Water-cooled jacket system and single-crystal furnace

Abstract

The present disclosure discloses a water-cooled jacket device and a single crystal furnace. The water-cooled jacket device includes a cylindrical body, and a regulating sleeve is provided at the bottom of the cylindrical body, which is connected to the inside of the cylindrical body. The regulating sleeve includes a first end connected to the cylindrical body and a second end opposite to the first end. From the first end to the second end, the regulating sleeve gradually reduces the cross-sectional area in the radial direction of the cylindrical body. The arrangement of the regulating sleeve prevents heat transfer from the bottom of the cylindrical body to the internal space of the water-cooled jacket, and effectively prevents bottom-up dissipation of heat. And the regulating sleeve gradually reduces the cross-sectional area in the radial direction of the cylindrical body, so that when the inert gas flow blows through the regulating sleeve from the top of the crystal pulling furnace, the flow rate increases, ensuring sufficient contact between the inert gas flow and the crystal rod, increasing the cooling rate of the crystal rod, and well adjusting the temperature gradient in the vertical and radial directions of the crystal rod, controlling the reaction rate of defects in the crystal rod, adjusting the defect distribution, and pulling different types of crystal rods.

Description

Technical Field

[0001] (Cross - reference to related applications) This disclosure claims priority based on Chinese Patent Application No. 202210544317.6 filed in China on May 18, 2022, and all of its contents are incorporated herein by reference. This disclosure relates to the technical field of manufacturing single - crystal silicon products, and particularly to a water - cooled jacket device and a single - crystal furnace.

Background Art

[0002] As the advanced processes of semiconductors continue to improve, the requirements for the quality of semiconductor wafers are becoming increasingly high. Regarding the quality of wafers, the crystal pulling process has a very significant impact on the core quality of wafers. For example, the quality such as oxygen content, bulk micro - defects (BMDs), stacking defects, crystal - originated particles (COPs), flow - pattern defects (FPDs), laser - scattering tomography defects (LTDs) of wafers are all closely related to the crystal pulling process.

[0003] The thermal history experienced during the growth process of the crystal rod greatly affects the overall quality of the crystal rod. The thermal history is mainly affected by the temperature gradients in the longitudinal and axial directions of the crystal rod, and the structural components of the crystal pulling furnace have a great impact on the temperature gradient. One of the very important components among them is the water - cooled jacket, which greatly changes the temperature gradients in the longitudinal and transverse directions of the crystal rod, increases the cooling rate of the crystal rod, and further affects the pulling speed of the crystal rod.

[0004] Among related technologies, water-cooled jackets are cylindrical, which greatly restricts temperature control in the axial and longitudinal directions of the crystal rod. This makes it difficult to control crystal defects in the crystal rod. For example, the limited control capacity prevents proper heat transfer to the center of the crystal rod, leading to the accumulation of excessive internal stress. As a result, dislocations occur, which significantly affects the quality of the crystal rod. In particular, when performing epitaxial deposition processes on epitaxial products, stacking faults lead to deposition non-uniformity and can even cause deposition failure. [Overview of the Initiative]

[0005] To solve the above technical problems, this disclosure provides a water-cooled jacket apparatus and a single-crystal furnace that solve the problem of limited temperature control in the axial and longitudinal directions of the crystal rod.

[0006] To achieve the above objective, the technical solutions relating to the embodiments of this disclosure are: A water-cooled jacket device comprising a cylindrical body, the bottom of which is provided an adjustment sleeve communicating with the interior of the cylindrical body, the adjustment sleeve having a first end connected to the cylindrical body and a second end opposite to the first end, the adjustment sleeve having a gradually decreasing radial cross-sectional area from the first end to the second end.

[0007] The inner surface of the adjustment sleeve is curved, as can be selected.

[0008] Selectively, the cross-sectional shape of the adjustment sleeve in the axial direction of the cylindrical body is parabolic.

[0009] Selectively, in the axial direction of the cylindrical body, the adjustment sleeve includes a first portion adjacent to the cylindrical body and a second portion adjacent to the first portion, the outer surface of the second portion being recessed to form a recess.

[0010] A heat-absorbing layer is provided on the inner surface of the adjustment sleeve, which can be selected as needed.

[0011] Selectively, the heat-absorbing layer includes a first layer adjacent to the adjustment sleeve and a second layer away from the adjustment sleeve, wherein the first layer is a transition layer formed by a chemical reaction between the graphite material and the inner wall of the adjustment sleeve.

[0012] Selectively, the first layer is a C+SiC composite transition coating layer, and the second layer is a SiC coating layer.

[0013] The thickness of the heat-absorbing layer is optionally 130 ± 15 microns.

[0014] A thermal insulation layer is provided on the outer surface of the adjustment sleeve, as selectable.

[0015] The thermal insulation layer optionally includes a third layer adjacent to the adjustment sleeve and a fourth layer away from the adjustment sleeve, wherein the third layer is a transition layer formed by a chemical reaction between the graphite material and the outer wall of the adjustment sleeve.

[0016] Selectively, the third layer is a C+SiC composite transition coating layer, and the fourth layer is a SiC coating layer.

[0017] The thickness of the thermal insulation layer is optionally 160 ± 15 microns.

[0018] Selectively, the cylindrical body includes an inner cylinder and an outer cylinder located outside the inner cylinder, the bottom of which includes a first region for supporting the inner cylinder and a second region adjacent to the first region, the first region being positioned close to the side wall of the outer cylinder, and a flange being provided on the upper part of the adjustment sleeve, the flange being connected to the second region.

[0019] The embodiments of this disclosure further provide a single crystal furnace including the water-cooled jacket device described above.

[0020] The present disclosure has the following beneficial effects. Due to the arrangement of the adjusting sleeve, heat transfer from below the cylindrical body to the internal space of the water-cooled jacket is prevented, effectively blocking the bottom-up dissipation of heat. And the adjusting sleeve is such that the cross-sectional area in the radial direction of the cylindrical body gradually decreases. When an inert gas flow blows and flows through the adjusting sleeve from above the crystal pulling furnace, the flow velocity increases, ensuring sufficient contact between the inert gas flow and the crystal rod, increasing the cooling rate of the crystal rod, well adjusting the temperature gradients in the longitudinal and radial directions of the crystal rod, controlling the reaction rate of defects in the crystal rod, adjusting the defect distribution, and enabling the pulling of different types of crystal rods.

Brief Description of the Drawings

[0021] [Figure 1] It is a schematic structural view of the water-cooled jacket device in an embodiment of the present disclosure. [Figure 2] It is a schematic structural view of the adjusting sleeve in an embodiment of the present disclosure. [Figure 3] It is a schematic structural view of the inner cylinder in an embodiment of the present disclosure. [Figure 4] It is a schematic structural view of the outer cylinder in an embodiment of the present disclosure. [Figure 5] It is a schematic structural view of the lifting lever in an embodiment of the present disclosure (Part One). [Figure 6] It is a schematic structural view of the lifting lever in an embodiment of the present disclosure (Part Two). [Figure 7] It is a schematic structural view of the connection part in an embodiment of the present disclosure.

Modes for Carrying Out the Invention

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present disclosure clearer, the following will clearly and completely describe the technical solutions of the embodiments of the present disclosure in relation to the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are only some, rather than all, of the embodiments of the present disclosure. Based on the described embodiments of the present disclosure, all other embodiments obtained by those skilled in the art belong to the protection scope of the present disclosure.

[0023] In the description of the present disclosure, the orientation and positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientation and positional relationships shown in the drawings, and are merely for facilitating the description of the present disclosure and simplifying the description, and do not indicate or imply that the specified device or element must have a specific orientation and be configured and operated in a specific orientation, so it cannot be understood as a limitation to the present disclosure. Furthermore, the terms "first", "second", "third" are used only for the purpose of description and are not understood to indicate or imply relative importance.

[0024] As shown in FIGS. 1 and 2, this embodiment provides a water-cooled jacket device, which includes a cylindrical main body. At the bottom of the cylindrical main body, an adjustment sleeve 6 communicating with the inside of the cylindrical main body is provided. The adjustment sleeve 6 includes a first end connected to the cylindrical main body and a second end facing the first end. From the first end to the second end, the cross-sectional area of the adjustment sleeve 6 in the radial direction of the cylindrical main body gradually decreases.

[0025] Due to the arrangement of the adjustment sleeve 6, heat transfer from below the cylindrical main body to the internal space of the water-cooled jacket is prevented, and bottom-up dissipation of heat is effectively blocked. And the adjustment sleeve 6 has a gradually decreasing cross-sectional area in the radial direction of the cylindrical main body. When an inert gas flow blows through the adjustment sleeve from above the crystal pulling furnace, the flow velocity increases, ensuring sufficient contact between the inert gas flow and the crystal rod, increasing the cooling rate of the crystal rod, well adjusting the temperature gradient in the longitudinal and radial directions of the crystal rod, controlling the reaction rate of defects in the crystal rod, adjusting the defect distribution, and enabling different types of crystal rods to be pulled up.

[0026] Exemplarily, the inner surface of the adjustment sleeve 6 is a curved surface.

[0027] Exemplarily, the shape of the cross-section of the adjustment sleeve 6 in the axial direction of the cylindrical main body is a parabolic shape.

[0028] For example, in the axial direction of the cylindrical body, the adjustment sleeve 6 includes a first portion adjacent to the cylindrical body and a second portion adjacent to the first portion, the outer surface of the second portion being recessed to form a recess 61.

[0029] The water-cooling jacket is located above the crucible, and the arrangement of the recess 61 directs and reflects the heat from below onto the surface of the graphite member or molten silicon below the water-cooling jacket, thereby maintaining stability in the downward temperature field.

[0030] For example, a heat-absorbing layer is provided on the inner surface of the adjustment sleeve 6.

[0031] The heat-absorbing layer has an endothermic effect, the bonding strength between the heat-absorbing layer and the adjustment sleeve 6 is high, and the thermal stress at the heat-absorbing layer interface (the connection surface between the heat-absorbing layer and the adjustment sleeve 6) can be effectively relieved, resulting in stable thermodynamic performance. The adjustment sleeve 6 can effectively remove the amount of heat transferred by the crystal rod in real time, significantly improving the cooling rate of the crystal rod, increasing the pulling speed, and increasing the crystal pulling efficiency.

[0032] Exemplary, the heat-absorbing layer includes a first layer adjacent to the adjustment sleeve 6 and a second layer away from the adjustment sleeve, wherein the first layer is a transition layer formed by a chemical reaction between the graphite material and the inner wall of the adjustment sleeve 6.

[0033] The material of the adjustment sleeve is a carbon fiber composite material, the first layer being a C+SiC composite transition coating layer (thickness 80±10 microns), and the second layer being a SiC coating layer (thickness 50±5 microns). This coating layer structure (the bonding method between the heat-absorbing layer and the adjustment sleeve) has properties such as high bonding strength and high induced density. It can protect the matrix and extend its lifespan.

[0034] For example, the thickness of the heat-absorbing layer is 130 ± 15 microns.

[0035] For example, an insulating layer is provided on the outer surface of the adjustment sleeve 6.

[0036] The aforementioned heat-insulating layer has the effect of heat reflection and heat shielding, preventing external heat from being transferred from the adjustment sleeve 6 to the inside of the water-cooled jacket, and maintaining a constant temperature inside the water-cooled jacket.

[0037] Exemplary, the thermal insulation layer includes a third layer adjacent to the adjustment sleeve 6 and a fourth layer separated from the adjustment sleeve, wherein the third layer is a transition layer formed by a chemical reaction between the graphite material and the outer wall of the adjustment sleeve.

[0038] The material of the adjustment sleeve is a carbon fiber composite material, the third layer is a C+SiC composite transition coating layer (thickness 80±10 microns), and the fourth layer is a SiC coating layer (thickness 50±5 microns). This coating layer structure (the bonding method between the heat insulating layer and the adjustment sleeve) has properties such as high bonding strength and high induced density. It can protect the matrix and extend its lifespan.

[0039] For example, the thickness of the thermal insulation layer is 160 ± 15 microns.

[0040] Exemplary, the cylindrical body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2, the bottom of the outer cylinder 1 includes a first region for supporting the inner cylinder and a second region adjacent to the first region, the first region being provided close to the side wall of the outer cylinder 1, and a flange (third flange 62) is provided on the upper part of the adjustment sleeve 6, the flange being connected to the second region.

[0041] As shown in Figures 1, 3, and 4, the inner cylinder 2 has an inverse tapered structure, as an example.

[0042] Compared to a single straight-cylinder structure, this embodiment employs a double-walled structure of a sleeved inner cylinder and an outer cylinder, the outer cylinder adopting a straight-cylinder structure and serving to insulate against heat, and the inner cylinder adopting an inverse tapered structure, which enables the effect of vertical gradient water cooling, and the temperature gradient of the crystal rod in the vertical direction (i.e., the axial direction of the crystal rod) exhibits a gradient change (the lower end is hotter and the upper end is colder, with one end close to the silicon molten liquid being the lower end and the other end away from the silicon molten liquid being the upper end), so the heat of the crystal rod is mainly transferred to an object with a lower ambient temperature by radiation, and the intensity of radiative heat transfer is The radiative heat transfer is inversely proportional to the cube of the distance, meaning that the closer the distance, the stronger the radiative heat transfer becomes, and correspondingly the water cooling effect improves. The inner cylinder has an inverse tapered shape, and the distance between the inner wall of the inner cylinder and the crystal rod in the radial direction of the crystal rod changes in a gradient along the longitudinal direction, enabling a gradient water cooling effect, or longitudinal asymmetric effect. This achieves a gradient change in temperature in the radial and axial directions, significantly increasing heat dissipation in the axial and radial directions of the crystal rod, reducing internal heat accumulation, changing the thermal history of the crystal rod, reducing the occurrence of dislocations and other crystal defects, and improving the quality of the crystal rod. Depending on the requirements of the pulling process, the inclination angle of the inner wall of the inner cylinder can be adjusted, allowing for significant adjustment of the longitudinal (i.e., axial) and radial temperature gradients of the crystal rod, thereby controlling the reaction rate of defects in the crystal rod and adjusting the defect distribution.

[0043] For example, the inner diameter of the upper part of the inner cylinder is 450 mm, and the inner diameter of the lower part of the inner cylinder is 390 mm, but it is not limited to these dimensions.

[0044] A second flange 22 is provided on the upper part of the inner cylinder, and a first flange 11 is provided on the upper part of the outer cylinder. A stepped groove 13 is provided on the side of the first flange 11 that is close to the inner cylinder, and the second flange 22 is stretched across the stepped groove 13.

[0045] The first surface of the second flange 22 that is separated from the bottom of the inner cylinder and the second surface of the first flange 11 that is separated from the bottom of the inner cylinder are located on the same plane.

[0046] The bottom of the inner cylinder has a first through hole, and the bottom of the outer cylinder has a second through hole 12. The orthogonal projection of the center of the first through hole onto the bottom of the outer cylinder 1 coincides with the center of the second through hole 12.

[0047] For example, the edge of the second through hole 12 has an annular projection 14 that protrudes toward the upper part of the outer cylinder 1, and the annular projection 14 functions as a wall to stop the inner cylinder 2.

[0048] As an example, a toothed corrugated structure 21 is provided on the inner wall of the inner cylinder 2 along the axial direction of the inner cylinder 2.

[0049] The arrangement of the toothed corrugated structure 21 increases the surface area of ​​the inner wall of the inner cylinder, that is, it increases the heat absorption area of ​​the water cooling jacket. Compared to a smooth surface, such a surface has a better heat absorption effect and a good cooling crystal rod effect.

[0050] The toothed corrugated structure 21 includes a plurality of annular teeth extending in the circumferential direction of the inner cylinder 2, the plurality of annular teeth being arranged along the axial direction of the inner cylinder 2, and the cross-sectional shape of a single annular tooth may be triangular, trapezoidal, arc-shaped, etc.

[0051] For example, the thickness of the toothed corrugated structure 21 in the radial direction of the inner cylinder 2 gradually increases in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2.

[0052] For example, a heat-absorbing coating layer is provided on the inner wall of the inner cylinder 2.

[0053] The heat-absorbing coating layer is provided on the side of the toothed corrugated structure 21 that is away from the outer cylinder 1, and the shape of the heat-absorbing coating layer matches the shape of the toothed corrugated structure 21. In other words, both the connection surface between the heat-absorbing coating layer and the inner cylinder 2, and the inner surface provided opposite the connection surface, are toothed corrugated structures 21.

[0054] The heat-absorbing coating layer has a heat-absorbing effect, and the bonding strength between the heat-absorbing coating layer and the inner cylinder 2 is high. This effectively relieves thermal stress at the heat-absorbing coating layer interface (the connection surface between the heat-absorbing coating layer and the inner cylinder 2), resulting in stable thermodynamic performance. The inner cylinder 2 can effectively remove the heat transferred by the crystal rod in real time, significantly improving the cooling rate of the crystal rod, increasing the pulling speed, and increasing the crystal pulling efficiency.

[0055] For example, the thickness of the heat-absorbing coating layer in the radial direction of the inner cylinder 2 gradually increases from the top of the inner cylinder 2 to the bottom of the inner cylinder 2.

[0056] For example, the heat-absorbing coating layer is made of ceramic, but is not limited to ceramic.

[0057] For example, the thickness of the heat-absorbing coating layer is 200 ± 25 microns.

[0058] For example, the outer wall of the inner cylinder 2 and / or the inner wall of the outer cylinder 1 are provided with a heat insulating coating layer.

[0059] The aforementioned heat-insulating coating layer has the effect of heat reflection and heat shielding, preventing external heat from being transferred from the outer cylinder 1 to the inside of the water-cooling jacket (i.e., the inside of the inner cylinder 2), and maintaining a constant temperature inside the water-cooling jacket.

[0060] For example, a heat insulating coating layer is provided on the outer wall of the inner cylinder 2, and the thickness of the heat insulating coating layer in the radial direction of the inner cylinder 2 gradually increases from the top of the inner cylinder 2 to the bottom of the inner cylinder 2.

[0061] For example, the thermal insulation coating layer is made using high-temperature thermal insulation zirconia ceramics.

[0062] For example, the thickness of the heat-insulating coating layer is 100 ± 25 microns, but is not limited to this.

[0063] As an example, the water cooling duct 3 is spirally distributed around the outer wall of the inner cylinder 2 along the axial direction of the inner cylinder 2.

[0064] The water-cooling duct 3 may be provided on the outer wall of the inner cylinder 2 or on the inner wall of the outer cylinder 1.

[0065] The specific structural form of the water cooling duct 3 is not limited to this, but for example, the water cooling duct 3 may be meandering and distributed along the outer wall of the inner cylinder 2, and the water cooling duct 3 may be meandering and include a plurality of straight ducts 3 extending along the axial direction of the inner cylinder 2, and a bent duct 3 provided between two adjacent straight ducts 3.

[0066] For example, the diameter of the water-cooling duct 3 gradually increases in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2.

[0067] According to the above embodiment, the water cooling effect of the water-cooled duct 3 exhibits a gradient change along the axial direction of the inner cylinder 2, which is advantageous for adjusting the gradient temperature in the radial and axial directions.

[0068] For example, the diameter of the water cooling duct is 5mm-10mm, but is not limited to this.

[0069] For example, the circumference spacing of the water cooling duct is 48 mm in the direction from the top of the inner cylinder 2 to the bottom of the inner cylinder 2.

[0070] As shown in Figures 1, 5 to 7, in this embodiment, the water-cooled jacket device further includes a lifting structure for controlling the raising and lowering of the cylindrical body. The cylindrical body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2. The lifting structure includes two lifting sections 4 provided opposite each other on both sides of the cylindrical body, each lifting section 4 includes a drive member and a transmission member, and the transmission member is connected to the outer cylinder 1 via a connecting structure so that the two lifting sections 4 can move asynchronously to tilt the cylindrical body by a predetermined angle.

[0071] The arrangement of the lifting structure controls the lifting of the cylindrical body, and the two lifting units 4 are driven independently so that they can move asynchronously. This allows the cylindrical body to tilt within a predetermined angular range, forming an asymmetric water-cooling effect. Large gradient changes accelerate the transfer of heat from the crystal rod to the water-cooling jacket, increasing heat transfer efficiency and accelerating heat dissipation in the axial and radial directions of the crystal rod. Furthermore, the longitudinal and radial temperature gradients of the crystal rod can be significantly adjusted as needed during the pulling process, controlling the reaction rate of defects in the crystal rod and adjusting the defect distribution. This results in a good cooling rate and allows for the pulling of crystal rods of different defect types (e.g., stacking fault-free crystal rods, BMD crystal rods).

[0072] Crystal rods required for different process parameters need to be matched with different water cooling effects, and an asynchronously moving water cooling jacket device can make corresponding adjustments according to the demand to obtain the appropriate cooling effect.

[0073] The purpose of asynchronous movement is to create a radially asymmetric effect and enhance the water cooling effect. The operation of the lifting mechanism is as follows: When pulling up epitaxial crystal rods, it is necessary to pull them up at a high pulling speed. By moving the water cooling jacket to the liquid surface, the cooling effect is increased, thereby increasing the pulling speed. When pulling up defect-free polished crystal rods, the water cooling jacket is moved upward to suppress COP formation. When pulling up BMD crystal rods, BMD nucleation and growth are promoted. By adjusting the movement of the water cooling jacket, BMDs can undergo low-temperature nucleation at 650°C-700°C, and at the same time, for high-temperature regions, asynchronous movement adjustment expands the crystal rod section to the 750°C-1100°C temperature range. This promotes high-temperature nucleation of BMDs.

[0074] Furthermore, due to the operation of the lifting structure, the two opposing lifting sections 4 work together to tilt and raise the cylindrical body. In other words, after the two lifting sections 4 tilt by a predetermined angle through asynchronous movement, the synchronous movement of the two lifting sections 4 can be controlled to move the cylindrical body up and down while it is tilted.

[0075] Furthermore, the number of lifting sections 4 included in the lifting structure is not limited. Two lifting sections 4 are provided on opposite sides of the cylindrical body, and the two opposing lifting sections 4 form a pair. The lifting structure can include multiple pairs of lifting sections 4, and each pair of lifting sections 4 can achieve inclination in one direction of the cylindrical body. Therefore, multiple pairs of lifting sections 4 can be installed as needed, thereby flexibly controlling the inclination direction of the cylindrical body and improving the water cooling effect.

[0076] Furthermore, the two opposing lifting sections 4 work together to tilt and raise / lower the water-cooling jacket body, and the tilt angle can be set according to actual needs, for example, from 0 to 17 degrees, but is not limited to this.

[0077] Exemplary, the transmission member includes a lifting lever 41 and a transmission gear 42. The lifting lever 41 extends along the axial direction of the outer cylinder 1, and a rack structure 411 is provided on the outer surface of the lifting lever 41. The transmission gear 42 is connected to the lifting lever 41 by meshing with the rack structure 411.

[0078] In this embodiment, by employing a system in which the transmission gear 42 and the lifting lever 41 cooperate, the transmission gear 42 rotates, and the lifting lever 41 transmits power, thereby enabling the cylindrical body to be raised and lowered.

[0079] For example, the drive member of each of the lifting sections 4 may be a drive electric motor.

[0080] For example, the outer surface of one of the lifting levers 41 includes a first region provided away from the other lifting lever 41, the first region being recessed to form a connecting surface, and the rack structure 411 is provided on the connecting surface.

[0081] The connecting surface is a plane parallel to the axial direction of the outer cylinder 1, and the rack structure 411 is provided on the connecting surface to facilitate cooperation between the rack structure 411 and the transmission gear 42.

[0082] Exemplary, the rack structure 411 includes a plurality of parallel racks projecting from the connecting surface, the plurality of racks arranged in a line along the axial direction of the outer cylinder 1, and tooth grooves forming between two adjacent racks.

[0083] The extension direction of the rack is perpendicular to the axial direction of the outer cylinder 1, the axial direction of the transmission gear 42 is parallel to the extension direction of the rack, the teeth of the transmission gear 42 correspond to the tooth grooves, and the transmission gear 42 rotates to raise and lower the lifting lever 41, thereby raising and lowering the cylindrical body.

[0084] For example, the rack is a threaded rack, which has the characteristics of high precision and large load capacity.

[0085] For example, a stopper base 43 is provided at the end of the lifting lever 41 that is separated from the outer cylinder 1.

[0086] The arrangement of the stopper base 43 prevents the transmission gear 42 from separating from the lifting lever 41. The stopper base 43 may have a circular structure, and the area of ​​the stopper base 43 in the radial direction of the lifting lever 41 is larger than the cross-sectional area of ​​the end face of the lifting lever 41.

[0087] The stopper base 43 may be an integral structure with the lifting lever 41, may be connected by a process such as welding, or may be formed synchronously with the formation of the connection surface. The first region may be located in the middle of the lifting lever 41, and the first region is recessed to form a groove, the bottom surface of the groove being the connection surface. In this way, in the axial direction of the lifting lever 41, the first side wall of the groove that moves away from the outer cylinder 1 forms the stopper base 43, and the second side wall of the groove facing the first side wall forms a limiting stopper wall for restricting the movement stroke of the transmission gear 42.

[0088] For example, in the axial direction of the outer cylinder 1, the length of the first region is less than the length of the lifting lever 41, and the first region is located at the end of the lifting lever 41 that is separated from the outer cylinder 1.

[0089] For example, in the axial direction of the outer cylinder 1, the length of the first region is greater than half the length of the lifting lever 41.

[0090] Exemplary, the connecting portion 5 includes a retainer ring 51 sleeved and provided on the outside of the outer cylinder 1, with two projections 52 protruding from opposing sides of the retainer ring 51, and each projection 52 is provided with a connecting through hole 521 for connecting to the corresponding lifting lever 41.

[0091] For example, a connecting ring 44 is provided at the end of the lifting lever 41 that is close to the outer cylinder 1, the connecting ring 44 and the lifting lever 41 are connected by a screw, and the lifting lever 41 and the projection 52 are loosely fitted together in a gap, thus making it easy to achieve an incline of the water-cooling jacket when the two lifting levers 41 move asynchronously.

[0092] For example, a first flange 11 is provided on the upper part of the outer cylinder 1, and the retainer ring 51 is provided on the side of the first flange 11 that is close to the bottom of the outer cylinder 1.

[0093] The retainer ring 51 can reinforce the connection strength between the connecting portion 5 and the outer cylinder 1 by bonding it to the first flange 11 via an adhesive layer.

[0094] Embodiments of the present disclosure further provide a single crystal furnace including the water-cooled jacket device, the single crystal furnace further including a furnace body and a crucible located within the furnace body, wherein the cylindrical body is fixed above the crucible by the lifting action of the lifting structure.

[0095] While it should be understood that the embodiments described above are merely exemplary embodiments adopted to illustrate the principles of the Disclosure, the Disclosure is not limited thereto. Those skilled in the art can make various modifications and improvements without departing from the spirit and substance of the Disclosure, and such modifications and improvements will also be considered within the scope of the Disclosure.

Claims

1. A water-cooled jacket device, It includes a cylindrical body, and the bottom of the cylindrical body is provided with an adjustment sleeve that communicates with the inside of the cylindrical body. The adjustment sleeve includes a first end connected to the cylindrical body and a second end facing the first end. From the first end to the second end, the adjustment sleeve has a gradually decreasing radial cross-sectional area of ​​the cylindrical body. A water-cooled jacket device, wherein an insulating layer is provided on the outer surface of the adjustment sleeve, and the insulating layer includes a third layer adjacent to the adjustment sleeve and a fourth layer away from the adjustment sleeve, and the third layer is a transition layer formed by a chemical reaction between the graphite material and the outer wall of the adjustment sleeve.

2. The water-cooled jacket device according to claim 1, wherein the inner surface of the adjustment sleeve is curved.

3. The water-cooled jacket device according to claim 2, wherein the cross-sectional shape of the adjustment sleeve in the axial direction of the cylindrical body is parabolic.

4. The water-cooled jacket device according to claim 1, wherein in the axial direction of the cylindrical body, the adjustment sleeve includes a first portion adjacent to the cylindrical body and a second portion adjacent to the first portion, and the outer surface of the second portion is recessed to form a recess.

5. The water-cooled jacket device according to claim 1, wherein a heat-absorbing layer is provided on the inner surface of the adjustment sleeve.

6. The water-cooled jacket apparatus according to claim 5, wherein the heat-absorbing layer includes a first layer adjacent to the adjustment sleeve and a second layer away from the adjustment sleeve, and the first layer is a transition layer formed by a chemical reaction between the graphite material and the inner wall of the adjustment sleeve.

7. The water-cooled jacket apparatus according to claim 6, wherein the first layer is a C+SiC composite transition coating layer and the second layer is a SiC coating layer.

8. The water-cooled jacket device according to claim 5, wherein the thickness of the heat-absorbing layer is 130 ± 15 microns.

9. The water-cooled jacket apparatus according to claim 1, wherein the third layer is a C+SiC composite transition coating layer and the fourth layer is a SiC coating layer.

10. The water-cooled jacket device according to claim 1, wherein the thickness of the heat insulating layer is 160 ± 15 microns.

11. The water-cooled jacket device according to claim 1, wherein the cylindrical body includes an inner cylinder and an outer cylinder located outside the inner cylinder, the bottom of the outer cylinder includes a first region for supporting the inner cylinder and a second region adjacent to the first region, the first region is provided so as to be close to the side wall of the outer cylinder, a flange is provided on the upper part of the adjustment sleeve, and the flange is connected to the second region.

12. A water-cooled jacket device, It includes a cylindrical body, and the bottom of the cylindrical body is provided with an adjustment sleeve that communicates with the inside of the cylindrical body. The adjustment sleeve includes a first end connected to the cylindrical body and a second end facing the first end. From the first end to the second end, the adjustment sleeve has a gradually decreasing radial cross-sectional area of ​​the cylindrical body. A water-cooled jacket device, wherein a heat-absorbing layer is provided on the inner surface of the adjustment sleeve, and the heat-absorbing layer includes a first layer adjacent to the adjustment sleeve and a second layer away from the adjustment sleeve, and the first layer is a transition layer formed by a chemical reaction between graphite material and the inner wall of the adjustment sleeve.

13. A water-cooled jacket device, It includes a cylindrical body, and the bottom of the cylindrical body is provided with an adjustment sleeve that communicates with the inside of the cylindrical body. The adjustment sleeve includes a first end connected to the cylindrical body and a second end facing the first end. From the first end to the second end, the adjustment sleeve has a gradually decreasing radial cross-sectional area of ​​the cylindrical body. The cylindrical body includes an inner cylinder and an outer cylinder located outside the inner cylinder, the bottom of the outer cylinder includes a first region for supporting the inner cylinder and a second region adjacent to the first region, the first region being provided close to the side wall of the outer cylinder, a flange being provided on the upper part of the adjustment sleeve, and the flange being connected to the second region, wherein the water-cooled jacket device.

14. A single crystal furnace comprising a water-cooled jacket device according to any one of claims 1 to 13.

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