Operation screen switching method, operation determination method, and circuit board processing system

Abstract

To provide an operation picture changeover method enabling securement of safety of an operator operating at a neighbor of a substrate processing device.SOLUTION: An operation picture changeover method includes: a step (S1) of determining whether or not a user logs-into a first operation device 200 via a second operation device 300 connected to the first operation device 200 that controls a substrate processing device 100; a step (S2) of displaying a first operation picture SG1 in the case where it is determined that the user does not log-in to the first operation device 200 (No in S1); and a step (S5) of displaying a second operation picture SG2 in the case where it is determined that the user logs in the first operation device 200 (Yes in S1). In the second operation picture SG2, a part of operations as an operation object included in the first operation picture SG1 is prohibited. The substrate processing device 100 comprises a transportation portion (IR and CR) that transfers a substrate W. The operation to be prohibited includes operation that causes the transportation portion (IR and CR) to operate.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present invention relates to an operation screen switching method, an operation determination method, and a substrate processing system.

Background Art

[0002] A substrate processing system in which an operation device is connected to a substrate processing apparatus via a network is known (see, for example, Patent Document 1). The substrate processing system of Patent Document 1 includes a substrate processing apparatus, a main operation device, and an external operation device. The substrate processing apparatus is provided with a main controller and a switching hub. The main operation device is disposed near the substrate processing apparatus and is connected to the main controller via the switching hub of the substrate processing apparatus. The external operation device is disposed at a position away from the substrate processing apparatus and is connected to the main controller via a communication network such as a LAN (Local Area Network) having a switching hub.

[0003] The substrate processing system of Patent Document 1 restricts the functions that a user can operate according to the group to which the user logged in to the external operation device belongs. Specifically, when the user logged in to the external operation device belongs to the maintenance group, only the "reference" permission is given regarding the process recipe, and "editing" is prohibited. Regarding the alarm conditions, both "reference" and "editing" are prohibited. Regarding maintenance, the "reference" and "editing" permissions are given.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, the substrate processing system described in Patent Document 1 merely restricts the functions that a user can operate depending on the group to which the user who has logged into the external operating device belongs. Therefore, depending on the group to which the user belongs, there is a risk that the substrate processing system may perform actions that endanger workers working near the substrate processing system. Thus, considering the safety of workers working near the substrate processing system, there is room for further improvement.

[0006] The present invention has been made in view of the above problems, and its purpose is to provide an operation screen switching method, an operation determination method, and a substrate processing system that can better ensure the safety of workers working near a substrate processing device. [Means for solving the problem]

[0007] According to one aspect of the present invention, the operation screen switching method of the first embodiment includes the steps of: determining whether a user has logged into a first operation device via a second operation device remotely connected to a first operation device that controls a substrate processing device for processing substrates; displaying a first operation screen if it is determined via the second operation device that the user has not logged into the first operation device; and displaying a second operation screen if it is determined via the second operation device that the user has logged into the first operation device. The second operation screen prohibits some of the operations of the operation targets included in the first operation screen. The substrate processing device includes a transport unit for transporting the substrates. The prohibited operations include operations for operating the transport unit.

[0008] According to another aspect of the present invention, the operation screen switching method of the second embodiment is such that when a user is logged into the first operation device via a second operation device that is remotely connected to the first operation device that controls the substrate processing device for processing substrates, a detection unit provided in the substrate processing device Being human A step of determining whether or not the detection target is detected, and if the detection unit determines that it has not detected the detection target, The first display unit provided in the first operating device and the second display unit provided in the second operating deviceThe steps include displaying the first operation screen, and when the detection unit determines that it has detected the target object, The first display unit and the second display unit The procedure includes the step of displaying a second operation screen. The second operation screen prohibits some of the operations of the objects of operation included in the first operation screen. The substrate processing apparatus includes a transport unit for transporting the substrate. The prohibited operations include operations that operate the transport unit.

[0009] In one embodiment, the operation screen switching method of the first and second embodiments further includes the step of creating the second operation screen based on information indicating whether or not each operation target included in the first operation screen can be executed.

[0010] According to yet another aspect of the present invention, the operation determination method includes the steps of displaying an operation screen when a user is logged into a first operating device, via a second operating device remotely connected to a first operating device that controls a substrate processing device that processes substrates, and a detection unit provided in the substrate processing device Being human The process includes the steps of: determining whether or not a detection target is detected; determining whether or not an instruction made by the user via the operation screen is a prohibited instruction when the detection unit has determined that it has detected the detection target; prohibiting the execution of the instruction when it has been determined that an instruction made by the user via the operation screen is a prohibited instruction; and executing the instruction when it has been determined that an instruction made by the user via the operation screen is not a prohibited instruction. The substrate processing apparatus includes a transport unit for transporting the substrate. The prohibited instruction includes an instruction to operate the transport unit.

[0011] In one embodiment, the above operation determination method further includes the step of setting instructions for prohibited items based on information indicating whether or not each operation target included in the operation screen can be executed.

[0012] According to yet another aspect of the present invention, a substrate processing system of the first embodiment comprises a substrate processing apparatus, a first operating device, and a second operating device. The substrate processing apparatus processes a substrate. The first operating device controls the substrate processing apparatus. The second operating device is remotely connectable to the first operating device. The substrate processing apparatus includes a transport unit for transporting the substrate. The first operating device comprises a first display unit, a first communication unit, and a first control unit. The first display unit displays a first operation screen operated by a first user. The first communication unit is communicatively connected to the second operating device. The second operating device comprises a second communication unit, a second control unit, and a second display unit. The second communication unit is communicatively connected to the first communication unit. The second control unit controls the second communication unit to remotely connect the second operating device to the first operating device. The second display unit displays a second operation screen operated by a second user when the second operating device is remotely connected to the first operating device. The first control unit determines whether the second user is logged into the first operating device via the second operating device. If the first control unit determines that the second user is not logged into the first operating device via the second operating device, it causes the first operation screen to be displayed on the first display unit. If the first control unit determines that the second user is logged into the first operating device via the second operating device, it causes the second operation screen to be displayed on the second display unit. The second operation screen prohibits some of the operations included in the first operation screen. The prohibited operations include operations that operate the transport unit.

[0013] According to yet another aspect of the present invention, a substrate processing system of a second embodiment comprises a substrate processing apparatus, a first operating device, and a second operating device. The substrate processing apparatus processes a substrate. The first operating device controls the substrate processing apparatus. The second operating device is remotely connectable to the first operating device. The substrate processing apparatus comprises a transport unit and a detection unit. The transport unit transports the substrate. The detection unit, Being humanThe detection unit detects the target to be detected. The first operating device comprises a first display unit, a first communication unit, and a first control unit. The first display unit displays a first operation screen operated by a first user. The first communication unit is connected to the second operating device in a communicative manner. The second operating device comprises a second communication unit, a second control unit, and a second display unit. The second communication unit is connected to the first communication unit in a communicative manner. The second control unit controls the second communication unit to remotely connect the second operating device to the first operating device. When the second operating device is remotely connected to the first operating device, the second display unit displays the first operation screen or the second operation screen operated by the second user. When the second user is logged into the first operating device via the second operating device, the first control unit determines whether the detection unit has detected the target to be detected. If the first control unit determines that the detection unit has not detected the target to be detected, it causes the second display unit to display the first operation screen. The first control unit causes the second display unit to display the second operation screen when it determines that the detection unit has detected the object to be detected. The second operation screen prohibits some of the operations of the objects to be operated that are included in the first operation screen. The prohibited operations include operations that operate the transport unit.

[0014] In one embodiment, the first control unit creates the second operation screen based on information indicating whether or not each operation target included in the first operation screen can be executed.

[0015] According to yet another aspect of the present invention, a third embodiment of the substrate processing system comprises a substrate processing apparatus, a first operating device, and a second operating device. The substrate processing apparatus processes a substrate. The first operating device controls the substrate processing apparatus. The second operating device is remotely connectable to the first operating device. The substrate processing apparatus comprises a transport unit and a detection unit. The transport unit transports the substrate. The detection unit, Being humanThe detection unit detects the object to be detected. The first operating device comprises a first display unit, a first communication unit, and a first control unit. The first display unit displays an operation screen operated by a first user. The first communication unit is connected to the second operating device in a communicative manner. The second operating device comprises a second communication unit, a second control unit, and a second display unit. The second communication unit is connected to the first communication unit in a communicative manner. The second control unit controls the second communication unit to remotely connect the second operating device to the first operating device. When the second operating device is remotely connected to the first operating device, the second display unit displays the operation screen operated by the second user. When the second user is logged into the first operating device via the second operating device, the first control unit causes the second display unit to display the operation screen. The first control unit determines whether the detection unit has detected the object to be detected. When the first control unit determines that the detection unit has detected the object to be detected, it determines whether the instruction given by the second user via the operation screen is an instruction to be prohibited. If the first control unit determines that the instruction given by the second user via the operation screen is an instruction to be prohibited, it prohibits the execution of the instruction. If the first control unit determines that the instruction given by the second user via the operation screen is not an instruction to be prohibited, it executes the instruction. The instruction to be prohibited includes an instruction to operate the transport unit.

[0016] In one embodiment, the first control unit sets the instruction for the prohibited target based on information indicating whether or not each operation target included in the operation screen can be executed. [Effects of the Invention]

[0017] According to the operation screen switching method, operation determination method, and substrate processing system of the present invention, the safety of workers working near the substrate processing apparatus can be further ensured. [Brief explanation of the drawing]

[0018] [Figure 1] This figure shows a substrate processing system according to Embodiment 1 of the present invention. [Figure 2] It is a schematic plan view showing an example of a substrate processing apparatus included in a substrate processing system according to Embodiment 1 of the present invention. [Figure 3] It is a schematic diagram showing an example of a substrate processing unit included in the substrate processing apparatus. [Figure 4] It is a block diagram showing the configuration of a first operation device included in a substrate processing system according to Embodiment 1 of the present invention. [Figure 5] It is a block diagram showing the configuration of a second operation device included in a substrate processing system according to Embodiment 1 of the present invention. [Figure 6] (a) is a diagram showing an example of a first operation screen. (b) is a diagram showing an operation permission information table. [Figure 7] (a) is a diagram showing an example of a second operation screen. (b) is a diagram showing a modified example of the second operation screen. [Figure 8] It is a diagram showing a method for switching an operation screen according to Embodiment 1 of the present invention. [Figure 9] It is a schematic plan view showing an example of a substrate processing apparatus included in a substrate processing system according to Embodiment 2 of the present invention. [Figure 10] It is a diagram showing a method for switching an operation screen according to Embodiment 2 of the present invention. [Figure 11] It is a diagram showing an operation determination method according to Embodiment 3 of the present invention. [Figure 12] It is a diagram showing an operation determination method according to Embodiment 3 of the present invention.

Embodiments for Carrying Out the Invention

[0019] Hereinafter, embodiments related to an operation screen switching method, an operation determination method, and a substrate processing system of the present invention will be described with reference to the drawings (FIGS. 1 to 12). However, the present invention is not limited to the following embodiments, and can be implemented in various aspects without departing from the gist thereof. In addition, descriptions of overlapping parts may be omitted as appropriate. Also, in the figures, the same or corresponding parts are denoted by the same reference numerals and the description will not be repeated.

[0020] In the operation screen switching method, operation determination method, and substrate processing system according to the present invention, the "substrate" to be processed can be various types of substrates, including semiconductor wafers, photomask glass substrates, liquid crystal display glass substrates, plasma display glass substrates, FED (Field Emission Display) substrates, optical disk substrates, magnetic disk substrates, and magneto-optical disk substrates. The embodiments of the present invention will primarily be described below using a disc-shaped semiconductor wafer as an example, but the operation screen switching method, operation determination method, and substrate processing system according to the present invention can be similarly applied to various types of substrates other than the semiconductor wafers described above. Furthermore, the shape of the substrate is not limited to a disc shape; the operation screen switching method, operation determination method, and substrate processing system according to the present invention can be applied to substrates of various shapes.

[0021] [Embodiment 1] First, the substrate processing system 1000 of this embodiment will be described with reference to Figure 1. Figure 1 is a diagram showing the substrate processing system 1000 of this embodiment. As shown in Figure 1, the substrate processing system 1000 comprises a substrate processing apparatus 100, a first operating device 200, and a second operating device 300.

[0022] The substrate processing apparatus 100 processes the substrate W. In this embodiment, the substrate processing apparatus 100 processes the substrate W using a processing liquid. The first operating device 200 is located near the substrate processing apparatus 100. Here, "nearby" refers to a position where the operator (user) operating the first operating device 200 can see the substrate processing apparatus 100. For example, the first operating device 200 may be integrated with the substrate processing apparatus 100. Hereinafter, the first operating device 200 may be referred to as a "local terminal".

[0023] The first operating device 200 controls the substrate processing device 100. Specifically, when a user who has logged into the first operating device 200 inputs an instruction to the first operating device 200, the first operating device 200 operates the substrate processing device 100 according to that instruction.

[0024] A user who has logged into the first operating device 200 can further operate the first operating device 200 to edit various recipes for the substrate processing device 100, edit various parameters for the substrate processing device 100, edit various conditions for the substrate processing device 100, and check the status of the substrate processing device 100. The various recipes, for example, indicate the processing content of substrate W. The various parameters include, for example, the set value of the pressure (exhaust pressure) of the gas discharged from chamber 1a (see Figure 3). The conditions include, for example, alert conditions. The status of the substrate processing device 100 includes, for example, the state inside chamber 1a. The state inside chamber 1a can be confirmed by displaying the image of the inside of chamber 1a captured by the imaging device.

[0025] The second operating device 300 is positioned away from the substrate processing device 100. Here, "away from the device" means a position where the operator (user) operating the second operating device 300 cannot see the substrate processing device 100. For example, the second operating device 300 may be located in the operator's (user's) home. The second operating device 300 may also be, for example, a personal computer.

[0026] The second operating device 300 is remotely connectable to the first operating device 200. Specifically, the second operating device 300 remotely connects to the first operating device 200 via a communication network. The communication network may include, for example, a public network such as the Internet, or it may include a dedicated communication line. In this embodiment, the second operating device 300 remotely connects to the first operating device 200 via a server SE. The server SE may be, for example, a cloud server.

[0027] An operator (user) operating the second control device 300 can remotely connect the second control device 300 to the first control device 200 and log in to the first control device 200. Hereinafter, a user who logs in to the first control device 200 by operating the first control device 200 may be referred to as the "first user." A user who logs in to the first control device 200 by operating the second control device 300 may be referred to as the "second user." Furthermore, when it is not necessary to distinguish between the first user and the second user, both the first user and the second user may be referred to as "user."

[0028] After logging into the first operating device 200, the second user can operate the second operating device 300 to input instructions to the first operating device 200. The first operating device 200 will operate the substrate processing device 100 according to these instructions. The second user can also operate the second operating device 300 to have the first operating device 200 perform tasks such as editing various recipes for the substrate processing device 100. In this embodiment, the operation items to which the second user can input instructions are limited to a portion of the operation items to which the first user can input instructions. In other words, the second user's privileges are restricted. Hereinafter, the second operating device 300 may be referred to as the "remote terminal".

[0029] Next, the substrate processing apparatus 100 will be described with reference to Figure 2. Figure 2 is a schematic plan view showing an example of a substrate processing apparatus 100 included in the substrate processing system 1000 of this embodiment. As shown in Figure 2, the substrate processing apparatus 100 may include an indexer unit U1, a processing unit U2, and a plurality of processing liquid cabinets U3. In this case, the first operating device 200 controls the indexer unit U1, the processing unit U2, and the plurality of processing liquid cabinets U3. In this embodiment, the substrate processing apparatus 100 is a cleaning apparatus or a wet etching apparatus.

[0030] The indexer unit U1 includes a plurality of load ports LP, an indexer robot IR, and a first transport chamber CH1. The indexer robot IR is located in the first transport chamber CH1. The processing unit U2 includes a center robot CR, a plurality of substrate processing units 1, a transfer chamber CHA, and a second transport chamber CH2. The center robot CR is located in the second transport chamber CH2. The indexer unit U1 and the processing unit U2 are connected by the transfer chamber CHA. The transfer chamber CHA includes a transfer unit 2. The indexer robot IR and the center robot CR are examples of "transport units".

[0031] Each load port LP accommodates multiple substrates W stacked on top of each other. The indexer robot IR transports the substrates W between the load ports LP and the center robot CR. Specifically, the indexer robot IR retrieves a substrate W from one of the load ports LP and passes it to the transfer unit 2. The substrates W retrieved from the load ports LP are placed on the transfer unit 2.

[0032] The central robot CR transports the substrate W between the indexer robot IR and the substrate processing unit 1. Specifically, the central robot CR receives the substrate W from the transfer unit 2 and delivers the substrate W to one of the multiple substrate processing units 1.

[0033] The substrate processing unit 1 processes the substrate W. The substrate processing unit 1 is a single-wafer type that processes substrates W one at a time. Processing liquid is supplied to each substrate processing unit 1 from each of the multiple processing liquid cabinets U3. In this embodiment, the substrate processing unit 1 processes the substrate W with the processing liquid. The processing liquid is not particularly limited as long as it is a liquid that comes into contact with the substrate W. In this embodiment, the processing liquid includes a chemical solution and a rinsing solution.

[0034] The chemicals include, for example, dilute hydrofluoric acid (DHF), hydrofluoric acid (HF), hydrofluoric acid-nitric acid (a mixture of hydrofluoric acid and nitric acid (HNO3)), buffered hydrofluoric acid (BHF), ammonium fluoride, HFEG (a mixture of hydrofluoric acid and ethylene glycol), phosphoric acid (H3PO4), sulfuric acid, acetic acid, nitric acid, hydrochloric acid, ammonia water, hydrogen peroxide, organic acids (e.g., citric acid, oxalic acid), organic alkalis (e.g., TMAH: tetramethylammonium hydroxide), sulfuric acid-hydrogen peroxide mixture (SPM), ammonia-hydrogen peroxide mixture (SC1), hydrochloric acid-hydrogen peroxide mixture (SC2), isopropyl alcohol (IPA), surfactants, or corrosion inhibitors.

[0035] The rinsing solution may be, for example, deionized water, carbonated water, electrolyzed ionized water, hydrogen water, ozonated water, or hydrochloric acid water at a diluted concentration (for example, around 10 ppm to 100 ppm).

[0036] After the substrate W has been processed by the substrate processing unit 1, the central robot CR removes the processed substrate W from the substrate processing unit 1 and passes the substrate W to the transfer unit 2. The substrate W processed by the substrate processing unit 1 is placed on the transfer unit 2.

[0037] The indexer robot IR receives the processed substrate W from the transfer unit 2 and places the substrate W into one of the multiple load ports LP.

[0038] Multiple substrate processing units 1 form multiple towers TW (four towers TW in this embodiment) arranged to surround the central robot CR in a plan view. Each tower TW includes multiple substrate processing units 1 (for example, three substrate processing units 1) stacked vertically.

[0039] Next, the substrate processing unit 1 will be described with reference to Figure 3. Figure 3 is a schematic diagram showing an example of the substrate processing unit 1 included in the substrate processing apparatus 100. As shown in Figure 3, the substrate processing unit 1 may include a chamber 1a, a spin chuck 3, a spin motor 4, a first nozzle 5, a nozzle moving unit 6, a second nozzle 8, and a guard 11. The substrate processing apparatus 100 may also further include a chemical solution supply unit 7 and a rinse solution supply unit 9. In this case, the first operating device 200 controls the spin chuck 3, the spin motor 4, the nozzle moving unit 6, the chemical solution supply unit 7, the rinse solution supply unit 9, and the guard 11.

[0040] Chamber 1a has a roughly box shape. Chamber 1a houses the substrate W, spin chuck 3, spin motor 4, first nozzle 5, part of nozzle moving section 6, part of chemical supply section 7, second nozzle 8, part of rinse liquid supply section 9, and guard 11.

[0041] The spin chuck 3 holds the substrate W and rotates it. Specifically, the spin chuck 3 holds the substrate W horizontally within the chamber 1a and rotates the substrate W around the rotation axis AX.

[0042] Specifically, the spin chuck 3 comprises a spin base 31 and a plurality of chuck members 32. The plurality of chuck members 32 are provided on the spin base 31. The plurality of chuck members 32 hold the substrate W in a horizontal position. The spin base 31 is substantially disc-shaped and supports the plurality of chuck members 32 in a horizontal position.

[0043] The spin motor 4 rotates the spin base 31 around the rotation axis AX. Therefore, the spin base 31 rotates around the rotation axis AX. As a result, the substrate W held by the multiple chuck members 32 provided on the spin base 31 rotates around the rotation axis AX. Specifically, the spin motor 4 comprises a motor body 41 and a shaft 42. The shaft 42 is coupled to the spin base 31. The motor body 41 rotates the spin base 31 by rotating the shaft 42.

[0044] The first nozzle 5 discharges the chemical solution toward the substrate W while the substrate W is rotating. The chemical solution supply unit 7 supplies the chemical solution to the first nozzle 5. Specifically, the chemical solution supply unit 7 comprises a chemical solution supply pipe 71 and a valve 72. The chemical solution supply pipe 71 circulates the chemical solution to the first nozzle 5. The valve 72 opens and closes the chemical solution supply pipe 71, switching between supplying and stopping the supply of the chemical solution to the first nozzle 5.

[0045] The nozzle moving unit 6 moves the first nozzle 5 in a substantially vertical and substantially horizontal direction. Specifically, the nozzle moving unit 6 comprises an arm 61, a pivot shaft 62, and a nozzle moving mechanism 63.

[0046] The arm 61 extends in a substantially horizontal direction. The first nozzle 5 is positioned at the tip of the arm 61. The arm 61 is connected to a pivot shaft 62. The pivot shaft 62 extends in a substantially vertical direction.

[0047] The nozzle moving mechanism 63 rotates the pivot shaft 62 around the pivot axis AXS which is in a substantially vertical direction, thereby rotating the arm 61 along a substantially horizontal plane. As a result, the first nozzle 5 moves along a substantially horizontal plane. The nozzle moving mechanism 63 also raises and lowers the pivot shaft 62 along a substantially vertical direction, thereby raising and lowering the arm 61. As a result, the first nozzle 5 moves along a substantially vertical direction. The nozzle moving mechanism 63 may include, for example, a ball screw mechanism and an electric motor that provides driving force to the ball screw mechanism.

[0048] The second nozzle 8 discharges rinsing liquid toward the substrate W while the substrate W is rotating. The second nozzle 8 is a fixed nozzle. The rinsing liquid supply unit 9 supplies rinsing liquid to the second nozzle 8. Specifically, the rinsing liquid supply unit 9 comprises a rinsing liquid supply pipe 91 and a valve 92. The rinsing liquid supply pipe 91 circulates the rinsing liquid to the second nozzle 8. The valve 92 opens and closes the rinsing liquid supply pipe 91, switching between supplying and stopping the supply of rinsing liquid to the second nozzle 8.

[0049] The guard 11 has a roughly cylindrical shape. The guard 11 receives the processing fluid discharged from the substrate W. The guard 11 can be raised or lowered.

[0050] Next, the first operating device 200 will be described with reference to Figure 4. Figure 4 is a block diagram showing the configuration of the first operating device 200 included in the substrate processing system 1000 of this embodiment. As shown in Figure 4, the first operating device 200 comprises a first communication unit 201, a first input unit 202, a first display unit 203, a first storage unit 204, and a first control unit 205.

[0051] The first communication unit 201 is connected to the second operating device 300 in a communicative manner. In other words, the first communication unit 201 communicates with the second operating device 300. In this embodiment, the first communication unit 201 is connected to the second operating device 300 in a communicative manner via a server SE. Specifically, the first communication unit 201 includes a communication interface circuit such as a LAN board. The communication interface circuit communicates with the second operating device 300 via the server SE.

[0052] The first input unit 202 is a user interface device operated by the first user. The first input unit 202 inputs instructions (control signals) corresponding to the first user's operations to the first control unit 205. The first input unit 202 also inputs data corresponding to the first user's operations to the first control unit 205.

[0053] For example, the first user can operate the first input unit 202 to input the information necessary to log in to the first operating device 200 (login information) to the first control unit 205. By entering the login information, the first user can log in to the first operating device 200. After logging in, the first user can operate the first input unit 202 to log out of the first operating device 200, edit various recipes, etc. The login information includes, for example, a username and a password corresponding to that username.

[0054] Furthermore, after logging in, the first user can operate the first input unit 202 to input instructions to the first control unit 205 to operate the substrate processing device 100. The first control unit 205 controls the substrate processing device 100 based on the instructions input via the first input unit 202. The instructions include instructions to operate at least one of the indexer robot IR and the center robot CR, as described with reference to Figure 2. For example, the first user can operate the first input unit 202 to instruct the substrate processing device 100 to perform substrate processing. The first control unit 205 causes the substrate processing device 100 to perform substrate processing based on the instructions input by the first user. The indexer robot IR and the center robot CR operate when substrate processing is performed. Hereinafter, instructions to operate at least one of the indexer robot IR and the center robot CR may be referred to as "robot transport-related instructions".

[0055] The first input unit 202 includes, for example, a keyboard and a mouse. The first input unit 202 may also include a touch sensor. The touch sensor is superimposed on the display surface of the first display unit 203 to generate a signal indicating a touch operation by the first user on the display surface. The first user can input various instructions and data to the first operating device 200 by touch operation.

[0056] The first display unit 203 displays various screens. For example, the first display unit 203 displays a first operation screen SG1 operated by a first user (for example, the first operation screen SG1 shown in Figure 6(a)). The first display unit 203 includes a display device such as a liquid crystal display device or an organic EL (electroluminescence) display device.

[0057] The first storage unit 204 includes a storage device and stores data and computer programs. For example, the first storage unit 204 stores various recipes and pre-registered login information. The first storage unit 204 includes a main memory device such as semiconductor memory as its storage device. The first storage unit 204 may further include an auxiliary storage device as its storage device. The auxiliary storage device may include, for example, semiconductor memory, a solid-state drive, and / or a hard disk drive. The first storage unit 204 may further include a removable media as its storage device.

[0058] The first control unit 205 controls the substrate processing device 100, the first communication unit 201, the first display unit 203, and the first storage unit 204. If the first input unit 202 includes a touch sensor, the first control unit 205 further controls the touch sensor.

[0059] Specifically, the first control unit 205 includes a processor such as a CPU (Central Processing Unit). The processor performs various processes based on the data and computer programs stored in the first storage unit 204.

[0060] For example, when the first user operates the first input unit 202 and inputs login information, the first control unit 205 determines whether it matches any of the login information stored in the first storage unit 204. If there is a match, it allows the first user to log in. As a result, the first user can input various instructions and data to the first operating device 200 (first control unit 205). For example, the first user can instruct the substrate processing device 100 to perform substrate processing. The first control unit 205 controls the substrate processing device 100 based on the instructions input by the first user. The first user can also operate the first input unit 202 to edit recipes, etc.

[0061] Next, the second operating device 300 will be described with reference to Figures 4 and 5. Figure 5 is a block diagram showing the configuration of the second operating device 300 included in the substrate processing system 1000 of this embodiment. As shown in Figure 5, the second operating device 300 comprises a second communication unit 301, a second input unit 302, a second display unit 303, a second storage unit 304, and a second control unit 305.

[0062] The second communication unit 301 is connected to the first operating device 200 in a communicative manner. In other words, the second communication unit 301 communicates with the first operating device 200. In this embodiment, the second communication unit 301 is connected to the first operating device 200 in a communicative manner via a server SE. Specifically, the second communication unit 301 is connected to the first communication unit 201 (Figure 4) in a communicative manner. The second communication unit 301 includes a communication interface circuit such as a LAN board.

[0063] The second input unit 302 is a user interface device operated by a second user. The second input unit 302 includes, for example, a keyboard and a mouse. The second input unit 302 may also include a touch sensor. The touch sensor is superimposed on the display surface of the second display unit 303 to generate a signal indicating a touch operation on the display surface by the second user.

[0064] The second input unit 302 inputs instructions (control signals) corresponding to the second user's operations to the second control unit 305. The second input unit 302 also inputs data corresponding to the second user's operations to the second control unit 305. For example, the second user can remotely connect the second operating device 300 to the first operating device 200 by operating the second input unit 302. After remotely connecting the second operating device 300 to the first operating device 200, the second user can log in to the first operating device 200 by operating the second input unit 302. The second user's login is performed via the second operating device 300. After logging in, the second user can log out of the first operating device 200, edit various recipes, etc., by operating the second input unit 302.

[0065] The second display unit 303 includes, for example, a display device such as a liquid crystal display device or an organic EL display device. The second display unit 303 displays various screens. For example, when the second operating device 300 is remotely connected to the first operating device 200, the second display unit 303 displays a second operation screen SG2 operated by a second user (for example, the second operation screen SG2 shown in Figure 7(a)).

[0066] Specifically, while the second operating device 300 is remotely connected to the first operating device 200, the first control unit 205 (Figure 4) transmits image information indicating the screen to be displayed on the first display unit 203 (Figure 4) to the second operating device 300. As a result, the second control unit 305 displays the same screen on the second display unit 303 as the screen currently displayed on the first display unit 203. In other words, the screen is shared between the first operating device 200 (first display unit 203) and the second operating device 300 (second display unit 303). However, the authority to operate the screen is granted to the logged-in user.

[0067] The second storage unit 304 includes a storage device and stores data and computer programs. For example, the second storage unit 304 stores an application program for remote connection with the first operating device 200. The second storage unit 304 includes a main memory device such as semiconductor memory as a storage device. The second storage unit 304 may further include an auxiliary storage device as a storage device. The second storage unit 304 may further include a removable media as a storage device.

[0068] The second control unit 305 controls the second communication unit 301, the second display unit 303, and the second storage unit 304. If the second input unit 302 includes a touch sensor, the second control unit 305 further controls the touch sensor.

[0069] Specifically, the second control unit 305 includes a processor such as a CPU. The processor performs various processes based on the data and computer programs stored in the second storage unit 304.

[0070] For example, the second control unit 305 controls the second communication unit 301 to remotely connect the second operating device 300 to the first operating device 200. After the remote connection is established, when the login information of the second user is entered, the second control unit 305 transmits the login information of the second user to the first operating device 200 via the second communication unit 301. As a result, the login information received by the first communication unit 201 (Figure 4) is input to the first control unit 205 (Figure 4).

[0071] The first control unit 205 determines whether the login information received by the first communication unit 201 matches any of the login information stored in the first storage unit 204. If they match, it allows the second user to log in. As a result, the second user can operate the second input unit 302 to input various instructions and data to the first operating device 200 (first control unit 205).

[0072] When the second user operates the second input unit 302 to input various instructions and data, the second control unit 305 transmits these instructions and data to the first operating device 200 via the second communication unit 301. As a result, the instructions and data received by the first communication unit 201 (Figure 4) are input to the first control unit 205 (Figure 4), and the first control unit 205 executes various controls based on the second user's instructions. However, as already explained, the operation items that the second user can input instructions for are limited to a portion of the operation items that the first user can input instructions for.

[0073] Next, the first operation screen SG1 will be explained with reference to Figure 6(a). Figure 6(a) is a diagram showing an example of the first operation screen SG1. The first operation screen SG1 is displayed after the first user logs in to the first operating device 200. Specifically, the first operation screen SG1 is displayed on the first display unit 203 if the second operating device 300 is not remotely connected to the first operating device 200. If the second operating device 300 is remotely connected to the first operating device 200, the first operation screen SG1 is displayed on both the first display unit 203 and the second display unit 303.

[0074] In this embodiment, the authority to operate the first operation screen SG1 is granted only to the user (first user) who has logged into the first operating device 200 by operating the first input unit 202. In other words, the authority to operate the first operation screen SG1 is granted only to the user (first user) who has logged into the first operating device 200 directly.

[0075] The first operation screen SG1 shown in Figure 6(a) includes a logout button B1, a screen switching button B2, multiple operation target item fields TK, and multiple execute buttons BR. In other words, the first operation screen SG1 shown in Figure 6(a) displays a logout button B1, a screen switching button B2, multiple operation target item fields TK, and multiple execute buttons BR.

[0076] The logout button B1 is a button image used to perform a logout. The first user can input a command to press the logout button B1 by operating the first input unit 202. When the logout button B1 is pressed, the first control unit 205 performs a logout.

[0077] The screen switching button B2 is a button image used to switch screens. The first user can input an instruction to press the screen switching button B2 by operating the first input unit 202. When the screen switching button B2 is pressed, the first control unit 205 switches the screen. For example, when the screen switching button B2 of the first operation screen SG1 shown in Figure 6(a) is pressed, the first control unit 205 switches the screen from the first operation screen SG1 to another first operation screen SG1.

[0078] Note that other first operation screens SG1 include a logout button B1 and a screen switching button B2, similar to the first operation screen SG1 shown in Figure 6(a). However, the positions of the logout button B1 and the screen switching button B2 in other first operation screens SG1 may differ from those in the first operation screen SG1 shown in Figure 6(a).

[0079] Multiple operation target item fields TK each represent an operation target T. Operation targets T include, for example, board processing start, shutdown, recipe editing, log confirmation, and alarm status confirmation. An execution button BR is provided for each operation target item field TK. The first user can input an instruction to press the execution button BR by operating the first input unit 202. When the execution button BR is pressed, the first control unit 205 executes the process corresponding to the pressed execution button BR.

[0080] For example, when the execution button BR corresponding to the start of board processing is pressed, the first control unit 205 causes the board processing device 100 to perform board processing. When the execution button BR corresponding to shutdown is pressed, the first control unit 205 shuts down the power supply to the board processing device 100. When the execution button BR corresponding to recipe editing is pressed, the first control unit 205 displays the recipe editing screen on the first display unit 203, or on the first display unit 203 and the second display unit 303. When the execution button BR corresponding to log confirmation is pressed, the first control unit 205 displays the log list screen on the first display unit 203, or on the first display unit 203 and the second display unit 303. When the execution button BR corresponding to alarm status confirmation is pressed, the first control unit 205 displays the alarm status list screen on the first display unit 203, or on the first display unit 203 and the second display unit 303.

[0081] In addition, other first operation screens SG1 also include at least one target item field TK and an execution button BR corresponding to that target item field TK, similar to the first operation screen SG1 shown in Figure 6(a). However, the display format, position, and size of the target item field TK and the execution button BR in other first operation screens SG1 may differ from those of the first operation screen SG1 shown in Figure 6(a).

[0082] Next, the operation feasibility information table TA will be explained with reference to Figure 6(b). Figure 6(b) is a diagram showing the operation feasibility information table TA. The operation feasibility information table TA is stored in the first storage unit 204. The operation feasibility information table TA shows operation feasibility information. The operation feasibility information indicates whether all operation targets T included in all first operation screens SG1 can be executed. For example, the operation feasibility information includes information indicating whether each operation target T included in the first operation screen SG1 shown in Figure 6(a) can be executed.

[0083] As shown in Figure 6(b), the operation feasibility information table TA shows the relationship between each operation target T and the feasibility data AN indicating whether each operation target T can be executed. The feasibility data AN is, for example, a flag. In the example shown in Figure 6(b), the feasibility data AN of "OK" indicates that the execution of the corresponding operation target T is permitted, and the feasibility data AN of "NOT" indicates that the execution of the corresponding operation target T is prohibited. Specifically, among the multiple operation targets T, the feasibility data AN of "NOT" is assigned to the operation target T on which at least one of the indexer robot IR and the center robot CR, as explained with reference to Figure 2, operates.

[0084] In this embodiment, a "no" permission data AN is also assigned to the shutdown. If the power supply of the board processing device 100 shuts down while the second operating device 300 is remotely connected to the first operating device 200, the remote connection is disconnected. According to this embodiment, by assigning a "no" permission data AN to the shutdown, it is possible to prevent the second user who has logged into the first operating device 200 from disconnecting the remote connection.

[0085] Next, the second operation screen SG2 will be explained with reference to Figure 7(a). Figure 7(a) is a diagram showing an example of the second operation screen SG2. The second operation screen SG2 is displayed on the first display unit 203 and the second display unit 303 after the second user logs in to the first operating device 200.

[0086] In this embodiment, the authority to operate the second operation screen SG2 is granted only to the user (second user) who has logged into the first operating device 200 by operating the second input unit 302. In other words, the authority to operate the second operation screen SG2 is granted only to the user (second user) who has logged into the first operating device 200 via the second operating device 300.

[0087] The second operation screen SG2 shown in Figure 7(a) includes a logout button B1, a screen switching button B2, multiple operation target item fields TK, and multiple execute buttons BR. In other words, the second operation screen SG2 shown in Figure 7(a) displays a logout button B1, a screen switching button B2, multiple operation target item fields TK, and multiple execute buttons BR.

[0088] The second operation screen SG2 shown in Figure 7(a) corresponds to the first operation screen SG1 shown in Figure 6(a). As shown in Figures 6(a) and 7(a), unlike the first operation screen SG1, some execution buttons BR are grayed out in the second operation screen SG2. Therefore, some execution buttons BR are disabled in the second operation screen SG2. In other words, some operations of the target T included in the first operation screen SG1 are prohibited in the second operation screen SG2. Therefore, the second user cannot perform some operations. Specifically, among the multiple execution buttons BR, the execution button BR for the target T on which at least one of the indexer robot IR and the center robot CR, as explained with reference to Figure 2, operates is grayed out. Furthermore, in this embodiment, the shutdown execution button BR is grayed out.

[0089] The second operation screen SG2 is created based on the operation availability information explained with reference to Figure 6(b). Specifically, after the second user logs in, the first control unit 205 reads the operation availability information table TA from the first storage unit 204 and creates the second operation screen SG2 by referring to the operation availability information table TA. Specifically, the first control unit 205 grays out the execution button BR for the operation target T that has been given the availability data AN of "Not".

[0090] According to this embodiment, a user (second user) who has logged into the first operating device 200 (local terminal) via the second operating device 300 (remote terminal) cannot input instructions (robot transport-related instructions) to operate at least one of the indexer robot IR and the center robot CR. Therefore, the safety of workers working near the substrate processing device 100 can be further ensured.

[0091] In more detail, if a worker performing maintenance is working near the substrate processing device 100, that worker may enter the first transport chamber CH1 (Figure 2) or the second transport chamber CH2 (Figure 2) to perform maintenance. On the other hand, the second user cannot see the substrate processing device 100 and therefore cannot determine whether or not a worker is present near it. Therefore, if the second user can input robot transport-related instructions, there is a risk that the substrate processing device 100 may perform actions that endanger workers working near it. In contrast, according to this embodiment, the second user cannot input robot transport-related instructions. Therefore, even if the second user logs into the first operating device 200 and operates the first operating device 200 via the second operating device 300, the safety of workers performing maintenance near the substrate processing device 100 can be better ensured.

[0092] Next, a modified example of the second operation screen SG2 will be explained with reference to Figure 7(b). Figure 7(b) is a diagram showing a modified example of the second operation screen SG2. In the second operation screen SG2 shown in Figure 7(b), the execution button BR, which was grayed out in the second operation screen SG2 shown in Figure 7(a), has been removed. Therefore, in the second operation screen SG2 shown in Figure 7(b), as in the second operation screen SG2 shown in Figure 7(a), some operations of the target T included in the first operation screen SG1 are prohibited.

[0093] In detail, among the multiple execution buttons BR, the execution button BR for the target T that operates on at least one of the indexer robot IR and the center robot CR has been removed. Therefore, similar to the second operation screen SG2 shown in Figure 7(a), the safety of workers working near the substrate processing device 100 can be further ensured. In this embodiment, the shutdown execution button BR has also been removed.

[0094] Next, the operation screen switching method and the substrate processing system 1000 of this embodiment will be described with reference to Figures 1 to 8. Figure 8 is a diagram showing the operation screen switching method of this embodiment. More specifically, Figure 8 is a flowchart showing the flow of the operation screen switching process executed by the first control unit 205. As shown in Figure 8, the operation screen switching method (operation screen switching process) of this embodiment includes steps S1 to S5. The operation screen switching process starts when a user logs in to the first operating device 200.

[0095] As shown in Figure 8, when a user logs in to the first operating device 200, the first control unit 205 determines whether the logged-in user is the second user (step S1). In other words, the first control unit 205 determines whether a user (the second user) has logged in to the first operating device 200 via the second operating device 300 (step S1).

[0096] If the logged-in user is not the second user (No. in step S1), that is, if the logged-in user is the first user, the first control unit 205 displays the first operation screen SG1 on the first display unit 203 (step S2). Alternatively, the first control unit 205 displays the first operation screen SG1 on both the first display unit 203 and the second display unit 303. More specifically, if the second operating device 300 is remotely connected to the first operating device 200, the first control unit 205 displays the first operation screen SG1 on both the first display unit 203 and the second display unit 303.

[0097] After displaying the first operation screen SG1, the first control unit 205 determines whether the first user has logged out (step S3). If the first user has logged out (Yes in step S3), the first control unit 205 terminates the process shown in Figure 8.

[0098] Furthermore, if the first control unit 205 determines that the logged-in user is the second user (Yes in step S1), it creates the second operation screen SG2 by referring to the operation availability information table TA, as explained with reference to Figure 6(b) (step S4). In other words, the first control unit 205 creates the second operation screen SG2 based on the operation availability information. Then, the first control unit 205 displays the second operation screen SG2 on the first display unit 203 and the second display unit 303 (step S5).

[0099] After displaying the second operation screen SG2, the first control unit 205 determines whether the second user has logged out (step S3). If the second user has logged out (Yes in step S3), the first control unit 205 terminates the process shown in Figure 8.

[0100] Embodiment 1 of the present invention has been described above with reference to Figures 1 to 8. According to this embodiment, as already described, the second user cannot input robot transport-related instructions. Therefore, the safety of workers working near the substrate processing apparatus 100 can be further ensured.

[0101] [Embodiment 2] Next, Embodiment 2 of the present invention will be described with reference to Figures 1, 3 to 7, 9, and 10. However, only the differences from Embodiment 1 will be described, and the same matters as in Embodiment 1 will be omitted. Embodiment 2 differs from Embodiment 1 in the configuration of the substrate processing apparatus 100 and the operation screen switching process (operation screen switching method).

[0102] Figure 9 is a schematic plan view showing an example of a substrate processing apparatus 100 included in the substrate processing system 1000 of this embodiment. As shown in Figure 9, Embodiment 2 differs from Embodiment 1 in that the substrate processing apparatus 100 includes a detection unit 12.

[0103] The detection unit 12 detects the object to be detected. The first control unit 205 shown in Figure 4 determines whether or not the detection unit 12 has detected the object to be detected. In this embodiment, the detection unit 12 includes a first imaging device 121 and a second imaging device 122. In this embodiment, the object to be detected is a person.

[0104] The first imaging device 121 is located inside the first transport chamber CH1 and images the interior of the first transport chamber CH1, transmitting a first imaging signal indicating the imaging result to the first control unit 205. The second imaging device 122 is located inside the second transport chamber CH2 and images the interior of the second transport chamber CH2, transmitting a second imaging signal indicating the imaging result to the first control unit 205. Hereafter, when it is not necessary to distinguish between the first imaging signal and the second imaging signal, both the first imaging signal and the second imaging signal may be referred to as "imaging signals".

[0105] The first control unit 205 determines whether or not there is a person in the first transport chamber CH1 based on the first imaging signal. The first control unit 205 also determines whether or not there is a person in the second transport chamber CH2 based on the second imaging signal. More specifically, the first control unit 205 processes the first imaging signal to determine whether or not objects other than the structures in the first transport chamber CH1 are moving. Similarly, the first control unit 205 processes the second imaging signal to determine whether or not objects other than the structures in the second transport chamber CH2 are moving. The structures in the first transport chamber CH1 include the indexer robot IR. The structures in the second transport chamber CH2 include the center robot CR.

[0106] Next, the operation screen switching method and the substrate processing system 1000 of this embodiment will be described with reference to Figures 1, 3 to 7, 9, and 10. Figure 10 is a diagram showing the operation screen switching method of this embodiment. More specifically, Figure 10 is a flowchart showing the flow of the operation screen switching process executed by the first control unit 205. As shown in Figure 10, the operation screen switching method (operation screen switching process) of this embodiment includes steps S11 to S20. The operation screen switching process starts when a user logs in to the first operating device 200.

[0107] In the process shown in Figure 10, steps S11 to S13 are the same as steps S1 to S3 explained with reference to Figure 8, so their explanation is omitted here.

[0108] If the first control unit 205 determines that the logged-in user is the second user (Yes in step S11), it determines whether the detection unit 12 has detected the target (step S14). Specifically, the first control unit 205 determines, based on the imaging signal, whether or not there is a person in the first transport chamber CH1 or the second transport chamber CH2.

[0109] If the detection unit 12 determines that it has not detected the target object (No. in step S14), the first control unit 205 displays the first operation screen SG1 on the first display unit 203 and the second display unit 303 (step S15).

[0110] After displaying the second operation screen SG2, the first control unit 205 determines whether the second user has logged out (step S16). If the second user logs out (Yes in step S16), the first control unit 205 terminates the process shown in Figure 10.

[0111] If the second user has not logged out (No. in step S16), the first control unit 205 determines whether or not the detection unit 12 has detected the target object (step S17).

[0112] If the detection unit 12 does not detect the target (No. in step S17), the process returns to step S16, and the first control unit 205 determines whether the second user has logged out.

[0113] On the other hand, if the first control unit 205 determines that the detection unit 12 has detected an object to be detected (Yes in step S17), it creates the second operation screen SG2 by referring to the operation feasibility information table TA, which was explained with reference to Figure 6(b) (step S18). Then, the first control unit 205 displays the second operation screen SG2 on the first display unit 203 and the second display unit 303 (step S19).

[0114] Furthermore, if the first control unit 205 determines in step S14 that the detection unit 12 has detected an object to be detected (Yes in step S14), it refers to the operation feasibility information table TA to create the second operation screen SG2 (step S18), and displays the second operation screen SG2 on the first display unit 203 and the second display unit 303 (step S19).

[0115] After displaying the second operation screen SG2, the first control unit 205 determines whether the second user has logged out or not (step S20). If the second user has logged out (Yes in step S20), the first control unit 205 terminates the process shown in Figure 10.

[0116] Embodiment 2 of the present invention has been described above with reference to Figures 1, 3 to 7, 9, and 10. According to this embodiment, when the detection unit 12 detects an object to be detected, the second user cannot input robot transport-related instructions. Therefore, the safety of workers working near the substrate processing apparatus 100 can be further ensured. Specifically, when the presence of a person is detected in the space where the indexer robot IR operates (first transport chamber CH1) or in the space where the center robot CR operates (second transport chamber CH2), the operation of robot transport-related instructions is restricted. Therefore, the safety of workers working near the substrate processing apparatus 100 can be further ensured.

[0117] In this embodiment, the interior of the substrate processing apparatus 100 was imaged by the first imaging device 121 and the second imaging device 122. However, the area near the entrance / exit for people to enter and exit the substrate processing apparatus 100 may also be imaged. Alternatively, the vicinity (exterior) of the substrate processing apparatus 100 may be imaged.

[0118] Furthermore, in this embodiment, the first imaging device 121 and the second imaging device 122 were used as the detection unit 12, but the detection unit 12 is not limited to the first imaging device 121 and the second imaging device 122. For example, the detection unit 12 may be a human presence sensor or an infrared thermograph.

[0119] [Embodiment 3] Next, embodiments of the operation determination method and substrate processing system of the present invention will be described with reference to Figures 1, 3 to 7, 9, 11, and 12. However, only the differences from embodiments 1 and 2 will be described, and the same matters as in embodiments 1 and 2 will be omitted. Embodiment 3 differs from embodiments 1 and 2 in that the first control unit 205 performs operation determination processing instead of operation screen switching processing.

[0120] In Embodiment 3, similar to Embodiment 2, the substrate processing apparatus 100 includes a detection unit 12. More specifically, the substrate processing apparatus 100 includes a first imaging device 121 and a second imaging device 122.

[0121] Figures 11 and 12 illustrate the operation determination method of this embodiment. More specifically, Figures 11 and 12 are flowcharts showing the flow of the operation determination process executed by the first control unit 205. As shown in Figures 11 and 12, the operation determination method (operation determination process) of this embodiment includes steps S31 to S43. The operation determination process starts when a user logs in to the first operating device 200.

[0122] As shown in Figure 11, when a user logs in to the first operating device 200, the first control unit 205 determines whether the logged-in user is the second user or not (step S31).

[0123] If the logged-in user is not the second user (No. in step S31), that is, if the logged-in user is the first user, the first control unit 205 displays the first operation screen SG1 on the first display unit 203 (step S32). Alternatively, the first control unit 205 displays the first operation screen SG1 on both the first display unit 203 and the second display unit 303.

[0124] After displaying the first operation screen SG1, the first control unit 205 determines whether the first user has logged out (step S33). If the first user has logged out (Yes in step S33), the first control unit 205 terminates the processes shown in Figures 11 and 12.

[0125] If the first user has not logged out (No. in step S33), the first control unit 205 determines whether the first user has entered an instruction by operating the first input unit 202 (step S34). Specifically, the first control unit 205 determines whether an instruction to press the execution button BR, as explained with reference to Figure 6(a), has been entered.

[0126] If no instruction is entered (No. in step S34), the process returns to step S33, and the first control unit 205 determines whether the first user has logged out.

[0127] If an instruction is entered (Yes in step S34), the first control unit 205 executes that instruction (step S35). As a result, the process returns to step S33. Specifically, the first control unit 205 executes the operation target T corresponding to the pressed execution button BR. For example, if the operation target T is the start of substrate processing, the first control unit 205 controls the substrate processing apparatus 100 to cause the substrate processing apparatus 100 to execute the substrate processing.

[0128] If the first control unit 205 determines that the logged-in user is the second user (Yes in step S31), it sets a prohibition instruction as shown in Figure 12 (step S36).

[0129] More specifically, the first control unit 205 sets instructions for prohibited actions based on the operation permission information described with reference to Figure 6(b). Specifically, the first control unit 205 refers to the operation permission information table TA stored in the first storage unit 204 and sets the operation target T associated with the permission data AN of "No" as an instruction for prohibited actions.

[0130] After setting the instruction to be prohibited, the first control unit 205 displays the first operation screen SG1 on the first display unit 203 and the second display unit 303 (step S37). After displaying the first operation screen SG1, the first control unit 205 determines whether the second user has logged out or not (step S38).

[0131] If the second user has not logged out (No. in step S38), the first control unit 205 determines whether the second user has entered an instruction by operating the second input unit 302 (step S39). If no instruction has been entered (No. in step S39), the process returns to step S38, and the first control unit 205 determines whether the second user has logged out.

[0132] If an instruction is input (Yes in step S39), the first control unit 205 determines whether the detection unit 12 has detected a target object (step S40). Specifically, the first control unit 205 determines, based on the imaging signal, whether there is a person in the first transport chamber CH1 or the second transport chamber CH2.

[0133] If the detection unit 12 determines that it has detected an object to be detected (Yes in step S40), the first control unit 205 determines whether the input instruction is an instruction for an object to be prohibited (step S41).

[0134] If the input instruction is not an instruction that is prohibited (No. in step S41), the first control unit 205 executes the input instruction (step S42). Also, if the first control unit 205 determines that the detection unit 12 has not detected a target (No. in step S40), it executes the input instruction (step S42). Specifically, the first control unit 205 executes the operation target T corresponding to the pressed execution button BR. For example, if the operation target T is recipe editing, the first control unit 205 displays the recipe editing screen on the first display unit 203 and the second display unit 303. After the instruction is executed, the process returns to step S38, and the first control unit 205 determines whether the second user has logged out or not.

[0135] If the input instruction is one of the prohibited instructions (Yes in step S41), the first control unit 205 prohibits the execution of the input instruction (step S43). In other words, the first control unit 205 does not execute the input instruction. After prohibiting the execution of the instruction, the process returns to step S38, and the first control unit 205 determines whether the second user has logged out or not.

[0136] When the second user logs out (Yes in step S38), the first control unit 205 terminates the processes shown in Figures 11 and 12, as shown in Figure 11.

[0137] Embodiment 3 of the present invention has been described above with reference to Figures 1, 3 to 7, 9, 11, and 12. According to Embodiment 3, similar to Embodiment 2, when the detection unit 12 detects an object, the second user cannot input robot transport-related instructions. Therefore, the safety of workers working near the substrate processing device 100 can be further ensured.

[0138] Embodiments of the present invention have been described above with reference to the drawings (Figures 1 to 12). However, the present invention is not limited to the embodiments described above, and can be implemented in various forms without departing from its spirit. Furthermore, the multiple components disclosed in the above embodiments can be modified as appropriate. For example, some components from all the components shown in one embodiment may be added to the components of another embodiment, or some components from all the components shown in one embodiment may be deleted from the embodiment.

[0139] The drawings schematically show each component in order to facilitate understanding of the invention, and the thickness, length, number, spacing, etc. of each component shown may differ from the actual dimensions due to the convenience of drawing creation. Furthermore, the configuration of each component shown in the above embodiments is merely an example and is not particularly limiting, and it goes without saying that various modifications are possible without substantially departing from the effects of the present invention.

[0140] For example, in the embodiment described with reference to Figures 1 to 12, the substrate processing apparatus 100 was a cleaning apparatus or a wet etching apparatus, but the substrate processing apparatus 100 is not limited to a cleaning apparatus or a wet etching apparatus. The substrate processing apparatus 100 can be any apparatus that processes the substrate W. For example, the substrate processing apparatus 100 may be a dry etching apparatus, a bake apparatus, a coating apparatus, or a developing apparatus.

[0141] Furthermore, although the substrate processing apparatus 100 was a single-wafer type in the embodiments described with reference to Figures 1 to 12, the substrate processing apparatus 100 may also be a batch type.

[0142] Furthermore, in the embodiments described with reference to Figures 1 to 12, the object to be detected was a person, but the object to be detected is not limited to a person. For example, the substrate processing apparatus 100 may include a gas sensor, a humidity sensor, or a pressure sensor as the detection unit 12. The gas sensor detects the gas inside the substrate processing apparatus 100. The humidity sensor detects the humidity inside the substrate processing apparatus 100. The pressure sensor detects the pressure inside the substrate processing apparatus 100. [Industrial applicability]

[0143] This invention can be used in equipment for processing substrates. [Explanation of symbols]

[0144] 100: Substrate processing equipment 200: 1st operating device 201: First Communications Department 203: 1st display section 205: First Control Unit 300: 2nd operating device 301: Second Communications Department 303:Second display 305: Second Control Unit 1000: PCB processing system AN: Feasibility Data BR: Execute button CR: Center Robot IR: Indexer Robot SG1: 1st operation screen SG2: 2nd operation screen T: Operation target TA: Operation Availability Information Table W: Circuit board

Claims

1. The steps include determining whether a detection unit provided in the substrate processing apparatus has detected a person when a user is logged into the first operating device via a second operating device that is remotely connected to the first operating device, and If the detection unit determines that it has not detected the object to be detected, the first operation screen is displayed on the first display unit provided on the first operating device and the second display unit provided on the second operating device. When the detection unit determines that it has detected the object to be detected, the second operation screen is displayed on the first display unit and the second display unit. Includes, The second operation screen has some operations of the objects included in the first operation screen prohibited. The substrate processing apparatus includes a transport unit for transporting the substrate, The prohibited operation is an operation screen switching method that includes an operation that operates the transport unit.

2. The operation screen switching method according to claim 1, further comprising the step of creating a second operation screen based on information indicating whether or not each operation target included in the first operation screen can be executed.

3. The steps include: displaying an operation screen when a user is logged into a first operating device, via a second operating device that is remotely connected to a first operating device that controls a substrate processing device for processing substrates; The steps include determining whether the detection unit provided in the substrate processing apparatus has detected a person as the target of detection, If the detection unit determines that it has detected the object to be detected, the step is to determine whether the instruction given by the user via the operation screen is an instruction that is prohibited. If it is determined that the instruction given by the user via the operation screen is an instruction subject to prohibition, the step of prohibiting the execution of the instruction, If it is determined that the instruction given by the user via the operation screen is not an instruction subject to prohibition, the instruction is to be executed. Includes, The substrate processing apparatus includes a transport unit for transporting the substrate, The aforementioned prohibited instruction includes an instruction to operate the transport unit, which is part of the operation determination method.

4. The operation determination method according to claim 3, further comprising the step of setting instructions for prohibited items based on information indicating whether or not each operation target included in the operation screen can be executed.

5. A substrate processing apparatus for processing substrates, A first operating device for controlling the substrate processing apparatus, A second operating device that can be remotely connected to the first operating device and Equipped with, The substrate processing apparatus is A transport unit for transporting the aforementioned substrate, A detection unit that detects the target being a person. Equipped with, The first operating device is A first display unit that displays a first operation screen operated by the first user, A first communication unit that is communicatively connected to the second operating device, First control unit and Equipped with, The second operating device is A second communication unit that is connected to the first communication unit in a communication manner, A second control unit controls the second communication unit to remotely connect the second operating device to the first operating device, When the second operating device is remotely connected to the first operating device, a second display unit that displays the first or second operating screen operated by the second user, Equipped with, The first control unit is, When the second user is logged into the first operating device via the second operating device, the detection unit determines whether or not it has detected the object to be detected. If the detection unit determines that it has not detected the target object, it will display the first operation screen on the second display unit. When the detection unit determines that it has detected the object to be detected, it causes the second display unit to display the second operation screen. The second operation screen has some operations of the objects included in the first operation screen prohibited. The prohibited operation includes an operation that operates the transport unit in the substrate processing system.

6. The substrate processing system according to claim 5, wherein the first control unit creates the second operation screen based on information indicating whether or not each operation target included in the first operation screen can be executed.

7. A substrate processing apparatus for processing substrates, A first operating device for controlling the substrate processing apparatus, A second operating device that can be remotely connected to the first operating device and Equipped with, The substrate processing apparatus is A transport unit for transporting the aforementioned substrate, A detection unit that detects the target being a person. Equipped with, The first operating device is A first display unit that displays an operation screen operated by the first user, A first communication unit that is communicatively connected to the second operating device, First control unit and Equipped with, The second operating device is A second communication unit that is connected to the first communication unit in a communication manner, A second control unit controls the second communication unit to remotely connect the second operating device to the first operating device, When the second operating device is remotely connected to the first operating device, a second display unit displays the operation screen operated by the second user. Equipped with, The first control unit is, When the second user is logged into the first operating device via the second operating device, the operation screen is displayed on the second display unit. The detection unit determines whether or not it has detected the object to be detected. When the detection unit determines that it has detected the object to be detected, it determines whether the instruction given by the second user via the operation screen is an instruction that is prohibited. If it is determined that the instruction given by the second user via the operation screen is an instruction subject to prohibition, the execution of the instruction is prohibited. If it is determined that the instruction given by the second user via the operation screen is not an instruction subject to prohibition, the instruction is executed. The prohibited instruction includes an instruction to operate the transport unit in the substrate processing system.

8. The substrate processing system according to claim 7, wherein the first control unit sets instructions for the prohibited items based on information indicating whether or not each operation target included in the operation screen can be executed.

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