Side track buffer apparatus and semiconductor process device comprising the same

Abstract

The invention relates to a side rail buffer device and a semiconductor process device having therein provided at the periphery of the OHT traveling track, comprising: a frame portion, disposed on the periphery of the OHT traveling track; Accordingly, the invention is to configure the frame portion, the platform portion of the disassembly wafer box and the transfer station portion of the clamped wafer box at the periphery of the OHT traveling track, and then individually purge multiple wafer boxes around the periphery of the OHT traveling track, thereby providing an effect that can improve the production performance and process performance of the semiconductor process device.

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