A probe cassette for storing, transporting, and handling one or more probe devices for probe-based systems.

Abstract

The present invention relates to a probe cassette for storing, transporting and handling one or more probe devices for a probe-based system, the cassette comprising a cassette body having at least one probe container configured to accommodate the probe device, a lid connectable to the cassette body, and a clamping unit configured to hold the probe device on the container by applying a clamping force to the probe device when the lid is in a closed position, the clamping unit including an adjustment member for adjusting the clamping force, the clamping unit being selectively operable from a first position in which the clamping force is insufficient to provide clamping to a plurality of second positions in which the clamping force is sufficient to prevent movement of the probe device on the container.

Description

Technical Field

[0001] The present invention relates to a probe cassette for storing, transporting, and handling one or more probe devices for probe-based systems such as scanning probe microscopes. The present invention further relates to a method for storing, transporting, and handling one or more probe devices for probe-based systems. Additionally, the present invention relates to the use of the probe cassette.

Background Art

[0002] Probe-based systems such as scanning probe microscopes are widely used to characterize the properties of a sample by the interaction between a probe device and the sample. The probe device can be attached to a scanning probe microscope (such as an atomic force microscope). There are various types of probe devices. Generally, cantilever-based probe devices are employed. Such cantilever-based probe devices may have a tip for performing local measurements of one or more properties of the sample. By monitoring the interaction between the sample and the tip of the probe device associated with the probe-based system, the properties of a small-scale sample can be characterized. By providing a relative scanning motion between the probe device associated with the chip and the sample, surface characterization, subsurface characterization, and / or other sample-dependent data can be determined over a specific region of the sample. Additionally or alternatively, the probe device can also be used to modify the surface of the sample using the probe-based system.

[0003] Probe devices used in scanning probe microscopes are typically very small in size and tend to require delicate handling. To facilitate transport and prevent damage to the probe devices, it is common practice to place one or more probe devices in a probe cassette for delivery to the user or customer. A probe cassette may be a container or holder that includes retaining elements positioned to hold the probe devices substantially securely in place, even when transporting the cassette (e.g., shipping, on-site transport, handling, etc.). Probe devices may also be placed in a gel box with a gel for holding the probe devices in place.

[0004] When the probe device is loaded into the cassette body, the lid may be positioned on top of the cassette body. When the lid is closed, the probe device may be covered. Furthermore, the lid may be configured to facilitate securing the probe device to the cassette, for example, by using a probe device holder attached to the underside of the lid.

[0005] Patent Document 1 describes a probe cassette for holding one or more probe devices of a scanning probe microscope. The probe cassette comprises a base having at least one probe storage container, a lid that can be attached to the base so as to at least substantially cover at least one container, and a probe retainer that holds at least one SPM probe device in the container under a compressive force, the compressive force being generated by deforming a spring.

[0006] Existing probe cassettes may not provide adequate clamping. Mechanical clamping provided by such lids or covers may be insufficient. The cassette may not be able to absorb shocks to prevent damage to the probe device. Furthermore, the probe device may be displaced as a result of such shocks or vibrations, for example, during transport or handling of the probe cassette.

[0007] When closing the lid or cover, retainers positioned or connected to the lid may damage the probe device. Clamps are typically too sensitive to engineering tolerances. Furthermore, mechanical clamping mechanisms are only available for specific probe device body thicknesses, which vary by probe device manufacturer.

[0008] The clamp used in the probe cassette needs improvement. [Prior art documents] [Patent Documents]

[0009] [Patent Document 1] U.S. Patent No. 7908909 [Overview of the Initiative] [Problems that the invention aims to solve]

[0010] The object of the present invention is to provide a method and system for eliminating at least one of the above-mentioned drawbacks.

[0011] Additionally or alternatively, an object of the present invention is to provide an improved clamping mechanism for cassettes.

[0012] Additionally or alternatively, an object of the present invention is to reduce the risk of damage to probe devices during transport or handling. [Means for solving the problem]

[0013] In contrast, the present invention provides a probe cassette for storing, transporting, and handling one or more probe devices for a probe-based system, the cassette comprising: a cassette body having at least one probe container configured to house probe devices; a lid connectable to the cassette body, wherein the lid in the closed position is configured to substantially cover at least one container; and a clamping unit configured to hold the probe devices in the container by applying a clamping force to the probe devices, the clamping unit including an adjustment member for adjusting the clamping force, the clamping unit being selectively operable from a first position where the clamping force is insufficient to provide clamping of the probe devices in the container to a plurality of second positions where the clamping force restricts the movement of the probe devices in the container, the plurality of second positions providing different clamping forces to restrict the probe devices to different degrees.

[0014] Instead of using a spring-based or material-stiffness-based clamping force applied to the probe device when the lid is closed, the clamping unit provides multiple selectable positions, resulting in different clamping forces. In this way, the clamping unit can provide an adjustable clamping force. The clamping of the probe device can be improved, and the clamping force can be selected according to dynamic conditions requiring different clamping forces (e.g., transport, handling, storage, etc.). The clamping unit is configured to generate a non-material-stiffness-based clamping force on the probe device when the lid is in the closed position. Since the clamping unit includes multiple second positions, each having a different predetermined clamping force for the probe device placed in the container, improved control over the clamping force can be obtained. Thus, the clamping can be improved to reduce the risk of damaging one or more probe devices during storage, transport, and / or handling.

[0015] Multiple second positions on the clamping unit provide adjustability of the clamping force. For example, the clamping force can be precisely controlled depending on activities such as storing, handling, and transporting the probe cassette. In some embodiments, the clamping force can also be measured and / or recorded.

[0016] Optionally, the clamping force is sufficient to prevent the probe device from moving within the container at multiple second positions.

[0017] A clamping unit for holding the probe device within the probe cassette allows for selective application of clamping force to the probe device. An adjustable clamping unit can provide a precise clamping mechanism that is less dependent on structural interaction with the structural elements for holding the probe device in the container. For example, elastic or spring-based mechanical retainers may be more susceptible to deformation, damage, changes in stiffness, or abrasion of the probe device over time. Furthermore, such elastic-based mechanical retainers may change stiffness over time, for example, reducing the effectiveness of the clamp. Such damage can be prevented by using an adjustable clamping unit.

[0018] Optionally, one or more probe devices can be loaded into the cassette after use.

[0019] The lid can be movably connected to the cassette body, for example, by a hinge mechanism. The lid may be movable between an open position and a closed position. In the open position of the lid, one or more probe devices in the container are accessible. For example, the cassette may be opened before being moved to a probe-based system such as an atomic force microscope. This allows the atomic force microscope to access at least one of the probe devices supported by the probe cassette. In the closed position of the lid, one or more probe devices are covered by the lid. A clamping unit may be configured to clamp one or more probe devices, at least when the lid is closed. In this way, the possibility of the probe devices shifting and being damaged within the cassette can be substantially prevented, for example, during handling or transport.

[0020] Optionally, the lid in the closed position is configured to hold one or more probe devices in each container of the probe cassette body. The lid may include a clamping unit configured to generate a non-material rigid / elastic-based clamping force on the probe devices when the lid is in the closed position. Advantageously, the clamping force generated using the clamping unit is adaptable and / or adjustable. In this way, the arrangement can become less dependent on tolerances. Furthermore, the cassette can be configured to work with different types of probe devices, for example, having different dimensions. Thus, the probe compatibility of the probe cassette can be increased.

[0021] Optionally, the probe cassette is configured to hold one or more first probe devices and / or one or more second probe devices, the one or more first probe devices and the one or more second probe devices having different dimensions and / or shapes.

[0022] Optionally, the clamping unit is configured to apply clamping force to the probe device only when the lid is in the closed position.

[0023] Optionally, the clamping unit comprises an actuator selectively operable from a first position to one of a plurality of second positions.

[0024] The probe cassette may have an actuator configuration for providing selective clamping, and the induced clamping force is adjustable by controlling the actuator. Various actuators are available.

[0025] The actuator may provide an actuation upon activation. The cassette may be configured such that the clamping unit can be guided to a plurality of second positions when the lid is provided on the cassette body.

[0026] Optionally, the clamping unit includes an electromechanical actuator configured to selectively provide a clamping force.

[0027] The electromechanical actuator may be electrically actuated to provide a mechanical clamping. By adjusting the electrical actuation, the mechanical clamping force can be adjusted.

[0028] Optionally, the electromechanical actuator is a piezoelectric actuator. The piezoelectric actuator may have various configurations. For example, the piezoelectric actuator may be configured to be switchable between an extended position and a contracted position. Additionally or alternatively, the piezoelectric actuator may be configured to bend to cause a displacement that can be used to obtain a clamping force. In this way, a greater deflection can be obtained at the tip of the piezoelectric actuator. Additionally or alternatively, the piezoelectric actuator may operate in a shear mode to obtain a shear displacement.

[0029] Optionally, the electromechanical actuator is an elastomer actuator.

[0030] Piezoelectric and elastomer actuators allow for precise control of clamping force. It should be understood that other electromechanical actuators, such as electric motors, can also be used.

[0031] Optionally, the clamping unit includes a capillary configured to guide the liquid in the container toward the surface of the probe device when the lid is in the closed position, and the clamping unit is configured to provide a clamping force from the resulting surface tension of the liquid.

[0032] A capillary tube may be configured to provide a droplet of liquid between its outlet and the probe device in the container. The clamping force obtained by the liquid droplet may depend on the gap distance between the capillary tube outlet and the probe device. This distance is adjustable so that the clamping force can be adjusted. Additionally or alternatively, the clamping force can be adjusted by changing the amount of liquid guided through the capillary tube.

[0033] Optionally, the clamping unit includes one or more magnets to provide clamping force.

[0034] Electromagnets, static magnets, or a combination thereof can be used. For example, a static magnet may be configured such that when the lid is closed, the like poles of the magnet move closer to each other, inducing the clamping force necessary to hold the probe device in place. Like poles repel each other, and the clamping force can be adjusted by changing the gap distance between the poles with the lid closed. Thus, the clamping force can be achieved as a result of the interaction between like poles.

[0035] At least one electromagnet is used, at an optional rate. In this way, the clamping force can be more easily adjusted by changing the magnetic field generated by the electromagnet. Various solenoids can be used to achieve the desired clamping force.

[0036] The container clamping unit may include two magnets positioned facing each other. The relative position of at least one of the two magnets in the probe cassette may be adjustable relative to each other so that the resulting clamping force can be adjusted.

[0037] It is also conceivable to use two permanent magnets and at least one electromagnet. For example, the first permanent magnet can be coupled to another electromagnet to overlay the magnetic field generated between the two permanent magnets. A controller or control unit can be linked to the electromagnet to change the magnetic field and adjust the resulting clamping force. Optionally, sensors can be placed to monitor changes in the gap distance between opposing similar magnetic poles (N,N, or S,S) to activate the electromagnet with a stronger magnetic field and adjust the resulting clamping force. Other sensors may also be used to estimate or monitor the resulting clamping force.

[0038] Optionally, the clamping unit includes a membrane that is expandable under fluid pressure, and when the membrane is in the expanded position, it contacts the probe device in the container to provide a clamping force. The membrane can press against the surface of the probe device when in the expanded position. As a result of the pressing action, a clamping force is obtained. The clamping force can be adjusted by changing the fluid pressure on the membrane.

[0039] Optionally, the membrane forms an expandable balloon that is positioned near the probe device when the lid is in the closed position. The expandable balloon can improve control over the induced clamping force applied to the probe device.

[0040] Optionally, the clamping unit includes a fluid blower configured to blow a fluid stream toward the probe device to provide a clamping force.

[0041] The fluid flow can provide a pushing force to hold the probe device in place within the container. The fluid flow achieved by the fluid blower results in a clamping force applied to the probe device within the container. The applied pressure or clamping force resulting from the fluid flow provided by the fluid blower can be adjusted by changing the flow directed towards the probe device (parameters include, for example, flow rate, flow direction, and fluid pressure).

[0042] Optionally, the clamp unit includes a vacuum clamping member configured to selectively hold a probe device with a clamping force, the container having at least one aperture which can be connected to a vacuum pressure via a passage located in the cassette body while selectively holding the probe device.

[0043] Optionally, the clamping force is tensile holding force and / or suction force.

[0044] Optionally, the clamping unit is a first clamping unit, and the probe cassette includes a further second clamping unit distinct from the first clamping unit, wherein, when the lid is closed, the first clamping unit is operable from a first position to one of a plurality of second positions, the second clamping unit is positioned in the cassette body to selectively hold the probe device in the container with a clamping force, the second clamping unit is adjustable between a first state in which the tensile holding force is large enough to allow clamping of the probe device and a second state in which the tensile holding force is small enough to allow release of the probe device, the second clamping unit is operable when the lid is in the open position, in which case one or more probe devices housed in the probe cassette are accessible.

[0045] Optionally, a second clamping unit provides clamping by vacuum pressure. Such a vacuum clamping member can be configured to selectively hold the probe device with a clamping force. The container may have at least one aperture that can be connected to vacuum pressure via a passage located in the cassette body while selectively holding the probe device, and the cassette includes a first fluid port that can be connected to a first vacuum source for delivering vacuum pressure.

[0046] It should be understood that a vacuum can be understood as a low pressure that provides a clamping force (e.g., suction force). Various low or vacuum pressures can be used to achieve the clamping force. The clamping force can be improved by providing a sealing member at the interface between the clamping unit and the probe device.

[0047] The vacuum transmitted to the vacuum clamping member creates a differential pressure acting on the probe device, securely holding it in place within the cassette body in the container. This provides an improved vacuum-based clamping mechanism for holding the probe device in place within the cassette body. The possibility of damage to the probe device's integrity during handling, transport, loading, and installation of the cassette is reduced. The vacuum can generate an attractive force applied to the probe device. This induced tensile force can be large enough to effectively secure the probe device to the cassette body. The vacuum clamping member provides a reliable clamping mechanism requiring minimal maintenance.

[0048] The vacuum clamping member can hold the probe device on the cassette body without requiring mechanical retaining means, such as a lid configured to cover and hold the probe device when the lid is closed. Therefore, a clamping mechanism can be provided even if the mechanical retaining means (e.g., a lid) is removed (e.g., the lid is opened or removed). Furthermore, the displacement of the probe device carried by the probe cassette can be minimized, reducing the risk of potential damage to the probe device as a result of handling, transport, and / or loading in probe-based systems (e.g., scanning probe microscopes such as atomic force microscopes).

[0049] The vacuum clamping member provides a vacuum holding mechanism that is easier to control, more accurate, more robust, and / or less sensitive to dimensional tolerances than other retainers (e.g., kinematic retainers) configured to contact and hold the probe device at one or more points. Additionally or alternatively, the vacuum holding mechanism may allow for easy alignment of the probe device on the cassette body.

[0050] Optionally, the first fluid port can be connected to the first vacuum source via a corresponding flexible tube. A non-flexible tube can also be used.

[0051] Optionally, the probe cassette includes a second fluid port that can be connected to a second vacuum source.

[0052] The second fluid port may be different from the first fluid port. In this way, the cassette can be connected to different vacuum sources. For example, the cassette may be moved and subsequently inserted into a probe-based system, and the first vacuum source may provide vacuum pressure to the vacuum clamp member. The cassette inserted into the probe-based system may be connected to a second vacuum source (e.g., mechanical vacuum pressure provided by the probe-based system). The first fluid port may be disconnected so that the cassette obtains vacuum pressure only from the second vacuum source. It is also conceivable that the first and second fluid ports are the same.

[0053] The probe cassette may include means for temporarily connecting a vacuum source to the probe cassette (for example, via a first fluid port). Optionally, the cassette further includes means for automatically connecting to a second vacuum source (mechanical vacuum) once the cassette is accepted into the probe-based system. The first fluid port may be used to provide (temporarily) vacuum during handling and transfer of the cassette to the probe-based system, and the second fluid port may be used to provide the mechanical vacuum to be applied in the probe-based system. In both cases, the same vacuum member can be used to fix the probe device in place using the tensile holding force induced as a result of the vacuum.

[0054] Optionally, the vacuum clamping member is adjustable between a first position where the vacuum pressure is sufficiently low to allow vacuum clamping of the probe device and a second position where the vacuum pressure is sufficiently high to allow release of the probe device.

[0055] The probe device may be released by controlling the vacuum pressure supplied to the vacuum clamp member. The pressure supplied to the vacuum clamp member can be switched between at least two states, namely a vacuum-clamped state and an unclamped state. In the vacuum-clamped state, vacuum pressure is supplied to the vacuum clamp member, holding the probe device in place on the cassette body. In the unclamped state, vacuum pressure is not supplied to the vacuum clamp member, and the probe device can be released from the cassette body if it is not held by other means (for example, not shape-locked by a lid).

[0056] Optionally, the first clamping unit is positioned on the lid of the cassette probe, and when the lid is guided to the closed position, the first clamping unit automatically moves to one of several second positions.

[0057] Optionally, the cassette includes a controller configured to control the clamping unit to adjust the clamping force applied by the clamping unit.

[0058] Optionally, the cassette is housed in a probe device delivery package including a package base and a package lid that are connectable to each other, the package lid being mountable on the body of the cassette to substantially cover at least one container, and at least one of the package lid or the body including means configured to hold one or more probe devices in the body of the cassette, and a first fluid port being connectable to a first vacuum source when the package lid is in the closed position.

[0059] The lid can facilitate the holding of at least one probe device on the cassette base. Once a suction force induced by the vacuum clamping member is generated, the lid can be removed, and the probe device can be automatically loaded onto the probe mount of the probe-based system (e.g., a scanning probe microscope). It should be understood that the suction force can be selectively applied before and / or after opening / removing the lid.

[0060] Instead of providing a probe cassette that can be housed / mounted in the probe device delivery package, we can provide a cassette including a lid and base, and it should be understood that when the lid is closed, one or more probe devices placed in the body of the cassette are covered by the lid.

[0061] Advantageously, the probe device can be prevented from moving relative to the cassette or lid when the lid is closed, open, being opened or closed, or when the cassette is entering or leaving the machine, or during handling. Particle contamination can also be prevented.

[0062] Optionally, the cassette includes a controller, which is configured to adjust the tensile holding force applied by the vacuum clamp member by controlling the vacuum pressure.

[0063] Optionally, the vacuum clamp member has at least one connecting portion configured to fit the surface of at least one probe device, forming a sealing contact with the probe device. The body of the cassette in the container may be configured to have a shape complementary to the probe shape.

[0064] The container may be adapted to form a sheet for a probe device, and the probe device received in the sheet is supported in a position that allows the connecting portion of the vacuum clamp member to hold the probe device in place under vacuum. Such a sheet may be formed, for example, by a recess, a low plane, or an inclined surface on the body of the cassette. The sheet may optionally be configured to provide a shape lock in at least one dimension, preferably at least two dimensions. Optionally, the container may have an inclined surface that facilitates seating the probe device on it.

[0065] Multiple apertures are arranged in the container to vacuum-hold the probe device on the cassette body while selectively holding at least one probe device. In this way, the force can be distributed more evenly across the surface of the probe device, allowing for improved vacuum clamping.

[0066] Optionally, the vacuum clamping member includes a seal configured to provide a sealing interface with the probe device to substantially prevent gas leakage.

[0067] In this way, a lower vacuum pressure can be maintained on the probe device to fix and hold it in the container. The resulting tensile force can be precisely controlled by the sealing. Many types of seals are available. The seal may also be formed by a part of the cassette body (shape seal). Additionally or alternatively, an elastic or rubber seal can be placed to obtain a conformal seal between a part of the probe device (e.g., the bottom surface) and the cassette body. In one embodiment, the vacuum clamp member includes a suction cup.

[0068] Optionally, the cassette includes multiple containers arranged in at least one array. The cassette may include multiple arrays. In this way, the cassette can carry a large number of probe devices. Each container can accept at least one probe device.

[0069] Optionally, the cassette body includes several arrays / rows of probe device containers or pockets designed to accommodate one or more types of probe devices. The probe devices can be used with different scanning probe microscope probe-based systems.

[0070] Optionally, the cassette can be attached to a scanning probe microscope probe-based system, automatically loading one or more probe devices into the probe mount of the probe-based system, and optionally returning them to the cassette after use.

[0071] The probe cassette may utilize a vacuum-powered clamping fixture to enable the safe transport and storage of the probe device housed within the probe cassette. Vacuum (see suction) is used to selectively clamp the probe device to the body of the cassette.

[0072] The attachment of the probe device to the probe mount of a probe-based system can be carried out in a variety of ways, such as vacuum clamps, mechanical clamps, electromagnetic clamps, electrostatic clamps, and / or adhesive clamps.

[0073] Vacuum pressure can be generated outside the cassette by an external vacuum source. The cassette may be configured to maintain the vacuum supplied to the vacuum clamp member for at least a predetermined period, even if the vacuum source is disconnected.

[0074] Optionally, the vacuum is generated internally within the cassette. The cassette may include a vacuum source built into the cassette to deliver vacuum pressure. The vacuum can be generated using a vacuum pump. The vacuum pump may be connected to a power source, for example. The power source may be external to and / or internal to the cassette (e.g., a battery). An internal vacuum source may offer a more integrated design. An external vacuum source may be in fluid communication with the cassette via an air tube or the like connected to the cassette's fluid port.

[0075] According to one embodiment, the present invention provides the use of a probe cassette for storing, transporting, and / or handling one or more probe devices for a probe-based system.

[0076] It should be understood that any aspect, feature, or optional selection described in consideration of the apparatus (probe cassette) applies equally to the use and described method. It is also clear that one or more of the above aspects, features, and optional selections can be combined.

[0077] The present invention will be further described based on exemplary embodiments shown in the drawings. These exemplary embodiments are given by non-limiting description. It should be noted that the drawings are merely schematic diagrams of embodiments of the present invention given as non-limiting examples. [Brief explanation of the drawing]

[0078] [Figure 1A] This is a cross-sectional view showing a schematic diagram of an embodiment of a cassette clamping unit. [Figure 1B] This is a cross-sectional view showing a schematic diagram of an embodiment of a cassette clamping unit. [Figure 2] This is a cross-sectional view showing a schematic diagram of a part of the probe cassette. [Figure 3] This is a schematic diagram of an embodiment of the clamping unit for a probe cassette. [Figure 4] This is a schematic diagram of an embodiment of the clamping unit for a probe cassette. [Figure 5] This is a schematic diagram of an embodiment of the clamping unit for a probe cassette. [Figure 6] This is a schematic diagram of an embodiment of the clamping unit for a probe cassette. [Figure 7A] This is a schematic diagram of an embodiment of the clamping unit for a probe cassette. [Figure 7B] This is a schematic diagram of an embodiment of the clamping unit for a probe cassette. [Figure 8] This is a schematic diagram of an embodiment of the clamping unit for a probe cassette. [Figure 9] This is a perspective view showing a schematic diagram of one embodiment of a cassette. [Figure 10A] This is a cross-sectional view showing a schematic diagram of the cassette clamping unit. [Figure 10B] This is a cross-sectional view showing a schematic diagram of the cassette clamping unit. [Figure 10C] This is a cross-sectional view showing a schematic diagram of the cassette clamping unit. [Figure 10D] This is a cross-sectional view showing a schematic diagram of the cassette clamping unit. [Figure 11] This is a schematic diagram of the process. [Figure 12A] This is a perspective view showing a schematic diagram of a cassette. [Figure 12B] This is a perspective view showing a schematic diagram of a cassette. [Figure 13] This is a perspective view showing a schematic diagram of the probe delivery package and cassette. [Figure 14A] This is a perspective view showing a schematic diagram of a cassette. [Figure 14B] This is a perspective view showing a schematic diagram of a cassette. [Figure 15A] This is a cross-sectional view showing a schematic diagram of a cassette in a container. [Figure 15B] This is a cross-sectional view showing a schematic diagram of a cassette in a container. [Modes for carrying out the invention]

[0079] Figures 1A and 1B show schematic cross-sectional views of an embodiment of a probe cassette clamping unit. The probe cassette is arranged for storing, transporting, and handling one or more probe devices for a probe-based system. The cassette includes a cassette body 3 having at least one probe container 5 configured to house a probe device 15, a lid connectable to the cassette body 3, configured such that when the lid is in the closed position, it substantially covers at least one container 5, and a clamping unit 2 configured to hold the probe device 15 in the container 5 by applying a clamping force F to the probe device 15 when the lid is in the closed position, wherein the clamping unit 2 includes an adjustment member for adjusting the clamping force F, and the clamping unit 2 is selectively operable from a first position where the clamping force F is insufficient to provide clamping of the probe device 15 in the container 5 to a plurality of second positions where the clamping force F restricts the movement of the probe device 15 in the container 5, the plurality of second positions providing different clamping forces F to restrict the probe device over different ranges. At multiple second positions, the clamping force F may be sufficient to prevent movement of the probe device 15 in the container 5 during use. However, the clamping force can be increased to achieve better clamping during specific operations or activities, such as transporting the cassette. In this way, it can be more reliably ensured that the clamping force is sufficient to successfully clamp the probe device in the container, even when the cassette is subjected to impact forces, vibrations, or large accelerations.

[0080] Figures 1A and 1B show a cross-sectional view of a container 5 housing a probe device 15. Only a portion of the cassette is shown in cross-section. The probe device 15 can be selectively clamped in place by the clamp unit 2. Different types of probe devices 15 can be held by the cassette in the container 5. In this embodiment, the probe device 15 is a cantilever-based probe device having a probe tip 17. It should be understood that the cassette can be configured to accept other types of probe devices.

[0081] The clamp unit 2 is positioned in the probe container 5. The clamp unit 2 is configured to selectively hold the probe device 15 under an adjustable clamping force caused by the clamp unit 2. The probe cassette may include multiple containers, as shown in Figures 1A and 1B. For example, the probe cassette may include multiple arrays / rows of probe containers, each array containing multiple containers 5. Each probe container 5 may be configured to receive a probe device. In this embodiment, the probe device 15 is received in the container with its tip facing upward. However, it is also conceivable that the containers are adapted to receive the probe device 15 facing downward. The probe containers can be adjusted to accommodate the probe devices 15 and can be positioned close to each other to accommodate as many probe devices as possible, thereby improving the packaging efficiency of the probe cassette 1.

[0082] In Figure 1B, a sheet 21, conforming to the shape and dimensions of the probe device 15, is formed on the probe container 5 on the cassette body 3. The sheet 21 is formed by a low / recessed surface 23 on the body 3 of the cassette 1. The sheet 21 can be sized to facilitate the positioning of the probe device 15 in the probe container 5, and allows for selective holding of the probe device 15 by the clamp unit 2.

[0083] The clamp unit 2 can be configured to provide an adjustable pressing force that is strong enough to hold the probe device in place, but not so strong as to compromise the integrity of the probe device. The clamp unit allows the probe device to be held against the surface of the probe cassette body with an adaptable precision force without damaging the probe device 15. Furthermore, this clamping force F applied to the probe device 15 can be precisely controlled using the actuator of the clamp unit 2. Advantageously, the clamping force can be selected according to the type, shape, and / or dimensions of the probe device. In this way, the probe cassette can be compatible with a wide variety of probe devices.

[0084] Figure 2 shows a schematic cross-sectional view of a portion of the probe cassette. Multiple probe containers 5 can be arranged adjacent to each other in one or more arrays. Each probe container 5 is adapted to receive a probe device 15. The clamp unit 2 may be adapted to provide an adjustable clamping force F to each probe device 15. The clamping force F may be the same for all probe devices. However, in an exemplary embodiment, the clamping force F may be adjusted separately for each probe device 15. In this way, a custom clamping force can be provided for each and / or group of clamp devices 15 held in the containers 5 on the cassette body 3 of the cassette.

[0085] Figure 3 shows a schematic diagram of one embodiment of the clamping unit 2 of a probe cassette. The clamping unit includes one or more magnets for providing a clamping force F. The cassette includes a lid 25 that substantially covers at least one container 5 in the closed position. As a result of the closing operation of the lid 25, one or more probe devices 15 can be held on the body 3 of the probe cassette 1 using the magnetic clamping unit 2. The lid 25 in the closed position can lock or secure the probe devices 15 to the container 5. The cassette can withstand shocks, including sudden movements and handling. The adjustable clamping unit 2 allows the probe devices 15 to provide a selectable clamping force.

[0086] The lid 25 may include a first static magnet 30a. A second static magnet 30b may be positioned on the surrounding pin 32. The first magnet 30a is positioned to push the surrounding pin 32 downward toward the probe device 15 when the lid is closed. This magnetic induction clamping force F can be adjusted by changing the distance between the two static magnets 30a, 30b in the closed position of the lid 25. This allows for more precise adjustment of the clamping force F. The clamping unit 2 may include one or more optional bearings 34 for guiding the surrounding pin 32.

[0087] Figure 4 shows a schematic diagram of an embodiment of the clamping unit 2 of the probe cassette. A first magnet 30a and a second magnet 30b (static and / or electromagnet) are used, which move closer to each other when the lid is closed, generating a repulsive force used to generate a clamping force. The clamping unit includes a movable structure 36 configured to push the probe device when the lid is in the closed position. In this embodiment, the movable structure 36 is bendable. Other types of movable devices are also conceivable. In one embodiment, the movable structure 36 is a spring, such as a leaf spring.

[0088] The pressing force is obtained by the magnetic force on the upper part of the surrounding sheet metal guide strip. For example, a static magnet inside the cover can continue to press the surrounding sheet metal guide strip downward against its own rigidity on the probe device 15. In one embodiment, the spring is bent more than 15°, so the sheet metal guide strip functions as a leaf spring pressing with the rigidity of a leaf spring. In one embodiment, the sheet metal guide strip is bent less than 13°, and a magnet is used, so the strip functions only as a guide and contact element pressed against the probe device by magnetic force. Other advantageous embodiments are also conceivable.

[0089] Figure 5 shows a schematic diagram of an embodiment of the clamp unit 2 of the probe cassette. The clamp unit includes a capillary tube 38 configured to guide liquid 40 in the container 5 toward the surface of the probe device 15 when the lid is in the closed position, and a clamping force F is obtained from the surface tension of the resulting liquid 40. The capillary tube 38 is positioned to provide a drop of liquid 40a between its outlet 38a and the probe device 15. The clamping force F obtained by the drop of liquid 40a may depend on the gap distance G between the outlet of the capillary tube 38 and the probe device 15. This gap distance G may be adjustable to allow adjustment of the clamping force. Additionally or alternatively, the clamping force F is adjusted by changing the amount of liquid guided through the outlet 38a of the capillary tube 38.

[0090] The fluid can be introduced from the upper surface of the probe device by a capillary tube 38. A force may be generated by the surface tension of the expanding liquid droplet. It will be understood that the fluid droplet can be removed by contraction or evaporation.

[0091] Figure 6 shows a schematic diagram of an embodiment of the clamping unit 2 of the probe cassette. The clamping unit includes an electromechanical actuator 60 configured to selectively provide a clamping force F. The electromechanical actuator is electrically actuated to mechanically clamp the probe device 15 in a container 5 located on the cassette body 3. The mechanical clamping force F can be adjusted by adjusting the electrical operation of the electromechanical actuator 60.

[0092] Different types of electromechanical actuators 60, such as piezoelectric actuators or elastomer actuators, can be used. Advantageously, precise control of the clamping force F can be achieved.

[0093] Small elastomer elements can be used in each probe device. In one embodiment, an elastomer foil with pockets / holes can be placed. Compressive force can be generated by expanding the elastomer using electrical action. The elastomer can be expanded by applying electrical tension. It will be understood that such electrical tension can be applied by providing a power source to the cassette, for example, by incorporating a battery in the lid or body of the probe cassette.

[0094] In one embodiment, a piezoelectric element is used in the lid of each probe device. The operation of the piezoelectric element can provide extension. Since the piezoelectric sheet can be cut into small elements, piezoelectric elements can be easily placed in each probe device. The piezoelectric element may be bonded to a PCB that is powered via an external power supply or battery located, for example, in the lid or body of the probe cassette.

[0095] Figures 7A and 7B show schematic diagrams of one embodiment of the clamp unit 2 of the probe cassette. The clamp unit 2 includes a membrane that is expandable under fluid pressure, and in the expanded position, the membrane contacts the probe device 15 in the container 5 to provide a clamping force F. When the membrane is in the expanded position, it can press against the surface of the probe device 15. As a result of the pressing action, a clamping force is obtained. The clamping force can be adjusted by changing the fluid pressure applied to the membrane. In this embodiment, the membrane forms an expandable balloon 70 that is positioned close to the probe device 15 when the lid 25 is in the closed position. The expandable balloon 70 precisely controls the induced clamping force applied to the probe device. Figure 7A shows the balloon 70 of the clamp unit 2 in the non-clamped position, and Figure 7B shows the balloon 70 of the clamp unit 2 in the clamped position where the inflated / extended balloon exerts a clamping force on the probe device 15.

[0096] The membrane-based pneumatic operation (gas pressure on the upper membrane) can provide appropriate clamping force to a wide variety of probe devices 15. Various pressing elements can be placed on or within the membrane. The membrane may be inflatable by gas pressure; however, hydraulic (hydraulic operation) can also be used. It may be easier to set the maximum pneumatic pressure, inflation force, or stroke using gas.

[0097] Figure 8 shows a schematic diagram of an embodiment of the clamp unit 2 of the probe cassette. The clamp unit 2 includes a fluid blower 80 configured to blow a fluid flow toward the probe device 15 to provide a clamping force F. The fluid flow can provide sufficient pushing action to hold the probe device fixed to the container. The clamp unit 2 includes a fluid channel 82 configured to guide the fluid under pressure toward the surface of the probe device 15. To obtain a more stable clamping force F, an optional foam member 84 can be placed around the fluid channel 82.

[0098] Figure 9 shows a schematic perspective view of an exemplary embodiment of probe cassette 1. Probe cassette 1 is configured to store, transport, and handle one or more probe devices (not shown in this figure) for probe-based systems such as scanning probe microscopes. Cassette 1 includes a body 3 having at least one probe container 5 configured to house probe devices. In this example, a vacuum clamping member 7 is positioned in the probe container 5 for selectively holding probe devices with a clamping force. An aperture 9 is positioned in each container 7. The aperture 9 is positioned in the body of cassette 1. While selectively holding probe devices, the aperture 9 is connectable to a vacuum pressure via a passage located in the cassette body 3. Cassette 1 includes a first fluid port 11 connectable to a first vacuum source for delivering vacuum pressure.

[0099] Each container 5 can form a slot adapted to receive a probe device. In this example, cassette 1 includes multiple containers 5 arranged in multiple arrays 13. In this exemplary embodiment, each array 13 has 10 containers 5. Furthermore, cassette 1 has a total of 20 consecutive arrays arranged adjacent to one another. It should be understood that different numbers of arrays and / or containers are possible. Many configurations are possible. Other types of container arrangements are also possible. For example, one cassette may be configured to accommodate 100 or more probe devices, e.g., 200 or more probe devices.

[0100] By using probe cassette 1, individual probe devices can be pre-loaded and transported to remote locations or probe-based systems, reducing user intervention. The pre-loaded cassette 1 can be easily shipped in a probe device delivery package. Upon delivery, the probe device delivery package and / or cassette 1, or at least a part thereof, can be directly mounted to a probe-based system (e.g., AFM). During operation of the probe-based system, the probe devices can be automatically accessed by the probe-based system.

[0101] The probe cassette can interface with a probe-based system. For example, when probe cassette 1 is delivered, the lid can be removed or opened. Then, probe cassette 1 can be placed at a mounting location on the probe-based system, such as a stage. Alternatively, the probe cassette or probe device delivery package can be introduced into the probe-based system, and then the lid can be opened within the probe-based system. Advantageously, the vacuum clamping member holds the probe device even when the lid is opened or removed, and even allows it to be handled with the lid open or removed. Therefore, the yield of fully functional probe devices after transport and handling can be significantly improved.

[0102] The container 5 may include a support surface on which a probe device can be placed, and the support surface may have at least one vacuum aperture to allow for (selective) vacuum clamping. The body of the cassette may include multiple apertures, each aperture arranged to provide vacuum clamping.

[0103] Figures 10A, 10B, 10C, and 10D show schematic cross-sectional views of the vacuum clamping member 7 (i.e., a further / second clamping unit) of the cassette 1. A container 5 housing the probe device 15 is shown in cross-section. Only a portion of the cassette 1 is shown in cross-section. The probe device 15 can be selectively clamped in place by the vacuum clamping member 7. In this example, the probe device 15 is a cantilever-based probe device with a probe tip 17. It should be understood that the cassette can be configured to accept other types of probe devices.

[0104] A vacuum clamp member 7 is located in the probe container 5. The vacuum clamp member 7 is configured to selectively hold the probe device 15 under a clamping force resulting from vacuum suction selectively induced by the clamp member 7 through an aperture 9. The aperture 9 is located in the body of the cassette 1 in the container 7. While selectively holding the probe device, the aperture 9 is connectable to vacuum pressure via a passage 19 located in the cassette body 3. The cassette 1 includes a first fluid port 11 connectable to a first vacuum source (not shown) for delivering vacuum pressure.

[0105] The probe cassette 1 may include multiple containers, as shown in Figures 10A and 10B. For example, the probe cassette 1 may include multiple arrays / rows of probe containers, each array containing multiple containers 5. Each probe container 5 may be configured to receive a probe device. In this example, the probe device 15 is received in the container with its tip facing upward. However, it is also conceivable that the containers are adapted to receive the probe device 15 facing downward. The probe containers can be adjusted to accommodate the probe device 15 and can be positioned close to each other to accommodate as many probe devices as possible, thereby improving the packaging efficiency of the probe cassette 1.

[0106] In Figure 10B, a sheet 21 is formed on the probe container 5, conforming to the shape and dimensions of the probe device 15. The sheet 21 is formed by a low / recessed surface 23 on the main body 3 of the cassette 1. The sheet can be sized to facilitate the positioning of the probe device 15 in the probe container 5, and allows for selective holding of the probe device 15 by the vacuum clamp member.

[0107] The vacuum clamp member 7 can be configured to provide a tensile force strong enough to hold the probe device in place, but not so strong as to impair the integrity of the probe device. The vacuum clamp member allows the probe device to be held against the surface of the probe cassette body with precise force without damaging the probe device. Furthermore, this tensile force applied to the probe device is precisely adjustable. Optionally, the vacuum force can be selected according to the type of probe device.

[0108] Figures 10C and 10D show schematic cross-sectional views of the vacuum clamp member 7 of the cassette 1. The lid 25 is attachable to the probe cassette 1 and substantially covers at least one container 5. The lid 25 may include retaining means (not shown) for holding one or more probe devices 15 on the body 3 of the probe cassette 1. When the lid 25 is in the closed position, it can, for example, shape-lock the probe devices 15 in the container 5. Advantageously, the vacuum clamp member 7 can hold the probe devices in position on the probe container 5 using a vacuum-induced clamping force, even when the lid is open and / or removed. The lid 25 may be opened and / or removed, for example, when the cassette is placed in the probe-based system. Also, during these operations, the probe devices 15 can be held in place on the body 3 of the cassette 1. In the embodiment of Figure 10D, the clamp member 7 has two apertures 9 and two passages 19 connected to the respective apertures 9 in the probe container 5. It should be understood that other configurations are also possible to achieve vacuum clamping. The body 3 of the cassette 1 includes a slit with an inclined concave surface adapted to accommodate the probe device 15.

[0109] The probe device 15 can be fixed between the lid 25 and the body 3 of the probe cassette 1 when the lid 25 is in the closed position. The cassette can withstand shocks, including sudden movements and handling. The vacuum clamping member allows the probe device 15 to be held even when the lid 25 is removed or opened. If the lid 25 no longer provides a clamp (i.e., is open / removed), only selective vacuum clamping may be employed.

[0110] For example, the tensile holding force of the vacuum base that secures the probe device 15 to the main body 3 of the probe cassette 1 can be made sufficiently large so that the probe device can withstand pushing or vibration during transport or handling without compromising the integrity of the probe device 15.

[0111] Figure 11 shows a schematic diagram of a process 100 for delivering a probe device in a probe-based system. The probe cassette 1 includes a body having at least one probe container configured to house a probe device. The probe device is selectively held under a clamping force in the probe container by a vacuum clamping member. The container has at least one aperture, which is connected to a vacuum pressure through a passage located in the cassette body while selectively holding the probe device. The probe cassette has a first fluid port 31 connectable to a first vacuum source for delivering the vacuum pressure. The fluid connection is achieved by a flexible tube 35.

[0112] The probe cassette 1 further includes a second fluid port 33 connectable to a second vacuum source. The tensile holding force applied by the vacuum clamp member is adjustable by controlling the vacuum pressure. Furthermore, a lid 37 is attached to the probe cassette 1 and substantially covers at least one container. Optionally, the lid 37 includes retaining means 27 for holding one or more probe devices on the body of the probe cassette 1. In this example, the cassette 1 is initially housed in a probe cassette delivery package comprising a base 39 and a lid 37. It will be understood that the lid 37 and / or base 39 may be part of the cassette and / or integrated with the cassette 1.

[0113] The probe device can be selectively held in position in the probe container by a vacuum clamp member when the lid 37 is opened and / or removed. The first fluid port 31 can be connected to the first vacuum source when the lid 37 is closed.

[0114] In process 100, the first fluid port 31 is connected to the first vacuum source (step B). The cassette 1, lid 37, base 39 and / or optional package delivery package are arranged to allow this while the lid 37 is in the closed position. Vacuum is then supplied to the cassette 1, and by applying a tensile holding force, the vacuum clamp member is allowed to hold the probe device in the position housed in the probe cassette 1. Next, while the probe device is held in place by the vacuum clamp member of the cassette 1, the lid 37 can be removed from the cassette 1 (step C). The probe cassette 1 is then moved to a probe-based system having the first fluid port 31 connected to the first vacuum source that provides the vacuum (step D). Next, the probe cassette 1, inserted into the chamber 41 of the probe-based system, is connected to a second vacuum source via the second fluid port 33 of the probe cassette 1 (step E). The second vacuum source is the mechanical vacuum of the probe-based system. Next, the first fluid port 31 is disconnected from the first vacuum source (step F). The probe used in the probe-based system may be returned to cassette 1.

[0115] A probe-based system may selectively access probe devices arranged on a probe cassette. In this regard, one or more selected probe devices may be loaded into one or more probe mounts of the probe-based system using means for retrieving / holding the probe devices from the probe cassette. Mechanical clamps, (electromagnetic) magnetic clamps, electrostatic clamps, adhesive clamps, and / or vacuum clamps may be used.

[0116] Figures 12A and 12B show schematic perspective views of cassette 1. In Figure 12B, the diagram is rotated relative to the perspective view shown in Figure 12A. Cassette 1 includes a first fluid port 31 and a second fluid port 33. Fluid ports 31 and 33 are located within a fluid connection system 45. Probe cassette 1 includes a series of probe vacuum retainers arranged to hold the probe device located within the probe container 5 of the main body of cassette 1.

[0117] Figure 13 shows a schematic perspective view of the probe delivery package 50 and the cassette 1 housed therein. The cassette 1 is configured to be housed in the probe device delivery package 50. The probe device delivery package 50 includes a package base 39' and a package lid 37' connected to each other. The package lid 37' is mountable on the body of the cassette 1 and substantially covers at least one container positioned on the body. A first fluid port 31 is connectable to a first vacuum source when the package lid 37' is in the closed position. The package lid 37' is movably positioned relative to the package base 39' by a hinge 51. In this way, the package lid 37' can be opened to remove the cassette 1. In this embodiment, the package base 39' includes a port opening 53 configured to allow fluid connection between the first fluid port 31 of the probe cassette 1 and an external vacuum source while the probe device delivery package 50 is closed (i.e., the package lid 37' is in the closed position). Therefore, in this way, the vacuum clamping member of the probe cassette can be selectively operated before the package lid 37' is opened, improving the clamping system.

[0118] Optionally, the lid includes a clamping unit having a series of clampers 55 configured to interface with a probe device located in the container 5, the distal ends of which collide with the probe device 15, thereby improving the retention of the probe device within the container. Shape locking can be achieved in this manner. Optionally, the probe device is sandwiched between the lid 37' and the body of the cassette 1. A vacuum clamping member may be operated to hold the probe device within the cassette under a clamping force (e.g., tensile / suction force). The container is provided with a vacuum aperture / opening to contact at least a portion of the probe device in order to hold the probe device on the base of the cassette when the lid is removed or opened and / or when the lid is handled in a state where the lid does not cover multiple containers (open / removed position).

[0119] The tensile force applied to the probe device can be adjusted by the vacuum clamp member. Various tensile forces can be selected. Optionally, the tensile force applied by the tensile vacuum holding mechanism is variable and can be controlled by a controller that adjusts the applied vacuum conditions. During transport and / or handling of the probe cassette 1, a configurable suction force can be applied to the probe device to secure it to the body of the probe cassette 1.

[0120] In some embodiments, the lid is not connected to the cassette body but is positioned in alignment with the cassette body.

[0121] Figures 14A and 14B show schematic perspective views of the probe cassette 1. The clamp unit 2 includes two magnets to provide the clamping force. In this example, two static / permanent magnets 30a and 30b are arranged. The magnets 30a and 30b are configured such that when the lid is closed, the like poles of the magnets 30a and 30b approach each other, inducing the clamping force necessary to hold the probe device 15 in the position of the container 5 where the probe device 15 will be received. The like poles of the magnets 30a and 30b repel each other, and the clamping force can be adjusted by changing the gap distance in the closed position of the lid. The clamping device is adjustable to a plurality of second positions in which the probe device is clamped, each second position having a different clamping force.

[0122] In the illustrated example, the first magnet 30a and the second magnet 30b are positioned such that the same poles of magnets 30a and 30b face each other. The clamp unit 2 is configured such that when the lid 25 is closed, the first magnet 30a and the second magnet 30b move closer to each other, generating a force used to clamp the probe device 15 to the container 5.

[0123] The magnets 30a and 30b are not in contact with each other and face each other when the lid 25 of the probe cassette 1 is closed. The magnets 30a and 30b interact with each other when the lid 25 is closed, generating a clamping force. The similar poles (e.g., N, N or S, S) of each magnet 30a and 30b of the clamping unit 2 face each other. The relative position of at least one of the two magnets 30a and 30b can be adjusted so that the resulting clamping force is adjustable, at least when the lid is closed. Although permanent magnets are used in this example, it should be understood that an electromagnet arrangement is also conceivable. In the illustrated example, only one clamping unit 2 is shown for one container housing a single probe device 15. However, a clamping unit 2 may be placed in each container. It is also conceivable that multiple probe devices 15 may be accommodated in the container 5.

[0124] Figures 15A and 15B show a schematic cross-sectional view of the cassette in the container. The clamping unit 2 includes a first magnet 30a having magnetic poles 30a-1 and 30a-2, and a second magnet 30b having magnetic poles 30b-1 and 30b-2. Both magnets 30a and 30b are permanent magnets having the same poles (30a-1, 30b-1) facing each other for repulsion. The two magnets 30a and 30b are aligned with respect to each other in the illustrated example. The clamping force is achieved when the lid 25 is closed and / or placed on the body 3 of the probe cassette 1. When the lid is in the closed position, the clamping force can be adjusted by adjusting the distance between the two magnets 30a and 30b. The clamping unit 2 is equipped with an adjustment member for adjusting the clamping force, and the clamping unit is selectively operable to a plurality of second positions, which provide different clamping forces to restrict the movement of the probe device 15 in the container 5, ranging from a first position (e.g., when the lid 25 is open) where the clamping force is insufficient to clamp the probe device 15 in the container 5, to a plurality of second positions (e.g., when the lid is closed) where the clamping force restricts the movement of the probe device 15 in the container 5, thereby providing different clamping forces to restrict the probe device 15 to different degrees.

[0125] In the example shown in Figures 15A and 15B, the first magnet 30a and the second magnet 30b are configured such that the clamping force for holding the probe device in the container is based on the repulsive force between the two magnets 30a and 30b. The first magnet 30a may be fixed to the lid 25, and the second magnet 30b may be fixed to a guide member 90. The second magnet 30b may guide the probe clamp pin 91 to press against the probe device 15. The guide member 90 may be a guide curve. The guide curve 90 may be configured to guide the probe clamp pin 91 toward the probe device 15 when the lid 25 of the probe cassette 1 is closed, and to move the probe clamp pin 91 away from the probe device when the lid 25 of the probe cassette is opened or removed from the cassette body 3. It should be understood that other structures (e.g., biasing members) can also be used as the guide member 90.

[0126] In an exemplary embodiment (not shown), the clamping unit includes permanent magnets 30a, 30b and at least one electromagnet. The first permanent magnet can be coupled to another electromagnet to overlay the magnetic field generated between the two permanent magnets. A controller or control unit can be linked to the electromagnet to change the magnetic field and adjust the resulting clamping force.

[0127] Optionally, the vacuum hole clamping unit can be configured to retain the probe device in the container position even when the lid 25 is opened or removed from the cassette body 3.

[0128] Drawings are not necessarily drawn to a fixed scale. Furthermore, elements with the same function and configuration are denoted by the same reference numeral in the drawings, and detailed descriptions of these elements are omitted.

[0129] Furthermore, all details of the present invention can be replaced with other technically equivalent elements, and the materials used, as well as the shapes and dimensions of the various components, may be varied according to requirements.

[0130] The cassette can be used in many types of probe-based systems. Following scanning probe microscopes, other probe-based systems are also envisioned. It should be understood that atomic force microscopes (AFMs) can also be used to manipulate parts of a substrate (e.g., atoms) using one or more probe devices. In this case, the scanning probe microscope may also be called a scanning probe manipulator. The present invention can be applied to other machines or systems, for example, machines that use fragile units (e.g., substrates, chips) that must be replaced periodically. Fragile units are small in size and may require delicate handling (they can be damaged if not handled with extreme care). The cassette according to the present invention can be used for the transport and handling of such fragile units.

[0131] Wherever a feature or element is referred to as being "on top of" another feature or element, it may be immediately on top of the other feature or element, or there may be intervening features and / or elements. Also, wherever a function or element is referred to as being "connected," "attached," or "combined" to another function or element, it is understood that it may be directly connected to, attached to, or combined with the other function or element, or there may be intervening functions or elements.

[0132] The terms “first” and “second” may be used herein to describe various features / elements, but unless otherwise indicated in the context, these features / elements should not be limited by these terms. These terms may be used to distinguish one function / element from another. Thus, without departing from the teachings of the invention, the first feature / element discussed below may be referred to as the second feature / element, and similarly, the second feature / element discussed below may be referred to as the first feature / element.

[0133] "Optional" or "optional" means that the event or situation described thereafter may or may not occur, and the description includes both cases where the event or situation occurs and where it does not.

[0134] In drawings that are not necessarily drawn to a consistent scale, similar numbers may represent similar components in different drawings. Similarly, similar numbers with different letter suffixes may represent different examples of similar components.

[0135] Various embodiments can be implemented using hardware elements, software elements, or a combination of both. Examples of hardware elements may include processors, microprocessors, circuits, application-specific integrated circuits (ASICs), programmable logic devices (PLDs), digital signal processors (DSPs), field programmable gate arrays (FPGAs), logic gates, registers, semiconductor devices, microchips, and chipsets. Examples of software may include software components, programs, applications, computer programs, application programs, system programs, machine programs, operating system software, mobile apps, middleware, firmware, software modules, routines, subroutines, functions, computer-implemented methods, procedures, software interfaces, application program interfaces (APIs), methods, instruction sets, computing code, and computer code.

[0136] Herein, the present invention will be described with reference to specific examples of embodiments of the invention. However, it will be apparent that various modifications, alterations, substitutions, and changes can be made without departing from the essence of the invention. For the sake of clear and concise description, features are described herein as part of the same or distinct embodiments, but alternative embodiments having all or some combinations of the features described in these distinct embodiments are also envisioned and will be understood to fall within the framework of the invention as outlined by the claims. Accordingly, the specification, figures, and examples should be considered descriptive rather than restrictive. The invention is intended to encompass all substitutions, modifications, and alterations that fall within the spirit and scope of the appended claims. Furthermore, many of the elements described are functional entities that can be implemented as individual or distributed components, or in combination with other components, in any suitable combination and location.

[0137] In the claims, reference symbols placed in parentheses should not be construed as limiting the claims. The word “including” does not preclude the existence of other functions or steps other than those described in the claims. Furthermore, the words “a” and “an” should not be construed as limiting to “only one,” but rather as meaning “at least one,” and not precluding plural. The mere fact that certain measures are described in different claims does not indicate that a combination of these measures cannot be used advantageously. [Explanation of symbols]

[0138] 1 Probe Cassette 2 Clamp Units 3. Main unit, cassette unit 5. Probe container 7. Vacuum clamping member, container 9 Aperture 11, 31 First fluid port 13 Arrays 15 Probe device 17 Probe tip 19 aisle 21 sheets 23 Surface 25, 37, 37' lid 27 Retention means 30a First magnet 30a-1, 30a-2 magnetic pole 30b Second Magnet 30b-1, 30b-2 magnetic pole 32 Encircling pins 33 Second fluid port 34 bearings 35 Flexible Tube 36 Movable structure 38 Capillaries 38a exit 39, 39' base 40, 40a liquid 41 Chamber 45 Fluid Connection Systems 50 probe delivery packages 51 Hinge 53 port openings 55 Clamper 60 Electromechanical Actuators 70 balloons 82 fluid channels 84 Foam components 90 Guide Member 91 Probe clamp pin 100 processes

Claims

1. A probe cassette for storing, transporting, and handling one or more probe devices for a probe-based system, A cassette body having at least one probe container configured to house a probe device, A lid connectable to the cassette body, wherein the lid, when in the closed position, is configured to substantially cover the at least one probe container, and A clamping unit configured to hold the probe device in the probe container by applying a clamping force to the probe device when the lid is in the closed position, Equipped with, The clamping unit includes an adjustment member for adjusting the clamping force, the adjustment member being selectively operable to move from a first state insufficient to provide clamping of the probe device in the probe container while the lid is held in the closed position, to a plurality of second states in which the clamping force restricts the movement of the probe device in the probe container, the plurality of second states providing different clamping forces to restrict the probe device to different degrees, each of the plurality of second states being an indexed stable setting associated with a predetermined clamping force, and the probe cassette further includes a controller configured to maintain the predetermined clamping force in each of the plurality of second states. Probe cassette.

2. The probe cassette according to claim 1, wherein the clamp unit includes an actuator that can be selectively operated from the first state to one of the plurality of second states.

3. The probe cassette according to claim 1 or 2, wherein the clamping unit includes an electromechanical actuator configured to selectively provide the clamping force achieved in the first state and the plurality of second states.

4. The probe cassette according to claim 3, wherein the electromechanical actuator is at least one of a piezoelectric actuator or an elastomer actuator.

5. The probe cassette according to any one of claims 1 to 4, wherein the clamping unit includes a capillary configured to guide liquid toward the surface of the probe device in the probe container when the lid is in the closed position, and the clamping unit is configured to achieve the clamping force by the resulting surface tension of the liquid.

6. The probe cassette according to any one of claims 1 to 5, wherein the clamping unit includes one or more magnets for providing the clamping force.

7. The probe cassette according to claim 6, wherein the clamping unit includes at least two opposing magnets having poles configured to generate a repulsive force to provide the clamping force when the lid is closed.

8. The probe cassette according to any one of claims 1 to 7, wherein the clamping unit includes a membrane expandable under fluid pressure, and in the plurality of second states, the clamping unit is configured to guide the membrane to an expanded position that contacts the probe device at the probe container to provide the clamping force.

9. The probe cassette according to claim 8, wherein the membrane forms an expandable and retractable balloon that is positioned close to the probe device when the lid is in the closed position.

10. The probe cassette according to any one of claims 1 to 9, wherein the clamping unit includes a fluid blower configured to blow a fluid flow toward the probe device in order to provide the clamping force.

11. The probe cassette according to any one of claims 1 to 10, wherein the clamping unit includes a vacuum clamping member configured to selectively hold the probe device with a clamping force, and the probe container has at least one aperture that can be connected to a vacuum pressure via a passage located in the cassette body while selectively holding the probe device.

12. A probe cassette according to any one of claims 1 to 11, wherein the clamping unit is a first clamping unit, the probe cassette includes a further second clamping unit distinct from the first clamping unit, the first clamping unit is operable from a first state to one of a plurality of second states when the lid is closed, the second clamping unit is positioned in the cassette body to selectively hold the probe device in the probe container under a second clamping force, the second clamping unit is adjustable between a first state in which the second clamping force is large enough to allow the probe device to be clamped and a second state in which the second clamping force is small enough to allow the probe device to be released, the second clamping unit is operable when the lid is in the open position, and in the open position, the one or more probe devices housed in the probe cassette can be accessed.

13. The probe cassette according to claim 12, wherein the first clamping unit is positioned on the lid of the cassette probe, and the first clamping unit automatically operates to one of the plurality of second states when the lid is in the closed position.

14. Use of a probe cassette according to any one of claims 1 to 13 for storing, transporting and / or handling one or more probe devices for a probe-based system.

Images