Power supply member and vibration device

The power supply member with misaligned connection and contact portions addresses the electrode peeling issue, ensuring high bonding reliability and improved vibration performance in droplet elimination devices.

JP7868682B2Active Publication Date: 2026-06-02MURATA MFG CO LTD

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
MURATA MFG CO LTD
Filing Date
2023-07-14
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

The existing droplet elimination devices face issues with electrode peeling off the flexible substrate due to applied loads, leading to unreliable voltage application to the piezoelectric element.

Method used

A power supply member with a joining member having a joining surface and contact portions that are misaligned with the wiring portion, reducing load on the contact portion and enhancing bonding reliability with the piezoelectric element.

Benefits of technology

The configuration ensures high bonding reliability and improved vibration performance by reducing load on the contact portion, resulting in a highly reliable vibration device.

✦ Generated by Eureka AI based on patent content.

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Abstract

This power-feeding member comprises: a bonding member having a bonding surface that can bind to a piezoelectric element; at least one contact section that is provided on the bonding member and can electrically connect to an electrode of the piezoelectric element; and a wiring part that is drawn out from the bonding member. When viewed in a first direction that intersects the bonding surface, the contact section and a connection portion between the bonding member and the wiring part are located at positions deviated from each other.
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Description

Technical Field

[0001] The present invention relates to a power supply member and a vibration device including the power supply member.

Background Art

[0002] Patent Document 1 discloses a droplet elimination device having a function of reliably and efficiently eliminating droplets or the like adhering to a light beam passing region of a dome-shaped drip cover. In the droplet elimination device of Patent Document 1, a piezoelectric element and a piezoelectric element control unit are electrically connected via a flexible substrate.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the droplet elimination device, an electrode for applying a voltage to the piezoelectric element is disposed on an extension of the flexible substrate. Therefore, when a load is applied to the flexible substrate, the electrode may peel off and a voltage may not be applied to the piezoelectric element.

[0005] An object of the present invention is to provide a power supply member having high bonding reliability with respect to a piezoelectric element and a vibration device including the power supply member.

Means for Solving the Problems

[0006] A power supply member according to an aspect of the present invention includes a joining member having a joining surface that can be joined to a piezoelectric element, at least one contact portion provided on the joining member and electrically connectable to an electrode of the piezoelectric element, and a wiring portion drawn out from the joining member and When viewed along the first direction intersecting the joint surface, the connection portion of the joint member and the wiring portion and the contact portion are in misaligned positions.

[0007] A vibration device according to one aspect of the present invention is: The power supply member of the above embodiment, The piezoelectric element joined to the aforementioned joining surface, A vibrating body that amplifies vibrations caused by the piezoelectric element, A light-transmitting body connected to one end of the vibrating body in the first direction and It is equipped with. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a power supply member with high bonding reliability to a piezoelectric element, and a vibration device equipped with the power supply member. [Brief explanation of the drawing]

[0009] [Figure 1] A perspective view showing a vibration device according to one embodiment of the present invention. [Figure 2] A cross-sectional view along line II-II in Figure 1. [Figure 3] Figure 1 is a perspective view showing the power supply member of the vibration device. [Figure 4] Figure 1 is a bottom view of the vibrating device. [Figure 5] A perspective view showing a first modified example of the power supply member in Figure 3. [Figure 6] Figure 5 shows a bottom view of a vibrating device equipped with a power supply member. [Figure 7] A cross-sectional view along line VII-VII in Figure 6. [Figure 8] A side view showing the wiring section of the vibration device in Figure 1 under tension. [Figure 9] Figure 8 shows a bottom view of the vibrating device. [Figure 10] A graph showing the relationship between angle and stress acting on the adhesive layer. [Figure 11] A schematic cross-sectional view showing a first modified example of the power supply device in Figure 5. [Figure 12] A schematic cross-sectional view showing a second modified example of the power supply device shown in Figure 5. [Figure 13] Cross-sectional schematic view showing a third modification of the power supply device of FIG. 5. [Figure 14] Cross-sectional schematic view showing a fourth modification of the power supply device of FIG. 5. [Figure 15] Planar schematic view showing a fifth modification of the power supply device of FIG. 5. [Figure 16] Planar schematic view showing a sixth modification of the power supply device of FIG. 5. [Figure 17] Planar schematic view showing a seventh modification of the power supply device of FIG. 5. [Figure 18] Planar schematic view showing an eighth modification of the power supply device of FIG. 5. [Figure 19] Planar schematic view showing a ninth modification of the power supply device of FIG. 5. [Figure 20] Figure showing the simulation result of the displacement amount distribution in the vibration device of FIG. 1. [Figure 21] Cross-sectional schematic view showing a first modification of the vibration device of FIG. 1. [Figure 22] Planar schematic view showing a tenth modification of the power supply device of FIG. 3. [Figure 23] Planar schematic view showing an eleventh modification of the power supply device of FIG. 5.

Embodiments for Carrying Out the Invention

[0010] The power supply member of the first aspect of the present invention includes a joining member having a joining surface that can be joined to a piezoelectric element, at least one contact portion provided on the joining member and electrically connectable to the electrode of the piezoelectric element, and a wiring portion drawn out from the joining member and when viewed along a first direction intersecting the joining surface, the connection portion of the joining member and the wiring portion and the contact portion are at displaced positions.

[0011] According to the power supply member of the first embodiment, when viewed along a first direction intersecting the joint surface, the connection portion and contact portion of the joint member and the wiring portion are in offset positions that do not overlap. Therefore, when a load is applied to the wiring portion, the load on the contact portion can be reduced. As a result, a power supply member with high reliability in joining to the piezoelectric element can be realized.

[0012] A power supply member according to a second aspect of the present invention is a power supply member according to a first aspect, The aforementioned joining member The member body having the aforementioned joining surface, The member body is provided with at least one projection that, when viewed along the first direction, extends from the member body in a direction along the joining surface and is capable of being joined to a vibrating body that amplifies vibrations by the piezoelectric element. It has, The contact portion is located on the protruding portion.

[0013] According to the power supply member of the second embodiment, since the contact portion is located on the protruding portion, when viewed along the first direction, the connection portion between the member body and the wiring portion and the protruding portion are in a misaligned position. Therefore, when a load is applied to the wiring portion, the load on the protruding portion is reduced, and the reliability of the connection with respect to the internal vibrating body of the protruding portion can be increased.

[0014] A third aspect of the present invention is a power supply member that, in the power supply member of the second aspect, The joining member has a plurality of the aforementioned protrusions.

[0015] According to the power supply member of the third embodiment, the contact area with the internal vibrating body of the protruding portion is increased, so the reliability of the contact with the internal vibrating body of the protruding portion can be further improved.

[0016] A power supply member according to a fourth aspect of the present invention is a power supply member according to a second or third aspect, The contact portion and the vibrating body are joined together on a plane along the joining surface.

[0017] According to the power supply member of the fourth embodiment, the contact portion and the vibrating body are joined on the same plane, thus further improving the reliability of the joint with the piezoelectric element.

[0018] A power supply member according to a fifth aspect of the present invention is a power supply member according to the first aspect, The aforementioned joining member A member body that can be joined to a vibrating body that amplifies vibrations by the piezoelectric element, The member body is provided with at least one projection that, when viewed along the first direction, extends from the member body in a direction along the joining surface and has the joining surface. It has.

[0019] According to the power supply member of the fifth embodiment, a power supply member that can be used with vibration devices of various configurations can be realized, thereby increasing the design flexibility of the vibration device.

[0020] The power supply member according to the sixth aspect of the present invention is a power supply member according to any of the first to fifth aspects, The aforementioned wiring section is drawn from a portion of the connecting member where vibration is small.

[0021] According to the power supply member of the sixth embodiment, since the wiring portion is drawn from a portion of the joining member where vibration is small, the stress generated at the boundary between the wiring portion and the contact portion is reduced, and the reliability of the joining to the piezoelectric element is improved.

[0022] A seventh aspect of the present invention is a vibration device, A power supply member according to any of the first to sixth embodiments, The piezoelectric element joined to the aforementioned joining surface, A vibrating body that amplifies vibrations caused by the piezoelectric element, A light-transmitting body connected to one end of the vibrating body in the first direction and It is equipped with.

[0023] According to the seventh embodiment of the vibration device, a highly reliable vibration device can be realized by using a power supply member.

[0024] One embodiment of the present invention will be described below with reference to the accompanying drawings. The following description is essentially illustrative and is not intended to limit the present invention, its applications, or its uses. Furthermore, the drawings are schematic, and the proportions of the dimensions, etc., do not necessarily correspond to those of reality.

[0025] As shown in Figures 1 and 2, a vibration device 1 according to one embodiment of the present invention comprises a power supply member 10, a piezoelectric element 20, an internal vibrator 30 (an example of a vibrator), and a lens 40 (an example of a light-transmitting body). In this embodiment, the vibration device 1 further comprises a lens module 41 and an external vibrator 50.

[0026] As shown in Figure 2, the power supply member 10 is joined to the piezoelectric element 20 and is configured to supply a drive signal from, for example, the drive circuit 60 to the piezoelectric element 20. The drive circuit 60 is composed of, for example, a printed circuit board on which mounted components are attached. When the piezoelectric element 20 is supplied with a drive signal, it causes its internal vibrator 30 to vibrate in a first direction (for example, the Z direction) that intersects the joining surface 111 of the power supply member 10, which will be described later. As the piezoelectric element 20 vibrates, the lens 40 vibrates, and foreign matter such as water droplets attached to the lens 40 is removed.

[0027] As shown in Figure 3, the power supply member 10 includes a connecting member 11, a contact portion 12 provided on the connecting member 11, and a wiring portion 13 extending from the connecting member 11.

[0028] The bonding member 11 is made of, for example, a flexible printed circuit board and has a member body 16 having a bonding surface 111. In this embodiment, the member body 16 has a substantially annular shape, but is not limited to this and can be any shape. The bonding surface 111 is configured to be bondable to the piezoelectric element 20 and has a pair of strip-shaped electrode patterns 112 and 113 formed on it. The electrode patterns 112 and 113 are made of, for example, copper foil. By configuring the bonding surface 111 to have a large bonding area with the piezoelectric element 20, the bonding strength to the piezoelectric element 20 is increased and the bonding reliability to the piezoelectric element 20 is improved.

[0029] The contact portion 12 is configured to be electrically connectable to the electrodes of the piezoelectric element 20. In this embodiment, the power supply member 10 has two contact portions 12, with one end of the electrode patterns 112 and 113 each constituting a contact portion 12. The other ends of the electrode patterns 112 and 113 are located at the tips of the wiring portion 13.

[0030] The wiring section 13 is configured to be electrically connectable to the drive circuit 60 (see Figure 2) and extends from the main body 16. In this embodiment, the wiring section 13 is composed of a substantially T-shaped plate member that extends radially from the radially inner side surface of the main body 16.

[0031] As shown in Figure 3, when viewed along the first direction Z, the connection portion 14 and contact portion 12 of the member body 16 and wiring portion 13 of the joining member 11 are in offset positions and do not overlap. In this embodiment, the contact portion 12 is located circumferentially offset from the connection portion 14, and the virtual line L1 connecting the center point CP of the member body 16 and the connection portion 14 and the virtual line L2 connecting the center point CP and the contact portion 12 form an angle θ of zero or greater. In other words, the contact portion 12 is not located on the virtual line L1. As an example, the virtual line L2 is a line passing through the center point CP and the point of the contact portion 12 in the circumferential direction relative to the center point CP that is closest to the virtual line L1 (for example, point 121 in Figure 4).

[0032] The piezoelectric element 20 has a piezoelectric body and electrodes. The piezoelectric element 20 is connected to the second portion 32 of the internal vibrator 30, which will be described later, for example, by an adhesive. In this embodiment, the piezoelectric element 20 is formed in a substantially annular shape when viewed along the first direction Z.

[0033] As shown in Figure 4, two electrodes 21 and 22, which are electrically independent of each other, are provided on the surface 201 (see Figure 2) of the piezoelectric element 20 facing the bonding surface 111. Electrode 21 contacts a contact portion 12 formed by one end of an electrode pattern 112 located radially outward. Electrode 22 contacts a contact portion 12 formed by one end of an electrode pattern 113 located radially inward. On the surface 202 (see Figure 2) of the piezoelectric element 20 opposite to the surface 201 facing the bonding surface 111 in the first direction Z, an electrode (not shown) connected to electrode 22 is provided. Pole and These are connected via electrodes (not shown) provided on the side surface of the piezoelectric element 20.

[0034] The piezoelectric material of the piezoelectric element 20 is, for example, barium titanate (BaTiO3), lead zirconate titanate (PZT:PbTiO3·PbZrO3), lead titanate (PbTiO3), lead metaniobate (PbNb2O6), bismuth titanate (Bi4Ti3O3) 12 It is composed of piezoelectric ceramics such as (K,Na)NbO3, or piezoelectric single crystals such as LiTaO3 and LiNbO3.

[0035] The electrodes of the piezoelectric element 20 are composed of, for example, Ni electrodes, or electrodes containing a thin metal film of Ag or Au. The electrodes containing the thin metal film are formed, for example, by sputtering, plating, or vapor deposition.

[0036] The internal vibrator 30 is configured to amplify vibrations from the piezoelectric element 20 and vibrate the lens 40. The internal vibrator 30 is made of a metal or ceramic such as stainless steel, aluminum, iron, titanium, or duralumin. The surface of the internal vibrator 30 may be treated with a surface treatment such as oxidation or anodizing to improve the adhesion of the adhesive. If the surface of the internal vibrator 30 is black, for example, it can better prevent a decrease in optical performance due to diffuse reflection of light.

[0037] In this embodiment, the internal vibrator 30 has, for example, a cylindrical shape. As shown in Figure 2, the internal vibrator 30 includes a first portion 31 that contacts the lens 40, a second portion 32 to which the piezoelectric element 20 is attached, and a third portion 33 with a substantially S-shaped cross-section that connects the first portion 31 and the second portion 32. The first portion 31 has a cylindrical shape that is extended in the axial direction (i.e., the first direction Z) of the cylindrical body. The radially outer end of the first portion 31 constitutes a fitting portion 34 that is connected to the external vibrator 50. The second portion 32 is a portion that vibrates together with the vibration of the piezoelectric element 20, and has a larger plate thickness than the first portion 31 and the third portion 33. This makes it easier to efficiently transmit the vibration of the piezoelectric element 20 to the lens 40. The third portion 33 supports the first portion 31 and transmits the vibration of the second portion 32 to the first portion 31. The first part 31, the second part 32, and the third part 33 may be formed as a single unit or individually. The maximum external dimensions of the third part 33 (for example, the maximum dimension in the X direction) are greater than the maximum external dimensions of the first part 31, and the maximum external dimensions of the second part 32 are greater than the maximum external dimensions of the third part 33. This allows the vibrations of the piezoelectric element 20 to be efficiently transmitted to the lens 40.

[0038] The lens 40 works in cooperation with lens modules 41 arranged in series in the first direction Z to form an optical image plane. The lens 40 is made of glass, for example, and has a convex shape that protrudes in the first direction Z and away from the power supply member 10. The surface of the lens 40 is coated with, for example, a water-repellent film and an anti-reflective film (AR coating). As shown in Figure 2, the surface of the lens 40 facing the lens module 41 is composed of a flat portion 42 and a concave shape 43. The flat portion 42 is connected to the first portion 31 of the internal vibrator 30.

[0039] The lens module 41 is composed of multiple lenses and is located in the internal space of the internal vibrator 30. When combined with the lens 40, the lens module 41 has optical performance capable of forming an image as an image sensor.

[0040] The external vibrator 50 prevents vibrations from the internal vibrator 30 from escaping to components other than the lens 40, and efficiently transmits vibrations to the lens 40. Furthermore, the external vibrator 50 is provided to cover the entire internal vibrator 30, protecting both the internal vibrator 30 and the lens module 41. The external vibrator 50 is made of a metal material such as stainless steel, aluminum, iron, titanium, or duralumin, or of resin.

[0041] In this embodiment, the external vibrator 50 has, for example, a hollow rectangular prism shape. As shown in Figure 2, the external vibrator 50 has a first connecting portion 51, a second connecting portion 52 connected to the first connecting portion 51, and a fixing portion 53 connected to the second connecting portion 52.

[0042] The first connecting portion 51 is configured to clamp the radially outer end of the lens 40 in the first direction Z together with the first portion 31 of the internal vibrator 30. This prevents the lens 40 from falling off the vibrator 1 when the lens 40 vibrates. In this embodiment, the first connecting portion 51 is located radially outside the first portion 31 of the internal vibrator 30 and the lens 40, and extends from the second connecting portion 52 toward the outside of the vibrator 1 along the first direction Z. One end of the first connecting portion 51 in the first direction Z is provided with a projection 511 that protrudes radially toward the lens 40. The radially outer end of the lens 40 is clamped in the first direction Z between the projection 511 and the first portion 31 of the internal vibrator 30.

[0043] The second connecting portion 52 is configured to absorb vibrations generated in the lens 40. In this embodiment, the second connecting portion 52 extends in an annular shape from the other end of the first connecting portion 51 in the first direction Z in a direction intersecting the first direction Z (for example, the X direction). The thickness of the second connecting portion 52 is smaller than the thickness of the fixing portion 53, for example, 0.2 mm or more and 1.0 mm or less. Also, the thickness of the second connecting portion 52 is 0.2 times or more and 1.5 times or less than the thickness of the third portion 33. Because the second connecting portion 52 has such a thin thickness, it functions as a leaf spring.

[0044] The fixed part 53 is connected to components such as a case for housing the image sensor and a lens module 41. The fixed part 53 has nodes that suppress vibrations to less than 1 / 100th of the displacement of the lens 40, and is configured to prevent vibrations from propagating to the connected components. The larger the volume of the fixed part 53, the more the vibration of the fixed part 53 can be suppressed. In this embodiment, the fixed part 53 has a rectangular shape. If the outer shape is rectangular, the volume of the fixed part 53 can be increased without increasing the size of the vibration device 1. For example, a cube with dimensions of 25 mm x 25 mm has a larger volume than a cylindrical shape with a diameter of 25 mm.

[0045] If the external vibrator 50 has grooves or other indentations, foreign matter such as water droplets or mud can accumulate there, and this accumulated foreign matter can further degrade the vibration performance. In this embodiment, the corners of the external vibrator 50 are chamfered, for example, with a radius of R2.5 or greater. This reduces metal fatigue caused by ultrasonic vibration and suppresses the formation of indentations in the external vibrator 50. Furthermore, by chamfering the corners of the external vibrator 50, it is possible to prevent the corners of the external vibrator 50 from being imaged even with a wide-angle lens 40 with a field of view of 180 degrees or more.

[0046] The power supply member 10 and vibration device 1 of the present invention can provide the following effects.

[0047] The power supply member 10 comprises a bonding member 11 having a bonding surface 111 that can be bonded to a piezoelectric element 20, a contact portion 12 provided on the bonding member 11 that can be electrically connected to the electrodes of the piezoelectric element 20, and a wiring portion 13 extending from the bonding member 11. When viewed along a first direction intersecting the bonding surface 111, the connection portion 14 of the bonding member 11 and the wiring portion 13 and the contact portion 12 are in offset positions. With this configuration, when a load is applied to the wiring portion 13, the load on the contact portion 12 can be reduced. As a result, a power supply member 10 with high reliability in bonding to the piezoelectric element 20 can be realized.

[0048] The vibration device 1 comprises a power supply member 10, a piezoelectric element 20 joined to the joint surface 111, an internal vibrator 30 that amplifies the vibration caused by the piezoelectric element 20, and a lens 40 connected to one end of the internal vibrator 30 in a first direction. With this configuration, a highly reliable vibration device 1 can be realized.

[0049] The power supply member 10 and vibration device 1 of the present invention can also be configured as follows.

[0050] As shown in Figures 5 to 7, the joining member 11 may have a member body 16 having a joining surface 111 and at least one protrusion 15 provided on the member body 16. When viewed along the first direction Z, the protrusion 15 extends from the member body 16 in a direction along the joining surface 111 and is configured to be joinable to an internal vibrating body 30 that amplifies vibrations by the piezoelectric element 20. In this embodiment, the protrusion 15 has a substantially rectangular shape with the circumferential direction relative to the center point CP being the longitudinal direction, but it is not limited to this and any shape can be adopted.

[0051] In the power supply member 10 shown in Figures 5 to 7, the contact portion 12 is located on the protruding portion 15. More specifically, in the power supply member 10 shown in Figures 5 to 7, the contact portion 12 of the radially outer electrode pattern 112 is located on the joining surface 111 of the member body 16, and the contact portion 12 of the radially inner electrode pattern 113 is located on the protruding portion 15.

[0052] Let L3 be a virtual line connecting the center point CP and the contact portion 12 of the radially outer electrode pattern 112, and let L4 be a virtual line connecting the center point CP and the contact portion 12 of the radially inner electrode pattern 113. Virtual lines L1 and L3 form an angle θ1 of zero or greater, and virtual lines L1 and L4 form an angle θ2 of zero or greater. As an example, virtual lines L3 and L4 are lines that pass through the center point CP and the point on the contact portion 12 in the circumferential direction relative to the center point CP that is closest to the virtual line L1 (for example, points 122 and 123 in Figure 6). In this way, the connection portion 14 of the member body 16 and the wiring portion 13 and the protruding portion 15 are in offset positions, more specifically, in different positions in the circumferential direction relative to the center point CP. Therefore, when a load is applied to the wiring portion 13, the load on the protruding portion 15 is reduced, and the reliability of the joint with respect to the internal vibrating body 30 of the protruding portion 15 can be improved.

[0053] In the power supply member 10 shown in Figures 5 to 7, the second portion 32 of the internal vibrator 30 has a projection 321 that extends toward the protruding portion 15 of the power supply member 10, as shown in Figure 7. The projection 321 is substantially annular in cross-section with a substantially square shape, and the tip surface 322 facing the protruding portion 15 is located substantially on the same plane as the surface 201 facing the bonding surface 111 of the piezoelectric element 20. The contact portion 12 and the internal vibrator 30 are joined on a plane along the bonding surface 111. This allows power to be supplied from the internal vibrator 30 to the surface of the piezoelectric element 20 facing the internal vibrator 30. As a result, it is no longer necessary to provide a wiring layer to dampen vibrations between the piezoelectric element 20 and the internal vibrator 30, and the vibration performance of the vibration device 1 equipped with the power supply member 10 can be improved. Furthermore, since the contact portion 12 and the internal vibrator 30 are joined on the same plane, the reliability of the bonding to the piezoelectric element 20 is further improved.

[0054] Here, in the vibration device 1, the wiring section 13 is pulled in the first direction Z and away from the lens 40 with a force of F = 1500 N / m (see Figure 8), and the power supply member 10 and piezoelectric element 20 of the connection section 14 are joined by an adhesive layer. In this case, by positioning the wiring section 13 so that the stress acting on the adhesive layer (maximum principal stress) due to the pulling of the wiring section 13 is less than or equal to the strength of the adhesive layer, the reliability of the joint with respect to the internal vibrating body 30 of the protruding section 15 can be increased. The adhesive layer can be made of any material.

[0055] Figure 10 shows the relationship between the angle θ5 (see Figure 9) formed by a virtual line L1 and an arbitrary virtual line L5 passing through the center point CP, and the stress acting on the adhesive layer on the virtual line L5. As shown in Figure 10, when the strength of the adhesive layer is 40 MPa, the adhesive layer at positions where the angle θ5 is 2.5 degrees or more experiences a stress of 40 MPa or less. In other words, when the strength of the adhesive layer is 40 MPa, by providing the protrusion 15 at a position further from the virtual line L1 in the circumferential direction than the virtual line L5 where the angle θ5 is 2.5 degrees, the reliability of the bond with respect to the internal vibrating body 30 of the protrusion 15 is improved.

[0056] The force F exerted on the wiring section 13 was defined as "1500 N / m" based on the applied force to the handrail in Experiment No. 5, described in "Measurement Experiment of Horizontal Loads Generated on Handrails by Various Human Actions, Journal of the Architectural Institute of Japan, Vol. 16, No. 33, 649-654, June 2010".

[0057] As an example, the projection height of the protrusion 15 (in other words, the length of the protrusion 15 along the radial direction from the radially inner side of the member body 16) is set so that, when viewed along the first direction Z, the protrusion 15 overlaps with the protrusion 321 of the internal vibrator 30 but does not overlap with the lens 40. This prevents interference between the protrusion 15 and the lens 40 and lens module 41.

[0058] As shown in Figure 11, the wiring portion 13 can be bent. By positioning the wiring portion 13 on the piezoelectric element 20 side, interference between the wiring portion 13 and internal components (e.g., lens module 41) can be avoided. As shown in Figure 12, the protrusion 15 may have a substantially L-shaped cross-section that connects to the tip surface 322 and side surface 323 of the projection 321 of the internal vibrator 30. As shown in Figures 13 and 14, the protrusion 15 may be configured to connect to the side surface 324 of the second portion 32. In Figure 14, an inclined surface 325 is formed on the side surface 324 of the internal vibrator 30 (the side opposite to the side surface 323), and the protrusion 15 is in surface contact with the inclined surface 325. As shown in Figure 15, there is not limited to one protrusion 15, but multiple protrusions can be provided as shown in Figure 15. In Figure 15, the power supply member 10 has two protrusions 15. This configuration increases the contact area between the protruding portion 15 and the internal vibrating body 30, thereby further improving the reliability of the connection between the protruding portion 15 and the internal vibrating body 30. Figures 11 to 14 omit components other than the power supply member 10, piezoelectric element 20, and internal vibrating body 30. Figure 15 omits the electrode pattern on the joint surface 111.

[0059] When multiple protrusions 15 are provided, the multiple protrusions 15 may be positioned at equal intervals in the circumferential direction, or they may be positioned symmetrically with respect to the center point CP of the member body 16.

[0060] The main body of the component 16 is not limited to being roughly annular, but may also be roughly C-shaped, as shown in Figures 16 to 18. By configuring it in this way, the wiring section 13 can be made longer, for example, making inspection easier. In this case, the power supply member 10 may be configured as follows. In the following configuration, as shown in Figure 23, the angle formed by virtual line L1 and virtual line L6 is θ6, the angle formed by virtual line L6 and virtual line L7 is θ7, the angle formed by virtual line L1 and virtual line L8 is θ8, and the angle formed by virtual line L8 and virtual line L9 is θ9. Virtual line L6 is assumed to be a virtual line passing through the center point CP and the part of the protruding portion 15 closest to virtual line L1 in the circumferential direction. Virtual line L7 is assumed to be a virtual line passing through the center point CP and the part of the protruding portion 15 furthest from virtual line L1 in the circumferential direction. Let virtual line L8 be a virtual line symmetric to virtual line L6 with respect to virtual line L1, and let virtual line L9 be a virtual line symmetric to virtual line L7 with respect to virtual line L1. In other words, angles θ6 and θ8 are the same angle, and angles θ7 and θ9 are the same angle. ·Angle θ6=Angle θ8≧2.5 degrees ·Angle θ7=Angle θ9≧30 degrees By setting angles θ6 and θ8 to 2.5 degrees or more, the reliability of the connection between the protrusion 15 and the internal vibrating body 30 can be improved, as described above. By setting angles θ7 and θ9 to 30 degrees or more, electrical conductivity between the protrusion 15 and the internal vibrating body 30 can be more reliably ensured, and a sufficient bonding area of ​​the power supply member 10 to the internal vibrating body 30 can be secured.

[0061] The wiring section 13 is not limited to being located radially inward of the member body 16, as shown in Figures 16 and 18. For example, it may be located radially outward of the member body 16, as shown in Figures 17 and 19.

[0062] As shown in Figure 18, the main body 16 of the member may be joined to the internal vibrator 30, and the protruding portion 15 may be configured to have a joining surface 111. In the power supply member 10 of Figure 18, the main body 16 of the member is configured to be joinable to the protruding portion 321 of the internal vibrator 30. In this way, a power supply member 10 that can be used with various configurations of vibration devices 1 can be realized, increasing the design flexibility of the vibration device 1.

[0063] The wiring section 13 may be drawn from a portion of the joining member 11 where vibration is small. This configuration reduces the stress generated at the boundary between the wiring section 13 and the contact section 12, improving the reliability of the connection to the piezoelectric element 20.

[0064] Here, with reference to Figure 20, the simulation results of the displacement distribution in the vibration device 1 will be explained. The simulation was performed using Femtet®, a registered trademark of Murata Software Corporation, to perform piezoelectric analysis (resonance analysis) on the vibration device 1 shown in Figure 7. In the simulation, the lens 40 was made of a material equivalent to glass, the internal vibrator 30 and external vibrator 50 were made of a material equivalent to stainless steel, and the piezoelectric element was made of a material equivalent to PZT (lead zirconate titanate). As shown in Figure 20, in the vibration device 1 shown in Figure 7, it can be seen that the radially inner side of the member body 16 is the part where the vibration (amplitude) is small.

[0065] In the vibration device 1 equipped with the roughly C-shaped internal vibrator 30 shown in Figure 21, the internal vibrator 30 exhibits tuning fork behavior. As a result, the vibration of the end 203 of the piezoelectric element 20 near the portion of the internal vibrator 30 extending in the first direction Z (shown by the dashed line) becomes smaller, while the vibration of the end 204 of the piezoelectric element 20 farther from the portion shown by the dashed line in Figure 21 in the direction intersecting the first direction Z (for example, the X direction) becomes larger. In other words, in the vibration device equipped with the internal vibrator 30 shown in Figure 21, the reliability of the connection to the piezoelectric element 20 can be improved by drawing out the wiring portion 13 from the portion of the connecting member 11 closer to the end 203 of the piezoelectric element 20.

[0066] The direction in which the wiring section 13 is pulled out can be set arbitrarily. For example, as shown in Figure 22, the wiring section 13 may be pulled out from the radially inner side of the member body 16 toward the radially outer side.

[0067] The bonding member 11 can be formed with electrode patterns of any configuration, not limited to electrode patterns 112 and 113, in which the contact portion 12 is not located on a virtual straight line L1.

[0068] The power supply member 10 is not limited to the vibration device 1 of the above embodiment, but can also be applied to vibration devices with other configurations.

[0069] By appropriately combining any embodiment or modification from the various embodiments or modifications described above, the effects of each can be achieved. Furthermore, combinations of embodiments with each other, combinations of examples with each other, and combinations of embodiments with examples are possible, as well as combinations of features from different embodiments or examples.

[0070] Although the present invention has been described in detail in each embodiment, the disclosures in these embodiments are subject to change in the details of their configuration, and changes in the combination and order of elements in each embodiment can be realized without departing from the claimed scope and spirit of the present invention. [Explanation of symbols]

[0071] 1 Vibration device 10 Power supply component 11 Joining members 12 Contact area 13 Wiring section 14 Connection part 15 Protrusion 16 Main component 20 Piezoelectric elements 21, 22 electrodes 30 Internal vibrator 31 Part 1 32 Part 2 33 Part 3 34 Fitting part 40 lenses 41 Lens Module 42 Plane part 43 Concave shape 50 External vibrators 51 First connection section 511 Protrusion 52 Second connection section 53 Fixed part 60 Drive Circuit 111 Joint surface 112, 113 Electrode Patterns

Claims

1. A bonding member having a bonding surface that can be bonded to a piezoelectric element, The joining member is provided with at least one contact portion that can be electrically connected to the electrode of the piezoelectric element, The wiring portion extending from the aforementioned joint member and Equipped with, When viewed along the first direction intersecting the joint surface, the connection portion of the joint member and the wiring portion and the contact portion are in misaligned positions. The aforementioned joining member The member body having the aforementioned joining surface, The member body is provided with at least one projection that, when viewed along the first direction, extends from the member body in a direction along the joining surface and is capable of being joined to a vibrator that amplifies vibrations by the piezoelectric element. It has, A power supply member in which the contact portion is located at the protruding portion.

2. The power supply member according to claim 1, wherein the joining member has a plurality of protrusions.

3. The power supply member according to claim 1 or 2, wherein the contact portion and the vibrating body are joined on a plane along the joining surface.

4. The power supply member according to claim 1 or 2, wherein the wiring portion is drawn from a portion of the connecting member where vibration is small.

5. A power supply member according to claim 1 or 2, The piezoelectric element joined to the aforementioned joining surface, A vibrating body that amplifies vibrations caused by the piezoelectric element, A light-transmitting body connected to one end of the vibrating body in the first direction and A vibrating device equipped with the following features.