Axial-cooled metal showerhead for high-temperature processes

Abstract

To provide an axially cooled metal showerhead for a high temperature process.SOLUTION: In a substrate processing system, a base portion 402 of a showerhead 400 (first and second components 500, 520) is made of a first metallic material, has a top surface 560 including a gas inlet and a buttom surface 562, and includes passages. A faceplate 404 is made of a second metallic material and includes side surfaces attached to a lower surface 562, a bottom surface 439 defining a plenum 405 together with the buttom surface 562, a vertical wall 416 that extends from the bottom surface upward through the plenum and is in contact with a second surface, and an outlet disposed along the vertical wall. A heater coil 422 is disposed in a groove 411 along the periphery of the base portion. A cooling plate 420 is disposed on the top surface and includes a conduit 424 for a coolant. Plates 430, 432 are made of a third material having a lower thermal conductivity than that of the first and second metallic materials and are disposed between the cooling plate and the base portion.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] Cross - Reference to Related Applications: This disclosure is a PCT international application of U.S. Patent Application No. 63 / 083,442, filed on September 25, 2020. The entire disclosure of the above application is incorporated herein by reference.

[0002] This disclosure generally relates to substrate processing systems, and more particularly to axially cooled metal showerheads for high - temperature processes.

Background Art

[0003] The description of the background art provided herein is for the purpose of generally presenting the context of the disclosure. Neither the research of the inventors whose names are listed at present in the scope described in this background art section, nor the aspects of the description that could not be regarded as prior art at the time of filing, are admitted as prior art to this disclosure, either explicitly or implicitly.

[0004] Atomic layer deposition (ALD) is a thin - film deposition method that sequentially performs vapor - phase chemical processes for depositing a thin film on the surface of a material (e.g., the surface of a substrate such as a semiconductor wafer). Most ALD reactions use at least two chemical substances called precursors (reactants), and these chemical substances react with the surface of the material with self - limiting sequentiality, one precursor at a time. By repeated exposure to separate precursors, a thin film is gradually deposited on the surface of the material.

[0005] Thermal ALD (T - ALD) is carried out in a heated processing chamber. The processing chamber is maintained at a pressure below atmospheric pressure using a vacuum pump and a controlled flow of inert gas. The substrate to be coated with the ALD film is placed inside the processing chamber and brought to equilibrium with the temperature of the processing chamber before starting the ALD process.

Summary of the Invention

[0006] The shower head comprises a base portion, a faceplate, a heater, a cooling plate, and a metal plate. The base portion is made of a first metal material and has a first surface including a gas inlet and a second surface opposite the first surface, and includes a plurality of passages that communicate fluidly with the gas inlet. The faceplate is made of a second metal material and has a side surface attached to the second surface of the base portion and a bottom surface. The side surface and bottom surface of the faceplate and the second surface of the base portion define a plenum that communicates fluidly with the plurality of passages. The faceplate includes a plurality of walls that extend upward from the bottom surface through the plenum and contact the second surface of the base portion. The bottom surface includes a plurality of outlets arranged along the plurality of walls and that communicate fluidly with the plenum. The heater is disposed in a groove along the perimeter of the base portion. The cooling plate is disposed on the first surface of the base portion and includes a conduit having an inlet for receiving a coolant and an outlet. The metal plate is made of a third metal material having a lower thermal conductivity than the first and second metal materials, and is placed between the cooling plate and the base portion of the shower head.

[0007] In other features, the outer diameter of the cooling plate and metal plate is less than or equal to the inner diameter of the groove.

[0008] Other features include the fact that the multiple walls are vertical and concentric.

[0009] Another characteristic is that the multiple walls have different heights.

[0010] Another characteristic is that the multiple walls have different widths.

[0011] Other features include the placement of walls and outlets within the faceplate area, and the outer diameters of the cooling plate and metal plate being less than or equal to the diameter of the area.

[0012] Other features include the placement of multiple walls and exits within the faceplate area, where the diameter of the area is less than or equal to the inner diameter of the groove.

[0013] In other features, the cooling plate and metal plate have a smaller diameter than the outer diameter of the base portion and faceplate.

[0014] In other respects, the first and second metallic materials are identical.

[0015] Other features include a base portion which includes a flange extending radially outward from the upper end of the base portion, and a shower head which further comprises a clamping ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange.

[0016] In other features, the metal plate includes one or more recesses on at least one of its top and bottom surfaces.

[0017] Another feature is that the showerhead further includes an additional non-metallic plate positioned between the metal plate and the base.

[0018] Another characteristic is that nonmetals have lower thermal conductivity than a third metallic material.

[0019] Another characteristic is that the outer diameter of the additional plate is less than or equal to the outer diameter of the metal plate.

[0020] Another characteristic is that the metal plate is thicker than the additional plate.

[0021] Another feature is that the faceplate is diffusion-bonded to the base portion.

[0022] Another feature is that the base and faceplate are covered with corrosion-resistant material.

[0023] In other features, the metal plate comprises a first layer having one or more recesses, a second flat layer, and a third layer having one or more recesses.

[0024] In other features, the first, second, and third layers are diffusely joined.

[0025] In other features, the recesses of the first layer and the third layer are aligned with each other.

[0026] In other features, the recesses of the first layer and the third layer partially overlap.

[0027] In other features, the recesses of the first layer and the third layer do not overlap.

[0028] In other features, the base portion includes a first and a second disc-shaped element and a cylindrical element. The first disc-shaped element includes a groove proximate to the outer diameter of the first disc-shaped element. The heater is disposed within the groove. The second disc-shaped element is disposed on the first disc-shaped element and has an outer diameter that is less than or equal to the inner diameter of the groove. The cylindrical element is disposed on the first disc-shaped element and has an inner diameter that is greater than or equal to the outer diameter of the groove.

[0029] In other features, the first disc-shaped element, the second disc-shaped element, and the cylindrical element are diffusion bonded.

[0030] In another feature, the groove extends perpendicularly from the upper surface of the first disc-shaped element toward the bottom surface of the first disc-shaped element.

[0031] In other features, the outer diameters of the bottoms of the first disc-shaped element, the second disc-shaped element, and the cylindrical element are equal.

[0032] In other features, the first disc-shaped element includes a slot at the center of the upper surface of the first disc-shaped element. The slot is in fluid communication with a gas inlet and includes a plurality of grooves extending radially from the slot. The passageway extends downward from the distal end of the groove to the bottom surface of the first disc-shaped element and extends through the bottom surface.

[0033] In other features, the upper end of the cylindrical element includes a flange extending radially outward, and the shower head further includes a clamping ring having a vertical portion disposed on the heater and a horizontal portion attached to the flange.

[0034] Other features include the inclusion of multiple grooves extending radially outward from the center of the faceplate.

[0035] Another feature is that the multiple grooves are of different lengths.

[0036] Other features include multiple walls that are perpendicular and concentric, and multiple grooves that intersect with the walls.

[0037] Other features include a faceplate with an annular recess along the outer diameter of the bottom surface, and a showerhead further comprising an edge ring positioned within the annular recess.

[0038] Other features include the processing chamber, which is equipped with a showerhead and a pedestal. The edge ring is located close to the outer edge of the upper surface of the pedestal.

[0039] Another feature is that the radially outward gas flow through the gap between the edge ring and the outer edge of the pedestal's upper surface prevents contaminants from the processing chamber from flowing through the gap towards the substrate placed on the pedestal during substrate processing.

[0040] Other features of the system include a showerhead, a gas distribution system for supplying process gas to the gas inlet, a fluid distribution system for supplying fluid to the conduits in the cooling plate, and a power supply for supplying power to the heater.

[0041] In other features, the system further includes controllers for controlling the gas distribution system, the fluid distribution system, and the power supply.

[0042] Further features include that the shower head comprises a base portion, a face plate, a cooling plate, a first metal plate, and a second plate. The base portion has a first surface including a gas inlet and a second surface opposite the first surface. The base portion includes a gas inlet and a plurality of passages communicating with fluid. The face plate has sides attached to the second surface of the base portion and a bottom surface including a plurality of outlets. The face plate includes a plurality of walls extending upward from the bottom surface and in contact with the second surface of the base portion. The cooling plate is positioned on the first surface of the base portion. The cooling plate includes a conduit having an inlet and an outlet for receiving a coolant. The first metal plate is positioned between the cooling plate and the base portion of the shower head. The first metal plate has a lower thermal conductivity than the face plate and the cooling plate. The second plate is positioned between the first metal plate and the base portion. The second plate is made of a nonmetal having a lower thermal conductivity than the first metal plate.

[0043] In another feature, the first metal plate comprises a first layer having one or more recesses, a second flat layer, and a third layer having one or more recesses.

[0044] In another feature, the base comprises a first disc-shaped element, a second disc-shaped element, and a cylindrical element. The first disc-shaped element includes a heater positioned in a groove adjacent to the outer diameter of the first disc-shaped element. The second disc-shaped element is positioned on the first disc-shaped element and has an outer diameter less than or equal to the inner diameter of the groove. The cylindrical element is positioned on the first disc-shaped element and has an inner diameter greater than or equal to the outer diameter of the groove. The bottom of the cylindrical element, as well as the outer diameters of the first and second disc-shaped elements, are equal.

[0045] In other features, the first disc-shaped element has a slot at the center of its upper surface. The slot is in fluid communication with a gas inlet and contains several grooves extending radially from the slot. The passage extends downward from the far end of the groove to the bottom surface of the first disc-shaped element and through the bottom surface.

[0046] Other features include the upper end of the cylindrical element, which includes a flange extending radially outward. The shower head further comprises a clamping ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange.

[0047] Other features include a faceplate containing multiple grooves extending radially outward from the center of the faceplate. The grooves are of varying lengths. The walls are perpendicular and concentric. The grooves intersect the walls. The faceplate contains an annular recess along the outer diameter of the bottom surface. The annular recess contains an edge ring, which allows for radially outward gas flow through the gap between the edge ring and the outer edge of the top surface of the pedestal.

[0048] Further features include a showerhead comprising a base, a faceplate, a heater, a cooling plate, and a plate. The base is made of a first metallic material. The base has a first surface including a gas inlet and a second surface opposite the first surface. The base includes a plurality of passages that communicate fluidly with the gas inlet. The faceplate is made of a second metallic material. The faceplate has sides attached to the second surface of the base and a bottom surface. The sides and bottom surface of the faceplate and the second surface of the base define a plenum that communicates fluidly with the plurality of passages. The faceplate includes a plurality of walls that extend upward from the bottom surface through the plenum and contact the second surface of the base. The bottom includes a plurality of outlets arranged along the walls that communicate fluidly with the plenum. The heater is disposed in a groove along the perimeter of the base. The cooling plate is placed on the first surface of the base. The cooling plate includes a conduit having an inlet and an outlet for receiving a coolant. The plate is made of a third material having a lower thermal conductivity than the first and second metallic materials. The plate is positioned between the cooling plate and the base portion of the showerhead.

[0049] In other features, the cooling plate and the outer diameter of the plate are less than or equal to the inner diameter of the groove.

[0050] Other features include: the multiple walls are vertical and concentric; the multiple walls have different heights; and the multiple walls have different widths.

[0051] Other features include the placement of multiple walls and outlets within the faceplate area. The cooling plate and the outer diameter of the plate are less than or equal to the diameter of the area. The diameter of the area is less than or equal to the inner diameter of the groove.

[0052] Other features include a base portion that includes a flange extending radially outward from the upper end of the base portion. The shower head further comprises a clamping ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange.

[0053] In other features, the third material includes a thermoplastic material. The showerhead further comprises an additional plate positioned between the plate and the cooling plate. The additional plate has a different thermal conductivity than the third material.

[0054] Other features include the fact that the first outer diameter of the additional plate is greater than or equal to the second outer diameter of the plate. The plate is thinner than the additional plate.

[0055] In other features, the third material includes a thermoplastic material. The plate comprises a first layer having one or more recesses, a second flat layer, and a third layer having one or more recesses.

[0056] In other features, the recesses of the first and third layers are aligned with each other, partially overlap, or do not overlap.

[0057] Other features include a base comprising a first disc-shaped element, a second disc-shaped element, and a cylindrical element. The first disc-shaped element includes a groove adjacent to the outer diameter of the first disc-shaped element. A heater is placed in the groove. The second disc-shaped element is placed on the first disc-shaped element and has an outer diameter less than or equal to the inner diameter of the groove. The cylindrical element is placed on the first disc-shaped element and has an inner diameter greater than or equal to the outer diameter of the groove. The outer diameters of the bottoms of the first disc-shaped element, the second disc-shaped element, and the cylindrical element are equal. The first disc-shaped element, the second disc-shaped element, and the cylindrical element are diffusion-bonded.

[0058] In other features, the first disc-shaped element has a slot at the center of its upper surface. The slot is in fluid communication with a gas inlet and contains several grooves extending radially from the slot. The passage extends downward from the far end of the groove to the bottom surface of the first disc-shaped element and through the bottom surface.

[0059] Other features include the upper end of the cylindrical element, which includes a flange extending radially outward. The shower head further comprises a clamping ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange.

[0060] Other features include the fact that the faceplate contains multiple grooves extending radially outward from the center of the faceplate. The grooves are of different lengths. The walls are perpendicular and concentric. The grooves intersect the walls.

[0061] Other features include the processing chamber comprising a showerhead and a pedestal. The faceplate includes an annular recess along the outer diameter of the bottom surface. The showerhead includes an edge ring disposed within the annular recess. The edge ring is close to the outer edge of the upper surface of the pedestal. The radially outward gas flow through the gap between the edge ring and the outer edge of the upper surface of the pedestal prevents contaminants from the processing chamber from flowing through the gap towards the substrate placed on the pedestal during substrate processing.

[0062] Further features include that the showerhead comprises a base portion, a faceplate, a cooling plate, and a plate. The base portion has a first surface including a gas inlet and a second surface opposite the first surface. The base portion includes a gas inlet and a plurality of passages communicating with fluid. The faceplate has sides attached to the second surface of the base portion and a bottom surface including a plurality of outlets. The faceplate includes a plurality of walls extending upward from the bottom surface and in contact with the second surface of the base portion. The cooling plate is positioned on the first surface of the base portion. The cooling plate includes a conduit having an inlet and an outlet for receiving a coolant. The plate has a lower thermal conductivity than the faceplate and the cooling plate. The plate is positioned between the cooling plate and the base portion of the showerhead.

[0063] In other features, the plate is made of a thermoplastic material. The plate comprises a first layer containing one or more recesses, a second flat layer, and a third layer containing one or more recesses.

[0064] Other features include a base comprising a first disc-shaped element, a second disc-shaped element, and a cylindrical element. The first disc-shaped element includes a heater positioned in a groove adjacent to the outer diameter of the first disc-shaped element. The second disc-shaped element is positioned on the first disc-shaped element and has an outer diameter less than or equal to the inner diameter of the groove. The cylindrical element is positioned on the first disc-shaped element and has an inner diameter greater than or equal to the outer diameter of the groove. The bottom of the cylindrical element, as well as the outer diameters of the first and second disc-shaped elements, are equal.

[0065] In other features, the first disc-shaped element has a slot at the center of its upper surface. The slot is in fluid communication with a gas inlet and contains several grooves extending radially from the slot. The passage extends downward from the far end of the groove to the bottom surface of the first disc-shaped element and through the bottom surface.

[0066] Other features include the upper end of the cylindrical element, which includes a flange extending radially outward. The shower head further comprises a clamping ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange.

[0067] Other features include: the faceplate contains multiple grooves extending radially outward from the center of the faceplate. The grooves are of different lengths. The walls are perpendicular and concentric. The grooves intersect the walls. The faceplate contains an annular recess along the outer diameter of the bottom surface. The annular recess contains an edge ring, which allows for radially outward gas flow through the gap between the edge ring and the outer edge of the top surface of the pedestal.

[0068] Further areas of applicability of this disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are for illustrative purposes only and are not intended to limit the scope of this disclosure.

[0069] This disclosure will be better understood from the detailed description and accompanying drawings. [Brief explanation of the drawing]

[0070] [Figure 1] This figure shows an example of a substrate processing system including a processing chamber.

[0071] [Figure 2] This is a diagram showing an example of a shower head.

[0072] [Figure 3] This figure shows an example of a shower head equipped with a faceplate having multiple vertical walls.

[0073] [Figure 4] This figure shows an example of a shower head equipped with a faceplate having multiple vertical walls and a heat chalk.

[0074] [Figure 5] Figure 4 shows the showerhead together with the pedestal.

[0075] [Figure 6] Figure 4 shows an example of a showerhead with a heat chalk.

[0076] [Figure 7] Figure 4 is a top view of the showerhead.

[0077] [Figure 8] Figure 4 is a bottom view of the showerhead.

[0078] [Figure 9A] This figure shows the showerhead in Figure 4 in more detail. [Figure 9B] This figure shows the showerhead in Figure 4 in more detail.

[0079] [Figure 10A] Figure 4 is an isometric view of the showerhead. [Figure 10B] Figure 4 is a side cross-sectional view of the showerhead.

[0080] [Figure 11A] Figure 4 is an isometric view of the showerhead faceplate. [Figure 11B] Figure 4 is an upper cross-sectional view of the showerhead's faceplate. [Modes for carrying out the invention]

[0081] In drawings, reference numbers may be reused to identify similar and / or identical elements.

[0082] Showerheads made of metals such as aluminum are generally not used for processes that run at relatively high pedestal temperatures because they generate a relatively large heat flow to the showerhead in processes that require a pedestal temperature of approximately 575–650 degrees Celsius. The heat flow to the showerhead is generally offset by a heat flux direction that drives radially from the central region to the edge region of the showerhead. At the edge region of the showerhead, thermal coupling occurs to the colder upper plate or sidewall of the processing chamber. This thermal coupling causes a temperature gradient within the metal showerhead (e.g., approximately 80–120 degrees Celsius). This temperature gradient, in turn, causes a relatively large temperature gradient within the substrate during processing, especially when the gap between the showerhead and the substrate is relatively small (e.g., in processes such as ALD), due to thermal coupling between the showerhead and the substrate.

[0083] In this disclosure, a heat flow path through a vertical plenum wall within the showerhead enhances the axial heat flow from the bottom to the top of the showerhead, resulting in a reduction of the radial temperature gradient across the showerhead. Specifically, instead of using an open plenum with a cavity in the center of the showerhead, the showerhead according to this disclosure uses spoke-like grooves (illustrated and described in detail below) in the faceplate of the showerhead to distribute the gas flow within the showerhead. The spoke-like grooves allow for the inclusion of a dual-purpose vertical wall within the plenum of the showerhead. In addition to distributing the gas flow within the showerhead, these walls also provide a heat flow path from the bottom to the top of the showerhead. The resulting axial heat flow path and axial temperature gradient within the showerhead significantly reduce the radial temperature range across the faceplate of the showerhead (for example, from approximately 150 degrees Celsius to approximately 30 degrees Celsius in some processes).

[0084] For additional thermal management, a combination of heating, cooling, and a thermal choke (described below) is used in the showerhead according to this disclosure. A cooling plate is positioned on the top surface of the showerhead and is designed to cool the central region of the showerhead while maintaining heating capacity at the edges of the showerhead for temperature control. A heater coil is positioned around the perimeter of the showerhead. A thermal choke is positioned between the cooling plate and the faceplate of the showerhead, as described below.

[0085] By heating, cooling, and thermal choke, the showerhead can be kept relatively cool (e.g., below 200 degrees Celsius) while maintaining a relatively small gap between the showerhead and the pedestal, allowing it to be used in processes running at high temperatures of around 650 degrees Celsius. Keeping the showerhead cool protects the corrosion-resistant coating applied to it. The thermal management provided by heating, cooling, and thermal choke prevents the showerhead from being damaged by the heat load from the pedestal while operating in such a reduced gap.

[0086] Furthermore, by reducing the gap between the showerhead and the pedestal, the volume of gas flowing through the showerhead can be significantly reduced by using grooves and walls for gas distribution in the showerhead instead of using a plenum with a cavity in the showerhead. Reducing the flow volume helps to reduce precursor consumption in the process, which reduces costs. The reduced flow volume allows the process gas to be purged more quickly, which shortens the duration between gas transitions and consequently reduces the cycle time in processes such as ALD. The reduced cycle time allows a larger number of substrates to be processed in the same amount of time, which increases throughput. These and other features of the showerhead according to this disclosure are described in detail below.

[0087] This disclosure is organized as follows: An example of a processing chamber in which the showerhead of this disclosure may be used is illustrated and described with reference to Figure 1. The problem solved by the showerhead of this disclosure is described with reference to Figure 2. An example of a showerhead of this disclosure that solves the problem is illustrated and described with reference to Figures 3 to 5. An example of a thermal chalk used in the showerhead of Figure 4 is illustrated and described with reference to Figure 6. A top view and a bottom view of the showerhead of Figure 4 are illustrated and described with reference to Figures 7 and 8, respectively. The showerhead of Figure 4 is illustrated and described in more detail with reference to Figures 9A to 11B.

[0088] Figure 1 shows an example of a substrate processing system 100 comprising a processing chamber 102 configured to process a substrate using thermal atomic layer deposition (T-ALD). The processing chamber 102 surrounds the other components of the substrate processing system 100. The processing chamber 102 includes a substrate support (e.g., a pedestal) 104. During processing, the substrate 106 is placed on the pedestal 104.

[0089] One or more heaters 108 (e.g., a heater array) may be disposed within a ceramic plate placed on a metal base plate of the pedestal 104 to heat the substrate 106 during processing. One or more additional heaters, called zone heaters or primary heaters (not shown), may be disposed within the ceramic plate above or below the heaters 108. Furthermore, a cooling system, not shown, may be disposed within the base plate of the pedestal 104, comprising cooling channels through which a coolant can flow to cool the pedestal 104, and one or more temperature sensors may be disposed within the pedestal 104 to detect the temperature of the pedestal 104.

[0090] The processing chamber 102 includes a gas distribution device 110, such as a showerhead, for introducing and distributing process gas into the processing chamber 102. The gas distribution device (hereinafter referred to as the showerhead) 110 is made of a metal or alloy such as aluminum. The showerhead 110 may include a stem portion 112, one end of which is connected to the upper surface of the processing chamber 102. The base portion 114 of the showerhead 110 is substantially cylindrical and extends radially outward from the opposite end of the stem portion 112 at a position spaced apart from the upper surface of the processing chamber 102.

[0091] The substrate-facing surface of the base portion 114 of the shower head 110 is provided with a faceplate (shown in a later figure). The faceplate is provided with a plurality of outlets or features (e.g., slots or through-holes) through which the precursor passes and flows into the processing chamber 102. The faceplate of the shower head 110 is illustrated and described in detail with reference to Figures 10A to 11B.

[0092] The showerhead 110 also includes a cooling plate and a heater (illustrated and described with reference to later figures). The cooling plate includes a conduit (see Figure 7) through which a coolant can circulate, as described below. Furthermore, although not illustrated, one or more temperature sensors may be disposed within the showerhead 110 to detect the temperature of the showerhead 110. The showerhead 110 also includes one or more thermal chokes and edge rings, which are illustrated and described in detail with reference to later figures.

[0093] The gas delivery system 130 comprises one or more gas sources 132-1, 132-2, ..., and 132-N (collectively, gas source 132), where N is an integer greater than 0. The gas source 132 is connected to a manifold 139 by valves 134-1, 134-2, ..., and 134-N (collectively, valve 134) and mass flow controllers 136-1, 136-2, ..., and 136-N (collectively, mass flow controller 136). The output of the manifold 139 is sent to the processing chamber 102. The gas source 132 can supply process gas, cleaning gas, purging gas, inert gas, etc., to the processing chamber 102.

[0094] A fluid delivery system 140 supplies coolant to the cooling system within the pedestal 104 and to the cooling plate within the showerhead 110. A temperature controller 150 may be connected to the heater 108, zone heater, cooling system, and temperature sensor within the pedestal 104. The temperature controller 150 may also be connected to the cooling plate, heater, and temperature sensor within the showerhead 110. The temperature controller 150 can control the power supplied to the heater 108 and zone heater, and the flow of coolant through the cooling system within the pedestal 104, in order to control the temperature of the pedestal 104 and the substrate 106. The temperature controller 150 may also control the power supplied to the heater located within the showerhead 110, and the flow of coolant through the conduit located within the cooling plate of the showerhead 110, in order to control the temperature of the showerhead 110.

[0095] A vacuum pump 158 maintains a pressure below atmospheric pressure inside the processing chamber 102 during substrate processing. A valve 156 is connected to the exhaust port of the processing chamber 102. The valve 156 and vacuum pump 158 are used to control the pressure inside the processing chamber 102 and to exhaust reactants from the processing chamber 102 via the valve 156. A system controller 160 controls the components of the substrate processing system 100.

[0096] Figure 2 shows a shower head 200 comprising a base portion 202 and a faceplate 204, the faceplate 204 being attached to the base portion 202 with a spatial offset from the bottom surface 203 of the base portion 202. The shower head 200 (i.e., both the base portion 202 and the faceplate 204) is made of a metal or alloy such as aluminum. In some examples, the base portion 202 and the faceplate 204 may be made of different metals or alloys.

[0097] The bottom surface 203 of the base portion 202 is non-planar. For example, the bottom surface 203 of the base portion 202 is substantially concave. The top surface 209 of the faceplate 204 is planar. The bottom surface 203 of the base portion 202 and the top surface 209 of the faceplate 204 define the plenum 206.

[0098] The upper surface 205 of the base portion 202 is substantially flat. The upper surface 205 includes a groove 207 adjacent to the outer diameter (OD) of the upper surface 205. The heater coil 212 is mounted in the groove 207 using a flat ring 223. The flat ring 223 is coplanar with the upper surface 205 of the base portion 202 and extends radially inward from the outer edge of the groove 207 toward the center of the base portion 202. The upper surface 205 extends radially outward from the OD of the groove 207 toward the OD of the upper surface 205, then vertically downward, and then radially inward toward the center of the base portion 202 to form the first flange 211.

[0099] The upper plate 213 of the processing chamber surrounds the base portion 202 and face plate 204 of the shower head 200. The upper plate 213 includes a flange 217 that extends radially inward from the inner diameter (ID) of the upper plate 213. The first flange 211 of the base portion 202 protrudes over the flange 217 of the upper plate 213. An O-ring 215 is disposed in a groove 219 within the flange 217.

[0100] The base portion 202 extends vertically upward from the bottom surface 203 at the OD of the base portion 202, then radially outward, and then vertically upward to the bottom of the first flange 211 to form the second flange 229. The second flange 229 has a smaller diameter than the first flange 211. The peripheral portion 231 of the faceplate 204 extends vertically upward from the OD of the faceplate 204 to the second flange 229. The faceplate 204 is attached to the base portion 202 at the second flange 229.

[0101] The shower head 200 has a stem portion 208. One end of the stem portion 208 is attached to the top of the processing chamber. The other end of the stem portion 208 is attached to the center of the upper region 237 of the base portion 202 using fasteners 221-1, 221-2. The stem portion 208 includes an inlet 210 for receiving one or more gases from the gas delivery system. The inlet 210 extends vertically downward into the plenum 206 through the stem portion 208 and through the center of the base portion 202. The gas flows from the inlet 210 into the plenum 206 and then through a number of holes 227-1, 227-2, 227-3, ..., and 227-N (collectively, through-holes 227), where N is an integer greater than 1, into the processing chamber.

[0102] A cooling plate 214 is positioned above the base portion 202. The cooling plate 214 is annular in shape, having an OD substantially equal to the OD of the base portion 202. The ID of the cooling plate 214 is substantially equal to the ID of the groove 207. The cooling plate 214 includes a conduit 225 through which coolant from the fluid delivery system flows. The conduit 225 is located within a groove 233 in the cooling plate 214. The cooling plate 214 provides cooling at the edge of the base portion 202.

[0103] When used in close proximity to a pedestal in processes requiring relatively high temperatures (e.g., ALD), the faceplate 204 of the showerhead 200 has a relatively large radial temperature gradient. For example, heat flows upward along the path indicated by the arrow, from the center of the faceplate 204 towards the OD of the faceplate 204 and toward the cooling plate 214. For example, in some processes, the temperature at the center of the faceplate 204 may be approximately 330 degrees Celsius, while the temperature at the edge of the faceplate 204 may be approximately 190 degrees Celsius (due to heat loss to the relatively cool upper plate 213 of the processing chamber), resulting in a radial temperature gradient across the faceplate 204 of approximately 140 degrees Celsius.

[0104] Figure 3 shows a shower head 300 positioned in close proximity to a pedestal 312 according to this disclosure. The shower head 300 includes a base portion 302 and a face plate 304. The shower head 300 (i.e., both the base portion 302 and the face plate 304) are made of a metal or alloy such as aluminum and are diffusion-bonded to each other. In some examples, the base portion 302 and the face plate 304 may be made of different metals or alloys.

[0105] The base portion 302 comprises two elements 302-1 and 302-2 (collectively, the base portion 302) diffusely bonded to each other. The first element 302-1 is cylindrical. The peripheral portion 333 of the first element 302-1 extends vertically upward and then radially outward to form a flange 307 along the OD of the first element 302-1. The top surface 301 of the first element 302-1 is substantially flat and includes a groove 311. The groove 311 is located close to the peripheral portion 333 of the first element 302-1. A heater coil 322 is mounted in the groove 311 using a flat ring 326. The flat ring 326 extends radially inward from the outer edge of the groove 311 toward the center of the first element 302-1. The second element 302-2 of the base portion 302 is a flat, disc-shaped element attached to the upper surface 309 of the first element 302-1. The second element 302-2 has an OD equal to the ID of the flat ring 326.

[0106] The shower head 300 differs in many respects from the shower head 200 shown in Figure 2. Firstly, the structure of the base portion 302 and faceplate 304 of the shower head 300 differs from the structure of the base portion 202 and faceplate 204 of the shower head 200 shown in Figure 2. Specifically, the bottom surface 203 of the base portion 202 of the shower head 200 is non-flat and has a spatial offset from the faceplate 204, whereas the bottom surface 303 of the base portion 302 of the shower head 300 is flat.

[0107] Secondly, the bottom surface 303 of the base portion 302 is in direct contact with the top surface 309 of the faceplate 304, and the top surface 309 is also planar. The base portion 302 and the faceplate 304 define a plenum 305 that is different from the plenum 206 of the showerhead 200. The reason why the plenum 305 of the showerhead 300 is different from the plenum 206 of the showerhead 300 is that the faceplate 304 of the showerhead 300, unlike the faceplate 204 of the showerhead 200, contains multiple vertical walls 316-1, 316-2, 316-3, ..., 316-N (collectively, vertical walls 316), where N is an integer greater than 1. The vertical walls 316 extend from the faceplate 304 to the base portion 302 through the plenum 305, but are not present in the plenum 206 of the showerhead 200.

[0108] The vertical wall 316 may have a uniform height or varying heights. The vertical wall 316 may have a uniform width or varying widths. Since the vertical wall 316 extends from the bottom of the faceplate 304 to the top surface 309 of the faceplate 304 and contacts the bottom surface 303 of the base portion 302, the vertical wall 316 provides a heat flow path from the bottom of the faceplate 304 to the base portion 302 along the vertical axis of the showerhead 300. Thus, the vertical wall 316 provides axial cooling of the showerhead 300. These heat flow paths and axial cooling provided by the vertical wall 316 help reduce the radial temperature gradient across the faceplate 304 of the showerhead 300.

[0109] Thirdly, the shower head 300 includes a cooling plate 320 that is different from the cooling plate 214 of the shower head. Specifically, unlike the cooling plate 214, which is annular and provides cooling only at the edges of the shower head 200, the cooling plate 320 is larger in size than the cooling plate 214 (having a larger surface area in contact with the shower head) and extends from the center of the shower head 300 (specifically from the stem portion described below) to the OD of the second element 302-2 of the base portion 302 of the shower head 300.

[0110] The cooling plate 320 is positioned on and attached to the second element 302-2 of the base portion 302. The cooling plate 320 includes a conduit 324 through which the coolant from the fluid delivery system flows. The conduit 324 is positioned within a groove 325 in the cooling plate 320. Heat flows from the bottom of the face plate 304, through the vertical wall 316, through the first and second elements 302-1, 302-2 of the base portion 302, to the cooling plate 320, as indicated by the vertical arrow. Thus, unlike the cooling plate 214 which cools the edges of the shower head 200, the cooling plate 320 cools the central area of ​​the shower head 300.

[0111] The upper plate 313 of the processing chamber surrounds the base portion 302 and face plate 304 of the shower head 300. The upper plate 313 includes a flange 317 that extends radially inward from the inner diameter (ID) of the upper plate 313. The flange 307 of the base portion 302 protrudes over the flange 317 of the upper plate 313. An O-ring 315 is disposed in a groove 319 within the flange 317.

[0112] The shower head 300 has a stem portion 308. One end of the stem portion 308 is attached to the top of the processing chamber. The other end of the stem portion 308 is attached to the center of the upper surface 335 of the second element 302-2 of the base portion 302. The stem portion 308 includes an inlet 310 for receiving one or more gases from the gas delivery system.

[0113] The inlet 310 extends vertically downward through the stem portion 308 and connects to the plenum 305 at the center of the base portion 302 via a slot (an example of which is shown in Figures 9A to 10B). The bottom surface 339 of the faceplate 304 includes a number of holes 327-1, 327-2, 327-3, ..., and 327-N (collectively, through-holes 327), where N is an integer greater than 1. The gas flows from the inlet 310 through the slot into the plenum 305 and then into the processing chamber through the number of holes 327 in the bottom surface 339 of the faceplate 304. The bottom surface 339 of the faceplate 304 is in very close proximity to the top surface 349 of the pedestal 312 located inside the processing chamber.

[0114] During processing, the substrate 341 is placed on the pedestal 312. The pedestal includes a ring 343 surrounding the upper surface 349 of the pedestal 312 to support the substrate 341. Although not shown, the pedestal 312 includes other features of the substrate support 110 described with reference to Figure 1.

[0115] As described below, by increasing the diameter of the cooling plate 320 and arranging the heater coil 322 in a different manner, the axial cooling of the showerhead 300 provided by the vertical wall 316 of the faceplate 304 can be improved, and the radial temperature gradient across the showerhead 300 can be further reduced. As described below, a thermal choke can be added to further improve thermal management and to further improve axial cooling and the radial temperature gradient across the showerhead.

[0116] Figures 4 and 5 show a shower head 400 according to the present disclosure. Figure 4 shows the shower head 400, and Figure 5 shows the shower head 400 positioned on a pedestal 312 according to the present disclosure. The shower head 400 includes a base portion 402, a face plate 404, and a flange portion 530. The shower head 400 (i.e., the base portion 402, the face plate 404, and the flange portion 530) are made of a metal or alloy such as aluminum and are diffusion-bonded to each other. In some examples, the base portion 402 and the face plate 404 may be made of different metals or alloys.

[0117] The showerhead 400 differs from the showerhead 300 in many respects. In addition to using a larger cooling plate and a different heater coil arrangement than the showerhead 300, the showerhead 400 also includes a thermal choke that is not present in the showerhead 300. These elements of the showerhead 400 are described in detail below.

[0118] The base portion 402 and the faceplate 404 are illustrated and described in more detail with reference to Figures 9A to 11B. Briefly, the base portion 402 comprises three components, namely a first component 500, a second component 520, and a third component 530, which are collectively referred to as the base portion 402. The first component 500 is a disc-shaped element having planar top and bottom surfaces 560, 562. The second component 520 is a flat disc-shaped element attached to the top surface 560 of the first component 500.

[0119] The third component 530 (which includes the flange 428 described below and is therefore referred to above as the flange portion 530) is a cylindrical element attached to the first component 500 at its OD. The OD of the bottom of the third component 530 attached to the first component 500 is equal to the OD of the first component 500. The third component 530 extends perpendicularly from the OD of the first component 500 and then radially outward to form the flange 428.

[0120] The upper surface 560 of the first component 500 includes a groove 411 adjacent to the OD of the first component 500. The heater coil 422 is mounted in the groove 411 using a clamping ring 564 having an inverted L-shape. The clamping ring 564 extends vertically upward from the top of the heater coil 422, then extends radially outward to form an inverted L-shape, and is attached to the flange 428. The base portion 402 is illustrated and described in more detail below with reference to Figures 9A and 9B.

[0121] The showerhead 400 differs in several respects from the showerhead 300 shown in Figure 3. Firstly, unlike the showerhead 300, where the flat ring 326 used to mount the heater coil 322 extends radially inward, the inverted L-shaped clamping ring 564 used to mount the heater coil 422 in the showerhead 400 extends vertically upward and then radially outward. This inverted L-shape of the clamping ring 564 allows the use of a cooling plate 420 with a larger diameter than the cooling plate 320 used in the showerhead 300. The OD of the cooling plate 420 is less than or equal to the ID of the groove 411 in which the heater coil 422 is mounted. The increased size (diameter) of the cooling plate 420 improves the axial cooling along the vertical axis of the showerhead 400 compared to the axial cooling provided by the cooling plate 320 for the showerhead 300. The improved axial cooling provided by the cooling plate 420 results in a further reduction of the radial temperature gradient across the faceplate 404 of the showerhead 400.

[0122] Secondly, unlike showerhead 300, showerhead 400 includes a thermal resistor formed by first and second plates 430, 432, each of which has a lower thermal conductivity than the metal or alloy used for the base portion 402 and faceplate 404. As will be described in more detail below, the first and second plates 430, 432 obstruct (i.e., slow down) the heat flow from faceplate 404 to cooling plate 420 in order to prevent the coolant in cooling plate 420 from boiling. Furthermore, as will be described in more detail below with reference to Figure 6, the first plate 430 includes a number of recesses 434-1, 432-2 (collectively, recess 434, shown in detail in Figure 6) that further increase the impedance of the thermal resistor formed by the first and second plates 430, 432.

[0123] The combination of the cooling plate 420, the heater coil 422, and the first and second plates 430 and 432 significantly improves thermal management in the shower head 400 by balancing heating and cooling compared to the shower head 300. The improved thermal management reduces the radial temperature gradient across the face plate 404 of the shower head 400. The reduced thermal stress on the shower head 400 allows the shower head 400 to be placed closer to the pedestal 312 than the shower head 300.

[0124] A smaller gap between the faceplate 404 and the pedestal 312 allows for a reduction in the process gas flow volume, which reduces costs. By reducing the process gas flow volume, smaller amounts of process gas can be purged more quickly, and transitions between process gases during the process cycle can occur more rapidly, resulting in a faster process cycle. This allows for processing a larger number of substrates in the same amount of time, resulting in higher throughput.

[0125] More specifically, the bottom surface 562 of the planar base portion 402 is in direct contact with the top surface 409 of the faceplate 404, which is also planar. The base portion 402 and the faceplate 404 define a plenum 405. The faceplate 404 of the showerhead 400 includes a number of vertical walls 416-1, 416-2, 416-3, ..., 416-N (collectively, vertical walls 416), where N is an integer greater than 1. The vertical walls 416 extend from the faceplate 404 to the base portion 402 through the plenum 405 and are in contact with the base portion 402.

[0126] The vertical wall 416 extends from the bottom of the faceplate 404 to the top surface 409 of the faceplate 404 and contacts the bottom surface 562 of the base portion 402, so the vertical wall 416 provides a heat flow path from the bottom of the faceplate 404 to the base portion 402 along the vertical axis of the showerhead 400. Thus, the vertical wall 416 provides axial cooling of the showerhead 400. The axial cooling provided by the vertical wall 416 helps to reduce the radial temperature gradient across the faceplate 404 of the showerhead 400 (for example, from about 150 degrees Celsius to about 30 degrees Celsius in some processes). The vertical wall 416 may have a uniform height or different heights. The vertical wall 416 may have a uniform width or different widths. The vertical wall 416 is illustrated and described in more detail with reference to Figures 10A to 11B.

[0127] The cooling plate 420 extends from the center of the shower head 400 (specifically, from the stem portion described below) to the OD of the second component 520 of the base portion 402 of the shower head 400. The cooling plate 420 is positioned on and attached to the first and second plates 430, 432. The cooling plate 420 includes conduits 424 through which coolant from the fluid delivery system flows. The conduits 424 are positioned within grooves 425 in the cooling plate 420. Heat flows from the bottom of the face plate 404 through the vertical wall 416, through the base portion 402 and the first and second plates 430, 432, to the cooling plate 420.

[0128] Because the cooling plate 420 of the shower head 400 has a larger diameter than the cooling plate 320 of the shower head 300, the cooling plate 420 covers and cools a larger area of ​​the base portion 402 than the area of ​​the base portion 302 covered and cooled by the cooling plate 320 of the shower head 300. Specifically, the cooling plate 420 cools most of the portion of the shower head 400 that extends from the center of the shower head 400 to the heater coil 422. Therefore, the cooling plate 420 significantly improves the axial cooling across the shower head 400 compared to the axial cooling provided by the cooling plate 320 in the shower head 300.

[0129] In Figure 5, the shower head 400 has a stem portion 408. One end of the stem portion 408 is attached to the top of the processing chamber. The other end of the stem portion 408 is attached to the center of the upper surface 435 of the second component 520 of the base portion 402 using fasteners 421-1, 421-2, through the first and second plates 430, 432. The stem portion 308 includes an inlet 410 for receiving one or more gases from the gas delivery system.

[0130] The inlet 410 extends vertically downward through the stem portion 408 and the first and second plates 430, 432 and the base portion 402, and connects to the plenum 405 via a slot 502 (further illustrated and described in detail in Figures 9A to 11B) at the center of the first component 500 of the base portion 402. The bottom surface 439 of the faceplate 404 includes a number of through-holes 427-1, 427-2, 427-3, ..., and 427-N (collectively, through-holes 427), where N is an integer greater than 1. The gas flows from the inlet 410 through the slot 502 into the plenum 405 and then into the processing chamber via the number of through-holes 427 in the bottom surface 439 of the faceplate 404. The bottom surface 439 of the faceplate 404 is in very close proximity to the top surface 349 of the pedestal 312 located inside the processing chamber.

[0131] During processing, the substrate 341 is placed on the pedestal 312. The pedestal 312 includes a ring 343 surrounding the upper surface 349 of the pedestal 312 to support the substrate 341. Although not shown, the pedestal 312 includes other features of the substrate support 110 described with reference to Figure 1.

[0132] The upper plate 313 of the processing chamber surrounds the base portion 402 and face plate 404 of the shower head 400. The upper plate 313 includes a flange 317 that extends radially inward from the ID of the upper plate 313. The flange 428 of the base portion 402 protrudes over the flange 317 of the upper plate 313. An O-ring 315 is disposed in a groove 319 within the flange 317.

[0133] The upper plate 313 of the processing chamber is cooler than the showerhead 400. As a result, the central region of the faceplate 404 is relatively hot due to the heat load from the pedestal 312, while the edges of the showerhead 400 lose heat to the upper plate 313 of the processing chamber. The heater coil 422 helps to offset the heat loss along the edges of the showerhead 400, and the cooling plate 420 cools the central region of the showerhead 400. The combination of heating and cooling reduces the radial temperature gradient from the center of the showerhead 400 to the OD.

[0134] The showerhead 400, specifically the base portion 402 and the faceplate 404, is coated with a corrosion-resistant material such as nickel. The emissivity of the corrosion-resistant material further reduces the temperature gradient across the showerhead 400. However, the coating can degrade (e.g., crystallize) above a threshold temperature (e.g., approximately 200 degrees Celsius for the nickel coating). To prevent the coating from degrading, the cooling plate 420 keeps the temperature of the showerhead 400 below the threshold temperature.

[0135] However, while the cooling plate 420 keeps the showerhead 400 below a threshold temperature, the coolant flowing through the conduit 424 may become hotter as heat flows from the faceplate 404 to the cooling plate 420, potentially losing its ability to provide cooling (i.e., cooling capacity). For example, if water is used as the coolant (other coolants may be used), the water boils at 100 degrees Celsius and may lose its cooling capacity. Since the temperature of the showerhead 400 can reach approximately 200 degrees Celsius, the temperature of the coolant must be kept well below the boiling point of the coolant (for example, well below 100 degrees Celsius if water is used as the coolant). This is achieved by using a thermal resistor (also called a thermal choke) comprising first and second plates 430, 432 interposed between the faceplate 404 and the cooling plate 420, which obstructs the heat flow from the faceplate 404 to the cooling plate 420, preventing the coolant from overheating and boiling.

[0136] Specifically, the shower head 400 comprises a first plate 430 and a second plate 432 disposed between the cooling plate 420 and the base portion 402 (more specifically, disposed between the cooling plate 320 and the second component 520 of the base portion 402), as shown in the figure. The first and second plates 430, 432, which form a thermal resistor (or thermal choke), are illustrated and described in more detail below with reference to Figure 6. In short, the first and second plates 430, 432 are made of materials having different thermal conductivity, each of which has a lower thermal conductivity than the metal or alloy that makes up the base portion 402 and the face plate 404. For example, if the base portion 402 and the face plate 404 are made of aluminum, the first plate 430 may be made of stainless steel, and the second plate 432 may be made of a non-metallic material (e.g., a semiconductor material). For example, the thermal conductivity of the first plate 430 is lower than that of the base portion 402 and the face plate 404, and higher than that of the second plate 432.

[0137] Therefore, the first and second plates 430 and 432 form a thermal resistance that gently obstructs (i.e., slows down) the heat flow from the faceplate 404 to the cooling plate 420 in order to prevent overheating of the coolant in the conduit 424. Specifically, the thermal resistance prevents the coolant from reaching its boiling point. The first plate 430 further includes a recess 434, which provides an air pocket that further increases the thermal resistance of the thermal resistance.

[0138] The showerhead 400 offers several advantages over showerheads with ceramic faceplates. Specifically, the showerhead 400 is made of one or more metals or alloys and has a higher thermal conductivity than showerheads with ceramic faceplates. For example, the thermal conductivity of aluminum is about 5 to 6 times higher than that of ceramic materials. The higher conductivity of the showerhead 400 reduces the temperature gradient across it. Also, while thermal stress can damage (e.g., fracture) a ceramic faceplate, thermal stress does not cause such catastrophic failure in the showerhead 400. Therefore, the showerhead 400 can be positioned closer to the pedestal 312 than a showerhead with a ceramic faceplate (see Figure 5).

[0139] Furthermore, as described above, the temperature gradient across the showerhead 400 is significantly reduced (for example, to about 30 degrees Celsius if the pedestal setting point is about 650 degrees Celsius) by the improved axial cooling provided by the base portion 402, the cooling plate 420, the heater coil 422, and the vertical walls 416 in the faceplate 404 that are in contact with the first and second plates 430, 432. Thus, the gap between the faceplate 404 and the pedestal 312 can be further reduced (see Figure 5). For example, gaps of about 0.2 inches, 0.15 inches, and 0.11 inches between the showerhead 400 and the pedestal 312 can be achieved without damaging the faceplate 404 while maintaining a radial temperature gradient across the showerhead 400 with the pedestal setting point at about 650 degrees Celsius at about 30 degrees Celsius.

[0140] Further reduction in the gap allows for a reduction in the amount of process gas used during substrate processing, which reduces costs. For example, the amount of process gas used in showerhead 200 shown in Figure 2 may be approximately 820 cc, while the amount of process gas used in showerhead 400 shown in Figure 4 may be approximately 530 cc. The significant reduction in the amount of gas used allows for rapid purging and transition, and therefore process cycles (e.g., ALD cycles) can be executed more quickly, which in turn increases throughput (i.e., more substrates can be processed in the same amount of time).

[0141] The showerhead 400 further comprises an edge ring 442, which helps prevent the diffusion of contaminants from the processing chamber back into a minute volume of process gas in the region between the faceplate 404 and the top of the pedestal 312. Specifically, the bottom surface 439 of the faceplate 404 includes an annular recess 440 along the OD of the faceplate 404. The edge ring 442 is disposed within the annular recess 440. During processing, diffusion of contaminants into a minute volume of process gas can be prevented if the velocity at which the process gas flows through the gap 444 between the edge ring 442 and the edge of the pedestal 312 is relatively high, independently of different process gas flows. A relatively high velocity of gas flow through the gap 444, independent of different process gas flows, can be provided as follows:

[0142] The gap 444 is defined by two parameters shown in Figure 5: h (i.e., the height of the gap 444), which is the distance between the bottom of the edge ring 442 and the top of the ring 343 at the edge of the pedestal 312; and L (approximately the distance between ID and OD of the ring 343 at the edge of the pedestal 312). The velocity at which the process gas flows through the gap 444 is a function of h, L, and the total gas flow used in the process. For example, the smaller the value of h, the higher the velocity of the gas flow in the gap 444.

[0143] The velocity of the gas before entering the gap 444 increases or decreases with the total gas flow used in the process. If the gas velocity before entering the gap 444 is low, the value of h needs to be smaller. Conversely, if the gas velocity before entering the gap 444 is high, the value of h can be higher. Therefore, different values ​​of h are required for different process gas flows in order to maintain a relatively high velocity within the gap 444. Different values ​​of h can be provided by using edge rings 442 of appropriate thickness for different processes without changing the distance between the faceplate 404 and the pedestal 312.

[0144] Figure 6 shows a thermal resistance body comprising first and second plates 430, 432 in more detail. The outer diameters of the first and second plates 430 are less than or equal to the OD of the second component 520 of the base portion 402. Although not shown, the first and second plates 430, 432 include holes aligned with various sets of holes shown in Figures 7 to 9B through which fasteners can be inserted to fasten the cooling plate 420 to the base portion 402.

[0145] The first plate 430 includes a plurality of recesses 434-1, 434-2, 434-3, ..., and 434-N (collectively, recesses 434), where N is an integer greater than 1. The recesses 434 may be located on at least one of the top and bottom surfaces of the first plate 430. The size, shape, and number of recesses 434 on the top surface of the first plate 430 may be such that approximately 65% ​​of the surface area of ​​the top surface of the first plate 430 is in contact with the bottom surface of the cooling plate 420. Similarly, the size, shape, and number of recesses 434 on the bottom surface of the first plate 430 may be such that approximately 65% ​​of the surface area of ​​the bottom surface of the first plate 430 is in contact with the top surface of the second plate 432. Other percentages may be used for the contact area between the top and bottom surfaces of the first plate 430. For example, the contact area between the top and bottom surfaces of the first plate 430 may vary between 50 and 80%. Furthermore, the contact areas of the top and bottom surfaces of the first plate 430 may be different (i.e., not equal).

[0146] The first and second plates 430 and 432 are made of a material having a relatively low thermal conductivity. The first plate 430 may have a higher thermal conductivity than the second plate 432. For example, the thermal conductivity of the first and second plates 430 and 432 may be approximately 15 watts per meter·Kelvin (W / mK) and 2 W / mK, respectively. The first and second plates 430 and 432 provide a thermal barrier against heat flowing from the face plate 404 to the cooling plate 420.

[0147] The second plate 432 provides a thermal barrier against heat flowing from the face plate 404 to the first plate 430, and the first plate 430 provides a thermal barrier against heat flowing from the second plate 432 to the cooling plate 420. The first and second plates 430 and 432 function as a thermal choke or thermal resistor in series with respect to each other. Thus, the second plate 432 and the first plate 430 present a gradually increasing thermal barrier or thermal resistance against heat flowing from the face plate 404 to the cooling plate 420.

[0148] The recesses 434 contain air pockets and are spaced apart across the entire first plate 430 on at least one of the top and bottom surfaces to further increase the thermal barrier. The stack of the first and second plates 430, 432 forms a thermal resistor that prevents the cooling plate 420 from conducting away a relatively large amount of heat from the showerhead 400, which allows the heater coil 422 to operate at a relatively high capacity. The thermal resistor prevents the coolant (e.g., water) in the conduit 424 from approaching its boiling point due to the heat flow.

[0149] Therefore, the cooling plate 420, the heater coil 422, and the thermal resistance body formed by the first and second plates 430 and 432 provide a balance between heating and cooling of the shower head 400, minimizing the temperature gradient across the shower head and protecting the corrosion-resistant coating on the shower head 400 by keeping the temperature of the shower head 400 below a threshold temperature (e.g., 200 degrees Celsius).

[0150] The first plate 430 may be manufactured as a monolithic plate. Alternatively, the first plate 430 may comprise three layers: two layers (an upper layer and a bottom layer) containing recesses 434 (in the form of indentations or slots cut through the layers), and a third layer that is flat (i.e., without recesses 434) and sandwiched between the two layers. The three layers may be joined to one another (e.g., brazing or diffusion bonding).

[0151] The recesses 434 can be positioned in many ways on at least one of the top and bottom surfaces of the first plate 430. A recess 434 on the top surface of the first plate 430 can be aligned with a recess 434 on the bottom surface of the first plate 430. Alternatively, a recess 434 on the top surface of the first plate 430 can be offset from a recess 434 on the bottom surface of the first plate 430. For example, a recess 434 on the top surface of the first plate 430 can overlap with at least one of the recesses 434 on the bottom surface of the first plate 430. Alternatively, none of the recesses 434 on the top surface of the first plate 430 may overlap with any of the recesses 434 on the bottom surface of the first plate 430.

[0152] The recesses 434 on the top and bottom surfaces of the first plate 430 can have any size, shape, and number, as long as the contact area between the top and bottom surfaces of the first plate 430 is as described above. For example, the recesses 434 on the top and bottom surfaces of the first plate 430 may be the same size and shape. Alternatively, the recesses 434 on the top surface of the first plate 430 may be different in size and / or shape from the recesses 434 on the bottom surface of the first plate 430. The recesses 434 may be arranged symmetrically or asymmetrically on the top and bottom surfaces of the first plate 430.

[0153] The number of recesses 434 may differ from that shown (for example, fewer or more). The top and bottom surfaces of the first plate 430 may have the same number of recesses 434. Alternatively, the top surface of the first plate 430 may have a different number of recesses 434 than the bottom surface of the first plate 430.

[0154] The depths of the recesses 434 may be the same or different. The recesses 434 on the top and bottom surfaces of the first plate may have the same depth. Alternatively, the recesses 434 on the top surface of the first plate 430 may have a first depth, and the recesses 434 on the bottom surface of the first plate 430 may have a second depth. The depth of the recesses 434 on the top surface of the first plate 430 may vary in a first pattern, and the depth of the recesses 434 on the bottom surface of the first plate 430 may vary in a second pattern. Any combination of the above modifications may be used.

[0155] The OD of the first and second plates 430 and 432 is less than or equal to the OD of the cooling plate 420 and less than or equal to the ID of the groove in the base portion 402 where the heater coil 422 is disposed. The thicknesses of the first and second plates 430 and 432 may vary depending on the process requirements. The first plate 430 may be thicker than the second plate 432.

[0156] In some applications, the second plate 432 may also include recesses on at least one of its top and bottom surfaces, and may include any of the modifications described above with reference to the first plate 430. There may also be additional possible substitutions and combinations between the recesses of the first and second plates 430, 432. In some applications, the second plate 432 may be made of a thermoplastic material (e.g., polyimide) and may include all of the structural features of the first plate 430 described above, and may be used independently (i.e., by itself instead of being used with the first plate 430). Alternatively, in some applications, the second plate 432 may be omitted, and the first plate 430 may be made of a thermoplastic material (e.g., polyimide).

[0157] Furthermore, although not shown, a third plate having a relatively low thermal conductivity may be used in addition to the first and second plates 430, 432. The third plate may be similar to either the first and second plates 430, 432, except that the thermal conductivity of the third plate may differ from that of the first and second plates 430, 432. The third plate may be positioned above, below, or between the first and second plates 430, 432. The thermal conductivity of the third plate may be selected based on its position. For example, a third plate positioned below the second plate 432 may have a lower thermal conductivity than the second plate 432. A third plate positioned above the first plate 430 may have a higher thermal conductivity than the first plate 430. A third plate positioned between the first and second plates 430, 432 may have a thermal conductivity smaller than that of the first plate 430 and larger than that of the second plate 432.

[0158] Figures 7 and 8 show the top and bottom views of the shower head 400, respectively. In Figure 7, a top view of the cooling plate 420 is visible. The cooling plate 420 is attached to the second component 520 of the base portion 402 by fasteners inserted into through-holes 431. Holes 409 are provided for inserting fasteners for attaching the stem portion 408 to the shower head 400. Various other sets of mounting holes / fastening holes 431-1, 431-2, and 431-3 are shown, through the first and second plates 430, into which fasteners can be inserted to fasten the cooling plate 420 to the base portion 402.

[0159] The upper horizontal portion of the clamping ring 564 shown in this figure is fastened to the lower vertical portion of the clamping ring 564, which is not visible in this figure (but is visible in Figures 4 and 5), by a fastener inserted through hole 433-1. The upper horizontal portion of the clamping ring 564 is fastened to the flange 428 of the base portion 402 by a fastener inserted through hole 433-2.

[0160] Elements 437-1 and 437-2 are the first and second terminals of the heater coil 422, which can be connected to a power source. Elements 429-1 and 429-2 are the inlet and outlet, respectively, of the conduit 424, which can be connected to a fluid delivery system.

[0161] The cooling plate 420 extends radially outward from the stem portion 408 (visible in Figure 5) toward the OD of the base portion 402. The conduit 424 is disposed within the corresponding groove 425 (visible in Figure 5) in the cooling plate 420. The number of turns of the conduit 424 may vary (i.e., more or fewer turns than those shown may be used). The diameter of the conduit 424 may be uniform over its entire length. The size, shape, and layout of the conduit 424 may be optimized to suit process requirements.

[0162] Alternatively, the cooling plate 420 may be divided into multiple zones, and multiple conduits may be arranged in these zones. For example, a first conduit may be arranged in a first zone comprising the inner half of the cooling plate 420, and a second conduit may be arranged in a second zone comprising the outer half of the cooling plate 420. Another example is that the first and second conduits may be arranged in first and second zones defined adjacent to the ID and OD of the cooling plate 420, respectively, and a third conduit may be arranged in a third zone between the first and second zones. Each of the multiple conduits may be supplied with the same coolant. Alternatively, at least one of the multiple conduits may be supplied with a different coolant than the others. When multiple conduits are used, each conduit may have any of the characteristics (size, shape, and layout) described above with reference to conduit 424.

[0163] Figure 8 shows a bottom view of the shower head 400, showing the substrate-facing side (i.e., bottom surface 439) of the faceplate 404. The through-hole 427 within the bottom surface 439 of the faceplate 404 is visible in this figure. The through-hole 427 is also visible in the additional views of the faceplate 404 shown in Figures 11A and 11B. The bottom of the edge ring 442 is also visible in this figure, which is illustrated and described in detail above with reference to Figures 4 and 5.

[0164] Figures 9A and 9B show the base portion 402 and faceplate 404 of the shower head 400 in more detail. Figure 9A shows an isometric view of the shower head 400. The first component 500 is not shown in detail in this figure (but is shown in more detail in Figure 9B). The second component 520 includes holes 409 and sets of 431-1, 431-2, and 431-3, which align with the corresponding sets of holes 409 and 431-1, 431-2, and 431-3 shown in Figure 7. The flange 428 includes hole 433-1 which aligns with hole 433-1 shown in Figure 7.

[0165] Figure 9B shows the first, second, and third components 500, 520, and 530 of the base portion 402 in more detail. The first component 500 of the base portion 402 is a first disc-shaped element including a groove 411 along the OD of the first component 500. The groove 411 opens on the top surface 560 of the first component 500 and extends vertically downward toward the bottom surface 562 of the first component 500.

[0166] The first component 500 includes a slot 502 at the center of its top surface 560. The slot 502 includes a plurality of grooves 504 extending radially outward from the center of the slot 502. A plurality of passages 506 extend vertically downward from the far ends of the grooves 504 to approximately the midpoint of the first component 500. As shown in 507, from approximately the midpoint, the passages 506 may split (i.e., branch) through the remainder of the first component 500 and open to the bottom surface 560 of the first component 500. Thus, the passages 506 may have an inverted "Y" shape as shown in 507, but other shapes (e.g., U-shape, V-shape, etc.) are also possible. The gas received through the inlet 410 enters the faceplate 404 through the slot 502 and the passages 506. The first component 500 includes holes 409 and sets of 431-1, 431-2, and 431-3, which align with the corresponding sets of holes 409 and 431-1, 431-2, and 431-3 of the second component 520, as well as the respective sets of holes shown in Figure 7.

[0167] The second component 520 of the base portion 402 is a second disc-shaped element. The OD of the second component 520 is less than or equal to the ID of the groove 411 in the first component 500. The second component 520 is positioned on the upper surface 560 of the first component 500 and is fastened or diffuse-bonded to the upper surface 560. The inlet 410 at the center of the second component 520 aligns with the slot 502 in the first component 500 and opens into the slot 502.

[0168] The third component 530 of the base portion 402 is a cylindrical element, which is also positioned on the first component 500 and fastened or diffusion-bonded to the first component 500. The upper end of the third component 530 extends radially outward to form a flange 428. The ID of the third component 530 is greater than or equal to the OD of the groove 411. The width or thickness of the third component 530 at its lower end is equal to the distance (or difference) between the OD of the groove 411 and the OD of the second component 520. The OD of the lower end of the third component 530, the OD of the second component 520, and the OD of the faceplate 404 are equal, as can be seen in Figures 4 and 5.

[0169] The second component 520 is positioned on the first component 500. The third component 530 is also positioned on the first component 500. The third component 530 surrounds the second component 520. The first, second, and third components 500, 520, and 530 can be joined to each other using diffusion bonding to form the base portion 402 of the shower head 400. Diffusion bonding eliminates the use of fillers, which are commonly used when brazing is used to join components. Eliminating fillers eliminates the possibility of contamination by residual fillers that tend to remain after brazing and subsequent cleaning.

[0170] The faceplate 404 includes vertical walls 416. For example, the vertical walls 416 may be concentric. As described above, the vertical walls 416 may have different heights and / or widths. When the faceplate 404 is attached to the base portion 402, the space between the vertical walls 416 and the bottom surface 562 of the first component 500 of the base portion 402 forms a plenum 405 within the faceplate 404. The passage 506 within the first component 500 of the base portion 402 opens into the plenum 405 within the faceplate 404 (also shown in Figures 10A and 10B).

[0171] The faceplate 404 includes multiple radially extending grooves 540-1, 540-2, 540-3, ..., 540-N (collectively, groove 540), where N is an integer greater than 1, and these are arranged like spokes of a wheel. The grooves 540 intersect with the vertical wall 416, dividing the vertical wall 416 into multiple sections. Multiple through-holes 427 (see Figures 8 and 11B) are located on both sides of the vertical wall 416 on the bottom surface 439 of the faceplate 404 (i.e., the substrate-facing surface, see Figure 8).

[0172] The vertical wall 416 and through-hole 427 are formed within a region of the faceplate 404 that extends from the center of the faceplate 404 to a predetermined radial distance from the center of the faceplate 404. The corresponding predetermined diameter of the region of the faceplate 404 defined by the predetermined radial distance aligns with the ID of the recess 440 in the bottom surface 439 of the faceplate 404 where the edge ring 442 is located (i.e., it is less than or equal to the ID of the recess 440). Thus, the predetermined diameter of the region of the faceplate 404 including the vertical wall 416 and through-hole 427 is less than or equal to the ID of the edge ring 442. The predetermined diameter is also less than or equal to the ID of the groove 411 in the base portion 402, as can be seen in Figures 4 and 5.

[0173] The vertical wall 416 and groove 540 uniformly distribute the gas received from the passage 506 in the first component 500 of the base portion 402 to the through hole 427. Furthermore, as described above with reference to Figures 4 and 5, the vertical wall 416 extends vertically upward from the faceplate 404 and contacts the bottom surface 562 of the base portion 402 (i.e., the bottom surface 562 of the first component 500 of the base portion 402), so the vertical wall 416 provides a heat path between the faceplate 404 and the base portion 402.

[0174] Figures 10A and 10B show isometric and cross-sectional views, respectively, of the showerhead 400, comprising the base portion 402 and the faceplate 404. The inlet 410 of the showerhead 400 receives process gas from a gas distribution system (e.g., element 130 shown in Figure 1). The process gas flows into the faceplate 404 through the inlet 410, slot 502, groove 504, and passage 506, and exits the faceplate 404 through the through-hole 427 into the processing chamber. The structural and functional details of the components of the showerhead 400, particularly the base portion 402 and the faceplate 404, have already been described in detail above with reference to Figures 4 to 9B, and will not be described again here for brevity.

[0175] Figures 11A and 11B show isometric and top views, respectively, of section AA of the faceplate 404 shown in Figure 10B. Figures 11A and 11B show a vertical wall 416, a groove 540, and through-holes 427 arranged around the vertical wall 416. As shown, the groove 540 may be arranged in a certain pattern. For example, as shown, the groove 540 may extend radially outward from the center of the faceplate 404 to the end of a predetermined diameter of the faceplate, with the vertical wall 416 and through-holes 427 arranged within the faceplate 404.

[0176] Alternatively, some of the grooves 540 may extend radially outward from the center of the faceplate 404, but not to the end of a given diameter. In another arrangement, some of the grooves 540 may not start from the center of the faceplate 404, nor may they extend radially outward to the end of a given diameter. For example, a first set of grooves 540 may start at a first distance from the center of the faceplate 404 and extend radially outward to the end or part of a given diameter, and a second set of grooves 540 may start at a second distance from the center of the faceplate 404 and extend radially outward to the end or part of a given diameter, and so on, where the second distance is different from the first distance.

[0177] In other words, the lengths and extents of the grooves 540 in the first set, the second set, etc., may be different (i.e., not equal). Thus, some of the vertical walls 416 may be located at the same radial distance from the center of the faceplate 404, but may have different arc lengths. Other patterns and arrangements of the vertical walls 416 and grooves 540 are also conceivable that may be suitable for distributing the gas received through the through-holes 427 from the inlet 410, slot 502, groove 504, and passage 506.

[0178] The above description is, by its very nature, illustrative and is not intended to limit the Disclosure, its applications, or uses. The broad teachings of this Disclosure may be carried out in various forms. Therefore, while this Disclosure includes certain examples, the true scope of this Disclosure should not be limited in this way, as other variations will become apparent by examining the drawings, specification, and appended claims.

[0179] It should be understood that one or more steps in the method may be performed in a different order (or concurrently) without altering the principles of the Disclosure. Furthermore, while each embodiment is described above as having specific features, one or more of those features described in relation to any embodiment of the Disclosure may be implemented in and / or combined with features of any other embodiment, even if the combination is not explicitly described. In other words, the described embodiments are not mutually exclusive, and substituting one or more embodiments for one another is within the scope of the Disclosure.

[0180] Spatial and functional relationships between elements (e.g., between modules, between circuit elements, between semiconductor layers, etc.) are described using a variety of terms, including “connected,” “engaged,” “joined,” “adjacent,” “proximity,” “above,” “above,” “below,” and “displaced.” Unless expressly stated to be “direct,” where a relationship between a first and second element is described in the above disclosure, that relationship may be a direct relationship in which no other intervening elements are present between the first and second elements, or an indirect relationship in which one or more intervening elements are present between the first and second elements (either spatially or functionally). Where used herein, the phrase “at least one of A, B, and C” should be interpreted as meaning a logical (A OR B OR C) using non-exclusive logic OR, and not as “at least one of A, at least one of B, and at least one of C.”

[0181] In some embodiments, the controller is part of the system and may be part of the examples described above. Such a system may comprise semiconductor processing equipment including one or more processing tools, one or more chambers, one or more processing platforms, and / or specific processing components (such as pedestals, gas flow systems, etc.). These systems may be integrated with electronic equipment to control their operation before, during, and after processing of semiconductor wafers or substrates. The electronic equipment may be called a “controller” and may control various components or parts of one or more systems.

[0182] Depending on the processing requirements and / or type of the system, the controller may be programmed to control any of the processes disclosed herein, including processing gas delivery, temperature setting (e.g., heating and / or cooling), pressure setting, vacuum setting, power setting, radio frequency (RF) generator setting, RF matching circuit setting, frequency setting, flow rate setting, fluid delivery setting, position and operation setting, and wafer transport between tools connected to or interfaced with a particular system and other transport tools and / or load locks.

[0183] Generally, a controller can be defined as an electronic device having various integrated circuits, logic, memory, and / or software that receive and issue instructions, control operations, enable cleaning operations, enable endpoint measurement, and so on. Integrated circuits may include chips in the form of firmware that store program instructions, chips defined as digital signal processors (DSPs), application-specific integrated circuits (ASICs), and / or one or more microprocessors or microcontrollers that execute program instructions (e.g., software).

[0184] Program instructions can be instructions communicated to a controller in the form of various separate settings (or program files) that define operating parameters for performing a specific process on or against a semiconductor wafer or against a system. In some embodiments, the operating parameters may be part of a recipe defined by a process engineer to perform one or more processing steps during the fabrication of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or dies of a wafer.

[0185] In some embodiments, the controller may be part of or coupled to a computer that is integrated into the system, coupled to the system, or otherwise networked to the system, or a combination thereof. For example, the controller may be in the “cloud” and may be all or part of a fab host computer system that can enable remote access to wafer processing. The computer may enable remote access to the system to monitor the current progress of a fabrication operation, examine the history of past fabrication operations, examine trends or performance metrics from multiple fabrication operations, change parameters of the current process, set processing steps following the current process, or start a new process.

[0186] In some examples, a remote computer (e.g., a server) may provide process recipes to the system over a network, which may include a local network or the internet. The remote computer may include a user interface that allows input or programming of parameters and / or settings, which are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data, which specifies parameters for each of the processing steps to be performed during one or more operations. It should be understood that the parameters may be specific to the type of process to be performed and the type of tool the controller is configured to interface with or control.

[0187] Therefore, as described above, the controllers may be distributed, for example, by comprising one or more individual controllers that are networked together and act toward common purposes such as the processes and controls described herein. An example of a distributed controller for such purposes is one or more integrated circuits on a chamber that communicate with one or more integrated circuits located remotely (at the platform level or as part of a remote computer, for example) and are combined to control the processes on the chamber.

[0188] Without limitation, exemplary systems may include plasma etching chambers or modules, deposition chambers or modules, spin rinse chambers or modules, metal plating chambers or modules, cleaning chambers or modules, bevel edge etching chambers or modules, physical vapor deposition (PVD) chambers or modules, chemical vapor deposition (CVD) chambers or modules, atomic layer deposition (ALD) chambers or modules, atomic layer etching (ALE) chambers or modules, ion implantation chambers or modules, track chambers or modules, and any other semiconductor processing systems that may be used in connection with or for the fabrication and / or manufacture of semiconductor wafers.

[0189] As described above, depending on one or more process steps to be performed by the tool, the controller may communicate with one or more of the following: other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, neighboring tools, tools located throughout the factory, a main computer, another controller, or tools used in material transport to carry wafer containers to and from tool locations and / or load ports in the semiconductor manufacturing plant. Furthermore, this disclosure can also be implemented in the following forms. [Form 1] It is a shower head, A base portion made of a first metal material, the base portion having a first surface including a gas inlet and a second surface facing the first surface, the base portion including a plurality of passages that fluidly communicate with the gas inlet, A faceplate made of a second metal material, the faceplate having a side surface attached to the second surface of the base portion, and a bottom surface, wherein the side surface and the bottom surface of the faceplate and the second surface of the base portion define a plenum that is in fluid communication with the plurality of passages, the faceplate includes a plurality of walls that extend upward from the bottom surface through the plenum and contact the second surface of the base portion, and the bottom surface includes a plurality of outlets arranged along the plurality of walls that are in fluid communication with the plenum, A heater is disposed in a groove along the periphery of the base portion, A cooling plate disposed on the first surface of the base portion, the cooling plate includes a conduit having an inlet and an outlet for receiving a coolant, A plate made of a third material having a lower thermal conductivity than the first metal material and the second metal material, and disposed between the cooling plate and the base portion of the shower head, A shower head equipped with [features / equipment]. [Form 2] A shower head according to Embodiment 1, wherein the cooling plate and the outer diameter of the plate are less than or equal to the inner diameter of the groove. [Form 3] A shower head as described in Form 1, The aforementioned multiple walls are vertical and concentric, The aforementioned multiple walls have different heights, The aforementioned multiple walls have showerheads of different widths. [Form 4] A shower head as described in Form 1, The plurality of walls and the outlet are arranged within the area of ​​the faceplate. The cooling plate and the outer diameter of the plate are less than or equal to the diameter of the region. A shower head in which the diameter of the region is less than or equal to the inner diameter of the groove. [Form 5] A shower head according to Embodiment 1, wherein the base portion includes a flange extending radially outward from the upper end of the base portion, and the shower head further comprises a tightening ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange. [Form 6] A shower head according to Embodiment 1, wherein the third material comprises a thermoplastic material, and the shower head further comprises an additional plate disposed between the plate and the cooling plate, wherein the additional plate has a different thermal conductivity from the third material. [Form 7] A shower head as described in Embodiment 6, The first outer diameter of the additional plate is greater than or equal to the second outer diameter of the plate. The aforementioned plate is thinner than the aforementioned additional plate, and is a shower head. [Form 8] A shower head according to Embodiment 1, wherein the third material includes a thermoplastic material, and the plate is A first layer including one or more recesses, The second layer is flat, A third layer including one or more recesses, A shower head equipped with [a specific feature]. [Form 9] A shower head as described in form 8, The recesses of the first layer and the third layer are aligned with each other. The recesses of the first layer and the third layer partially overlap, or The recesses of the first and third layers do not overlap in the shower head. [Form 10] The shower head according to Form 1, wherein the base portion is A first disc-shaped element comprising a groove adjacent to the outer diameter of the first disc-shaped element, wherein the heater is disposed within the groove and comprises the first disc-shaped element and A second disc-shaped element is placed on the first disc-shaped element and has an outer diameter less than or equal to the inner diameter of the groove, A cylindrical element is placed on the first disc-shaped element and has an inner diameter greater than or equal to the outer diameter of the groove, Equipped with, The outer diameters of the bottoms of the first disc-shaped element, the second disc-shaped element, and the cylindrical element are equal, The first disc-shaped element, the second disc-shaped element, and the cylindrical element are diffusion-bonded to a shower head. [Form 11] The shower head according to Embodiment 10, wherein the first disc-shaped element is The first disc-shaped element has a slot in the center of its upper surface, The slot is in fluid communication with the gas inlet and includes a plurality of grooves extending radially from the slot. The passage extends downward from the far end of the groove to the bottom surface of the first disc-shaped element and through the bottom surface, forming a showerhead. [Form 12] A shower head according to Embodiment 10, wherein the upper end of the cylindrical element includes a flange extending radially outward, and the shower head further comprises a tightening ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange. [Form 13] A shower head as described in Form 1, The faceplate includes a plurality of grooves extending radially outward from the center of the faceplate, The aforementioned multiple grooves are of different lengths. The aforementioned multiple walls are vertical and concentric, The showerhead has multiple grooves that intersect with the multiple walls. [Form 14] A processing chamber comprising a shower head and a pedestal as described in Embodiment 1, The faceplate includes an annular recess along the outer diameter of the bottom surface, The shower head includes an edge ring disposed within the annular recess, The edge ring is close to the outer edge of the upper surface of the pedestal, A processing chamber in which a radially outward gas flow through the gap between the edge ring and the outer edge of the upper surface of the pedestal prevents contaminants from the processing chamber from flowing through the gap toward the substrate placed on the pedestal during substrate processing. [Form 15] It is a shower head, A base portion having a first surface including a gas inlet and a second surface facing the first surface, wherein the base portion includes a plurality of passages that are in fluid communication with the gas inlet, A face plate having a side surface attached to the second surface of the base portion and a bottom surface including a plurality of outlets, wherein the face plate includes a plurality of walls extending upward from the bottom surface and in contact with the second surface of the base portion, A cooling plate disposed on the first surface of the base portion, the cooling plate includes a conduit having an inlet and an outlet for receiving a coolant, A plate having a lower thermal conductivity than the face plate and the cooling plate, and positioned between the cooling plate and the base portion of the shower head, A shower head equipped with [features / equipment]. [Form 16] A shower head according to Embodiment 15, wherein the plate is made of a thermoplastic material, and the plate is A first layer including one or more recesses, The second layer is flat, A third layer including one or more recesses, A shower head equipped with [a specific feature]. [Form 17] The shower head according to the form 15, wherein the base portion is A first disc-shaped element comprising a heater disposed in a groove adjacent to the outer diameter of the first disc-shaped element, A second disc-shaped element is positioned on the first disc-shaped element and has an outer diameter less than or equal to the inner diameter of the groove, A cylindrical element is placed on the first disc-shaped element and has an inner diameter greater than or equal to the outer diameter of the groove, Equipped with, The bottom of the cylindrical element and the outer diameters of the first and second disc-shaped elements are equal in the shower head. [Form 18] A shower head according to Embodiment 17, wherein the first disc-shaped element has a slot at the center of the upper surface of the first disc-shaped element, the slot is in fluid communication with the gas inlet and includes a plurality of grooves extending radially from the slot, the passage extending downward from the far end of the grooves to the bottom surface of the first disc-shaped element and through the bottom surface. [Form 19] A shower head according to Embodiment 17, wherein the upper end of the cylindrical element includes a flange extending radially outward, and the shower head further comprises a tightening ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange. [Form 20] A shower head according to form 15, wherein the face plate is A plurality of grooves extending radially outward from the center of the faceplate, wherein the plurality of grooves are of different lengths, the plurality of walls are perpendicular and concentric, and the plurality of grooves intersect with the plurality of walls, An annular recess along the outer diameter of the bottom surface, wherein the annular recess includes an edge ring, and the edge ring allows for radially outward gas flow through the gap between the edge ring and the outer edge of the upper surface of the pedestal. A showerhead, including the showerhead.

Claims

1. It is a shower head, A base portion having a first surface including a gas inlet and a second surface facing the first surface, and including a plurality of passages that are in fluid communication with the gas inlet, A face plate having a side surface attached to the second surface of the base portion and a bottom surface, wherein the side surface and the bottom surface of the face plate and the second surface of the base portion define a plenum that is in fluid communication with the plurality of passages, the face plate includes a plurality of walls that extend upward from the bottom surface through the plenum and contact the second surface of the base portion, and the bottom surface includes a plurality of outlets arranged along the plurality of walls that are in fluid communication with the plenum, A cooling plate disposed on the first surface of the base portion, comprising a conduit having an inlet and an outlet for receiving a coolant, A plate having a lower thermal conductivity than the base portion and the face plate, and positioned between the cooling plate and the base portion of the shower head, A shower head equipped with [features / equipment].

2. A shower head according to claim 1, The base portion is further provided with a heater disposed in a groove along the periphery of the base portion. A shower head in which the cooling plate and the outer diameter of the plate are less than or equal to the inner diameter of the groove.

3. A shower head according to claim 1, The aforementioned multiple walls are vertical and concentric, forming a showerhead.

4. A shower head according to claim 1, The aforementioned multiple walls are showerheads of different heights.

5. A shower head according to claim 1, The aforementioned multiple walls have showerheads of different widths.

6. A shower head according to claim 1, The plurality of walls and the plurality of exits are arranged within the area of ​​the faceplate. A shower head in which the cooling plate and the outer diameter of the plate are less than or equal to the diameter of the area.

7. A shower head according to claim 1, The base portion is further provided with a heater disposed in a groove along the periphery of the base portion. The plurality of walls and the plurality of exits are arranged within the area of ​​the faceplate. A shower head in which the diameter of the aforementioned region is less than or equal to the inner diameter of the groove.

8. A shower head according to claim 1, A shower head wherein the cooling plate and the plate have a diameter smaller than the outer diameter of the base portion and the face plate.

9. A shower head according to claim 1, A shower head in which the base portion and the faceplate are made of the same material.

10. A shower head according to claim 1, The base portion is further provided with a heater disposed in a groove along the periphery of the base portion. The shower head comprises a base portion including a flange extending radially outward from the upper end of the base portion, and the shower head further comprises a tightening ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange.

11. A shower head according to claim 1, The aforementioned plate is a shower head having one or more recesses on at least one of its top and bottom surfaces.

12. A shower head according to claim 1, A shower head further comprising an additional plate positioned between the aforementioned plate and the base portion.

13. A shower head according to claim 12, The shower head comprises an additional plate having a lower thermal conductivity than the plate.

14. A shower head according to claim 12, A shower head in which the outer diameter of the additional plate is less than or equal to the outer diameter of the plate.

15. A shower head according to claim 12, The aforementioned plate is thicker than the aforementioned additional plate, and is a shower head.

16. A shower head according to claim 1, The faceplate is diffusely bonded to the base portion, forming a shower head.

17. A shower head according to claim 1, A shower head in which the base portion and the face plate are covered with a corrosion-resistant material.

18. A shower head according to claim 1, The aforementioned plate is A first layer including one or more recesses, The second layer is flat, A third layer including one or more recesses, A shower head equipped with [a specific feature].

19. A shower head according to claim 18, The first layer, the second layer, and the third layer are diffusion-bonded to a shower head.

20. A shower head according to claim 18, The recesses of the first and third layers are aligned with each other in a shower head.

21. A shower head according to claim 18, The recesses of the first and third layers partially overlap in the shower head.

22. A shower head according to claim 18, The recesses of the first and third layers do not overlap in the shower head.

23. A shower head according to claim 1, The aforementioned base portion is A first disc-shaped element comprising a groove adjacent to the outer diameter of the first disc-shaped element, A heater placed in the groove, A second disc-shaped element is placed on the first disc-shaped element and has an outer diameter less than or equal to the inner diameter of the groove, A cylindrical element disposed on the first disc-shaped element and having an inner diameter greater than or equal to the outer diameter of the groove, A shower head equipped with [a specific feature].

24. A shower head according to claim 23, The first disc-shaped element, the second disc-shaped element, and the cylindrical element are diffusion-bonded to a shower head.

25. A shower head according to claim 23, The groove extends perpendicularly from the upper surface of the first disc-shaped element toward the bottom surface of the first disc-shaped element, forming a shower head.

26. A shower head according to claim 23, A shower head in which the outer diameters of the bottoms of the first disc-shaped element, the second disc-shaped element, and the cylindrical element are equal.

27. A shower head according to claim 23, The first disc-shaped element has a slot in the center of the upper surface of the first disc-shaped element, The slot is in fluid communication with the gas inlet and includes a plurality of grooves extending radially from the slot. The plurality of passages extend downward from the far end of the groove to the bottom surface of the first disc-shaped element and through the bottom surface, in a shower head.

28. A shower head according to claim 23, The upper end of the cylindrical element includes a flange extending radially outward, and the shower head further comprises a tightening ring having a vertical portion positioned on the heater and a horizontal portion attached to the flange.

29. A shower head according to claim 1, The shower head includes a faceplate with a plurality of grooves extending radially outward from the center of the faceplate.

30. A shower head according to claim 29, The shower head has multiple grooves of different lengths.

31. A shower head according to claim 29, The aforementioned multiple walls are vertical and concentric, The showerhead has multiple grooves that intersect with the multiple walls.

32. A shower head according to claim 1, The shower head comprises a face plate including an annular recess along the outer diameter of the bottom surface, and the shower head further comprises an edge ring disposed within the annular recess.

33. A processing chamber, The shower head according to claim 32, A pedestal, wherein the edge ring is close to the outer edge of the upper surface of the pedestal, A processing chamber equipped with the following:

34. A processing chamber according to claim 33, A processing chamber in which a radially outward gas flow through the gap between the edge ring and the outer edge of the upper surface of the pedestal prevents contaminants from the processing chamber from flowing through the gap toward the substrate placed on the pedestal during substrate processing.

35. It is a system, The shower head according to claim 1, A heater is disposed in a groove along the periphery of the base portion, A gas distribution system for supplying process gas to the aforementioned gas inlet, A fluid distribution system for supplying fluid to the conduits within the cooling plate, A power supply for supplying power to the aforementioned heater, A system that includes these features.

36. The system according to claim 35, A system further comprising a controller for controlling the gas distribution system, the fluid distribution system, and the power supply.

37. A shower head according to claim 1, A shower head comprising the base portion, the face plate, and the plate, all made of a metal material.

38. A shower head according to claim 12, A shower head comprising the base portion, the face plate, and the plate, which are made of metal material, and the additional plate, which is made of a non-metallic material.

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