Pressure regulating valves and semiconductor manufacturing equipment

Abstract

To provide a technology that can effectively suppress deposition of by-products to a pressure regulating valve.SOLUTION: A pressure regulating valve includes: piping; a valve element disposed inside the piping; and a support shaft for supporting the valve element so as to be rotatable. The valve element includes: a valve element-side flow path through which a purge gas can circulate inside the valve element; and a plurality of outlets communicated to the valve element-side flow path in an outer peripheral part of the valve element. The support shaft includes a support shaft-side flow path for introducing the purge gas into the valve element-side flow path.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present disclosure relates to a pressure regulating valve and a semiconductor manufacturing apparatus.

Background Art

[0002] When a semiconductor manufacturing apparatus processes a substrate with a reactive gas in a processing chamber, by-products that do not contribute to the processing are generated. This type of by-product accumulates in an exhaust pipe that exhausts the gas in the processing chamber, a pressure regulating valve in the exhaust pipe, or the like. For this reason, for example, Patent Document 1 discloses a technique for suppressing the adhesion of by-products by providing a heater in the exhaust pipe and adjusting the temperature of the exhaust pipe.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present disclosure provides a technique capable of effectively suppressing the accumulation of by-products on a pressure regulating valve.

Means for Solving the Problems

[0005] According to one aspect of the present disclosure, there is provided a pressure regulating valve including a pipe, a valve body disposed inside the pipe, and a support shaft that rotatably supports the valve body, the pressure regulating valve being configured to rotate the valve body to adjust the pressure, wherein the valve body has a valve body side flow path through which a purge gas can flow inside the valve body, and a plurality of outlets communicating with the valve body side flow path on an outer peripheral portion of the valve body, and the support shaft includes a support shaft side flow path for introducing the purge gas into the valve body side flow path The valve body has a gas diffusion section that extends circumferentially and covers a plurality of outlets, and the gas diffusion section diffuses the purge gas discharged from the plurality of outlets in the circumferential direction of the valve body and causes it to flow out to the outside of the valve body. A pressure regulating valve is provided.

Effects of the Invention

[0006] According to one embodiment, the accumulation of by-products on the pressure regulating valve can be effectively suppressed. [Brief explanation of the drawing]

[0007] [Figure 1] This is a schematic side cross-sectional view showing a semiconductor manufacturing apparatus according to one embodiment. [Figure 2] Figure 2(A) is a schematic side cross-sectional view of the pressure regulating valve. Figure 2(B) is a schematic top cross-sectional view of the pressure regulating valve. [Figure 3] This is an exploded perspective view showing the valve body and pivot shaft of a pressure regulating valve. [Figure 4] Figure 4(A) is a plan view showing the valve body side flow path. Figure 4(B) is an enlarged cross-sectional view showing the mounting state of the valve body and support shaft. [Figure 5] Figure 5(A) is a side cross-sectional view showing the deposition of by-products. Figure 5(B) is a side cross-sectional view showing the effect of discharge of purge gas. [Figure 6] This is a schematic plan cross-sectional view showing a pressure regulating valve according to the first modified example. [Figure 7] Figure 7(A) is a schematic side cross-sectional view showing a pressure regulating valve according to the second modified example. Figure 7(B) is a schematic top cross-sectional view showing a pressure regulating valve according to the second modified example. [Figure 8] This is a schematic side cross-sectional view showing a pressure regulating valve according to the third modified example. [Modes for carrying out the invention]

[0008] The following describes embodiments for implementing this disclosure with reference to the drawings. In each drawing, the same reference numerals are used for identical components, and redundant explanations may be omitted.

[0009] As shown in Figure 1, a pressure regulating valve 100 according to one embodiment is applied to a semiconductor manufacturing apparatus 1 for manufacturing semiconductors. Below, in order to facilitate understanding of the invention, the configuration of the semiconductor manufacturing apparatus 1 will be described first.

[0010] [Configuration of semiconductor manufacturing equipment 1] One embodiment of the semiconductor manufacturing apparatus 1 is a film deposition apparatus that forms a metal nitride film, such as a titanium nitride (TiN) film or a titanium oxynitride (TiON) film, on the surface of a substrate W using atomic layer deposition (ALD). The substrate W to be subjected to the film deposition process may be a semiconductor substrate such as a silicon wafer or a compound semiconductor wafer. The film deposition apparatus may also deposit films other than metal nitride films (for example, high-k films) on the substrate W.

[0011] Specifically, the semiconductor manufacturing apparatus 1 includes a processing container 10 for processing the substrate W. The semiconductor manufacturing apparatus 1 also includes a susceptor 20, a shower head 30, a gas supply unit 40, and an exhaust unit 50, which are installed in or connected to the processing container 10. Furthermore, the semiconductor manufacturing apparatus 1 has a control device 90 that controls each of these components to perform the film deposition process.

[0012] The processing container 10 is made of a metal such as aluminum and has a processing space 10s inside for performing film deposition on the substrate W. The processing container 10 is formed in a substantially cylindrical shape according to the planar shape of the substrate W to be contained. The processing container 10 also includes an inlet / outlet 11 for loading and unloading the substrate W, and a gate valve 12 for opening and closing the inlet / outlet 11.

[0013] Furthermore, the processing container 10 is equipped with an annular discharge duct 13 at its top. The discharge duct 13 has a slit 13a that communicates with the processing space 10s along the circumferential direction of its inner surface, and an outlet 13b at a predetermined position on its outer surface.

[0014] The susceptor 20 is made of nickel or the like and is supported by a support member 23 inside the processing vessel 10. The susceptor 20 is formed in a planar shape (circular shape) corresponding to the substrate W and horizontally supports the substrate W. Further, the susceptor 20 has a heater 21 inside for heating the substrate W placed on the mounting surface (upper surface) of the susceptor 20. The mounting surface of the susceptor 20 is temperature-controlled to, for example, 300 to 450 °C by the heater 21. Further, the susceptor 20 includes a cover member 22 made of ceramics such as alumina so as to cover the outer peripheral region of the mounting surface of the substrate W and the side surface of the susceptor 20.

[0015] The support member 23 that supports the susceptor 20 penetrates through a hole formed in the bottom wall of the processing vessel 10 from the center of the bottom surface of the susceptor 20 and extends downward of the processing vessel 10, and the lower end thereof is connected to a vertical movement mechanism 24. The susceptor 20 moves up and down by the vertical movement mechanism 24 via the support member 23. Specifically, the vertical movement mechanism 24 displaces the susceptor 20 between a processing position for film-forming the substrate W and a transfer position below the processing position where the substrate W can be transferred. Further, below the processing vessel 10 in the vertical direction, a bellows 25 that expands and contracts as the susceptor 20 moves up and down and a flange portion 26 that closes the lower end of the bellows 25 are provided.

[0016] The processing vessel 10 includes a substrate lifting / lowering unit 27 on the bottom wall. The substrate lifting / lowering unit 27 includes a lifting / lowering plate 27a, a plurality (for example, three) of support pins 27b protruding upward from the lifting / lowering plate 27a, and a pin vertical movement mechanism 27c that moves the lifting / lowering plate 27a up and down. When the substrate W is carried into the processing vessel 10, the substrate lifting / lowering unit 27 receives the substrate W by raising each support pin 27b with respect to the substrate W conveyed by a transfer arm (not shown), and then places the substrate W on the susceptor 20 at the processing position by lowering each support pin 27b. Conversely, when the substrate W is carried out of the processing vessel 10, the substrate lifting / lowering unit 27 lifts the substrate W from the susceptor 20 at the processing position by raising each support pin 27b and delivers the substrate W to the entering transfer arm.

[0017] The shower head 30 is formed of, for example, aluminum and is provided so as to face the susceptor 20 above the processing container 10 in the vertical direction. The shower head 30 has a main body portion 31 and a shower plate 32.

[0018] The main body portion 31 is formed in a substantially cylindrical shape and has a recess 34 serving as a gas diffusion space 33 at the center on the lower side in the vertical direction. On the upper side of the outer edge portion of the main body portion 31, a flange 31a protruding radially outward and engaging with the discharge duct 13 is provided. The space between the flange 31a and the discharge duct 13 is hermetically sealed by a seal member 15. Further, the main body portion 31 includes a gas introduction portion 35 protruding upward in the vertical direction at the upper center. The gas introduction portion 35 has a gas flow path 35a leading to the gas diffusion space 33.

[0019] The shower plate 32 is attached so as to cover the recess 34 on the lower side in the vertical direction of the main body portion 31. The gas diffusion space 33 is defined by the recess 34 and the shower plate 32. The shower plate 32 has a plurality of gas discharge holes 32a for discharging gas from the gas diffusion space 33.

[0020] The gas supply unit 40 includes a gas supply path 41 connected to the gas flow path 35a of the main body portion 31, and also includes gas sources (raw material gas sources, reducing gas sources, etc.) of a plurality of types of processing gases not shown on the upstream side of the gas supply path 41. The raw material gas supplied by the gas supply unit 40 is not particularly limited as long as it can form a film in the film forming process, and may be an organic compound or an inorganic compound. When forming a TiN film, for example, titanium chloride (TiCl4) or the like can be used as the raw material gas. When forming a TiN film, as the reducing gas supplied by the gas supply unit 40, a nitrogen-containing gas such as ammonia (NH3) can be used. In addition, the gas supply unit 40 may have a configuration in which a purge gas source for supplying a purge gas or the like is connected to the gas supply path 41. Although one gas supply path 41 is shown in FIG. 1, the gas supply path 41 may be provided for each of a plurality of types of processing gases.

[0021] Furthermore, the gas supply unit 40 is equipped with flow controllers such as mass flow controllers and on / off valves (not shown) in each gas supply path 41 between the raw material gas source and the main unit 31, and between the reducing gas source and the main unit 31. The semiconductor manufacturing apparatus 1 controls the flow controllers and on / off valves by the control device 90 to switch the flow of raw material gas and reducing gas on and off, and to adjust the flow rate of raw material gas.

[0022] The exhaust unit 50 has a discharge path 51 connected to the outlet 13b of the discharge duct 13 of the processing container 10. The exhaust unit 50 is equipped with a pressure regulating valve (APC (Automatic Pressure Control) valve) 100 configured to adjust the pressure inside the processing container 10 at an intermediate position in the discharge path 51. The exhaust unit 50 also has a vacuum pump 52 and a waste unit 53 for processing exhaust gas downstream of the pressure regulating valve 100 in the discharge path 51. In the film deposition process, the exhaust unit 50 operates the vacuum pump 52 to suck out the gas inside the processing container 10, thereby discharging the gas from the processing container 10 to the waste unit 53 via the discharge duct 13 and the discharge path 51. The semiconductor manufacturing apparatus 1 can also adjust the pressure inside the processing container 10 by adjusting the opening of the pressure regulating valve 100 when the vacuum pump 52 is sucking out gas.

[0023] The control device 90 of the semiconductor manufacturing apparatus 1 controls the susceptor 20, gas supply unit 40, exhaust unit 50, etc., to perform film deposition processing in the processing container 10. The control device 90 is a control computer having one or more processors, memory, input / output interfaces, and electronic circuits (not shown). The one or more processors are a combination of one or more CPUs, GPUs, ASICs, FPGAs, or circuits consisting of multiple discrete semiconductors. The memory includes non-volatile memory and volatile memory and forms the storage unit of the control device 90. The memory stores programs for controlling the film deposition process and recipes executed in the film deposition process. The processor reads the programs and recipes stored in the memory and performs control.

[0024] [Configuration of pressure regulating valve 100] Next, the configuration of the pressure regulating valve 100 of the exhaust section 50 will be described. As shown in Figures 2(A) and 2(B), the pressure regulating valve 100 includes a pipe 101 connected to the upstream pipe 51a and the downstream pipe 51b that constitute the discharge path 51, a valve body 110 disposed within the pipe 101, and a support shaft 120 that rotatably supports the valve body 110. The pressure regulating valve 100 also has a valve body operating unit 130 located outside the pipe 101 that adjusts the rotation angle of the valve body 110.

[0025] The pipe 101 is formed in a cylindrical shape and has a through hole 102 on its inside that constitutes the flow path of the discharge path 51. The inner circumferential surface 103 of the pipe 101 is formed in a circular shape when viewed in cross-section perpendicular to the axial direction of the pipe 101. The axial length of the pipe 101 is not particularly limited, but is set to be greater than or equal to the diameter of the valve body 110, for example. The pipe 101 is also provided with flanges 104 at each of its axial ends. Each flange 104 is connected to the flange of the upstream pipe 51a and the flange of the downstream pipe 51b by fixing means such as screws.

[0026] The pipe 101 has a projection 105 on a part of its outer surface that protrudes radially outward. The projection 105 constitutes the part that holds the valve body operating part 130. An axial hole 106 for housing the support shaft 120 is formed in the projection 105 and in the pipe 101 where the projection 105 is connected. In addition, a hole 107 for housing the support shaft 120 is formed in the pipe 101 at a location opposite to the axial hole 106 (a location on the inner surface 103 of the pipe 101 that is 180° out of phase with respect to the axial hole 106).

[0027] The valve body 110 is formed in a disc shape with a diameter slightly smaller than the diameter of the through-hole 102 of the piping 101. Therefore, when the valve body 110 is housed in the through-hole 102 of the piping 101, it is positioned without contact with the inner circumferential surface 103. As shown in Figures 2(A) to 3, the valve body 110 has a base portion 111 fixed to the support shaft 120 and a pair of outer protrusions 112 that protrude low from the primary side surface (upper surface) of the outer circumference of the base portion 111.

[0028] The base portion 111 is formed as a disc with a flat upper surface and a secondary surface (lower surface) that extend parallel to each other. The thickness of this base portion 111 is not particularly limited, but is set to, for example, several millimeters to several tens of millimeters.

[0029] The pair of outer projections 112 have an arc shape that extends approximately 180° along the circumferential direction of the outer circumference of the base portion 111. The outer sides of the pair of outer projections 112 protrude slightly radially outward from the outer circumference of the base portion 111, forming the outer edge of the valve body 110. The area on the outer circumference of the base portion 111 where the pair of outer projections 112 are spaced apart is a notch 113 for positioning the support shaft 120.

[0030] The pressure regulating valve 100 rotatably supports the valve body 110 by fixing a support shaft 120 to the upper surface of the valve body 110 and pivotally supporting the support shaft 120 in the piping 101. To fix the valve body 110 and the support shaft 120, the base portion 111 is provided with fixing holes 114 that penetrate the upper and lower surfaces at the positions of two notches 113 formed between a pair of outer protrusions 112. The pressure regulating valve 100 integrates the valve body 110 and the support shaft 120 by screwing a screw (not shown) onto the support shaft 120 from the lower surface side of the base portion 111 through each fixing hole 114.

[0031] The support shaft 120 is a rod-shaped member that extends in a straight line and rotatably supports the valve body 110 within the piping 101. The support shaft 120 has a shaft body 121 that is formed in a circular shape in a cross-sectional view perpendicular to the axial direction of the support shaft 120, and a mounting portion 122 that bulges out from the outer circumferential surface of the shaft body 121 and is fixed to the valve body 110.

[0032] The shaft body 121 is inserted into the shaft hole 106 and the hole 107 of the pipe 101 and is rotatably supported by the pipe 101. A sealing member 108, such as an O-ring, is provided inside the pipe 101 that supports the shaft body 121 in order to block the inflow of gas from the through hole 102.

[0033] The mounting portion 122 has a substantially semicircular shape, for example, with a flat surface facing the valve body 110, and contacts the upper surface of the valve body 110 in a surface direction. The mounting portion 122 is positioned to pass between a pair of outer protrusions 112 (two notches 113). A screw hole 123 into which the above-mentioned screw can be screwed is provided at a predetermined position on the lower surface of the mounting portion 122.

[0034] The valve body operating unit 130 is attached to the protruding portion 105 and supports one end of the pivot shaft 120. Inside the valve body operating unit 130 are a drive source such as a motor and a transmission mechanism that transmits the driving force of the drive source to the pivot shaft (neither of which are shown). The valve body operating unit 130 is connected to the control device 90 via a driver (not shown) and rotates the pivot shaft based on the rotation angle commanded by the control device 90.

[0035] The pressure regulating valve 100 changes the opening of the flow path of the discharge path 51 based on the rotation angle (tilt) of the valve body 110, which is operated by the valve body operating unit 130. By changing the opening of the flow path of the discharge path 51, the pressure regulating valve 100 adjusts the flow rate of the gas flowing through the flow path. This adjusts the pressure inside the processing container 10 which is connected to the discharge path 51.

[0036] Furthermore, the pressure regulating valve 100 according to this embodiment has a purge gas discharge mechanism 140 that discharges purge gas from the valve body 110. The purge gas discharge mechanism 140 includes a pipe-side passage 141 provided in the piping 101, a support shaft-side passage 142 provided in the support shaft 120, a valve body-side passage 143 provided in the valve body 110, and gas diffusion sections 144 provided on each outer projection 112 of the valve body 110. This purge gas discharge mechanism 140 is connected to a purge gas supply unit 150 installed outside the pressure regulating valve 100, and purge gas is supplied from the purge gas supply unit 150. The purge gas discharged by the purge gas discharge mechanism 140 is not particularly limited, but it is preferable to use an inert gas such as N2 gas, Ar gas, or CO2 gas.

[0037] The purge gas supply unit 150 has an external supply path 151 through which purge gas flows, and is equipped with a purge gas source 152, a flow regulator 153 such as a mass flow controller, and an on / off valve 154 in order from the upstream to the downstream side of the external supply path 151. The purge gas supply unit 150 switches the flow of purge gas and stops its flow, as well as adjusting the flow rate of the raw material gas, by controlling the flow regulator 153 and the on / off valve 154 by the control device 90. The purge gas supply unit 150 may share a purge gas source and part of the path with the gas supply unit 40 of the semiconductor manufacturing apparatus 1.

[0038] The piping-side flow path 141 of the purge gas discharge mechanism 140 extends within the protrusion 105 (or the piping 101 itself to which the protrusion 105 is connected) in a direction perpendicular to the axis of the support shaft 120. One end of the piping-side flow path 141 is connected to the external supply path 151 of the purge gas supply unit 150 via a connector (not shown).

[0039] The other end of the piping-side passage 141 is connected to the support shaft-side passage 142 via a communication bearing 145 provided on the protruding portion 105. The communication bearing 145 maintains communication between the piping-side passage 141 and the support shaft-side passage 142 without hindering the rotation of the support shaft 120. For example, the communication bearing 145 has a groove around the outer surface of the support shaft 120 that communicates with the piping-side passage 141, so that the communication opening 142a of the support shaft-side passage 142 faces the groove regardless of the angle at which the support shaft 120 is oriented. In addition, the sealing member 108 that seals the support shaft 120 inside the piping 101 is installed between the valve body operating part 130 and the communication bearing 145 to prevent purge gas from leaking out of the piping 101.

[0040] The support shaft side passage 142 extends linearly within the support shaft 120, along the axis of the support shaft 120. One end of the support shaft side passage 142 communicates with a communication port 142a formed on the outer circumferential surface of the support shaft 120 (see Figure 2(B)). The other end of the support shaft side passage 142 bends relative to the axis of the support shaft 120, communicating with a communication port 142b formed on the lower surface of the central part of the mounting portion 122 (see Figure 3). The communication port 142b is positioned at the center of the upper surface of the valve body 110 when the support shaft 120 is fixed to the valve body 110. Note that the support shaft side passage 142 is not limited to being provided inside the support shaft 120; it may also be provided inside a pipe connected to the outer circumferential surface of the support shaft 120.

[0041] As shown in Figures 4(A) and 4(B), the valve body side flow path 143 has an inlet 143a at the center of the upper surface of the valve body 110, and a common path 146 that extends a short distance downward in the thickness direction from the inlet 143a. Note that the inlet 143a may be located slightly off-center from the center of the valve body 110 (approximately the center), and the term "center" in this disclosure includes the approximate center. Furthermore, the valve body 110 and the support shaft 120 may be provided with a positioning structure 148 (see dotted line in Figure 4(B)) to connect the inlet 143a of the valve body 110 with the communication port 142b of the support shaft 120. For example, the positioning structure 148 can have a fitting structure in which a recess is provided on either the valve body 110 or the support shaft 120 and a protrusion is provided on the other.

[0042] The valve body side flow path 143 branches off from the lower end of the common path 146 into multiple (six in the illustrated example) branch paths 147. The number of branch paths 147 in the purge gas discharge mechanism 140 is not particularly limited and can be set to an appropriate number considering the shape of the valve body 110, etc.

[0043] Each branch path 147 extends radially outward from the common path 146 (inlet 143a) at the center of the valve body 110. On the outer circumference of the base portion 111, each branch path 147 curves diagonally upward to reach a pair of outer projections 112 connected to the upper surface of the base portion 111. Each branch path 147 then communicates with an outlet 143b provided within the pair of outer projections 112.

[0044] Each outer projection 112 is provided with a configuration groove 115 for arranging the gas diffusion section 144. The configuration groove 115 is continuous with the entire outer edge of the outer projection 112 and has an open portion radially outward from the outer projection 112, and has an appropriate depth extending radially inward from this open portion into the outer projection 112. The outlet 143b of each branch path 147 is in communication with the bottom of this configuration groove 115.

[0045] The gas diffusion section 144 is positioned in the arrangement groove 115 to diffuse the purge gas supplied from each branch path 147 through the outlet 143b. For example, a porous body 144a having an irregular number of holes through which gas can pass can be used as this gas diffusion section 144. As a result, the purge gas supplied from each branch path 147 moves along the circumferential direction of the porous body 144a (arrangement groove 115) as it passes through the porous body 144a, and is discharged evenly from the outer surface of the porous body 144a.

[0046] Furthermore, the gas diffusion section 144 is not limited to the application of the porous material 144a, and can take various configurations. For example, the gas diffusion section 144 may be made of a lattice structure 144b in which multiple branch-like grids are arranged periodically. By applying the lattice structure 144b in this way, the gas diffusion section 144 can ensure reproducibility of the gas diffusion function for each valve body 110. Alternatively, the gas diffusion section 144 may be made of a shower structure that includes a passage extending in the circumferential direction of the outer projection 112 and multiple discharge ports provided on the outer circumferential surface of the outer projection 112 and communicating with the passage, instead of the arrangement groove 115.

[0047] The valve body 110 having the purge gas discharge mechanism 140 described above can be manufactured using a 3D printer (not shown). Manufacturing with a 3D printer allows for the formation of the desired shape even in a configuration with valve body side flow paths 143 (common path 146, branch path 147) without the need for mold cutting to form the valve body side flow paths 143. Furthermore, using a 3D printer allows for the formation of the gas diffusion section 144 (e.g., porous body 144a, lattice structure 144b) in a continuous manner with the formation of the valve body 110, simplifying the manufacturing process.

[0048] [Operation of semiconductor manufacturing equipment 1 and pressure regulating valve 100] The pressure regulating valve 100 and semiconductor manufacturing apparatus 1 according to this embodiment are basically configured as described above, and their operation will be explained below.

[0049] As shown in Figure 1, the semiconductor manufacturing apparatus 1 opens the gate valve 12 with the susceptor 20 lowered to the transport position, and uses a transport arm (not shown) to transport the substrate W into the processing container 10 via the input / output 11. Then, in the processing container 10, the substrate W is supported by support pins 27b, and after the transport arm is retracted, the support pins 27b are lowered to place the substrate W on the susceptor 20. Subsequently, the semiconductor manufacturing apparatus 1 raises the susceptor 20 to the processing position.

[0050] Subsequently, the semiconductor manufacturing apparatus 1 reduces the pressure inside the processing container 10 to a predetermined level by sucking out the gas inside the processing container 10 using the exhaust unit 50. After the pressure reduction, the semiconductor manufacturing apparatus 1 deposits a TiN film on the substrate W using an ALD process in which it supplies a raw material gas (TiCl4) and a reducing gas (NH3), which are the processing gases. For example, the semiconductor manufacturing apparatus 1 alternately repeats the process of supplying the raw material gas and the process of supplying the reducing gas to promote the reaction between the raw material gas and the reducing gas inside the processing container 10 and deposit a TiN film.

[0051] In this film deposition process, the pressure regulating valve 100 of the exhaust section 50 adjusts the opening of the flow path in the discharge path 51 (pipe 101) under the control of the control device 90. As a result, the semiconductor manufacturing apparatus 1 can appropriately maintain a predetermined pressure inside the processing container 10.

[0052] Furthermore, in the film deposition process, the processing container 10 generates by-products that do not contribute to film deposition due to the supply of multiple types of gases. The exhaust unit 50 sucks up these by-products by suctioning the gas. As a result, as shown in Figure 5(A), the by-products that have moved to the pressure regulating valve 100 via the discharge path 51 accumulate on the pressure regulating valve 100. In particular, because the pressure regulating valve 100 is positioned to face the through-hole 102 of the piping 101, by-products tend to accumulate easily, and it is difficult to remove the by-products from the pressure regulating valve 100 by simply adjusting the temperature of the discharge path 51. If by-products accumulate between the outermost edge of the valve body 110 and the inner circumferential surface 103 of the piping 101, it may affect the operation of the valve body 110. For example, if the semiconductor manufacturing apparatus 1 is operated for a long period of time, a large amount of by-products may accumulate, potentially causing the valve body 110 and the piping 101 to stick together.

[0053] Figure 5(B) shows that the purge gas discharge mechanism 140 of the pressure regulating valve 100 discharges purge gas from each outer projection 112, which is the outer circumference of the valve body 110, toward the side of the valve body 110 (radially outward: horizontal direction). As a result, the purge gas discharged from the valve body 110 can suppress the accumulation of by-products on the outer circumference of the valve body 110. By-products repelled from the valve body 110 by the purge gas are smoothly discharged to the waste section 53 based on the suction of the vacuum pump 52.

[0054] Furthermore, even if by-products accumulate between the valve body 110 and the piping 101, the discharge of purge gas can blow away the by-products, thus preventing them from affecting the operation of the valve body 110. In particular, the purge gas discharge mechanism 140 discharges purge gas over almost the entire circumference of the outermost edge of the valve body 110 via the gas diffusion section 144, so that by-products can be reliably removed regardless of where they accumulate on the outermost edge. The valve body side flow path 143 of the valve body 110 may also have a dedicated branch path 147 extending to blow purge gas onto areas where by-products tend to accumulate (for example, around the support shaft 120).

[0055] The semiconductor manufacturing apparatus 1 may continuously discharge purge gas from the purge gas discharge mechanism 140 during the film deposition process, or it may be configured to discharge purge gas only when supplying gases that generate byproducts. This makes it possible to suppress the amount of purge gas supplied. In addition, the semiconductor manufacturing apparatus 1 may discharge purge gas from the valve body 110 not only continuously but also intermittently. Alternatively, the semiconductor manufacturing apparatus 1 may be configured to discharge purge gas for a predetermined period during the final process after the film deposition process. This makes it possible to stop operation after removing the byproducts accumulated on the valve body 110.

[0056] It should be noted that the pressure regulating valve 100 according to this disclosure is not limited to the above-described embodiment and can be modified in various ways. For example, the valve body 110 may consist only of a base portion 111 without a pair of external protrusions 112. In this case, the branch path 147 of the valve body side flow path 143 should be configured to extend linearly along the radial direction within the base portion 111 and reach the outer edge of the base portion 111.

[0057] Below, we will explain some examples of modified versions of the pressure regulating valve 100.

[0058] [First variation] The pressure regulating valve 100A according to the first modified example shown in Figure 6 is equipped with a purge gas discharge mechanism 140A that discharges purge gas from the inner circumferential surface 103 of the pipe 101. This purge gas discharge mechanism 140A has a pipe discharge channel 149 that communicates with the pipe side channel 141 within the pipe 101 and extends along the circumferential direction of the pipe 101. In addition, on the inner circumferential surface 103 of the pipe 101, a plurality of discharge ports 149a are provided along the pipe discharge channel 149 at approximately the same height as the valve body 110, and communicate with the pipe discharge channel 149.

[0059] The pipe discharge channel 149 and discharge port 149a formed in this manner can suppress the adhesion of by-products to the valve body 110 by discharging the purge gas supplied from the purge gas supply unit 150 from the inner circumferential surface 103 toward the valve body 110. Furthermore, by discharging purge gas from the valve body 110 as well, the adhesion of by-products can be suppressed even more reliably.

[0060] [Second variation] The pressure regulating valve 100B, shown in Figure 7 as a second modified example, improves the sealing performance of the valve body 110 by using a sealing mechanism 160 to reduce the conductance of the discharged gas. Specifically, the sealing mechanism 160 has sealing members 161, such as O-rings, on the outer projections 112, which are the outer circumferences of the upper surface (primary side surface) and lower surface (secondary side surface) of the valve body 110. The sealing members 161 are arranged in an annular shape around the outer circumference of the valve body 110.

[0061] On the other hand, the piping 101 has a pair of inner flanges 162 that project inward from the inner circumferential surface 103. The pair of inner flanges 162 have an arc shape that extends along the circumferential direction of the valve body 110, excluding the support shaft 120. One of the pair of inner flanges 162 is formed above the position of the valve body 110 (primary position) in order to contact the sealing member 161 on the upper side of the valve body 110. The other of the pair of inner flanges 162 is formed below the position of the valve body 110 (secondary position) in order to contact the sealing member 161 on the lower side of the valve body 110. Note that the pressure regulating valve 100B may have the sealing member 161 on the inner flange 162 instead of the valve body 110.

[0062] The pressure regulating valve 100B, configured as described above, can minimize the gap in the flow path while the valve body 110 is blocking the flow path of the discharge path 51 (the through-hole 102 of the piping 101). Therefore, it becomes possible to more reliably block the discharge of gas from the processing container 10.

[0063] Furthermore, in this pressure regulating valve 100B, the purge gas discharge mechanism 140 can discharge purge gas, guiding it to the seal portion and suppressing the adhesion of by-products. Specifically, the valve body side passage 143 can guide purge gas between the seal member 161 and the inner flange 162 by discharging purge gas from the outermost radially outer edge of the valve body 110. Alternatively, the valve body side passage 143 may be configured to discharge purge gas from the inside of the seal member 161 toward the seal member 161, thereby suppressing the adhesion of by-products to the seal member 161.

[0064] [Third variation] The pressure regulating valve 100C, according to the third modified example shown in Figure 8, differs from the pressure regulating valves 100, 100A, and 100B described above in that it is equipped with a vibrator 170 on the outside of the piping 101 that vibrates the piping 101. The vibrator 170 is connected to a control device 90 and vibrates the piping 101 at appropriate timings under the control of the control device 90. In addition to the discharge of purge gas from the valve body 110 by the purge gas discharge mechanism 140, the pressure regulating valve 100C can further reduce the adhesion of by-products to the piping 101 around the valve body 110 by vibrating the piping 101.

[0065] The technical ideas and effects of this disclosure, as described in the embodiments above, are described below.

[0066] A first aspect of the present invention is a pressure regulating valve 100, 100A to 100C comprising a pipe 101, a valve body 110 disposed inside the pipe 101, and a support shaft 120 that rotatably supports the valve body 110, wherein the valve body 110 has a valve body-side passage 143 through which purge gas can flow inside the valve body 110, and a plurality of outlets 143b on the outer circumference of the valve body 110 that communicate with the valve body-side passage 143, and the support shaft 120 has a support shaft-side passage 142 for introducing purge gas into the valve body-side passage 143.

[0067] As described above, the pressure regulating valves 100, 100A to 100C can suppress the accumulation of material (by-products) on the valve body 110 and the surrounding piping 101 by discharging purge gas from the valve body 110. This increases the durability of the pressure regulating valves 100, 100A to 100C and enables the valve body 110 to operate continuously and stably.

[0068] Furthermore, the valve body 110 has an inlet 143a at its center that communicates with the support shaft side flow path 142, and the valve body side flow path 143 has a plurality of branch paths 147 that extend radially from the inlet 143a toward each of the plurality of outlets 143b. As a result, the valve body 110 can evenly distribute the purge gas through each branch path 147, and it is possible to discharge the purge gas from the entire outer circumference of the valve body 110.

[0069] Furthermore, the valve body 110 has multiple outlets 143b and an outer edge portion (outer projection 112) that discharges purge gas radially outward from the valve body 110. This prevents the pressure regulating valves 100, 100A to 100C from accumulating by-products between the valve body 110 and the piping 101, thereby hindering the operation of the valve body 110.

[0070] Furthermore, the valve body 110 has a gas diffusion section 144 that extends circumferentially around the valve body 110 and covers a plurality of outlets 143b. The gas diffusion section 144 diffuses the purge gas discharged from the plurality of outlets 143b circumferentially around the valve body 110, causing it to flow out to the outside of the valve body 110. As a result, the valve body 110 can further diffuse the purge gas along its circumferential direction and discharge it to the outside of the valve body 110.

[0071] Furthermore, the gas diffusion section 144 is a porous body 144a having multiple pores. By applying the porous body 144a in this way, the pressure regulating valves 100, 100A to 100C can easily diffuse the purge gas.

[0072] Alternatively, the gas diffusion section 144 may be a lattice structure 144b in which a grid is arranged periodically. By applying this lattice structure 144b, the pressure regulating valves 100, 100A to 100C can improve the reproducibility of purge gas diffusion.

[0073] Furthermore, the piping 101 has a pipe discharge channel 149 extending around the location of the valve body 110, and a plurality of discharge ports 149a that communicate with the pipe discharge channel 149 and discharge purge gas toward the valve body 110. This allows the pressure regulating valve 100C to more reliably suppress the adhesion of by-products to the piping 101 around the valve body 110.

[0074] Furthermore, the piping 101 has a plurality of inner flanges 162 that protrude radially inward from the inner surface, and the plurality of inner flanges 162 contact the primary side surface and the secondary side surface of the valve body 110, respectively, thereby sealing the primary and secondary sides of the valve body 110. As a result, the pressure regulating valve 100B can enhance the gas shutoff capability in the piping 101 while suppressing the adhesion of by-products.

[0075] Furthermore, the piping 101 is equipped with a vibrator 170 that vibrates the piping 101. As a result, the pressure regulating valve 100C can remove by-products adhering to the piping 101 by the vibration of the vibrator 170, thereby suppressing the accumulation of by-products on the piping 101 side.

[0076] Furthermore, a second aspect of the present disclosure is a semiconductor manufacturing apparatus 1 having a processing container 10, a gas supply unit 40 for supplying processing gas to the processing container 10, and a discharge path 51 for discharging gas from the processing container 10, wherein the discharge path 51 includes a pipe 101, a valve body 110 disposed inside the pipe 101, and a support shaft 120 that rotatably supports the valve body, and has pressure regulating valves 100, 100A to 100C configured to adjust the pressure by rotating the valve body 110, the valve body 110 has a valve body side passage 143 through which purge gas can flow inside the valve body 110, and has a plurality of outlets 143b on the outer circumference of the valve body 110 that communicate with the valve body side passage 143, and the support shaft 120 has a support shaft side passage 142 for introducing purge gas into the valve body side passage 143.

[0077] The pressure regulating valves 100, 100A to 100C and the semiconductor manufacturing apparatus 1 according to the embodiments disclosed herein are illustrative in all respects and are not limiting. The embodiments can be modified and improved in various ways without departing from the scope and spirit of the appended claims. The matters described in the above embodiments can be otherwise configured and combined in a non-consistent manner.

[0078] The semiconductor manufacturing apparatus 1 of this disclosure is applicable to any of the following types of apparatus: Atomic Layer Deposition (ALD) apparatus, Capacitively Coupled Plasma (CCP), Inductively Coupled Plasma (ICP), Radial Line Slot Antenna (RLSA), Electron Cyclotron Resonance Plasma (ECR), and Helicon Wave Plasma (HWP). [Explanation of Symbols]

[0079] 1. Semiconductor manufacturing equipment 100, 100A~100C Pressure Regulating Valve 101 Piping 110 Valve body 120 Spindle 142 Support shaft side flow path 143 Valve body side flow path 143b Exit

Claims

1. A pressure regulating valve comprising a pipe, a valve body disposed inside the pipe, and a support shaft that rotatably supports the valve body, configured to adjust pressure by rotating the valve body, The valve body has a valve body-side passage through which purge gas can flow, and has a plurality of outlets on its outer circumference that communicate with the valve body-side passage. The support shaft is equipped with a support shaft side passage for introducing the purge gas into the valve body side passage, The valve body has gas diffusion sections that extend in the circumferential direction of the valve body and cover a plurality of outlets, The gas diffusion section diffuses the purge gas discharged from the plurality of outlets in the circumferential direction of the valve body and causes it to flow out to the outside of the valve body. Pressure regulating valve.

2. The valve body has an inlet at its center that communicates with the support shaft side passage, The valve body side flow path has a plurality of branching paths that extend radially from the inlet toward each of the plurality of outlets. The pressure regulating valve according to claim 1.

3. The valve body has a plurality of outlets and an outer edge portion that discharges the purge gas radially outward from the valve body. A pressure regulating valve according to claim 1 or 2.

4. The gas diffusion section is a porous body having multiple pores. The pressure regulating valve according to claim 1.

5. The gas diffusion section has a lattice structure in which the grid is arranged periodically. The pressure regulating valve according to claim 1.

6. The aforementioned piping is A pipe discharge channel extending around the position where the valve body is located, It has a plurality of discharge ports that communicate with the aforementioned piping discharge channel and discharge the purge gas toward the valve body, A pressure regulating valve according to any one of claims 1 to 5.

7. The aforementioned piping has a plurality of inner flanges that protrude radially inward from the inner surface, The multiple inner flanges contact the primary side surface and the secondary side surface of the valve body, thereby sealing the primary and secondary sides of the valve body. A pressure regulating valve according to any one of claims 1 to 6.

8. The aforementioned piping is equipped with a vibrator that vibrates the piping. A pressure regulating valve according to any one of claims 1 to 7.

9. A semiconductor manufacturing apparatus comprising a processing container, a gas supply unit for supplying processing gas to the processing container, and a discharge path for discharging gas from the processing container, The discharge path includes a pipe, a valve body disposed inside the pipe, and a support shaft that rotatably supports the valve body, and has a pressure regulating valve configured to adjust the pressure by rotating the valve body. The valve body has a valve body-side passage through which purge gas can flow, and has a plurality of outlets on its outer circumference that communicate with the valve body-side passage. The support shaft is equipped with a support shaft side passage for introducing the purge gas into the valve body side passage, The valve body has gas diffusion sections that extend in the circumferential direction of the valve body and cover a plurality of outlets, The gas diffusion section diffuses the purge gas discharged from the plurality of outlets in the circumferential direction of the valve body and causes it to flow out to the outside of the valve body. Semiconductor manufacturing equipment.

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