Electric motor, stage equipment, lithography equipment, and method for manufacturing articles

Abstract

To provide an advantageous technique for shortening a time required to stop or decelerate a mover while preventing damage to a coil.SOLUTION: An electric motor includes a magnet assembly, a coil assembly including a plurality of coils, a first dynamic braking circuit and a second dynamic braking circuit which generate braking forces by short-circuiting those of the plurality of coils which face the magnet assembly, and a control circuit which controls the operation of the first dynamic braking circuit and the second dynamic braking circuit, the control circuit activates the first dynamic braking circuit and the second dynamic braking circuit at mutually different times.SELECTED DRAWING: Figure 1A

Description

Technical Field

[0001] The present invention relates to an electric motor, a stage device, a lithography device, and an article manufacturing method.

Background Art

[0002] Patent Document 1 describes a stage device that moves a moving body by a linear motor. This linear motor has a plurality of coils as stators and a magnet as a mover, and generates a thrust by Lorentz force by switching the energized coil among the plurality of coils. In this stage device, among a pair of coils arranged at positions separated from each other, the coil facing the magnet is used as a dynamic braking coil, and the other coil is used as a current limiting resistor.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Although it is possible to prevent damage to the coil by restricting the current flowing through the dynamic braking coil during the operation of the dynamic brake, there is a problem that the time required to stop or decelerate the mover becomes long.

[0005] An object of the present invention is to provide an advantageous technique for shortening the time required to stop or decelerate the mover while preventing damage to the coil.

Means for Solving the Problems

[0006] One aspect of the present invention relates to an electric motor comprising a magnet assembly and a coil assembly including a plurality of coils, wherein the electric motor comprises a first dynamic brake circuit and a second dynamic brake circuit that generate a braking force by short-circuiting the coils among the plurality of coils that face the magnet assembly, and a control circuit that controls the operation of the first dynamic brake circuit and the second dynamic brake circuit, wherein the control circuit activates the second dynamic brake circuit when the first dynamic brake circuit is activated and the second dynamic brake circuit is not activated, and controls it so that the time when the first dynamic brake circuit is activated and the time when the second dynamic brake circuit is activated overlap.

Effects of the Invention

[0007] According to the present invention, an advantageous technique is provided for reducing the time required to stop or decelerate the movable part while preventing damage to the coil. [Brief explanation of the drawing]

[0008] [Figure 1A] This figure shows the circuit configuration of phase A of the motor of the first embodiment during normal operation. [Figure 1B] This figure shows the circuit configuration of the B phase of the motor of the first embodiment during normal operation. [Figure 2A] This diagram shows the circuit configuration of phase A of the motor in the first embodiment during the first stage of emergency stop. [Figure 2B] This diagram shows the circuit configuration of phase A of the motor in the first embodiment during the first stage of emergency stop. [Figure 3A] This diagram shows the circuit configuration of phase A of the motor in the first embodiment during the second stage of emergency stop. [Figure 3B] This diagram shows the circuit configuration of phase A of the motor in the first embodiment during the second stage of emergency stop. [Figure 4] A perspective view showing the configuration of the stage device and electric motor according to the second embodiment. [Figure 5] A perspective view showing the configuration of the stage device and electric motor according to the second embodiment. [Figure 6] A top view showing the configuration of the stage device and electric motor of the second embodiment. [Figure 7] A diagram showing the configuration of the magnet assembly and coil assembly of the electric motor according to the second embodiment. [Figure 8A] This figure shows the circuit configuration of phase A of the motor of the second embodiment during normal operation. [Figure 8B] This figure shows the circuit configuration of the B phase of the motor of the second embodiment during normal operation. [Figure 9A] This diagram shows the circuit configuration of phase A of the motor in the second embodiment during the first stage of emergency stop. [Figure 9B] This diagram shows the circuit configuration of phase A of the motor in the second embodiment during the first stage of emergency stop. [Figure 10A] Figure showing the circuit configuration of phase A of the motor of the second embodiment in the second stage during emergency stop. [Figure 10B] Figure showing the circuit configuration of phase A of the motor of the second embodiment in the second stage during emergency stop. [Figure 11] Perspective view showing the configuration of the stage device and the motor of the third embodiment. [Figure 12] Perspective view showing the configuration of the stage device and the motor of the third embodiment. [Figure 13] Figure showing the configuration of the magnet assembly and the coil assembly of the motor of the third embodiment. [Figure 14] Perspective view showing the configuration of the stage device and the motor of the fourth embodiment. [Figure 15] Top view showing the configuration of the stage device and the motor of the fourth embodiment. [Figure 16] Perspective view showing the configuration of the stage device and the motor of the fifth embodiment. [Figure 17] Perspective view showing the configuration of the stage device and the motor of one embodiment. [Figure 18] Perspective view showing the configuration of the stage device and the motor of one embodiment. [Figure 19] Partial enlarged view of FIG. 18. [Figure 20] Cross-sectional view showing the configuration of the magnet assembly and the coil assembly of the motor of one embodiment. [Figure 21] Top view showing the configuration of the stage device and the motor of one embodiment. [Figure 22] Top view showing the configuration of the magnet assembly and the coil assembly of the motor of one embodiment. [Figure 23A] Figure showing the circuit configuration of phase A of the motor of the comparative example during normal operation. [Figure 23B] Figure showing the circuit configuration of phase B of the motor of the comparative example during normal operation. [Figure 24A] Figure showing the circuit configuration of phase A of the motor of the comparative example during emergency stop. [Figure 24B] Figure showing the circuit configuration of phase B of the motor of the comparative example during emergency stop. [Figure 25] A diagram illustrating the configuration of a lithography apparatus according to one embodiment. [Figure 26A] This diagram shows the circuit configuration of phase A of the motor in the third embodiment during an emergency stop. [Figure 26B] This diagram shows the circuit configuration of the B phase of the motor in the third embodiment during an emergency stop. [Modes for carrying out the invention]

[0009] The embodiments will be described in detail below with reference to the attached drawings. Note that the following embodiments do not limit the invention as defined in the claims. While the embodiments describe multiple features, not all of these features are essential to the invention, and the features may be combined in any way. Furthermore, in the attached drawings, identical or similar configurations are given the same reference numerals, and redundant descriptions are omitted.

[0010] First, an example of the configuration of a stage device ST according to one embodiment will be described with reference to Figures 17, 18, 19, 20, 21, and 22. Figure 17 is a perspective view of the stage device ST. Figure 18 is a perspective view of the stage device ST of Figure 17 with some components removed. Figure 19 is an enlarged perspective view of a part of Figure 18. Figure 20 is a cross-sectional view showing an example of the configuration of a coil assembly (stator) 505 and a magnet assembly (movable element) 504. Figure 21 is a top view of the stage device ST. Figure 22 is a top view showing an example of the configuration of a coil assembly (stator) 505 and a magnet assembly (movable element) 504. The coil assembly (stator) 505 and the magnet assembly (movable element) 504 constitute an electric motor, in this example, a linear motor.

[0011] Yaw guides 501 may be fixed to each of the two sides of the base 500. The stage 502 may be slidably supported by the top surface of the base 500 and the sides of the two yaw guides 501 via air slides (not shown). An arm 503 may be fixed on the stage 502, and a magnet assembly 504 as a movable element may be fixed to the end of the arm 503. The magnet assembly 504 faces the coil assembly 505 non-contactingly so as to surround the coil assembly 505 as a stator. The coil assembly 505 may be fixed to a coil support structure 506. The coil support structure 506 may include a column 506-1 and a base 506-2.

[0012] The magnet assembly 504 may include an upper yoke 504-1U, two spacers 504-2, an upper magnet row 504-3U, a lower magnet row 504-3L, and a lower yoke 504-1L. The upper magnet row 504-3U may include two upward-magnetized magnets 504-3VU, two downward-magnetized magnets 504-3VL, two Y+-oriented magnetized magnets 504-3YP, and three Y--oriented magnetized magnets 504-3YM. The upper magnet row 504-3U may be fixed to the upper yoke 504-1U to form a Halbach arrangement of magnets that forms a substantially sinusoidal magnetic flux density distribution. The lower magnet row 504-3L may be fixed to the lower yoke 504-1L to form a Halbach arrangement of magnets similar to the upper magnet row 504-3U. The coil assembly 505 may include eleven flattened oval coils 505-C and coil support members 505-S that support them. The flattened oval coils 505-C may be fixed to the coil support members 505-S by means of adhesive or other methods.

[0013] If the period of the approximately sinusoidal magnetic flux density distribution is T, the distance between adjacent coils is 3 / 4T in terms of center-to-center distance and 3 / 2π in terms of electrical angle. The distance between coils that are spaced one apart is 3π in terms of electrical angle, and their phases are opposite. Therefore, by reversing the connections to the windings of the spaced-apart coils, they can be treated as coils that are in phase. Here, a set of spaced-apart coils 505A constitutes an A-phase coil set, and the remaining sets of spaced-apart coils 505B constitute a B-phase coil set 505B. Then, at position y of the stage 502 (driving direction, i.e., the direction of arrangement of the multiple coils), a current of Ia = I·sin(2π / T·y) is passed through the A-phase coil set, and a current of Ib = I·sin(2π / T·y + 3 / 2π) is passed through the B-phase coil set. This makes it possible to generate thrust at position y that is proportional to the current amplitude I. Currents Ia and Ib are supplied only to the coils facing the magnet, not to all of the coils.

[0014] Figure 22 shows the magnet assembly 504 and coil assembly 505 with the upper yoke 504-1U removed. The coil shown in white is coil 505A of the A-phase coil set, and the coil shown in gray is coil 505B of the B-phase coil set.

[0015] Here, a comparative example will be explained with reference to Figures 23A, 23B, 24A, and 24B. Figure 23A shows the A-phase coil set's coil 505A together with the driver 600A, coil selector 601A, short circuit 604A, and stop command circuit 605A. Figure 23B shows the B-phase coil set's coil 505B together with the driver 600B, coil selector 601B, short circuit 604B, and stop command circuit 605B. Figures 23A and 23B also show the operation during normal operation.

[0016] In phase A, driver 600A is connected to each coil 505A of the phase A coil set via coil selector 601A. In phase B, driver 600B is connected to each coil 505B of the phase B coil set via coil selector 601B. Coil selectors 601A and 601B control the connection so that only the coils facing the magnet assembly 504 are connected to drivers 600A and 600B, while the others are not connected to drivers 600A and 600B. Of the two terminals of each coil, the terminal opposite the coil selector is connected to a switch 602G for connecting to a common ground and one end of a switch 602S for short-circuiting each coil. The common ground is indicated by an inverted triangle. The other end of switch 602S is connected to the coil selector side via an external resistor 603.

[0017] The A-phase stop command circuit 605A controls the activation and deactivation of the stop command signal that causes each switch 602S of the A-phase short circuit circuit 604A to be in a conducting state, i.e., to short-circuit each coil 505A of the A-phase coil set. The B-phase stop command circuit 605B controls the activation and deactivation of the stop command signal that causes each switch 602S of the B-phase short circuit circuit 604B to be in a conducting state, i.e., to short-circuit each coil 505B of the B-phase coil set. Activation of the stop command signal means that the switch 602S is transitioned to a conducting state, and deactivation of the stop command signal means that the switch 602S is transitioned to a non-conducting state. When the stop command signal is active, it means that the switch 602S is in a conducting state, and when the stop command signal is inactive, it means that the switch 602S is in a non-conducting state.

[0018] During normal operation, the coil selectors 601A and 601B connect the drivers 600A and 600B only to the coils facing the magnet assembly 504, and the stop command circuits 605A and 605B maintain the stop command signal inactive. Also, during normal operation, in the short circuits 604A and 604B, all switches 602G are in a conductive state, and all switches S602S are in a non-conductive state.

[0019] Figures 24A and 24B show the operation during an emergency stop. During an emergency stop, the stop command circuits 605A and 605B activate the stop command signal. This state is indicated by showing the stop command circuits 605A and 605B in gray. During an emergency stop, all coil selectors 601A and 601B are de-conducted, and in the short circuit circuits 604A and 604B, all switches 602G are de-conducted.

[0020] Here, let Ea be the back electromotive force of each coil 505A in the A-phase coil set, Eb be the back electromotive force of each coil 505B in the B-phase coil set, R be the resistance of coils 505A and 505B, and Ro be the resistance of the external resistor 603. A current of Iea = Ea / (R+Ro) flows through the A-phase coil 505A facing the magnet assembly 504, and a dynamic brake functions. Similarly, a current of Ieb = Eb / (R+Ro) flows through the B-phase coil 505B facing the magnet assembly 504, and a dynamic brake functions. If a large acceleration acts on the stage 502 due to the dynamic brake, the stage 502 will be damaged, so to prevent this, Ro is set to an appropriate value and Iea and Ieb are limited to appropriate values.

[0021] The motor of the first embodiment will be described below with reference to Figures 1A, 1B, 2A, 2B, 3A, and 3B. Matters not mentioned as part of the first embodiment may follow the above description. The motor of the first embodiment can be used, for example, as a motor for a stage device. Figure 1A shows coil 505A of the A-phase coil set together with driver 600A, coil selector 601A, short circuit 704A, and control circuit 710A. Figure 1B shows coil 505B of the B-phase coil set together with driver 600B, coil selector 601B, short circuit 604B, and control circuit 710B.

[0022] In phase A, driver 600A is connected to each coil 505A of the phase A coil set via coil selector 601A. In phase B, driver 600B is connected to each coil 505B of the phase B coil set via coil selector 601B. Coil selectors 601A and 601B control the connection of only the coils facing the magnet assembly 504 to drivers 600A and 600B, while the others remain disconnected. One end of switch 702G, which connects to a common ground, and one end of switches 702S-1 and 702S-2, which short-circuit each coil, are connected to the terminal opposite the coil selector. The other ends of switches 702S-1 and 702S-2 are connected to the coil selector side via external resistors 703-1 and 703-2.

[0023] In other words, the A-phase short circuit 704A includes an external resistor (first resistor) 703-1 and a switch (first switch) 702S-1 arranged in the path connecting the two terminals of coil 505A as a first dynamic brake circuit. Furthermore, the A-phase short circuit 704A includes an external resistor (second resistor) 703-2 and a switch (second switch) 702S-2 arranged in the path connecting the two terminals of coil 505A as a second dynamic brake circuit.

[0024] Similarly, the B-phase short circuit 704B includes, as a first dynamic brake circuit, an external resistor (first resistor) 703-1 and a switch (first switch) 702S-1 arranged in the path connecting the two terminals of coil 505B. The B-phase short circuit 704B also includes, as a second dynamic brake circuit, an external resistor (second resistor) 703-2 and a switch (second switch) 702S-2 arranged in the path connecting the two terminals of coil 505B. These dynamic brake circuits generate a braking force that brakes the stage 502 (or, in other words, the magnet assembly 504 as a movable element).

[0025] The A-phase control circuit 710A controls the operation of the first dynamic brake circuit (703-1, 702S-1) and the second dynamic brake circuit (703-2, 702S-2). The control circuit 710A activates the first dynamic brake circuit (703-1, 702S-1) and the second dynamic brake circuit (703-2, 702S-2) at different timings. The control circuit 710A may include a first generation circuit 705A that generates a first braking signal BA1 to activate the first dynamic brake circuit, and a second generation circuit 706A that generates a second braking signal BA2 to activate the second dynamic brake circuit. The second generation circuit 706A may include a delay unit that generates the second braking signal BA2 by delaying the first braking signal BA1. The delay unit may be composed of an analog circuit including a CR integrator, for example, or a counter composed of an FPGA or the like. The delay time provided by the delay unit can be set to, for example, a few milliseconds.

[0026] Alternatively, the control circuit 710A may be configured to include a generation circuit for generating a first signal and a delayer for generating a second signal which is a delayed version of the first signal. In this case, the control circuit 710A may activate a first braking signal BA1 which activates a first dynamic braking circuit in response to the activation of the first signal, and activate a second braking signal BA2 which activates a second dynamic braking circuit in response to the activation of the second signal.

[0027] Similarly, the B-phase control circuit 710B controls the operation of the B-phase first dynamic brake circuits (703-1, 702S-1) and the B-phase second dynamic brake circuits (703-2, 702S-2). The control circuit 710B activates the first dynamic brake circuits (703-1, 702S-1) and the second dynamic brake circuits (703-2, 702S-2) at different timings. The control circuit 710B may include a first generation circuit 705B that generates a first braking signal BB1 to activate the first dynamic brake circuit, and a second generation circuit 706B that generates a second braking signal BB2 to activate the second dynamic brake circuit. The second generation circuit 706B may include a delayer that generates the second braking signal BB2 by delaying the first braking signal BB1.

[0028] Alternatively, the control circuit 710B may be configured to include a generation circuit for generating a first signal and a delay circuit for generating a second signal which is a delayed version of the first signal. In this case, the control circuit 710B may activate a first braking signal BB1 which activates a first dynamic braking circuit in response to the activation of the first signal, and activate a second braking signal BB2 which activates a second dynamic braking circuit in response to the activation of the second signal.

[0029] Activation of braking signals BA1(BB1) and BA2(BB2) means that switch 702S-1 transitions to -1 and 702S-2 transitions to a conductive state. Deactivation of braking signals BA1(BB1) and BA2(BB2) means that switch 702S-1 transitions to -1 and 702S-2 transitions to a non-conductive state. When braking signals BA1(BB1) and BA2(BB2) are active, it means that switch 702S-1 is in a -1 state and 702S-2 is in a conductive state. When braking signals BA1(BB1) and BA2(BB2) are inactive, it means that switch 702S-1 is in a -1 state and 702S-2 is in a non-conductive state.

[0030] The electric motor of this embodiment may be equipped with a power source, such as an emergency power supply or a capacitor, to supply power to the circuits (control circuits 710A, 710B, short circuit 704A, short circuit 704B, etc.) in order to apply dynamic braking in the event of power loss. In the event of power loss, the circuits can operate to apply dynamic braking by power supplied from such a power source.

[0031] Figures 1A and 1B schematically show the state of the motor during normal operation, in other words, when the stage 502 (magnet assembly 504) is driven by the motor (linear motor). During normal operation, the coil selectors 601A and 601B connect the drivers 600A and 600B only to the coils facing the magnet assembly 504, and the control circuits 710A and 710B maintain the braking signals BA1, BA2, BB1, and BB2 in an inactive state. Also, during normal operation, in the short circuits 704A and 704B, all switches 702G are in a conductive state, and all switches 702S-1 and 702S-2 are in a non-conductive state.

[0032] Figures 2A and 2B schematically show the state of the motor in the first stage of emergency stopping, in other words, the operation to bring the stage 502 (magnet assembly 504) driven by the motor (linear motor) to an emergency stop. In the first stage, all coil selectors 601A and 601B are de-conducted, and in the short circuits 704A and 704B, all switches 702G are de-conducted.

[0033] Furthermore, in the first stage, the control circuits 710A and 710B activate the first braking signals BA1 and BB1, while the second braking signals BA2 and BB2 are kept inactive. As a result, in the short-circuit circuits 704A and 704B, switch 702G is kept in a non-conductive state, switch 702S-1 transitions to and is kept in a conductive state, and switch 702S-2 is kept in a non-conductive state.

[0034] Here, let Ea be the back electromotive force of each coil 505A in the A-phase coil set, Eb be the back electromotive force of each coil 505B in the B-phase coil set, R be the resistance of coils 505A and 505B, and Ro1 be the resistance of the external resistor 703-1. In the first stage, the current Iea flowing through the A-phase coil 505A facing the magnet assembly 504, and the current Ieb flowing through the B-phase coil 505B facing the magnet assembly 504, are given by equations (1) and (2). A dynamic brake according to these currents Iea and Ieb acts on the stage 502, and a braking force acts on the stage 502.

[0035] Iea = Ea / (R + Ro1) ... (1) Ieb = Eb / (R + Ro1) ... (2) Figures 3A and 3B schematically show the second stage state of the motor during an emergency stop. The transition from the first stage to the second stage occurs when the second braking signals BB1 and BB2 are activated after a predetermined delay time following the activation timing of the first braking signals BA1 and BA2. In the second stage, all coil selectors 601A and 601B are kept in a non-conductive state, and in the short circuits 704A and 704B, all switches 702G are kept in a non-conductive state.

[0036] Furthermore, in the second stage, the control circuits 710A and 710B maintain the active state of the first braking signals BA1 and BB1, and activate the second braking signals BA2 and BB2. As a result, in the short-circuit circuits 704A and 704B, switch 702G is maintained in a non-conductive state, switch 702S-1 is maintained in a conductive state, and switch 702S-2 transitions to and maintains a conductive state.

[0037] Here, the resistance of the external resistor 703-2 is denoted as Ro2. In the second stage, the current Iea' flowing through the A-phase coil 505A facing the magnet assembly 504, and the current Ieb' flowing through the B-phase coil 505B facing the magnet assembly 504, are given by equations (1') and (2'). A dynamic brake according to these currents Iea' and Ieb' acts on the stage 502, and a braking force acts on the stage 502.

[0038] Iea'=Ea / (R+1 / (1 / Ro2+1 / Ro1)) ···(1') Ieb'=Eb / (R+1 / (1 / Ro2+1 / Ro1)) ···(2') In equations (1') and (2'), 1 / (1 / Ro2+1 / Ro1) is smaller than Ro1 in equations (1) and (2), so the current value is larger, and a large braking force acts on stage 502. In other words, in the first stage, a weak braking force is applied to the dynamic brake on stage 502 to avoid damage to stage 502. Then, in the second stage after a predetermined delay time, a strong braking force is applied to the dynamic brake on stage 502 to shorten the braking distance of stage 502. However, depending on the application and purpose, the opposite may be applied: a strong braking force is applied to the dynamic brake on stage 502, and then a weak braking force is applied to stage 502 after a predetermined delay time.

[0039] The stage apparatus and motor of the second embodiment will be described with reference to Figures 4, 5, 6, 7, 8A, 8B, 9A, 9B, 10A, and 10B. Matters not mentioned as part of the second embodiment may follow the above description. Figure 4 is a perspective view of the stage apparatus ST. Figure 5 is a perspective view of the stage apparatus ST of Figure 4 with some components removed. Figure 6 is a top view of the stage apparatus ST. The coil assembly (stator) 805 and the magnet assembly (movable element) 804 constitute the motor, in this example, a linear motor.

[0040] In the second embodiment, the magnet assembly 804 is divided into two magnet assemblies 8041 and 8042. The magnet assemblies 8041 and 8042 may have a configuration similar to that of the magnet assembly 504 shown in Figures 17 to 22. The magnet assemblies 5041 and 5042 may be coupled to the stage 502 via an arm 503. In the second embodiment, a braking force acts on magnet assembly 8041 in response to the activation of a first braking signal, and a braking force acts on magnet assembly 8042 in response to a second braking signal which is activated after a predetermined delay time from the activation of the first braking signal.

[0041] Yaw guides 501 may be fixed to each of the two sides of the base 500. The stage 502 may be slidably supported by the top surface of the base 500 and the sides of the two yaw guides 501 via an air slide (not shown). Two arms 503 may be fixed to the stage 502, and magnet assemblies 8041 and 8402, which constitute a movable element, may be fixed to the ends of the two arms 503, respectively. The magnet assemblies 8041 and 8042 face the coil assembly 805 in a non-contact manner, surrounding the coil assembly 805 which serves as a stator. The coil assembly 805 may be fixed to a coil support structure 506. The coil support structure 506 may include a column 506-1 and a base 506-2.

[0042] The magnet assembly 8041 may include an upper yoke 8041-1U, two spacers 8041-2, an upper magnet row 8041-3U, a lower magnet row 8041-3L (not shown), and a lower yoke 8041-1L. The upper magnet row 8041-3U may include two upward-magnetized magnets 504-3VU, two downward-magnetized magnets 504-3VL, two Y+-oriented magnetized magnets 504-3YP, and three Y--oriented magnetized magnets 504-3YM, similar to the configuration in Figure 20. The upper magnet row 8041-3U may be fixed to the upper yoke 8041-1U to form a Halbach arrangement of magnets that forms a substantially sinusoidal magnetic flux density distribution. The lower magnet row 8041-3L may be fixed to the lower yoke 8041-1L to form a Halbach arrangement of magnets, similar to the upper magnet row 8041-3U. The upper magnet array 8041-3U can be understood as a first magnet array that generates thrust due to the magnetic field generated by a first coil selected from a plurality of first coils 505A-1. The lower magnet array 8041-3L can be understood as a third magnet array that generates thrust due to the magnetic field generated by a first coil selected from a plurality of first coils 505A-1.

[0043] Magnet assembly 8042 may have a similar configuration to magnet assembly 8041. Magnet assembly 8042 may include an upper yoke 8042-1U, two spacers 8042-2, an upper magnet row 8042-3U, a lower magnet row 8042-3L (not shown), and a lower yoke 8042-1L. The upper magnet row 8042-3U can be understood as a second magnet row that generates thrust due to the magnetic field generated by a second coil selected from a plurality of second coils 505A-2. The lower magnet row 8042-3L can be understood as a fourth magnet row that generates thrust due to the magnetic field generated by a second coil selected from a plurality of second coils 505A-2.

[0044] The coil assembly 505 may include eleven flattened oval coils 505-C and coil support members 505-S that support them. The flattened oval coils 505-C may be fixed to the coil support members 505-S by means of adhesive or other methods. In layer A, a plurality of first coils 505A-1 may be understood as being arranged between the first end (end in the -Y direction) and the second end (end in the +Y direction) of the coil assembly, and a plurality of second coils 505A-2 may be understood as being arranged between the plurality of first coils and the second end. Similarly, in layer B, a plurality of first coils 505B-1 may be arranged between the first end (end in the -Y direction) and the second end (end in the +Y direction) of the coil assembly, and a plurality of second coils 505B-2 may be understood as being arranged between the plurality of first coils and the second end. The upper magnet row 8041-3U (first magnet row) and the lower magnet row 8041-3L (third magnet row) are arranged to face each other via the coil assembly 505. The upper magnet row 8042-3U (second magnet row) and the lower magnet row 8042-3L (fourth magnet row) may also be arranged to face each other via the coil assembly 505.

[0045] Figure 7 shows the magnet assemblies 8041 and 8042 and the coil assembly 505 with the upper yokes 8041-1U and 8042-1U removed. The coil shown in white is coil 505A of the A-phase coil set, and the coil shown in gray is coil 505B of the B-phase coil set.

[0046] Figure 8A shows the coil 505A of the A-phase coil set together with drivers 800A-1 and 800A-2, coil selectors 801A-1 and 801A-2, short circuits 804A-1 and 804A-2, and control circuits 810A-1 and 805A-2. Here, the multiple coils 505A constituting the A-phase coil set include multiple first coils 505A-1 and multiple second coils 505A-2. Driver 800A-1, coil selector 801A-1, short circuit 804A-1, and control circuit 810A-1 constitute the first A-phase system related to the multiple first coils 505A-1. Driver 800A-2, coil selector 801A-2, short circuit 804A-2, and control circuit 810A-2 constitute the second A-phase system related to the multiple first coils 505A-2.

[0047] Figure 8B shows the coil 505B of the B-phase coil set together with drivers 800B-1 and 800B-2, coil selectors 801B-1 and 801B-2, short circuits 804B-1 and 804B-2, and control circuits 605B-1 and 605B-2. Here, the multiple coils 505B that make up the B-phase coil set include multiple second coils 505B-1 and multiple second coils 505B-2. Driver 800B-1, coil selector 801B-1, short circuit 804B-1, and control circuit 810B-1 constitute the first B-phase system involving multiple first coils 505B-1. Driver 800B-2, coil selector 801B-2, short circuit 804B-2, and control circuit 810B-2 constitute the second B-phase system involving multiple first coils 505B-2.

[0048] In the first system of phase A, driver 800A-1 is connected to each coil 505A-1 of the first system of phase A via coil selector 801A-1. In the second system of phase A, driver 800A-2 is connected to each coil 505A-2 of the second system of phase A via coil selector 801A-2. Coil selectors 801A-1 and 801A-2 control the connection of only the coils facing magnet assemblies 8041 and 8042 to drivers 800A-1 and 800A-2, while the others are disconnected from drivers 800A-1 and 800A-2. Of the two terminals of each coil 505A-1 of the first system, the terminal opposite to coil selector 801A-1 is connected to a common ground, and one end of switch 802S-1 is connected to short-circuit each coil 505A-1. The other end of switch 802S-1 is connected to coil selector 801A-1 via external resistor 803-1. Similarly, of the two terminals of each coil 505A-2 in the second system, the terminal opposite to coil selector 801A-2 is connected to switch 802G-2 for connection to a common ground, and one end of switch 802S-2 for short-circuiting each coil 505A-2. The other end of switch 802S-2 is connected to coil selector 801A-2 via external resistor 803-2.

[0049] In other words, the first short circuit 804A-1 of phase A includes an external resistor (first resistor) 803-1 and a switch (first switch) 802S-1 arranged in a path connecting the two terminals of coil 505A-1, as a first dynamic brake circuit. The second short circuit 804A of phase A includes an external resistor (second resistor) 803-2 and a switch (second switch) 802S-2 arranged in a path connecting the two terminals of coil 505A-2, as a second dynamic brake circuit. These dynamic brake circuits generate a braking force that brakes the stage 502 (or, in other words, the magnet assembly 504 as a movable element).

[0050] The configuration of phase B is similar. In the first system of phase B, driver 800B-1 is connected to each coil 505B-1 of the first system of phase B coil set via coil selector 801B-1. In the second system of phase B, driver 800B-2 is connected to each coil 505B-2 of the second system of phase B coil set via coil selector 801B-2. Coil selectors 801B-1 and 801B-2 control the connection of only the coils facing magnet assemblies 8041 and 8042 to drivers 800B-1 and 800B-2, while the others are disconnected from drivers 800B-1 and 800B-2. Of the two terminals of each coil 505B-1 of the first system, the terminal opposite to coil selector 801B-1 is connected to a common ground, and one end of switch 802G-1 for short-circuiting each coil 505B-1 is connected to switch 802S-1. The other end of switch 802S-1 is connected to coil selector 801B-1 via external resistor 803-1. Similarly, of the two terminals of each coil 505B-2 in the second system, the terminal opposite to coil selector 801B-2 is connected to switch 802G-2 for connection to a common ground, and one end of switch 802S-2 for short-circuiting each coil 505B-2. The other end of switch 802S-2 is connected to coil selector 801B-2 via external resistor 803-2.

[0051] In other words, the first short circuit 804B-1 of phase B includes an external resistor (first resistor) 803-1 and a switch (first switch) 802S-1 arranged in a path connecting the two terminals of coil 505B-1, as a first dynamic brake circuit. The second short circuit 804B of phase B includes an external resistor (second resistor) 803-2 and a switch (second switch) 802S-2 arranged in a path connecting the two terminals of coil 505B-2, as a second dynamic brake circuit. These dynamic brake circuits generate a braking force that brakes the stage 502 (or, in other words, the magnet assembly 504 as a movable element).

[0052] The A-phase control circuit 810A controls the operation of the first dynamic brake circuit (803-1, 802S-1) and the second dynamic brake circuit (803-2, 802S-2). The control circuit 810A activates the first dynamic brake circuit (803-1, 802S-1) and the second dynamic brake circuit (803-2, 802S-2) at different timings. The control circuit 810A may include a first generation circuit 805A that generates a first braking signal BA1 to activate the first dynamic brake circuit, and a second generation circuit 806A that generates a second braking signal BA2 to activate the second dynamic brake circuit. The second generation circuit 806A may include a delay unit that generates the second braking signal BA2 by delaying the first braking signal BA1. The delay unit may be composed of, for example, an analog circuit including a CR integrator, or a counter composed of an FPGA or the like. The delay time provided by the delay unit can be set to, for example, a few milliseconds.

[0053] Alternatively, the control circuit 810A may be configured to include a generation circuit for generating a first signal and a delayer for generating a second signal which is a delayed version of the first signal. In this case, the control circuit 810A may activate a first braking signal BA1 which activates a first dynamic braking circuit in response to the activation of the first signal, and activate a second braking signal BA2 which activates a second dynamic braking circuit in response to the activation of the second signal.

[0054] The B-phase control circuit 810B controls the operation of the first dynamic brake circuit (803-1, 802S-1) and the second dynamic brake circuit (803-2, 802S-2). The control circuit 810B activates the first dynamic brake circuit (803-1, 802S-1) and the second dynamic brake circuit (803-2, 802S-2) at different timings. The control circuit 810B may include a first generation circuit 805B that generates a first braking signal BB1 to activate the first dynamic brake circuit, and a second generation circuit 806B that generates a second braking signal BB2 to activate the second dynamic brake circuit. The second generation circuit 806B may include a delay unit that generates the second braking signal BB2 by delaying the first braking signal BB1. The delay unit may be composed of an analog circuit including a CR integrator, for example, or a counter composed of an FPGA or the like. The delay time provided by the delay unit can be set to, for example, a few milliseconds.

[0055] Alternatively, the control circuit 810B may be configured to include a generation circuit for generating a first signal and a delay circuit for generating a second signal which is a delayed version of the first signal. In this case, the control circuit 810B may activate a first braking signal BB1 which activates a first dynamic braking circuit in response to the activation of the first signal, and activate a second braking signal BB2 which activates a second dynamic braking circuit in response to the activation of the second signal.

[0056] Figures 8A and 8B schematically show the state of the motor during normal operation, in other words, when the stage 502 (magnet assemblies 8041 and 8042) is driven by the motor (linear motor). During normal operation, the coil selectors 801A-1, 801A-2, 801B-1, and 801B-2 connect the drivers 800A-1, 800A-2, 800B-1, and 800B-2 only to the coils facing the magnet assemblies 8041 and 8042. In addition, the control circuits 810A and 810B maintain the braking signals BA1, BA2, BB1, and BB2 in an inactive state. Furthermore, during normal operation, in the short circuits 804A-1, 804A-2, 804B-1, and 804B-2, all switches 802G-1 and 802G-2 are in a conductive state, and all switches 802S-1 and 802S-2 are in a non-conductive state.

[0057] Figures 9A and 9B schematically show the state of the motor in the first stage of emergency stop operation, in other words, the operation to emergency stop the stage 502 (magnet assemblies 8041 and 8042) which was driven by the motor (linear motor). In the first stage, all coil selectors 801A-1, 801A-2, 801B-1, and 801B-2 are de-conducted. Also in the first stage, all switches 802G-1 and 802G-2 in the short circuits 804A-1, 804A-2, 804B-1, and 804B-2 are de-conducted.

[0058] Furthermore, in the first stage, the control circuits 810A and 810B activate the first braking signals BA1 and BB1, while the second braking signals BA2 and BB2 are kept inactive. As a result, in the short circuits 804A-1 and 804B-1, switch 802G-1 is kept in a non-conductive state, switch 802S-1 transitions to and is kept in a conductive state, and switch 802S-2 is kept in a non-conductive state. This allows the first coil 505A-1 of phase A and the first coil 505B-1 of phase B to apply a braking force to the stage 502 by dynamic braking.

[0059] Figures 10A and 10B schematically show the second stage state of the motor during an emergency stop. The transition from the first stage to the second stage occurs when the second braking signals BB1 and BB2 are activated after a predetermined delay time following the activation timing of the first braking signals BA1 and BA2. In the second stage, all coil selectors 801A-1, 801A-2, 801B-1, and 801B-2 are kept in a non-conductive state. Also in the second stage, all switches 802G-1 and 802G-2 in the short circuits 804A-1, 804A-2, 804B-1, and 804B-2 are kept in a non-conductive state.

[0060] Furthermore, in the second stage, the control circuits 810A and 810B maintain the active state of the first braking signals BA1 and BB1, and activate the first braking signals BA2 and BB2. As a result, in the short circuits 804A-1, 804A-2, 804B-1, and 804B-2, switches 802G-1 and 802G-2 are maintained in a non-conductive state, switch 802S-1 is maintained in a conductive state, and switch 802S-2 transitions to and is maintained in a conductive state.

[0061] In the second embodiment, the first system applies a weak braking force to the stage 502 using dynamic braking to avoid damage to the stage 502. Subsequently, after a predetermined delay time, the first and second systems apply a strong braking force to the stage 502 using dynamic braking to shorten the braking distance of the stage 502.

[0062] The stage apparatus and electric motor of the third embodiment will be described with reference to Figures 11, 12, 13, 26A, and 26B. Matters not mentioned as part of the third embodiment may follow the above description. Figure 11 is a perspective view of the stage apparatus ST. Figure 12 is a perspective view of the stage apparatus ST of Figure 11 with some components removed. Figure 13 is a cross-sectional view showing an example configuration of the coil assembly (stator) 905 and the magnet assembly (movable element) 904. The coil assembly (stator) 905 and the magnet assembly (movable element) 904 constitute an electric motor, in this example, a linear motor.

[0063] The third embodiment combines the two magnet assemblies 8041 and 8042 in the motor of the second embodiment into a single magnet assembly 904. Therefore, the motor of the third embodiment is advantageous in reducing the size and mass of the movable part and improving the stroke.

[0064] The magnet assembly 904 includes an upper magnet row 904-3U and a lower magnet row 904-3L. The upper magnet row 904-3U may include four downward-magnetized magnets 904-3VL, four Y+-magnetized magnets 904-3YP, and four Y--magnetized magnets 904-3YM. The upper magnet row 904-3U can be fixed to the upper yoke 904-1U to form a Halbach arrangement of magnets that forms a substantially sinusoidal magnetic flux density distribution. The lower magnet row 904-3L can be fixed to the lower yoke 904-1L to form a Halbach arrangement of magnets similar to the upper magnet row 904-3U.

[0065] The A-phase coil set includes a first coil set (multiple coils 801A-1) and a second coil set (multiple coils 801A-2), which can be arranged to overlap each other. The B-phase coil set includes a first coil set (multiple coils 801B-1) and a second coil set (multiple coils 801B-2), which can be arranged to overlap each other. When coils 801A-1, 801B-1, 801A-2, 801B-2, etc. are repeatedly arranged in that order, the distance between every three coils is 6π in electrical angles, and their phases are the same. Therefore, the connections to the windings of every three coils can be made the same. First, the dynamic brake circuits (first dynamic brake circuits) corresponding to the first system of A-phase (multiple coils 801A-1) and the first system of B-phase (multiple coils 801B-1) are activated. Subsequently, the dynamic brake circuits (second dynamic brake circuits) corresponding to the second system of phase A (multiple coils 801A-2) and the second system of phase B (multiple coils 801B-2) are activated with a timing difference. In other words, the control circuit activates the first dynamic brake circuit and the second dynamic brake circuit at different timings.

[0066] The motor of the third embodiment has a driver 800A, coil selectors 801A-1 and 801A-2, short circuits 804A-1 and 804A-2, and control circuits 810A-1 and 810A-2 for phase A. The motor of the third embodiment also has a driver 800B, coil selectors 801B-1 and 801B-2, short circuits 804B-1 and 804B-2, and control circuits 810B-1 and 810B-2 for phase B.

[0067] A fourth embodiment will be described with reference to Figures 14 and 15. Matters not mentioned in the fourth embodiment may follow those of the second embodiment. Figure 14 is a perspective view of the stage device ST. Figure 15 is a top view of the stage device ST.

[0068] In the fourth embodiment, two sets of electric motors (linear motors) are provided. The first set of electric motors includes a first movable assembly 1004-1 and a first coil assembly 1005-1. The second set of electric motors includes a second movable assembly 1004-2 and a second coil assembly 1005-2. The first coil assembly 1005-1 includes a plurality of coils in a first system of phase A and a plurality of coils in a first system of phase B, and the second coil assembly 1005-2 may include a plurality of coils in a second system of phase A and a plurality of coils in a second system of phase B.

[0069] Although not shown, the motor of the fourth embodiment, like the second embodiment, has drivers 800A-1 and 800A-2, coil selectors 801A-1 and 801A-2, short circuits 804A-1 and 804A-2, and control circuits 810A-1 and 805A-2 for the A phase. The motor of the third embodiment, like the second embodiment, has drivers 800B-1 and 800B-2, coil selectors 801B-1 and 801B-2, short circuits 804B-1 and 804B-2, and control circuits 810B-1 and 805B-2 for the B phase.

[0070] A fifth embodiment will be described with reference to Figure 16. Matters not mentioned as part of the fifth embodiment may follow those of the second embodiment. In the fifth embodiment, the coil assembly has a two-layer structure, consisting of an upper coil assembly 1105-CU and a lower coil assembly 1105-CL. One of the upper coil assembly 1105-CU and the lower coil assembly 1105-CL may include a plurality of coils of a first system of phase A and a plurality of coils of a first system of phase B, while the other may include a plurality of coils of a second system of phase A and a plurality of coils of a second system of phase B.

[0071] Although not shown, the motor of the fourth embodiment, like the second embodiment, has drivers 800A-1 and 800A-2, coil selectors 801A-1 and 801A-2, short circuits 804A-1 and 804A-2, and control circuits 810A-1 and 805A-2 for the A phase. The motor of the third embodiment, like the second embodiment, has drivers 800B-1 and 800B-2, coil selectors 801B-1 and 801B-2, short circuits 804B-1 and 804B-2, and control circuits 810B-1 and 805B-2 for the B phase.

[0072] The above embodiments may be implemented by combining two or more of them. In the above example, the linear motor has a flattened oval coil, but the linear motor may be configured as a cylindrical linear motor with annular coils arranged coaxially. The motor is not limited to two phases, but may have three or more phases. In the case of three phases, the distance between coils skipped by five is 9π in electrical angles, and their phases are opposite to each other. Therefore, by reversing the connections of the coils skipped by five to the windings, they can be treated as coils with the same phase. The first and second braking signals may be changed to three or more braking signals with different activation timings. The motor may also be of a rotary type.

[0073] The following describes an exemplary embodiment of a lithography apparatus as an example of the application of the above-mentioned electric motor or stage device. Figure 25 shows the configuration of an exposure apparatus EXP as one embodiment of a lithography apparatus for transferring a pattern of a master plate R onto a substrate S. The exposure apparatus EXP may include a stage for holding the substrate S or master plate, and the above-mentioned electric motor configured to drive the stage. Alternatively, the exposure apparatus EXP may include the above-mentioned stage device configured to hold and drive the substrate S or master plate.

[0074] The exposure apparatus EXP may include, for example, an illumination optical system IO for illuminating a master plate R, and a projection optical system PO for projecting the pattern of the master plate R onto a substrate S. The exposure apparatus EXP may also include a master plate stage RS for holding the master plate R, an electric motor MR configured to drive the master plate stage RS, a substrate stage SS for holding the substrate S, and an electric motor MS configured to drive the substrate stage SS. The master plate stage RS and the electric motor MR may constitute a master plate stage device for driving the master plate RS. The substrate stage SS and the electric motor MS may constitute a substrate stage device for driving the substrate S.

[0075] One embodiment of the article manufacturing method may include a transfer step of transferring the pattern of a master plate R onto a substrate S using the lithography apparatus described above, and a processing step of obtaining an article by processing the substrate S onto which the pattern has been transferred. Processing the substrate S may include, for example, etching the substrate S.

[0076] This disclosure includes the following: (Item 1) An electric motor comprising a magnet assembly and a coil assembly including a plurality of coils, A first dynamic brake circuit and a second dynamic brake circuit that generate braking force by short-circuiting the coil facing the magnet assembly among the plurality of coils, The system comprises a control circuit that controls the operation of the first dynamic brake circuit and the second dynamic brake circuit, The control circuit activates the first dynamic brake circuit and the second dynamic brake circuit at different timings. An electric motor characterized by the following features. (Item 2) The control circuit activates the second dynamic brake circuit at a timing delayed from the activation of the first dynamic brake circuit. The electric motor described in item 1, characterized by the features described above. (Item 3) The first dynamic brake circuit includes a first resistor and a first switch arranged in a path that connects two terminals of one of the plurality of coils to each other. The second dynamic brake circuit includes a second resistor and a second switch arranged in a path connecting the two terminals to each other. An electric motor as described in item 1 or 2, characterized by the features described above. (Item 4) The plurality of coils include a first coil and a second coil, The first dynamic brake circuit includes a first resistor and a first switch arranged in a path connecting the two terminals of the first coil to each other. The second dynamic brake circuit includes a second resistor and a second switch arranged in a path connecting the two terminals of the second coil to each other. An electric motor as described in item 1 or 2, characterized by the features described above. (Item 5) The control circuit includes a first generation circuit that generates a first braking signal to activate the first dynamic brake circuit, and a second generation circuit that generates a second braking signal to activate the second dynamic brake circuit. The second generation circuit includes a delayer that generates the second braking signal by delaying the first braking signal. An electric motor as described in any one of items 1 to 4, characterized by the features described in item 1 to 4. (Item 6) The control circuit includes a generation circuit for generating a first signal and a delay circuit for generating a second signal obtained by delaying the first signal. The control circuit activates a first braking signal that activates the first dynamic braking circuit in response to the activation of the first signal, and activates a second braking signal that activates the second dynamic braking circuit in response to the activation of the second signal. An electric motor as described in any one of items 1 to 4, characterized by the features described in item 1 to 4. (Item 7) The plurality of coils includes a plurality of first coils and a plurality of second coils, The first dynamic brake circuit includes, for each of the plurality of first coils, a first resistor and a first switch arranged in a path connecting the two terminals of the first coil to each other. The second dynamic brake circuit includes, for each of the plurality of second coils, a second resistor and a second switch arranged in a path connecting the two terminals of the second coil to each other. An electric motor as described in any one of items 1 to 6, characterized by the features described herein. (Item 8) The magnet assembly includes a first magnet array that generates thrust due to a magnetic field generated by a first coil selected from the plurality of first coils, and a second magnet array that generates thrust due to a magnetic field generated by a second coil selected from the plurality of second coils. An electric motor as described in item 7, characterized by the features described therein. (Item 9) The plurality of first coils are arranged between the first end and the second end of the coil assembly, and the plurality of second coils are arranged between the plurality of first coils and the second end. The electric motor described in item 8, characterized by the features described above. (Item 10) The plurality of first coils and the plurality of second coils are arranged in an overlapping manner. The electric motor described in item 8, characterized by the features described above. (Item 11) The first and second magnet rows form a Halbach arrangement. The electric motor described in item 10, characterized by the features described above. (Item 12) The magnet assembly includes a third magnet row that generates thrust due to a magnetic field generated by a first coil selected from the plurality of first coils, and a fourth magnet row that generates thrust due to a magnetic field generated by a second coil selected from the plurality of second coils, The first and third magnet rows are arranged to face each other via the coil assembly, and the second and fourth magnet rows are arranged to face each other via the coil assembly. The electric motor described in item 11, characterized by the features described herein. (Item 13) The stage and, A motor according to any one of items 1 to 12, configured to drive the aforementioned stage, A stage device characterized by being equipped with the following features. (Item 14) A lithography apparatus for transferring the pattern of an original plate onto a substrate, A stage for holding the substrate or the original plate, A motor according to any one of items 1 to 12, configured to drive the aforementioned stage, A lithography apparatus characterized by comprising the following: (Item 15) A transfer process in which the pattern of the master plate is transferred to the substrate using the lithography apparatus described in item 14, A processing step to obtain an article by processing the substrate onto which the pattern has been transferred, A method for manufacturing articles, characterized by including the following:

[0077] The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, claims are attached to disclose the scope of the invention. [Explanation of Symbols]

[0078] 804: Magnet assembly, 505: Coil assembly, 710A, 710B: Control circuit, ST: Stage device

Claims

1. An electric motor comprising a magnet assembly and a coil assembly including a plurality of coils, A first dynamic brake circuit and a second dynamic brake circuit that generate braking force by short-circuiting the coil facing the magnet assembly among the plurality of coils, The system comprises a control circuit for controlling the operation of the first dynamic brake circuit and the second dynamic brake circuit, The control circuit activates the second dynamic brake circuit when the first dynamic brake circuit is activated and the second dynamic brake circuit is not activated, and controls it so that the time when the first dynamic brake circuit is activated and the time when the second dynamic brake circuit is activated overlap. An electric motor characterized by the following features.

2. The first dynamic brake circuit includes a first resistor and a first switch arranged in a path that interconnects two terminals of one of the plurality of coils, The second dynamic brake circuit includes a second resistor and a second switch arranged in a path connecting the two terminals to each other. The electric motor according to feature 1.

3. The plurality of coils include a first coil and a second coil, The first dynamic brake circuit includes a first resistor and a first switch arranged in a path connecting the two terminals of the first coil to each other. The second dynamic brake circuit includes a second resistor and a second switch arranged in a path connecting the two terminals of the second coil to each other. The electric motor according to feature 1.

4. The control circuit includes a first generation circuit that generates a first braking signal to activate the first dynamic brake circuit, and a second generation circuit that generates a second braking signal to activate the second dynamic brake circuit. The second generation circuit includes a delayer that generates the second braking signal by delaying the first braking signal. The electric motor according to feature 1.

5. The control circuit includes a generation circuit that generates a first signal, and a delay circuit that generates a second signal obtained by delaying the first signal. The control circuit activates a first braking signal that activates the first dynamic braking circuit in response to the activation of the first signal, and activates a second braking signal that activates the second dynamic braking circuit in response to the activation of the second signal. The electric motor according to feature 1.

6. The plurality of coils includes a plurality of first coils and a plurality of second coils, The first dynamic brake circuit includes, for each of the plurality of first coils, a first resistor and a first switch arranged in a path connecting the two terminals of the first coil to each other. The second dynamic brake circuit includes, for each of the plurality of second coils, a second resistor and a second switch arranged in a path connecting the two terminals of the second coil to each other. The electric motor according to feature 1.

7. The magnet assembly includes a first magnet array that generates thrust due to a magnetic field generated by a first coil selected from the plurality of first coils, and a second magnet array that generates thrust due to a magnetic field generated by a second coil selected from the plurality of second coils. The electric motor according to feature 6.

8. The plurality of first coils are arranged between the first end and the second end of the coil assembly, and the plurality of second coils are arranged between the plurality of first coils and the second end. The electric motor according to feature 7.

9. The plurality of first coils and the plurality of second coils are arranged in an overlapping manner. The electric motor according to feature 7.

10. The first and second magnet rows form a Halbach arrangement. The electric motor according to feature 9.

11. The magnet assembly includes a third magnet row that generates thrust due to a magnetic field generated by a first coil selected from the plurality of first coils, and a fourth magnet row that generates thrust due to a magnetic field generated by a second coil selected from the plurality of second coils. The first and third magnet rows are arranged to face each other via the coil assembly, and the second and fourth magnet rows are arranged to face each other via the coil assembly. The electric motor according to feature 10.

12. The stage and, A motor according to any one of claims 1 to 11, configured to drive the aforementioned stage, A stage device characterized by being equipped with the following features.

13. A lithography apparatus for transferring the pattern of an original plate onto a substrate, A stage for holding the substrate or the original plate, A motor according to any one of claims 1 to 11, configured to drive the aforementioned stage, A lithography apparatus characterized by comprising the following:

14. A transfer step of transferring the pattern of the master plate onto a substrate using the lithography apparatus described in claim 13, A processing step to obtain an article by processing the substrate onto which the pattern has been transferred, A method for manufacturing articles, characterized by including the following:

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