Position detector and linear transport system

Abstract

The position detector (5) includes a position detection magnet (6) that can be installed on a mover (4) that moves along a conveying path (2) having a stator (3), a position detection unit (7) that can be installed on the conveying path (2) and detects a magnetic field generated from the position detection magnet (6), a plurality of magnetic shielding members (8) that can be installed side by side with gaps (10) in a first direction (A) in which the mover (4) moves along the conveying path (2) and can shield magnetic flux from the mover magnet (4c) of the mover (4) and the coil (3b) of the stator (3) toward the position detection unit (7), and a gap magnetic shielding member (9) that closes the gaps (10) between adjacent magnetic shielding members (8) and can shield magnetic flux.

Description

[Technical field]

[0001] The present disclosure relates to a position detector that detects the position of a mover and a linear transport system. [Background technology]

[0002] Conventionally, linear servo motors having a mover and a stator are known. The mover has a structure having a base and a moving magnet attached to the base to generate a magnetic field for movement. The stator has a structure having a stator core and a coil attached to the stator core to generate a magnetic field for movement. In a linear servo motor, a magnetic field is generated by passing a current through the coil of the stator, and this magnetic field generates a propulsive force that moves the mover, thereby moving the mover. Linear servo motors are installed in linear transport systems that transport goods, etc.

[0003] A magnetic position detector that detects the position of a mover is generally used in a linear conveyance system equipped with a linear servo motor. The position detector includes a position detection magnet that is installed on the mover and generates a magnetic field for position detection, and a position detection unit that detects the magnetic field generated by the position detection magnet.

[0004] If the magnetic flux generated from the moving magnet and the coil interferes with the position detection section, the magnetic field generated from the position detection magnet cannot be accurately detected by the position detector, resulting in a problem of a deterioration in the accuracy of detecting the position of the mover.

[0005] As a technique for suppressing such problems, Patent Document 1 discloses a technique for shielding magnetic flux from the coil toward the position detector by disposing a magnetic shielding member between the stator and the position detector. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] International Publication No. 2021 / 124439 Summary of the Invention [Problem to be solved by the invention]

[0007] In the case of a linear conveyance system in which the movable distance of the mover is long, it is necessary to prepare each of the stator and the magnetic shielding member by dividing them into several parts, and when assembling the linear conveyance system, it is necessary to arrange the several stators in the conveyance direction and arrange the several magnetic shielding members in the conveyance direction. Even if several magnetic shielding members are arranged without gaps, gaps will occur between adjacent magnetic shielding members due to unavoidable dimensional tolerances, assembly tolerances, etc. Then, the magnetic flux generated from the movable magnet and the coil passes through the gap toward the position detection unit, and the magnetic flux generated from the movable magnet and the coil interferes with the position detection unit. Therefore, the technology disclosed in Patent Document 1 has room for improvement in terms of improving the accuracy of detecting the position of the mover.

[0008] The present disclosure has been made in consideration of the above, and aims to obtain a position detector that can prevent magnetic flux generated from a moving magnet and a coil from passing through a gap and interfering with the position detection unit, thereby improving the accuracy of detecting the position of the mover compared to conventional methods. [Means for solving the problem]

[0009] In order to solve the above problems and achieve the object, the position detector according to the present disclosure includes a position detection magnet that can be installed on a mover that moves along a transport path having a stator, and a position detection unit that can be installed on the transport path and detects a magnetic field generated from the position detection magnet. The position detector according to the present disclosure also includes a plurality of magnetic shielding members that can be installed side by side with gaps in a first direction that is the direction in which the mover moves along the transport path and that can shield magnetic flux from the mover magnet and the coil of the stator toward the position detection unit, and a gap magnetic shielding member that closes the gap between adjacent magnetic shielding members and can shield magnetic flux. A step is formed between adjacent magnetic shielding members so as to be offset in a second direction perpendicular to the first direction. The gap magnetic shielding members are bent to fit along the step and are in contact with the adjacent magnetic shielding members. Effect of the Invention

[0010] The position detector according to the present disclosure has the advantage of preventing magnetic flux generated from the moving magnet and coil from passing through the gap and interfering with the position detection unit, thereby improving the accuracy of detecting the position of the mover compared to conventional techniques. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a plan view showing an entire linear transport system according to a first embodiment; [Diagram 2] FIG. 1 is a cross-sectional view showing a linear transport system according to a first embodiment. [Diagram 3] FIG. 1 is a plan view showing a linear transport system according to a first embodiment; [Figure 4] FIG. 1 is a side view showing a linear transport system according to a first embodiment; [Diagram 5] FIG. 1 is an explanatory diagram for explaining an effect of the linear transport system according to the first embodiment. [Figure 6] FIG. 11 is a side view showing a linear transport system according to a second embodiment. [Figure 7] FIG. 11 is a side view showing a linear transport system according to a third embodiment. [Figure 8] FIG. 13 is a side view showing a linear transport system according to a fourth embodiment. [Figure 9] FIG. 13 is a side view showing a linear transport system according to a fifth embodiment. [Figure 10] FIG. 13 is a side view showing a linear transport system according to a sixth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A position detector and a linear transport system according to an embodiment will be described below in detail with reference to the drawings.

[0013] Embodiment 1 FIG. 1 is a plan view showing an entire linear conveyance system 1 according to the first embodiment. FIG. 2 is a cross-sectional view showing the linear conveyance system 1 according to the first embodiment. The linear conveyance system 1 is a system that conveys an article using a linear servo motor. As shown in FIG. 1, the linear conveyance system 1 includes a conveyance path 2 having a plurality of stators 3, and a plurality of movers 4. As shown in FIG. 2, the linear conveyance system 1 also includes a position detector 5. Although not shown in the figure, the linear conveyance system 1 includes a control device that controls the movement of the movers 4.

[0014] FIG. 2 shows a cross section perpendicular to the conveying direction, which is the moving direction of the mover 4 along the conveying path 2. In the following description, the conveying direction perpendicular to the paper surface of FIG. 2 and in which the mover 4 moves along the conveying path 2 is referred to as the first direction A. The direction perpendicular to the first direction A is referred to as the second direction B. The direction perpendicular to the first direction A and the second direction B is referred to as the third direction C. In the following description, the second direction B is referred to as the vertical direction. In the following description, the upper side of the paper surface of the second direction B is referred to as the upside, and the lower side of the paper surface of the second direction B is referred to as the downside. In FIG. 2, for convenience of explanation, a stator core 3a of the stator 3, which will be described later, and a housing 4a and a base 4b of the mover 4, which will be described later, are cross-sectionally hatched.

[0015] The shape of the conveying path 2 shown in FIG. 1 is a track shape having a straight portion and a curved portion, but may be changed as appropriate. For example, the shape of the conveying path 2 may be straight and curved, may be another shape having a straight portion and a curved portion, or may be a branched shape branched into a plurality of parts along the way. As shown in FIG. 2, the conveying path 2 has a stator 3. Although not shown, the conveying path 2 has a base member that holds the stator 3, a position detection unit 7 described later, and a magnetic shielding member 8 described later, and mounting members that are disposed between the stator 3, the position detection unit 7, and the magnetic shielding member 8 and the base member. When assembling the conveying path 2, the stator 3, the position detection unit 7, and the magnetic shielding member 8 may be mounted on the same mounting member, and then this mounting member may be mounted on the base member. Alternatively, when assembling the conveying path 2, the stator 3 may be mounted on one mounting member, and the position detection unit 7 and the magnetic shielding member 8 may be mounted on another mounting member, and then each mounting member may be mounted on the base member.

[0016] FIG. 3 is a plan view showing the linear conveying system 1 according to the first embodiment. FIG. 4 is a side view showing the linear conveying system 1 according to the first embodiment. As shown in FIG. 3, the stator 3 is divided into multiple parts in the first direction A. In the illustrated example, the number of stators 3 is two, but this is not intended to limit the number of stators 3. The multiple stators 3 are installed side by side in the first direction A. Adjacent stators 3 are installed consecutively. Each stator 3 includes a stator core 3a and multiple coils 3b.

[0017] The stator core 3a includes a core back 3c and a plurality of teeth 3d. The core back 3c extends in a first direction A. The plurality of teeth 3d protrude in a third direction C from an end of the core back 3c facing the mover 4. The plurality of teeth 3d are arranged at intervals from one another in the first direction A.

[0018] Each of the coils 3b is provided on each of the teeth 3d, that is, each of the coils 3b is formed by winding a wire around each of the teeth 3d.

[0019] The mover 4 is a member that moves along the transport path 2 and constitutes a linear servo motor together with the stator 3. As shown in Fig. 2, the mover 4 has a housing 4a, a base 4b, and a mover magnet 4c.

[0020] The housing 4a is a plate-shaped member that holds the base 4b. The housing 4a extends in the second direction B. The housing 4a extends longer in the second direction B than the stator 3.

[0021] The base 4b is a plate-like member attached to the surface of the housing 4a facing the stator 3. The base 4b is disposed at a position near one end of the housing 4a in the second direction B. The base 4b and the stator 3 are in the same position in the second direction B. The base 4b and the stator 3 face each other in the third direction C. The base 4b extends in the second direction B.

[0022] The movable magnet 4c is a member that generates a magnetic field for moving the mover 4. The movable magnet 4c is, for example, a permanent magnet. The movable magnet 4c is attached to the surface of the base 4b that faces the stator 3. The movable magnet 4c is attached to the housing 4a via the base 4b. The movable magnet 4c and the stator 3 are positioned in the same position in the second direction B. The movable magnet 4c and the stator 3 are arranged facing each other and spaced apart from each other in the third direction C. The movable magnet 4c extends in the second direction B.

[0023] The movable magnet 4c has a magnetic field generating surface 4d that generates a magnetic field. The magnetic field generating surface 4d is a surface of the movable magnet 4c that faces the stator 3, and in this embodiment, it is a surface that extends in the second direction B. The magnetic field generating surface 4d is a plane that is perpendicular to the third direction C. A magnetic field is generated by a current flowing through the coil 3b, and this magnetic field generates a driving force in the movable magnet 4c, which can move the mover 4. As shown in FIG. 3, a plurality of movable magnets 4c are attached to one base 4b. The plurality of movable magnets 4c are arranged at intervals from each other in the first direction A. In the illustrated example, the number of movable magnets 4c is three, but this is not intended to limit the number of movable magnets 4c. In addition, the plurality of movable magnets 4c do not need to be arranged at intervals from each other.

[0024] 2, the position detector 5 includes a position detection magnet 6, a position detection unit 7, a magnetic shielding member 8, and a gap magnetic shielding member 9. The position detector 5 is a device for detecting the position of the mover 4.

[0025] The position detection magnet 6 is a magnet that generates a magnetic field for detecting the position of the mover 4. The position detection magnet 6 is, for example, a scale magnet having a plurality of magnetic poles. The position detection magnet 6 is installed on the mover 4. The position detection magnet 6 is attached to the surface of the housing 4a that faces the stator 3. The position detection magnet 6 is disposed at a position near the other end of the housing 4a that is opposite to the one end to which the base 4b is disposed in the second direction B. The stator 3 and the position detection magnet 6 are disposed apart from each other in the second direction B. The mover magnet 4c and the position detection magnet 6 are disposed apart from each other in the second direction B. The position detection magnet 6 extends in the third direction C.

[0026] The position detecting magnet 6 has a magnetic field generating surface 6a that generates a magnetic field. The magnetic field generating surface 6a is a surface of the position detecting magnet 6 that faces the position detecting unit 7, and in this embodiment, is a surface that extends in the third direction C. The magnetic field generating surface 6a is a flat surface that is perpendicular to the second direction B. The magnetic field generating surface 4d of the movable magnet 4c and the magnetic field generating surface 6a of the position detecting magnet 6 are perpendicular to each other.

[0027] The position detection unit 7 is installed on the transport path 2 and detects the magnetic field generated from the position detection magnet 6. The position detection unit 7 is disposed between the stator 3 and the position detection magnet 6 in the second direction B. The stator 3 and the position detection unit 7 are disposed apart from each other in the second direction B. The movable magnet 4c and the position detection unit 7 are disposed apart from each other in the second direction B.

[0028] As shown in FIG. 4, a plurality of position detection units 7 are arranged at intervals from each other in the first direction A. In the illustrated example, the number of position detection units 7 is two, but the number of position detection units 7 is not limited. Each position detection unit 7 includes one substrate 7a and a plurality of magnetic sensors 7b attached to the substrate 7a. The magnetic sensors 7b are, for example, magnetoresistance elements or Hall elements. The plurality of magnetic sensors 7b are arranged at intervals from each other in the first direction A. The magnetic sensors 7b are attached to the surface of the substrate 7a facing the position detection magnet 6. As shown in FIG. 2, the position detection magnet 6 and the magnetic sensor 7b are aligned in the third direction C. The position detection magnet 6 and the magnetic sensor 7b face each other in the second direction B. The position detection magnet 6 and the magnetic sensor 7b are arranged apart from each other in the second direction B.

[0029] As shown in FIG. 4, the magnetic shielding member 8 is divided into a plurality of parts in the first direction A. In the illustrated example, the number of the magnetic shielding members 8 is two, but the number of the magnetic shielding members 8 is not limited. The magnetic shielding members 8 are arranged in a line in the first direction A with a gap 10 therebetween, and shield the magnetic flux from the movable magnet 4c of the mover 4 and the coil 3b of the stator 3 toward the position detector 7. The material of the magnetic shielding member 8 is, for example, a magnetic body. The magnetic body is, for example, a cold-rolled steel plate, a carbon steel plate such as S45C, or an electromagnetic steel plate. The magnetic shielding member 8 extends in the first direction A. In this embodiment, the magnetic shielding member 8 is a plate-shaped member that is longer in the first direction A than in the second direction B. The magnetic shielding member 8 is disposed between the movable magnet 4c and the position detector 7 in the second direction B, and is disposed between the stator 3 and the position detector 7 in the second direction B.

[0030] In the illustrated example, the dividing positions 12 of adjacent stators 3 and the dividing positions 13 of adjacent magnetic shielding members 8 coincide in the first direction A, but they may be offset from each other in the first direction A. In the following description, when it is necessary to distinguish between adjacent magnetic shielding members 8, one magnetic shielding member 8 will be referred to as magnetic shielding member 8A and the other magnetic shielding member 8 will be referred to as magnetic shielding member 8B.

[0031] It is preferable that the multiple magnetic shielding members 8 are arranged side by side in the first direction A with no gaps between them, but in reality, when the multiple stators 3 are arranged side by side in the first direction A with no gaps between them, gaps 10 will be generated between the adjacent magnetic shielding members 8 due to unavoidable dimensional tolerances, assembly tolerances, and gaps that are intentionally provided to avoid problems due to interference. These gaps 10 vary widely, from large to small enough that they cannot be distinguished at a glance, but for ease of explanation, the gaps 10 are shown enlarged here. The same applies below.

[0032] The gap magnetic shielding member 9 is a member that blocks the gap 10 between the adjacent magnetic shielding members 8 and shields the magnetic flux from the movable magnet 4c and the coil 3b toward the position detection unit 7. More specifically, the gap magnetic shielding member 9 is a member that blocks the magnetic flux from the movable magnet 4c and the coil 3b from passing through the gap 10 toward the position detection unit 7. The material of the gap magnetic shielding member 9 is, for example, a magnetic body. The magnetic body is, for example, a cold-rolled steel plate, a carbon steel plate such as S45C, or an electromagnetic steel plate. In this embodiment, the gap magnetic shielding member 9 is formed separately from the magnetic shielding member 8. The gap magnetic shielding member 9 extends in a first direction A. In this embodiment, the gap magnetic shielding member 9 is a plate-shaped member that is longer in the first direction A than in the second direction B.

[0033] The gap magnetic shielding member 9 spans the gap 10 and is in contact with each of the two adjacent magnetic shielding members 8. The gap magnetic shielding member 9 is fixed to the magnetic shielding member 8 by, for example, screws. The magnetic shielding member 8 and the gap magnetic shielding member 9 may have the same thickness or different thicknesses. The magnetic shielding member 8 and the gap magnetic shielding member 9 may be made of the same material or different materials.

[0034] Here, the arrangement of the magnetic shielding member 8, the movable magnet 4c, the stator 3, and the position detector 7 will be described in more detail with reference to FIG. 2. The distance between the magnetic shielding member 8 and the movable magnet 4c along the second direction B is defined as distance D1. More specifically, the distance D1 is the distance from the side of the movable magnet 4c close to the magnetic shielding member 8 in the second direction B to the magnetic shielding member 8. The distance between the magnetic shielding member 8 and the stator 3 along the second direction B is defined as distance D2. More specifically, the distance D2 is the distance from the side of the stator 3 close to the magnetic shielding member 8 in the second direction B to the magnetic shielding member 8. The distance between the magnetic shielding member 8 and the position detector 7 along the second direction B is defined as distance D3. More specifically, the distance D3 is the distance between the magnetic shielding member 8 and the magnetic sensor 7b of the position detector 7 along the second direction B. In this embodiment, the magnetic shielding member 8, the movable magnet 4c, the stator 3, and the position detector 7 are arranged so that the distance D1 is shorter than the distance D3 and the distance D2 is shorter than the distance D3. The magnetic shielding member 8, the movable magnet 4c, the stator 3, and the position detector 7 may be arranged so that at least one of the distance D1 being shorter than the distance D3 and the distance D2 being shorter than the distance D3 is satisfied.

[0035] Next, the effects of the linear transport system 1 according to this embodiment will be described.

[0036] 4, in this embodiment, the linear transport system 1 includes a gap magnetic shielding member 9 that closes the gap 10 between adjacent magnetic shielding members 8 and can shield the magnetic flux from the movable magnet 4c and the coil 3b toward the position detection unit 7. This configuration can prevent the magnetic flux generated from the movable magnet 4c and the coil 3b from passing through the gap 10 toward the position detection unit 7. This prevents the magnetic flux generated from the movable magnet 4c and the coil 3b from passing through the gap 10 and interfering with the position detection unit 7, and can improve the accuracy of detecting the position of the mover 4 compared to the conventional art.

[0037] FIG. 5 is an explanatory diagram for explaining the effect of the linear conveyance system 1 according to the first embodiment. In FIG. 5, the solid arrow indicates the magnetic flux generated from the movable magnet 4c and the coil 3b. In FIG. 5, for convenience of explanation, the magnetic shielding member 9 for the gap is omitted. In this embodiment, as shown in FIG. 5, the stator 3 and the position detection magnet 6 are arranged apart from each other in the second direction B, and the position detection unit 7 is arranged between the stator 3 and the position detection magnet 6 in the second direction B. In this embodiment, the magnetic shielding member 8 is arranged between the stator 3 and the position detection unit 7 in the second direction B. With these configurations, the magnetic flux generated from the coil 3b and the movable magnet 4c returns to the stator core 3a through the magnetic shielding member 8.

[0038] Specifically, when the coil 3b is energized, the magnetic flux generated from the coil 3b flows through the movable magnet 4c and then flows to the base 4b. When the coil 3b is energized, the magnetic flux generated from the movable magnet 4c flows to the base 4b. Next, the magnetic flux that flows to the base 4b is divided into a route toward the magnetic shielding member 8 and a route toward the opposite side of the magnetic shielding member 8 in the second direction B. The magnetic flux that flows from the base 4b toward the magnetic shielding member 8 flows along the magnetic shielding member 8 and then returns to the stator core 3a from the end of the stator core 3a facing the opposite side to the mover 4. The magnetic flux that flows from the base 4b toward the opposite side of the magnetic shielding member 8 in the second direction B passes outside the stator 3 and then returns to the stator core 3a from the end of the stator core 3a facing the opposite side to the mover 4. Therefore, the magnetic flux generated from the moving magnet 4c and the coil 3b is further prevented from interfering with the position detector 7, and the accuracy with which the position of the mover 4 is detected can be further improved.

[0039] In this embodiment, as shown in FIG. 2, the movable magnet 4c and the position detector 7 are arranged apart from each other in the second direction B, and the stator 3 and the position detector 7 are arranged apart from each other in the second direction B. In this embodiment, the magnetic shielding member 8 is arranged between the movable magnet 4c and the position detector 7 in the second direction B, and between the stator 3 and the position detector 7 in the second direction B. In this embodiment, the magnetic shielding member 8, the movable magnet 4c, the stator 3, and the position detector 7 are arranged so that both of the distance D1 is shorter than the distance D3 and the distance D2 is shorter than the distance D3 are satisfied. With these configurations, the effect of the magnetic flux generated from the coil 3b and the movable magnet 4c returning to the stator core 3a through the magnetic shielding member 8 can be further enhanced. Therefore, the magnetic flux generated from the movable magnet 4c and the coil 3b is further prevented from interfering with the position detector 7, and the accuracy of detecting the position of the mover 4 can be further improved.

[0040] 2, in this embodiment, the magnetic field generating surface 4d of the movable magnet 4c and the magnetic field generating surface 6a of the position detecting magnet 6 are perpendicular to each other. With this configuration, the magnetic flux generated from the movable magnet 4c is less likely to interfere with the position detecting unit 7, so that the accuracy of detecting the position of the mover 4 can be further improved.

[0041] Embodiment 2 Next, a linear conveying system 1A according to a second embodiment will be described with reference to Fig. 6. Fig. 6 is a side view showing the linear conveying system 1A according to the second embodiment. In this embodiment, the configuration of the gap magnetic shielding member 9 is different from that of the first embodiment. In the second embodiment, the same reference numerals are used for the parts that overlap with those of the first embodiment, and the description thereof will be omitted.

[0042] It is preferable that the positions of adjacent magnetic shielding members 8 in the second direction B are the same. However, in reality, a step 11 may occur between adjacent magnetic shielding members 8 due to dimensional tolerances of each magnetic shielding member 8, assembly tolerances of each magnetic shielding member 8, and intentional misalignment to avoid problems caused by interference between magnetic shielding members 8. This step 11 varies from large to small, which cannot be distinguished at a glance, but for convenience of explanation, the step 11 is illustrated large here. Adjacent magnetic shielding members 8 are misaligned in the second direction B. In this embodiment, one magnetic shielding member 8A is disposed closer to the stator 3 than the other magnetic shielding member 8B. A step 11 misaligned in the second direction B occurs between adjacent magnetic shielding members 8A and 8B. The gap magnetic shielding member 9 is bent so as to fit along the step 11 and is in contact with each of the adjacent magnetic shielding members 8A and 8B.

[0043] Next, the effects of the linear transport system 1A according to this embodiment will be described.

[0044] In this embodiment, a step 11 is formed between adjacent magnetic shielding members 8A, 8B, which is offset in the second direction B, and the gap magnetic shielding member 9 is bent along the step 11 to contact each of the adjacent magnetic shielding members 8A, 8B. With this configuration, even if a step 11 is formed between adjacent magnetic shielding members 8A, 8B, it is possible to eliminate a magnetic gap between each of the magnetic shielding members 8A, 8B and the gap magnetic shielding member 9. That is, by bending the gap magnetic shielding member 9 to match the step 11 between adjacent magnetic shielding members 8A, 8B and bringing the gap magnetic shielding member 9 into contact with each of the adjacent magnetic shielding members 8A, 8B, it is possible to eliminate a magnetic gap between each of the magnetic shielding members 8A, 8B and the gap magnetic shielding member 9. As a result, even if a step 11 occurs between adjacent magnetic shielding members 8A, 8B, the magnetic flux generated from the movable magnet 4c and the coil 3b is prevented from interfering with the position detection unit 7, thereby improving the accuracy of detecting the position of the movable element 4 compared to the conventional art.

[0045] Embodiment 3 Next, a linear conveying system 1B according to a third embodiment will be described with reference to Fig. 7. Fig. 7 is a side view showing the linear conveying system 1B according to the third embodiment. In this embodiment, the configuration of the gap magnetic shielding member 9 is different from that of the first embodiment. In the third embodiment, the same reference numerals are used for the parts that overlap with those of the first embodiment, and the description thereof will be omitted.

[0046] The gap magnetic shielding member 9 is formed integrally with one of the adjacent magnetic shielding members 8. The gap magnetic shielding member 9 extends from an end of one magnetic shielding member 8A facing the other magnetic shielding member 8B toward the stator 3, and then extends toward the other magnetic shielding member 8B. The gap magnetic shielding member 9 closes the gap 10 from the stator 3 side. The gap magnetic shielding member 9 is in contact with a surface of the other magnetic shielding member 8B facing the stator 3.

[0047] The gap magnetic shielding member 9 may extend from an end of one magnetic shielding member 8A facing the other magnetic shielding member 8B toward the position detection unit 7, and then extend toward the other magnetic shielding member 8B. In such a configuration, the gap magnetic shielding member 9 closes the gap 10 from the position detection unit 7 side and comes into contact with the surface of the other magnetic shielding member 8B facing the position detection unit 7. The gap magnetic shielding member 9 may also be formed on the other magnetic shielding member 8B.

[0048] Next, the effects of the linear transport system 1B according to this embodiment will be described.

[0049] In this embodiment, the gap magnetic shielding member 9 is formed integrally with one of the adjacent magnetic shielding members 8. This configuration reduces the number of parts and improves the accuracy of detecting the position of the mover 4 compared to the conventional method, as in the first embodiment.

[0050] Embodiment 4 Next, a linear conveying system 1C according to a fourth embodiment will be described with reference to Fig. 8. Fig. 8 is a side view showing the linear conveying system 1C according to the fourth embodiment. In this embodiment, the configuration of the gap magnetic shielding member 9 differs from that of the first embodiment. In the fourth embodiment, the same reference numerals are used for the parts that overlap with those of the first embodiment, and the description thereof will be omitted.

[0051] The gap magnetic shielding member 9 has a first shielding portion 9a extending from one of the adjacent magnetic shielding members 8 toward the other, and a second shielding portion 9b formed on the other of the adjacent magnetic shielding members 8 and in contact with the first shielding portion 9a. The first shielding portion 9a extends toward the magnetic shielding member 8B from an end portion of the magnetic shielding member 8A facing the other magnetic shielding member 8B. In this embodiment, the first shielding portion 9a is a protrusion.

[0052] The second shielding portion 9b is formed at an end portion of the magnetic shielding member 8B facing the one magnetic shielding member 8A. In this embodiment, the second shielding portion 9b is a recess into which the first shielding portion 9a is inserted. The recess is open toward the one magnetic shielding member 8A. The recess is recessed in a direction away from the one magnetic shielding member 8A. The inner surface of the recess, which is the second shielding portion 9b, is in contact with the protrusion, which is the first shielding portion 9a. The gap 10 is closed by inserting the first shielding portion 9a into the second shielding portion 9b.

[0053] Alternatively, the first shielding portion 9a may be a recess, and the second shielding portion 9b may be a protrusion that is inserted into the recess.

[0054] Next, the effects of the linear transport system 1C according to this embodiment will be described.

[0055] In this embodiment, the gap magnetic shielding members 9 are formed integrally with both of the adjacent magnetic shielding members 8. This configuration reduces the number of parts and improves the accuracy of detecting the position of the mover 4 compared to the conventional method, as in the first embodiment.

[0056] In this embodiment, the gap magnetic shielding member 9 has a first shielding portion 9a extending from one of the adjacent magnetic shielding members 8 toward the other, and a second shielding portion 9b formed on the other of the adjacent magnetic shielding members 8 and in contact with the first shielding portion 9a. Specifically, the first shielding portion 9a is a protrusion extending from the magnetic shielding member 8A toward the magnetic shielding member 8B, and the second shielding portion 9b is a recess formed on the magnetic shielding member 8B into which the protrusion serving as the first shielding portion 9a is inserted. With this configuration, the gap 10 between the adjacent magnetic shielding members 8A and 8B can be eliminated or reduced.

[0057] Embodiment 5. Next, a linear conveying system 1D according to a fifth embodiment will be described with reference to Fig. 9. Fig. 9 is a side view showing a linear conveying system 1D according to the fifth embodiment. In this embodiment, the configuration of the gap magnetic shielding member 9 differs from that of the first embodiment. In the fifth embodiment, the same reference numerals are used for the parts that overlap with those of the first embodiment, and the description thereof will be omitted.

[0058] The gap magnetic shielding member 9 has a first shielding portion 9a extending from one of the adjacent magnetic shielding members 8 toward the other, and a second shielding portion 9b formed on the other of the adjacent magnetic shielding members 8 and in contact with the first shielding portion 9a. The first shielding portion 9a extends from an end portion of the magnetic shielding member 8A facing the other magnetic shielding member 8B toward the magnetic shielding member 8B. In this embodiment, the first shielding portion 9a is a convex portion. The first shielding portion 9a extends from a lower half portion of an end portion of the magnetic shielding member 8A facing the other magnetic shielding member 8B toward the magnetic shielding member 8B.

[0059] The second shielding portion 9b is formed at an end portion of the magnetic shielding member 8B facing the one magnetic shielding member 8A. In this embodiment, the second shielding portion 9b is a convex portion. The second shielding portion 9b extends from the upper half of the end portion of the magnetic shielding member 8B facing the one magnetic shielding member 8A toward the magnetic shielding member 8A. The first shielding portion 9a and the second shielding portion 9b are in the same position in the first direction A. The first shielding portion 9a and the second shielding portion 9b overlap each other in the second direction B. That is, the first shielding portion 9a and the second shielding portion 9b are in positions where they overlap each other when viewed along the second direction B. The second shielding portion 9b is in contact with the surface of the first shielding portion 9a facing the stator 3.

[0060] In this embodiment, the second shielding portion 9b may be in contact with the surface of the first shielding portion 9a that faces the position detection unit .

[0061] Next, the effects of the linear transport system 1D according to this embodiment will be described.

[0062] In this embodiment, the gap magnetic shielding members 9 are formed integrally with both of the adjacent magnetic shielding members 8. This configuration reduces the number of parts and improves the accuracy of detecting the position of the mover 4 compared to the conventional method, as in the first embodiment.

[0063] In this embodiment, the gap magnetic shielding member 9 has a first shielding portion 9a extending from one of the adjacent magnetic shielding members 8 toward the other, and a second shielding portion 9b formed on the other of the adjacent magnetic shielding members 8 and in contact with the first shielding portion 9a. Specifically, the first shielding portion 9a is a convex portion extending from the magnetic shielding member 8A toward the magnetic shielding member 8B, and the second shielding portion 9b is a convex portion extending from the magnetic shielding member 8B toward the magnetic shielding member 8A and located at a position overlapping with the first shielding portion 9a when viewed along the second direction B. With this configuration, the gap 10 between the adjacent magnetic shielding members 8A and 8B can be eliminated or reduced.

[0064] Embodiment 6 Next, a linear conveying system 1E according to a sixth embodiment will be described with reference to Fig. 10. Fig. 10 is a side view showing a linear conveying system 1E according to the sixth embodiment. In this embodiment, the configuration of the gap magnetic shielding member 9 differs from that of the first embodiment. In the sixth embodiment, the same reference numerals are used for parts that overlap with those of the first embodiment, and descriptions thereof will be omitted.

[0065] The gap magnetic shielding member 9 has a first shielding portion 9a extending from one of the adjacent magnetic shielding members 8 to the other, and a second shielding portion 9b formed on the other of the adjacent magnetic shielding members 8 and in contact with the first shielding portion 9a.

[0066] The first shielding portion 9a extends from an end portion of the magnetic shielding member 8A facing the other magnetic shielding member 8B toward the magnetic shielding member 8B. The first shielding portion 9a is curved so as to be located on the stator 3 side as it moves from the magnetic shielding member 8A toward the magnetic shielding member 8B. The first shielding portion 9a has a first bent portion 9c and a first contact portion 9d. The first bent portion 9c is a curved portion formed between the first contact portion 9d and an end portion of the magnetic shielding member 8A facing the other magnetic shielding member 8B. The first contact portion 9d extends in a curved shape so as to be located on the stator 3 side as it moves from the first bent portion 9c toward the magnetic shielding member 8B. The first contact portion 9d is elastically deformable in a first direction A with the first bent portion 9c as a base point.

[0067] The second shielding portion 9b extends from an end portion of the magnetic shielding member 8B facing one of the magnetic shielding members 8A toward the magnetic shielding member 8A. The second shielding portion 9b curves toward the stator 3 side as it moves from the magnetic shielding member 8B toward the magnetic shielding member 8A. The first shielding portion 9a and the second shielding portion 9b are symmetrical in the first direction A. The second shielding portion 9b has a second bent portion 9e and a second contact portion 9f. The second bent portion 9e is a curved portion formed between the second contact portion 9f and an end portion of the magnetic shielding member 8B facing one of the magnetic shielding members 8A. The second contact portion 9f extends in a curved shape from the second bent portion 9e toward the magnetic shielding member 8A so as to move toward the stator 3 side. The second contact portion 9f is elastically deformable in the first direction A with the second bent portion 9e as a base point.

[0068] When the tip of the first contact portion 9d and the tip of the second contact portion 9f come into contact with each other during assembly of the magnetic shielding member 8 with which the gap magnetic shielding member 9 is integrally formed, the first contact portion 9d elastically deforms in a direction away from the second contact portion 9f with the boundary portion with the first bent portion 9c as a base point, and is pressed against the second contact portion 9f by the elastic restoring force of the boundary portion. On the other hand, when the tip of the first contact portion 9d and the tip of the second contact portion 9f come into contact with each other during assembly of the magnetic shielding member 8 with which the gap magnetic shielding member 9 is integrally formed, the second contact portion 9f elastically deforms in a direction away from the first contact portion 9d with the boundary portion with the second bent portion 9e as a base point, and is pressed against the first contact portion 9d by the elastic restoring force of the boundary portion. The first shielding portion 9a and the second shielding portion 9b come into contact with each other so as to press against each other, thereby closing the gap 10.

[0069] The first shielding portion 9a may be curved toward the position detector 7 as it approaches the magnetic shielding member 8B. The second shielding portion 9b may be curved toward the position detector 7 as it approaches the magnetic shielding member 8A.

[0070] Next, the effects of the linear transport system 1E according to this embodiment will be described.

[0071] In this embodiment, the gap magnetic shielding members 9 are formed integrally with both of the adjacent magnetic shielding members 8. This configuration reduces the number of parts and improves the accuracy of detecting the position of the mover 4 compared to the conventional method, as in the first embodiment.

[0072] In this embodiment, the gap magnetic shielding member 9 has a first shielding portion 9a extending from one of the adjacent magnetic shielding members 8 to the other, and a second shielding portion 9b formed on the other of the adjacent magnetic shielding members 8 and in contact with the first shielding portion 9a. Specifically, the first shielding portion 9a and the second shielding portion 9b have an elastic restoring force and contact each other so as to press against each other. With this configuration, the gap 10 between the adjacent magnetic shielding members 8A, 8B can be eliminated or reduced.

[0073] In addition, in this embodiment, the first shielding portion 9a and the second shielding portion 9b have an elastic restoring force and contact each other by pressing against each other. Therefore, even if there is a step 11 shown in FIG. 6 between the adjacent magnetic shielding members 8A and 8B, the first shielding portion 9a and the second shielding portion 9b elastically deform to fit the step 11 and contact each other. This makes it possible to eliminate a magnetic gap between the first shielding portion 9a and the second shielding portion 9b. Therefore, even if the step 11 occurs between the adjacent magnetic shielding members 8A and 8B, it is possible to suppress the magnetic flux generated from the movable magnet 4c and the coil 3b from interfering with the position detection portion 7, and to improve the accuracy of detecting the position of the mover 4 compared to the conventional art.

[0074] The configurations shown in the above embodiments are merely examples, and may be combined with other known technologies, or the embodiments may be combined with each other. Also, parts of the configurations may be omitted or modified without departing from the spirit of the invention. [Explanation of symbols]

[0075] 1, 1A, 1B, 1C, 1D, 1E linear conveying system, 2 conveying path, 3 stator, 3a stator core, 3b coil, 3c core back, 3d teeth, 4 mover, 4a housing, 4b base, 4c moving magnet, 4d, 6a magnetic field generating surface, 5 position detector, 6 position detection magnet, 7 position detection unit, 7a substrate, 7b magnetic sensor, 8, 8A, 8B magnetic shielding member, 9 gap magnetic shielding member, 9a first shielding unit, 9b second shielding unit, 9c first bent portion, 9d first contact portion, 9e second bent portion, 9f second contact portion, 10 gap, 11 step, 12, 13 division position, A first direction, B second direction, C third direction.

Claims

1. A position detection magnet that can be installed on a mover that moves along a conveyance path having a stator, A position detection unit that can be installed on the conveyance path and detects a magnetic field generated from the position detection magnet, A plurality of magnetic shielding members that can be arranged with a gap in a first direction that is the direction in which the mover moves along the conveyance path, and that can shield magnetic flux from the mover's movable magnet and the stator's coil toward the position detection unit, A magnetic shielding member for gap that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux, Comprising: A step is formed between adjacent magnetic shielding members, offset in a second direction that is a direction orthogonal to the first direction, The magnetic shielding member for gap is bent along the step and is in contact with each of the adjacent magnetic shielding members, and the position detector is characterized by this.

2. A position detection magnet that can be installed on a mover that moves along a conveyance path having a stator, A position detection unit that can be installed on the conveyance path and detects a magnetic field generated from the position detection magnet, A plurality of magnetic shielding members that can be arranged with a gap in a first direction that is the direction in which the mover moves along the conveyance path, and that can shield magnetic flux from the mover's movable magnet and the stator's coil toward the position detection unit, A magnetic shielding member for gap that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux, Comprising: The position detection magnet can be arranged away from the stator in a second direction that is a direction orthogonal to the first direction, The position detection unit can be arranged between the stator and the position detection magnet in the second direction, The magnetic shielding member can be arranged between the stator and the position detection unit in the second direction, and the position detector is characterized by this.

3. A position detection magnet that can be installed on a mover that moves along a conveyance path having a stator, A position detection unit that can be installed on the conveyance path and detects a magnetic field generated from the position detection magnet, A plurality of magnetic shielding members that can be arranged with a gap in a first direction that is the direction in which the mover moves along the conveyance path, and that can shield magnetic flux from the mover's movable magnet and the stator's coil toward the position detection unit, A magnetic shielding member for gap that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux, Comprising: The magnetic shielding member can be disposed between the movable magnet and the position detector, which are arranged apart from each other in a second direction orthogonal to the first direction, and can also be disposed between the stator and the position detector, which are arranged apart from each other in the second direction. The position detector is characterized in that the magnetic shielding member, the movable magnet, the stator, and the position detector can be arranged such that at least one of the following conditions is satisfied: the distance along the second direction between the magnetic shielding member and the movable magnet is shorter than the distance along the second direction between the magnetic shielding member and the position detector; and the distance along the second direction between the magnetic shielding member and the stator is shorter than the distance along the second direction between the magnetic shielding member and the position detector.

4. A position detection magnet that can be installed on a mover that moves along a conveyance path having a stator, A position detector that can be installed on the conveyance path and detects a magnetic field generated from the position detection magnet, A plurality of magnetic shielding members that can be arranged with a gap in a first direction, which is the direction in which the mover moves along the conveyance path, and can shield magnetic flux from the movable magnet of the mover and the coil of the stator toward the position detector, A magnetic shielding member for gaps that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux, Comprising: The position detector is characterized in that the magnetic shielding member for gaps is integrally formed with at least one of the adjacent magnetic shielding members.

5. A position detection magnet that can be installed on a mover that moves along a conveyance path having a stator, A position detector that can be installed on the conveyance path and detects a magnetic field generated from the position detection magnet, A plurality of magnetic shielding members that can be arranged with a gap in a first direction, which is the direction in which the mover moves along the conveyance path, and can shield magnetic flux from the movable magnet of the mover and the coil of the stator toward the position detector, A magnetic shielding member for gaps that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux, Comprising: The magnetic shielding member for gaps, A first shielding portion that extends from one of the adjacent magnetic shielding members toward the other, The position detector is characterized by having a second shielding portion that is formed on the other of the adjacent magnetic shielding members and contacts the first shielding portion.

6. A conveyance path having a stator, A mover that moves along the conveyance path and forms a linear servo motor together with the stator; A position detection magnet installed on the mover; A position detection unit installed on the conveyance path that detects a magnetic field generated from the position detection magnet; A plurality of magnetic shielding members that are arranged side by side with a gap in a first direction which is the direction in which the mover moves along the conveyance path, and can shield magnetic flux from the mover's movable magnet and the stator's coil toward the position detection unit; A magnetic shielding member for the gap that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux; Comprising; A step is formed between adjacent magnetic shielding members, shifted in a second direction which is a direction orthogonal to the first direction; The magnetic shielding member for the gap is bent along the step and is in contact with each of the adjacent magnetic shielding members, and a linear conveyance system characterized by this.

7. A conveyance path having a stator; A mover that moves along the conveyance path and forms a linear servo motor together with the stator; A position detection magnet installed on the mover; A position detection unit installed on the conveyance path that detects a magnetic field generated from the position detection magnet; A plurality of magnetic shielding members that are arranged side by side with a gap in a first direction which is the direction in which the mover moves along the conveyance path, and can shield magnetic flux from the mover's movable magnet and the stator's coil toward the position detection unit; A magnetic shielding member for the gap that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux; Comprising; The stator and the position detection magnet are arranged apart from each other in a second direction which is a direction orthogonal to the first direction; The position detection unit is arranged between the stator and the position detection magnet in the second direction; The magnetic shielding member is arranged between the stator and the position detection unit in the second direction, and a linear conveyance system characterized by this.

8. A conveyance path having a stator; A mover that moves along the conveyance path and forms a linear servo motor together with the stator; A position detection magnet installed on the mover; A position detection unit installed on the conveyance path that detects a magnetic field generated from the position detection magnet; A plurality of magnetic shielding members are arranged side by side with a gap in a first direction which is the direction in which the mover moves along the conveyance path, and can shield magnetic flux from the mover's movable magnet and the stator's coil toward the position detection unit. A magnetic shielding member for the gap that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux. It is provided with. The movable magnet and the position detection unit are arranged apart from each other in a second direction which is a direction orthogonal to the first direction. The stator and the position detection unit are arranged apart from each other in the second direction. The magnetic shielding member is arranged between the movable magnet and the position detection unit in the second direction, and is also arranged between the stator and the position detection unit in the second direction. A linear conveyance system, characterized in that the magnetic shielding member, the movable magnet, the stator, and the position detection unit are arranged such that at least one of the distance along the second direction between the magnetic shielding member and the movable magnet is shorter than the distance along the second direction between the magnetic shielding member and the position detection unit, and the distance along the second direction between the magnetic shielding member and the stator is shorter than the distance along the second direction between the magnetic shielding member and the position detection unit.

9. A conveyance path having a stator, A mover that moves along the conveyance path and constitutes a linear servo motor together with the stator, A position detection magnet installed on the mover, A position detection unit installed on the conveyance path that detects the magnetic field generated from the position detection magnet, A plurality of magnetic shielding members are arranged side by side with a gap in a first direction which is the direction in which the mover moves along the conveyance path, and can shield magnetic flux from the mover's movable magnet and the stator's coil toward the position detection unit. A magnetic shielding member for the gap that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux. It is provided with. A linear conveyance system, characterized in that the magnetic field generation surfaces of the movable magnet and the position detection magnet are orthogonal to each other.

10. A conveyance path having a stator, A mover that moves along the conveyance path and constitutes a linear servo motor together with the stator, A position detection magnet installed on the mover, A position detection unit installed on the conveyance path that detects the magnetic field generated from the position detection magnet, A plurality of magnetic shielding members are arranged with a gap therebetween in a first direction which is the direction in which the mover moves along the conveyance path, and can shield magnetic flux from the mover's movable magnet and the stator's coil toward the position detection unit. A magnetic shielding member for gap that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux. Comprising: The linear conveyance system is characterized in that the magnetic shielding member for gap is formed integrally with at least one of the adjacent magnetic shielding members.

11. A conveyance path having a stator, A mover that moves along the conveyance path and constitutes a linear servo motor together with the stator, A position detection magnet installed on the mover, A position detection unit installed on the conveyance path for detecting a magnetic field generated from the position detection magnet, A plurality of magnetic shielding members are arranged with a gap therebetween in a first direction which is the direction in which the mover moves along the conveyance path, and can shield magnetic flux from the mover's movable magnet and the stator's coil toward the position detection unit. A magnetic shielding member for gap that closes the gap between adjacent magnetic shielding members and can shield the magnetic flux. Comprising: The magnetic shielding member for gap Has a first shielding portion extending from one of the adjacent magnetic shielding members toward the other, And a second shielding portion formed on the other of the adjacent magnetic shielding members and contacting the first shielding portion. The linear conveyance system is characterized by this.

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