Work inspection device

Abstract

To perform stable inspection of the workpiece while avoiding damage to the top surface of the workpiece. [Solution] The work inspection device includes a disc-shaped index table having a storage section for accommodating workpieces, which intermittently rotates with the workpieces in the storage section to transport the workpieces to an inspection position; an inspection device that performs electrical or optical inspection of the workpieces transported to the inspection position; and a pressing and holding mechanism that presses and holds the workpieces transported to the inspection position against the wall surface of the storage section before performing the inspection. The pressing and holding mechanism includes a pressing body that presses the workpieces from the outside of the storage section, and a driving unit that drives the pressing body radially inward.

Description

Technical Field

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[0001] The present disclosure relates to a work inspection device.

Background Art

[0002] A work inspection device for performing electrical and / or optical inspection of a work (electronic component) is known. The work inspection device includes a disk-shaped index table that intermittently rotates while accommodating the work in a housing portion to convey the work to an inspection position, and an inspection device that inspects the work conveyed to the inspection position. The inspection device includes, for example, an optical measuring instrument disposed above the inspection position. An opening window is formed in a cover provided above the work, and the work is inspected through this opening window.

[0003] In a conventional work inspection device, in order to perform stable inspection, at the inspection position, the work is lifted upward from the lower surface by a probe, and the upper surface of the work is pressed against the inner surface of the cover provided above the work, and the inspection by the inspection device is performed through the opening window of the cover. However, in this inspection method, since the upper surface of the work is pressed against the inner surface of the cover, the upper surface of the work may be damaged.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In view of the above, an object of the present disclosure is to provide a work inspection device that can perform stable inspection of a work while avoiding damage to the upper surface of the work.

Means for Solving the Problems

[0006] Embodiments of this disclosure relate to the following [1] to [6].

[0007] [1] A disc-shaped index table having a storage section for accommodating a workpiece, which rotates intermittently with the workpiece accommodating the workpiece to transport the workpiece to the inspection position, An inspection device for performing electrical or optical inspection of the workpiece transported to the inspection position, The system includes a pressing and holding mechanism that presses and holds the workpiece, which has been transported to the inspection position, against the wall surface of the housing before performing the inspection, The pressing and holding mechanism includes a pressing body that presses the workpiece from the outside of the housing and a drive unit that drives the pressing body radially inward, in a workpiece inspection device.

[0008] [2] The workpiece inspection apparatus according to [1], wherein the pressing and holding mechanism further includes a cam driven by the drive unit, a cam follower that moves in accordance with the cam, a movable body that moves radially inward as the cam follower moves, and a holder that is held by the movable body and holds the pressing body.

[0009] [3] The workpiece inspection apparatus according to [1] or [2], wherein the inspection apparatus includes a probe that is movable in the vertical direction, which moves upward at the inspection position to electrically connect with the workpiece and supplies power to the workpiece to cause the workpiece to emit light.

[0010] [4] The workpiece inspection apparatus according to [3], wherein the inspection apparatus is positioned above the inspection position and includes an optical measuring instrument for measuring the amount of light emitted from the workpiece.

[0011] [5] The pressing body is movable between a pressing position in which the pressing body presses the workpiece and a retracted position in which the pressing body does not press the workpiece. A first sensor that detects when the pressing body is located at the pressing position, A workpiece inspection device according to any one of [1] to [4], further comprising a second sensor for detecting that the pressing body is in the retracted position.

[0012] [6] Further comprising a control unit, The workpiece inspection apparatus according to [5], wherein the control unit controls the index table to transport the workpiece to the inspection position, controls the pressing and holding mechanism to move the pressing body to the pressing position, and when the first sensor detects that the pressing body is in the pressing position, controls the inspection apparatus to perform the inspection of the workpiece, and after the inspection is completed, controls the pressing and holding mechanism to move the pressing body to the retracted position, and when the second sensor detects that the pressing body is in the retracted position, controls the index table again to transport the workpiece and transport the next workpiece to the inspection position. [Effects of the Invention]

[0013] According to this disclosure, stable inspection of a workpiece can be performed while avoiding damage to the upper surface of the workpiece. [Brief explanation of the drawing]

[0014] [Figure 1] Figure 1 is a plan view of the workpiece inspection device. [Figure 2] Figure 2 is a cross-sectional view of the workpiece inspection device. [Figure 3] Figure 3 is a cross-sectional view showing the structure of the pressure holding mechanism. [Figure 4] Figure 4 is a side view showing the first and second sensors. [Figure 5] Figure 5 is a flowchart showing the operation of the workpiece inspection device. [Figure 6] Figure 6 is a diagram illustrating the operation of the workpiece inspection device. [Figure 7] Figure 7 is a diagram illustrating the operation of the workpiece inspection device. [Figure 8] Figure 8 is a diagram illustrating the operation of the workpiece inspection device. [Figure 9] FIG. 9 is a diagram for explaining the operation of the work inspection device. [Figure 10] FIG. 10 is a diagram for explaining the operation of the work inspection device. [Figure 11] FIG. 11 is a diagram for explaining the operation of the work inspection device.

Embodiments for Carrying Out the Invention

[0015] In the drawings attached to this specification, for the convenience of illustration and easy understanding, the scale, the aspect ratio of vertical and horizontal dimensions, etc. are appropriately changed and exaggerated from those of the actual object. In some of the drawings, the configurations shown may be omitted in other drawings.

[0016] In this specification, terms specifying shapes, geometric conditions, and their degrees, such as "parallel", "orthogonal", etc., are not limited to strict meanings and are interpreted to include ranges where similar functions can be expected.

[0017] To clarify the direction relationships among the drawings, in some of the drawings, the X direction, Y direction, and Z direction are shown as common directions by arrows with common reference numerals. In the following examples, the X direction and Y direction are directions parallel to the horizontal direction, and the Z direction is a direction parallel to the vertical direction. The X direction, Y direction, and Z direction are orthogonal to each other. An arrow pointing forward from the paper surface along the direction perpendicular to the paper surface of the drawing is shown by a symbol with a dot in a circle, as shown in FIGS. 1 and 4. An arrow pointing backward into the paper along the direction perpendicular to the paper surface of the drawing is shown by a symbol with an "x" in a circle, as shown in FIGS. 2, 3, 6 to 11, for example.

[0018] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings.

[0019] Figure 1 is a plan view of the workpiece inspection device 10. A portion of the workpiece inspection device 10 is shown in Figure 1. Figure 2 is a cross-sectional view of the workpiece inspection device 10. A cross-section of the workpiece inspection device 10 at inspection position Pi is shown in Figure 2.

[0020] The workpiece inspection device 10 is a device that performs electrical and / or optical inspection of a workpiece W. The workpiece W is an electronic component such as a light-emitting diode. As shown in Figures 1 and 2, the workpiece inspection device 10 includes a base 11, an index table 12, an inspection device 20, a pressing and holding mechanism 30, and a control unit 50.

[0021] The index table 12 is rotatably positioned on the base 11. The index table 12 is formed in a disc shape. The index table 12 has a storage section 13 for accommodating workpieces W. As shown in Figure 1, the index table 12 may have a plurality of storage sections 13, each accommodating a workpiece W and arranged along the circumferential direction.

[0022] The storage section 13 is provided on the outer edge of the index table 12. The storage section 13 is formed in a notched shape on the outer edge of the index table 12. The storage section 13 opens to the top surface, bottom surface, and outer surface (outer edge) of the index table 12. The storage section 13 includes one wall surface 13a located radially inward of the index table 12 and two wall surfaces located on both sides in the circumferential direction of the index table 12. A base 11 is located on the bottom surface of the storage section 13. The workpiece W housed in the storage section 13 is supported by the base 11.

[0023] The index table 12 rotates around the rotation axis 12a. The index table 12 rotates intermittently on one side in the circumferential direction (in the direction of the arrow in Figure 1). The index table 12 transports the workpiece W by rotating intermittently with the workpiece W contained in the storage section 13. The workpiece W contained in the storage section 13 is transported while sliding against the base 11. The storage section 13 contains workpiece W supplied from a workpiece supply unit (not shown). The workpiece W supplied from the workpiece supply unit and contained in the storage section 13 is transported to the inspection position Pi by the index table 12. The index table 12 is driven by a drive mechanism (not shown).

[0024] A cover 15 is provided above the housing section 13. The cover 15 covers the housing section 13 from above at positions other than the inspection position Pi. As shown in Figure 1, the cover 15 may be formed in a substantially arc shape so as to cover a plurality of housing sections 13 arranged along the circumferential direction. An opening window 16 is formed in the cover 15 at the inspection position Pi. In the illustrated example, the opening window 16 has a circular shape. The opening window 16 exposes the workpiece W located at the inspection position Pi and housed in the housing section 13. When viewed from above, the opening window 16 overlaps with the housing section 13 located at the inspection position Pi. When viewed from above, the opening window 16 may be larger than the housing section 13. In particular, when viewed from above, the opening window 16 may be larger than the workpiece W housed in the housing section 13.

[0025] The inspection device 20 performs electrical and / or optical inspection of the workpiece W that has been transported to the inspection position Pi by the index table 12. The inspection device 20 includes a probe 21 and an optical measuring instrument 22.

[0026] As shown in Figure 2, the probe 21 is positioned below the inspection position Pi. In particular, the probe 21 is positioned below the workpiece W located at the inspection position Pi and housed in the housing 13. In the illustrated example, the probe 21 is positioned within a through hole 11a formed in the base 11.

[0027] The probe 21 is configured to be movable in the vertical direction. The probe 21 is configured to be movable between a connection position Pc (upper) where it is electrically connected to the workpiece W housed in the housing 13, and a non-connection position Pd (lower) where it is not connected to the workpiece W housed in the housing 13. In the connection position Pc, the probe 21 is in contact with the lower surface of the workpiece W. In the non-connection position Pd, the probe 21 is away from the lower surface of the workpiece W. The probe 21 is normally located in the lower position. During inspection, the probe 21 moves upward. In the inspection position Pi, the probe 21 moves upward and electrically connects to the workpiece W housed in the housing 13. The probe 21 then supplies power to the workpiece W, causing the workpiece W to emit light.

[0028] As shown in Figure 2, the optical measuring instrument 22 is positioned above the inspection position Pi. In particular, the optical measuring instrument 22 is positioned above the workpiece W located at the inspection position Pi and housed in the housing 13. The optical measuring instrument 22 is electrically connected to the probe 21 at the inspection position Pi and measures the amount of light emitted by the workpiece W when power is supplied. The optical measuring instrument 22 measures the amount of light emitted by the workpiece W from the opening window 16 of the cover 15.

[0029] The pressing and holding mechanism 30 is configured to press and hold the workpiece W, which has been transported to the inspection position Pi by the index table 12, against the wall surface 13a of the housing section 13 before inspection by the inspection device 20. The pressing and holding mechanism 30 is positioned radially outward from the housing section 13 at the inspection position Pi. The pressing and holding mechanism 30 is positioned on the base 11.

[0030] The structure of the pressing and holding mechanism 30 will now be described. Figure 3 is a cross-sectional view showing the structure of the pressing and holding mechanism 30. As shown in Figure 3, the pressing and holding mechanism 30 includes at least a pressing body 31 and a drive unit 32. In the example shown in Figure 3, the pressing and holding mechanism 30 includes a pressing body 31, a drive unit 32, a cam 33, a cam follower 34, a movable body 35, and a holder 36.

[0031] The pressing body 31 is a member that presses the workpiece W from the outside of the housing section 13 (radially outside the index table 12). The pressing body 31 includes a body portion 31a and a pressing portion 31b that protrudes radially inward from the body portion 31a. The pressing portion 31b is the part that presses the workpiece W. That is, the pressing portion 31b presses the workpiece W, which is located at the inspection position Pi and housed in the housing section 13, against the wall surface 13a of the housing section 13. The pressing body 31 is configured to be movable between a pressing position Pa, in which the pressing body 31 presses the workpiece W, and a retracted position Pb, in which the pressing body 31 does not press the workpiece W. At the pressing position Pa, the pressing body 31 is in contact with the side surface of the workpiece W. At the retracted position Pb, the pressing body 31 is away from the side surface of the workpiece W.

[0032] The drive unit 32 drives the pressing body 31 radially inward. That is, the drive by the drive unit 32 causes the pressing body 31 to move radially inward and press the workpiece W from the outside of the housing 13. The drive unit 32 is, for example, a servo motor. The drive unit 32 has a drive shaft 32a that rotates when driven.

[0033] The cam 33 is mounted on the drive shaft 32a of the drive unit 32. The cam 33 is driven by the drive unit 32. In the illustrated example, the cam 33 is an eccentric cam that rotates when driven by the drive unit 32.

[0034] The cam follower 34 is positioned adjacent to the cam 33. In the illustrated example, the cam follower 34 is positioned radially outward from the cam 33. The cam follower 34 is configured to move in accordance with the cam 33.

[0035] The movable body 35 is connected to the cam follower 34. The movable body 35 and the cam follower 34 are fixed to each other. The movable body 35 is configured to move radially inward as the cam follower 34 moves. The movable body 35 is biased radially inward by a biasing member 37. In the illustrated example, one end of the biasing member 37 is attached to a structure 37a fixed to the base 11, and the other end of the biasing member 37 is attached to a structure 37b fixed to the movable body 35, thereby biasing the movable body 35 radially inward.

[0036] The holder 36 is held by the movable body 35. The holder 36 and the movable body 35 are fixed to each other. Therefore, the holder 36 moves together with the movable body 35. The holder 36 also holds the pressing body 31. The holder 36 and the pressing body 31 are fixed to each other. Therefore, the holder 36 moves together with the pressing body 31. In other words, the holder 36 and the pressing body 31 move as the movable body 35 moves.

[0037] In this manner, the drive unit 32 drives the cam 33, and together with the cam follower 34 that follows the cam 33, the moving body 35, the holding body 36, and the pressing body 31 move radially inward, and the pressing body 31 presses the workpiece W. In this way, the pressing and holding mechanism 30 presses and holds the workpiece W, which has been transported to the inspection position Pi, against the wall surface 13a of the housing unit 13.

[0038] Furthermore, in the illustrated example, a first sensor 41 is provided to detect when the pressing body 31 is in the pressing position Pa, and a second sensor 42 is provided to detect when the pressing body 31 is in the retracted position Pb. Figure 4 is a side view showing the first sensor 41 and the second sensor 42.

[0039] As shown in Figure 4, the first sensor 41 and the second sensor 42 are provided on a structure 40 fixed to the base 11. A detected part 38, which is detected by the first sensor 41 and the second sensor 42, is provided on the side of the mobile body 35. The detected part 38 is provided so as to protrude from the side of the mobile body 35. The detected part 38 is fixed to the mobile body 35. Therefore, the detected part 38 moves together with the mobile body 35.

[0040] The first sensor 41 and the second sensor 42 detect the detected part 38 that moves in conjunction with the movement of the moving body 35. The first sensor 41 and the second sensor 42 are, for example, proximity sensors. The first sensor 41 detects that the pressing body 31 is in the pressing position Pa by detecting the detected part 38 when the pressing body 31 moves to the pressing position Pa. The second sensor 42 detects that the pressing body 31 is in the retracted position Pb by detecting the detected part 38 when the pressing body 31 moves to the retracted position Pb.

[0041] The control unit 50 controls each component of the work inspection device 10. More specifically, the control unit 50 controls the index table 12, the inspection device 20, and the pressing and holding mechanism 30. For example, the control unit 50 controls the drive unit of the index table 12, the probe 21 and optical measuring instrument 22 of the inspection device 20, and the drive unit 32 of the pressing and holding mechanism 30.

[0042] The control unit 50 controls the index table 12 to transport the workpiece W to the inspection position Pi. Next, the control unit 50 controls the pressing and holding mechanism 30 to move the pressing body 31 to the pressing position Pa. Then, when the control unit 50 detects that the pressing body 31 is in the pressing position Pa using the first sensor 41, it controls the inspection device 20 to inspect the workpiece W. After the inspection is complete, the control unit 50 controls the pressing and holding mechanism 30 to move the pressing body 31 to the retracted position Pb. Then, when the control unit 50 detects that the pressing body 31 is in the retracted position Pb using the second sensor 42, it controls the index table 12 again to transport the workpiece W and transport the next workpiece W to the inspection position Pi.

[0043] Although not shown in the figures, the work inspection device 10 may include, in addition to the inspection device 20, an imaging device for imaging the workpiece W housed in the storage section 13. The imaging device may perform a visual inspection of the workpiece W by imaging it. The work inspection device 10 may include multiple imaging devices. For example, the work inspection device 10 may include an imaging device for imaging the top surface of the workpiece W and an imaging device for imaging the bottom surface of the workpiece W. The work inspection device 10 may also include an imaging device for imaging the side surface of the workpiece W. The imaging device may be positioned at the inspection position Pi, or at a position other than the inspection position Pi, for example, upstream or downstream of the inspection position Pi in the transport direction of the workpiece W.

[0044] Next, the operation of the workpiece inspection device 10 described above will be explained using Figures 5 to 11. Figure 5 is a flowchart showing the operation of the workpiece inspection device 10. Figures 6 to 11 are diagrams illustrating the operation of the workpiece inspection device 10. The workpiece inspection device 10 is operated under the control of the control unit 50. The operation of the workpiece inspection device 10 will be explained below in accordance with the flowchart in Figure 5.

[0045] First, in step S1, the index table 12 transports the workpiece W to the inspection position Pi. More specifically, the drive unit of the index table 12 rotates the index table 12 for a predetermined set number of pulses. As a result, the workpiece W, supplied from a workpiece supply unit (not shown) and stored in the storage unit 13, is transported to the inspection position Pi by the index table 12.

[0046] Next, in step S2, the pressing body 31 is moved to the pressing position Pa. More specifically, the driving unit 32 of the pressing and holding mechanism 30 drives the pressing body 31 to move radially inward from the retracted position Pb shown in Figure 6 to the pressing position Pa shown in Figure 7. As a result, as shown in Figure 7, the workpiece W housed in the housing 13 is pressed and held against the wall surface 13a of the housing 13 by the pressing and holding mechanism 30.

[0047] Next, in step S3, the first sensor 41 detects that the pressing body 31 is located at the pressing position Pa. More specifically, the first sensor 41 detects the detected part 38 when the pressing body 31 moves to the pressing position Pa. This confirms that the pressing body 31 has been positioned at the pressing position Pa.

[0048] Next, in step S4, the probe 21 is moved to the connection position Pc. More specifically, the probe 21 is moved upward from the non-connection position Pd shown in Figure 7 to the connection position Pc shown in Figure 8. This electrically connects the probe 21 to the workpiece W housed in the housing 13.

[0049] Next, in step S5, the workpiece W is inspected. More specifically, as shown in Figure 9, a probe 21 electrically connected to the workpiece W housed in the housing 13 supplies power to the workpiece W, causing it to emit light, and the amount of light emitted by the workpiece W is measured by an optical measuring instrument 22 positioned above the inspection position Pi. This allows the inspection device 20 to perform an electrical and / or optical inspection of the workpiece W.

[0050] Next, in step S6, the probe 21 is moved to the disconnected position Pd. More specifically, as shown in Figure 10, the probe 21 is moved downward from the connected position Pc to the disconnected position Pd. This disconnects the electrical connection between the probe 21 and the workpiece W.

[0051] Next, in step S7, the pressing body 31 is moved to the retracted position Pb. More specifically, the driving unit 32 of the pressing and holding mechanism 30 drives the pressing body 31 to move radially outward from the pressing position Pa to the retracted position Pb, as shown in Figure 11. This releases the pressing and holding of the workpiece W by the pressing and holding mechanism 30.

[0052] Next, in step S8, the second sensor 42 detects that the pressing body 31 is in the retracted position Pb. More specifically, the second sensor 42 detects the detected part 38 when the pressing body 31 moves to the retracted position Pb. This confirms that the pressing body 31 has been positioned in the retracted position Pb.

[0053] Next, in step S9, the workpiece W is transported by the index table 12. More specifically, the drive unit of the index table 12 rotates the index table 12 for a predetermined set number of pulses. As a result, the workpiece W that has been inspected is transported from the inspection position Pi by the index table 12. When inspecting multiple workpieces W, the rotational drive of the index table 12 transports the next workpiece W to the inspection position Pi. Then, steps S1 to S9 described above are performed on this next workpiece W. By repeating this process, multiple workpieces W can be inspected sequentially.

[0054] As mentioned above, in conventional workpiece inspection devices, in order to perform stable inspections, the workpiece was lifted upward from below using a probe at the inspection position, and the top surface of the workpiece was pressed against the inner surface of the cover, and the inspection was performed by the inspection device through the opening window of the cover. However, this inspection method sometimes damaged the top surface of the workpiece because it was pressed against the inner surface of the cover.

[0055] In contrast, according to this embodiment, the workpiece W, which has been transported to the inspection position Pi by the pressing and holding mechanism 30, is pressed and held against the wall surface 13a of the housing section 13, thereby enabling stable inspection during inspection by the inspection device 20. Furthermore, since the workpiece W is pressed against the wall surface 13a, damage to the upper surface of the workpiece W can be avoided. In particular, if the workpiece W is a light-emitting diode, the upper surface of the workpiece W is the light-emitting surface. Therefore, damage to the light-emitting surface can be avoided. Thus, according to this embodiment, stable inspection of the workpiece W can be performed while avoiding damage to the upper surface of the workpiece W.

[0056] Furthermore, in conventional workpiece inspection devices, the workpiece is lifted upward from below by a probe at the inspection position, and its top surface is pressed against the inner surface of the cover. As a result, the opening window of the cover was made smaller than the workpiece. Therefore, during inspection, the light emitted from the workpiece may be blocked by the cover, potentially affecting inspection accuracy.

[0057] In contrast, according to this embodiment, the upper surface of the workpiece W is not pressed against the inner surface of the cover 15, so the opening window 16 of the cover 15 can be made larger than in the case of a typical workpiece inspection device. Therefore, it is possible to suppress the obstruction of the light emitted by the workpiece W by the cover 15 during inspection, and inspection accuracy can be improved.

[0058] According to the embodiment described above, stable inspection of the workpiece W can be performed while avoiding damage to the upper surface of the workpiece W.

[0059] While embodiments of the present disclosure have been described above with reference to specific examples, the embodiments of the present disclosure are not limited to those described above. Embodiments of the present disclosure can be implemented in various other specific examples, and various omissions, substitutions, modifications, and additions are possible without departing from the spirit thereof. [Explanation of symbols]

[0060] 10 Workpiece Inspection Device 12 Index Tables 13. Detention Unit 13a Wall surface 20 Inspection equipment 21 probes 22 Optical measuring instruments 30 Press and hold mechanism 31 Pressing body 32 Drive unit 33 Cam 34 Cam Follower 35 Mobile Unit 36 Holding body 41 First Sensor 42. Second Sensor 50 Control Unit Pa Pressing Position Pb evacuation position Pi inspection location Double job

Claims

1. A disc-shaped index table having a storage section for accommodating a workpiece, which intermittently rotates while the workpiece is accommodating the workpiece in the storage section to transport the workpiece to the inspection position, An inspection device for performing electrical or optical inspection of the workpiece transported to the inspection position, The system includes a pressing and holding mechanism that presses and holds the workpiece, which has been transported to the inspection position, against the wall surface of the housing before performing the inspection, The pressing and holding mechanism includes a pressing body that presses the workpiece from the outside of the housing, a drive unit that drives the pressing body radially inward, a cam driven by the drive unit, a cam follower that moves in accordance with the cam, a moving body that moves radially inward in conjunction with the movement of the cam follower, and a holding body that is held by the moving body and holds the pressing body, in a workpiece inspection device.

2. A disc-shaped index table having a storage section for accommodating a workpiece, which intermittently rotates while the workpiece is accommodating the workpiece in the storage section to transport the workpiece to an inspection position, An inspection device for performing electrical or optical inspection of the workpiece transported to the inspection position, The system includes a pressing and holding mechanism that presses and holds the workpiece, which has been transported to the inspection position, against the wall surface of the housing before performing the inspection, The pressing and holding mechanism includes a pressing body that presses the workpiece from the outside of the housing and a drive unit that drives the pressing body radially inward. The inspection device includes a probe that is movable in the vertical direction, which moves upward at the inspection position to electrically connect with the workpiece and supplies power to the workpiece, thereby causing the workpiece to emit light.

3. A disc-shaped index table having a storage section for accommodating a workpiece, which intermittently rotates while the workpiece is accommodating the workpiece in the storage section to transport the workpiece to an inspection position, An inspection device for performing electrical or optical inspection of the workpiece transported to the inspection position, The system includes a pressing and holding mechanism that presses and holds the workpiece, which has been transported to the inspection position, against the wall surface of the housing before performing the inspection, The pressing and holding mechanism includes a pressing body that presses the workpiece from the outside of the housing and a drive unit that drives the pressing body radially inward. The pressing body is movable between a pressing position in which the pressing body presses the workpiece and a retracted position in which the pressing body does not press the workpiece. A first sensor that detects when the pressing body is located at the pressing position, A workpiece inspection device further comprising a second sensor for detecting that the pressing body is in the retracted position.

4. The workpiece inspection apparatus according to claim 2 or 3, wherein the pressing and holding mechanism further includes a cam driven by the drive unit, a cam follower that moves in accordance with the cam, a movable body that moves radially inward as the cam follower moves, and a holder that is held by the movable body and holds the pressing body.

5. The workpiece inspection apparatus according to claim 1 or 3, wherein the inspection apparatus includes a probe that is movable in the vertical direction, which moves upward at the inspection position to electrically connect with the workpiece and supplies power to the workpiece to cause the workpiece to emit light.

6. The workpiece inspection apparatus according to claim 2, wherein the inspection apparatus is positioned above the inspection position and includes an optical measuring instrument for measuring the amount of light emitted from the workpiece.

7. The pressing body is movable between a pressing position in which the pressing body presses the workpiece and a retracted position in which the pressing body does not press the workpiece. A first sensor that detects when the pressing body is located at the pressing position, The workpiece inspection apparatus according to claim 1 or 2, further comprising a second sensor for detecting that the pressing body is in the retracted position.

8. Further equipped with a control unit, The workpiece inspection apparatus according to claim 3, wherein the control unit controls the index table to transport the workpiece to the inspection position, controls the pressing and holding mechanism to move the pressing body to the pressing position, and when the first sensor detects that the pressing body is in the pressing position, controls the inspection apparatus to perform the inspection of the workpiece, and after the inspection is completed, controls the pressing and holding mechanism to move the pressing body to the retracted position, and when the second sensor detects that the pressing body is in the retracted position, controls the index table again to transport the workpiece and transport the next workpiece to the inspection position.

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