Slide member and robot

A slide member formed by laminating carbon fiber sheets impregnated with resin addresses the issue of increased parts and costs in conventional designs, achieving faster movement and reduced manufacturing costs with improved rigidity and thermal conductivity.

JP7869850B2Active Publication Date: 2026-06-03FUJI CORP +1

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
FUJI CORP
Filing Date
2022-02-25
Publication Date
2026-06-03

AI Technical Summary

Technical Problem

The conventional slide member composed of three laminated tubular bodies made of carbon fiber reinforced resin increases the number of parts and manufacturing costs.

Method used

A slide member formed by laminating carbon fiber sheets impregnated with resin in the thickness direction, maintaining rigidity while reducing weight and manufacturing costs through a simpler shape.

Benefits of technology

The laminated carbon fiber sheets enable faster movement of the movable part and reduce manufacturing costs by simplifying processing, while ensuring rigidity and thermal conductivity.

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Patent Text Reader

Abstract

This slide member is configured to support a movable part and to be slidably movable in a prescribed direction. This slide member is a carbon-fiber-reinforced resin cylindrical body which is formed from a laminate obtained by layering, in the thickness direction, carbon fiber sheets impregnated with a resin.
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Description

Technical Field

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[0001] This specification discloses a slide member and a robot.

Background Art

[0002] Conventionally, a linear motion device has been proposed that includes a beam extending in one direction, a guide provided on the beam and extending in one direction, a slider provided on the guide so as to be movable in one direction, a mover provided on the slider, and a stator provided on the beam (see, for example, Patent Document 1). The beam is formed by laminating tubular bodies made of carbon fiber reinforced resin (CFRP) having a rectangular cross section, and includes a first tubular body and two second tubular bodies disposed on both the upper and lower sides of the first tubular body. A stator is provided on the surface of the first tubular body facing the slider. Also, a pair of guides is provided on the surfaces of the two second tubular bodies facing the slider.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The beam (slide member) described in Patent Document 1 is composed of three laminated tubular bodies made of carbon fiber reinforced resin, which increases the number of parts and causes an increase in cost.

[0005] The main object of the present disclosure is to reduce the weight while ensuring rigidity and reduce the manufacturing cost in a slide member that supports a movable part and is slidable in a predetermined direction.

Means for Solving the Problems

[0006] This disclosure employs the following means to achieve the primary objectives described above.

[0007] The slide member of this disclosure is A sliding member that supports a movable part and is capable of sliding in a predetermined direction, It is a cylindrical body made of carbon fiber reinforced resin, formed by a laminate of carbon fiber sheets impregnated with resin and stacked in the thickness direction. This is the gist of it.

[0008] The slide member of this disclosure is a cylindrical body made of carbon fiber reinforced resin, formed by laminating carbon fiber sheets impregnated with resin in the thickness direction. The lamination of carbon fiber sheets allows for weight reduction while maintaining rigidity. As a result, the movement of the movable part can be made faster. Furthermore, its simple shape makes it easy to process, thus reducing manufacturing costs.

[0009] Since the robot of this disclosure is equipped with the sliding member of this disclosure, it can achieve the same effects as the sliding member of this disclosure. [Brief explanation of the drawing]

[0010] [Figure 1] This is a top view of the component mounting machine according to this embodiment. [Figure 2] This is a perspective view of the head and sliding member. [Figure 3] This is a perspective view of the sliding member and the X-axis linear guide. [Figure 4] This is an explanatory diagram showing the laminated structure of the slide member body. [Figure 5] This is an explanatory diagram showing the orientation angle and fiber type of the multiple layers of carbon fiber sheets that make up the slide member body. [Figure 6] This is a cross-sectional view of the sliding member and the X-axis linear guide. [Figure 7] This is an explanatory diagram showing how to attach the X-axis linear guide to the sliding member. [Modes for carrying out the invention]

[0011] Next, the forms for implementing this disclosure will be described with reference to the drawings.

[0012] Figure 1 is a top view of the component mounting machine 10 of this embodiment. Figure 2 is an external perspective view of the head 15 and the slide member 20. Figure 3 is an external perspective view of the slide member 20 and the X-axis linear guide 31. Figure 4 is an explanatory diagram showing the laminated structure of the slide member body 21. Figure 5 is an explanatory diagram showing the orientation angle and fiber type of the multiple layers of carbon fiber sheets constituting the slide member body 21. Figure 6 is a cross-sectional view of the slide member 20 and the X-axis linear guide 31. Figure 7 is an explanatory diagram showing how the X-axis linear guide 31 is attached to the slide member 20. In Figure 1, the left-right direction is the X-axis direction, the front-back direction is the Y-axis direction, and the up-down direction (vertical direction in the plane of the paper in Figure 1) is the Z-axis direction.

[0013] As shown in Figure 1, the component mounting machine 10 of this embodiment picks up components supplied from a feeder F and mounts them onto a substrate S. This component mounting machine 10 includes a substrate transport device (not shown), first and second heads 15a, 15b, first and second slide members 20a, 20b, first and second X-axis moving devices 30a, 30b, and first and second Y-axis moving devices 50a, 50b. A strip-shaped support base 11 extending in the front-to-back direction is provided on the left and right side walls of the component mounting machine 10. The first head 15a and the second head 15b may be simply referred to as head 15. The first slide member 20a and the second slide member 20b may be simply referred to as slide member 20. The first X-axis moving device 30a and the second X-axis moving device 30b may be simply referred to as X-axis moving device 30. The first Y-axis moving device 50a and the second Y-axis moving device 50b are sometimes simply referred to as the Y-axis moving device 50.

[0014] The substrate transport device is a belt conveyor device that transports substrates S on a conveyor belt from left to right by driving the conveyor belt with a motor.

[0015] The first and second heads 15a and 15b (head 15) have nozzles for adsorbing components. As shown in FIG. 1, the first head 15a is supported by a first slide member 20a so as to be movable in the left-right (X-axis) direction. The second head 15b is supported by a second slide member 20b so as to be movable in the left-right (X-axis) direction.

[0016] The first and second slide members 20a and 20b (slide member 20) are elongated members extending in the left-right (X-axis) direction, are arranged parallel to each other, and are bridged over a pair of left and right iron Y-axis linear guides 51 (guide rails) shared by each other and move back and forth (Y-axis) along the pair of Y-axis linear guides 51. As shown in FIGS. 2 and 3, the first and second slide members 20a and 20b have a slide member body 21 formed in a cylindrical shape by carbon fiber reinforced resin (CFRP). In the present embodiment, as shown in FIG. 4, the first and second slide members 20a and 20b are formed in a rectangular tube shape with a substantially rectangular cross section such that the opposing surfaces are substantially parallel. By forming the slide member body 21 of CFRP, the slide member 20 can be lightened and the slide member 20 can be moved at high speed. Further, by forming the slide member body 21 in a simple rectangular tube shape, the processing by CFRP can be facilitated and the manufacturing cost can be reduced.

[0017] The slide member body 21 is formed by laminating a plurality of carbon fiber sheets impregnated with resin in a cylindrical shape and heating and curing them. As shown in FIGS. 4 and 5, the carbon fiber sheet 21o disposed on the outermost layer of the laminate constituting the slide member body 21 (the outer surface side of the slide member body 21) is formed of carbon fiber (for example, ultra-high elastic pitch-based carbon fiber) having a thermal conductivity equal to or higher than that of iron, copper, etc. Further, the carbon fiber sheet 21i disposed on the innermost layer (inner surface side) of the laminate constituting the slide member body 21 is formed of a cross material in which the fibers are woven.

[0018] Furthermore, the multiple carbon fiber sheets 21m of the intermediate layer, positioned between the outermost carbon fiber sheet 21o and the innermost carbon fiber sheet 21i, are formed so that the fiber orientation angle (0°, ±45°, 90°, etc.), fiber type, and fiber-to-resin mixing ratio are symmetrical (mirror symmetry) in the thickness direction, both inside and outside the sheet. This suppresses residual internal stress during molding of the slide member body 21 and prevents deformation. The carbon fiber sheet 21m of the symmetrical center plane can have an orientation angle of, for example, 0°, 90°, or no orientation. Here, it is desirable that the symmetrical center plane be positioned at the physical thickness center of the slide member body 21, but it may be shifted relative to the thickness center due to the difference in thickness between the outermost carbon fiber sheet 21o and the innermost carbon fiber sheet 21i. However, since the ratio of the thickness of the outermost carbon fiber sheet 21o and the innermost carbon fiber sheet 21i to the physical thickness of the slide member body 21 is very small, it is considered that there is almost no effect from the misalignment between the symmetry center plane and the physical thickness center of the slide member body. The intermediate layer of carbon fiber sheets 21m may be formed from pitch-based carbon fibers or from pan-based carbon fibers, similar to the outermost carbon fiber sheet 21o. Furthermore, some of the intermediate layer of carbon fiber sheets 21m may be formed from pitch-based carbon fibers and other parts from pan-based carbon fibers. When some of the multiple carbon fiber sheets 21m are formed from different types of fibers, it is preferable that the types of fibers be formed symmetrically with respect to the symmetry center plane.

[0019] In addition, since the slide member body 21 is formed in a rectangular tube shape with a rectangular cross-section, as shown in FIG. 4, in a cross-sectional view, the opposing surfaces are configured to be line-symmetric with respect to a center line passing through the center of the opposing surfaces. Further, as described above, the plurality of carbon fiber sheets 21m of the intermediate layer are formed such that the fiber orientation angle, the type of fiber, and the blending ratio of the fiber and the resin are symmetric (mirror-symmetric) inside and outside in the plate thickness direction with respect to the symmetric center plane. As a result, the fiber orientation angle, the type of fiber, and the blending ratio of the fiber and the resin are also symmetric (mirror-symmetric) with respect to the above center line. Thereby, deformation of the slide member body 21 can be further suppressed. Also, the manufacturing cost can be further reduced with a simpler shape.

[0020] On the opposing side surfaces of the slide member bodies 21 of the first and second slide members 20a and 20b, a pair of upper and lower iron X-axis linear guides 31 (guide rails) extending parallel to each other left and right are joined respectively. The first and second heads 15a and 15b are supported by the first and second slide members 20a and 20b so as to be movable left and right along the X-axis linear guides 31.

[0021] The X-axis linear guide 31 is joined to the slide member body 21 by fixing a strip-shaped seat plate 22 and a back plate 23, both approximately the same length as the X-axis linear guide 31, to the outer and inner surfaces of the slide member body 21, respectively, and fastening the X-axis linear guide 31 to the seat plate 22 with bolts 26, as shown in Figures 6 and 7. The seat plate 22 and the back plate 23 are made of aluminum or an aluminum alloy, respectively. Female threaded holes for screwing in the bolts 26 are formed in the seat plate 22 and the back plate 23 by tapping. In addition, a through hole 211 for inserting the bolts 26 is formed in the slide member body 21 by drilling, penetrating from the outer surface to the inner surface of the slide member body 21. As described above, since the innermost carbon fiber sheet 21i of the slide member body 21 is formed from a cross material in which fibers are woven, it is possible to suppress the occurrence of fraying of the fibers on the opposite side of the processed surface (the inner surface side of the slide member body 21) when drilling holes, and thus suppress the deterioration of the positioning accuracy of the backing plate 23 that is placed there.

[0022] The first X-axis moving device 30a moves the first head 15a left and right (X-axis). The second X-axis moving device 30b moves the second head 15b left and right (X-axis). As shown in Figure 2, the first and second X-axis moving devices 30a, 30b (X-axis moving devices 30) each have a pair of upper and lower X-axis linear guides 31, an X-axis linear motor 32, and a plurality (four) of X-axis guide nuts 36.

[0023] In this embodiment, the X-axis linear motor 32 is configured as a flat-type linear motor having an X-axis stator 33 attached to the side surface of the slide member 20 and an X-axis movable element 34 positioned opposite the X-axis stator 33 at a predetermined distance in the front and rear directions. The X-axis stator 33 has a plurality of permanent magnets arranged between a pair of upper and lower X-axis linear guides 31 on the side surface of the slide member 20, with alternating N-pole and S-pole polarities along the X-axis linear guides 31. The X-axis movable element 34 has a plurality of cores, each made by laminating electromagnetic steel sheets, and each phase coil wound around the corresponding core. The X-axis movable element 34 is supported by X-axis guide nuts 36 attached to each of the upper and lower X-axis linear guides 31, and moves left and right (X-axis) by applying a three-phase alternating current to each phase coil. In this embodiment, two X-axis guide nuts 36 are arranged on each of the upper and lower X-axis linear guides 31, and the X-axis movable element 34 is supported by a total of four X-axis guide nuts 36. The head 15 is supported by the X-axis movable element 34, and moves left and right (along the X-axis) together with the X-axis movable element 34 as the X-axis movable element 34 moves left and right (along the X-axis).

[0024] The head 15 moves left and right (along the X-axis) as the X-axis guide nut 36 slides against the X-axis linear guide 31. As a result, the X-axis linear guide 31 and the X-axis guide nut 36 generate a relatively large amount of heat due to the movement (sliding) of the X-axis guide nut 36. In this embodiment, the outermost layer of the slide member body 21 is made of ultra-high elasticity pitch-based carbon fiber and has a thermal conductivity equal to or greater than that of iron or copper. Therefore, the heat generated in the X-axis linear guide 31 and the X-axis guide nut 36 can be transferred to the slide member body 21 via the aluminum or aluminum alloy seat plate 22 and dissipated by the slide member body 21. This prevents overheating of the X-axis linear guide 31 and suppresses deformation of the X-axis linear guide 31 due to heat.

[0025] Furthermore, as shown in Figure 1, block members 40 made of aluminum or aluminum alloy are fixed to both ends of the slide member body 21. The slide member 20 moves back and forth (Y-axis) at both ends by Y-axis moving devices 50 (first Y-axis moving device 50a, second Y-axis moving device 50b) which move each block member 40 on the corresponding Y-axis linear guide 51.

[0026] The block member 40 is joined to the slide member body 21 by fitting the fitting portion of the block member 40 to the inner surface of the end of the slide member body 21 and fastening the two together with bolts. The fitting portion of the block member 40 has a female threaded hole formed by tapping for screwing in the bolt. In addition, the slide member body 21 has a through hole formed by drilling that penetrates from the outer surface to the inner surface of the slide member body 21 for inserting the bolt. As described above, since the innermost layer carbon fiber sheet 21i of the slide member body 21 is made of a cross material in which fibers are woven into a fabric, it is possible to suppress the occurrence of fraying of the fibers on the opposite side of the processed surface (the inner surface of the slide member body 21) when drilling, and thus it is possible to suppress the deterioration of the positioning accuracy of the block member 40 that is placed there.

[0027] The first Y-axis moving device 50a moves the first slide member 20a back and forth (Y-axis). The second Y-axis moving device 50b moves the second slide member 20b back and forth (Y-axis). As shown in Figure 1, the first and second Y-axis moving devices 50a, 50b (Y-axis moving devices 50) each have a pair of left and right Y-axis linear guides 51, Y-axis linear motors 52 provided on the left and right sides respectively, and multiple Y-axis guide nuts 56 slidably mounted on each of the left and right Y-axis linear guides 51 and supporting the block member 40. As shown in Figure 1, the pair of left and right Y-axis linear guides 51 are arranged to extend back and forth on the upper surfaces of the left and right support bases 11.

[0028] As shown in Figure 1, the Y-axis linear motor 52 is configured as a flat-type linear motor having a Y-axis stator 53 fixed to a support base 11 so as to extend in the front-rear direction, and a Y-axis movable element 54 fixed to a block member 40 so as to face the Y-axis stator 53 at a predetermined vertical distance. The Y-axis stator 53 has a plurality of permanent magnets arranged flat on the same plane as the Y-axis linear guide 51, with alternating N and S pole polarities along the Y-axis linear guide 51. The Y-axis movable element 54 has a plurality of cores, each made by laminating electromagnetic steel sheets, and phase coils wound around the corresponding cores. The Y-axis movable element 54 moves back and forth (Y-axis) by applying a three-phase alternating current to each phase coil.

[0029] Thus, the head 15 can move in all directions (XY axes) by moving the slide member 20 back and forth (Y axis) using the Y-axis moving device 50, and by moving the X-axis movable element 34 left and right (X axis) relative to the slide member 20 using the X-axis moving device 30. As described above, the slide member 20 has a slide member body 21 made of CFRP formed in a rectangular tubular shape, which makes the slide member 20 lighter and allows the head 15 to move at a higher speed. Moreover, by making the slide member body 21 a rectangular tubular shape, the manufacturing cost can be reduced due to its simple shape.

[0030] Furthermore, since the slide member body 21 is formed by laminating multiple carbon fiber sheets impregnated with resin, and the outermost carbon fiber sheet 21o is made of carbon fiber with high thermal conductivity (for example, ultra-high elasticity pitch carbon fiber), the heat generated in the X-axis linear guide 31 as the head 15 moves can be dissipated by the slide member body 21, thereby suppressing deformation of the X-axis linear guide 31 due to heat. In addition, since the innermost carbon fiber sheet 21i is made of a woven cloth material, even if through holes are formed in the slide member body 21 from the outer surface to the inner surface by drilling, fraying of the fibers on the opposite side of the processed surface can be suppressed. Moreover, since the multiple carbon fiber sheets 21m of the intermediate layer, which are arranged between the outermost carbon fiber sheet 21o and the innermost carbon fiber sheet 21i, are formed so that the orientation angle of the fibers is symmetrical on the inside and outside in the thickness direction with respect to the symmetrical center plane, deformation can be suppressed when forming the slide member body 21.

[0031] It goes without saying that this disclosure is not limited in any way to the embodiments described above, and can be implemented in various forms as long as they fall within the technical scope of this disclosure.

[0032] For example, in the embodiment described above, the innermost carbon fiber sheet 21i constituting the slide member body 21 is formed from a cross material made of woven fibers, but it does not necessarily have to be formed from a cross material, for example, if no holes are drilled.

[0033] Furthermore, in the embodiment described above, the carbon fiber sheet 21m of the intermediate layer of the slide member body 21 is formed such that the fiber type and the ratio of fibers to resin are symmetrical with respect to the symmetrical center plane. However, the carbon fiber sheet 21m of the intermediate layer only needs to have at least one of the orientation angle, fibrous topography, and ratio of fibers to resin symmetrical with respect to the symmetrical center plane.

[0034] Furthermore, in the embodiment described above, the component mounting machine 10 is provided with two heads 15 (first and second heads 15a and 15b), but it may also be provided with a single head. In this case, the component mounting machine 10 only needs to be provided with one set each of the sliding member 20, the X-axis moving device 30, and the Y-axis moving device 50.

[0035] In the embodiments described above, the robot of this disclosure was applied to a component mounting machine 10, but it may be applied to any other robot, such as a printing press, die bonder, or machine tool, as long as it has a movable part supported by a sliding member made of carbon fiber reinforced resin.

[0036] As described above, the slide member of this disclosure is a cylindrical body made of carbon fiber reinforced resin, formed by laminating carbon fiber sheets impregnated with resin in the thickness direction. The laminate of carbon fiber sheets allows for weight reduction while ensuring rigidity. As a result, it is possible to increase the speed of movement of the movable part. In addition, the simple shape makes it easy to process, which reduces manufacturing costs.

[0037] In the slide member described herein, the carbon fiber sheet disposed in at least the outermost layer of the laminate may have a higher thermal conductivity than the carbon fiber sheets disposed in the other layers. In this case, the carbon fiber sheet disposed in at least the outermost layer of the laminate may be made of pitch-based carbon fiber. Furthermore, in these cases, the cylindrical body may extend in an orthogonal direction perpendicular to the predetermined direction, and a metal rail may be attached to the outer surface of the cylindrical body, extending in the orthogonal direction and supporting the movable part so as to be movable in the orthogonal direction. This allows the heat generated by the sliding of the rail to be dissipated throughout the entire slide member, and deformation of the rail due to heat can be suppressed.

[0038] Furthermore, in the slide member of this disclosure, the carbon fiber sheet disposed in at least the innermost layer of the laminate may be formed from a woven cloth material. In this case, through holes that penetrate in the thickness direction may be formed by drilling. This makes it possible to suppress the occurrence of fraying of the fibers on the opposite side of the processed surface when drilling holes on the outer surface of the slide member.

[0039] Furthermore, in the slide member of this disclosure, the plurality of continuous carbon fiber sheets of the laminate may be formed such that at least one of the fiber orientation angle, fiber type, and fiber-to-resin blending ratio is symmetrical in the thickness direction with respect to the symmetry center plane. This suppresses stress concentration during molding and prevents deformation of the slide member.

[0040] Furthermore, the slide member of this disclosure may be a rectangular tubular elongated member extending in a direction perpendicular to the predetermined direction, and the movable part may be supported on one side in the predetermined direction. This makes it possible to make the slide member a highly rigid member and to support the movable part well on one side. In addition, the simpler shape can further reduce manufacturing costs.

[0041] Furthermore, in the slide member of this disclosure, the cross-section may be formed in a substantially rectangular tubular shape such that opposing surfaces are substantially parallel, and at least one of the orientation angle of the fibers, the type of fibers, and the blending ratio of fibers to resin of the plurality of carbon fiber sheets constituting the laminate may be symmetrical with respect to a center line passing through the center of the opposing surfaces in a cross-sectional view. This would allow for a simpler shape and further reduction of manufacturing costs.

[0042] Although this disclosure describes the form as a sliding member, it may also describe the form of a robot comprising such a sliding member and a movable part supported by the sliding member. [Industrial applicability]

[0043] This disclosure can be used in industries such as the manufacturing of sliding components and robots. [Explanation of Symbols]

[0044] 10 Component mounting machine, 11 Support base, 15 Head, 15a First head, 15b Second head, 20 Slide member, 20a First slide member, 20b Second slide member, 21 Slide member body, 21i, 21m, 21o Carbon fiber sheet, 22 Seat plate, 23 Back plate, 26 Bolt, 30 X-axis moving device, 30a First X-axis moving device, 30b Second X-axis moving device, 31 X-axis linear guide, 32 X-axis linear motor, 33 X-axis stator, 34 X-axis movable element, 36 X-axis guide nut, 40 Block member, 50 Y-axis moving device, 50a First Y-axis moving device, 50b Second Y-axis moving device, 51 Y-axis linear guide, 52 Y-axis linear motor, 53 Y-axis stator, 54 Y-axis movable element, 56 Y-axis guide nut, 211 Through hole, F Feeder, S Substrate.

Claims

1. A sliding member that supports a movable part and is capable of sliding in a predetermined direction, It comprises a tubular body made of carbon fiber reinforced resin, formed by laminating resin-impregnated carbon fiber sheets in the thickness direction, and extending in a direction perpendicular to the predetermined direction, A metal rail is attached to the outer surface of the cylindrical body, extending in the orthogonal direction and supporting the movable part so that it can move in the orthogonal direction. A strip-shaped seat plate and back plate, both approximately the same length as the rail, are fixed to the outer and inner surfaces of the cylindrical body, respectively. The rail is fastened to the seat plate by bolts, The base plate and the back plate have female screw holes formed in them for screwing in the bolts. The cylindrical body has a through hole formed in it by drilling, which penetrates from the outer surface to the inner surface of the cylindrical body, for inserting the bolt. The carbon fiber sheet, which is arranged in at least the innermost layer of the laminate, is formed from a woven cloth material. Sliding component.

2. A slide member according to claim 1, The carbon fiber sheet arranged in at least the outermost layer of the laminate has a higher thermal conductivity than the carbon fiber sheets arranged in the other layers. Sliding component.

3. A slide member according to claim 2, The carbon fiber sheet, which is arranged in at least the outermost layer of the laminate, is made of pitch-based carbon fiber. Sliding component.

4. A slide member according to any one of claims 1 to 3, The continuous plurality of carbon fiber sheets of the laminate are formed such that at least one of the fiber orientation angle, fiber type, and fiber-to-resin blending ratio is symmetrical both inside and outside the thickness direction with respect to the symmetrical center plane. Sliding component.

5. A slide member according to any one of claims 1 to 4, A rectangular tubular elongated member extending in a direction perpendicular to the predetermined direction, supporting the movable part on one side in the predetermined direction. Sliding component.

6. A slide member according to any one of claims 1 to 5, The laminate is formed in a rectangular tubular shape with a roughly rectangular cross-section such that opposing surfaces are roughly parallel, and at least one of the orientation angle of the fibers, the type of fibers, and the blending ratio of fibers to resin of the multiple carbon fiber sheets constituting the laminate is symmetrical with respect to a center line passing through the center of the opposing surfaces in a cross-sectional view. Sliding component.

7. Movable parts and A cylindrical body made of carbon fiber reinforced resin, formed by laminating resin-impregnated carbon fiber sheets in the thickness direction and extending in an orthogonal direction perpendicular to a predetermined direction, comprising a slide member that supports the movable part and is slidable in the predetermined direction, Equipped with, A metal rail is attached to the outer surface of the cylindrical body, extending in the orthogonal direction and supporting the movable part so that it can move in the orthogonal direction. A strip-shaped seat plate and back plate, both approximately the same length as the rail, are fixed to the outer and inner surfaces of the cylindrical body, respectively. The rail is fastened to the seat plate by bolts, The base plate and the back plate have female screw holes formed in them for screwing in the bolts. The cylindrical body has a through hole formed in it by drilling, which penetrates from the outer surface to the inner surface of the cylindrical body, for inserting the bolt. The carbon fiber sheet, which is arranged in at least the innermost layer of the laminate, is formed from a woven cloth material. robot.