Semiconductor device

Abstract

A semiconductor device 1 comprises: a substrate 10; N first electrodes 22 provided above the substrate 10 (where N is an integer of 2 or more); a first dielectric film 23 provided above the N first electrodes 22; M second electrodes 24 provided above the N first electrodes 22 with the first dielectric film 23 therebetween (where M is an integer of 3 or more and satisfies M>N); a first protective layer 26 covering the N first electrodes 22 and the M second electrodes 24; three or more external electrodes 27 penetrating the first protective layer 26; and a second protective layer 29 covering an external electrode 27 excluding two of the external electrodes 27 among the three or more of the external electrodes 27. At least one of the second electrodes 24 is disposed above each of the first electrodes 22. M capacitor elements CAP1, CAP2, and CAP3 are constituted by the N first electrodes 22, the first dielectric film 23, and the M second electrodes 24. M capacitor elements CAP1, CAP2 and CAP3 are electrically connected in series. Among the M capacitor elements CAP1, CAP2 and CAP3, two of the capacitor elements CAP1 and CAP2 having two second electrodes 24A and 24B disposed on the same first electrode 22A are electrically connected in series. Two of the external electrodes 27 that are not covered with the second protective layer 29 constitute two terminal electrodes 27A and 27B which are electrically connected to the two of the capacitor elements CAP1 and CAP3, respectively, among the M capacitor elements CAP1, CAP2 and CAP3. Among the M capacitor elements CAP1, CAP2 and CAP3, two of the capacitor elements CAP2 and CAP3 that have two of the second electrodes 24B and 24C disposed above different first electrodes 22A and 22B are electrically connected in series by an external electrode 27C which does not constitute the two terminal electrodes 27A and 27B. The external electrode 27C which does not constitute the two terminal electrodes 27A and 27B is covered with the second protective layer 29.

Description

Semiconductor Devices

[0001] The present invention relates to a semiconductor device.

[0002] A typical capacitor element used in semiconductor integrated circuits is, for example, a metal-insulator-metal (MIM) capacitor, which has a parallel-plate structure in which an insulator is sandwiched between a lower electrode and an upper electrode.

[0003] Patent Document 1 discloses a duplexer including a common port, a first signal port, a second signal port, a low-pass filter provided between the common port and the first signal port and selectively passing signals of frequencies within a first pass band that are equal to or lower than a first cutoff frequency, and a high-pass filter provided between the common port and the second signal port and selectively passing signals of frequencies within a second pass band that are equal to or higher than a second cutoff frequency that is higher than the first cutoff frequency, wherein the low-pass filter includes a first LC resonant circuit and a first acoustic wave resonator provided in a shunt path that connects a path from the first LC resonant circuit to the first signal port and ground, and wherein the resonant frequency of the first acoustic wave resonator is higher than the first cutoff frequency.

[0004] Patent Document 2 discloses a capacitor manufacturing method including the steps of: forming a dielectric film on a wafer; forming a monitor electrode, the surface of which facing the wafer having a predetermined area, in a monitor region included in a portion of the region on the wafer where the dielectric film is formed; measuring a capacitance value of a capacitance formed by the monitor electrode formed in the monitor region and the dielectric film; calculating, based on the measured capacitance value, an area of ​​an upper electrode to be formed in a capacitor formation region, which is a region of the portion of the region other than the monitor region; and forming the upper electrode in the capacitor formation region based on the calculated area.

[0005] JP 2017-112525 A Patent No. 6372677

[0006] High frequencies of 700 MHz or higher are currently used in high frequency circuits in RF modules for communication, and in the future, high frequencies of 3 GHz or higher will be used to increase communication speeds.

[0007] FIG. 19 is a circuit diagram showing a filter circuit according to a comparative example.

[0008] For example, a filter circuit that does not transmit a desired frequency to a subsequent stage of the circuit is realized as shown in Figures 1 and 19 of Patent Document 1. L and C are connected in series, and a signal with a resonant frequency of f0 = 1 / 2π√(LC) is dropped to ground.

[0009] The higher the frequency, the greater the effect that variations in the L and C constants have on the resonant frequency, so components with the narrowest standard deviations have been selected for high-frequency circuits.

[0010] For example, in the LC filter circuit of Figure 19, when L = 1 nH and C = 1 pF, f0 = 5.03 GHz, but if we assume that C has a capacitance deviation of ±0.05 pF and C varies from 0.95 to 1.05 pF, f0 will vary from 4.91 to 5.16 GHz. This amount of variation in the resonant frequency f0 can be fatal to the filter characteristics of a high-frequency circuit.

[0011] To solve the above problem, it is conceivable to select components with narrower deviations in C and L. However, with conventional electronic components, there is a limit to the minimum deviation, and in some cases this cannot be achieved.

[0012] The present invention has been made to solve the above problems, and has an object to provide a semiconductor device with small capacitance deviation.

[0013] The semiconductor device of the present invention comprises a substrate, N (where N is an integer of 2 or more) first electrodes provided on the substrate, a first dielectric film provided on the N first electrodes, M (where M is an integer of 3 or more satisfying M>N) second electrodes provided on the N first electrodes via the first dielectric film, a first protective layer covering the N first electrodes and the M second electrodes, three or more external electrodes penetrating the first protective layer, and a second protective layer covering all but two of the three or more external electrodes, wherein at least one second electrode is disposed on each of the first electrodes, and M capacitor elements are configured from the N first electrodes, the first dielectric film, and the M second electrodes. The M capacitor elements are electrically connected in series, and two of the M capacitor elements, each having two second electrodes arranged on the same first electrode, are electrically connected in series by their first electrodes, and the two external electrodes not covered with the second protective layer constitute two terminal electrodes electrically connected to two of the M capacitor elements, respectively, and two of the M capacitor elements, each having two second electrodes arranged on different first electrodes, are electrically connected in series by their external electrodes not constituting the two terminal electrodes, and the external electrodes not constituting the two terminal electrodes are covered with the second protective layer.

[0014] According to the present invention, it is possible to provide a semiconductor device with a small capacitance deviation.

[0015] FIG. 1 is a cross-sectional view schematically showing an example of a capacitor according to a first embodiment of the present invention. FIG. 2 is a plan view schematically showing an example of a capacitor according to the first embodiment of the present invention. FIG. 3 shows an equivalent circuit of the capacitor shown in FIGS. 1 and 2. FIG. 4 is a cross-sectional view schematically showing an example of a capacitor according to a second embodiment of the present invention. FIG. 5 is a plan view schematically showing an example of a capacitor according to the second embodiment of the present invention. FIG. 6 shows an equivalent circuit of the capacitor shown in FIGS. 4 and 5. FIG. 7 is a cross-sectional view schematically showing an example of a capacitor according to a third embodiment of the present invention. FIG. 8 is a plan view schematically showing an example of a capacitor according to the third embodiment of the present invention. FIG. 9 shows an equivalent circuit of the capacitor shown in FIGS. 7 and 8. FIG. 10 is a cross-sectional view schematically showing an example of a capacitor according to a fourth embodiment of the present invention. FIG. 11 is a plan view schematically showing an example of a capacitor according to the fourth embodiment of the present invention. FIG. 12 shows an equivalent circuit of the capacitor shown in FIGS. 10 and 11. FIG. 13 is a cross-sectional view schematically showing an example of a capacitor according to a fifth embodiment of the present invention. FIG. 14 is a plan view schematically showing an example of a capacitor according to the fifth embodiment of the present invention. Fig. 15 shows an equivalent circuit of the capacitor shown in Fig. 13 and Fig. 14. Fig. 16 is a cross-sectional view schematically showing an example of a capacitor according to a sixth embodiment of the present invention. Fig. 17 is a plan view schematically showing an example of a capacitor according to the sixth embodiment of the present invention. Fig. 18 shows an equivalent circuit of the capacitor shown in Fig. 16 and Fig. 17. Fig. 19 is a circuit diagram showing a filter circuit according to a comparative embodiment.

[0016] The semiconductor device of the present invention will be described below. However, the present invention is not limited to the following configuration, and can be appropriately modified and applied within the scope of the present invention. Note that a combination of two or more of the individual preferred configurations of the present invention described below also constitutes the present invention.

[0017] The following embodiments are merely examples, and it goes without saying that partial substitution or combination of the configurations shown in different embodiments is possible. From the second embodiment onwards, descriptions of matters common to the first embodiment will be omitted, and only the differences will be described. In particular, similar effects resulting from similar configurations will not be mentioned one after the other for each embodiment.

[0018] In the following description, unless otherwise specified, each embodiment will be referred to simply as the "semiconductor device of the present invention." The shape and arrangement of the semiconductor device and each component of the present invention are not limited to the examples shown in the drawings.

[0019] In the following, a capacitor will be described as an example of one embodiment of the semiconductor device of the present invention. The semiconductor device of the present invention may be a capacitor itself or a device including a capacitor.

[0020] A semiconductor device of the present invention comprises a substrate, N (where N is an integer of 2 or more) first electrodes provided on the substrate, a first dielectric film provided on the N first electrodes, M (where M is an integer of 3 or more satisfying M>N) second electrodes provided on the N first electrodes via the first dielectric film, a first protective layer covering the N first electrodes and the M second electrodes, three or more external electrodes penetrating the first protective layer, and a second protective layer covering all but two of the three or more external electrodes, wherein at least one second electrode is disposed on each of the first electrodes, and M capacitor elements are configured from the N first electrodes, the first dielectric film, and the M second electrodes. The M capacitor elements are electrically connected in series, and two of the M capacitor elements, each having two second electrodes arranged on the same first electrode, are electrically connected in series by their first electrodes, and the two external electrodes not covered by the second protective layer constitute two terminal electrodes electrically connected to two of the M capacitor elements, respectively, and two of the M capacitor elements, each having two second electrodes arranged on different first electrodes, are electrically connected in series by external electrodes not constituting the two terminal electrodes, and the external electrodes not constituting the two terminal electrodes are covered by the second protective layer.

[0021] In this specification, the terms "first, second, third, fourth, ... electrodes" refer to the electrodes that are present in the first layer (first), second layer (second), third layer (third), fourth layer (fourth), ... of the electrodes that form the capacitor element, counting from the substrate side.

[0022] In addition, in this specification, the term "capacitor element" refers to an element (small capacitor) composed of a dielectric film and a pair of electrodes facing each other via the dielectric film, and the term "capacitor" represents a concept that includes multiple capacitor elements.

[0023] First Embodiment A capacitor according to a first embodiment of the present invention includes two (i.e., N=2) first electrodes, three (i.e., M=3) second electrodes, and three external electrodes.

[0024] Fig. 1 is a cross-sectional view schematically showing an example of a capacitor according to a first embodiment of the present invention. Fig. 2 is a plan view schematically showing an example of a capacitor according to the first embodiment of the present invention. Fig. 1 is a cross-sectional view taken along line II of the capacitor shown in Fig. 2. Fig. 3 shows an equivalent circuit of the capacitor shown in Figs. 1 and 2.

[0025] In this specification, the length direction, width direction, and thickness direction of a capacitor (semiconductor device) are defined by arrows L, W, and T, respectively, as shown in Figures 1 and 2. Here, the length direction L, width direction W, and thickness direction T are perpendicular to each other.

[0026] The capacitor 1 shown in FIGS. 1 and 2 includes a substrate 10, an insulating film 21 provided on the substrate 10, two first electrodes 22 provided on the insulating film 21, a first dielectric film 23 provided on the two first electrodes, three second electrodes 24 provided on the two first electrodes 22 via the first dielectric film 23, a moisture-resistant film 25 provided on the first dielectric film 23 and the second electrodes 24, a first protective layer 26 covering the two first electrodes 22, the three second electrodes 24, and the moisture-resistant film 25, three external electrodes 27 penetrating the first protective layer 26, and a second protective layer 29 covering one of the three external electrodes 27 except for two of the external electrodes 27.

[0027] If one of the two first electrodes 22 is the first electrode 22A and the other is the first electrode 22B, the second electrode 24 includes second electrodes 24A and 24B provided on the first electrode 22A, and a second electrode 24C provided on the first electrode 22B.

[0028] At least one second electrode 24 is disposed on each first electrode 22, and three capacitor elements CAP1, CAP2, and CAP3 are configured by two first electrodes 22, a first dielectric film 23, and three second electrodes 24. The three capacitor elements CAP1, CAP2, and CAP3 are electrically connected in series (see FIG. 3). Of the three capacitor elements CAP1, CAP2, and CAP3, two capacitor elements CAP1 and CAP2 having two second electrodes 24A and 24B disposed on the same first electrode 22A are electrically connected in series by the first electrode 22A. The two capacitor elements CAP1 and CAP2 that are not covered with the second protective layer 29 are electrically connected in series by the first electrode 22A. The external electrode 27 of each capacitor element CAP1 forms two terminal electrodes 27A and 27B electrically connected to two of the three capacitor elements CAP1, CAP2, and CAP3, respectively. Of the three capacitor elements CAP1, CAP2, and CAP3, two capacitor elements CAP2 and CAP3 having two second electrodes 24B and 24C arranged on different first electrodes 22A and 22B are electrically connected in series by an external electrode 27C that does not form the two terminal electrodes 27A and 27B, and the external electrode 27C that does not form the two terminal electrodes 27A and 27B is covered with a second protective layer 29.

[0029] This makes it possible to fabricate capacitors with small capacitance deviations (capacitance variations), the reason for which will be explained below.

[0030] It is assumed that the capacitance generated by the variation in the thickness of the dielectric film within the wafer surface is C0±ΔC0. The capacitance that can be realized by adopting the above-mentioned three series capacitor element configuration is C0 / 3+ΔC0 / 3, calculated from 1 / C=1 / C1+1 / C2+1 / C3, where C1, C2, and C3 are the capacitances of the capacitor elements CAP1, CAP2, and CAP3, respectively. In other words, by connecting three capacitor elements in series, the capacitance deviation can be reduced to one-third.

[0031] The target capacitance value C0 / 3 can be achieved whether the capacitances C1, C2, and C3 are the same value or a combination of different values. However, capacitance variation reflecting variation in the thickness of the dielectric film differs for each capacitance, and when different capacitances C1, C2, and C3 are used, the total capacitance variation ΔC0 / 3 becomes large, so it is preferable that the capacitances C1, C2, and C3 are the same.

[0032] In this specification, the expression "a certain amount is the same" includes the case where the amount is substantially the same.

[0033] Another advantage is that by connecting multiple capacitor elements in series, it is possible to easily form a low-capacitance capacitor. For example, if one capacitor is formed per chip using a dielectric film with a thickness of 1 μm, the capacitance will be 1 pF. On the other hand, with the above configuration, the electrode area is reduced to 1 / 4, and since there are three capacitors connected in series, it is possible to form a low-capacitance capacitor with a capacitance of 0.1 pF or less.

[0034] Furthermore, the two capacitor elements CAP2 and CAP3 formed by the different first electrodes 22A and 22B are not electrically connected in series via a common second electrode, but are electrically connected in series via the external electrode 27C that penetrates the first protective layer 26, which makes it possible to suppress interference between the capacitor elements CAP2 and CAP3. This interference can be particularly suppressed when the substrate 10 is a semiconductor substrate.

[0035] Each component will be described in detail below.

[0036] The substrate 10 is not particularly limited, but is preferably a semiconductor substrate such as a silicon substrate or a gallium arsenide substrate, or an insulating substrate such as glass or alumina.

[0037] The insulating film 21 is provided so as to cover the entire one main surface of the substrate 10. The insulating film 21 may be provided so as to cover a part of the one main surface of the substrate 10, but it needs to be provided in an area that is larger than the first electrode 22 and overlaps the entire area of ​​the first electrode 22. Note that if the substrate 10 is an insulating substrate such as glass or alumina, the insulating film 21 does not need to be provided.

[0038] That is, the capacitor elements CAP1, CAP2, and CAP3 are electrically insulated from the semiconductor substrate by providing the insulating film 21. This makes it possible to reduce the parasitic capacitance components of each of the capacitor elements CAP1, CAP2, and CAP3.

[0039] The material for forming the insulating film 21 is not particularly limited, but is preferably SiO ２ , SiN, Al ２ O ３ , HfO ２ , Ta ２ O ５ , ZrO ２ etc.

[0040] The first electrode 22 is provided at a position away from the edge of the substrate 10. In other words, the edge of the first electrode 22 is located inside the edge of the substrate 10.

[0041] The material constituting the first electrode 22 is not particularly limited, but is preferably Cu, Ag, Au, Al, Ni, Cr, or Ti, or an alloy containing at least one of these metals.

[0042] The first dielectric film 23 is provided so as to cover the first electrode 22 except for the opening. In Fig. 1, the end of the first dielectric film 23 is also provided on the surface of the insulating film 21 from the end of the first electrode 22 to the end of the substrate 10. The end of the first dielectric film 23 does not have to be provided to the end of the substrate 10.

[0043] The material for forming the first dielectric film 23 is not particularly limited, but is preferably SiO ２ , SiN, Al ２ O ３ , HfO ２ , Ta ２ O ５ Examples of oxides or nitrides include those mentioned above.

[0044] The second electrode 24 is provided opposite the first electrode 22 with the first dielectric film 23 interposed therebetween. More specifically, the second electrodes 24A and 24B face the first electrode 22A, and the second electrode 24C faces the first electrode 22B.

[0045] 2, the three second electrodes 24 have the same area and the same planar shape. Specifically, the three second electrodes 24 have a rectangular shape with the same dimensions in the length direction L and width direction W.

[0046] In this specification, when simply referring to "area," it means the area in a plan view from the thickness direction T, and when referring to "planar shape," it means the shape in a plan view from the thickness direction T.

[0047] The material constituting the second electrode 24 is not particularly limited, but is preferably Cu, Ag, Au, Al, Ni, Cr, or Ti, or an alloy containing at least one of these metals.

[0048] The moisture-resistant film 25 is provided so as to cover the first dielectric film 23 and the second electrode 24 except for the opening. The provision of the moisture-resistant film 25 improves the moisture resistance of the capacitor element, particularly the first dielectric film 23. The moisture-resistant film 25 does not necessarily have to be provided.

[0049] The material for forming the moisture-resistant film 25 is not particularly limited, but is preferably SiO ２ , SiN, and other moisture-resistant materials.

[0050] The first protective layer 26 has openings at positions overlapping the openings (openings overlapping the first electrode 22B) of the first dielectric film 23 and the moisture-resistant film 25, and at a position overlapping the opening (opening overlapping the second electrode 24) of the moisture-resistant film 25. The provision of the first protective layer 26 protects the capacitor element, particularly the first dielectric film 23, from moisture.

[0051] The material constituting the first protective layer 26 is not particularly limited, but preferable examples include resin materials such as polyimide resin and resin in solder resist.

[0052] The thickness of the first protective layer 26 is not particularly limited, but is preferably 0.5 μm or more and 10 μm or less, and more preferably 1 μm or more and 5 μm or less. By electrically connecting the two capacitor elements CAP2 and CAP3 with the external electrode 27C formed on the first protective layer 26 having such a thickness, the electric field coupling between the first electrode 22 and the external electrode 27C is alleviated. This configuration reduces the parasitic capacitance components of each of the capacitor elements CAP1, CAP2, and CAP3, and by employing this configuration and the insulating film 21, the parasitic capacitance components of each of the capacitor elements CAP1, CAP2, and CAP3 can be minimized.

[0053] The external electrodes 27 constituting the terminal electrodes 27A and 27B are electrically connected to the capacitor elements (here, the capacitor elements CAP1 and CAP3) connected in series at both ends of the three capacitor elements CAP1, CAP2, and CAP3. More specifically, the external electrodes 27 constituting the terminal electrodes 27A and 27B are connected to the second electrode 24A and the first electrode 22B, respectively.

[0054] On the other hand, the external electrode 27C that does not constitute the terminal electrodes 27A and 27B is a connecting wiring, and is electrically connected to one of the three capacitor elements CAP1, CAP2, and CAP3 except for the capacitor element connected in series at both ends (capacitor element CAP2 in this case) and to the other capacitor element (capacitor element CAP3 in this case). More specifically, the external electrode 27C is connected to the second electrodes 24B and 24C.

[0055] The material constituting the external electrode 27 is not particularly limited, but preferably includes Cu, Ni, Ag, Au, Al, etc. The external electrode 27 may have a single-layer structure or a multi-layer structure. The outermost surface of the external electrode 27 is preferably made of Au or Sn.

[0056] When the external electrode 27 has a multilayer structure, the external electrode 27 may have, in order from the substrate 10 side, a seed layer 28a, a first plating layer 28b, and a second plating layer 28c, as shown in FIG.

[0057] The seed layer 28a of the external electrode 27 may be, for example, a laminate (Ti / Cu) of a conductor layer made of titanium (Ti) and a conductor layer made of copper (Cu).

[0058] The first plating layer 28b of the external electrode 27 may be made of, for example, nickel (Ni).

[0059] Examples of materials for the second plating layer 28c of the external electrode 27 include gold (Au) and tin (Sn).

[0060] The materials constituting the three external electrodes 27 may be the same as or different from one another.

[0061] The second protective layer 29 has openings that expose the terminal electrodes 27A and 27B. The second protective layer 29 insulates the external electrode 27 (external electrode 27C) excluding the terminal electrodes 27A and 27B from the outside. Furthermore, the provision of the second protective layer 29 more effectively protects the capacitor element, particularly the first dielectric film 23, from moisture.

[0062] The material constituting the second protective layer 29 is not particularly limited, but preferably includes a resin material such as a polyimide resin or a resin in a solder resist.

[0063] The distance between adjacent capacitor elements is not particularly limited, but is preferably 5 μm to 100 μm, and more preferably 10 μm to 50 μm. By setting the distance to 100 μm or less, the difference in film thickness of the first dielectric film 23 between the capacitor elements becomes small, and capacitor elements with the same capacitance can be formed.

[0064] The capacitor 1 shown in FIGS. 1 and 2 is manufactured using, for example, a method similar to that for manufacturing a general MIM capacitor.

[0065] Second Embodiment A capacitor according to a second embodiment of the present invention differs from the first embodiment in that at least two of the three second electrodes have different areas.

[0066] Fig. 4 is a cross-sectional view schematically showing an example of a capacitor according to a second embodiment of the present invention. Fig. 5 is a plan view schematically showing an example of a capacitor according to the second embodiment of the present invention. Fig. 4 is a cross-sectional view taken along line II of the capacitor shown in Fig. 5. Fig. 6 shows an equivalent circuit of the capacitor shown in Figs. 4 and 5.

[0067] Although the capacitor 1 shown in FIGS. 1 and 2 can reduce variations in capacitance, there is a possibility that the center of capacitance may deviate from the desired value.

[0068] 4 and 5, at least two of the three second electrodes 24 have different areas, which makes it possible to adjust the capacitance center. This is because the area of ​​each second electrode 24 can be set to cancel out the film thickness distribution of the first dielectric film 23 within the wafer surface.

[0069] More specifically, each second electrode 24 is composed of a first region 30a having a rectangular planar shape and a second region 30b having a rectangular planar shape that protrudes from the first region 30a. The areas of the first regions 30a of the three second electrodes 24 are the same, while the areas of the second regions 30b of at least two of the three second electrodes 24 are different from one another.

[0070] The areas of all the second electrodes 24 may be different from one another, or the areas of the second regions 30b of all the second electrodes 24 may be different from one another.

[0071] The capacitor 2 shown in FIGS. 4 and 5 is manufactured using the method described in, for example, Japanese Patent Application Laid-Open No. 2003-144999.

[0072] In this embodiment, the capacitance center can be adjusted to a desired value. Furthermore, the area of ​​the second electrode 24 can be corrected so as to cancel out the film thickness distribution of the first dielectric film 23 within the wafer surface, thereby making it possible to reduce the capacitance distribution. In other words, a capacitor with an adjusted capacitance center and reduced capacitance variation can be realized.

[0073] [Third Embodiment] A capacitor according to a third embodiment of the present invention further includes a second dielectric film and three (i.e., M=3) third electrodes on three (i.e., M=3) second electrodes, and differs from the second embodiment in that at least two of the three third electrodes have different areas.

[0074] Fig. 7 is a cross-sectional view schematically showing an example of a capacitor according to a third embodiment of the present invention. Fig. 8 is a plan view schematically showing an example of a capacitor according to the third embodiment of the present invention. Fig. 7 is a cross-sectional view taken along line II of the capacitor shown in Fig. 8. Fig. 9 shows an equivalent circuit of the capacitor shown in Figs. 7 and 8.

[0075] The capacitor 3 shown in Figures 7 and 8 further includes a second dielectric film 31 provided on the three second electrodes 24, and three third electrodes 32 provided on the three second electrodes 24, respectively, via the second dielectric film 31.

[0076] That is, three capacitor elements CAP4, CAP5 and CAP6 are composed of three second electrodes 24, a second dielectric film 31 and three third electrodes 32, and the six capacitor elements CAP1 to CAP6 are electrically connected in series (see Figure 9).

[0077] In this way, in this embodiment, the number of series connections can be increased, and capacitance variations can be further suppressed. Furthermore, since the capacitor elements are formed in the thickness direction, the chip can be made smaller.

[0078] 7 and 8, at least two of the three third electrodes 32 have different areas. This makes it possible to adjust the capacitance center. This is because the area of ​​each third electrode 32 can be set so as to cancel out the film thickness distribution of the second dielectric film 31 within the wafer surface.

[0079] More specifically, each third electrode 32 is composed of a first region 33a having a rectangular planar shape and a second region 33b having a rectangular planar shape protruding from the first region 33a. The areas of the first regions 33a of the three third electrodes 32 are the same, while the areas of the second regions 33b of at least two of the three third electrodes 32 are different from one another.

[0080] The areas of all the third electrodes 32 may be different from one another, or the areas of the second regions 33b of all the third electrodes 32 may be different from one another.

[0081] 8 shows a state in which each third electrode 32 completely overlaps with the opposing second electrode 24 in plan view from the thickness direction T, but each third electrode 32 may partially overlap with the opposing second electrode 24 in plan view from the thickness direction T. Also, each third electrode 32 may be formed within the frame of each second electrode 24.

[0082] The capacitor 3 shown in FIGS. 7 and 8 is manufactured using the method described in Patent Document 2, for example.

[0083] The components specific to this embodiment will be described in detail below.

[0084] The second dielectric film 31 is provided so as to cover the second electrode 24 except for the opening. In Fig. 7, the end of the second dielectric film 31 is also provided on the surface of the first dielectric film 23 between the end of the first electrode 22 and the first dielectric film 23. The end of the second dielectric film 31 does not have to extend to the end of the substrate 10.

[0085] The material for forming the second dielectric film 31 is not particularly limited, but is preferably SiO ２ , SiN, Al ２ O ３ , HfO ２ , Ta ２ O ５ Examples of oxides or nitrides include those mentioned above.

[0086] The third electrode 32 is provided opposite the second electrode 24 with the second dielectric film 31 interposed therebetween. More specifically, the third electrode 32 includes a third electrode 32A opposite the second electrode 24A, a third electrode 32B opposite the second electrode 24B, and a third electrode 32C opposite the second electrode 24C.

[0087] The material constituting the third electrode 32 is not particularly limited, but is preferably Cu, Ag, Au, Al, Ni, Cr, or Ti, or an alloy containing at least one of these metals.

[0088] The external electrodes 27 constituting the terminal electrodes 27A and 27B are each electrically connected to one of the six capacitor elements CAP1 to CAP6 (capacitor elements CAP4 and CAP3 in this example) connected in series to both ends of the capacitor elements. More specifically, the external electrodes 27 constituting the terminal electrodes 27A and 27B are connected to the third electrode 32A and the first electrode 22B, respectively.

[0089] On the other hand, the external electrode 27C, which does not constitute the terminal electrodes 27A and 27B, is electrically connected to two of the six capacitor elements CAP1 to CAP6 (here, the capacitor elements CAP5 and CAP6) excluding the capacitor elements connected in series at both ends. More specifically, the external electrode 27C is connected to the third electrodes 32B and 32C.

[0090] In this embodiment, a capacitor can be realized in which the number of series connections is large, the center of capacitance is adjusted, and capacitance variations are further suppressed.Furthermore, the chip can be made smaller.

[0091] [Fourth Embodiment] A capacitor according to a fourth embodiment of the present invention further includes a third dielectric film and three fourth electrodes (i.e., M=3) on the three third electrodes (i.e., M=3), and differs from the third embodiment in that at least two of the three fourth electrodes have different areas.

[0092] Fig. 10 is a cross-sectional view schematically showing an example of a capacitor according to a fourth embodiment of the present invention. Fig. 11 is a plan view schematically showing an example of a capacitor according to the fourth embodiment of the present invention. Fig. 10 is a cross-sectional view taken along line II of the capacitor shown in Fig. 11. Fig. 12 shows an equivalent circuit of the capacitor shown in Figs. 10 and 11.

[0093] The capacitor 4 shown in Figures 10 and 11 further includes a third dielectric film 34 provided on the three third electrodes 32, and three fourth electrodes 35 provided on the three third electrodes 32, respectively, via the third dielectric film 34.

[0094] That is, three capacitor elements CAP7, CAP8, and CAP9 are composed of three third electrodes 32, a third dielectric film 34, and three fourth electrodes 35, and nine capacitor elements CAP1 to CAP9 are electrically connected in series (see Figure 12).

[0095] In this way, in this embodiment, the number of series connections can be increased, and capacitance variations can be further suppressed. Furthermore, since the capacitor elements are formed in the thickness direction, the chip can be made smaller.

[0096] 10 and 11, at least two of the three fourth electrodes 35 have different areas. This makes it possible to adjust the capacitance center. This is because the area of ​​each fourth electrode 35 can be set so as to cancel out the film thickness distribution of the third dielectric film 34 within the wafer surface.

[0097] More specifically, each fourth electrode 35 is composed of a first region 36a having a rectangular planar shape and a second region 36b having a rectangular planar shape protruding from the first region 36a. The areas of the first regions 36a of the three fourth electrodes 35 are the same, while the areas of the second regions 36b of at least two of the three fourth electrodes 35 are different from one another.

[0098] The areas of all the fourth electrodes 35 may be different from one another, or the areas of the second regions 36b of all the fourth electrodes 35 may be different from one another.

[0099] 11 shows a state in which each fourth electrode 35 completely overlaps the opposing third electrode 32 when viewed from the thickness direction T, but each fourth electrode 35 may partially overlap the opposing third electrode 32 when viewed from the thickness direction T. Also, while FIG. 11 shows a state in which each third electrode 32 completely overlaps the opposing second electrode 24 when viewed from the thickness direction T, each third electrode 32 may partially overlap the opposing second electrode 24 when viewed from the thickness direction T. Also, each fourth electrode 35 may be formed within the frame of each third electrode 32, and each third electrode 32 may be formed within the frame of each second electrode 24.

[0100] The capacitor 4 shown in FIGS. 10 and 11 is manufactured using the method described in, for example, Japanese Patent Application Laid-Open No. 2003-144999.

[0101] The components specific to this embodiment will be described in detail below.

[0102] The third dielectric film 34 is provided so as to cover the third electrode 32 except for the opening. In Fig. 10, the end of the third dielectric film 34 is also provided on the surface of the second dielectric film 31 between the end of the first electrode 22 and the second dielectric film 31. The end of the third dielectric film 34 does not have to extend to the end of the substrate 10.

[0103] The material for the third dielectric film 34 is not particularly limited, but is preferably SiO ２ , SiN, Al ２ O ３ , HfO ２ , Ta ２ O ５ Examples of oxides or nitrides include those mentioned above.

[0104] The fourth electrode 35 is provided opposite the third electrode 32 with the third dielectric film 34 sandwiched therebetween. More specifically, the fourth electrode 35 includes a fourth electrode 35A opposite the third electrode 32A, a fourth electrode 35B opposite the third electrode 32B, and a fourth electrode 35C opposite the third electrode 32C.

[0105] The material constituting the fourth electrode 35 is not particularly limited, but is preferably Cu, Ag, Au, Al, Ni, Cr, or Ti, or an alloy containing at least one of these metals.

[0106] The external electrodes 27 constituting the terminal electrodes 27A and 27B are electrically connected to the capacitor elements (here, the capacitor elements CAP7 and CAP3) connected in series to both ends of the nine capacitor elements CAP1 to CAP9. More specifically, the external electrodes 27 constituting the terminal electrodes 27A and 27B are connected to the fourth electrode 35A and the first electrode 22B, respectively.

[0107] On the other hand, the external electrode 27C, which does not constitute the terminal electrodes 27A and 27B, is electrically connected to two of the nine capacitor elements CAP1 to CAP9 (here, the capacitor elements CAP8 and CAP9) excluding the capacitor elements connected in series at both ends. More specifically, the external electrode 27C is connected to the fourth electrodes 35B and 35C.

[0108] In this embodiment, a capacitor can be realized in which the number of series connections is large, the center of capacitance is adjusted, and capacitance variations are further suppressed.Furthermore, the chip can be made smaller.

[0109] Fifth Embodiment A capacitor according to a fifth embodiment of the present invention differs from the second embodiment in that an element isolation is provided between three capacitor elements within a semiconductor substrate.

[0110] Fig. 13 is a cross-sectional view schematically showing an example of a capacitor according to a fifth embodiment of the present invention. Fig. 14 is a plan view schematically showing an example of a capacitor according to the fifth embodiment of the present invention. Fig. 13 is a cross-sectional view taken along line II of the capacitor shown in Fig. 14. Fig. 15 shows an equivalent circuit of the capacitor shown in Figs. 13 and 14.

[0111] In the capacitor 5 shown in FIGS. 13 and 14, the substrate 10 is a semiconductor substrate, and isolation 37 is provided in the semiconductor substrate between the three capacitor elements CAP1, CAP2, and CAP3.

[0112] This reduces the current flowing through the semiconductor substrate between adjacent capacitor elements, thereby reducing the mutual interference between the adjacent capacitor elements, thereby improving the accuracy of the center capacitance value and capacitance variation of the capacitor 5.

[0113] Specifically, the element isolation 37 is formed by forming a cavity in the semiconductor substrate and insulating the SiO ２ This is a structure in which a film is buried (STI: Shallow Trench Isolation).

[0114] 14, the isolation 37 is provided at least between adjacent capacitor elements (here, between capacitor elements CAP1 and CAP2 and between capacitor elements CAP2 and CAP3), and is preferably provided so as to surround the periphery of each of the capacitor elements CAP1, CAP2, and CAP3. Furthermore, the isolation 37 is preferably arranged so as to overlap with and frame the peripheral portion of the first electrode 22.

[0115] Sixth Embodiment A capacitor according to a sixth embodiment of the present invention differs from the fifth embodiment in that the material of the element isolation is different.

[0116] Fig. 16 is a cross-sectional view schematically showing an example of a capacitor according to a sixth embodiment of the present invention. Fig. 17 is a plan view schematically showing an example of a capacitor according to the sixth embodiment of the present invention. Fig. 16 is a cross-sectional view taken along line II of the capacitor shown in Fig. 17. Fig. 18 shows an equivalent circuit of the capacitor shown in Figs. 16 and 17.

[0117] 16 and 17, the substrate 10 is an n-type semiconductor substrate, and the element isolation 37 has a structure in which a p+ active layer is formed in the n-type semiconductor substrate. Such element isolation 37 can be formed, for example, by implanting a high concentration of p-type impurities into the n-type semiconductor substrate by ion implantation.

[0118] This embodiment also reduces the current flowing through the semiconductor substrate between adjacent capacitor elements, thereby reducing the mutual interference between the adjacent capacitor elements, thereby improving the accuracy of the center capacitance value and capacitance variation of the capacitor 6.

[0119] [Other Embodiments] The semiconductor device of the present invention is not limited to the above-described embodiments, and various applications and modifications can be made within the scope of the present invention with respect to the configuration, manufacturing conditions, etc. of the semiconductor device such as a capacitor.

[0120] For example, while the above embodiment has been described with reference to the case where M=3, M is not particularly limited as long as it is an integer of 3 or greater that satisfies M>N, and may be, for example, M=4. For example, in the first embodiment, a fourth second electrode may be provided on the first electrode 22B via the first dielectric film 23, and the terminal electrode 27B may be connected to the second electrode. Furthermore, in the third embodiment, a fourth second electrode may be provided on the first electrode 22B via the first dielectric film 23, and a fourth third electrode may be provided on the second electrode via the second dielectric film 31, and the terminal electrode 27B may be connected to the third electrode. Furthermore, in the fourth embodiment, a fourth second electrode may be provided on the first electrode 22B via the first dielectric film 23, a fourth third electrode may be provided on the second electrode via the second dielectric film 31, and a fourth fourth electrode may be provided on the third electrode via the third dielectric film 34, and the terminal electrode 27B may be connected to the fourth electrode.

[0121] Furthermore, in the above embodiment, the case where N = 2 has been described, but N is not particularly limited as long as it is an integer of 2 or more, and may be, for example, 3. For example, in the first embodiment, a third first electrode may be provided between the two first electrodes 22A and 22B, and fourth and fifth second electrodes may be provided on the first electrode via the first dielectric film 23, thereby forming fourth and fifth capacitor elements (a total of five capacitor elements connected in series), and the fourth capacitor element and capacitor element CAP2 may be electrically connected in series via an external electrode that does not constitute the terminal electrodes 27A and 27B, and the fifth capacitor element and capacitor element CAP3 may be electrically connected in series via an external electrode that does not constitute the terminal electrodes 27A and 27B.

[0122] The present specification discloses the following:

[0123] <1> A semiconductor device comprising: a substrate; N (where N is an integer of 2 or more) first electrodes provided on the substrate; a first dielectric film provided on the N first electrodes; M (where M is an integer of 3 or more satisfying M>N) second electrodes provided on the N first electrodes via the first dielectric film; a first protective layer covering the N first electrodes and the M second electrodes; three or more external electrodes penetrating the first protective layer; and a second protective layer covering all but two of the three or more external electrodes, wherein at least one second electrode is disposed on each of the first electrodes; M capacitor elements are configured from the N first electrodes, the first dielectric film, and the M second electrodes; and the M capacitor elements are electrically connected in series, A semiconductor device, wherein, of the M capacitor elements, two capacitor elements having two second electrodes arranged on the same first electrode are electrically connected in series by their first electrodes; the two external electrodes not covered by the second protective layer constitute two terminal electrodes electrically connected to two of the M capacitor elements, respectively; and, of the M capacitor elements, two capacitor elements having two second electrodes arranged on different first electrodes are electrically connected in series by their external electrodes not constituting the two terminal electrodes; and the external electrodes not constituting the two terminal electrodes are covered by the second protective layer.

[0124] <2> The semiconductor device according to <1>, wherein at least two of the M second electrodes have different areas.

[0125] <3> The semiconductor device according to <1> or <2>, further comprising: a second dielectric film provided on the M second electrodes; and M third electrodes provided on the M second electrodes, respectively, via the second dielectric film.

[0126] <4> The semiconductor device according to <3>, wherein at least two of the M third electrodes have different areas.

[0127] <5> The semiconductor device according to <3> or <4>, further comprising: a third dielectric film provided on the M third electrodes; and M fourth electrodes provided on the M third electrodes, respectively, via the third dielectric film.

[0128] <6> The semiconductor device according to claim <5>, wherein at least two of the M fourth electrodes have areas different from each other.

[0129] <7> The semiconductor device according to any one of <1> to <6>, wherein the substrate is a semiconductor substrate, and an element isolation is provided in the semiconductor substrate between the M capacitor elements.

[0130] 1, 2, 3, 4, 5, 6 Capacitor (semiconductor device) 10 Substrate 21 Insulating film 22, 22A, 22B First electrode 23 First dielectric film 24, 24A, 24B, 24C Second electrode 25 Moisture-resistant film 26 First protective layer 27 External electrode 27A, 27B External electrode (terminal electrode) 27C External electrode (connecting wiring) 28a Seed layer 28b First plating layer 28c Second plating layer 29 Second protective layer 30a First region of second electrode 30b Second region of second electrode 31 Second dielectric film 32, 32A, 32B, 32C Third electrode 33a First region of third electrode 33b Second region of third electrode 34 Third dielectric film 35, 35A, 35B, 35C Fourth electrode 36a: First region of fourth electrode; 36b: Second region of fourth electrode; 37: Element isolation; CAP1 to CAP9: Capacitor elements;

Claims

1. A substrate; N (where N is an integer of 2 or more) first electrodes provided on the substrate; a first dielectric film provided on the N first electrodes; M second electrodes (where M is an integer of 3 or more satisfying M>N) provided on the N first electrodes via the first dielectric film; a first protective layer covering the N first electrodes and the M second electrodes; three or more external electrodes penetrating the first protective layer; a second protective layer that covers all but two of the three or more external electrodes, at least one second electrode is disposed on each of the first electrodes; the N first electrodes, the first dielectric film, and the M second electrodes constitute M capacitor elements; The M capacitor elements are electrically connected in series, Among the M capacitor elements, two capacitor elements having two second electrodes arranged on the same first electrode are electrically connected in series at their first electrodes; the two external electrodes not covered with the second protective layer constitute two terminal electrodes electrically connected to two capacitor elements out of the M capacitor elements, respectively; Among the M capacitor elements, two capacitor elements each having two second electrodes arranged on different first electrodes are electrically connected in series by external electrodes that do not constitute the two terminal electrodes, The external electrodes that do not constitute the two terminal electrodes are covered with the second protective layer.

2. The semiconductor device according to claim 1 , wherein at least two of said M second electrodes have areas different from each other.

3. a second dielectric film provided on the M second electrodes; 3. The semiconductor device according to claim 1, further comprising: M third electrodes provided on the M second electrodes, respectively, with the second dielectric film interposed therebetween.

4. The semiconductor device according to claim 3 , wherein at least two of said M third electrodes have areas different from each other.

5. a third dielectric film provided on the M third electrodes; 4. The semiconductor device according to claim 3, further comprising: M fourth electrodes respectively provided on said M third electrodes with said third dielectric film interposed therebetween.

6. The semiconductor device according to claim 5 , wherein at least two of said M fourth electrodes have areas different from each other.

7. the substrate is a semiconductor substrate, 3. The semiconductor device according to claim 1, wherein an isolation is provided in the semiconductor substrate between the M capacitor elements.