Heat Treatment Furnace Equipment

Abstract

A heat treatment furnace apparatus according to an embodiment heats a storage container made of stainless steel that stores multiple ceramic metal substrates when brazing a metal plate to a ceramic substrate, and performs heat treatment on the multiple ceramic metal substrates at 600° C. or more and less than 950° C. The heat treatment furnace apparatus includes a rail section for transporting the storage container installed in the furnace body, and a transport means for transporting the storage container placed on the rail section in a predetermined transport direction along the rail section while moving the storage container in a direction perpendicular to the rail section.

Description

[Technical field]

[0001] The embodiment relates to a heat treatment furnace apparatus that performs heat treatment such as brazing on a ceramic substrate and a metal plate transported inside the furnace. [Background technology]

[0002] One method for manufacturing a ceramic-metal substrate is to print and dry a paste (e.g., brazing material) containing a metal such as silver, copper, or an active metal on a ceramic substrate, place a metal plate on the surface of the dried brazing material, and heat-treat the ceramic substrate and metal plate to bond them together (Patent Document 1). Hereinafter, for the sake of convenience, the ceramic substrate, brazing material, and metal plate before bonding as well as the ceramic substrate, brazing material, and metal plate after bonding will be referred to as the "ceramic-metal substrate." According to Patent Document 1, 10 -3 The metal plates are joined by heating at temperatures between 700℃ and 950℃ for 10 minutes or more under reduced pressure of less than 10 Pa.

[0003] Also, a mesh belt conveyor type brazing furnace has been disclosed in which a base material and a brazing material are transported into the furnace by a mesh belt conveyor, and the brazing material is melted in a heating chamber to perform brazing (Patent Document 2). According to Patent Document 2, in the furnace transport section on the furnace entrance side of the melting zone where the brazing material in the heating chamber is melted, the mesh belt of the mesh belt conveyor is supported by a hearth roll, thereby reducing the frictional resistance applied to the mesh belt.

[0004] Also, ceramic storage containers but A method for moving a workpiece storage container in a heating furnace without contacting the surface has been disclosed (Patent Document 3). According to Patent Document 3, a rail section for transporting the workpiece storage container installed in the furnace body and the workpiece storage container placed on the rail section are transported in a predetermined transport direction along the rail section while moving in a vertical direction relative to the rail section, so that the storage container can be transported with almost no load. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 7240511 [Patent Document 2] Japanese Patent Application Publication No. 9-150261 [Patent Document 3] Patent No. 4179714 Summary of the Invention [Problem to be solved by the invention]

[0006] In conventional heat treatment furnaces for brazing, containers loaded with ceramic metal substrates are transported by a mesh belt. Because the mesh belt slides on a pedestal while being transported, abrasion powder generated by the mesh belt and the pedestal adheres to the ceramic metal substrates, lowering the yield of the ceramic metal substrates.

[0007] In addition, the weight of the ceramic metal substrate and the container generates tension in the mesh belt, which causes the mesh belt to stretch and deform, necessitating replacement, and increasing the equipment costs of the heat treatment furnace.

[0008] Furthermore, the storage container is larger than the ceramic metal substrate because it is placed with plenty of space in all directions when the ceramic metal substrate is placed in it. For this reason, if the ceramic metal substrate is placed approximately in the center of the bottom surface of the storage container and heat treatment is repeated, the bottom plate of the metal storage container is likely to deform downward into a convex shape. A storage container with a convex bottom plate is likely to rotate around the convex part, which causes misalignment during transportation and stops during transportation inside a furnace.

[0009] For this reason, there is a demand for a system that allows a container made of metal such as stainless steel, in which ceramic metal substrates are stored, to be transported in a heat treatment furnace with almost no load on the container, thereby reducing the equipment cost of the heat treatment furnace, improving the yield of ceramic metal substrates, and improving the production efficiency of ceramic metal substrates. [Means for solving the problem]

[0010] A heat treatment furnace apparatus according to an embodiment heats a ceramic metal substrate storage container (hereinafter, abbreviated as "storage container") made of stainless steel in which a plurality of ceramic metal substrates are stored, and performs a heat treatment on the plurality of ceramic metal substrates at 600° C. or more and less than 950° C., when brazing a metal plate to a ceramic substrate. The heat treatment furnace apparatus includes a rail section for transporting the storage container installed in the furnace body, and a transport means for transporting the storage container placed on the rail section in a predetermined transport direction along the rail section while moving the storage container in a direction perpendicular to the rail section.

[0011] In addition, in the heat treatment furnace apparatus, the transport means includes a first moving means that moves the storage container along the transport direction, and a second moving means that moves the storage container and the first moving means together in a vertical direction.

[0012] Furthermore, in the heat treatment furnace apparatus, the first moving means includes a container support plate for supporting the storage container, a support member for supporting the container support plate, and a first moving mechanism for moving the support member along the transport direction, and the second moving means includes a support plate for supporting the support member movably along the transport direction, and a second moving mechanism for raising and lowering the support plate.

[0013] Furthermore, in the heat treatment furnace apparatus, a rail section is provided with a space that vertically penetrates the central part of the rail section and is formed along the transport direction, the space above the rail section is configured as the transport space for the storage container, and the upper surface of the rail section is configured as the mounting surface for the storage container.

[0014] In addition, in this heat treatment furnace apparatus, the container support plate is supported by the support member in a state where it is inserted into the space of the rail section so that the upper surface of the container support plate is parallel to the storage container mounting surface of the rail section.

[0015] Furthermore, in the heat treatment furnace apparatus, the rail section includes an endless looped inlet side chain belt section and a drive section for circulating the inlet side chain belt section, and includes an inlet side chain belt mechanism in which a downstream end of the conveying surface of the inlet side chain belt section is connected to an upstream end of the storage container mounting surface of the rail section and the conveying surface of the first chain belt section is arranged along the storage container mounting surface. The rail section includes an endless looped outlet side chain belt section and a drive section for circulating the outlet side chain belt section, and includes an outlet side chain belt mechanism in which an upstream end of the conveying surface of the outlet side chain belt section is connected to a downstream end of the storage container mounting surface of the rail section and the conveying surface of the outlet side chain belt section is arranged along the storage container mounting surface. Furthermore, the container support plate is configured such that when the height of the upper surface of the container support plate is equal to the height of the storage container mounting surface of the rail section, the upstream end of the upper surface of the container support plate overlaps the downstream end of the conveying surface of the inlet side chain belt section. The container support plate is configured such that the downstream end of the upper surface of the container support plate overlaps with the upstream end of the conveying surface of the outlet-side chain belt portion. [Brief description of the drawings]

[0016] [Figure 1] FIG. 2 is a plan view showing a heat treatment furnace apparatus according to the embodiment. [Diagram 2] 2 is a cross-sectional view taken along line II-II in FIG. 3 in the heat treatment furnace apparatus shown in FIG. 1. [Diagram 3] 3 is a cross-sectional view taken along line III-III in FIG. 2 in the heat treatment furnace apparatus shown in FIG. 1. [Figure 4] FIG. 2 is a diagram showing a storage container constituting the heat treatment furnace apparatus according to the embodiment. [Diagram 5]3 is a cross-sectional view of the heat treatment furnace apparatus shown in FIG. 2, showing a state in which the storage container has been moved to a container placement surface. [Figure 6] 4 is a cross-sectional view of the heat treatment furnace apparatus shown in FIG. 3, showing a state in which the storage container has been moved to a container placement surface. [Figure 7] 3 is a cross-sectional view of the heat treatment furnace apparatus shown in FIG. 2, illustrating a state in which a storage container is supported on a container placement surface and a container support surface. [Figure 8] 4 is a cross-sectional view of the heat treatment furnace apparatus shown in FIG. 3, showing a state in which a storage container is supported on a container placement surface and a container support surface. [Figure 9] 3 is a cross-sectional view of the heat treatment furnace apparatus shown in FIG. 2, showing a state in which the storage container is supported only by the container support surface. [Figure 10] 4 is a cross-sectional view of the heat treatment furnace apparatus shown in FIG. 3, showing a state in which the storage container is supported only by the container support surface. [Figure 11] 11 is a cross-sectional view of the heat treatment furnace apparatus shown in FIG. 3, illustrating a state in which the storage container has been moved together with the container support plate along the transport direction from the state shown in FIG. 10. FIG. [Figure 12] This is a cross-sectional view corresponding to the cross-section of the heat treatment furnace apparatus shown in Figure 3, showing a state in which the storage container has been lowered together with the container support plate from the state shown in Figure 11, and the storage container is supported on the container mounting surface of the rail section and the container support surface of the container support plate. [Figure 13] This is a cross-sectional view corresponding to the cross-section of the heat treatment furnace apparatus shown in Figure 3, showing a state in which the storage container has been lowered together with the container support plate from the state shown in Figure 10, and the height of the container support surface of the container support plate has become lower than the height of the container mounting surface of the rail section. [Figure 14] FIG. 11 is a cross-sectional view showing an inner vessel transport unit of a heat treatment furnace apparatus according to a second embodiment. [Figure 15] FIG. 1 is a diagram showing a conventional belt-type heat treatment furnace. Embodiment

[0017] A heat treatment furnace apparatus according to an embodiment heats a storage container made of stainless steel that stores multiple ceramic metal substrates when brazing a metal plate to a ceramic substrate, and performs a heat treatment on the multiple ceramic metal substrates at 600° C. or more and less than 950° C. The heat treatment furnace apparatus includes a rail section for transporting the storage container installed in the furnace body, and a transport means for transporting the storage container placed on the rail section in a predetermined transport direction along the rail section while moving the storage container in a direction perpendicular to the rail section.

[0018] In addition, in the heat treatment furnace apparatus, the transport means includes a first moving means that moves the storage container along the transport direction, and a second moving means that moves the storage container and the first moving means together in a vertical direction.

[0019] Furthermore, in the heat treatment furnace apparatus, the first moving means includes a container support plate for supporting the storage container, a support member for supporting the container support plate, and a first moving mechanism for moving the support member along the transport direction, and the second moving means includes a support plate for supporting the support member movably along the transport direction, and a second moving mechanism for raising and lowering the support plate.

[0020] Furthermore, in the heat treatment furnace apparatus, a rail section is provided with a space that vertically penetrates the central part of the rail section and is formed along the transport direction, the upper space of the rail section is configured as the transport space for the storage container, and the upper surface of the rail section is configured as the mounting surface for the storage container.

[0021] In addition, in this heat treatment furnace apparatus, the container support plate is supported by the support member in a state where it is inserted into the space of the rail section so that the upper surface of the container support plate is parallel to the storage container mounting surface of the rail section.

[0022] In the heat treatment furnace apparatus, the rail section includes an endless looped inlet-side chain belt section and an inlet-side chain belt mechanism having a drive section for circulating the inlet-side chain belt section, a downstream end of the conveying surface of the inlet-side chain belt section connected to an upstream end of the storage container mounting surface of the rail section, and the conveying surface of the inlet-side chain belt section is arranged along the storage container mounting surface. The rail section includes an endless looped outlet-side chain belt section and an outlet-side chain belt mechanism having a drive section for circulating the outlet-side chain belt section, a downstream end of the conveying surface of the outlet-side chain belt section connected to a downstream end of the storage container mounting surface of the rail section, and the conveying surface of the outlet-side chain belt section is arranged along the storage container mounting surface. Furthermore, the container support plate is configured such that when the height of the upper surface of the container support plate is equal to the height of the storage container mounting surface of the rail section, the upstream end of the upper surface of the container support plate overlaps the downstream end of the conveying surface of the inlet-side chain belt section. The container support plate is configured such that the downstream end of the upper surface of the container support plate overlaps with the upstream end of the conveying surface of the outlet-side chain belt portion.

[0023] In the heat treatment furnace apparatus, it is preferable that the inlet side chain belt section and the outlet side chain belt section have a space that passes through the center section in the vertical direction. When such a space is provided, the space of the inlet side chain belt section has an inlet side lifting platform connected to an inlet side lifting cylinder, and is at the same height as the loading section of an inlet side loading mechanism that is located higher than the upper surface of the inlet side chain belt section, and is equipped with a mechanism for transporting the storage container from the loading section and positioning the storage container on the inlet side chain belt section by lowering the inlet side lifting cylinder. Furthermore, when such a space is provided, the space of the outlet side chain belt section has an inlet side lifting platform connected to an outlet side lifting cylinder, and is at the same height as the loading section of an inlet side loading mechanism that is located higher than the upper surface of the inlet side chain belt section, and is equipped with a mechanism for transporting the storage container from the loading section and positioning the storage container on the inlet side chain belt section by lowering the inlet side lifting cylinder. RThe storage container is configured to be transported to the discharge section by raising the exit side lifting platform, which is located downstream of the exit side chain belt section and lower than the upper surface of the exit side chain belt section, by the exit side lifting cylinder, so that the exit side lifting platform is at the same height as the discharge section of the exit side discharge mechanism, and the storage container is transported to the discharge section.

[0024] Furthermore, in the heat treatment furnace apparatus, it is preferable that the transport means is a means for moving the storage container so as to describe a square pulse-shaped trajectory while placing the storage container on the rail portion with a required interval therebetween.

[0025] In addition, the heat treatment furnace apparatus is preferably configured such that an inert gas atmosphere is present inside the furnace body, and the inert gas is caused to flow into the furnace body from the outside and caused to flow out of the furnace body.

[0026] Furthermore, in the heat treatment furnace apparatus, it is preferable that the second moving mechanism has a link mechanism for raising and lowering the support plate with its support surface parallel to the transport direction, and is configured to raise and lower the support plate via the link mechanism by reciprocating the support plate parallel to the transport direction.

[0027] In the heat treatment furnace apparatus, the second moving mechanism preferably includes a moving mechanism support plate that is provided to be movable along the transport direction relative to the furnace body, a plurality of convex portions that are provided at predetermined intervals along the transport direction on the base surface of the moving mechanism, each having an upstream end that protrudes upward and an inclined surface that inclines upward toward an end that protrudes from the downstream end of the base surface, and a plurality of rollers that are rotatably connected to the moving mechanism support plate and reciprocate while rotating on the inclined surfaces of the convex portions on the upper surface of the base surface. Furthermore, in the heat treatment furnace apparatus, it is preferable that the moving mechanism support plate is reciprocated parallel to the transport direction, so that the moving mechanism support plate is raised and lowered together with the rollers by reciprocating along the inclined surfaces of the rollers while maintaining the support surfaces parallel to the transport direction.

[0028] In the heat treatment furnace apparatus, the heater is installed vertically on the outer side surface of the furnace body, and the heater is positioned on the rail portion. of Preferably, it is configured to be at a height.

[0029] Moreover, it is preferable that the heat treatment furnace apparatus includes the storage container, and a hole is formed in a bottom portion of the storage container so as to include a central portion thereof.

[0030] According to the heat treatment furnace apparatus as described above, the storage container containing a plurality of ceramic metal substrates can be transported in the furnace body in a substantially unloaded state without sliding on the rail section, and the storage container in the unloaded transported state can be subjected to heat treatment. Therefore, according to the heat treatment furnace apparatus, friction and wear between the storage container and the container mounting surface of the rail section can be avoided. As a result, it is no longer necessary to replace the worn mesh belt or rail section, which occurred in the conventional heat treatment furnace, and the equipment cost of the heat treatment furnace apparatus can be dramatically reduced.

[0031] Furthermore, according to the heat treatment furnace apparatus as described above, since no friction or wear occurs between the storage container and the container mounting surface of the rail portion, it is possible to prevent abrasion powder generated by wear between the storage container and the rail portion from adhering to the ceramic metal substrate, thereby maintaining a high yield of ceramic metal substrates.

[0032] Furthermore, according to the heat treatment furnace apparatus described above, the storage containers can be transported under almost no load, eliminating the need to replace belts due to stretching as occurs with conventional belt systems, thereby reducing maintenance costs.

[0033] The above-mentioned heat treatment furnace apparatus will be described in detail with reference to the attached drawings. In this embodiment, the heat treatment furnace apparatus will be described as a brazing furnace apparatus that heats a ceramic metal substrate in brazing.

[0034] FIG. 1 is a plan view of the heat treatment furnace apparatus according to the embodiment, as seen from above. FIG. 2 is a view showing a cross section of the heat treatment furnace apparatus shown in FIG. 1, taken along the line II-II in FIG. 3. FIG. 3 is a view showing a cross section of the heat treatment furnace apparatus shown in FIG. 1, taken along the line III-III in FIG. 2. FIG. 4 is a plan view and a side view of a storage container constituting the heat treatment furnace apparatus shown in FIG. 1. FIG. 1 shows a heat treatment furnace apparatus 1 according to the embodiment. The heat treatment furnace apparatus 1 includes an outer wall 4, an inlet side carry-in mechanism 15, and an outlet side carry-out mechanism 16. The outer wall 4 includes a walking hearth type heating furnace. The walking hearth type heating furnace has the following features: since the material is transported by a moving hearth, the material does not rub against the hearth, unlike a pusher furnace, and sliding scratches do not occur; and since there is no heating mechanism in the lower part of the furnace, the structure is simpler than that of a walking beam furnace. The inlet side carry-in mechanism 15 is provided with opening and closing mechanisms 56, 57, and a pusher 58. The outlet side discharge mechanism 16 includes opening / closing mechanisms 66 and 67 and a pusher 68 .

[0035] 1 to 4, in the heat treatment furnace apparatus 1, a plurality of ceramic metal substrates 3 before bonding are placed in a storage container 2 made of stainless steel or the like that has been transported from a printing, drying and metal plate installation process (not shown). For example, the heat treatment furnace apparatus 1 is an apparatus that performs heat treatment on a ceramic metal substrate 3 in which an active metal brazing material containing silver or copper is printed and dried on the front and back surfaces of a ceramic substrate such as silicon nitride, and a metal plate such as a copper plate is further placed on the front and back surfaces. The storage container 2 may be a part of the configuration of the heat treatment furnace apparatus 1, or may be an external configuration of the heat treatment furnace apparatus 1. The ceramic metal substrate 3 is an external configuration of the heat treatment furnace apparatus 1.

[0036] As shown in FIG. 2, the heat treatment furnace apparatus 1 is composed of an outer wall 4, a heater 5 for heating the ceramic metal substrate 3, a furnace body 6, a rail section 7, and an inner vessel transport unit 8 as a transport means. The furnace body 6 has an inert gas atmosphere. The rail section 7 is for transporting the storage container 2 for the ceramic metal substrate 3, which is installed along a horizontal plane in the furnace body 6, into the furnace. The inner vessel transport unit 8 is provided in the furnace body 6, and for transporting the storage container 2 in which the ceramic metal substrate 3 is stored, along the longitudinal direction of the rail section 7, which is the transport direction of the ceramic metal substrate 3, and within the furnace body 6 while placing the storage container 2 on the rail section 7 at required intervals. The furnace body 6 is provided inside the outer wall 4 so as to cover the storage container 2 to be transported. In addition, the outer periphery of the furnace body 6 is preferably arranged near the storage container 2 from the viewpoint of the efficiency of heating the ceramic metal substrate 3. For example, the outer periphery of the furnace body 6 is preferably provided inside the heater 5. The inert gas is configured to enter through a predetermined gas inlet and be discharged from a predetermined gas outlet in the furnace body 6. The heat treatment atmosphere of the heat treatment furnace apparatus 1 according to this embodiment is not limited to an inert atmosphere as long as it does not interfere with the brazing process, and may be a reducing atmosphere such as hydrogen, or the air or a vacuum.

[0037] As shown in Figure 3, the furnace body 6 is equipped with a furnace inlet section 10 which serves as an entrance when the storage container 2 is loaded into the furnace body 6, a furnace outlet section 11 which serves as an exit when the storage container 2 is loaded out of the furnace body 6, a heating section 12 connected to the furnace inlet section 10, and a cooling section 13 for cooling the ceramic metal substrate 3 in the storage container 2.

[0038] 2, a heater 5 is attached in the vertical direction to the outer wall side of the heating section 12 of the furnace body 6. The ceramic metal substrate 3 in the storage container 2 that has been transferred into the heating section 12 through the furnace inlet section 10 is heated by the heater 5, thereby brazing and joining the ceramic substrate and the metal plate that constitute the ceramic metal substrate 3.

[0039] For the ceramic metal substrate 3, a ceramic substrate with a larger area is used in order to improve productivity. Furthermore, in order to place and bond a metal plate with an area similar to that of the ceramic substrate, it is necessary to uniformly heat the peripheral and central parts of the ceramic metal substrate 3. For this reason, it is preferable that the heater 5 heats from the side when the storage container 2 is placed on the container mounting surface 7a. Furthermore, it is preferable that the heater 5 extends to the side of the rail portion 7 and heats from below the bottom surface of the storage container 2.

[0040] A predetermined region of the heating section 12 on the furnace inlet section 10 side is configured as a preheating section for preheating the ceramic metal substrate 3, and the remaining region is configured as a bonding zone for bonding the ceramic metal substrate 3. In the heat treatment for brazing bonding performed in this embodiment, heating is performed by the heater 5 so that the temperature of the preheating zone is 400°C or more and less than 700°C, and the temperature of the bonding zone is 600°C or more and less than 950°C. At this time, the heat treatment temperature is appropriately selected depending on the metal material forming the brazing layer, and the temperature difference between the preheating zone and the bonding zone is 100°C or more, preferably in the range of 100°C or more and 200°C or less.

[0041] Furthermore, the cooling section 13 of the furnace body 6 has an upstream end (hereinafter abbreviated as "upstream side") in the conveying direction connected to the heating section 12, and a downstream end (hereinafter abbreviated as "downstream side") connected to the furnace outlet section 11. The cooling section 13 cools the ceramic metal substrate 3 in the storage container 2 that has been heated in the heating section 12.

[0042] 1 carries a storage container 2 having a plurality of ceramic metal substrates 3 transported via a transport conveyor (not shown) or the like into the furnace entrance 10 and places it on the upstream end of the entrance chain belt mechanism 23 on the rail section 7. The exit carry-out mechanism 16 carries the storage container 2 located at the downstream end of the rail section 7 out of the furnace exit 11 and places it on a transport conveyor (not shown) or the like for the next process.

[0043] In FIG. 3, the rail section 7 is provided with an entrance-side chain belt mechanism 23 and an exit-side chain belt mechanism 30. The entrance-side chain belt mechanism 23 has an endless loop-shaped entrance-side chain belt section 20 and a drive section 21 such as a roller that drives the entrance-side chain belt section 20 in a circulating manner. The entrance-side chain belt mechanism 23 is disposed so that an entrance-side conveying surface 20a, which is the upper surface of the entrance-side chain belt section 20, is aligned along a horizontal plane. The exit-side chain belt mechanism 30 has an endless loop-shaped exit-side chain belt section 28 and a drive section 29 such as a roller that drives the exit-side chain belt section 28 in a circulating manner. The exit-side chain belt mechanism 30 is disposed so that an exit-side conveying surface 28a, which is the upper surface of the exit-side chain belt section 28, is aligned along a horizontal plane.

[0044] An entrance side lifting platform 90 connected to an entrance side lifting cylinder (not shown) is installed in the space of the entrance side chain belt section 20 on the opposite side to the drive section 21. The entrance side lifting platform upper surface 90a is moved vertically (up and down) between the entrance side chain belt sections 20 by the entrance side lifting cylinder. Also, an exit side lifting platform 91 connected to an exit side lifting cylinder (not shown) is installed in the space of the exit side chain belt section 28 on the opposite side to the drive section 29. The exit side lifting platform upper surface 91a is moved vertically between the exit side chain belt sections 28 by the exit side lifting cylinder to the exit side conveying surface 28a.

[0045] The downstream end of the inlet transport surface 20a is disposed near the upstream end of the heating section 12 and at a predetermined position upstream of the upstream end. A first photoelectric sensor (not shown) is installed in the furnace body 6 to detect whether or not the storage container 2 is present at the downstream end of the inlet transport surface 20a.

[0046] 2 and 3, the rail section 7 has an upstream end connected to the downstream end of the inlet-side conveying surface 20a, and is provided with a rail section 7 provided to the furnace body 6 so that the container placement surface 7a is along the inlet-side conveying surface 20a. The rail section 7 is disposed so that its downstream tip reaches a position corresponding to the downstream end of the cooling section 13 in the furnace body 6.

[0047] The rail section 7 is provided with an outlet-side chain belt mechanism 30 in which the upstream end of the outlet-side conveying surface 28a is connected to the downstream end of the rail section 7 and the outlet-side conveying surface 28a is disposed along the container placement surface 7a. A second photoelectric sensor (not shown) is provided in the furnace body 6 for detecting whether or not a storage container 2 is present at the upstream end of the outlet-side conveying surface 28a.

[0048] The storage container 2 has a bottom surface 2c (shown in FIG. 4) placed on a rail portion 7 or the like, on which a plurality of ceramic metal substrates 3 are placed. The storage container 2 may be made of any material that is heat resistant, inexpensive, and easy to process, and is preferably made of stainless steel.

[0049] 4 shows (A) a perspective view, (B) a bottom view, and (C) a side view of the storage container 2. As shown in the bottom view, a hole 2d is formed in the bottom surface 2c of the storage container 2 so as to include the center C of the bottom surface 2c. The storage container 2 is designed to be larger than the ceramic metal substrate 3 so that there is ample space in all directions when the ceramic metal substrate 3 is placed. For this reason, if the ceramic metal substrate 3 is placed in the center C of the bottom surface 2c and heat treatment is repeated, the bottom surface 2c of a metal storage container 2 is likely to deform into a downward convex shape.

[0050] In the heat treatment furnace apparatus 1 according to this embodiment, the storage container 2 storing the ceramic metal substrates 3 can be made heavier than the conventional belt furnace. However, as the storage container 2 becomes heavier, the deformation of the bottom surface portion 2c becomes greater. For this reason, a hole 2d is provided in the bottom surface portion 2c so as to include the center portion C, thereby preventing the bottom surface portion 2c from deforming into a convex shape. Furthermore, by providing the hole 2d in the bottom surface portion 2c, even if the bottom surface portion 2c deforms into a convex shape, the presence of the hole 2d prevents the deformation from concentrating at one point, and rotation around the convex portion can be prevented.

[0051] The hole 2d shown in FIG. 4 is circular, but is not limited to this case. For example, the hole 2d may have no corners and may be elliptical or rectangular with rounded corners. In this case, it is preferable that the diameter of the hole 2d is 15% to 70% of the length of the short side of the bottom surface 2c. The hole 2d is rectangular. In this case, the ratio of the opening to the length of the corresponding side is used. If this ratio is less than 15%, a sufficient effect in preventing deformation is not obtained. Also, if the ratio is more than 70%, the overall strength of the storage container 2 decreases.

[0052] Furthermore, the storage container 2 of the heat treatment furnace apparatus 1 according to this embodiment is not directly transported from the inlet-side carry-in mechanism 15 to the inlet-side transport surface 20a, but is moved to the inlet-side lifting platform 90 and then transported to the inlet-side transport surface 20a. Therefore, even if a hole 2d is provided in the storage container 2, the storage container 2 can move without the hole 2d getting caught by the chain belt. Similarly, when the storage container 2 moves from the outlet-side transport surface 28a to the outlet-side carry-out mechanism 16 via the outlet-side lifting platform 91, the storage container 2 can move without the hole 2d getting caught.

[0053] In FIG. 2, the rail portion 7 has a substantially rectangular cross section perpendicular to the conveying direction, and a gap 36 that is a gap that penetrates the central part of the rectangle in the vertical direction is formed along the conveying direction.

[0054] The upper surface of the rail portion 7 is disposed as a container mounting surface 7a so as to be parallel to and connected to the inlet side conveying surface 20a of the inlet side chain belt mechanism 23 and the outlet side conveying surface 28a of the outlet side chain belt mechanism 30, respectively.

[0055] 2 and 3, the inner vessel transport unit 8 includes a first moving mechanism 40, a second moving mechanism 41, and a heat-resistant plate for supporting the storage vessel (hereinafter, abbreviated as "vessel support plate") 42. The first moving mechanism 40 moves the storage vessel 2 in a vertical direction (up and down direction) relative to a base part 8a of the inner vessel transport unit 8. The second moving mechanism 41 moves in the vertical direction in response to the vertical movement of the first moving mechanism 40, and Container support plate 42 The container support plate 42 is supported by the second moving mechanism 41 in the vertical direction.

[0056] In Figure 2, the container support plate 42 is inserted into the gap 36 along the conveying direction of the rail section 7 so that its upper surface (hereinafter abbreviated as "container support surface") 42a is parallel to the container mounting surface 7a of the rail section 7, and is supported by the second moving mechanism 41.

[0057] In Fig. 3, the first moving mechanism 40 is configured by attaching a moving mechanism support plate 45 having a second moving mechanism supporting surface (hereinafter abbreviated as "moving mechanism support surface") parallel to the conveying direction to a base portion 8a. The first moving mechanism 40 includes a link mechanism 46 and a first hydraulic cylinder 47. The link mechanism 46 raises and lowers the moving mechanism support plate 45 with its moving mechanism support surface 45a parallel to the conveying direction. The first hydraulic cylinder 47 reciprocates the moving mechanism support plate 45 parallel to the conveying direction by the reciprocation of a piston 47a.

[0058] 3, the second moving mechanism 41 includes a support member 50 for supporting the container support plate, and a second hydraulic cylinder 51. The support member 50 is attached to a moving mechanism support surface 45a of the moving mechanism support plate 45 in the first moving mechanism 40 via a plurality of rollers 49 so as to be freely reciprocable along the conveying direction. The second hydraulic cylinder 51 reciprocates the support member 50 in parallel to the conveying direction by the reciprocation of a piston 51a.

[0059] Furthermore, the first hydraulic cylinder 47 and the second hydraulic cylinder 51 are each provided with a limit switch (LS) 53. The limit switch 53 detects the piston strokes of the first hydraulic cylinder 47 and the second hydraulic cylinder 51, thereby enabling it to detect the moving position in the vertical direction and the moving position in the conveying direction of the container support plate 42 based on the driving of the first moving mechanism 40 and the second moving mechanism 41, respectively.

[0060] When the height of the container support surface 42a of the container support plate 42 matches the height of the container mounting surface 7a of the rail section 7, the upstream end of the container support surface 42a overlaps with the downstream end of the inlet side conveying surface 20a, and the downstream end of the container support surface 42a overlaps with the upstream end of the outlet side conveying surface 28a.

[0061] In FIG. 1, the entrance side carry-in mechanism 15 is configured to carry the storage container 2, which has been carried by a transport rail or the like, into the heat treatment furnace, and is configured to communicate with the entrance side chain belt section 20. At this time, it is preferable that opening and closing mechanisms 56, 57, such as shutters, are provided so that the atmosphere in the heat treatment furnace does not leak to the outside. The opening and closing mechanisms 56, 57 are opened and closed by a drive cylinder. The exit side carry-out mechanism 16 is also configured to carry the storage container 2, which has been carried by a transport rail or the like, into the heat treatment furnace, and is configured to communicate with the entrance side chain belt section 20. Delivery mechanism 15 Similarly, it is preferable that the conveyor rail, the opening and closing mechanism 66, 67, the drive cylinder, etc. are provided.

[0062] Next, the overall operation of the heat treatment furnace apparatus 1 according to the embodiment will be described, focusing on the transport operation of the storage container 2.

[0063] First, the operation of carrying the storage container 2 into the heat treatment furnace apparatus 1 will be described.

[0064] The storage containers 2, which store multiple ceramic metal substrates 3 in multiple tiers, are transported in sequence via the transport rails by the operation of the transport conveyor to the inlet side carry-in mechanism 15 of the heat treatment furnace 1. At this time, the opening / closing mechanism 57 of the inlet side carry-in mechanism 15 is closed, and the opening / closing mechanism 56 is open.

[0065] Then, when the leading storage container 2 enters the inlet-side carry-in mechanism 15, the opening / closing mechanism 56 closes, and the inside of the inlet-side carry-in mechanism 15 is replaced with, for example, nitrogen, and then the opening / closing mechanism 57 opens. This prevents the atmosphere inside the heat treatment furnace 1 from leaking to the outside. Next, the storage container 2 in the inlet-side carry-in mechanism 15 is moved onto the inlet-side lifting platform 90 of the furnace inlet section 10 by the pusher 58. At this time, the inlet-side lifting platform 90 is raised, and the inlet-side lifting platform upper surface 90a is in a higher position than the inlet-side conveying surface 20a (this state is not shown). The pusher 58 returns and the opening / closing mechanism 57 closes. Next, the inlet-side lifting platform 90 descends, and in the process of the inlet-side lifting platform upper surface 90a becoming lower than the inlet-side conveying surface 20a, the storage container 2 placed on the inlet-side lifting platform upper surface 90a is placed on the upstream end of the inlet-side conveying surface 20a.

[0066] Next, the inlet chain belt section 20 is circulated via the drive section 21 to move the storage container 2 placed on the upstream end of the inlet conveying surface 20a to the downstream end of the inlet conveying surface 20a. That is, the storage container 2 is moved to the upstream end of the container placement surface 7a of the overlapped rail section 7.

[0067] Next, when the storage container 2 is transported by the operation of the furnace container transport unit 8 and moves from the downstream end of the inlet-side transport surface 20a, which is the detection position of the first photoelectric sensor (not shown), the first photoelectric sensor transmits a container carry-in command signal. This causes a control operation to be executed, and the storage container 2 is carried into the heat treatment furnace apparatus 1. Thereafter, each time a container carry-in command signal is transmitted from the first photoelectric sensor, multiple storage containers 2 are carried into the heat treatment furnace apparatus 1 in sequence.

[0068] Next, the transport operation of the storage container 2 in the heat treatment furnace apparatus 1 will be described.

[0069] 5 and 6 are cross-sectional views of the heat treatment furnace apparatus 1 corresponding to FIGS. 2 and 3 in a state in which the storage container 2a of the storage container 2 has been moved onto the container placement surface 7a of the rail section 7 by the container carry-in operation process.

[0070] 5 and 6, when the storage container 2a is moved onto the container mounting surface 7a, the moving mechanism support plate 45 of the first moving mechanism 40 is lowered to a predetermined position, and the container supporting surface 42a is located at a position lower than the container mounting surface 7a. The height of the container supporting surface 42a at this time is designated as H1.

[0071] Therefore, all storage containers 2 including storage container 2a are placed on the container placement surface 7a of the rail section 7. In this case, the storage container located most downstream is designated by the reference symbol "2b."

[0072] In this pre-transport state of the storage container 2, the first hydraulic cylinder 47 is driven to move the piston 47a in the opposite direction to the transport direction (upstream side). As a result, the movement mechanism support plate 45 is raised by the operation of the link mechanism 46 with the movement mechanism support surface 45a in a state parallel to the transport direction.

[0073] In response to the rise of the movement mechanism support plate 45, the second movement mechanism 41 rises integrally with the movement mechanism support plate 45, and the container support plate 42 supported by the support member 50 of the second movement mechanism 41 also rises integrally with the movement mechanism support plate 45.

[0074] When the container support plate 42 is raised so that the height of its container support surface 42a coincides with the height of the container mounting surface 7a, the storage container 2 placed on the container mounting surface 7a is supported by the container support surface 42a of the container support plate 42. The height of the container support surface 42a at this time is designated as H2 (shown in FIG. 9).

[0075] 7 and 8 are cross-sectional views of the heat treatment furnace apparatus 1 corresponding to FIGS. 2 and 3 in a state in which the storage container 2a is supported on the container mounting surface 7a of the rail portion 7 and the container supporting surface 42a of the container supporting plate 42. FIG.

[0076] In Figures 7 and 8, when the storage container 2 is supported on the container mounting surface 7a of the rail section 7 and the container support surface 42a of the container support plate 42, the first hydraulic cylinder 47 is driven to move the piston 47a in the opposite direction of the conveying direction, thereby further lifting the moving mechanism support plate 45.

[0077] As the moving mechanism support plate 45 rises, the container support plate 42 also rises together with the moving mechanism support plate 45, and the height of the container support surface 42a of the container support plate 42 rises above the height of the container mounting surface 7a of the rail portion 7. All of the storage containers 2 that were placed on the container mounting surface 7a are separated from the container mounting surface 7a and are supported only by the container supporting surface 42a of the container support plate 42.

[0078] When the piston stroke amount of the first hydraulic cylinder 47 detected by the limit switch detects that the storage container 2 has separated from the container mounting surface 7a and the container support surface 42a has risen to a predetermined position (height H3), the drive of the first hydraulic cylinder 47 is stopped and the rise of the container support plate 42 and the storage container 2 is stopped.

[0079] Figures 9 and 10 show cross-sectional views of the heat treatment furnace apparatus 1 corresponding to Figures 2 and 3 in a state in which the storage container 2a has moved away from the container mounting surface 7a of the rail portion 7 due to the rising of the container support plate 42 and is supported only by the container support surface 42a of the container support plate 42.

[0080] 9 and 10, in response to the driving of the first moving mechanism 40, the container support surface 42a rises a predetermined distance (S1+S2) from height H1 to H3, and transports the storage container 2 placed on the container placement surface 7a (height H2) of the rail section 7 upward the predetermined distance (S2). The trajectory of the storage container 2a at this time is indicated by an arrow r1 (shown in FIG. 10).

[0081] In Fig. 9 and Fig. 10, in a state where the storage container 2a is supported only on the container support surface 42a by the container support plate 42 and transported upward, the second hydraulic cylinder 51 is driven to move the piston 51a by a predetermined stroke in the transport direction, and the support member 50 is moved along the transport direction on the moving mechanism support surface 45a via the roller 49. Distance traveled Let S3 be the sum of the two.

[0082] In Figure 11, in response to the movement of the support member 50 along the transport direction, the container support plate 42 moves along the transport direction integrally with the support member 50, and the storage container 2 supported only by the container support surface 42a of the container support plate 42 moves along the transport direction integrally with the container support plate 42.

[0083] In response to the driving of the second moving mechanism 41, the container support plate 42 moves a predetermined distance S3 along the transport direction, and all of the storage containers 2 supported on the container support surface 42a of the container support plate 42 are transported along the predetermined distance S3. The trajectory of the storage containers 2a at this time is indicated by an arrow r2 (shown in FIG. 11).

[0084] 11, in a state where the storage container 2 is transported downstream in the transport direction by the container support plate 42, the first hydraulic cylinder 47 is driven to move the piston 47a in the transport direction. As a result, the movement mechanism support plate 45 is lowered by the operation of the link mechanism 46 with the movement mechanism support surface 45a being parallel to the transport direction.

[0085] In response to the descent of the movement mechanism support plate 45, the second movement mechanism 41 descends integrally with the movement mechanism support plate 45, and the container support plate 42 supported by the support member 50 of the second movement mechanism 41 also descends.

[0086] In Fig. 12, when the height of the container supporting surface 42a coincides with the height H2 (shown in Fig. 9) of the container mounting surface 7a of the rail section 7 due to the downward movement of the container support plate 42, the storage container 2 that was supported only by the container supporting surface 42a of the container support plate 42 is placed on the container mounting surface 7a of the rail section 7. The trajectory of the storage container 2a at this time is indicated by arrow r3.

[0087] 6 and 12, the storage container 2 initially placed on the container placement surface 7a of the rail section 7 is transported along the conveying direction by a distance S3 (shown in FIG. 11) along a rectangular pulse-like trajectory by the movement of the container support plate 42 based on the drive of the first moving mechanism 40 and the second moving mechanism 41, and is placed again on the container placement surface 7a of the rail section 7. At this time, the trajectory of the storage container 2a is in the order of arrow r1, arrow r2, and arrow r3.

[0088] In this way, the multiple storage containers 2 placed on the container mounting surface 7a in the heat treatment furnace apparatus 1 are heated as they move along the conveying direction within the furnace inlet section 10 and heating section 12 in the furnace body 6, tracing a square pulse-shaped trajectory at predetermined distances S3.

[0089] Then, the heated and sintered storage containers 2 proceed along the conveying direction to the cooling section 13 at predetermined distances S3 while tracing a square pulse-shaped trajectory, and are cooled while moving within the cooling section 13 along the conveying direction.

[0090] In Fig. 12, the storage container 2b, which was located at the most downstream side in the transport direction before the in-furnace storage container transport operation in Fig. 6, is placed on the downstream end of the container placement surface 7a, i.e., on the upstream end of the overlapped exit-side transport surface 28a of the exit-side chain belt mechanism. That is, the storage container 2b is placed at the detection position of the second photoelectric sensor.

[0091] Furthermore, in a state in which the storage container 2a is supported by the container mounting surface 7a and the container support surface 42a, the first hydraulic cylinder 47 is further driven to move the piston 47a along the conveying direction, thereby lowering the movement mechanism support plate 45.

[0092] 13, as the moving mechanism support plate 45 descends, the container support plate 42 also descends together with the moving mechanism support plate 45, and the container support surface 42a is located at a height H1 (shown in FIG. 5) lower than the height of the container placement surface 7a. As a result, the container support plate 42 returns to the state before the storage container 2 is transported, as shown in FIGS. 5 and 6.

[0093] In Fig. 13, the storage container 2a, which was located at the downstream end of the inlet transport surface 20a on the upstream end of the container placement surface 7a in Fig. 6, has been transported along the transport direction by a predetermined distance S3 (shown in Fig. 11), so the first photoelectric sensor transmits a container carry-in command signal. Further, the storage container carry-in operation process into the heat treatment furnace 1 and the storage container transport operation process in the heat treatment furnace 1 are sequentially performed.

[0094] Furthermore, the vertical movement distance of the storage container 2 based on the piston stroke of the first hydraulic cylinder 47 of the first moving mechanism 40 and the movement distance S3 in the conveying direction of the storage container 2 based on the piston stroke of the second hydraulic cylinder 51 of the second moving mechanism 41 can also be changed for each pulse-like conveying step by changing the detection settings of the limit switches 53 installed on each hydraulic cylinder.

[0095] Next, the operation of carrying out the storage container from the heat treatment furnace 1 will be described.

[0096] In FIG. 12, when the storage container 2b is placed at the detection position of the second photoelectric sensor, the second photoelectric sensor transmits a container removal command signal.

[0097] In FIG. 13, the second photoelectric sensor directive In response to the signal, the exit side chain belt section 28 is circulated via the drive section 29, thereby moving the storage container 2b placed on the upstream end of the exit side conveying surface 28a from the upstream end of the exit side conveying surface 28a (storage container 2b shown by the dashed line in FIG. 13) to the downstream end (storage container 2b shown by the solid line in FIG. 13). At this time, the exit side lifting platform 91 is lowered, and the exit side lifting platform upper surface 91a is in a lower position than the exit side conveying surface 28a.

[0098] Next, the exit side lifting platform 91 rises, and the storage container 2 placed on the upstream end rises. At this time, the opening / closing mechanism 66 is open, and the opening / closing mechanism 67 is closed. The pusher 68 moves the storage container 2 into the exit side carrying-out mechanism 16. The pusher 68 returns, and the opening / closing mechanism 66 closes. Next, the opening / closing mechanism 67 opens, and the storage container 2 is discharged and transported to the next process.

[0099] When the storage container 2 is transported by a predetermined distance S3 by the operation of the furnace container transport unit 8 and reaches the upstream end of the outlet-side transport surface 28a, which is the detection position of the second photoelectric sensor, a signal is transmitted from the second photoelectric sensor and the storage container 2 is transported out of the heat treatment furnace apparatus 1. Every time the second photoelectric sensor signal is transmitted, the storage container 2 is transported out of the heat treatment furnace apparatus 1 and transported to the next process.

[0100] According to this embodiment, the storage container 2 containing a plurality of ceramic metal substrates 3 can be transported in a substantially unloaded state relative to the storage container 2 in the heating section 12 and the cooling section 13 of the furnace body 6 while tracing a pulse-like trajectory, and the heat sintering process can be performed on the storage container 2 in the unloaded transported state. Therefore, friction is not generated between the storage container 2 and the container mounting surface 7a of the rail section 7, and the occurrence of wear deformation of the storage container 2 and the container mounting surface 7a of the rail section 7 can be eliminated. This makes it unnecessary to replace worn belts and rails that occurred in conventional heat treatment furnaces, and reduces the equipment cost of the heat treatment furnace device.

[0101] Furthermore, according to this embodiment, there is no friction or wear between the storage container 2 and the container mounting surface 7a of the rail portion 7, so that wear powder generated by wear between the storage container 2 and the rail portion 7 does not adhere to the ceramic metal substrate 3, thereby reducing defects in the ceramic metal substrate caused by the wear powder.

[0102] Furthermore, since the storage containers 2 are transported in a substantially unloaded state, there is no load when a mesh belt is used. For example, as shown in the conventional art of Fig. 15, if a stainless steel storage container 103 measuring 200 mm in length, 200 mm in width, and 50 mm in height is used when heat-treating ceramic metal substrates 104, the weight of the storage container 103 containing the ceramic metal substrates 104 is approximately 1 kg. If 20 storage containers 103 are simultaneously moved by drive unit 101 while mesh belt 100 slides on pedestal 102, a load of 20 kg is applied to the mesh belt.

[0103] In contrast, in the heat treatment furnace apparatus 1 of the unloaded transport type used in this embodiment, the pressing load on the storage container is approximately 0. Also, the load on the pusher at the entrance and exit and the chain belt portion can be reduced to 1 kg.

[0104] Therefore, it is possible to provide a heat treatment furnace apparatus 1 that is superior to conventional belt furnaces in terms of equipment costs due to friction and wear and production efficiency of ceramic metal substrates.

[0105] In this embodiment, a furnace inner vessel transport unit as shown in Figures 2 and 3 is used as a mechanism for raising and lowering the container support plate 42 in the furnace inner vessel transport unit and moving it back and forth along the transport direction, but this embodiment is not limited to this.

[0106] FIG. 14 is a diagram of a heat treatment furnace inner vessel transport unit according to the second embodiment.

[0107] In Figure 14, in the furnace inner vessel transport unit 80, the container support plate 42 for supporting the storage container 2 and the second moving mechanism 41 for supporting this container support plate 42 in the gap 36 in a vertical direction are identical to the configurations shown in Figures 2 and 3, etc.

[0108] 14, the first moving mechanism 81 in the inner vessel transporting unit 80 includes a moving mechanism support plate 82 having a moving mechanism support surface 82a parallel to the transporting direction and movably provided along the base part 8a of the inner vessel transporting unit, and a plurality of protrusions 84 provided on the base part 8a of the inner vessel transporting unit so as to protrude upward at predetermined intervals along the transporting direction. The second moving mechanism 41 includes a support member 50 and a plurality of rollers 49 reciprocating along the transporting direction on the moving mechanism support surface 82a of the moving mechanism support plate 82.

[0109] 14, the upstream end of each protrusion 84 in the transport direction protrudes almost directly upward. Each protrusion 84 has an inclined surface 84a that slopes upward from the downstream end of the base portion 8a in the transport direction toward the protruding portion of the upstream end. In other words, the side surface of each protrusion 84 has a shape of a substantially right-angled triangle.

[0110] The first moving mechanism 81 is provided with a plurality of rollers 85 which are rotatably connected to the moving mechanism support plate 82 and which rotate and reciprocate on the inclined surface 84a of the convex portion 84 formed on the base portion 8a. The moving mechanism support plate 82 is integral with the rollers 85 and moves up and down with the moving mechanism support surface 82a parallel to the conveying direction in response to the reciprocating movement of the rollers 85 along the inclined surface 84a.

[0111] The first moving mechanism 81 includes a first hydraulic cylinder 87 for reciprocating the moving mechanism support plate 82 in a direction parallel to the conveying direction by reciprocating a piston, and a limit switch for detecting the stroke of the piston.

[0112] In this embodiment, the first hydraulic cylinder 87 is driven to move the piston in the opposite direction (upstream side) to the conveying direction, so that the roller 85 of the moving mechanism support plate 82 moves in the conveying direction on the inclined surface 84a of the protruding portion 84 of the base portion 8a. and the opposite side The movement mechanism support plate 82 moves upward integrally with the rollers 85 with the movement mechanism support surface 82a parallel to the conveying direction.

[0113] In response to the rise of the movement mechanism support plate 82, the second movement mechanism 41 rises integrally with the movement mechanism support plate 82. As a result, the container support plate 42 (shown in FIG. 13, etc.) supported by the support member 50 of the second movement mechanism 41 also rises integrally.

[0114] Then, with the container support plate 42 and the support member 50 raised, the second hydraulic cylinder 51 is operated to move the second moving mechanism 41 in the conveying direction. Next, the first hydraulic cylinder 87 is driven to move the piston in the conveying direction. This causes the roller 85 of the moving mechanism support plate 82 to rotate and move in the conveying direction on the inclined surface 84a of the protruding portion 84 of the base portion 8a. The moving mechanism support plate 82, integral with the roller 85, descends with the moving mechanism support surface 82a parallel to the conveying direction.

[0115] In response to the descent of the moving mechanism support plate 82, the second moving mechanism 41 descends integrally with the moving mechanism support plate 82, and the container support plate 42 supported by the support member 50 of the second moving mechanism 41 also descends integrally.

[0116] In this way, even when using the furnace inner vessel transport unit 80 of this modified example, the container support plate 42 can be raised and lowered by the operation of the first moving mechanism 81, and operation processing can be performed in a manner substantially similar to that of the furnace inner vessel transport unit 8 having the first moving mechanism 40.

[0117] 14, the base portion 8a is provided with a gas inlet 88. The same gas as that in the furnace body 6 can be introduced into the furnace inner vessel transport unit 80, thereby preventing gas from leaking out from the gap 36. It is possible to reduce the flow rate of gas introduced into the furnace body 6 and to widen the gap 36.

[0118] In the above, the present embodiment has been described by taking as an example a brazing furnace apparatus for performing heat treatment of the ceramic metal substrate 3 in the brazing process, but the present embodiment is not limited to this. For example, the present embodiment can be applied to a heat treatment furnace apparatus for performing heat treatment other than brazing.

[0119] Furthermore, although several embodiments of the present invention have been illustrated, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, modifications, etc. can be made without departing from the gist of the invention. Modifications of these embodiments are included in the scope and gist of the invention, and are included in the scope of the invention and its equivalents described in the claims. In addition, the above-mentioned embodiments can be implemented in combination with each other.

Claims

1. A heat treatment furnace apparatus for performing a heat treatment on a plurality of ceramic metal substrates at 600° C. or more and less than 950° C. by heating a container made of stainless steel in which a plurality of ceramic metal substrates are stored when a metal plate is brazed to a ceramic substrate, comprising: The heat treatment furnace apparatus includes a heater installed outside the furnace body, a rail section for transporting the storage container installed in the furnace body, and a transport means for transporting the storage container placed on the rail section in a predetermined transport direction along the rail section while moving the storage container in a direction perpendicular to the rail section, the transport means includes a first moving means for moving the storage container along the transport direction, and a second moving means for moving the storage container and the first moving means together in a vertical direction; the first moving means includes a container support plate for supporting the storage container, a support member for supporting the container support plate, and a first moving mechanism for moving the support member along the transport direction; the second moving means includes a support plate that supports the support member movably along the transport direction, and a second moving mechanism that raises and lowers the support plate; a rail section having a space formed along a transport direction and vertically penetrating a central portion of the rail section, the space above the rail section being configured as a transport space for the storage container, and an upper surface of the rail section being configured as a placement surface for the storage container, the container support plate is supported by the support member in a state where the container support plate is inserted into the space of the rail portion so that an upper surface of the container support plate is parallel to a storage container mounting surface of the rail portion; The rail portion is an inlet-side chain belt mechanism including an endless looped inlet-side chain belt portion and a drive portion for circulating the inlet-side chain belt portion, a downstream end of a conveying surface of the inlet-side chain belt portion being connected to an upstream end of a storage container mounting surface of the rail portion, and the conveying surface of the inlet-side chain belt portion being disposed along the storage container mounting surface; an outlet-side chain belt mechanism including an endless loop-shaped outlet-side chain belt portion and a drive portion for circulating the outlet-side chain belt portion, an upstream end of a conveying surface of the outlet-side chain belt portion being connected to a downstream end of a storage container mounting surface of the rail portion, and the conveying surface of the outlet-side chain belt portion being disposed along the storage container mounting surface; the container support plate is configured such that, when the height of the upper surface of the container support plate coincides with the height of the storage container mounting surface of the rail portion, an upstream end of the upper surface of the container support plate overlaps with a downstream end of the conveying surface of the inlet chain belt portion, The heat treatment furnace apparatus is characterized in that the downstream end of the upper surface of the container support plate is configured to overlap the upstream end of the conveying surface of the outlet side chain belt section.

2. the inlet side chain belt portion and the outlet side chain belt portion each have a space passing through a central portion in a vertical direction, a mechanism for disposing the storage container on the entrance side chain belt section by transporting the storage container from the transport section and lowering the entrance side lifting cylinder, the mechanism including an entrance side lifting platform connected to an entrance side lifting cylinder in the space of the entrance side chain belt section and located at the same height as a loading section of an entrance side loading mechanism which is located higher than an upper surface of the entrance side chain belt section, the mechanism comprising: The heat treatment furnace apparatus of claim 1, characterized in that the space of the exit side chain belt section has an exit side lifting platform connected to an exit side lifting cylinder, and the exit side lifting platform, which is located lower than the upper surface of the exit side chain belt section, is raised by the exit side lifting cylinder to the same height as the discharge section of the exit side discharge mechanism, and the storage container is transported to the discharge section.

3. 2. The heat treatment furnace apparatus according to claim 1, wherein the transport means moves the storage containers so as to draw a square pulse-like locus while placing the storage containers on the rail portions at a required interval.

4. 2. The heat treatment furnace apparatus according to claim 1, wherein the inside of the furnace body has an inert gas atmosphere, and the inert gas is caused to flow into the furnace body from the outside and to flow out of the furnace body.

5. 2. The heat treatment furnace apparatus according to claim 1, wherein the second moving mechanism has a link mechanism for raising and lowering the support plate with its support surface parallel to the transport direction, and is configured to raise and lower the support plate via the link mechanism by reciprocating the support plate parallel to the transport direction.

6. The second moving mechanism includes: A movement mechanism support plate that is movable along the conveying direction relative to the furnace body; a plurality of protruding portions provided at predetermined intervals along the transport direction on a base portion of the second moving mechanism, each having an upstream end protruding upward and an inclined surface inclined upward from the downstream end of the base portion toward an end protruding from the downstream end of the base portion; a plurality of rollers rotatably connected to the movement mechanism support plate and reciprocating while rotating on an inclined surface of a convex portion on an upper surface of the base portion; 2. The heat treatment furnace apparatus according to claim 1, wherein the movement mechanism support plate is reciprocated parallel to the transport direction, so that the movement mechanism support plate is raised and lowered integrally with the roller by reciprocating along the inclined surface of the roller while maintaining its support surface parallel to the transport direction.

7. 2. The heat treatment furnace apparatus according to claim 1, wherein the heater is installed vertically on the outer side surface of the furnace body and is configured so that the heater is at the same height as the storage container when the heater is in the rail portion.

8. The heat treatment furnace apparatus includes the storage container, 2. The heat treatment furnace apparatus according to claim 1, wherein a hole is formed in a bottom portion of the storage container so as to include a central portion thereof.

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