped protrusion is formed in a ring-shaped region surrounded by concentric circles centered on the center of the base.

6. The aforementioned ceramic sintered body mainly consists of AlN, The material of the thermal spray coating is Al ２ O ３ , Y ２ O ３ , ZrO ２ The substrate holding member according to claim 5, characterized in that it is either , or quartz glass.

7. A method for manufacturing a substrate holding member according to any one of claims 1 to 6, A preparation step for preparing a substrate holding member precursor comprising a substrate formed from a ceramic sintered body and a heat-generating resistor embedded in the substrate, A thermal spraying step is performed on the substrate mounting surface side of the substrate holding member precursor by slurry spraying using one of the following materials having a lower thermal conductivity than the ceramic sintered body: Al₂O₃, Y₂O₃, ZrO₂, or quartz glass, to form a thermal sprayed film. The process includes a step of forming a pin-shaped protrusion by processing the thermal spray film to form a pin-shaped protrusion in which at least the upper end surface that contacts the substrate is formed of the thermal spray film, A method for manufacturing a substrate holding member, characterized in that, in the pin-shaped protrusion formation step, the thermal spray film is processed so that the ceramic sintered body is exposed on the upper surface of the substrate.

8. A method for manufacturing a substrate holding member according to any one of claims 1 to 6, The substrate holding member precursor comprises a base body formed from a ceramic sintered body, a heat-generating resistor embedded in the base body, and a plurality of pin-shaped protrusions formed projecting upward from the upper surface of the base body, wherein the pin-shaped protrusions are formed in a preparation step in which at least the upper end surface that contacts the substrate is formed of the thermal spray film, A thermal spray coating removal step, which removes at least a portion of the thermal spray coating, A thermal spraying step in which slurry spraying is performed on the substrate mounting surface side of the substrate holding member precursor from which at least a portion of the thermal spray film has been removed, using one of the materials Al₂O₃, Y₂O₃, ZrO₂, or quartz glass, which has a lower thermal conductivity than the ceramic sintered body, to form another thermal spray film, The process includes a step of forming a pin-shaped projection by processing the aforementioned other thermal spray film to form a pin-shaped projection in which at least the upper end surface that contacts the substrate is formed of the aforementioned other thermal spray film, A method for manufacturing a substrate holding member, characterized in that, in the pin-shaped protrusion formation step, the thermal spray film is processed so that the ceramic sintered body is exposed on the upper surface of the substrate.

Images