Sensor and Capacitor Devices

Abstract

To provide a sensor and capacitor device capable of improving characteristics.SOLUTION: A sensor comprises a base and an element section. The element section includes a fixed electrode, a first support structure, and a movable member. The fixed electrode is fixed to the base. The first support structure includes a first fixed member fixed to the base, a first intermediate member supported by the first fixed member, a first connecting member supported by the first intermediate member, a first cross fixed member fixed to the base, a first cross intermediate member supported by the first cross fixed member, and a first cross connecting member supported by the first cross intermediate member. The first connecting member includes a first connecting portion, a first support connecting portion, and a first intermediate connecting portion between the first connecting portion and the first support connecting portion. The first support member is fixed to the base and supports the first intermediate connecting portion. The movable member includes a first movable portion. The first movable portion is supported by the first support connecting portion and the first cross connecting member.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to a sensor and a capacitor device.

Background Art

[0002] For example, there is a sensor for detecting a gas such as hydrogen. In the sensor, improvement in characteristics is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments of the present invention provide a sensor and a capacitor device capable of improving characteristics.

Means for Solving the Problems

[0005] According to embodiments of the present invention, the sensor includes a base and an element portion. The element portion includes a fixed electrode, a first support structure, and a movable member. The fixed electrode is fixed to the base. The first support structure includes a first fixed member fixed to the base, a first intermediate member supported by the first fixed member, a first connecting member supported by the first intermediate member, a first crossing fixed member fixed to the base, a first crossing intermediate member supported by the first crossing fixed member, and a first crossing connecting member supported by the first crossing intermediate member. The first connecting member includes a first connecting portion, a first support connecting portion, and a first intermediate connecting portion between the first connecting portion and the first support connecting portion. The direction from the first connecting portion to the first support connecting portion is along a second direction intersecting a first direction from the base to the fixed electrode. The first support member is fixed to the base and supports the first intermediate connecting portion. The movable member includes a movable electrode. The movable member includes a first movable portion. The first movable part is supported by the first support connection part and the first crossing connection member. A first gap is provided between the fixed electrode and the movable member. [Brief explanation of the drawing]

[0006] [Figure 1] Figure 1 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 2] Figure 2 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 3] Figure 3 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 4] Figure 4 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 5] Figure 5 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 6] Figure 6 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 7] Figure 7 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 8] Figure 8 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 9] Figure 9 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 10] Figure 10 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 11] Figure 11 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 12] Figure 12 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 13] Figure 13 is a schematic plan view illustrating a sensor according to the first embodiment. [Modes for carrying out the invention]

[0007] The embodiments of the present invention will be described below with reference to the drawings. Drawings are schematic or conceptual, and the relationships between the thickness and width of each part, as well as the ratios of the sizes of different parts, are not necessarily identical to those of reality. Even when representing the same part, the dimensions and ratios may be depicted differently in different drawings. In this specification and in each figure, elements similar to those described above are denoted by the same reference numerals with respect to previously shown figures, and detailed explanations are omitted as appropriate.

[0008] (First Embodiment) Figure 1 is a schematic plan view illustrating a sensor according to the first embodiment. Figures 2 to 5 are schematic cross-sectional views illustrating a sensor according to the first embodiment. Figure 2 is a cross-sectional view taken along line A1-A2 in Figure 1. Figure 3 is a cross-sectional view taken along line A3-A4 in Figure 1. Figure 4 is a cross-sectional view taken along line B1-B2 in Figure 1. Figure 5 is a cross-sectional view taken along line B3-B4 in Figure 1.

[0009] As shown in Figures 1 to 5, the sensor 110 according to this embodiment includes a base 51s and an element section 10E. The base 51s includes, for example, a silicon substrate. The base 51s may also include electronic elements such as transistors.

[0010] The element part 10E includes a fixed electrode 51E, a first support structure 20a, and a movable member 11M. The fixed electrode 51E is fixed to a base 51s. The first direction D1 from the base 51s to the fixed electrode 51E is the Z-axis direction. The direction perpendicular to the Z-axis direction is the Y-axis direction. The direction perpendicular to the Z-axis direction and the Y-axis direction is the X-axis direction.

[0011] As shown in FIG. 2, the base 51s includes a first surface 51F. The first surface 51F substantially follows the X-Y plane. The fixed electrode 51E is provided on the first surface 51F.

[0012] The first support structure 20a includes a first fixing member 21F, a first intermediate member 21M, a first connecting member 21, a first cross fixing member 41F, a first cross intermediate member 41M, and a first cross connecting member 41C.

[0013] The first fixing member 21F is fixed to the base 51s. The first intermediate member 21M is supported by the first fixing member 21F. The first connecting member 21 is supported by the first intermediate member 21M.

[0014] The first connecting member 21 includes a first connecting part 21a, a first support connecting part 21b, and a first intermediate connecting part 21c. The first intermediate connecting part 21c is provided between the first connecting part 21a and the first support connecting part 21b. The direction from the first connecting part 21a to the first support connecting part 21b follows the second direction D2. The second direction D2 intersects the first direction D1 from the base 51s to the fixed electrode 51E. In this example, the second direction D2 follows the Y-axis direction.

[0015] The first support member 21S is fixed to the base 51s. The first support member 21S supports the first intermediate connecting part 21c.

[0016] For example, the first cross direction Dx1 from the first support member 21S to the first intermediate connecting part 21c intersects the plane including the first direction D1 and the second direction D2.

[0017] In this example, the element portion 10E further includes a first opposing support member 21Sx. The first opposing support member 21Sx is fixed to the base 51s. The first opposing support member 21Sx supports a first intermediate connection portion 21c. The first intermediate connection portion 21c is located between the first support member 21S and the first opposing support member 21Sx.

[0018] The first intersecting fixing member 41F is fixed to the base 51s. The first intersecting intermediate member 41M is supported by the first intersecting fixing member 41F. The first intersecting connecting member 41C is supported by the first intersecting intermediate member 41M.

[0019] The movable member 11M includes a movable electrode 11E. The movable member 11M includes a first movable part 11a. The first movable part 11a is supported by a first support connection part 21b and a first crossing connection member 41C. A first gap g1 is provided between the fixed electrode 51E and the movable member 11M. Part of the first gap g1 is between the base body 51s and the first connection member 21. Another part of the first gap g1 is between the base body 51s and the first crossing connection member 41C.

[0020] As shown in Figure 1, the direction from the first connecting member 21 to the first movable part 11a is along the second direction D2. The direction from the first intersecting connecting member 41C to the first movable part 11a intersects the first direction D1 and the second direction D2. For example, the direction from the first intersecting connecting member 41C to the first movable part 11a is along the third direction D3. In this example, the third direction D3 is, for example, along the first intersecting direction Dx1.

[0021] As shown in Figure 2, the distance between the base 51s and the first connecting portion 21a along the first direction D1 is defined as the first distance d1. The distance between the base 51s and the first support connecting portion 21b along the first direction D1 is defined as the second distance d2. In this embodiment, when the first distance d1 decreases, the second distance d2 increases. When the first distance d1 increases, the second distance d2 decreases. In the first connecting member 21, the height of the first intermediate connecting portion 21c is fixed, and the portions on both sides thereof (the first connecting portion 21a and the first support connecting portion 21b) are displaced in opposite directions. The first connecting member 21 has a seesaw structure.

[0022] When the end of the first intermediate member 21M (the end on the first connecting member 21 side) attempts to displace toward the base body 51s, the first support connecting portion 21b attempts to displace toward the base body 51s.

[0023] On the other hand, when the end of the first intersecting intermediate member 41M (the end on the side of the first intersecting connecting member 41C) attempts to displace toward the base body 51s, the first intersecting connecting member 41C also attempts to displace toward the base body 51s.

[0024] In this way, opposite displacements occur in the two beams (first connecting member 21 and first crossing connecting member 41C) that support the first movable part 11a of the movable member 11M. This allows for the suppression of effects such as temperature, and enables detection with higher accuracy.

[0025] In one example, the first intermediate member 21M and the first intersecting intermediate member 41M deform in response to temperature. For example, as the temperature rises, the ends of the first intermediate member 21M and the ends of the first intersecting intermediate member 41M are displaced to move closer to the base 51s. At this time, as described above, the direction of displacement at the first support connection 21b is opposite to the direction of displacement at the first intersecting connection member 41C. This makes it possible to suppress, for example, unintended displacement of the movable member 11M due to temperature.

[0026] In another example, the first intermediate member 21M is deformable according to the state of the object to be detected. The deformation of the first intermediate member 21M changes the rotation angle of the first connecting member 21. This changes the inter-electrode distance dz between the fixed electrode 51E and the movable electrode 11E. The change in the inter-electrode distance dz changes the capacitance between these electrodes. By detecting the change in capacitance, the state of the object to be detected can be detected. The state of the object to be detected is, for example, the concentration of the target gas. The capacitance may be detected by, for example, the control unit 70 (see Figure 2).

[0027] In the above example, where the first intermediate member 21M deforms according to the state of the object to be detected, the provision of a first cross-connecting member 41C whose direction of displacement is in the opposite direction can suppress the effects of, for example, temperature. This enables detection with higher accuracy.

[0028] In one example, as shown in Figure 2, the first intermediate member 21M includes a first layer 21L. The first layer 21L is, for example, a sensitive membrane. The volume of the first layer 21L changes according to the concentration of the object to be detected (e.g., the gas to be detected). This is due to the object to be detected entering the first layer 21L. The first intermediate member 21M, including the first layer 21L, functions, for example, as an actuator.

[0029] For example, if the concentration of the substance to be detected is high, the volume of the first layer 21L increases. As a result, the first intermediate member 21M deforms, and the first connecting portion 21a moves closer to the base body 51s. Accordingly, the first support connecting portion 21b moves away from the base body 51s. Therefore, as the concentration of the substance to be detected increases, the distance dz between electrodes increases, and the capacitance decreases.

[0030] On the other hand, a possible example is one in which the inter-electrode distance dz increases as the concentration of the substance to be detected increases. In this example, if the inter-electrode distance dz becomes excessively short, the movable member 11M will come into contact with the fixed electrode 51E, making it difficult to obtain normal operation. In this example, if the inter-electrode distance dz is set to a long initial value, the sensitivity will decrease.

[0031] In this embodiment, the first intersecting intermediate member 41M is not provided with a sensitive film (e.g., the first layer 21L), and the first intermediate member 21M does not need to have a sensitive film. In this case, for example, when the concentration of the substance to be detected increases, the inter-electrode distance dz increases due to the seesaw structure of the first connecting member 21, and the capacitance decreases. Even at high concentrations, the substance to be detected can be properly detected. In the initial state, even if the inter-electrode distance dz is set to be short, the inter-electrode distance dz will not become shorter than the initial state. As a result, in this embodiment, the inter-electrode distance dz in the initial state can be made smaller than its value in the reference example. This enables detection with higher sensitivity. According to this embodiment, a wide dynamic range can be obtained. High sensitivity can be obtained. According to this embodiment, a sensor with improved characteristics can be provided.

[0032] For example, in this embodiment, a first state and a second state may exist. The concentration of the substance to be detected in the first state, which is present around the element portion 10E, is higher than the concentration of the substance to be detected in the second state. The first state is, for example, a high-concentration state. The second state is a low-concentration state.

[0033] For example, the first distance d1 in the first state is shorter than the first distance d1 in the second state. The first distance d1 becomes shorter when the concentration of the substance being detected is high. For example, the second distance d2 in the first state is longer than the second distance d2 in the second state. The second distance d2 becomes longer when the concentration of the substance being detected is high.

[0034] In one example, the first layer 21L included in the first intermediate member includes, for example, at least one selected from the group consisting of palladium (Pd), platinum (Pt), and gold (Au). The first layer 21L may further include, for example, at least one selected from the group consisting of silicon (Si), phosphorus (P), boron (B), copper (Cu), silver (Ag), nickel (Ni), gold (Au), iron (Fe), and chromium (Cr). The first layer 21L may include, for example, an alloy containing a first element and a second element. The first element includes, for example, at least one selected from the group consisting of Mg, Ti, Zr, Ca, La, Mn, and V. The second element includes, for example, at least one selected from the group consisting of Ni, Cu, Fe, Co, Cr, Mn, V, and Nb. The above material is capable of incorporating, for example, hydrogen. In this case, the target for detection includes hydrogen. The first intermediate member 21M deforms according to the hydrogen concentration.

[0035] As shown in Figure 2, in this example, the first intermediate member 21M includes a first insulating layer 21i. The first insulating layer 21i is located between the substrate 51s and the first layer 21L. For example, when the concentration of the substance to be detected increases, the volume of the first layer 21L expands. On the other hand, the volume of the first insulating layer 21i does not change substantially. As a result, the end of the first intermediate member 21M (the terminal on the first connecting member 21 side) is displaced to move closer to the substrate 51s. The first support connecting portion 21b is displaced to move away from the substrate 51s. Accordingly, the movable member 11M is displaced to move away from the substrate 51s.

[0036] As shown in Figures 1, 2, and 5, the element section 10E may further include a first other support structure 20aA. The first other support structure 20aA includes a first other fixing member 21FA, a first other intermediate member 21MA, a first other connecting member 21A, a first other support member 21SA, a first other cross fixing member 41FA, a first other cross intermediate member 41MA, and a first other cross connecting member 41CA.

[0037] The first other fixing member 21FA is fixed to the base 51s. The first other intermediate member 21MA is supported by the first other fixing member 21FA. The first other connecting member 21A is supported by the first other intermediate member 21MA.

[0038] The first other connecting member 21A includes a first other connecting portion 21aA, a first other support connecting portion 21bA, and a first other intermediate connecting portion 21cA. The first other intermediate connecting portion 21cA is provided between the first other connecting portion 21aA and the first other support connecting portion 21bA. The direction from the first other connecting portion 21aA to the first other support connecting portion 21bA intersects with the first direction D1. In this example, the direction from the first other support connecting portion 21bA to the first other connecting portion 21aA follows the second direction D2.

[0039] The first other support member 21SA is fixed to the base 51s. The first other support member 21SA supports the first other intermediate connection portion 21cA. As shown in Figure 1, in this example, the element portion 10E further includes a first other opposing support member 21SxA. The first other opposing support member 21SxA is fixed to the base 51s. The first other opposing support member 21SxA supports the first other intermediate connection portion 21cA. The first other intermediate connection portion 21cA is provided between the first other support member 21SA and the first other opposing support member 21SxA. As shown in Figure 2, a portion of the first gap g1 is between the base 51s and the first other connection member 21A.

[0040] As shown in Figures 1 and 5, the first intersecting fixing member 41FA is fixed to the base 51s. The first intersecting intermediate member 41MA is supported by the first intersecting fixing member 41FA. The first intersecting connecting member 41CA is supported by the first intersecting intermediate member 41MA.

[0041] The movable member 11M further includes a first other movable part 11aA. The first other movable part 11aA is supported by a first other support connection part 21bA and a first other crossing connection member 41CA.

[0042] The provision of the first support structure 20aA allows, for example, the movable member 11M to be supported more stably.

[0043] As shown in Figure 1, the element portion 10E may further include a second support structure 20b. The second support structure 20b includes a second fixing member 22F, a second intermediate member 22M, a second connecting member 22, a second support member 22S, a second crossing fixing member 42F, a second crossing intermediate member 42M, and a second crossing connecting member 42C.

[0044] As shown in Figure 3, the second fixing member 22F is fixed to the base 51s. The second intermediate member 22M is supported by the second fixing member 22F. The second connecting member 22 is supported by the second intermediate member 22M.

[0045] The second connecting member 22 includes a second connecting portion 22a, a second support connecting portion 22b, and a second intermediate connecting portion 22c. The second intermediate connecting portion 22c is provided between the second connecting portion 22a and the second support connecting portion 22b. The direction from the second connecting portion 22a to the second support connecting portion 22b intersects with the first direction D1. In this example, the direction from the second connecting portion 22a to the second support connecting portion 22b follows the second direction D2.

[0046] The second support member 22S is fixed to the base 51s. The second support member 22S supports the second intermediate connection portion 22c.

[0047] In this example, the element portion 10E further includes a second opposing support member 22Sx. The second opposing support member 22Sx is fixed to the base 51s. The second opposing support member 22Sx supports a second intermediate connection portion 22c. The second intermediate connection portion 22c is located between the second support member 22S and the second opposing support member 22Sx.

[0048] As shown in Figure 3, the distance between the base 51s and the second connecting portion 22a along the first direction D1 is defined as the third distance d3. The distance between the base 51s and the second support connecting portion 22b along the first direction D1 is defined as the fourth distance d4. In this embodiment, when the third distance d3 decreases, the fourth distance d4 increases. When the third distance d3 increases, the fourth distance d4 decreases. In the second connecting member 22, the height of the second intermediate connecting portion 22c is fixed, and the portions on both sides thereof (the second connecting portion 22a and the second support connecting portion 22b) are displaced in opposite directions.

[0049] As shown in Figure 4, the second intersecting fixing member 42F is fixed to the base 51s. The second intersecting intermediate member 42M is supported by the second intersecting fixing member 42F. The second intersecting connecting member 42C is supported by the second intersecting intermediate member 42M.

[0050] The movable member 11M further includes a second movable part 11b. The second movable part 11b is supported by a second support connection part 22b and a second crossing connection member 42C.

[0051] As shown in Figure 1, the element section 10E may further include a second other support structure 20bA. The second other support structure 20bA includes a second other fixing member 22FA, a second other intermediate member 22MA, a second other connecting member 22A, a second other support member 22SA, a second other crossing fixing member 42FA, a second other crossing intermediate member 42MA, and a second other crossing connecting member 42CA.

[0052] As shown in Figure 3, the second other fixing member 22FA is fixed to the base 51s. The second other intermediate member 22MA is supported by the second other fixing member 22FA. The second other connecting member 22A is supported by the second other intermediate member 22MA.

[0053] The second other connecting member 22A includes a second other connecting portion 22aA, a second other support connecting portion 22bA, and a second other intermediate connecting portion 22cA. The second other intermediate connecting portion 22cA is provided between the second other connecting portion 22aA and the second other support connecting portion 22bA. The direction from the second other connecting portion 22aA to the second other support connecting portion 22bA intersects with the first direction D1. The direction from the second other support connecting portion 22bA to the second other connecting portion 22aA follows the second direction D2.

[0054] The second other support member 22SA is fixed to the base 51s. The second other support member 22SA supports the second other intermediate connection part 22cA.

[0055] In this example, the element portion 10E further includes a second opposing support member 22SxA. The second opposing support member 22SxA is fixed to the base 51s. The second opposing support member 22SxA supports a second intermediate connection portion 22cA. The second intermediate connection portion 22cA is provided between the second support member 22SA and the second opposing support member 22SxA. As shown in Figure 3, a portion of the first gap g1 is between the base 51s and the second connecting member 22A.

[0056] The second intersecting fixing member 42FA is fixed to the base 51s. The second intersecting intermediate member 42MA is supported by the second intersecting fixing member 42FA. The second intersecting connecting member 42CA is supported by the second intersecting intermediate member 42MA.

[0057] The movable member 11M further includes a second other movable part 11bA. The second other movable part 11bA is supported by a second other support connection part 22bA and a second other crossing connection member 42CA.

[0058] The provision of the second support structure 20bA allows, for example, the movable member 11M to be supported more stably.

[0059] As already explained, the first intermediate member 21M may include a first layer 21L and a first insulating layer 21i (see Figure 2). The first insulating layer 21i is located between the substrate 51s and the first layer 21L. As shown in Figure 2, the first other intermediate member 21MA may include a first other layer 21LA and a first other insulating layer 21iA. The first other insulating layer 21iA is located between the substrate 51s and the first other layer 21LA. As shown in Figure 3, the second intermediate member 22M may include a second layer 22L and a second insulating layer 22i. The second insulating layer 22i is located between the substrate 51s and the second layer 22L. As shown in Figure 3, the second other intermediate member 22MA may include a second other layer 22LA and a second other insulating layer 22iA. The second other insulating layer 22iA is located between the substrate 51s and the second other layer 22LA.

[0060] Figures 6 to 9 are schematic cross-sectional views illustrating a sensor according to the first embodiment. Figures 6 to 9 are cross-sectional views corresponding to lines A1-A2, A3-A4, B1-B2, and B3-B4 in Figure 1, respectively.

[0061] As shown in Figure 6, in the sensor 111 according to this embodiment, the first intermediate member 21M includes the first conductive member 21h. The configuration of the sensor 111, excluding this member, may be the same as that of the sensor 110.

[0062] When a first current is supplied to the first conductive member 21h, the distance between the base 51s and the first connection part 21a along the first direction D1 (first distance d1) decreases. At this time, the distance between the base 51s and the first support connection part 21b along the first direction D1 (second distance d2) increases. The movable member 11M (first movable part 11a) is then displaced away from the base 51s. This displacement is due to the expansion of a portion of the first intermediate member 21M based on the current supplied to the first conductive member 21h. The first conductive member 21h functions, for example, as a heater.

[0063] As shown in Figure 8, the first crossing intermediate member 41M may include a first crossing conductive member 41h. When current is supplied to the first crossing conductive member 41h, the movable member 11M is displaced to move closer to the base 51s. For example, when the first crossing current is supplied to the first crossing conductive member 41h, the distance between the base 51s and the first movable part 11a along the first direction D1 (substantially the distance between electrodes dz) is shorter than the distance between the base 51s and the first movable part 11a along the first direction D1 when the first crossing current is not supplied to the first crossing conductive member 41h. An insulating member 41i may be provided around the first crossing conductive member 41h.

[0064] Thus, in the supply of current to the first conductive member 21h and the supply of current to the first cross conductive member 41h, the direction of displacement of the movable member 11M (first movable part 11a) is opposite.

[0065] The position of the movable member 11M relative to the base 51s can be controlled by controlling at least one of the current supplied to the first conductive member 21h and the current supplied to the first cross conductive member 41h.

[0066] Current control may be performed, for example, by the control unit 70. The control unit 70 can supply the first current to the first conductive member 21h. The control unit 70 can supply the first cross current to the first cross conductive member 41h.

[0067] In the sensor 111, the first other intermediate member 21MA may further include the first other conductive member 21hA. In the sensor 111, the second intermediate member 22M may further include the second conductive member 22h. In the sensor 111, the second other intermediate member 22MA may further include the second other conductive member 22hA.

[0068] In sensor 111, the first intersecting intermediate member 41MA may include the first intersecting conductive member 41hA. In sensor 111, the second intersecting intermediate member 42M may include the second intersecting conductive member 42h. In sensor 111, the second intersecting intermediate member 42MA may include the second intersecting conductive member 42hA. An insulating member 41iA may be provided around the first intersecting conductive member 41hA. An insulating member 42i may be provided around the second intersecting conductive member 42h. An insulating member 42iA may be provided around the second intersecting conductive member 42hA.

[0069] In one example, when the ambient temperature rises, current is supplied to the first cross-conducting member 41h, the first other cross-conducting member 41hA, the second cross-conducting member 42h, and the second other cross-conducting member 42hA. This allows the inter-electrode distance dz to be adjusted to a desired value (e.g., a center value).

[0070] In another example, when the ambient temperature decreases, current is supplied to the first conductive member 21h, the first other conductive member 21hA, the second conductive member 22h, and the second other conductive member 22hA. This allows the inter-electrode distance dz to be adjusted to a desired value (e.g., a center value).

[0071] Current may be supplied to a conductive member included in any of the multiple support structures (for example, the first support structure 20a, the first other support structure 20aA, the second support structure 20b, and the second other support structure 20bA, etc.). This allows, for example, adjustment and correction of the tilt (distortion) of the movable member 11M with respect to the base 51s.

[0072] Figures 10 and 11 are schematic cross-sectional views illustrating a sensor according to the first embodiment. Figures 10 and 11 are cross-sectional views corresponding to lines B1-B2 and B3-B4 in Figure 1, respectively.

[0073] As shown in Figure 10, in the sensor 112 according to this embodiment, the first intersecting intermediate member 41M includes the first intersecting layer 41L. The configuration of the sensor 112, excluding this, may be the same as that of the sensor 111.

[0074] The material of the first cross layer 41L may be the same as the material of the first layer 21L. The first cross layer 41L is, for example, a sensitive film. In the sensor 112, the first cross intermediate member 41M may include a first cross cover layer 41j. The first cross layer 41L is located between the substrate 51s and the first cross cover layer 41j. By providing the first cross cover layer 41j, the first cross layer 41L becomes substantially unresponsive to the object to be detected.

[0075] As shown in Figure 10, in the sensor 112, the second intersecting intermediate member 42M may include a second intersecting layer 42L. The material of the second intersecting layer 42L may be the same as the material of the first layer 21L. In the sensor 112, the second intersecting intermediate member 42M may include a second intersecting cover layer 42j. The second intersecting layer 42L is located between the substrate 51s and the second intersecting cover layer 42j.

[0076] As shown in Figure 11, in the sensor 112, the first intersecting intermediate member 41MA may include the first intersecting layer 41LA. The material of the first intersecting layer 41LA may be the same as the material of the first layer 21L. In the sensor 112, the first intersecting intermediate member 41MA may include the first intersecting cover layer 41jA. The first intersecting layer 41LA is located between the substrate 51s and the first intersecting cover layer 41jA.

[0077] As shown in Figure 11, in the sensor 112, the second intersecting intermediate member 42MA may include a second intersecting layer 42LA. The material of the second intersecting layer 42LA may be the same as the material of the first layer 21L. In the sensor 112, the second intersecting intermediate member 42MA may include a second intersecting cover layer 42jA. The second intersecting layer 42LA is located between the substrate 51s and the second intersecting cover layer 42jA.

[0078] Figure 12 is a schematic plan view illustrating a sensor according to the first embodiment. As shown in Figure 12, in the sensor 113 according to this embodiment, the element portion 10E includes a third support structure 20c and a third other support structure 20cA. The configuration of the sensor 113 other than these may be the same as the configuration of any of the sensors 110 to 112.

[0079] The configuration of the third support structure 20c may be the same as, for example, the configuration of the first support structure 20a. The configuration of the third other support structure 20cA may be the same as, for example, the configuration of the first other support structure 20aA.

[0080] For example, the third support structure 20c includes a third fixing member 23F fixed to the base 51s, a third intermediate member 23M supported by the third fixing member 23F, and a third connecting member 23 supported by the third intermediate member 23M. The third connecting member 23 supports the movable member 11M. The direction from the third connecting member 23 to the movable member 11M is inclined with respect to the direction from the first connecting member 21 to the movable member 11M.

[0081] For example, the third other support structure 20cA includes a third other fixing member 23FA fixed to the base 51s, a third other intermediate member 23MA supported by the third other fixing member 23FA, and a third other connecting member 23A supported by the third other intermediate member 23MA. The third other connecting member 23A supports the movable member 11M. The direction from the third other connecting member 23A to the movable member 11M intersects with the direction from the first other connecting member 21A to the movable member 11M.

[0082] In sensor 113, for example, the effects of temperature can be suppressed, enabling detection with higher accuracy. A wide dynamic range can also be obtained in sensor 113. High sensitivity can be achieved. Sensor 113 can also be provided with improved characteristics.

[0083] Figure 13 is a schematic plan view illustrating a sensor according to the first embodiment. As shown in Figure 13, in the sensor 114 according to this embodiment, the third support structure 20c and the third other support structure 20cA are omitted. The configuration of the sensor 114, excluding these, can be the same as that of the sensor 113. Even with the sensor 114, it is possible to provide a sensor with improved characteristics.

[0084] (Second Embodiment) The second embodiment relates to a capacitor device. The capacitor device according to the second embodiment may have the same configuration as the sensor according to the first embodiment. For example, the configuration of the capacitor device 210 (see Figure 1) may be the same as the configuration of the sensor 110. For example, the influence of temperature can be suppressed.

[0085] For example, the configuration of the capacitor device 211 (see Figures 6 to 9) may be the same as that of the sensor 111. For example, in the capacitor device 211, the element section 10E includes a fixed electrode 51E, a first support structure 20a, and a movable member 11M. The fixed electrode 51E is fixed to the base 51s. The first support structure 20a includes a first fixed member 21F fixed to the base 51s, a first intermediate member 21M supported by the first fixed member 21F, a first connecting member 21 supported by the first intermediate member 21M, a first support member 21S, a first crossing fixed member 41F fixed to the base 51s, a first crossing intermediate member 41M supported by the first crossing fixed member 41F, and a first crossing connecting member 41C supported by the first crossing intermediate member 41M.

[0086] The first connecting member 21 includes a first connecting portion 21a, a first support connecting portion 21b, and a first intermediate connecting portion 21c. The first intermediate connecting portion 21c is provided between the first connecting portion 21a and the first support connecting portion 21b. The direction from the first connecting portion 21a to the first support connecting portion 21b follows a second direction D2 that intersects with a first direction D1 from the base body 51s to the fixed electrode 51E. The first support member 21S is fixed to the base body 51s and supports the first intermediate connecting portion 21c.

[0087] The movable member 11M includes a movable electrode 11E. The movable member 11M includes a first movable part 11a. The first movable part 11a is supported by a first support connection part 21b and a first crossing connection member 41C. A first gap g1 is provided between the fixed electrode 51E and the movable member 11M.

[0088] In the capacitor device 211, the first intermediate member 21M includes a first conductive member 21h. The control unit 70 can supply a first current to the first conductive member 21h. When the first current is supplied to the first conductive member 21h, the first distance d1 along the first direction D1 between the base 51s and the first connection part 21a decreases, and the second distance d2 along the first direction D1 between the base 51s and the first support connection part 21b increases.

[0089] In the capacitor device 211, the first crossing intermediate member 41M may include a first crossing conductive member 41h (see Figure 8). When current is supplied to the first crossing conductive member 41h, the movable member 11M is displaced to move closer to the base 51s. For example, when the first crossing current is supplied to the first crossing conductive member 41h, the distance between the base 51s and the first movable part 11a along the first direction D1 (substantially the distance between electrodes dz) is shorter than the distance between the base 51s and the first movable part 11a along the first direction D1 when the first crossing current is not supplied to the first crossing conductive member 41h.

[0090] Thus, in the supply of current to the first conductive member 21h and the supply of current to the first cross conductive member 41h, the direction of displacement of the movable member 11M (first movable part 11a) is opposite.

[0091] By controlling these currents, the desired capacitance can be obtained with high precision. For example, the effects of temperature can be suppressed.

[0092] The capacitor device 212 according to the embodiment may have the configuration of the sensor 112. The capacitor device 213 according to the embodiment may have the configuration of the sensor 113. The capacitor device 214 according to the embodiment may have the configuration of the sensor 114.

[0093] The embodiment may include the following configuration (e.g., proposed technical details). (Composition 1) Substrate and, The element part, Equipped with, The element portion includes a fixed electrode, a first support structure, and a movable member. The fixed electrode is fixed to the substrate, The first support structure is, A first fixing member fixed to the base, The first intermediate member supported by the first fixing member, A first connecting member supported by the first intermediate member, the first connecting member includes a first connecting portion, a first support connecting portion, and a first intermediate connecting portion between the first connecting portion and the first support connecting portion, wherein the direction from the first connecting portion to the first support connecting portion is along a second direction that intersects a first direction from the base to the fixed electrode, A first support member fixed to the base and supporting the first intermediate connection portion, A first intersecting fixing member fixed to the base, The first intersecting intermediate member is supported by the first intersecting fixing member, The first intersecting connecting member is supported by the first intersecting intermediate member, Includes, The movable member includes a movable electrode, The movable member includes a first movable part, The first movable part is supported by the first support connection part and the first crossing connection member, A sensor in which a first gap is provided between the fixed electrode and the movable member.

[0094] (Configuration 2) The sensor according to configuration 1, wherein the first intersecting direction from the first support member to the first intermediate connection portion intersects a plane including the first direction and the second direction.

[0095] (Composition 3) The direction from the first connecting member to the first movable part is along the second direction, The sensor according to configuration 1 or 2, wherein the direction from the first crossing connecting member to the first movable part intersects with the first direction and the second direction.

[0096] (Composition 4) The element portion further includes a first opposing support member, The first opposing support member is fixed to the base body, The first opposing support member supports the first intermediate connection portion, The first intermediate connection portion is located between the first support member and the first opposing support member. The sensor according to configuration 3, wherein a portion of the first gap is located between the base and the first connecting member.

[0097] (Composition 5) A sensor according to any one of configurations 1 to 4, wherein when the first distance along the first direction between the base and the first connection portion decreases, the second distance along the first direction between the base and the first support connection portion increases.

[0098] (Composition 6) The first distance along the first direction between the base and the first connecting portion in the first state is greater than the first distance in the second state. short Ku, The sensor according to any one of configurations 1 to 4, wherein the second distance along the first direction between the base and the first support connection in the first state is longer than the second distance in the second state.

[0099] (Composition 7) The sensor according to configuration 6, wherein the concentration of the object to be detected in the first state, which is present around the element portion, is higher than the concentration of the object to be detected in the second state.

[0100] (Composition 8) The first intermediate member includes a first layer, The first layer comprises at least one selected from the group consisting of palladium, platinum, and gold. The detection target is the sensor according to configuration 7, which contains hydrogen.

[0101] (Composition 9) The first intermediate member further includes a first insulating layer, The first insulating layer is located between the substrate and the first layer, as described in configuration 8 of the sensor.

[0102] (Composition 10) The element portion further includes a first other support structure, The aforementioned first other support structure is A first other fixing member fixed to the base, The first intermediate member supported by the first other fixing member, A first other connecting member supported by the first other intermediate member, the first other connecting member includes a first other connecting portion, a first other support connecting portion, and a first other intermediate connecting portion between the first other connecting portion and the first other support connecting portion, wherein the direction from the first other connecting portion to the first other support connecting portion intersects the first direction with the first other connecting member, A first other support member fixed to the base and supporting the first other intermediate connection portion, A first intersecting fixing member fixed to the base, The first intersecting intermediate member supported by the first intersecting fixing member, The first intersecting connecting member supported by the first intersecting intermediate member, Includes, The aforementioned movable member further includes a first other movable part, The first other movable part is a sensor according to any one of configurations 1 to 9, supported by the first other support connection part and the first other cross connection member.

[0103] (Composition 11) The element portion further includes a first opposing support member, The first opposing support member is fixed to the base body, The first opposing support member supports the first intermediate connection portion, The first other intermediate connection portion is located between the first other support member and the first other opposing support member. A portion of the first gap is located between the base and the first other connecting member, as described in configuration 10.

[0104] (Composition 12) The sensor according to configuration 10 or 11, wherein the direction from the first other support connection to the first support connection is along the second direction.

[0105] (Composition 13) The first intermediate member further includes a first conductive member, The sensor according to any one of configurations 1 to 12, wherein when a first current is supplied to the first conductive member, the distance between the base and the first connection portion along the first direction decreases, and the distance between the base and the first support connection portion along the first direction increases.

[0106] (Composition 14) The first intersecting intermediate member further includes a first intersecting conductive member, The sensor according to configuration 13, wherein the distance between the base and the first movable part along the first direction when a first cross current is supplied to the first cross conductive member is shorter than the distance between the base and the first movable part along the first direction when no first cross current is supplied to the first cross conductive member.

[0107] (Composition 15) It further includes a control unit, The control unit is capable of supplying the first current to the first conductive member. The control unit is capable of supplying the first cross current to the first cross conductive member, as described in configuration 14.

[0108] (Composition 16) The element portion further includes a second support structure, The second support structure is, A second fixing member fixed to the base, A second intermediate member supported by the second fixing member, A second connecting member supported by the second intermediate member, the second connecting member includes a second connecting portion, a second support connecting portion, and a second intermediate connecting portion between the second connecting portion and the second support connecting portion, wherein the direction from the second connecting portion to the second support connecting portion intersects with the first direction, A second support member fixed to the base and supporting the second intermediate connection portion, A second intersecting fixing member fixed to the base, The second intersecting intermediate member is supported by the second intersecting fixing member, The second intersecting connecting member is supported by the second intersecting intermediate member, Includes, The movable member further includes a second movable part, The second movable part is supported by the second support connection part and the second cross connection member, and is a sensor according to any one of configurations 1 to 15.

[0109] (Composition 17) The element portion further includes a second other support structure, The second other support structure is, A second other fixing member fixed to the base, A second intermediate member supported by the second other fixing member, A second other connecting member supported by the second other intermediate member, the second other connecting member includes a second other connecting portion, a second other support connecting portion, and a second other intermediate connecting portion between the second other connecting portion and the second other support connecting portion, wherein the direction from the second other connecting portion to the second other support connecting portion intersects with the first direction, A second other support member fixed to the base and supporting the second other intermediate connection portion, A second intersecting fixing member fixed to the base, The second intersecting intermediate member supported by the second intersecting fixing member, The second intersecting connecting member is supported by the second intersecting intermediate member, Includes, The aforementioned movable member further includes a second other movable part, The sensor according to configuration 16, wherein the second other movable part is supported by the second other support connection part and the second other cross connection member.

[0110] (Composition 18) Substrate and, The element part, Equipped with, The element portion includes a fixed electrode, a first support structure, and a movable member. The fixed electrode is fixed to the substrate, The first support structure is, A first fixing member fixed to the base, The first intermediate member supported by the first fixing member, A first connecting member supported by the first intermediate member, the first connecting member includes a first connecting portion, a first support connecting portion, and a first intermediate connecting portion between the first connecting portion and the first support connecting portion, wherein the direction from the first connecting portion to the first support connecting portion is along a second direction that intersects a first direction from the base to the fixed electrode, A first support member fixed to the base and supporting the first intermediate connection portion, A first intersecting fixing member fixed to the base, The first intersecting intermediate member is supported by the first intersecting fixing member, The first intersecting connecting member is supported by the first intersecting intermediate member, Includes, The movable member includes a movable electrode, The movable member includes a first movable part, The first movable part is supported by the first support connection part and the first crossing connection member, A capacitor device in which a first gap is provided between the fixed electrode and the movable member.

[0111] (Composition 19) It further includes a control unit, The first intermediate member includes a first conductive member, The control unit is capable of supplying the first current to the first conductive member. The capacitor device according to configuration 18, wherein when the first current is supplied to the first conductive member, the first distance along the first direction between the substrate and the first connection decreases, and the second distance along the first direction between the substrate and the first support connection increases.

[0112] According to the embodiment, a sensor and capacitor device capable of improving characteristics can be provided.

[0113] Embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element included in the sensor and capacitor device, such as the substrate, element part, fixed electrode, fixed member, intermediate member, connecting member, movable part, support member, and control unit, is included within the scope of the present invention as long as those skilled in the art can appropriately select from the known scope to implement the present invention in the same way and obtain similar effects.

[0114] Combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the invention.

[0115] Furthermore, all sensor and capacitor devices that a person skilled in the art can design and implement based on the above-described sensor and capacitor devices as embodiments of the present invention, insofar as they encompass the gist of the present invention, also fall within the scope of the present invention.

[0116] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and it is understood that such modifications and alterations also fall within the scope of the present invention.

[0117] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of symbols]

[0118] 10E: Element part, 11E: Movable electrode, 11M: Movable member, 11a, 11b: 1st, 2nd movable part, 11aA, 11bA: 1st, 2nd and other movable parts, 20a~20c: 1st~3rd support structure, 20aA~20cA: 1st~3rd and other support structure, 21~23: 1st~3rd connecting member, 21A~23A: 1st~3rd and other connecting member, 21F~23F: 1st~3rd fixing member, 21FA~23FA: 1st~3rd and other fixing member, 21L, 22L: 1st, 2nd layer, 21LA, 22LA: 1st, 2nd and other layer, 21M~23M: 1st~3rd intermediate member, 21MA~23MA: 1st~3rd and other intermediate member, 21S, 22S: First and second support members, 21SA, 22SA: First and second other support members, 21Sx, 22Sx: First and second opposing support members, 21SxA, 22SxA: First and second other opposing support members, 21a, 22a: First and second connection parts, 21aA, 22aA: First and second other connection parts, 21b, 22b: First and second support connection parts, 21bA, 22bA: First and second other support connection parts, 21c, 22c: First and second intermediate connection parts, 21cA, 22cA: First and second other intermediate connection parts, 21h, 22h: First and second conductive members, 21hA, 22hA: First and second other conductive members, 21i, 22i: First and second insulating layers, 21iA, 22iA: First and second other insulating layers, 41C, 42C: First and second cross-connecting members, 41CA, 42CA: First and second other cross-connecting members, 41F, 42F: First and second cross-fixing members, 41FA, 42FA: First and second other cross-fixing members, 41L, 42L: First and second cross-layers, 41LA, 42LA: First and second other cross-layers, 41M, 42M: First and second cross-intermediate members, 41MA, 42MA: First and second other cross-intermediate members, 41h, 42h: First and second cross-conducting members, 41hA, 42hA: First and second other cross-conducting members, 41i, 42i, 41iA, 42iA: Insulating members, 41j, 42j: First and second crossing cover layers, 41jA, 42jA: First and second crossing cover layers, 51E: Fixed electrode, 51F: First surface, 51s: Substrate, 70: Control unit, 110-114: Sensor, 210-214: Capacitor device, D1-D3: First to third directions, Dx1: First crossing direction, d1-d4: First to fourth distances, dz: Distance between electrodes, g1: First gap

Claims

1. Substrate and, The element part, Equipped with, The element portion includes a fixed electrode, a first support structure, and a movable member. The fixed electrode is fixed to the substrate, The first support structure is, A first fixing member fixed to the base, The first intermediate member supported by the first fixing member, A first connecting member supported by the first intermediate member, the first connecting member includes a first connecting portion, a first support connecting portion, and a first intermediate connecting portion between the first connecting portion and the first support connecting portion, wherein the direction from the first connecting portion to the first support connecting portion is along a second direction that intersects a first direction from the base to the fixed electrode, A first support member fixed to the base and supporting the first intermediate connection portion, A first intersecting fixing member fixed to the base, The first intersecting intermediate member supported by the first intersecting fixing member, The first intersecting connecting member supported by the first intersecting intermediate member, Includes, The movable member includes a movable electrode, The movable member includes a first movable part, The first movable part is supported by the first support connection part and the first crossing connection member, A first gap is provided between the fixed electrode and the movable member. A sensor that detects the state of the object to be detected by detecting a change in capacitance between the fixed electrode and the movable electrode, which is caused by a change in the distance between the fixed electrode and the movable electrode in response to a change in the state of the object to be detected.

2. The sensor according to claim 1, wherein when the first distance along the first direction between the base and the first connecting portion decreases, the second distance along the first direction between the base and the first support connecting portion increases.

3. The first distance along the first direction between the base and the first connecting portion in the first state is shorter than the first distance in the second state. The sensor according to claim 1, wherein the second distance along the first direction between the base and the first support connection in the first state is longer than the second distance in the second state.

4. The sensor according to claim 3, wherein the concentration of the object to be detected in the first state, which is present around the element portion, is higher than the concentration of the object to be detected in the second state.

5. The element portion further includes a first other support structure, The first other support structure is, A first other fixing member fixed to the base, The first intermediate member supported by the first other fixing member, A first other connecting member supported by the first other intermediate member, the first other connecting member includes a first other connecting portion, a first other support connecting portion, and a first other intermediate connecting portion between the first other connecting portion and the first other support connecting portion, wherein the direction from the first other connecting portion to the first other support connecting portion intersects the first direction with the first other connecting member, A first other support member fixed to the base and supporting the first other intermediate connection portion, A first intersecting fixing member fixed to the base, The first intersecting intermediate member is supported by the first intersecting fixing member, The first intersecting connecting member is supported by the first intersecting intermediate member, Includes, The aforementioned movable member further includes a first other movable part, The sensor according to any one of claims 1 to 4, wherein the first other movable part is supported by the first other support connection part and the first other cross connection member.

6. The first intermediate member further includes a first conductive member, The sensor according to claim 1, wherein when a first current is supplied to the first conductive member, the distance between the base and the first connection portion along the first direction decreases, and the distance between the base and the first support connection portion along the first direction increases.

7. The first intersecting intermediate member further includes a first intersecting conductive member, The sensor according to claim 6, wherein the distance between the base and the first movable part along the first direction when a first cross current is supplied to the first cross conductive member is shorter than the distance between the base and the first movable part along the first direction when no first cross current is supplied to the first cross conductive member.

8. It further includes a control unit, The control unit is capable of supplying the first current to the first conductive member. The sensor according to claim 7, wherein the control unit is capable of supplying the first crossing current to the first crossing conductive member.

9. Substrate and, The element part, Equipped with, The element portion includes a fixed electrode, a first support structure, and a movable member. The fixed electrode is fixed to the substrate, The first support structure is, A first fixing member fixed to the base, The first intermediate member supported by the first fixing member, A first connecting member supported by the first intermediate member, the first connecting member includes a first connecting portion, a first support connecting portion, and a first intermediate connecting portion between the first connecting portion and the first support connecting portion, wherein the direction from the first connecting portion to the first support connecting portion is along a second direction that intersects a first direction from the base to the fixed electrode, A first support member fixed to the base and supporting the first intermediate connection portion, A first intersecting fixing member fixed to the base, The first intersecting intermediate member supported by the first intersecting fixing member, The first intersecting connecting member supported by the first intersecting intermediate member, Includes, The movable member includes a movable electrode, The movable member includes a first movable part, The first movable part is supported by the first support connection part and the first crossing connection member, A first gap is provided between the fixed electrode and the movable member. It further includes a control unit, The first intermediate member includes a first conductive member, The control unit is capable of supplying the first current to the first conductive member. A capacitor device in which, when the first current is supplied to the first conductive member, the first distance along the first direction between the substrate and the first connection decreases, and the second distance along the first direction between the substrate and the first support connection increases.

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