Gas cooling apparatus and heat furnace

Abstract

The present application discloses a gas cooling apparatus and a heat furnace. The gas cooling apparatus comprises a pipeline structure. The pipeline structure defines a gas flow channel and a liquid channel; the gas flow channel is used for circulating a high-temperature gas; and the liquid channel is located outside the gas flow channel and is provided with a liquid spraying part communicated with the gas flow channel. The pipeline structure is further provided with a gas spraying part communicated with the gas flow channel; and a liquid sprayed from the liquid spraying part can be atomized under the action of the high-temperature gas in the gas flow channel and the high-pressure gas sprayed from the gas spraying part. The gas cooling apparatus has the advantages of simple structure, convenient use, rapid cooling rate for a high-temperature gas, and less use of a cooling liquid.

Description

Gas cooling device and hot furnace

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on June 16, 2023, with application number 202321541270.4 and invention name “Gas Cooling Device”, the entire contents of which are incorporated herein by reference.

[0002] This application claims priority to the Chinese patent application filed with the China Patent Office on June 16, 2023, with application number 202310716600.7 and invention name “A Heat Dissipation Device”, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present application relates to the field of semiconductor processing technology, and in particular to a gas cooling device and a heat furnace. Background Art

[0004] The equipment used in processes such as photovoltaic deposition or diffusion is a hot furnace. During operation, the temperature inside the hot furnace can reach thousands of degrees Celsius. The gas exhausted from the hot furnace needs to be cooled before it can be discharged. The existing exhaust cooling structure usually wraps a cold water pipe around the exhaust pipe to achieve exhaust cooling. However, this cooling method is inefficient, and the cold water pipe is very easily damaged by the exhaust pipe, requiring regular inspection and replacement, making the maintenance operation of the exhaust cooling structure very complicated and inconvenient to use.

[0005] Therefore, there is an urgent need for a gas cooling device that can achieve rapid temperature reduction and is easy to use.

[0006] Summary of the Invention

[0007] The first purpose of the present application is to provide a gas cooling device and a hot furnace. The gas cooling device has a simple structure, is easy to use, has a fast cooling rate for high-temperature gas, and uses less cooling liquid.

[0008] To achieve the above technical effects, the technical solutions of this application are as follows:

[0009] The present application discloses a gas cooling device, including a pipeline structure, which defines an air flow channel and a liquid channel. The air flow channel is used to circulate high-temperature gas. The liquid channel is located outside the air flow channel and has a liquid spray portion connected to the air flow channel. The pipeline structure also has an air jet portion connected to the air flow channel. The liquid sprayed by the liquid spray portion can be vaporized under the action of the high-temperature gas in the air flow channel and the high-pressure gas sprayed by the air jet portion.

[0010] In some specific embodiments, the gas channel includes a high-temperature zone, which is located at one end of the gas channel close to the direction of high-temperature gas inflow; the liquid channel includes a cooling channel and a liquid storage cavity, the cooling channel has a liquid inlet, the liquid inlet is connected to an external liquid source, and the cooling channel is located outside the high-temperature zone; the liquid storage cavity has a connecting port and a liquid spraying portion, the connecting port is connected to the cooling channel, and the flow area of ​​the connecting port is smaller than the flow area of ​​the cooling channel and the liquid storage cavity.

[0011] In some specific embodiments, the gas cooling device further includes a liquid inlet pipe, one end of which is connected to the pipeline structure and communicates with the liquid inlet, and the other end of which is connected to an external liquid source.

[0012] In some specific embodiments, the gas cooling device further includes a flow guide pipe, which is located in the cooling channel and is used to allow the liquid in the cooling channel to substantially fill the cooling channel before flowing into the liquid storage cavity.

[0013] In some specific embodiments, the inlet of the guide tube is connected to the cooling channel, the inlet of the guide tube is located at the air inlet end of the air flow channel, and the outlet of the guide tube is connected to the liquid storage cavity, so that the liquid in the cooling channel flows into the liquid storage cavity along the guide tube.

[0014] In some specific embodiments, the guide tube includes a first tube segment and a second tube segment, the first tube segment is connected to the liquid channel, the second tube segment is connected to the liquid storage chamber, and the position where the first tube segment and the second tube segment are connected is higher than the air inlet end of the air flow channel.

[0015] In some specific embodiments, the guide tube is a bent tube, the inlet of the bent tube is connected to the liquid channel, the outlet of the bent tube is connected to the liquid storage chamber, and the bending part of the bent tube is higher than the air inlet end of the air flow channel.

[0016] In some specific embodiments, there are multiple liquid spraying parts, and the multiple liquid spraying parts are distributed at intervals along the circumference of the air flow channel.

[0017] In some specific embodiments, the air-jet portion is arranged obliquely, and an extension direction of the liquid-jet portion intersects with an extension direction of the air-jet portion.

[0018] In some specific embodiments, the pipeline structure further defines an air storage cavity, which can be connected to an external air source, and the air injection portion is in communication with the air storage cavity.

[0019] In some specific embodiments, along the gas flow direction in the air flow channel, the flow area of ​​the air storage cavity gradually decreases, and the air injection portion is provided on an inclined side wall of the air storage cavity facing the air flow channel.

[0020] In some specific embodiments, the gas cooling device further includes an air inlet pipe, one end of which is connected to the air storage chamber, and the other end of which is connected to an external high-pressure air source.

[0021] In some specific embodiments, there are multiple air-jet portions, and the multiple air-jet portions are distributed at intervals along the circumference of the air flow channel.

[0022] In some specific embodiments, the air flow channel includes a high temperature zone, an atomization zone and a vaporization zone arranged in sequence along the air flow direction, part of the liquid channel is located outside the high temperature zone, and the air injection part and the liquid injection part are both connected to the atomization zone.

[0023] The present application discloses a gas cooling device, including a pipeline structure, which defines an air flow channel and a liquid channel. The air flow channel is used to circulate high-temperature gas. The liquid channel is located outside the air flow channel and has a liquid spray portion connected to the air flow channel. The liquid spray portion is used to spray liquid toward the air flow channel.

[0024] In some specific embodiments, the air flow channel has an air inlet end and an air outlet end, the air inlet end is used to introduce high-temperature gas, and the liquid channel has a liquid inlet; the liquid channel also includes a connecting pipe, the outlet of the connecting pipe is arranged at the air outlet end, the inlet of the connecting pipe is connected to the liquid channel, and the outlet of the connecting pipe is connected to the air flow channel to spray liquid toward the air flow channel; wherein, the liquid spraying part is arranged at the outlet of the connecting pipe, and the outlet of the connecting pipe sprays liquid toward the air flow channel through the liquid spraying part.

[0025] In some specific embodiments, the air flow channel is arranged at an angle, and the air inlet end is higher than the air outlet end.

[0026] In some specific embodiments, the connecting tube includes a first tube body and a second tube body, the first tube body is connected to the liquid channel, the second tube body is connected to the air flow channel, and the position where the first tube body and the second tube body are connected is higher than the air inlet end of the air flow channel.

[0027] In some specific embodiments, the connecting tube further includes a third tube body, both ends of the third tube body are respectively connected to the first tube body and the second tube body, and the third tube body is higher than the air inlet end of the air flow channel.

[0028] In some specific embodiments, the connecting tube is a bent tube, the inlet of the bent tube is connected to the liquid channel, the outlet of the bent tube is connected to the air flow channel, and the bend of the bent tube is higher than the air inlet end of the air flow channel.

[0029] In some specific embodiments, the gas cooling device further includes a fan, which is disposed in the pipeline structure to drive the gas in the air flow channel to forcedly flow.

[0030] In some specific embodiments, the gas cooling device further includes an exhaust pipe, one end of which is connected to the air outlet end of the air flow channel, and the other end is used to install a fan, and the end of the exhaust pipe where the fan is installed is lower than the end connected to the air outlet end.

[0031] In some specific embodiments, the gas cooling device further includes an exhaust pipe connected to a side of the fan facing away from the exhaust pipe.

[0032] The present application discloses a heat furnace, comprising a furnace body and the above-mentioned gas cooling device, wherein the furnace body has an exhaust pipe; the gas cooling device is used for cooling the gas released from the furnace body through the exhaust pipe.

[0033] The gas cooling device of the present application has the following beneficial effects: Compared with the prior art solution of winding a cold water pipe around the exhaust pipe, the piping structure of the high-temperature gas cooling device of the present application is connected to the air outlet of the exhaust pipe, which is convenient to use, not easily damaged by the exhaust pipe, and has a long service life. During operation, after the high-temperature gas enters the air flow channel, the liquid channel is provided outside the air flow channel, so that the liquid channel can cool the high-temperature gas. The liquid in the liquid channel can also be sprayed from the liquid spray portion into the air flow channel. The sprayed liquid is sequentially vaporized under the combined action of the high-pressure gas and the high-temperature gas sprayed by the spray portion. The liquid vaporization can remove a large amount of heat. Since the gas cooling device can remove a large amount of heat through liquid cooling and liquid vaporization, it can achieve rapid cooling of the high-temperature gas, thereby improving the cooling rate and cooling efficiency. Since the spray portion can spray high-pressure gas toward the air flow channel, the liquid sprayed into the air flow channel is atomized, and the sprayed liquid can be fully utilized to cool the high-temperature gas, reducing the amount of sprayed liquid. Since the liquid channel is provided outside the air flow channel, the structural material of the entire pipeline can be made of conventional materials, without the need for special high-temperature resistant materials, thereby reducing the manufacturing cost of the gas cooling device.

[0034] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become obvious from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] FIG1 is a schematic cross-sectional view of a gas cooling device according to an embodiment of the present application;

[0036] Figure 2 is a partial enlarged view of point II in Figure 1;

[0037] FIG3 is a schematic structural diagram of a gas cooling device according to an embodiment of the present application;

[0038] FIG4 is a schematic diagram of a partial cross-sectional structure of a gas cooling device in one embodiment of the present application;

[0039] FIG5 is a schematic diagram of the internal structure of a gas cooling device according to an embodiment of the present application;

[0040] FIG6 is a schematic diagram of the three-dimensional structure of a gas cooling device in one embodiment of the present application;

[0041] FIG7 is a schematic cross-sectional view of the gas cooling device shown in FIG6 ;

[0042] FIG8 is a schematic diagram of a partial cross-sectional structure of the gas cooling device shown in FIG6;

[0043] FIG9 is a structural block diagram of a heat furnace in one embodiment of the present application.

[0044] The accompanying drawings in the specification are numeraled as follows: 1. hot furnace; 100. gas cooling device; 200. furnace body; 10. piping structure; 11. air flow channel; 111. high temperature zone; 112. atomizing zone; 1121. tapered section; 1122. straight section; 113. vaporizing zone; 114. air inlet; 115. air outlet; 12. liquid channel; 121. cooling channel; 1211. liquid inlet; 1212. first section; 1213. second section; 122. liquid storage chamber; 1221. connecting port; 13. liquid spraying portion; 14. air spraying portion; 15. air storage chamber; 20. liquid inlet pipe; 30. flow guide pipe; 31. first pipe section; 32. second pipe section; 33. inlet; 40. air inlet pipe; 50. connecting pipe; 51. first pipe body; 52. second pipe body; 53. third pipe body; 60. Fan; 70. Suction pipe; 80. Exhaust pipe. DETAILED DESCRIPTION

[0045] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0046] The present application discloses a gas cooling device 100, as shown in Figures 1, 2 and 9, the gas cooling device 100 includes a pipeline structure 10, the pipeline structure 10 defines an air flow channel 11 and a liquid channel 12, the air flow channel 11 is used to circulate high-temperature gas, the liquid channel 12 is located outside the air flow channel 11, and has a liquid spray portion 13 connected to the air flow channel 11, the pipeline structure 10 also has an air jet portion 14 connected to the air flow channel 11, the liquid sprayed by the liquid spray portion 13 can be vaporized under the action of the high-temperature gas in the air flow channel 11 and the high-pressure gas sprayed by the air jet portion 14.

[0047] First of all, it should be noted that, taking water as an example, the specific heat capacity of water is .J(g·℃), and the latent heat of vaporization at ℃ is .kJ / kg. Therefore, during the vaporization phase change, the heat energy absorbed is much greater than that of the conventional water cooling solution.

[0048] It can be understood that the "high temperature" and "high pressure" in the "high temperature gas" and "high pressure gas" described in the embodiments of the present application have the meanings commonly understood by those skilled in the art, and do not impose specific numerical restrictions on the temperature and pressure of the gas.

[0049] It is understood that, in actual use, when the piping structure 10 is connected to the exhaust pipe of the hot furnace 1, after the high-temperature gas enters the airflow channel 11, the liquid channel 12 is provided on the outside of the airflow channel 11, and the liquid channel 12 can cool the high-temperature gas. The liquid in the liquid channel 12 can also be sprayed from the liquid spraying portion 13 into the airflow channel 11. The sprayed liquid will quickly atomize when it encounters the high-pressure gas ejected from the jetting portion 14. The atomized liquid will then mix with the high-temperature gas. After the atomized liquid encounters the high-temperature gas, it will quickly vaporize and become steam. When the liquid vaporizes, it absorbs a large amount of heat, thereby ensuring that the temperature of the high-temperature gas is rapidly reduced, and the high-temperature gas will have a lower temperature when it exits the piping structure 10.

[0050] It should be noted here that the atomization process and the vaporization process may not be in a strict order. The sprayed liquid may be atomized under the action of high-pressure gas and then vaporized under the action of high-temperature gas. It may also be directly vaporized under the combined action of high-pressure gas and high-temperature gas. In the actual working process, the phase change process of the liquid may be more complicated. For the convenience of explanation, the atomization process and the vaporization process are described separately here.

[0051] Compared with the technical solution of winding a cold water pipe around the exhaust pipe in the prior art, the pipe structure 10 of the present application is connected to the air outlet of the exhaust pipe, is easy to use, and is not easily damaged by the exhaust pipe, and has a longer service life; during operation, a large amount of heat can be taken away by liquid cooling and liquid vaporization, thereby achieving rapid cooling of the high-temperature gas and improving the cooling rate and cooling efficiency; since the jet part 14 is capable of spraying high-pressure gas toward the air flow channel 11, the liquid sprayed toward the air flow channel 11 is atomized, and the sprayed liquid can be fully utilized to cool the high-temperature gas, thereby reducing the amount of sprayed liquid.

[0052] It should be additionally explained that, since a liquid channel 12 is provided outside the air flow channel 11, the presence of the liquid channel 12 can, on the one hand, ensure that the temperature of the outer tube of the pipeline structure 10 is relatively safe, and the temperature of the outer wall cannot be higher than the boiling point of water; on the other hand, it reduces the temperature of the inner tube of the pipeline structure 10, so that the material of the pipeline structure 10 can be conventional stainless steel pipes, without the need for special heat-resistant materials, thereby reducing the manufacturing cost of the gas cooling device 100, ensuring the sealing characteristics of the gas cooling device 100, and avoiding leakage.

[0053] Optionally, in actual operation, both the liquid channel 12 and the air flow channel 11 may be multi-layered. For example, in some embodiments, the pipeline structure 10 is a three-layer structure, with the middle layer being the air flow channel 11, and the inner and outer layers both being liquid channels 12. The outermost and innermost liquid channels 12 can both spray liquid into the air flow channel 11, and the jet portion 14 is disposed at the outermost liquid channel 12 of the pipeline structure 10 and is isolated from the liquid channel 12 to spray external gas into the air flow channel 11. Of course, in other embodiments of the present application, the number of layers of the liquid channel 12 and the air flow channel 11 can also be selected according to actual needs.

[0054] Optionally, the air jet portion 14 is an air jet hole. This allows the pressure of the gas ejected from the air jet portion 14 to be relatively high, which is beneficial for liquid atomization. In this embodiment, the cross-sectional shape of the air jet hole can be selected according to actual needs and is not limited here.

[0055] Optionally, the liquid spraying portion 13 is a liquid spraying hole. Thus, the flow rate of the liquid sprayed by the liquid spraying portion 13 can be relatively large, which is conducive to liquid atomization. In this embodiment, the cross-sectional shape of the liquid spraying hole can be selected according to actual needs and is not limited here.

[0056] In some embodiments, as shown in Figure 1, the air flow channel 11 includes a high-temperature zone 111, an atomization zone 112 and a vaporization zone 113 arranged in sequence along the air flow direction. Part of the liquid channel 12 is located outside the high-temperature zone 111, and the jet part 14 and the liquid spray part 13 are both connected to the atomization zone 112.

[0057] It can be understood that when the high-temperature gas flows through the high-temperature zone 111, it can be cooled down by the coolant in the liquid channel 12. When the high-temperature gas moves to the atomization zone 112, it can come into contact with the droplets atomized by the high-pressure gas, and can fully contact with the atomized liquid in the vaporization zone 113, so that the atomized droplets are quickly vaporized to achieve cooling of the high-temperature gas.

[0058] In some specific embodiments, as shown in Figures 1 and 2, the liquid channel 12 includes a cooling channel 121 and a liquid storage chamber 122, the cooling channel 121 has a liquid inlet 1211, the liquid inlet 1211 is connected to an external liquid source (not marked in the figure), and the cooling channel 121 is located outside the high temperature zone 111, the liquid storage chamber 122 has a connecting port 1221 and a liquid spraying portion 13, the connecting port 1221 is connected to the cooling channel 121, and the flow area of ​​the connecting port 1221 is smaller than the flow areas of the cooling channel 121 and the liquid storage chamber 122.

[0059] It is understood that when the high-temperature gas flows through the high-temperature zone 111, it can be cooled by the coolant in the cooling channel 121. This can cool the high-temperature gas through heat exchange, which is beneficial for improving the cooling rate. The coolant enters the liquid storage chamber 122 from the cooling channel 121 and is then sprayed. Because the flow area of ​​the connecting port 1221 is smaller than the flow area of ​​the cooling channel 121 and the liquid storage chamber 122, the coolant can have a higher pressure after entering the liquid storage chamber 122. As a result, the liquid sprayed into the airflow channel 11 by the liquid spraying portion 13 has a higher pressure, thereby facilitating atomization.

[0060] In some specific embodiments, the cooling channel 121 is located upstream of the pipeline structure 10. Thus, the high-temperature gas can be first cooled by the coolant in the liquid channel 12 in the pipeline structure 10, and then cooled by the atomized liquid, which can better improve the cooling effect on the high-temperature gas.

[0061] In some specific embodiments, as shown in Figures 1 and 3, the gas cooling device 100 further includes a flow guide 30, which is located within the cooling channel 121. The flow guide 30 is configured to allow the liquid within the cooling channel 121 to substantially fill the cooling channel 121 before flowing into the liquid storage chamber 122. This helps ensure that the cooling channel 121 is always filled with liquid, so that when the high-temperature gas flows into the pipeline structure 10, it is first cooled by the coolant within the liquid channel 12.

[0062] It should be noted that by arranging the guide tube 30 in the cooling channel 121, not only can the guide tube 30 be protected and the risk of damage to the guide tube 30 due to impact be reduced, but the structure of the gas cooling device 100 can also be made more compact, reducing the overall space occupied by the gas cooling device 100 and facilitating use.

[0063] Of course, in other embodiments, the guide tube 30 may also be provided on the outer wall of the pipeline structure 10 . This application does not limit this, and those skilled in the art may select it according to actual conditions.

[0064] In some specific embodiments, the inlet 33 of the guide tube 30 is connected to the cooling channel 121, and the inlet 33 of the guide tube 30 is located at one end of the high temperature zone 111 away from the atomization zone 112, and the outlet of the guide tube 30 is connected to the liquid storage chamber 122, so that the liquid in the cooling channel 121 flows into the liquid storage chamber 122 along the guide tube 30.

[0065] In some specific embodiments, the flow guide tube 30 includes a first tube section 31 and a second tube section 32. The first tube section 31 is in communication with the liquid channel 12, and the second tube section 32 is in communication with the liquid storage chamber 122. The location where the first tube section 31 and the second tube section 32 are connected is higher than the air inlet end 114 of the air flow channel 11. It will be understood that the inclusion of the first tube section 31 and the second tube section 32 in the flow guide tube 30 facilitates connecting the flow guide tube 30 to the liquid channel 12 and the liquid storage chamber 122. The location where the first tube section 31 and the second tube section 32 are connected is higher than the air inlet end 114 of the air flow channel 11, which can, to a certain extent, increase the pressure of the liquid flowing from the second tube section 32 into the liquid storage chamber 122, thereby increasing the total amount of liquid, thereby increasing the contact between the high-temperature gas and the liquid, and accelerating the cooling efficiency.

[0066] It is worth noting that the highest point of the guide tube 30 (the position where the first tube section 31 and the second tube section 32 are connected) is higher than the air inlet end 114 of the air flow channel 11. When the liquid passes through the pipeline structure 10, since the highest point of the guide tube 30 is higher than the highest point of the multi-layer tube structure, the liquid is ensured to fill the multi-layer tube structure and can be stably sprayed into the air flow channel 11, thereby ensuring the cooling effect.

[0067] In some specific embodiments, a portion of the cooling channel 121 can serve as a portion of the flow guide 30. For example, a portion of the cooling channel 121 serves as the first pipe section 31 of the flow guide 30. This can reduce the number of flow guides 30 used and reduce manufacturing costs.

[0068] In some specific embodiments, the flow guide tube 30 is a bent tube, the inlet 33 of the bent tube is connected to the liquid channel 12, and the outlet of the bent tube is connected to the liquid storage chamber 122. The bend of the bent tube is higher than the air inlet end 114 of the air flow channel 11. It is understood that the highest point (bend) of the flow guide tube 30 is higher than the air inlet end 114 of the air flow channel 11. When the liquid passes through the pipeline structure 10, because the highest point of the flow guide tube 30 is higher than the air inlet end 114 of the air flow channel 11, it is ensured that the liquid fills the liquid channel 12 and can flow stably into the liquid storage chamber 122, thereby ensuring the cooling effect. At the same time, the flow guide tube 30 is manufactured by bending a straight tube, which facilitates the manufacture of the flow guide tube 30.

[0069] In some more specific embodiments, as shown in Figure 1, the cooling channel 121 has a bending portion (not marked in the figure), and the cooling channel 121 includes a first section 1212 and a second section 1213 arranged at an angle, the first section 1212 is located upstream of the second section 1213, the first section 1212 intersects with the extension direction of the airflow channel 11, and the second section 1213 is arranged parallel to the extension direction of the airflow channel 11.

[0070] It can be understood that in actual operation, after the high-temperature gas enters the airflow channel 11, since the first section 1212 intersects with the extension direction of the airflow channel 11, the high-temperature gas can enter the second section 1213 under the guidance of the first section 1212, which is beneficial for the high-temperature gas in the airflow channel 11 to contact with the coolant in the cooling channel 121, thereby facilitating the cooling of the high-temperature gas.

[0071] In some more specific embodiments, the liquid inlet 1211 of the cooling channel 121 is located downstream of the second section 1213. It is understood that the location of the liquid inlet 1211 can ensure that when the liquid spraying portion 13 sprays liquid toward the air flow channel 11, the liquid has a relatively high pressure, thereby facilitating liquid atomization and facilitating cooling of the high-temperature gas.

[0072] In some embodiments, the inlet 33 of the flow conduit 30 is disposed on the first section 1212. It will be appreciated that the inlet 33 of the flow conduit 30 serves as a fluid inlet. By disposing the inlet 33 of the flow conduit 30 on the first section 1212, on the one hand, it ensures that the coolant nearly fills the cooling channel 121 before flowing into the liquid reservoir 122. Thus, the high-temperature gas in the cooling channel 121 can be cooled by the coolant in the liquid channel 12. Combined with cooling by atomized coolant, this significantly enhances the cooling effect on the high-temperature gas. On the other hand, it ensures that there is sufficient coolant in the cooling channel 121, which facilitates cooling of the high-temperature gas.

[0073] In some specific embodiments, as shown in FIG2 , the liquid spraying portion 13 is disposed near a side wall of the liquid storage chamber 122 that faces the air flow channel 11. Thus, the liquid sprayed from the liquid spraying portion 13 can be as close as possible to the high-temperature gas in the air flow channel 11, thereby facilitating cooling of the high-temperature gas.

[0074] In some specific embodiments, the pipeline structure 10 includes a first pipe body (not labeled) and a second pipe body (not labeled). The first pipe body forms the liquid channel 12 and the high-temperature zone 111 and atomization zone 112 of the airflow channel 11. The second pipe body forms the vaporization zone 113 of the airflow channel 11. The first pipe body and the second pipe body are connected by a flange.

[0075] It is understood that the liquid channel 12 is outside, and the high temperature zone 111 and atomization zone 112 of the air flow channel 11 are inside. In other words, the pipeline structure 10 needs to be a multi-layer structure at the first tube body, while the second tube body can be set as a single-layer tube. Splitting the pipeline structure 10 into the first tube body and the second tube body can facilitate the manufacture of the pipeline structure 10 and facilitate the assembly of the pipeline structure 10.

[0076] In some specific embodiments, as shown in FIG. 1 and FIG. 2 , the atomization zone 112 includes a tapered section 1121 and a straight section 1122 , thereby being more conducive to atomization of the sprayed liquid under the action of the sprayed gas.

[0077] In some specific embodiments, the flow area of ​​the small end of the tapered section 1121 of the atomizing zone 112 is larger than the flow area of ​​the high-temperature zone 111. As a result, the high-temperature gas flows from the high-temperature zone 111 to the atomizing zone 112 in a jet-like flow, which makes more complete contact with the atomized liquid, thereby facilitating the cooling of the high-temperature gas.

[0078] It should be noted that the gas flow area gradually increases from the high-temperature zone 111 to the atomization zone 112 and then to the vaporization zone 113. On the one hand, it provides a larger space for high-temperature gas to dissipate heat. On the other hand, the high-temperature gas is in a jet shape, which is conducive to more complete contact with the atomized liquid, thereby being more conducive to the cooling of the high-temperature gas.

[0079] In some specific embodiments, the atomization area 112 is entirely a straight section 1122 to ensure that the high-temperature gas flows at a uniform speed, reduce turbulence of the high-temperature gas in the atomization area 112, and reduce the risk of cooling effect.

[0080] In some more specific embodiments, as shown in Figures 1 to 4, the gas cooling device 100 further includes a liquid inlet pipe 20, which is connected to the pipeline structure 10 and communicates with the liquid inlet 1211. Thus, liquid from an external cooling source can enter the liquid channel 12 from the liquid inlet 1211 through the liquid inlet pipe 20. The liquid inlet 1211 is located downstream of the second section 1213, ensuring that sufficient liquid is always present in the liquid channel 12 throughout the entire workflow, thereby facilitating continuous injection of liquid into the gas flow channel 11.

[0081] In other more specific embodiments, the liquid inlet pipe 20 and the liquid inlet port 1211 connected to the liquid inlet pipe 20 can be located upstream of the pipeline structure 10, and the liquid spraying portion 13 can be located downstream of the pipeline structure 10. It can be understood that since the liquid inlet pipe 20 is located upstream of the pipeline structure 10, there is always sufficient liquid in the liquid channel 12 throughout the entire workflow. The high-temperature gas can be first cooled by the coolant in the liquid channel 12 in the pipeline structure 10, and then cooled by the atomized liquid, which can effectively improve the cooling effect of the high-temperature gas.

[0082] In some embodiments, as shown in FIG1 , the pipe structure 10 includes a bend (not shown) located at the junction of the first section 1212 and the second section 1213. The air inlet and outlet directions of the pipe structure 10 are arranged at an angle. Compared to a straight pipe, the bend in the pipe structure 10 of this embodiment can reduce the total length of the pipe structure 10 in a certain direction while ensuring a longer airflow path, thereby facilitating the use of the pipe structure 10.

[0083] The embodiments of the present application do not limit the specific shape of the bend structure of the pipe structure 10. In one possible scenario, the bend of the pipe structure 10 can be formed in a manner as shown in FIG1 to form a sharp angle at the connection between the first section 1212 and the second section 1213. In another possible scenario, the bend of the pipe structure 10 can be formed in a smooth transition manner to form a certain arc at the connection between the first section 1212 and the second section 1213.

[0084] In some specific embodiments, as shown in Figures 2 and 3, the liquid spray portion 13 extends along the direction of airflow within the airflow channel 11, and the air jet portion 14 is arranged at an angle, with the extension direction of the liquid spray portion 13 intersecting the extension direction of the air jet portion 14. It will be appreciated that the inclined arrangement of the air jet portion 14 causes the airflow injected into the airflow channel 11 to generate angular inertia, forming a vortex cyclone. The vortex cyclone can increase the contact area between the high-pressure gas and the liquid, improve the atomization efficiency of the liquid, and thus facilitate the cooling efficiency of the high-temperature gas.

[0085] In some specific embodiments, as shown in FIG2 , the flow area of ​​the air storage chamber 15 gradually decreases along the direction of gas flow within the air flow channel 11, and the air injection portion 14 is disposed on the inclined sidewall of the air storage chamber 15 facing the air flow channel 11. It will be appreciated that the inner wall of the air storage chamber 15 is formed as an inclined sidewall (for example, the cross-section of the air storage chamber 15 is triangular, and the inclined sidewall is the hypotenuse of the triangle), which can, to a certain extent, increase the angular moment of inertia generated by the air flow injected into the air flow channel 11, making the vortex vortex more intense, further increasing the contact area between the high-pressure gas and the liquid, and further improving the atomization efficiency of the liquid, thereby facilitating improved cooling efficiency of the high-temperature gas.

[0086] In other embodiments, the air storage chamber 15 may also adopt other shapes. For example, the cross-section of the air storage chamber 15 is rectangular. It is only necessary to ensure that the jet portion 14 is arranged toward the air flow channel 11, and the extension direction of the jet portion 14 intersects with the extension direction of the liquid spray portion 13. This application does not limit this.

[0087] In some specific embodiments, as shown in Figures 1, 3, and 4, the gas cooling device 100 further includes an air inlet pipe 40, one end of which is connected to the air storage chamber 15, and the other end of which is connected to an external high-pressure air source, thereby facilitating air supply to the pipeline structure 10.

[0088] In some specific embodiments, there are multiple liquid spraying portions 13, and the multiple liquid spraying portions 13 are spaced apart along the circumference of the air flow channel 11. It is understood that the multiple liquid spraying portions 13 are spaced apart along the circumference of the air flow channel 11 so that the liquid can be evenly sprayed into the air flow channel 11, which is beneficial to increase the contact area between the high-temperature gas and the liquid, thereby facilitating an increase in the cooling rate.

[0089] In some specific embodiments, there are multiple liquid spraying portions 13, and the multiple liquid spraying portions 13 are spaced apart along the axial direction of the air flow channel 11. This allows the liquid to be evenly sprayed into the air flow channel 11, which is beneficial to increasing the contact area between the high-temperature gas and the liquid, thereby improving the cooling rate.

[0090] It should be noted that in actual design, the liquid spraying portion 13 can be arranged in multiple circles along the air flow channel 11, and each circle is provided with multiple liquid spraying portions 13 distributed at intervals along the circumference of the air flow channel 11. The distribution of the liquid spraying portions 13 can be selected according to actual needs.

[0091] In some specific embodiments, the size of the liquid spraying portion 13 is less than 1 mm. As a result, the liquid sprayed from the liquid spraying portion 13 has a relatively high pressure, which is conducive to the atomization of the liquid under the action of the high-pressure gas. It should be noted that the shape and size of the liquid spraying portion 13 can be selected according to actual needs and are not limited to the above-mentioned limitations.

[0092] In some specific embodiments, the liquid spraying portion 13 is formed as a narrow and long hole, which can further increase the pressure of the liquid sprayed by the liquid spraying portion 13 and facilitate the atomization of the liquid under the action of the high-pressure gas.

[0093] In some specific embodiments, as shown in FIG4 , there are multiple air jet portions 14, and the multiple air jet portions 14 are spaced apart along the circumference of the air flow channel 11. It is understood that the spaced apart distribution of the multiple air jet portions 14 along the circumference of the air flow channel 11 enables the high-pressure gas to be evenly sprayed into the air flow channel 11, which is beneficial for increasing the contact area between the high-pressure gas and the liquid, facilitating the atomization of the liquid injected into the air flow channel 11, and thus facilitating an increase in the cooling rate.

[0094] In some specific embodiments, there are multiple air injection portions 14, and the multiple air injection portions 14 are spaced apart along the axial direction of the air flow channel 11. This allows the high-pressure gas to be evenly injected into the air flow channel 11, which is beneficial for increasing the contact area between the high-pressure gas and the liquid, facilitating the atomization of the liquid injected into the air flow channel 11, and thus improving the cooling rate.

[0095] It should be noted that in actual design, the air jets 14 can be arranged in multiple circles along the air flow channel 11, with each circle having multiple air jets 14 spaced apart along the circumference of the air flow channel 11. The distribution of the air jets 14 can be selected according to actual needs.

[0096] In some specific embodiments, the aperture of the air jet portion 14 is less than mm. As a result, the liquid ejected from the air jet portion 14 has a relatively high pressure, which facilitates atomization of the liquid under the action of the high-pressure gas. It should be noted that the shape and size of the air jet portion 14 can be selected according to actual needs and are not limited to the above-mentioned limitations.

[0097] It should be noted that, in the embodiments of the present application, the distribution forms of the air jet portion 14 and the liquid jet portion 13 can be arbitrarily combined according to actual needs. For example, in some embodiments, the air jet portion 14 is multiple circles and the liquid jet portion 13 is also multiple circles; for another example, in some embodiments, the air jet portion 14 and the liquid jet portion 13 are both one circle.

[0098] An embodiment of the present application also provides a gas cooling device 100, as shown in Figures 5 to 8, the gas cooling device 100 includes a pipeline structure 10, the pipeline structure 10 defines an air flow channel 11 and a liquid channel 12, the air flow channel 11 is used to circulate high-temperature gas, the liquid channel 12 is located outside the air flow channel 11, and has a liquid spray portion 13 connected to the air flow channel 11, the liquid spray portion 13 is used to spray liquid toward the air flow channel 11.

[0099] Specifically, the air flow channel 11 has an air inlet 114 and an air outlet 115. The air inlet 114 is used to introduce high-temperature gas. The liquid channel 12 has a liquid inlet 1211. The liquid channel 12 also includes a connecting tube 50. The outlet of the connecting tube 50 is located at the air outlet 115. The inlet 33 of the connecting tube 50 is connected to the liquid channel 12. The outlet of the connecting tube 50 is connected to the air flow channel 11 to spray liquid toward the air flow channel 11. The liquid spraying portion 13 is located at the outlet of the connecting tube 50. The outlet of the connecting tube 50 sprays liquid toward the air flow channel 11 through the liquid spraying portion 13.

[0100] It can be understood that in the gas cooling device 100 of this embodiment, when the liquid is sprayed from the outlet of the connecting pipe 50 to the air flow channel 11, most of the liquid will quickly vaporize after encountering the high-temperature gas, and will absorb a large amount of heat during the vaporization process. In this way, the heat carried by the high-temperature gas will be consumed in large quantities during the liquid vaporization process, and the high-temperature gas is quickly cooled. Compared with the cooling method of water-cooled heat exchange in the prior art, this embodiment utilizes the principle that the liquid needs to absorb a large amount of heat when changing from liquid phase to gas phase, so that the high-temperature gas can be quickly cooled, thereby improving the cooling effect and cooling efficiency.

[0101] In addition, the presence of the liquid channel 12 can, on the one hand, ensure that the temperature of the outer tube of the pipeline structure 10 is relatively safe, and the temperature of the outer wall cannot be higher than the boiling point of water. On the other hand, it reduces the temperature of the inner tube of the pipeline structure 10, so that the material of the pipeline structure 10 can be conventional stainless steel pipes, without the need to use special heat-resistant materials, thereby reducing the manufacturing cost of the pipeline structure 10, ensuring the sealing characteristics of the pipeline structure 10, and avoiding leakage.

[0102] It should be noted that, in the present application, there may be only one or more connecting tubes 50. When there are multiple connecting tubes 50, the multiple connecting tubes 50 may be distributed at intervals along the axial direction of the pipeline structure 10, or at intervals along the circumference of the pipeline structure 10. The multiple connecting tubes 50 may also be arranged in multiple circles along the axial direction of the pipeline structure 10, each circle including connecting tubes 50 distributed at intervals along the circumference of the pipeline structure 10. Therefore, in actual use, the arrangement of the connecting tubes 50 can be selected according to actual needs, as long as a good cooling effect is ensured.

[0103] In some specific embodiments, the air flow channel 11 is tilted, and the air inlet end 114 is higher than the air outlet end 115. It is understood that the tilted air flow channel 11 can also cause the liquid channel 12 located outside the air flow channel 11 to be tilted. The air inlet end 114 being higher than the air outlet end 115 can prevent the liquid in the liquid channel 12 from flowing back.

[0104] In some specific embodiments, as shown in Figures 5 to 8, the connecting tube 50 includes a first tube body 51 and a second tube body 52, the first tube body 51 is connected to the liquid channel 12, and the second tube body 52 is connected to the air flow channel 11, and the position where the first tube body 51 and the second tube body 52 are connected is higher than the air inlet end 114 of the air flow channel 11.

[0105] It can be understood that the connecting tube 50 includes a first tube body 51 and a second tube body 52, which facilitates connecting the connecting tube 50 with the liquid storage chamber 122 and the gas channel. The position where the first tube body 51 and the second tube body 52 are connected is higher than the air inlet end 114 of the air flow channel 11, which can increase the liquid pressure sprayed from the second tube body 52 to a certain extent, increase the total amount of liquid, thereby increasing the contact between the high-temperature gas and the liquid, and accelerating the cooling efficiency.

[0106] In some embodiments, the connecting tube 50 further includes a third tube body 53, the ends of which are connected to the first tube body 51 and the second tube body 52, respectively. The third tube body 53 is higher than the air inlet end 114 of the air flow channel 11. It is understood that the highest point of the connecting tube 50 (the location of the third tube body 53) is higher than the highest point of the pipeline structure 10 (the air inlet end 114). When the liquid passes through the pipeline structure 10, because the highest point of the U-shaped tube is higher than the highest point of the pipeline structure 10, it is ensured that the liquid fills the pipeline structure 10 and can be stably sprayed into the air flow channel 11, thereby ensuring a cooling effect.

[0107] In some specific embodiments, as shown in Figure 5, the third tube 53 is arranged horizontally, and the first tube 51 and the second tube 52 are both perpendicular to the third tube 53. This ensures that the liquid fills the multi-layer tube structure and can be stably sprayed into the air flow channel 11, thereby ensuring a cooling effect. Of course, in other embodiments of the present application, the angle between the first tube 51, the third tube 53, and the second tube 52 can be selected according to actual needs and is not limited to the limitations of this embodiment.

[0108] In some specific embodiments, the connecting tube 50 is a bent tube, the inlet 33 of the bent tube is connected to the liquid channel 12, the outlet of the bent tube is connected to the air flow channel 11, and the bend of the bent tube is higher than the air inlet end 114 of the air flow channel 11. It is understandable that the highest point (bend) of the connecting tube 50 is higher than the highest point (air inlet end 114) of the pipeline structure 10. When the liquid passes through the pipeline structure 10, since the highest point of the connecting tube 50 is higher than the highest point of the pipeline structure 10, it is ensured that the liquid fills the pipeline structure 10 and can be stably sprayed into the air flow channel 11, thereby ensuring the cooling effect. At the same time, the connecting tube 50 is manufactured by bending a straight tube, which facilitates the manufacture of the connecting tube 50.

[0109] In other embodiments, the connecting pipe 50 is a straight pipe, the inlet 33 of the straight pipe is connected to the liquid channel 12, and the outlet of the straight pipe is connected to the air flow channel 11. That is, in the embodiments of the present application, the connecting pipe 50 is not limited to the U-shaped pipe structure described above.

[0110] In some embodiments, the gas channel 11 includes a high-temperature zone (not shown), which is located at one end of the gas channel 11 close to the direction of high-temperature gas inflow. The liquid channel 12 may also include a cooling channel (not shown) and a liquid storage chamber (not shown), with a liquid inlet 1211 provided in the cooling channel, the liquid inlet 1211 being connected to an external liquid source, and the cooling channel being located outside the high-temperature zone. The liquid storage chamber has a connecting port and a liquid spraying portion 13, the connecting port being connected to the cooling channel, and the flow area of ​​the connecting port being smaller than the flow area of ​​the cooling channel and the liquid storage chamber. Exemplarily, the connecting port of the liquid storage chamber is connected to the connecting pipe 50 to obtain coolant from the cooling channel through the connecting pipe 50.

[0111] It is understood that when high-temperature gas flows through the high-temperature zone, it can be cooled by the coolant in the cooling channel. This can cool the high-temperature gas through heat exchange, which is beneficial for improving the cooling rate. The coolant enters the liquid storage chamber from the cooling channel and is then sprayed. Because the flow area of ​​the connecting port is smaller than the flow area of ​​the cooling channel and the liquid storage chamber, the coolant can have a higher pressure after entering the liquid storage chamber, resulting in the liquid sprayed into the airflow channel 11 by the liquid spray portion 13 having a higher pressure.

[0112] In some specific embodiments, there are multiple liquid spraying portions 13, and the multiple liquid spraying portions 13 are spaced apart along the circumference of the air flow channel 11. It is understood that the multiple liquid spraying portions 13 are spaced apart along the circumference of the air flow channel 11 so that the liquid can be evenly sprayed into the air flow channel 11, which is beneficial to increase the contact area between the high-temperature gas and the liquid, thereby facilitating an increase in the cooling rate.

[0113] In some specific embodiments, as shown in Figures 1 and 5, the gas cooling device 100 further includes a fan 60, which is connected to the air outlet 115 of the air flow channel 11. The fan 60 is used to drive the gas in the air flow channel 11 to forcibly flow. It is understood that the fan 60 can drive the gas flow in the air flow channel 11, thereby increasing the air flow velocity in the air flow channel 11, which is conducive to improving the cooling efficiency.

[0114] In some specific embodiments, as shown in Figures 1 and 5, the gas cooling device 100 further includes an exhaust pipe 70, one end of which is connected to the air outlet end 115 of the air flow channel 11, and the other end of which is used to mount the fan 60. The end of the exhaust pipe 70 where the fan 60 is mounted is lower than the end of the exhaust pipe 70 that is connected to the air outlet end 115 of the air flow channel 11. It is understood that the connection between the fan 60 and the air outlet end 115 of the air flow channel 11 via the exhaust pipe 70 can ensure that the air flow is at a relatively low temperature when it reaches the fan 60, thereby avoiding corrosion to the fan 60 caused by the relatively high air flow temperature, which is conducive to extending the service life of the fan 60.

[0115] In some more specific embodiments, as shown in Figures 1 and 5, the gas cooling device 100 further includes an exhaust pipe connected to the side of the fan 60 facing away from the exhaust pipe 70. It is understood that the additional exhaust pipe can exhaust gas toward a designated location. When harmful gases are present in the high-temperature gas, the harmful gases can be discharged into a designated space, thereby improving work safety.

[0116] The present application also provides a heat furnace 1, as shown in FIG9 . The heat furnace 1 includes a furnace body 200 and the aforementioned gas cooling device 100. The furnace body 200 has an exhaust pipe 80. The gas cooling device 100 is used to cool the gas released from the furnace body 200 through the exhaust pipe 80. It is understood that in actual use, the piping structure 10 is connected to the exhaust pipe 80 of the heat furnace 1. After the high-temperature gas enters the air flow channel 11, the liquid channel 12 is provided outside the air flow channel 11, and the liquid channel 12 can cool the high-temperature gas. The liquid in the liquid channel 12 can also be sprayed from the liquid spraying portion 13 into the air flow channel 11. The sprayed liquid will rapidly atomize upon encountering the high-pressure gas ejected from the jetting portion 14. The atomized liquid will then mix with the high-temperature gas. Upon encountering the high-temperature gas, the atomized liquid will rapidly vaporize, becoming steam. As the liquid vaporizes, it absorbs a large amount of heat, thereby ensuring that the temperature of the high-temperature gas is rapidly reduced. The high-temperature gas will have a lower temperature when it exits the piping structure 10.

[0117] Compared with the technical solution of winding a cold water pipe on the exhaust pipe in the prior art, the pipeline structure 10 of the present application is connected to the air outlet of the exhaust pipe (such as the exhaust pipe 80), is easy to use, and is not easily damaged by the exhaust pipe, and has a long service life; during operation, a large amount of heat can be taken away by liquid cooling and liquid vaporization, thereby achieving rapid cooling of the high-temperature gas and improving the cooling rate and cooling efficiency; since the jet part 14 is capable of spraying high-pressure gas toward the air flow channel 11, the liquid sprayed toward the air flow channel 11 is atomized, and the sprayed liquid can be fully utilized to cool the high-temperature gas, thereby reducing the amount of sprayed liquid.

[0118] It should be additionally explained that, since a liquid channel 12 is provided outside the air flow channel 11, the presence of the liquid channel 12 can, on the one hand, ensure that the temperature of the outer tube of the pipeline structure 10 is relatively safe, and the temperature of the outer wall cannot be higher than the boiling point of water; on the other hand, it reduces the temperature of the inner tube of the pipeline structure 10, so that the material of the pipeline structure 10 can be conventional stainless steel pipes, without the need for special heat-resistant materials, thereby reducing the manufacturing cost of the gas cooling device 100, ensuring the sealing characteristics of the gas cooling device 100, and avoiding leakage.

[0119] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A gas cooling device, It is characterized in that The invention comprises a pipeline structure, wherein the pipeline structure defines an air flow channel and a liquid channel, wherein the air flow channel is used to circulate high-temperature gas, the liquid channel is located outside the air flow channel and has a liquid spraying portion connected to the air flow channel, and the pipeline structure also has an air spraying portion connected to the air flow channel, and the liquid sprayed by the liquid spraying portion can be vaporized under the action of the high-temperature gas in the air flow channel and the high-pressure gas sprayed by the air spraying portion.

2. A gas cooling device, It is characterized in that It includes a pipeline structure, which defines an air flow channel and a liquid channel. The air flow channel is used to circulate high-temperature gas. The liquid channel is located outside the air flow channel and has a liquid spraying part connected to the air flow channel. The liquid spraying part is used to spray liquid toward the air flow channel.

3. The gas cooling device according to claim 1 or 2, It is characterized in that The gas channel comprises a high temperature zone, and the high temperature zone is located at one end of the gas channel close to the inflow direction of the high temperature gas; The liquid channel comprises: A cooling channel, wherein the cooling channel has a liquid inlet, the liquid inlet is connected to an external liquid source, and the cooling channel is located outside the high temperature zone; The liquid storage chamber has a connecting port and the liquid spraying portion, the connecting port is connected to the cooling channel, and the flow area of ​​the connecting port is smaller than the flow areas of the cooling channel and the liquid storage chamber.

4. The gas cooling device according to claim 3, It is characterized in that The gas cooling device further comprises a liquid inlet pipe, one end of which is connected to the pipeline structure and communicates with the liquid inlet, and the other end of which is connected to an external liquid source.

5. The gas cooling device according to claim 3, It is characterized in that The gas cooling device further comprises a flow guide pipe, which is located in the cooling channel and is used to allow the liquid in the cooling channel to substantially fill the cooling channel before flowing into the liquid storage cavity.

6. The gas cooling device according to claim 5, It is characterized in that The inlet of the guide tube is communicated with the cooling channel, the inlet of the guide tube is located at the air inlet end of the air flow channel, and the outlet of the guide tube is communicated with the liquid storage cavity, so that the liquid in the cooling channel flows into the liquid storage cavity along the guide tube.

7. The gas cooling device according to claim 5, It is characterized in that The flow guide tube includes a first tube section and a second tube section, the first tube section is connected to the liquid channel, the second tube section is connected to the liquid storage chamber, and the position where the first tube section and the second tube section are connected is higher than the air inlet end of the air flow channel.

8. The gas cooling device according to claim 5, It is characterized in that The guide tube is a bent tube, the inlet of the bent tube is connected to the liquid channel, the outlet of the bent tube is connected to the liquid storage chamber, and the bending part of the bent tube is higher than the air inlet end of the air flow channel.

9. The gas cooling device according to claim 1 or 2, It is characterized in that There are a plurality of liquid spraying parts, and the plurality of liquid spraying parts are distributed at intervals along the circumferential direction of the air flow channel.

10. The gas cooling device according to claim 1, It is characterized in that The air jet portion is arranged obliquely, and an extending direction of the liquid jet portion intersects with an extending direction of the air jet portion.

11. The gas cooling device according to claim 10, It is characterized in that The pipeline structure further defines an air storage cavity, which can be connected to an external air source, and the air injection portion is in communication with the air storage cavity.

12. The gas cooling device according to claim 11, It is characterized in that Along the gas flow direction in the air flow channel, the flow area of ​​the air storage cavity gradually decreases, and the jetting portion is arranged on the inclined side wall of the air storage cavity facing the air flow channel.

13. The gas cooling device according to claim 11, It is characterized in that The gas cooling device also includes an air inlet pipe, one end of which is connected to the air storage cavity, and the other end of which is connected to an external high-pressure air source.

14. The gas cooling device according to claim 1, It is characterized in that There are a plurality of the air jet portions, and the plurality of the air jet portions are distributed at intervals along the circumferential direction of the air flow channel.

15. The gas cooling device according to claim 1, It is characterized in that The airflow channel includes a high temperature zone, an atomization zone and a vaporization zone arranged in sequence along the airflow direction, part of the liquid channel is located outside the high temperature zone, and the air injection part and the liquid injection part are both connected to the atomization zone.

16. The gas cooling device according to claim 2, It is characterized in that The air flow channel has an air inlet end and an air outlet end, the air inlet end is used to introduce high-temperature gas, and the liquid channel has a liquid inlet; The liquid channel further comprises a connecting pipe, the outlet of the connecting pipe is arranged at the air outlet end, the inlet of the connecting pipe is communicated with the liquid channel, and the outlet of the connecting pipe is communicated with the air flow channel to spray liquid toward the air flow channel; Wherein, the liquid spraying part is arranged at the outlet of the connecting pipe, and the outlet of the connecting pipe sprays liquid toward the air flow channel through the liquid spraying part.

17. The gas cooling device according to claim 16, It is characterized in that The air flow channel is arranged obliquely, and the air inlet end is higher than the air outlet end.

18. The gas cooling device according to claim 16, It is characterized in that The connecting pipe includes a first tube body and a second tube body, the first tube body is connected to the liquid channel, the second tube body is connected to the air flow channel, and the position where the first tube body and the second tube body are connected is higher than the air inlet end of the air flow channel.

19. The gas cooling device according to claim 18, It is characterized in that The connecting pipe further includes a third tube body, two ends of which are respectively connected to the first tube body and the second tube body, and the third tube body is higher than the air inlet end of the air flow channel.

20. The gas cooling device according to claim 16, It is characterized in that The connecting tube is a bent tube, the inlet of the bent tube is connected to the liquid channel, the outlet of the bent tube is connected to the air flow channel, and the bending part of the bent tube is higher than the air inlet end of the air flow channel.

21. The gas cooling device according to any one of claims 1 or 2, It is characterized in that The gas cooling device also includes a fan, which is arranged in the pipeline structure to drive the gas in the air flow channel to flow by force.

22. The gas cooling device according to claim 21, It is characterized in that The gas cooling device also includes an exhaust pipe, one end of which is connected to the air outlet end of the air flow channel, and the other end is used to install the fan, and the end of the exhaust pipe where the fan is installed is lower than the end connected to the air outlet end.

23. The gas cooling device according to claim 22, It is characterized in that The gas cooling device further comprises an exhaust pipe connected to a side of the fan away from the exhaust pipe.

24. A hot stove, It is characterized in that include: A furnace body, wherein the furnace body has an exhaust pipe; The gas cooling device according to any one of claims 1 to 2 and 10 to 20, wherein the gas cooling device is used to cool the gas released from the furnace body through the exhaust pipe.

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