Optical analysis device, optical analysis method, and program for optical analysis device

Abstract

Provided is an optical analysis device 1 that analyses a component of interest by leading, to a measuring cell 4, light which has been emitted from a light source 2 and detecting, with a detector, light which has passed through the measuring cell 4, said optical analysis device 1 comprising: a moving mirror 8 that reflects the light emitted from the light source 2 while reciprocating; a moving mechanism 9 that reciprocates the moving mirror 8; a movement control unit 11a that controls the application voltage or application current to the moving mechanism 9; and a cause inference unit 11f that uses actual waveform data, which indicates the application voltage or application current to the moving mechanism 9 at each time, and reference waveform data, which indicates the application voltage or application current to the moving mechanism 9 at each time and which has been obtained in advance, to infer a cause of an anomaly which affects the moving mirror.

Description

Optical analysis device, optical analysis method, and program for optical analysis device

[0001] The present invention relates to an optical analysis device, an optical analysis method, and a program for an optical analysis device.

[0002] As disclosed in Patent Document 1, a conventional optical analysis device uses an FTIR interferometer to measure a light intensity spectrum and analyze the concentration of a component to be measured.

[0003] The measurement accuracy of the light intensity spectrum depends on the accuracy of the constant speed control of the moving mirror when sampling the interferogram waveform that is the basis of the light intensity spectrum.

[0004] Therefore, in order to ensure the measurement accuracy of the light intensity spectrum, not only are the mechanical, electrical, and software designed to be able to control the moving mirror at a constant speed, but precision control is also carried out to suppress variations that may occur during the assembly or adjustment of the device.

[0005] This type of management involves, for example, checking the speed stability of the mirror in the constant speed control section, and checking for the presence or absence of noise or vibration when controlling the moving mirror.If there are any problems with these accuracy control indicators, the problems at the time of assembly or adjustment are investigated and corrected.

[0006] However, even if such quality control reveals that a problem has occurred, there is insufficient information to deduce the cause, and as a result, a lot of time is spent identifying the cause and implementing countermeasures when a problem occurs.

[0007] JP 2016-090472 A

[0008] The present invention has been made to solve the above-mentioned problems, and its main object is to make it possible to estimate the cause of a problem that occurs in the movement of a moving mirror.

[0009] In other words, the optical analysis device of the present invention is an optical analysis device that analyzes target components by guiding light emitted from a light source to a measurement cell and detecting the light that has passed through the measurement cell, and is characterized by comprising: a movable mirror that reflects the light emitted from the light source while moving back and forth; a moving mechanism that moves the movable mirror back and forth; a movement control unit that controls the voltage or current applied to the moving mechanism; and a cause estimation unit that estimates causes that affect the movement of the movable mirror using actual waveform data that indicates the actual voltage or current applied to the moving mechanism at each time, and reference waveform data that has been obtained in advance and indicates the voltage or current applied to the moving mechanism at each time.

[0010] Here, the reference waveform represented by the reference waveform data is a waveform acquired in advance under normal conditions or after maintenance, and represents the ideal behavior of the applied voltage or current when there are no abnormalities in the device. On the other hand, the actual waveform represented by the actual waveform data represents the actual behavior, such as when measuring the applied voltage or current given to the moving mechanism to minimize the difference between the actual position of the moving mirror and the target position. Therefore, if there is an abnormality in the device and that abnormality is causing problems with the movement of the moving mirror, the actual waveform will deviate from the reference waveform. The way in which this deviation occurs will vary depending on the location of the abnormality in the device, such as by shifting the entire waveform up or down, or by changing the height or gentleness of the peak.

[0011] Therefore, the optical analysis device of the present invention is equipped with a cause estimation unit that uses actual waveform data and reference waveform data to estimate the cause affecting the movement of the movable mirror, so that when a problem occurs in the movement of the movable mirror, the cause of the problem can be estimated, unlike in the past.

[0012] As a specific aspect of the above-mentioned cause estimation unit, it is preferable to further include a cause output unit that outputs, as the cause of the abnormality, information related to a drive source that constitutes the moving mechanism, information related to a frictional force generated by the movement of the moving mirror, or information related to a force applied to the moving mirror regardless of the position of the moving mirror during reciprocating movement, and outputs the cause estimated by the cause estimation unit. With such a configuration, the user can quickly grasp the cause of the abnormality.

[0013] It is preferable that the position of the movable mirror at each time and the applied current or voltage to the movable mechanism at each time can be expressed using a predetermined transfer function, and that the transfer function includes a plurality of parameters corresponding to a plurality of types of causes, and that the cause estimation unit estimates the cause by comparing the values ​​of each parameter of the transfer function obtained using the reference waveform data with the values ​​of each parameter of the transfer function obtained using the actual waveform data. In this case, it is possible to estimate the location of an abnormality, etc., depending on which parameters differ.

[0014] The correlation between the applied voltage and the target position of the moving mirror is complex and cannot be expressed by a simple proportional equation, and since the actual waveform data also contains the effects of measurement noise, etc., it is difficult to accurately determine the values ​​of the above-mentioned parameters by simple calculation.

[0015] Therefore, it is preferable to provide an actual parameter value acquisition unit that acquires actual parameter values, which are the parameter values ​​of the transfer function, by fitting the transfer function to the actual waveform data. With this configuration, the accuracy of the acquired actual parameter values ​​is improved, and abnormal locations, etc. can be more accurately estimated.

[0016] As mentioned in the background art, the accuracy of constant-velocity control is important in FTIR interferometers, and so it is often thought that the waveform in the constant-velocity control section of the moving mirror is important. However, comparing the actual waveform in the constant-velocity control section with the reference waveform provides little information, making it difficult to identify abnormalities. Therefore, the inventors of the present application have conducted extensive research and found that the waveform in the section including the turning point of the reciprocating moving mirror is more complex than the waveform in the constant-velocity control section, and that the deviation between the actual waveform and the reference waveform in this section indicates various identifiable causes of abnormalities. For this reason, it is preferable that the actual parameter value acquisition unit fits the transfer function to the transient section included in the actual waveform indicated by the actual waveform data. In this way, the transient section included in the actual waveform corresponds to the section including the turning point of the moving mirror, allowing for more accurate estimation of various causes of abnormalities.

[0017] It is preferable that one of the plurality of parameters is a parameter that varies depending on the deviation of the driving force output from the moving mechanism to the moving mirror from its theoretical value. In this case, if there is a difference in this parameter, it can be assumed that the cause of the abnormality is, for example, a driving source such as a coil that constitutes the moving mechanism.

[0018] It is preferable that one of the plurality of parameters is a parameter that varies in response to the frictional force generated by the movement of the movable mirror. In this case, if there is a difference in this parameter, it can be assumed that the cause of the abnormality is, for example, a guide that supports the movable mirror.

[0019] It is preferable that one of the plurality of parameters is a parameter that varies depending on the force applied to the moving mirror regardless of the position of the moving mirror during reciprocation. In this case, if there is a difference in this parameter, it is possible to infer the cause of the abnormality, such as a tilted part of the device.

[0020] The optical analysis method of the present invention analyzes target components by guiding light emitted from a light source to a measurement cell and detecting the light that passes through the measurement cell. The method is used in an optical analysis device that includes a movable mirror that reflects the light emitted from the light source while moving back and forth, and a moving mechanism that moves the movable mirror back and forth. The method is characterized in that the cause of an abnormality affecting the movable mirror is estimated using actual waveform data that indicates the applied voltage or applied current to the moving mechanism at each time, and reference waveform data that has been obtained in advance and indicates the applied voltage or applied current to the moving mechanism at each time.

[0021] The program for an optical analysis device according to the present invention analyzes target components by guiding light emitted from a light source to a measurement cell and detecting the light that passes through the measurement cell. The program is used in an optical analysis device that includes a movable mirror that reflects the light emitted from the light source while moving back and forth, and a moving mechanism that moves the movable mirror back and forth. The program is characterized in that it causes a computer to function as a cause estimation unit that estimates the cause of an abnormality affecting the movable mirror using actual waveform data that indicates the applied voltage or current to the moving mechanism at each time, and reference waveform data that has been obtained in advance and indicates the applied voltage or current to the moving mechanism at each time.

[0022] According to such an optical analysis method and a program for an optical analysis device, it is possible to achieve the same effects as those of the optical analysis device described above.

[0023] In addition, the optical analysis device of the present invention is an optical analysis device that analyzes target components by guiding light emitted from a light source to a measurement cell and detecting the light that has passed through the measurement cell, and is characterized by comprising: a movable mirror that reflects the light emitted from the light source while moving back and forth; a moving mechanism that moves the movable mirror back and forth; a movement control unit that controls the position of the moving mechanism; and a cause estimation unit that estimates the cause of an abnormality affecting the movable mirror using actual waveform data that indicates the position of the movable mirror at each time or that is determined from that position, and reference waveform data that indicates a target position of the movable mirror at each time that has been obtained in advance or that is determined from that target position.

[0024] Here, the reference waveform (for example, a waveform indicating a target position or speed) is what is called an ideal waveform when no abnormality occurs in the device, and the actual waveform is a waveform that deviates from the reference waveform when an abnormality occurs in the device and the abnormality is causing problems in the movement of the moving mirror. The way in which this deviation occurs varies depending on the abnormality in the device, for example, the entire waveform shifts up or down, or the height or gentleness of the peak changes.

[0025] Therefore, the optical analysis device of the present invention described above is equipped with a cause estimation unit that uses actual waveform data and reference waveform data to estimate the cause of an abnormality affecting the movable mirror, so that when a problem occurs with the movement of the movable mirror, it is possible to estimate the cause of the problem, unlike conventional methods.

[0026] The optical analysis device according to the present invention is an optical analysis device that analyzes a target component by guiding light emitted from a light source to a measurement cell and detecting the light transmitted through the measurement cell, and is characterized by comprising: a movable mirror that reflects the light emitted from the light source while moving back and forth, a movement mechanism that moves the movable mirror back and forth, a movement control unit that controls the voltage or current applied to the movement mechanism, and a comparison output unit that outputs actual waveform data indicating the voltage or current applied to the movement mechanism at each time and reference waveform data that has been acquired in advance and indicates the voltage or current applied to the movement mechanism at each time in a comparable manner. With the optical analysis device configured in this manner, the above-mentioned actual waveform data and reference waveform data are output in a comparable manner, so that when a problem occurs in the movement of the movable mirror, the cause of the problem can be estimated, unlike in the past.

[0027] According to the present invention configured in this way, when a problem occurs in the movement of the movable mirror, the cause of the problem can be estimated.

[0028] 1 is a schematic diagram showing the configuration of an optical analysis device of the present embodiment; a functional block diagram showing the functions of a control device of the present embodiment; a functional block diagram showing the functions of a control device of another embodiment; a graph showing the relationship between the target position of a moving mirror of the present embodiment and time; a graph showing the relationship between the velocity of a moving mirror of the present embodiment and time; a graph showing the behavior of actual waveform data of the present embodiment; a flowchart showing the operation of the control device of the present embodiment; a graph explaining fitting using actual parameter values ​​of the present embodiment.

[0029] An embodiment of an optical analysis device according to the present invention will be described below with reference to the drawings.

[0030] The optical analysis device 1 of this embodiment is a Fourier transform infrared spectroscopic analysis device, commonly known as FTIR, and as shown in FIG. 1, includes an infrared light source 2, an interferometer 3, a measurement cell 4, and an analysis unit 5.

[0031] With the above-described configuration, infrared light emitted from the infrared light source 2 is irradiated via the interferometer 3 onto the measurement sample contained in the measurement cell 4, and the analysis unit 5 detects and disperses the transmitted light that passes through the measurement sample, thereby detecting a spectrum unique to the measurement sample and analyzing the measurement sample.

[0032] As shown in FIG. 1, the interferometer 3 includes a beam splitter 6, a fixed mirror 7, a movable mirror 8, a moving mechanism 9 that moves the movable mirror 8 back and forth, a measuring unit 10 that measures the moving speed of the movable mirror 8, and a control device 11 that controls the moving mechanism 9 to move the movable mirror 8 back and forth at a constant speed.

[0033] The beam splitter 6 is a parallel plate made of an infrared-transparent crystal such as KBr coated with a thin film of Ge or the like, and transmits and reflects the light emitted from the light source 2. Therefore, the light emitted from the light source 2 and passing through the beam splitter 6 is split into two optical paths: one for the transmitted light and one for the reflected light.

[0034] The fixed mirror 7 is disposed on one of the optical paths split by the beam splitter 6 , and in this embodiment, is disposed on the optical path of the light transmitted by the beam splitter 6 .

[0035] The movable mirror 8 is disposed on the other side of the optical path split by the beam splitter 6 , and in this embodiment, is disposed on the optical path of the light reflected by the beam splitter 6 .

[0036] The moving mechanism 9 has a power source that outputs power to move the moving mirror 8. Examples of such a power source include those that output mechanical, electrical, magnetic, or fluid driving forces, and more specifically, those that utilize a motor, a pneumatic valve, a solenoid, or the like.

[0037] As shown in Figure 1, the moving mechanism 9 here comprises a linear guide 9a with rails provided in the longitudinal direction, a base 9c that moves along the rails of the linear guide 9a and on which the moving mirror 8 is mounted, a coil 9b wound around the base 9c along the longitudinal direction of the linear guide 9a, and a pair of permanent magnets (not shown) arranged along the longitudinal direction so as to sandwich the linear guide 9a.

[0038] The measuring unit 10 is a photosensor that measures the moving speed of the moving mirror 8, and measures the speed from, for example, a change in the frequency of light emitted from the light source 10a and reflected by the fixed mirror 7 and / or the moving mirror 8. The measuring unit 10 then transmits actual speed data indicating the measured speed to the control device 11.

[0039] The control device 11 controls the operation of the movement mechanism 9, and is structurally a so-called computer circuit having a CPU, internal memory, an I / O buffer circuit, an AD converter, etc. The control device 11 operates in accordance with a control program stored in a predetermined area of ​​the internal memory, whereby the CPU and peripheral devices work together to function as a movement control unit 11a shown in FIG.

[0040] The movement control unit 11a controls the voltage or current applied to the movement mechanism 9, and specifically outputs a control signal to the drive source of the movement mechanism 9, and causes the moving mirror 8 to move back and forth in a linear manner using the drive force from the drive source.

[0041] This movement control unit 11a moves the moving mirror 8 at a constant speed in a section excluding the section required for reversing the moving mirror 8. Specifically, as shown in FIG. 3 , the movement control unit 11a generates target speed data indicating a target speed by time-differentiating the target position indicated by target position data input in advance via the input means. The movement control unit 11a then calculates the deviation between the created target speed data and the actual speed data transmitted from the measurement unit 10, performs arithmetic processing on this deviation using a feedback equation such as proportional action and integral action, generates a control signal, and transmits this control signal to the moving mechanism 9.

[0042] The target position described above, with the vertical axis representing position and the horizontal axis representing time, describes a triangular wave as shown in Fig. 3. The speed at which the moving mechanism 9 is moved to follow the target position, with the vertical axis representing speed and the horizontal axis representing time, alternates between a constant speed section and a reversal section in which the moving mechanism 9 decelerates from the constant speed to a stop and then accelerates back to the same speed as the constant speed, as shown in Fig. 4.

[0043] The movement control unit 11a moves the movement mechanism 9 at a constant speed along the linear guide 9a in the constant speed section, and reverses the movement mechanism 9 at both ends of the linear guide 9a in the reversing section. Then, by repeating this control by the movement control unit 11a, the movement mechanism 9 and the moving mirror 8 mounted on this movement mechanism 9 move back and forth in a straight line.

[0044] The control signal output from the movement control unit 11a to the movement mechanism 9 is a signal that indicates the magnitude of the applied current or voltage to be applied to the movement mechanism 9. When this control signal is received, a current flows through the coil 9b, and the force generated by the direction of the current flow and the magnetic field created by the permanent magnet causes the platform 9c to move back and forth in a straight line along the linear guide 9a.

[0045] With the above-described configuration, light emitted from light source 2 is split into two beams by beam splitter 6, one beam is reflected by fixed mirror 7 toward beam splitter 6, and the other beam is reflected by movable mirror 8 toward beam splitter 6. At this time, since movable mirror 8 is moved linearly back and forth by moving mechanism 9, an optical path difference occurs between the beam reflected by fixed mirror 7 and the beam reflected by movable mirror 8, and these beams are superimposed by beam splitter 6 to generate interference light.

[0046] As shown in FIG. 2, the control device 11 of this embodiment further includes the functions of an actual waveform data acquisition unit 11b and a reference waveform data acquisition unit 11c.

[0047] The actual waveform data acquiring unit 11b acquires actual waveform data indicating the voltage or current applied at each time to the moving mechanism 9 during a check. Note that the time of check means the time when an abnormality in the movement of the moving mirror 8 is confirmed, specifically, the timing when the moving mechanism 9 is moved during measurement or the timing when the moving mechanism 9 is moved before measurement.

[0048] The actual waveform data is the change over time in the value (in this embodiment, the applied voltage or applied current) indicated by the control signal at each time actually transmitted from the above-mentioned movement control unit 11a to the movement mechanism 9 during measurement by the optical analysis device 1, etc.

[0049] The behavior of this actual waveform data, where the vertical axis represents the applied voltage or applied current and the horizontal axis represents time, is shown in FIG. 5 as a repetition of steady-state sections corresponding to the constant velocity sections described above and transient sections corresponding to the reversal sections described above.

[0050] The steady section is a section in which there is little fluctuation in the applied voltage or applied current, in other words, a flat section in which the applied current or applied voltage is stable.

[0051] On the other hand, a transient section is a section in which the applied voltage or applied current fluctuates greatly between adjacent steady sections, in other words, a section that appears as an upward or downward peak.

[0052] The reference waveform data acquiring unit 11c acquires reference waveform data indicating the voltage or current applied to the moving mechanism 9 at each time point at a reference time. Note that the reference time means a time when it can be said that at least no abnormality occurs in the movement of the moving mirror 8, and specifically, such as at the time of factory shipment, after maintenance, at the time of calibration, at the time of first use, after a predetermined number of uses, or after a predetermined period of time has elapsed.

[0053] In other words, the reference waveform data acquisition unit 11c acquires reference waveform data that indicates the applied voltage or applied current at each time to the moving mechanism 9, which has been acquired in advance, and more specifically, acquires reference waveform data that has been acquired before the acquisition of the above-mentioned actual waveform data.

[0054] The reference waveform data is obtained assuming that no abnormalities have occurred in the optical analysis device 1 (i.e., the optical analysis device 1 is normal), and is the change over time in the value (in this embodiment, the applied voltage or applied current) indicated by the control signal sent from the movement control unit 11a to the movement mechanism 9 when moving the movable mirror 8 to the target position at each time at the reference time described above.

[0055] The behavior of this reference data, similar to that of the actual waveform data described above, is such that, with the vertical axis representing applied voltage or applied current and the horizontal axis representing time, a steady section corresponding to the constant velocity section described above and a transient section corresponding to the inversion section described above are repeated.

[0056] Here, there is a correlation between the position Y(s) of the moving mirror 8 at each time and the applied current or applied voltage U(s) to the moving mechanism 9 at each time, and these position Y(s) and applied current or applied voltage U(s) are expressed by the following equation (1) using a predetermined transfer function G(s) with s as a parameter.

[0057] This transfer function G(s) includes multiple parameters, and these parameters include parameters that correspond to the cause of abnormalities in the movement of the movable mirror 8, in other words, parameters whose values ​​vary depending on whether or not an abnormality that affects the movement of the movable mirror 8 has occurred.

[0058] These parameters correspond to causes that affect the speed of the moving mirror 8, and more specifically, to causes of abnormalities (hereinafter also referred to as abnormal causes) that affect the movement speed of the moving mirror 8 in the constant speed section.

[0059] It should be noted that the abnormality affecting the moving speed of the moving mirror 8 here includes not only abnormalities occurring in the moving mirror 8 itself, but also abnormalities occurring in the members surrounding the moving mirror 8.

[0060] Furthermore, the abnormality cause referred to here is a cause that causes a difference between the behavior shown by the actual waveform data and the behavior shown by the reference waveform data, such as variations that occur in the optical analysis device 1 or the interferometer 3 during assembly or manufacturing.

[0061] That is, the values ​​of the above-mentioned parameters vary depending on whether or not an abnormality that affects the moving speed of the moving mirror 8 in the constant speed section occurs.

[0062] Examples of such parameters include a parameter (hereinafter referred to as the first parameter) whose value varies depending on the deviation from the theoretical value of the driving force output from the moving mechanism 9 to the moving mirror 8, a parameter (hereinafter referred to as the second parameter) whose value varies depending on the frictional force generated by the movement of the moving mirror 8, and a parameter (hereinafter referred to as the third parameter) whose value varies depending on the force applied to the moving mirror 8 regardless of the position of the moving mirror 8 as it moves back and forth.

[0063] A specific example of the above formula (1) is one represented by the following formula (1)'.

[0064] The transfer function G(s) here is expressed by the coefficients and constant terms of U(s), and a ０ , b ０ is the first parameter, and a １ is the second parameter, and d ０ is the third parameter.

[0065] The transfer function G(s) does not include a constant term (i.e., d ０ = 0). In addition, the transfer function G(s) described above is expressed as a quadratic expression of the parameter s, but it may be expressed as a linear expression of the parameter s, or may be expressed as a cubic or higher order expression.

[0066] The control device 11 of this embodiment is configured to control the voltage or current applied to the moving mechanism 9, and to estimate the cause of an abnormality affecting the moving mirror 8 using actual waveform data indicating the voltage or current applied to the moving mechanism 9 at each time, and reference waveform data indicating the voltage or current applied to the moving mechanism 9 at each time, which has been obtained in advance.

[0067] Specifically, as shown in FIG. 2A , the control device 11 includes a movement control unit 11a, a reference parameter value acquisition unit 11d, an actual parameter value acquisition unit 11e, and a cause estimation unit 11f. The reference parameter value acquisition unit 11d, the actual parameter value acquisition unit 11e, and the cause estimation unit 11f may be collectively referred to as a cause estimation unit. In this case, the cause estimation unit estimates the cause of an abnormality affecting the moving mirror using actual waveform data indicating the voltage or current applied to the moving mechanism at each time and previously acquired reference waveform data indicating the voltage or current applied to the moving mechanism at each time.

[0068] 2B, the control device 11 may be configured to include a reference parameter value acquiring unit 11d, an actual parameter value acquiring unit 11e, and a comparison output unit 12. The comparison output unit 12 outputs actual waveform data indicating the voltage or current applied to the moving mechanism 9 at each time and previously acquired reference waveform data indicating the voltage or current applied to the moving mechanism 9 at each time in a manner that allows them to be compared.

[0069] The operation of the control device 11 will be described below with reference to the flowchart of FIG. 6, along with an explanation of each of these components.

[0070] The reference parameter value acquiring unit 11d acquires, as reference parameter values, the values ​​of parameters included in G(s) in a transfer function indicating the correlation between target position data and reference waveform data (S1).

[0071] The method for obtaining the reference parameter values ​​is not particularly limited, but one example is a method in which the transfer function G(s) is obtained by optimizing the transfer function G(s) using the target position data and the reference waveform data, and the values ​​of the parameters included in the optimized transfer function G(s) are obtained as the reference parameter values.

[0072] More specifically, the reference parameter value acquiring unit 11d fits the transfer function G(s) to the reference waveform data, and acquires a first parameter a ０ , b ０ , the second parameter a １, and the third parameter d ０ Each of the values ​​is taken as a reference parameter value.

[0073] The actual parameter value acquiring unit 11e acquires, as actual parameter values, the values ​​of parameters included in the transfer function G(s) that indicates the correlation between the target position data and the actual waveform data (S2).

[0074] The method for obtaining the actual parameter values ​​is not particularly limited, but one example is a method in which the transfer function G(s) is obtained by optimizing the transfer function G(s) using the target position data and the actual waveform data, and the value of each parameter included in the optimized transfer function G(s) is obtained as the actual parameter value.

[0075] More specifically, the actual parameter value acquiring unit 11e fits the transfer function G(s) to the actual waveform data, and acquires a first parameter a ０ , b ０ , the second parameter a １ , and the third parameter d ０ Each of the values ​​is obtained as an actual parameter value.

[0076] The actual parameter value acquiring unit 11e of this embodiment is configured to fit a transfer function G(s) to a transient section that appears in an actual waveform indicated by actual waveform data, as shown in Fig. 7. In Fig. 7, the solid line indicates the waveform of the actual waveform data, and the dotted line indicates the waveform of the fitting data.

[0077] The cause estimation unit 11f uses the actual waveform data and the reference waveform data to estimate the cause affecting the movement of the movable mirror 8 (hereinafter also referred to as the abnormal cause). Specifically, it estimates the abnormal cause using the actual parameter values ​​obtained using the actual waveform data and the reference parameter values ​​obtained using the reference waveform data.

[0078] The cause estimating unit 11f of this embodiment compares each actual parameter value with each reference parameter value (S3) and estimates the cause of the abnormality (S4).

[0079] To explain more specifically, the cause estimation unit 11f compares the values ​​of, for example, the first parameter acquired as the actual parameter value described above with the first parameter acquired as the reference parameter value, and if the difference is greater than or equal to a first threshold value, it estimates that an abnormality has occurred related to a deviation from the theoretical value of the driving force output from the moving mechanism 9 to the moving mirror 8.

[0080] Specifically, the cause of this abnormality may be, for example, an abnormality in the drive source that constitutes the moving mechanism 9, such as an abnormality related to the excitation force of the coil 9b.

[0081] In other words, when a difference of a first threshold value or more occurs between the value of the first parameter acquired as the actual parameter value and the value of the first parameter acquired as the reference parameter value, the cause estimation unit 11f of this embodiment estimates that an abnormality has occurred in the drive source or its surroundings, and outputs this information to a display or the like by announcing and / or displaying it.

[0082] In addition, the cause estimation unit 11f compares the values ​​of the second parameter acquired as the above-mentioned actual parameter value with the second parameter acquired as the reference parameter value, and if the difference is greater than or equal to a second threshold value, it estimates that an abnormality has occurred related to the frictional force generated by the movement of the movable mirror 8.

[0083] Specifically, the cause of this abnormality is, for example, the linear guide 9a that constitutes the moving mechanism 9 and / or the base 9c on which the moving mirror 8 is mounted, which becomes an abnormality, and examples of the cause include a lubricant such as grease that is interposed between the linear guide 9a and the base 9c.

[0084] In other words, when a difference of equal to or greater than the second threshold occurs between the value of the second parameter acquired as the actual parameter value and the value of the second parameter acquired as the reference parameter value, the cause estimation unit 11f of this embodiment estimates that an abnormality has occurred in the linear guide 9a, the base 9c, or their surroundings, and outputs this information to a display or the like by announcing and / or displaying it.

[0085] Furthermore, the cause estimation unit 11f compares the values ​​of the third parameter acquired as the above-mentioned actual parameter value with the third parameter acquired as the reference parameter value, and if the difference is greater than or equal to a third threshold value, it estimates that an abnormality has occurred that is related to the force constantly applied to the movable mirror 8 regardless of the position of the movable mirror 8 as it moves back and forth.

[0086] Specifically, the cause of this abnormality is, for example, the linear guide 9a that constitutes the moving mechanism 9 and / or the platform 9c on which the moving mirror 88 is mounted, which becomes an abnormality point, and examples of causes include the inclination of the platform 9c relative to the linear guide 9a and / or the inclination of the linear guide 9a itself.

[0087] In other words, when a difference of equal to or greater than the third threshold occurs between the value of the third parameter acquired as the actual parameter value and the value of the third parameter acquired as the reference parameter value, the cause estimation unit 11f of this embodiment estimates that an abnormality has occurred in the installation state of the base 9c relative to the linear guide 9a and / or the installation state of the linear guide 9a, and outputs this information to a display or the like by reporting and / or displaying it.

[0088] The first threshold, the second threshold, and the third threshold may be partially or entirely the same value, or partially or entirely different values.

[0089] As shown in FIG. 2, the control device 11 of this embodiment further includes a function as a cause output unit 11g that outputs the cause estimated by the cause estimation unit 11f.

[0090] The cause output unit 11g outputs and displays part or all of the results of estimation by the cause estimation unit 11f on a display or the like (S5).

[0091] Specifically, if the difference between the first parameter acquired as the actual parameter value and the first parameter acquired as the reference parameter value is greater than or equal to a first threshold value, the cause output unit 11g outputs information related to the driving source that constitutes the moving mechanism 9 as the cause of the abnormality.

[0092] In addition, if the difference between the second parameter acquired as the actual parameter value and the second parameter acquired as the reference parameter value is greater than or equal to a second threshold value, the cause output unit 11g outputs information related to the frictional force generated by the movement of the movable mirror 8 as the cause of the abnormality.

[0093] Furthermore, if the difference between the third parameter acquired as the actual parameter value and the third parameter acquired as the reference parameter value is equal to or greater than a third threshold value, the cause output unit 11g outputs information related to the force applied to the moving mirror 8 as the cause of the abnormality, regardless of the position of the moving mirror 8 moving back and forth.

[0094] The cause output unit 11 g may be configured to output an abnormality location based on the estimation result of the cause estimation unit 11 f. Examples of the abnormality location to be output include the moving mirror 8 and / or components constituting the moving mechanism 9 such as the drive source, the linear guide 9 a, the coil 9 b, and / or the base 9 c on which the moving mirror 8 is mounted.

[0095] According to the optical analysis device 1 configured in this manner, if there is a problem with the movement of the movable mirror 8, the actual waveform will deviate from the reference waveform in various ways depending on the cause of the abnormality in the device, and the cause estimation unit 11f can estimate the cause of the abnormality by using the actual waveform data and the reference waveform data.

[0096] More specifically, for example, it is possible to infer that the coil 9b that constitutes the moving mechanism 9 is the cause of the abnormality, or that the guide that supports the moving mirror 8 is the cause of the abnormality, or that the device has a tilted part or other such cause of the abnormality.

[0097] Furthermore, since the actual parameter value acquiring unit 11e acquires the actual parameter values ​​using the fitting waveform data, the accuracy of the acquired actual parameter values ​​is improved, and the cause can be more accurately estimated.

[0098] Incidentally, since the precision of constant velocity control is important in the FTIR interferometer 3, it is often thought that the waveform in the constant velocity control section of the moving mirror 8 is important. However, even if the deviation between the actual waveform and the reference waveform in the constant velocity control section is confirmed, the amount of information is small, making it difficult to infer the cause of the abnormality.

[0099] In contrast, the actual parameter value acquisition unit 11e of this embodiment fits the transient section included in the actual waveform indicated by the actual waveform data, and since this section corresponds to the section including the turning point of the movable mirror 8, it is possible to more accurately estimate the causes of various abnormalities.

[0100] The present invention is not limited to the above-described embodiment.

[0101] For example, the cause estimation unit 11f may be a unit that estimates the cause of an abnormality occurring in the moving mirror 8 by using actual waveform data that indicates the actual position of the moving mirror 8 at each time or that is determined from that position, and reference waveform data that indicates the target position of the moving mirror 8 at each time or that is determined from that target position. In addition, the movement control unit 11a in this case may be a unit that controls the position of the moving mechanism 9.

[0102] Specifically, the cause estimation unit 11f may estimate the cause of the abnormality using actual waveform data indicating the actual position of the movable mirror 8 at each time and reference waveform data indicating the target position of the movable mirror 8 at each time.

[0103] The cause estimation unit 11f may also estimate the cause of the abnormality using actual waveform data indicating the actual speed of the movable mirror 8 obtained from the actual position of the movable mirror 8 at each time, and reference waveform data indicating the speed of the movable mirror 8 obtained by calculation from the target position of the movable mirror 8 at each time. The optical analysis device 1 may also have a position sensor (not shown) that measures the position of the movable mirror 8.

[0104] The transfer function is not limited to that described in the above embodiment, and may be, for example, the coefficient of U(s) in the correlation equation expressed by the following equation (2), or may include the coefficient of U(s) and a constant term in the correlation equation expressed by the following equation (3), or may be any of various other equations.

[0105] In the above embodiment, the first parameter a ０ , b ０ , the second parameter a １ , and the third parameter d ０ For each of the values, the reference parameter value and the actual parameter value are compared. However, for example, the cause estimation unit 11f may estimate the cause using a combination of a plurality of actual parameter values.

[0106] A specific example is a two-dimensional map in which the value of the first parameter is set on one axis and the value of the second parameter is set on the other axis, and one or more abnormal regions corresponding to abnormalities in the movement of the movable mirror 8 are set.

[0107] In this configuration, the cause estimation unit 11f may estimate the presence or absence of an abnormality and the cause of the abnormality by comparing a combination of multiple actual parameter values ​​with the abnormality region. Note that the abnormality region may be set by combining three or more parameters, not limited to a combination of two parameters.

[0108] Furthermore, the cause estimation unit 11f may be configured to estimate the cause of an abnormality by applying a machine-learned model to the actual parameter values.

[0109] In addition, some or all of the actual waveform data acquisition unit 11b, the reference waveform data acquisition unit 11c, the reference parameter value acquisition unit 11d, the actual parameter value acquisition unit 11e, or the cause estimation unit 11f may be functions performed by a CPU separate from the movement control unit 11a.

[0110] Furthermore, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications are possible without departing from the spirit of the present invention.

[0111] According to the optical analysis device of the present invention described above, when a problem occurs in the movement of the movable mirror, it becomes possible to estimate the cause of the problem.

[0112] REFERENCE SIGNS LIST 1 Optical analysis device 2 Infrared light source 3 Interferometer 4 Measurement cell 5 Analysis section 6 Beam splitter 7 Fixed mirror 8 Moving mirror 9 Moving mechanism 9a Linear guide 9b Coil 9c Platform 10 Measurement section 11 Control device 11a Movement control section 11b Actual waveform data acquisition section 11c Reference waveform data acquisition section 11d Reference parameter value acquisition section 11e Actual parameter value acquisition section 11f Cause estimation section 11g Cause output section

Claims

1. An optical analyzer that analyzes a target component by guiding light emitted from a light source to a measurement cell and detecting light that has transmitted through the measurement cell, a moving mirror that reflects the light emitted from the light source while moving back and forth; a moving mechanism for reciprocating the moving mirror; a movement control unit that controls an applied voltage or an applied current to the movement mechanism; an optical analysis device comprising: a cause estimation unit that estimates the cause of an abnormality affecting the moving mirror using actual waveform data indicating the applied voltage or applied current to the moving mechanism at each time, and reference waveform data that has been acquired in advance and indicates the applied voltage or applied current to the moving mechanism at each time.

2. the cause estimation unit estimates, as the cause of the abnormality, information about a drive source constituting the moving mechanism, information about a frictional force generated by the movement of the moving mirror, or information about a force applied to the moving mirror regardless of the position of the moving mirror during reciprocating movement; The optical analysis device according to claim 1 , further comprising a cause output unit that outputs the cause estimated by the cause estimation unit.

3. a position of the movable mirror at each time and an applied current or applied voltage to the movable mechanism at each time can be expressed using a predetermined transfer function, and the transfer function includes a plurality of parameters corresponding to a plurality of types of causes; 3. The optical analysis device according to claim 1, wherein the cause estimation unit estimates the cause by comparing the values ​​of each parameter of the transfer function obtained using the reference waveform data with the values ​​of each parameter of the transfer function obtained using the actual waveform data.

4. The optical analysis device according to claim 3 , further comprising an actual parameter value acquisition unit that acquires actual parameter values, which are values ​​of parameters of the transfer function, by fitting the transfer function to the actual waveform data.

5. The optical analysis device according to claim 4 , wherein the actual parameter value acquisition unit fits the transfer function to a transient section included in the actual waveform indicated by the actual waveform data.

6. The optical analysis device of claim 3, wherein one of the plurality of parameters is a parameter that varies depending on the deviation of the driving force output from the moving mechanism to the movable mirror from its theoretical value, a parameter that varies depending on the frictional force generated by the movement of the movable mirror, or a parameter that varies depending on the force applied to the movable mirror regardless of the position of the movable mirror as it moves back and forth.

7. A method for analyzing a target component by guiding light emitted from a light source to a measurement cell and detecting the light transmitted through the measurement cell, the method being used in an optical analysis device comprising: a movable mirror that reflects the light emitted from the light source while moving back and forth; and a moving mechanism that moves the movable mirror back and forth, An optical analysis method for estimating the cause of an abnormality affecting the moving mirror using actual waveform data indicating the applied voltage or current to the moving mechanism at each time, and reference waveform data obtained in advance indicating the applied voltage or current to the moving mechanism at each time.

8. A program used in an optical analyzer that analyzes a target component by guiding light emitted from a light source to a measurement cell and detecting the light that has passed through the measurement cell, the program comprising: a movable mirror that reflects the light emitted from the light source while moving back and forth; and a moving mechanism that moves the movable mirror back and forth, A program for an optical analysis device that causes a computer to function as a cause estimation unit that estimates the cause of an abnormality affecting the moving mirror using actual waveform data that indicates the applied voltage or applied current to the moving mechanism at each time, and reference waveform data that has been acquired in advance and indicates the applied voltage or applied current to the moving mechanism at each time.

9. An optical analyzer that analyzes a target component by guiding light emitted from a light source to a measurement cell and detecting light that has transmitted through the measurement cell, a moving mirror that reflects the light emitted from the light source while moving back and forth; a moving mechanism for reciprocating the moving mirror; a movement control unit that controls the position of the movement mechanism; An optical analysis device comprising: a cause estimation unit that estimates the cause of an abnormality affecting the movable mirror using actual waveform data that indicates the position of the movable mirror at each time or that is determined from that position, and reference waveform data that indicates a target position of the movable mirror at each time that has been acquired in advance or that is determined from that target position.

10. An optical analyzer that analyzes a target component by guiding light emitted from a light source to a measurement cell and detecting light that has transmitted through the measurement cell, a moving mirror that reflects the light emitted from the light source while moving back and forth; a moving mechanism for reciprocating the moving mirror; a movement control unit that controls an applied voltage or an applied current to the movement mechanism; An optical analysis device comprising a comparison output unit that outputs actual waveform data indicating the applied voltage or applied current to the moving mechanism at each time and reference waveform data obtained in advance indicating the applied voltage or applied current to the moving mechanism at each time in a comparable manner.