Substrate processing apparatus and position adjustment method

Abstract

To adjust a position, so as to irradiate the desired position of a substrate with laser light.SOLUTION: A substrate processing device for processing the substrate includes a substrate holding part which holds the substrate, a laser irradiation part which irradiates the substrate held by the substrate holding part with the laser light, a camera which images the substrate, a rotation mechanism which rotates the substrate holding part, a movement mechanism which moves the substrate holding part and the laser irradiation part relatively and horizontally, and a control part. The control part executes control for irradiating the substrate with the laser light, to form an annular processing part on the substrate, control for imaging the processing part by the camera, control for calculating the processing center of the imaged processing part, and control for moving the substrate holding part and the laser irradiation part relatively and horizontally to a position where the processing center aligns with the rotation center of the substrate holding part at least in the movement direction of the movement mechanism.SELECTED DRAWING: Figure 9

Description

Technical Field

[0001] The present disclosure relates to a substrate processing apparatus and a position adjustment method.

Background Art

[0002] Patent Document 1 discloses transferring a semiconductor element to a transfer destination substrate in a semiconductor substrate on which a peeling oxide film and a semiconductor element are formed on the surface. The method described in Patent Document 1 includes a step of irradiating light from the back surface of the semiconductor substrate to locally heat the peeling oxide film, and a step of causing peeling in the peeling oxide film and / or at the interface between the peeling oxide film and the semiconductor substrate to transfer the semiconductor element to the transfer destination substrate.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The technology according to the present disclosure performs position adjustment so that laser light is irradiated at a desired position on the substrate.

Means for Solving the Problems

[0005] One aspect of the present disclosure is a substrate processing apparatus for processing a substrate, including a substrate holding unit for holding the substrate, a laser irradiation unit for irradiating the substrate held by the substrate holding unit with laser light, a camera for imaging the substrate, a rotation mechanism for rotating the substrate holding unit, a movement mechanism for relatively moving the substrate holding unit and the laser irradiation unit in a horizontal direction, and a control unit. The control unit Control to scan the laser beam in the central region of the substrate while the rotation of the substrate is stopped, thereby irradiating the substrate with the laser beam in an annular pattern and forming an annular central processing portion; control to image the central processing portion with the camera; control to calculate the central processing center of the imaged central processing portion; and control to move the substrate holder and the laser irradiation unit in a relative horizontal direction so that the central processing center and the rotation center of the substrate holder coincide, at least in the direction of movement of the moving mechanism. executes.

Effects of the Invention

[0006] According to this disclosure, the position can be adjusted so that laser light is irradiated to a desired location on the substrate. [Brief explanation of the drawing]

[0007] [Figure 1] This is a side view illustrating the schematic configuration of a polymerized wafer processed in a wafer processing system. [Figure 2] This is a schematic plan view illustrating the general configuration of the wafer processing system. [Figure 3] This is a side view showing a schematic configuration of the laser irradiation device. [Figure 4] This is a plan view showing the schematic configuration of the laser irradiation device. [Figure 5] This is an explanatory diagram showing how the separation device works. [Figure 6] This is an explanatory diagram showing how laser light is irradiated onto a laser absorption layer. [Figure 7] This is an explanatory diagram showing how laser light is irradiated onto a laser absorption layer. [Figure 8] This is an explanatory diagram showing how a processed area is formed on the laser absorption layer. [Figure 9] This is an explanatory diagram showing the first adjustment of the machining center and the chuck rotation center. [Figure 10] This is an explanatory diagram showing the process of performing the second adjustment between the machining center and the chuck rotation center. [Figure 11] This is an explanatory diagram showing the process of performing the second adjustment between the machining center and the chuck rotation center. [Figure 12] This is an explanatory diagram showing the process of performing the second adjustment between the machining center and the chuck rotation center. [Modes for carrying out the invention]

[0008] In the semiconductor device manufacturing process, a device layer formed on the surface of a second wafer is transferred to a first wafer in a polymerized wafer, which is made by bonding two semiconductor substrates (hereinafter referred to as "wafers"). This device layer transfer is performed, for example, using laser lift-off. That is, by irradiating the inside of the polymerized wafer, which is held in a chuck, with laser light from a laser irradiation unit, the bonding strength between the first and second wafers is reduced, and then the device layer is transferred to the first wafer by peeling the second wafer away from the first wafer.

[0009] In laser lift-off, the polymerized wafer is rotated, and the laser beam is pulsed while moving radially from the outside to the inside. In order to uniformly separate the first and second wafers across the wafer surface, it is preferable to keep the interval between laser beam irradiations, i.e., the pulse interval, constant. However, if the pulse interval is kept constant, the rotation speed of the polymerized wafer increases as the laser beam moves radially from the outside to the inside. When the rotation speed of the polymerized wafer reaches its upper limit, the irradiation interval of the laser beam decreases as the irradiation position of the laser beam moves radially inward, and the laser beams may overlap in the central region. Furthermore, if the rotation speed of the polymerized wafer increases in the central region, there is a risk that the first wafer will separate. Therefore, the polymerized wafer is rotated while the laser beam is irradiated in the outer peripheral region, and the rotation of the polymerized wafer is stopped while the laser beam is scanned in the central region.

[0010] Here, for example, if the processing center of the polymerized wafer (center of the processing position) and the chuck rotation center are misaligned, the laser beam may not be irradiated to the appropriate position in the outer peripheral region, and there is a risk that the laser beam may be irradiated to areas where the polymerized wafer does not exist. Also, if the processing center and the chuck rotation center are misaligned, the scanning may not reach the central region, and an unprocessed area may be created at the boundary between the outer peripheral region and the central region.

[0011] The technology described herein involves positioning a substrate so that laser light is irradiated to a desired location on the substrate. Hereinafter, a wafer processing system equipped with a laser irradiation device as a substrate processing apparatus according to this embodiment, and a wafer processing method as a substrate processing method, will be described with reference to the drawings. In this specification and the drawings, elements having substantially the same functional configuration are denoted by the same reference numerals, thus omitting redundant explanations.

[0012] In the wafer processing system 1 described later according to this embodiment, processing is performed on a polymerized wafer T, which is a substrate formed by joining a first wafer W1 and a second wafer W2, as shown in Figure 1. Hereinafter, in the first wafer W1, the side that is joined to the second wafer W2 is referred to as the front surface W1a, and the side opposite to the front surface W1a is referred to as the back surface W1b. Similarly, in the second wafer W2, the side that is joined to the first wafer W1 is referred to as the front surface W2a, and the side opposite to the front surface W2a is referred to as the back surface W2b.

[0013] The first wafer W1 is a semiconductor wafer, such as a silicon substrate. In one embodiment, the first wafer W1 has a substantially disc shape. A device layer D1 and a surface film F1 are laminated on the surface W1a of the first wafer W1 in this order from the surface W1a side. The device layer D1 contains a plurality of devices. Examples of the surface film F1 include an oxide film (THOX film, SiO2 film, TEOS film), a SiC film, a SiCN film, or an adhesive.

[0014] The second wafer W2 is a semiconductor wafer such as a silicon substrate. In one embodiment, the second wafer W2 has a substantially disk shape. On the surface W2a of the second wafer W2, a laser absorption layer P, a device layer D2, and a surface film F2 are laminated in this order from the surface W2a side. The laser absorption layer P absorbs the laser light irradiated from the laser irradiation unit 110 as described later. For the laser absorption layer P, for example, an oxide film (SiO2 film) is used, but it is not particularly limited as long as it can absorb laser light. The device layer D2 and the surface film F2 are the same as the device layer D1 and the surface film F1 of the first wafer W1, respectively. Then, the surface film F1 of the first wafer W1 and the surface film F2 of the second wafer W2 are joined. Note that the position of the laser absorption layer P is not limited to the above embodiment, and may be formed, for example, between the device layer D2 and the surface film F2.

[0015] As shown in FIG. 2, the wafer processing system 1 has a configuration in which a loading / unloading block 10, a transfer block 20, and a processing block 30 are integrally connected. The loading / unloading block 10 and the processing block 30 are provided around the transfer block 20. Specifically, the loading / unloading block 10 is disposed on the negative Y-axis side of the transfer block 20. A laser irradiation device 31 and a separation device 32, which will be described later, of the processing block 30 are disposed on the negative X-axis side of the transfer block 20, and a first cleaning device 33 and a second cleaning device 34, which will be described later, are disposed on the positive X-axis side of the transfer block 20.

[0016] The loading / unloading block 10 receives cassettes Ct, Cw1, and Cw2 that can accommodate a plurality of polymerized wafers T, a plurality of first wafers W1, and a plurality of second wafers W2, respectively, from the outside. The loading / unloading block 10 is provided with a cassette mounting table 11. In the illustrated example, the cassette mounting table 11 can mount a plurality of, for example, three cassettes Ct, Cw1, and Cw2 in a row in the X-axis direction. Note that the number of cassettes Ct, Cw1, and Cw2 mounted on the cassette mounting table 11 is not limited to this embodiment and can be arbitrarily determined.

[0017] The transport block 20 is provided with a wafer transport device 22 configured to move along a transport path 21 extending in the X-axis direction. The wafer transport device 22 has, for example, two transport arms 23, 23 that hold and transport the polymerized wafer T, the first wafer W1, or the second wafer W2. Each transport arm 23 is configured to move horizontally, vertically, around the horizontal axis, and around the vertical axis. Note that the configuration of the transport arms 23 is not limited to this embodiment and can be any configuration. The wafer transport device 22 is configured to transport the polymerized wafer T, the first wafer W1, and the second wafer W2 to the cassettes Ct, Cw1, Cw2 of the cassette mounting table 11, the laser irradiation device 31, the separation device 32, the first cleaning device 33, and the second cleaning device 34.

[0018] The processing block 30 includes a laser irradiation device 31, a separation device 32, a first cleaning device 33, and a second cleaning device 34. In one example, the laser irradiation device 31 and the separation device 32 are stacked on the negative X-axis side of the transport block 20. The first cleaning device 33 and the second cleaning device 34 are stacked on the positive X-axis side of the transport block 20. The number and arrangement of the laser irradiation device 31, the separation device 32, the first cleaning device 33, and the second cleaning device 34 are not limited to these examples.

[0019] The laser irradiation device 31 irradiates the inside of the polymerized wafer T, more specifically the laser absorption layer P of the second wafer W2, with laser light to reduce the bonding strength at the interface between the second wafer W2 and the laser absorption layer P. This interface within the polymerized wafer T where the bonding strength has been reduced (in this embodiment, the interface between the second wafer W2 and the laser absorption layer P) may be referred to as the "separation surface" in the technology of this disclosure. The laser irradiation device 31 functions as a wafer processing device for laser processing the polymerized wafer T, as well as a position adjustment device for adjusting the processing position of the polymerized wafer T.

[0020] As shown in Figures 3 and 4, a transfer position A1 and a processing position A2 are set inside the laser irradiation device 31. Transfer position A1 is a position from which the polymerized wafer T can be transferred from the transport arm 23 to the chuck 100 (described later), and is also a position from which the processed portion of the polymerized wafer T (laser absorption layer P) formed by the laser light can be imaged by the camera 120 (described later). Processing position A2 is a position from which the laser irradiation unit 110 (described later) can irradiate the polymerized wafer T (laser absorption layer P) with laser light.

[0021] The laser irradiation device 31 has a chuck 100 as a substrate holder that holds the polymerized wafer T on its upper surface. The chuck 100 has a holding surface for the polymerized wafer T on its upper surface and holds the entire surface W1b of the first wafer W1, or a part of the radially inner surface W1b, by suction. The chuck 100 is, for example, an electrostatic chuck (ESC) or a vacuum chuck. The chuck 100 is provided with a lifting pin (not shown) for supporting and raising / lowering the polymerized wafer T from below. The lifting pin is inserted through a through hole (not shown) formed through the chuck 100 and is configured to be able to move up and down.

[0022] The chuck 100 is supported by the slider table 102 via an air bearing 101. A rotation mechanism 103 is provided on the underside of the slider table 102. The rotation mechanism 103 incorporates, for example, a motor as a drive source. The chuck 100 is configured to rotate around the θ axis (vertical axis) via the air bearing 101 through the rotation mechanism 103. The slider table 102 is configured to move between the above-mentioned transfer position A1 and processing position A2 along a rail 106 that extends in the Y-axis direction and is provided on the base 105, by a moving mechanism 104 provided on its underside. The drive source for the moving mechanism 104 is not particularly limited, but for example, a linear motor can be used. A moving mechanism 107 may also be provided to move the chuck 100 in the X-axis direction. The configuration of the moving mechanism 107 is arbitrary, but for example, it may be provided on the air bearing 101 and mechanically move the chuck 100 using a screw or the like.

[0023] A laser irradiation unit 110 is provided above the chuck 100 at processing position A2. The laser irradiation unit 110 includes a laser head 111, an optical system 112, and a lens 113. The laser irradiation unit 110 can scan the laser beam. In the following description, scanning the laser beam L means moving the laser beam L emitted from the lens 113 of the laser irradiation unit 110 relative to the laser absorption layer P.

[0024] The laser head 111 has a laser oscillator (not shown) that emits laser light in a pulsed manner. This laser light is a so-called pulsed laser. In this embodiment, the laser light is CO2 laser light, and the wavelength of the CO2 laser light is, for example, 8.9 μm to 11 μm. The laser head 111 may also have other equipment besides the laser oscillator, such as an amplifier.

[0025] The optical system 112 includes an optical element (not shown) that controls the intensity and position of the laser beam, an attenuator (not shown) that attenuates the laser beam to adjust the output, and a laser scanning unit (not shown) that scans the laser beam. For example, a rotary wedge scanner or a galvanometer scanner can be used as the laser scanning unit. The optical system 112 may also be configured to control the branching of the laser beam.

[0026] The lens 113 irradiates the polymerized wafer T held in the chuck 100 with laser light. The laser light emitted from the laser irradiation unit 110 passes through the second wafer W2 and irradiates the laser absorption layer P. The lens 113 may be configured to move horizontally by a moving mechanism (not shown) or to move vertically by a lifting mechanism (not shown).

[0027] Furthermore, a camera 120 is provided above the chuck 100 at the transfer position A1. The camera 120 has one or more cameras selected from macro cameras, micro cameras, etc. The camera 120 may be configured to move horizontally by a moving mechanism (not shown) or to move vertically up and down by a lifting mechanism (not shown).

[0028] Camera 120 images the processed area of ​​the polymerized wafer T held in the chuck 100 that has been irradiated with laser light. Camera 120 is equipped with, for example, a coaxial lens, irradiates infrared light (IR), and also receives reflected light from the object. The image data captured by camera 120 is output to the control device 40, which will be described later.

[0029] As will be described later, the wafer processing system 1 has a control device 40, and this control device 40 is provided in the laser irradiation device 31 and also functions as a control unit that controls the laser irradiation device 31.

[0030] The separation device 32 peels the second wafer W2 from the first wafer W1, using the interface between the second wafer W2, which serves as the separation surface, and the laser absorption layer P, where the bonding strength has been reduced by the laser irradiation device 31, as the starting point.

[0031] In one example, as shown in Figure 5, the separation device 32 includes a suction chuck 200 that holds the back surface W1b of the first wafer W1 from below, and a suction pad 210 that holds the back surface W2b of the second wafer W2 from above. In the separation device 32, as shown in Figure 5, with the suction chuck 200 holding the first wafer W1 and the suction pad 210 holding the second wafer W2, the suction pad 210 is raised to peel the second wafer W2 from the laser absorption layer P.

[0032] The configuration of the separation device 32 is not limited to this, and any configuration is possible as long as the second wafer W2 can be separated from the first wafer W1.

[0033] The first cleaning apparatus 33 cleans the surface W1a side of the first wafer W1 that has been separated by peeling in the separation apparatus 32. For example, a brush is brought into contact with the laser absorption layer P on the surface W1a side of the first wafer W1 to clean the laser absorption layer P. A pressurized cleaning solution may be used to clean the first wafer W1. The first cleaning apparatus 33 may also have a configuration to clean the back surface W1b of the first wafer W1 in addition to the surface W1a side.

[0034] The second cleaning apparatus 34 cleans the surface W2a side of the second wafer W2 that has been separated by peeling in the separation apparatus 32. For example, a brush is brought into contact with the surface W2a of the second wafer W2 to clean the surface W2a. Pressurized cleaning solution may be used to clean the second wafer W2. The second cleaning apparatus 34 may also be configured to clean the back surface W2b of the second wafer W2 in addition to the surface W2a side.

[0035] In this embodiment, as described above, the first cleaning device 33 for cleaning the first wafer W1 and the second cleaning device 34 for cleaning the second wafer W2 are arranged independently. However, the cleaning of the first wafer W1 and the second wafer W2 may be performed using the same cleaning device. In this case, the cleaning of the first wafer W1 and the second wafer W2 may be performed simultaneously or independently.

[0036] Furthermore, in this embodiment, the second wafer W2 was separated from the first wafer W1 using the separation device 32, but such separation may also be performed inside the laser irradiation device 31. For example, a liftable transport pad (not shown) is provided at the transfer position A1 of the laser irradiation device 31. Then, with the chuck 100 adsorbing and holding the first wafer W1, the second wafer W2 is adsorbed and held by the transport pad, and the transport pad is further raised to separate the second wafer W2 from the first wafer W1.

[0037] As shown in Figure 2, the wafer processing system 1 is equipped with a control device 40 as a control unit. The control device 40 is, for example, a computer and has a program storage unit (not shown). The program storage unit stores a program that controls the processing of the polymerized wafer T in the wafer processing system 1. The program storage unit also stores a program that controls the operation of the drive systems, such as the various processing devices and transport devices, to realize the wafer processing described later in the wafer processing system 1. The above program may have been recorded on a storage medium H that is readable by the computer and installed from the storage medium H to the control device 40. The storage medium H may be temporary or permanent.

[0038] Next, a wafer processing procedure performed using the wafer processing system 1 configured as described above will be explained. In this embodiment, the first wafer W1 and the second wafer W2 are bonded together in an external bonding device (not shown) to the wafer processing system 1 to form a polymerized wafer T in advance.

[0039] First, a cassette Ct containing multiple polymerized wafers T is placed on the cassette mounting table 11 of the loading / unloading block 10.

[0040] Next, the polymerized wafer T is removed from the cassette Ct by the wafer transport device 22 and transported to the laser irradiation device 31. In the laser irradiation device 31, the polymerized wafer T is transferred from the transport arm 23 to the chuck 100 located at the transfer position A1, and is held by the chuck 100. Subsequently, the chuck 100 is moved to the processing position A2 by the moving mechanism 104.

[0041] Next, as shown in Figure 6, laser light L (CO2 laser light) is pulsed from the laser irradiation unit 110 onto the laser absorption layer P, and more specifically, onto the interface between the laser absorption layer P and the second wafer W2. At this time, the laser light L penetrates the second wafer W2 from the back surface W2b side of the second wafer W2 and is absorbed by the laser absorption layer P. This laser light L reduces the bonding strength between the laser absorption layer P and the second wafer W2. In this embodiment, "reduced bonding strength" means a state in which the bonding strength is reduced at least compared to before irradiation with laser light L, and includes modification of the laser absorption layer P and delamination between the laser absorption layer P and the second wafer W2.

[0042] In this embodiment, the polymerized wafer T is rotated, and the laser beam L is moved radially from the outside to the inside while the laser beam L is irradiated in a pulsed manner. In this case, if the interval between irradiations of the laser beam L is kept constant in order to uniformly separate the second wafer W2 and the laser absorption layer P across the wafer surface, the rotation speed of the polymerized wafer T increases as the laser beam L moves radially from the outside to the inside. In such a case, the laser beam L may overlap in the central region of the laser absorption layer P, and if the rotation speed of the polymerized wafer T increases in the central region, there is a risk that the second wafer W2 may separate during processing while rotating.

[0043] Therefore, as shown in Figure 7, in the outer region R1, the polymerized wafer T is rotated while the laser beam L is irradiated, and in the central region R2, the rotation of the polymerized wafer T is stopped while the laser beam L is scanned.

[0044] The central region R2 of the chuck 100, where the laser beam L is scanned, is a circular region with a desired diameter length relative to the chuck rotation center, which serves as the holding center of the chuck 100, and is preset prior to wafer processing in the laser irradiation device 31. The diameter length of the central region R2 is, for example, the radial position where the relative rotation speed of the chuck 100 with respect to the lens 113 of the laser irradiation unit 110 reaches its upper limit; in other words, it is the limit position where the laser beam L does not overlap. The diameter length of the central region R2 is approximately 10 mm as an example. Furthermore, the outer peripheral region R1, where the chuck 100 is rotated when the laser beam L is irradiated, is set to a region radially outside the central region R2.

[0045] When irradiating the laser absorption layer P with laser light L, first the outer region R1 is imaged by the camera 120. The image data captured by the camera 120 is output to the control device 40. Based on the image data, the control device 40 determines the starting position for irradiation of the laser light L in the outer region R1.

[0046] Next, in the outer peripheral region R1, the chuck 100 (polymerized wafer T) is rotated by the rotation mechanism 103, and the chuck 100 is moved in the negative Y-axis direction by the movement mechanism 104, while the laser beam L is irradiated in a pulsed manner. At this time, the laser beam L is fixed without scanning. As a result, in the outer peripheral region R1, the laser beam L is irradiated in a spiral pattern from the radially outer side to the inner side.

[0047] Next, the rotation of the chuck 100 is stopped in the central region R2. Then, the laser beam L is pulsed and irradiated from the laser irradiation unit 110. The laser beam L is also scanned in the central region R2. During this process, the scanning irradiation of the laser beam L in the X-axis direction and the movement of the chuck 100 (polymerized wafer T) in the Y-axis direction are repeated alternately. Alternatively, the scanning irradiation of the laser beam L in the X-axis direction and the negative Y-axis movement of the chuck 100 may be synchronized.

[0048] As shown in Figure 8, a spiral-shaped processing area (dashed line in Figure 8) is formed in the outer region R1, and a circular-shaped processing area (shaded area in Figure 8) is formed in the central region R2. In order to improve the throughput of wafer processing, the laser beam L may be branched by the optical system 112 described above, and the laser beam L may be irradiated simultaneously at multiple points on the laser absorption layer P.

[0049] When the outer peripheral region R1 and the central region R2 are irradiated with laser light L, and the bonding strength between the second wafer W2 and the laser absorption layer P is reduced across the entire surface, the chuck 100 (polymerized wafer T) is then moved to the transfer position A1 by the moving mechanism 104.

[0050] Next, the polymerized wafer T on the chuck 100 is transferred to the transfer arm 23 of the wafer transfer device 22 and transported to the separation device 32. In the separation device 32, as shown in Figure 5(a), the back surface W1b of the first wafer W1 is held by the suction chuck 200, and the back surface W2b of the second wafer W2 is held by the suction pad 210. Then, as shown in Figure 5(b), with the suction pad 210 holding the second wafer W2 by suction, the suction pad 210 is raised to detach the second wafer W2 from the laser absorption layer P. At this time, as described above, the bonding strength at the interface between the laser absorption layer P and the second wafer W2 is reduced by irradiation with laser light L, so the second wafer W2 can be detached from the laser absorption layer P without applying a large load.

[0051] The detached second wafer W2 is transferred from the suction pad 210 to the transport arm 23 of the wafer transport device 22 and then transported to the second cleaning device 34. At this time, the second wafer W2 discharged from the separation device 32 may be inverted, for example, by an inversion device (not shown) or the operation of the suction pad 210, so that the surface W2a, which is the detached surface, faces upwards, before being transported to the second cleaning device 34.

[0052] In the second cleaning device 34, the surface W2a, which is the peeled surface, is cleaned. In the first cleaning device 33, the back surface W2b may also be cleaned along with the surface W2a. Alternatively, separate cleaning units may be provided for cleaning the surface W2a and the back surface W2b, respectively. After that, the second wafer W2, which has been cleaned by the second cleaning device 34, is transported by the wafer transport device 22 to the cassette Cw2 on the cassette mounting table 11.

[0053] Meanwhile, the first wafer W1 held by the suction chuck 200 is transferred to the transport arm 23 and transported to the first cleaning device 33. In the first cleaning device 33, the surface W1a side, which is the peeling surface, specifically the surface of the laser absorption layer P, is cleaned. In addition, the first cleaning device 33 may also clean the back surface W1b of the first wafer W1 along with the surface of the laser absorption layer P. Alternatively, separate cleaning units may be provided to clean the surface of the laser absorption layer P and the back surface W1b of the first wafer W1, respectively. After cleaning by the first cleaning device 33, the first wafer W1 is transported by the wafer transport device 22 to the cassette Cw1 on the cassette mounting table 11.

[0054] Thus, the series of wafer processing operations in wafer processing system 1 is completed.

[0055] Here, when the laser irradiation device 31 irradiates the outer peripheral region R1 with laser light L, if the processing center of the spiral processing portion shown in Figure 8 (dashed line in Figure 8) and the chuck rotation center (rotation center) of the chuck 100 are misaligned, the laser light L may be irradiated to a place where the first wafer W1 does not exist.

[0056] Furthermore, when irradiating the central region R2 with laser light L, if the machining center of the circular machining area shown in Figure 8 (the shaded area in Figure 8) and the rotation center of the chuck 100 are misaligned, the laser will not scan to the central region R2. In this case, an unmachined area may be created at the boundary between the outer region R1 and the central region R2 where the laser light L is not irradiated.

[0057] Therefore, before performing the series of wafer processing described above on the polymerized wafer T to be commercialized, for example, when starting up the laser irradiation device 31, the processing center and the chuck rotation center are adjusted to coincide. This adjustment of the processing center and chuck rotation center may be done using a dummy wafer Wd as the substrate or the polymerized wafer T. The following explanation will use the case where a dummy wafer Wd is used as an example.

[0058] There are two methods for adjusting the machining center and the chuck rotation center.

[0059] The first adjustment method will now be described. First, the chuck 100, which holds the dummy wafer Wd by suction, is placed at the processing position A2. Next, while rotating the chuck 100 with the rotation mechanism 103, the laser beam L is irradiated in a circular pulse pattern onto the outer peripheral region R1 of the dummy wafer Wd. At this time, the laser beam L is fixed without scanning. Then, as shown in Figure 9, a circular outer peripheral processing portion Q1 (dashed line in Figure 9) is formed on the dummy wafer Wd.

[0060] Next, the chuck 100 is moved to the transfer position A1. Then, while rotating the chuck 100, the outer peripheral machining portion Q1 is imaged using the camera 120. The image data captured by the camera 120 is output to the control device 40.

[0061] The control device 40 calculates the position of the outer perimeter machining center Cq1, which is the center of the outer perimeter machining portion Q1, based on the image data.

[0062] Furthermore, the control device 40 moves the chuck 100 horizontally so that the outer circumference machining center Cq1 and the chuck rotation center Cc of the chuck 100 coincide. Specifically, it calculates the distance L1 between the outer circumference machining center Cq1 and the chuck rotation center Cc, and calculates the horizontal movement distance (Y-axis and X-axis directions) of the chuck 100 based on this distance L1. The movement of the chuck 100 in the Y-axis direction is performed by the movement mechanism 104. The method of moving the chuck 100 in the X-axis direction is arbitrary, but it may be done mechanically, for example, using the movement mechanism 107. Also, if the movement mechanism 104 is configured to move the chuck 100 in the X-axis direction as well, the chuck 100 may be moved in the X-axis direction by the movement mechanism 104. Alternatively, the lens 113 of the laser irradiation unit 110 may be moved in the X-axis direction.

[0063] In this way, the outer circumference machining center Cq1 and the chuck rotation center Cc coincide, and the annular outer circumference machining portion Q1 can be formed concentrically with the chuck 100 (solid line in Figure 9). As a result, the relative positional relationship between the irradiation position of the laser beam L from the laser irradiation unit 110 and the position of the chuck 100 can be adjusted.

[0064] The second adjustment method will now be described. First, the chuck 100, which holds the dummy wafer Wd by suction, is placed at the processing position A2. Next, with the rotation of the chuck 100 stopped, the laser beam L is scanned over the central region R2 of the dummy wafer Wd, and the laser beam L is irradiated in a circular, pulsed manner. Then, as shown in Figure 10, a circular central processing portion Q2 (dashed line in Figure 10) is formed on the dummy wafer Wd.

[0065] Next, the chuck 100 is moved to the transfer position A1. Then, while rotating the chuck 100, the central processing area Q2 is imaged using the camera 120. The image data captured by the camera 120 is output to the control device 40.

[0066] The control device 40 calculates the position of the central machining center Cq2, which is the center of the central machining section Q2, based on the image data.

[0067] Furthermore, the control device 40 moves the chuck 100 horizontally so that the central machining center Cq2 and the chuck rotation center Cc of the chuck 100 coincide. Specifically, the control device 40 calculates the distance L2 between the central machining center Cq2 and the chuck rotation center Cc, and calculates the horizontal movement distance (Y-axis and X-axis directions) of the chuck 100 based on this distance L2. The movement of the chuck 100 in the Y-axis direction is performed by the movement mechanism 104. The method of moving the chuck 100 in the X-axis direction is arbitrary, but it may be done mechanically, for example, using a screw. Also, if the movement mechanism 104 is configured to move the chuck 100 in the X-axis direction as well, the chuck 100 may be moved in the X-axis direction by the movement mechanism 104.

[0068] In this way, the central machining center Cq2 and the chuck rotation center Cc coincide, and the annular central machining portion Q2 can be formed concentrically with the chuck 100 (solid line in Figure 10). As a result, the relative positional relationship between the irradiation position of the laser beam L from the laser irradiation unit 110 and the position of the chuck 100 can be adjusted. In particular, when the optical system 112 has a rotary wedge scanner or the like, as in this embodiment, adjustments can be made considering the operating center of the optical system 112.

[0069] The first and second adjustments described above may be performed either individually to adjust the machining center and the chuck rotation center, or both may be performed to adjust the machining center and the chuck rotation center. For example, a two-stage adjustment may be performed, in which the first adjustment adjusts the position of the outer peripheral machining center Cq1 and the chuck rotation center Cc, and then the second adjustment adjusts the central machining center Cq2 and the chuck rotation center Cc. In this case, the relative positional relationship between the laser irradiation unit 110 and the chuck 100 can be corrected more precisely.

[0070] According to this embodiment, the processing center and the chuck rotation center can be adjusted to coincide. Therefore, the formation of unprocessed areas can be suppressed, and peeling defects between the first wafer W1 and the second wafer W2 can be suppressed. In addition, the overlap of the laser beam L in the outer peripheral region R1 and the laser beam L in the central region R2 can be prevented, thereby suppressing damage to the device.

[0071] In addition, the first and second adjustments are performed with the camera 120 properly positioned. That is, the position of the camera 120 is pre-adjusted so that the imaging center of the camera 120, the processing center of the laser beam L from the laser irradiation unit 110, and the chuck rotation center of the chuck 100 are all located coaxially in the Y-axis direction.

[0072] In the above embodiment, when adjusting the machining center and the chuck rotation center, the chuck 100 was moved horizontally. However, the lens 113 of the laser irradiation unit 110 may be moved horizontally, or both the chuck 100 and the lens 113 may be moved horizontally. By moving the chuck 100 and the lens 113 relatively horizontally, the machining center and the chuck rotation center can be adjusted.

[0073] In the embodiments described above, when adjusting the machining center and the chuck rotation center, at least one of either an annular outer machining portion Q1 or an annular central machining portion Q2 was formed. However, the shape of the machining portions Q1 and Q2 is not limited to annular shapes. For example, rectangular annular machining portions Q1 and Q2 may be formed, the positions of the rectangular annular machining centers Cq1 and Cq2 may be calculated, and the machining center and chuck rotation center may be adjusted. In such a case, the optical system 112 of the laser irradiation unit 110 may have a galvanometer scanner.

[0074] In the embodiments described above, an annular central machining portion Q2 was formed during the second adjustment of the machining center and the chuck rotation center. However, the central machining portion Q2 may be formed to fill the entire machining area. In such a case, the optical system 112 of the laser irradiation unit 110 may have a galvanometer scanner.

[0075] As shown in Figure 11, a laser beam L is irradiated to fill the entire circular machining area, forming a circular central machining area Q2. For example, a galvanometer scanner is used to irradiate the area with straight laser beams L of different lengths in steps and repeats to form the circular central machining area Q2. Then, the chuck 100 is moved horizontally so that the central machining center Cq2 of the circular central machining area Q2 coincides with the chuck rotation center Cc.

[0076] Furthermore, as shown in Figure 12, the laser beam L is irradiated to fill the entire rectangular machining area, forming the central machining portion Q2 of the rectangle. For example, a galvanometer scanner is used to irradiate the central machining portion Q2 of the rectangle with straight laser beams L of the same length in steps and repeats. Then, the chuck 100 is moved horizontally so that the central machining center Cq2 of the central machining portion Q2 of the rectangle coincides with the chuck rotation center Cc.

[0077] In the above embodiment, the laser beam L was irradiated in a spiral pattern onto the outer peripheral region R1 as shown in Figure 8, but the laser beam L may also be irradiated concentrically across the entire surface of the outer peripheral region R1.

[0078] In the embodiments described above, the position adjustment method for laser processing described herein was applied when performing laser lift-off to peel the second wafer W2 from the laser absorption layer P, but the wafer processing to which it can be applied is not limited thereto.

[0079] In the semiconductor device manufacturing process, a modified layer is formed inside a silicon substrate wafer on which multiple electronic circuits and other devices are formed on the surface by irradiating it with laser light along the plane direction, and the wafer is thinned by separating it using the modified layer as a starting point. A YAG laser beam is used for this laser light. The laser processing position adjustment method of this disclosure can also be applied when forming the modified layer in this way. Furthermore, the laser processing position adjustment method of this disclosure can also be applied to the techniques of surface modification and surface planarization of wafers.

[0080] Furthermore, when thinning a wafer, so-called edge trimming is performed to remove the peripheral edge of the wafer. In edge trimming, the peripheral edge is modified by irradiating it with laser light, making it easier to remove. The position adjustment method for laser processing described in this disclosure can also be applied when modifying this peripheral edge.

[0081] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The above embodiments may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0082] 31 Laser irradiation device 40 Control device 100 Chuck 104 Moving mechanism 110 Laser irradiation area 120 Cameras L Laser light T Polymerized wafer Wd dummy wafer

Claims

1. A substrate processing apparatus for processing substrates, A substrate holding section that holds the substrate, A laser irradiation unit that irradiates the substrate held in the substrate holding unit with laser light, A camera for imaging the aforementioned substrate, A rotating mechanism for rotating the substrate holding portion, A moving mechanism that moves the substrate holding portion and the laser irradiation portion relative to each other in the horizontal direction, It comprises a control unit and, The control unit, Control to scan the central region of the substrate with the rotation of the substrate stopped, thereby irradiating the substrate with the laser beam in an annular pattern and forming an annular central processing portion, Control to image the central processing area with the camera, Control for calculating the central processing center of the central processing portion that has been captured, A substrate processing apparatus that performs control to move the substrate holding part and the laser irradiation part in a relative horizontal direction to a position where the central processing center and the rotation center of the substrate holding part coincide, at least in the direction of movement of the moving mechanism.

2. The control unit, Control to irradiate the outer peripheral region of the substrate in an annular shape with the laser light to form an annular outer peripheral processed portion, Control to image the outer peripheral processed portion with the camera, Control to calculate the outer edge machining center of the captured outer edge machining portion, The substrate processing apparatus according to claim 1, wherein control is performed to move the substrate holding portion and the laser irradiation portion in a relative horizontal direction to a position where the outer peripheral processing center and the rotation center coincide, at least in the direction of movement of the moving mechanism.

3. The substrate processing apparatus according to claim 1, wherein the control unit calculates the distance between the central processing center and the rotation center, and performs control to calculate the relative movement distance between the substrate holding unit and the laser irradiation unit.

4. The substrate processing apparatus according to claim 1, wherein the control unit controls the relative horizontal movement of the substrate holding unit and the laser irradiation unit to a position where the central processing center and the rotation center coincide in a direction orthogonal to the direction of movement of the moving mechanism.

5. A substrate processing apparatus for processing substrates, A substrate holding section that holds the substrate, A laser irradiation unit that irradiates the substrate held in the substrate holding unit with laser light, A camera for imaging the aforementioned substrate, A rotating mechanism for rotating the substrate holding portion, A moving mechanism that moves the substrate holding portion and the laser irradiation portion relative to each other in the horizontal direction, It comprises a control unit and, The control unit, Control to scan the laser beam in the central region of the substrate while the rotation of the substrate is stopped, thereby irradiating the processing area of ​​the substrate with the laser beam and forming the central processing portion, Control to image the central processing area with the camera, Control for calculating the central processing center of the central processing portion that has been captured, A substrate processing apparatus that performs control to move the substrate holding part and the laser irradiation part in a relative horizontal direction to a position where the central processing center and the rotation center of the substrate holding part coincide, at least in the direction of movement of the moving mechanism.

6. A position adjustment method for adjusting the processing position of a circuit board, The substrate is held in place by the substrate holding part, In the central region of the substrate held by the substrate holding portion, with the rotation of the substrate stopped, a laser beam is scanned from the laser irradiation portion to irradiate the substrate in an annular pattern with the laser beam, thereby forming an annular central processing portion. To image the central processing area, To calculate the central processing center of the central processing portion that was captured, A position adjustment method comprising moving the substrate holding portion and the laser irradiation portion in a relative horizontal direction to a position where the central processing center and the rotation center of the substrate holding portion coincide.

7. In the outer peripheral region of the substrate, the laser light is irradiated in an annular shape to form an annular outer peripheral processed portion. To image the aforementioned outer peripheral processed portion, To calculate the center of the outer peripheral machining of the captured outer peripheral machining portion, The position adjustment method according to claim 6, further comprising moving the substrate holding portion and the laser irradiation portion in a relative horizontal direction to a position where the outer peripheral machining center and the rotation center coincide.

8. The position adjustment method according to claim 6, comprising calculating the distance between the central processing center and the rotation center, and calculating the relative movement distance between the substrate holding portion and the laser irradiation portion.

9. A position adjustment method for adjusting the processing position of a circuit board, The substrate is held in place by the substrate holding part, In the central region of the substrate held by the substrate holding part, with the rotation of the substrate stopped, a laser beam is scanned from the laser irradiation part to irradiate the processing area of ​​the substrate with the laser beam, thereby forming a central processing portion. To image the central processing area, To calculate the central processing center of the central processing portion that was captured, A position adjustment method comprising moving the substrate holding portion and the laser irradiation portion in a relative horizontal direction to a position where the central processing center and the rotation center of the substrate holding portion coincide.

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