Microfluidic system, processing method using microfluidic system, and method for producing polymer

Abstract

This microfluidic system includes a plurality of chip-type microfluidic devices having formed therein micro flow paths. The system is provided with: one or more mixing devices which are microfluidic devices that have mixing flow paths for mixing a plurality of different fluids and have introduction units for introducing at least one of the plurality of different fluids into the mixing flow paths; and one or more other-process devices which are microfluidic devices in which a chemical / bio / physical process other than the mixing process is performed in the micro flow paths with respect to a mixed fluid of the plurality of different fluids mixed in the mixing flow paths.

Description

Microfluidic system, processing method using a microfluidic system, and method for producing polymers

[0001] The present disclosure relates to microfluidic systems, processing methods using microfluidic systems, and methods for producing polymers.

[0002] In recent years, in the fields of chemical synthesis and chemical analysis, the use of microfluidic devices has been promoted as a means of performing unit operations on fluids as chemical, biological, and physical processes. A microfluidic device is a device equipped with a minute channel (microchannel) having a channel width on the order of μm, and performs unit operations on fluids flowing within the minute channel. In particular, a microfluidic device intended to perform a chemical reaction within the minute channel as a unit operation is also called a microreactor.

[0003] A microreactor mixes multiple different types of fluids (heterogeneous fluids) introduced into a microchannel and brings them into contact with each other, resulting in a chemical reaction. In a microreactor, the microchannel serves as the reaction site, allowing the multiple heterogeneous fluids to form thin laminar flows, and molecular diffusion at the contact interface allows the fluids to mix and react quickly. Furthermore, compared to conventional batch-type reactors using large tanks, a microreactor offers the advantage of high heat transfer and conduction efficiency due to its greater surface area relative to the fluid volume.

[0004] As a technique using a microreactor, Patent Document 1 discloses a technique for controlling the uniformity (particularly, molecular weight distribution) of a polymer obtained by using a microreactor that includes a first inlet for introducing a monomer component and another inlet located downstream of the first inlet, and that can introduce monomer components into the first inlet and the other inlet.

[0005] Japanese Patent Application Laid-Open No. 2020-29518

[0006] When a chemical, bio, or physical process, such as a chemical reaction, is carried out using multiple components in a microfluidic system including a microfluidic device, the multiple components used in the chemical, bio, or physical process are typically supplied to the chemical, bio, or physical process by mixing two or more fluids containing some of the components. If these fluids are not mixed uniformly, i.e., if there is a bias in the concentrations of the various components, the desired results may not be achieved. When a chemical reaction is carried out as a chemical process, the chemical reaction may not proceed uniformly, resulting in problems such as the inability to ensure the quality of the reaction product (e.g., the reaction product may not have the desired chemical structure, molecular weight, or other properties). Therefore, to achieve the desired results in a microfluidic device, it is necessary to uniformly mix the various components before carrying out the chemical, bio, or physical process.

[0007] The technology disclosed herein has been made in consideration of the above-mentioned circumstances, and its purpose is to provide a microfluidic system including a microfluidic device that realizes a state in which various components to be subjected to chemical, biological, or physical processes are uniformly mixed, and that can cause the chemical, biological, or physical processes to proceed from that state.

[0008] In order to solve the above problems, the present inventors have conducted extensive research. As a result, they have found that the above problems can be solved by using a mixing device that mixes multiple different fluids and another process device that performs chemical, biological, or physical processes other than mixing. That is, the gist of the present disclosure is as follows.

[0009] [1] A microfluidic system including a plurality of chip-type microfluidic devices formed with microchannels, comprising: one or more mixing devices, the microfluidic device having a mixing channel for mixing a plurality of different fluids and an inlet for introducing at least one of the plurality of different fluids into the mixing channel; and one or more other process devices, the microfluidic device for performing a chemical, bio, or physical process other than the mixing process within the microchannel on the mixed fluid of the plurality of different fluids mixed in the mixing channel. [2] The microfluidic system according to [1], wherein the chemical, bio, or physical process performed in the other process device is at least one of chemical reaction, extraction, distillation, concentration, solid-phase extraction, particle separation and classification, crystallization, and cell culture. [3] The microfluidic system according to [1], wherein the other process device is a reaction device in which a chemical reaction takes place, and has a reaction channel that advances a chemical reaction of reactants contained in a mixed fluid of the plurality of different fluids mixed in the mixing channel, and the one or more mixing devices and the one or more reaction devices are arranged in series so that the mixing channel and the reaction channel are in communication with each other. [4] The microfluidic system according to [3], comprising a plurality of the mixing devices and a plurality of the reaction devices, and the plurality of mixing devices and the plurality of reaction devices are arranged alternately and in series. [5] The microfluidic system according to [3] or [4], wherein the plurality of different fluids include at least a fluid containing a polymerization initiator and a fluid containing one or more monomers, and the fluid containing the one or more monomers is introduced into the mixing channel of the mixing device from the inlet, and the one or more monomers are polymerized in the reaction channel of the reaction device in the presence of the polymerization initiator. [6] The microfluidic system according to any one of [3] to [5], further comprising a reaction promoting means for promoting a chemical reaction of reactants contained in the mixed fluid in the reaction channel. [7] The microfluidic system according to [6], wherein the reaction promoting means includes at least one of a heating means, a light irradiation means, a vibration energy applying means, and a voltage applying means.[8] The microfluidic system according to any one of [3] to [7], wherein the channel width of the mixing channel and the channel width of the reaction channel are 1000 μm or less. [9] The microfluidic system according to any one of [1] to [8], wherein the one or more mixing devices and the one or more other process devices are arranged in series, and in at least one combination of the mixing device and the other process device adjacent to each other in the flow direction, the mixing device and the other process device are arranged side by side in a direction perpendicular to the extending plane of the microfluidic device.

[10] The microfluidic system according to [9], further comprising a heat-insulating partition member arranged between the mixing device and the other process device in the at least one combination of the mixing device and the other process device.

[11] A processing method using a microfluidic system including a plurality of chip-type microfluidic devices formed with microchannels, wherein the microfluidic system comprises: one or more mixing devices, the microfluidic device having a mixing channel for mixing a plurality of different fluids and an inlet for introducing at least one of the plurality of different fluids into the mixing channel; and one or more other process devices, the microfluidic device performing a chemical, bio, or physical process other than the mixing process within the microchannel on the mixed fluid of the plurality of different fluids mixed in the mixing channel.

[12] The processing method according to

[11] , wherein the chemical, bio, or physical process performed in the other process device is at least one of chemical reaction, extraction, distillation, concentration, solid-phase extraction, particle separation and classification, crystallization, and cell culture.

[13] The processing method according to

[11] , wherein the other process device is a reaction device in which a chemical reaction takes place, and has a reaction flow path that advances a chemical reaction of reactants contained in a mixed fluid of the plurality of different fluids mixed in the mixing flow path, and the one or more mixing devices and the one or more reaction devices are arranged in series so that the mixing flow path and the reaction flow path are in communication with each other.

[14] The processing method according to

[13] , wherein the microfluidic system comprises a plurality of the mixing devices and a plurality of the reaction devices, and the plurality of mixing devices and the plurality of reaction devices are arranged alternately and in series.

[15] The processing method according to

[13] or

[14] , wherein the plurality of different fluids include at least a fluid containing a polymerization initiator and a fluid containing one or more types of monomers, and the fluid containing the one or more types of monomers is introduced into the mixing channel of the mixing device from the inlet, and the one or more types of monomers are polymerized in the presence of the polymerization initiator in the reaction channel of the reaction device.

[16] The processing method according to any of

[13] to

[15] , wherein the microfluidic system further comprises a reaction promotion means for promoting a chemical reaction of reactants contained in the mixed fluid in the reaction channel.

[17] The processing method according to

[16] , wherein the reaction promotion means includes at least one of a heating means, a light irradiation means, a vibration energy applying means, or a voltage applying means.

[18] The processing method according to any one of

[11] to

[17] , wherein the one or more mixing devices and the one or more other process devices are arranged in series, and in at least one combination of the mixing device and the other process device adjacent to each other in the flow direction, the mixing device and the other process device are arranged side by side in a direction perpendicular to the extending surface of the microfluidic device.

[19] The processing method according to

[18] , wherein a heat-insulating partition member is arranged between the mixing device and the other process device in the at least one combination of the mixing device and the other process device.

[20] A method for producing a polymer using a microfluidic system including a plurality of chip-type microfluidic devices formed with microchannels, wherein the microfluidic system comprises: a plurality of mixing devices, each of which is a microfluidic device having a mixing channel that mixes a plurality of different fluids at least including a fluid containing a polymerization initiator and a fluid containing one or more types of monomers, and an inlet that introduces at least the one or more monomers of the plurality of different fluids into the mixing channel; and one or more reaction devices, each of which is a microfluidic device having a reaction channel that causes a polymerization reaction of the one or more monomers in the presence of the polymerization initiator by the plurality of different fluids mixed in the mixing channel; and the plurality of mixing devices and the one or more reaction devices are arranged in series so that the mixing channel and the reaction channel are in communication with each other.

[0010] The technology disclosed herein makes it possible to provide a microfluidic system including a microfluidic device that realizes a state in which various components to be subjected to chemical, biological, or physical processes are uniformly mixed, and that can cause the chemical, biological, or physical processes to proceed from that state.

[0011] Fig. 1 is a configuration diagram of a polymer production system according to this embodiment. Fig. 2 is a plan view of a mixing device according to this embodiment. Fig. 3 is a plan view of a reaction device according to this embodiment. Fig. 4 is a configuration diagram of a polymer production system according to a comparative example. Fig. 5 is a configuration diagram of a polymer production system according to a modified example of this embodiment.

[0012] Each configuration and combination thereof in each embodiment is merely an example, and additions, omissions, substitutions, and other modifications of the configurations are possible as appropriate within the scope of the gist of this disclosure. The present disclosure is not limited by the embodiments, but only by the claims. Furthermore, each aspect disclosed in this specification can be combined with any other feature disclosed in this specification. Furthermore, a numerical range expressed using "to" means a range that includes the numerical values ​​before and after "to" as the lower and upper limits, and "A to B" means greater than or equal to A and less than or equal to B.

[0013] One embodiment of the present disclosure is a microfluidic system including a plurality of chip-type microfluidic devices each having a microchannel formed therein, the microfluidic system comprising: one or more mixing devices, the microfluidic device having a mixing channel for mixing a plurality of different fluids and an inlet portion for introducing at least one of the plurality of different fluids into the mixing channel; and one or more other process devices, the microfluidic device for performing a chemical, biological, or physical process other than the mixing process within the microchannel on the mixed fluid of the plurality of different fluids mixed in the mixing channel.

[0014] <Microfluidic Device> A microfluidic device is a device in which minute flow channels (microchannels) with a flow channel width on the order of μm are formed. The microfluidic device according to the present disclosure is not particularly limited, and may be a chip-type microfluidic device in which a microchannel is formed inside or on the surface of a substrate, or a tube-type microfluidic device in which a microchannel is formed inside a tube. Furthermore, depending on the purpose, a microfluidic device may be called a micromixer if the purpose is mixing, or a microreactor if the purpose is chemical reaction.

[0015] The microchannel may be formed inside the substrate or on the surface of the substrate. The cross-sectional shape of the microchannel is not particularly limited and can be appropriately selected depending on the purpose, and examples include circular, rectangular, semicircular, and triangular shapes. The width (inner diameter) and cross-sectional area of ​​the microchannel are also not particularly limited as long as they do not impair the effects of the technology disclosed herein and can be appropriately selected depending on the purpose. For example, the channel width is preferably 15 mm or less, more preferably 20 μm to 1000 μm, and even more preferably 100 μm to 500 μm. A channel width greater than 15 mm reduces the surface area per unit volume, which may make rapid mixing and removal of reaction heat difficult. A channel width greater than 1000 μm may increase the molecular diffusion distance, resulting in reduced mixing efficiency and reduced functionality as a microfluidic device. A channel width less than 20 μm increases the pressure loss of the liquid flowing through the channel, requiring a high-pressure pump for liquid transport, which may increase manufacturing costs. The cross-sectional area of ​​the flow path is 0.0001 mm ２ 225mm or more ２ It is preferable that the thickness is 0.0003 mm or less. ２ More than 1 mm ２ It is more preferable that the thickness is 0.01 mm or less. ２ 0.25mm or more ２It is more preferable that the length of the channel (channel length) formed in the microfluidic device is not particularly limited and can be set appropriately depending on the mixing time and reaction time. For example, in the production of polymers, the channel length of the mixing channel in a mixing device is preferably 10 mm or more and 3000 mm or less, more preferably 20 mm or more and 2000 mm or less, and even more preferably 50 mm or more and 1000 mm or less. In the production of polymers, the channel length of the reaction channel in a reaction device is preferably 10 mm or more and 500 m or less, more preferably 20 mm or more and 10,000 mm or less, and even more preferably 50 mm or more and 5,000 mm or less. The flow rate of the liquid flowing through the microchannel of the microfluidic device is not particularly limited and can be selected appropriately depending on the purpose. For example, in the production of a polymer, the flow rate is preferably 0.000001 mL / min to 10 mL / min, more preferably 0.00001 mL / min to 0.1 mL / min, and even more preferably 0.0001 mL / min to 0.05 mL / min. A flow rate within the above range tends to achieve rapid mixing of the monomer components and the polymerization initiator, and also tends to suppress pressure loss. Note that the above refers to the flow rate of the fluid immediately after introduction into the microchannel.

[0016] <Mixing Device> A mixing device is a microfluidic device in which at least a mixing process is carried out as a unit operation. The multiple different fluids subjected to the mixing process in the mixing device are not particularly limited, and examples thereof include liquid phase mixing, gas-liquid mixing, and slurry mixing. The mixing device has a mixing flow channel as a microchannel for mixing the multiple different fluids. The multiple different fluids flow through this mixing flow channel, thereby progressing the mixing process of the multiple different fluids.

[0017] <Other Process Device> The other process device is a microfluidic device in which a chemical, bio, or physical process other than a mixing process is performed. In this specification, the term "chemical, bio, or physical process" refers to "one or more processes selected from the group consisting of a chemical process, a bioprocess, and a physical process." The chemical, bio, or physical process performed in the other process device is not particularly limited, and examples thereof include liquid-phase reactions, gas-liquid reactions, extraction, distillation, concentration, slurry reactions, solid-phase extraction, particle separation and classification, crystallization, and cell culture. The other process device performs unit operations other than a mixing process within a microchannel on a mixed fluid of multiple different fluids mixed in a mixing channel of a mixing device. The process performed in the other process device may be one or more chemical, bio, or physical processes other than a mixing process. Therefore, in addition to the one or more chemical, bio, or physical processes, the other process may also include a mixing process. <Reaction Device> The reaction device is an other process device in which at least a chemical reaction is performed as a chemical, bio, or physical process other than a mixing process. The chemical reaction carried out in the reaction device is not particularly limited, but examples thereof include solid-phase reactions, slurry mixing / reactions, liquid-phase reactions, liquid-phase mixing, and gas-liquid reactions.

[0018] <Reaction Promotion Means> The reaction promotion means is not particularly limited and can be appropriately selected depending on the desired chemical reaction. Examples of the reaction promotion means include heating means, light irradiation means, vibration energy imparting means, voltage application means, etc. Examples of the heating means include heaters and microwave irradiation devices, examples of the light irradiation means include LEDs, organic light-emitting devices (OLEDs), lasers, arc lamps, etc. Examples of the vibration energy imparting means include ultrasonic generators and piezoelectric transducers, etc. Examples of the voltage application means include electrodes, etc. The reaction promotion means may include at least one of the various means described above, or may be a combination of multiple means. For example, the reaction promotion means may heat the fluid in the reaction flow channel using a microwave irradiation device as heating means, or may irradiate the fluid in the reaction flow channel with light using an illumination device as light irradiation means using various light sources.

[0019] <Heterogeneous Fluids> In the microfluidic system according to this embodiment, a chemical reaction of reactants contained in a mixed fluid (i.e., a reaction system) of multiple heterogeneous fluids proceeds in the reaction channel of the reaction device. In this embodiment, by circulating multiple heterogeneous fluids through the mixing channel of the mixing device, a mixed fluid in which the multiple heterogeneous fluids are uniformly mixed is obtained, and as a result, the reaction can proceed uniformly within the same reaction system, preferably across multiple lots. The multiple heterogeneous fluids may be liquid or gas, but are preferably liquid.

[0020] In this specification, a state in which multiple heterogeneous fluids are uniformly mixed means, when the mixed fluid is a single phase, that the concentration of each component in the mixed fluid is highly uniform and there is little or no concentration unevenness. When the mixed fluid is composed of two or more phases including a liquid phase, it means that the concentration of each component in the liquid phase is highly uniform and the other phases are uniformly dispersed in the liquid phase. Preferred examples of mixed fluids consisting of two or more phases including a liquid phase include emulsions (e.g., oil-in-water emulsions and water-in-oil emulsions) in which a liquid dispersoid is dispersed in a liquid dispersion medium, and suspensions in which a solid dispersoid is dispersed in a liquid dispersion medium. In addition, the terms "uniform" and "highly uniform" used herein refer to "uniformity" and "highly uniform," respectively, compared to the case of using a conventional microfluidic system that does not have a mixing device for mixing multiple heterogeneous fluids.

[0021] Each of the multiple heterogeneous fluids is a fluid for supplying components necessary for the progress of a chemical reaction to the reaction system. The components necessary for the progress of a chemical reaction include one or more reactants and, if necessary, may include other components necessary for the progress of the chemical reaction (hereinafter simply referred to as "other components"). Preferably, the multiple heterogeneous fluids include one or more of the other components necessary for the progress of the chemical reaction. In other words, one of the multiple heterogeneous fluids contains one or more reactants, and the other one or more fluids each contain one or more reactants and / or one or more other components. Note that, among the multiple heterogeneous fluids mixed in a mixing device located immediately downstream of the reaction device, one or more fluids are fluids containing a reaction product obtained by the chemical reaction in the reaction device. This reaction product may be a reactant to be subjected to a chemical reaction in a reaction device located further downstream of the mixing device, but it may also be a component that is not reactive and does not undergo a chemical reaction (i.e., a component other than the component necessary for the progress of the chemical reaction).

[0022] When any of the multiple different fluids contains other components necessary for the progress of a chemical reaction, the other components necessary for the progress of the chemical reaction may be contained in the one fluid, or may be contained in both the one fluid and the one or more other fluids, but it is preferable that the other components be contained in the one or more other fluids.

[0023] Other components necessary for the progress of the chemical reaction may be appropriately selected as needed from known or commonly used components for the target chemical reaction, including, for example, initiators, catalysts, catalyst assistants, solvents, reaction reagents such as acids, bases, and water, and additives such as surfactants.

[0024] The fluid that supplies each of the multiple different fluids may be determined based on the convenience of mixing (for example, various conditions such as the properties of the reactants, the properties of the other components, and the number of components necessary for the chemical reaction to proceed). The number of components contained in one fluid is not particularly limited, and is usually 1 to 5, preferably 1 to 4, and more preferably 2 to 3. The number of multiple different fluids is not particularly limited as long as it is 2 or more, but is preferably 2 to 5, more preferably 2 to 3, and even more preferably 2.

[0025] More specifically, when compound A and compound B are reacted in solvent A in the presence of catalyst A, compound A and compound B correspond to reactants, and solvent A and catalyst A correspond to other components necessary for the progress of the chemical reaction. The types and numbers of components contained in the multiple different fluids are not particularly limited as long as each contains one or more of these components. For example, the multiple different fluids may be three fluids: a solution in which compound A is dissolved in solvent A, a solution in which compound B is dissolved in solvent A, and a solution in which catalyst A is dissolved in solvent A. Furthermore, for example, the multiple fluids may be two fluids: a fluid consisting of compound A and compound B, and a solution in which catalyst A is dissolved in solvent A.

[0026] When a chemical reaction proceeds in the absence of other components necessary for the chemical reaction to proceed, the mixed fluid of multiple different fluids does not contain any other components necessary for the chemical reaction to proceed. Such a case is, for example, when a chemical reaction between reactant A and reactant B proceeds in a reaction system consisting only of reactant A and reactant B. In this case, in the mixing device, one of reactant A, which is one fluid, and reactant B, which is another fluid, is circulated through a predetermined processing flow path, and the other is introduced from an introduction part.

[0027] Examples of chemical reactions include synthesis reactions such as synthesis reactions of organic compounds, synthesis reactions of inorganic compounds, and synthesis reactions of organic-inorganic hybrid materials; as well as decomposition reactions of organic compounds, decomposition reactions of inorganic compounds, and decomposition reactions of organic-inorganic hybrid materials. Of these, the chemical reaction is preferably a synthesis reaction, more preferably a synthesis reaction of an organic compound, and even more preferably a synthesis reaction of a polymer. These chemical reactions maximize the benefits of the microfluidic system according to the present embodiment, namely, the ability to ensure the quality of the reaction product by ensuring sufficient progress of the chemical reaction. However, since ensuring an appropriate residence time in the reaction channel allows the reaction to proceed sufficiently regardless of the type of chemical reaction, the effects of the technology according to the present disclosure can also be achieved with chemical reactions other than those described above. Therefore, the chemical reaction is not limited to the above-described chemical reactions.

[0028] In the microfluidic system according to this embodiment, chemical reactions can proceed uniformly, making it possible to produce polymers with a small polydispersity index Mw / Mn (Mw: weight average molecular weight, Mn: number average molecular weight). Therefore, the microfluidic system according to this embodiment is suitable for producing polymers, and more suitable for producing polymers for photoresists. An example of multiple different fluids used in producing a polymer by a radical polymerization reaction of a monomer is described below.

[0029] In this example, a polymer is produced using a microfluidic device in which four microfluidic devices are arranged in series, from the upstream side, namely a mixing device, a reaction device, another mixing device, and a reaction device, in the following order (i) to (v).

[0030] (i) In a mixing device, which is a microfluidic device arranged at the most upstream, a monomer solution in which a monomer is dissolved in a solvent is mixed with an initiator solution in which a radical polymerization initiator is dissolved in a solvent to prepare a mixed fluid. Here, the monomer corresponds to the reactant, and the solvent and the radical polymerization initiator correspond to the other components. Furthermore, the monomer solution and the initiator solution correspond to multiple different fluids.

[0031] (ii) Next, the mixed fluid obtained in (i) above is introduced into a reaction device, which is the second microfluidic device from the upstream side, and a radical polymerization reaction of the monomer is carried out. In this reaction device, most of the monomer is consumed, and the reaction mixture obtained after the polymerization reaction contains a small amount of monomer, a radical polymerization initiator (and / or radicals generated from the radical polymerization initiator (in this specification, "radical polymerization initiator" also includes radicals generated from the radical polymerization initiator)), a solvent, and a polymer that is the reaction product.

[0032] (iii) The reaction mixture obtained in (ii) above is introduced into a mixing channel of a mixing device, which is the third microfluidic device from the upstream side, and a monomer solution in which a monomer is dissolved in a solvent is introduced from an inlet. These fluids are mixed in the mixing device to prepare a mixed fluid. Here, the monomer corresponds to the reactant, and the solvent and radical polymerization initiator correspond to the other components. Furthermore, the monomer solution and the reaction mixture correspond to multiple different fluids.

[0033] (iv) Subsequently, the mixed fluid obtained in (iii) above is introduced into a reaction device, which is the fourth microfluidic device from the upstream side, and a radical polymerization reaction of the monomer is carried out.

[0034] (v) Recovering the polymer from the reaction mixture discharged from the reaction device in (iv) above.

[0035] As in the above example, when a monomer solution is added at each stage in a multi-stage polymer synthesis, the monomers mixed in one mixing device and the monomers mixed in one or more other mixing devices (in the above example, the monomers introduced into the mixing device in (i) and the monomers introduced into the mixing device in (iii)) may be the same or different, but from the viewpoint of mass production of the same polymer, it is preferable that they are the same.

[0036] In the above example, the microfluidic device used has two mixing devices and two reaction devices arranged alternately, but in a modified example using a microfluidic device in which three or more mixing devices and three or more reaction devices are arranged alternately, a polymer can be produced by repeating the same operations as in (iii) and (iv) above. In another modified example in which the monomer solution introduced into the mixing device in (iii) above is replaced with a fluid containing a chemical modifier, a polymer can be obtained in which one or more of the terminals, main chain, and side chains of the polymer obtained in (ii) above have been modified.

[0037] In the production of a polymer, a solution of a chain transfer agent dissolved in a solvent may be further introduced into the mixing device to prepare a mixed fluid containing the chain transfer agent, which allows the production of a polymer with a smaller polydispersity index Mw / Mn.

[0038] The quality of a polymer can be evaluated, for example, by its polydispersity index (Mw / Mn). Generally, the narrower the molecular weight distribution of a polymer, i.e., the smaller the polydispersity index (Mw / Mn), the smaller the variation in molecular weight of the polymer, making it easier to obtain a polymer with desired properties. In producing polymers, the microfluidic system according to this embodiment is suitable for producing polymers having a polydispersity index (Mw / Mn) of 1.3 or more and 3.0 or less, more suitable for producing polymers having a polydispersity index (Mw / Mn) of 1.3 or more and 2.0 or less, even more suitable for producing polymers having a polydispersity index (Mw / Mn) of 1.3 or more and 1.9 or less, even more suitable for producing polymers having a polydispersity index (Mw / Mn) of 1.3 or more and 1.8 or less, particularly suitable for producing polymers having a polydispersity index (Mw / Mn) of 1.3 or more and 1.7 or less, and especially suitable for producing polymers having a polydispersity index (Mw / Mn) of 1.3 or more and 1.6 or less.

[0039] The quality of a polymer can also be evaluated by its weight-average molecular weight Mw and / or number-average molecular weight. In producing a polymer, the microfluidic system according to this embodiment is suitable for producing a polymer having a weight-average molecular weight Mw of 500 or more and 8000 or less, more suitable for producing a polymer having a weight-average molecular weight Mw of 500 or more and 7000 or less, and even more suitable for producing a polymer having a weight-average molecular weight Mw of 1000 or more and 6000 or less. In producing a polymer, the microfluidic system according to this embodiment is suitable for producing a polymer having a number-average molecular weight Mn of 500 or more and 4500 or less, more suitable for producing a polymer having a number-average molecular weight Mn of 1000 or more and 4000 or less, and even more suitable for producing a polymer having a number-average molecular weight Mn of 2000 or more and 3500 or less.

[0040] The weight average molecular weight Mw and number average molecular weight Mn are measured by gel permeation chromatography (GPC). The polydispersity index Mw / Mn is calculated by measuring the weight average molecular weight Mw and number average molecular weight Mn of a polymer by gel permeation chromatography (GPC) and dividing the former by the latter. The following conditions are used as the GPC measurement conditions.

[0041] Apparatus: GPC system (Shimadzu Corporation) System controller: SIL-20A (Shimadzu Corporation) Pump: LC-20AD (Shimadzu Corporation) Degasser: DGU-20A3R (Shimadzu Corporation) Column oven: CTO-20AC (Shimadzu Corporation) RI detector: RID-20A (Shimadzu Corporation) Column: GPC KF-806L (column size: 8.0 mm (ID) × 300 mm (L), manufactured by Resonac Corporation) × 3 Guard column: KF-G (column size: 4.6 mm (ID) × 10 mm (L), manufactured by Resonac Corporation) Column temperature: 40°C Cell temperature: 40°C Eluent: tetrahydrofuran Eluent flow rate: 0.8 mL / min Injection volume: 35 μL Analysis time: 60 minutes Sample: 5 wt% tetrahydrofuran solution Sample for creating calibration curve: Polystyrene calibration kit S-M-10 (manufactured by Agilent Technologies, Inc.)

[0042] The monomers, radical polymerization initiators, solvents, and chain transfer agents used in the radical polymerization reaction of the above-mentioned monomers will be described in more detail below.

[0043] (Monomer) The type of monomer, the number of monomer types, and the mixing ratio of the monomers when two or more monomer types are used are selected depending on the polymer to be produced. Therefore, a single monomer may be used, or two or more types may be used in any combination and ratio. When a copolymerization reaction is performed using two or more monomers, the type of copolymerization sequence is not particularly limited, and examples include random copolymerization, alternating copolymerization, block copolymerization, and graft copolymerization. The structure of the resulting polymer is also not particularly limited, and may be linear, branched, or cyclic.

[0044] The type of monomer is not particularly limited as long as it is a polymerizable monomer (hereinafter also referred to as "polymerizable monomer"). For example, polymerizable monomers disclosed in JP 2018-149791 A and JP 2010-194983 A, specifically, (meth) polymerizable monomers containing an acryloyl group, polymerizable monomers containing an isocyanate group, polymerizable monomers containing a carboxyl group, polymerizable monomers containing a hydroxyl group, polymerizable monomers containing an epoxy group, polymerizable monomers containing an oxazoline group, polymerizable monomers containing a maleimide group, polymerizable monomers containing an amino group, styrene-based monomers, fluorine-containing vinyl monomers, silicon-containing vinyl-based monomers, conjugated diene-based monomers, aromatic vinyl monomers, vinyl carboxylic acid vinyl esters, olefin-based monomers, vinyl halides, vinylidene halides, allyl halides, and vinyl ethyl ether. At least one monomer selected from the group consisting of.

[0045] These monomers may be used alone or in combination of two or more. The monomers listed below may be derivatives thereof. The monomers may be synthesized or commercially available. In this specification, the terms "(meth)acryloyl", "meth(acrylic)", and "(meth)acrylate" mean "acryloyl and / or methacryloyl", "methacrylic and / or acrylic", and "acrylate and / or methacrylate", respectively.

[0046] Examples of polymerizable monomers containing a (meth)acryloyl group include methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, isopropyl (meth)acrylate, n-butyl (meth)acrylate, isobutyl (meth)acrylate, tert-butyl (meth)acrylate, n-pentyl (meth)acrylate, n-hexyl (meth)acrylate, cyclohexyl (meth)acrylate, n-heptyl (meth)acrylate, n-octyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, nonyl (meth)acrylate, decyl (meth)acrylate, dodecyl (meth)acrylate, phenyl (meth)acrylate, toluyl (meth)acrylate, benzyl (meth)acrylate, 2-methoxyethyl (meth)acrylate, Examples include 3-methoxybutyl acrylate, stearyl (meth)acrylate, γ-(methacryloyloxypropyl)trimethoxysilane, trifluoromethylmethyl (meth)acrylate, 2-trifluoromethylethyl (meth)acrylate, 2-perfluoroethylethyl (meth)acrylate, 2-perfluoroethyl-2-perfluorobutylethyl (meth)acrylate, perfluoroethyl (meth)acrylate, perfluoromethyl (meth)acrylate, diperfluoromethylmethyl (meth)acrylate, 2-perfluoromethyl-2-perfluoroethylethyl (meth)acrylate, 2-perfluorohexylethyl (meth)acrylate, 2-perfluorodecylethyl (meth)acrylate, and 2-perfluorohexadecylethyl (meth)acrylate. In addition to the above, examples include monomers having a chemical structure exhibiting photosensitivity, which will be described later.

[0047] Examples of aromatic vinyl monomers include styrene; alkylstyrenes such as o-methylstyrene, m-methylstyrene, p-methylstyrene, 2,4-dimethylstyrene, p-ethylstyrene, p-isopropylstyrene, p-n-butylstyrene, p-tert-butylstyrene, α-methylstyrene, and α-methyl-p-methylstyrene; alkoxystyrenes such as o-methoxystyrene, m-methoxystyrene, p-methoxystyrene, and p-tert-butoxystyrene; halostyrenes such as o-chlorostyrene, m-chlorostyrene, p-chlorostyrene, and p-bromostyrene; hydroxystyrenes such as o-hydroxystyrene, m-hydroxystyrene, p-hydroxystyrene, and 3,5-dihydroxystyrene; and styrenesulfonic acid or an alkali metal salt thereof.

[0048] Examples of vinyl carboxylates include vinyl carboxylates having 3 to 10 carbon atoms, such as vinyl formate, vinyl acetate, vinyl propionate, and vinyl pivalate.

[0049] Examples of conjugated diene monomers include conjugated dienes having 4 to 16 carbon atoms, such as butadiene, isoprene, chloroprene, 1,3-pentadiene, 2,3-dimethyl-1,3-butadiene, piperylene, 3-butyl-1,3-octadiene, and 1-phenyl-1,3-butadiene.

[0050] Examples of the olefin monomer include alkenes having 2 to 10 carbon atoms, such as ethylene, propylene, 1-butene, 2-butene, and isobutene.

[0051] Examples of vinyl halides include vinyl fluoride, vinyl chloride, and vinyl bromide.

[0052] Examples of the vinylidene halides include vinylidene fluoride, vinylidene chloride, and vinylidene bromide.

[0053] When the polymer to be produced is a photoresist polymer, a monomer having a photosensitive chemical structure is used instead of or in addition to the above-mentioned monomer. For example, when producing a polymer for a chemically amplified photoresist using a photoacid generator, the monomer preferably contains a monomer having a group that generates a polar group by partial elimination under the action of acid (sometimes referred to as an "acid-decomposable group"). The polarity of the photoresist polymer increases under the action of acid, thereby increasing its solubility in an alkaline developer and enabling pattern formation.

[0054] Examples of polar groups include acidic groups and alcoholic hydroxyl groups. Examples of acidic groups include phenolic hydroxyl groups; carboxy groups; fluorinated alcohol groups such as hexafluoro-2-hydroxyisopropyl groups; sulfonic acid groups; sulfonamide groups, sulfonylimide groups; (alkylsulfonyl)(alkylcarbonyl)methylene groups; (alkylsulfonyl)(alkylcarbonyl)imide groups; bis(alkylcarbonyl)methylene groups, bis(alkylcarbonyl)imide groups; bis(alkylsulfonyl)methylene groups, bis(alkylsulfonyl)imide groups; acidic groups such as tris(alkylcarbonyl)methylene groups and tris(alkylsulfonyl)methylene groups; and the like. Of these, the polar group is preferably a carboxy group, a fluorinated alcohol group, or a sulfonic acid group.

[0055] The acid-decomposable group is preferably a group in which the hydrogen atom of the polar group is substituted with a group that is cleaved by an acid. Examples of the acid-decomposable group include -C(R Ｉ ) (R ＩＩ ) (R ＩＩＩ ) and a group represented by —C(R ＩＶ ) (R Ｖ ) (OR ＶＩ In the above formula, R Ｉ ~R ＩＩＩ and R ＶＩ R each independently represents an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, or an alkenyl group. ＩＶ and R ＶR each independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, or an alkenyl group. Ｉ ~R ＩＩＩ At least two of the groups may be bonded to each other to form a ring. ＩＶ and R Ｖ may be bonded to each other to form a ring.

[0056] The lower limit of the number of carbon atoms in the acid-decomposable group is not particularly limited, but is preferably at least 4, more preferably at least 5. The upper limit of the number of carbon atoms in the acid-decomposable group is not particularly limited, but is preferably 20 or less.

[0057] R Ｉ ~R ＶＩ The alkyl group represented by the formula (I) is preferably an alkyl group having 1 to 8 carbon atoms. Examples of the alkyl group having 1 to 8 carbon atoms include a methyl group, an ethyl group, a propyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a hexyl group, and an octyl group.

[0058] R Ｉ ~R ＶＩ The cycloalkyl group represented by the formula (I) may be a monocyclic hydrocarbon group or a polycyclic (bridged ring) hydrocarbon group. Preferred examples of the monocyclic hydrocarbon group include cycloalkyl groups having 3 to 8 carbon atoms, such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, and a cyclooctyl group. Preferred examples of the polycyclic hydrocarbon group include cycloalkyl groups having 6 to 20 carbon atoms, such as an adamantyl group, a norbornyl group, an isobornyl group, a camphanyl group, a dicyclopentyl group, an α-pinel group, a tricyclodecanyl group, a tetracyclododecyl group, and an androstanyl group. In the cycloalkyl group, a carbon atom other than the first carbon atom among the carbon atoms constituting the cycloalkane ring may be substituted with a heteroatom such as an oxygen atom. In this case, the number of carbon atoms substituted with a heteroatom is not particularly limited.

[0059] R Ｉ ~R ＶＩPreferred examples of the aryl group represented by the formula (I) include aryl groups having 6 to 14 carbon atoms, such as a phenyl group, a naphthyl group, and an anthryl group.

[0060] R Ｉ ~R ＶＩ Preferred examples of the aralkyl group represented by the formula (I) include aralkyl groups having 7 to 12 carbon atoms, such as a benzyl group, a phenethyl group, and a naphthylmethyl group.

[0061] R Ｉ ~R ＶＩ Preferred examples of the alkenyl group represented by the formula (I) include alkenyl groups having 2 to 8 carbon atoms, such as a vinyl group, an allyl group, a butenyl group, and a cyclohexenyl group.

[0062] R Ｉ ~R ＩＩＩ a ring formed by bonding at least two groups selected from the group consisting of R ＩＶ and R Ｖ The ring formed by bonding is preferably a cycloalkane ring. Preferred examples of the cycloalkane ring include monocyclic cycloalkane rings such as a cyclopropane ring, a cyclobutane ring, a cyclopentane ring, and a cyclohexane ring; and polycyclic cycloalkane rings such as a norbornane ring, a tricyclodecane ring, a tetracyclododecane ring, and an adamantane ring.

[0063] In addition, R Ｉ ~R ＶＩ The alkyl group, cycloalkyl group, aryl group, aralkyl group, and alkenyl group represented by the formula (I) and the cycloalkane ring may each have a substituent within the range that does not inhibit the radical polymerization reaction.

[0064] Of these, the acid-decomposable group is preferably a tert-butyl group, a tert-amyl group, or a group represented by the following formulae (I) to (IV).

[0065]

[0066] R in formulas (I) to (IV) ２ ~R ７ , R ａ , n, p, and ring Z １respectively represent R in the formulas (a1) to (a4) described below. ２ ~R ７ , R ａ , n, p, and ring Z １ is synonymous with.

[0067] The acid-decomposable group may be bonded to the radically polymerizable functional group via a spacer, such as a linking group represented by A in formula (1) described below.

[0068] Examples of the monomer having an acid-decomposable group include a monomer represented by the following formula (1).

[0069]

[0070] In formula (1), R １ represents an acid-decomposable group. In addition, in formula (1), R represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. Examples of the halogen atom in the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a chlorine atom, a bromine atom, and an iodine atom. In addition, examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, pentyl, isoamyl, sec-amyl, tert-amyl, and hexyl groups. Examples of the alkyl group having 1 to 6 carbon atoms which has a halogen atom include trifluoromethyl and 2,2,2-trifluoroethyl groups.

[0071] In formula (1), A represents a single bond or a linking group. Examples of the linking group include a carbonyl group (-C(=O)-), an ether bond (-O-), an ester bond (-C(=O)-O-), an amide bond (-C(=O)-NH-), a carbonate bond (-O-C(=O)-O-), a group in which a plurality of these are linked together, and a group in which an alkylene group is linked to these. Examples of the alkylene group include linear or branched alkylene groups such as methylene, methylmethylene, dimethylmethylene, ethylene, propylene, and trimethylene groups; and divalent alicyclic hydrocarbon groups (particularly divalent cycloalkylene groups) such as 1,2-cyclopentylene, 1,3-cyclopentylene, cyclopentylidene, 1,2-cyclohexylene, 1,3-cyclohexylene, 1,4-cyclohexylene, and cyclohexylidene groups.

[0072] Preferred examples of the monomer represented by formula (1) include one or more monomers selected from the group consisting of monomers represented by the following formulas (a1) to (a4). Hereinafter, "one or more monomers selected from the group consisting of monomers represented by formulas (a1) to (a4)" may be referred to as "monomer a."

[0073]

[0074] In formulas (a1) to (a4), R represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, similar to R in formula (1), and A represents a single bond or a linking group. A in formulas (a1) to (a4) is preferably a single bond or a group in which an alkylene group and a carbonyloxy group are bonded (an alkylene-carbonyloxy group). R ２ ~R ４ R each independently represents an alkyl group having 1 to 6 carbon atoms which may have a substituent. ２ and R ３ may be bonded to each other to form a ring. ５ and R ６ R each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms which may have a substituent. ７ Is -COOR ｃ represents a group.ｃ represents a tertiary hydrocarbon group, a tetrahydrofuranyl group, a tetrahydropyranyl group, or an oxepanyl group, which may have a substituent; n represents an integer of 1 to 3; when n is 2 or 3, two or three R ７ may be the same or different. ａ is Ring Z １ and each independently represents an oxo group, an alkyl group, a hydroxy group which may be protected by a protecting group, a hydroxyalkyl group which may be protected by a protecting group, or a carboxy group which may be protected by a protecting group. p represents an integer of 0 or more and 3 or less. Z １ represents an alicyclic hydrocarbon ring having 3 to 20 carbon atoms. When p is 2 or 3, two or three R ａ may be the same or different.

[0075] R ａ Examples of the alkyl group represented by the formula (I) include alkyl groups having 1 to 6 carbon atoms, such as methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, isoamyl, sec-amyl, tert-amyl, and n-hexyl groups.

[0076] R ａ Examples of the hydroxyalkyl group represented by the formula (I) include hydroxyalkyl groups having 1 to 6 carbon atoms, such as hydroxymethyl, 2-hydroxyethyl, 1-hydroxyethyl, 3-hydroxypropyl, 2-hydroxypropyl, 4-hydroxybutyl, and 6-hydroxyhexyl groups.

[0077] R ａ Examples of the protecting group that the hydroxy group and hydroxyalkyl group may have include alkyl groups having 1 to 4 carbon atoms, such as methyl, ethyl, and tert-butyl groups; groups that form an acetal bond together with the oxygen atom constituting the hydroxy group (for example, C １－４ Alkyl-O-C １－４groups that form an ester bond together with the oxygen atom constituting the hydroxy group (for example, an acetyl group, a benzoyl group, etc.); and the like.

[0078] R ａ Examples of the protecting group for a carboxy group represented by the formula (I) include alkyl groups having 1 to 6 carbon atoms, such as methyl, ethyl, propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, pentyl, isoamyl, sec-amyl, tert-amyl, and hexyl groups; 2-tetrahydrofuranyl groups; 2-tetrahydropyranyl groups; and 2-oxepanyl groups.

[0079] R ２ ~R ６ Examples of the alkyl group having 1 to 6 carbon atoms represented by the formula (R) include linear or branched alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, pentyl, isoamyl, sec-amyl, tert-amyl, and hexyl groups. ２ ~R ６ The number of carbon atoms in the alkyl group having 1 to 6 carbon atoms is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 to 2.

[0080] R ２ ~R ６ Examples of the substituent that an alkyl group having 1 to 6 carbon atoms, represented by the formula (I), may have include a halogen atom, a hydroxy group, a substituted hydroxy group (for example, an alkoxy group having 1 to 4 carbon atoms, such as a methoxy, ethoxy, or propoxy group), and a cyano group. Examples of the alkyl group having 1 to 6 carbon atoms and having a substituent include a haloalkyl group having 1 to 6 carbon atoms, such as a trifluoromethyl or 2,2,2-trifluoroethyl group; a hydroxyalkyl group having 1 to 6 carbon atoms, such as a hydroxymethyl or 2-hydroxyethyl group; an alkoxyalkyl group having 1 to 6 carbon atoms, such as a methoxymethyl, 2-methoxyethyl, ethoxymethyl, or 2-ethoxyethyl group; and a cyanoalkyl group having 1 to 6 carbon atoms, such as a cyanomethyl or 2-cyanoethyl group.

[0081] R ２ and R ３ When they are bonded to each other to form a ring, examples of the ring include an alicyclic hydrocarbon ring having from 3 to 12 carbon atoms which may have a substituent.

[0082] R ｃ Examples of the tertiary hydrocarbon group represented by the formula (I) include a tert-butyl group and a tert-amyl group.

[0083] R ｃ Examples of the substituent that the tertiary hydrocarbon group represented by the formula (I) may have include a halogen atom, a hydroxy group, a substituted hydroxy group (for example, an alkoxy group having from 1 to 4 carbon atoms, such as a methoxy, ethoxy, or propoxy group), and a cyano group.

[0084] Z １ Examples of the alicyclic hydrocarbon ring having 3 to 20 carbon atoms and represented by the formula (I) include a monocyclic alicyclic hydrocarbon ring, a ring containing a norbornane ring or a norbornene ring, an adamantane ring, a ring in which a polycyclic aromatic fused ring is hydrogenated (preferably a fully hydrogenated ring), and a bridged cyclic hydrocarbon ring having 2 to 6 rings. Examples of the monocyclic alicyclic hydrocarbon ring include a 3- to 20-membered (preferably 3- to 15-membered, particularly preferably 5- to 12-membered) cycloalkane ring such as a cyclopropane ring, a cyclobutane ring, a cyclopentane ring, a cyclohexane ring, and a cyclooctane ring; and a 3- to 20-membered (preferably 3- to 15-membered, particularly preferably 5- to 10-membered) cycloalkene ring such as a cyclopropene ring, a cyclobutene ring, a cyclopentene ring, and a cyclohexene ring. Examples of the ring containing a norbornane ring or a norbornene ring include a norbornane ring, a norbornene ring, a bornane ring, an isobornane ring, a tricyclo[5.2.1.0 ２，６ ] decane ring, and tetracyclo[4.4.0.1 ２，５ .1 ７，１０ ]dodecane ring, etc. Examples of the ring in which the polycyclic aromatic condensed ring is hydrogenated include a perhydroindene ring, a decalin ring, a tricyclo[7.4.0.0 ３，８] tridecane ring, and perhydroanthracene ring. Examples of the bridged cyclic hydrocarbon rings of 2 to 6 ring systems include tricyclo[4.2.2.1 ２，５ ]undecane ring, etc. The carbon number of the bicyclic to hexacyclic bridged hydrocarbon ring is preferably 6 or more and 20 or less.

[0085] The monomers are [-C(=O)-O-] and [-S(=O) ２ It is preferable that the photoresist polymer contains an alicyclic monomer having [—C(═O)—O—], or [—C(═O)—O—C(═O)—]. The use of an alicyclic monomer can impart higher substrate adhesion and etching resistance to the photoresist polymer. Hereinafter, the term “[—C(═O)—O—], [—S(═O) ２ An alicyclic monomer having [—O—] or [—C(═O)—O—C(═O)—] may be referred to as “monomer b.”

[0086] Monomer b is preferably one or more monomers selected from the group consisting of monomers represented by the following formulas (b1) to (b5). In the following formulas (b1) to (b5), R represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, and A represents a single bond or a linking group. X represents a single bond, a methylene group, an ethylene group, an oxygen atom, or a sulfur atom. Y represents a methylene group or a carbonyl group. Z represents a divalent organic group (for example, an alkylene group exemplified and explained as the alkylene group which may be contained in A in formulas (a1) to (a4) (particularly a linear alkylene group having 1 to 3 carbon atoms)). V １ ~V ３ are each independently —CH ２ -, [-C(=O)-], or [-C(=O)-O-]. However, V １ ~V ３ At least one of the groups is [—C(═O)—O—]. ８ ~R １４each independently represents a hydrogen atom, a fluorine atom, an alkyl group which may have a fluorine atom, a hydroxy group which may be protected by a protecting group, a hydroxyalkyl group which may be protected by a protecting group, a carboxy group which may be protected by a protecting group, or a cyano group.

[0087]

[0088] R and A in the formulae (b1) to (b5) have the same meanings as R and A in the formulae (a1) to (a4), respectively.

[0089] R in formulas (b1) to (b5) ８ ~R １４ represents an alkyl group, a hydroxy group which may be protected by a protecting group, a hydroxyalkyl group which may be protected by a protecting group, or a carboxy group which may be protected by a protecting group. ８ ~R １４ The alkyl group represented by the formula (a1) to (a4), the hydroxy group which may be protected by a protecting group, the hydroxyalkyl group which may be protected by a protecting group, and the carboxy group which may be protected by a protecting group are each represented by R ａ and groups similar to an alkyl group represented by the formula (I), a hydroxy group which may be protected by a protecting group, a hydroxyalkyl group which may be protected by a protecting group, and a carboxy group which may be protected by a protecting group. ８ ~R １４ Examples of the alkyl group represented by the formula (I) include haloalkyl groups having 1 to 6 carbon atoms, such as trifluoromethyl and 2,2,2-trifluoroethyl groups.

[0090] The monomers represented by formulas (b1) to (b4) are each R ８ ~R １１ may have one or more R ８ ~R １１ It is preferable that the monomers represented by formulas (b1) to (b4) have 1 to 3 R ８ ~R １１ When there are two or more R ８ ~R １１ may be the same or different.

[0091] Among these, the monomer b is represented by the formula (b1) and R ８ is a cyano group, a group having an amide group, a group having an imide group, or a fluoro(C １－６ a monomer represented by formula (b2), a monomer represented by formula (b3) in which Y is a carbonyl group, a monomer represented by formula (b4), or a monomer represented by formula (b5). Photoresist polymers obtained by polymerization of these monomers are excellent in substrate adhesion and etching resistance, and also in solubility in alkaline developers, allowing for the formation of fine patterns with high precision.

[0092] In formula (b1), R ８ is an electron-withdrawing group such as a cyano group, a group having an amide group, a group having an imide group, or a fluoroalkyl group having from 1 to 6 carbon atoms, ８ is particularly preferably bonded to at least the carbon atom marked with * in formula (b1).

[0093] The monomer may further contain a monomer c. The monomer c is a monomer represented by the following formula (c1). A photoresist polymer obtained by polymerizing a monomer containing the monomer c has high transparency and excellent etching resistance. In the formula, R represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms and optionally having a halogen atom. A represents a single bond or a linking group. R ｂ represents a hydroxy group which may be protected by a protecting group, a hydroxyalkyl group which may be protected by a protecting group, a carboxy group which may be protected by a protecting group, or a cyano group, and is preferably a hydroxy group or a cyano group. q represents an integer of 1 or more and 5 or less. Z ２ represents an alicyclic hydrocarbon ring having 6 to 20 carbon atoms. When q is an integer of 2 to 5, 2 to 5 R ｂ may be the same or different.

[0094]

[0095] R and A in formula (c1) have the same meanings as R and A in formulas (a1) to (a4), respectively.

[0096] R in formula (c1) ｂ represents a hydroxy group which may be protected by a protecting group, a hydroxyalkyl group which may be protected by a protecting group, or a carboxy group which may be protected by a protecting group. ｂ The hydroxy group which may be protected by a protecting group, the hydroxyalkyl group which may be protected by a protecting group, and the carboxy group which may be protected by a protecting group are each represented by R ａ These are synonymous with a hydroxy group which may be protected by a protecting group represented by the following formula:

[0097] Z in formula (c1) ２ represents an alicyclic hydrocarbon ring having from 6 to 20 carbon atoms. Examples of the alicyclic hydrocarbon ring having from 6 to 20 carbon atoms include a monocyclic alicyclic hydrocarbon ring, a ring containing a norbornane ring or a norbornene ring, an adamantane ring, a ring in which a polycyclic aromatic fused ring is hydrogenated (preferably a fully hydrogenated ring), and a bridged cyclic hydrocarbon ring having 2 to 6 rings. Examples of the monocyclic alicyclic hydrocarbon ring include a 6- to 20-membered (preferably 6- to 15-membered, particularly preferably 6- to 12-membered) cycloalkane ring such as a cyclohexane ring and a cyclooctane ring; and a 6- to 20-membered (preferably 6- to 15-membered, particularly preferably 6- to 10-membered) cycloalkene ring such as a cyclohexene ring. Examples of the ring containing a norbornane ring or a norbornene ring include a norbornane ring, a norbornene ring, a bornane ring, an isobornane ring, a tricyclo[5.2.1.0 ２，６ ] decane ring, and tetracyclo[4.4.0.1 ２，５ .1 ７，１０ ]dodecane ring, etc. Examples of the ring in which the polycyclic aromatic condensed ring is hydrogenated include a perhydroindene ring, a decalin ring, a tricyclo[7.4.0.0 ３，８ ] tridecane ring, and perhydroanthracene ring. Examples of the bridged cyclic hydrocarbon rings of 2 to 6 ring systems include tricyclo[4.2.2.1 ２，５The carbon number of the 2- to 6-ring bridged cyclic hydrocarbon ring is preferably 6 or more and 20 or less. ２ is preferably a norbornane ring, a ring containing a norbornene ring, or an adamantane ring.

[0098] (Radical polymerization initiator) As the radical polymerization initiator, a known or commonly used radical polymerization initiator can be used. Examples of the known or commonly used radical polymerization initiator include a radical polymerization initiator containing a cyano group and a radical polymerization initiator not containing a cyano group. The radical polymerization initiator may be used alone or in combination of two or more types in any ratio.

[0099] Examples of the radical polymerization initiator containing a cyano group include azo compounds containing a cyano group, such as dimethyl 2,2'-azobis(2-methylpropionate), 2,2'-azobis(isobutyronitrile), 2,2'-azobis(2,4-dimethylvaleronitrile), 2,2'-azobis(2-methylbutyronitrile), and 4,4'-azobis(4-cyanovaleric acid).

[0100] Examples of the radical polymerization initiator not containing a cyano group include azo compounds not containing a cyano group, peroxide compounds not containing a cyano group, and redox compounds not containing a cyano group.

[0101] Examples of azo compounds that do not contain a cyano group include dimethyl-2,2'-azobisisobutyrate, 2,2'-azobis(2,4,4-trimethylpentane), 2,2'-azobis(2-methylpropane), and dibutyl-2,2'-azobisisobutyrate.

[0102] Examples of peroxide compounds not containing a cyano group include ketone peroxides such as methyl ethyl ketone peroxide and cyclohexanone peroxide; peroxyketals such as 1,1-bis(tert-hexylperoxy)3,3,5-trimethylcyclohexane and 1,1-bis(tert-hexylperoxy)cyclohexane; hydroperoxides such as p-menthane hydroperoxide; dialkyl peroxides such as 2,5-dimethyl-2,5-bis(tert-butylperoxy)hexane; diacyl peroxides such as isobutyryl peroxide and 3,3,5-trimethylhexanoyl peroxide; peroxyesters such as 1,1,3,3-tetramethylbutylperoxyneodecanate and tert-hexylperoxyneodecanate; and peroxydicarbonates such as di-n-propyl peroxydicarbonate and diisopropyl peroxydicarbonate.

[0103] Examples of redox compounds that do not contain a cyano group include hydrogen peroxide and ammonium persulfate.

[0104] (Solvent) Examples of the solvent include glycol-based solvents (glycol-based compounds), ester-based solvents, ketone-based solvents, ether-based solvents, amide-based solvents, sulfoxide-based solvents, and hydrocarbon-based solvents. The solvent may be a single solvent or a mixed solvent of two or more solvents mixed at any ratio.

[0105] Examples of glycol solvents include propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, and ethylene glycol monobutyl ether acetate.

[0106] Examples of ester solvents include lactate ester solvents such as ethyl lactate; propionate ester solvents such as methyl 3-methoxypropionate; acetate ester solvents such as methyl acetate, ethyl acetate, propyl acetate, and butyl acetate; and the like.

[0107] Examples of ketone solvents include acetone, methyl ethyl ketone, methyl isobutyl ketone, methyl amyl ketone, cyclopentanone, and cyclohexanone.

[0108] Examples of ether solvents include chain ethers such as diethyl ether, diisopropyl ether, dibutyl ether, and dimethoxyethane; and cyclic ethers such as tetrahydrofuran and dioxane.

[0109] An example of the amide solvent is N,N-dimethylformamide.

[0110] Examples of sulfoxide solvents include dimethyl sulfoxide.

[0111] Examples of hydrocarbon solvents include aliphatic hydrocarbons such as pentane, hexane, heptane, and octane; alicyclic hydrocarbons such as cyclohexane and methylcyclohexane; and aromatic hydrocarbons such as benzene, toluene, and xylene.

[0112] Among these, the solvent is preferably a glycol-based solvent such as propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate; an ester-based solvent such as ethyl lactate; a ketone-based solvent such as acetone, methyl ethyl ketone, methyl isobutyl ketone, methyl amyl ketone, cyclopentanone, and cyclohexanone; or a mixed solvent thereof.

[0113] (Chain transfer agent) As the chain transfer agent, known or conventional chain transfer agents used in radical polymerization can be used. Examples of known or conventional chain transfer agents include chain transfer agents containing a mercapto group, chain transfer agents containing a thiocarbonylthio group (chain transfer agents containing a cyano group and a thiocarbonylthio group, and chain transfer agents containing a thiocarbonylthio group but not a cyano group), etc. The chain transfer agent may be used alone or in combination of two or more in any ratio.

[0114] Examples of chain transfer agents containing a mercapto group include 1-butanethiol, 2-butanethiol, t-butyl mercaptan, 2-methyl-1-propanethiol, 2-methyl-2-propanethiol, 1-octanethiol, 1-decanethiol, 1-dodecanethiol, 1-tetradecanethiol, n-lauryl mercaptan, cyclohexanethiol, 1-mercaptoethanol, 2-mercaptoethanol, 3-mercapto-1-propanol, 3-mercapto-1,2-propanediol, triethylene glycol dimercaptan, p-mercaptophenylmethanol, 2-(p-mercaptophenyl)ethanol, p-(mercaptomethyl)phenylmethanol, 2-(p-(mercaptomethyl)phenyl)ethanol, p-mercaptophenol, p-(mercaptomethyl)phenol, and p-(1-mercaptoethyl)phenol. thiols such as mercaptophenol and p-(2-mercaptoethyl)phenol (preferably a thiol having an aliphatic hydrocarbon group having from 1 to 20 carbon atoms, which may have a substituent, more preferably a thiol having an aliphatic hydrocarbon group having from 6 to 12 carbon atoms, which may have a substituent); thiolic acids such as mercaptopropionic acid, thiobenzoic acid, thioglycolic acid, and thiomalic acid; thiolic acid esters (preferably alkyl thiolates) such as methyl thioglycolate, ethyl thioglycolate, n-butyl thioglycolate, methyl 2-mercaptopropionate, ethyl 2-mercaptopropionate, methyl 3-mercaptopropionate, ethyl 3-mercaptopropionate, methyl p-mercaptobenzoate, ethyl p-mercaptobenzoate, methyl p-(mercaptomethyl)benzoate, and ethyl p-(mercaptomethyl)benzoate;

[0115] Examples of chain transfer agents containing a cyano group and a thiocarbonylthio group include 2-cyano-2-propyl 4-cyanobenzodithioate, 4-cyano-4-(phenylcarbonothioylthio)pentanoic acid, 2-cyano-2-propylbenzodithioate, and 4-cyano-4-(phenylcarbonothioylthio)pentanoic acid. Dithiobenzoate-based chain transfer agents containing a cyano group such as N-succinimidyl ester; 4-cyano-4-[(dodecylsulfanylthiocarbonyl)sulfanyl]pentanoic acid, 2-cyano-2-propyldodecyltrithiocarbonate, 4-cyano-4-[(dodecylsulfanylthiocarbonyl)sulfanyl]pentanol, poly(ethylene glycol) methyl ether 4-cyano-4-[(dodecylsulfanylthiocarbonyl)sulfanyl]pentanoate, poly(ethylene glycol) methyl ether (4-cyano-4-pentanoate dodecyltrithiocarbonate), poly(ethylene glycol) methyl ether (4-cyano-4-pentanoate dodecyltrithiocarbonate), poly(ethylene glycol) trithiocarbonate-based chain transfer agents containing a cyano group, such as cyanomethylmethyl (phenyl)carbamodithioate, cyanomethyldiphenylcarbamodithioate, 1-succinimidyl-4-cyano-4-[N-methyl-N-(4-pyridyl)carbamothioylthio]pentanoate, 2-cyanopropan-2-yl-N-methyl-N(pyridin-4-yl)carbamodithioate, and cyanomethylmethyl(4-pyridyl)carbamodithioate; and xanthate-based chain transfer agents containing a cyano group. Among these, the chain transfer agent containing a cyano group and a thiocarbonylthio group is preferably 4-cyano-4-(phenylcarbonothioylthio)pentanoic acid, 2-cyano-2-propylbenzodithioate, 4-cyano-4-[(dodecylsulfanylthiocarbonyl)sulfanyl]pentanoic acid, or 2-cyano-2-propyldodecyltrithiocarbonate, in terms of obtaining a polymer with a smaller polydispersity index Mw / Mn.

[0116] Examples of chain transfer agents that do not contain a cyano group but contain a thiocarbonylthio group include didithiobenzoate-based chain transfer agents that do not contain a cyano group, such as 2-phenyl-2-propylbenzodithioate, 1-(methoxycarbonyl)ethylbenzodithioate, benzylbenzodithioate, ethyl-2-methyl-2-(phenylthiocarbonylthio)propionate, methyl-2-phenyl-2-(phenylcarbonothioylthio)acetate, ethyl-2-(phenylcarbonothioylthio)propionate, and bis(thiobenzoyl)disulfide; 2-(dodecylthiocarbonylthioylthio)propionic acid, 2-(dodecylthiocarbonylthioylthio)-2-methylpropionic acid, methyl-2-(dodecylthiocarbonylthioylthio)-2-methylpropionate, and 2-(dodecylthiocarbonylthioylthio)-2-methylpropionic acid. N-hydroxysuccinimide ester, poly(ethylene glycol) methyl ether (2-methyl-2-propionic acid dodecyltrithiocarbonate), poly(ethylene glycol) bis[2-(dodecylthiocarbonylthioylthio)-2-methylpropionate], 2-(dodecylthiocarbonylthioylthio)-2-methylpropionic acid 3-azido-1-propanol ester, 2-(dodecylthiocarbonylthioylthio)-2-methylpropionic acid pentafluorophenyl ester, poly(ethylene glycol) methyl ether 2-(dodecylthiocarbonylthioylthio)-2-methylpropionate, poly(ethylene glycol) methyl ether 2-(dodecylthiocarbonylthioylthio)-2-methylpropionate, poly(ethylene glycol) methyl ether trithiocarbonate chain transfer agents not containing a cyano group, such as 2-(dodecylthiocarbonylthiooylthio)-2-methylpropionate, poly(ethylene glycol) bis[2-(dodecylthiocarbonylthiooylthio)-2-methylpropionate], and bis(dodecylsulfanylthiocarbonyl) disulfide;Examples of suitable chain transfer agents include dithiocarbamate-based chain transfer agents that do not contain a cyano group, such as benzyl 1H-pyrrole-1-carbodithioate, methyl 2-propionate methyl(4-pyridinyl)carbamodithioate, and N,N'-dimethyl-N,N'-di(4-pyridinyl)thiuram disulfide; and xanthate-based chain transfer agents that do not contain a cyano group. Among these, ethyl-2-methyl-2-(phenylthiocarbonylthio)propionate is preferred as the chain transfer agent that does not contain a cyano group but contains a thiocarbonylthio group, as this allows for the production of polymers with a smaller polydispersity index Mw / Mn.

[0117] Although the radical polymerization reaction of a monomer using a microfluidic system has been described above, the polymerization reaction when polymerizing a monomer using the microfluidic system according to this embodiment is not limited to a radical polymerization reaction, and any known or commonly used polymerization reaction may be appropriately employed. Furthermore, as described above, the fact that the components in the reaction system are uniformly mixed to enable a chemical reaction to proceed uniformly is not limited to a polymerization reaction of a monomer, but can also be applied to various chemical reactions. Therefore, even if the microfluidic system according to this embodiment is used for a chemical reaction other than a polymerization reaction of a monomer, it is possible to ensure the uniform progression of the chemical reaction, thereby ensuring the quality of the product.

[0118] [Polymer Production System] A polymer production system, which is an example of a microfluidic system according to the present disclosure, will now be described with reference to the drawings. FIG. 1 is a configuration diagram of a polymer production system 100 according to the present embodiment. In this embodiment, as an example of a microfluidic system according to the present disclosure, a polymer production system 100 will be described that polymerizes two types of monomers, monomer B and monomer C, in the presence of a polymerization initiator A to obtain polymer D, which is a reaction product of these two types of monomers. However, the configuration of the embodiment described below is merely an example, and the technology of the present disclosure is not limited to the configuration of this embodiment. In this specification, "directly upstream" means the upstream side in a relationship adjacent to each other in the flow direction, and "directly downstream" means the downstream side in a relationship adjacent to each other in the flow direction.

[0119] [Overall Configuration] First, the overall configuration of the polymer production system 100 will be described. The polymer production system 100 is configured to include multiple chip-type microfluidic devices each having a microchannel formed on a substrate. More specifically, as shown in FIG. 1 , the polymer production system 100 includes multiple device units 10 each including a mixing device 20 and a reaction device 30, which are chip-type microfluidic devices; a heater 40; raw material tanks 50a and 50b; liquid delivery pumps 60a and 60b; a product tank 70; and conduits 80a, 80b, 80c, 80d, and 80e. In this embodiment, the "upstream side" refers to the raw material tank 50a side of a production flow path F1 (an example of a "predetermined processing flow path") extending from the raw material tank 50a to the product tank 70; and the "downstream side" refers to the product tank 70 side of the production flow path F1. The production flow path F1 is a flow path that continues from the raw material tank 50a, which is a fluid supply source, to the product tank 70, which is a fluid discharge destination.

[0120] The raw material tank 50a contains a solution containing a radical polymerization initiator A (polymerization initiator A solution). The radical polymerization initiator A (hereinafter sometimes simply referred to as "polymerization initiator A") generates radicals when subjected to treatment such as heating or light irradiation, thereby promoting the polymerization reaction of the curable compound. The raw material tank 50b contains a solution containing reactants, monomer B and monomer C (monomer BC solution). Monomer B and monomer C are monomers that undergo radical polymerization with each other in the presence of the radical polymerization initiator A. Monomer B and monomer C may be different types of monomers, in which case they will undergo copolymerization. Alternatively, monomer B and monomer C may be the same type of monomer, in which case they will undergo homopolymerization. The polymerization initiator A solution and the monomer BC solution are each an example of "multiple different fluids" according to the present disclosure.

[0121] As shown in Figure 1, in the polymer production system 100, a plurality of mixing devices 20 and a plurality of reaction devices 30 are arranged alternately in the flow direction, with the mixing device 20 at the most upstream (first) and moving downstream. The mixing devices 20 and reaction devices 30 adjacent to each other in the flow direction are connected by conduits 80d and 80e so as to be able to communicate with each other. Therefore, in the polymer production system 100, the plurality of mixing devices 20 and the plurality of reaction devices 30 are arranged alternately and in series. In addition, the reaction device 30 is provided with a heater 40, which will be described later.

[0122] The device unit 10 is a combination of microfluidic devices composed of a mixing device 20 and a reaction device 30 adjacent to each other in the flow direction. In the device unit 10, the mixing device 20 is arranged on the upstream side, and the reaction device 30 is arranged on the downstream side. The polymer production system 100 according to this embodiment is composed of a plurality of device units 10. Hereinafter, the number of device units 10 in this embodiment will be represented as N (N is an integer of 2 or more). The number N of device units 10 is not particularly limited, but is preferably 5 or more, for example. For example, it is preferably 3 or more, more preferably 4 or more, and even more preferably 5 or more.

[0123] Here, of the multiple device units 10 included in the polymer production system 100, the kth device unit 10 from the upstream side (k is an integer between 1 and N) is referred to as device unit 10k. That is, in the polymer production system 100, device unit 101, device unit 102, ..., and device unit 10N are arranged in order from the upstream side. Furthermore, of the multiple mixing devices 20 included in the polymer production system 100, the mixing device 20 of the kth device unit 10 from the upstream side is referred to as mixing device 20k. That is, in the polymer production system 100, mixing device 201, mixing device 202, ..., and mixing device 20N are arranged in order from the upstream side. Similarly, of the multiple reaction devices 30 included in the polymer production system 100, the reaction device 30 of the kth device unit 10 from the upstream side is referred to as reaction device 30k. That is, in the polymer production system 100, reaction device 301, reaction device 302, ..., and reaction device 30N are arranged in order from the upstream side. In this embodiment, the device unit 10k is configured by combining a mixing device 20k and a reaction device 30k.

[0124] The polymer production system 100 continuously supplies a polymerization initiator A solution and a monomer BC solution to the production flow path F1 via the mixing device 201 of the device unit 101 located at the most upstream side, and continuously additionally supplies (additionally charges) the monomer BC solution to the production flow path F1 via the mixing device 20 of the device unit 10 located downstream of the device unit 101, thereby sequentially producing a polymer D. The polymer D produced by the polymer production system 100 is discharged from the reaction device 30N of the device unit 10N located at the most downstream side of the multiple device units 10.

[0125] The conduits 80a, 80b, 80c, 80d, and 80e are pipes through which a fluid can flow. The conduit 80a connects the raw material tank 50a to the mixing device 201 of the device unit 101 so that they can communicate with each other, and the conduit 80b connects the raw material tank 50b to the mixing device 20 so that they can communicate with each other. The conduit 80c connects the mixing device 20 to the reaction device 30 in the device unit 10 so that they can communicate with each other. The conduit 80d connects the reaction device 30 in the upstream device unit 10 to the mixing device 20 in the downstream device unit 10 so that they can communicate with each other, between the device units 10 adjacent to each other in the flow direction. The conduit 80e connects the reaction device 30N in the device unit 10N to the product tank 70 so that they can communicate with each other.

[0126] As described above, the raw material tanks 50a and 50b are containers that contain the polymerization initiator A solution and the monomer BC solution, respectively. The polymerization initiator A solution and the monomer BC solution are supplied to the mixing device 20 via conduits 80a and 80b, respectively. The product tank 70 is a container that stores the polymer D produced by the polymer production system 100. The polymer D is discharged from the reaction device 30N of the device unit 10N to the product tank 70 via a conduit 80e.

[0127] The conduits 80a and 80b are provided with liquid feed pumps 60a and 60b, respectively. The liquid feed pumps 60a and 60b are liquid feed means for transporting fluids in the raw material tanks 50a and 50b to the mixing device 20. The polymerization initiator A solution in the raw material tank 50a is pressure-fed through the conduit 80a by driving the liquid feed pump 60a and supplied to the mixing device 20. The monomer BC solution in the raw material tank 50b is pressure-fed through the conduit 80b by driving the liquid feed pump 60b and supplied to the mixing device 20. Examples of liquid feed pumps include a syringe pump, a diaphragm pump, and a pressure-controlled pump. In this embodiment, for example, the raw material tanks 50a and 50b may not be used, and the polymerization initiator A solution and the monomer BC solution may be supplied to the reaction device 30 using syringe pumps each containing the polymerization initiator A solution and the monomer BC solution.

[0128] [Mixing Device] Next, the structure of the mixing device 20 will be described. Fig. 2 is a plan view of the mixing device 20 according to this embodiment. The mixing device 20 according to this embodiment is configured as a chip-type microfluidic device in which a microchannel (also referred to as a microchannel) is formed inside a substrate. As shown in Fig. 2, the mixing device 20 has a substrate 1, a first channel 2, and a first inlet channel 3.

[0129] The substrate 1 is a plate-like member having a rectangular shape in a plan view. The material of the substrate 1 is not particularly limited, but examples thereof include silicon, silica, quartz, glass, resin, and silicon carbide. From the viewpoint of resist polymer production, a glass chip is preferably used as a non-metallic, solvent-resistant material.

[0130] The first flow path 2 and the first inlet flow path 3 are configured as grooves formed on the surface of the substrate 1. The first flow path 2 and the first inlet flow path 3 can be formed by, for example, performing an etching process on the substrate 1.

[0131] The first flow path 2 is formed as a microchannel that constitutes part of the production flow path F1. As shown in FIG. 2 , the first flow path 2 has a serpentine shape in a plan view. One end of the first flow path 2 is formed with a supply port 21 for supplying a fluid into the first flow path 2, and the other end of the first flow path 2 is formed with an outlet port 22 for discharging a solution from the first flow path 2. In other words, the first flow path 2 extends continuously in a serpentine shape from the supply port 21 to the outlet port 22. The fluid supplied to the supply port 21 flows through the first flow path 2 and is discharged from the outlet port 22. The first flow path 2 includes a plurality of straight flow paths 23 that are formed linearly and arranged in parallel in a plan view, and a plurality of curved flow paths 24 that are formed curvedly and connect the ends of adjacent straight flow paths 23, 23 in the flow direction. The first flow path 2 is formed in a serpentine shape by these straight flow paths 23 and curved flow paths 24.

[0132] An inlet section 25 for introducing a fluid from the first inlet flow channel 3 into the first flow channel 2 is formed in a midway portion of the first flow channel 2 in the flow direction, more specifically, in a midway portion of the straight flow channel 23 located at the most upstream position in the first flow channel 2. The inlet section 25 introduces the monomer BC solution into the first flow channel 2 in order to mix the polymerization initiator A solution and the monomer BC solution, which are multiple different fluids, in the production flow channel F1 (first flow channel 2 in this example). The inlet section 25 is formed as a confluence section that merges with the first inlet flow channel 3. In other words, the first flow channel 2 merges with the first inlet flow channel 3 at the inlet section 25. As shown in the enlarged view A1 of FIG. 2 , the inlet section 25 has a first inlet port 25a that opens into the first inlet flow channel 3.

[0133] Herein, in the present specification, a microchannel in a mixing device that promotes mixing of reactants contained in a mixture of multiple different fluids is referred to as a "mixing channel." The mixing channel is, in other words, a region where mixing of reactants introduced at an inlet portion progresses. In the polymer production system 100 according to this embodiment, the region of the first channel 2 downstream of the inlet portion 25 corresponds to the "mixing channel." The region of the first channel 2 upstream of the inlet portion 25 is referred to as the transport channel 2a, and the region downstream of the inlet portion 25 is referred to as the mixing channel 2b. That is, the transport channel 2a is the region from the supply port 21 to the inlet portion 25, and the mixing channel 2b is the region from the inlet portion 25 to the outlet 22. As will be described in detail later, the transport channel 2a of the mixing device 201, which is located at the most upstream of the multiple mixing devices 20, transports a polymerization initiator A solution, and the transport channel 2a of the mixing device 20 located downstream of the mixing device 201 transports a product liquid (reaction mixture) containing the polymerization initiator A solution and polymer D. The fluid transported from the transport flow path 2a of the first flow path 2 and the monomer BC solution transported from the first introduction flow path 3 merge at the introduction part 25 of the first flow path 2 and are mixed while flowing through the mixing flow path 2b.

[0134] The flow path length (length in the flow direction) of the mixing flow path 2b is defined as L1. L1 is the flow path length of the first flow path 2 downstream of the inlet 25, and can be defined as the flow path length from the inlet 25 to the outlet 22. In other words, the flow path length L1 can be defined as the flow path length of the first flow path 2 downstream of the position where mixing of the monomer BC solution and the polymerization initiator A solution introduced from the inlet 25 begins.

[0135] Here, the channel length L1 of the mixing channel 2b in the k-th mixing device 20 from the upstream side among the multiple mixing devices 20 included in the polymer production system 100 is denoted as L1k. That is, the channel lengths L1 of the mixing channels 2b in the mixing device 201, mixing device 202, ..., and mixing device 20N, starting from the upstream side, are L11, L12, ..., and L1N. In this case, in the polymer production system 100 according to this embodiment, the channel lengths L1 of the mixing channels 2b in each mixing device 20 are set so that L1k < L1(k+1) while the cross-sectional areas of the mixing channels 2b of the multiple mixing devices 201 to 20N are equal (constant). That is, the channel length L1 of the mixing channel 2b in each mixing device 20 is set so that the channel length L1 of the mixing channel 2b of the mixing device 20 located further downstream among the multiple mixing devices 20 is longer. Therefore, in the polymer production system 100 according to this embodiment, the volume of the mixing channel 2b increases as the mixing device 20 is positioned further downstream. However, the technology of the present disclosure is not limited to this, and the channel length can be set as appropriate.

[0136] The first inlet flow path 3 is a flow path for introducing the monomer BC solution into the first flow path 2. The first inlet flow path 3 is formed in a straight line. One end of the first inlet flow path 3 is formed with a supply port 31 for supplying a fluid (in this example, the monomer BC solution) into the first inlet flow path 3, and the other end of the first inlet flow path 3 is connected to the inlet section 25 of the first flow path 2. This allows the first inlet flow path 3 to communicate with the first flow path 2 via the first inlet 25a. The transport flow path 2a of the first flow path 2, the first inlet flow path 3, and the mixing flow path 2b form a substantially Y-shape. The monomer BC solution supplied to the supply port 31 flows through the first inlet flow path 3 and is introduced into the first flow path 2 from the first inlet 25a of the inlet section 25.

[0137] As shown in FIG. 1 , a conduit 80a is connected to the supply port 21 of the first flow path 2 of the mixing device 201, which is located at the most upstream of the multiple mixing devices 20, for supplying a polymerization initiator A solution from a raw material tank 50a to the first flow path 2. A conduit 80d is connected to the supply port 21 of the first flow path 2 of the mixing device 20 located downstream of the mixing device 201, for supplying a product liquid containing the polymerization initiator A solution and polymer D from the reaction device 30 to the first flow path 2. A conduit 80c is connected to the outlet 22 of the first flow path 2 of the mixing device 20, for supplying a mixed liquid of the polymerization initiator A solution and monomer BC (an example of a mixed fluid) from the first flow path 2 to the reaction device 30. Thus, the first flow path 2 constitutes a part of the production flow path F1. A conduit 80b is connected to the supply port 31 of the first inlet flow path 3 of the mixing device 20, for supplying the monomer BC solution from a raw material tank 50b to the first inlet flow path 3.

[0138] In the technology according to the present disclosure, an inlet channel for introducing a fluid into the mixing channel (first inlet channel 3 in this example) is not an essential component. For example, the mixing device 20 may not have the first inlet channel 3, and the monomer BC solution may be introduced directly from the inlet portion 25 of the first channel 2. However, from the viewpoint of efficient mixing, it is preferable that the mixing device has an inlet channel that introduces a fluid to the inlet portion. The mixing device may also have multiple inlet portions. For example, the mixing device 20 may introduce a monomer B solution containing monomer B and a monomer C solution containing monomer C into the mixing channel 2b via separate inlet portions.

[0139] [Reaction Device] Next, the structure of the reaction device 30 will be described. Fig. 3 is a plan view of the reaction device 30 according to this embodiment. Like the mixing device 20, the reaction device 30 according to this embodiment is configured as a chip-type microfluidic device in which a microchannel is formed inside a substrate. As shown in Fig. 3, the reaction device 30 has a substrate 5 and a reaction channel 6. The reaction device 30 is an example of an "other process device", and a chemical reaction takes place in the reaction channel 6.

[0140] The substrate 5 is a plate-like member having a rectangular shape in a plan view. The material of the substrate 5 is not particularly limited, but examples thereof include silicon, silica, quartz, glass, resin, and silicon carbide. From the viewpoint of producing a resist polymer, a glass chip is preferably used as a non-metallic, solvent-resistant material.

[0141] The reaction channels 6 are configured as grooves formed on the surface of the substrate 5, and can be formed by, for example, subjecting the substrate 5 to an etching process.

[0142] The reaction channel 6 is a channel for promoting a chemical reaction in a mixed solution of the polymerization initiator A solution and the monomer BC solution mixed in the mixing channel 2b of the mixing device 20, and is formed as a microchannel constituting part of the production channel F1. As shown in FIG. 3 , the reaction channel 6 has a serpentine shape in plan view. One end of the reaction channel 6 is formed with a supply port 61 for supplying a fluid into the reaction channel 6, and the other end of the reaction channel 6 is formed with a discharge port 62 for discharging the solution from the reaction channel 6. In other words, the reaction channel 6 extends continuously in a serpentine shape from the supply port 61 to the discharge port 62. The fluid supplied to the supply port 61 flows through the reaction channel 6 and is discharged from the discharge port 62. The reaction channel 6 includes a plurality of linear channel 63 formed in a straight line and arranged in parallel in plan view, and a plurality of curved channel 64 formed in a curved line and connecting the ends of adjacent linear channel 63, 63 in the flow direction. These linear channel 63 and curved channel 64 form the reaction channel 6 in a serpentine shape.

[0143] Here, the channel length (length in the flow direction) of the reaction channel 6 is defined as L2. L2 can be defined as the channel length from the supply port 61 to the discharge port 62. The channel length L2 is not particularly limited and can be set appropriately.

[0144] As shown in FIG. 1 , a conduit 80c is connected to the supply port 61 of the reaction flow path 6 in the reaction device 30, for supplying a mixed solution of a polymerization initiator A solution and a monomer BC solution from the mixing flow path 2b of the mixing device 20 to the reaction flow path 6. Furthermore, a conduit 80d is connected to the outlet 62 of the reaction flow path 6 in the reaction device 30 that is located upstream of the reaction device 30N that is located most downstream among the multiple reaction devices 30, for supplying a product liquid containing the polymerization initiator A solution and polymer D from the reaction flow path 6 to the first flow path 2 of the mixing device 20. Furthermore, a conduit 80e is connected to the outlet 62 of the reaction flow path 6 in the reaction device 30N, for discharging the product liquid from the reaction flow path 6 to the product tank 70. As a result, the reaction flow path 6 constitutes a part of the production flow path F1, and the mixing flow path 2b and the reaction flow path 6 are connected in series.

[0145] Furthermore, as will be described in detail later, the mixed solution flowing through the reaction channel 6 is heated by the heater 40 to a reaction temperature or higher, thereby accelerating the polymerization reaction between the monomers B and C in the presence of the polymerization initiator A. In other words, the reaction channel 6 is a microchannel for promoting a chemical reaction in the mixed solution of the polymerization initiator A solution and the monomers B and C solutions. Note that the reaction device according to the present disclosure may have one or more inlet portions for introducing at least one of the different fluids into the reaction channel, depending on the type, amount, introduction timing, etc. of the different fluids. In this case, the reaction channel can be defined as a microchannel arranged downstream of the inlet portion located most downstream in the reaction device.

[0146] [Heater] The heater 40 is a device for accelerating a chemical reaction (a polymerization reaction in this example) by heating the mixed solution flowing through the reaction flow path 6 of the reaction device 30. The heater 40 is an example of a "reaction acceleration means" according to the present disclosure. The heating temperature of the heater 40 is not particularly limited and can be set appropriately depending on the reaction temperature. The heater 40 heats the mixed solution in the reaction flow path 6 to a temperature equal to or higher than the reaction temperature of the polymerization reaction in order to accelerate the polymerization reaction of monomer B and monomer C in the presence of polymerization initiator A. The reaction temperature here is, for example, the decomposition temperature of polymerization initiator A. The heater 40 is not particularly limited, and a known heater such as an electric heater can be used. In this embodiment, the heater 40 is provided in the reaction device 30 so as to accelerate the chemical reaction of the reactants in the reaction flow path 6. In this embodiment, the heater 40 is provided only in the reaction device 30 out of the mixing device 20 and the reaction device 30 so that the chemical reaction of the reactants is promoted in the reaction channel 6 out of the mixing channel 2b and the reaction channel 6. In other words, in this embodiment, the fluid flowing through the mixing channel 2b is not heated by the heater 40 and is kept below the reaction temperature. Therefore, in this embodiment, the chemical reaction of the reactants contained in the fluid flowing through the mixing channel 2b is suppressed from progressing in the mixing channel 2b.

[0147] [Polymer Production Method] A polymer production method using the polymer production system 100 according to the embodiment will now be described. The polymer according to the embodiment is produced by continuously supplying a polymerization initiator A solution and a monomer BC solution to a production flow path F1 including a mixing flow path 2b and a reaction flow path 6. Specifically, the polymerization initiator A solution is continuously supplied to the first flow path 2 of the mixing device 201 by the liquid supply pump 60a, and the monomer BC solution is continuously supplied to the first flow path 2 of each mixing device 20 by the liquid supply pump 60b. The flow rates and flow velocities of the solutions supplied to the first flow path 2 are not particularly limited and can be set appropriately depending on the purpose.

[0148] In the polymer production system 100, a polymer is produced in each reaction device 30 of each device unit 10. Hereinafter, the mixed liquid supplied from mixing device 20k, which is the mixing device 20 of the kth device unit 10 from the upstream side, to reaction device 30k will be referred to as the kth mixed liquid, and the product liquid supplied from reaction device 30k to mixing device 20(k+1) will be referred to as the kth product liquid.

[0149] First, we will explain the production of polymer in the device unit 101, which is located at the most upstream. A polymerization initiator A solution is supplied from the raw material tank 50a through the conduit 80a by the liquid feed pump 60a to the mixing device 201 of the device unit 101, and is introduced into the first flow path 2 via the supply port 21. On the other hand, a monomer BC solution is supplied from the raw material tank 50b through the conduit 80b by the liquid feed pump 60b to the mixing device 201, and is introduced into the first inlet flow path 3 via the supply port 31.

[0150] Then, the monomer BC solution transported from the first introduction flow path 3 is introduced into the first flow path 2 via the introduction part 25 and merges with the polymerization initiator A solution transported through the transport flow path 2a. This initiates mixing of the polymerization initiator A solution and the monomer BC solution in the introduction part 25. The polymerization initiator A solution and the monomer BC solution flow through the mixing flow path 2b due to the pressure of the liquid feed pumps 60a and 60b, and are uniformly mixed on the way to the outlet 22 due to diffusion mixing in which the mixing flow path 2b, which is a microflow path, serves as a mixing field.

[0151] Here, the fluid flowing through the mixing flow path 2b of the mixing device 201 is kept below the reaction temperature without being heated by the heater 40. Therefore, the polymerization reaction between the monomers B and C is suppressed from proceeding in the mixing flow path 2b.

[0152] The primary mixed solution of the polymerization initiator A solution and the monomer BC solutions is discharged from the outlet 22 and flows through the conduit 80 c to be supplied to the reaction device 301 of the device unit 101 .

[0153] The primary mixed liquid supplied to the reaction device 301 is introduced into the reaction flow channel 6 through the supply port 61. The primary mixed liquid introduced into the reaction flow channel 6 flows through the reaction flow channel 6 while being heated by the heater 40 to a temperature equal to or higher than the reaction temperature. This promotes the polymerization reaction of monomer B and monomer C in the presence of polymerization initiator A, and polymer D is produced. At this time, a portion of the polymerization initiator A, at least a portion of monomer B, and at least a portion of monomer C contained in the primary mixed liquid are consumed by the polymerization reaction. Monomer B and monomer C may be polymerized entirely, or only a portion may be left.

[0154] The primary product liquid containing the polymerization initiator A and the polymer D is discharged from the discharge port 62 and flows through the conduit 80 d to be supplied to the mixing device 202 of the device unit 102 .

[0155] Next, polymer production in a device unit 10p (p is an integer equal to or greater than 2 and less than N) arranged downstream of the device unit 101 will be described. The (p-1)th product liquid, which flows through the conduit 80d from the reaction device 30(p-1) of the device unit 10(p-1) arranged immediately upstream of the device unit 10p and is supplied to the mixing device 20p of the device unit 10p, is introduced into the first flow path 2 via the supply port 21. This (p-1)th product liquid contains a polymerization initiator A and a polymer D. Furthermore, the (p-1)th product liquid may contain residual monomers B and C that did not react in the reaction devices 30 upstream of the mixing device 20p.

[0156] Meanwhile, similar to the case of the mixing device 201, the monomer BC solution is supplied to the mixing device 20p by the liquid feed pump 60b. Then, the monomer BC solution transported from the first inlet flow path 3 is introduced into the first flow path 2 via the inlet 25 and merges with the (p-1)th product liquid transported through the transport flow path 2a. This causes additional monomer BC solution to be introduced into the production flow path F1, thereby additionally charging the monomer. Then, at the inlet 25 of the first flow path 2, mixing of the (p-1)th product liquid containing the polymerization initiator A and the polymer D with the additionally introduced monomer BC solution begins. The (p-1)th product liquid and the monomer BC solution are uniformly mixed while flowing through the mixing flow path 2b due to the pressure of the liquid feed pumps 60a and 60b and reaching the outlet 22.

[0157] Here, similarly to the case of the mixing device 201, the fluid flowing through the mixing flow path 2b of the mixing device 20p is kept below the reaction temperature without being heated by the heater 40. Therefore, the polymerization reaction between the monomer B and the monomer C is suppressed from proceeding in the mixing flow path 2b.

[0158] The p-th mixed solution of the (p-1)th product solution and the monomer BC solution is discharged from the outlet 22, flows through the conduit 80d, and is supplied to the reaction device 30p of the device unit 10p.

[0159] The p-th order mixed liquid supplied to the reaction device 30p is introduced into the reaction flow path 6 through the supply port 61 and flows through the reaction flow path 6 while being heated by the heater 40 to a temperature equal to or higher than the reaction temperature. This promotes the polymerization reaction of monomer B and monomer C in the presence of polymerization initiator A, producing polymer D. At this time, a portion of the polymerization initiator A, at least a portion of monomer B, and at least a portion of monomer C contained in the p-th order mixed liquid are consumed by the polymerization reaction. All of monomer B and monomer C may be polymerized, or only a portion may be polymerized. Furthermore, if monomer B or monomer C that did not react in each reaction device 30 upstream of the mixing device 20p remains in the p-th order mixed liquid, these may also be polymerized.

[0160] The pth product liquid containing polymerization initiator A and polymer D is discharged from outlet 62, flows through conduit 80d and is supplied to mixing device 20(p+1) of device unit 10(p+1) located immediately downstream.

[0161] Next, the production of polymers in the device unit 10N arranged at the most downstream side will be described. The mixing process in the mixing device 20N of the device unit 10N and the chemical reaction in the reaction device 30N are similar to those in the device unit 10p, and therefore detailed description thereof will be omitted.

[0162] As with the mixing device 20p, in the mixing device 20N of the device unit 10N, the (N-1)th-order product liquid containing a polymerization initiator A and a polymer D and the additionally introduced monomer B solution are uniformly mixed on their way to the discharge port 22, with the progress of the polymerization reaction being suppressed. As with the reaction device 30p, in the reaction device 30N of the device unit 10N, the Nth-order mixture flows through the reaction flow path 6 while being heated by the heater 40 to a temperature equal to or higher than the reaction temperature, thereby accelerating the polymerization reaction and producing polymer D. At this time, in the reaction flow path 6 of the reaction device 30N, all of the polymerization initiator A contained in the Nth-order mixture may be consumed by the polymerization reaction of the monomer B and the monomer C. Furthermore, all of the monomer B and all of the monomer C contained in the Nth-order mixture may be consumed by the polymerization reaction.

[0163] The Nth product liquid containing polymer D is discharged from the outlet 62, flows through the conduit 80e, and is discharged into the product tank 70. This allows the polymer D produced in the device units 101, 102, ... 10N to be recovered. As described above, in the polymer production method using the polymer production system 100 according to this embodiment, a large amount of polymer D can be produced by additionally charging (N-1) times.

[0164] [Actions and Effects] As described above, the polymer production system 100 according to this embodiment includes a plurality of mixing devices 20 each having a mixing flow channel 2b that mixes a polymerization initiator A solution and a monomer BC solution, which are different fluids, and an inlet 25 that introduces the monomer BC solution into the mixing flow channel 2b, and a plurality of reaction devices 30 each having a reaction flow channel 6 that causes a polymerization reaction between monomer B and monomer C (reactants) contained in the mixed solution mixed in the mixing flow channel 2b. In the polymer production system 100, the plurality of mixing devices 20 and the plurality of reaction devices 30 are arranged in series so that the mixing flow channel 2b and the reaction flow channel 6 are in communication with each other.

[0165] If the polymer production system 100 were not equipped with the mixing device 20 and mixing and reaction were carried out only in the reaction device 30, the polymerization initiator A solution, the monomer B solution, and the monomer C solution would not be mixed sufficiently uniformly, and the polymerization reaction would be carried out in a state where the concentrations of the polymerization initiator A, the monomer B, and the monomer C are uneven in the reaction system. If this happens, the polymerization reaction would not proceed uniformly, and as a result, problems such as the monomer sequence and polydispersity Mw / Mn of the polymer D not being as desired could occur, and the quality of the reaction product could not be ensured.

[0166] In contrast, the polymer production system 100 according to the present embodiment mixes a polymerization initiator A solution, a monomer B solution, and a monomer C solution in a mixing device 20, and then causes a polymerization reaction between the monomers B and C contained in these mixed solutions to proceed in a reaction device 30. Therefore, in the reaction device 30, the polymerization reaction is carried out in a state in which the polymerization initiator A solution and the monomers B and C solutions are more uniformly mixed. As a result, the polymer production system 100 allows the polymerization reaction to proceed more uniformly. This makes it easier to achieve desired properties, such as the monomer sequence and polydispersity Mw / Mn of the polymer D, and therefore makes it easier to ensure the quality of the reaction product.

[0167] In order to uniformly mix multiple different fluids and ensure that chemical, biological, and physical processes in the other process devices proceed uniformly, the microfluidic system according to the present disclosure may include at least one mixing device and at least one other process device; the number of mixing devices and the number of other process devices do not need to be multiple. According to the microfluidic system according to the present disclosure, by separating the mixing device where the mixing process is performed from the other process devices where processes other than the mixing process are performed, the chemical, biological, and physical processes in the other process devices can proceed in a state where multiple different fluids are uniformly mixed. Regarding this embodiment, in order to ensure that the chemical reaction in the reaction device 30 proceeds uniformly, it is sufficient that at least one mixing device 20 and at least one reaction device 30 are arranged in series; the number of mixing devices 20 and the number of reaction devices 30 do not need to be multiple. Furthermore, in order to ensure that the chemical reaction proceeds uniformly, the polymer production system 100 may include a microfluidic device other than the mixing device 20 and the reaction device 30. For example, a reaction device having an inlet through which the monomer BC solution can be introduced into the reaction channel 6 may be provided.

[0168] Furthermore, in the polymer production system 100 disclosed according to the present embodiment, the mixing process and the chemical reaction process are performed in separate devices, and thus, by controlling the temperature for each device, it is possible to control the temperature of the fluid flowing through the microchannel separately for the mixing process and the chemical reaction process. In this embodiment, by heating the reaction device 30 with the heater 40 without heating the mixing device 20, the temperature of the fluid flowing through the microchannel can be changed for each device. Furthermore, because microfluidic devices have excellent temperature responsiveness, it is easy to control the temperature for each device. Therefore, the temperature of the fluid flowing through the microchannel can be quickly switched for each device.

[0169] From the above viewpoint, the inlet section 25 may introduce at least one of the multiple different fluids, the polymerization initiator A solution and the monomer BC solution, into the mixing flow path 2b so that the mixed liquid contains a reactant; for example, it may introduce only the monomer BC solution or only the polymerization initiator A solution into the mixing flow path 2b.

[0170] Furthermore, the polymer production system 100 according to this embodiment is equipped with a plurality of mixing devices 20 and reaction devices 30, and by introducing monomer B and monomer C into the production flow path F1 multiple times to carry out a polymerization reaction, the number of polymerization reaction processes carried out in the production flow path F1 can be increased, thereby increasing the production amount of polymer D, which is the reaction product.

[0171] Furthermore, in the polymer production system 100 according to this embodiment, a plurality of mixing devices 20 and a plurality of reaction devices 30 are arranged alternately and in series. As a result, the mixed solution supplied to each reaction device 30 is uniformly mixed by the adjacent mixing device 20 upstream of the reaction device 30. This allows the reaction in each reaction device 30 to proceed uniformly. Note that the term "alternately arranged" here means that the mixing devices 20 and the reaction devices 30 are arranged alternately in a line, and does not exclude the presence of another type of device between the mixing devices 20 and the reaction devices 30. For example, a device that performs extraction or other chemical, biological, or physical processes as a unit operation on the fluid flowing through the microchannel may be interposed between the mixing device 20 and the reaction device 30. Furthermore, in the polymer production system 100, it is not necessary to arrange a plurality of mixing devices 20 and a plurality of reaction devices 30 alternately. For example, the reaction devices 30 may be arranged consecutively in the flow direction. In this case, the reaction device 30 not adjacent to the mixing device 20 on the upstream side may be provided with an inlet capable of introducing the monomer BC solution into the reaction channel 6. The mixing devices 20 may also be arranged one after the other in the flow direction.

[0172] In the polymer production system 100 including multiple mixing devices 20, a polymerization initiator A solution and a monomer BC solution are continuously supplied (introduced) into the production flow path F1, which includes a mixing flow path 2b and a reaction flow path 6 connected in series with each other. Therefore, the flow rate of the fluid at any position in the production flow path F1 in the flow direction is the sum of the flow rates of all fluids introduced into the production flow path F1 upstream of that position. For example, the mixing device 20 of the device unit 10 located qth (q is an integer between 2 and N) from the upstream side among the multiple mixing devices 20 is designated as mixing device 20q. In this case, the total flow rate (total volume) of the fluid flowing through the mixing flow path 2b of mixing device 20q is approximately the sum of the flow rate (volume) of the fluid flowing through the mixing flow path 2b of the mixing device 201 located most upstream and the flow rate (volume) of the fluid additionally introduced by all mixing devices 20 from mixing device 201 to mixing device 20q. Therefore, the total flow rate of the fluid flowing through the production flow channel F1 increases from the upstream side to the downstream side as it passes through each mixing flow channel 2b. As a result, the more downstream a mixing device 20 is located among the multiple mixing devices 20, the greater the total flow rate of the fluid flowing through the mixing flow channel 2b. Therefore, from the perspective of more uniformly mixing the fluids in the flow channels and allowing the chemical reaction to proceed uniformly, it is preferable to make the residence time longer in the mixing flow channels 2b of mixing devices 20 located further downstream.

[0173] Furthermore, in the polymer production system 100 according to this embodiment, in which a monomer polymerization reaction is performed, multiple polymerization reaction processes are performed in the production flow path F1 by additionally charging the monomer in the mixing device 20. Therefore, the number of molecules of polymer D flowing through the production flow path F1 increases with each passage through each reaction flow path 6 from upstream to downstream. The more downstream the mixing device 20 is located, the higher the concentration of polymer D in the mixing flow path 2b. Therefore, depending on factors such as the polymer concentration, the viscosity of the fluid flowing through the mixing flow path 2b tends to increase and the diffusion coefficient tends to decrease. In other words, from the perspective of increasing the reliability of uniform mixing of the fluids within the flow path, it is preferable to make the residence time longer in the mixing flow path 2b of the mixing device 20 located further downstream. However, the diffusion coefficient is a factor that has a smaller impact on fluid mixing than the total flow rate of the fluid.

[0174] In contrast, in the polymer production system 100 according to the present embodiment, the flow path length L1 of the multiple mixing devices 20 is set such that the flow path length L1 of the mixing flow path 2b is longer for the mixing device 20 located further downstream. That is, the volume of each mixing flow path 2b of the multiple mixing devices 20 is set such that the volume of the mixing flow path 2b is larger for the mixing device 20 located further downstream. Because the residence time of a fluid in a flow path is proportional to the volume of the flow path, the residence time of the fluid in the mixing flow path 2b is longer for the mixing device 20 located further downstream. This ensures that the residence time required for uniform mixing of the fluids can be secured even in the mixing device 20 located further downstream. Therefore, the fluids can be uniformly mixed even in the mixing device 20 located further downstream, allowing the polymerization reaction in the reaction device 30 located further downstream to proceed uniformly. As a result, the polymer production system 100 according to the present embodiment allows the multiple mixing devices 20 to introduce and uniformly mix the monomers B and C, thereby increasing the production amount of polymer D while ensuring quality.

[0175] From the viewpoint of achieving uniform mixing in the multiple mixing devices 20, it is not essential that the volume of all mixing devices 20 be larger the more downstream the mixing device 20, but it is preferable that the volumes of at least two mixing devices 20 among the multiple mixing devices 20 are set so that the volume of the mixing flow channel 2b is larger in the mixing device 20 located more downstream. For example, the volume of any one mixing device 20 among the multiple mixing devices 20 may be equal to or smaller than the volume of any one mixing device 20 located upstream of that mixing device 20. However, from the viewpoint of achieving uniform mixing in the multiple mixing devices 20, it is more preferable that the volume of all mixing devices 20 be set so that the more downstream the mixing device 20 is, the larger the volume is.

[0176] Furthermore, for any mixing device 20 among the multiple mixing devices 20, the flow path length [m] of the mixing flow path 2b is defined as L1, and the total flow rate [m ３ / s] is u, and the diffusion coefficient [m ２ From the above viewpoint, it is preferable that the flow path length L1 of the mixing flow path 2b is set so that L1≧u / 2D, where D is the flow path length L1 / s.

[0177] In this embodiment, the sequential addition of monomer solutions from the multiple mixing devices 20 increases the flow rate toward the downstream mixing channel 2b. However, the technology disclosed herein is not limited to this configuration, and the flow rate does not necessarily need to increase. For example, the flow rate decreases when a device performing phase separation, such as extraction, is interposed between the mixing device and the reaction device as a unit operation. Furthermore, the difficulty of achieving uniform mixing in the mixing channel of a mixing device varies depending on various conditions, such as the flow rate, the chemical, biological, or physical processes performed in other devices, and the properties and amounts of the reactants. Therefore, in order to achieve uniform mixing in multiple mixing devices, the technology disclosed herein does not require all mixing channels in multiple mixing devices to have the same volume, but may instead have the channel length of the mixing channel in at least one mixing device different from the volume of the mixing channel in the other mixing devices. This allows the residence time in the mixing channel to be set according to the mixing conditions performed in the mixing channel. Furthermore, adjusting the residence time for each of the multiple mixing channels can improve the quality of the reaction product. In the polymer production system 100 according to this embodiment, the volume of the mixing channel 2b in at least one of the multiple mixing devices 20 is made different from the volume of the mixing channel 2b in the other mixing devices 20 in response to the fact that the flow rate increases toward the downstream side of the mixing channel 2b. Note that, in the technology according to the present disclosure, the volumes of the mixing channels in at least two of the multiple mixing devices may be equal. Furthermore, in the technology according to the present disclosure, the volume of the mixing channel may be set smaller in the mixing device located further downstream, depending on various conditions such as the type of chemical, biological, or physical process and the properties of the reactants.

[0178] Furthermore, in this embodiment, the cross-sectional areas of the mixing channels 2b are made equal in two or more mixing devices 20 while the channel lengths L1 are made different to make the volumes of the mixing channels 2b different, but the technology according to the present disclosure is not limited to this. When making the volumes of the mixing channels in two or more mixing devices different, it is not necessary to make the channel lengths different. In the technology according to the present disclosure, the volumes of the mixing channels may be made different by making the cross-sectional areas different while the channel lengths of the mixing channels in two or more mixing devices are made equal, or by making both the cross-sectional areas and the channel lengths different to make the volumes of the mixing channels different.

[0179] Furthermore, the polymer production system 100 according to this embodiment is provided with a heater 40 as a reaction promoting means, thereby making it possible to promote the polymerization reaction between the monomer B and the monomer C in the reaction channel 6 .

[0180] In the above-described embodiment, the polymerization initiator A solution and the monomer B and C solutions are mixed as the plurality of different fluids, but the plurality of different fluids may include only a fluid containing a polymerization initiator and a fluid containing one type of monomer. A fluid containing one type of monomer may be introduced into the mixing flow path 2b of the mixing device 20 from the inlet 25, and the one type of monomer may be polymerized in the presence of a polymerization initiator in the reaction flow path 6 of the reaction device 30.

[0181] Although the present embodiment described above involves a polymerization reaction between monomer B and monomer C introduced into a mixing device, the technology according to the present disclosure is not limited to a reaction between reactants contained in different fluids (such as polymerization between monomers). For example, the technology according to the present disclosure may involve mixing a fluid containing a reactant and a fluid containing a decomposition catalyst as multiple different fluids in a mixing device, and then carrying out a decomposition reaction of the reactants in a reaction device.

[0182] Furthermore, in the above-described embodiment, a chip-type microfluidic device is used as the microfluidic device, but a tube-type microfluidic device or other types of microfluidic device may also be used. For example, the reaction device 30 may be configured as a tube-type microfluidic device.

[0183] The present disclosure will be specifically described below with reference to examples, but the present disclosure is not limited to the aspects of the following examples.

[0184] The weight-average molecular weight Mw and number-average molecular weight Mn of the polymers obtained in the following Examples and Comparative Examples were measured as follows. The polydispersity index Mw / Mn of the obtained polymers was calculated from the measured weight-average molecular weight Mw and number-average molecular weight Mn.

[0185] [Method for measuring weight average molecular weight Mw and number average molecular weight Mn] The weight average molecular weight Mw and number average molecular weight Mn of the polymer were measured by gel permeation chromatography (GPC) under the following conditions.

[0186] Apparatus: GPC system (Shimadzu Corporation) System controller: SIL-20A (Shimadzu Corporation) Pump: LC-20AD (Shimadzu Corporation) Degasser: DGU-20A3R (Shimadzu Corporation) Column oven: CTO-20AC (Shimadzu Corporation) RI detector: RID-20A (Shimadzu Corporation) Column: GPC KF-806L (column size: 8.0 mm (ID) × 300 mm (L), manufactured by Resonac Corporation) × 3 Guard column: KF-G (column size: 4.6 mm (ID) × 10 mm (L), manufactured by Resonac Corporation) Column temperature: 40°C Cell temperature: 40°C Eluent: tetrahydrofuran Eluent flow rate: 0.8 mL / min Injection volume: 35 μL Analysis time: 60 minutes Sample: 5 wt% tetrahydrofuran solution Sample for creating calibration curve: Polystyrene calibration kit S-M-10 (manufactured by Agilent Technologies, Inc.)

[0187] Example 1 Polymers were produced by radical polymerization of monomers using a polymer production system 100 (N=5) shown in Figure 1. The flow path designs of the mixing devices 201 to 205 and reaction devices 301 to 305 in the polymer production system 100 are shown in Table 1. The liquid feed pumps 60a and 60b of the polymer production system 100 were syringe pumps, and the conduits 80a to 80e were polyether ether ketone tubes (inner diameter 260 µm).

[0188] Specific operation, mixing conditions, and reaction conditions are as follows. The following fluids were stored in raw material tanks 50a and 50b of the polymer production system 100, and each fluid was introduced into the mixing devices 201 to 205 and the reaction devices 301 to 305 at the flow rates shown in Table 2. The temperature during mixing in the mixing devices 201 to 205 was room temperature (25°C). In addition, in the reaction devices 301 to 305, the reaction channel 6 was heated by the heater 40 so that the reaction temperature became 95°C. Table 2 also shows the diffusion coefficient D of methyl methacrylate (MMA, 25°C) in the mixed fluids prepared in each of the mixing devices 201 to 205. The diffusion coefficient D was calculated according to the Stokes-Einstein equation with reference to measurements by 1H-NMR and literature values.

[0189] Liquid 1a (fluid contained in raw material tank 50a) supplied to mixing device 201: A liquid (liquid 1a, solvent concentration: 80.0% by mass) obtained by dissolving dimethyl 2,2′-azobis(2-methylpropionate) (V-601; manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.; polymerization initiator) in propylene glycol monomethyl ether acetate (MMPGAC; manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.; boiling point: 145° C., melting point: less than −10° C., specific gravity: 0.97; solvent) so that the concentration of the polymerization initiator was 20.0% by mass.

[0190] Liquid 1b (fluid contained in raw material tank 50b) supplied to mixing device 201: A liquid (liquid 1b, solvent concentration: 66.0% by mass) obtained by dissolving methyl methacrylate (MMA; manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.; boiling point 101°C, melting point -48°C, specific gravity 0.94) so ​​that the concentration of methyl methacrylate was 17.0% by mass, and phenyl methacrylate (PhMA; manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.; boiling point 198°C, melting point -17°C, specific gravity 1.06) so that the concentration of phenyl methacrylate was 10.2% by mass, in propylene glycol monomethyl ether acetate (similar to MMPGAC described above).

[0191] Liquid 1c (fluid contained in raw material tank 50b) supplied to mixing devices 202 to 205: A liquid (liquid 1c, solvent concentration: 71.0% by mass) obtained by dissolving methyl methacrylate (MMA; manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.; boiling point 101°C, melting point -48°C, specific gravity 0.94) so ​​that the concentration of methyl methacrylate was 12.0% by mass, and phenyl methacrylate (PhMA; manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.; boiling point 198°C, melting point -17°C, specific gravity 1.06) so that the concentration of phenyl methacrylate was 17.0% by mass, in propylene glycol monomethyl ether acetate (similar to MMPGAC described above).

[0192] The weight average molecular weight Mw, number average molecular weight Mn, and polydispersity index Mw / Mn of the polymer stored in the product tank 70 from the reaction device 305 through the conduit 80e were determined by the above-described methods. The monomer conversion rate of the resulting polymer was also calculated. The results are shown in Table 7.

[0193] Example 2 A polymer was produced in the same manner as in Example 1, except that the reaction temperature was changed to 90°C. The weight average molecular weight Mw, number average molecular weight Mn, and polydispersity index Mw / Mn of the obtained polymer were determined by the methods described above. The monomer conversion rate of the obtained polymer was also calculated. The results are shown in Table 7.

[0194] Comparative Example 1 A polymer was produced by a radical polymerization reaction of a monomer using a polymer production system 200 shown in FIG. 4 . The polymer production system 200 does not have the mixing device of the polymer production system used in Example 1, but instead has four reaction devices 30A (30A1 to 30A4) arranged in series and connected by a conduit 80c. Each of the reaction devices 30A1 to 30A4 is provided with a supply port 61 for introducing a monomer solution into the reaction flow channel 6. The flow channel design of the reaction devices 30A1 to 30A4 in the polymer production system 200 is shown in Table 3. The liquid feed pumps 60a and 60b of the polymer production system 200 are syringe pumps, and the conduits 80a to 80d are polyether ether ketone tubes (inner diameter 260 μm).

[0195] The specific operation and reaction conditions are as follows. The following initiator solution and monomer solution were stored in raw material tanks 50a and 50b of the polymer production system 200. The initiator solution and monomer solution were introduced from these raw material tanks into each of the reaction devices 30A1 to 30A4 at the flow rates shown in Table 4, and a chemical reaction was carried out. At this time, in the reaction devices 301 to 30A4, the reaction flow path 6 was heated by the heater 40 so that the reaction temperature was 75°C.

[0196] Liquid 2a (fluid accommodated in raw material tank 50a) to be supplied to reaction device 30A1: A liquid (liquid 2a, solvent concentration: 58.0 mass%) obtained by dissolving dimethyl 2,2'-azobis(2-methylpropionate) (V-601; manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.; polymerization initiator) in propylene glycol monomethyl ether acetate (MMPGAC; manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.; boiling point 145°C, melting point less than -10°C, specific gravity 0.97; solvent) so that the concentration of the polymerization initiator was 42.0 mass%. Liquid 2b (fluid accommodated in raw material tank 50b) to be supplied to reaction device 30A1: A liquid (liquid 2a, solvent concentration: 58.0 mass%) obtained by dissolving dimethyl 2,2'-azobis(2-methylpropionate) (V-601; manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.; polymerization initiator) in propylene glycol monomethyl ether acetate (MMPGAC; manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.; boiling point 145°C, melting point less than -10°C, specific gravity 0.97; solvent) so that the concentration of the polymerization initiator was 42.0 mass%. a liquid (liquid 2b, solvent concentration: 80.0 mass%) obtained by dissolving methyl methacrylate (MMA; manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.; boiling point 101°C, melting point -48°C, specific gravity 0.94) so ​​that the concentration of methyl methacrylate was 9.8 mass% and phenyl methacrylate (PhMA; manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.; boiling point 198°C, melting point -17°C, specific gravity 1.06) so that the concentration of phenyl methacrylate was 10.2 mass% in propylene glycol monomethyl ether acetate (similar to the above-mentioned MMPGAC); and a liquid 2c (fluid contained in raw material tank 50b) to be supplied to reaction devices 30A2 to 30A4. A liquid (liquid 2c, solvent concentration: 85.00 mass%) was prepared by dissolving phenyl methacrylate (PhMA; manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.; boiling point: 198°C, melting point: -17°C, specific gravity: 1.06) in propylene glycol monomethyl ether acetate (similar to MMPGAC described above) so that the concentration of phenyl methacrylate was 15.0 mass%.

[0197] The weight average molecular weight Mw, number average molecular weight Mn, and polydispersity index Mw / Mn of the polymer stored in the product tank 70 from the reaction device 30A4 through the conduit 80d were determined by the above-described methods. The monomer conversion rate of the resulting polymer was also calculated. The results are shown in Table 7.

[0198] [Reference Example 1] A polymer was produced by a radical polymerization reaction of a monomer using the same polymer production system as in Comparative Example 1, except that the number of reaction devices was 1 and the inner diameter of the polyether ether ketone tube serving as a conduit was 500 μm. The flow path design of the reaction device in the polymer production system is shown in Table 5.

[0199] The specific operation and reaction conditions are as follows: The following initiator solution and monomer solution were placed in the raw material tank of the polymer production system. The initiator solution and monomer solution were introduced from these raw material tanks into the reaction device at the flow rates shown in Table 6, and a chemical reaction was carried out. At this time, the reaction flow path in the reaction device was heated with a heater so that the reaction temperature was about 95±1°C.

[0200] Liquid 4a (fluid contained in raw material tank) to be supplied to the reaction device: A liquid (liquid 4a, solvent concentration: 70.0 mass%) obtained by dissolving dimethyl 2,2'-azobis(2-methylpropionate) (V-601; manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.; polymerization initiator) in propylene glycol monomethyl ether acetate (MMPGAC; manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.; boiling point: 145°C, melting point: less than -10°C, specific gravity: 0.97; solvent) so that the concentration of the polymerization initiator was 30.0 mass%. Liquid 4b (fluid contained in raw material tank) to be supplied to the reaction device: A liquid (liquid 4b, solvent concentration: 71.4% by mass) was prepared by dissolving methyl methacrylate (MMA; manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.; boiling point: 101°C, melting point: -48°C, specific gravity: 0.94) so ​​that the concentration of methyl methacrylate was 12.0% by mass, and phenyl methacrylate (PhMA; manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.; boiling point: 198°C, melting point: -17°C, specific gravity: 1.06) so that the concentration of phenyl methacrylate was 16.6% by mass in propylene glycol monomethyl ether acetate (similar to the above-mentioned MMPGAC).

[0201] The weight average molecular weight Mw, number average molecular weight Mn, and polydispersity Mw / Mn of the polymer stored in the product tank from the reaction device through the conduit were determined by the above-mentioned methods. The monomer conversion rate of the resulting polymer was also calculated. The results are shown in Table 7.

[0202]

[0203]

[0204]

[0205]

[0206]

[0207]

[0208]

[0209] [Modification] A polymer production system 100A according to a modification of the present embodiment will be described below. In the following description of the modification, differences from the polymer production system 100 described using Figures 1 to 3 will be mainly described, and detailed description of similarities with the polymer production system 100 will be omitted.

[0210] 5 is a configuration diagram of a polymer production system 100A according to a modified example of this embodiment. As shown in FIG. 5, the polymer production system 100A according to the modified example has a two-story hierarchical structure, and differs from the above-described polymer production system 100 in that the mixing device 20 and the reaction device 30 are arranged side by side in the up-down direction (vertical direction) in the device unit 10. Furthermore, the polymer production system 100A according to the modified example differs from the above-described polymer production system 100 in that it includes a partition member 90 arranged between the mixing device 20 and the reaction device 30.

[0211] 5, the direction parallel to the surface on which the microfluidic device extends (i.e., the upper and lower surfaces of the substrate of the microfluidic device) is defined as the X direction, and the direction perpendicular to the surface on which the microfluidic device extends is defined as the Y direction. The Y direction is the direction perpendicular to the substrate of the microfluidic device. The X direction and the Y direction are perpendicular to each other. Each microfluidic device in the modified polymer production system 100A is arranged so that the X direction coincides with the horizontal direction and the Y direction coincides with the vertical direction. However, the present disclosure is not limited to this.

[0212] As shown in FIG. 5 , in the modified example, similar to the polymer production system 100 of FIG. 1 , a plurality of mixing devices 20 and a plurality of reaction devices 30 are arranged alternately and in series so that adjacent mixing devices 20 and reaction devices 30 in the flow direction can communicate with each other. A heater 40 is provided in each reaction device 30. In the modified example, in a device unit 10 which is a combination of a pair of mixing devices 20 and reaction devices 30 adjacent to each other in the flow direction, the mixing devices 20 and reaction devices 30 are arranged side by side in the Y direction. More specifically, in the device unit 10, the mixing devices 20 and the reaction devices 30 are arranged at different positions in the Y direction but at the same position in the X direction. In other words, in the device unit 10, the mixing devices 20 and the reaction devices 30 are arranged opposite each other with a gap in the Y direction. In the modified example, a plurality of device units 10 are arranged side by side in the X direction. Therefore, in the polymer production system 100A according to the modified example, the mixing device 20 and the reaction device 30 adjacent to each other in the flow direction are arranged at different positions in the Y direction.

[0213] In the polymer production system 100A according to the modified example, the microfluidic devices may be arranged, for example, in a two-tiered rack having an upper tier and a lower tier. In the modified example, the mixing device 20 is arranged in the upper tier and the reaction device 30 is arranged in the lower tier. However, the present disclosure is not limited to this, and the mixing device 20 may be arranged in the lower tier and the reaction device 30 may be arranged in the upper tier. Furthermore, the conduits 80c, 80d connecting the microfluidic devices may be connected, for example, perpendicular to the side surfaces of the substrates of the microfluidic devices. This allows the lengths of the conduits 80c, 80d to be shorter than when the upper or lower surfaces of the substrates of the microfluidic devices are connected by the conduits 80c, 80d.

[0214] 5, a heat-insulating partition member 90 is disposed between the mixing device 20 and the reaction device 30 in the device unit 10. The partition member 90 is formed in a plate shape and is disposed in a direction perpendicular to the Y direction. In other words, the partition member 90 is disposed in a direction parallel to the microfluidic device. The partition member 90 is formed from a heat-insulating material. The material of the partition member 90 is not particularly limited, but a material with excellent heat-insulating properties, such as a resin material, can be used.

[0215] As described above, in the polymer production system 100A according to the modified example, the mixing device 20 and the reaction device 30 adjacent to each other in the flow direction are arranged side by side in the Y direction, so that heat from the heater 40 attached to the reaction device 30 is less likely to be transmitted to the mixing device 20. This reduces the effect of heating by the heater 40 on the mixing device 20, allowing for more uniform mixing in the mixing device 20. Furthermore, the polymer production system 100A according to the modified example includes a heat-insulating partition member 90 arranged between the mixing device 20 and the reaction device 30, so that the effect of heat on the mixing device 20 can be further reduced.

[0216] The embodiment according to the modified example is not limited to the reaction device 30, but can also be applied to cases where other process devices other than the reaction device 30 are used. Even in such cases, the influence of a reaction promoting means, such as a heater, attached to the other process device on the mixing device can be suppressed, thereby enabling more uniform mixing in the mixing device 20. Furthermore, the present disclosure does not require all mixing devices and other process devices adjacent to each other in the flow direction to be arranged side by side in the Y direction. In at least one combination of a mixing device and other process device adjacent to each other in the flow direction, it is sufficient that the mixing device and other process device are arranged side by side in a direction perpendicular to the extending plane of the microfluidic device.

[0217] 2b Mixing channel 10 Mixing device 40 Heater (an example of a reaction promoting means) 100 Polymer production system

Claims

1. A microfluidic system including a plurality of chip-type microfluidic devices each having a microchannel formed therein, comprising: one or more mixing devices, the microfluidic device having a mixing channel for mixing a plurality of different fluids and an introduction part for introducing at least one of the plurality of different fluids into the mixing channel; and one or more other process devices, the microfluidic device in which a chemical, biological or physical process other than the mixing process is performed within the microchannel on the mixed fluid of the plurality of different fluids mixed in the mixing channel.

2. The microfluidic system according to claim 1, wherein the chemical / bio / physical process carried out in the other process device is at least one of a chemical reaction, extraction, distillation, concentration, solid-phase extraction, particle separation / classification, crystallization, and cell culture.

3. The microfluidic system of claim 1, wherein the other process device is a reaction device in which a chemical reaction takes place, and has a reaction flow path that advances a chemical reaction of reactants contained in the mixed fluid of the plurality of different fluids mixed in the mixing flow path, and the one or more mixing devices and the one or more reaction devices are arranged in series so that the mixing flow path and the reaction flow path are connected to each other.

4. The microfluidic system according to claim 3, comprising a plurality of said mixing devices and a plurality of said reaction devices, said plurality of mixing devices and said plurality of reaction devices being arranged alternately and in series.

5. A microfluidic system as described in claim 3 or 4, wherein the plurality of different fluids include at least a fluid containing a polymerization initiator and a fluid containing one or more types of monomers, the fluid containing the one or more types of monomers is introduced into the mixing flow path of the mixing device from the inlet portion, and the one or more types of monomers are polymerized in the presence of the polymerization initiator in the reaction flow path of the reaction device.

6. The microfluidic system according to claim 3 or 4, further comprising a reaction promotion means for promoting a chemical reaction of reactants contained in the mixed fluid in the reaction channel.

7. The microfluidic system according to claim 6, wherein the reaction promotion means includes at least one of heating means, light irradiation means, vibration energy imparting means, and voltage application means.

8. The microfluidic system according to claim 3 or 4, wherein the width of the mixing channel and the width of the reaction channel are 1000 μm or less.

9. A microfluidic system according to any one of claims 1 to 4, wherein the one or more mixing devices and the one or more other process devices are arranged in series, and in at least one combination of the mixing device and the other process device adjacent to each other in the flow direction, the mixing device and the other process device are arranged side by side in a direction perpendicular to the extending surface of the microfluidic device.

10. The microfluidic system according to claim 9, further comprising a partition member having thermal insulation, disposed between said mixing device and said other process device in said at least one combination of said mixing device and said other process device.

11. A processing method using a microfluidic system including a plurality of chip-type microfluidic devices formed with microchannels, the microfluidic system comprising: one or more mixing devices which are microfluidic devices having a mixing channel for mixing a plurality of different fluids and an introduction part for introducing at least one of the plurality of different fluids into the mixing channel; and one or more other process devices which are microfluidic devices in which a chemical, biological or physical process other than the mixing process is performed within the microchannel on the mixed fluid of the plurality of different fluids mixed in the mixing channel.

12. The processing method according to claim 11, wherein the chemical / bio / physical process carried out in the other process device is at least one of a chemical reaction, extraction, distillation, concentration, solid-phase extraction, particle separation / classification, crystallization, and cell culture.

13. The processing method according to claim 11, wherein the other process device is a reaction device in which a chemical reaction takes place, and has a reaction flow path that advances a chemical reaction of reactants contained in the mixed fluid of the plurality of different fluids mixed in the mixing flow path, and the one or more mixing devices and the one or more reaction devices are arranged in series so that the mixing flow path and the reaction flow path are connected.

14. The processing method according to claim 13, wherein the microfluidic system comprises a plurality of the mixing devices and a plurality of the reaction devices, the plurality of mixing devices and the plurality of the reaction devices being arranged alternately and in series.

15. The processing method described in claim 13 or 14, wherein the plurality of different fluids include at least a fluid containing a polymerization initiator and a fluid containing one or more types of monomers, the fluid containing the one or more types of monomers is introduced into the mixing flow path of the mixing device from the inlet portion, and the one or more types of monomers are polymerized in the presence of the polymerization initiator in the reaction flow path of the reaction device.

16. The processing method according to claim 13 or 14, wherein the microfluidic system further comprises a reaction promotion means for promoting a chemical reaction of reactants contained in the mixed fluid in the reaction channel.

17. The processing method according to claim 16, wherein the reaction promotion means includes at least one of heating means, light irradiation means, vibration energy imparting means, and voltage application means.

18. A processing method according to any one of claims 11 to 14, wherein the one or more mixing devices and the one or more other process devices are arranged in series, and in at least one combination of the mixing device and the other process device adjacent to each other in the flow direction, the mixing device and the other process device are arranged side by side in a direction perpendicular to the extending surface of the microfluidic device.

19. The processing method according to claim 18, further comprising disposing a partition member having thermal insulation between the mixing device and the other process device in the at least one combination of the mixing device and the other process device.

20. A method for producing a polymer using a microfluidic system including a plurality of chip-type microfluidic devices formed with a microchannel, the microfluidic system comprising: a plurality of mixing devices, the microfluidic device having a mixing channel for mixing a plurality of different fluids including at least a fluid containing a polymerization initiator and a fluid containing one or more types of monomers, and an inlet part for introducing at least the one or more monomers of the plurality of different fluids into the mixing channel; and one or more reaction devices, the microfluidic device having a reaction channel for progressing a polymerization reaction of the one or more monomers in the presence of the polymerization initiator by the plurality of different fluids mixed in the mixing channel, the plurality of mixing devices and the one or more reaction devices being arranged in series so that the mixing channel and the reaction channel are connected.