Vertical reactor assembly, method for aligning annular flange units, and use

Abstract

To provide a vertical furnace reactor assembly which can easily and quickly achieve proper mutual alignment of annular flange units.SOLUTION: A vertical furnace reactor assembly 2 comprises: a reactor housing 6 defining a processing chamber 8, the processing chamber having an opening 10 for moving substrates 4 into and out of the processing chamber along a main loading axis L, the opening being surrounded by a stack of annular flange units including at least two of a housing flange 12, 26, a gas divided ring unit 14, a liner suspension ring unit 16, a scavenger ring unit and a clamp ring unit. At least two of the annular flange units are provided with mutually cooperating centering structures. The centering structures comprise a plurality of slots and a plurality of corresponding pins. The slots extend along respective main slot axes. The slot axes mutually intersect centrally with respect to the stack of annular flange units.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a vertical furnace reactor assembly for processing a substrate, a method of aligning the annular flange units of such a reactor assembly, and the use of such a reactor assembly.

Background Art

[0002] A known vertical furnace reactor assembly for processing a substrate includes a reactor housing that defines a processing chamber configured to process the substrate therein. The processing chamber has an opening for moving the substrate in and out of the processing chamber along a main load axis, and the opening is surrounded by a stack of annular flange units. Such annular flange units may include housing flanges, gas splitting ring units, liner suspension ring units, scavenger ring units, and / or clamp ring units.

[0003] To achieve good operating performance of the reactor, the annular flange units need to be accurately aligned and positioned relative to each other. Achieving such alignment in known reactor assemblies can be complicated and time-consuming and requires highly skilled handling.

Summary of the Invention

[0004] This "Summary of the Invention" is provided to introduce selected concepts in a simplified form. These concepts are further described in more detail in the "Detailed Description of the Invention" of the exemplary embodiments of the present disclosure below. This "Summary of the Invention" is not intended to identify the main features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0005] An object of the present invention may be to provide a vertical furnace reactor assembly for processing a substrate in which proper alignment of annular flange units can be achieved more easily and / or quickly. An object of the present invention may also be to provide a reactor assembly in which misalignment between annular flange units can be less likely to occur.

[0006] To that end, aspects of the present invention may provide a vertical furnace reactor assembly for processing a substrate. The reactor assembly may comprise a reactor housing defining a processing chamber which may be configured for processing a substrate therein. The processing chamber may have an opening along the main load axis for loading and unloading the substrate into the processing chamber. The opening may be surrounded by a stack of annular flange units including at least two of a housing flange, a gas splitting ring unit, a liner suspension ring unit, a scavenger ring unit, and a clamping ring unit.

[0007] At least two of the annular flange units may be provided with interconnected centering structures for centering each of the at least two flange units relative to one another. The interconnected centering structures may comprise a plurality of slots and a plurality of corresponding pins. Each slot may extend along its respective main slot axis. The slot axes may be oriented to intersect each other at the center with respect to the stack of annular flange units.

[0008] Each slot may be configured to receive one pin in a direction substantially parallel to the main load axis, such that the received pin can move within the slot along each main slot axis and be substantially immobile within the slot in a direction perpendicular to the main slot axis and the main load axis.

[0009] Preferably, the direction perpendicular to the main slot axis and the main load axis may correspond at least substantially to the circumferential direction of the annular flange unit and / or the opening.

[0010] This interconnected centering structure may enable relatively easy and rapid alignment between each annular flange unit, thereby reducing the risk of unintentional misalignment.

[0011] When the flange units are positioned relative to each other, the pins may be inserted into the slots, particularly substantially along the main load axis. The receiving slots restrict the movement of the pins in such a way that the pins can be conveniently inserted one by one, while automatic centering may be achieved during the positioning.

[0012] A further embodiment may provide a method for aligning annular flange units of a vertical reactor assembly relative to one another within a stack. The method is:

[0013] To provide a vertical reactor assembly as described herein,

[0014] This includes inserting a pin from a group of pins into a corresponding slot from a group of slots, thereby centering at least two annular flange units relative to one another.

[0015] These methods may offer the aforementioned advantages.

[0016] A further embodiment may provide the use of a vertical furnace reactor as described herein for processing a substrate therein.

[0017] Such use may provide the aforementioned advantages.

[0018] For the purpose of summarizing the present invention and the advantages achieved beyond the prior art, certain objectives and advantages of the present invention are described above. Naturally, it can be understood that not all of these objectives or advantages can necessarily be achieved by any particular embodiment of the present invention. Therefore, those skilled in the art will recognize that the present invention may be embodied or practiced in a manner that achieves or optimizes one or a group of advantages as taught or suggested herein, without necessarily achieving other objectives or advantages as taught or suggested herein.

[0019] Various embodiments are claimed in the dependent claims, which will be further illustrated with reference to the embodiments shown in the figures. The embodiments may be combined or applied separately from one another.

[0020] All of these embodiments are intended to be within the scope of the invention disclosed herein. These and other embodiments will be readily apparent to those skilled in the art from the following “Modes for Carrying Out the Invention” of certain embodiments with reference to the following appended drawings, and the invention is not limited to any particular embodiment disclosed.

[0021] While this specification specifically points out embodiments of the present invention and concludes with the explicitly claimed claims, the advantages of the embodiments of this disclosure may be more readily apparent from the description of certain embodiments of the embodiments of this disclosure, when read in conjunction with the accompanying drawings. [Brief explanation of the drawing]

[0022] [Figure 1] Figure 1 is a side cross-sectional view of an exemplary vertical reactor assembly according to the first embodiment. [Figure 2] Figure 2 is a side cross-sectional view of an exemplary vertical reactor assembly according to a second embodiment. [Figure 3] Figure 3 shows an exemplary top view of an interconnected centering structure. [Figure 4] Figure 4 shows an isometric view of an exemplary stack of annular flange units. [Figure 5] Figure 5 shows an isometric view of an exemplary scavenger ring. [Figure 6] Figure 6 shows an isometric view of a further exemplary scavenger ring. [Figure 7] Figure 7 shows an isometric view of an exemplary clamp ring.

BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In this application, similar or corresponding features are indicated by similar or corresponding reference numerals. The description of the various embodiments is not limited to the examples shown in the figures, and the reference numerals used in the "BRIEF DESCRIPTION OF THE DRAWINGS" and the "CLAIMS" are not intended to limit the description of the embodiments, but are included to clarify the embodiments.

[0024] Certain specific embodiments and examples are disclosed below, but it will be understood by those skilled in the art that the invention extends beyond the specifically disclosed embodiments and / or uses of the present invention, as well as their obvious modifications and equivalents. Therefore, it is intended that the scope of the disclosed invention should not be limited by the specific disclosed embodiments described below. The figures presented in this specification do not mean the actual appearance of any specific material, structure, or device, but are merely idealized representations used to illustrate the embodiments of the present disclosure.

[0025] As used herein, the term "wafer" may refer to any underlying material(s) on which a device, circuit, or film may be formed or used.

[0026] Figures 1 and 2 show examples of vertical furnace reactor assemblies 2, or 102, that can be used to process the substrate 4 therein.

[0027] The reactor assembly 2, or 102, may include a reactor housing 6 that defines a processing chamber 8, which may be configured for processing a substrate 4 therein. The processing chamber 8 may have an opening 10 (here on the bottom of the chamber 8) along the main load axis L for loading and unloading the substrate 4 into the processing chamber 8. The opening 10 may be surrounded by a stack of annular flange units. The annular flange units may include at least two of the housing flanges 12, 26, gas splitting ring unit 14, liner suspension ring unit 16, scavenger ring unit 18, and clamp ring unit 20.

[0028] In the embodiment shown in Figure 1, the stack shown therein includes a housing flange 12 of the reactor housing 6, a gas splitting ring unit 14, a liner suspension ring unit 16, and an additional housing flange 26. Since the housing 6 defines the processing chamber 8, the housing flange 12 may also be called the processing chamber flange 12. In the embodiment shown in Figure 2, the stack shown therein includes a housing flange 12 of the reactor housing 6, a liner suspension ring unit 16, a scavenger ring unit 18, a clamp ring unit 20, and an additional housing flange 26. One or more (additional) clamp ring units (not shown in the drawings) may be provided in any one or more of the shown embodiments, particularly between the liner suspension ring unit 16 and the housing flange 12, and / or between the scavenger ring unit 18 and the liner suspension ring unit 16.

[0029] A further housing flange 26 may be associated with a wafer boat handling device 28, which can be configured to move batches of substrate 4 into and out of the chamber 8 for processing. A liner suspension ring unit 16 may be associated with the liner 30 of the reactor assembly 2.

[0030] In the embodiment shown in Figure 4, the stack shown therein includes a clamp ring unit 20, a liner suspension unit 16, and a gas split ring unit 14. In the embodiment shown in Figure 4, a housing flange not shown may be located below the gas split ring unit 14. Nevertheless, the pins 24 of the housing flange are shown as will be further described.

[0031] Naturally, the stack compositions shown are merely representative of examples, and such stacks may be composed differently, for example, with different sets, different orders, and / or one or more additional annular flange units.

[0032] For example, as shown in Figure 2, flange units may be stacked such that one flange unit partially or completely surrounds another flange unit.

[0033] At least two of the annular flange units 12, 14, 16, 18, 20, and 26 may be provided with interconnected centering structures 22, 24 (see, for example, Figure 3; not shown in Figures 1 and 2) to center each of the at least two flange units 12, 14, 16, 18, 20, and 26 relative to each other.

[0034] The interconnected centering structures 22, 24 may comprise a plurality of slots 22 and a corresponding plurality of pins 24. Each slot 22 may extend along its respective main slot axis S, which may be oriented to intersect each other at the center with respect to the stack of annular flange units 12, 14, 16, 18, 20, 26. The slot axes S may intersect the main load axis L, i.e., at the centerlines of the stack and / or reactor assembly 2, or 102. Alternatively, some or all of the slot axes S may intersect at least one of the other slot axes S at a short distance from the main load axis L, particularly at a short distance compared to the distance between the intersection and each slot 22.

[0035] Each slot 22 may be configured to receive one of the pins 24 in a direction substantially parallel to the main load axis L, such that the received pins 24 are movable within the slot 22 along each main slot axis S and can be substantially immobile within the slot 22 in a direction perpendicular to the main slot axis S and the main load axis L.

[0036] In the embodiment shown in Figure 3, the slots 22 are closed at both of their axial ends. Alternatively, one or more of the slots 22 may be open at one or two of their axial ends. This embodiment can be seen in Figure 4.

[0037] Figure 4 shows several sets of slots 22 and pins 24 in the stack of interlocking centering structures, particularly the annular flange units 20, 16, and 14. The pins 24 of the housing flange (not shown itself) below the gas splitting ring unit 14 are shown receiving into the slots 22 of the gas splitting ring unit 14. The pins 24 of the gas splitting ring unit 14 are shown receiving into the slots 22 of the liner suspension ring unit 16.

[0038] Figure 5 shows a pin 24 of a housing flange (not shown itself) that is received within an exemplary scavenger ring unit 18.

[0039] Figure 6 shows an exemplary scavenger ring unit 18 having pins 24 that can be received in slots 22 of the exemplary clamp ring unit 20 shown in Figure 7.

[0040] In one embodiment, the number of slots 22 may comprise at least three slots 22, and the number of pins 24 may comprise at least three pins 24. Naturally, the number of slots 22 and pins 24 is defined here for each centering structure, i.e., for each annular flange unit.

[0041] Therefore, for example, if two annular flange units are provided with a centering structure that interlocks with each other, one of the flange units may be provided with at least three slots 22, while the other flange unit may be provided with at least three pins 24. In a less preferred but possible alternative, one of the flange units may be provided with, for example, two slots 22 and one pin 24, while the other flange unit may be provided with one slot 22 and two pins 24. Naturally, many further variations and combinations may therefore be possible.

[0042] By providing at least three slots 22 and at least three pins 24, good centering behavior may be obtained, while the positioning of the pins 24 within the slots 22 may be relatively easy.

[0043] In one embodiment, the corresponding number of slots 22 and pins 24 may be distributed substantially evenly around each of the annular flange units 12, 14, 16, 18, 20, and 26.

[0044] The centering behavior may be further improved as a result.

[0045] In one embodiment, the principal slot directions S of each pair of slots 22 among at least three slots 22 may include an angle of about 120 degrees relative to each other in a plane that can intersect with the principal load axis L. Alternatively, one or more pairs of slots may include different angles, for example, an angle substantially greater or less than 120 degrees.

[0046] In one embodiment, each pin 24 may extend along a principal pin direction which may be substantially parallel to the principal load axis L.

[0047] The pin 24 may therefore be inserted into the slot 22 in the direction of the main load axis L, while the movement of the received pin 24 in one or more lateral directions relative to the main load axis L may be restricted by the slot 22.

[0048] In one embodiment, the interconnected centering structures 22, 24 may be configured to provide at least one of kinematic and non-kinematic couplings between the respective annular flange units 12, 14, 16 or between 18, 20, 26.

[0049] In one embodiment, a stack of annular flange units 12, 14, 16, 26, or 12, 18, 20, 26 may comprise at least three, preferably at least four, annular flange units 12, 14, 16, 26, or 12, 18, 20, 26.

[0050] In one embodiment, the reactor assembly 2 or 102 may include a plurality (e.g., three) of equalization pins 24a (see Figure 4) which may be configured to adjust the mutual equalization of each of the annular flange units 12, 14, 16, 18, 20, 26, particularly including the gas splitting ring unit 14.

[0051] In one embodiment, the interconnected circumferential shape of the annular flange units 12, 14, 16, or 18, 20, 26 may be a circular shape with its center located on the main load axis L.

[0052] Therefore, a relatively strong flange unit can provide within it an opening that is relatively large, especially in comparison to its circumference. Such a circular flange shape may match the circular shape of the opening 10 and / or the reactor housing 6.

[0053] Referring to the illustrative drawing, the method for aligning the annular flange units 12, 14, 16, 18, 20, and 26 of the vertical reactor assembly 2 or 102 relative to each other in the stack is as follows: To provide a vertical reactor assembly 2 as described herein, This includes inserting one of the pins 24 into the corresponding slot 22 of the slots 22, thereby centering at least two annular flange units 12, 14, 16, 18, 20, and 26 relative to each other.

[0054] While exemplary embodiments of the present invention have been described above with partial reference to the accompanying drawings, it should be understood that the present invention is not limited to these embodiments. Variations of the embodiments of this disclosure can be understood and achieved by those skilled in the art who practice the claimed invention from a review of the drawings, disclosure, and the accompanying claims.

[0055] For example, a stack of annular flange units may comprise one or more annular flange units that do not have pins and / or slots for centering relative to another flange unit. Further embodiments are provided throughout the specification.

[0056] Throughout this specification, any reference to “one embodiment” or “an embodiment” means that a particular feature, structure, or characteristic described in relation to an embodiment is included in at least one embodiment of the present invention. Therefore, the use of the phrase “in one embodiment” or “in an embodiment” in various places throughout this description does not necessarily refer to the same embodiment.

[0057] Furthermore, it should be noted that one or more specific features, structures, or characteristics from the various embodiments described above may be used and implemented independently of each other, and may be combined in any suitable manner to form new, not expressly described embodiments. The reference numbers used in “Modes for Carrying Out the Invention” and “Claims” do not limit the description of the embodiments or the claims. The reference numbers are used for clarity only.

Claims

1. A vertical furnace reactor assembly (2, or 102) for processing a substrate (4), comprising a reactor housing (6) defining a processing chamber (8) configured therein for processing the substrate (4), wherein the processing chamber (8) has an opening (10) for moving the substrate (4) in and out of the processing chamber (8) along a main load axis (L), and the opening (10) is surrounded by a stack of annular flange units (12, 14, 16, 26, or 12, 18, 20, 26) including at least two of housing flanges (12, 26), gas splitting ring units (14), liner suspension ring units (16), scavenger ring units (18), and clamp ring units (20), At least two of the annular flange units (12, 14, 16, 18, 20, 26) are provided with centering structures (22, 24) that interlock with each other to align the respective at least two flange units (12, 14, 16, 18, 20, 26) to each other. The interconnected centering structures (22, 24) comprise a plurality of slots (22) and a corresponding plurality of pins (24), each of which slots (22) extends along its respective main slot axis (S), and the slot axes (S) are oriented to intersect each other at the center with respect to the stack of the annular flange units (12, 14, 16, 18, 20, 26). A reactor assembly in which the pins (24) received within the slots (22) are movable along the main slot axis (S), and each slot (22) is configured to receive one of the pins (24) in a direction substantially parallel to the main load axis (L) in a direction perpendicular to the main slot axis (S) and the main load axis (L).

2. The reactor assembly according to claim 1, wherein the plurality of slots (22) comprises at least three slots (22), and the corresponding number of pins (24) comprises at least three pins (24) corresponding to them.

3. The reactor assembly according to claim 1 or 2, wherein the corresponding plurality of slots (22) and pins (24) are substantially evenly distributed around each of the respective annular flange units (12, 14, 16, 18, 20, 26).

4. The reactor assembly according to claim 3, a dependent claim of claim 2, wherein the main slot directions (S) of each pair of slots (22) among the at least three slots (22) mutually include an angle of about 120 degrees in a plane that crosses the main load axis (L).

5. The reactor assembly according to any one of claims 1 to 4, wherein each of the pins (24) extends along a main pin direction which is substantially parallel to the main load axis (L).

6. The reactor assembly according to any one of claims 1 to 5, wherein the interconnected centering structures (22, 24) are configured to provide at least one of kinematic coupling and non-kinematic coupling between the respective annular flange units (12, 14, 16, or 18, 20, 26).

7. The reactor assembly according to any one of claims 1 to 6, wherein the stack of the annular flange units (12, 14, 16, 26, or 12, 18, 20, 26) comprises at least three, preferably at least four annular flange units (12, 14, 16, 26, or 12, 18, 20, 26).

8. The reactor assembly according to any one of claims 1 to 7, further comprising a plurality of leveling pins (24a) configured to adjust the relative leveling of each of the annular flange units (12, 14, 16, 18, 20, 26).

9. The reactor assembly according to any one of claims 1 to 8, wherein the interconnected circumferential shape of the annular flange units (12, 14, 16, or 18, 20, 26) is a circular shape having its center on the main load axis (L).

10. A method for aligning the annular flange units (12, 14, 16, 18, 20, 26) of a vertical reactor assembly (2, or 102) relative to each other in a stack, To provide a vertical reactor assembly (2) according to any one of claims 1 to 9, A method comprising inserting one of the plurality of pins (24) into a corresponding slot (22) among the plurality of slots (22), thereby centering the at least two annular flange units (12, 14, 16, 18, 20, 26) relative to one another.

11. Use of a vertical furnace reactor assembly (2 or 102) according to any one of claims 1 to 9 for processing a substrate (4) inside.

Images